TW201538232A - Coating device, coating method, and method for manufacturing display component - Google Patents

Abstract

Provided are a coating device with which it is possible to eject a constant flow of a coating liquid from a nozzle in a coating commencement area, and additionally to instantaneously eject a surplus of the coating liquid in an amount necessary to form a bead; a coating method; and a method for manufacturing a display component. Specifically, the device is provided with: a nozzle for ejecting the coating liquid; a moving means for producing relative movement of the nozzle and a coated component; a supply means for supplying the coating liquid to the nozzle; and a pressure reducing means for suctioning the coating liquid inside the nozzle. The supply means is provided with: a first supply means including a liquid feeder for feeding the coating liquid to the nozzle in a constant flow; and a second supply means having a tank that stores the coating liquid, the tank being connected to the nozzle through a flow channel, and a pressurization means for pressurizing the coating liquid in the tank and feeding the coating liquid to the nozzle.

Description

Coating device, coating method, and manufacturing method of member for display

The present invention relates to a coating apparatus and a coating method for forming a coating film on a surface of a member to be coated, and a method for producing a member for a display which is carried out by using the above coating method.

The display for a color liquid crystal includes a color filter, an array substrate for TFT (thin film transistor), and the like. The production of the color filter or the TFT array substrate includes a step of applying a coating liquid (liquid material) to a substrate to be coated and drying it to form a coating film. For example, in order to manufacture a color filter, a black photo-resist material is coated on the entire surface of the glass substrate and dried to form a black coating film. Then, after the black coating film is formed in a lattice shape by photolithography, a coating film of a red, blue, and green photo-resist material is sequentially formed between the cells by the same method.

As a coating device for forming such a coating film on a member to be coated, a slit coater is used. The slit coater includes a nozzle having a slit-shaped elongated discharge port, and the nozzle is opposed to the member to be coated while the discharge port of the nozzle is provided with a fixed gap between the nozzle and the member to be coated. The coating liquid is ejected from the nozzle of the nozzle to the member to be coated while moving at a constant speed in one direction. Thereby, a coating film having a fixed film thickness can be formed on the member to be coated.

Here, in order to manufacture a high-quality product (for example, a high-quality color filter), it is required to make the film thickness uniform over the entire area from the start of coating to the end of coating. For this reason, it is necessary to flow the coating liquid which is ejected from the nozzle to the coated member which moves at a fixed speed (per unit In order to achieve this, a piston pump (also referred to as a syringe pump) that can accurately fix the flow rate of the coating liquid to the nozzle is used (for example, see Patent Document 1).

However, even if the discharge rate of the coating liquid to the nozzle is fixed by using the piston pump, the coating liquid that is moved at a constant speed from the nozzle is "spun flow-discharged" to the coating liquid, and the area where the coating starts and ends is small (distance coating) The film thickness in the region of the range of the start/end point of the cloth is also different from the film thickness of the region in the middle of the coating, and is a so-called poor film thickness. In this case, during the application of the region in the middle of the application of the member to be coated, the liquid droplet which is the liquid of the coating liquid is stably present in the gap between the discharge port of the nozzle and the member to be coated. Maintaining a stable film thickness by a fixed size bead, for which

(1) In the coating start region, the coating liquid which is ejected from the nozzle forms a bead and is coated. Therefore, before the completion of the formation of the bead, the flow rate for coating is insufficient, and the film thickness is poor.

(2) In the coating completion region, even if the coating liquid is stopped from being ejected from the nozzle, the gradually decreasing liquid bead is applied until it is completely destroyed, resulting in a poor film thickness.

In particular, in the application start region, since the area where the film thickness is poor is small, in addition to the above-mentioned "constant flow rate discharge" of the coating liquid from the nozzle, it is attempted to apply the amount required to form the liquid bead. "Excessive ejection" in which the liquid is excessively ejected (for example, refer to Patent Document 2).

In Patent Document 2, in order to realize the excessive discharge named "positive pulse", a displacement piston is provided in the nozzle, and a fixed flow rate of the coating liquid is sent to the nozzle by the pump, and the displacement piston is fixed. The distance is rapidly actuated, whereby the coating liquid in the nozzle is extruded in a fixed amount.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2000-334355

[Patent Document 2] Japanese Patent Laid-Open No. Hei 4-61958

However, in the case of shifting the piston, even if the shifting piston starts to operate with the start signal as a trigger, the increase in the operation or the decrease in the stop is delayed, resulting in a time-consuming excessive discharge. Therefore, in order to make the defective film thickness region smaller than the allowable value, it is necessary to reduce the moving speed of the member to be coated, that is, the coating speed, so that high-speed coating cannot be performed and productivity cannot be improved. That is, in the known method, the instantaneous excessive discharge in the coating start region cannot be achieved, so that the coating speed cannot be increased, the production time is shortened, the productivity is improved, and the defective film thickness region cannot be made small and the film thickness is made uniform. The area of high quality products has become larger.

Therefore, the present invention provides a method of coating a product region having a small film thickness region and expanding a uniform film thickness and high quality at a high speed and high productivity, except that a constant flow rate is ejected from the nozzle at the coating start region. In addition to the coating liquid, a coating device and a coating method for instantaneously ejecting a coating liquid in an amount required for forming a bead may be used, and the present invention provides a method for producing a member for a display using the coating method.

(1) The coating apparatus of the present invention is characterized by comprising: a nozzle that ejects a coating liquid to a member to be coated; and a moving device that moves the nozzle relative to the member to be coated; and supplies the device to the above a nozzle supply coating liquid; and a pressure reducing device for performing suction of the coating liquid in the nozzle; and the supply device includes: a first supply device including a coating at a fixed flow rate to the nozzle a liquid supply device; and a second supply device, comprising: a storage tank that accumulates the coating liquid and is connected to the nozzle via a flow path; and a pressurizing device for performing the coating liquid of the storage tank The coating liquid is pressurized and sent to the nozzle.

According to the present invention, when the supply device is started to be applied, in addition to the application of the liquid film to the nozzle at a fixed flow rate in order to form a coating film having a fixed film thickness, the coating device can be coated with the pressurizing device. The liquid is pressurized and sent out in excess at high speed, so it is the same as the previous one. In the case of a displacement piston, it is possible to eject the coating liquid excessively from the nozzle in a shorter time, that is, instantaneously.

Further, since the nozzle and the member to be coated are moved in one direction while being opposed by the moving means, when the application of the coating liquid to the nozzle is stopped at the end of the application, the nozzle is sprayed. A coating liquid that becomes a liquid bead remains between the outlet and the member to be coated, and the area of the poor film thickness in the coating end region does not become small. However, according to the present invention, since the decompression device can instantaneously perform the suction of the coating liquid in the nozzle in cooperation with the end of the coating, the discharge port remaining in the nozzle can be coated at the end of the coating. The liquid droplets (coating liquid) between the members are sucked into the nozzle to instantaneously break them. Therefore, the area of the poor film thickness in the coating end region can be made small.

(2) Further, the storage tank may be connected to a flow path of the first supply device from the nozzle to the liquid supply device. In this case, the first supply device has a nozzle connected thereto. One of the flow paths serves as a flow path from the storage tank to the nozzle of the second supply device.

(3) Alternatively, the liquid supply device may be connected to a first flow path extending from the nozzle, and the storage tank may be connected to an independent second flow path different from the first flow path extending from the nozzle. Composition. In this case, at the start of the application, the coating liquid for performing the constant flow rate discharge using the first supply means can be supplied to the nozzle and the second supply means can be used for the application of the excess discharge. Since the supply of the liquid to the nozzles is performed independently of each other in the completely independent flow paths, the responsiveness is improved, and the excessive discharge of the coating liquid in a shorter time can be easily realized.

(4) Alternatively, the storage tank may be connected to a flow path between the nozzle and the liquid supply device of the first supply device via a joint, and the joint may include a first joint therein. a flow path connected to the flow path of the first supply device; and a second joint flow path that is 5 to 75 degrees from the connection point with the first joint flow path with respect to the first joint flow path An angle extending toward the liquid feeder side of the flow path of the first supply device and connected to the second supply device; and further, the first supply device at the distance from the joint A valve having a flow path length of 50 mm or less on the nozzle side of the flow path is provided, and the valve supplies and stops the application liquid from the liquid supply device and the storage tank to the nozzle.

According to this, at the time of starting the coating, the coating liquid can be sent out at a high speed from both the liquid supply device and the storage tank in a very short time, so that the coating liquid can be applied from the nozzle in a very short time. Excessive ejection in a pulsed manner. Therefore, the area of the poor film thickness in the coating start region can be made smaller.

(5) Further, preferably, the second supply device further includes a supply stop valve that is provided in a flow path between the storage tank and the nozzle and that performs coating in the storage tank The start and stop of the delivery of liquid to the nozzle. In this case, when the supply stop valve is opened, the coating liquid is instantaneously sent to the nozzle, so that excessive instantaneous discharge can be performed.

(6) In the above (5), preferably, the second supply device further includes a suction device provided in a flow path between the supply stop valve and the nozzle and suctioning the suction device The coating solution for the flow path. In this case, when the supply stop valve is opened while the coating liquid in the storage tank is pressurized at a higher pressure, the coating liquid is sent to the nozzle in a shorter period of time, but it is more than necessary. Excessive delivery, the excess portion is removed by suction of the coating liquid by the suction means, and as a result, it can be excessively ejected from the nozzle in a shorter time. Further, after the excess discharge, the liquid feeder that directly receives the first supply device feeds the coating liquid at a constant flow rate to the nozzle.

(7) The present invention is characterized by the method of applying a coating liquid to a member to be coated using the coating apparatus according to any one of the above (1) to (6), and comprising: a coating start step And the operation of supplying the coating liquid to the nozzle at a fixed flow rate by the first supply means is started, and the coating liquid is supplied to the nozzle by the second supply means at a specific time. Thereafter, the application of the second supply device to the coating liquid of the nozzle is stopped, and the coating is started; the intermediate step of coating is performed by the first supply device at a fixed flow rate. a supply of the coating liquid; and a coating end step of stopping the supply of the coating liquid by the first supply means, and starting the coating liquid in the nozzle by the pressure reducing means The suction is stopped after a certain time and the application to the above-mentioned coated member is ended.

According to the present invention, the same effects as those of the coating apparatus of the above (1) can be exhibited, and in the coating start step, the liquid droplets can be instantaneously ejected from the nozzle to form a liquid bead, and in the coating end step, The coating was terminated by instantaneously breaking the beads.

(8) Further, preferably, in the coating start step, the nozzle is performed in the nozzle by the pressure reducing device simultaneously with the stop of the supply of the coating liquid by the second supply device The suction of the coating liquid. Thereby, the same effects as those of the coating apparatus of the above (6) can be exhibited, and the coating liquid can be excessively ejected from the nozzle in a shorter period of time.

(9) Further, in the coating start step, preferably, the coating in the flow path connected to the storage tank is performed simultaneously with the stop of the supply of the coating liquid by the second supply means. Liquid suction. Thereby, the same effects as those of the coating method of the above (8) can be exhibited, and the coating liquid can be excessively ejected from the nozzle in a shorter period of time.

Further, in the method for producing a member for a display of the present invention, the coating member is manufactured from the member to be coated by the coating method according to the above (7) to (9).

According to the above coating method used in the present invention, as described above, in the coating start step, the liquid droplets can be instantaneously ejected from the nozzle to form a liquid bead, and in the coating end step, the liquid bead can be instantaneously made. The coating was terminated by destruction. Thereby, even in the case of high-speed coating, the area of the film thickness in the application start region and the application end region of the member to be coated can be made small, and the display having high quality can be manufactured with high productivity and at low cost. member.

According to the coating apparatus and the coating method of the present invention, in addition to the coating liquid which is ejected from the nozzle at a constant flow rate in the coating start region of the member to be coated, the amount of the coating liquid required for the formation of the bead can be instantaneously excessive. Sprayed out and pumped to the spray in the end of the coating The liquid bead is instantaneously destroyed inside the mouth. Therefore, it is possible to increase the coating speed and shorten the production distance by making the area of the coating film in the coating start region and the coating end region extremely small and expanding the uniform film thickness and high quality. Time and productivity, and can be easily achieved.

According to the manufacturing method of the present invention, since the member for display is manufactured by the above-described excellent coating method, a member for display having high quality can be manufactured with high productivity and low cost.

1‧‧‧ Coating device

2‧‧‧ Coating solution

3‧‧‧ platform

4‧‧‧Control device

5‧‧‧ nozzle

6‧‧‧Management

7‧‧‧Spray flow path

7a‧‧‧Spray outlet

8‧‧‧Mobile devices

8a‧‧‧linear motor

8b‧‧‧Guiding components

9‧‧‧ Lifting mechanism

10‧‧‧Supply device

11‧‧‧Flow

11a‧‧‧1st flow path

11b‧‧‧2nd flow path

12‧‧‧ pump (feeder)

13‧‧‧Intermediate storage tanks (storage tanks)

14‧‧‧ Pressurized device

15‧‧‧Intermediate valve

15a‧‧‧Upstream side intermediate valve

15b‧‧‧ downstream side intermediate valve

16‧‧‧Upstream side tank

16a‧‧‧ Pressurized device

17‧‧‧ downstream side valve

18‧‧‧Upstream side valve

19a‧‧‧ joint part

19b‧‧‧ joint part

19c‧‧‧flow section

20‧‧‧Filter

40‧‧‧Relief device

41‧‧‧Suction pump (decompression section)

42‧‧‧Reducing flow path

43‧‧‧1st decompression valve

44‧‧‧2nd decompression valve

46‧‧‧ adjuster

50‧‧‧Starting decompression device

51‧‧‧Suction pump (decompression section)

52‧‧‧Decompression flow path

53‧‧‧1st decompression valve

54‧‧‧2nd decompression valve

56‧‧‧ adjuster

61‧‧‧1st supply device

62‧‧‧2nd supply device

70‧‧‧Suction device

71‧‧‧Suction pump (suction unit)

72‧‧‧sucking flow path

73‧‧‧1st suction valve

74‧‧‧2nd suction valve

76‧‧‧ adjuster

80‧‧‧ connector

81‧‧‧1st joint flow path

82‧‧‧2nd joint flow path

83‧‧‧ dispenser side connection point

84‧‧‧Nozzle side connection point

85‧‧‧2nd supply device connection point

86‧‧‧Internal connection points

200‧‧‧ Coating device

B‧‧‧Liquid beads

G‧‧‧ gap

LP‧‧‧Flow length

M‧‧·film

M1‧‧·coating film

M2‧‧·film

Q‧‧‧Flow

t‧‧‧Time

T‧‧‧ film thickness (film M)

W‧‧‧Substrate (coated component)

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

θ‧‧‧An angle of the second joint flow path with respect to the first joint flow path

Fig. 1 is a schematic view showing the schematic configuration of a coating apparatus of the present invention.

2(A) to 2(C) are flowcharts showing the coating operation of the coating device shown in Fig. 1.

3(A) to 3(C) are flowcharts showing the coating operation of the coating device shown in Fig. 1.

4(A) to 4(C) are flowcharts showing the coating operation of the coating device shown in Fig. 1.

5(A) and 5(B) are flowcharts showing the coating operation of the coating device shown in Fig. 1.

6(A) to 6(D) are line diagrams showing temporal changes in the discharge flow rate of the nozzle at the start of coating.

Fig. 7 is a schematic view showing a schematic configuration of a coating device (another embodiment).

Fig. 8 is a schematic view showing a schematic configuration of a coating apparatus (another aspect).

Fig. 9 is a schematic view showing the schematic configuration of another coating apparatus of the present invention.

10(A) to (C) are flowcharts showing the coating operation of the coating device shown in Fig. 9.

11(A) to (C) are flowcharts showing the coating operation of the coating device shown in Fig. 9.

12(A) to (C) are flowcharts showing the coating operation of the coating device shown in Fig. 9.

13(A) and 13(B) are flowcharts showing the coating operation of the coating apparatus shown in Fig. 9.

Fig. 14 is an explanatory view showing the configuration of a coating device, (a) is a view from the front, and (b) is a view from the side.

Fig. 15 is a schematic view showing the schematic configuration of still another coating apparatus of the present invention.

Fig. 16 is a schematic view showing a part of the coating apparatus in an enlarged manner.

Fig. 17 is an explanatory view showing a coating start operation of the coating device.

Hereinafter, embodiments of the present invention will be described based on the drawings.

Fig. 1 is a schematic view showing a schematic configuration of a coating apparatus 1 of the present invention. The coating device 1 is a device that applies a coating liquid 2 to the surface of a substrate W as a member to be coated, and a coating film M1 and a coating film M2 formed by the coating liquid 2 are formed on the substrate W. The coating device 1 includes a nozzle 5 that ejects the coating liquid 2 to the substrate W, a supply device 10 that supplies the coating liquid 2 to the nozzle 5, and a moving device 8 that makes one of the nozzle 5 and the substrate W Or both move in the horizontal direction; and a pressure reducing device 40 that sucks the coating liquid 2 in the nozzle 5. Further, the coating device 1 includes a control device 4 including a computer, and the control device 4 is a mechanism (the moving device 8, the supply device 10 including the valves, and the decompression device 40 including the valves) included in the coating device 1. Perform motion control.

Fig. 14 is an explanatory view showing the configuration of the coating device 1, wherein (a) is a view from the front, and (b) is a view from the side. In Fig. 14(a), the nozzle 5 has therein a manifold 6 which extends in the longitudinal direction (Y direction) perpendicular to the plane of the paper, and a discharge flow path 7 which is connected to the manifold 6. The manifold 6 is for accumulating the coating liquid 2 supplied from the supply device 10, and is equally distributed in the longitudinal direction and then sent to the expanded space of the discharge flow path 7, and the discharge flow path 7 is for discharging the coating liquid to the substrate W. The flow path. The end portion of the discharge flow path 7 on the side opposite to the side of the manifold 6 serves as the discharge port 7a of the coating liquid 2, and the coating liquid 2 is discharged from the discharge port 7a. The discharge flow path 7 may be an elongated slit-shaped flow path, or may be a flow path including a plurality of holes, and in the case of a slit shape, a planar coating film M is formed, which is a plurality of holes. In the case, a stripe-shaped coating film M is formed.

In the present embodiment, the moving device 8 includes a platform 3 that fixes the substrate W by suction or the like, a linear motor 8a for moving the stage 3, and a guiding member 8b that guides the platform in the X direction. 3. The moving device 8 can move the stage 3 on which the substrate W is placed in one direction (X direction) with respect to the nozzle 5. Further, it is also possible to adopt a configuration in which the stage 3 is fixed and the nozzle 5 side is moved in the horizontal direction with respect to the stage 3.

Further, the nozzle 5 can be moved in the vertical direction (Z direction of FIG. 14(a)) by the elevating mechanism 9. Thereby, the gap G of the gap between the discharge port 7a of the nozzle 5 and the substrate W can be adjusted. Further, the elevating mechanism 9 includes a motor 9a that is controlled by the control device 4 (see FIG. 1), a screw 9b that is rotated by the motor 9a, and a nut unit 9c that is screwed to the motor 9a. Screw 9b. The nozzle unit 5 is fixed to the nut unit 9c, and the nut unit 9c is moved up and down along the screw 9b by the forward and reverse rotation of the screw 9b, thereby moving the nozzle 5 up and down. When the ejecting port 7a of the nozzle 5 is brought close to the substrate W by the elevating mechanism 9 to form a gap of the gap amount G, the stage 3 on which the substrate W is placed is moved at a constant speed V in one direction (X direction), and the nozzle is moved from the nozzle. When the discharge port 7a of the 5 is discharged at a constant flow rate Q, the liquid droplet B is first formed between the discharge port 7a of the nozzle 5 and the substrate W, and then the liquid bead B is used as the starting point with the movement of the substrate W. The coating liquid 2 is applied to form a coating film M having a film thickness T. Furthermore, the flow rate as referred to herein is the capacity of the coating liquid flowing per unit time. Then, when the coating width (length in the Y direction) is CW, the film thickness T is calculated by T=Q/(V×CW). In the present embodiment, the coating liquid 2 is intermittently ejected from the discharge port 7a of the nozzle 5 while the one substrate W and the nozzle 5 are moved in one direction, whereby intermittent application can be performed. Thereby, as shown in FIG. 1, a plurality of independent coating films M1 and M2 are formed on the substrate W along the moving direction.

Further, in the case of such a coating operation, when the stage 3 is moved in one direction and all the coating operations are completed, the stage 3 moves in the opposite direction and returns to the initial state.

In FIG. 1, the supply device 10 has a first supply device 61 and a second supply device 62. The first supply device 61 includes a flow path 11 connected to the nozzle 5 (manifold 6), and a pump 12 as a liquid supply device that sends the coating liquid 2 to the nozzle 5 (manifold 6) via the flow path 11. The second supply device 62 includes an intermediate storage tank 13 that is a storage tank that stores the coating liquid 2, and a pressurizing device 14.

The flow path 11 is mainly composed of a resin pipe (a resin-made pipe), and the flow path 11 includes a joint for connecting the respective devices. Further, the piping constituting the flow path 11 may be made of metal other than resin.

The pump 12 is a constant capacity pump having a function of delivering the coating liquid 2 to the nozzle 5 at a fixed flow rate. The pump 12 of the present embodiment is a syringe pump having the same structure as a syringe.

The intermediate storage tank 13 constituting the second supply device 62 is connected to the flow path 11 of the first supply device 61 from the nozzle 5 to the pump 12 at a position of the joint portion 19a. Further, the intermediate storage tank 13 is connected to the above-described flow path 11 via the intermediate valve 15.

The intermediate valve 15 belongs to the second supply device 62 and is disposed on the flow path between the intermediate storage tank 13 and the nozzle 5, and the intermediate valve 15 is used together with the downstream side valve 17 described below as the intermediate storage tank 13 The supply liquid 2 in the inside of the coating liquid 2 functions to supply and stop the supply stop valve.

The pressurizing means 14 is constituted by a pressurizer that supplies compressed air to the intermediate storage tank 13, by which the internal pressure of the intermediate storage tank 13 can be increased. The pressurizing device 14 pressurizes the coating liquid 2 in the intermediate storage tank 13, and in the state where the intermediate valve 15 and the downstream side valve 17 are opened, the coating liquid in the intermediate storage tank 13 can be pressurized by the pressurization. 2 is sent to the nozzle 5 (pressure feed). When the intermediate valve 15 is closed, the delivery of the coating liquid 2 in the intermediate storage tank 13 is stopped. Further, the pressing pressure of the pressurizing device 14 is arbitrarily set. The flow rate of the coating liquid 2 in the intermediate storage tank 13 to the nozzle 5 can be determined by the magnitude of the pressure. Of course, the higher the set pressure is, the larger the flow rate is. For example, when the downstream valve 17 is turned from the closed state to the open state and the coating liquid 2 is sent out, the rise is also fast until the fixed flow rate is reached (the rise time is short).

Further, a downstream side valve 17 is provided at a position on the downstream side of the joint portion 19a of the flow path 11 which is in contact with the intermediate storage tank 13 and the joint portion 19b which is in contact with the pump 12, that is, on the nozzle 5 side. . By opening the downstream side valve 17, the coating liquid 2 can be supplied from the pump 12 and the intermediate storage tank 13 to the nozzle 5, and the supply of the coating liquid 2 can be stopped by closing the downstream side valve 17.

The supply device 10 of the present embodiment further includes an upstream side storage tank 16 for storing the coating liquid 2, and the nozzle 5 and the upstream side storage tank 16 are connected by the flow path 11. An upstream side valve 18 and a filter 20 are provided on the upstream side storage tank 16 side of the flow path 11. The upstream side storage tank 16 is provided with the same pressurizing means 16a as the intermediate storage tank 13, and the pump 12 and the intermediate storage tank 13 can be supplemented with the coating liquid 2.

Further, the flow path length from the discharge flow path 7 of the nozzle 5 to the intermediate storage tank 13 is constituted as The flow path length from the discharge flow path 7 to the upstream side storage tank 16 is shorter, and the flow path length from the discharge flow path 7 to the pump 12 is further shortened.

According to the first supply device 61 having the supply device 10 of the pump 12, the coating liquid 2 is sent to the nozzle 5 at a fixed flow rate Q by the pump 12, so that the nozzle 5 (the discharge flow path 7) can be ejected at a constant flow rate Q. "Constant flow rate discharge" of the coating liquid 2. Further, the coating liquid 2 in the intermediate storage tank 13 is pressurized by the pressurizing means 14 of the second supply means 62, which will be described later, when the discharge of the coating liquid 2 from the nozzle 5 is started. In addition to the above-described "constant flow discharge" by the pump 12, "excess discharge" in which the coating liquid 2 is excessively discharged can be performed.

Next, the pressure reducing device 40 of the present embodiment has a suction pump 41 as a pressure reducing portion that performs a pumping operation of the coating liquid 2 inside the nozzle 5 (manifold 6), and the pressure reduction (suction force) can be freely adjusted. The regulator 46 includes a pressure reducing passage 42 that connects the nozzle 5 (the manifold 6) to the suction pump 41, and a plurality of (two) first pressure reducing valves 43 and a second pressure reducing valve 44. The first pressure reducing valve 43 and the second pressure reducing valve 44 are disposed in series in a single pressure reducing flow path 42. The first decompression valve 43 and the second decompression valve 44 are opened and closed by the control device 4, and the details will be described later, and the coating liquid in the nozzle 5 is performed. The action of suction start and suction stop. Further, the regulator 46 is constituted by, for example, a vacuum pressure setting device (vacuum regulator) or a pressure regulating valve, and the pressure reduction can be freely set by an electric signal. The suction flow rate of the coating liquid in the nozzle 5 can be adjusted by changing the pressure reduction. Further, of course, when the depressurization pressure is set to be high, the suction flow rate of the coating liquid 2 in the nozzle 5 becomes high.

In the coating method using the coating device 1 having the above configuration, each step shown in the following (A1) to (A12) will be described in order with reference to FIGS. 2 to 5 . 2 to 5 show a coating operation of the coating device 1 when two (two-sided) coating films M, that is, a coating film M1 and a coating film M2 are formed on the substrate W by intermittent coating (coating method) ) The flow chart. Further, "open" and "closed" which are marked in the vicinity of the valves in the drawings indicate the open and close states of the respective valves. Further, when the upward arrow is indicated on the right side of the pump 12, the pump 12 is operated.

(A1) Coating preparation step (refer to FIG. 2(A))

Prepare before starting the coating. In a state in which all the flow paths constituting the nozzle 5 and the supply device 10 are filled with the coating liquid, the downstream side valve 17 is closed, the upstream side valve 18 is opened, the intermediate valve 15 is opened, and the pressurizing device 16a is actuated. The coating liquid 2 of the upstream side storage tank 16 is extruded by pressure, and the coating liquid 2 is replenished to the pump 12 and the intermediate storage tank 13 via the filter 20 (refer to FIG. 1). Further, since the pump 12 is a syringe pump, the piston is operated on the suction side, and the coating liquid 2 capable of coating one (two or more) substrates W is filled into the syringe. Further, the substrate W is placed on the stage 3 at an initial position (X = X0) from the nozzle 5 in the X direction. Further, in the decompression device 40, the first decompression valve 43 is closed, the second decompression valve 44 is opened, the suction pump 41 is actuated, and the regulator 46 sets the decompression pressure PVE at the end of coating.

(A2) First coating start preparation step (refer to FIG. 2(B))

Preparation for coating of the coating film M1 is performed. The upstream side valve 18 is closed at the point of completion of the replenishment of the coating liquid 2 in the previous step. Then, the coating liquid 2 of the intermediate storage tank 13 is pressurized at a specific pressure P by the pressurizing means 14. At the same time, the elevating mechanism 9 is operated, and the nozzle 5 is lowered so that the gap between the ejection port 7a of the nozzle 5 and the substrate W becomes the gap amount G. Then, while the downstream side valve 17 is closed and the intermediate valve 15 is opened, the pump 12 is driven to rise, and the coating liquid 2 is sent from the pump 12 to the flow path 11 at a constant flow rate Q. The supplied coating liquid 2 is directed toward the intermediate storage tank 13 against the pressure P.

(A3) First coating start step 1 (refer to FIG. 2(C))

The coating of the coating film M1 was started. When the stage 3 is driven, the substrate W is moved at a fixed speed V. When the application start position (X=X1) of the coating film M1 of the substrate W reaches the discharge port 7a of the nozzle 5, the downstream side valve 17 is opened. In this way, in the region where the application of the substrate W is started (the region within a range of several millimeters from the application start position), in addition to the constant flow rate of the flow rate Q of the coating liquid 2 by the pump 12 by the pump 12, Excessive ejection of the coating liquid 2 of the intermediate storage tank 13 is also performed by pressurization of the pressure P of the pressurizing means 14. As a result, the liquid bead B was started to be formed, and coating was also started. Furthermore, the speed V becomes the coating speed.

(A4) First coating start step 2 (refer to FIG. 3(A))

After the downstream valve 17 is opened and the coating is started, the intermediate valve 15 is closed after a certain period of time, and the excessive discharge from the nozzle 5 is stopped. As a result, the formation of the liquid bead B is completed, and it is of a specific size, and is ejected from the nozzle 5 at a constant flow rate of the flow rate Q. Therefore, the film thickness of the coating film M1 reaches the film thickness T. Therefore, the coating film M1 having a specific film thickness T is formed from this point on. Here, the first decompression valve 43 of the decompression device 40 may be opened simultaneously with the closing of the intermediate valve 15, and the second decompression valve 44 may be closed after a certain period of time. Thereby, the excessive discharge can be stopped in a shorter time than when the intermediate valve 15 is closed. In the case where the decompression device 40 is used in this step, in the (A1) coating preparation step, the regulator 46 is used to set the depressurization voltage PVS at the start of coating. Then, after the completion of the step (A4), the first decompression valve 43 is closed for the preparation of the next step, and then the second decompression valve 44 is opened, and then the regulator 46 is set to be coated. The pressure reduction PVE at the end.

(A5) First coating intermediate step (refer to FIG. 3(B))

The substrate W is continuously moved at the velocity V, and the coating liquid 2 is ejected from the nozzle 5 at a constant flow rate Q from the nozzle 5, so that stable coating can be performed to form the coating film M1 having the film thickness T.

(A6) First coating end step (refer to FIG. 3(C))

When the coating end position (X=X2) of the coating film M1 of the substrate W reaches directly below the ejection port 7a of the nozzle 5, the downstream side valve 17 is closed, and the opening of the intermediate valve 15 and the decompression device 40 are performed. 1 The opening of the pressure reducing valve 43. Then, after the specific time period in which the first pressure reducing valve 43 is opened, the second pressure reducing valve 44 is closed, and the suction at the end of the coating is completed. According to the above, the constant flow rate of the coating liquid 2 to the substrate W is discharged (interrupted), and the liquid droplet B is sucked to the nozzle 5 via the discharge port 7a by the pressure reducing device 40, so that the liquid bead B instantaneously The coating is completed by the destruction, and the formation of the coating film M1 is also completed. Further, the pump 12 continues to operate regardless of the above operation, and the coating liquid 2 is continuously sent to the intermediate storage tank 13 at the flow rate Q by the opening of the intermediate valve 15.

(A7) Second coating start preparation step (refer to FIG. 4(A))

Preparation for coating of the next coating film M2 is performed. The second decompression valve 44 is opened after the first decompression valve 43 is closed in parallel with the movement of the speed W of the substrate W. The pump 12 is continuously driven.

(A8) Second coating start step 1 (refer to FIG. 4(B))

The coating of the coating film M2 was started. When the application start position (X=X3) of the coating film M2 of the substrate W which is moved at the speed V reaches the discharge port 7a of the nozzle 5, the downstream side valve 17 is opened. Thereby, in addition to the constant flow rate of the flow rate Q from the nozzle 5 by the pump 12, the excess pressure of the coating liquid 2 of the intermediate storage tank 13 is performed by the pressure P of the pressurizing device 14 . The formation of the bead B was started, and coating was also started.

(A9) Second coating start step 2 (refer to FIG. 4(C))

After the downstream side valve 17 is opened and the application is started, the intermediate valve 15 is closed after a certain period of time, and the excessive discharge from the nozzle 5 is stopped. Thereby, the formation of the bead B is completed to a specific size, and the film thickness of the coating film M2 reaches the film thickness T.

Here, the first decompression valve 43 of the decompression device 40 may be opened simultaneously with the closing of the intermediate valve 15, and the second decompression valve 44 may be closed after a certain period of time. Thereby, the ejection is stopped in a shorter time. When the pressure reducing device 40 is used in this step, in the second coating start preparation step (A7), the regulator 46 is used to set the pressure reduction PVS at the start of coating. Then, after the end of the step (A9), after the first decompression valve 43 is closed, the second decompression valve 44 is opened, and then the regulator 46 is set to the depressurization pressure PVE at the end of coating.

(A10) Second coating intermediate step (refer to FIG. 5(A))

The substrate W is continuously moved at the velocity V, and the coating liquid 2 is ejected from the nozzle 5 at a constant flow rate Q from the nozzle 5, so that the coating film M2 having the film thickness T is formed.

(A11) Second coating end step (refer to FIG. 5(B))

When the coating end position (X=X4) of the coating film M2 of the substrate W reaches directly below the ejection port 7a of the nozzle 5, the downstream side valve 17 is closed, and the opening and decompression of the intermediate valve 15 is performed. The first decompression valve 43 of the device 40 is opened. Then, after the specific time period in which the first decompression valve 43 is opened, the second decompression valve 44 is closed and the suction is completed. According to the above, the constant flow rate of the coating liquid 2 to the substrate W is completed, and the liquid droplet B is sucked into the nozzle 5 through the discharge port 7a by the pressure reducing device 40, so that the liquid bead B is instantaneously broken. At the end of the coating, the formation of the coating film M2 is also completed. Then, the pump 12 is stopped.

(A12) Preparation step after coating is completed

After the application is completed, the substrate W continues to move at the speed V, and if it reaches the end position (X = X5), it stops. Further, the coated substrate W is taken out and carried out to the next step (drying step), and the stage 3 is moved in the reverse direction to return to the initial position (X = X0).

Thereafter, the coating of the next substrate W is repeated from the (A1) coating preparation step.

In the above coating method, at the start of coating ((A3, A4) first coating start steps 1, 2 and (A8, A9) second coating start steps 1, 2), except from the nozzle 5 In addition to the constant flow rate of the coating liquid 2 by the pump 12, the excess discharge of the coating liquid 2 of the intermediate storage tank 13 from the nozzle 5 is performed by the pressurization of the pressurizing means 14, so that it can be instantaneously The liquid bead B is formed, and further, it can be transferred to the stable coating immediately after the formation of the liquid bead B, so that the film thickness region which does not become the film thickness T can be made small. This case will be described in further detail using FIG. 6.

Fig. 6 is a line diagram showing temporal changes in the discharge flow rate of the nozzle 5 at the start of coating. In Fig. 6(A), the broken line is the case where no excessive discharge is performed and only a constant flow rate is performed by the pump 12, and after the downstream side valve 17 is opened at time t=0, the discharge flow rate from the nozzle 5 gradually rises to the flow rate. Since Q is completed, t=t3 is required until the liquid crystal B is formed to start the formation of the coating film M having the film thickness T. That is, the region of the film thickness which is not the film thickness T is the range from the start of coating to t=t3, and the size (length) thereof can be calculated by the moving speed V×t3 of the stage 3. On the other hand, the solid line is a portion that is excessively ejected by pressurization of the pressure P of the pressurizing device 14 in addition to the constant flow rate. Therefore, after the downstream side valve 17 is opened at t=0, the intermediate valve is made at t=t1. 15 is closed, and the flow rate of the flow rate Q is ejected at t=t2. In this case, the diagonal line is more than the flow rate Q. The minute indicates an excessive discharge, and the area (time integral of the flow rate change) becomes an excessive discharge amount. This excess discharge amount is used to form the liquid bead B, so that the coating film M having the film thickness T is formed from t=t2. Therefore, the size of the defective film thickness region which is not the film thickness T is V × t2, which is smaller than the case where only a constant flow rate is ejected.

Next, Fig. 6(B) shows a case where the pressure of the pressurizing device 14 is greater than the pressure P1 of the pressure P, and when the downstream side valve 17 is opened at t=0, it is supplied not only from the intermediate storage tank 13 to the nozzle 5 but also to the nozzle 5 The traffic has increased, and the rise has also increased. Therefore, the intermediate valve 15 is closed at t = t4 smaller than t1, and even if the coating liquid located upstream of the intermediate valve 15 can be stopped, the coating liquid for excessive ejection through the intermediate valve 15 is due to inertial force or flow path. The residual pressure (the difference between the pressure P1 and the pressure in the flow path at the time of the constant flow rate discharge) does not immediately stop the flow until the excessive discharge stops, and takes more than t5 of the time t2 when the pressure P is reached. When the pressure P1 is excessively ejected, the size of the film thickness region which is thicker than the film thickness T is V × t5, which is larger than the size V × t2 of the film thickness region when the pressure P is excessively discharged. Therefore, there is a case where the pressure P is increased and the flow rate of the excessive discharge is increased, and the defective film thickness region cannot be made small.

On the other hand, as shown in the preferred example of the above coating method, the pressure reducing device 40 is used at the start of coating as shown in Fig. 6(C). That is, in the state of the pressure P1 of the pressurization of the pressurizing device 14, the downstream side valve 17 is opened at t=0, then the intermediate valve 15 is closed at t=t4, and the first of the decompression devices 40 is turned The pressure reducing valve 43 is opened. Thereby, the amount of coating liquid for excessive ejection from the nozzle 5 can be sucked from the nozzle 5 by the pressure reduction PVS of the decompression device 40, and the excessive ejection from the nozzle 5 is stopped at t=t6 less than t2. Only the constant flow rate is ejected, whereby the coating film M having the film thickness T can be formed. Then, at the start of coating, the size of the defective film thickness region when the pressure-reducing device 40 is used is V × t6 and can be minimized. According to the present invention, since the time t6 at which the excessive discharge can be made is extremely small, even if the moving speed, that is, the coating speed V, is increased, the size of the defective film thickness region determined by V × t6 can be kept extremely small. In other words, in the case where the defective film thickness region is made small and the product region is enlarged, it can be performed in a state of high speed coating and improved productivity.

Further, the operation of opening the first decompression valve 43 may be made to be the same as before and after t=t4 with respect to closing the intermediate valve 15 at t=t4. As long as it is combined with the magnitude of the reduced pressure PVS, the timing can be adjusted so that the time t6 at which the excessive discharge is stopped is minimized. Further, the time t6 until the excessive discharge is stopped can be made larger by the pressure P1 of the pressurization of the pressurizing device 14 for the excessive discharge, and also by the coating set by the adjuster 46 of the decompression device 40. When the pressure reduction PVS is increased, the suction time of the pressure reduction is adjusted (the time from when the first pressure reducing valve 43 is opened to the time when the second pressure reducing valve 44 is closed) is small, and the result is The area of poor film thickness is as small as the limit. However, if the adjustment is insufficient, for example, under the same operating conditions as in FIG. 6(C), the suction time of the pressure reduction is performed (the first pressure reducing valve 43 is opened until the second pressure reducing valve 44 is closed). When the time is longer, it becomes FIG. 6(D). That is, the time t7 at which the excessive discharge is stopped is less than t6, but the suction flow rate of the nozzle 5 is less than the flow rate Q, and the discharge flow rate is excessively small, and it takes too much t8 to be greater than t6 until it returns to the flow rate Q again. In this case, the size of the defective film thickness region becomes V × t8 and becomes larger than V × t6 when the suction time is appropriate. In order to make the area of the poor film thickness as small as possible, it is necessary to carry out an excessive amount of ejection in an appropriate amount in a very small time based on the flow rate of the flow rate Q, so that too little ejection does not occur. Since the excessive discharge is judged as a positive pulse of the flow rate based on the flow rate Q, the negative pulse which is determined to be the flow rate is too small to be ejected. Therefore, in other words, in order to make the defective film thickness region to the limit, flow must be generated. A very small positive pulse, without generating a negative pulse of flow.

In order to carry out an appropriate amount of excess discharge in a very small time, it is required that the supply time of the intermediate storage tank 13 to the nozzle 5 from the excessive discharge or the suction time of the decompression device 40 is also extremely small. In the present invention, in order to minimize the supply time of the intermediate storage tank 13 to the nozzle 5 at the time of excessive discharge, the downstream side valve 17 and the intermediate valve 15 are provided, and the downstream side valve 17 is used for 2 The supply device 62 starts a valve for opening the supply of the coating liquid to the nozzle 5, and the intermediate valve 15 is disposed in series with the downstream side valve 17 and is operable independently of the downstream side valve 17 to stop the nozzle 5 A valve for closing the supply of the coating liquid. Again, in order to make The pumping time of the pressure device 40 is also extremely small. As the pressure reducing valve of the pressure reducing device 40, the first pressure reducing valve 43 for opening the suction of the coating liquid and the first pressure reducing valve are provided. The valve 43 is disposed in series and is operable to independently stop the first pressure reducing valve and to close the second pressure reducing valve 44 for closing the suction of the coating liquid. In other words, when the valve is closed, opened, and closed by one valve, the supply time and the suction time cannot be made smaller than the operation time of the valve, but the series connection is independently and relatively performed as in the present invention. The opening of the valve for opening and the opening and closing of the valve for opening and closing can make the supply time and the suction time extremely small.

Further, in the above coating method, when the application is completed (the first application completion step and the second application completion step), the high-pressure pumping from the discharge port 7a of the nozzle 5 can be performed by using the pressure reducing device 40. Suction, while the bead B is instantaneously destroyed, so that the coating ends momentarily. Thereby, the area of the film thickness which is not the film thickness T in the coating end region can be made small. The larger the depressurization PVE set by the regulator 46, the higher the flow rate of the suction bead B. Therefore, if the depressurization pressure PVE is made large, the bead B can be broken in a very short time, so that the poor film thickness region in the coating end region can be made extremely small. In this case, if the suction time from the discharge port 7a is long, the outside air is sucked in addition to the liquid bead B, so that the suction time must be extremely small. In the present invention, the first decompression valve 43 is a valve for opening the suction, and the second decompression valve 44 is a valve for stopping the suction. Therefore, the suction time can be made small to be extremely small by independently operating with two valves. Thereby, the poor film thickness region of the coating end region can be stably minimized.

In addition, the downstream side valve 17 is closed at the end of the application, and the operation of opening the first decompression valve 43 may be performed at the same time. It may be adjusted in such a manner that the suction of the coating liquid is appropriately and fastest performed in combination with the pressure-reducing PVE.

As described above, when the coating apparatus and the coating method of the present invention are used, the composition or action is excellent as described above, so that the area of the poor film thickness in the coating start and end regions can be minimized.

Further, in the coating device 1, the pressure reducing device 40 is used as the pressure reducing device at the start of coating, but it may be as shown in Figs. 7 and 8. 7 and 8 are schematic views for explaining another schematic configuration of the coating device 1. In FIG. 7, with respect to the coating apparatus 1 shown in FIG. 1, as a pressure-reduction device at the start of application, the pressure-reduction device 50 and the pressure-reduction device 40 are additionally connected to the nozzle 5 in parallel at the beginning. In other words, in the coating device shown in FIG. 7, as a pressure reducing device for performing suction of the coating liquid in the nozzle 5, a pressure reducing device that performs suction of the coating liquid at the start of coating is separately provided. That is, the decompression device 50 at the beginning and the decompression device 40 which is a decompression device that performs suction of the coating liquid at the end of coating. The pressure reducing device 50 has the same configuration as that of the pressure reducing device 40, and is provided as a pressure reducing unit that performs a pumping operation of the coating liquid 2 inside the nozzle 5 (manifold 6), and is provided with a suction pump 51. a regulator 56 for adjusting the pressure reduction (suction force), a pressure reducing passage 52 for connecting the nozzle 5 (manifold 6) to the suction pump 51, and a plurality of (two) first pressure reducing valves 53 and 2 Pressure reducing valve 54. Further, the first pressure reducing valve 53 and the second pressure reducing valve 54 are disposed in series in the single pressure reducing passage 52. The coating method of the coating apparatus 1 shown in FIG. 7 is used in the coating method shown in the above steps (A1) to (A12).

1. In the (A1) coating preparation step, the first decompression valve 53 is closed, and the second decompression valve 54 is opened, and the suction pump 51 is actuated by the regulator. 56 is set to the reduced pressure PVS at the start of coating.

2. (A4) first coating start step 2 and (A9) second coating start step 2 are replaced by the following (A4') first coating start step 2 and (A9') second coating start step 2.

(A4') first coating start step 2

After the downstream side valve 17 is opened and the application is started, the intermediate valve 15 is closed after a certain period of time, and the first pressure reducing valve 53 of the pressure reducing device 50 at the start is opened simultaneously with the closing of the intermediate valve 15 at a specific time. Thereafter, the second pressure reducing valve 54 is closed. Thereby, the excessive discharge from the nozzle 5 is stopped. Then, after the end of this step (A4'), the second decompression valve 54 is opened after the first decompression valve 53 is closed for the next preparation.

(A9') 2nd coating start step 2

After the downstream side valve 17 is opened and the application is started, the intermediate valve 15 is closed after a certain period of time, and the first pressure reducing valve 53 of the pressure reducing device 50 at the start is opened simultaneously with the closing of the intermediate valve 15 at a specific time. Thereafter, the second pressure reducing valve 54 is closed. Thereby, the excessive discharge from the nozzle 5 is stopped. Then, after the end of the step (A9'), the first pressure reducing valve 53 is closed, and then the second pressure reducing valve 54 is opened.

The effect at the time of starting the application of the pressure-reducing device 50 at the start of coating is exactly the same as when the pressure-reducing device 40 is used for the start of coating. However, the decompression device 50 can be used exclusively at the beginning of the coating. That is, it is not necessary to switch the setting of the decompression at the start of coating and at the end of coating as in the case of the decompression device 40, and in the case where responsiveness is required at the time of high-speed coating, the decompression device 50 at the beginning can be preferably applied.

Next, in FIG. 8, the suction device 70 is additionally connected to the coating device 1 shown in FIG. 1 as a pressure reducing device at the start of coating, and is provided in the middle of the supply stop valve of the second supply device 62. The flow path between the valve 15 and the nozzle 5. In this case, the suction device 70 belongs to the second supply device 62. In the case where the excess of the coating liquid 2 pressurized by the pressurizing device 14 is applied at the start of coating, when the intermediate valve 15 is closed, the flow path through the inside of the nozzle 5 is sucked through the intermediate valve 15 The coating liquid for excessive discharge is the starting pressure reducing device 50, whereas the suction device 70 is sucked by the flow path between the intermediate valve 15 and the nozzle 5. The suction device 70 has the same configuration as that of the pressure reducing device 40, and is provided as a pressure reducing portion for performing the pumping operation of the coating liquid 2 in the flow path downstream of the intermediate valve 15, and is provided with a suction pump 71 and is freely adjustable. A suction force (reduction pressure) adjuster 76, a suction flow path 72 connecting the flow path between the intermediate valve 15 and the nozzle 5 and the suction pump 71, and a plurality of (two) first suction valves 73 And the second suction valve 74. Further, the first suction valve 73 and the second suction valve 74 are disposed in series in the single suction flow path 72. The coating method of the coating device 1 shown in FIG. 8 is used in the coating method shown in the above steps (A1) to (A12).

1. (A1) In the coating preparation step, the first suction valve 73 is closed with respect to the suction device 70, and after the second suction valve 74 is opened, the suction pump 71 is actuated, and the regulator 76 is set to be coated. Cloth start Time to reduce the pressure PVS.

2. (A4) first coating start step 2 and (A9) second coating start step 2 are replaced by the following (A4") first coating start step 2 and (A9") second coating start step 2.

(A4") first coating start step 2

After the downstream side valve 17 is opened and the application is started, the intermediate valve 15 is closed after a certain period of time, and the first suction valve 73 of the suction device 70 is opened simultaneously with the closing of the intermediate valve 15, and the predetermined time is made. 2 The suction valve 74 is closed. Thereby, the excessive discharge from the nozzle 5 is stopped. Then, after the end of this step (A4"), the second suction valve 74 is opened after the first suction valve 73 is closed for the next preparation.

(A9") 2nd coating start step 2

After the downstream side valve 17 is opened and the application is started, the intermediate valve 15 is closed after a certain period of time, and the first suction valve 73 of the suction device 70 is opened simultaneously with the closing of the intermediate valve 15, and the predetermined time is made. 2 The suction valve 74 is closed. Thereby, the excessive discharge from the nozzle 5 is stopped. Then, after the end of this step (A9"), the second suction valve 74 is opened after the first suction valve 73 is closed for the next preparation.

Regarding the effect of the case where the suction device 70 is used at the start of coating, except that the coating liquid is sucked from the flow path between the intermediate valve 15 and the nozzle 5, and when the pressure reducing device 40 is used for coating start The situation is exactly the same. However, in the decompression device 40, when the pressure reduction PVS at the start of application is extremely large, there is a case where air is sucked from the discharge port 7a in addition to the coating liquid supplied to the nozzle 5, so that the applied pressure reducing PVS is applied. There is a limit to the size. On the other hand, the suction device 70 sucks the coating liquid for the excessive discharge from the nozzle 5 through the intermediate valve 15 at the position away from the upstream side, so that the air is not sucked from the discharge port 7a of the nozzle 5, so that it can be The applicable pressure reducing PVS is set to be larger than the pressure reducing device 40. Therefore, the suction device 70 can be preferably applied to the decompression device 40 in the case where the excessive ejection is stopped more quickly and the defective film thickness region is made smaller.

Furthermore, regarding the decompression device 40, the pressure in the nozzle 5 is set by the regulator 46. When the pressure is lower, the coating liquid in the nozzle 5 can be sucked. Therefore, the regulator 46 and the suction pump 41 can be a regulator or a compressor that can set compressed air of atmospheric pressure or positive pressure. However, when the suction flow rate of the coating liquid is made large and the suction time is extremely small, it is of course preferable to use a regulator 46 that can set a larger negative pressure (depressurization pressure) and a suction pump 41 such as a vacuum pump. . The above case is not limited to the decompression device 40, and the decompression device 50 and the suction device 70 are also identical at the beginning.

Next, a coating apparatus 100 which is another embodiment of the coating apparatus of the present invention will be described.

FIG. 9 is a schematic view showing a schematic configuration of the coating device 100. The coating device 100 shown in Fig. 9 is identical to the coating device 1 shown in Fig. 1 except for the following points.

1. In the coating apparatus 100, the second supply means 62 including the intermediate storage tank 13 is connected to a separate second flow different from the first flow path 11a (corresponding to the flow path 11 of Fig. 1) extending from the nozzle 5. Road 11b. Further, a pump 12 as a liquid feeder constituting the first supply device 61 is connected to the first flow path 11a. (In the coating device 1, the second supply device 62 including the intermediate storage tank 13 is connected to the flow path 11 from the nozzle 5 to the liquid feeder pump 12).

2. In the coating device 100, the supply-stop valve constituting the second supply device includes two independent valves of the upstream intermediate valve 15a and the downstream intermediate valve 15b (in the coating device 1, the supply stop valve is only For the intermediate valve 15).

In the coating device 100, as the second supply device 62, a suction device 70 having a downstream side of the downstream intermediate valve 15b connected to the second flow path 11b is added. Further, as described above, the suction device 70 is provided with the suction pump 71, the adjuster 76 that can freely adjust the suction force (reduction pressure), and the flow path and suction between the downstream intermediate valve 15b and the nozzle 5. The suction flow path 72 to which the pump 71 is connected and the first suction valve 73 and the second suction valve 74 which are arranged in series in the suction flow path 72.

Further, the action and effect of the coating device 100 are the same as those of the coating device 1 shown in FIG. However, at the start of the application, the supply of the coating liquid to the nozzle 5 for the constant flow rate using the first supply device 61 is performed using the first flow path 11a, and the second supply is used. The supply of the coating liquid to the nozzle 5 for excessive ejection of the device uses the second flow path 11b. In this way, the supply of the coating liquid for the constant flow rate discharge and the supply of the coating liquid for the excessive discharge can be performed without any interference between the completely independent flow paths, so that the responsiveness of the coating device 100 can be improved. Excessive ejection of the coating liquid compared to the coating apparatus 1 for a shorter period of time is easily achieved.

Next, the coating method using the coating device 100 will be described in order for each step shown in the following (B1) to (B12) with reference to FIGS. 10 to 13 . FIG. 10 to FIG. 13 are flowcharts showing a coating operation (coating method) of the coating apparatus 100 when two coating films M1 and M2 are formed on the substrate W by intermittent coating. Furthermore, "open" and "closed" in the drawings indicate the open and close states of the valves. Further, when an upward arrow is described on the right side of the pump 12, the pump 12 is operated.

(B1) Coating preparation step (refer to FIG. 10(A))

In the state in which all the flow paths of the nozzle 5 and the first supply device 61 and the second supply device 62 constituting the supply device 10 are filled with the coating liquid, the downstream side valve 17 and the downstream side intermediate valve 15b are closed, and then the upstream side is closed. The side valve 18 is opened to open the upstream side intermediate valve 15a, and the pressurizing means 16a is actuated to pressurize the coating liquid 2 of the upstream side storage tank 16 by pressure to replenish the pump 12 via the filter 20. Further, the coating liquid has been artificially replenished in the intermediate storage tank 13.

Here, the substrate W is placed on the stage 3 at the initial position (X=X0). In the decompression device 40, the first decompression valve 43 is closed, the second decompression valve 44 is opened, the suction pump 41 is actuated, and the regulator 46 sets the decompression pressure PVE at the end of coating. Further, in the suction device 70, the first suction valve 73 is also closed, and after the second suction valve 74 is opened, the suction pump 71 is actuated, and the regulator 76 is set to the pressure reduction PVS at the start of application.

(B2) First coating start preparation step (refer to FIG. 10(B))

The coating liquid 2 of the intermediate storage tank 13 is pressurized at a specific pressure P by the pressurizing means 14. At the same time, the elevating mechanism 9 is operated to lower the nozzle 5 such that the gap between the ejection port 7a of the nozzle 5 and the substrate W becomes the gap amount G. Then, keep the downstream side valve 17 When the upstream side valve 18 is closed and the upstream side valve 18 is opened, the pump 12 is driven to rise, and the coating liquid 2 is sent from the pump 12 to the first flow path 11a at a constant flow rate Q. The supplied coating liquid 2 is directed toward the upstream side storage tank 16.

(B3) First coating start step 1 (refer to FIG. 10(C))

The substrate 3 is driven to move at a fixed speed V. When the application start position (X=X1) of the coating film M1 of the substrate W reaches directly below the ejection port 7a of the nozzle 5, the downstream side valve 17 and the downstream side are caused. The intermediate valve 15b is opened and the upstream side valve 18 is closed. In this way, in the region where the application of the substrate W is started (the region within a range of several millimeters from the application start position), in addition to the constant flow rate of the flow rate Q of the coating liquid 2 by the pump 12 by the pump 12, Excessive ejection of the coating liquid 2 of the intermediate storage tank 13 is also carried out under the pressure P of the pressurizing means 14. As a result, the liquid bead B was started to be formed, and coating was also started.

(B4) First coating start step 2 (refer to FIG. 11(A))

After the downstream side valve 17 and the downstream side intermediate valve 15b are opened and the application is started, the upstream intermediate valve 15a is closed after a certain period of time, and the first suction of the suction device 70 is simultaneously performed simultaneously with the closing of the upstream side intermediate valve 15a. The valve 73 is opened to close the second suction valve 74 after a certain period of time. Thereby, the excessive discharge from the nozzle 5 is stopped. At the same time, the formation of the liquid bead B is completed to a specific size, and a constant flow rate of the flow rate Q is ejected from the nozzle 5, so that the film thickness of the coating film M1 reaches the film thickness T. Therefore, the coating film M1 having a specific film thickness T is formed from this point on. Further, by the operation of the suction device 70, the excessive discharge can be stopped more than the time when the upstream side intermediate valve 15a is closed for a shorter period of time. Then, after the end of this step (B4), the second suction valve 74 is opened after the first suction valve 73 is closed for the next preparation. Similarly, after the downstream side intermediate valve 15b is closed, the upstream side intermediate valve 15a is opened.

(B5) First coating intermediate step (refer to Fig. 11 (B))

The substrate W is continuously moved at the speed V, and the coating liquid 2 is ejected from the nozzle 5 at a constant flow rate Q by the pump 12, so that stable coating is performed to form the coating film M1 having the film thickness T.

(B6) First coating end step (refer to FIG. 11(C))

When the coating end position (X=X2) of the coating film M1 of the substrate W reaches directly below the ejection port 7a of the nozzle 5, the downstream side valve 17 is closed, and the opening of the upstream side valve 18 and the decompression device 40 are performed. The first decompression valve 43 is opened. Then, after the specific time period in which the first decompression valve 43 is opened, the second decompression valve 44 is closed, and the suction at the end of the application is completed. According to the above, the constant flow rate of the coating liquid 2 to the substrate W is discharged (interrupted), and the liquid bead B is sucked to the nozzle 5 through the discharge port 7a by the decompression device 40, so that the liquid bead B is instantaneously destroyed. At the end of the coating, the formation of the coating film M1 is also completed. Further, the pump 12 is continuously driven regardless of the above operation, and the upstream side valve 18 is opened, and the coating liquid 2 is continuously supplied to the upstream storage tank 16 at the flow rate Q.

(B7) Second coating start preparation step (refer to FIG. 12(A))

The second decompression valve 44 is opened after the first decompression valve 43 is closed in parallel with the movement of the speed W of the substrate W. The pump 12 is continuously driven.

(B8) Second coating start step 1 (refer to FIG. 12(B))

The coating of the coating film M2 was started. When the application start position (X=X3) of the coating film M2 of the substrate W that has been moved at the speed V reaches directly below the discharge port 7a of the nozzle 5, the downstream side valve 17 and the downstream side intermediate valve 15b are opened, and The upstream side valve 18 is closed. Thereby, in addition to the constant flow rate of the flow rate Q from the nozzle 5 by the pump 12, the excess pressure of the coating liquid 2 of the intermediate storage tank 13 is performed by the pressure P of the pressurizing device 14 . The formation of the bead B was started, and coating was also started.

(B9) Second coating start step 2 (refer to Fig. 12(C))

After the downstream side valve 17 and the downstream side intermediate valve 15b are opened and the application is started, the upstream intermediate valve 15a is closed after a certain period of time, and the first suction of the suction device 70 is simultaneously performed simultaneously with the closing of the upstream side intermediate valve 15a. The valve 73 is opened to close the second suction valve 74 after a certain period of time. Thereby, the excessive discharge from the nozzle 5 is stopped. At the same time, the formation of the bead B is completed to a specific size, and a constant flow rate of the flow rate Q is ejected from the nozzle 5, so that the film thickness of the coating film M2 reaches the film thickness T. Therefore, the coating film M2 having a specific film thickness T is formed from now on.

Then, after the end of this step (B9), the second suction valve 74 is opened after the first suction valve 73 is closed for the next preparation.

(B10) Second coating intermediate step (refer to Fig. 13(A))

The substrate W is continuously moved at the speed V, and the coating liquid 2 is ejected from the nozzle 5 at a constant flow rate Q by the pump 12, so that the coating film M2 having the film thickness T is formed.

(B11) Second coating end step (refer to FIG. 13(B))

When the coating end position (X=X4) of the coating film M2 of the substrate W reaches directly below the ejection port 7a of the nozzle 5, the downstream side valve 17 is closed, and the opening of the upstream side valve 18 and the decompression device 40 are performed. The first decompression valve 43 is opened. Then, after the specific time period in which the first decompression valve 43 is opened, the second decompression valve 44 is closed and the suction is also completed. According to the above, the predetermined flow rate of the coating liquid 2 to the substrate W is discharged, and the liquid droplet B is sucked to the nozzle 5 through the discharge port 7a by the pressure reducing device 40, so that the liquid bead B is instantaneously broken and coated. At the end, the formation of the coating film M2 is also completed. Then, the pump 12 is stopped.

(B12) Preparation step after coating is completed

After the application is completed, the substrate W is still continuously moved at the speed V, and if it reaches the end position (X = X5), it is stopped. Then, the coated substrate W is taken out and carried out to the next step (drying step), and the stage 3 is moved in the reverse direction to return to the initial position (X = X0).

Thereafter, the coating of the next substrate W is repeated from the (B1) coating preparation step.

Next, a coating apparatus 200 which is another embodiment of the coating apparatus of the present invention will be described. Fig. 15 is a schematic view showing a schematic configuration of a coating device 200. In the coating device 200 shown in Fig. 15, the joint portion 19a of the coating device 1 shown in Fig. 1 is replaced with a joint 80, and the flow path from the joint 80 to the downstream side valve 17 is defined by the flow path length LP. The length is the same as that of the coating device 1 except for this. This different aspect will be described in detail using FIG.

Fig. 16 is a schematic view showing an enlargement of a portion of the coating device 200, that is, the joint 80, and its vicinity. The inside of the joint 80 includes a first joint flow path 81 connected to the flow path 11 of the first supply device 61, and a second joint flow path 82 connected to the second supply device 62. 1st The joint flow path 81 is a part of the flow path 11, and is connected to the liquid supply side connection point 83 on the pump 12 side of the liquid supply device 11, and is connected to the nozzle side connection point 84 on the nozzle 5 side. Further, the second joint passage 82 is at an angle θ from the first joint passage 86, which is a connection point with the first joint passage 81, (see the arrangement of the second joint passage 81 as shown in Fig. 16). The pump 12 is extended toward the flow path 11, and the second supply device connection point 85 is connected to the second supply device 62 and reaches the intermediate storage tank 13.

According to the above configuration, it can be said that the intermediate storage tank 13 of the second supply device 62 is connected to the flow path 11 from the nozzle 5 to the pump 12 of the first supply device 61 via the joint 80. Further, the joint 80 includes therein a first joint flow path 81 connected to the flow path 11 of the first supply device 61, and a second joint flow path 82 which is internally connected to the first joint flow path 81. The connection point 86 merges and is connected to the flow path of the second supply device 62; the coating liquid 2 flowing out of the intermediate storage tank 13 and flowing through the second joint flow path 82 has a flow path through the first joint flow path 81. The flow direction of the coating liquid 2 is a speed component in the same direction, and the second joint flow path 82 is configured to merge with the first joint flow path 81.

Further, the downstream side valve 17 is disposed at a position from the joint 80 on the nozzle 5 side of the flow path 11 at a predetermined flow path length LP along the flow path 11. Further, the downstream side valve 17 is a valve that supplies and stops the application liquid from both the pump 12 and the intermediate storage tank 13 to the nozzle 5. The downstream side valve 17 is disposed between the self-joint 80 and the nozzle 5 and is located closer to the side of the joint 80 than the nozzle 5. For example, the downstream side valve 17 (the valve body) is disposed closer to the joint 80 side than the intermediate point of the flow path from the joint 80 to the nozzle 5.

The coating method using the coating apparatus 200 having the above configuration is completely the same as the coating method using the coating apparatus 1, and the first coating start step 1 and the (A8) second coating start step are (A3). In the case of 1st, when the angle θ and the flow path length LP are appropriately selected and applied, the action and effect are more excellent.

Therefore, the (A3) first coating start step 1 of the coating apparatus 200 is referred to as (A3') first coating start step 1', and the coating apparatus 200 is faced with reference to FIG. Make Explain the effect and effect. Fig. 17 is an explanatory view showing a coating start operation of the coating device 200 corresponding to Fig. 2(C).

(A3') First coating start step 1 (refer to Fig. 17)

The coating of the coating film M1 was started. When the stage 3 is driven, the substrate W is moved at a fixed speed V. When the application start position (X=X1) of the coating film M1 of the substrate W reaches the discharge port 7a of the nozzle 5, the downstream side valve 17 is opened. In this way, in the region where the application of the substrate W is started (the region within a range of several millimeters from the application start position), in addition to the constant flow rate of the flow rate Q of the coating liquid 2 by the pump 12 by the pump 12, Excessive ejection of the coating liquid 2 of the intermediate storage tank 13 is also performed by the pressure P of the pressurizing means 14. As a result, the liquid bead B was started to be formed, and coating was also started.

In this case, when the angle θ is preferably 5 to 75 degrees, more preferably 15 to 60 degrees, the coating liquid 2 and the second coating liquid in the first joint flow path 81 of the joint 80 are opened when the downstream side valve 17 is opened. The coating liquid 2 in the joint flow path 82 flows out in the same direction (that is, a velocity component having the same direction). Thereby, the quantitative discharge of the flow rate Q of the coating liquid 2 of the pump 12 flowing in the first joint flow path 81 is surely and instantaneously added to the pressure of the pressurizing means 14 flowing in the second joint flow path 82. The excess flow rate Qr of the coating liquid 2 of the intermediate storage tank 13 of P reaches the combined flow rate (Q+Qr) at a flow rate of the coating liquid 2 supplied to the nozzle 5 in a very short time. Further, when the coating liquid 2 in the first joint flow path 81 starts to flow toward the nozzle 5 side, the coating liquid 2 in the second joint flow path 82 is sucked into the first by the suction effect of the Venturi effect. The joint flow path 81 contributes to the flow of the coating liquid in the intermediate storage tank 13 caused by the pressure P, so that the coating liquid flowing in the second joint flow path 82 reaches the excess flow rate Qr in a very short time. Due to the above action, after the downstream side valve 17 is opened, the flow rate of the coating liquid supplied to the nozzle 5 in a very short time reaches the combined flow rate (Q+Qr). Therefore, the coating liquid can be excessively ejected from the nozzle 5 in a pulsed flow rate (Q+Qr). When the angle θ is smaller than the above range, the junction area becomes long in the flow path in the joint, and the joint is enlarged, which is not practical. When the angle θ is larger than the above range, one part of the coating liquid in the second joint flow path 82 and the coating liquid in the first joint flow path 2 Since it flows in a countermeasure manner, the time until the flow rate of the coating liquid reaches the combined flow rate (Q+Qr) after the downstream side valve 17 is opened becomes long, and the nozzle 5 cannot be pulsed at the combined flow rate (Q+Qr). Excessive ejection.

In particular, when the angle θ is greater than 90 degrees, the coating liquid 2 in the second joint channel 82 and the coating liquid 2 in the first joint channel will flow in the direction of the nozzle 5 when they collide with each other. Therefore, after the downstream side valve 17 is opened, the flow rate of the coating liquid reaches a combined flow rate (Q+Qr) for a relatively long period of time, and only a trapezoidal shape is ejected from the nozzle 5 at a combined flow rate (Q+Qr). In the excessive discharge of the trapezoidal shape, the film thickness region of the coating start portion cannot be made small at the time of high-speed coating. On the other hand, in the present embodiment, the coating liquid 2 can be excessively ejected in a pulse shape as shown in FIG. 6(c) from the nozzle 5 (the hatched portion in FIG. 6(c)). In addition, the excessive discharge of the trapezoidal shape means that the region corresponding to the hatched portion of Fig. 6(c) has a trapezoidal shape.

When the flow path length LP is reduced, the flow length of the coating liquid flowing through the first joint flow path 81 and the second joint flow path 82 to merge with the internal junction point 86 and reach the downstream side valve 17 becomes small. . Therefore, when the flow path length LP is made small, the time until the downstream side valve 17 is opened and the coating liquid that has merged at the internal junction point 86 reaches the downstream side valve 17 is also reduced. In other words, after the downstream side valve 17 is opened, the time until the flow rate of the flow rate (Q+Qr) of the combined flow rate (Q+Qr) is supplied from the downstream side valve 17 to the nozzle 5 becomes short. In this case, it can be said that the coating liquid is supplied to the nozzle 5 with high responsiveness after the downstream side valve 17 is opened. When the flow path length LP is preferably 50 mm or less, after the downstream side valve 17 is opened, the excess flow rate Qr of the flow rate Q of the pump 12 and the pressurizing means 14 is instantaneously applied from the downstream side valve 17. The coating liquid of the combined flow rate (Q+Qr) of the liquid-liquid combined flow is supplied to the nozzle 5. Thereby, after the downstream side valve 17 is opened, the coating liquid can be instantaneously ejected from the nozzle 5 at a combined flow rate (Q+Qr), that is, the coating liquid is excessively ejected from the nozzle 5 with high responsiveness. When the flow path length from the downstream side valve 17 to the nozzle 5 is preferably 50 mm or less, more preferably 20 mm or less, the excess amount of the coating liquid from the nozzle 5 with respect to the opening operation of the downstream side valve 17 can be ejected. The responsiveness is further improved. That is, after the downstream side valve 17 is opened, the flow rate (Q+Qr) can be merged from the nozzle 5 in an extremely short time. Excessive ejection of the coating liquid.

When the coating apparatus 200 is used to start the application, the downstream side valve 17 is opened, and the responsiveness is high, and the coating liquid having a fixed flow rate from the nozzle 5 can be instantaneously pulsed to be excessively ejected, so that even the high speed coating is performed. In the case of the cloth, the defective film thickness region of the coating start portion can be made small, and the product region having a uniform thickness can be enlarged.

That is, it is convenient to use the coating device 200 (A8), the second coating start step 1, that is, the (A8') second coating start step 1', the coating device 200 and the coating device in the above (A3') step. The difference in the role of 1 is also the same.

The coating apparatus 1, the coating apparatus 100, and the coating method of the present invention described above can be applied to a color filter for a color liquid crystal display, an organic EL (Electroluminescence), a plasma display, or the like. The surface is formed into a plurality of coating films having a plurality of coating films in a planar or striped shape. According to the coating apparatus and the coating method of the present invention, as described above, even in the case of high-speed coating, the coating start region and the coating end region can be made to have a small film thickness region, and the film thickness is uniform and high. Since the product area of the quality is increased, it is possible to manufacture a member for display having a uniform film thickness and high quality with high productivity and low cost due to material loss. Further, the substrate W on which the plurality of coating films are formed is cut into the surface of each coating film to form a member for display.

The applicability of the above coating device 1 and coating device 100 is also the same for the coating device 200.

Further, the coating device 1 and the coating device 100 of the present invention are not limited to the illustrated ones, and may be in other forms within the scope of the present invention. For example, in FIG. 1, the moving device 8 may be configured such that the nozzle 5 can be moved in one direction relative to the substrate W. Other configurations may be employed, and the platform 3 may be fixed to move the nozzle 5 relative to the platform 3. . The above configuration is also applicable to the coating device 200.

Hereinafter, the present invention will be specifically described by way of examples.

[Example 1]

The following organic EL pattern substrate was prepared: in an alkali-free glass substrate having a thickness of 250 mm (width direction) × 550 mm (coating direction) and a thickness of 0.7 mm, two places of 210 mm (width direction) were provided at intervals of 20 mm in the coating direction. In the surface area of ×250 mm (coating direction), a polyimide film having a height of 2 μm and a width of 20 μm and a length of 250 mm in the longitudinal direction of the substrate was used as a barrier layer in each surface region, and 2,101 were arranged at a pitch of 100 μm in the width direction.

Further, each of the surface regions is located at the center of the substrate in the width direction and is located inside the substrate end portion 15 mm from the coating direction. That is, a region of 20 mm on both sides in the substrate width direction (Y direction), 15 mm on both sides in the substrate application direction (X direction), and 20 mm in the center are non-product regions of the non-stripe polyimine film. Further, an ITO (Indium Tin Oxides) transparent electrode was used as an anode to form 0.1 μm on the glass substrate between the polyimide film as a barrier, and polyethylene was formed thereon to have a thickness of 0.1 μm. A mixture of dioxythiophene and polystyrene sulfonic acid is used as a hole injection layer.

In the above surface region, as the EL light-emitting layer, the R light-emitting material was intermittently applied so that the thickness after drying was only 0.07 μm. The R luminescent material had a solid content concentration of 2%, a viscosity of 5 mPa ‧ s, and a wet thickness of 3.5 μm corresponding to a thickness of 0.07 μm after drying.

As the coating device, the coating device 1 shown in Fig. 1 was used. Further, the nozzle 5 is capable of forming 700 stripe-shaped coating films at a pitch of 300 μm in a length of 210 mm in the Y direction. Further, each valve uses a solenoid valve having a small change in capacity caused by switching between opening and closing.

Further, the batch coating method shown in the above steps (A1) to (A12) is carried out. At this time, the coating speed V was 100 mm/s, and the gap G between the substrate and the discharge port 7a of the nozzle, that is, the gap G was 30 μm. Further, the flow rate of the coating liquid supplied from the pump 12 at the time of constant flow rate discharge was set to 19.6 μl/s, and the pressure P of the pressurization of the pressurizing device 14 at the time of excessive discharge was set to 10 kPa. Further, the time during which the coating liquid is supplied to the nozzle 5 by the pressure P is 0.005 second, and the intermediate valve 15 is closed after 0.005 seconds after the downstream side valve 17 is opened. On the other hand, in the coating end step, the pressure reduction at the end of coating is set by the adjuster 46 of the pressure reducing device 40. In the case of -10 kPa, the time for applying the coating liquid in the suction nozzle 5 is 0.002 seconds, and the second pressure reducing valve 44 is closed after 0.002 seconds after the first pressure reducing valve 43 is opened. The way to control.

The substrate on which the R light-emitting material was intermittently applied on the first surface and the second surface under the above conditions was vacuum dried for 65 seconds at 65 Pa in 30 seconds, and then 120 was used. The hot plate of °C was further dried for 10 minutes.

The film thickness was measured after drying, and as a result, the two-side coating film was 0.07 μm at 3 mm from the start of coating, and the region not in the coating end portion of 0.07 μm was 3 mm. In other words, the size of the film thickness region of the coating start region and the coating end region which is not 0.07 μm in thickness is 3 mm in the coating start region and 3 mm in the coating end region. In the range of 250 mm obtained by removing the portions of the poor film thickness region which are 3 mm apart from the coating start and end portions, that is, the barrier ribs in which the polyimide film is formed, the film thickness is uneven. ±5% or less, very good.

Then, the G light-emitting material and the B light-emitting material are also applied in this order, and the negative electrode is vapor-deposited so as to cover the RGB light-emitting material and the barrier ribs to form an organic EL element. The organic EL device was further formed into a display device by performing a specific treatment in the subsequent step. As a result, the color of RGB was uniformly displayed over the entire surface of the substrate, and the quality of both surfaces was excellent.

[Industrial availability]

The present invention can be used for various types of planar or stripe-shaped coating films which are intermittently and stably formed on a surface of a substrate of a display member such as a color filter for a color liquid crystal display, an organic EL or a plasma display. Manufacture of components for displays.

1‧‧‧ Coating device

2‧‧‧ Coating solution

3‧‧‧ platform

4‧‧‧Control device

5‧‧‧ nozzle

6‧‧‧Management

7‧‧‧Spray flow path

8‧‧‧Mobile devices

8a‧‧‧linear motor

8b‧‧‧Guiding components

10‧‧‧Supply device

11‧‧‧Flow

12‧‧‧ pump (feeder)

13‧‧‧Intermediate storage tanks (storage tanks)

14‧‧‧ Pressurized device

15‧‧‧Intermediate valve

16‧‧‧Upstream side tank

16a‧‧‧ Pressurized device

17‧‧‧ downstream side valve

18‧‧‧Upstream side valve

19a‧‧‧ joint part

19b‧‧‧ joint part

20‧‧‧Filter

40‧‧‧Relief device

41‧‧‧Suction pump (decompression section)

42‧‧‧Reducing flow path

43‧‧‧1st decompression valve

44‧‧‧2nd decompression valve

46‧‧‧ adjuster

61‧‧‧1st supply device

62‧‧‧2nd supply device

B‧‧‧Liquid beads

M1‧‧·coating film

M2‧‧·film

W‧‧‧Substrate (coated component)

Claims (10)

A coating apparatus comprising: a nozzle that ejects a coating liquid to a member to be coated; a moving device that moves the nozzle relative to the member to be coated; and a supply device that supplies the coating to the nozzle And a pressure reducing device for performing suction of the coating liquid in the nozzle; and the supply device includes: a first supply device including a liquid feeding solution for delivering the coating liquid to the nozzle at a fixed flow rate And a second supply device having: a storage tank that accumulates the coating liquid and is connected to the nozzle via a flow path; and a pressurizing device for pressurizing the coating liquid of the storage tank and The coating liquid is sent to the nozzle. A coating apparatus according to claim 1, wherein said storage tank is connected to a flow path of said first supply means from said nozzle to said liquid supply means. The coating apparatus according to claim 1, wherein the liquid supply device is connected to a first flow path extending from the nozzle, and the storage tank is connected to an independent second flow path different from the first flow path extending from the nozzle. . The coating device according to claim 2, wherein the storage tank is connected to a flow path between the nozzle and the liquid supply device of the first supply device via a joint, and the joint is provided inside: a first joint flow path And connected to the flow path of the first supply device; and the second joint flow path is at an angle of 5 to 75 degrees with respect to the first joint flow path from a connection point with the first joint flow path. And extending to the second supply device to the liquid feeder side of the flow path of the first supply device, and further to the flow path of the first supply device from the joint A valve is disposed at a position of a flow path length of 50 mm or less on the nozzle side, and the valve supplies and stops the application liquid from the liquid supply device and the storage tank to the nozzle. The coating apparatus according to any one of claims 1 to 4, wherein the second supply device further includes a supply stop valve, and the supply stop valve is provided in a flow path between the storage tank and the nozzle for performing The start and stop of the delivery of the coating liquid in the storage tank to the nozzle. The coating device according to claim 5, wherein the second supply device further includes a suction device, and the suction device is provided in a flow path between the supply stop valve and the nozzle and suctions a coating liquid of the flow path . A coating method, which is a method of applying a coating liquid to a member to be coated, using a coating apparatus according to any one of claims 1 to 6, and comprising: a coating start step, The operation of supplying the coating liquid to the nozzle at a fixed flow rate by the first supply means is started, and the coating liquid is supplied to the nozzle by the second supply means, and the borrowing is stopped after a specific time. The application of the second supply device to the coating liquid of the nozzle starts, and the intermediate step of coating is continued by the first supply device at a fixed flow rate; and the coating end step The supply of the coating liquid by the first supply means is stopped, and the suction of the coating liquid in the nozzle by the pressure reducing means is started, and the suction is stopped after a specific time. The coating onto the coated member is completed. The coating method according to claim 7, wherein in the coating start step, the nozzle is performed by the pressure reducing device simultaneously with the stop of the supply of the coating liquid by the second supply device The suction of the coating liquid. The coating method of claim 7, wherein the coating start step is performed simultaneously with the stopping of the supply of the coating liquid by the second supply means The suction of the coating liquid in the flow path to which the storage tank is connected. A method of producing a member for a display, characterized in that a member for a display is manufactured from the member to be coated using the coating method according to claims 7 to 9.