CN215599020U

CN215599020U - Sample platform

Info

Publication number: CN215599020U
Application number: CN202121176144.4U
Authority: CN
Inventors: 王义林; 秦姗; 周睿
Original assignee: Zhenjiang Lehua Technology Co ltd
Current assignee: Zhenjiang Lehua Technology Co ltd
Priority date: 2021-05-28
Filing date: 2021-05-28
Publication date: 2022-01-21
Anticipated expiration: 2031-05-28

Abstract

The utility model relates to the technical field of electron microscope accessories, in particular to a sample table, which comprises a sample arrangement component, a sample table body, a magnification calibration table, a Faraday cup and a resolution measurement table, wherein the sample arrangement component, the magnification calibration table, the Faraday cup and the resolution measurement table are all arranged on the sample table body.

Description

Sample platform

Technical Field

The utility model relates to the technical field of electron microscope accessories, in particular to a sample table.

Background

The electron microscope is generally referred to as an electron microscope. An Electron Microscope (abbreviated as Electron Microscope) has become an indispensable important tool in modern science and technology after more than fifty years of development. The electron microscope is composed of a lens cone, a vacuum device and a power supply cabinet.

The electron microscope is carrying out the dose measurement of electron beam before carrying out electron beam exposure sculpture usually, electron microscope resolution ratio test and calibration electron microscope's magnification, then install general sample platform again and carve the sample, after a sample sculpture is accomplished, the staff need take off general sample platform, measure and calibrate a series of operations to the electron microscope once more, when this process increases staff's work load, the efficiency of sample sculpture has been reduced, and present general sample platform can only install the sample of carving of treating of setting for the specification, when treating the specification of carving the sample and changing, then need change corresponding general sample platform, the efficiency of sample sculpture has been reduced.

Disclosure of Invention

Aiming at the defects in the prior art, the utility model provides the sample table, which has the advantage of improving the sample engraving efficiency and breaks through the bottleneck that the measurement and calibration of the electron microscope and the sample table are integrated.

In order to solve the technical problem, the utility model is solved by the following technical scheme:

a sample table comprises a sample arrangement component, a sample table body, a magnification calibration table, a Faraday cup and a resolution measurement table, wherein the sample arrangement component, the magnification calibration table, the Faraday cup and the resolution measurement table are all arranged on the sample table body.

Optionally, the sample stage body comprises a carved sample placing area and an electron microscope adjusting area, and the height of the carved sample placing area is higher than that of the electron microscope adjusting area.

Optionally, the magnification calibration stage, the faraday cup and the resolution measurement stage are all installed in the electron microscope adjusting area.

Optionally, the sample placement assembly is mounted on the engraved sample placement area.

Optionally, the sample placement assembly comprises a positioning mechanism and a pressing mechanism, and both the positioning mechanism and the pressing mechanism are installed in the engraved sample placement area.

Optionally, the height of the positioning mechanism is higher than the height of the magnification calibration stage, the faraday cup and the resolution measurement stage.

Optionally, the positioning mechanism includes a first positioning element and a second positioning element, and the first positioning element is perpendicular to the second positioning element.

Optionally, the pressing mechanism comprises two groups of pressing pieces I and two groups of pressing pieces II, the two groups of pressing pieces I are arranged in parallel, the two groups of pressing pieces I are arranged perpendicular to the positioning piece II, and the pressing piece II is arranged perpendicular to the positioning piece I.

Optionally, a groove is formed in one side surface of the first positioning piece, which is close to the first pressing piece.

Optionally, a groove is formed in one side surface, close to the second pressing piece, of the second positioning piece.

Compared with the prior art, the technical scheme provided by the utility model has the following beneficial effects:

through add magnification calibration stand, Faraday cup and resolution ratio measuring table on sample platform body, realize that the electron microscope both can carry out the electron microscope and measure on sample platform body, can carry out sample sculpture operation again, reduce staff's work load, improve the sculpture efficiency of sample, set up on the sample platform body simultaneously and compress tightly a first and compress tightly a second for can install the sample of different specifications on the sample platform body.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a structural diagram of a sample stage according to an embodiment of the present invention;

fig. 2 is a diagram of a groove position structure of a sample stage according to an embodiment of the present invention.

Reference numerals: 1. a sample stage body; 2. a magnification calibration stage; 3. a Faraday cup; 4. a resolution measuring stage; 5. engraving the sample placing area; 6. an electron microscope adjustment region; 7. a positioning mechanism; 8. a hold-down mechanism; 9. a first positioning piece; 10. a second positioning piece; 11. a first pressing piece; 12. a second pressing piece; 13. a groove; 14. and (7) installing holes.

Detailed Description

The present invention will be described in further detail with reference to examples, which are illustrative of the present invention and are not to be construed as being limited thereto.

As shown in fig. 1, a sample stage comprises a sample placement assembly, a sample stage body 1, a magnification calibration stage 2, a faraday cup 3 and a resolution measurement stage 4, wherein the sample placement assembly, the magnification calibration stage 2, the faraday cup 3 and the resolution measurement stage 4 are all mounted on the sample stage body 1, and a plurality of mounting holes 14 are formed in the side wall of the sample stage body 1.

When the worker carves a sample, the sample platform body 1 is firstly installed on the electron microscope through the installation hole 14, and then the sample platform body 1 is controlled to rotate through the electron microscope.

When a worker needs to measure the dose of the electron beam of the electron microscope, the sample table body 1 is rotated, the Faraday cup 3 is positioned right below an electron beam emission opening of the electron microscope, and therefore the dose of the electron beam is measured through the Faraday cup 3;

when the staff need measure the resolution ratio of electronic speculum, the staff installs the standard sample of a certain resolution ratio on resolution ratio measuring table 4 earlier, then rotates sample platform body 1, makes resolution ratio measuring table 4 be located the mirror mouth of electronic speculum under, carries out the regulation of resolution ratio from the electronic speculum, and the staff can change the standard sample of different resolution ratios according to actual demand to install on resolution ratio measuring table 4, supply the mirror to adjust its resolution ratio.

When the staff need adjust the magnification of electron microscope, the staff installs the standard sample of a certain magnification on magnification calibration platform 2 earlier, then rotates sample platform body 1, makes magnification calibration platform 2 be located the electron microscope optical axis under to the electron microscope adjusts the magnification according to standard sample, makes the electron microscope can see the sample of this magnification clearly, and the staff can be according to actual demand, changes the standard sample of different magnifications.

Sample platform body 1 includes that the sculpture sample places district 5 and electron microscope regulatory region 6, the sculpture sample places the height that highly is higher than electron microscope regulatory region 6 in district 5, magnification calibration platform 2, faraday cup 3 and resolution ratio measuring table 4 are all installed in electron microscope regulatory region 6, and the sculpture sample places the up end and the magnification calibration platform 2 in district 5, faraday cup 3 and resolution ratio measuring table 4's up end on same horizontal plane, the sample is settled the subassembly and is installed and place district 5 at the sculpture sample.

When the resolution of the electron microscope and the dose measurement of the electron beam are completed and the magnification of the electron microscope is calibrated, a worker places a sample to be engraved on the engraved sample placement area 5 and fixes and compresses the sample through the sample placement member.

The sample arrangement component comprises a positioning mechanism 7 and a pressing mechanism 8, wherein the positioning mechanism 7 and the pressing mechanism 8 are both arranged in the engraving sample placement area 5, and the height of the positioning mechanism 7 is higher than the heights of the magnification calibration table 2, the Faraday cup 3 and the resolution measurement table 4.

Through setting the height difference between the height position of the positioning mechanism 7 and the height positions of the magnification calibration platform 2, the Faraday cup 3 and the resolution measurement platform 4, when an electron microscope engraves a sample, the positioning mechanism 7 isolates the magnification calibration platform 2, the Faraday cup 3 and the resolution measurement platform 4 to a certain degree, so that the sample on the engraving sample placing area 5 cannot be damaged when an electron beam is calibrated on the magnification calibration platform 2, the dose of the electron beam is measured on the Faraday cup 3 and the dose of the electron beam is measured on the resolution measurement platform 4.

As shown in fig. 2, the pressing mechanism 8 includes two sets of first pressing members 11 and second pressing members 12, the positioning mechanism 7 includes a first positioning member 9 and a second positioning member 10, the first positioning member 9 is perpendicular to the second positioning member 10, a groove 13 is formed in a side surface of the first positioning member 9 close to the first pressing member 11, and a groove 13 is formed in a side surface of the second positioning member 10 close to the second pressing member 12.

The sample that needs to carve is regular square shape, and when placing the sample that needs to carve, the staff at first with placing of sample in the vertical space that setting element one 9 and setting element two 10 formed, and two limits of the sample that needs to carve are located the recess 13 of setting element one 9 and setting element two 10 respectively to prevent through recess 13 that the sample that needs to carve from perk or pop out.

The two groups of first pressing pieces 11 are arranged in parallel, the two groups of first pressing pieces 11 are perpendicular to the second positioning piece 10, and the second pressing pieces 12 are perpendicular to the first positioning piece.

The first pressing piece 11 and the second pressing piece 12 are pressing pieces with one ends fixed on the sample table body 1, and the first pressing piece 11 and the second pressing piece 12 both have certain elasticity.

After the sample is positioned at the placing position through the first positioning piece 9 and the second positioning piece 10, if the sample needing to be carved is a sample with a small specification, the worker pulls up one end of the first pressing piece 11, so that the sample needing to be carved is positioned below the first pressing piece 11 and is pressed by the first pressing piece 11 for further fixation.

If the sample needing to be carved is a large-size sample, the worker pulls up one end of the second pressing piece 12, so that the sample needing to be carved is located below the second pressing piece 12 and is pressed by the second pressing piece 12 for further fixation.

The specification size of the sample that needs to be carved judges according to the actual sample platform body 1 on the installation position of the pressing piece 11 and the pressing piece two 12 of installation and judges to through the setting of pressing piece 11 and pressing piece two 12, improve the specification scope that the sample of sample platform body 1 was placed.

After the placement of the sample to be carved is completed, the worker controls the sample table body 1 to rotate again, so that the electron beam scans the sample to be carved on the carved sample placement area 5, and the carving action can be carried out.

In addition, it should be noted that the specific embodiments described in the present specification may differ in the shape of the components, the names of the components, and the like. All equivalent or simple changes of the structure, the characteristics and the principle of the utility model which are described in the patent conception of the utility model are included in the protection scope of the patent of the utility model. Various modifications, additions and substitutions for the specific embodiments described may be made by those skilled in the art without departing from the scope of the utility model as defined in the accompanying claims.

Claims

1. The utility model provides a sample platform, its characterized in that, settles subassembly, sample platform body, magnification calibration stand, Faraday cup and resolution ratio measuring table including the sample, sample settling subassembly, magnification calibration stand, Faraday cup and resolution ratio measuring table are all installed on the sample platform body, the sample platform body is including carving sample and placing district and electron microscope regulatory region, the height that highly is higher than electron microscope regulatory region in carving sample and placing the district.

2. The sample stage according to claim 1, wherein the magnification calibration stage, the faraday cup and the resolution measurement stage are mounted in the adjustment region of the electron microscope.

3. A sample stage according to claim 1, wherein the sample positioning assembly is mounted in the engraved sample placement area.

4. A sample stage according to claim 1, wherein the sample positioning assembly comprises a positioning mechanism and a hold-down mechanism, both of which are mounted in the engraved sample placement area.

5. The sample stage of claim 4, wherein the height of the positioning mechanism is greater than the height of the magnification calibration stage, the Faraday cup, and the resolution measurement stage.

6. The sample stage as claimed in claim 5, wherein the positioning mechanism comprises a first positioning member and a second positioning member, and the first positioning member is perpendicular to the second positioning member.

7. The sample stage according to claim 6, wherein the pressing mechanism comprises two pressing members I and two pressing members II, the two pressing members I are arranged in parallel, the two pressing members I are perpendicular to the positioning block II, and the two pressing members II are perpendicular to the positioning block I.

8. The sample stage according to claim 7, wherein a recess is formed in a side surface of the first positioning member adjacent to the first pressing member.

9. The sample stage according to claim 7, wherein a groove is formed in one side surface of the second positioning member close to the second pressing member.