TW201334875A - Coating method, coating device and manufacturing method and manufacturing device for components of a display - Google Patents

Abstract

This invention is related to a coating method and a coating device for efficiently exhausting the gas which invades into a coating device of a die coator for coating a surface of a glass substrate. And this invention is also related to a manufacturing method and a manufacturing device of a material for a display using the coating method and the coating device. By utilizing the coating method and the coating device of this invention, a gas exhaust route connected to a gas outlet of the coating device is placed at approximately the same as the gas outlet or lower than the gas outlet. Furthermore, an exit of a gas supply route is lower than the gas outlet. Furthermore, an exit of the gas exhaust route is placed lower than the outlet. By supplying liquid from a liquid supply means, opening a switching valve of the gas supply route and exhausting coating liquid mixed with that gas from the gas outlet, the hydraulic pressure of height difference from an uppermost part and a lowermost part would not be resistance, and the siphon principle could be used for promoting the gas exhaust, so that the gas can be efficiently exhausted in a short time. Moreover, after supplying the gas whose capacity is more than a constant amount from the gas supply route connected with either of the coating device, the liquid supply route or the gas exhaust route to the manifold of the coating device, integrating minute gas into gas area formed internally and erasing the minute gas, the supplied gas is exhausted outside of the coating device with a small amount of coating liquid, so that the minute gas which is hard to exhaust is efficiently and surely exhausted outside in a short time. In addition, by utilizing the coating device wherein the sectional area of the manifold in the direction of the coating width is being decreased from an intake to the gas outlet and an upper edge of the manifold is parallel with an outlet plane including the outlet or tilts upward from the intake to the gas outlet on a basis of the outlet plane, the flow velocity of the coating liquid in the manifold from the intake to the gas outlet is high even if the coating device enlarges, the gas in the manifold moves rapidly toward the gas outlet and the movement of the gas is not disturbed by the tilt of the upper edge of the manifold, so that the gas could be efficiently and surely exhausted outside in a short time.

Description

Coating method and coating device, and manufacturing method and manufacturing device for display member

The present invention is used in, for example, a color filter for color liquid crystal displays, an array substrate, a panel for a plasma display panel, and an optical filter. More specifically, the present invention relates to a coating method and a coating apparatus capable of efficiently discharging gas inside an applicator of a die coater which is applied to a surface of a member to be coated such as a glass substrate or the like. And a manufacturing method and manufacturing apparatus using the display member using these.

A color liquid crystal display comprising a color filter, an array substrate, or the like often includes a manufacturing process in which a liquid material having a low viscosity is applied to the surface of a glass substrate to be coated, and the coating film is dried. For example, in the manufacturing process of a color filter, a coating film of a black photo-resist material is formed on a glass substrate, and the coating film is processed into a lattice shape by photolithography, and the same lithography is used between the grids. A coating film of red, blue, and green light-resistance materials is sequentially formed. In addition to the manufacturing process of the color filter, there is also a photoresist for coating a spacer for forming a space of the liquid crystal injected between the color filter and the array substrate, which is formed to emboss the surface on the color filter. The manufacturing process of the top coat film for smoothing and the like.

In terms of a coating device for forming such a coating film, a spin coater, a bar coater, or the like has been conventionally used. However, recently, the coating die disclosed in Patent Document 1 is widely used because of the reduction in the amount of the coating liquid, the reduction in the amount of power consumption, and the increase in the size of the device due to the increase in the size of the glass substrate.

However, when such a coating die is used to apply a sheet-shaped member to be coated such as a glass substrate, there may be a case where a gas is trapped inside the applicator. The main cause of gas intrusion is: 1) gas intrusion through a pipe connection portion through which a coating liquid flows or a sliding portion of a pump; 2) gas dissolved in a coating liquid is foamed inside the applicator; 3) based on The gas is sucked by the opening and closing operation of the valve for supplying the liquid supply, or is foamed by the change in the volume of the coating liquid; 4) the gas is sucked from the discharge port of the applicator, and the like. For the above reasons, when the gas enters the inside of the applicator, the discharge pressure at the start of coating is delayed, and the film thickness at the start of coating is reduced, and the gas is directly discharged from the discharge port of the applicator to the member to be coated. Disadvantages of pinhole or straight line coating.

To this end, an invention has been completed in which the gas is intruded into the interior of the applicator, and before the above problem occurs, the applicator is rotated with the discharge port facing upward, and the gas is discharged from the discharge port or the applicator. A technique in which a gas discharge port is provided and a coating liquid is discharged together with a gas from a gas discharge port. However, as disclosed in Patent Document 2, the method of rotating the applicator and discharging the gas from the upward discharge port is such that it is necessary to temporarily interrupt the coating production to rotate the applicator, and the rotating mechanism for rotating the applicator or the gas is discharged. The coating liquid attached to the applicator afterwards is required to be manually wiped by an operator.

However, it takes a lot of time and labor for the applicator to be large in size in response to a large substrate to be cleaned by an operator manually. As a result, the coating production is interrupted for a long period of time, and the operation rate or productivity of the coating device for coating production is remarkably lowered. Further, in order to rotate the large-sized applicator, it is necessary to rotate the device with high precision and high output, so that the cost of the device is increased.

On the other hand, the means for discharging the gas from the gas discharge port provided on the applicator can discharge the gas in the coating production in a state where the discharge port is directed downward, and can avoid the above without rotating the applicator. The problem.

Here, in the method disclosed in Patent Document 3, the gas discharge pipe connected to the gas discharge port is disposed at a position higher than the gas discharge port so that the gas is discharged from the gas discharge port by buoyancy. However, at this position, since the hydraulic pressure generated by the difference between the upper portion and the lowermost portion of the gas discharge pipe becomes a resistance, the amount of the coating liquid to be consumed for discharging the gas is large or the gas discharge time is long. Therefore, the gas discharge capacity is remarkably lowered.

Further, in the method disclosed in Patent Document 4, an atmosphere opening portion is provided in the middle of the gas discharge pipe. However, in this method, the uppermost portion of the discharge path at the upper portion of the discharge port is opened to the atmosphere. Therefore, in order to discharge the gas, it is necessary to supply the coating liquid having a viscosity of 5 cp substantially the same as that of the liquid crystal display production coating liquid. Above 1000 cc, the gas discharge efficiency is very low. On the other hand, it is difficult to consider the cost of the system for the use of a coating liquid for the production of a very high-priced liquid crystal display.

Further, the invention of Patent Document 5 also discloses a structure in which the gas is discharged from the supply port toward the gas discharge port and the upper edge of the manifold is inclined upward to allow the gas to easily flow to the gas discharge port. However, it is difficult to fully utilize the buoyancy of the gas by tilting the upper edge of the manifold upward, and it is difficult to discharge the gas adhering to the upper edge of the manifold. Further, in the invention disclosed in Patent Document 6 or Patent Document 7, the sectional area of the manifold at the position where the gas discharge port is provided is made larger than the sectional area of the manifold which is located at the position where the supply port is provided, Therefore, the flow velocity inside the manifold is reduced as the gas discharge port is closer. As a result, the ability to move the gas is reduced. Low, especially when the applicator is enlarged, the gas discharge efficiency is also remarkably lowered.

Further, when the minute gas having a diameter of less than 1 mm enters the applicator, the buoyancy acting on the minute gas or the pressing force from the coating liquid is very small, so the movement of the gas moving toward the gas discharge port is small. The speed is extremely small, and there is a case where the gas adheres to the wall surface of the manifold during moving and becomes unable to move. In particular, when the applicator is enlarged, since the movement path of the minute gas is also long, it is extremely difficult to discharge the minute gas from the gas discharge port. However, in any of the above inventions, there is no description of the method for efficiently discharging the fine gas from the applicator. When the minute gas intrudes into the inside, the means for discharging the minute gas is increased only by increasing the supply rate or the supply time of the coating liquid at the time of gas discharge. Therefore, it is assumed that even if a small gas can be discharged, a large amount of coating liquid is required and a long time is required. Therefore, in order to discharge a minute gas having a diameter of less than 1 mm, it is extremely difficult to apply a conventional system to a coating liquid for liquid crystal display production which is very expensive. In addition, in the above-mentioned means, there is a case where the minute gas cannot be completely discharged. Therefore, there is a disadvantage that the minute gas is discharged from the discharge port to the member to be coated, so that the so-called pinhole or straight line coating is caused.

[Patent Document 1] Japanese Patent JP06-339656A

[Patent Document 2] Japanese Patent JP09-253556A

[Patent Document 3] Japanese Patent JP-2557582B

[Patent Document 4] Japanese Patent JP2000-176351A

[Patent Document 5] Japanese Patent JP2001-334197A

[Patent Document 6] Japanese Patent JP2005-144376A

[Patent Document 7] Japanese Patent JP2006-95459A

The present invention has been accomplished to solve the above problems. An object of the present invention is to provide a means for discharging any gas that has entered the inside of the applicator with a small amount of coating liquid for a short period of time, and can be formed with a short tact time and high productivity. A coating device and a coating method for a high-quality coating film, and a manufacturing device and a manufacturing method for a member for a display using the devices and methods. The object of the present invention is achieved by the means described below.

The coating method of the present invention is a coating method in which a coating film is formed on the surface of the member to be coated by moving the applicator and the member to be coated while the coating liquid is supplied from the discharge port to the member to be coated, using a coating device having the following configuration. The coating apparatus includes: a liquid supply mechanism that supplies a coating liquid to the applicator; an applicator that has a discharge port for discharging the coating liquid and a gas discharge port that discharges the gas together with the coating liquid; and is connected to the gas discharge port and is located at a gas discharge port having substantially the same height or a position lower than the gas discharge port and having a gas discharge path formed by an opening and closing valve in the middle; a waste liquid tank storing the waste liquid discharged from the outlet of the gas discharge path; and holding the member to be coated a holding mechanism; and a moving mechanism for relatively moving the applicator and the holding mechanism; the coating method is characterized in that the gas is supplied from the liquid supply mechanism before and/or after the coating film is formed on the surface of the member to be coated The opening and closing valve of the discharge path is opened and the coating liquid and the gas are discharged from the gas discharge port. The invention In the coating method, the outlet of the gas discharge path is preferably such that the opening and closing valve is opened while the atmosphere is open, and the coating liquid and the gas are discharged from the gas discharge port.

In addition, in the coating method of the present invention, the coating liquid is supplied to the member to be coated from the discharge port, and the applicator and the member to be coated are relatively moved to form a surface of the member to be coated. In the coating method of the coating film, the coating device includes: a liquid supply mechanism that supplies a coating liquid to the applicator; an applicator that has a discharge port for discharging the coating liquid and a gas discharge port that discharges the gas together with the coating liquid; and a gas discharge port a gas discharge path including an opening and closing valve at a position lower than the discharge port and having a discharge port; a waste liquid tank for storing the waste liquid discharged from the outlet of the gas discharge path; and a holding mechanism for holding the member to be coated a moving mechanism for relatively moving the applicator and the holding mechanism, wherein the coating method is characterized in that the gas discharge path is opened while the liquid is supplied from the liquid supply mechanism before and/or after the coating film is formed on the surface of the member to be coated. The valve is opened and closed to discharge the coating liquid and the gas from the gas discharge port. In the coating method of the present invention, the outlet of the gas discharge path is preferably such that the opening and closing valve is opened while the atmosphere is open, and the coating liquid and the gas are discharged from the gas discharge port. In the coating method of the present invention, the liquid storage portion of the waste liquid tank is opened to the atmosphere, and the liquid level of the waste liquid accumulated in the waste liquid tank is lower than the discharge port of the applicator, and the gas is discharged. In the state where the outlet of the path is immersed in the waste liquid in the waste liquid tank, it is preferable to open the opening and closing valve and discharge the coating liquid and the gas from the gas discharge port.

According to still another application method of the present invention, the coating liquid is discharged from the discharge port of the applicator while being coated with the applicator having the following configuration. The coating and the applicator are relatively moved to apply a coating liquid to the surface of the member to be coated, the applicator having a manifold for expanding the coating liquid in the coating width direction, a discharge port for discharging the coating liquid, and a gas together with the coating liquid The discharged gas discharge port is characterized in that the gas is supplied to the manifold filled with the coating liquid, and then the coating liquid is supplied to the manifold, and a part of the gas and the coating liquid is discharged from the gas discharge port, and then the mixture is discharged. A coating liquid is applied to the surface of the coating member.

A method of producing a member for a display according to the present invention is characterized in that the coating method described in any of the above is used.

The coating apparatus of the present invention includes: a liquid supply mechanism having a liquid supply path for supplying a coating liquid to the applicator; and a discharge port for expanding the coating liquid in the application width direction and a discharge port for discharging the coating liquid together with the coating liquid An applicator for discharging the gas from the gas discharge port; a gas discharge path connected to the gas discharge port and having an opening and closing valve in the middle; a holding mechanism for holding the member to be coated; and a moving mechanism for relatively moving the applicator and the holding mechanism, the coating device It is characterized in that the gas discharge path is at a position substantially at the same height as the gas discharge port or lower than the gas discharge port.

Further, another coating apparatus according to the present invention includes: a liquid supply mechanism having a liquid supply path for supplying a coating liquid to the applicator; and a discharge port for expanding the coating liquid in a coating width direction and a discharge port for discharging the coating liquid, and An applicator for discharging a gas from a gas discharge port; a gas discharge path connected to the gas discharge port and having an opening and closing valve in the middle; a holding mechanism for holding the member to be coated; and a moving mechanism for relatively moving the applicator and the holding mechanism The coating device is characterized in that the outlet of the gas discharge path is at a higher ratio than the discharge The mouth is still low.

Still another coating apparatus of the present invention includes: a liquid supply mechanism having a liquid supply path for supplying a coating liquid to the applicator; and a discharge port for expanding the coating liquid in a coating width direction and a discharge port for discharging the coating liquid, and coating together An applicator for discharging a gas discharge gas together with a gas; a gas discharge path connected to the gas discharge port and having an opening and closing valve in the middle; a holding mechanism for holding the member to be coated; and a moving mechanism for relatively moving the applicator and the holding mechanism, The coating apparatus is characterized in that a gas supply path for supplying gas to the applicator is connected to at least one of an applicator, a liquid supply path, or a gas discharge path. In the coating apparatus of the present invention, the inlet of the gas supply path is preferably an open atmosphere.

In the coating apparatus of the present invention, the applicator has a supply port for supplying the coating liquid to the applicator from the liquid supply path, and the cross-sectional area of the manifold in the coating width direction is reduced from the supply port toward the gas discharge port, and on the manifold It is preferable that the edge is parallel to the discharge surface or is inclined upward from the supply port toward the gas discharge port with respect to the discharge port surface. Further, in the coating apparatus of the present invention, it is preferable that the length of the island block of the slit of the applicator is reduced from the central portion in the application width direction toward both end portions.

A device for manufacturing a member for a display according to the present invention is characterized in that the coating device described in any of the above is used.

When the coating method and the coating apparatus according to the present invention are used, the gas discharge path connected to the gas discharge port of the applicator is at substantially the same height as the gas discharge port or lower than the gas discharge port, and In gas In the state in which the outlet of the body discharge path is lower than the discharge port, the liquid supply means supplies the liquid, and opens the opening and closing valve of the gas discharge path, thereby discharging the coating liquid containing the gas from the gas discharge port. Therefore, the hydraulic pressure based on the difference between the uppermost portion and the lowermost portion of the gas discharge path does not become a resistance, because the discharge of the gas can be promoted by the siphon principle, so that the gas can be discharged in a short time.

Further, a gas having a predetermined volume or more is supplied to the manifold of the applicator from a gas supply path connected to any one of the applicator, the liquid supply path, or the gas discharge path, whereby the gas is formed in the gas field formed inside. After the micro gas is removed, the supplied gas is discharged to the outside of the applicator together with a small amount of the coating liquid, so that even a minute gas that is difficult to discharge can be discharged to the outside in a short time and reliably.

Further, the cross-sectional area of the manifold in the application width direction is reduced from the supply port toward the gas discharge port, and the upper edge of the manifold is parallel to the discharge port surface including the discharge port, or is supplied from the discharge port surface. The port faces the gas discharge port and is inclined upward. Since such an applicator is used, even if the applicator is enlarged, since the flow rate of the coating liquid inside the manifold from the supply port toward the gas discharge port is fast, the gas is directed toward the gas row. The outlet moves quickly, and the movement of the gas is not hindered by the inclination of the upper edge of the manifold, so that the gas can be discharged to the outside in a shorter time and with certainty.

According to the coating method and the coating apparatus described above, since the gas discharge operation can be performed in the coating production, there is no case where the coating production is interrupted for a long time due to the gas discharge operation. Therefore, the operation rate of the coating device is increased and the tact time is easily shortened, so that the productivity can be greatly improved. Moreover, there is no need to Since the coating liquid for liquid crystal display manufacturing, which is very expensive, is wasted and discharged, it contributes greatly to cost reduction. Further, since the gas inside the applicator can be completely discharged to the outside according to the superior gas discharge performance, it is possible to completely eliminate the film which is caused by the gas inside the applicator due to the delay in the discharge pressure at the start of coating. The thickness is reduced, and there is a problem that the gas is directly discharged from the discharge port to the member to be coated, and the pinhole or the straight line is coated. Further, since the rotating device of the applicator is not required, it is easy to increase the size of the substrate.

According to the method and apparatus for manufacturing a member for a display according to the present invention, since the member for display is manufactured by using the above-described excellent coating method and coating device, it is possible to manufacture a display having superior coating quality at low cost and high yield. member.

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, preferred embodiments of the present invention will be described based on the drawings. The coating die 1 according to the present invention shown in Fig. 1 is referred to. The coating die 1 is provided with a base 30, and the base 30 is provided with a pair of guide rails 31. A stage 32 is provided on the guide rail 31. The platform 32 is driven by the linear motor 33 to be freely reciprocable in the X direction shown in Fig. 1. Further, a vacuum adsorption surface having a plurality of adsorption holes (not shown) is formed on the upper surface of the stage 32, and the substrate 3 belonging to the member to be coated can be adsorbed and held. Further, the base 30 is provided with a gate-shaped stay 34. A pair of lifting device units 40 that are reciprocable in the vertical direction are provided on both sides of the column 34. The applicator 10 that performs coating is such that the lifting device unit 40 is mounted with the discharge port 15 facing downward. The lifting device unit 40 is a lifting table 41 for lifting and lowering the applicator holding table 22 holding the applicator 10, and the lifting table 41 The guide 42 that guides the vertical direction, the motor 43, and a screw 44 that converts the rotational motion of the motor 43 into a linear motion of the lift table 41 is formed. Since the lifting device unit 40 can independently operate at both ends (left and right) of the applicator 10 in the application width direction, the application width direction of the applicator 10 can be arbitrarily set in the horizontal direction. Thereby, the discharge surface 21 of the applicator 10 and the substrate 3 belonging to the member to be coated can be made parallel to the coating width direction of the applicator 10, and the distance between the surface of the substrate 3 and the discharge opening surface 21 - clearance ( Clearance) can be set to any size.

Further, a wiping unit 50 is provided on the base 30. This wiping unit 50 is freely reciprocable on the guide rail 31 in the X direction of the coating direction, similarly to the stage 32. The wiping unit 50 is composed of a wiping head 51, a wiping head driving device 52, a wiping head holder 53, a carriage 54, and a wiping unit holding table 55. Further, the wiping head 51 is formed into a shape that fits into the shape of the lower end portion of the applicator 10, and is preferably an elastic body such as synthetic resin.

When the lower end portion of the applicator 10 is wiped by the wiping unit 50, the wiping unit 50 is moved in the X direction to the lower portion of the applicator 10, and the applicator 10 is lowered by the elevating device unit 40 so that the wiping head 51 and the lower end of the applicator 10 are lowered. Contact. Next, in a state of being in contact with the lower end portion of the applicator 10, the wiping head 51 is moved by the wiping head driving device 52 in the coating width direction orthogonal to the X direction of the applicator 10, thereby adhering to the lower end of the applicator 10. The residual coating liquid, particles, and the like of the portion are removed. The residual coating liquid, particles, and the like removed by the applicator 10 are picked up by a bracket 54 provided at a lower portion of the wiping head 51, and are collected in a container (not shown) via a waste liquid path (not shown). In addition, the bracket 54 can also be used to discharge the self-discharging outlet 15 for the coating liquid 2 The type is exchanged or a coating liquid 2 for preventing drying of the discharge port 21 at the lower end of the applicator 10, a solvent, and the like.

Further, the coating die 1 is also provided with a coating liquid supply device unit 60 that supplies the coating liquid 2 to the applicator 10. Here, as described in detail with reference to the supply path and the discharge path connected to the applicator 10 shown in FIG. 4, the coating liquid supply device unit 60 includes the coating liquid tank 61 that stores the coating liquid 2. The coating liquid 2 stored in the coating liquid tank 61 is supplied to the syringe pump 64 via the pump supply path 62 connected to the downstream of the coating liquid tank 61 and the suction opening and closing valve 63. The coating liquid 2 supplied to the syringe pump 64 is sent to the manifold 13 from the supply port 16 of the applicator 10 via the discharge opening and closing valve 65 and the mold supply path 66. Here, the syringe pump 64 is a piston holding base 69 that holds the injection cylinder 67, the piston 68, and the holding piston 68, and the piston lifting and lowering guide 70 that guides the piston holding base 69 in the vertical direction, and moves the piston holding base 69 in the vertical direction. The syringe pump motor 71 of the drive source and the syringe pump screw 72 that converts the rotational motion of the syringe pump motor 71 into a linear motion of the piston holding base 69 and actually moves the piston holding base 69. The syringe pump 64 is of a fixed capacity type, and the coating liquid 2 filled in the inside of the injection cylinder 67 is extruded by the piston 68, and the coating liquid 2 having a desired volume of the coating film can be supplied to the applicator 10. When the application liquid 2 is to be filled in the inside of the injection cylinder 67, the suction opening/closing valve 63 attached to the upstream side of the injection cylinder 67 is "opened", and the discharge opening and closing valve 65 attached to the downstream of the injection cylinder 67 is used. The piston 68 is lowered in the "closed" state. In the case where the coating liquid 2 inside the injection cylinder 67 is supplied to the applicator 10, the suction opening/closing valve 63 is "closed" and the discharge opening/closing valve 65 is "open". rise.

Referring to Fig. 1, the applicator 10 mounted on the coating die 1 is formed by superimposing the front lip portion 11 and the rear lip portion 12 extending in the coating width direction (direction perpendicular to the paper surface) in the coating direction. A plurality of assembly bolts are shown to be combined. Further, the coating direction is identical to the X direction of Fig. 1 . Further, the applicator 10 is formed with a manifold 13 for expanding the coating liquid 2 supplied to the inside of the applicator 10 in the coating width direction. This manifold 13 has a shape extending in the coating width direction similarly to the front lip portion 11 and the rear lip portion 12. Here, the coating width direction coincides with the longitudinal direction of the applicator 10. A slit 14 which is a gap between the front lip portion 11 and the rear lip portion 12 is formed below the manifold 13, and the slit 14 also extends in the coating width direction. Further, the lower end portion of the slit 14 serves as the discharge port 15 of the applicator 10.

Fig. 2 is a schematic front cross-sectional view of the applicator 10, showing the inside of the applicator 10 as seen from the direction of application orthogonal to the application width direction. Referring to Fig. 2(a), the applicator 10 is provided with a supply port 16 to which the coating liquid 2 is supplied, and a gas row for discharging the gas 100 invading the inside of the applicator 10 shown in Fig. 4 together with the coating liquid 2. Exits 17A, 17B.

Here, the number and position of the supply ports 16 are not particularly limited. As shown in Fig. 2, when the supply port 16 is provided in the center in the application width direction of the manifold 13, the flow path length for expanding the coating liquid 2 in the application width direction is shown in Fig. 2 It is best to be the shortest. It is very useful to arrange such a supply port 16 particularly in the case where the applicator 10 is elongated.

When the supply port 16 is provided in the center of the application width direction of the manifold 13, the gas discharge port 17B is preferably provided in a pair at both ends in the application width direction of the manifold 13. Accordingly, the gas flowing in from the supply port 16 is at the applicator 10 The gas which is internally foamed and the gas sucked from the discharge port 15 may be the gas 100 which is accumulated in the manifold 13 shown in Fig. 4, and the gas 100 may be applied to the coating liquid 2 in the manifold 13. The flow is discharged from the gas discharge port 17B. Further, in order to discharge the gas accumulated in the upper portion of the supply port 16 or the gas intruding from the supply port 16 before reaching the manifold 13, the gas discharge port 17A is preferably provided above the supply port 16.

Next, referring to Fig. 3, a schematic side cross-sectional view orthogonal to the application width direction of the applicator 10, a third (a) view showing a position of the supply port 16, and a third (b) view showing a gas discharge port 17B. A section view of the location. As shown in Fig. 3(a), the supply port 16 is preferably connected to the upper portion of the manifold 13 via the supply internal flow path 18, and the gas discharge port 17A is preferably provided to the internal flow path for easy gas collection. 18 is connected above.

Further, as shown in Fig. 3(b), the gas discharge port 17B is preferably connected to the upper portion of the manifold 13 which is easily collected by the gas discharge internal flow path 19B. Here, although the gas discharge internal passages 19A and 19B may partially have a path extending in the vertical direction, it is preferable to extend the path extending in the horizontal direction in the vicinity of the gas discharge ports 17A and 17B, thereby avoiding the internal discharge due to the gas. The flow rate of the coating liquid 2 flowing through the gas discharge internal passages 19A and 19B is lowered by the influence of the hydraulic pressure of the difference between the uppermost portion and the lowermost portion of the flow passages 19A and 19B. Therefore, it is preferable that the gas discharge ports 17A, 17B are not provided on the upper surface of the applicator 10 but in any of the front surface, the side surface, and the back surface.

Referring to Fig. 2, in order to efficiently discharge the gas in the manifold 13 along the flow of the coating liquid 2, the upper edge 20 of the manifold 13 is as shown in Fig. 2(a) and the discharge port. Face 21 is parallel, or as shown in Figure 2(b) It is preferable that the outlet surface 21 is inclined from the supply port 16 toward the gas discharge port 17B as a reference. In such a configuration, when the gas is to be moved together with the coating liquid 2 to the gas discharge port 17B, since the buoyancy acting on the gas promotes the movement of the gas, the gas can be easily discharged, and high gas discharge efficiency can be obtained. On the other hand, in the case where the upper edge 20 of the manifold 13 is inclined downward from the supply port 16 toward the gas discharge port 17B with respect to the discharge port surface 21, the gas is supplied together with the coating liquid 2 toward the gas discharge port. When the 17B moves, there is a need to counteract the buoyancy acting on the gas and the returning force in the direction of gravity. Therefore, the gas becomes difficult to discharge, and the gas discharge efficiency is remarkably lowered.

The upper edge 20 of the manifold 13 is inclined upward from the supply port 16 to the gas discharge port 17B. Since the buoyancy acting on the gas can be utilized for pushing out, the upper edge 20 of the manifold 13 faces the discharge port. The inclination angle α of 21 may be any size, but is preferably within 5°, more preferably within 3°. On the other hand, when the inclination angle α is excessively large, the total height of the applicator 10 (the distance from the discharge port surface 21 of the first drawing to the coater holding table 22) increases, and the size of the applicator 10 increases. As a result, so-called production costs increase and management problems decrease. Further, since it becomes difficult to form the locking surface between the lips when the front lip portion 11 and the rear lip portion 12 are locked in the coating width direction, the gap of the slit 14 becomes in the coating direction. It is not uniform and also has an adverse effect on the accuracy of the discharge.

Further, it is preferable that all the upper edges 20 of the manifold 13 are parallel to the discharge port surface 21 or are inclined upward from the supply port 16 toward the gas discharge port 17B with respect to the discharge port surface 21, but It is also possible to have a portion that is inclined downward in the middle.

Here, specifically, the inclination angle α is expressed by an angle formed by a broken line parallel to the discharge port surface 21 and the upper edge 20 of the manifold 13 as shown in the second (b) diagram. The upper edge 20 of the manifold 13 is a straight line portion indicated by 20 in Fig. 2, and more specifically, a line or surface that connects the uppermost portion of the manifold 13 in Fig. 3 to the coating width direction.

Further, as shown in Fig. 2(a), the length from the discharge port 15 to the lower portion of the manifold 13 is also the length of the island block of the slit 14, and is Ha (the central portion of the island block length) > Hb (end portion) The length of the island block is appropriate. In the second (a) diagram, the length of the island block decreases from the central portion of the manifold 13 toward both end portions. If Ha (central island block length) = Hb (end island block length), since the pressure loss at both end portions of the slit 14 is higher than the central portion, the discharge amount at both end portions is changed. It is smaller than the central portion, but by making Ha (central island block length)>Hb (end island length), since the pressure loss at both ends of the slit 14 is lower than the central portion, The coating liquid 2 which discharges the same amount as the center part from the both ends is formed. As a result, the coating liquid 2 can be uniformly discharged from the discharge port 15 in the coating width direction.

Referring to Fig. 3 again, the cross-sectional area of the manifold 13 in the application width direction, that is, the area of the cross section orthogonal to the application width direction is gradually decreased from the supply port 16 toward the gas discharge port 17B to be Sa (supply port portion) Tube sectional area)>Sb (distribution area of gas discharge port manifold). By making the gas discharge port manifold sectional area Sb smaller than the supply port manifold sectional area Sa, since the flow rate of the coating liquid 2 toward the gas discharge port 17B becomes high, the gas inside the manifold 13 can be made together with The coating liquid 2 quickly moves toward the gas discharge port 17B, and discharges the gas for a short time, and becomes difficult to cause retention in the manifold 13. section. As a result, the gas discharge of the elongated applicator 10 can be performed in a short time, and the problem of deterioration due to the retention of the coating liquid 2 can also be solved.

On the other hand, the manifold cross-sectional area Sb in the gas discharge port portion is larger than the supply port manifold cross-sectional area Sa, because the flow rate of the coating liquid 2 toward the gas discharge port 17B in the manifold 13 becomes low, so The time for gas discharge becomes longer. Further, the gas discharge efficiency is lowered, and at the same time, the problem that the coating liquid 2 is deteriorated due to the retention is likely to occur. In addition, if the cross-sectional area of the manifold 13 in the application width direction is gradually decreased from the supply port manifold sectional area Sa toward the gas discharge port manifold sectional area Sb, an arbitrary area change pattern can be applied. Further, it is also possible to apply a pattern of change in which the area is temporarily increased in the middle. In order to more efficiently move the gas to the gas discharge ports 17B and Sb (the gas discharge port portion manifold sectional area) / Sa (the supply port manifold sectional area) is preferably 1/2 or less.

Referring to Fig. 4, the gas discharge ports 17A and 17B are connected to the gas discharge paths 80A and 80B and the discharge opening and closing valves 81A and 81B, respectively. The gas 100 and the coating liquid 2 discharged from the gas discharge ports 17A and 17B are discharged to the waste liquid tanks 82A and 82B through the discharge opening and closing valves 81A and 81B and the gas discharge paths 80A and 80B. Here, in order to prevent the gas 100 discharged from the gas discharge ports 17A and 17B from returning to the inside of the applicator 10, it is preferable that the discharge opening and closing valves 81A and 81B are provided closest to the gas discharge ports 17A and 17B. The discharge opening and closing valves 81A and 81B are preferably provided at positions at least within 100 mm from the gas discharge ports 17A and 17B. For the gas discharge paths 80A and 80B, piping of any material such as a metal pipe or a synthetic resin pipe can be applied. Gas discharge road Since the diameters 80A and 80B are connected to the applicator 10 that performs the lifting operation, it is preferable to use a flexible synthetic resin pipe.

When the waste liquid 83 is stored in the waste liquid tanks 82A and 82B in a certain amount or more, the waste liquid 83 is passed through the waste liquid discharge paths 84A and 84B and the waste liquid opening and closing valves 85A and 85B by the suction pumps 86A and 86B. Drain the outside. The waste liquid tanks 82A, 82B are provided with high side sensors 87A, 87B and low side sensors 88A, 88B. The high side sensors 87A and 87B detect the capacity of the waste liquid 83 in which the suction pumps 86A and 86B start the suction operation. The low side sensors 88A and 88B detect the capacity of the waste liquid 83 in which the suction pumps 86A and 86B start the suction operation. The height difference between the high side sensors 87A, 87B and the low side sensors 88A, 88B is preferably 200 mm or less, more preferably 100 mm or less.

Here, the method of discharging the waste liquid 83 may be applied to a method of intermittently discharging the waste liquid 83 using the high side sensors 87A, 87B or the low side sensors 88A, 88B, or by accumulating a certain amount. After the waste liquid 83, the excess amount of the waste liquid 83 is discharged from the waste liquid tanks 82A and 82B, and the liquid level 89 of the waste liquid tanks 82A and 82B is set to be constant. Further, in the fourth drawing, two waste liquid tanks 82A and 82B are provided. However, the waste liquid tanks 82A and 82B may be shared by one, or may be provided in the same number as the gas discharge paths 80A and 80B.

Here, in order to discharge the gas 100 in a shorter time, it is necessary to provide a suction mechanism in the gas discharge paths 80A and 80B. The suction mechanism may be a suction pump or the like. However, the pump internal coating liquid 2 of the suction pump is fixed and cannot be used for a long period of time, and there is a problem that it is difficult to finely adjust the discharge amount. Therefore, it is preferable to use an attraction mechanism that can obtain the same function as the suction pump and that uses the principle of the siphon. The attraction mechanism is an outlet 90A of the gas discharge paths 80A, 80B, The 90B is disposed at a position lower than the discharge port 15, and simultaneously fills the inside of the gas discharge paths 80A, 80B from the gas discharge ports 17A, 17B to the outlets 90A, 90B with liquid, thereby generating a suction effect. In other words, the suction force is generated by the hydraulic pressure generated by the difference between the discharge port 15 and the outlets 90A and 90B of the gas discharge paths 80A and 80B. When the suction mechanism using the principle of the siphon is used, only the height difference H' between the discharge port 15 and the outlets 90A and 90B of the gas discharge paths 80A and 80B can be adjusted to finely adjust the discharge amount. Furthermore, since a driving device such as a suction pump is not used, maintenance is easy.

Further, the gas discharge paths 80A and 80B and the gas discharge ports 17A and 17B are disposed at substantially the same height in the vertical direction or at a position lower than the gas discharge ports 17A and 17B. According to this configuration, the attraction of the siphon principle can be utilized most efficiently. Here, the gas discharge paths 80A and 80B and the gas discharge ports 17A and 17B are disposed at substantially the same height in the vertical direction or at a position lower than the gas discharge ports 80A and 80B, which means that the gas discharge paths 80A and 80B are from the gas discharge line. The centers of the outlets 17A and 17B extend in a direction within a range of θ=±30° with respect to the horizontal line, and are disposed at positions lower than 50 mm above the center of the gas discharge ports 17A and 17B in the vertical direction. On the other hand, when the ratio is smaller than θ = -30°, the resistance due to the buoyancy of the gas 100 becomes large, and it becomes difficult to discharge the gas 100 to the gas discharge paths 80A and 80B from the gas discharge ports 17A and 17B. In the case where the gas discharge paths 80A and 80B are disposed at a position higher than 50 mm from the center of the gas discharge ports 17A and 17B, the uppermost portion of the gas discharge paths 80A and 80B is larger than θ=+30°. Since the hydraulic pressure at the lowest level is the resistance, the amount of the coating liquid 2 discharged from the gas discharge paths 80A and 80B is lowered. As a result, the discharge amount of the gas 100 is lowered, so good.

Further, it is preferable that the outlets 90A and 90B of the gas discharge paths 80A and 80B are opened to the atmosphere, and the lowermost portions of the gas discharge paths 80A and 80B are preferably opened to the atmosphere. However, depending on the characteristics of the coating liquid 2, when the gas discharge operation is stopped, the outside air is taken in from the outlets 90A and 90B of the gas discharge paths 80A and 80B, whereby the dry solidified material is caused to cause clogging. Therefore, in order to prevent clogging due to dry solidified matter, the outlets 90A, 90B of the gas discharge paths 80A, 80B are preferably immersed in the waste liquid 83 stored in the waste liquid tanks 82A, 82B which are inside the atmospheric pressure.

Here, the liquid level 89 of the waste liquid 83 stored in the waste liquid tanks 82A and 82B is preferably at a position lower than the discharge port 15. However, between the discharge port 15 and the level H between the liquid surface 89 of the waste liquid 83 stored in the waste liquid tanks 82A and 82B, and between the discharge port 15 and the outlets 90A and 90B of the gas discharge paths 80A and 80B. When the height difference H' is too large, the hydraulic pressure generated by the height difference H or the height difference H' causes the amount of the coating liquid 2 discharged from the gas discharge ports 17A, 17B to become smaller than the amount supplied to the inside of the applicator 10. More than more. Therefore, a part of the manifold 13 becomes a negative pressure and a phenomenon in which the outside air is taken in from the discharge port 15 occurs. Therefore, it is necessary to adjust the flow path resistance and the flow rate adjustment valve at any position of the gas discharge paths 80A, 80B to adjust the supply amount to the inside of the applicator 10 and the discharge amount from the gas discharge ports 17A, 17B. The ratio. The flow path resistance is determined by the height difference H or the height difference H', the diameter of the gas discharge ports 17A and 17B, the pipe diameter of the gas discharge paths 80A and 80B, or the pipe length.

Here, the discharge amount Q2 from the gas discharge ports 17A, 17B is applied toward the coating side. The ratio Q2/Q1 of the supply amount Q1 inside the device 10 is preferably 0.5 to 0.95, and more preferably 0.7 to 0.9. When it is larger than this range, it is easy to take in the outside air from the discharge port 15, and when it is smaller than this range, the amount of the coating liquid 2 to be supplied is increased in order to discharge the gas 100, and the gas 100 cannot be efficiently used. discharge. Moreover, it is preferable that the inner diameters of the gas discharge paths 80A and 80B are such that the gas 100 does not remain inside the pipe. In order to set the ratio Q2/Q1 to a preferable range, the gas 100 is not retained in the inside of the pipe, and the height difference H or the height difference H' is preferably 800 mm or less, and the gas discharge ports 17A and 17B have an inner diameter of 10 mm. Hereinafter, the pipe diameters of the gas discharge paths 80A and 80B are set to have an inner diameter of 10 mm or less. In addition, the height difference H or the height difference H' is set to 500 mm or less, the inner diameters of the gas discharge ports 17A and 17B are 6 mm or less, and the pipe diameters of the gas discharge paths 80A and 80B are set to have an inner diameter of 6 mm or less.

Further, the minute gas 101 having a diameter of less than 1 mm inside the applicator 10 is not easily discharged from the gas discharge ports 17A and 17B. In order to eliminate the minute gas 101, a large-capacity gas is supplied to the manifold 13 inside the applicator 10, and the gas is combined with the fine gas 101. When the large-volume gas is discharged to the outside of the manifold 13 by the above-described method, the minute gas 101 disappears.

For this purpose, the coating die 1 of the present embodiment is connected to the downstream side of the discharge opening and closing valve 81A connected to the gas discharge path 80A, as shown in Fig. 4, and is connected to supply gas to the inside of the applicator 10. The gas supply path 91. The gas supply path 91 has a gas supply on-off valve 92 and an inlet 93 that is opened to the atmosphere in the gas supply path 91 on the upstream side of the gas supply on-off valve 92. In this gas supply path 91, gas supply The on-off valve 92 and the inlet 93 function as a gas supply mechanism. When the gas supply on-off valve 92 is "opened", the atmospheric pressure gas can be supplied from the inlet 93 to the inside of the applicator 10. Here, in order to open the gas supply opening/closing valve 92, the coating liquid 2 of the gas discharge path 80A does not flow backward toward the gas supply path 91 side, and at least a part of the gas supply path 91 is preferably disposed more than the gas discharge path 80A. High position.

Further, in addition to the gas supplied from the inlet 93 to the atmospheric pressure, a gas pressurized by a pump or an air pressure source may be supplied from the inlet 93. When the pressurized gas is supplied, when the gas supply rate is too fast, the gas that has reached the inside of the applicator 10 mixes with the coating liquid 2 to generate bubbles, and conversely, the minute gas 101 is generated. In this case, it is preferable to supply the gas slowly by providing a flow rate adjusting valve or the like on the gas supply path 91. Further, in the case of supplying a gas pressurized by a pump or a pressure source or the like, there is no limitation on the arrangement of the gas supply path 91. The material of the pipe to be used as the gas supply path 91 may be any metal or synthetic resin, but it is preferable because the synthetic resin is easy to handle.

Further, in the present embodiment, the gas supply path 91 is connected to the gas discharge path 80A connected to the gas discharge port 17A, but may be connected to the gas discharge connected to the gas discharge port 17B located at the end of the manifold 13 via 80B or connected to a mold supply path 66 that is connected to the supply port 16 of the applicator 10. That is, as long as the gas supply path 91 can supply the gas to the inside of the manifold 13, it can be connected to any place. In addition to the supply port 16 and the gas discharge ports 17A and 17B, the hole connected to the manifold 13 is provided in the front lip portion 11 or the rear lip portion 12, and the holes may be connected to the gas supply path 91. also, The gas supply path 91 may also be connected in plurality to a portion that can supply gas to the applicator 10.

In addition, the discharge opening and closing valves 81A and 81B for opening and closing the gas 100 and the gas supply opening and closing valve 92 for opening and closing the micro gas 101, the linear motor 33, the motor 43, and the drive pump are provided. All of the movable portions of the coating liquid supply device unit 60 of the syringe pump motor 71 of the piston 68 of the 64, and the like, are operated by the control signal of the control device 95. Next, the control command signal is transmitted to each device in accordance with the automatic operation program installed in the control device 95, and a predetermined operation is performed. Further, when it is necessary to change the respective operating conditions, if the change parameter is appropriately input to the operation panel 96, it is transmitted to the control device 95 to change the operation operation.

Next, an example of a method of discharging the gas inside the applicator 10 using the coating die 1 will be described. At the outset, with reference to Figs. 4 and 5, the gas 100 is discharged from the state in which the coating liquid 2 is completely removed from the inside of the applicator 10, and the gas 100 is discharged and the coating liquid 2 is filled. The method is explained. First, in the fourth drawing, the coating liquid tank 61 is filled into the inside of the injection cylinder 67 to fill the coating liquid 2. When all of the discharge opening and closing valves 81A and 81B and the gas supply on-off valve 92 are "closed", the piston 68 of the syringe pump 64 is raised, and the coating liquid 2 filled in the inside of the injection cylinder 67 is applied. The side of the device 10 is washed away. Thereby, as shown in Fig. 5(a), the coating liquid 2 is sent from the supply port 16 to the manifold 13. After the application of the coating liquid 2 by the syringe pump 64, as shown in Fig. 5(b), the coating liquid 2 spreads in the application width direction of the manifold 13 and the slit 14, and a part of the coating liquid 2 passes. The slit 14 is passed through the discharge port 15 and discharged. When the coating liquid 2 is continuously supplied by the syringe pump 64, as shown in Fig. 5(c), the coating liquid 2 is filled in the entire area of the slit 14 and discharged from the discharge port 15, but since it is long in the manifold 13 Since the gas 100 is closed on the upper side at both end portions in the side direction, it is difficult for the gas 100 to be discharged from the discharge port 15. At this time, the gas supply opening/closing valve 92 is kept "closed" and the discharge opening and closing valves 81A, 81B are set to "open" only during the period from the supply of the coating liquid 2 by the syringe pump 64. Accordingly, the manifold 13 generates the coating liquid 2 to flow from the supply port 16 toward the gas discharge ports 17A, 17B. According to this flow, the gas 100 closed inside the applicator 10 can be discharged together with the coating liquid 2 from the gas discharge ports 17A, 17B. When the gas discharge operation is repeated until the gas 100 inside the applicator 10 is completely discharged, as shown in the fifth (d), the inside of the applicator 10 is only filled with the coating liquid 2, and the filling of the applicator 10 is completed. The operation of the coating liquid. The gas discharge operation before the application of the coating may be completed during the supply operation of supplying the coating liquid 2 from the syringe pump 64 to the applicator 10, or may be performed plural times while the supply operation of the coating liquid 2 is repeated. Let it end.

Next, a gas discharge method in the coating production performed when the gas 100 intrudes into the inside of the applicator 10 filled with the coating liquid 2 will be described with reference to FIGS. 4 and 6 .

First, as shown in Fig. 6(a), the gas 100 that has entered the inside of the applicator 10 during coating production is accumulated in the upper portion of the manifold 13 or the supply port 16.

In the state in which the gas supply opening/closing valve 92 is "closed", the discharge opening and closing valves 81A and 81B are set to "on" only while the application liquid 2 is supplied from the syringe pump 64. Accordingly, in the manifold 13 The coating liquid 2 flowing from the supply port 16 toward the gas discharge ports 17A, 17B is generated. The upper edge 20 of the manifold 13 is parallel to the discharge port surface 21, or is inclined upward from the supply port 16 to the gas discharge port 17B with respect to the discharge port surface 21. Therefore, the flow of the gas 100 toward the gas discharge port 17B is not hindered at the upper edge 20 of the manifold 13. In addition, since the cross-sectional area of the manifold 13 in the application width direction is reduced from the supply port 16 toward the gas discharge port 17B and is Sa (supply port manifold sectional area) > Sb (gas discharge port portion manifold sectional area), The flow rate of the coating liquid 2 toward the gas discharge port 17B is also high. Therefore, as shown in Fig. 6(b), the gas 100 accumulated inside the applicator 10 is rapidly collected in the vicinity of the gas discharge port 17A located at the upper portion of the supply port 16 and the gas row at the both ends of the manifold 13. Exit near 17B. In the state in which the gas supply opening/closing valve 92 is "closed", the discharge opening/closing valves 81A and 81B are repeatedly "opened" while the application liquid 2 is being supplied from the syringe pump 64. Discharge action. As a result, as shown in Fig. 6(c), the gas 100 is completely discharged from the inside of the applicator 10, and only the coating liquid 2 is filled in the flow path of the manifold 13 or the like, and the intrusion into the inside of the applicator 10 is completed. The discharge operation of the gas 100. The gas discharge operation in such coating production may be performed only once or repeatedly.

However, as shown in Fig. 7(a), in the inside of the applicator 10 in which the coating liquid 2 is filled, the micro gas 101 having a diameter of less than 1 mm may enter. Since this minute gas 101 is very small, the buoyancy acting on the minute gas 101 is small. Moreover, after adhering to the wall surface of the manifold 13, the flow of the coating liquid 2 to be supplied is hard to move. Therefore, in the gas discharge method in the above-described coating production, there is a case where the minute gas 101 cannot be discharged. Have The method of discharging the minute gas in the coating production in which the fine gas 101 is discharged will be described below using FIGS. 4 and 7.

First, the application of the coating liquid 2 to the applicator 10 from the syringe pump 64 is stopped, and all of the gas supply opening and closing valve 92 and the discharge opening and closing valves 81A and 81B are "opened". As a result, the coating liquid 2 is discharged from the discharge port 15 and the gas discharge ports 17A and 17B, and corresponds to the discharge amount of the coating liquid 2, and as shown in the seventh (b) diagram, the supply gas 102 passes through the gas supply path 91. The gas discharge path 80A is supplied to the supply port 16 and the manifold 13 through the gas discharge port 17A. The coating liquid 2 in the manifold 13 is replaced with the supply gas 102, so that the space formed by the supply gas 102 is formed on the upper portion of the manifold 13 while being expanded from the gas discharge port 17A toward the coating width direction.

Next, when the space in which the gas 102 is supplied is formed at a position where the minute gas 101 exists, as shown in FIG. 7(c), the minute gas 101 is combined or absorbed in the space formed by the supply gas 102, so the minute gas The 101 series disappeared. As shown in Fig. 7(d), after the space for supplying the gas 102 is formed at least over the entire width of the upper portion of the manifold 13 in the longitudinal direction, the gas supply opening and closing valve 92 and the discharge opening and closing valves 81A and 81B are all " "Close" to stop the supply of the supply gas 102. Thereafter, after the gas discharge operation in the above-described normal coating production is performed, the supply gas 102 located inside the applicator 10 is completely discharged, and only the coating liquid 2 is filled inside the applicator 10. As a result, the originally existing minute gas 101 is discharged to the outside. In the above embodiment, in order to quickly supply the supply gas 102 to the manifold 13, the gas supply opening and closing valve 92 and the discharge opening and closing valves 81A and 81B are all "on". However, the gas discharge path 80B to which the gas supply path 91 is not connected is made When the discharge opening/closing valve 81B is maintained in the "closed" state, the gas supply opening and closing valve 92 and the discharge opening and closing valve 81A are "opened", and the supply gas 102 can be supplied to the manifold 13.

In any of the above-described gas discharge methods, the opening and closing operations of the discharge opening and closing valves 81A and 81B are performed by the injection pump 64 in order to prevent the gas 100 from being sucked from the discharge port 15 or the reverse flow from the gas discharge ports 17A and 17B. It is advisable to carry out the supply of 2 . Therefore, it is necessary to stop the supply by the syringe pump 64 after the discharge opening and closing valves 81A and 81B are "closed". Further, in the above-described embodiment, the discharge opening and closing valves 81A and 81B are all set to "on" at the same time. However, they may be operated individually or sequentially in a combined manner. In this case, the opening and closing sequence is not particularly limited. However, in order to prevent the gas 100 in the vicinity of the supply port 16 from flowing into the manifold 13 and efficiently discharging it, the discharge opening and closing valve 81A that connects the supply port 16 is provided. It is advisable to "open" first. In the above embodiment, in order to discharge the internal gas 100, the micro gas 101, the supply gas 102, and the coating liquid 2 of the applicator 10 from the gas discharge ports 17A and 17B, the syringe pump 64 is used as the supply mechanism of the coating liquid 2. . However, the supply mechanism is not limited thereto, and the coating liquid 2 may be supplied by pressurizing the coating liquid tank 61 or by using another known pump.

In addition, the gas 100, the fine gas 101, the supply gas 102, and the coating liquid 2 discharged from the inside of the applicator 10 by the above-described gas discharge method are discharged to the waste liquid tanks 82A and 82B via the gas discharge paths 80A and 80B, and the coating liquid 2 It is stored as waste liquid 83. Here, as shown in FIG. 4, the waste liquid 83 is detected by the high side sensors 87A, 87B provided in the waste liquid tanks 82A, 82B. When the liquid level 89 becomes higher than Q4, the suction pumps 86A and 86B are operated. Then, the waste liquid opening and closing valves 85A and 85B are "opened", and the waste liquid 83 is sucked from the waste liquid discharge paths 84A and 84B by the suction pumps 86A and 86B, and the waste liquid 83 is discharged to a waste liquid path (not shown). . Thereafter, when it is detected by the low-side sensors 88A and 88B that the liquid level 89 of the waste liquid 83 is lower than Q3, the waste liquid opening and closing valves 85A and 85B are "closed", and the suction pumps 86A, 86B are stopped. The discharge operation of the waste liquid 83 is finished.

Here, after the suction pumps 86A and 86B are operated in the gas discharge operation from the applicator 10, the discharge amount of the coating liquid 2 from the gas discharge ports 17A and 17B may change and the gas discharge amount may not be controlled. Therefore, it is preferable that the suction pumps 86A and 86B are operated when the gas discharge operation is not performed, that is, when the discharge opening and closing valves 81A and 81B are "closed".

Further, the above is an example of a combination of a method of eliminating the minute gas 101 by the supply gas 102 and a method of discharging the gas 100 by the flow force of the coating liquid 2. However, the method of discharging the gas 100 in combination with the method of eliminating the minute gas 101 by the supply gas 102 may be carried out by connecting a mechanical suction mechanism such as a pump to the gas discharge paths 80A and 80B. The method of suction and the method in which the gas discharge ports 17A and 17B are provided on the upper surface of the applicator 10 and the gas is discharged from the internal flow paths 19A and 19B to form a path extending in the vertical direction, and the gas 100 is discharged by buoyancy.

Next, an example of a method of applying the substrate 3 by using the coating die 1 on which the applicator 10 of the present invention is mounted will be described.

First, the moving parts provided in the coating die 1 are returned to the origin. Thereafter, each movable portion moves to a standby position set in advance. Further, as of this time, the parameters for realizing the coating conditions set as the target complete the input to the operation panel 96. Further, the operation of discharging the gas 100 inside the applicator 10 and filling the coating liquid 2 is also completed by the above-described gas discharge method before coating production. The coating liquid 2 is filled from the coating liquid tank 61 to the inside of the applicator 10. At this time, all of the discharge opening and closing valves 81A and 81B and the gas supply on-off valve 92 are "closed", and the wiping unit 50 is positioned away from the applicator 10.

At the time when the above preparation operation is completed, the wiping unit 50 is moved right below the applicator 10. Next, a plurality of lift pins (not shown) are raised on the surface of the stage 32, and the substrate 3 is placed on the upper portion of the lift pins from a mount (not shown). Then, the lift pins are lowered, the substrate 3 is placed on the stage 32, and the substrate 3 is positioned by a aligning device (not shown), and the substrate 3 is suction-held by a plurality of adsorption holes (not shown). In parallel with this, the coating liquid supply device unit 60 is operated to discharge a small amount of the coating liquid 2 from the applicator 10 toward the tray 54. Next, the applicator 10 is lowered by the elevating device unit 40, and the wiping head 51 is moved in the longitudinal direction of the applicator 10 while the lower end of the applicator 10 is in contact with the wiping head 51. After the periphery of the discharge surface 21 of the applicator 10 is cleaned by wiping by the wiping head 51, the applicator 10 is raised by the elevating device unit 40, and the wiping unit 50 is returned to the origin position away from the coating direction of the lower portion of the applicator 10. .

Next, the stage 32 on which the substrate 3 is adsorbed and held starts to move, and the thickness of the substrate 3 is measured by a sensor (not shown). Thereafter, the application start position of the substrate 3 is moved right below the discharge port surface 21 of the applicator 10, and the stage 32 is stopped. Next, the thickness of the substrate 3 measured by a sensor (not shown) is used. The applicator 10 is lowered by the elevating device unit 40 in such a manner that the distance from the discharge port surface 21 of the applicator 10 to the surface of the substrate 3 is the set value.

After the applicator 10 has finished descending, the coating liquid supply device unit 60 is driven and only the coating liquid 2 filled inside the injection cylinder 67 is pushed out by the piston 68. Accordingly, a residue (Bead) 97 of the coating liquid 2 can be formed between the discharge port 15 of the applicator 10 and the substrate 3. In a certain period of time after the formation of the residue 97, the stage 32 which is positively adsorbed and held by the substrate 3 is moved by the linear motor 33 at a constant speed, and when the coating liquid 2 is continuously discharged from the surface of the moving substrate 3 from the discharge port 15, Then, a coating film is formed on the substrate 3.

Thereafter, after the application end portion of the substrate 3 comes to the position of the discharge port 15 of the applicator 10, the piston 68 is stopped to stop the supply of the coating liquid 2, and then the elevating device unit 40 is driven to raise the applicator 10. By this operation, the residue 97 formed between the substrate 3 and the applicator 10 is completely cut off to complete the coating. Thereafter, the stage 32 is continuously moved and stopped at the position where the substrate 3 is carried out. In parallel with this, the applicator 10 returns to the origin position in the vertical direction. Further, the adsorption of the substrate 3 on the stage 32 is released, and the substrate 3 is lifted by raising a lift pin (not shown). At this time, an unloader (not shown) holds the substrate 3 and transports the substrate 3 to the next project. Next, the platform 32 returns to the home position, and the piston 68 of the syringe pump 64 is lowered and the inside of the injection cylinder 67 is filled with the new coating liquid 2. Thereafter, the wiping unit 50 is moved to the lower portion of the applicator 10 and stands by until the next substrate 3 is transferred, and thereafter the same operation is repeated.

Here, in the coating operation, there may be a gas depending on the following (1) to (4). Intrusion into the inside of the applicator 10, that is, (1) gas intrusion from the coating liquid supply device unit 60; (2) foaming of the gas dissolved in the coating liquid 2; (3) opening and closing of the suction opening/closing valve 63 or discharge The valve 65 is opened and closed to suck in gas; and (4) a gas or the like is taken in from the discharge port 15 of the applicator 10. When the gas intrudes into the inside of the applicator 10, a delay in the discharge pressure rise occurs at the start of coating, and the film thickness at the start of coating is reduced, so that the film thickness accuracy in the coating direction is deteriorated or the gas is discharged from the discharge port 15 to the substrate 3. A coating disadvantage of so-called pinholes or straight lines occurs. When the gas discharge operation is repeated under the conditions set in advance by the gas discharge method in the above-described coating production, the gas 100 is completely discharged, and when the substrate 3L is applied again in this state, It is possible to avoid filming at the beginning of the coating portion or to cause coating defects.

However, there is also a case where the gas discharge method in the coating production is used, and the film formation at the start of coating or the occurrence of coating defects cannot be eliminated. That is the case where the minute gas 101 intrudes inside the applicator 10. In this case, when the micro gas discharge method in the above-described coating production is performed, the fine gas 101 inside the applicator 10 can be discharged, and the occurrence of film formation or coating defects at the start of coating can be completely eliminated. Further, these gas discharge operations may be performed after the film thickness is unstable and the coating defect occurs, or may be performed after applying a predetermined number of substrates 3, and further, for any reason. The coating operation may be interrupted once and the coating operation may be performed again before the application.

Here, the viscosity of the coating liquid 2 to which the present invention is applicable is 1 to 1000 mPa. S is better, and 1~50mPa. S is better. Coating liquid 2 is coated Sexually, it is suitable for a Newtonian flow, but it can also have a shake. The present invention has an effect particularly when a solvent having a high volatility, for example, a coating liquid of Propylene Glycol Monomethyl Ether Acetate, butyl acetate or ethyl lactate, is used. Examples of the coating liquid 2 that can be specifically applied include an RGB photoresist liquid for a color filter, a photoresist liquid for a black matrix, a photoresist liquid for a photoresist spacer, a positive photoresist liquid for an array substrate, and a top. Coating materials and so on. Further, as the member to be coated of the substrate 3, a metal plate such as aluminum, a ceramic plate, a tantalum wafer or the like may be used in addition to glass. Further, in the coating production, it is preferably from 5 to 100 sheets per 1 to 100 sheets, and more preferably from 15 to 50 sheets. The minute gas discharge operation in the coating operation is preferably performed every 50 to 5,000 sheets per a certain number of coatings, and is preferably performed per 100 to 1,000 sheets. Further, in the micro gas discharge operation, the amount of gas to be supplied to the inside of the applicator 10 and the supply time are required to supply the gas 102 at least in the upper portion of the manifold 13 in order to reliably eliminate the minute gas 101 accumulated in the manifold 13. If a space is formed, any supply gas amount or supply time is also applied.

[Examples]

Hereinafter, the embodiments are exemplified to more specifically explain the present invention.

Example 1

The color filter was produced as it is using the coating die shown in Figs. 1 and 4 . Here, as the applicator, the gap between the discharge port is 100 μm, the length in the longitudinal direction is 1300 mm, the coating width is 1100 mm, and the length of the central island block is Ha=40 mm.>"End island length Hb=38 "mm" and a gas discharge port having a diameter of 4 mm are provided in the upper part of the supply port and the both ends of the manifold in three places. The upper edge of the manifold is parallel to the discharge port surface and Sa (supply port manifold sectional area) = 34mm ² , Sb (sectional area of manifold at the gas discharge port at both ends) = 8.5mm ² , Sb (sectional area of manifold at gas discharge port) / Sa (sectional area of manifold for supply port) = 1/4 . Further, a tube made of Teflon (registered trademark) having an inner diameter of 4 mm is used for each gas discharge path to which the applicator is connected, and is connected to each gas discharge port of the applicator in the horizontal direction while being downstream of the connection portion. The horizontal portion of each gas discharge path is set so as to be 20 mm lower than the center of each gas discharge port. In addition, each gas discharge path is disposed such that the outlet of each gas discharge path is 450 mm lower than the discharge port of the applicator, and the outlet of each gas discharge path is immersed in a waste liquid tank opened to the atmosphere. Stored in waste liquid. Here, the difference H between the liquid level of the waste liquid in the waste liquid tank and the discharge port of the applicator is such that the waste liquid tank is disposed such that the liquid level of the waste liquid is 400 mm lower than the discharge port of the applicator. Further, the discharge opening and closing valve is provided at a position 50 mm from each gas discharge port. The gas supply path having the gas supply opening and closing valve is connected to the Teflon (registered trademark) pipe having an inner diameter of 6 mm, and is connected between the outlet of the gas discharge path connected to the supply port and the discharge opening and closing valve to allow the gas supply path to be The inlet is open to the atmosphere and is placed at a higher position than the spout of the applicator. Further, as the coating liquid, each of the black matrix, red, green, and blue coating liquids was prepared. For the black matrix coating liquid, carbon black was used as a light shielding material, acrylic resin was used as a binder, and Propylene Glycol Monomethyl Ether Acetate was used as a solvent, and the solid concentration was 10%, and the viscosity was 10 mPa. . S. Similarly, the red coating liquid was obtained by using acrylic resin as a binder, PGMEA as a solvent, and pigment red 177 as a pigment, and adjusting the solid concentration to 15% and the viscosity to 5 mPa. S. The green coating solution replaces the pigment green 36 with the coating solution for red, and adjusts the solid concentration to 15% and the viscosity to 5 mPa. S. The blue coating solution is to replace the pigment blue 15 with the red coating solution, and adjust the solid concentration to 15% and the viscosity to 5 mPa. S. These coating liquids all have photosensitive characteristics.

First, in order to apply the coating liquid for a black matrix, the coating liquid tank is filled with the coating liquid, and the coating liquid filling operation is performed inside the applicator. Here, in order to perform the gas discharge operation before the coating production for the coating liquid filling operation, the supply conditions of the syringe pump are a supply speed of 5000 μl/sec, a supply amount of 40,000 μl, and a supply time of 8 seconds. With this supply condition, all of the discharge opening and closing valves are set to the "on" state after the pump is started for one second, and all of the discharge opening and closing valves are set to the "closed" state after 7 seconds, and the gas discharge operation cycle is repeated three times to apply the applicator. The internal gas is completely discharged. Further, in the gas discharge operation, the gas supply opening and closing valve is always kept in the "closed" state.

After the above coating liquid filling operation, a coating thickness of 10 μm was applied on a substrate of 1100×1300 mm and a thickness of 0.7 mm on an alkali-free glass with a distance of a coater and a substrate of 100 μm and a coating speed of 3 m/min. Coating film. Here, 300 sheets of the substrate were coated. In the coating operation, in order to prevent the deterioration of the film thickness due to the intrusion of gas from the supply system, the foaming of the gas dissolved in the coating liquid, and the gas inhalation from the discharge port of the applicator, or the coating defect In the gas discharge operation in the coating production, the feed rate is 5000 μl/sec, the supply amount is 40,000 μl, and the supply time is 8 seconds, and the coating is performed once for every 20 sheets. After the first one second, the discharge opening and closing valves are all set to "on" state, and after seven seconds, all of the gas discharge operation cycles are set to "closed". In the gas discharge operation cycle, the gas supply opening and closing valve is always kept "closed". In the above-described gas discharge operation, in order to discharge the fine gas which is difficult to discharge, the coating production is temporarily stopped every 100 sheets are applied, and the gas supply opening and closing valve and the discharge opening and closing valve are used for the minute gas discharge operation. All of the "open" was performed for 30 seconds, and after the gas was supplied to the inside of the applicator and the minute gas was removed, the gas discharge operation before the coating production was performed.

The coated substrate was dried by a hot plate heated to 100 ° C for 10 minutes, and after exposure, development, and peeling, a vulcanization was performed for 30 minutes on a hot plate of 260 degrees to obtain a thickness of 1 μm. Black matrix pattern.

Next, in addition to the coating film having a thickness of 13 μm, the red coating liquid was continuously applied to 100 substrates on which the black matrix was formed under the same conditions as the black matrix coating liquid. The coated substrate was dried on a hot plate heated to 90° C. for 10 minutes, and then exposed, developed, and peeled off, and only a red coating film having a thickness of 2 μm remained in the red pixel portion, and a hot plate of 260 degrees was used. The vulcanization was carried out for 30 minutes.

Next, except for the coating film having a thickness of 20 μm, the green coating liquid was applied continuously to 100 substrates on which the black matrix and the red pixel portion were formed under the same conditions as the red coating liquid. The coated substrate was dried on a hot plate heated to 100 ° C for 10 minutes, and then exposed, developed, and peeled off, and only a green coating film having a thickness of 2 μm remained in the green pixel portion, and a hot plate of 260 degrees was applied. The vulcanization was carried out for 30 minutes.

Furthermore, the blue coating liquid was continuously applied to 100 substrates on which the black matrix, the red pixel portion, and the green pixel portion were formed under the same conditions as the green coating liquid. The coated substrate was also subjected to drying, exposure, development, peeling, and vulcanization under the same conditions as the green coating liquid, and the blue coating film having a thickness of 2 μm remained only in the blue pixel portion. In addition, in the application of the coating liquid of each color, the film thickness was measured in the state before the pattern formation after the drying, and it was found that the coating direction and the coating width direction were all target values of ±3 for all the coated substrates except for the end portion of 10 mm. Film thickness accuracy below %. Moreover, the inspection of coating unevenness was also performed collectively, and the coating quality was excellent with respect to all coated substrates. There is no such a disadvantage that the gas inside the applicator is discharged into the member to be coated to cause pinholes or straight lines due to the coating of the gas. Next, finally, ITO was adhered by sputtering to produce 300 color filters. The completed color filter not only satisfies the film thickness accuracy, but also has no coating defects, and is impeccable in quality. Moreover, since the gas discharge operation is performed promptly before the coating production or in the coating production, the production efficiency is also extremely high.

Comparative example 1

The liquid level of the waste liquid stored in the waste liquid tank which is disposed 50 mm higher than the discharge port of the applicator and is immersed in the outlet of each gas discharge path at the outlet of each gas discharge path is located at the discharge port of the applicator The color filter was produced under the same conditions as in Example 1 except that the waste liquid tank was placed at a position as high as 200 mm. As a result, in any of the gas discharge operations in the coating liquid filling operation and the coating production, the flow rate of the coating liquid discharged from each gas discharge port is lowered and the gas inside the applicator is not discharged from each gas in a short time. The outlet is discharged. That is because the liquid of the waste liquid stored in the waste tank The hydraulic pressure difference between the surface and the discharge surface of the applicator may become a resistance. As a result, in addition to the increase in gas discharge operation time and a significant decrease in production efficiency, gas remains inside the applicator. In the case where the film thickness accuracy of the coating direction is deteriorated or the coating defect is caused, 60 pieces of 300 sheets are defective products, and a color filter which cannot obtain good quality is generated. Moreover, after the application of 300 sheets was completed, in order to find out the conditions in which the gas inside the applicator was not left, the supply conditions for completely discharging the gas were examined. As a result, it was found that, at a supply speed of 5000 μl/sec, a supply amount of 100,000 μl, and a supply time of 20 seconds, the supply port and the discharge opening and closing valve connected to both end portions were supplied one second after the start of the supply. All of them are in the "on" state, and all of them are set to the "off" state after 19 seconds, and such a gas discharge operation cycle is required four times in the coating liquid filling operation and two times in the coating production. Accordingly, it can be understood that, in comparison with Example 1, the time and supply amount of gas discharge are increased, and the gas discharge efficiency is lowered. This is because the liquid level of the waste liquid stored in the waste liquid tank opened in the atmosphere is disposed at a position 200 mm higher than the discharge port of the applicator.

Comparative example 2

The color filter was produced under the same conditions as in Example 1 except that the gas discharge paths were set to be higher than the center of each gas discharge port by 100 mm. As a result, the flow rate of the coating liquid discharged from each gas discharge port in any of the gas discharge operations during the coating liquid filling operation and the coating production is lowered, and the gas inside the applicator cannot be discharged from each gas discharge port in a short time. That is because the hydraulic pressure based on the difference between the gas discharge path and the gas discharge port becomes a resistance. In accordance with this, in addition to gas discharge In addition to an increase in working time and a decrease in production efficiency, gas remains inside the applicator. Further, in the case where the film thickness accuracy in the coating direction is deteriorated or the coating defect is caused, 28 pieces of 300 sheets are defective products, and a color filter in which good quality cannot be obtained is generated.

Further, after the application of 300 sheets was completed, in order to find out the condition that no gas remained inside the applicator, the supply conditions for completely discharging the gas were examined. As a result, after the supply speed was 5000 μl/sec, the supply amount was 70,000 μl, and the supply time was 14 seconds, the discharge was connected to the supply port and the both end portions one second after the start of the supply. When all the on-off valves are set to the "on" state and the "off" state is set after 13 seconds, it is known that such a gas discharge operation cycle is required three times in the coating liquid filling operation, and in the coating production. It takes 2 times. Accordingly, in comparison with Example 1, it is understood that the time required for gas discharge and the amount of supply are increased, and the gas discharge efficiency is lowered. This is why the gas discharge path passes through a position 100 mm higher than the gas discharge port.

Comparative example 3

The color filter was produced under the same conditions as in the first embodiment except that the gas supply path and the gas supply on-off valve were not provided and the micro gas was not discharged every 100 sheets. As a result, the film thickness accuracy was within the target of ±3% in both the application direction and the coating width direction. However, since the minute gas inside the applicator is not sufficiently discharged, a coating defect occurs, and eight of the 300 sheets are defective products, and a color filter that does not have good quality cannot be obtained.

Moreover, after the end of 300 sheets of coating, it is sought to be discharged into the applicator. The conditions of the small gas are reviewed for the supply conditions in which the micro gas can be completely discharged, but it is understood that the micro gas cannot be discharged under any conditions.

Comparative example 4

In addition to Sa (supply port manifold sectional area) = 34 mm ² , Sb (gas discharge port manifold sectional area) = 51 mm ² , and Sb (gas discharge port manifold sectional area) / Sa (supply The color filter was produced under the same conditions as in Example 1 except that the cross-sectional area of the mouth manifold was changed to 3/2. As a result, the flow rate of the coating liquid at the gas discharge ports toward the inside and both ends of the manifold becomes lower in any of the gas discharge operations before the coating production and in the coating production, and the gas inside the applicator is not in a short time. The inside is discharged from the gas discharge ports at both ends. Therefore, there is a gas residue in the applicator, and the film thickness deterioration in the coating direction, the coating defect, and the like occur, and 72 of the 300 sheets are defective products, and a good color quality cannot be obtained.

Moreover, after the application of 300 sheets was completed, in order to find out the conditions in which no gas remained in the applicator, the supply conditions for completely discharging the gas were examined. As a result, under the condition that the supply speed is 5000 μl/sec, the supply amount is 70,000 μl, and the supply time is 14 seconds, the discharge opening and closing valves connected to the supply port and the both end portions are all set to "open" one second after the start of the supply. In the state of "OFF" after 13 seconds, it is known that such a gas discharge operation cycle requires three times before coating production and two times in coating production. Accordingly, the light is Sb (the gas discharge port portion manifold sectional area) / Sa (the supply port manifold sectional area) = 3/2, and compared with the first embodiment, the time and supply amount of the gas discharge are known. Both increase and the gas discharge efficiency decreases.

Comparative Example 5

The color filter was produced under the same conditions as in the first embodiment except that the upper edge of the manifold was inclined from the supply port toward the gas discharge ports at both end portions with respect to the discharge port surface by 2 degrees. . As a result, in any of the gas discharge operations before the coating production and in the coating production, the upper edge of the manifold hinders the flow of the gas moving to the gas discharge ports at both ends, so that the gas inside the applicator becomes impossible. The gas discharge ports at both ends are discharged for a short time. As a result, gas remains in the inside of the applicator, and there are 60 defective products in 300 sheets due to deterioration in film thickness accuracy in the coating direction, coating defects, and the like, and a color filter having good quality cannot be obtained.

Moreover, after the application of 300 sheets was completed, in order to find out the conditions in which no gas remained in the applicator, the supply conditions for completely discharging the gas were examined. As a result, under the condition that the supply speed is 5000 μl/sec, the supply amount is 70,000 μl, and the supply time is 14 seconds, the discharge opening and closing valves connected to the supply port and the both end portions are all set to "open" one second after the start of the supply. The state is set to the "off" state after 13 seconds, and it is known that such a gas discharge operation cycle requires three times before coating production and two times in coating production. Accordingly, the upper edge of the manifold is inclined by 2 degrees downward from the supply port toward the gas discharge ports at both end portions with respect to the discharge port surface, and the time and supply of the gas discharge are known in comparison with the first embodiment. The amount is increased, and the gas discharge efficiency is lowered.

Comparative Example 6

In addition to the upper edge of the manifold, the gas discharge port from the supply port to the both end portions is inclined by 2 degrees from the supply port to the both end portions, and Sb (gas discharge port portion manifold sectional area) / Sa (supply) The color filter was produced under the same conditions as in Example 1 except that the cross-sectional area of the mouth manifold was changed to 3/2. This knot In the gas discharge operation before the coating production and in the coating production, the flow rate of the coating liquid toward the gas discharge ports at both end portions becomes low, and the upper edge of the manifold hinders the gas moving toward the gas discharge ports at both end portions. Since the flow occurs, the gas inside the applicator cannot be discharged from the gas discharge port for a short time. Therefore, the gas remains in the inside of the applicator, and depending on factors such as deterioration in film thickness accuracy in the coating direction or coating defects, 122 of the 300 sheets are defective and cannot obtain good quality.

Moreover, after the application of 300 sheets was completed, in order to find out the conditions in which no gas remained in the applicator, the supply conditions for completely discharging the gas were examined. As a result, it was found that, at a supply speed of 5000 μl/sec, a supply amount of 100,000 μl, and a supply time of 20 seconds, the supply port and the connection to both ends were discharged one second after the supply was started. All the on-off valves are set to "on" state, and all of them are "off" after 19 seconds. It is known that such a gas discharge operation cycle requires four times before coating production, and is required for coating production. Times. According to this, the upper edge of the manifold is inclined downward by 2 degrees from the supply port toward the gas discharge ports at both end portions with respect to the discharge port surface, and even if the gas discharge port portion is formed as the manifold sectional area Sb/supply port portion The cross-sectional area of the manifold is Sa=3/2. Compared with the first embodiment, it is understood that the time required for gas discharge and the amount of supply are increased, and the gas discharge efficiency is lowered.

Comparative Example 7

The color filter was produced under the same conditions as in Example 1 except that "the central portion of the island block length Ha = 40 mm" = "the end island block length Hb = 40 mm". As a result, since there is no problem in the gas discharge operation before the coating production and in the coating production, there is no disadvantage in coating. But by The "central island block length Ha = end island block length Hb" is created, and the pressure loss at both end portions of the slit is increased to reduce the amount of discharge from both end portions. As a result, the film thickness accuracy in the coating width direction exceeds ±3% of the target, so that the total number is defective, and a good color filter cannot be obtained.

[Industrial value]

According to the present invention, since any gas that has entered the inside of the applicator can be discharged with a small amount of supply and for a short period of time, a high-quality coating film can be formed with high cycle time and high productivity.

According to the present invention, it is possible to provide a coating method and a coating device and a member for a display which are capable of improving a gas discharge capability of a coating die and capable of forming a coating film having no coating defects with high film thickness precision without impairing the advantages of a coating die. Manufacturing method and manufacturing device.

The present invention is suitable for forming a coating film on a member to be coated, and in particular, it can be suitably used in the field of manufacturing color filters for color liquid crystal displays, array substrates, panels for plasma displays, optical filters, and the like.

1‧‧‧Application mould

2‧‧‧ Coating solution

3‧‧‧Substrate

10‧‧‧applicator

11‧‧‧ front lip

12‧‧‧After the lip

13‧‧‧Management

14‧‧‧Slit

15‧‧‧Exporting

16‧‧‧ supply port

17A, 17B‧‧‧ gas discharge

18‧‧‧Supply internal flow

19A, 19B‧‧‧ gas discharge internal flow path

20‧‧‧Management upper edge

21‧‧‧Exhaust face

22‧‧‧Applicator Holder

30‧‧‧Abutment

31‧‧‧ rails

32‧‧‧ platform

33‧‧‧Linear motor

34‧‧‧ pillar

40‧‧‧ Lifting unit

41‧‧‧ Lifting table

42‧‧‧Guide

43‧‧‧Motor

44‧‧‧ screw

50‧‧‧Wiping unit

51‧‧‧ Wipe head

52‧‧‧Wiping head drive

53‧‧‧Wiping head holder

54‧‧‧ bracket

55‧‧‧ Wiping unit holding table

60‧‧‧ Coating liquid supply unit

61‧‧‧ coating tank

62‧‧‧ pump supply road

63‧‧‧Attraction opening and closing valve

64‧‧‧Syringe pump

65‧‧‧Opening and closing valve for spitting

66‧‧‧Mold supply road

67‧‧‧Injection tube

68‧‧‧Piston

69‧‧‧Piston holding table

70‧‧‧Piston lifting guide

71‧‧‧Spump pump motor

72‧‧‧Spin pump screw

80A, 80B‧‧‧ gas discharge path

81A, 81B‧‧‧ Discharge opening and closing valve

82A, 82B‧‧‧ waste tank

83‧‧‧ Waste

84A, 84B‧‧‧ Waste liquid discharge path

85A, 85B‧‧‧Opening and closing valve for waste liquid

86A, 86B‧‧‧ suction pump

87A, 87B‧‧‧ high side sensor

88A, 88B‧‧‧ low side sensor

89‧‧‧ liquid level

90A, 90B‧‧‧Export of gas discharge path

91‧‧‧ gas supply path

92‧‧‧ gas supply opening and closing valve

93‧‧‧ Entrance to the gas supply path

95‧‧‧Control device

96‧‧‧Operation panel

97‧‧‧Residues (Bead)

100‧‧‧ gas

101‧‧‧Small gas

102‧‧‧Supply gas

X‧‧‧ Coating direction (substrate orientation)

Ha‧‧‧Central Island length

Hb‧‧‧ end island length

Angle of inclination of the upper edge of the α‧‧‧ manifold

Sa‧‧‧ supply mouth manifold sectional area

Sectional area of manifold for Sb‧‧‧ gas discharge

Angle of inclination of the θ‧‧‧ gas discharge path

H‧‧‧The difference between the discharge and the level of waste liquid accumulated in the waste tank

H'‧‧‧ Height difference between the outlet of the spout and the exit of the gas discharge path H

Q3‧‧‧Low side sensor height

Q4‧‧‧High side sensor height

Fig. 1 is a schematic configuration diagram of a coating die 1 on which a coating device of a coater 10 is mounted.

The second (a) and (b) drawings are schematic front cross-sectional views of the applicator 10 inside the applicator 10 viewed from the coating direction.

The third (a) and (b) drawings are schematic side cross-sectional views orthogonal to the application width direction of the applicator 10.

Fig. 4 is a schematic front view of the applicator 10 to which the supply portion and the discharge portion of the coating liquid 2 are added.

The fifth (a) to (d) are schematic cross-sectional views showing the applicator 10 in a state in which the gas 100 is discharged during the coating liquid filling operation.

The sixth (a) to (c) are schematic cross-sectional views showing the applicator 10 in a state in which the gas 100 invaded during the coating operation is discharged.

The seventh (a) to (d) diagrams are schematic cross-sectional views showing a state in which the minute gas 101 inside the applicator 10 is removed by the gas supplied to the applicator 10.

In addition, the meanings represented by the symbols and numbers in the drawing are as follows.

10‧‧‧applicator

13‧‧‧Management

14‧‧‧Slit

15‧‧‧Exporting

16‧‧‧ supply port

17A, 17B‧‧‧ gas discharge

60‧‧‧ Coating liquid supply unit

61‧‧‧ coating tank

62‧‧‧ pump supply road

63‧‧‧Attraction opening and closing valve

64‧‧‧Syringe pump

65‧‧‧Opening and closing valve for spitting

66‧‧‧Mold supply road

67‧‧‧Injection tube

68‧‧‧Piston

69‧‧‧Piston holding table

70‧‧‧Piston lifting guide

71‧‧‧Spump pump motor

72‧‧‧Spin pump screw

80A, 80B‧‧‧ gas discharge path

81A, 81B‧‧‧ Discharge opening and closing valve

82A, 82B‧‧‧ waste tank

83‧‧‧ Waste

84A, 84B‧‧‧ Waste liquid discharge path

85A, 85B‧‧‧Opening and closing valve for waste liquid

86A, 86B‧‧‧ suction pump

87A, 87B‧‧‧ high side sensor

88A, 88B‧‧‧ low side sensor

89‧‧‧ liquid level

90A, 90B‧‧‧Export of gas discharge path

91‧‧‧ gas supply path

92‧‧‧ gas supply opening and closing valve

93‧‧‧ Entrance to the gas supply path

95‧‧‧Control device

96‧‧‧Operation panel

100‧‧‧ gas

101‧‧‧Small gas

Claims (7)

In a coating method, the coating liquid is applied to the surface of the member to be coated while the coating material is discharged from the discharge port of the applicator while the coating liquid is discharged from the applicator, and the coating liquid is applied to the surface of the member to be coated. There is a manifold for expanding the coating liquid in the coating width direction, a discharge port for discharging the coating liquid, and a gas discharge port for discharging the gas together with the coating liquid, and the coating method is characterized in that the manifold is filled with the coating liquid. The gas is then supplied to the manifold, and a part of the gas and the coating liquid is discharged from the gas discharge port, and then the coating liquid is applied to the surface of the member to be coated. A method of producing a member for a display using the coating method of claim 1 of the patent application. A coating apparatus comprising: a liquid supply mechanism having a liquid supply path for supplying a coating liquid to an applicator; a discharge pipe for expanding a coating liquid in a coating width direction; and a discharge port for discharging the coating liquid; and a gas together with the coating liquid An applicator for discharging the gas discharge port; a gas discharge path connected to the gas discharge port and having an opening and closing valve in the middle; a holding mechanism for holding the member to be coated; and a moving mechanism for relatively moving the applicator and the holding mechanism, the coating device A gas supply path for supplying gas to the applicator is connected to at least one of an applicator, a liquid supply path, or a gas discharge path. A coating apparatus according to claim 3, wherein the inlet of the gas supply path is opened to the atmosphere. Such as the coating device of claim 3 or 4, wherein The applicator has a supply port for supplying the coating liquid to the applicator from the liquid supply path, and the cross-sectional area of the manifold in the coating width direction is reduced from the supply port toward the gas discharge port, and the upper edge of the manifold and the discharge port surface including the discharge port Parallel or inclined upward from the supply port toward the gas discharge port with reference to the discharge port surface. A coating apparatus according to claim 5, wherein the length of the island block of the slit of the applicator decreases from a central portion toward both end portions in the coating width direction. A manufacturing apparatus for a member for a display, which is characterized in that the member for display is manufactured by the coating device according to any one of claims 3 to 6.