TW201525476A - Substrates detecting system - Google Patents

Abstract

A substrates detecting System comprise, a stored device, a carrying device, a first substrates adsorption stage and a first detected device. At least one substrate placed on the stored device. The carrying device carries the substrates between the stored device and the first substrates adsorption stage. The first substrates adsorption stage movably disposed on a first guide rail. The first detected device detects the substrates which dispose on the first substrates adsorption stage.

Description

Substrate detection system

The present invention relates to a substrate inspection system, and more particularly to a substrate inspection system that can quickly and accurately detect a substrate.

The inspection of finished circuit boards is an important part of the production process. The most important thing in the inspection of finished products is the detection of electrical wires. The traditional circuit board test relies on the manual operation of the operator. For those circuit boards with relatively simple circuits and less test signals, the manual operation can still meet the requirements, but with the advancement of electronic technology, the circuit becomes more and more complicated. More and more test signals, product life cycle is shorter and shorter, small batch, multi-variety product tasks are more, manual circuit board test methods are not only inefficient, and easy to make mistakes, can not meet the fast high-quality production Competitive demand. Accordingly, the present inventors have felt that the above problems can be improved, and that the present invention has been deliberately studied and used in conjunction with the theory, and a present invention which is reasonable in design and effective in improving the above problems has been proposed.

The main object of the present invention is to provide a substrate detecting system that rapidly loads a substrate by using a carrier device and cooperates with the first substrate to adsorb the stage, thereby effectively positioning the substrate so as to be accurately transmitted through the first detecting device. The detection of the relevant circuit wires can solve the problem that the conventional technology can not quickly and accurately detect the related wires of the substrate, and cannot meet the competition demand of fast high-quality production.

In order to achieve the above object, the present invention provides a substrate detecting system comprising: a loading device, a carrier device, a first substrate adsorption stage and a first detecting device. The loading device is configured to place at least one substrate. The carrier is used to carry the carrier The substrate of the loading device. The first substrate adsorption stage is movably disposed on a first guide rail for adsorbing the substrate placed by the carrier device. The first detecting device is configured to detect a substrate disposed on the first substrate adsorption stage.

The invention has the beneficial effects that the detection efficiency of the substrate and the effect thereof can be effectively improved, thereby achieving the competitive demand for rapid and high-quality production.

In order to further understand the techniques, methods and effects of the present invention in order to achieve the intended purpose, reference should be made to the detailed description and drawings of the present invention. It is to be understood that the appended claims are not intended to

1‧‧‧Substrate inspection system

10‧‧‧Feeding device

11‧‧‧First substrate placement area

111, 121‧‧‧ movable stage

12‧‧‧Second substrate placement area

20‧‧‧Carriage

201‧‧‧Adsorption platform

202‧‧‧Adsorption holes

21‧‧‧Active arm

22‧‧‧Anti-stacking device

221‧‧‧Flexible clamping arm

30, 30'‧‧‧First substrate adsorption stage

300‧‧‧First rail

301‧‧‧station body

3011‧‧‧Adsorption holes

3012‧‧‧First trench

3013‧‧‧Second trench

302‧‧‧First airway

3021‧‧‧First vent

303‧‧‧Second airway

3031‧‧‧second vent

31, 31'‧‧‧ first gas barrier module

311‧‧‧Main airway

3111‧‧‧ main air hole

311'‧‧‧ airway

3111’‧‧‧ vents

3112, 3112'‧‧‧ Venting holes

312, 312'‧‧‧ gas blocking unit

313, 313'‧‧‧ operating unit

32‧‧‧Second gas barrier module

321‧‧‧Operation Department

322‧‧‧Axis

323‧‧‧Block unit

324‧‧‧Connected space

33‧‧‧Baffle

34‧‧‧ tilting device

40‧‧‧First detection device

50‧‧‧Second substrate adsorption stage

500‧‧‧Second rail

501‧‧‧station body

5011‧‧‧Adsorption holes

5012‧‧‧First groove

5013‧‧‧second trench

60‧‧‧Substrate turning device

61‧‧‧First jaw module

611‧‧‧First jaw

612‧‧‧second jaw

62‧‧‧Second jaw module

621‧‧‧First jaw

622‧‧‧second jaw

63‧‧‧Support frame

70‧‧‧Second detection device

A‧‧‧Substrate

1 is a schematic view of a first embodiment of a substrate inspection system of the present invention.

2 is a schematic view of a carrier device and an anti-stacking device of a first embodiment of the substrate inspection system of the present invention.

3 is a schematic view showing a first detecting device and a first substrate adsorption stage of the first embodiment of the substrate detecting system of the present invention.

4 is a partial top perspective view of the first substrate adsorption stage of the first embodiment of the substrate inspection system of the present invention.

Figure 5 is a partial cross-sectional view showing a first substrate adsorption stage of the first embodiment of the substrate inspection system of the present invention.

6 is a schematic view of a first substrate adsorption stage of another aspect of the first embodiment of the substrate inspection system of the present invention.

Figure 7 is a top perspective view of a first substrate adsorption stage of another aspect of the first embodiment of the substrate inspection system of the present invention.

Figure 8 is a schematic illustration of a second embodiment of a substrate inspection system of the present invention.

9 is a schematic view showing a second detecting device and a substrate inverting device of a second embodiment of the substrate detecting system of the present invention.

[First Embodiment]

Please refer to FIG. 1 to FIG. 7 together, which are schematic diagrams of a first embodiment of a substrate inspection system of the present invention. As shown in FIG. 1, the substrate detecting system 1 includes a loading device 10, a carrier device 20, a first substrate adsorption stage 30, and a first detecting device 40. The loading device 10 includes a first substrate placement area 11 and a second substrate placement area 12; for example, the first substrate placement area 11 can place the substrate A to be inspected, and the second substrate placement area 12 The substrate A that has been inspected may be placed. In practical applications, it may be based on the result detected by the first detecting device 40, such as a substrate re-detection area, a substrate destruction area, and the like. The first substrate placement area 11 and the second substrate placement area 12 may be respectively provided with a movable stage 111, 121 for placing at least one substrate A to be detected or detected, and the substrate may be The number of A can be raised and lowered to the height of the movable stage.

The carrier device 20 may be mechanically coupled to the at least one movable carrier 21 and movably movable in the X or Y direction and moved up and down to carry the substrate A placed on the first substrate placement area 11 to the first substrate for adsorption. The stage 30 is configured to carry the substrate A that has been inspected by the first substrate adsorption stage 30 to the second substrate placement area 12; and the carrier device 20 may include an adsorption stage 201 and a plurality of adsorption holes 202. The substrate A is carried by adsorption. In another embodiment, the carrier device 20 may carry the substrate A by means of a jaw. The first substrate adsorption stage 30 is movably disposed on the first guide rail 300 and is movably linearly displaced to carry the substrate A placed by the carrier device 20 to a position adjacent to the first detecting device 40 for The first detecting device 40 performs detection. The first detecting device 40 may include a photosensitive-coupled device (CCD) for detecting the surface of the substrate A. The substrate A may preferably be a circuit substrate.

As shown in FIG. 2, the carrier device 20 further includes an anti-lamination device 22, which may include a sensing module (not shown) and an elastic clamping arm 221. Carrier device 20 After the adsorption stage 201 adsorbs the substrate A, the substrate A may be rotated and arranged upright so that the substrate A can enter between the two elastic clamping arms 221 and push against one of the elastic clamping arms 221 to pass through the judgment. The amount of displacement of the elastic clamping arm 221 after being pushed to determine the thickness of the substrate A by the sensing module, thereby determining whether the carrier device 20 carries a single substrate A, thereby effectively preventing the carrier device 20 from being carried simultaneously The two substrates A further cause a problem that one of the substrates A cannot be adsorbed by the first substrate adsorption stage 30 and falls. Preferably, the rubber wheel is disposed at a position where the front end of the elastic clamping arm 221 is in contact with the substrate A to avoid the problem that the substrate A collides with the elastic clamping arm 221 to be destroyed.

As shown in FIG. 3 , the first substrate adsorption stage 30 includes a stage body 301 , a first gas barrier module 31 , a plurality of second gas barrier modules 32 , a baffle 33 , and a tilting device 34 . The stage body 301 has a plurality of regularly arranged adsorption holes 3011. The first gas barrier module 31 is disposed on one side of the stage body 301 and includes an operation unit 313 for selectively closing at least one column of the adsorption holes 3011 in the X direction. Each of the second gas barrier modules 32 is disposed on the other side of the stage body 301, and includes an operation portion 321 for selectively closing at least one row of the adsorption holes 3011 in the Y direction. The tilting device 34 mechanically connects the stage body 301, and optionally causes the stage body 301 to assume a tilted state. The baffle 33 is disposed on the side of the stage body 301, and can abut against the substrate A when the stage body 301 is in an inclined state to prevent the substrate A from slipping.

As shown in FIG. 4, it is a top perspective view of the first substrate adsorption stage 30. The stage body 301 includes a plurality of first air passages 302 disposed parallel to the X direction and a plurality of second air passages 303 disposed parallel to the Y direction. The first air passage 302 includes a plurality of first air holes 3021, the second air passage 303 includes a plurality of second air holes 3031, and each of the second air holes 3031 corresponds to one of the adsorption holes 3011, and each of the first air passages 302 of each column One of the air holes 3021 communicates with each of the second air passages 303, that is, the second air holes 3031 of the second air passages 303 of each row communicate with one of the first air passages 302, respectively. The first air channel 302 and each of the second air channels 303 may be formed on the stage body. The passage in 301 may also be an independent air tube disposed below the stage body 301.

The first air blocking module 31 includes a main air channel 311, a gas blocking unit 312 and an operating unit 313. The main air channel 311 includes a plurality of main air holes 3111 and an air discharging hole 3112. The main air holes 3111 and the first air channel 302 respectively. In communication, the air vent 3112 is coupled to an air extracting device (not shown). The gas blocking unit 312 is movably disposed in the main air passage 311; the operating unit 313 is exposed outside the first gas blocking module 31, and is mechanically connected to the gas blocking unit 312, thereby controlling the adjustment of the gas blocking unit 312 in the main air passage 311. position. The gas blocking unit 312 may be a piston or the like, and completely seal the gas blocking member; the first gas blocking module 31 may be integrally formed with the stage body 301, or may be two detachable independent members.

For example, the gas blocking unit 312 may be disposed at an opposite end of the main air passage 311 with the air venting hole 3112. When the gas blocking unit 312 is not shielded from any main air hole 3111 and disposed at one end of the main air passage 311, each main air hole 3111 The air venting holes 3112 are connected to each other, and the first air passages 302 communicating with the main air holes 3111 are respectively in a state in which the adsorption holes 3011 of the respective columns in the X direction are in a state of having an adsorption force; when the gas blocking unit 312 is subjected to the operation unit 313 When the operation moves to the air vent 3112 and shields one of the main air holes 3111, the blocked main air hole 3111 and the main air hole 3111 located behind the gas blocking unit 312 and away from the air venting hole 3112 are blocked by the gas blocking unit 312, and cannot be The suction holes 3112 are in communication, and the corresponding adsorption holes 3011 in the X direction of the column do not have an adsorption force, and the effect of closing the X-direction adsorption holes 3011 is achieved.

In other words, when the gas blocking unit 312 and the air venting holes 3112 are respectively disposed at both ends of the main air passage 311, when the operating unit 313 is not moved, the adsorption holes 3011 of the respective rows X direction exhibit a state of having an adsorption force, and with the operation unit 313 While gradually approaching the air vent 3112, the adsorption hole 3011 corresponding to the column X direction of the operation unit 313 is blocked by the gas blocking unit 312 without the adsorption force, that is, the adsorption in the X direction of each column through which the operation unit 313 passes. The holes 3011 are all blocked by the gas blocking unit 312 without adsorption force. It is worth mentioning that in the figure, the air vent and the gas blocking unit are respectively arranged in the airway. The two ends are taken as an example, but the practical application is not limited thereto, and the two may be disposed at the same end of the air passage, and the operation mode of the gas blocking unit is opposite to that described in the embodiment.

Each of the second gas barrier modules 32 includes a shaft body 322 and a plurality of spaced apart barrier units 323, and one end of the shaft body 322 exposed to the stage body 301 is an operation portion 321 , and a communication space is formed between each of the barrier units 323 . 324. In a practical application, each of the blocking units 323 may be integrally formed with the shaft body 322 or a separate member that is additionally sleeved on the shaft body 322, and each of the blocking units 323 may be selectively provided with a sealing rubber ring. When the operation portion 321 of the second gas barrier module 32 is pressed, each of the blocking units 323 blocks the communication between the second air holes 3031 and the first air holes 3021, thereby blocking the communication between the adsorption holes 3011 and the first air passage 302. The adsorption hole 3011 of the row Y direction corresponding to the second gas barrier module 32 is closed so as not to have an adsorption force.

As shown in FIG. 4 and FIG. 5, when the operating portion 321 of the second gas barrier module 32 is pulled, the shaft body 322 and the blocking units 323 are moved in the second air passage 303 so as to be between the respective blocking units 323. When the communication space 324 is located between the second air hole 3031 and the first air hole 3021, the second air holes 3031 can communicate with the first air hole 3021 through the communication space 324, and the adsorption holes 3011 and the first air channel 302 and the main The air passages 311 are in communication, and each of the adsorption holes 3011 has an adsorption force. In particular, in the embodiment, the second gas barrier module 32 is pulled by pressing the operation portion 321 of the second gas barrier module 32 to close the corresponding adsorption hole 3011 of the row Y direction. The operation unit 321 is exemplified by the opening of the adsorption hole 3011. However, in practical applications, the design of each of the blocking unit 323, the second air holes 3031, and the first air holes 3021 of the second gas barrier module 32 may be used. When the operation portion 321 is pressed, the adsorption hole 3011 is opened, and when the operation portion 321 is pulled, the adsorption hole 3011 is closed. In addition, in another implementation, both ends of the second gas barrier module 32 may be exposed outside the carrier body 301, that is, the second gas barrier module 32 has two exposed operation portions 321 . The user can open and close the adsorption hole 3011 only by pressing.

Please refer to FIG. 6 and FIG. 7 , which are another embodiment of the first substrate adsorption stage. As shown, the first substrate adsorption stage 30 ′ may include two first resistors having the same internal structure. The gas modules 31, 31' are respectively disposed on one side of the stage body 301 in the X and Y directions, thereby respectively controlling at least one column of the adsorption holes 3011 in the X direction and at least one row of the adsorption holes 3011 in the Y direction. The internal structure of the first gas barrier module 31 and its related actuation relationship are the same as those described above, and will not be further described herein. Only the first gas barrier module 31' will be briefly described herein. Expressed by different nouns and darts. As shown in Fig. 7, the first gas barrier module 31' includes a primary air passage 311', a gas blocking unit 312', and an operating unit 313'. The secondary air passage 311' includes a plurality of secondary air holes 3111' and one air suction hole 3112', and each of the secondary air holes 3111' communicates with each of the second air passages 303. The gas blocking unit 312' is mechanically coupled to the operating unit 313' and is controlled by the operating unit 313' to selectively block one of the air holes 3111'.

As described above, the actual substrate A detection process may be: first, the substrate A is carried by the first substrate placement area 11 of the loading device 10 through the carrier device 20, and passed through the anti-lamination device 22 to determine whether the carrier device 20 is Only the single substrate A is carried, and then the carrier A is placed on the first substrate adsorption stage 30. At this time, the first substrate adsorption stage 30 may be parallel to the horizontal line without tilting, and when the substrate A is disposed on After the stage body 301 is mounted, the tilting device 34 controls the tilting of the stage body 301 such that one side of the substrate A abuts against the shutter 33; subsequently, the first substrate adsorption stage 30 moves on the first rail 300, And the substrate A corresponds to the first detecting device 40 to perform the surface detecting operation of the substrate A; when the detecting is completed, the carrying device 20 can carry the substrate A back to the original position adjacent to the carrying device 20, so that the carrying device The substrate A is carried and placed in the second substrate placement area 12 of the loading device 10 to complete the substrate inspection operation.

[Second embodiment]

Please refer to FIG. 8 and FIG. 9 together, which are schematic diagrams of a second embodiment of the substrate detecting system of the present invention. As shown in FIG. 8, the substrate detecting system 2 includes: a loading device 10. A carrier device 20, a first substrate adsorption stage 30, a first detecting device 40, a second substrate adsorption stage 50, a substrate inverting device 60, and a second detecting device 70. The connection relationship between the loading device 10, the carrier device 20, the first substrate adsorption stage 30, and the first detecting device 40 is the same as that of the above-described embodiment, and will not be described again. In this embodiment, the substrate detecting system 2 further includes a second rail 500 disposed in parallel with the first rail 300, and the second substrate adsorption stage 50 is movably disposed on the second rail 500; The detailed structure of the second substrate adsorption stage 50 may be the same as that of the first substrate adsorption stage 30 described in the foregoing embodiment, or may be a substrate carrying device having only a plurality of adsorption holes 5011.

As shown in FIG. 9 (in order to clearly show the substrate inverting device 60, the illustration of the first detecting device 40 and the second detecting device 70 is omitted in the drawing), the substrate inverting device 60 is disposed on the first rail 300 and the second rail. One end of the 500 includes a first jaw module 61, a second jaw module 62 and a support frame 63. The support frame 63 can be disposed across the first rail 300 and the second rail 500 and supported. A first jaw module 61 and a second jaw module 62 are respectively disposed on the left and right inner sides of the frame 63, and the first jaw module 61 is disposed adjacent to the first substrate adsorption stage 30, and the second jaw is disposed. The module 62 is disposed adjacent to the second substrate adsorption stage 50. The second detecting device 70 may be disposed adjacent to the second substrate adsorption stage 50 with respect to the first detecting device 40 for detecting the substrate A on the second substrate adsorption stage 50.

Further, the first jaw module 61 may include a plurality of first jaws 611 and a plurality of second jaws 612 corresponding to the first jaws 611; and the second jaw modules 62 may equally include There are a plurality of first jaws 621 and a plurality of second jaws 612 corresponding to the first jaws 611; the stage body 301 of the first substrate adsorption stage 30 corresponds to the plurality of first jaws 611 and several The second jaw 612 has a plurality of first grooves 3012 and a plurality of second grooves 3013. Similarly, the stage body 501 of the second substrate adsorption stage 50 may have a plurality of first grooves 5012 and a plurality of Two grooves 5013.

After the first detecting device 40 detects the substrate A on the first substrate adsorption stage 30, the first substrate adsorption stage 30 moves to a position adjacent to the first jaw module 61, and the first jaw module 61 The first jaw 611 and the second jaw 612 project into the first groove 3012 and the second groove 3013 to sandwich the substrate A from the first substrate adsorption stage 30. Then, the substrate A is grasped by the first jaw module 61 through the second jaw module 62, and then placed on the second substrate adsorption stage 50, thereby achieving the purpose of turning the substrate A over, thereby enabling the substrate. The other side of A is detected by the second detecting means 70, and the effect of detecting the front and back sides of the substrate A can be achieved. In a preferred implementation, another carrier device (not shown) may be disposed adjacent to the second substrate adsorption stage 50, so as to cooperate with the original carrier device 20, and the detected substrate is matched. A is disposed in a substrate placement area corresponding to the loading device 10.

As described above, specifically, the detection process of the substrate A may be: first, the substrate A to be tested is adsorbed by the first substrate placement area 11 of the loading device 10 through the carrier device 20, and after being detected by the anti-lamination device 22, After being placed on the first substrate adsorption stage 30, the stage body 301 is tilted by the tilting device 34, and then moved along the first rail 300 to a position adjacent to the first detecting device 40, so that the substrate A is subjected to the first detecting device 40. After the substrate A is grasped by the first jaw module 61, the substrate A is grasped by the second jaw module 62, and the substrate A is placed on the second substrate adsorption stage 50, so that the substrate A is The other side is detected by the second detecting device 70, and finally the substrate A after double-sided detection is carried to the second substrate placement area 12 or the phase of the loading device 10 through another carrier device or the original carrier device 20. Corresponding substrate placement area (for example, substrate destruction area, substrate re-detection area, etc.), thereby completing the detection operation of a single substrate.

However, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of patent protection of the present creation. Therefore, the equivalent changes of the present specification and the contents of the schema are all included in the right of the creation. Within the scope of protection, it is given to Chen Ming.

1‧‧‧Substrate inspection system

10‧‧‧Feeding device

11‧‧‧First substrate placement area

111, 121‧‧‧ movable stage

12‧‧‧Second substrate placement area

20‧‧‧Carriage

201‧‧‧Adsorption platform

202‧‧‧Adsorption holes

21‧‧‧Active arm

22‧‧‧Anti-stacking device

30‧‧‧First substrate adsorption stage

300‧‧‧First rail

301‧‧‧station body

3011‧‧‧Adsorption holes

33‧‧‧Baffle

34‧‧‧ tilting device

40‧‧‧First detection device

A‧‧‧Substrate

Claims (10)

A substrate detecting system comprising: a loading device for arranging at least one substrate; a carrier device for carrying the substrate placed on the loading device; and a first substrate absorbing platform; The substrate is movably disposed on a first rail for adsorbing the substrate disposed by the carrier device; and a first detecting device is configured to detect the substrate disposed on the first substrate adsorption stage. The substrate detecting system of claim 1, further comprising a second substrate adsorption stage, a substrate inverting device and a second detecting device, wherein the second substrate adsorption stage is movably disposed on a second rail And the second rail is disposed adjacent to the first rail, the substrate inverting device is configured to invert the substrate on the first substrate adsorption stage, and the inverted substrate is placed on the second substrate adsorption stage. The substrate is detected by the second detecting device. The substrate detecting system of claim 2, wherein the substrate inverting device comprises a first jaw module and a second jaw module, the first jaw module corresponding to the second jaw module The first jaw module is configured to clamp the substrate disposed on the first substrate adsorption stage, and the second jaw mold is disposed adjacent to the first rail and the second rail. The group is configured to clamp the substrate of the first jaw module, and the substrate is disposed on the second substrate adsorption stage. The substrate detecting system of claim 3, wherein the first jaw module and the second jaw module respectively comprise at least one set of jaws, and the first substrate adsorption stage and the second substrate adsorption load Each of the stages of the stage includes at least one set of grooves corresponding to the jaws. The substrate detecting system according to any one of claims 2 to 4, wherein the first substrate adsorption stage and the second substrate adsorption stage respectively comprise a baffle, and the first substrate adsorption stage and the first The two substrate adsorption stages are respectively connected to a tilting device, The tilting device is configured to tilt the first substrate tilting device and the stage body of the second substrate adsorption stage, and abutting one side of the substrate disposed on the stage body against the baffle. The substrate detecting system according to any one of claims 2 to 4, wherein the first substrate adsorption stage and the second substrate adsorption stage respectively comprise a first gas barrier module and a plurality of second gas barrier modules And a plurality of adsorption holes, the first gas barrier module selectively opening and closing at least one column of the adsorption holes in the X direction, and each of the second gas barrier modules may select at least one row of the Y direction Some adsorption holes. The substrate detecting system of claim 6, wherein the first substrate adsorption stage and the second substrate adsorption stage further comprise: a main air channel connected to an air suction device, and the main air channel includes a plurality of first air passages, each of the first air passages being respectively connected to each of the main air holes of the main air passage, and each of the first air passages includes a plurality of first air holes; and a plurality of second air passages, each of which The second air passage includes a plurality of second air holes, each of the second air holes respectively corresponding to the plurality of the adsorption holes, and each of the first air holes of each of the first air channels respectively communicate with the second air passage; The first gas barrier module is movably disposed in the main air passage to selectively close at least one main air hole, and each of the second gas blocking modules is disposed in each of the second air passages to be selectable. At least one of the second air holes is closed. The substrate detecting system according to any one of claims 2 to 4, wherein the first substrate adsorption stage and the second substrate adsorption stage further comprise a first gas barrier module and a second gas barrier module, respectively And the plurality of adsorption holes, the first gas barrier module selectively opens and closes at least one column of the adsorption holes in the X direction, and the second gas barrier module can select at least one row of the Y direction Adsorption holes. The substrate detecting system of claim 8, wherein the first substrate adsorption stage and the second substrate adsorption stage further comprise: a main air passage, which is connected to an air suction device, and the main air passage includes a plurality of main air holes; a plurality of first air passages, each of the first air passages being respectively connected to the adsorption holes in each row of the X direction, and each The first air passage is respectively connected to each of the main air holes; a primary air passage is connected to the air suction device, and the secondary air passage includes a plurality of secondary air holes; and a plurality of second air passages, each of the second air passages respectively and Y The plurality of adsorption holes are connected to each other, and each of the second air passages is respectively connected to each of the secondary air holes; wherein the first gas blocking module is movably disposed in the main air passage to selectively close The at least one main air hole, the second gas blocking module is disposed in the secondary air passage to selectively close the at least one secondary air hole. The substrate detecting system of any one of claims 2 to 4, further comprising an anti-lamination device comprising a sensing module and at least one elastic clamping arm; when the carrier device carries the carrier When the substrate is placed on the clamping module, the substrate abuts the elastic clamping arm, and the sensing module senses the thickness of the substrate.