TW201532693A - 容器內面之乾燥方法 - Google Patents

容器內面之乾燥方法 Download PDF

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Publication number
TW201532693A
TW201532693A TW103129806A TW103129806A TW201532693A TW 201532693 A TW201532693 A TW 201532693A TW 103129806 A TW103129806 A TW 103129806A TW 103129806 A TW103129806 A TW 103129806A TW 201532693 A TW201532693 A TW 201532693A
Authority
TW
Taiwan
Prior art keywords
container
gas
drying
suction
gas supply
Prior art date
Application number
TW103129806A
Other languages
English (en)
Chinese (zh)
Inventor
Hidenori SUMI
Masayuki Enomoto
Original Assignee
Tri Chemical Lab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tri Chemical Lab Inc filed Critical Tri Chemical Lab Inc
Publication of TW201532693A publication Critical patent/TW201532693A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
    • F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/12—Drying solid materials or objects by processes not involving the application of heat by suction

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning In General (AREA)
TW103129806A 2013-10-21 2014-08-29 容器內面之乾燥方法 TW201532693A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013218318A JP2016223636A (ja) 2013-10-21 2013-10-21 容器内面の乾燥方法

Publications (1)

Publication Number Publication Date
TW201532693A true TW201532693A (zh) 2015-09-01

Family

ID=52992583

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103129806A TW201532693A (zh) 2013-10-21 2014-08-29 容器內面之乾燥方法

Country Status (3)

Country Link
JP (1) JP2016223636A (ja)
TW (1) TW201532693A (ja)
WO (1) WO2015059972A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7168961B2 (ja) * 2019-03-18 2022-11-10 大日商事株式会社 半導体搬送容器の乾燥方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3293061B2 (ja) * 1997-08-29 2002-06-17 八木 俊一 被乾燥物の乾燥方法およびその装置
JP2003234273A (ja) * 2002-02-07 2003-08-22 Dainippon Screen Mfg Co Ltd 基板処理装置および基板処理方法
JP4394134B2 (ja) * 2007-05-23 2010-01-06 カンサン株式会社 ガス容器内部の洗浄方法
JP5371605B2 (ja) * 2008-09-25 2013-12-18 東京エレクトロン株式会社 減圧乾燥装置及び減圧乾燥方法

Also Published As

Publication number Publication date
JP2016223636A (ja) 2016-12-28
WO2015059972A1 (ja) 2015-04-30

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