CN214669198U - Probe station device capable of automatically adjusting levelness of probe card - Google Patents
Probe station device capable of automatically adjusting levelness of probe card Download PDFInfo
- Publication number
- CN214669198U CN214669198U CN202120701202.4U CN202120701202U CN214669198U CN 214669198 U CN214669198 U CN 214669198U CN 202120701202 U CN202120701202 U CN 202120701202U CN 214669198 U CN214669198 U CN 214669198U
- Authority
- CN
- China
- Prior art keywords
- probe card
- compensation
- probe
- levelness
- machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses an automatic adjust probe station device of probe card levelness has: a machine platform; the periphery of the machine table is uniformly provided with a series of compensation mechanisms; the probe card is connected with the compensation mechanism; the compensation mechanism has: the stepping motor is arranged on the machine table; an external thread is arranged on a rotating shaft of the stepping motor; the compensation table is fixedly connected with the probe card; be equipped with the screw hole in the compensation platform, advance the pivot and the screw hole cooperation of motor for the levelness of needle point is better, and adjustment needle point levelness that can be normal and quick, and can make the needle point atress even, promotes the life-span of probe card.
Description
Technical Field
The utility model belongs to a probe station device of automatic adjustment probe card levelness
Background
In the process of implementing the present invention, the inventor finds that the prior art has at least the following problems:
in the semiconductor display industry, particularly the silicon-based OLED industry, the automatic probe station is an important step for testing photoelectric parameters; on a traditional probe station, the levelness of a probe card needs to be adjusted after the probe card is replaced, so that the probe can be smoothly pricked on an electrode, and a chip cannot be lightened due to poor levelness; if the levelness is poor, the probe which is firstly contacted with the electrode is subjected to larger pressure, so that the probe is deformed or even damaged; secondly, in the process of replacing the probe card, the accuracy of manually adjusting the levelness is low, and the time is long.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a make the levelness of needle point better, can be normal and quick adjustment needle point levelness is provided, and can make the needle point atress even, promote the probe station device of the automatic adjustment probe card levelness in the life-span of probe card
In order to solve the technical problem, the utility model discloses the technical scheme who adopts is: a probe station device for automatically adjusting levelness of a probe card comprises:
a machine platform;
the periphery of the machine table is uniformly provided with a series of compensation mechanisms;
the probe card is connected with the compensation mechanism;
the compensation mechanism has:
the stepping motor is arranged on the machine table; an external thread is arranged on a rotating shaft of the stepping motor;
the compensation table is fixedly connected with the probe card; and a threaded hole is formed in the compensation table, and a rotating shaft of the motor is matched with the threaded hole.
The periphery of board is equipped with the recess, step motor installs in the tank bottom of recess, compensation platform slidable mounting be in the recess.
The board is circular, and the periphery of circular board evenly is equipped with four groups compensation mechanism.
The compensation table is fixedly connected with the probe card through screws.
One of the technical solutions has the following advantages or beneficial effects that the levelness of the needle point is good, the levelness of the needle point can be adjusted normally and quickly, the stress of the needle point can be uniform, and the service life of the probe card is prolonged.
Drawings
Fig. 1 is a schematic structural diagram of a probe station apparatus for automatically adjusting levelness of a probe card according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the operation of the probe station apparatus for automatically adjusting levelness of a probe card of FIG. 1;
the labels in the above figures are: 101. machine platform, 102, probe card, 103, compensation mechanism, 1031, step motor, 1032, compensation platform, 1033, screw hole.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
Referring to fig. 1-2, a probe station apparatus for automatically adjusting levelness of a probe card, includes:
a machine platform;
the periphery of the machine table is uniformly provided with a series of compensation mechanisms;
the probe card is connected with the compensation mechanism;
the compensation mechanism has: the stepping motor is arranged on the machine table; an external thread is arranged on a rotating shaft of the stepping motor; the compensation table is fixedly connected with the probe card; a threaded hole is formed in the compensation table, and a rotating shaft of the motor is matched with the threaded hole.
The periphery of the machine table is provided with a groove, the stepping motor is arranged in the groove bottom of the groove, and the compensation table is slidably arranged in the groove. The board is circular, and the periphery of circular board evenly is equipped with four groups compensation mechanism. The compensation table is fixedly connected with the probe card through screws.
The probe card is placed on the machine 101, the flatness of the machine 101 requires +/-5 um, and the material of the machine is an insulating material such as ceramic, polymethyl methacrylate or carbon steel with insulating paint.
The probe card 102 is customized to fit the probe station, and the flatness of the lower surface thereof is ± 5 um.
A stepping motor is arranged in the compensation platform 103, the precision of the stepping motor is 1um, and the repetition precision is 0.5 um; the flatness of the compensating table is +/-5 mu m, and the material is an insulating material, such as ceramic, polymethyl methacrylate or carbon steel with insulating paint.
The compensating mechanism 103 should be installed inside the machine 101 structure, and ensure the flatness of the compensating table module and the machine structure to be within ± 5 um.
The compensation mechanism 103 includes a stepper motor 1031, a compensation stage 1032, and a threaded hole 1033, wherein the probe card is attached to the compensation stage structure by screws.
When the machine station tests the positions of the first needle point and the second needle point, the Z-axis difference exists, the machine station informs the position difference to the compensation platform structure, and at the moment, the four compensation platform structures can be adjusted to enable the levelness of the compensation platform structure to be normal.
After the structure is adopted, four compensation tables with stepping motors are arranged on the probe table, and the automatic probe table informs the four compensation tables of the Z-axis position of the probe point positioning to compensate the Z-axis, so that the levelness of the probe point is good, the levelness of the probe point can be adjusted normally and quickly, the stress of the probe point can be even, and the service life of the probe card is prolonged.
The present invention has been described above with reference to the accompanying drawings, and it is obvious that the present invention is not limited by the above-mentioned manner, and various insubstantial improvements can be made without modification to the method and technical solution of the present invention, or the present invention can be directly applied to other occasions without modification, all within the scope of the present invention.
Claims (4)
1. A probe station device for automatically adjusting levelness of a probe card is characterized by comprising the following components:
a machine platform;
the periphery of the machine table is uniformly provided with a series of compensation mechanisms;
the probe card is connected with the compensation mechanism;
the compensation mechanism has:
the stepping motor is arranged on the machine table; an external thread is arranged on a rotating shaft of the stepping motor;
the compensation table is fixedly connected with the probe card; and a threaded hole is formed in the compensation table, and a rotating shaft of the motor is matched with the threaded hole.
2. The apparatus of claim 1, wherein a groove is formed on an outer circumference of the machine table, the stepping motor is installed in a bottom of the groove, and the compensating table is slidably installed in the groove.
3. The apparatus of claim 2, wherein the stage is circular, and four compensating mechanisms are uniformly disposed on the periphery of the circular stage.
4. The probe station apparatus for automatically adjusting levelness of a probe card according to claim 3, wherein the compensation stage is fixedly connected with the probe card by a screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120701202.4U CN214669198U (en) | 2021-04-07 | 2021-04-07 | Probe station device capable of automatically adjusting levelness of probe card |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120701202.4U CN214669198U (en) | 2021-04-07 | 2021-04-07 | Probe station device capable of automatically adjusting levelness of probe card |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214669198U true CN214669198U (en) | 2021-11-09 |
Family
ID=78459687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120701202.4U Active CN214669198U (en) | 2021-04-07 | 2021-04-07 | Probe station device capable of automatically adjusting levelness of probe card |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214669198U (en) |
-
2021
- 2021-04-07 CN CN202120701202.4U patent/CN214669198U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN214669198U (en) | Probe station device capable of automatically adjusting levelness of probe card | |
| CN207289632U (en) | A kind of transmission output shaft measures clamping device | |
| CN211125600U (en) | Precision adjusting probe station for testing semiconductor device | |
| CN208729213U (en) | A kind of machining center clamp of end cap | |
| CN215677112U (en) | High accuracy four-axis testing platform | |
| CN219957413U (en) | X-ray diffraction appearance phase Instrument and sample stage device thereof | |
| CN219871443U (en) | Flange tool with dial for testing new energy driving motor rack | |
| CN218163058U (en) | Circuit board tool convenient to adjustment installation | |
| CN214405254U (en) | Z image measuring module | |
| CN211940575U (en) | Novel compression permanent deformation anchor clamps | |
| CN216915203U (en) | Ceramic wafer surface coating positioning mechanism | |
| CN112338822A (en) | Jig positioning device | |
| CN218972293U (en) | Automatic lifting and rotating tracking equipment | |
| CN219223704U (en) | Measuring device for detecting flatness and concentricity of rotary graphite tray | |
| CN219798232U (en) | Integrated on-line plane dimension measuring equipment | |
| CN215599020U (en) | Sample platform | |
| CN213580092U (en) | Clamp for steady flow air passage test | |
| CN111765846B (en) | Method for adjusting optical axis of optical instrument | |
| CN218647090U (en) | Wafer piece insulating property measuring device | |
| CN220039721U (en) | Static balance detection positioning tool | |
| CN219224454U (en) | Micro-hardening meter lifter | |
| CN211785668U (en) | Display panel CELL end detection tool | |
| CN220863809U (en) | Position detection clamp for shaft parts | |
| CN218213325U (en) | Moving contact speed measuring device of high-voltage switch | |
| CN216144938U (en) | Card holds in palm socket detection mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |