CN111618724A - Non-contact height measuring device for scribing machine - Google Patents
Non-contact height measuring device for scribing machine Download PDFInfo
- Publication number
- CN111618724A CN111618724A CN202010515295.1A CN202010515295A CN111618724A CN 111618724 A CN111618724 A CN 111618724A CN 202010515295 A CN202010515295 A CN 202010515295A CN 111618724 A CN111618724 A CN 111618724A
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- CN
- China
- Prior art keywords
- contact height
- height measuring
- protective cover
- horizontal pushing
- mounting plate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0683—Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The invention discloses a non-contact height measuring device for a scribing machine, wherein the non-contact height measuring device is arranged on a mounting plate of the scribing machine; the non-contact height measuring device comprises a horizontal pushing mechanism mounting block and a non-contact height measuring assembly which are respectively mounted on a scribing machine mounting plate, wherein a horizontal pushing mechanism is mounted on the horizontal pushing mechanism mounting block, a power output end of the horizontal pushing mechanism is connected with a protective cover with an opening on the side face in a mounting manner, the non-contact height measuring assembly is fixedly mounted on the non-contact height measuring mounting plate, and the side face of the non-contact height measuring mounting plate is correspondingly matched with the protective cover to form a closed protective cover body for protecting the non-contact height measuring assembly; the protective cover can transversely and horizontally push and move relative to the scribing machine mounting plate, so that the closed protective cover body can be opened and closed; the invention avoids the problem that accumulated water splashes around the turnover type protective cover in the prior art, and simultaneously, the invention adopts a horizontal pushing motion mode to open the closed protective cover body, thereby being simple, convenient and stable and reliable in working process.
Description
Technical Field
The invention relates to the field of scribing machine manufacturing, in particular to a non-contact height measuring device for a scribing machine.
Background
Dicing saws are a critical semiconductor post-packaging device that functions to divide a device into individual circuit units or to separate large-sized materials into small-sized materials. In the cutting process, the Z-bearing air static pressure main shaft drives the grinding wheel blade to cut, and the blade is continuously abraded along with the processing. In order to ensure that the relative position of the Z axis and the processing material is unchanged, the height of the grinding wheel blade needs to be measured in the cutting process.
Adopt non-contact height measurement device to be used for satisfying the height measurement function of wafer cutter in cutting process among the prior art, non-contact height measurement device's theory of operation is: through the optical fiber sensor of two correlation types of installation on the fixed block, when using, rotate through the upset cylinder, open the visor of protection optical fiber sensor, the spray lance is aimed at the optical fiber surface, washes out washing liquid and compressed air respectively and cleans the sensor surface, when not using, the upset cylinder drives the visor and closes. Because the scribing machine needs the water to cool off at the cutting in-process, so all can adhere to the water droplet on the air static pressure main shaft, therefore have a large amount of water smoke in the scribing machine cutting cavity, so when the visor upset was opened, can assemble partial cooling water in the lid, lead to when the visor was closed, the water in the lid can splash everywhere, in addition, because the structure and the opening mode restriction of tilting mechanism and visor, the visor often can appear and can not be opened or the lid takes place to warp the scheduling problem, the working property is unstable, seriously influence the use of scribing machine.
Therefore, the applicant expects that a new non-contact height measuring device for a dicing machine is required to solve the above technical problems.
Disclosure of Invention
In view of the above, the present invention provides a non-contact height measuring device for a dicing saw, which avoids the problem of splashing of accumulated water around a turnover protective cover in the prior art, and simultaneously, the present invention adopts a horizontal pushing motion to open a closed protective cover body, which is simple and convenient, and has a stable and reliable working process.
The technical scheme adopted by the invention is as follows:
a non-contact height measuring device for a scribing machine comprises a scribing machine mounting plate positioned below a grinding wheel blade, wherein the non-contact height measuring device is mounted on the scribing machine mounting plate; the non-contact height measuring device comprises a horizontal pushing mechanism mounting block and a non-contact height measuring assembly which are respectively mounted on the dicing saw mounting plate, wherein a horizontal pushing mechanism is mounted on the horizontal pushing mechanism mounting block, the power output end of the horizontal pushing mechanism is connected with a protective cover with an opening on the side face in a mounting manner, the non-contact height measuring assembly is fixedly mounted on the non-contact height measuring mounting plate, and the side face of the non-contact height measuring mounting plate is correspondingly matched with the protective cover to form a closed protective cover body for protecting the non-contact height measuring assembly; the protective cover can transversely and horizontally push and displace relative to the scribing machine mounting plate, and the closed protective cover body is opened and closed.
Preferably, the horizontal pushing mechanism comprises an air cylinder installed on the installation block of the horizontal pushing mechanism, and the output end of the air cylinder is fixedly connected with a protective cover and used for driving the protective cover to perform horizontal pushing displacement.
Preferably, the output end of the cylinder is connected with the protective cover through a horizontal pushing guide mounting block, wherein the horizontal pushing guide mounting block is integrally connected into a first horizontal derivation direction mounting part and a second horizontal derivation direction mounting part which are in an L-shaped shape, the first horizontal derivation direction mounting part is fixedly mounted on the inner side surface of the protective cover, and the second horizontal derivation direction mounting part is fixedly mounted on the inner surface of the protective cover.
Preferably, the second flat guiding mounting portion is in guiding sliding contact fit with the cylinder side surface.
Preferably, a sensor for identifying whether the closed protective cover body is in an open or closed state is mounted on the horizontal pushing mechanism.
Preferably, the horizontal pushing mechanism mounting block comprises a connecting rod fixedly mounted on the dicing saw mounting plate, a transition connecting block is fixedly mounted on the connecting rod, and the horizontal pushing mechanism is mounted on the transition connecting block.
Preferably, the bottom limit of the non-contact height measurement mounting plate is arranged on the dicing saw mounting plate.
Preferably, the non-contact height measurement component comprises an optical fiber sensor fixing block fixedly mounted on the non-contact height measurement mounting plate, opposite-type optical fiber sensors are mounted on two sides of the optical fiber sensor fixing block, and the grinding wheel blade moves to a position between the opposite-type optical fiber sensors through a Z axis to realize non-contact height measurement of the grinding wheel blade.
Preferably, the optical fiber sensor fixing block is further provided with a cleaning liquid spray rod and a compressed air spray rod which are respectively used for cleaning and blowing functions of the correlation type optical fiber sensor.
Preferably, the cleaning liquid spray rod and the compressed air spray rod are respectively provided with a cleaning liquid joint and a compressed air joint, and the cleaning liquid joint and the compressed air joint are respectively connected with an external cleaning liquid source supply joint and a compressed air source supply joint through connecting pipes.
The horizontal pushing mechanism is arranged to selectively open and close the closed protective cover body, so that in practical application, when the non-contact height measuring assembly is required to measure height, the closed protective cover body is opened through the horizontal pushing displacement of the horizontal pushing mechanism, and when the non-contact height measuring assembly is in a finished or non-working state, the closed protective cover body is closed through the horizontal pushing displacement of the horizontal pushing mechanism, so that the problem that accumulated water splashes around in the turnover protective cover in the prior art is solved.
Drawings
Fig. 1 is a schematic view of the installation structure of a non-contact height measuring device (hidden part of a protective cover 3) according to an embodiment of the present invention;
fig. 2 is an exploded view of fig. 1.
Detailed Description
The embodiment of the invention discloses a non-contact height measuring device for a scribing machine, which comprises a scribing machine mounting plate positioned below a grinding wheel blade, wherein the non-contact height measuring device is arranged on the scribing machine mounting plate; the non-contact height measuring device comprises a horizontal pushing mechanism mounting block and a non-contact height measuring assembly which are respectively mounted on a scribing machine mounting plate, wherein a horizontal pushing mechanism is mounted on the horizontal pushing mechanism mounting block, a power output end of the horizontal pushing mechanism is connected with a protective cover with an opening on the side face in a mounting manner, the non-contact height measuring assembly is fixedly mounted on the non-contact height measuring mounting plate, and the side face of the non-contact height measuring mounting plate is correspondingly matched with the protective cover to form a closed protective cover body for protecting the non-contact height measuring assembly; the protective cover can transversely and horizontally push and displace relative to the scribing machine mounting plate, and the closed protective cover body is opened and closed.
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 and 2, a non-contact height measuring device 10 for a dicing saw includes a dicing saw mounting plate 20 located below a grinding wheel blade (not shown), the dicing saw mounting plate 20 having the non-contact height measuring device 10 mounted thereon; the non-contact height measuring device 10 comprises a horizontal pushing mechanism mounting block 1 and a non-contact height measuring assembly 2 which are respectively mounted on a dicing saw mounting plate 20, wherein a horizontal pushing mechanism 5 is mounted on the horizontal pushing mechanism mounting block 1, a power output end of the horizontal pushing mechanism 5 is mounted and connected with a protective cover 3 with an opening on the side surface, the non-contact height measuring assembly 2 is fixedly mounted on a non-contact height measuring mounting plate 4, and the side surface of the non-contact height measuring mounting plate 4 is correspondingly matched with the protective cover 3 to form a closed protective cover body for protecting the non-contact height measuring assembly 2; the protective cover 3 can transversely and horizontally push and displace relative to the scribing machine mounting plate 20, so that the closed protective cover body can be opened and closed;
preferably, in the present embodiment, the horizontal pushing mechanism 5 includes an air cylinder 51 mounted on the horizontal pushing mechanism mounting block 1, and an output end of the air cylinder 51 is fixedly connected to the protection cover 3 for driving the protection cover 3 to perform horizontal pushing displacement; an output end 51a of the cylinder 51 is connected with the protective cover 3 through a horizontal pushing guide mounting block 52 in an installing manner, wherein the horizontal pushing guide mounting block 52 adopts a first horizontal derivation direction mounting part 52a and a second horizontal derivation direction mounting part 52b which are integrally connected into an L shape, the first horizontal derivation direction mounting part 52a is fixedly mounted on the inner side surface of the protective cover 3, and the second horizontal derivation direction mounting part 52b is fixedly mounted on the inner surface of the protective cover 3; the second horizontal derivation direction installation part 52b is in guiding sliding contact fit with the side surface of the cylinder 51, so that the guiding effect during horizontal derivation is further facilitated;
preferably, in the present embodiment, a sensor (a known structure, not shown) for identifying whether the closed protective cover is in an open state or a closed state is mounted on the horizontal pushing mechanism 5, the mounting position of the sensor may be in the protective cover 3 or on the cylinder 51, and the present embodiment is not particularly limited, and the sensor can ensure that the Z-axis drives the grinding wheel blade to make a descending displacement to enter the non-contact height measurement process only when the closed protective cover is in the closed state and the sensor identifies a complete closing signal;
preferably, in the present embodiment, the horizontal pushing mechanism mounting block 1 includes a connecting rod 11 fixedly mounted on the dicing saw mounting plate 20, a transition connecting block 12 is fixedly mounted on the connecting rod 11, and the air cylinder 51 is mounted on the transition connecting block 12; the bottom of the non-contact height measurement mounting plate 4 is limited and mounted on the dicing saw mounting plate 20; the installation structure design of the embodiment is beneficial to obtaining more convenient and quick installation, disassembly and assembly and maintenance effects;
preferably, in the present embodiment, the non-contact height measurement component 2 includes an optical fiber sensor fixing block 21 fixedly mounted on the non-contact height measurement mounting plate, two sides of the optical fiber sensor fixing block 21 are mounted with correlation type optical fiber sensors 22, and the grinding wheel blade moves to between the correlation type optical fiber sensors 22 through the Z axis to realize non-contact height measurement of the grinding wheel blade; the optical fiber sensor fixing block 21 is further provided with a cleaning liquid spray rod 23 and a compressed air spray rod 24 which are respectively used for cleaning and blowing functions of the correlation type optical fiber sensor 22, in the embodiment, after a cleaning liquid path is separated from a compressed air path, the mixing of cleaning liquid and air is effectively cut off, the time of a blowing stage is reduced, after the correlation type optical fiber sensor 22 is cleaned, the cleaning liquid on the surface of the correlation type optical fiber sensor 22 can be quickly dried through the blowing function, and the working efficiency is improved;
preferably, in order to achieve quick installation, in the present embodiment, the cleaning liquid spray bar 23 and the compressed air spray bar 24 are provided with a cleaning liquid joint 23a and a compressed air joint 24a, respectively, and the cleaning liquid joint 23a and the compressed air joint 24a are connected to an external cleaning liquid source supply joint and a compressed air source supply joint, respectively, through connection pipes (not shown), which may be provided directly on the dicing saw mounting plate 20.
In the embodiment, the horizontal pushing mechanism 5 is arranged to selectively open and close the closed protective cover body, so that in actual application, when a non-contact height measuring component is required to measure the height, the closed protective cover body is opened through the horizontal pushing displacement of the horizontal pushing mechanism 5, the non-contact height measuring component 2 is exposed, a cleaning solution is firstly flushed through the cleaning solution spray rod 23 aiming at the correlation point of the correlation type optical fiber sensor 22, the surface of the correlation type optical fiber sensor 22 is cleaned, then air flow is blown out through the compressed air spray rod 24, and the cleaning solution remained on the surface of the correlation type optical fiber sensor 22 is blown clean; after the process is finished, the Z axis slowly descends, the grinding wheel blade slowly descends to a position between the correlation type optical fiber sensors 22 to shield light correlation so as to realize non-contact height measurement of the grinding wheel blade, then the grinding wheel blade is slowly lifted, after the process is repeated for three times, the Z axis drives the grinding wheel blade to be lifted and returned to the initial installation height, and the height measurement of the non-contact height measurement component 2 is finished; when non-contact height finding subassembly 2 height finding was over or off-working state, the horizontal flat push displacement through flat push mechanism 5 closed the sealed protecting shield body, avoided convertible visor among the prior art to have ponding problem of splashing everywhere, and the embodiment adopts the flat push motion mode to open the sealed protecting shield body simultaneously, and is simple convenient, and the working process is reliable and stable.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A non-contact height measuring device for a scribing machine comprises a scribing machine mounting plate positioned below a grinding wheel blade, wherein the non-contact height measuring device is mounted on the scribing machine mounting plate; the non-contact height measuring device is characterized by comprising a horizontal pushing mechanism mounting block and a non-contact height measuring assembly which are respectively mounted on the dicing saw mounting plate, wherein a horizontal pushing mechanism is mounted on the horizontal pushing mechanism mounting block, a power output end of the horizontal pushing mechanism is mounted and connected with a protective cover with an opening on the side surface, the non-contact height measuring assembly is fixedly mounted on the non-contact height measuring mounting plate, and the side surface of the non-contact height measuring mounting plate is correspondingly matched with the protective cover to form a closed protective cover body for protecting the non-contact height measuring assembly; the protective cover can transversely and horizontally push and displace relative to the scribing machine mounting plate, and the closed protective cover body is opened and closed.
2. The non-contact height measuring device for the dicing saw according to claim 1, wherein the horizontal pushing mechanism comprises a cylinder mounted on the horizontal pushing mechanism mounting block, and an output end of the cylinder is fixedly connected with a protective cover for driving the protective cover to perform horizontal pushing displacement.
3. The non-contact height measuring device for the dicing saw according to claim 2, wherein the output end of the cylinder is connected to the protective cover by a horizontal pushing guide mounting block, wherein the horizontal pushing guide mounting block adopts a first horizontal guiding mounting part and a second horizontal guiding mounting part which are integrally connected to form an L shape, the first horizontal guiding mounting part is fixedly mounted on the inner side surface of the protective cover, and the second horizontal guiding mounting part is fixedly mounted on the inner surface of the protective cover.
4. The non-contact height finding apparatus for a dicing saw of claim 3 wherein the second horizontal derivation direction mounting portion is in guiding sliding contact engagement with the cylinder side surface.
5. The non-contact height measuring device for dicing saw according to claim 1, wherein a sensor for recognizing that the closed protective cover is in an open or closed state is mounted on the horizontal pushing mechanism.
6. The non-contact height measuring device for scribing machine according to claim 1, wherein the horizontal pushing mechanism mounting block comprises a connecting rod fixedly mounted on the scribing machine mounting plate, a transition connecting block is fixedly mounted on the connecting rod, and the horizontal pushing mechanism is mounted on the transition connecting block.
7. The non-contact height finding device for dicing saw of claim 6 wherein the bottom limit of the non-contact height finding mounting plate is mounted on the dicing saw mounting plate.
8. The non-contact height measuring device for the scribing machine according to claim 1, wherein the non-contact height measuring component comprises an optical fiber sensor fixing block fixedly mounted on the non-contact height measuring mounting plate, opposite type optical fiber sensors are mounted on two sides of the optical fiber sensor fixing block, and the grinding wheel blade moves to the position between the opposite type optical fiber sensors through the Z axis to realize non-contact height measuring of the grinding wheel blade.
9. The non-contact height measuring device for the scribing machine as claimed in claim 8, wherein said optical fiber sensor fixing block is further respectively installed with a cleaning liquid spray bar and a compressed air spray bar for respectively cleaning and blowing functions of said opposite type optical fiber sensor.
10. The non-contact height measuring device for dicing saw according to claim 8, wherein the cleaning liquid spray bar and the compressed air spray bar are provided with a cleaning liquid joint and a compressed air joint, respectively, which are connected to an external cleaning liquid source supply joint and a compressed air source supply joint, respectively, through connecting pipes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2020/130729 WO2021208439A1 (en) | 2020-04-16 | 2020-11-23 | Non-contact height measurement device for dicing machine |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2020102975213 | 2020-04-16 | ||
| CN202010297521 | 2020-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111618724A true CN111618724A (en) | 2020-09-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010515295.1A Pending CN111618724A (en) | 2020-04-16 | 2020-06-09 | Non-contact height measuring device for scribing machine |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN111618724A (en) |
| WO (1) | WO2021208439A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113118950A (en) * | 2021-05-10 | 2021-07-16 | 沈阳和研科技有限公司 | Antifouling device for optical fiber sensor |
| WO2021208439A1 (en) * | 2020-04-16 | 2021-10-21 | 江苏京创先进电子科技有限公司 | Non-contact height measurement device for dicing machine |
| CN114345812A (en) * | 2022-03-17 | 2022-04-15 | 沈阳和研科技有限公司 | Blade height measuring device and scribing machine |
| CN114406879A (en) * | 2022-01-14 | 2022-04-29 | 深圳特斯特半导体设备有限公司 | Automatic scribing machine suitable for cluster type distribution |
| CN116872059A (en) * | 2023-09-04 | 2023-10-13 | 沈阳和研科技股份有限公司 | Cutting machine for automatically cutting KIT rubber groove |
| CN118181554A (en) * | 2024-02-04 | 2024-06-14 | 江苏优柯半导体科技有限公司 | Non-contact height measurement device of wafer cutting equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113916268B (en) * | 2021-12-14 | 2022-04-22 | 国网山东省电力公司桓台县供电公司 | Photoelectric sensor with adjustable measuring distance |
| CN114234788A (en) * | 2021-12-27 | 2022-03-25 | 沈阳和研科技有限公司 | Contact height measuring device of grinding wheel scribing machine |
| CN116394135B (en) * | 2023-06-08 | 2023-08-25 | 沈阳和研科技股份有限公司 | Contact height measurement method of dicing saw |
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| CN111618724A (en) * | 2020-04-16 | 2020-09-04 | 江苏京创先进电子科技有限公司 | Non-contact height measuring device for scribing machine |
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- 2020-06-09 CN CN202010515295.1A patent/CN111618724A/en active Pending
- 2020-11-23 WO PCT/CN2020/130729 patent/WO2021208439A1/en active Application Filing
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| US6010396A (en) * | 1997-07-22 | 2000-01-04 | Disco Corporation | Blade cover in a cutting apparatus |
| CN103913417A (en) * | 2014-03-20 | 2014-07-09 | 浙江晶盛机电股份有限公司 | Crystal orientation detection device of single crystal silicon rod and crystal orientation detection method thereof |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021208439A1 (en) * | 2020-04-16 | 2021-10-21 | 江苏京创先进电子科技有限公司 | Non-contact height measurement device for dicing machine |
| CN113118950A (en) * | 2021-05-10 | 2021-07-16 | 沈阳和研科技有限公司 | Antifouling device for optical fiber sensor |
| CN114406879A (en) * | 2022-01-14 | 2022-04-29 | 深圳特斯特半导体设备有限公司 | Automatic scribing machine suitable for cluster type distribution |
| CN114345812A (en) * | 2022-03-17 | 2022-04-15 | 沈阳和研科技有限公司 | Blade height measuring device and scribing machine |
| CN114345812B (en) * | 2022-03-17 | 2022-06-07 | 沈阳和研科技有限公司 | Blade height measuring device and scribing machine |
| CN116872059A (en) * | 2023-09-04 | 2023-10-13 | 沈阳和研科技股份有限公司 | Cutting machine for automatically cutting KIT rubber groove |
| CN118181554A (en) * | 2024-02-04 | 2024-06-14 | 江苏优柯半导体科技有限公司 | Non-contact height measurement device of wafer cutting equipment |
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| Publication number | Publication date |
|---|---|
| WO2021208439A1 (en) | 2021-10-21 |
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Application publication date: 20200904 |
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