JP2010259998A - Method of manufacturing functional film and apparatus for producing functional film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a functional film by which a homogeneous functional film is formed over the whole surface of a base material. <P>SOLUTION: In the coating of a base material 1 moving relatively to a solution ejection nozzle 6 with an ejected functional film solution (organic light emitting material ink 14) by continuously ejecting the functional film solution prepared by dissolving components of the functional film in a solvent from the solution ejection nozzle 6, the unevenness of the upper surface of the base material 1 due to the uneven thickness is reduced by jetting a gas 13 to the base material 1 supported by an elastic body layer 4 from a static nozzle 7 arranged in the vicinity of the solution ejection nozzle 6 and deforming the base material 1 by the pressure impressed by the jetted gas 13. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a functional film manufacturing method and a functional film manufacturing apparatus for manufacturing a functional film such as an organic light emitting layer of an organic EL display using a coating technique.

  In recent years, a demand for a thin, low power consumption, and lightweight display has increased, and a technique for manufacturing a functional film of a display by a low-cost coating method has attracted attention. For example, when manufacturing the organic light emitting layer of an organic EL display, the technique which prints the organic light emitting material ink on a base material by the inkjet method or a relief printing method is proposed.

  However, in the ink jet method, the slight wetting unevenness on the nozzle surface causes the ink to land on the target portion by changing the flying direction of the liquid droplets, or the non-ejection nozzle is generated during the ejection pause for a short time. The relief printing method has a problem that the printing position accuracy cannot be ensured in the peripheral portion of the display due to expansion and contraction of the plate.

  Therefore, a dispenser-type solution discharge head that is unlikely to generate non-discharge nozzles is mounted on a stage that can be positioned with high accuracy, and the nozzle tip is brought close to the substrate with high positional accuracy, and organic light emitting material ink is used as the substrate. A method of applying has been proposed (see, for example, Patent Document 1).

  Hereinafter, a conventional functional film manufacturing apparatus for applying an organic light emitting material ink to a substrate using a dispenser type solution discharge head will be described with reference to the drawings. 11 is a view showing a part of a conventional functional film manufacturing apparatus, FIG. 12 is a sectional view as seen from the front direction J shown in FIG. 11, and FIG. 13 is a sectional view as seen from the side direction F as shown in FIG.

  11 to 13, reference numeral 101 denotes a base material, 102 denotes a partition provided on the base material 101, 103 denotes a base material mounting table on which the base material 101 is placed, 104 denotes a solution discharge head, and 105 denotes a solution discharge A solution discharge nozzle of the head 104, 106 is a manifold of the solution discharge head 104, 107 is a solution extrusion pipe of the solution discharge head 104, 108 is a solution extrusion gas supplied to the solution extrusion pipe 107, 109 is an organic light emitting material ink It is. G shown in FIGS. 12 and 13 indicates a gap between the base material 101 and the solution discharge nozzle 105.

  FIGS. 11 to 13 show a state in which the organic light emitting material ink 109 continuously discharged from the solution discharge nozzle 105 is applied to the grooves formed in a stripe shape on the substrate 101 by the partition wall 102.

  The solution discharge head 104 includes a solution discharge nozzle 105, a manifold 106 connected to the upper portion of the solution discharge nozzle 105, and a solution extrusion pipe 107 connected to the upper portion of the manifold 106. This is connected to a solution pushing gas supply means (not shown) for supplying the working gas 108.

  In addition, the solution discharge head 104 is arranged along the groove on the substrate 101 with a certain gap G between the substrate 101 and the solution discharge nozzle 105 by a driving unit (not shown). 101 moves over the entire surface.

  Subsequently, an operation of applying the organic light emitting material ink by the conventional functional film manufacturing apparatus configured as described above will be described. When the base material 101 provided with the partition wall 102 is placed on the base material mounting table 103, the partition wall 102 on the base material 101 is provided on the extension line in the groove direction of the groove portion on the base material 101. The solution discharge nozzle 105 is positioned in a non-outside region. Next, the movement of the solution discharge head 104 along the groove direction is started, and the solution discharge head 104 is accelerated until the solution discharge nozzle 105 reaches the upper portion of the groove portion. Then, the acceleration of the solution discharge head 104 is stopped when the solution discharge nozzle 105 reaches the upper portion of the groove, and thereafter, the solution discharge head 104 is moved at a constant speed to the end of the groove. On the other hand, supply of the solution extrusion gas 108 is started when the solution discharge nozzle 105 reaches the upper portion of the groove, and the organic light emitting material is emitted from the solution discharge nozzle 105 while the solution discharge nozzle 105 is moving on the upper portion of the groove. The ink 109 is continuously ejected to apply the organic light emitting material ink 109 to the groove. Then, when the solution discharge nozzle 105 reaches the end of the groove, the supply of the solution extrusion gas 108 is stopped, and the application of the organic light emitting material ink 109 is stopped. Thereafter, the same coating operation is performed on the other grooves.

JP 2001-189192 A (page 4, FIG. 1)

  As described above, as a functional film manufacturing apparatus for manufacturing an organic light emitting layer of an organic EL display, an apparatus for applying an organic light emitting material ink to a substrate using a dispenser type solution discharge head has been conventionally proposed. However, in the method of applying the organic light emitting material ink using the dispenser type solution discharge head as described above, when a portion where the solution discharge nozzle is not sufficiently close to the substrate occurs due to uneven thickness of the substrate, the portion Thus, the application state of the organic light emitting material ink is interrupted, and the organic light emitting material ink is not applied in a single line shape to the groove portion, and there is a problem that a uniform organic light emitting layer cannot be manufactured.

  FIG. 14 is a diagram illustrating a state where the application state of the organic light emitting material ink is interrupted in the conventional functional film manufacturing apparatus, and FIG. 15 is a cross-sectional view viewed from the side surface direction F illustrated in FIG. 14 and 15, members corresponding to those shown in FIGS. 11 to 13 are denoted by the same reference numerals, and description thereof is omitted.

  In the case of an ink having a viscosity of several hundreds mPa · sec or less, such as an organic light emitting material ink, the ink itself is easily cut off. Therefore, when the gap G between the substrate 101 and the solution discharge nozzle 105 is widened as shown in FIG. Further, the organic light emitting material ink 109 is more easily broken. Therefore, if the thickness of the base material 101 varies depending on the location due to uneven thickness of the base material 101, the organic material discharged from the solution discharge nozzle 105 when the gap G between the base material 101 and the solution discharge nozzle 105 widens. The light emitting material ink 109 is torn off, and the organic light emitting material ink 109 is applied intermittently instead of being applied in a single line as shown in FIG.

  The problem that the application state of the organic light emitting material ink described above is intermittently interrupted becomes prominent when the organic light emitting material ink is applied to a substrate using a solution discharge head provided with a plurality of solution discharge nozzles. That is, when the organic light emitting material ink is applied to the entire surface of the substrate using a single solution discharge nozzle, organic light emission is achieved by sequentially adjusting the gap between the solution discharge nozzle and the substrate to a minute amount. Material ink can be applied in a single line, but when organic light emitting material ink is discharged simultaneously from multiple solution discharge nozzles, the gap between each solution discharge nozzle and the substrate is adjusted individually. Even if the gap between any one solution discharge nozzle and the substrate is adjusted, the organic light emitting material ink discharged from the other solution discharge nozzles may be interrupted.

  FIG. 16 is a view showing a part of a conventional functional film manufacturing apparatus for applying an organic light emitting material ink to a substrate using a solution discharge head provided with a plurality of solution discharge nozzles, and FIG. 17 is a front direction shown in FIG. It is sectional drawing seen from J. FIG. 18 is a perspective view of a conventional solution discharge head provided with a plurality of solution discharge nozzles as viewed from the back side. 16 and 17, members corresponding to those shown in FIGS. 11 to 13 are denoted by the same reference numerals, and description thereof is omitted.

  16 to 18, 110 is a solution discharge head, 111 is a solution discharge nozzle of the solution discharge head 110, 112 is a nozzle plate of the solution discharge head 110, 113 is a manifold of the solution discharge head 110, and 114 is of the solution discharge head 110. A solution extrusion pipe 115 is a solution extrusion gas supplied to the solution extrusion pipe 114.

  16 and 17 show the organic light-emitting material ink 109 that is simultaneously and continuously discharged from a plurality of solution discharge nozzles 111 into a part of the grooves formed in stripes on the substrate 101 with uneven thickness. It shows a state of coating.

  The solution discharge head 110 includes a nozzle plate 112 in which a plurality of solution discharge nozzles 111 are formed in a row, a manifold 113 connected to the upper part of the nozzle plate 112, and a solution extrusion pipe 114 connected to the upper part of the manifold 113. The solution push-out pipe 114 is connected to a solution push-out gas supply means (not shown) for supplying the solution push-out gas 115. The solution discharge head 110 configured in this manner continuously supplies the organic light emitting material ink 109 from the plurality of solution discharge nozzles 111 formed on the nozzle plate 112 by supplying the solution extrusion gas 115 to the solution extrusion pipe 114. To be discharged.

  In addition, the solution discharge head 110 is positioned on the substrate 101 in a state in which the solution discharge head 110 is positioned in the height direction so that a certain gap is formed between the substrate 101 and each solution discharge nozzle 111 by a driving unit (not shown). It moves along the groove part.

  By using the solution discharge head 110 provided with the plurality of solution discharge nozzles 111 as described above, the organic light emitting material ink 109 is simultaneously applied to a part of the plurality of grooves on the base material 101, so that the application tact time is reduced. Can be shortened. However, as shown in FIGS. 16 and 17, if the base material 101 is uneven, the solution discharge nozzle 111 is not sufficiently close to the base material 101 at the thinnest part of the base material 101, and the intermittent application state Will occur.

  The present invention was made in view of the above-described conventional problems, and a functional film solution in which components of the functional film are dissolved in a solvent is continuously discharged from a solution discharge nozzle to a substrate with uneven thickness, An object of the present invention is to provide a functional film production method and a functional film production apparatus capable of producing a homogeneous functional film over the entire surface of the base material even when the functional film solution is applied to the base material.

  In the method for producing a functional film according to claim 1 of the present invention, a functional film solution in which a component of the functional film is dissolved in a solvent is continuously discharged from a solution discharge nozzle, and the discharged functional film solution is Applying the functional film solution to a substrate that moves relative to the solution discharge nozzle, and after applying the functional film solution, evaporating the solvent of the functional film solution to produce a functional film, From the static pressure nozzle disposed in the vicinity of the solution discharge nozzle, the gas is ejected to the base material supported by the elastic layer, and the base material is deformed by the pressure applied by the ejected gas, The functional film solution is applied to the substrate.

  Moreover, the manufacturing method of the functional film of Claim 2 of this invention is a manufacturing method of the functional film of Claim 1, Comprising: Said solution along the relative moving direction of the said solution discharge nozzle and the said base material When applying the functional film solution to the substrate while ejecting the gas from the static pressure nozzle disposed so as to sandwich the discharge nozzle, from the static pressure nozzle on the upstream side in the relative movement direction, The gas is ejected so that the base material is pressurized with a pressurizing force larger than the pressurizing force of the gas ejected from the static pressure nozzle on the downstream side in the relative moving direction.

  Moreover, the manufacturing method of the functional film of Claim 3 of this invention is a manufacturing method of the functional film in any one of Claim 1 or 2, Comprising: The said base material differs in thickness according to a location, It is characterized by the above-mentioned. To do.

  Moreover, the manufacturing method of the functional film of Claim 4 of this invention is a manufacturing method of the functional film in any one of Claim 1 thru | or 3, Comprising: The clearance gap between the said solution discharge nozzle and the said base material Is 100 μm or less.

  The method for producing a functional film according to claim 5 of the present invention is the method for producing a functional film according to claim 4, wherein the functional film has a viscosity in the range of 10 mPa · sec to 500 mPa · sec. It is characterized by using a solution.

  Moreover, the manufacturing method of the functional film of Claim 6 of this invention is a manufacturing method of the functional film in any one of Claim 1 thru | or 5, Comprising: A several application area | region is a fixed space | interval on the said base material. The functional film solution is applied to the application region.

  Moreover, the manufacturing method of the functional film of Claim 7 of this invention is a manufacturing method of the functional film of Claim 6, Comprising: The said functional film solution is discharged from several said solution discharge nozzles, and several said said When the functional film solution is simultaneously applied to a part of the application region, the gas is ejected from the plurality of static pressure nozzles arranged in the vicinity of the plurality of solution discharge nozzles.

  Moreover, the functional film manufacturing apparatus according to claim 8 of the present invention is a functional film manufacturing apparatus for manufacturing a functional film by applying a functional film solution in which a component of the functional film is dissolved in a solvent on a base material. An elastic layer that supports the base material so as to be elastically deformable; a solution discharge nozzle that discharges the functional film solution disposed above the base material with a gap; and a static pressure that is disposed in the vicinity of the solution discharge nozzle A nozzle, and relatively moves the base material supported by the elastic body layer and the solution discharge nozzle, and jets gas from the static pressure nozzle to the base material by the jetted gas. The functional film solution is continuously applied to the base material while the base material is deformed by an applied pressure.

  The functional film manufacturing apparatus according to claim 9 of the present invention is the functional film manufacturing apparatus according to claim 8, wherein the elastic body layer is provided on a substrate mounting stage. .

  Moreover, the functional film manufacturing apparatus of Claim 10 of this invention is a functional film manufacturing apparatus of Claim 8, Comprising: One set of roll which conveys the said sheet-like base material, and the said elastic body layer are surfaces. And the substrate pressing roll is arranged to face the solution discharge nozzle with the substrate conveyed by the one set of rolls interposed therebetween. .

  Moreover, the functional film manufacturing apparatus of Claim 11 of this invention is a functional film manufacturing apparatus in any one of Claim 8 thru | or 10, Comprising: The relative moving direction of the said solution discharge nozzle and the said base material A plurality of the static pressure nozzles are arranged so as to sandwich the solution discharge nozzle along the vertical direction, from the static pressure nozzle on the upstream side in the relative movement direction, to the downstream side in the relative movement direction. The gas is ejected so that the base material is pressurized with a pressurizing force larger than the pressurizing force of the gas ejected from a static pressure nozzle.

  A functional film manufacturing apparatus according to a twelfth aspect of the present invention is the functional film manufacturing apparatus according to any one of the eighth to eleventh aspects, wherein a plurality of the solution discharge nozzles and a plurality of the solution discharge nozzles in the vicinity thereof. The functional film solution is simultaneously applied to a part of a plurality of application regions formed at regular intervals on the substrate. It is arranged so that it may be arranged.

  According to a preferred embodiment of the present invention, a functional film solution in which components of the functional film are dissolved in a solvent is continuously discharged from a solution discharge nozzle to a substrate having uneven thickness, and the functional film solution is applied to the substrate. In the case of coating the substrate, the substrate can be deformed by the pressure applied by the gas ejected from the static pressure nozzle, the unevenness of the substrate can be reduced, and a homogeneous functional film can be produced over the entire surface of the substrate.

The figure which shows the principal part of the functional film manufacturing apparatus in Embodiment 1 of this invention Sectional view seen from the front direction J shown in FIG. Sectional view seen from the side direction F shown in FIG. The perspective view which looked at the solution discharge head of the functional film manufacturing apparatus in Embodiment 1 of this invention from the back side The perspective view which shows a part of other example of the solution discharge head of the functional film manufacturing apparatus in Embodiment 1 of this invention. The figure which shows the structure of one Example of the organic EL display in Embodiment 1 of this invention The figure which shows one Example of the manufacturing process of the organic light emitting layer of the organic electroluminescent display in Embodiment 1 of this invention. The perspective view which shows a part of solution discharge head of the functional film manufacturing apparatus in Embodiment 1 of this invention Sectional drawing which looked at the principal part of the functional film manufacturing apparatus in Embodiment 2 of this invention from the side surface direction The figure which shows the principal part of the functional film manufacturing apparatus in Embodiment 3 of this invention. A diagram showing a part of a conventional functional membrane manufacturing system Sectional view seen from the front direction J shown in FIG. Sectional view seen from the side direction F shown in FIG. The figure which shows a mode that the application state of organic luminescent material ink interrupts in the conventional functional film manufacturing apparatus Sectional view seen from the side direction F shown in FIG. The figure which shows a part of functional film manufacturing apparatus provided with the solution discharge head provided with the conventional several solution discharge nozzle Sectional view seen from front direction J shown in FIG. The perspective view which looked at the solution discharge head provided with the conventional several solution discharge nozzle from the back side

  Hereinafter, a functional film manufacturing method and a functional film manufacturing apparatus according to each embodiment of the present invention will be described with reference to the drawings. However, members corresponding to the members described in advance are denoted by the same reference numerals, and description thereof is omitted as appropriate.

  In each of the following embodiments, a case where an organic light emitting layer of an organic EL display is manufactured will be described. When manufacturing an organic light emitting layer, an organic light emitting material ink in which an organic light emitting material is dissolved in a solvent is used as a functional film solution in which the components of the functional film are dissolved in a solvent.

  In each of the following embodiments, a case where an organic light emitting layer of a passive matrix type organic EL display is manufactured will be described as an example. However, the present invention is a case where an organic light emitting layer of an active matrix type organic EL display is manufactured. Can also be implemented.

(Embodiment 1)
1 is a diagram showing a main part of a functional film manufacturing apparatus according to Embodiment 1 of the present invention, FIG. 2 is a cross-sectional view seen from the front direction J shown in FIG. 1, and FIG. 3 is seen from a side direction F shown in FIG. FIG. 4 is a perspective view of the solution ejection head of the functional film manufacturing apparatus according to Embodiment 1 of the present invention as seen from the back side.

  1 to 4, 1 is a substrate having uneven thickness, 2 is a partition wall, 3 is a substrate mounting table, 4 is an elastic layer, 5 is a solution discharge head, and 6 is a solution discharge nozzle of the solution discharge head 5. , 7 is a static pressure nozzle of the solution ejection head 5, 8 is a nozzle plate of the solution ejection head 5, 9 is a manifold of the solution ejection head 5, 10 is a solution extrusion pipe of the solution ejection head 5, and 11 is a solution ejection head 5. A static pressure nozzle pipe, 12 is a solution extrusion gas supplied to the solution extrusion pipe 10, 13 is a static pressure nozzle gas supplied to the static pressure nozzle pipe 11, and 14 is an organic light emitting material ink.

  The substrate 1 has uneven thickness, and the thickness varies depending on the location. A partition wall 2 is provided on the substrate 1, and a region on the substrate 1 divided by the partition wall 2 is a coating region. Here, a case will be described in which grooves are formed as stripes at regular intervals on the substrate 1 as application regions. The elastic body layer 4 is provided on the base material mounting table 3, and the elastic body layer 4 supports the base material 1 so as to be elastically deformable.

  The solution discharge head 5 includes a nozzle plate 8 in which a plurality of solution discharge nozzles 6 and a plurality of static pressure nozzles 7 are formed. The plurality of solution discharge nozzles 6 are arranged in a row so that when the organic light emitting material ink 14 is applied to the substrate 1, the organic light emitting material ink 14 is simultaneously applied to a part of the plurality of grooves on the substrate 1. Deploy. The plurality of static pressure nozzles 7 are arranged in the vicinity of the plurality of solution discharge nozzles 6. Specifically, the plurality of static pressure nozzles 7 are arranged in two rows so as to sandwich the row of the solution discharge nozzles 6 along the relative movement direction of the substrate 1 and the solution discharge head 5.

  The solution discharge head 5 includes a manifold 9 connected to the upper part of the nozzle plate 8. A storage tank for storing the organic light emitting material ink 14 is formed in the nozzle plate 8 and the manifold 9 connected to each other. The storage tank communicates with the solution discharge nozzle 6.

  The solution discharge head 5 includes a solution extrusion pipe 10 and a static pressure nozzle pipe 11 connected to the upper portion of the manifold 9. The solution extrusion pipe 10 communicates with the nozzle plate 8 and the reservoir 9 formed inside the manifold 9. The static pressure nozzle pipe 11 branches inside the manifold 9 and communicates with each static pressure nozzle 7.

  The solution extruding pipe 10 is connected to a solution extruding gas supply means (not shown) for supplying the solution extruding gas 12 and is connected by the supply of the solution extruding gas 12 by the solution extruding gas supply means. The organic light emitting material ink 14 stored in the storage tank formed inside the nozzle plate 8 and the manifold 9 is simultaneously and continuously discharged from the plurality of solution discharge nozzles 6 formed on the nozzle plate 8.

  The static pressure nozzle pipe 11 is connected to a static pressure nozzle gas supply means (not shown) for supplying the static pressure nozzle gas 13, and the supply of the static pressure nozzle gas 13 by the static pressure nozzle gas supply means. Thus, the static pressure nozzle gas 13 is ejected from the static pressure nozzle 7.

  As the solution extrusion gas supply means and the static pressure nozzle gas supply means described above, for example, an electropneumatic regulator capable of adjusting a set pressure by an electric signal may be used, or a valve may be opened by an electric signal. A method of adjusting the degree may be used.

  In addition, the functional film manufacturing apparatus includes a driving unit (not shown) that moves the solution discharge head 5. By this driving means, the solution discharge head 5 and the substrate 1 can be relatively moved. Here, the groove portion on the base material 1 in a state where the solution discharge head 5 is positioned in the height direction so that a predetermined gap is provided between each solution discharge nozzle 6 and the base material 1 by the driving means. Move along.

  Moreover, although not shown in figure, this functional film manufacturing apparatus is equipped with a drying apparatus. This drying device (not shown) evaporates the solvent of the organic light emitting material ink 14 after the organic light emitting material ink 14 is applied to the groove on the substrate 1.

  The functional film manufacturing apparatus configured as described above simultaneously discharges the organic light emitting material ink 14 from the plurality of solution discharge nozzles 6 arranged in a row at the same time, and the substrate 1 is applied to the solution discharge nozzle 6. The organic light emitting material ink 14 is applied to a part of the groove portion formed in a stripe shape by the partition wall 2 on the base material 1 by being relatively moved, and then the solvent of the organic light emitting material ink 14 is evaporated to form an organic material. A light emitting layer is manufactured. Further, when the organic light emitting material ink 14 is applied, the static pressure nozzle gas 13 is ejected from the static pressure nozzle 7 to the substrate 1 supported by the elastic layer 4, and the static pressure nozzle gas 13 is ejected. The base material 1 is deformed by the applied pressure.

  Subsequently, regarding the operation of the functional film manufacturing apparatus, the organic light emitting layers of the three primary colors so that the red organic light emitting layer, the green organic light emitting layer, and the blue organic light emitting layer are sequentially arranged from the left end of the substrate 1. An example of manufacturing the case will be described.

  First, the base material 1 provided with the partition walls 2 is adsorbed and fixed on the elastic body layer 4. Next, each solution discharge nozzle 6 is positioned above the top of some of the plurality of grooves formed on the substrate 1. Specifically, each solution discharge nozzle 6 is positioned above the top of each groove where the red organic light emitting layer is provided.

  Next, the supply of the static pressure nozzle gas 13 is started, and while the static pressure nozzle gas 13 is ejected from the static pressure nozzle 7, the solution discharge head 5 is lowered by a driving means (not shown), and the static pressure nozzle 7 The substrate 1 is deformed by the pressure applied by the jetted static pressure nozzle gas 13 to reduce unevenness due to uneven thickness on the upper surface of the substrate 1.

  Next, supply of the solution extrusion gas 12 is started, the red organic light emitting material ink 14 is discharged from the solution discharge nozzle 6, and the tip of the red organic light emitting material ink 14 is attached to the tip of the groove.

  Next, while continuing to supply the gas 13 for static pressure nozzle and the gas 12 for extruding the solution, the solution discharge head 5 is accelerated toward the end method of the groove by driving means (not shown), and then moved at a constant speed, Red organic light emitting material ink 14 is applied to the groove. In the acceleration region of the solution ejection head 5, it is preferable to adjust the application amount in the acceleration region to be a constant amount by changing the set pressure of the solution extrusion gas 12 according to the speed.

  When the solution discharge nozzle 6 reaches the end of the groove, the supply of the solution extrusion gas 12 is stopped and the movement of the solution discharge head 5 is stopped. Next, after the solution discharge head 5 is raised and moved away from the substrate 1, the supply of the static pressure nozzle gas 13 is stopped and the coating operation is terminated. Thereafter, the red organic light emitting material ink 14 is dried to produce a red organic light emitting layer. When stopping the movement of the solution discharge head 5, it is preferable to decelerate the solution discharge head 5 before the solution discharge nozzle 6 reaches the end of the groove.

  Thereafter, the same operation as that for producing the red organic light emitting layer is repeated for each groove portion for providing the green organic light emitting layer and each groove portion for providing the blue organic light emitting layer. An organic light emitting layer can be manufactured. Note that when changing the color of the organic light emitting material ink to be applied, for example, switching to a solution discharge head storing the organic light emitting material ink of the color to be changed may be performed.

  As described above, when the organic light emitting material ink 14 is applied to the substrate 1, the substrate 1 supported by the elastic body layer 4 from the plurality of static pressure nozzles 7 disposed in the vicinity of the plurality of solution discharge nozzles 6. By ejecting the gas 13 for static pressure nozzles, the substrate 1 is deformed by the pressure applied by the ejected gas 13 for static pressure nozzles, and unevenness due to uneven thickness on the upper surface of the substrate 1 can be reduced. .

  That is, when the gap between the static pressure nozzle 7 and the base material 1 is widened, the pressure applied by the static pressure nozzle gas 13 is weakened, and the pressure is rapidly increased as the gap is narrowed. Therefore, when the solution discharge head 5 having a plurality of static pressure nozzles 7 is brought close to the uneven base material 1 supported by the elastic layer 4, the convex portion is stronger than the concave portion of the base material 1. The unevenness on the upper surface of the base material 1 can be reduced by being pressed and pressed more greatly.

  Therefore, the organic light emitting material ink 14 can be applied to the substrate 1 with the unevenness suppressed, and the gap between the solution discharge nozzle 6 and the substrate 1 is set to an interval at which the ink is not interrupted on the entire surface of the substrate 1. The organic light emitting material ink 14 can be applied in a single line without being interrupted, and a uniform organic light emitting layer can be produced.

  Here, as the solution discharge head 5, a type in which ink is pushed out by gas is used, but a type in which ink is directly pushed out by a piston or the like may be used. Here, the solution discharge head 5 is moved when applying the organic light emitting material ink 14, but the substrate 1 side may be moved. FIG. 4 shows the solution discharge nozzle 6 having a shape with a hole in the plane. However, the shape is not limited to the shape. For example, as shown in FIG. 5, the solution discharge nozzle 6 is a protruding nozzle. It does not matter.

  Next, an example of the functional film manufacturing method and the functional film manufacturing apparatus according to the first embodiment will be described with reference to the drawings. 6A and 6B are diagrams showing a structure of an example of the organic EL display according to Embodiment 1 of the present invention, in which FIG. 6A is a plan view and FIG. 6B is A in FIG. 6A. It is sectional drawing along the -A line. Moreover, FIG. 7 is a figure which shows an Example of the manufacturing process of the organic light emitting layer of the organic electroluminescent display in Embodiment 1 of this invention.

  6 and 7, 15 is the first electrode, 16 is the red organic light emitting layer provided in the groove on the substrate 1, 17 is the green organic light emitting layer provided in the groove on the substrate 1, and 18 is the base. A blue organic light emitting layer provided in the groove on the material 1, 19 is a second electrode, and 20 is a display image area of the organic EL display.

  As shown in FIG. 6, the first electrode 15 is formed in a stripe shape on the substrate 1. The partition 2 is formed so that a part of the first electrode 15 overlaps the groove. The red organic light-emitting layer 16, the green organic light-emitting layer 17, and the blue organic light-emitting layer 18 are sequentially and repeatedly arranged on the base material 1 in stripe-shaped grooves separated by the partition walls 2. Specifically, as described above, the red organic light emitting layer 16, the green organic light emitting layer 17, and the blue organic light emitting layer 18 are sequentially and repeatedly arranged from the left end of the substrate 1. The second electrode 19 is formed on the organic light emitting layers 16, 17 and 18.

  Here, a glass plate having an uneven thickness of 40 μm and an average plate thickness of 0.7 mm was used as the substrate 1. The first electrode 15 may be formed by patterning using ITO, for example, by photolithography. The thickness of the organic light emitting layers 16, 17, and 18 was about 60 nm. The partition wall 2 may be formed by patterning, for example, using a photosensitive resin material by a photolithography method. As the material of the partition wall 2, a photosensitive resin material containing fluorine so as to exhibit liquid repellency with respect to the organic light emitting material ink after patterning and a contact angle of the organic light emitting material ink to be 50 deg or more is used. Is preferred. Al was used as the material of the second electrode 19. The second electrode 19 may be patterned by, for example, a vacuum deposition method through a mask.

  The manufacturing process of the organic light emitting layer of the organic EL display having the above-described configuration will be described with reference to FIG. First, as shown in FIG. 7A, a base material 1 on which a partition wall 2 is formed is prepared. Here, the width of the partition wall 2 is 40 μm, the height is 1 μm, the width of the groove section separated by the partition wall 2 is 60 μm, and the pitch of the groove section is 100 μm.

  Next, red organic light emitting material ink is continuously applied to some of the plurality of grooves on the substrate 1 and then dried, and the red organic light emitting layer 16 is formed as shown in FIG. To manufacture. Next, a green organic light emitting material ink is continuously applied simultaneously to the groove portions adjacent to the respective groove portions provided with the red organic light emitting layer 16 and then dried, as shown in FIG. Layer 17 is manufactured. Finally, the blue organic light emitting material ink is continuously applied simultaneously to the groove portions adjacent to the respective groove portions where the green organic light emitting layer 17 is provided, and then dried, as shown in FIG. 18 is manufactured.

  Here, as the nozzle plate 8 for applying the organic light emitting material ink of each color to the substrate 1, the hole diameter of the solution discharge nozzle 6 is 30 μm, the pitch of the solution discharge nozzle 6 is 300 μm, and the number of holes of the solution discharge nozzle 6 is 1300. The pitch Np1 between the holes and the rows of the static pressure nozzles 7 is 40 mm, the pitch Np2 in the row direction of the static pressure nozzles 7 is 15 mm, the number of holes in the static pressure nozzle 7 is 27 on one side, a total of 54, and the groove width of the static pressure pad An Nw of 2 mm and a hydrostatic pad depth of 0.5 mm were used. FIG. 8 shows the pitch Np1 between the rows of the static pressure nozzles 7, the pitch Np2 in the row direction of the static pressure nozzles 7, and the groove width Nw of the static pressure pad. Further, an organic light emitting material ink having a viscosity of 100 mPa · sec was used.

  When the organic light emitting material ink is applied using the nozzle plate and the organic light emitting material ink in a state where the ejection of the static pressure nozzle gas 13 from the static pressure nozzle 7 is stopped, the substrate 1 and the solution discharge nozzle When the gap between the substrate 6 and the solution discharge nozzle 6 is set to 10 μm, the application state of the organic light emitting material ink is interrupted at the portion where the gap between the substrate 1 and the solution discharge nozzle 6 is 40 μm or more. The intermittent application state appeared. On the other hand, when the organic light emitting material ink is applied in a state where the static pressure nozzle gas 13 is ejected from the static pressure nozzle 7, the organic light emitting material ink is continuously applied to the entire surface of the substrate 1 without protruding from the groove portion. I was able to.

  6B shows an organic EL display in which the organic light-emitting layers 16, 17, and 18 are provided on the first electrode 15. However, as shown in FIG. The organic light-emitting layers 16, 17, and 18 may be manufactured after the hole transport layer 21 and the intermediate layer 22 are stacked on each other by spin coating and the partition wall 2 is formed thereon.

  Further, in the above embodiment, the organic light emitting material ink having a viscosity of 100 mPa · sec is used. However, the present invention is suitable for the organic light emitting material ink having a viscosity in the range of 10 mPa · sec to 500 mPa · sec. Can be implemented. In addition, when an organic light emitting material ink having a viscosity of 500 mPa · sec is used, the static pressure nozzle gas 13 is jetted so that the gap between the solution discharge nozzle 6 and the substrate 1 is 100 μm or less over the entire surface of the substrate 1. It is suitable to make it.

(Embodiment 2)
FIG. 9 is a cross-sectional view of the main part of the functional film manufacturing apparatus according to the second embodiment of the present invention as viewed from the side. In FIG. 9, 7a and 7b are static pressure nozzles, 11a and 11b are static pressure nozzle pipes, and 13a and 13b are static pressure nozzle gases.

  The functional film manufacturing apparatus according to the second embodiment is different from the first embodiment described above in the configuration of the solution discharge head 5. That is, in the solution discharge head 5 according to the first embodiment described above, one static pressure nozzle pipe 11 branches inside the manifold 9 and communicates with the plurality of static pressure nozzles 7. On the other hand, in the solution discharge head 5 according to the second embodiment, as shown in FIG. 9, two static pressure nozzle pipes 11a and 11b are connected to the upper part of the manifold 9, and one of the static pressures The nozzle pipe 11a branches inside the manifold 9 and communicates with the respective static pressure nozzles 7a on the upstream side in the relative movement direction of the solution discharge head 5 and the substrate 1, and the other static pressure nozzle pipe 11b is connected. It branches inside the manifold 9 and communicates with the respective static pressure nozzles 7b on the downstream side in the relative movement direction of the solution discharge head 5 and the substrate 1. As described above, in the second embodiment, the piping systems connected to the two rows of static pressure nozzles 7a and 7b provided on the nozzle plate 8 are different from each other.

  Next, the operation of this functional film manufacturing apparatus will be described. The operation of this functional film manufacturing apparatus supplies the supply amount of the static pressure nozzle gas 13a supplied to the upstream side static pressure nozzle 7a to the downstream side static pressure nozzle 7b when the organic light emitting material ink is applied. The applied pressure is set to be larger than the supply amount of the static pressure nozzle gas 13b and is larger than the applied pressure by the static pressure nozzle gas 13b ejected from the upstream static pressure nozzle 7a. Thus, the first embodiment is different from the first embodiment in that the static pressure nozzle gas 13a is ejected so that the substrate 1 is pressurized.

  Thus, by increasing the pressure on the upstream side more than that on the downstream side, the bead of the solution formed between the solution discharge nozzle 6 and the substrate 1 is pushed back to the upstream side, making it difficult to tear the bead. The application state of the luminescent material ink 14 is difficult to tear.

  According to the second embodiment, as in the first embodiment described above, the organic light emitting material ink 14 can be applied to the entire surface of the substrate 1 in a single line without being interrupted. The layer can be manufactured. For example, in the example in which the organic light emitting layer of the organic EL display shown in FIG. 6 described in the first embodiment is manufactured in the manufacturing process shown in FIG. 7 using the nozzle plate 8 shown in FIG. When a pressure difference of 10 kPa is set on the side and the downstream side and the other conditions are the same, the organic light emitting material ink is applied to a base material with an uneven thickness of 50 μm without tearing the application state. I was able to.

(Embodiment 3)
FIG. 10 is a diagram showing a main part of the functional film manufacturing apparatus according to Embodiment 3 of the present invention. In FIG. 10, 23a and 23b are conveyance rolls, 24 is a base-material press roll.

  This functional film manufacturing apparatus is configured to manufacture an organic light emitting layer on a long sheet-like substrate 1. Specifically, the long sheet-like base material 1 is provided with a plurality of partition walls 2 that form stripe-shaped grooves parallel to the longitudinal direction thereof, and a set of transport rolls. The organic light-emitting material ink 14 is applied to the long sheet-like substrate 1 conveyed by 23a and 23b. That is, this functional film manufacturing apparatus includes a pair of transport rolls 23a and 23b as driving means for relatively moving the solution discharge head 5 and the substrate 1. For example, a polyethylene naphthalate sheet is used as the substrate 1, but of course, the material of the substrate 1 is not limited to polyethylene naphthalate, and may be, for example, a transparent polyimide film.

  Furthermore, this functional film manufacturing apparatus includes a base material pressing roll 24 provided on the surface with an elastic body layer 4 that supports the base material 1 so as to be elastically deformable. The base material pressing roll 24 is disposed to face the solution discharge head 5 with the base material 1 transported by the transport rolls 23a and 23b interposed therebetween.

  Subsequently, regarding the operation of the functional film manufacturing apparatus, the organic light emitting layers of the three primary colors so that the red organic light emitting layer, the green organic light emitting layer, and the blue organic light emitting layer are sequentially arranged from the left end of the substrate 1. An example of manufacturing the case will be described.

  First, the solution discharge head 5 is positioned so that each solution discharge nozzle 6 passes above each groove where the red organic light emitting layer is provided, and the long sheet substrate 1 is conveyed by the pair of conveyance rolls 23a and 23b. To start. When the organic light emitting material ink 14 is applied on the base material 1, the long base material 1 is continuously conveyed between the base material pressing roll 24 and the solution discharge head 5 at a constant speed. Meanwhile, the substrate 1 is pressed from the lower surface by the substrate pressing roll 24, and is pressed from the upper surface by the static pressure nozzle gas 13 ejected from the static pressure nozzle 7. Will be reduced.

  In this state, when the head of the groove formed on the substrate 1 reaches below each solution discharge nozzle 6, supply of the solution extrusion gas 12 is started, and the organic light emitting material ink 14 is discharged. By discharging from the nozzle 6, the tip of the red organic light emitting material ink 14 is attached to the tip of the groove. Thereafter, the red organic light emitting material ink 14 is continuously discharged from the solution discharge nozzle 6, and when the end of the groove portion reaches below each solution discharge nozzle 6, the supply of the solution extrusion gas 12 is stopped, and the solution discharge is performed. The discharge of the red organic light emitting material ink 14 from the nozzle 6 is stopped.

  By repeating the above operation, the red organic light emitting material ink 14 is applied to the grooves formed by the respective partitions 3 provided on the long sheet-like substrate 1, and then the red organic light emitting material ink 14 is applied. A red organic light emitting layer is produced by drying.

  Thereafter, the same operation as that for producing the red organic light emitting layer is repeated for each groove portion for providing the green organic light emitting layer and each groove portion for providing the blue organic light emitting layer. An organic light emitting layer can be manufactured. Note that when changing the color of the organic light emitting material ink to be applied, for example, switching to a solution discharge head storing the organic light emitting material ink of the color to be changed may be performed.

  According to the third embodiment, as in the first embodiment described above, the organic light emitting material ink 14 can be applied to the entire surface of the substrate 1 in a single line shape without any interruption, and uniform organic light emission is achieved. A layer can be formed.

  The functional film manufacturing method and the functional film manufacturing apparatus of the present invention continuously discharge a functional film solution in which components of the functional film are dissolved in a solvent from a solution discharge nozzle to a substrate with uneven thickness. Even when the functional film solution is applied to the base material, a uniform functional film can be produced over the entire surface of the base material, which is useful for a passive matrix type organic EL display or an active matrix type organic EL display.

DESCRIPTION OF SYMBOLS 1,101 Base material 2,102 Partition 3,103 Base material mounting table 4 Elastic body layer 5,104,110 Solution discharge head 6,105,111 Solution discharge nozzle 7,7a, 7b Static pressure nozzle 8,112 Nozzle plate 9, 106, 113 Manifold 10, 107, 114 Solution extrusion piping 11, 11a, 11b Static pressure nozzle piping 12, 108, 115 Solution extrusion gas 13, 13a, 13b Static pressure nozzle gas 14, 109 Organic light emitting material Ink 15 First electrode 16 Red (R) organic light emitting layer 17 Green (G) organic light emitting layer 18 Blue (B) organic light emitting layer 19 Second electrode 20 Display pixel region 21 Hole transport layer 22 Intermediate layer 23a, 23b Transport Roll 24 Base material pressing roll

Claims (12)

  A functional film solution in which components of the functional film are dissolved in a solvent is continuously discharged from a solution discharge nozzle, and the discharged functional film solution is applied to a substrate that moves relative to the solution discharge nozzle. A functional film manufacturing method for manufacturing a functional film by evaporating the solvent of the functional film solution after applying the functional film solution, wherein the functional film solution is elastic from a static pressure nozzle disposed in the vicinity of the solution discharge nozzle. A gas is jetted onto the base material supported by a body layer, and the functional film solution is applied to the base material while the base material is deformed by the pressure applied by the jetted gas. A method for producing a functional film.   The functional film solution is applied to the substrate while the gas is ejected from the static pressure nozzle disposed so as to sandwich the solution discharge nozzle along the relative movement direction of the solution discharge nozzle and the substrate. In this case, the base pressure is greater than the pressure applied by the gas ejected from the static pressure nozzle upstream of the relative movement direction from the static pressure nozzle downstream of the relative movement direction. The method for producing a functional film according to claim 1, wherein the gas is ejected so that the material is pressurized.   The method for producing a functional film according to claim 1, wherein the substrate has a thickness that varies depending on a location.   The method for producing a functional film according to claim 1, wherein a gap between the solution discharge nozzle and the base material is 100 μm or less.   The method for producing a functional film according to claim 4, wherein a functional film solution having a viscosity in a range of 10 mPa · sec to 500 mPa · sec is used as the functional film solution.   6. The method for producing a functional film according to claim 1, wherein a plurality of application regions are formed on the substrate at regular intervals, and the functional film solution is applied to the application region. .   When the functional film solution is discharged from a plurality of the solution discharge nozzles, and the functional film solution is simultaneously applied to a part of the plurality of application regions, a plurality of the plurality of solution discharge nozzles arranged in the vicinity of the plurality of the solution discharge nozzles The method for producing a functional film according to claim 6, wherein the gas is ejected from the static pressure nozzle.   A functional film production apparatus for producing a functional film by applying a functional film solution in which a component of the functional film is dissolved in a solvent on a base material, the elastic body layer supporting the base material in an elastically deformable manner, The base material supported by the elastic layer, comprising: a solution discharge nozzle for discharging the functional film solution disposed above the base material with a gap; and a static pressure nozzle disposed in the vicinity of the solution discharge nozzle. And the solution discharge nozzle are moved relative to each other, and the functional film solution is applied to the substrate while the gas is ejected from the static pressure nozzle and the substrate is deformed by the pressure applied by the ejected gas. An apparatus for producing a functional film, which is continuously applied to the substrate.   The functional film manufacturing apparatus according to claim 8, wherein the elastic body layer is provided on a substrate mounting stage.   The sheet-shaped base material is provided with a set of rolls and a base material pressing roll provided with the elastic layer on the surface, and the base material pressing roll is transported by the one set of rolls. The functional film manufacturing apparatus according to claim 8, wherein the functional film manufacturing apparatus is disposed to face the solution discharge nozzle with a base material interposed therebetween.   A plurality of the static pressure nozzles are disposed so as to sandwich the solution discharge nozzle along the relative movement direction of the solution discharge nozzle and the base material, and the static pressure upstream of the relative movement direction is arranged. The gas is ejected from the pressure nozzle so that the base material is pressurized with a pressurizing force larger than the pressurizing force by the gas ejected from the static pressure nozzle on the downstream side in the relative moving direction. The functional film manufacturing apparatus according to claim 8, wherein the functional film manufacturing apparatus is characterized in that:   A plurality of the solution discharge nozzles and a plurality of the static pressure nozzles arranged in the vicinity of the plurality of solution discharge nozzles, and the plurality of the solution discharge nozzles are formed on the substrate at regular intervals. The functional film manufacturing apparatus according to claim 8, wherein the functional film solution is disposed so as to be simultaneously applied to a part of the application region.