TW201420207A - Apparatus for spreading paste - Google Patents

Apparatus for spreading paste Download PDF

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Publication number
TW201420207A
TW201420207A TW102123177A TW102123177A TW201420207A TW 201420207 A TW201420207 A TW 201420207A TW 102123177 A TW102123177 A TW 102123177A TW 102123177 A TW102123177 A TW 102123177A TW 201420207 A TW201420207 A TW 201420207A
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Taiwan
Prior art keywords
paste
pipe
nozzle
stirring mechanism
liquid material
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TW102123177A
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Chinese (zh)
Inventor
Masataka Watanabe
Shigeo Watanabe
Yoshinori Tokuyasu
Akinori Gowa
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Hitachi Ltd
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Publication of TW201420207A publication Critical patent/TW201420207A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers

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  • Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

It is inserted in the conduit line (312a), in which the glass paste is circulated and conduit line (312a) from the nozzle (31a), discharging the paste reservoir (30), moving below the glass paste applied to element side substrate and glass paste to the element side substrate and paste reservoir (30) to the nozzle (31a). Paste reservoir (30) do with the stirring mechanism (33) agitating the glass paste experiencing and circulates the conduit line (312a) to the apparatus for paste-coating in which the stirring mechanism (33) is movably inserted in the conduit line (312a).

Description

糊料塗布裝置 Paste coating device

本發明係與糊料塗布裝置相關。 The invention relates to a paste coating apparatus.

例如,於使有機EL(Electro-Luminescence)元件發光並顯示影像等之有機EL面板等之發光面板的製造製程,含有將密封用玻璃基板(密封基板)貼合於具備有機EL元件等之發光元件之玻璃基板(元件側基板)的製程。該製程時,係以分配器等之糊料塗布裝置,將含有以固貼密封基板為目的之玻璃熔塊的糊料(玻璃糊料)塗布於元件側基板。 For example, a manufacturing process of a light-emitting panel such as an organic EL panel that emits an organic EL (Electro-Luminescence) element and displays an image or the like includes bonding a sealing glass substrate (sealing substrate) to a light-emitting element including an organic EL element or the like. The process of the glass substrate (component side substrate). In the process, a paste (glass paste) containing a glass frit for sealing a sealing substrate is applied to the element side substrate by a paste application device such as a dispenser.

該技術分野之先前技術方面,例如,專利文獻1記載著,「設置著:於棒狀體表面具備朝軸方向呈螺旋狀之鍔的螺桿、用以使螺桿旋轉之旋轉驅動機構、供螺桿插設之螺桿插設孔、具有與配設於螺桿插設孔側面之液材供給口及液材供給口連通之液材供給流路的本體部、配設於螺桿插設孔供螺桿插通之密封構件、以及裝設於本體部與螺桿插設孔連通之噴嘴,從螺桿插設孔之液材供給口朝向上方構成有防液空間,並以不會淋濕密封構件之方式,使螺桿 進行正旋轉而從噴嘴吐出液體材料來進行供給」(參照摘要)。 In the prior art of the technical field, for example, Patent Document 1 discloses that "a screw having a spiral shape in the axial direction on the surface of the rod body, a rotary drive mechanism for rotating the screw, and a screw insertion are provided. a screw insertion hole, a main body portion having a liquid material supply flow path that communicates with a liquid material supply port and a liquid material supply port disposed on a side surface of the screw insertion hole, and a screw insertion hole for screw insertion The sealing member and the nozzle that is connected to the screw insertion hole of the main body portion are configured to have a liquid-proof space from the liquid material supply port of the screw insertion hole, and the screw is not wetted by the sealing member. The positive rotation is performed, and the liquid material is discharged from the nozzle to supply it (see summary).

[專利文獻1]WO2008/126414號公報 [Patent Document 1] WO2008/126414

從噴嘴吐出如玻璃糊料之糊料狀液體材料來塗布於元件側基板時,有時會採用以空氣壓進行噴嘴內之加壓來將其推出之方式。於此種液體材料(玻璃糊料),混合含有著玻璃熔塊等之微小固態粒子,該固態粒子(玻璃熔塊等)集合成塊狀的話,有時會阻塞噴嘴等之細管部。 When a paste-like liquid material such as a glass paste is discharged from a nozzle and applied to the element-side substrate, a method of pushing the pressure in the nozzle by air pressure may be used. In such a liquid material (glass paste), fine solid particles such as glass frits are mixed, and when the solid particles (glass frit or the like) are aggregated, the thin tube portion such as a nozzle may be clogged.

所以,對於玻璃糊料,要求其含有之固態粒子(玻璃熔塊等)能處於擴散之狀態。 Therefore, for the glass paste, it is required that the solid particles (glass frit, etc.) contained therein can be in a state of diffusion.

例如,將玻璃糊料導引至噴嘴為止時,在管路中攪拌該玻璃糊料,可以使固態粒子維持於擴散之狀態。 For example, when the glass paste is guided to the nozzle, the glass paste is stirred in the pipe to maintain the solid particles in a diffused state.

例如,如專利文獻1之記載所示,藉由使將糊料導引至噴嘴(液材供給口)為止之管路(液材供給流路)具備旋轉螺桿,可以在管路內進行糊料之攪拌。 For example, as shown in the patent document 1, a pipe (liquid material supply flow path) for guiding the paste to the nozzle (liquid material supply port) is provided with a rotary screw, and the paste can be carried out in the pipe. Stir.

然而,專利文獻1所記載之構成時,因為需要支撐螺桿之構成、及使螺桿旋轉之構成等,而有塗布液體材料之裝置的構造較為複雜的問題。 However, in the configuration described in Patent Document 1, the structure of the support screw and the configuration in which the screw is rotated are required, and the structure of the apparatus for applying the liquid material is complicated.

而本發明之課題,係在提供構造簡單、可攪拌從噴嘴吐出前之糊料的糊料塗布裝置。 Further, an object of the present invention is to provide a paste application device which has a simple structure and can agitate a paste before being discharged from a nozzle.

解決該課題之本發明,係具備於從用以滯留塗布於基板之糊料狀液體材料的滯留部至吐出液體材料之噴嘴為止之供液體材料流通的管路攪拌該液體材料之攪拌機構的糊料塗布裝置。此外,該攪拌機構之特徵,係以可於管路上移動之方式進行組合。 The present invention for solving the problem is provided in a paste for agitating a liquid material in a line for allowing a liquid material to flow from a retention portion for retaining a paste-like liquid material applied to a substrate to a nozzle for discharging a liquid material. Material coating device. In addition, the agitating mechanism is characterized in that it can be combined in such a manner as to be movable on the pipe.

依據本發明的話,可以提供構造簡單、可攪拌從噴嘴吐出前之糊料的糊料塗布裝置。 According to the present invention, it is possible to provide a paste application device which is simple in construction and which can agitate the paste before being discharged from the nozzle.

1‧‧‧糊料塗布裝置 1‧‧‧Milk coating device

1a‧‧‧架台(載置基板之平面) 1a‧‧‧Rack (plane on which the substrate is placed)

2‧‧‧工作台 2‧‧‧Workbench

3‧‧‧注射頭 3‧‧‧Injection head

10‧‧‧元件側基板(基板) 10‧‧‧Component side substrate (substrate)

30‧‧‧糊料滯留部(滯留部) 30‧‧‧Paste retention department (stagnation department)

31a‧‧‧噴嘴 31a‧‧‧Nozzles

31c‧‧‧密封構件 31c‧‧‧ Sealing members

33‧‧‧攪拌機構(靜態混合器) 33‧‧‧Stirring mechanism (static mixer)

312‧‧‧支臂部 312‧‧‧ Arms

312a‧‧‧管路 312a‧‧‧pipe

312a1‧‧‧內壁 312a1‧‧‧ inner wall

312c‧‧‧開放端 312c‧‧‧ open end

Gp‧‧‧玻璃糊料(液體材料) Gp‧‧‧ glass paste (liquid material)

第1圖係本發明之實施例的糊料塗布裝置立體圖。 Fig. 1 is a perspective view of a paste application device according to an embodiment of the present invention.

第2圖,(a)係注射頭之側面圖,(b)係噴嘴座之構成的剖面圖。 Fig. 2(a) is a side view of the injection head, and Fig. 2(b) is a cross-sectional view showing the configuration of the nozzle holder.

第3圖係構成攪拌機構之要素的例圖。 Fig. 3 is a view showing an example of the elements constituting the stirring mechanism.

第4圖,(a)係拆除密封構件狀態之支臂部的剖面圖,(b)係插入攪拌機構之狀態之支臂部的剖面圖,(c)係以密封構件封閉管路開放端之狀態之支臂部的剖面圖。 Fig. 4 is a cross-sectional view showing the arm portion in a state in which the sealing member is removed, (b) is a sectional view of the arm portion in a state in which the stirring mechanism is inserted, and (c) is a closed end of the pipe closed by a sealing member. A cross-sectional view of the arm portion of the state.

以下,適度參照圖,來針對本發明之實施例進行詳細說明。而且,以下之說明時,係以有機EL面板做為發光 面板之一例,然而,本發明也可適用於有機EL面板以外之其他發光面板。有機EL面板以外之其他發光面板,如電漿顯示器、液晶顯示器等。本發明,並未受限於有機EL面板,也可廣泛地適用於將玻璃糊料含有之玻璃熔塊進行燒成來固貼2片玻璃基板之構成的發光面板。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Moreover, in the following description, the organic EL panel is used as the light. One example of the panel, however, the present invention is also applicable to other light-emitting panels other than the organic EL panel. Other light-emitting panels other than organic EL panels, such as plasma displays, liquid crystal displays, and the like. The present invention is not limited to an organic EL panel, and can be widely applied to a light-emitting panel in which a glass frit contained in a glass paste is fired to fix two glass substrates.

[實施例] [Examples]

第1圖,係本實施例之糊料塗布裝置的立體圖,第2圖,(a)係注射頭之側面圖,(b)係噴嘴座之構成的剖面圖。 Fig. 1 is a perspective view of a paste application device of the present embodiment, and Fig. 2 is a cross-sectional view showing a configuration of a nozzle holder, and Fig. 2(a) is a side view of the injection head.

如第1圖所示,本實施例之糊料塗布裝置1,係具有用以載置形成著發光面10a之玻璃基板等基板(元件側基板10)的工作台2,於載置在工作台2上之元件側基板10,以特定之形狀(塗布圖案)塗布玻璃糊料(液體材料)。 As shown in Fig. 1, the paste application device 1 of the present embodiment has a table 2 on which a substrate (element-side substrate 10) such as a glass substrate on which the light-emitting surface 10a is formed is placed, and is placed on a table. The element side substrate 10 on the second surface is coated with a glass paste (liquid material) in a specific shape (coating pattern).

元件側基板10,例如,係構成有機EL面板之要素,發光面10a,係配置含有未圖示之有機EL元件之電路的面。含有該等有機EL元件之電路,係以未圖示之控制部來控制有機EL元件之發光。 The element-side substrate 10 is, for example, an element constituting an organic EL panel, and the light-emitting surface 10a is a surface on which a circuit including an organic EL element (not shown) is disposed. In the circuit including the organic EL elements, the light emission of the organic EL elements is controlled by a control unit (not shown).

工作台2之構成上,係配置於糊料塗布裝置1之架台1a,以移動裝置2a、2b,於架台1a之平面上,可於交叉之2個方向移動。 The structure of the table 2 is disposed on the gantry 1a of the paste application device 1, and the moving devices 2a and 2b are movable on the plane of the gantry 1a in two directions of intersection.

亦即,本實施例之糊料塗布裝置1的架台1a,係用以載置元件側基板10之平面。 That is, the gantry 1a of the paste application device 1 of the present embodiment is for placing the plane of the element side substrate 10.

於架台1a上,將工作台2移動之2方向分別設定成X軸、Y軸的座標軸,工作台2之構成上,係利用移動裝置2a而沿著X軸之方向(X軸方向)移動,利用移動裝置2b而沿著Y軸之方向(Y軸方向)移動。 In the gantry 1a, the two directions in which the table 2 is moved are set as the coordinate axes of the X-axis and the Y-axis, and the configuration of the table 2 is moved in the X-axis direction (X-axis direction) by the moving device 2a. The moving device 2b is moved in the direction of the Y-axis (Y-axis direction).

而且,移動裝置2a之構成上,以具備用以檢測工作台2朝X軸方向移動之距離的感測器(位置檢測感測器等)為佳,移動裝置2b之構成上,以具備用以檢測工作台2朝Y軸方向移動之距離的感測器(位置檢測感測器等)為佳。 Further, the configuration of the mobile device 2a is preferably provided with a sensor (a position detecting sensor or the like) for detecting the distance moved by the table 2 in the X-axis direction, and the configuration of the mobile device 2b is provided to It is preferable to detect a sensor (a position detecting sensor or the like) that moves the table 2 in the Y-axis direction.

此外,糊料塗布裝置1,具備從上方朝載置於工作台2之元件側基板10塗布玻璃糊料之注射頭3。注射頭3之構成上,係裝設於橫架於架台1a之上方的支架4,於下方之架台1a上,朝於2個方向(X軸方向、Y軸方向)移動之工作台2塗布玻璃糊料。 Further, the paste application device 1 includes an injection head 3 that applies a glass paste from the upper side to the element side substrate 10 placed on the table 2. The injection head 3 is attached to a bracket 4 that is placed above the gantry 1a, and is coated on the table 2a that moves in two directions (X-axis direction, Y-axis direction) on the lower gantry 1a. Paste.

而且,第1圖,係具備1個注射頭3之糊料塗布裝置1,然而,也可以為具備2個以上之注射頭3之構成的糊料塗布裝置1。 In addition, the first embodiment is a paste application device 1 including one injection head 3. However, the paste application device 1 having two or more injection heads 3 may be used.

此外,本實施例時,工作台2係利用移動裝置2a、2b在架台1a上移動,裝設著注射頭3之支架4則相對於架台1a為固定。 Further, in the present embodiment, the table 2 is moved on the gantry 1a by the moving devices 2a and 2b, and the holder 4 to which the injection head 3 is attached is fixed to the gantry 1a.

此種構成時,藉由工作台2利用移動裝置2a、2b進行移動,可以使載置於工作台2之元件側基板10與注射頭3相對地移動。 In such a configuration, the component side substrate 10 placed on the table 2 can be moved relative to the injection head 3 by the movement of the table 2 by the moving devices 2a and 2b.

亦即,移動裝置2a、2b,具有使元件側基板10與注 射頭3相對地移動之機能。 That is, the mobile devices 2a, 2b have the component side substrate 10 and the bet The function of the head 3 to move relatively.

除了此種構成以外,也可以為注射頭3及支架4朝X軸方向及Y軸方向移動之構成。或者,亦可工作台2朝X軸方向及Y軸方向之一方移動,而注射頭3(支架4)則朝X軸方向及Y軸方向之另一方移動的構成。 In addition to such a configuration, the injection head 3 and the holder 4 may be moved in the X-axis direction and the Y-axis direction. Alternatively, the table 2 may be moved in one of the X-axis direction and the Y-axis direction, and the injection head 3 (bracket 4) may be moved in the other of the X-axis direction and the Y-axis direction.

任一構成時,皆可使注射頭3及工作台2(元件側基板10)相對地移動。 In either configuration, the injection head 3 and the table 2 (the element side substrate 10) can be relatively moved.

糊料塗布裝置1,係由控制裝置5進行控制。控制裝置5,係控制移動裝置2a、2b,使工作台2適度地移動。此外,控制裝置5,係控制注射頭3來執行玻璃糊料之塗布的ON/OFF。 The paste application device 1 is controlled by the control device 5. The control device 5 controls the mobile devices 2a and 2b to appropriately move the table 2. Further, the control device 5 controls the injection head 3 to perform ON/OFF of coating of the glass paste.

另外,控制裝置5,係以利用感測器取得工作台2之X軸方向及Y軸方向的移動距離而可以使工作台2移動至任意位置的方式,來控制移動裝置2a、2b。 Further, the control device 5 controls the mobile devices 2a and 2b so that the table 2 can be moved to an arbitrary position by taking the moving distance of the table 2 in the X-axis direction and the Y-axis direction by the sensor.

此種構成之糊料塗布裝置1時,係以注射頭3對載置於工作台2之元件側基板10塗布玻璃糊料。 In the paste application device 1 having such a configuration, the glass paste is applied to the element side substrate 10 placed on the table 2 by the injection head 3.

於前一製程形成發光面10a之元件側基板10被搬運手段20搬運至糊料塗布裝置1。 The element-side substrate 10 on which the light-emitting surface 10a is formed in the previous process is transported to the paste application device 1 by the transport means 20.

而且,元件側基板10之形狀(發光面10a之形狀),並未限制為矩形。 Further, the shape of the element side substrate 10 (the shape of the light emitting surface 10a) is not limited to a rectangular shape.

例如,可以為圓形或橢圓形之元件側基板10(發光面10a),也可以為n角形(n為3以上之自然數)之元件側基板10。 For example, the element-side substrate 10 (light-emitting surface 10a) having a circular or elliptical shape may be used, or the element-side substrate 10 having an n-angle (n is a natural number of 3 or more) may be used.

此外,搬運手段20,例如,如第1圖所示,只要為 搬運輸送帶即可,也可以為搬運機械人等,搬運手段20之構成並未受到限制。 Further, the transport means 20, for example, as shown in Fig. 1, is only The transport belt may be transported, or the transport robot may be transported, and the configuration of the transport means 20 is not limited.

如第1圖所示,由搬運手段20搬運至糊料塗布裝置1之元件側基板10,被適度地載置並固定於工作台2。將元件側基板10固定於工作台2之構成,並未受到限制。例如,只要為從工作台2側吸引並固定元件側基板10之構成即可。 As shown in FIG. 1, the component side substrate 10 conveyed by the conveyance means 20 to the paste application apparatus 1 is moderately placed and fixed to the table 2. The configuration in which the element side substrate 10 is fixed to the table 2 is not limited. For example, the configuration may be such that the element-side substrate 10 is attracted and fixed from the table 2 side.

控制裝置5,於工作台2上被載置(固定)著元件側基板10的話,控制移動裝置2a、2b來移動工作台2,將元件側基板10移動至特定之塗布開始位置。塗布開始位置,係以注射頭3開始塗布玻璃糊料之特定位置,以適度設定為佳。此外,控制裝置5,一邊從注射頭3塗布玻璃糊料一邊移動工作台2,而以描繪特定塗布圖案之方式,將玻璃糊料塗布於元件側基板10。 When the component side substrate 10 is placed (fixed) on the table 2, the control device 5 controls the moving devices 2a and 2b to move the table 2, and moves the element side substrate 10 to a specific application start position. The coating start position is preferably set at a specific position where the glass paste is applied by the injection head 3, and is preferably set appropriately. Further, the control device 5 moves the table 2 while applying the glass paste from the injection head 3, and applies the glass paste to the element side substrate 10 so as to draw a specific coating pattern.

而且,糊料塗布裝置1,以具備使載置於工作台2之元件側基板10移動至特定基準位置之位置決定手段為佳。 Further, the paste application device 1 preferably includes a position determining means for moving the element-side substrate 10 placed on the stage 2 to a specific reference position.

位置決定手段之構成,並未受到限制。例如,可以為以影像辨識用攝影機等讀取預先標記於元件側基板10之基準點(G1、G2),以使讀取之基準點G1、G2位於特定位置之方式,利用控制裝置5來移動工作台2之構成。如此,標記之基準點G1、G2位於特定位置之元件側基板10的位置,就是元件側基板10之基準位置。 The composition of the location decision means is not limited. For example, the reference point (G1, G2) previously marked on the element side substrate 10 can be read by a video recognition camera or the like so that the read reference points G1 and G2 are positioned at a specific position, and can be moved by the control device 5. The composition of the workbench 2. In this manner, the reference points G1 and G2 of the mark are located at the position of the element side substrate 10 at a specific position, which is the reference position of the element side substrate 10.

此外,例如,於元件側基板10標記2個以上之基準 點G1、G2,而為工作台2可於平行於架台1a之面內進行旋轉之構成的話,控制裝置5,可以使全部基準點G1、G2位於特定位置之方式,來旋轉工作台2。藉此,可以使形成為矩形之發光面10a的一邊,平行於設定於架台1a之座標軸(X軸、Y軸)。 Further, for example, two or more references are marked on the element side substrate 10 The points G1 and G2 are configured such that the table 2 can be rotated in parallel with the plane of the gantry 1a, and the control device 5 can rotate the table 2 so that all of the reference points G1 and G2 are positioned at specific positions. Thereby, one side of the rectangular light-emitting surface 10a can be parallel to the coordinate axis (X-axis, Y-axis) set on the gantry 1a.

此外,控制裝置5,可以適度地於X軸方向及Y軸方向移動工作台2,並於發光面10a之周圍塗布玻璃糊料。 Further, the control device 5 can appropriately move the table 2 in the X-axis direction and the Y-axis direction, and apply a glass paste around the light-emitting surface 10a.

而且,注射頭3係可上下移動地裝設於支架4,另外,也可以為於注射頭3裝設用以計測元件側基板10與噴嘴31a(參照第2圖之(b))之距離之感測器(使用雷射光之光學位移計等)的構成。 Further, the injection head 3 is attached to the holder 4 so as to be movable up and down, and the injection head 3 may be provided to measure the distance between the element side substrate 10 and the nozzle 31a (see FIG. 2(b)). The configuration of a sensor (optical displacement meter using laser light, etc.).

此種構成的話,控制裝置5,在塗布玻璃糊料時,可以計測噴嘴31a與元件側基板10之距離。此外,控制裝置5,藉由注射頭3之上下移動,而使噴嘴31a與元件側基板10維持良好之適當距離。 With such a configuration, the control device 5 can measure the distance between the nozzle 31a and the element side substrate 10 when applying the glass paste. Further, the control device 5 maintains the nozzle 31a and the element side substrate 10 at a proper distance by the upper and lower movement of the injection head 3.

第2圖,(a)係注射頭的側面圖,(b)係噴嘴座之構成的剖面圖。 Fig. 2(a) is a side view of the injection head, and Fig. 2(b) is a cross-sectional view showing the configuration of the nozzle holder.

如第2圖之(a)所示,本實施例之注射頭3的構成上,含有:由中空之圓筒所構成之用以滯留玻璃糊料的滯留部(糊料滯留部30)、及裝設於糊料滯留部30之一端的噴嘴座31。此外,糊料滯留部30,於與裝設著噴嘴座31之一端相對之另一端,具備空氣加壓部32。 As shown in Fig. 2(a), the injection head 3 of the present embodiment includes a retention portion (paste retention portion 30) composed of a hollow cylinder for retaining the glass paste, and The nozzle holder 31 is attached to one end of the paste retention portion 30. Further, the paste accumulation portion 30 is provided with an air pressurizing portion 32 at the other end facing the one end of the nozzle holder 31.

糊料滯留部30,滯留著塗布於元件側基板10(參照第1圖)之玻璃糊料,以空氣加壓部32對糊料滯留部30 之內部進行加壓時,玻璃糊料被從糊料滯留部30推出至噴嘴座31,再由噴嘴座31所具備之噴嘴31a吐出。 In the paste accumulation portion 30, the glass paste applied to the element side substrate 10 (see FIG. 1) is retained, and the air holding portion 32 is applied to the paste retention portion 30. When the inside is pressurized, the glass paste is pushed out from the paste accumulation portion 30 to the nozzle holder 31, and is discharged from the nozzle 31a provided in the nozzle holder 31.

空氣加壓部32,例如,只要為將以未圖示之空氣壓縮機(壓縮機)所壓縮之壓縮空氣(或者是,氮氣等)推送至糊料滯留部30內部之構成即可。 For example, the air pressurizing unit 32 may be configured to push compressed air (or nitrogen gas) compressed by an air compressor (compressor) (not shown) into the interior of the paste retaining unit 30.

注射頭3,係以糊料滯留部30之軸方向為上下方向,並使噴嘴座31位於下方之方式,裝設於支架4(參照第1圖)。此外,由空氣加壓部32所送入之壓縮空氣,被從糊料滯留部30推出,從噴嘴31a吐出之玻璃糊料,被塗布於在下方之架台1a(參照第1圖)上移動之元件側基板10(參照第1圖)的構成。 The injection head 3 is attached to the holder 4 (see Fig. 1) such that the axial direction of the paste retention portion 30 is in the vertical direction and the nozzle holder 31 is positioned below. In addition, the compressed air sent from the air pressurizing unit 32 is pushed out from the paste accumulating portion 30, and the glass paste discharged from the nozzle 31a is applied to the lower gantry 1a (see FIG. 1). The configuration of the element side substrate 10 (see Fig. 1).

如第2圖之(b)所示,噴嘴座31之構成上,係含有:連結於糊料滯留部30之一端的胴體部311、及延設在垂直於糊料滯留部30之軸方向之方向之胴體部311的支臂部312。 As shown in FIG. 2(b), the nozzle holder 31 is configured to include a body portion 311 connected to one end of the paste retention portion 30 and an axial direction perpendicular to the paste retention portion 30. The arm portion 312 of the body portion 311 in the direction.

此外,注射頭3,支臂部312,係以平行於形成著架台1a(參照第1圖)之平面的方式,裝設於支架4(參照第1圖)。 Further, the injection head 3 and the arm portion 312 are attached to the holder 4 so as to be parallel to the plane on which the gantry 1a (see Fig. 1) is formed (see Fig. 1).

此外,於胴體部311之內部,形成著供玻璃糊料流通之管路311a,於支臂部312之內部,則形成著供玻璃糊料流通之管路312a。此外,胴體部311之管路311a與支臂部312之管路312a,係經由角部313a進行連通。 Further, inside the body portion 311, a pipe 311a through which the glass paste flows is formed, and inside the arm portion 312, a pipe 312a through which the glass paste flows is formed. Further, the conduit 311a of the trunk portion 311 and the conduit 312a of the arm portion 312 communicate via the corner portion 313a.

支臂部312之管路312a,係於支臂部312之軸方向延伸的管路,以貫通支臂部312之前端部312b(與胴體 部311側相對之側的端部)來構成。亦即,於前端部312b,形成著管路312a之開放端312c。此外,於管路312a之前端部312b,嵌入著用以封閉管路312a之開放端312c的密封構件31c。 The pipe 312a of the arm portion 312 is a pipe extending in the axial direction of the arm portion 312 to penetrate the front end portion 312b of the arm portion 312 (with the body) The end portion of the side opposite to the side of the portion 311 is configured. That is, the open end 312c of the conduit 312a is formed at the front end portion 312b. Further, at the front end portion 312b of the pipe 312a, a sealing member 31c for closing the open end 312c of the pipe 312a is fitted.

密封構件31c,例如,以可螺合於形成在管路312a之前端部312b側(管路312a之開放端312c)之母螺絲的螺絲構件,而為可裝卸之構成為佳。 The sealing member 31c is preferably a detachable structure, for example, a screw member that can be screwed to a female screw formed on the side of the end portion 312b of the pipe 312a (the open end 312c of the pipe 312a).

而且,以於密封構件31c與支臂部312之前端部312b間,配設著未圖示之密封構件,來密封密封構件31c與前端部312b間之構成為佳。 Further, a sealing member (not shown) is disposed between the sealing member 31c and the front end portion 312b of the arm portion 312, and the configuration between the sealing member 31c and the tip end portion 312b is preferably sealed.

此外,於支臂部312,裝設著噴嘴31a。噴嘴31a,注射頭3裝設於第1圖所示之支架4時,以朝下方吐出玻璃糊料之方向裝設。 Further, a nozzle 31a is attached to the arm portion 312. In the nozzle 31a, when the injection head 3 is attached to the holder 4 shown in Fig. 1, the injection head 3 is mounted in a direction in which the glass paste is discharged downward.

例如,以糊料滯留部30之軸方向為上下方向之方式裝設注射頭3時,噴嘴31a係以軸方向平行於糊料滯留部30之軸方向而朝下方形成開口之方式裝設。此外,噴嘴31a與支臂部312之管路312a,係連通。 For example, when the injection head 3 is mounted so that the axial direction of the paste accumulation portion 30 is the vertical direction, the nozzle 31a is installed such that the axial direction thereof is parallel to the axial direction of the paste accumulation portion 30 and the opening is formed downward. Further, the nozzle 31a is in communication with the pipe 312a of the arm portion 312.

注射頭3為如第2圖之(a)、(b)所示之構成的話,從空氣加壓部32送入之壓縮空氣對糊料滯留部30之內部進行加壓時,玻璃糊料,被從糊料滯留部30推向噴嘴座31,而流通於胴體部311之管路311a。另外,玻璃糊料,經由角部313a流通於支臂部312之管路312a,並從噴嘴31a吐出。 When the injection head 3 is configured as shown in (a) and (b) of FIG. 2, when the compressed air sent from the air pressurizing unit 32 pressurizes the inside of the paste retaining portion 30, the glass paste, It is pushed from the paste accumulation portion 30 to the nozzle holder 31, and flows through the conduit 311a of the trunk portion 311. Further, the glass paste flows through the tube 312a of the arm portion 312 via the corner portion 313a, and is discharged from the nozzle 31a.

另外,本實施例之糊料塗布裝置1(參照第1圖), 於噴嘴座31之支臂部312的管路312a組裝著攪拌機構33。 Further, in the paste application device 1 of the present embodiment (refer to Fig. 1), A stirring mechanism 33 is incorporated in the pipe 312a of the arm portion 312 of the nozzle holder 31.

攪拌機構33,例如,具有以使沿著管路312a流動之玻璃糊料沿著管路312a之內壁312a1的圓周方向回旋之機能的翼狀構件為佳。 The stirring mechanism 33 preferably has, for example, a wing-like member that functions to swirl the glass paste flowing along the pipe 312a in the circumferential direction of the inner wall 312a1 of the pipe 312a.

第3圖,係構成攪拌機構之要素的一例圖。 Fig. 3 is a view showing an example of the elements constituting the stirring mechanism.

攪拌機構33,例如,如第3圖所示,從管路312a之玻璃糊料Gp的流動上游觀察時,以分別配置著複數、成直列形狀之對玻璃糊料Gp賦予沿著管路312a之內壁312a1之右方向回旋力的右組件33a、及對玻璃糊料Gp賦予沿著管路312a之內壁312a1之左方向回旋力的左組件33b之靜態混合器為佳。 For example, as shown in FIG. 3, the stirring mechanism 33 is provided with a plurality of in-line shapes to the glass paste Gp, as viewed from the upstream of the flow of the glass paste Gp of the pipe 312a. The right assembly 33a of the rightward direction of the inner wall 312a1 and the static mixer of the left assembly 33b which imparts the leftward direction of the inner wall 312a1 of the pipe 312a to the glass paste Gp are preferred.

如第3圖所示,流通於軸方向組裝著攪拌機構33(靜態混合器)之管路312a的玻璃糊料Gp,由攪拌機構33被以沿著管路312a之內壁312a1的圓周方向回旋之方式進行攪拌。所以,玻璃糊料Gp含有之玻璃熔塊等固態粒子維持擴散狀態,而抑制其成為塊狀。 As shown in Fig. 3, the glass paste Gp of the pipe 312a in which the stirring mechanism 33 (static mixer) is disposed in the axial direction is swirled by the stirring mechanism 33 in the circumferential direction of the inner wall 312a1 of the pipe 312a. Stir in the same way. Therefore, the solid particles such as the glass frit contained in the glass paste Gp are maintained in a diffused state, and are prevented from becoming a block.

而且,第3圖所示之右組件33a及左組件33b的形狀,係以說明攪拌機構33之機能為目的之例示,攪拌機構33(靜態混合器)之形狀,並未受到限制。 Further, the shapes of the right unit 33a and the left unit 33b shown in FIG. 3 are exemplified for explaining the function of the stirring mechanism 33, and the shape of the stirring mechanism 33 (static mixer) is not limited.

第4圖,(a)~(c)係將攪拌機構組裝於支臂部之管路的步驟圖。 Fig. 4, (a) to (c) are diagrams showing a step of assembling a stirring mechanism to a pipe of the arm portion.

如第4圖之(a)所示,支臂部312之管路312a,貫通前端部312b,而於前端部312b形成管路312a之開放 端312c。所以,拆除密封構件31c的話,管路312a之前端部312b側處於開放狀態。 As shown in Fig. 4(a), the pipe 312a of the arm portion 312 penetrates the front end portion 312b, and the pipe portion 312a is opened at the front end portion 312b. End 312c. Therefore, when the sealing member 31c is removed, the front end portion 312b side of the pipe 312a is in an open state.

此外,藉由採用螺絲構件做為密封構件31c,即可成為很容易就可拆除支臂部312之構成。 Further, by using the screw member as the sealing member 31c, the configuration of the arm portion 312 can be easily removed.

此外,例如,如第4圖之(b)所示,攪拌機構33,容易從管路312a形成開口之開放端312c,進入管路312a之內側。亦即,組裝攪拌機構33之作業者,可以容易地將攪拌機構33從前端部312b之開放端312c插入管路312a。 Further, for example, as shown in Fig. 4(b), the stirring mechanism 33 easily forms the open end 312c of the opening from the pipe 312a and enters the inside of the pipe 312a. That is, the operator who assembles the stirring mechanism 33 can easily insert the stirring mechanism 33 into the conduit 312a from the open end 312c of the front end portion 312b.

其後,如第4圖之(c)所示,密封構件31c被組裝於支臂部312之前端部312b的話,管路312a之開放端312c被封閉,攪拌機構33被封入管路312a而被組裝於管路312a。 Thereafter, as shown in Fig. 4(c), when the sealing member 31c is assembled to the front end portion 312b of the arm portion 312, the open end 312c of the pipe 312a is closed, and the stirring mechanism 33 is sealed in the pipe 312a. It is assembled in the line 312a.

此外,攪拌機構33,在處於被從管路312a之開放端312c插入的狀態,而以未受到管路312a之內壁312a1、其他機構及構造物所拘束下被進行組裝。藉此,攪拌機構33,以可以於管路312a內自由移動(可移動)之方式被進行組裝。 Further, the agitation mechanism 33 is assembled while being inserted from the open end 312c of the duct 312a, and is restrained by the inner wall 312a1 of the duct 312a and other mechanisms and structures. Thereby, the agitation mechanism 33 is assembled so as to be freely movable (movable) in the pipe 312a.

換言之,管路312a之構成,可以為無需支撐攪拌機構33之機構及構造物的簡單構成。 In other words, the configuration of the duct 312a can be a simple configuration of a mechanism and a structure that do not need to support the stirring mechanism 33.

而且,如第2圖之(b)所示,於管路312a之胴體部311側,形成有角部313a,而朝糊料滯留部30側彎曲。所以,支臂部312之管路312a內的攪拌機構33,只可移動至角部313a之位置為止,而不會從支臂部312之管路 312a移動至其他部位。 Further, as shown in FIG. 2(b), a corner portion 313a is formed on the side of the body portion 311 of the duct 312a, and is bent toward the paste accumulation portion 30 side. Therefore, the agitation mechanism 33 in the pipe 312a of the arm portion 312 can only move to the position of the corner portion 313a without the pipe from the arm portion 312. 312a moves to other parts.

如此,攪拌機構33,以極容易的作業即可被組裝於支臂部312之管路312a。 In this manner, the agitation mechanism 33 can be assembled to the conduit 312a of the arm portion 312 with extremely easy work.

此外,本實施例之糊料塗布裝置1(參照第1圖),係以糊料滯留部30(參照第2圖之(a))所具備之空氣加壓部32(參照第2圖之(a))對糊料滯留部30進行加壓,來推出玻璃糊料Gp(參照第3圖),並從支臂部312之噴嘴31a(參照第2圖之(b))吐出之構成。 In addition, the paste application device 1 (see Fig. 1) of the present embodiment is an air pressurizing unit 32 (see Fig. 2(a)) provided in the paste retaining portion 30 (see Fig. 2 (refer to Fig. 2). a)) The paste retention portion 30 is pressurized to push out the glass paste Gp (see Fig. 3), and is discharged from the nozzle 31a of the arm portion 312 (see Fig. 2(b)).

空氣加壓部32對糊料滯留部30進行加壓的話,支臂部312之管路312a(參照第2圖之(b)),從角部313a側被進行加壓,攪拌機構33(參照第2圖之(b)),被推向密封構件31c(參照第2圖之(b))側。如此,藉由攪拌機構33被推向密封構件31c而使旋轉受到抑制,玻璃糊料Gp流通於管路312a時之攪拌機構33的旋轉受到抑制,攪拌機構33可以有效地攪拌玻璃糊料Gp。 When the air pressurizing unit 32 pressurizes the paste accumulating portion 30, the pipe 312a of the arm portion 312 (see FIG. 2(b)) is pressurized from the corner portion 313a side, and the stirring mechanism 33 (refer to Fig. 2(b)) is pushed toward the sealing member 31c (see Fig. 2(b)). When the stirring mechanism 33 is pushed to the sealing member 31c to suppress the rotation, the rotation of the stirring mechanism 33 when the glass paste Gp flows through the pipe 312a is suppressed, and the stirring mechanism 33 can effectively stir the glass paste Gp.

如以上所示,本實施例之糊料塗布裝置1(參照第1圖),係於塗布於元件側基板10(參照第1圖)之玻璃糊料Gp(參照第3圖)流通的管路312a(參照第2圖之(b)),組裝著靜態混合器等之攪拌機構33(參照第2圖之(b))。此外,一邊攪拌玻璃糊料Gp一邊使其流通至噴嘴31a(參照第2圖之(b))為止,而可從噴嘴31a吐出並塗布於元件側基板10。所以,玻璃糊料Gp含有之玻璃熔塊等固態粒子可以維持擴散狀態,而可抑制玻璃熔塊等固態粒子阻塞噴嘴31a等之細管部。 As described above, the paste application device 1 (see FIG. 1) of the present embodiment is a pipe that flows through the glass paste Gp (see FIG. 3) applied to the element side substrate 10 (see FIG. 1). 312a (refer to Fig. 2(b)), a stirring mechanism 33 such as a static mixer is incorporated (see Fig. 2(b)). In addition, the glass paste Gp is allowed to flow to the nozzle 31a (see FIG. 2(b)), and can be discharged from the nozzle 31a and applied to the element side substrate 10. Therefore, the solid particles such as the glass frit contained in the glass paste Gp can maintain the diffusion state, and it is possible to suppress the solid particles of the glass frit from blocking the thin tube portion of the nozzle 31a or the like.

另外,藉由採用靜態混合器做為攪拌機構33,無需用以驅動攪拌機構33之壓縮空氣以外的動力源,以非常簡單構造即可攪拌玻璃糊料Gp。 Further, by using the static mixer as the stirring mechanism 33, the glass paste Gp can be stirred in a very simple configuration without a power source other than the compressed air for driving the stirring mechanism 33.

此外,作業者等將攪拌機構33組裝於支臂部312之管路312a(參照第2圖之(b))的作業也很容易,管理糊料塗布裝置1之作業者等,很容易即可組裝攪拌機構33。 Further, it is easy for the operator to assemble the stirring mechanism 33 to the pipe 312a of the arm portion 312 (see FIG. 2(b)), and it is easy to manage the operator of the paste application device 1 or the like. The stirring mechanism 33 is assembled.

此外,本實施例之攪拌機構33(參照第2圖之(b),靜態混合器等),係組裝於平行糊料塗布裝置1之架台1a(參照第1圖)而延伸之支臂部312的管路312a(參照第2圖之(b))。 Further, the stirring mechanism 33 of the present embodiment (see (b) of FIG. 2, static mixer, etc.) is an arm portion 312 which is assembled to the gantry 1a (see FIG. 1) of the parallel paste application device 1. The line 312a (refer to (b) of Fig. 2).

此外,以架台1a為大致水平之方式來設置糊料塗布裝置1時,支臂部312於大致水平方向延伸,流通於管路312a內之玻璃糊料Gp(參照第3圖)於大致水平方向流通。 Further, when the paste application device 1 is provided such that the gantry 1a is substantially horizontal, the arm portion 312 extends in a substantially horizontal direction, and the glass paste Gp (see FIG. 3) flowing through the pipe 312a is substantially horizontal. Circulation.

所以,利用組裝於支臂部312之管路312a的攪拌機構33而沿著管路312a之內壁312a1(參照第3圖)的圓周方向回旋之玻璃糊料Gp,被朝上下方向攪拌。藉此,因為密度不同而沉澱等之容易形成塊狀之玻璃熔塊的玻璃糊料Gp,被進行適度攪拌,而使玻璃熔塊維持於良好之擴散狀態。 Therefore, the glass paste Gp which is swung in the circumferential direction of the inner wall 312a1 (see FIG. 3) of the pipe 312a by the stirring mechanism 33 of the pipe 312a of the arm part 312 is stirred in the up-down direction. Thereby, the glass paste Gp which is easy to form a bulk glass frit due to precipitation or the like is appropriately stirred, and the glass frit is maintained in a good diffusion state.

而且,本發明並未受限於該實施例及變形例。例如,該實施例,係以容易了解本發明為目的之詳細說明,並不一定要為具備所說明之全部構成者。 Moreover, the invention is not limited to the embodiment and the modifications. For example, the embodiments are described in detail for the purpose of facilitating the understanding of the present invention, and are not necessarily required to be all described.

此外,可以將實施例之構成的一部分置換成其他實施例之構成,此外,也可以於實施例之構成追加其他實施例之構成。 Further, a part of the configuration of the embodiment may be replaced with a configuration of another embodiment, and a configuration of another embodiment may be added to the configuration of the embodiment.

例如,攪拌機構33(參照第2圖之(b))並未限制為靜態混合器。例如,細長平板也可以為朝1方向扭轉之構件。此時,流通於支臂部312之管路312a(參照第2圖之(b))的玻璃糊料Gp(參照第3圖),係一邊進行1方向回旋一邊進行流通。從上游觀察時,相較於朝左右兩方向回旋時,玻璃糊料Gp含有之固態粒子的擴散效果較小,然而,可以得到使固態粒子擴散的效果。此外,相較於靜態混合器,可以較便宜之構件來構成攪拌機構33。 For example, the stirring mechanism 33 (refer to (b) of Fig. 2) is not limited to a static mixer. For example, the elongated flat plate may also be a member that is twisted in one direction. At this time, the glass paste Gp (refer to FIG. 3) which flows through the pipe 312a of the arm part 312 (refer FIG. 2 (b)), and flows in the one direction rotation. When viewed from the upstream side, the diffusion effect of the solid particles contained in the glass paste Gp is small compared to the case of swirling in the left and right directions. However, the effect of diffusing the solid particles can be obtained. Further, the stirring mechanism 33 can be constituted by a relatively inexpensive member as compared with the static mixer.

此外,也可以為將具有使流通於支臂部312之管路312a(參照第2圖之(b))的玻璃糊料Gp(參照第3圖)沿內壁312a1(參照第2圖之(b))之圓周方向回旋之機能的複數翼狀構件插入管路312a之構成的攪拌機構33(參照第2圖之(b))。 Further, the glass paste Gp (see FIG. 3) having the pipe 312a (see FIG. 2(b)) flowing through the arm portion 312 may be provided along the inner wall 312a1 (refer to FIG. 2 (refer to FIG. 2 (refer to FIG. 2) b)) The plurality of wing members that function in the circumferential direction are inserted into the stirring mechanism 33 of the line 312a (see Fig. 2(b)).

3‧‧‧注射頭 3‧‧‧Injection head

32‧‧‧空氣加壓部 32‧‧‧Air pressurization department

30‧‧‧糊料滯留部(滯留部) 30‧‧‧Paste retention department (stagnation department)

31‧‧‧噴嘴座 31‧‧‧ nozzle holder

311‧‧‧胴體部 311‧‧‧ Body Department

312‧‧‧支臂部 312‧‧‧ Arms

31a‧‧‧噴嘴 31a‧‧‧Nozzles

31c‧‧‧密封構件 31c‧‧‧ Sealing members

312b‧‧‧前端部 312b‧‧‧ front end

311a‧‧‧管路 311a‧‧‧pipe

313a‧‧‧角部 313a‧‧ Corner

312a1‧‧‧內壁 312a1‧‧‧ inner wall

312a‧‧‧管路 312a‧‧‧pipe

33‧‧‧攪拌機構(靜態混合器) 33‧‧‧Stirring mechanism (static mixer)

312c‧‧‧開放端 312c‧‧‧ open end

Claims (5)

一種糊料塗布裝置,具有:滯留部,係用以滯留塗布於基板之糊料狀的液體材料;噴嘴,係用以朝該基板吐出該液體材料;管路,係用以供該液體材料從該滯留部流通至該噴嘴;以及攪拌機構,係組合於該管路,用以攪拌流通於該管路之該液體材料;該攪拌機構,係以可移動之方式組合於該管路。 A paste coating device comprising: a retention portion for retaining a paste-like liquid material applied to a substrate; a nozzle for discharging the liquid material toward the substrate; and a conduit for supplying the liquid material The retention portion flows to the nozzle; and a stirring mechanism is coupled to the conduit for agitating the liquid material flowing through the conduit; the agitation mechanism is movably coupled to the conduit. 如申請專利範圍第1項所記載之糊料塗布裝置,其中該攪拌機構係處於從該管路之開放端插入該管路之狀態,該開放端,係被可裝卸之密封構件所封閉。 The paste application device according to claim 1, wherein the agitation mechanism is in a state of being inserted into the pipe from an open end of the pipe, and the open end is closed by a detachable sealing member. 如申請專利範圍第1項所記載之糊料塗布裝置,其中該管路,係以使該液體材料大致平行於用以載置該基板之平面並流通的方式來構成,該攪拌機構,具有使該液體材料沿著該管路之內壁的圓周方向回旋之機能。 The paste application device according to claim 1, wherein the pipe is configured such that the liquid material flows substantially parallel to a plane on which the substrate is placed, and the stirring mechanism has a stirring mechanism The liquid material is rotated along the circumferential direction of the inner wall of the pipe. 如申請專利範圍第1項所記載之糊料塗布裝置,其中 該攪拌機構係靜態混合器。 A paste coating device as described in claim 1, wherein The agitation mechanism is a static mixer. 如申請專利範圍第3項所記載之糊料塗布裝置,其中該攪拌機構係靜態混合器。 The paste application device according to claim 3, wherein the agitation mechanism is a static mixer.
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