TW201446675A - Cutting method and cutting apparatus - Google Patents
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本發明係關於一種切割方法及切割設備,特別是一種用於切割一玻璃基板之切割方法及切割設備。 The invention relates to a cutting method and a cutting device, in particular to a cutting method and a cutting device for cutting a glass substrate.
目前玻璃基板廣泛運用在電子產品之各種零件中,如螢幕、外殼等。為了避免玻璃基板輕易被刮傷或破裂,通常玻璃基板均經過強化。在製造過程中,玻璃基板均需切割為較小尺寸之玻璃基板以配合各式裝置之應用。然而,強化玻璃基板因其硬度高,在切割程序中產生的龜裂較難以控制,因此,如何切割強化玻璃基板,並使玻璃基板沿預定切割線分裂,為此一業界之重要課題。 At present, glass substrates are widely used in various parts of electronic products, such as screens and casings. In order to prevent the glass substrate from being easily scratched or broken, the glass substrate is usually reinforced. In the manufacturing process, the glass substrate needs to be cut into a smaller size glass substrate to match the application of various devices. However, since the tempered glass substrate has high hardness and cracks generated in the cutting process are difficult to control, how to cut the tempered glass substrate and split the glass substrate along a predetermined dicing line is an important issue in the industry.
請參考圖1至2,習知切割方法係使用一切割刀輪21於玻璃基板1上進行連續性之刻劃步驟而產生一連續之刻劃開口203。使用習知切割方法刻劃玻璃基板1後,直接接觸切割刀輪21之玻璃基板1之第一表面11上會發生以下現象: Referring to FIGS. 1 to 2, the conventional cutting method uses a cutting blade 21 to perform a continuous scoring step on the glass substrate 1 to produce a continuous scribed opening 203. After the glass substrate 1 is scribed using the conventional cutting method, the following phenomenon occurs on the first surface 11 of the glass substrate 1 directly contacting the cutting blade 21:
1):塑性破壞區(Plastic core zone)204:切割刀輪21向下擠壓使玻璃基板1發生塑性破壞,而使刻劃開口203周圍發生塑性破壞區204,並伴隨產生渥勒線(Wallner line)205。 1): Plastic core zone 204: The cutting cutter wheel 21 is pressed downward to cause plastic destruction of the glass substrate 1, and the plastic damage zone 204 is generated around the scribe opening 203, and is accompanied by a smash line (Wallner Line) 205.
2):垂直裂痕(Median crack)206:向下生成垂直方向之裂痕。 2): Median crack 206: A crack in the vertical direction is generated downward.
3):側向裂痕207:沿第一表面11大致水平之方向延伸之裂痕。 3): Lateral crack 207: a crack extending in a substantially horizontal direction along the first surface 11.
4):表面崩落208:因側向裂痕207延伸至第一表面11造成之刻劃 開口邊緣崩落。 4): surface collapse 208: characterization caused by the lateral crack 207 extending to the first surface 11 The edge of the opening collapses.
在刻劃產生連續之刻劃開口203後,習知切割方法可採用施加機械應力的方式對玻璃基板1進行分斷。抑或,習知切割方法利用刻劃產生連續之刻劃開口203時,其向下之垂直裂痕206深度達到玻璃基板厚度的80%以上,而足以使玻璃基板1自然分裂。然而,習知用於玻璃基板1之切割方法所切割之玻璃產品之斷面209之品質不好,進而造成切割後玻璃基板1可承受外力之強度因此下降。玻璃基板1之第一表面11因為經切割刀輪21刻劃過,第一表面11會發生表面崩落208,進而產生碎屑(Chipping)。若刻劃後所產生之刻劃開口203相互交叉,於其交叉點更會有嚴重的表面崩落208現象發生,進而產生更嚴重之碎屑及裂痕(Chipping and Crack)狀況。上述問題均造成玻璃基板1之切割品質低下。此外,另一個嚴重的缺點是,當習知切割方法刻劃玻璃基板1時所產生之向下垂直裂痕206的垂直度相當差。若切割較小尺寸之玻璃產品,甚至會發生刻劃形成刻劃開口203後,玻璃基板1發生翹曲之狀況。 After the scribing produces a continuous scribed opening 203, the conventional cutting method can break the glass substrate 1 by applying mechanical stress. Or, the conventional cutting method utilizes scribing to create a continuous scribed opening 203 whose depth of the downward vertical crack 206 reaches more than 80% of the thickness of the glass substrate, sufficient to cause the glass substrate 1 to naturally split. However, it is conventionally known that the quality of the section 209 of the glass product cut by the cutting method for the glass substrate 1 is not good, and the strength of the glass substrate 1 which can withstand an external force after cutting is thus lowered. Since the first surface 11 of the glass substrate 1 is scribed by the cutter wheel 21, the first surface 11 is subjected to surface collapse 208, thereby generating chipping. If the scribe openings 203 created after scoring cross each other, there will be a serious surface collapse 208 at the intersection, which will result in more severe chipping and crack conditions. All of the above problems cause the cutting quality of the glass substrate 1 to be low. In addition, another serious disadvantage is that the verticality of the downward vertical crack 206 generated when the conventional cutting method scores the glass substrate 1 is rather poor. If the glass product of a smaller size is cut, even if the scribe opening 203 is scored, the glass substrate 1 is warped.
請參考圖2及3,良好之玻璃基板1之刻劃產生刻劃開口203之品質有三項重要要求。第一,垂直裂痕206之深度要深。垂直裂痕206之深度越深,玻璃基板1越容易分斷。第二,必須抑制側向裂痕207之發生。側向裂痕207之狀況嚴重時會引起刻劃開口203附近之表面崩落208。表面崩落208發生時,會影響玻璃基板1之切割後斷面209品質。第三,切割後玻璃基板1表面需維持平整;刻劃產生刻劃開口203時伴隨產生之表面破壞會影響第一表面11之品質,亦影響切割後玻璃基板1之可承受外力之強度。 Referring to Figures 2 and 3, the characterization of a good glass substrate 1 produces three important requirements for the quality of the scribe opening 203. First, the depth of the vertical crack 206 is deep. The deeper the depth of the vertical crack 206, the easier the glass substrate 1 is to be broken. Second, the occurrence of lateral cracks 207 must be suppressed. When the condition of the lateral crack 207 is severe, it causes a surface collapse 208 near the scribe opening 203. When the surface collapse 208 occurs, the quality of the cut surface section 209 of the glass substrate 1 is affected. Third, the surface of the glass substrate 1 after cutting needs to be flat; the surface damage accompanying the scribe opening 203 affects the quality of the first surface 11, and also affects the strength of the glass substrate 1 after the cutting.
然而,習知切割方法,有以下的缺點是無法被克服的。詳述如下: However, the conventional cutting method has the following disadvantages that cannot be overcome. Details are as follows:
1)如圖2所示,玻璃基板1之第一表面11之傷痕較大,甚至發生 表面崩落208,而產生碎屑:採用習知切割方法時,即使使用銳角的切割刀輪21,直接接觸刀輪21的第一表面11仍然有不欲產生的傷痕。再者,刻劃開口203之交叉點之表面傷痕會因為重複切割二次,而產生更大的表面傷痕,進而影響切割後之表面品質。 1) As shown in FIG. 2, the first surface 11 of the glass substrate 1 has a large flaw and even occurs. The surface collapses 208, causing debris: When the conventional cutting method is used, even if the sharp-cutting cutter wheel 21 is used, the first surface 11 directly contacting the cutter wheel 21 still has an unintended flaw. Moreover, the surface flaws at the intersection of the scribe openings 203 may result in larger surface scratches due to repeated cutting twice, thereby affecting the surface quality after cutting.
2)如圖2及3所示,垂直裂痕206垂直度不好:習知切割方法雖然會產生垂直裂痕206,但是垂直裂痕206之垂直度不佳,有相當大的誤差。造成玻璃基板1切割後之斷面並非垂直,斷面品質之要求無法被滿足。 2) As shown in Figures 2 and 3, the vertical crack 206 has a poor verticality: although the conventional cutting method produces a vertical crack 206, the perpendicularity of the vertical crack 206 is not good and there is considerable error. The section after the glass substrate 1 is cut is not vertical, and the requirements for the quality of the section cannot be satisfied.
2)彎曲強度低落:因為玻璃基板1經切割刀輪21刻劃過後,刻劃開口203附近會產生垂直裂痕206、側向裂痕207、表面損傷,甚至表面崩裂208,因此斷面209之品質不好。在斷面品質不好之情況下,切割後玻璃基板1於受到彎曲時,玻璃基板1內部之擠壓力量易對上述缺陷造成破壞,使切割後玻璃基板1強度非常差。 2) The bending strength is low: since the glass substrate 1 is scribed by the cutting blade 21, vertical cracks 206, lateral cracks 207, surface damage, and even surface cracking 208 are generated in the vicinity of the scribe opening 203, so the quality of the section 209 is not it is good. In the case where the quality of the cross section is not good, when the glass substrate 1 is subjected to bending after the cutting, the pressing force inside the glass substrate 1 is liable to cause damage to the above defects, so that the strength of the glass substrate 1 after cutting is very poor.
因此,如何切割玻璃基板,避免或減緩經習知切割方法刻劃過後之玻璃基板所產生之缺陷,為此一業界之重要課題。 Therefore, how to cut the glass substrate to avoid or slow down the defects caused by the glass substrate after the conventional cutting method has been etched is an important issue in the industry.
本發明之一目的在於提供一種切割方法及切割設備,適可避免或減緩經習知切割方法刻劃過後之玻璃基板所產生之缺陷。 It is an object of the present invention to provide a cutting method and a cutting apparatus which are suitable for avoiding or slowing down defects caused by a glass substrate which has been scribed by a conventional cutting method.
為達上述目的,本發明適以切割一玻璃基板以形成複數玻璃產品之切割方法,包含以下步驟:(a)沿一預定切割線於玻璃基板之一第一表面非連續地刻劃玻璃基板,以形成不相連之複數刻劃開口;及(b)使玻璃基板沿預定切割線分裂為玻璃產品。 To achieve the above object, the present invention is suitable for cutting a glass substrate to form a plurality of glass products, comprising the steps of: (a) discontinuously scribing the glass substrate along a predetermined cutting line on one of the first surfaces of the glass substrate, Forming an opening by forming a plurality of unconnected plurality; and (b) splitting the glass substrate into a glass product along a predetermined cutting line.
為達上述目的,本發明適以切割一玻璃基板以形成複數玻璃產品之切割設備包含一切割頭及一分斷裝置。切割頭用於沿預定切割線於玻璃基板之第一表面非連續地刻劃玻璃基板,以形成不相連之複數刻劃開口。分斷裝置用於使玻璃基板沿預定切割線分裂為多個玻璃產 品 To achieve the above object, the cutting apparatus suitable for cutting a glass substrate to form a plurality of glass products comprises a cutting head and a breaking device. The cutting head is for discontinuously scribing the glass substrate along the predetermined cutting line on the first surface of the glass substrate to form a plurality of scribed openings that are not connected. The breaking device is used to split the glass substrate into a plurality of glass products along a predetermined cutting line Product
1‧‧‧玻璃基板 1‧‧‧ glass substrate
11‧‧‧第一表面 11‧‧‧ first surface
12‧‧‧第二表面 12‧‧‧ second surface
21‧‧‧切割刀輪 21‧‧‧Cutting cutter wheel
203‧‧‧刻劃開口 203‧‧‧ scribing openings
204‧‧‧塑性破壞區 204‧‧‧Plastic damage zone
205‧‧‧渥勒線 205‧‧‧渥勒线
206‧‧‧垂直裂痕 206‧‧‧ vertical crack
207‧‧‧側向裂痕 207‧‧‧lateral cracks
208‧‧‧表面崩落 208‧‧‧ surface collapse
209‧‧‧斷面 209‧‧‧ Section
301‧‧‧預定切割線 301‧‧‧Predetermined cutting line
303‧‧‧刻劃開口 303‧‧‧ scribing openings
305‧‧‧斷面 305‧‧‧ Section
31‧‧‧切割刀輪 31‧‧‧Cutting cutter wheel
311‧‧‧切割刀鋒 311‧‧‧ cutting blade
313‧‧‧切割槽 313‧‧‧Cutting trough
33‧‧‧分斷裝置 33‧‧‧ Breaking device
331‧‧‧中央夾持件 331‧‧‧Central clamping parts
333‧‧‧側夾持件 333‧‧‧ side clamps
A‧‧‧軸向 A‧‧‧Axial
c‧‧‧周向 c‧‧‧Weighing
d‧‧‧槽深度 D‧‧‧ groove depth
D‧‧‧外徑 D‧‧‧OD
i‧‧‧間隔 I‧‧‧ interval
w‧‧‧長度 W‧‧‧ Length
r‧‧‧徑向 R‧‧‧radial
t‧‧‧厚度 T‧‧‧thickness
T‧‧‧刀輪厚度 T‧‧‧knife wheel thickness
θ‧‧‧切割角度 Θ‧‧‧ cutting angle
圖1為習知切割方法之一剖面示意圖;圖2為經習知切割方法刻劃後形成於玻璃基板上之缺陷之一示意圖;圖3為經習知切割方法切割後玻璃基板之斷面之一示意圖;圖4A為本發明切割方法之一立體示意圖;圖4B為本發明切割方法之一剖面示意圖;圖5為本發明切割方法之沿複數預定切割線刻劃玻璃基板之一示意圖;圖6為本發明切割設備之分斷裝置之一示意圖;圖7A至7C為本發明切割設備之切割刀輪之示意圖;及圖8為本發明切割方法切割後玻璃基板之斷面之一示意圖。 1 is a schematic cross-sectional view of a conventional cutting method; FIG. 2 is a schematic view showing a defect formed on a glass substrate after being scribed by a conventional cutting method; and FIG. 3 is a cross section of the glass substrate after being cut by a conventional cutting method. 4A is a schematic perspective view of a cutting method according to the present invention; FIG. 4B is a schematic cross-sectional view showing a cutting method according to the present invention; FIG. 5 is a schematic view showing a glass substrate cut along a plurality of predetermined cutting lines according to the cutting method of the present invention; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 7A to FIG. 7C are schematic views of a cutting wheel of a cutting device of the present invention; and FIG. 8 is a schematic view showing a section of a glass substrate after cutting by the cutting method of the present invention.
如圖4A及4B所示,本發明之切割方法適以切割一玻璃基板1以形成複數玻璃產品。玻璃基板1可為一強化玻璃基板或一未強化玻璃,並具有一第一表面11及相對於第一表面11之一第二表面12。本發明之切割方法包含以下步驟:步驟(a),沿一預定切割線301於玻璃基板1之第一表面11非連續地刻劃玻璃基板1,以形成不相連之複數刻劃開口303。步驟(b),使玻璃基板1沿預定切割線301分裂為多個玻璃產品。 As shown in Figures 4A and 4B, the cutting method of the present invention is adapted to cut a glass substrate 1 to form a plurality of glass products. The glass substrate 1 can be a tempered glass substrate or an unreinforced glass and has a first surface 11 and a second surface 12 opposite the first surface 11. The dicing method of the present invention comprises the steps of: (a), discontinuously scribing the glass substrate 1 along a predetermined cutting line 301 on the first surface 11 of the glass substrate 1 to form a plurality of scribed openings 303. In step (b), the glass substrate 1 is split into a plurality of glass products along a predetermined cutting line 301.
藉由本發明之切割方法,刻劃開口303之斷裂線之垂直度高,進而使切割後玻璃基板1之斷面305光滑度高(如圖8所示),並且刻劃開口303附近表面及複數預定切割線301之交叉點之表面崩落及碎屑現象可以有效地被抑制。本發明之切割方法較佳係利用特製切割刀輪31及可控制壓力的切割刀輪固定座(圖未示)刻劃玻璃基板1,使玻璃基板1 產生非連續性之刻劃開口303,並且相較於先前技術,不易產生向下之垂直裂痕。待刻劃產生出非連續之刻劃開口303後,再施以機械應力分斷玻璃基板1。 With the cutting method of the present invention, the perpendicularity of the fracture line of the scribe opening 303 is high, so that the section 305 of the glass substrate 1 after dicing is smooth (as shown in FIG. 8), and the surface and the number of the opening 303 are scribed. The surface collapse and chipping at the intersection of the predetermined cutting line 301 can be effectively suppressed. Preferably, the cutting method of the present invention uses a special cutting cutter wheel 31 and a pressure-control cutter wheel holder (not shown) to score the glass substrate 1 to make the glass substrate 1 The discontinuous scribe opening 303 is created and, compared to the prior art, it is less prone to produce a downward vertical crack. After the scribe is formed to form a discontinuous scribed opening 303, the glass substrate 1 is separated by mechanical stress.
此外,請參考圖5,於本發明之切割方法之步驟(a)中,可於玻璃基板1之第一表面11上沿相互平行或交叉之不同預定切割線301非連續地刻劃玻璃基板1,而形成複數組不相連之刻劃開口303。爾後,於本發明之切割方法之步驟(b)中,再使玻璃基板1分別沿不同預定切割線301分裂為多個玻璃產品。 In addition, referring to FIG. 5, in the step (a) of the cutting method of the present invention, the glass substrate 1 may be discontinuously scored on the first surface 11 of the glass substrate 1 along different predetermined cutting lines 301 which are parallel or intersect with each other. And forming a scribed opening 303 in which the complex array is not connected. Thereafter, in the step (b) of the cutting method of the present invention, the glass substrate 1 is further split into a plurality of glass products along different predetermined cutting lines 301, respectively.
如圖4A所示,於本發明之切割方法之步驟(a)中,不相連之刻劃開口303在沿預定切割線301上形成彼此間之一間隔i,較佳地,該間隔i實質上為1至3μm,並且刻劃開口303在沿預定切割線301上形成之一長度w較佳地實質上為5至15μm。 As shown in Fig. 4A, in the step (a) of the cutting method of the present invention, the scribed openings 303 are formed to form an interval i between each other along a predetermined cutting line 301. Preferably, the interval i is substantially It is 1 to 3 μm, and the scribe opening 303 is formed to have a length w along the predetermined cutting line 301, preferably substantially 5 to 15 μm.
如圖6所示,本發明之切割方法之步驟(b)較佳地可於第二表面12上沿預定切割線301(請參考中間之刻劃開口303之位置)向玻璃基板1加壓,並於第一表面11上較佳係平行於預定切割線301(請參考中間之刻劃開口303之位置)且於預定切割線301之鄰近相對二側向玻璃基板1加壓,以使玻璃基板1沿預定切割線301分裂為多個玻璃產品。 As shown in FIG. 6, step (b) of the cutting method of the present invention preferably pressurizes the glass substrate 1 along the predetermined cutting line 301 on the second surface 12 (refer to the position of the scribed opening 303 in the middle). And preferably on the first surface 11 parallel to the predetermined cutting line 301 (please refer to the position of the scribed opening 303 in the middle) and pressurize the glass substrate 1 adjacent to the opposite sides of the predetermined cutting line 301 to make the glass substrate 1 splits into a plurality of glass products along a predetermined cutting line 301.
於本發明之切割方法之步驟(a)中,較佳地係使用一切割刀輪31沿預定切割線301於玻璃基板1之第一表面11非連續地刻劃玻璃基板1。 In the step (a) of the cutting method of the present invention, the glass substrate 1 is preferably discontinuously scored on the first surface 11 of the glass substrate 1 along a predetermined cutting line 301 using a cutting blade 31.
本發明之切割設備適以切割一玻璃基板1以形成複數玻璃產品。如圖4A及4B及圖6所示,切割設備包含一切割頭及一分斷裝置33。切割頭較佳地包含一切割刀輪31。切割頭用於沿一預定切割線301於玻璃基板1之第一表面11非連續地刻劃玻璃基板1,以形成不相連之複數刻劃開口303。分斷裝置33用於使玻璃基板1沿預定切割線301分裂為多個玻璃產品。 The cutting apparatus of the present invention is adapted to cut a glass substrate 1 to form a plurality of glass products. As shown in FIGS. 4A and 4B and FIG. 6, the cutting apparatus includes a cutting head and a breaking device 33. The cutting head preferably includes a cutting wheel 31. The cutting head is used to discontinuously score the glass substrate 1 along a predetermined cutting line 301 on the first surface 11 of the glass substrate 1 to form a plurality of scribed openings 303 that are not connected. The breaking device 33 serves to split the glass substrate 1 into a plurality of glass products along a predetermined cutting line 301.
如圖4A所示,不相連之刻劃開口303沿預定切割線301形成之一間隔i較佳地實質上為1至3μm,並且,不相連之刻劃開口303沿預定切割線301形成之一長度w較佳地實質上為5至15μm。 As shown in FIG. 4A, the interval ii of the disconnected scribe openings 303 formed along the predetermined cutting line 301 is preferably substantially 1 to 3 μm, and the unconnected scribe openings 303 are formed along the predetermined cutting line 301. The length w is preferably substantially 5 to 15 μm.
如圖6所示,分斷裝置33包含一中央夾持件331及一對側夾持件333。中央夾持件331於第二表面12上沿預定切割線301(請參考中間之刻劃開口303之位置)向玻璃基板1加壓,並且側夾持件333分別於第一表面11上較佳係平行於預定切割線301(請參考中間之刻劃開口303之位置),且鄰近且相對於預定切割線301之二側位置處向玻璃基板1加壓,以使玻璃基板1沿預定切割線301分裂為多個玻璃產品。 As shown in FIG. 6, the breaking device 33 includes a center holding member 331 and a pair of side holding members 333. The central clamping member 331 presses the glass substrate 1 along the predetermined cutting line 301 on the second surface 12 (refer to the position of the scribed opening 303 in the middle), and the side clamping members 333 are preferably respectively on the first surface 11. Parallel to the predetermined cutting line 301 (please refer to the position of the scribed opening 303 in the middle), and pressurize the glass substrate 1 adjacent to and at a position opposite to the predetermined cutting line 301 to make the glass substrate 1 along a predetermined cutting line. The 301 split into multiple glass products.
請參考圖7A至7C,切割頭所包含之切割刀輪31具有一最大外徑D、一軸向A(即沿刀輪旋轉軸之方向)、一徑向r(即沿刀輪直徑之方向)、一周向c(即沿刀輪外圓周之方向)及沿軸向A之一刀輪厚度T。切割刀輪31外周緣由最大外徑D處沿徑向r向內漸縮形成具有一切割角度θ之一切割刀鋒311。在切割刀鋒311上延伸形成不平行於周向c之複數切割槽313,並且切割槽313具有一槽深度d。於一實施例中,玻璃基板1之一厚度t實質上介於0.05至1.1 mm,並且切割刀鋒311之切割角度θ實質上介於90°至150°,切割槽313之槽深度d實質上小於3μm,切割槽313之數量實質上大於200個,並且刻劃形成刻劃開口303時所加壓之一刻劃力實質上小於15牛頓(N)。 7A to 7C, the cutting head 31 included in the cutting head has a maximum outer diameter D, an axial direction A (ie, a direction along the axis of rotation of the cutter wheel), and a radial direction r (ie, a direction along the diameter of the cutter wheel). ), a circumferential direction to c (ie, in the direction of the outer circumference of the cutter wheel) and a thickness T of the cutter wheel in the axial direction A. The outer circumference of the cutter wheel 31 is tapered inwardly from the maximum outer diameter D in the radial direction r to form a cutting edge 311 having a cutting angle θ. A plurality of cutting grooves 313 which are not parallel to the circumferential direction c are formed on the cutting blade edge 311, and the cutting groove 313 has a groove depth d. In one embodiment, the thickness t of one of the glass substrates 1 is substantially between 0.05 and 1.1 mm, and the cutting angle θ of the cutting blade edge 311 is substantially between 90° and 150°, and the groove depth d of the cutting groove 313 is substantially smaller than At 3 μm, the number of cutting grooves 313 is substantially greater than 200, and one of the pressing forces when the scoring opening 303 is scored is substantially less than 15 Newtons (N).
於切割刀輪31之一較佳實施例中,當玻璃基板1之厚度t實質上為0.4 mm時,切割刀輪31之外徑D質上為2 mm,切割刀鋒311之切割角度θ實質上為125°,並且刻劃形成刻劃開口303時所加壓之刻劃力實質上介於0.6至2.5 N。 In a preferred embodiment of the cutter wheel 31, when the thickness t of the glass substrate 1 is substantially 0.4 mm, the outer diameter D of the cutter wheel 31 is 2 mm, and the cutting angle θ of the cutting blade 311 is substantially It is 125°, and the scribe force that is pressed when scribing the scribe opening 303 is substantially between 0.6 and 2.5 N.
本發明之切割方法及切割設備之特點在於沿預定切割線301於玻璃基板1之第一表面11非連續地刻劃玻璃基板1,以形成不相連之複數刻劃開口303,並可配合使用特殊切割刀輪31與特殊之可控制壓力的 切割刀輪固定座,其可精確控制刻劃形成刻劃開口303時所加壓之刻劃力。使用本發明之切割方法及切割設備所刻劃產生於玻璃基板1之第一表面11上之沿預定切割線301之微小不相連之複數刻劃開口303,不易產生習知切割方法所產生之垂直裂痕206和側向裂痕207以及表面崩落208。本發明之切割方法及切割設備有以下優點: The cutting method and the cutting device of the present invention are characterized in that the glass substrate 1 is discontinuously scored along the predetermined cutting line 301 on the first surface 11 of the glass substrate 1 to form a plurality of scribed openings 303 which are not connected, and can be used in combination with a special Cutting cutter wheel 31 with special controllable pressure The cutter wheel holder is mounted to precisely control the scribe force that is pressed when forming the scribe opening 303. The plurality of scribed openings 303 along the predetermined cutting line 301 which are generated on the first surface 11 of the glass substrate 1 by the cutting method and the cutting device of the present invention are not easily generated by the conventional cutting method. The crack 206 and the lateral crack 207 and the surface collapse 208. The cutting method and cutting device of the invention have the following advantages:
1.幾乎沒有表面崩落208和碎屑(Chipping)之發生:因為玻璃基板1僅有非連續之複數刻劃開口303,所以不會有表面崩落208和碎屑產生。特別是沿複數預定切割線301刻劃產生複數組刻劃開口303時,第一表面11於複數組刻劃開口303之交叉點處也不會有嚴重之缺陷產生。本發明之切割方法及切割設備可以保持玻璃基板1之表面完整性。 1. There is almost no occurrence of surface collapse 208 and chipping: since the glass substrate 1 has only a discontinuous plurality of scribe openings 303, there is no surface collapse 208 and debris generation. In particular, when the complex array of scribe openings 303 are created along the plurality of predetermined cut lines 301, the first surface 11 does not have serious defects at the intersection of the complex array scribe openings 303. The cutting method and cutting apparatus of the present invention can maintain the surface integrity of the glass substrate 1.
2.不易產生垂直裂痕206:沒有垂直裂痕206之好處是玻璃基板1切割後之斷面305之垂直度可以透過分斷裝置33來控制。只要如圖6所示之分斷裝置33沿預定切割線301施壓,即可得到如圖8所示之良好之垂直斷面305。 2. It is not easy to generate vertical cracks 206: The advantage of having no vertical cracks 206 is that the perpendicularity of the section 305 after the glass substrate 1 is cut can be controlled by the breaking device 33. As long as the breaking device 33 as shown in Fig. 6 is pressed along the predetermined cutting line 301, a good vertical section 305 as shown in Fig. 8 can be obtained.
3.玻璃基板1之彎曲強度增加:因為沒有側向裂痕207、垂直裂痕206、表面崩落208及碎屑之發生,所以切割分斷後之玻璃產品擁有良好之斷面305(如圖8所示),而良好之斷面305使切割玻璃基板1後所形成之玻璃產品可以承受較高的彎曲應力,彎曲時不會自切斷面既有之缺陷處發生破壞。 3. The bending strength of the glass substrate 1 is increased: since there are no lateral cracks 207, vertical cracks 206, surface collapses 208 and debris, the glass product after cutting and cutting has a good section 305 (as shown in Fig. 8). The good section 305 allows the glass product formed after cutting the glass substrate 1 to withstand high bending stress, and does not break from the defects of the cut surface when bent.
1‧‧‧玻璃基板 1‧‧‧ glass substrate
11‧‧‧第一表面 11‧‧‧ first surface
12‧‧‧第二表面 12‧‧‧ second surface
301‧‧‧預定切割線 301‧‧‧Predetermined cutting line
303‧‧‧刻劃開口 303‧‧‧ scribing openings
i‧‧‧間隔 I‧‧‧ interval
w‧‧‧長度 W‧‧‧ Length
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106277733A (en) * | 2015-06-03 | 2017-01-04 | 三星钻石工业股份有限公司 | Cutting method and cutting equipment |
CN112752637A (en) * | 2018-09-28 | 2021-05-04 | 三星钻石工业股份有限公司 | Cutting method of GaN substrate |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106277733A (en) * | 2015-06-03 | 2017-01-04 | 三星钻石工业股份有限公司 | Cutting method and cutting equipment |
CN112752637A (en) * | 2018-09-28 | 2021-05-04 | 三星钻石工业股份有限公司 | Cutting method of GaN substrate |
TWI837150B (en) * | 2018-09-28 | 2024-04-01 | 日商三星鑽石工業股份有限公司 | How to break GaN substrates |
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