JP2010277943A - Functional film manufacturing method and manufacturing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To uniformly form a luminous layer of an organic EL panel throughout the whole surface by a dispenser method with a plurality of nozzles even to a substrate having uneven thickness. <P>SOLUTION: By using a nozzle with a projection shape as the nozzle opposed to a groove between barrier ribs, an electric field is applied between the nozzle and a substrate mounting table to improve stability of beads formed at the edge portion of the nozzle outline, thereby, a stable continued line without extrusion can be coated even if the distance between the nozzle tip and the substrate upper face is made large. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a method and an apparatus for manufacturing a functional film such as a light emitting layer of an organic EL display using a coating technique.

  In recent years, as the demand for thin, low power consumption, and lightweight displays is increasing, a technique for producing a functional film of a display by a low-cost coating method has attracted attention. For example, there are a method of dropping an organic light emitting material ink onto a necessary pixel portion by an inkjet method in a groove section partitioned by a partition formed on a substrate, a method of transferring to a necessary pixel portion by a relief printing method, and the like. Proposed.

  However, in the conventional ink jet method, a slight unevenness of the wetness of the nozzle surface causes the droplet flight direction to be distorted, failing to land on the target pixel, or generating a non-ejection nozzle during a short period of ejection pause. There are problems such as. Further, the conventional relief printing method has a problem that the printing position accuracy cannot be secured at the peripheral portion of the display due to the expansion and contraction of the plate. Meanwhile, as a method to solve these problems, a dispenser, which is less likely to cause non-ejection than inkjet, is mounted on a stage that can be positioned with high accuracy, and the nozzle tip is applied close to the groove between the partition walls with high accuracy. A method has been proposed (see, for example, Patent Document 1).

  This will be described with reference to FIG. 17 and FIG.

  FIG. 17 is a view showing a method of applying the above-described conventional organic light emitting material ink, and FIG. 18 is a cross-sectional view seen from the J direction of FIG.

  In FIG. 17, 101 is a substrate, 103 is a partition formed on the substrate, 142 is a partition forming substrate, 120 is a substrate mounting table on which the substrate is mounted, and 124 is above the substrate 101. The dispenser is configured to be movable over the entire surface of the base material along the groove between the partition walls 103 with a certain gap opened by a driving means (not shown). The dispenser 24 includes a nozzle 122 at the lower end, a manifold 121 connected to the upper part thereof, a pipe 123 connected to the upper part of the manifold 121, and a constant pressure gas supply device (not shown) that supplies gas into the pipe 123. It is configured. Reference numeral 114 denotes an organic light emitting material ink discharged from the dispenser.

  Next, the operation of the conventional coating apparatus configured as described above will be described.

  First, the nozzle of the dispenser is positioned on the extended line of the groove between the partition walls at an outer location where the partition walls are not formed. Next, the movement of the dispenser is started in the groove direction between the partition walls, and the nozzle is accelerated to a constant speed until reaching the upper part of the groove between the partition walls. When the nozzle reaches the upper part of the groove between the partition walls, Gas is supplied from a constant pressure gas supply device to the pipe, and the organic light emitting material ink in the manifold is discharged from the nozzle tip and applied onto the substrate. When the nozzle reaches the end of the groove, the gas supply from the constant pressure gas supply device is stopped to stop the application, and then the dispenser is moved to the groove between the other partition walls to perform the same application operation. This operation was repeated, and the organic light emitting material ink was applied to a necessary portion on the entire surface of the partition wall forming substrate.

JP 2001-189192 A (page 4, FIG. 1)

  However, when forming the light emitting layer of the organic EL display by the conventional method described above, it is necessary to apply simultaneously using a plurality of nozzles in order to shorten the coating tact. There arises a portion where the gap between the tip of the nozzle and the upper surface of the substrate cannot be sufficiently close. In that case, there was a problem that the coating state of the portion was interrupted and a uniform light emitting layer could not be formed.

  This problem will be described in detail with reference to the drawings. FIG. 19 is a diagram showing a coating state when the distance between the tip of the nozzle of the dispenser and the substrate is separated. FIG. 20 is a diagram illustrating a case where application is performed with a dispenser provided with a plurality of nozzles on a substrate with uneven thickness. FIG. 21 is a cross-sectional view seen from the J direction in FIG.

  In the case of an ink having a viscosity of several hundred mPa · sec or less, such as an organic light emitting material ink, the ink itself is easily cut off, and if the distance between the nozzle tip and the substrate is increased, the ink discharged from the nozzle as shown in FIG. It is applied after being cut off. In the case of applying the entire surface of the substrate with one nozzle, it can be applied in a continuous line form by applying while adjusting the gap between the nozzle tip and the base material to a minute amount successively. However, as shown in FIG. 20, when applying with a dispenser provided with a plurality of nozzles on a substrate having uneven thickness on the substrate itself, as shown in FIG. There was a problem that the gap between the nozzle tip and the upper surface of the base material could not be made sufficiently close, and the nozzle was intermittently applied.

  The present invention solves the above-mentioned conventional problems, and is a coating method that enables continuous coating even if the gap between the nozzle tip and the substrate is kept away. An object of the present invention is to provide a coating method and apparatus for forming a uniform functional film over the entire surface of a substrate using the dispenser provided.

  In order to achieve the above object, the present invention provides a functional film solution in which components of a functional film are dissolved in a solvent, continuously ejected from a nozzle and applied to a substrate that moves relative to the nozzle, and the function is applied after coating. A method of forming a functional film by evaporating the solvent of a film solution to form a functional film, wherein a plurality of coating regions surrounded by a partition are formed on the base material at regular intervals, and the base material Is placed on a substrate placement table, and an electric field is applied between the nozzle and the substrate placement table or between the nozzle and the substrate by an electric field application means, The present invention provides a method for producing a functional film, which comprises applying a functional film solution.

  More preferably, a convex portion is provided around the discharge hole of the nozzle, and the functional film solution is applied in the application region while holding the functional film solution by a damming effect at an outer peripheral edge portion of the convex portion. The present invention provides a method for producing a functional film.

  More preferably, the angle formed by the rising surface of the convex portion and the nozzle surface is 80 deg to 100 deg.

  More preferably, the surface of the nozzle has a contact angle of 50 degrees or more with respect to the functional film solution.

  More preferably, there is provided a method for producing a functional film, wherein a nozzle having a nozzle hole diameter in a range of 0.7 to 1.0 times the groove width of the coating region is used. .

  More preferably, the width in the direction perpendicular to the application direction of the convex portion around the nozzle discharge hole is in the range of 1.5 to 2.5 times the fixed interval of the application region. A method for producing a functional film is provided.

  More preferably, a functional film manufacturing method is provided, wherein a functional film solution having a viscosity in the range of 50 mPa · sec to 200 mPa · sec is used as the functional film solution.

  More preferably, the present invention provides a method for producing a functional film, wherein the roundness of the edge portion formed by the rising surface of the convex portion and the nozzle surface has a radius of 10 microns or less.

  Furthermore, it is preferable to provide a method for producing a functional film, wherein the roundness of the edge portion formed by the rising surface of the convex portion and the nozzle surface is a radius of 2 microns or less.

  Further, the present invention is an apparatus for forming a functional film by applying a functional film solution obtained by dissolving a functional film component in a solvent on a base material, the base material mounting table for mounting the base material, A dispenser having at least one nozzle that discharges the functional film solution disposed above the base material with a gap; drive means for relatively moving the nozzle and the base material mounting table; and the nozzle And an electric field applying means for applying an electric field between the substrate and the nozzle and the substrate mounting table, and a control means for controlling the timing of the driving means, the dispenser, and the electric field applying means. An apparatus for producing a functional film characterized by the above is provided.

  Further, the present invention is an apparatus for forming a functional film on a base material by applying a functional film solution in which components of the functional film are dissolved in a solvent, wherein the base material is a film, and the base material is rolled to A dispenser having a substrate conveying mechanism for conveying by a roll, and having at least one nozzle for discharging the functional film solution disposed with a gap above the substrate, and opposite to the nozzle across the substrate A substrate pressing roll disposed on the side, and an electric field applying means for applying an electric field between the nozzle and the substrate or between the nozzle and the substrate pressing roll, and the substrate transport mechanism and the dispenser And a control device for controlling the timing of the electric field applying means.

  As described above, according to the present invention, it is possible to perform continuous application even when the gap between the nozzle tip and the substrate is kept away, and to use a dispenser provided with a plurality of nozzles even on a substrate with uneven thickness. A uniform coating can be applied over the entire surface of the substrate.

The figure which shows Embodiment 1 of this invention The figure seen from the F direction of FIG. 1 of Embodiment 1 of this invention The figure seen from J direction of FIG. 1 of Embodiment 1 of this invention The enlarged view of the B section of FIG. 2 of Embodiment 1 of this invention AA direction arrow view of FIG. 2 of Embodiment 1 of the present invention The enlarged view of the C section of FIG. 5 of Embodiment 1 of this invention The figure which shows the nozzle-shaped deformation | transformation version of Embodiment 1 of this invention. The figure which shows Embodiment 2 of this invention The figure seen from J direction of FIG. 8 of Embodiment 2 of this invention The figure which shows Embodiment 3 of this invention. The figure which shows the structure of the organic electroluminescent display of a present Example The figure which shows the partition of the organic electroluminescent display of a present Example The figure which shows the formation step of the light emitting layer of the organic electroluminescent display of a present Example. Diagram explaining wetting on the side wall of the nozzle Diagram for explaining the optimum inner diameter of the nozzle Diagram for explaining the optimum outer diameter of the nozzle The figure which shows the coating method of the light emitting layer of the conventional organic electroluminescent display The figure seen from the J direction of FIG. 17 of the coating method of the light emitting layer of the conventional organic EL display The figure for demonstrating the subject in the coating method of the light emitting layer of the conventional organic EL display The figure for demonstrating the subject in the case of apply | coating with the dispenser which provided the several nozzle with respect to the base material with uneven thickness by the conventional application | coating system. The figure seen from the J direction of FIG. 20 for demonstrating the subject in the case of apply | coating with the dispenser which provided the several nozzle with respect to the base material with uneven thickness by the conventional application | coating system.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  In this example, as the functional film solution, an organic light emitting material ink in which an organic light emitting material was dissolved in a solvent was used to form a light emitting layer of an organic EL display.

  First, the structure of the organic EL display created in this example will be described.

  FIG. 11 is a diagram showing the structure of the organic EL display created in this example. 11A is a plan view, and FIG. 11B is a cross-sectional view taken along the line AA in FIG. 11A.

  In FIG. 11, 1 is a base material, and 2 is a first electrode formed on the base material 1. In this example, a polyethylene naphthalate sheet having a thickness of 100 microns was used as the substrate 1 and the first electrode 2 was patterned by photolithography using ITO as a material. 3 is a partition formed on the first electrode 2, 11 is a lead-in projection, 4 is a red (R) organic light emitting layer formed in a groove formed by the partition 3, 5 is a green (G) organic light emitting layer, 6 is a blue (B) organic light emitting layer, and the thickness of the light emitting layer was about 60 nanometers.

  As a material of the partition wall 3, patterning was performed by a photolithography method using a photosensitive resin material which exhibited liquid repellency with respect to the organic light emitting material ink after patterning and contained fluorine so that the contact angle was 50 deg or more. . The pull-in convex part 11 was also formed by the same method using the same material as the partition wall 3. Reference numeral 7 denotes a second electrode formed on the organic light emitting layers 4, 5 and 6. Al was used as a material for the second electrode, and patterning was performed by a vacuum deposition method through a mask.

  Next, the formation procedure of the organic light emitting layer of the organic EL display configured as described above will be described with reference to FIGS. FIG. 12 is a view showing the arrangement of the partition walls of the organic EL display in the present embodiment, and FIG. 13 is a view showing the procedure for forming the light emitting layer.

  In this example, as shown in FIG. 12, the partition 3 was formed on the substrate 1. The partition wall width was 40 microns, the groove width between the partition walls was 60 microns, and the partition wall height was 1 micron. The height of the pull-in convex portion was also 1 micron, the same as that of the partition wall.

  The red (R) organic light emitting material ink is applied to the grooves between the partition walls and dried to form the red (R) organic light emitting layer 4 in FIG. 13A, and then the green (G) organic light emitting material ink is formed. Is applied and dried to form the green (G) organic light emitting layer 5 of FIG. 13 (b), and then the blue (B) organic light emitting material ink is applied and dried to obtain FIG. 13 (c). A blue (B) organic light emitting layer 6 was formed.

(Embodiment 1)
Next, an embodiment of the present invention will be described with reference to FIGS.

  1 is a diagram showing Embodiment 1 of the present invention, FIG. 2 is a diagram seen from the direction F in FIG. 1, FIG. 3 is a diagram seen from the J direction in FIG. 1, and FIG. FIG.

  In FIG. 1, 1 is a base material, 3 is a stripe-shaped partition formed on the base material 1, and the groove part in between becomes a coating area. Reference numeral 20 denotes a substrate placement table on which the substrate 1 is placed. Reference numeral 24 denotes a dispenser configured to be movable along the application region in a state where a predetermined gap is opened above the substrate 1 by driving means (not shown). is there.

  The dispenser 24 includes a nozzle 22 at the lower end, a manifold 21 connected to the upper part thereof, a pipe 23 connected to the upper part of the manifold 21, and a gas supply device (not shown) that supplies gas into the pipe 23. Yes. In this embodiment, an electropneumatic regulator capable of adjusting the set pressure by inputting an electric signal is used as the gas supply device. Reference numeral 14 denotes an organic light emitting material ink ejected from the dispenser, and reference numeral 41 denotes an electric field applying means connected between the nozzle 22 and the substrate mounting table 20.

  Next, the operation of the coating apparatus of the present embodiment configured as described above will be described.

  First, the base material 1 on which the striped partition walls 3 are formed is adsorbed and fixed on the base material mounting table 20. Next, the nozzle of the dispenser is positioned above the top of the groove-shaped application region surrounded by the partition walls 3. In this state, gas is supplied from the gas supply device to the pipe, and the organic light emitting material ink is ejected from the nozzle tip, and the tip of the discharged organic light emitting material ink is attached to the tip of the application region. Thereafter, in this state, the electric field applying means applies an electric field between the nozzle and the substrate mounting table, and further accelerates the dispenser toward the application region termination method by a driving means (not shown) while supplying gas to the pipe. . Thereafter, the organic light emitting material ink was applied to the application region by moving at a constant speed.

  In the acceleration region of the dispenser, the set pressure of the gas supply device was changed in accordance with the speed so that the coating amount was adjusted to be a constant amount even in the acceleration region. After that, when the nozzle reached above the end of the application region, the supply of gas to the pipe and the application of the electric field were stopped, the dispenser was decelerated and stopped to finish the application. During application, as shown in FIG. 2, the organic light emitting material ink is blocked by the edge portion of the nozzle protruding portion to form a bead, and by further applying an electric field in that state, the gap between the nozzle tip and the upper surface of the substrate is reduced. Even if it is wide, the bead is electrically attracted and is maintained without being divided, and a stable continuous line can be applied.

  In this embodiment, a liquid-repellent partition is used as the partition, and coating is performed on a substrate having a groove width of 60 microns surrounded by the partition and a coating region interval of 100 microns. As for the nozzle, as a result of trying various conditions for the rising angle of the protruding portion, the contact angle of the surface, the inner diameter, the outer diameter, and the protruding amount, the rising angle of the protruding portion is preferably 80 to 110 deg, and the contact angle is preferably 50 deg or more. It has been found that the inner diameter is preferably about 0.7 to 1.0 times the groove width of the application region, and the outer diameter is preferably about 1.5 to 2.5 times the interval between the application regions.

  The reason why the inner and outer diameters in this range are preferable will be described below with reference to FIGS. 5, 6, 15, and 16.

  5 is an AA arrow view of FIG. 2, FIG. 6 is an enlarged view of part C of FIG. 5, FIG. 15 is an enlarged view of part C when the inner diameter is too large and too small, and FIG. These are the enlarged views of part C when the outer diameter is too large and when it is too small. In these drawings, the dotted line with the width Wb indicates the width of the application region, and the dotted line with the width P indicates the interval between the application regions.

  As shown in FIG. 6, the organic light emitting material ink is stretched to the upstream side of the application on the nozzle surface and is dammed at the edge of the outer diameter to form a bead. The width of the bead increases to the width W with respect to the nozzle inner diameter φd. For this reason, as shown in FIG. 15A, when the nozzle inner diameter is larger than the groove width Wb of the application region, the width of the bead is further increased and exceeds the interval P between the application regions and protrudes onto the groove portion or partition wall of the adjacent application region. End up.

  On the other hand, if the nozzle inner diameter φd is too small, the ink connection between the nozzle hole and the bead becomes thin as shown in FIG. 15B, and it becomes difficult to apply a stable continuous line. On the other hand, if the outer diameter of the nozzle is too large, the bead becomes too large as shown in FIG. 16 (a), and protrudes beyond the gap P or the partition wall of the adjacent application region beyond the interval P between the application regions. On the other hand, if the nozzle outer diameter is too small, the contact area between the bead and the nozzle surface becomes small as shown in FIG. 16B, and the bead easily breaks, making it difficult to apply a stable continuous line.

  Further, when the rising angle of the nozzle protruding portion is smaller than 80 deg, the damming effect at the edge portion becomes weak as shown in FIG. 14, and the ink wets and spreads on the side surface of the nozzle to cause ink accumulation. The ink reservoir grows and drops off, and grows and drops off, causing periodic protrusions in the middle of the continuous line being applied. Similarly, when the roundness of the edge portion becomes large, the damming effect is weakened and the protrusion is likely to occur. Therefore, it is preferable that the roundness of the edge portion is set to a radius of 10 microns or less, and further, a radius of 2 microns or less. I understood.

  Further, as a result of a coating test on the organic light emitting material ink to be used in the range of several tens mPa · sec to several hundred mPa · sec, 50 mPa · sec to 200 mPa · sec is preferable, and further about 100 mPa · sec. It was found that can be applied best.

  In this embodiment, a nozzle having an inner diameter of 50 microns, an outer shape of 250 microns, a protruding amount of 150 microns, a rising angle of 90 deg, a contact angle of 60 deg, an ink viscosity of 110 mPa · sec, and a setting voltage of the electric field applying means of 2. Set to 0 kV. As a result, it was confirmed that the organic light emitting material ink was continuously applied without protruding from the groove portion of the application region with the distance between the nozzle tip and the upper surface of the substrate being 100 microns apart. After repeating this coating operation over the entire surface of the substrate, the ink is dried to form the first color light-emitting layer, and the organic light-emitting material ink of the next color is applied and dried in the same manner. Formed.

  In this embodiment, a nozzle having a circular outer shape is used. However, as shown in FIG. 7, the width D of the outer shape in the same direction as the direction of the interval P of the application region is 1.5 times P. As long as the outer shape is about 2.5 times, the outer shape may be an ellipse or a rectangle. In the present embodiment, a dispenser that pushes out through gas is used, but a dispenser that pushes out ink directly with a piston or the like may be used.

  Further, in this embodiment, a gas supply device that uses an electropneumatic regulator that can adjust the set pressure by inputting an electric signal is used, but a gas supply device that adjusts the opening of the valve using an electric signal is used. It doesn't matter. In this embodiment, after the dispenser is stopped, ink is ejected to form a bead, and then the electric field is applied to start moving the dispenser. However, the dispenser is accelerated before reaching the application area. The ink may be ejected and an electric field may be applied after entering the application region.

  Furthermore, in this embodiment, the dispenser is moved for application, but the substrate side may be moved for application.

(Embodiment 2)
Next, Embodiment 2 will be described with reference to FIGS. 8 is a diagram showing the second embodiment of the present invention, and FIG. 9 is a diagram viewed from the J direction of FIG.

  In FIG. 8, 62 is a multi-hole nozzle, 61 is a multi-hole nozzle manifold that is connected to the upper part of the multi-hole nozzle 62 and supplies ink uniformly to all nozzles, and is connected to the upper part of the multi-hole nozzle manifold. A multi-hole dispenser 65 is configured with the pipe 63 and a constant pressure gas supply device (not shown).

  The base material 1 is a base material with uneven thickness, and the gap between the nozzle tip and the top surface of the base material was different depending on the location of the nozzle as shown in FIG. Even when such a multi-hole dispenser is used, a continuous line is applied even if the gap between the nozzle tip and the upper surface of the substrate is separated by applying an electric field between the nozzle and the substrate mounting table by an electric field applying means. As a result, it was possible to apply a stable continuous line over the entire surface of the substrate even with uneven thickness.

  In the present embodiment, a continuous line that is stable with all 1280 nozzles by adjusting the minimum gap between the nozzle tip and the upper surface of the substrate to 40 microns with respect to equipment having an uneven thickness of 30 microns using 1280 nozzles. Application of was realized.

(Embodiment 3)
Next, Embodiment 3 will be described with reference to FIG. In addition, FIG. 10 is a figure which shows the coating device of Embodiment 3 of this invention.

  In FIG. 10, 1 is a long sheet base material wound around a roll and having uneven thickness, 3 is a striped partition wall formed on the substrate 1 in parallel with the longitudinal direction of the base material, and 48 is between the partition walls 3. This is a multi-nozzle dispenser head in which a plurality of nozzles are arranged above the grooves. Reference numeral 47 denotes a base material pressing roll arranged so that the lower surface of the base material 1 and the nozzle tip of the 48 multi-nozzle dispenser head have a uniform gap, and 41 denotes the nozzles of the 48 multi-nozzle dispenser head and the 47 base material. An electric field applying means for applying an electric field between the pressing roll, 45 is a base material transporting roll 1, 46 is a base material transporting roll 2, and transports a long sheet base material 1 by a driving means (not shown). It can be done.

  Furthermore, a gas supply means (not shown) connected to the multi-nozzle dispenser head 48 to supply gas, a control means (not shown) for controlling the timing of the driving means, the electric field applying means, and the gas supply means are provided. Yes. Next, the operation of the coating apparatus of the present embodiment configured as described above will be described.

  The long sheet substrate 1 is continuously conveyed at a constant speed by the conveying rolls 1 and 2 and is pressed by the substrate pressing roll so that the lower surface of the substrate and the nozzle tip of the multi-nozzle dispenser head have a certain gap. It is conveyed to. On the other hand, in the multi-nozzle dispenser arranged with a gap above the base material, gas is supplied from a gas supply device (not shown) when the tip of the nozzle reaches the upper part of the coating region at the start of the partition wall of the base material 1. At the same time, an electric field is applied between the nozzle and the substrate pressing roll by the electric field applying means, and the organic light emitting material ink is ejected from the nozzle to start application on the substrate. After that, when ink is continuously ejected and the end of the partition reaches below the nozzle, the supply of gas from a gas supply device (not shown) is stopped and the application of the electric field by the electric field applying means is stopped. Ink ejection from the nozzles is terminated.

  By repeating the above operation, coating was performed on a plurality of partition blocks formed on a long sheet having uneven thickness, and coating could be performed with high precision in the grooves of the partition walls.

  In the present embodiment, the case where the organic light emitting layers 4, 5, 6 are formed on the first electrode 2 has been described. However, hole transport is performed on the first electrode 2 as shown in FIG. The layer 9 and the intermediate layer 10 may be stacked by a spin coat method or the like, and the partition wall 3 may be formed thereon, and then the organic light emitting layers 4, 5, and 6 may be formed. Moreover, in this Embodiment, although the electric field was applied between the nozzle and the base-material mounting table, even if an electric field is applied between a nozzle and a base material, the same effect is acquired.

  In the present embodiment, the base material is a polyethylene naphthalate sheet, but the sheet is not limited to this. For example, a glass substrate may be used. Further, although a passive matrix display is described in this embodiment mode, the present invention can also be applied to an active matrix display.

  The method and apparatus for producing an organic EL display of the present invention can be applied not only to forming a light emitting layer of an organic EL display having a fine pixel pitch, but also to forming an intermediate layer or the like in a groove of a partition wall.

DESCRIPTION OF SYMBOLS 1 Base material 3 Partition 14 Organic light emitting material ink 20 Base material mounting table 21 Manifold 22 Nozzle 23 Piping 24 Dispenser 41 Electric field application means 42 Partition formation base material

Claims (11)

A method of forming a functional film by evaporating the solvent after continuously applying a functional film solution in which components of the functional film are dissolved in a solvent to a substrate from a nozzle discharge hole,
The substrate is mounted on a substrate mounting table, and the functional film is applied to the substrate while applying an electric field between the nozzle and the table or between the nozzle and the substrate. The manufacturing method of the functional film | membrane characterized by apply | coating a solution. The method for producing a functional film according to claim 1, wherein a convex portion is provided around the discharge hole in the nozzle, and the functional film solution is applied while being retained by a damming effect at an outer peripheral edge portion of the convex portion. . The method for producing a functional film according to claim 2, wherein an angle formed between the rising surface of the convex portion and the discharge surface of the nozzle is 80 deg to 100 deg. The method for producing a functional film according to claim 3, wherein a surface of the discharge surface of the nozzle has a contact angle of 50 deg or more with respect to the functional film solution. A plurality of application regions surrounded by a partition are formed on the substrate at regular intervals, and
The diameter of the hole of the said nozzle is a manufacturing method of the functional film of Claim 4 which is the range of 0.7 time-1.0 time of the groove width of the said application | coating area | region. The method for producing a functional film according to claim 5, wherein a width in a direction orthogonal to the application direction in which the functional film solution is applied is in a range of 1.5 to 2.5 times a predetermined interval of the application region. The viscosity of the said functional film solution is a manufacturing method of the functional film of Claim 6 which is the range of 50 mPa * sec-200 mPa * sec. The method of manufacturing a functional film according to claim 7, wherein the roundness of the edge portion formed by the rising surface of the convex portion and the discharge surface of the nozzle is 10 μm or less in radius. The method of manufacturing a functional film according to claim 7, wherein the roundness of the edge portion formed by the rising surface of the convex portion and the discharge surface of the nozzle is a radius of 2 microns or less. A substrate mounting table for mounting the substrate;
A dispenser disposed opposite the table and having at least one nozzle;
Drive means for relatively moving the nozzle and the table;
An electric field applying means for applying an electric field between the nozzle and the substrate or between the nozzle and the table;
Control means for controlling the timing of the driving means, the dispenser, and the electric field applying means;
An apparatus for producing a functional film, comprising: A base material transport mechanism for transporting the film-shaped base material with a roll;
A dispenser disposed opposite the substrate and having at least one nozzle;
A substrate pressing roll disposed on the opposite side of the nozzle across the substrate;
An electric field applying means for applying an electric field between the nozzle and the substrate, or between the nozzle and the substrate pressing roll;
Control means for controlling the timing of the substrate transport mechanism, the dispenser, and the electric field applying means;
An apparatus for producing a functional film, comprising:

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