TW201519472A - Light emitting diode having structure for uniform current spreading - Google Patents

Light emitting diode having structure for uniform current spreading Download PDF

Info

Publication number
TW201519472A
TW201519472A TW103121198A TW103121198A TW201519472A TW 201519472 A TW201519472 A TW 201519472A TW 103121198 A TW103121198 A TW 103121198A TW 103121198 A TW103121198 A TW 103121198A TW 201519472 A TW201519472 A TW 201519472A
Authority
TW
Taiwan
Prior art keywords
electrode
barrier layer
light
emitting diode
layer
Prior art date
Application number
TW103121198A
Other languages
Chinese (zh)
Inventor
Jeong-Woo Hong
Original Assignee
Iljin Led Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iljin Led Co Ltd filed Critical Iljin Led Co Ltd
Publication of TW201519472A publication Critical patent/TW201519472A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/38Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)

Abstract

Provided is a light emitting diode having a uniform current diffusion structure, for increasing external quantum efficiency by preventing current concentration and for preventing localized deterioration or aging and the like. The diode comprises: a first electrode pad arranged on a second semiconductor layer by being spatially separated from a transparent electrode layer positioned on a light emitting structure comprising a first semiconductor layer, an active layer and the second semiconductor layer, and electrically connected, by a connection part, with a first branched electrode extended in a longitudinal direction of the first semiconductor layer; a first blocking layer formed on the light emitting structure so as to electrically insulate the first electrode pad and the connection part from the light emitting structure; on the second semiconductor layer, a second electrode pad for supplying current to the transparent electrode layer and a second branched electrode parallel with the first branched electrode; and a second blocking layer formed on the second semiconductor layer so as to electrically insulate the second electrode pad and the second branched electrode from the second semiconductor layer.

Description

具有均勻的電流擴散結構的發光二極體 Light-emitting diode with uniform current spreading structure

本發明涉及具有p電極以及n電極的發光二極管,特別涉及能夠防止電流集中于電極周圍的現象而通過電流均勻擴散到有源層(active layer)來提高光效率的發光二極管。 The present invention relates to a light emitting diode having a p-electrode and an n-electrode, and more particularly to a light-emitting diode capable of preventing a current from being concentrated around the electrode and uniformly diffusing the current to an active layer to improve light efficiency.

發光二極體是將電能量轉換為光的元件,通常由位於摻雜有具有相反極性的雜質的層之間的、至少一個有源層中產生光。即,若對有源層的兩側施加偏壓,則空穴以及電子注入到有源層內而再結合,從而產生光。 A light-emitting diode is an element that converts electrical energy into light, typically produced by at least one active layer between layers doped with impurities of opposite polarity. That is, when a bias voltage is applied to both sides of the active layer, holes and electrons are injected into the active layer to be recombined, thereby generating light.

發光二極體與空氣相比具有較高的折射率,因此電子與空穴再結合而產生的光的大部分殘留在元件內部。這些光在逃離到外部之前通過薄膜、襯底、電極等多種途徑被吸收,因此外量子效率(external quantum efficiency)減小。 The light-emitting diode has a higher refractive index than air, and therefore most of the light generated by recombination of electrons and holes remains inside the element. These lights are absorbed by various means such as a film, a substrate, an electrode, etc. before fleeing to the outside, and thus the external quantum efficiency is reduced.

用於對有源層施加偏壓的電極由用於封裝的電極片(electrode pad)、以及分支電極(branch electrode)構成,其中,該分支電極從上述電極片延伸而實際上向有源層供給偏壓。 An electrode for biasing an active layer is composed of an electrode pad for packaging and a branch electrode, wherein the branch electrode extends from the electrode sheet to be actually supplied to the active layer bias.

但是,由於在p電極與n電極之間產生的電流集中現象,電流無法均勻地分散到有源層整體,電流集中到電極周圍,因此在遠離電極的區域形成相對較暗的暗部。 However, due to the current concentration phenomenon generated between the p-electrode and the n-electrode, the current cannot be uniformly dispersed to the entire active layer, and the current is concentrated around the electrode, so that a relatively dark dark portion is formed in a region away from the electrode.

這種電流集中現象特別容易產生於電極片與分支電極之間的區域。電流集中現象降低外量子效率,導致發生局部劣化(deterioration)以及老化(aging)現象等問題。 This current concentration phenomenon is particularly likely to occur in a region between the electrode sheet and the branch electrode. The current concentration phenomenon reduces the external quantum efficiency, causing problems such as local deterioration and aging.

另一方面,這種電流集中現像是由於p電極以及n電極之間的間距不固定而產生的情況較多。即,若電極之間的間距不固定,則在電極之間形成不均勻的電場,因此電流集中現象較為突出。 On the other hand, such a current concentration phenomenon is often caused by the fact that the pitch between the p-electrode and the n-electrode is not fixed. That is, if the pitch between the electrodes is not fixed, a non-uniform electric field is formed between the electrodes, and thus the current concentration phenomenon is prominent.

本發明的目的在於提供一種具有均勻的電流擴散結構的發光二極體,阻斷電流集中現象,提高外量子效率,防止局部劣化以及老化等。 It is an object of the present invention to provide a light-emitting diode having a uniform current spreading structure, which blocks current concentration, improves external quantum efficiency, and prevents local deterioration and aging.

用於解決本發明的問題的、具有均勻的電流擴散結構的發光二極體包括:發光結構體,包括第一半導體層、有源層以及第二半導體層;以及透明電極層,位於上述發光結構體上。另外,還包括:第一電極,與上述透明電極層在空間上隔開而設置,且包括第一分支電極、連接部以及第一電極片;以及第一阻擋層,形成在上述發光結構體上。 A light emitting diode having a uniform current diffusion structure for solving the problem of the present invention includes: a light emitting structure including a first semiconductor layer, an active layer, and a second semiconductor layer; and a transparent electrode layer located in the above light emitting structure Physically. In addition, the method further includes: a first electrode disposed spatially spaced apart from the transparent electrode layer, and including a first branch electrode, a connecting portion, and a first electrode sheet; and a first barrier layer formed on the light emitting structure .

在本發明的發光二極體中,上述第一電極片設置在上述第二半導體層上,可通過連接部與第一分支電極電連接,其中,該第一分支電極向上述第一半導體層的長度方向延伸。上述第一阻擋層可以形成於上述第二半導 體層和上述第一電極片之間。上述第一阻擋層優選與上述第一分支電極相互接觸。上述第一阻擋層可以具有與上述第一電極片以及上述連接部相同或擴大的形狀。上述第一阻擋層可以為氧化物膜或氮化物膜中選擇的任一膜、或者上述氧化物膜和上述氮化物膜層疊的多層膜。 In the light emitting diode of the present invention, the first electrode sheet is disposed on the second semiconductor layer, and is electrically connected to the first branch electrode through a connection portion, wherein the first branch electrode is opposite to the first semiconductor layer Extends in the length direction. The first barrier layer may be formed on the second semiconductor Between the bulk layer and the first electrode sheet described above. Preferably, the first barrier layer is in contact with the first branch electrode. The first barrier layer may have the same shape as or enlarged from the first electrode sheet and the connecting portion. The first barrier layer may be any one selected from an oxide film or a nitride film, or a multilayer film in which the oxide film and the nitride film are stacked.

在本發明的優選的二極體中,在上述第二半導體層上包括第二電極,還可以包括第二阻擋層,其中,該第二電極由第二電極片以及與上述第一分支電極平行的第二分支電極構成,該第二阻擋層用於使上述第二電極片以及上述第二分支電極與上述第二半導體層電絕緣。上述第二阻擋層可以形成於第二半導體層與第二電極片之間。 In a preferred diode of the present invention, the second electrode layer is included on the second semiconductor layer, and may further include a second barrier layer, wherein the second electrode is formed by the second electrode sheet and parallel to the first branch electrode The second branch electrode is configured to electrically insulate the second electrode sheet and the second branch electrode from the second semiconductor layer. The second barrier layer may be formed between the second semiconductor layer and the second electrode sheet.

在本發明的優選的二極體中,上述第一分支電極與上述第二分支電極之間的間距(L1)優選為固定,並且上述間距(L1)為固定的面積優選占整個面積的60%以上。上述第二阻擋層可以具有與上述第二電極片以及上述第二分支電極相同或擴大的形狀。本發明的上述第二阻擋層可以為氧化物膜或氮化物膜中選擇的任一膜、或者上述氧化物膜和上述氮化物膜層疊的多層膜。形成於上述第二電極片的上述第二阻擋層與上述透明電極層可以通過阻斷槽在空間上被分隔,該阻斷槽用於露出第二半導體層。 In a preferred diode of the present invention, a pitch (L1) between the first branch electrode and the second branch electrode is preferably fixed, and the pitch (L1) is a fixed area preferably occupies 60% of the entire area. the above. The second barrier layer may have the same shape as or enlarged from the second electrode sheet and the second branch electrode. The second barrier layer of the present invention may be any one selected from an oxide film or a nitride film, or a multilayer film in which the above oxide film and the nitride film are laminated. The second barrier layer formed on the second electrode sheet and the transparent electrode layer may be spatially separated by a blocking groove for exposing the second semiconductor layer.

根據本發明的具有均勻的電流擴散結構的發光二極體,通過附加防止向第一電極片以及第二電極片擴散電流的結構,阻斷電流集中現象而提高外量子效率,能夠防止局部劣化以及老化等。通過防止電流擴散的結構,防止電流集中在電極片與分支電極之間,從而能夠使發光二極體流過均勻 的電流。另外,通過使流過電流的電極之間的間距變得均勻,能夠防止發生不期望的電極之間的電流集中現象。 According to the light-emitting diode of the present invention having a uniform current-diffusion structure, by additionally preventing a structure in which current is diffused to the first electrode sheet and the second electrode sheet, current concentration is blocked to improve external quantum efficiency, and local deterioration can be prevented. Aging and so on. By preventing the current from diffusing, the current is prevented from being concentrated between the electrode sheet and the branch electrode, so that the light-emitting diode can flow evenly. Current. Further, by making the pitch between the electrodes through which the current flows, it is possible to prevent occurrence of an unintended current concentration phenomenon between the electrodes.

下麵,參照附圖詳細說明本發明的優選的實施例。在下面所說明的實施例可以變形為多種其他方式,本發明的範圍不限定於下麵所述的實施例。本發明的實施例是為了給具有本領域的普通技術知識的技術人員更加完整說明本發明而提供的。 DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments described below can be modified into various other ways, and the scope of the present invention is not limited to the embodiments described below. The embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art.

本發明的實施例提供一種具有均勻的電流擴散結構的發光二極體,對電極片附加防止電流擴散的結構,由此阻斷電流集中現象而提高外量子效率,防止局部劣化以及老化等。為此,詳細觀察具有防止電極片中的電流擴散的結構的發光二極體,通過此具體說明阻斷電流集中現象的過程。另外,說明由於本發明的實施例涉及的電流擴散防止結構而流過電流的電極之間的間隔實際上變成固定的過程。在此,所謂的電流集中現像是指:因電極片中的電流擴散而電流集中在電極片與分支電極之間,因此整個發光二極體中不會流過均勻的電流的情況。 Embodiments of the present invention provide a light-emitting diode having a uniform current spreading structure, and a structure for preventing current diffusion is added to the electrode sheet, thereby blocking current concentration phenomenon to improve external quantum efficiency, preventing local deterioration, aging, and the like. For this reason, a light-emitting diode having a structure for preventing current diffusion in the electrode sheet is observed in detail, and the process of blocking the current concentration phenomenon will be specifically described. In addition, a description will be given of a process in which the interval between the electrodes through which the current flows due to the current diffusion preventing structure according to the embodiment of the present invention becomes a fixed process. Here, the current concentration focusing means that the current concentrates between the electrode sheet and the branch electrode due to the current diffusion in the electrode sheet, so that a uniform current does not flow through the entire light emitting diode.

圖1是具有本發明的實施例涉及的均勻的電流擴散結構的發光二極體的立體圖;圖2是圖1的沿著Ⅱ-Ⅱ線切斷的截面圖;圖3是圖1的沿著Ⅲ-Ⅲ線切斷的截面圖;圖4是圖1的沿著Ⅳ-Ⅳ線切斷的截面圖。 1 is a perspective view of a light-emitting diode having a uniform current diffusion structure according to an embodiment of the present invention; FIG. 2 is a cross-sectional view taken along line II-II of FIG. 1; A cross-sectional view taken along line III-III; and Fig. 4 is a cross-sectional view taken along line IV-IV of Fig. 1.

參照圖1至圖4,發光二極體包括:襯底10、位於襯底10的一側的發光結構體14、透明電極層20、第一電極30、第二電極40、第一阻擋層34以及第二阻擋層44。在此情況下,第一阻擋層34用於阻斷電流從第一電極 30的第一電極片31擴散;第二阻擋層44用於阻斷電流從第二電極40的第二電極片41擴散。第一阻擋層34以及第二阻擋層44隔著透明電極層20均設置在發光結構體14上。 Referring to FIGS. 1 through 4, the light emitting diode includes: a substrate 10, a light emitting structure 14 on one side of the substrate 10, a transparent electrode layer 20, a first electrode 30, a second electrode 40, and a first barrier layer 34. And a second barrier layer 44. In this case, the first barrier layer 34 is used to block current from the first electrode The first electrode sheet 31 of 30 is diffused; the second barrier layer 44 serves to block current from diffusing from the second electrode sheet 41 of the second electrode 40. The first barrier layer 34 and the second barrier layer 44 are both disposed on the light emitting structure 14 via the transparent electrode layer 20.

襯底10可以為藍寶石(Al2O3)、碳化矽(SiC)、氮化鎵(GaN)、砷化鎵(GaAs)、矽(Si)、鍺(Ge)、氧化鋅(ZnO)、氧化鎂(MgO)、氮化鋁(AlN)、氮化硼(BN)、磷化鎵(GaP)、磷化銦(InP)、鋰-氧化鋁(LiAl2O3)中的任一個。可以在襯底10的上表面、下表面或者在上表面以及下表面兩個表面上形成能夠反射光的凹凸圖案(未圖示)。在襯底10與發光結構體14之間可以形成有緩衝層12,該緩衝層12用於緩解晶格不匹配。緩衝層12可以形成為單層或多層,例如,可以由GaN、InN、AlN、InGaN、AlGaN、AlGaInN、AlInN中的至少一個構成。 The substrate 10 may be sapphire (Al2O3), tantalum carbide (SiC), gallium nitride (GaN), gallium arsenide (GaAs), germanium (Si), germanium (Ge), zinc oxide (ZnO), magnesium oxide (MgO). Any one of aluminum nitride (AlN), boron nitride (BN), gallium phosphide (GaP), indium phosphide (InP), and lithium-aluminum oxide (LiAl 2 O 3 ). A concavo-convex pattern (not shown) capable of reflecting light may be formed on the upper surface, the lower surface of the substrate 10, or both surfaces of the upper surface and the lower surface. A buffer layer 12 may be formed between the substrate 10 and the light emitting structure 14, and the buffer layer 12 serves to alleviate lattice mismatch. The buffer layer 12 may be formed as a single layer or a plurality of layers, and may be composed of, for example, at least one of GaN, InN, AlN, InGaN, AlGaN, AlGaInN, and AlInN.

發光結構體14可以位於襯底10上或者緩衝層12上。發光結構體14的結構為多個導電型半導體層以襯底10為基準的np結結構、pn結結構、npn結結構、pnp結結構中的任一個。 The light emitting structure 14 may be located on the substrate 10 or on the buffer layer 12. The structure of the light-emitting structure 14 is any one of an np junction structure, a pn junction structure, an npn junction structure, and a pnp junction structure in which a plurality of conductive semiconductor layers are based on the substrate 10.

發光結構體14包括依次層疊的第一半導體層15、有源層16以及第二半導體層17。例如,在np結結構的情況下,第一半導體層15指的是n型半導體層,第二半導體層17指的是p型半導體層。 The light emitting structure 14 includes a first semiconductor layer 15, a active layer 16, and a second semiconductor layer 17 which are sequentially stacked. For example, in the case of an np junction structure, the first semiconductor layer 15 refers to an n-type semiconductor layer, and the second semiconductor layer 17 refers to a p-type semiconductor layer.

若對發光結構體14施加正方向的偏壓,則位於有源層16的傳導帶(Conduction band)的電子和位於價電子帶(Valence band)的空穴遷移而再結合,由此與能隙相當的能量放射為光。此時,根據構成有源層16的物質種類而確定所放射的光的波長。有源層16的電子或空穴是根據被施加的偏壓而由第一半導體層15以及第二半導體層17提供的。 When a positive direction bias is applied to the light-emitting structure 14, the electrons in the conduction band of the active layer 16 and the holes in the Valence band migrate and recombine, thereby forming an energy gap. A considerable amount of energy is emitted for the light. At this time, the wavelength of the emitted light is determined according to the kind of the substance constituting the active layer 16. The electrons or holes of the active layer 16 are supplied from the first semiconductor layer 15 and the second semiconductor layer 17 in accordance with the applied bias voltage.

第一半導體層15以及第二半導體層17為了具有相互不同的導電類型而可以包含相互不同的雜質。例如,第一半導體層15可以包含n型雜質,第二半導體層17可以包含p型雜質。在此情況下,第一半導體層15提供電子,第二半導體層17提供空穴。當然,第一半導體層15為p型且第二半導體層17為n型的情況在本發明的範圍內也是可行的。第一半導體層15以及第二半導體層17可以分別包括像氮化鎵(GaN)這樣的III-V族化合物。 The first semiconductor layer 15 and the second semiconductor layer 17 may contain mutually different impurities in order to have mutually different conductivity types. For example, the first semiconductor layer 15 may include an n-type impurity, and the second semiconductor layer 17 may include a p-type impurity. In this case, the first semiconductor layer 15 supplies electrons, and the second semiconductor layer 17 provides holes. Of course, the case where the first semiconductor layer 15 is p-type and the second semiconductor layer 17 is n-type is also feasible within the scope of the present invention. The first semiconductor layer 15 and the second semiconductor layer 17 may respectively include a group III-V compound such as gallium nitride (GaN).

在發光結構體14為np結結構的情況下,第一半導體層15可以包括摻雜n型雜質的n型AlxInyGazN(0x,y,z1,x+y+z=1)、n型GaN等。此時,上述n型雜質可以為矽(Si)、鍺(Ge)、錫(Sn)、硒(Se)、碲(Te)中所選擇的至少一個。第二半導體層可以使用摻雜p型雜質的p型AlxInyGazN(0x,y,z1,x+y+z=1)、p型GaN等。上述p型雜質可以為鎂(Mg)、鋅(Zn)、鈣(Ca)、鍶(Sr)、鈹(Be)、鋇(Ba)中所選擇的至少一個。 In the case where the light emitting structure 14 is an np junction structure, the first semiconductor layer 15 may include n-type Al x In y Ga z N doped with an n-type impurity (0) x,y,z 1, x + y + z = 1), n-type GaN, and the like. In this case, the n-type impurity may be at least one selected from the group consisting of bismuth (Si), germanium (Ge), tin (Sn), selenium (Se), and tellurium (Te). The second semiconductor layer may use p-type Al x In y Ga z N (0) doped with a p-type impurity x,y,z 1, x + y + z = 1), p-type GaN, and the like. The p-type impurity may be at least one selected from the group consisting of magnesium (Mg), zinc (Zn), calcium (Ca), strontium (Sr), bismuth (Be), and barium (Ba).

有源層16與第一半導體層15以及第二半導體層17相比具有較低的能帶隙,因此能夠激發光。有源層16可以放射多種波長的光,例如可以放射紅外線、可視光或紫外線。 The active layer 16 has a lower energy band gap than the first semiconductor layer 15 and the second semiconductor layer 17, and thus is capable of exciting light. The active layer 16 can emit light of various wavelengths, for example, can emit infrared rays, visible light, or ultraviolet rays.

有源層16可以包括Ⅲ族-V族化合物,並且可以包括AlxInyGazN(0x,y,z1,x+y+z=1)、InGaN或AlGaN。另外,有源層16可以為單量子阱(Single Quantum Well:SQW)或多量子阱(Multi Quantum Well:MQW)。進一步,有源層16可以具有量子阱層(Quantum Well Layer)與量子壘層(Quantum Barrier Layer)的層疊結構,上述量子阱層和上述量子壘層的個數可以根據需要進行各種改變。另外,有源層16可以為GaN/InGaN/GaN MQW的結構 或GaN/AlGaN/GaN MQW的結構。但這只是例示,有源層16所放射出的光的波長根據組成物質而不同。 The active layer 16 may include a group III-V compound and may include Al x In y Ga z N (0 x,y,z 1, x + y + z = 1), InGaN or AlGaN. In addition, the active layer 16 may be a single quantum well (SQW) or a multiple quantum well (Multi Quantum Well: MQW). Further, the active layer 16 may have a stacked structure of a quantum well layer and a quantum barrier layer, and the number of the quantum well layer and the quantum barrier layer may be variously changed as needed. In addition, the active layer 16 may be a structure of GaN/InGaN/GaN MQW or a structure of GaN/AlGaN/GaN MQW. However, this is merely an example, and the wavelength of light emitted from the active layer 16 differs depending on the constituent material.

發光結構體14可以為具有去除了有源層16以及第二半導體層17的局部區域的側壁的形狀,與此相對應地第一半導體層15的局部被去除而露出。通過上述側壁結構,在露出第一半導體層15的局部的區域上本發明的實施例涉及的第一電極30的第一分支電極33沿著長度方向延伸。由此,有源層16能夠限定於上述側壁結構而放射光。上述側壁結構可以利用電感耦合等離子體反應離子蝕刻(inductively coupled plasma reactive ion etching:ICP-RIE)、濕蝕刻或幹蝕刻來形成。 The light emitting structure 14 may be in the shape of a side wall having a partial region in which the active layer 16 and the second semiconductor layer 17 are removed, and correspondingly, a portion of the first semiconductor layer 15 is removed and exposed. The first branch electrode 33 of the first electrode 30 according to the embodiment of the present invention extends in the longitudinal direction on the region where the portion of the first semiconductor layer 15 is exposed by the above-described sidewall structure. Thereby, the active layer 16 can be limited to the above-described side wall structure to emit light. The sidewall structure may be formed by inductively coupled plasma reactive ion etching (ICP-RIE), wet etching, or dry etching.

透明電極層20由透明且具有導電性的物質組成,並位於第二半導體層17上。透明電極層20起到將從第二電極40注入的電流均勻地分散到第二半導體層17的作用。透明電極20可以包括金屬,例如可以為鎳(Ni)和金(Au)的複合層。另外,透明電極層20可以包括氧化物,例如,由ITO(Indium Tin Oxide)、IZO(Indium Zinc Oxide)、IZTO(Indium Zinc Tin Oxide)、AZO(Aluminum Zinc Oxide)、IAZO(Indium Aluminum Zinc Oxide)、GZO(Gallium Zinc Oxide)、IGO(Indium Gallium Oxide)、IGZO(Indium Gallium Zinc Oxide)、IGTO(Indium Gallium Tin Oxide)、ATO(Aluminum Tin Oxide)、IWO(Indium Tungsten Oxide)、CIO(Cupper Indium Oxide)、MIO(Magnesium Indium Oxide)、MgO、ZnO、In2O3、TiTaO2、TiNbO2、TiOx、RuOx以及IrOx中的至少一個來製造。 The transparent electrode layer 20 is composed of a transparent and electrically conductive material and is located on the second semiconductor layer 17. The transparent electrode layer 20 functions to uniformly disperse the current injected from the second electrode 40 to the second semiconductor layer 17. The transparent electrode 20 may include a metal such as a composite layer of nickel (Ni) and gold (Au). In addition, the transparent electrode layer 20 may include an oxide, for example, ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), IZTO (Indium Zinc Tin Oxide), AZO (Aluminum Zinc Oxide), IAZO (Indium Aluminum Zinc Oxide). , GZO (Gallium Zinc Oxide), IGO (Indium Gallium Oxide), IGZO (Indium Gallium Zinc Oxide), IGTO (Indium Gallium Tin Oxide), ATO (Aluminum Tin Oxide), IWO (Indium Tungsten Oxide), CIO (Cupper Indium Oxide) And MIO (Magnesium Indium Oxide), at least one of MgO, ZnO, In 2 O 3 , TiTaO 2 , TiNbO 2 , TiO x , RuO x , and IrO x .

本發明的實施例涉及的第一電極30為用於對第一半導體層15供給電流的結構體。第一電極30包括第一電極片31、連接部32以及第一分支電 極33而形成。第一電極片31位於第二半導體層17上,第一分支電極33在第一半導體層15的所露出的區域上沿著長度方向延伸。第一電極片31與透明電極層20在空間上隔開而設置。連接部32通過上述側壁結構連接第一電極片31以及第一分支電極33。由此,第一電極片31與第一分支電極33至少具有與上述側壁相當的高低差。 The first electrode 30 according to the embodiment of the present invention is a structure for supplying a current to the first semiconductor layer 15. The first electrode 30 includes a first electrode sheet 31, a connecting portion 32, and a first branch electric Formed by pole 33. The first electrode sheet 31 is located on the second semiconductor layer 17, and the first branch electrode 33 extends in the longitudinal direction on the exposed region of the first semiconductor layer 15. The first electrode sheet 31 and the transparent electrode layer 20 are spaced apart from each other. The connecting portion 32 connects the first electrode sheet 31 and the first branch electrode 33 by the above-described side wall structure. Thereby, the first electrode piece 31 and the first branch electrode 33 have at least a height difference corresponding to the above-described side wall.

第一電極片31用於封裝接合,其方式並未限定,但優選為圓板形狀。連接部32可以為粘貼在第一電極片31的局部區域上的長條狀,第一分支電極33也優選為長條狀。第一電極30可以通過濕蝕刻或幹蝕刻來製造。另一方面,如圖所示,可以在形成在上述側壁上的槽上形成連接部32。 The first electrode sheet 31 is used for package bonding, and the manner thereof is not limited, but is preferably a disk shape. The connecting portion 32 may be elongated in a partial region of the first electrode sheet 31, and the first branch electrode 33 is also preferably elongated. The first electrode 30 can be fabricated by wet etching or dry etching. On the other hand, as shown in the drawing, the connecting portion 32 may be formed on the groove formed on the side wall.

本發明的實施例涉及的第一阻擋層34是用於防止在第一電極片31中的電流擴散。為此,第一阻擋層34以與第一電極片31以及連接部32相同或略擴大的形狀插入到第一電極片31與第二半導體層17之間的區域、以及連接部32與上述側壁之間的區域。在此,在連接部32上形成第一阻擋層34的理由是為了防止發光結構體14中流過不必要的電流。因此,連接部32的第一阻擋層34是為了阻斷第一電極片31中的電流而不得不進行的。第一阻擋層34阻斷從第一電極片31引入的電流流過透明電極層20而發生電流集中的現象。被引入的第一電極片31的電流由於第一阻擋層34而僅通過第一分支電極33而注入到第一半導體層15。由此,能夠防止第一電極片31與第二電極40的第二分支電極42之間的電流集中現象。此时,第一阻挡层34优选与第一分支电极33相接。 The first barrier layer 34 according to an embodiment of the present invention is for preventing current diffusion in the first electrode sheet 31. To this end, the first barrier layer 34 is inserted into the region between the first electrode sheet 31 and the second semiconductor layer 17 in the same or slightly enlarged shape as the first electrode sheet 31 and the connecting portion 32, and the connecting portion 32 and the above-mentioned side wall The area between. Here, the reason why the first barrier layer 34 is formed on the connection portion 32 is to prevent an unnecessary current from flowing in the light-emitting structure 14. Therefore, the first barrier layer 34 of the connection portion 32 has to be performed in order to block the current in the first electrode sheet 31. The first barrier layer 34 blocks a phenomenon in which current introduced from the first electrode sheet 31 flows through the transparent electrode layer 20 to cause current concentration. The current of the introduced first electrode sheet 31 is injected into the first semiconductor layer 15 only by the first branch electrode 33 due to the first barrier layer 34. Thereby, the current concentration phenomenon between the first electrode sheet 31 and the second branch electrode 42 of the second electrode 40 can be prevented. At this time, the first barrier layer 34 is preferably in contact with the first branch electrode 33.

第一阻擋層34可以不透明或透明,可以為像氧化物這樣的絕緣體。第一阻擋層34可以為矽氧化物、矽氮化物、矽氮氧化物等這樣的氧化物或氮 化物。另外,第一阻擋層34可以為上述氧化物或氮化物層疊的多層膜。在此所例示的構成第一阻擋層34物質只是例示的,不一定限定於此。第一阻擋層34可以通過濕蝕刻或幹蝕刻形成。第一阻擋層34的厚度可考慮絕緣體的種類、阻斷電流的程度而事先設定。 The first barrier layer 34 may be opaque or transparent and may be an insulator such as an oxide. The first barrier layer 34 may be an oxide or a nitrogen such as cerium oxide, cerium nitride, germanium oxynitride or the like. Compound. In addition, the first barrier layer 34 may be a multilayer film in which the above oxide or nitride is laminated. The material constituting the first barrier layer 34 exemplified herein is merely illustrative, and is not necessarily limited thereto. The first barrier layer 34 may be formed by wet etching or dry etching. The thickness of the first barrier layer 34 can be set in advance in consideration of the type of the insulator and the degree of blocking current.

本發明的實施例涉及的第二電極40是用於對第二半導體層17供給電流的結構體。第二電極40包括第二電極片41以及第二分支電極42而形成。第二電極片41位於第二半導體層17上,第二分支電極42與第一分支電極33平行地延伸在第二半導體層17上。第二電極片41用於封裝接合,其形狀未被限定,但優選為圓板形狀。第二分支電極42優選為與第一分支電極33平行地延伸的長條狀。第二電極40可以通過濕蝕刻或幹蝕刻形成。 The second electrode 40 according to the embodiment of the present invention is a structure for supplying a current to the second semiconductor layer 17. The second electrode 40 is formed by including a second electrode sheet 41 and a second branch electrode 42. The second electrode sheet 41 is located on the second semiconductor layer 17, and the second branch electrode 42 extends on the second semiconductor layer 17 in parallel with the first branch electrode 33. The second electrode sheet 41 is used for package bonding, and its shape is not limited, but is preferably a disk shape. The second branch electrode 42 is preferably elongated in parallel with the first branch electrode 33. The second electrode 40 may be formed by wet etching or dry etching.

另一方面,平行的第一分支電極33以及第二分支電極43是用於防止因電流擴撒而導致的電流集中現象的優選的方式。根據發光二極體的形狀以及用途,第一分支電極33以及第二分支電極41可以變形為各種形狀,第一分支電極33以及第二分支電極42可以不一定平行。但是,若第一分支電極33以及第二分支電極42不平行,則電極33、42之間的間隔根據位置而不同,導致電流集中的現象,因此與本發明的實施例相同地優選第一分支電極33以及第二分支電極42平行。 On the other hand, the parallel first branch electrodes 33 and the second branch electrodes 43 are preferable modes for preventing current concentration due to current spreading. The first branch electrode 33 and the second branch electrode 41 may be deformed into various shapes according to the shape and use of the light emitting diode, and the first branch electrode 33 and the second branch electrode 42 may not necessarily be parallel. However, if the first branch electrode 33 and the second branch electrode 42 are not parallel, the interval between the electrodes 33 and 42 differs depending on the position, resulting in a phenomenon of current concentration. Therefore, the first branch is preferably the same as the embodiment of the present invention. The electrode 33 and the second branch electrode 42 are parallel.

第一電極30以及第二電極40可以均由相同的物質組成,可以通過一個工序實現。第一電極30以及第二電極40例如可以包括金(Au),銀(Ag),鋁(Al),鈀(Pd),鈦(Ti),鉻(Cr),鎳(Ni),錫(Sn),鉻(Cr),鉑(Pt),鎢(W),鈷(Co),銥(Ir),銠(Rh),釕(Ru),鋅(Zn),錳(Mg)或它們的合金。例如可以包括碳納米 管。第二電極40可以由單層構成或由多層構成,例如可以由像Ti/Al,Cr/Au,Ti/Au,Au/Sn這樣的多層構成。 The first electrode 30 and the second electrode 40 may each be composed of the same substance and can be realized by one process. The first electrode 30 and the second electrode 40 may include, for example, gold (Au), silver (Ag), aluminum (Al), palladium (Pd), titanium (Ti), chromium (Cr), nickel (Ni), tin (Sn ), chromium (Cr), platinum (Pt), tungsten (W), cobalt (Co), iridium (Ir), ruthenium (Rh), ruthenium (Ru), zinc (Zn), manganese (Mg) or alloys thereof . For example, carbon nanometers can be included tube. The second electrode 40 may be composed of a single layer or a plurality of layers, and may be composed of, for example, a multilayer such as Ti/Al, Cr/Au, Ti/Au, or Au/Sn.

根據本發明的實施例的第二阻擋層44包括第二電極片阻擋層45以及第二分支電極阻擋層46而構成。第二電極片阻擋層45位於第二電極片41以及第二半導體層17之間,優選為與第二電極片41相比略擴大的形狀。第二電極片阻擋層45防止通電到第二半導體層17。另外,在第二電極片阻擋層45以及透明電極20之間可以具備阻斷槽48,該阻斷槽48形成用於露出第二半導體層17的空間。通過阻斷槽48更加可靠地阻斷從第二電極片41引入的電流流向透明電極層20。 The second barrier layer 44 according to an embodiment of the present invention includes a second electrode sheet barrier layer 45 and a second branch electrode barrier layer 46. The second electrode sheet barrier layer 45 is located between the second electrode sheet 41 and the second semiconductor layer 17, and is preferably slightly enlarged compared to the second electrode sheet 41. The second electrode sheet barrier layer 45 prevents electrification to the second semiconductor layer 17. Further, a blocking groove 48 may be provided between the second electrode sheet barrier layer 45 and the transparent electrode 20, and the blocking groove 48 forms a space for exposing the second semiconductor layer 17. The current introduced from the second electrode sheet 41 flows to the transparent electrode layer 20 more reliably by the blocking groove 48.

第二分支電極阻擋層46位於透明電極層20且設置在第二半導體層17的上部以及第二分支電極42的下部。第二分支電極阻擋層46優選為與第二分支電極42相比略擴大的形狀。另外,第二分支電極阻擋層46使電流不流向第二半導體層17而僅流向透明電極層20。換言之,所引入的第二電極片41的電流由於第二阻擋層44而僅通過第二分支電極42而分散到透明電極20,從而注入到第二半導體層17。 The second branch electrode barrier layer 46 is located on the transparent electrode layer 20 and is disposed at an upper portion of the second semiconductor layer 17 and a lower portion of the second branch electrode 42. The second branch electrode barrier layer 46 is preferably slightly enlarged in shape compared to the second branch electrode 42. In addition, the second branch electrode barrier layer 46 causes current not to flow to the second semiconductor layer 17 but only to the transparent electrode layer 20. In other words, the current of the introduced second electrode sheet 41 is dispersed to the transparent electrode 20 only by the second branch electrode 42 due to the second barrier layer 44, thereby being injected into the second semiconductor layer 17.

第二阻擋層44可以不透明或者透明,可以為像氧化物這樣的絕緣體。第二阻擋層44可以為矽氧化物、矽氮化物、矽氮氧化物等這樣的氧化物或氮化物。另外,第二阻擋層44可以為上述氧化物或氮化物層疊的多層膜。在此所例示的構成第二阻擋層44物質只是例示的,不一定限定於此。第二阻擋層44可以通過濕蝕刻或幹蝕刻形成。第二阻擋層44的厚度可考慮絕緣體的種類、阻斷電流的程度而事先設定。 The second barrier layer 44 may be opaque or transparent and may be an insulator such as an oxide. The second barrier layer 44 may be an oxide or a nitride such as tantalum oxide, tantalum nitride, niobium oxynitride or the like. Further, the second barrier layer 44 may be a multilayer film in which the above oxide or nitride is laminated. The material constituting the second barrier layer 44 exemplified herein is merely illustrative and is not necessarily limited thereto. The second barrier layer 44 may be formed by wet etching or dry etching. The thickness of the second barrier layer 44 can be set in advance in consideration of the type of the insulator and the degree of blocking current.

根據本發明的實施例的發光二極體可以帶來以下的效果,即,由於第二分支電極42通過第一阻擋層34、第二阻擋層44使第一分支電極33以及第二分支電極44之間的間隙設定為固定。在第一阻擋層34的情況下,由於與第二分支電極42間的電流流通被阻斷,能夠使從實際上流過電流的第一分支電極33到第二分支電極42為止的距離L1變得均勻。換言之,若不存在第一阻擋層34,則第一電極片31與第二分支電極42之間的間隔(未圖示)與上述距離L1相比較小,因此有可能發生電流集中的現象。但是,如果像本發明的實施例那樣,設置第一阻擋層34,將第一電極片31進行電絕緣,就能夠阻斷第一電極片31與第二分支電極42之間的電流集中現象。另一方面,上述間隔L1固定的面積優選為整體面積的60%以上。若上述面積在60%以下,則施加到晶片整體的電流集中到具有固定間隔的部位,從而減小電流分散效果。 The light emitting diode according to the embodiment of the present invention can bring about the effect that the first branch electrode 33 and the second branch electrode 44 are made by the second branch electrode 42 through the first barrier layer 34 and the second barrier layer 44. The gap between them is set to be fixed. In the case of the first barrier layer 34, since the current flow with the second branch electrode 42 is blocked, the distance L1 from the first branch electrode 33 through which the current actually flows to the second branch electrode 42 can be made. Evenly. In other words, if the first barrier layer 34 is not present, the interval (not shown) between the first electrode sheet 31 and the second branch electrode 42 is smaller than the above-described distance L1, and thus current concentration may occur. However, if the first barrier layer 34 is provided and the first electrode sheet 31 is electrically insulated as in the embodiment of the present invention, the current concentration phenomenon between the first electrode sheet 31 and the second branch electrode 42 can be blocked. On the other hand, the area where the interval L1 is fixed is preferably 60% or more of the entire area. When the above area is 60% or less, the current applied to the entire wafer is concentrated to a portion having a fixed interval, thereby reducing the current dispersion effect.

同樣,第二電極片41與第一分支電極33之間的距離L2小於第一分支電極33與第二分支電極42的距離L1,因此若沒有第二阻擋層44,則如上所述地可能引起電流集中的現象。但是,像本發明的實施例那樣,如果通過設置第二阻擋層44,將第二電極片41進行電絕緣,就能夠阻斷第二電極片41與第一分支電極33之間的電流集中現象。如上所述,本發明的第一阻擋層34以及第二阻擋層44分別使引入到第一電極片31以及第二電極片41的電流均僅向平行排列第一分支電極33以及第二分支電極42流過。由此,能夠防止第一電極片31與第二分支電極42以及第二電極片41與第一分支電極33之間發生的電流集中的現象。 Similarly, the distance L2 between the second electrode sheet 41 and the first branch electrode 33 is smaller than the distance L1 between the first branch electrode 33 and the second branch electrode 42, so if there is no second barrier layer 44, it may be caused as described above. The phenomenon of current concentration. However, as in the embodiment of the present invention, if the second electrode sheet 41 is electrically insulated by providing the second barrier layer 44, current concentration between the second electrode sheet 41 and the first branch electrode 33 can be blocked. . As described above, the first barrier layer 34 and the second barrier layer 44 of the present invention cause the currents introduced to the first electrode sheet 31 and the second electrode sheet 41 to align only the first branch electrode 33 and the second branch electrode in parallel, respectively. 42 passed. Thereby, it is possible to prevent a phenomenon in which current is concentrated between the first electrode sheet 31 and the second branch electrode 42 and between the second electrode sheet 41 and the first branch electrode 33.

圖5a是表示不具備阻擋層的現有的發光二極體的發光圖像的照片,圖5b是具有阻擋層的本發明的實施例涉及的發光二極體的發光圖像的照片。 Fig. 5a is a photograph showing a light-emitting image of a conventional light-emitting diode without a barrier layer, and Fig. 5b is a photograph of a light-emitting image of a light-emitting diode according to an embodiment of the present invention having a barrier layer.

參照圖5a以及圖5b,現有的發光二極體光輸出(PO)為100%,本發明的光輸出為101.5%,光輸出上升了1.5%。另外,現有的發光二極體的正方向電壓VF為2.90V,本發明的發光二極體的正方向電壓VF為2.84V,正方向電壓VF減少了0.06V。現有的發光二極體在電極片與分支電極之間產生電流集中現象,在離電極較遠的區域形成相對較暗的暗部。與此相反,本發明的發光二極體相對來講幾乎沒有形成較暗的暗部,可以看出電流均勻分散。 Referring to Figures 5a and 5b, the conventional light-emitting diode light output (PO) is 100%, the light output of the present invention is 101.5%, and the light output is increased by 1.5%. Further, the positive direction of the conventional light-emitting diode voltage V F is 2.90V, the positive direction of the light emitting diode of the present invention is 2.84V voltage V F, forward voltage V F is reduced 0.06V. The existing light-emitting diode generates a current concentration phenomenon between the electrode sheet and the branch electrode, and forms a relatively dark dark portion in a region far from the electrode. In contrast, the light-emitting diode of the present invention has relatively little dark portion formed relatively, and it can be seen that the current is uniformly dispersed.

若發生電流集中現象而電流未均勻分散,則與此相反情況相比,光輸出下降且正方向電壓VF上升。由此,未阻斷電流集中現象的現有的發光二極體與本發明的二極體相比,光輸出較小且正方向電壓VF較高。如上所述,本發明的實施例通過將第一阻擋層34以及第二阻擋層44分別設置在第一電極片31以及第二電極片41來防止電流集中現象,由此,能夠提高發光二極體的光輸出且降低正方向電壓VFWhen a current concentration phenomenon occurs and the current is not uniformly dispersed, the light output is lowered and the positive direction voltage V F is increased as compared with the opposite case. Thus, the conventional light-emitting diode that does not block the current concentration phenomenon has a smaller light output and a higher forward voltage V F than the diode of the present invention. As described above, the embodiment of the present invention prevents the current concentration phenomenon by providing the first barrier layer 34 and the second barrier layer 44 on the first electrode sheet 31 and the second electrode sheet 41, respectively, thereby improving the light-emitting diode The light output of the body reduces the positive direction voltage V F .

圖6是表示具有本發明涉及的均勻的電流擴散結構的發光二極體的一個變形例的俯視圖。 Fig. 6 is a plan view showing a modification of the light-emitting diode having the uniform current diffusion structure according to the present invention.

參照圖6,在本發明的一個變形例中,在一對第二分支電極42a之間向第一阻擋層34a以及第一電極片31a延伸的第一分支電極33a形成固定的間距而被設置,該一對第二分支電極42a為從第二阻擋層44a上的第二電極片41a向透明電極層20a的兩側分支的電極。第二阻擋層44a以及第二電極片41a與第二分支電極42a連接。透明電極層20a位於第二半導體層17a上。 因此,第二阻擋層44a、第二電極片41a以及一對第二分支電極42a形成“ㄈ”字形狀。 Referring to Fig. 6, in a modification of the present invention, a first pitch electrode 33a extending between the pair of second branch electrodes 42a toward the first barrier layer 34a and the first electrode sheet 31a is formed at a fixed pitch, The pair of second branch electrodes 42a are electrodes that branch from the second electrode sheet 41a on the second barrier layer 44a to both sides of the transparent electrode layer 20a. The second barrier layer 44a and the second electrode sheet 41a are connected to the second branch electrode 42a. The transparent electrode layer 20a is located on the second semiconductor layer 17a. Therefore, the second barrier layer 44a, the second electrode sheet 41a, and the pair of second branch electrodes 42a form a "ㄈ" shape.

上述變形例的第一阻擋層34a以及第二阻擋層44a的功能以及作用與參照圖1至圖5b說明的第一阻擋層34以及第二阻擋層44的功能以及作用相同。即,第一阻擋層34a以及第二阻擋層44a分別使引入到第一電極片31a以及第二電極片41a的電流均僅向平行排列的第一分支電極33a以及第二分支電極42a流過。由此,能夠防止在第一電極片31a與第二分支電極42a以及第二電極片41a與第一分支電極33a之間發生的電流集中的現象。 The functions and functions of the first barrier layer 34a and the second barrier layer 44a of the above-described modification are the same as those of the first barrier layer 34 and the second barrier layer 44 described with reference to FIGS. 1 to 5b. That is, the first barrier layer 34a and the second barrier layer 44a cause currents introduced to the first electrode sheet 31a and the second electrode sheet 41a to flow only to the first branch electrode 33a and the second branch electrode 42a which are arranged in parallel. Thereby, it is possible to prevent a phenomenon in which current concentration occurs between the first electrode piece 31a and the second branch electrode 42a and between the second electrode piece 41a and the first branch electrode 33a.

圖7是表示具有本發明涉及的均勻的電流擴散結構的發光二極體的另一個變形例的俯視圖。 Fig. 7 is a plan view showing another modification of the light-emitting diode having the uniform current diffusion structure according to the present invention.

參照圖7,在本發明的另一變形例中,第二阻擋層44b、第二電極片41b、一對第二分支電極42b以及第一分支電極33b與圖6相同,但第一阻擋層34b以及第一電極片31b向二極體外輪廓擴大。本發明的另一變形例的第一阻擋層34b以及第二阻擋層44b的功能以及作用與參照圖1至圖5b說明的第一阻擋層34以及第二阻擋層44的功能以及作用相同。即,第一阻擋層34b以及第二阻擋層44b分別使引入到第一電極片31b以及第二電極片41b的電流均僅向平行排列的第一分支電極33b以及第二分支電極42b流過。由此,能夠防止在第一電極片31b與第二分支電極42b以及第二電極片41b與第一分支電極33b之間發生的電流集中現象。 Referring to Fig. 7, in another modification of the present invention, the second barrier layer 44b, the second electrode sheet 41b, the pair of second branch electrodes 42b, and the first branch electrode 33b are the same as in Fig. 6, but the first barrier layer 34b And the first electrode sheet 31b is expanded toward the outer surface of the diode. The functions and functions of the first barrier layer 34b and the second barrier layer 44b according to another modification of the present invention are the same as those of the first barrier layer 34 and the second barrier layer 44 described with reference to FIGS. 1 to 5b. That is, the first barrier layer 34b and the second barrier layer 44b respectively flow currents introduced to the first electrode piece 31b and the second electrode piece 41b only to the first branch electrode 33b and the second branch electrode 42b which are arranged in parallel. Thereby, it is possible to prevent a current concentration phenomenon occurring between the first electrode piece 31b and the second branch electrode 42b and the second electrode piece 41b and the first branch electrode 33b.

以上,本發明中舉出優先的實施例進行了詳細的說明,但本發明不限定於上述的實施例,在本發明的技術思想的範圍內,具有本領域的普通技術知識的人能夠進行各種變形。 The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to the above-described embodiments, and those having ordinary skill in the art can perform various kinds within the scope of the technical idea of the present invention. Deformation.

10‧‧‧襯底 10‧‧‧Substrate

12‧‧‧緩衝層 12‧‧‧ Buffer layer

14‧‧‧發光結構體 14‧‧‧Lighting structure

15‧‧‧第一半導體層 15‧‧‧First semiconductor layer

16‧‧‧有源層 16‧‧‧Active layer

17‧‧‧第二半導體層 17‧‧‧Second semiconductor layer

20‧‧‧透明電極層 20‧‧‧Transparent electrode layer

30‧‧‧第一電極 30‧‧‧First electrode

31、31a、31b‧‧‧第一電極片 31, 31a, 31b‧‧‧ first electrode

32‧‧‧連接部 32‧‧‧Connecting Department

33、33a、33b‧‧‧第一分支電極 33, 33a, 33b‧‧‧ first branch electrode

34、34a、34b‧‧‧第一阻擋層 34, 34a, 34b‧‧‧ first barrier

40‧‧‧第二電極 40‧‧‧second electrode

41、41a、41b‧‧‧第二電極片 41, 41a, 41b‧‧‧ second electrode

42:、42a、42b‧‧‧第二分支電極 42:, 42a, 42b‧‧‧ second branch electrode

44、44a、44b‧‧‧第二阻擋層 44, 44a, 44b‧‧‧ second barrier

45‧‧‧第二電極片阻擋層 45‧‧‧Second electrode sheet barrier

46‧‧‧第二分支電極阻擋層 46‧‧‧Second branch electrode barrier

48‧‧‧阻斷槽 48‧‧‧blocking slot

圖1表示具有本發明涉及的均勻的電流擴散結構的發光二極體的立體圖。 Fig. 1 is a perspective view showing a light-emitting diode having a uniform current spreading structure according to the present invention.

圖2是圖1的沿著Ⅱ-Ⅱ線切斷的截面圖。 Fig. 2 is a cross-sectional view taken along line II-II of Fig. 1;

圖3是圖1的沿著Ⅲ-Ⅲ線切斷的截面圖。 Fig. 3 is a cross-sectional view taken along line III-III of Fig. 1;

圖4是圖1的沿著Ⅳ-Ⅳ線切斷的截面圖。 Fig. 4 is a cross-sectional view taken along line IV-IV of Fig. 1;

圖5a是表示不具備阻擋層的現有的發光二極體的發光圖像的照片;圖5b是具有阻擋層的本發明的實施例涉及的發光二極體的發光圖像的照片。 Fig. 5a is a photograph showing a light-emitting image of a conventional light-emitting diode without a barrier layer; and Fig. 5b is a photograph of a light-emitting image of a light-emitting diode according to an embodiment of the present invention having a barrier layer.

圖6是表示具有本發明涉及的均勻的電流擴散結構的發光二極體的一個變形例的俯視圖。 Fig. 6 is a plan view showing a modification of the light-emitting diode having the uniform current diffusion structure according to the present invention.

圖7是表示具有本發明涉及的均勻的電流擴散結構的發光二極體的另一個變形例的俯視圖。 Fig. 7 is a plan view showing another modification of the light-emitting diode having the uniform current diffusion structure according to the present invention.

10‧‧‧襯底 10‧‧‧Substrate

12‧‧‧緩衝層 12‧‧‧ Buffer layer

14‧‧‧發光結構體 14‧‧‧Lighting structure

15‧‧‧第一半導體層 15‧‧‧First semiconductor layer

16‧‧‧有源層 16‧‧‧Active layer

17‧‧‧第二半導體層 17‧‧‧Second semiconductor layer

20‧‧‧透明電極層 20‧‧‧Transparent electrode layer

30‧‧‧第一電極 30‧‧‧First electrode

31‧‧‧第一電極片 31‧‧‧First electrode sheet

32‧‧‧連接部 32‧‧‧Connecting Department

33‧‧‧第一分支電極 33‧‧‧First branch electrode

34‧‧‧第一阻擋層 34‧‧‧First barrier

40‧‧‧第二電極 40‧‧‧second electrode

41‧‧‧第二電極片 41‧‧‧Second electrode

42‧‧‧第二分支電極 42‧‧‧Second branch electrode

44‧‧‧第二阻擋層 44‧‧‧second barrier

45‧‧‧第二電極片阻擋層 45‧‧‧Second electrode sheet barrier

46‧‧‧第二分支電極阻擋層 46‧‧‧Second branch electrode barrier

48‧‧‧阻斷槽 48‧‧‧blocking slot

Claims (14)

一種具有均勻的電流擴散結構的發光二極體,具備:發光結構體,包括第一半導體層、有源層以及第二半導體層;透明電極層,位於上述發光結構體上;第一電極,與上述透明電極層在空間上隔開而設置,包括第一分支電極、連接部以及第一電極片;以及第一阻擋層,形成在上述發光結構體上。 A light emitting diode having a uniform current diffusion structure, comprising: a light emitting structure comprising a first semiconductor layer, an active layer and a second semiconductor layer; a transparent electrode layer on the light emitting structure; a first electrode; The transparent electrode layers are spaced apart from each other, and include a first branch electrode, a connection portion, and a first electrode sheet; and a first barrier layer formed on the light-emitting structure. 根據請求項1所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第一電極片設置在上述第二半導體層上,通過上述連接部與上述第一分支電極電連接,其中,該第一分支電極向上述第一半導體層的長度方向延伸。 The light emitting diode according to claim 1, wherein the first electrode sheet is provided on the second semiconductor layer, and is electrically connected to the first branch electrode through the connecting portion. The first branch electrode extends in the longitudinal direction of the first semiconductor layer. 根據請求項1所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第一阻擋層形成於上述第二半導體層和上述第一電極片之間。 A light-emitting diode having a uniform current diffusion structure according to claim 1, wherein the first barrier layer is formed between the second semiconductor layer and the first electrode sheet. 根據請求項1所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第一阻擋層與上述第一分支電極相互接觸。 A light-emitting diode having a uniform current spreading structure according to claim 1, wherein the first barrier layer and the first branch electrode are in contact with each other. 根據請求項1所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第一阻擋層具有與上述第一電極片以及上述連接部相同或 擴大的形狀。 A light emitting diode having a uniform current spreading structure according to claim 1, wherein the first barrier layer has the same shape as the first electrode sheet and the connecting portion or Expanded shape. 根據請求項1所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第一阻擋層為氧化物膜或氮化物膜中選擇的任一膜,或者上述氧化物膜和上述氮化物膜層疊的多層膜。 A light-emitting diode having a uniform current diffusion structure according to claim 1, wherein the first barrier layer is any one selected from an oxide film or a nitride film, or the above oxide film and the above A multilayer film in which a nitride film is laminated. 根據請求項1所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,在上述第二半導體層上包括第二電極,還包括第二阻擋層,其中,該第二電極由第二電極片以及與上述第一分支電極平行的第二分支電極構成,該第二阻擋層用於使上述第二電極片以及上述第二分支電極與上述第二半導體層電絕緣。 A light emitting diode having a uniform current spreading structure according to claim 1, wherein the second semiconductor layer includes a second electrode, further comprising a second barrier layer, wherein the second electrode is a second electrode sheet and a second branch electrode parallel to the first branch electrode, wherein the second barrier layer is for electrically insulating the second electrode sheet and the second branch electrode from the second semiconductor layer. 根據請求項7所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第二阻擋層形成於上述第二半導體層與上述第二電極片之間。 A light-emitting diode having a uniform current diffusion structure according to claim 7, wherein the second barrier layer is formed between the second semiconductor layer and the second electrode sheet. 根據請求項7所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第一分支電極與上述第二分支電極之間的間距(L1)為固定。 A light-emitting diode having a uniform current spreading structure according to claim 7, wherein a pitch (L1) between the first branch electrode and the second branch electrode is fixed. 根據請求項9所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述間距(L1)為固定的面積占整個面積的60%以上。 A light-emitting diode having a uniform current spreading structure according to claim 9, wherein the pitch (L1) is a fixed area of 60% or more of the entire area. 根據請求項7所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第二阻擋層具有與上述第二電極片以及上述第二分支電極相同或擴大的形狀。 A light-emitting diode having a uniform current spreading structure according to claim 7, wherein the second barrier layer has the same shape as or enlarged from the second electrode sheet and the second branch electrode. 根據請求項7所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第二阻擋層具有與上述第二分支電極相同或擴大的形狀。 A light-emitting diode having a uniform current diffusion structure according to claim 7, wherein the second barrier layer has the same shape as or enlarged from the second branch electrode. 根據請求項7所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,上述第二阻擋層為氧化物膜或氮化物膜中選擇的一種膜,或者上述氧化物膜和上述氮化物膜層疊的多層膜。 A light-emitting diode having a uniform current diffusion structure according to claim 7, wherein the second barrier layer is a selected one of an oxide film or a nitride film, or the oxide film and the nitrogen A multilayer film in which a compound film is laminated. 根據請求項7所述的具有均勻的電流擴散結構的發光二極體,其特徵在於,形成於上述第二電極片的上述第二阻擋層與上述透明電極層通過阻斷槽在空間上被分隔,該阻斷槽用於露出第二半導體層。 The light emitting diode having a uniform current spreading structure according to claim 7, wherein the second barrier layer formed on the second electrode sheet and the transparent electrode layer are spatially separated by a blocking groove The blocking groove is for exposing the second semiconductor layer.
TW103121198A 2013-11-08 2014-06-19 Light emitting diode having structure for uniform current spreading TW201519472A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020130135200A KR101541363B1 (en) 2013-11-08 2013-11-08 Light emitting diode having structure for uniform current spreading

Publications (1)

Publication Number Publication Date
TW201519472A true TW201519472A (en) 2015-05-16

Family

ID=53041662

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103121198A TW201519472A (en) 2013-11-08 2014-06-19 Light emitting diode having structure for uniform current spreading

Country Status (3)

Country Link
KR (1) KR101541363B1 (en)
TW (1) TW201519472A (en)
WO (1) WO2015068912A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100730082B1 (en) * 2005-10-17 2007-06-19 삼성전기주식회사 Nitride semiconductor light emitting device
KR100747641B1 (en) * 2006-07-21 2007-08-08 서울옵토디바이스주식회사 Light emitting diode
US20110147784A1 (en) * 2009-12-18 2011-06-23 Sharp Kabushiki Kaisha Light emitting device with more uniform current spreading
JP5517882B2 (en) * 2010-10-20 2014-06-11 シャープ株式会社 Nitride semiconductor light emitting device
KR20120078386A (en) * 2010-12-31 2012-07-10 갤럭시아포토닉스 주식회사 Light emitting diode having current blocking layer and light emitting diode package

Also Published As

Publication number Publication date
KR101541363B1 (en) 2015-08-03
KR20150053838A (en) 2015-05-19
WO2015068912A1 (en) 2015-05-14

Similar Documents

Publication Publication Date Title
KR100999726B1 (en) Light emitting device and method for fabricating the same
JP6706900B2 (en) Light emitting device and lighting system
US9786814B2 (en) Ultraviolet light emitting device
US10347789B2 (en) Light emitting device and light emitting device package having same
KR102623615B1 (en) Light emitting device, light emitting device package and light emitting apparatus
KR101300781B1 (en) Light emitting diode having current spreading layer with an opening and light emitting diode package
US10177274B2 (en) Red light emitting diode and lighting device
US9178110B2 (en) Light-emitting device and method for manufacturing same
JP2014165337A (en) Light-emitting element, light-emitting element package, and method of manufacturing light-emitting element
KR101206523B1 (en) Light emitting diode having upper and lower fingers and light emitting diode package
KR101294824B1 (en) Light emitting diode having current blocking layer and its light emitting diode package
KR101204430B1 (en) Light emitting diode having bonding pads formed on recess region and light emitting diode package
US10236417B2 (en) Light-emitting element
KR20130067216A (en) Ultraviolet light-emitting device
KR101223226B1 (en) Light Emitting Diode having an open part and its Light Emitting Diode package
KR101541363B1 (en) Light emitting diode having structure for uniform current spreading
JP2016046411A (en) Semiconductor light emitting element
KR102224164B1 (en) Light emitting device and lighting system having the same
KR20120078377A (en) Light emitting diode having current blocking pattern and light emitting diode package
KR102328477B1 (en) Light emitting device and light unit having thereof
KR102356516B1 (en) Light emitting device and light emitting device package
KR102299735B1 (en) Light emitting device and lighting system
KR102336432B1 (en) Light emitting device and light emitting device package
KR102561565B1 (en) Light emitting device and light emitting device package
KR102346649B1 (en) Light emitting device and light emitting device package having thereof