CN114345812A - Blade height measuring device and scribing machine - Google Patents
Blade height measuring device and scribing machine Download PDFInfo
- Publication number
- CN114345812A CN114345812A CN202210260746.0A CN202210260746A CN114345812A CN 114345812 A CN114345812 A CN 114345812A CN 202210260746 A CN202210260746 A CN 202210260746A CN 114345812 A CN114345812 A CN 114345812A
- Authority
- CN
- China
- Prior art keywords
- water
- blowing pipe
- air blowing
- prism
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention discloses a blade height measuring device and a dicing saw, comprising: the base is provided with a water inlet channel and an air inlet channel; the optical fiber sensor assembly comprises a mounting seat connected with the base and an optical fiber sensor, wherein the optical fiber sensor comprises a transmitting end prism and a receiving end prism which are oppositely arranged on the mounting seat at intervals, and the transmitting end prism emits light rays to the receiving end prism; the cleaning structure is arranged on the base and comprises at least two water blowing pipes and at least two air blowing pipes, water inlets of the water blowing pipes are communicated with the water inlet channel, water blowing openings of one part of the water blowing pipes are arranged towards the prism at the transmitting end, and water blowing openings of the other part of the water blowing pipes are arranged towards the prism at the receiving end; and air inlets of the air blowing pipes are communicated with the air inlet channel, the air blowing openings of one part of the air blowing pipes are arranged towards the transmitting end prism, and the air blowing openings of the other part of the air blowing pipes are arranged towards the receiving end prism.
Description
Technical Field
The application relates to the technical field of dicing saw cutting, in particular to a blade height measuring device and a dicing saw.
Background
In the field of semiconductor processing, especially in the field of wafer processing, the precision requirement for the cutting depth of a workpiece is high, but because a cutting blade is abraded along with the cutting process, the outer diameter of the cutting blade is reduced, and the cutting depth of the workpiece is influenced. In order to measure the abrasion value of the cutting blade in the cutting process, thereby accurately controlling the cutting depth of the workpiece and ensuring the machining precision of the workpiece, a height measuring system is arranged to measure the abrasion value of the blade. The height measuring system mainly comprises a light emitting end and a receiving end, the whole height measuring system is fixed, and the main shaft drives the cutting blade to slowly descend so as to shield a light path between the light emitting end and the receiving end. The height measurement system calculates the blade wear value by the degree of light blocking. The whole height measurement process is carried out in the cutting cavity, and the cutting cavity is filled with water mist and cutting dirt, so that the measurement accuracy of the height measurement system is greatly influenced, and the cleanness of the height measurement system is guaranteed during measurement. Therefore, before height measurement, the prisms at the transmitting end and the receiving end of the height measurement system are cleaned by blowing water and dried by blowing air through the cleaning structure.
The cleaning structure in the existing height measuring system has poor effect on cleaning the prism. Because the cutting cavity is filled with water mist and cutting dirt, the prism is polluted seriously, the cleaning effect of the cleaning structure is poor or unstable, the measurement precision of the height measuring system is greatly influenced, and the cutting depth of a workpiece is influenced. The cleaning structure in the existing height measurement system has the problem that the blown cleaning water is gathered around the prism to interfere the light path, so that the accuracy of the measurement result of the height measurement system is influenced. And the water that clean structure blown out because the residual pressure, after the control valve was closed, the rivers in whole water route still can slowly spill over from blowing the water pipe mouth, blow again this moment, blow mouthful the place ahead air velocity of flow big, lead to atmospheric pressure to be less than blowing the mouth of a river, then can blow the water droplet that overflows to the prism together, thereby influence the luminousness and influence the height measurement precision.
Disclosure of Invention
In order to overcome the defects of the prior art, the embodiment of the application provides a blade height measuring device and a dicing saw.
The embodiment of the invention provides a blade height measuring device, which comprises:
the base is provided with a water inlet channel and an air inlet channel;
the optical fiber sensor assembly comprises a mounting seat connected with the base and an optical fiber sensor, the optical fiber sensor comprises a transmitting end prism and a receiving end prism which are oppositely arranged on the mounting seat at intervals, and the transmitting end prism emits light rays to the receiving end prism;
the cleaning structure is arranged on the base and comprises at least two water blowing pipes and at least two air blowing pipes, water inlets of the water blowing pipes are communicated with the water inlet channel, water blowing openings of one part of the water blowing pipes are arranged towards the transmitting end prism, and water blowing openings of the other part of the water blowing pipes are arranged towards the receiving end prism; the air inlets of the air blowing pipes are communicated with the air inlet channel, the air blowing openings of one part of the air blowing pipes are arranged towards the prism of the transmitting end, the air blowing openings of the other part of the air blowing pipes are arranged towards the prism of the receiving end, the direction of the optical fiber sensor assembly is the front direction, the air blowing pipes and the air blowing pipes are arranged in tandem, and the rear height of the air blowing pipes and the air blowing pipes is higher than the front height of the air blowing pipes; the included angle between the water/air blowing direction arranged at the front position of the air blowing pipe and the water blowing pipe and the plane of the transmitting end prism or the receiving end prism is 14-16 degrees, and the included angle between the water/air blowing direction arranged at the rear position of the air blowing pipe and the water blowing pipe and the plane of the transmitting end prism or the receiving end prism is 8-10 degrees.
According to the blade height measuring device provided by the embodiment of the invention, the air blowing pipe is arranged behind the water blowing pipe, and the height of the air blowing pipe is higher than that of the water blowing pipe.
According to the blade height measuring device provided by the embodiment of the invention, the included angle between the water blowing direction of the water blowing pipe and the plane of the transmitting end prism or the receiving end prism is 15 degrees, and the included angle between the air blowing direction of the air blowing pipe and the plane of the transmitting end prism or the receiving end prism is 9 degrees.
According to the blade height measuring device provided by the embodiment of the invention, the number of the water blowing pipes is two, wherein one water blowing pipe is arranged towards the transmitting end prism, and the other water blowing pipe is arranged towards the receiving end prism; and the number of the air blowing pipes is two, wherein one air blowing pipe is arranged towards the transmitting end prism, and the other air blowing pipe is arranged towards the receiving end prism.
According to the blade height measuring device provided by the embodiment of the invention, the water outlet temperature of the water blowing pipe is 22 +/-1 ℃.
According to the blade height measuring device provided by the embodiment of the invention, the bottom of the base is also provided with a waterway pressure relief opening for communicating the water inlet channel with the outside.
According to the blade height measuring device provided by the embodiment of the invention, the blade height measuring device further comprises: the controller is used for controlling the gas source communicated with the gas inlet channel and the water source communicated with the water inlet channel to simultaneously convey gas and water into the gas blowing pipe and the water blowing pipe respectively when the cutting blade is detected to be positioned between the transmitting end prism and the receiving end prism, and independently controlling the gas source to convey gas into the gas blowing pipe after the pressure of the waterway pressure relief port is relieved for a preset time;
and/or
The controller is used for independently controlling the water source to convey water into the water blowing pipe when the cutting blade is detected to be in a cutting state.
According to the blade height measuring device provided by the embodiment of the invention, the air blowing pipe is arranged behind the air blowing pipe, the air pressure of the air blowing pipe is greater than the water pressure of the air blowing pipe, or the air blowing pipe is arranged behind the air blowing pipe, and the water pressure of the air blowing pipe is greater than the air pressure of the air blowing pipe;
and/or
The air blowing pipe is arranged behind the air blowing pipe, the transverse distance between the air blowing pipe and the contact position of the water blowing surface on the side surface of the prism of the optical fiber sensor is 9 mm, and the longitudinal distance is 3 mm;
and/or
The air blowing pipe is arranged behind the air blowing pipe, the transverse distance between the air blowing pipe and the contact position of the air blowing surface on the side face of the prism of the optical fiber sensor is 15 mm, and the longitudinal distance is 3 mm.
According to the blade height measuring device provided by the embodiment of the invention, the side surface of the base is provided with a water blowing pipe angle adjusting port structure and an air blowing pipe angle adjusting port structure, and the angles of the water blowing pipe and the air blowing pipe facing the optical fiber sensor are respectively adjusted.
According to the blade height measuring device provided by the embodiment of the invention, the mounting seat comprises a main body part suitable for being connected with the base and two mounting parts oppositely arranged on the main body part, and the mounting parts are used for mounting the transmitting end prism or the receiving end prism; the surface of main part is located two between the installation department sets up to the water conservancy diversion inclined plane, the water conservancy diversion inclined plane be used for with water conservancy diversion to clean structure place one side.
According to the blade height measuring device provided by the embodiment of the invention, the inclination angle of the flow guide inclined plane is 15 degrees.
According to the blade height measuring device provided by the embodiment of the invention, the lowest end of the flow guide inclined plane is higher than the height of the mounting surface of the base, on which the cleaning structure is mounted.
According to the blade height measuring device provided by the embodiment of the invention, the guide inclined plane is provided with a plurality of guide grooves which are arranged in parallel, and the length direction of each guide groove extends along the inclination direction of the guide inclined plane.
According to the blade height measuring device provided by the embodiment of the invention, one side of each mounting part, which faces the other mounting part, is provided with a prism positioning part for limiting the transmitting end prism and the receiving end prism to be parallel; and an anti-splash water tank is arranged at one end of the prism positioning part close to the cleaning structure.
The embodiment of the invention also provides a dicing saw, which comprises a main shaft, a cutting blade arranged on the main shaft, a workpiece bearing table and the blade height measuring device in the embodiment.
The invention has the beneficial effects that: the blade height measuring device and the dicing saw provided by the embodiment of the invention comprise a cleaning structure, the cleaning structure is provided with at least two water blowing pipes and at least two air blowing pipes, the water blowing openings of the water blowing pipes are respectively towards the transmitting end prism and the receiving end prism, the air blowing openings of the air blowing pipes are respectively towards the transmitting end prism and the receiving end prism, the air blowing pipes and the water blowing pipes are arranged in tandem, and the height of the air blowing pipe behind the position of the air blowing pipe and the position of the water blowing pipe are higher than the height of the air blowing pipe in front of the position of the air blowing pipe, the included angle between the water/air blowing direction arranged at the position close to the front position in the air blowing pipe and the water blowing pipe and the plane of the transmitting end prism or the receiving end prism is 14-16 degrees, the included angle between the water/air blowing direction at the rear position of the air blowing pipe and the water blowing pipe and the plane of the transmitting end prism or the receiving end prism is 8-10 degrees. Under this angle, the circular water column of blowing pipe spun, the circular gas column of gas blow pipe spun after contact prism surface can become the stratosphere plane that keeps original initial pressure, sweeps whole prism face and improves clean efficiency, especially the gas blow mouth of gas blow pipe is towards the prism face and lean on the back to set up, can guarantee to weather the water on the whole prism face, realizes the best clean effect.
Drawings
The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a blade height measuring device for measuring height according to this embodiment.
Fig. 2 is a schematic structural diagram of the blade height measuring device provided in this embodiment.
Fig. 3 is a schematic view of the waterway pressure relief opening provided in this embodiment.
Fig. 4 is a schematic angle diagram of the blowing pipe and the water blowing pipe provided in this embodiment.
Fig. 5 is a schematic view of an adjusting jackscrew structure provided in this embodiment.
Fig. 6 is a schematic structural diagram of the optical fiber sensor assembly according to this embodiment.
Fig. 7 is a schematic structural diagram of the dicing saw provided in this embodiment.
Description of the main element symbols: 1-blade height measuring means; 2-a main shaft; 21-a cutting blade; 3-a workpiece bearing table; 11-a base; 111-a water inlet channel; 112-an intake passage; 12-a fibre-optic sensor assembly; 13-a cleaning structure; 121-a mounting seat; 122-a fiber optic sensor; 1221-an emitter prism; 1222-a receiving end prism; 131-a water blowing pipe; 132-an air blowing pipe; 113-a water blowing pipe angle adjusting port structure; 114-an air blowing pipe angle adjusting port structure; 115-waterway pressure relief port; 116-a flow-directing ramp; 1161-guiding gutter; 117-prism positioning section; 118-splash tank; 119-adjusting the jackscrew.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
The following disclosure provides many different embodiments or examples for implementing different features of the application. In order to simplify the disclosure of the present application, specific example components and arrangements are described below. Of course, they are merely examples and are not intended to limit the present application. Moreover, the present application may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, examples of various specific processes and materials are provided herein, but one of ordinary skill in the art may recognize applications of other processes and/or use of other materials.
As shown in fig. 1 to 6, an embodiment of the present invention provides a blade height measuring apparatus 1 including: a base 11, on which a water inlet channel 111 and an air inlet channel 112 are arranged; the water inlet channel 111 and the air inlet channel 112 are respectively connected with a water source and an air source (not shown in the figure). The base 11 is integrally stepped, and the water inlet of the water inlet channel 111 and the air inlet of the air inlet channel 112 are arranged on the side surface of the base 11.
A fiber sensor assembly 12 including a mounting base 121 coupled to the base 11, and a fiber sensor 122, the fiber sensor 122 including a transmitting end prism 1221 and a receiving end prism 1222 mounted on the mounting base 121 at a relative interval, the transmitting end prism 1221 emitting light to the receiving end prism 1222;
a cleaning structure 13, wherein the cleaning structure 13 is disposed on the base 11, the cleaning structure 13 includes at least two water blowing pipes 131 and at least two air blowing pipes 132, water inlets of the water blowing pipes 131 are both communicated with the water inlet channel 111, a part of the water blowing ports of the water blowing pipes 131 are disposed toward the emitter end prism 1221, and another part of the water blowing ports of the water blowing pipes 131 are disposed toward the receiver end prism 1222; the air inlets of the air blowing pipes 132 are all communicated with the air inlet channel 112, the air blowing openings of a part of the air blowing pipes 132 are arranged towards the transmitting end prism 1221, the air blowing openings of the other part of the air blowing pipes 132 are arranged towards the receiving end prism 1222, the direction of the optical fiber sensor assembly 12 is taken as the front, the blowing pipe 132 and the blowing pipe 131 are arranged in tandem, and the rear height of the blowing pipe 132 and the blowing pipe 131 is higher than the front height of the two, the included angle between the water/air blowing direction of the air blowing pipe 132 and the water blowing pipe 131, which is arranged at the front position, and the plane of the transmitting end prism 1221 or the receiving end prism 1222 is 14-16 degrees, the included angle between the water/air blowing direction at the rear position of the air blowing pipe 132 and the water blowing pipe 131 and the plane of the transmitting end prism 1221 or the receiving end prism 1222 is 8-10 degrees. That is, when the air blowing pipe 132 is disposed behind the air blowing pipe 131 and is disposed in front of the air blowing pipe 132, an angle between an air blowing direction of the air blowing pipe 132 and a plane of the emission end prism 1221 or the receiving end prism 1222 is 14 to 16 degrees, and an angle between an air blowing direction of the air blowing pipe 131 and a plane of the emission end prism 1221 or the receiving end prism 1222 is 8 to 10 degrees. When the air blowing pipe 132 is arranged at the rear and the front of the air blowing pipe 131, the angle between the water blowing direction of the air blowing pipe 131 and the plane of the transmitting end prism 1221 or the receiving end prism 1222 is 14-16 degrees, and the angle between the air blowing direction of the air blowing pipe 132 and the plane of the transmitting end prism 1221 or the receiving end prism 1222 is 8-10 degrees.
In the blade height measuring device 1 provided by the embodiment of the invention, the air blowing pipe 132 and the water blowing pipe 131 blow air or blow water at a specific angle, so that a circular water column sprayed by the water blowing pipe 131 and a circular air column sprayed by the air blowing pipe 132 become a stratospheric plane maintaining an original initial pressure after contacting the surface of the prism, and the circular water column and the circular air column are swept across the whole prism surface, thereby improving the cleaning efficiency. The blowing pipes 132 are arranged in tandem with the blowing pipes 131 and staggered in height, so that the blowing pipes 132 at the rear part can be prevented from being blocked by the blowing pipes 131 at the front part, or the blowing pipes 132 at the front part can be prevented from blocking the blowing pipes 131 at the rear part.
Specifically, it is preferable that the air blowing pipe 132 is disposed behind the air blowing pipe 131, and the height of the air blowing pipe 132 is higher than the height of the air blowing pipe 131. The air blowing opening of the air blowing pipe 132 faces the prism surface and is arranged close to the back, so that the water on the whole prism surface can be guaranteed to be dried, and a better cleaning effect is realized. The water blowing direction of the water blowing pipe 131 forms an angle of 15 degrees with the plane of the transmitting end prism 1221 or the receiving end prism 1222, and the air blowing direction of the air blowing pipe 132 forms an angle of 9 degrees with the plane of the transmitting end prism 1221 or the receiving end prism 1222.
As shown in fig. 2 and 4, in a preferred embodiment, two blowing pipes 131 are provided, one of which is disposed toward the emission end prism 1221 and one of which is disposed toward the receiving end prism 1222, and two blowing pipes 132 are provided, one of which is disposed toward the emission end prism 1221 and one of which is disposed toward the receiving end prism 1222. Preferably, the blowing pipe 132 is disposed behind the blowing pipe 131, and the air pressure of the blowing pipe 132 is greater than the water pressure of the blowing pipe 131, so that when the blowing pipe 132 and the blowing pipe 131 blow air and blow water simultaneously, the air pressure of the air blown out from the rear of the blowing pipe 132 can enhance the water pressure of the water blown out from the blowing pipe 131 in front, and the cleaning effect is better. Wherein, the water pressure of blowing pipe 131 is 0.2Mpa, the atmospheric pressure of blowing pipe 132 is 0.5Mpa, as replaceable embodiment, also can blowing pipe 131 sets up the rear of blowing pipe 132, the water pressure of blowing pipe 131 is greater than the atmospheric pressure of blowing pipe 132, and this kind of mode needs to make a little change to the structure of scribing machine, needs to increase the booster pump to water pressure boost in the scribing machine. And/or the air blowing pipe is arranged behind the air blowing pipe, the transverse distance between the contact position of the air blowing pipe 131 facing the emission end prism 1221 and the air blowing surface of the prism side surface of the emission end prism 1221 is 9 mm, and the longitudinal distance is 3 mm; accordingly, the lateral distance between the water blowing pipe 131 facing the receiving end prism 1222 and the prism side water blowing surface contact position of the receiving end prism 1222 is 9 mm, and the longitudinal distance is 3 mm. And/or the air blowing pipe is arranged behind the air blowing pipe, the transverse distance between the air blowing pipe 132 facing the emission end prism 1221 and the air blowing surface contact position on the prism side surface of the emission end prism 1221 is 15 mm, and the longitudinal distance is 3 mm; accordingly, the lateral distance between the contact position of the blowing pipe 132 facing the receiving end prism 1222 and the prism side blowing surface of the receiving end prism 1222 is 15 mm, and the longitudinal distance is 3 mm. By setting the angle between the air blowing pipe 131 and the air blowing pipe 132 and the plane of the emitting end prism 1221 or the receiving end prism 1222, the circular water column sprayed by the air blowing pipe 131 can be changed into a plane of a stratosphere maintaining the original initial pressure after contacting the surface of the emitting end prism 1221 or the receiving end prism 1222, so as to sweep the whole prism surface and clean the whole prism surface. And the air blowing opening of the air blowing pipe 132 faces the prism surface and is arranged at the back, so that the water on the whole prism surface can be dried, and the best cleaning effect is realized. In the process of cutting a workpiece by the dicing saw, the water blowing pipe 131 blows water to the surface of the prism surface in the whole process, so that most of dirt generated in the cutting process is washed away by water flow when the dirt is not attached to the prism. After the cutting is finished and before the height measurement is started, the water blowing pipe 131 and the air blowing pipe 132 are opened simultaneously to clean the prism surface, namely, a two-fluid cleaning mode. And because the air pressure of the air blowing pipe 132 is larger than the water pressure of the water blowing pipe 131, the higher pressure air carries water drops to impact on the prism, and the dirt can be removed more efficiently.
A blowing pipe angle adjusting port structure 113 and a blowing pipe angle adjusting port structure 114 are disposed on the side surface of the base 11, and respectively adjust the angles of the blowing pipe 131 and the blowing pipe 132 facing the optical fiber sensor 122. Through the water blowing pipe angle adjusting port structure 113 and the air blowing pipe angle adjusting port structure 114, the angles of the water blowing pipe 131 and the air blowing pipe 132 can be accurately adjusted to be 9 degrees or 15 degrees or other required angles with the prism surface in the installation process, so that the best cleaning effect on the prism surface is realized. As shown in fig. 5, specifically, the angle adjusting port structure 113 includes two adjusting jackscrews 119, the two adjusting jackscrews 119 are disposed at two sides of the water blowing pipe 131 inside the base 11, each adjusting jackscrew 119 abuts against the corresponding water blowing pipe 131, and after the angle of the water blowing pipe 131 is adjusted, the adjusting jackscrew 119 is rotated to lock the adjusted angle of the water blowing pipe 131. Similarly, the blowing pipe angle adjusting port structure 114 also includes two adjusting jackscrews 119, which are arranged in the same way as the adjusting jackscrews 119 in the blowing pipe angle adjusting port structure 113, and the angles of the blowing pipes 132 can be locked by rotating the adjusting jackscrews 119 on both sides, that is, each adjusting jackscrew 119 is used to adjust the angle of a corresponding blowing pipe 131 or blowing pipe 132, and if three blowing pipes 131 are arranged, three corresponding adjusting jackscrews 119 are also arranged. In other embodiments, the adjusting jackscrew 119 may be replaced by a clamping jaw, and the angle of the blowing pipe 131 or the blowing pipe 132 is adjusted and then the blowing pipe 131 or the blowing pipe 132 is clamped by the clamping jaw to perform angle locking. As shown in fig. 3, after the water blowing pipe 131 blows water, a residual pressure exists in the water path of the water blowing pipe 131, and in this state, even though the water valve of the water blowing pipe 131 is closed, the water flow of the whole water path still slowly overflows from the opening of the water blowing pipe 131. At this time, the air blowing pipe 132 blows air again, the air flow rate in front of the air blowing opening is large, so that the air pressure of the air blowing opening is lower than that of the water blowing opening, overflowed water drops are blown to the end face of the prism together, and the light transmittance of the prism is influenced, so that the precision of height measurement is influenced. Therefore, in this embodiment, a waterway pressure relief port 115 for communicating the water inlet channel 111 with the outside is further disposed at the bottom of the base 11. Through setting up water route pressure relief mouth 115, when the water valve of blowing pipe 131 is closed, inhalant canal 111 still communicates with the external world, can follow the residual pressure in the water route pressure relief mouth 115 unloads. The air pressure before the air blowing opening of the air blowing pipe 132 is balanced, overflowing water drops are prevented from blowing to the end face of the prism together, and the interference on the height measurement of the optical fiber sensor assembly 12 is reduced or even eliminated.
As shown in fig. 6, the mounting seat 121 includes a main body portion adapted to be connected to the base 11, and two mounting portions oppositely disposed on the main body portion, and the mounting portions are used for mounting the emitting end prism 1221 or the receiving end prism 1222; the surface of the main body part between the two installation parts is set to be a diversion inclined plane 116, and the diversion inclined plane 116 is used for guiding water to one side of the cleaning structure 13. And the angle of inclination of the diversion inclined plane 116 is 15 degrees. The base 11 is in a step shape, the mounting seat 121 is disposed at the uppermost portion of the step of the base 11, and the lowest end of the diversion inclined plane 116 is higher than the height of the mounting surface of the base 11 on which the cleaning structure 13 is mounted. Through setting up water conservancy diversion inclined plane 116 can effectively follow with the ponding and near rivers that wash behind the prism terminal surface water conservancy diversion inclined plane 116 flows away, prevents to have the ponding of surviving, on the prism terminal surface is taken with ponding on every side to subsequent in-process of blowing, thereby influences the luminousness and influences the height measurement precision.
Since the surface of the diversion inclined plane 116 where the water drops contact with the gas has a thin layer, i.e. a surface layer, molecules in the surface layer are thinner than those in the liquid, and the distance between the molecules is larger than that in the liquid, the interaction between the molecules shows the generation of attraction force, i.e. surface tension. Under surface tension, a water spot partially on the diversion ramp 116 may collect on the ramp without dripping. And the water drops may be splashed due to the collision with the subsequent water flow, so that the light path of the end face of the prism is influenced, and the measurement precision of the subsequent height measurement is disturbed. As shown in fig. 6, in a preferred embodiment, a plurality of diversion grooves 1161 are disposed on the diversion inclined plane 116 in parallel, and a length direction of the diversion groove extends along an inclined direction of the diversion inclined plane. The contact area between water drops and the diversion inclined plane 116 is reduced by increasing the diversion groove 1161, and the surface tension can be reduced, so that the water stored on the diversion inclined plane 116 can smoothly flow down the diversion inclined plane 116, and the interference of the water stored on the subsequent height measurement precision is prevented.
As shown in fig. 6, a prism positioning portion 117 is provided on one side of the mounting portion facing the other mounting portion to define that the transmitting-end prism 1221 and the receiving-end prism 1222 are kept parallel; an anti-splash water tank 118 is provided at an end of the prism positioning portion 117 adjacent to the cleaning structure 13. The prism positioning portion 117 is disposed on the mounting portion to ensure the requirement of parallelism between the transmitting end prism 1221 and the receiving end prism 1222, so as to avoid the influence on the accuracy of height measurement caused by mounting dislocation. Since the prism positioning portion 117 is located closer to the water blowing pipe 131 and the air blowing pipe 132, water droplets may be splashed during the water blowing and the air blowing, and a splash water tank 118 is provided at one end of the prism positioning portion 117 close to the cleaning structure 13. Splash proof water tank 118 goes out the water droplet water conservancy diversion that splashes, has avoided surveying the influence of high accuracy.
Because the precision requirement of the main shaft 2 of the dicing saw is very high, the main shaft 2 of the dicing saw needs to work in a constant temperature environment, and the constant temperature standard is room temperature +/-1 ℃. The height measurement system needs to be matched with the spindle 2 of the dicing saw for precise height measurement, so that the temperature of the whole height measurement system needs to be kept consistent. Otherwise, thermal expansion is generated due to temperature difference, and detection precision is affected. Therefore, in the blade height measuring device 1 provided in the present embodiment, the outlet water temperature in the water blowing pipe 131 is required to be room temperature ± 1 ℃, and specifically, the outlet water temperature of the water blowing pipe 131 is 22 ± 1 ℃. The measurement error caused by thermal expansion caused by water temperature is avoided.
The blade height measuring device 1 provided in this embodiment further includes a controller, and the controller is configured to control a gas source communicated with the gas inlet channel 112 and a water source communicated with the water inlet channel 111 to simultaneously deliver gas and water into the gas blowing pipe 132 and the water blowing pipe 131 respectively when it is detected that the cutting blade 21 is located between the transmitting end prism 1221 and the receiving end prism 1222, and independently control the gas source to deliver gas into the gas blowing pipe 132 after the pressure of the waterway pressure relief opening is relieved for a preset time; and/or the controller is configured to control the water source to always supply water into the water blowing pipe 131 when the cutting blade 21 is detected to be in the cutting state. Specifically, since most of the stains on the prism surfaces of the transmitting end prism 1221 and the receiving end prism 1222 are generated and attached to the prisms during the cutting process, the blade height measuring device 1 provided in this embodiment blows water to the prism surface during the whole process of cutting the workpiece by the dicing saw, so that most of the stains generated during the cutting process are washed away by the water flow when not attached to the prisms, and the attachment of the stains on the prism surfaces is reduced fundamentally. And this implementation provides blade height measurement device 1, adopts to blow water and blow and clean simultaneously, and the gas through higher pressure takes the water droplet, strikes the prism on, can the scrubbing of high efficiency. The blade height measuring device 1 provided by this embodiment realizes the antifouling and quick decontamination of the prism mirror surfaces of the transmitting end prism 1221 and the receiving end prism 1222, and improves the cleaning efficiency of the prism mirror surface under the condition of greatly improving the cleaning quality.
As shown in fig. 7, the present embodiment further provides a dicing saw, which includes a spindle 2, a cutting blade 21 disposed on the spindle 2, a workpiece support table 3, and the blade height measuring apparatus 1 according to the above embodiment. Are not described in detail herein.
The blade height measuring device 1 and the dicing saw provided in the embodiments of the present application are described in detail above, and specific examples are applied herein to explain the principle and the implementation of the present application, and the description of the above embodiments is only used to help understand the technical solution and the core idea of the present application; those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the present disclosure as defined by the appended claims.
Claims (15)
1. A blade height measuring device, comprising:
the base is provided with a water inlet channel and an air inlet channel;
the optical fiber sensor assembly comprises a mounting seat connected with the base and an optical fiber sensor, the optical fiber sensor comprises a transmitting end prism and a receiving end prism which are oppositely arranged on the mounting seat at intervals, and the transmitting end prism emits light rays to the receiving end prism;
the cleaning structure is arranged on the base and comprises at least two water blowing pipes and at least two air blowing pipes, water inlets of the water blowing pipes are communicated with the water inlet channel, water blowing openings of one part of the water blowing pipes are arranged towards the transmitting end prism, and water blowing openings of the other part of the water blowing pipes are arranged towards the receiving end prism; the air inlet of the air blowing pipe is communicated with the air inlet channel, one part of the air blowing pipe is arranged towards the transmitting end prism, the other part of the air blowing pipe is arranged towards the receiving end prism, the direction of the optical fiber sensor assembly is the front, the air blowing pipe and the water blowing pipe are arranged in tandem, the rear height of the air blowing pipe and the water blowing pipe is higher than the front height of the air blowing pipe and the water blowing pipe, the front-arranged air blowing direction of the air blowing pipe and the water blowing pipe and the plane included angle of the transmitting end prism or the receiving end prism are 14-16 degrees, and the rear-arranged air blowing direction of the air blowing pipe and the water blowing pipe and the plane included angle of the transmitting end prism or the receiving end prism are 8-10 degrees.
2. The blade height measuring device according to claim 1, wherein the air blowing pipe is disposed rearward of the air blowing pipe, and the height of the air blowing pipe is higher than the height of the air blowing pipe.
3. The blade height measuring device of claim 2, wherein the water blowing direction of the water blowing pipe forms an angle of 15 degrees with the plane of the transmitting end prism or the receiving end prism, and the air blowing direction of the air blowing pipe forms an angle of 9 degrees with the plane of the transmitting end prism or the receiving end prism.
4. The blade height measuring device of claim 1, wherein the water blowing pipes are provided in two, one of which is disposed toward the emitting end prism and one of which is disposed toward the receiving end prism, and the air blowing pipes are provided in two, one of which is disposed toward the emitting end prism and one of which is disposed toward the receiving end prism.
5. The blade height measuring device according to any one of claims 1 to 4, wherein the water blowing pipe has an outlet water temperature of 22 ± 1 ℃.
6. The blade height measuring device of any one of claims 1-4, wherein a waterway pressure relief port for communicating the water inlet channel with the outside is further provided at the bottom of the base.
7. The blade height measuring device of claim 6, further comprising: the controller is used for controlling the gas source communicated with the gas inlet channel and the water source communicated with the water inlet channel to simultaneously convey gas and water into the gas blowing pipe and the water blowing pipe respectively when the cutting blade is detected to be positioned between the transmitting end prism and the receiving end prism, and independently controlling the gas source to convey gas into the gas blowing pipe after the pressure of the waterway pressure relief port is relieved for a preset time;
and/or
The controller is used for independently controlling the water source to convey water into the water blowing pipe when the cutting blade is detected to be in a cutting state.
8. The blade height measuring device according to claim 1, wherein the air blowing pipe is provided behind the air blowing pipe, and the air pressure of the air blowing pipe is greater than the water pressure of the air blowing pipe, or the air blowing pipe is provided behind the air blowing pipe, and the water pressure of the air blowing pipe is greater than the air pressure of the air blowing pipe;
and/or
The air blowing pipe is arranged behind the air blowing pipe, the transverse distance between the air blowing pipe and the contact position of the water blowing surface on the side surface of the prism of the optical fiber sensor is 9 mm, and the longitudinal distance is 3 mm;
and/or
The air blowing pipe is arranged behind the air blowing pipe, the transverse distance between the air blowing pipe and the contact position of the air blowing surface on the side face of the prism of the optical fiber sensor is 15 mm, and the longitudinal distance is 3 mm.
9. The blade height measuring device according to claim 1, wherein a water blowing pipe angle adjusting port structure and a gas blowing pipe angle adjusting port structure are provided on a side surface of the base, respectively adjusting angles of the water blowing pipe and the gas blowing pipe facing the optical fiber sensor.
10. The blade height measuring device of any one of claims 1-4, wherein the mounting base includes a main body portion adapted to be coupled to the base, and two mounting portions disposed opposite the main body portion for mounting the emitter end prism or the receiver end prism; the surface of main part is located two between the installation department sets up to the water conservancy diversion inclined plane, the water conservancy diversion inclined plane be used for with water conservancy diversion to clean structure place one side.
11. The blade height measuring device of claim 10, wherein the angle of inclination of the diversion bevel is 15 degrees.
12. The blade height measuring device of claim 10, wherein a lowermost end of the diversion ramp is higher than a height of a mounting surface of the base on which the cleaning structure is mounted.
13. The blade height measuring device of claim 10, wherein the guiding inclined plane is provided with a plurality of guiding grooves arranged in parallel, and the length direction of the guiding grooves extends along the inclined direction of the guiding inclined plane.
14. The blade height measuring device of claim 10, wherein a prism positioning portion is provided on a side of the mounting portion facing the other mounting portion to define the transmitting-end prism and the receiving-end prism to be kept parallel; and an anti-splash water tank is arranged at one end of the prism positioning part close to the cleaning structure.
15. A dicing saw comprising a spindle, a cutting blade provided on the spindle, a workpiece carrier, and a blade height measuring apparatus according to any one of claims 1 to 14.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210260746.0A CN114345812B (en) | 2022-03-17 | 2022-03-17 | Blade height measuring device and scribing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210260746.0A CN114345812B (en) | 2022-03-17 | 2022-03-17 | Blade height measuring device and scribing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114345812A true CN114345812A (en) | 2022-04-15 |
| CN114345812B CN114345812B (en) | 2022-06-07 |
Family
ID=81094459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210260746.0A Active CN114345812B (en) | 2022-03-17 | 2022-03-17 | Blade height measuring device and scribing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114345812B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115041467A (en) * | 2022-08-16 | 2022-09-13 | 江苏京创先进电子科技有限公司 | Blade detection mechanism, air blowing block and dicing saw |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0550362A (en) * | 1991-08-21 | 1993-03-02 | Tokyo Seimitsu Co Ltd | Blade position detector |
| TW394153U (en) * | 1998-11-27 | 2000-06-11 | Chen Shu Wen | Measuring optical fiber washing device for BGA product cutter |
| CN1496295A (en) * | 2002-01-18 | 2004-05-12 | 株式会社迪斯科 | Cutting device |
| CN103317447A (en) * | 2013-04-25 | 2013-09-25 | 江苏京创先进电子科技有限公司 | Cutter height measurement cleaning system and working process thereof |
| CN104616972A (en) * | 2013-11-05 | 2015-05-13 | 株式会社迪思科 | Cutting device and cutting method |
| WO2016209001A1 (en) * | 2015-06-24 | 2016-12-29 | 유정정공주식회사 | Device for removing burrs from synchronizer hub, and burr removing method using same |
| CN106807565A (en) * | 2016-08-31 | 2017-06-09 | 昆山开拓者喷雾系统科技有限公司 | The fluid spray bar of anti-clogging two |
| CN111618724A (en) * | 2020-04-16 | 2020-09-04 | 江苏京创先进电子科技有限公司 | Non-contact height measuring device for scribing machine |
| CN215317454U (en) * | 2021-07-15 | 2021-12-28 | 东莞市熙科机电设备有限公司 | Bidirectional measurement optical fiber laser device |
-
2022
- 2022-03-17 CN CN202210260746.0A patent/CN114345812B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0550362A (en) * | 1991-08-21 | 1993-03-02 | Tokyo Seimitsu Co Ltd | Blade position detector |
| TW394153U (en) * | 1998-11-27 | 2000-06-11 | Chen Shu Wen | Measuring optical fiber washing device for BGA product cutter |
| CN1496295A (en) * | 2002-01-18 | 2004-05-12 | 株式会社迪斯科 | Cutting device |
| CN103317447A (en) * | 2013-04-25 | 2013-09-25 | 江苏京创先进电子科技有限公司 | Cutter height measurement cleaning system and working process thereof |
| CN104616972A (en) * | 2013-11-05 | 2015-05-13 | 株式会社迪思科 | Cutting device and cutting method |
| WO2016209001A1 (en) * | 2015-06-24 | 2016-12-29 | 유정정공주식회사 | Device for removing burrs from synchronizer hub, and burr removing method using same |
| CN106807565A (en) * | 2016-08-31 | 2017-06-09 | 昆山开拓者喷雾系统科技有限公司 | The fluid spray bar of anti-clogging two |
| CN111618724A (en) * | 2020-04-16 | 2020-09-04 | 江苏京创先进电子科技有限公司 | Non-contact height measuring device for scribing machine |
| CN215317454U (en) * | 2021-07-15 | 2021-12-28 | 东莞市熙科机电设备有限公司 | Bidirectional measurement optical fiber laser device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115041467A (en) * | 2022-08-16 | 2022-09-13 | 江苏京创先进电子科技有限公司 | Blade detection mechanism, air blowing block and dicing saw |
| CN115041467B (en) * | 2022-08-16 | 2022-11-04 | 江苏京创先进电子科技有限公司 | Blade detection mechanism and scribing machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114345812B (en) | 2022-06-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102513791B1 (en) | Substrate processing apparatus and substrate processing method | |
| CN114345812B (en) | Blade height measuring device and scribing machine | |
| US20040197433A1 (en) | Film removing apparatus, film removing method and substrate processing system | |
| KR100890295B1 (en) | Process and apparatus for ablation | |
| KR102580975B1 (en) | Laser machining apparatus | |
| JP4043923B2 (en) | Processing equipment | |
| KR102616530B1 (en) | Laser processing apparatus | |
| KR100865767B1 (en) | Device for slimming of plate and method for slimming of plate | |
| KR20160105298A (en) | Cutting apparatus | |
| KR20190049460A (en) | Laser machining apparatus | |
| TWI778154B (en) | Laser processing equipment | |
| CN117123911A (en) | Processing device and processing method | |
| JP2002176012A (en) | Apparatus and method for dicing | |
| JP2010114251A (en) | Cutting device | |
| TWI801596B (en) | Laser processing device | |
| TWI778144B (en) | Laser processing equipment | |
| KR20190043090A (en) | Laser machining apparatus | |
| JP6547871B2 (en) | Substrate processing apparatus and substrate processing method | |
| JP6605976B2 (en) | Cutting equipment | |
| KR20190045836A (en) | Laser machining apparatus | |
| JP7328020B2 (en) | Laser processing equipment | |
| US20210362199A1 (en) | Mask glue removing apparatus, system and method | |
| JP2874464B2 (en) | Glass processing method and apparatus | |
| KR102504805B1 (en) | Apparatus for removing film on wafer | |
| JP2013158799A (en) | Laser processing apparatus and laser processing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 110 000 No. 53 Buyunshan Road, Huanggu District, Shenyang City, Liaoning Province Patentee after: Shenyang Heyan Technology Co.,Ltd. Address before: 110 000 No. 53 Buyunshan Road, Huanggu District, Shenyang City, Liaoning Province Patentee before: SHENYANG HEYAN TECHNOLOGY CO.,LTD. |
|
| CP01 | Change in the name or title of a patent holder |