TW201330141A - Robot, method of setting robot and device for manufacturing robot - Google Patents
Robot, method of setting robot and device for manufacturing robot Download PDFInfo
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- TW201330141A TW201330141A TW101131318A TW101131318A TW201330141A TW 201330141 A TW201330141 A TW 201330141A TW 101131318 A TW101131318 A TW 101131318A TW 101131318 A TW101131318 A TW 101131318A TW 201330141 A TW201330141 A TW 201330141A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Abstract
Description
本發明是關於機器人、機器人之設置方法及製造裝置。 The present invention relates to a robot, a robot, and a manufacturing apparatus.
先前，已知有工件搬運用的搬運機器人。搬運機器人，例如：已知有利用水平方向伸縮之手臂部搬運工件的水平多關節機器人(參照專利文獻1)。 Previously, a transfer robot for carrying a workpiece was known. For example, a horizontal articulated robot that transports a workpiece by an arm portion that is stretched in the horizontal direction is known (see Patent Document 1).
搬運機器人，例如：其於半導體製造裝置或液晶製造裝置等，是使用在搬運半導體晶圓或玻璃基板等工件。於上述裝置中工件的處理，大多數是在已經減壓的真空室內進行。因此，搬運機器人也大多數是配置在真空室內。 The transport robot is, for example, a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus, and is used to transport a workpiece such as a semiconductor wafer or a glass substrate. Most of the processing of the workpieces in the above apparatus is carried out in a vacuum chamber which has been depressurized. Therefore, most of the handling robots are disposed in the vacuum chamber.
搬運機器人要組裝在真空室內時，例如是使用高架式起重機等起重裝置吊起搬運機器人，移動至真空室上方之後，使起重裝置下降將搬運機器人搬入至真空室內。 When the transport robot is to be assembled in the vacuum chamber, for example, a transport robot is lifted by a lifting device such as an overhead crane, and after moving to the upper side of the vacuum chamber, the lifting device is lowered to carry the transport robot into the vacuum chamber.
[專利文獻1]日本特許第3881579號公報 [Patent Document 1] Japanese Patent No. 3881579
然而，近年來玻璃基板或半導體晶圓等工件有大型化 的趨勢，隨著該等工件的大型化以致搬運機器人及真空室也有大型化的趨勢。因此，搬運機器人在真空室內的設置可能就會變困難。 However, in recent years, workpieces such as glass substrates or semiconductor wafers have increased in size. The trend is that as the size of the workpieces increases, the handling robots and vacuum chambers also tend to increase in size. Therefore, the setting of the transfer robot in the vacuum chamber may become difficult.
例如：搬運機器人愈是大型化就容易造成其高度尺寸愈大。因此，為了要將大型化的搬運機器人位於真空室上方，是以確保有更寬廣之該搬運機器人搬入用的搬入空間為佳，即，是以確保有更寬廣之真空室上面還上方的空間為佳。然而，當搬運機器人的高度尺寸變大時，由於搬運機器人收容用的真空室的高度尺寸也會變大，因此就難以確保有較寬廣之該搬運機器人搬入用的搬入空間。 For example, the larger the handling robot is, the easier it is to increase its height. Therefore, in order to position the large-sized transport robot above the vacuum chamber, it is preferable to ensure a wider loading space for the transport robot to carry in, that is, to ensure a space above the upper and lower sides of the vacuum chamber. good. However, when the height of the transport robot is increased, the height of the vacuum chamber for storing the transport robot is also increased, so that it is difficult to secure a wide loading space for the transport robot.
如上述，搬運機器人愈是大型化，搬運機器人可能愈難以設置在真空室內。 As described above, the more the handling robot is enlarged, the more difficult it is for the handling robot to be placed in the vacuum chamber.
本發明實施形態之一形態，其目的在於提供一種能夠使機器人容易設置在腔室內的機器人、機器人之設置方法及製造裝置。 According to one aspect of the present invention, an object of the invention is to provide a robot, a robot installation method, and a manufacturing apparatus that can easily install a robot in a chamber.
本發明實施形態之一形態相關的機器人，具備有第1單元和第2單元。第1單元是從腔室上方搬入至腔室內，並且固定在該腔室內。第2單元是從腔室上方搬入至腔室內，並且連結在已經固定在腔室內的第1單元。 A robot according to an embodiment of the present invention includes a first unit and a second unit. The first unit is carried into the chamber from above the chamber and is fixed in the chamber. The second unit is carried into the chamber from above the chamber and is coupled to the first unit that has been fixed in the chamber.
此外，本發明實施形態之一形態相關的機器人之設置方法，包括固定步驟和連結步驟。固定步驟，是將機器人的第1單元從腔室的上方搬入至腔室內，然後將該第1單 元固定在腔室內。連結步驟，是將機器人的第2單元從腔室的上方搬入至腔室內，然後將該第2單元連結在已經固定在腔室內的第1單元。 Further, a method of installing a robot according to an aspect of the embodiment of the present invention includes a fixing step and a connecting step. The fixing step is to carry the first unit of the robot from above the chamber into the chamber, and then the first order The element is fixed in the chamber. In the connecting step, the second unit of the robot is carried into the chamber from above the chamber, and then the second unit is coupled to the first unit that has been fixed in the chamber.
另外，本發明實施形態之一形態相關的製造裝置，具備腔室和要設置在腔室內的機器人。此外，機器人具備第1單元和第2單元。第1單元，是從腔室的上方搬入至腔室內，並且固定在腔室內。第2單元，是從腔室的上方搬入至腔室內，並且連結在已經固定在腔室內的第1單元。 Further, a manufacturing apparatus according to an aspect of the embodiment of the present invention includes a chamber and a robot to be installed in the chamber. Further, the robot includes a first unit and a second unit. The first unit is carried into the chamber from above the chamber and is fixed in the chamber. The second unit is carried into the chamber from above the chamber and is coupled to the first unit that has been fixed in the chamber.
根據本發明實施形態之一形態時，就能夠提供一種容易使機器人設置在腔室內的機器人和機器人的設置方法及製造裝置。 According to one aspect of the embodiment of the present invention, it is possible to provide a mounting method and a manufacturing apparatus for a robot and a robot which are easy to install a robot in a chamber.
以下，參照圖面對本申請所開示之機器人、機器人之設置方法及製造裝置的實施形態進行詳細說明。另，本發明並不限定於以下所示之實施形態。 Hereinafter, embodiments of the robot, the robot installation method, and the manufacturing apparatus disclosed in the present application will be described in detail with reference to the drawings. Further, the present invention is not limited to the embodiments described below.
首先，使用第1圖針對本實施形態相關之機器人的構成進行說明。第1圖為本發明實施形態相關的機器人模式性透視圖。 First, the configuration of the robot according to the present embodiment will be described using FIG. Fig. 1 is a schematic perspective view of a robot according to an embodiment of the present invention.
如第1圖所示，機器人1，是構成為具備又水平方向伸縮之2個伸縮手臂的水平多關節機器人。具體而言，機 器人1具備胴體部10和手臂單元20。 As shown in Fig. 1, the robot 1 is a horizontal articulated robot configured to have two telescopic arms that are stretched in the horizontal direction. Specifically, the machine The person 1 is provided with a body portion 10 and an arm unit 20.
胴體部10，是要設置在手臂單元20下部的單元。該胴體部10，在其筒狀的筐體11內具備昇降裝置，利用該昇降裝置使手臂單元20沿著垂直方向昇降。針對昇降裝置的構成是使用第3圖進行說明。 The body portion 10 is a unit to be disposed at the lower portion of the arm unit 20. The body portion 10 is provided with a lifting device in the cylindrical casing 11, and the arm unit 20 is raised and lowered in the vertical direction by the lifting device. The configuration of the lifting device will be described using FIG.
於筐體11的上部，是形成有凸緣部12。該凸緣部12由形成在真空室之開口部的緣部支撐著，藉此使機器人1成為設置在真空室內的狀態。關於該機器人設置在真空室內的狀態是使用第2圖進行說明。 A flange portion 12 is formed on the upper portion of the casing 11. The flange portion 12 is supported by an edge portion formed in the opening portion of the vacuum chamber, whereby the robot 1 is placed in a vacuum chamber. The state in which the robot is installed in the vacuum chamber will be described using FIG. 2 .
手臂單元20，是要透過昇降凸緣15形成為和胴體部10連結的單元。具體而言，手臂單元20，具備固定底座部21、第1手臂部22、第2手臂部23、活動底座部24及輔助手臂部25。另，於本實施形態中，固定底座部21、第1手臂部22、第2手臂部23及活動底座部24，是分別對應為第1構件、第2構件、第3構件及第4構件。 The arm unit 20 is a unit to be connected to the body portion 10 via the lifting flange 15. Specifically, the arm unit 20 includes a fixed base portion 21, a first arm portion 22, a second arm portion 23, a movable base portion 24, and an auxiliary arm portion 25. Further, in the present embodiment, the fixed base portion 21, the first arm portion 22, the second arm portion 23, and the movable base portion 24 correspond to the first member, the second member, the third member, and the fourth member, respectively.
固定底座部21，是可旋轉地支撐在昇降凸緣部15。固定底座部21，具備由馬達及減速機、軸筒等構成的旋繞裝置，利用該旋繞裝置形成旋轉。針對該旋繞裝置的構成是使用第3圖進行說明。 The fixed base portion 21 is rotatably supported by the lift flange portion 15. The fixed base portion 21 includes a winding device including a motor, a reduction gear, a shaft cylinder, and the like, and the rotation device forms a rotation. The configuration of the winding device will be described using FIG.
於固定底座部21的上部，透過減速機連結有第1手臂部22的基端部形成為可旋轉。此外，於第1手臂部22的前端上部，透過減速機連結連有第2手臂部23的基端部形成為可旋轉。 The base end portion of the first arm portion 22 that is coupled to the upper portion of the fixed base portion 21 via the speed reducer is rotatably formed. Further, the base end portion to which the second arm portion 23 is connected is connected to the upper portion of the distal end of the first arm portion 22 so as to be rotatable.
接著，於第2手臂部23的前端部，連結有活動底座 部24形成為可旋轉。該活動底座部24，是於其上部具備有要保持工件用的端部操作裝置24a，可隨著第1手臂部22及第2手臂部23的旋轉動作形成移動。 Next, a movable base is connected to the front end portion of the second arm portion 23 The portion 24 is formed to be rotatable. The movable base portion 24 is provided with an end portion operation device 24a for holding a workpiece on the upper portion thereof, and is movable in accordance with the rotation operation of the first arm portion 22 and the second arm portion 23.
機器人1，是利用1個馬達使設置在第1手臂部22之基端部的減速機及設置在第1手臂部22之前端部的減速機同步動作，藉此使端部操作裝置24a直線移動。 In the robot 1, the speed reducer provided at the base end portion of the first arm portion 22 and the speed reducer provided at the front end portion of the first arm portion 22 are simultaneously operated by one motor, thereby linearly moving the end operating device 24a. .
具體而言，機器人1，是以第2手臂部23對第1手臂部22的旋轉量為第1手臂部22對固定底座部21之旋轉量的2倍來使第1手臂部22及第2手臂部23旋轉。例如：機器人1，是以第1手臂部22對固定底座部21旋轉α度時，就會以第2手臂部23對第1手臂部22旋轉2 α度來使第1手臂部22及第2手臂部23旋轉。如此一來，端部操作裝置24a就會直線移動。 Specifically, the robot 1 is such that the first arm portion 22 and the second arm portion 22 are twice the amount of rotation of the first arm portion 22 to the fixed base portion 21 by the amount of rotation of the second arm portion 23 with respect to the first arm portion 22. The arm portion 23 rotates. For example, when the first arm portion 22 is rotated by a degree to the fixed base portion 21, the second arm portion 23 rotates the first arm portion 22 by 2 degrees to cause the first arm portion 22 and the second arm portion 22 to rotate. The arm portion 23 rotates. As a result, the end operating device 24a moves linearly.
另，從真空室內之污染防止等的觀點來看時，減速機及馬達等驅動裝置，是收納在保持成大氣壓之第1手臂部22的內部。如此一來，即使機器人1設置在減壓環境下時，還是能夠防止潤滑劑等潤滑油乾燥，除此之外又可防止揚塵造成的真空室內污染。 In addition, from the viewpoint of prevention of contamination in the vacuum chamber, etc., the driving device such as the reducer and the motor is housed inside the first arm portion 22 that is maintained at atmospheric pressure. In this way, even when the robot 1 is installed in a reduced pressure environment, it is possible to prevent the lubricating oil such as a lubricant from drying, and in addition to preventing contamination in the vacuum chamber caused by the dust.
輔助手臂部25，是一種連桿機構其連動於第1手臂部22及第2手臂部23的旋轉動作使移動中的端部操作裝置24a經常朝向一定的方向藉此限制活動底座部24的旋轉。 The auxiliary arm portion 25 is a link mechanism that rotates in conjunction with the rotation of the first arm portion 22 and the second arm portion 23, so that the moving end operation device 24a constantly restricts the rotation of the movable base portion 24 in a certain direction. .
具體而言，輔助手臂部25具備第1連桿部25a、中間連桿部25b及第2連桿部25c。 Specifically, the auxiliary arm portion 25 includes a first link portion 25a, an intermediate link portion 25b, and a second link portion 25c.
第1連桿部25a，其基端部可旋轉地連結在固定底座 部21，於前端部形成為和中間連桿部25b的前端部連結成可旋轉。此外，中間連桿部25b，其基端部軸支撐在第1手臂部22和第2手臂部23之連結軸的同軸上，其前端部和第1連桿部25a的前端部連結成可旋轉。 The first link portion 25a has a base end portion rotatably coupled to the fixed base The distal end portion 21 is formed to be rotatable in connection with the distal end portion of the intermediate link portion 25b. Further, the intermediate link portion 25b has a base end portion that is axially supported by the coupling shaft of the first arm portion 22 and the second arm portion 23, and the distal end portion and the distal end portion of the first link portion 25a are coupled to be rotatable. .
第2連桿部25c，於基端部形成為和中間連桿部25b連結成可旋轉，於前端部形成為和活動底座部24的基端部連結成可旋轉。此外，活動底座部24，於前端部形成為和第2手臂部23的前端部連結成可旋轉，於基端部形成為和第2連桿部25c連結成可旋轉。 The second link portion 25c is formed to be rotatable with the intermediate link portion 25b at the proximal end portion, and is formed to be rotatable with the proximal end portion of the movable base portion 24 at the distal end portion. Further, the movable base portion 24 is formed to be rotatable with the distal end portion of the second arm portion 23 at the distal end portion, and is coupled to the second link portion 25c so as to be rotatable at the proximal end portion.
第1連桿部25a，是和固定底座部21、第1手臂部22及中間連桿部25b一起形成第1平行連桿機構。即，當第1手臂部22以基端部為中心進行旋轉時，第1連桿部25a及中間連桿部25b就會分別與第1手臂部22及固定底座部21保持平行狀態的同時進行旋轉。 The first link portion 25a forms a first parallel link mechanism together with the fixed base portion 21, the first arm portion 22, and the intermediate link portion 25b. In other words, when the first arm portion 22 rotates around the base end portion, the first link portion 25a and the intermediate link portion 25b are simultaneously held in parallel with the first arm portion 22 and the fixed base portion 21, respectively. Rotate.
此外，第2連桿部25c，是和第2手臂部23、活動底座部24及中間連桿部25b一起形成第2平行連桿機構。即，當第2手臂部23以基端部為中心進行旋轉時，第2連桿部25c及活動底座部24就會分別與第2手臂部23及中間連桿部25b保持平行狀態的同時進行旋轉。 Further, the second link portion 25c forms a second parallel link mechanism together with the second arm portion 23, the movable base portion 24, and the intermediate link portion 25b. In other words, when the second arm portion 23 is rotated about the proximal end portion, the second link portion 25c and the movable base portion 24 are simultaneously held in parallel with the second arm portion 23 and the intermediate link portion 25b. Rotate.
中間連桿部25b，是由第1平行連桿機構使其和固定底座部21保持平行狀態的同時進行旋轉。因此，第2平行連桿機構的活動底座部24也是和固定底座部21保持平行狀態的同時進行旋轉。其結果，安裝在活動底座部24之上部的端部操作裝置24a，就會和固定底座部21保持平 行狀態的同時進行直線移動。 The intermediate link portion 25b is rotated while being held in parallel with the fixed base portion 21 by the first parallel link mechanism. Therefore, the movable base portion 24 of the second parallel link mechanism is also rotated while being held in parallel with the fixed base portion 21. As a result, the end operating device 24a attached to the upper portion of the movable base portion 24 is kept flat with the fixed base portion 21. The line moves while moving in a straight line.
如上述，機器人1，是利用2個平行連桿機構即第1平行連桿機構和第2平行連桿機構使端部操作裝置24a的朝向保持成一定。因此，其與例如在第2手臂部內設有皮帶輪及傳動皮帶，利用該等皮帶輪及傳動皮帶使端部操作裝置的朝向維持成一定方向的形態相比，是能夠抑制皮帶輪及傳動皮帶造成的揚塵。 As described above, the robot 1 maintains the orientation of the end operating device 24a constant by using the two parallel link mechanisms, that is, the first parallel link mechanism and the second parallel link mechanism. Therefore, for example, a pulley and a transmission belt are provided in the second arm portion, and the direction in which the end operation device is maintained in a constant direction by the pulleys and the transmission belt can suppress the pulley and the transmission belt. Dust.
另外，由於輔助手臂部25能夠提高手臂全體的剛性，因此就能夠降低端部操作裝置24a動作時的振動。基於此，與利用皮帶輪及傳動皮帶使端部操作裝置的朝向維持成一定方向的形態相比，又可抑制端部操作裝置24a動作時之振動造成的揚塵。 Further, since the auxiliary arm portion 25 can increase the rigidity of the entire arm, it is possible to reduce the vibration at the time of the operation of the end operating device 24a. Based on this, it is possible to suppress the dust generated by the vibration of the end operating device 24a when the end operating device 24a is maintained in a fixed direction by the pulley and the transmission belt.
此外，本實施形態相關的機器人1，具備有由第1手臂部22、第2手臂部23、活動底座部24及輔助手臂部25所構成的伸縮手臂二組。因此，機器人1，就能夠例如使用一方的伸縮手臂從某搬運位置取出工件的同時，使用另一方伸縮手臂將新的工件搬入至該搬運位置等同時平行進行2個作業。 Further, the robot 1 according to the present embodiment includes two sets of telescopic arms including the first arm portion 22, the second arm portion 23, the movable base portion 24, and the auxiliary arm portion 25. Therefore, the robot 1 can perform two operations in parallel while taking out a workpiece from a certain conveyance position by using one of the telescopic arms, and moving the new workpiece to the conveyance position using the other telescopic arm.
其次，在對具備有本實施形態相關之機器人1及真空室的製造裝置進行了說明以後，就針對對接凸緣周邊的構成及機器人1要設置在真空室內的設置方法進行具體性說明。 Next, after describing the manufacturing apparatus including the robot 1 and the vacuum chamber according to the present embodiment, a configuration of the periphery of the butt flange and a method of installing the robot 1 in the vacuum chamber will be specifically described.
第2圖為表示製造裝置之構成的模式性側面圖。如第2圖所示，製造裝置100具備有機器人1和機器人1收容 用的真空室30。 Fig. 2 is a schematic side view showing the configuration of a manufacturing apparatus. As shown in FIG. 2, the manufacturing apparatus 100 is equipped with the robot 1 and the robot 1 Vacuum chamber 30 used.
機器人1，其形成在胴體部10的凸緣部12是隔著密封構件固定在真空室30底部形成之開口部31的緣部。如此一來，真空室30就成為密閉狀態，由真空泵浦等減壓裝置使內部保持成減壓狀態。另，胴體部10的筐體11，是從真空室30的下部突出形成為位於真空室30支撐用之支撐部35內的空間。 The robot 1 is formed at an edge portion of the flange portion 12 of the trunk portion 10 that is fixed to the opening portion 31 formed at the bottom of the vacuum chamber 30 via a sealing member. As a result, the vacuum chamber 30 is in a sealed state, and the inside of the vacuum chamber 30 is maintained in a reduced pressure state by a pressure reducing device such as a vacuum pump. Further, the casing 11 of the trunk portion 10 is a space that protrudes from the lower portion of the vacuum chamber 30 so as to be located in the support portion 35 for supporting the vacuum chamber 30.
機器人1在上述真空室30內進行工件的搬運作業。例如，機器人1是使用第1手臂部22及第2手臂部23使端部操作裝置24a直線移動，透過未圖示的閘閥從與真空室30連結的其他真空室取出工件。 The robot 1 performs a workpiece conveyance operation in the vacuum chamber 30 described above. For example, the robot 1 linearly moves the end operating device 24a using the first arm portion 22 and the second arm portion 23, and takes out the workpiece from another vacuum chamber connected to the vacuum chamber 30 through a gate valve (not shown).
接著，機器人1，是在拉回端部操作裝置24a之後，以旋繞軸O為中心使固定底座部21朝水平方向旋轉，藉此使手臂單元20正對著成為工件搬運目的地之另一真空室。然後，機器人1，使用第1手臂部22及第2手臂部23使端部操作裝置24a直線移動，藉此將工件搬入至成為工件搬運目的地之另一真空室。 Next, after pulling back the end operation device 24a, the robot 1 rotates the fixed base portion 21 in the horizontal direction around the winding axis O, whereby the arm unit 20 faces the other vacuum which becomes the workpiece handling destination. room. Then, the robot 1 linearly moves the end operating device 24a using the first arm portion 22 and the second arm portion 23, thereby carrying the workpiece into another vacuum chamber that becomes a workpiece transfer destination.
真空室30，是配合機器人1的形狀形成。例如第2圖所示，於真空室30，是在底面形。有凹部，在該凹部納入有固定底座部21及昇降凸緣部15等往下方突出之機器人1的部位。如上述，由於真空室30是配合機器人1的形狀形成，因此就可使真空室內的容積為較小，能夠容易維持真空室30的減壓狀態。 The vacuum chamber 30 is formed in accordance with the shape of the robot 1. For example, as shown in Fig. 2, the vacuum chamber 30 is formed in a bottom surface. There is a recessed portion in which the portion of the robot 1 that protrudes downward, such as the fixed base portion 21 and the lift flange portion 15, is incorporated. As described above, since the vacuum chamber 30 is formed in accordance with the shape of the robot 1, the volume in the vacuum chamber can be made small, and the reduced pressure state of the vacuum chamber 30 can be easily maintained.
於真空室30的上部，設有蓋部32可使該真空室30 和外部連通及閉塞該真空室30。機器人1，是從已經拆下蓋部32之真空室30的上方搬入至真空室30內。 In the upper portion of the vacuum chamber 30, a cover portion 32 is provided to allow the vacuum chamber 30 The vacuum chamber 30 is connected to the outside and occluded. The robot 1 is carried into the vacuum chamber 30 from above the vacuum chamber 30 from which the lid portion 32 has been removed.
本實施形態相關的機器人1，其胴體部10和手臂單元20是構成為可於昇降凸緣部15形成分割。 In the robot 1 according to the present embodiment, the trunk portion 10 and the arm unit 20 are configured to be divided into the lift flange portion 15.
具體而言，本實施形態相關的機器人1，其昇降凸緣部15，是由2個凸緣即第1對接凸緣15a和第2對接凸緣15a所構成。第1對接凸緣15a是要固定在胴體部10側的凸緣，第2對接凸緣15b是要固定在手臂單元20側的凸緣。本實施形態相關的機器人1，是構成為使用螺栓等使該等第1對接凸緣15a及第2對接凸緣15b形成為一體性，藉此使胴體部10和手臂單元20成為一體性狀態。 Specifically, in the robot 1 according to the present embodiment, the lift flange portion 15 is composed of two flanges, that is, a first butt flange 15a and a second butt flange 15a. The first butt flange 15a is a flange to be fixed to the side of the trunk portion 10, and the second butt flange 15b is a flange to be fixed to the arm unit 20 side. The robot 1 according to the present embodiment is configured such that the first butt flange 15a and the second butt flange 15b are integrally formed by using a bolt or the like, whereby the body portion 10 and the arm unit 20 are integrated.
接著，本實施形態中，機器人1是在分割成胴體部10和手臂單元20的狀態下搬入至真空室30內。如此一來，就能夠使機器人1容易設置在真空室30內。 Next, in the present embodiment, the robot 1 is carried into the vacuum chamber 30 in a state of being divided into the body portion 10 and the arm unit 20. In this way, the robot 1 can be easily placed in the vacuum chamber 30.
其次，使用第3圖對具備第1對接凸緣15a之胴體部10及具備第2對接凸緣15b之固定底座部21的構成進行說明。第3圖為表示胴體部10及固定底座部21之構成的模式性剖面圖。 Next, the configuration of the trunk portion 10 including the first butt flange 15a and the fixed base portion 21 including the second butt flange 15b will be described with reference to FIG. Fig. 3 is a schematic cross-sectional view showing the configuration of the trunk portion 10 and the fixed base portion 21.
如第3圖所示，胴體部10具備有昇降裝置40。昇降裝置40，是一種利用未圖示之馬達及轉換機構42使軸筒部43往垂直方向移動的裝置。第1對接凸緣15a，是固定在從形成在凸緣部12之開口部121突出的軸筒部43上端部。 As shown in FIG. 3, the body portion 10 is provided with a lifting device 40. The lifting device 40 is a device that moves the shaft portion 43 in the vertical direction by a motor (not shown) and a switching mechanism 42. The first butt flange 15a is fixed to an upper end portion of the shaft portion 43 that protrudes from the opening portion 121 formed in the flange portion 12.
此外，手臂單元20具備有旋繞裝置60。旋繞裝置60 例如是透過皮帶輪64、65及傳動皮帶63對軸筒部62傳達由馬達61a及和減速機61b成一體性的附減速機之馬達61的旋轉，藉此使軸筒部62旋轉。軸筒部62，是透過軸承211支撐在固定底座部21支撐成可旋轉但旋轉方向是固定不變，因此其結果就會造成固定底座部21以軸筒部62的中心軸為旋繞軸O使固定底座部21朝水平方向旋轉。 Further, the arm unit 20 is provided with a winding device 60. Winding device 60 For example, the rotation of the motor 61 of the speed reducer integrated with the motor 61a and the speed reducer 61b is transmitted to the shaft cylinder portion 62 via the pulleys 64 and 65 and the transmission belt 63, whereby the shaft portion 62 is rotated. The shaft portion 62 is supported by the fixed base portion 21 so as to be rotatable through the bearing 211, but the rotation direction is fixed. Therefore, the fixed base portion 21 is caused by the central axis of the shaft portion 62 as the winding axis O. The fixed base portion 21 is rotated in the horizontal direction.
第2對接凸緣15b，是固定在從固定底座部21之下部朝垂直方向突出的軸筒部62前端部。 The second butt flange 15b is fixed to the front end portion of the shaft portion 62 that protrudes in the vertical direction from the lower portion of the fixed base portion 21.
接著，胴體部10及手臂單元20，是經由使用螺栓等固定第1對接凸緣15a及第2對接凸緣15b藉此形成為一體性構成機器人1。 Then, the body portion 10 and the arm unit 20 are integrally formed by fixing the first butting flange 15a and the second butting flange 15b by bolts or the like.
於此，如第3圖所示，在第1對接凸緣15a的上面是設有定位銷151，在第2對接凸緣15b是形成有要和定位銷151卡合的卡合孔153。手臂單元20是藉由定位銷151和卡合孔153為卡合狀態固定第1對接凸緣15a和第2對接凸緣15b，使其連結在胴體部10的適當位置。 Here, as shown in FIG. 3, the positioning pin 151 is provided on the upper surface of the first butting flange 15a, and the engaging hole 153 to be engaged with the positioning pin 151 is formed in the second butting flange 15b. In the arm unit 20, the first butting flange 15a and the second butting flange 15b are fixed by the positioning pin 151 and the engaging hole 153 in an engaged state, and are coupled to the appropriate position of the body portion 10.
如上述，本實施形態相關的機器人1，其第1單元即胴體部10是在上部具備有延伸在水平方向的第1對接凸緣15a，其第2單元即手臂單元20是在下部具備有延伸在水平方向的第2對接凸緣15b。接著，本實施形態相關的機器人1，是藉由固定第1對接凸緣15a和第2對接凸緣15b使胴體部10和手臂單元20成為連結。因此，就能夠容易進行胴體部10和手臂單元20的連結作業。 As described above, in the robot 1 according to the present embodiment, the first unit, that is, the body portion 10, has the first butting flange 15a extending in the horizontal direction at the upper portion, and the arm unit 20, which is the second unit, has an extension at the lower portion. The second butt flange 15b in the horizontal direction. Next, in the robot 1 according to the present embodiment, the body portion 10 and the arm unit 20 are coupled by fixing the first butting flange 15a and the second butting flange 15b. Therefore, the connection work of the trunk portion 10 and the arm unit 20 can be easily performed.
此外，本實施形態相關的機器人1，是在第1對接凸緣15a設有定位用的凸部即定位銷151，在第2對接凸緣15b形成有要和該定位銷151卡合的卡合孔153。因此，就能夠使手臂單元20以正確位置連結在胴體部10。 Further, in the robot 1 according to the present embodiment, the first butting flange 15a is provided with a positioning pin 151 which is a convex portion for positioning, and the second butting flange 15b is formed with a coupling to be engaged with the positioning pin 151. Hole 153. Therefore, the arm unit 20 can be coupled to the body portion 10 at the correct position.
另，於此，是在在第1對接凸緣15a設有定位用的凸部即定位銷151，在第2對接凸緣15b形成有要和該定位銷151卡合的卡合孔153，但也可構成為是在第1對接凸緣15a形成有插通孔，在第2對接凸緣15b設有定位銷。此外，於此，是使用定位銷151及卡合孔153對定位用的凸部及定位用的凹部其一例進行了說明，但定位用的凸部及定位用的凹部並不限於銷及插通孔。 In addition, the first butting flange 15a is provided with a positioning pin 151 which is a convex portion for positioning, and the second butting flange 15b is formed with an engaging hole 153 to be engaged with the positioning pin 151. The first butt flange 15a may be formed with an insertion hole, and the second butt flange 15b may be provided with a positioning pin. In addition, although the positioning pin 151 and the engaging hole 153 have been described with respect to the positioning convex portion and the positioning concave portion, the positioning convex portion and the positioning concave portion are not limited to the pin and the insertion. hole.
另外，於此，是針對旋繞裝置60具備有附減速機之馬達61時的例子進行了說明，但馬達和減速機也可不必為一體性。 Further, although the example in which the winding device 60 is provided with the motor 61 with the speed reducer has been described here, the motor and the speed reducer are not necessarily integral.
接著，針對旋繞裝置60及昇降裝置40之具體性構成進行說明。如第3圖所示，於旋繞裝置60的軸筒部62，是沿著旋繞軸O形成有從軸筒部62的上端貫通至下端的貫通孔622，於第2對接凸緣15b也形成有同樣的貫通孔154。接著，於該等貫通孔622、154，是插通有手臂單元20的配線300。該配線300，是從軸筒部62的上方通過貫通孔622、154形成為從固定底座部21之下部垂下的狀態。 Next, the specific configuration of the winding device 60 and the lifting device 40 will be described. As shown in Fig. 3, in the cylindrical portion 62 of the winding device 60, a through hole 622 is formed along the winding axis O so as to penetrate from the upper end to the lower end of the cylindrical portion 62, and the second butted flange 15b is also formed. The same through hole 154. Next, the through holes 622 and 154 are the wirings 300 through which the arm unit 20 is inserted. The wiring 300 is formed in a state of being suspended from the lower portion of the fixed base portion 21 through the through holes 622 and 154 from above the shaft tube portion 62.
昇降裝置40，具備有轉換機構42、軸筒部43及線性導件44。轉換機構42，是要將未圖示之馬達的旋轉運動 轉換成直線運動的機構部。具體而言，轉換機構42，具備有滾珠螺桿421及滾珠螺帽422。滾珠螺桿421是透過軸承112以可旋轉的狀態支撐在筐體11；滾珠螺帽422是貫通安裝在滾珠螺桿421。 The lifting device 40 includes a conversion mechanism 42, a barrel portion 43, and a linear guide 44. The switching mechanism 42 is to rotate the motor (not shown) A mechanism that converts into a linear motion. Specifically, the conversion mechanism 42 includes a ball screw 421 and a ball nut 422. The ball screw 421 is rotatably supported by the housing 11 through the bearing 112; the ball nut 422 is inserted through the ball screw 421.
軸筒部43，是沿著垂直方向延伸的筒狀構件。於該軸筒部43的筒內，是配設有轉換機構42，轉換機構42的滾珠螺帽422是固定在軸筒部43的內圍面。此外，軸筒部43，是於其外圍面固定在線性導件44。 The barrel portion 43 is a cylindrical member that extends in the vertical direction. A conversion mechanism 42 is disposed in the cylinder of the cylindrical portion 43, and the ball nut 422 of the conversion mechanism 42 is fixed to the inner circumferential surface of the shaft portion 43. Further, the barrel portion 43 is fixed to the linear guide 44 at its outer peripheral surface.
當使未圖示的馬達動作時，馬達的旋轉會經由未圖示的傳動皮帶及皮帶輪傳達至轉換機構42的滾珠螺桿421。接著，由滾珠螺桿421及滾珠螺帽422將該馬達的旋轉運動轉換成直線運動，使固定在滾珠螺帽422的軸筒部43沿著線性導件44昇降。 When a motor (not shown) is operated, the rotation of the motor is transmitted to the ball screw 421 of the conversion mechanism 42 via a transmission belt and a pulley (not shown). Next, the rotational motion of the motor is converted into a linear motion by the ball screw 421 and the ball nut 422, and the cylindrical portion 43 fixed to the ball nut 422 is moved up and down along the linear guide 44.
於第1對接凸緣15a，形成有沿著旋繞軸O形成的貫通孔152，經由該貫通孔152使手臂單元20的配線300插入在軸筒部43內。插入在軸筒部43內的配線300是從形成在軸筒部43下部的缺口部431拉出至軸筒部43外，然後連接在軸筒部43外設置的連接板。 A through hole 152 formed along the winding axis O is formed in the first butting flange 15a, and the wiring 300 of the arm unit 20 is inserted into the barrel portion 43 through the through hole 152. The wire 300 inserted into the barrel portion 43 is pulled out from the notch portion 431 formed at the lower portion of the barrel portion 43 to the outside of the barrel portion 43, and then connected to the connecting plate provided outside the barrel portion 43.
於此，轉換機構42，是以靠向軸筒部43內圍面的狀態形成配設。具體而言，轉換機構42，是以滾珠螺桿421之中心軸錯開軸筒部43之中心軸(即旋繞軸O)的狀態形成配設。如此一來，於轉換機構42和軸筒部43的內圍面之間就會形成有配線300的配線空間S。 Here, the conversion mechanism 42 is disposed to be disposed in a state of being in the inner surface of the cylindrical portion 43. Specifically, the conversion mechanism 42 is disposed in a state in which the central axis of the ball screw 421 is shifted from the central axis of the axial cylindrical portion 43 (that is, the winding axis O). As a result, the wiring space S of the wiring 300 is formed between the conversion mechanism 42 and the inner peripheral surface of the shaft portion 43.
接著，於軸筒部43，設有要引導從上方插入之配線 300至配線空間S的引導體450。引導體450，是一種於配線空間S和轉換機構42之間設置成為要覆蓋滾珠螺桿421之上部及側面的構件，形成有傾斜朝向配線空間S。 Next, the shaft portion 43 is provided with wiring for guiding the insertion from above. 300 to the guiding body 450 of the wiring space S. The guide body 450 is a member that is provided between the wiring space S and the conversion mechanism 42 so as to cover the upper portion and the side surface of the ball screw 421, and is formed to be inclined toward the wiring space S.
如上述，在軸筒部43的筒內設有引導體450，是可使配線300不會受到滾珠螺桿421及滾珠螺帽422的阻礙，能夠容易導入至配線空間S。此外，還能夠防止配線300和轉換機構42於機器人1的動作中彼此接觸。 As described above, the guide body 450 is provided in the cylinder of the cylindrical portion 43 so that the wiring 300 can be prevented from being impeded by the ball screw 421 and the ball nut 422, and can be easily introduced into the wiring space S. Further, it is also possible to prevent the wiring 300 and the switching mechanism 42 from coming into contact with each other in the operation of the robot 1.
其次，針對機器人1要設置在真空室30內的設置方法進行說明。首先，使用第4圖對真空室30上方之搬入空間的高度尺寸和機器人1的高度尺寸之比較進行說明。第4圖為真空室30上方之搬入空間的高度尺寸和機器人1的高度尺寸之比較圖。另，如第4圖所示，機器人1搬入作業，是在真空室30上部的蓋部32(參照第2圖)為拆下的狀態下進行。 Next, a description will be given of a setting method in which the robot 1 is to be placed in the vacuum chamber 30. First, a comparison between the height dimension of the loading space above the vacuum chamber 30 and the height dimension of the robot 1 will be described using FIG. Fig. 4 is a comparison diagram of the height dimension of the loading space above the vacuum chamber 30 and the height dimension of the robot 1. In addition, as shown in FIG. 4, the robot 1 carries out the work in a state in which the lid portion 32 (see FIG. 2) on the upper portion of the vacuum chamber 30 is removed.
機器人1，例如是使用高架起重機700從真空室30的上方搬入至真空室30內。高架起重機700，是一種利用吊掛鉤701將對象物吊起至指定高度接著沿著設置在天花板750的運輸線道751行駛後將所吊起的對象物降下至指定位置的吊車裝置。 The robot 1 is carried into the vacuum chamber 30 from above the vacuum chamber 30 by using the overhead crane 700, for example. The overhead crane 700 is a crane device that uses the hook 701 to lift an object to a predetermined height and then travels down the transport lane 751 provided on the ceiling 750 to lower the suspended object to a designated position.
要利用高架起重機700將所吊起的對象物搬入至真空室30內時，對象物的高度尺度需要比真空室30上方之搬入空間的高度尺寸X還小。於此，所謂搬入空間，是指位於真空室30之上方的機器人1要搬入至真空室30內時所需要的空間，具體而言，是指被吊起至最高位置之吊掛鉤 701的下部至真空室30之上端部為止的空間。 When the object to be lifted is carried into the vacuum chamber 30 by the overhead crane 700, the height dimension of the object needs to be smaller than the height dimension X of the loading space above the vacuum chamber 30. Here, the "loading space" refers to a space required when the robot 1 located above the vacuum chamber 30 is to be carried into the vacuum chamber 30, specifically, a hook that is lifted to the highest position. The space from the lower portion of 701 to the upper end of the vacuum chamber 30.
本實施形態相關之機器人1的高度尺寸H，是比該搬入空間的高度尺寸X還大。於該形態時，即使要利用高架起重機700使機器人1移動至搬入空間，但是因為機器人1會碰到真空室30的側壁，所以就難以使機器人1移動至搬入空間。 The height dimension H of the robot 1 according to the present embodiment is larger than the height dimension X of the carry-in space. In this form, even if the robot 1 is moved to the loading space by the overhead crane 700, since the robot 1 hits the side wall of the vacuum chamber 30, it is difficult to move the robot 1 to the loading space.
於是，本實施形態相關的機器人1，是將機器人1構成為可分割成胴體部10和手臂單元20，藉此可分別將胴體部10和手臂單元20搬入至真空室30。 Then, in the robot 1 according to the present embodiment, the robot 1 is configured to be divided into the body portion 10 and the arm unit 20, whereby the body portion 10 and the arm unit 20 can be carried into the vacuum chamber 30, respectively.
以下，使用第5A圖及第5B圖對本實施形態相關之機器人1要設置在真空室30內的設置方法進行說明。第5A圖為表示胴體部10要設置在真空室30內的設置方法說明圖，第5B圖為表示手臂單元20要設置在真空室30內的設置方法說明圖。 Hereinafter, a method of installing the robot 1 according to the present embodiment in the vacuum chamber 30 will be described with reference to FIGS. 5A and 5B. Fig. 5A is an explanatory view showing a setting method of the body portion 10 to be placed in the vacuum chamber 30, and Fig. 5B is an explanatory view showing a setting method of the arm unit 20 to be placed in the vacuum chamber 30.
如第5A圖所示，作業員等利用高架起重機700進行胴體部10要設置在真空室30內的設置作業。首先，作業員等是將具備有吊環810的懸吊用具800安裝在胴體部10之後，就將高架起重機700的吊掛鉤701鉤住懸吊用具800的吊環810藉此吊起胴體部10。 As shown in FIG. 5A, the worker or the like performs the installation work of the trunk portion 10 to be installed in the vacuum chamber 30 by the overhead crane 700. First, after the operator or the like attaches the hanging tool 800 including the hoisting ring 810 to the trunk portion 10, the hook 701 of the overhead crane 700 is hooked to the hoisting ring 810 of the hoisting tool 800 to hoist the trunk portion 10.
其次，作業員等使高架起重機700沿著運輸線道751行駛，藉此使胴體部10移動至真空室30上方的搬入空間。於此，如第5A圖所示，包括懸吊用具800之胴體部10的高度尺寸h1，是比搬入空間的高度尺寸X還小。因此，胴體部10就不會碰到真空室30能夠移動至搬入空 間。 Next, the worker or the like causes the overhead crane 700 to travel along the transportation lane 751, thereby moving the trunk portion 10 to the loading space above the vacuum chamber 30. Here, as shown in FIG. 5A, the height dimension h1 of the trunk portion 10 including the suspension tool 800 is smaller than the height dimension X of the loading space. Therefore, the body portion 10 does not hit the vacuum chamber 30 and can move to the empty space. between.
接著，作業員等操作高架起重機700將胴體部10的筐體11通過真空室30的開口部31使胴體部10載置在真空室30內。如此一來，胴體部10就會成為其凸緣部12支撐在真空室30之開口部31緣部的狀態。 Next, the operator or the like operates the overhead crane 700 to place the casing 11 of the trunk portion 10 through the opening portion 31 of the vacuum chamber 30 to place the trunk portion 10 in the vacuum chamber 30. As a result, the body portion 10 is in a state in which the flange portion 12 is supported by the edge portion of the opening portion 31 of the vacuum chamber 30.
然後，作業員等使用螺栓等將胴體部10的凸緣部12和開口部31的緣部加以固定。如此一來就完成胴體部10要設置在真空室30內的設置作業。另，於設置在真空室30內的胴體部10，是安裝有手臂單元20定位用的引導構件，但關於該部份的說明，將使用第6圖進行說明。 Then, the operator or the like fixes the flange portion 12 of the trunk portion 10 and the edge portion of the opening portion 31 with a bolt or the like. In this way, the setting operation of the body portion 10 to be disposed in the vacuum chamber 30 is completed. Further, the body portion 10 provided in the vacuum chamber 30 is a guide member for positioning the arm unit 20, but the description of the portion will be described using FIG.
當胴體部10設置在真空室30內的設置作業完成時，作業員等就會進行如第5B圖所示之手臂單元20要設置在真空室30內的設置作業。首先，作業員等將具備有吊環610的懸吊用具600安裝在手臂單元20之後，就將高架起重機700的吊掛鉤701鉤住懸吊用具600的吊環610藉此吊起胴體部10。此時，手臂單元20的配線300，是成為從手臂單元20之下部垂下的狀態。 When the installation work of the trunk portion 10 in the vacuum chamber 30 is completed, the worker or the like performs the installation work of the arm unit 20 to be placed in the vacuum chamber 30 as shown in Fig. 5B. First, after the operator or the like attaches the hanging tool 600 including the lifting eye 610 to the arm unit 20, the hanging hook 701 of the overhead crane 700 is hooked to the lifting ring 610 of the hanging tool 600 to lift the body portion 10. At this time, the wiring 300 of the arm unit 20 is in a state of being suspended from the lower portion of the arm unit 20.
作業員等使高架起重機700沿著運輸線道751行駛，藉此使手臂單元20移動至真空室30上方的搬入空間。於此，如第5B圖所示，包括懸吊用具600之手臂單元20的高度尺寸h2，是比搬入空間的高度尺寸X還小。因此，手臂單元20就不會碰到真空室30能夠移動至搬入空間。 The worker or the like causes the overhead crane 700 to travel along the transportation lane 751, thereby moving the arm unit 20 to the loading space above the vacuum chamber 30. Here, as shown in FIG. 5B, the height dimension h2 of the arm unit 20 including the suspension tool 600 is smaller than the height dimension X of the carry-in space. Therefore, the arm unit 20 does not hit the vacuum chamber 30 and can move to the carry-in space.
接著，作業員等操作高架起重機700將手臂單元20朝設置在真空室30內的胴體部10降下。如此一來，從手 臂單元20之下部垂下的配線300就會插入在胴體部10所具備之昇降裝置40的軸筒部43內(參照第3圖)。如上述，於軸筒部43內，在配線300的配線空間S和轉換機構42之間設有引導體450。因此，作業員等就能夠在不受到轉換機構42阻礙的狀態下使配線300通過配線空間S。另，通過至配線空間S的配線300是從缺口部431拉出至軸筒部43外，連接在連接板。 Next, the operator or the like operates the overhead crane 700 to lower the arm unit 20 toward the trunk portion 10 provided in the vacuum chamber 30. So, from the hand The wiring 300 hanging down the lower portion of the arm unit 20 is inserted into the cylindrical portion 43 of the lifting device 40 provided in the trunk portion 10 (see Fig. 3). As described above, in the barrel portion 43, a guide body 450 is provided between the wiring space S of the wiring 300 and the switching mechanism 42. Therefore, the worker or the like can pass the wiring 300 through the wiring space S without being hindered by the switching mechanism 42. Further, the wiring 300 that has passed through the wiring space S is pulled out from the notch portion 431 to the outside of the barrel portion 43, and is connected to the connecting plate.
其次，作業員等更加下降手臂單元20，使設置在手臂單元20下部的第2對接凸緣15b靠近設置在胴體部10上部的第1對接凸緣15a。 Next, the operator or the like lowers the arm unit 20, and the second butt flange 15b provided at the lower portion of the arm unit 20 is brought close to the first butt flange 15a provided on the upper portion of the body portion 10.
於此，在手臂單元20的懸吊用具600，是形成有與設置在胴體部10之引導構件成對的定位用標記，作業員等利用該等引導構件及定位用標記進行手臂單元20的大致定位作業。第6圖為表示手臂單元20要大致定位在胴體部10時的定位方法說明圖。 Here, in the suspension tool 600 of the arm unit 20, a positioning mark paired with the guide member provided in the body portion 10 is formed, and the worker or the like performs the arm unit 20 by using the guide member and the positioning mark. Position the job. Fig. 6 is an explanatory view showing a positioning method when the arm unit 20 is to be positioned substantially at the body portion 10.
如第6圖所示，於胴體部10之凸緣12部上的指定位置，是安裝有圓柱狀的引導構件125、126。此外，於手臂單元20的懸吊用具600，是以引導構件125、126間之間隔相等的間隔形成有貫通孔602a、603a做為定位用標記。 As shown in Fig. 6, at a predetermined position on the flange portion 12 of the body portion 10, cylindrical guide members 125, 126 are attached. Further, in the suspension tool 600 of the arm unit 20, through holes 602a and 603a are formed as positioning marks at equal intervals between the guide members 125 and 126.
作業員等是以該等引導構件125、126及貫通孔602a、603a為標記進行手臂單元20的定位作業。具體而言，當作業員等從上方看到貫通孔602a、603a時，是會以可使引導構件125、126分別納入貫通孔602a、603a的 狀態一邊調整手臂單元20的位置，一邊使手臂單元20朝胴體部10降下。 The operator or the like performs positioning work of the arm unit 20 with the guide members 125 and 126 and the through holes 602a and 603a as marks. Specifically, when the worker or the like sees the through holes 602a and 603a from above, the guide members 125 and 126 can be respectively incorporated into the through holes 602a and 603a. While the position of the arm unit 20 is adjusted, the arm unit 20 is lowered toward the body portion 10.
如上述，本實施形態中，針對胴體部10的凸緣部12是設有可裝拆的定位用引導構件125、126，針對懸吊用具600是形成有可對應引導構件125、126的貫通孔602a、603a。接著，本實施形態中，是利用該等引導構件125、126及貫通孔602a、603a進行手臂單元20在胴體部10的定位。因此，作業員等，在將手臂單元20朝胴體部10下降的同時，能夠容易掌握手臂單元20要安裝在胴體部10時的大致安裝位置。 As described above, in the present embodiment, the flange portion 12 of the trunk portion 10 is provided with detachable positioning guide members 125 and 126, and the suspension tool 600 is formed with through holes that can correspond to the guide members 125 and 126. 602a, 603a. Next, in the present embodiment, the positioning of the arm unit 20 in the trunk portion 10 is performed by the guide members 125 and 126 and the through holes 602a and 603a. Therefore, the worker or the like can easily grasp the approximate mounting position when the arm unit 20 is to be attached to the body portion 10 while lowering the arm unit 20 toward the body portion 10.
此外，如上述，於胴體部10的第1對接凸緣15a，是設有定位用的凸部即定位銷151，於手臂單元20的第2對接凸緣15b，是形成有要和定位銷151卡合的卡合孔153。如此一來，作業員等就能夠使第2對接凸緣15b正確設置在第1對接凸緣15a。 Further, as described above, the first butting flange 15a of the body portion 10 is provided with a positioning pin 151 which is a convex portion for positioning, and the second butting flange 15b of the arm unit 20 is formed with the positioning pin 151. Engagement engagement hole 153. In this way, the operator or the like can correctly set the second butting flange 15b to the first butting flange 15a.
在第1對接凸緣15a上載置第2凸緣15b之後，作業員等就會以螺栓等使第1對接凸緣15a和第2對接凸緣15b固定。如此一來，胴體部10和手臂單元20就會成一體性構成機器人1。 After the second flange 15b is placed on the first butting flange 15a, the operator or the like fixes the first butt flange 15a and the second butt flange 15b with a bolt or the like. In this way, the body portion 10 and the arm unit 20 integrally constitute the robot 1.
另，如第6圖所示，手臂單元20的懸吊用具600，具備上側支撐構件601和下側支撐構件602、603及連結軸604~606。作業員等，首先，是將下側支撐構件602、603安裝在固定底座部21的下部。安裝在固定底座部21的下側支撐構件602、603，其一部份是成為從固定底座部21 朝Y軸負方向突出的狀態。於該下側支撐構件602、603從固定底座部21突出的部份，是分別形成有貫通孔602a、603a。 Further, as shown in Fig. 6, the suspension tool 600 of the arm unit 20 includes an upper support member 601, lower support members 602 and 603, and connection shafts 604 to 606. The operator or the like first attaches the lower support members 602 and 603 to the lower portion of the fixed base portion 21. The lower side support members 602, 603 mounted on the fixed base portion 21 are partially formed from the fixed base portion 21 A state that protrudes in the negative direction of the Y-axis. The portions of the lower support members 602 and 603 that protrude from the fixed base portion 21 are formed with through holes 602a and 603a, respectively.
其次，作業員等是將連結軸604、605分別安裝在下側支撐構件602、603，將連結軸606安裝在固定底座部21。接著，作業員等是將上側支撐構件601安裝在連結軸604~606，以螺栓等使該等鎖緊。如此一來，懸吊用具600就會成為安裝在手臂單元20的狀態。 Next, the operator or the like attaches the connecting shafts 604 and 605 to the lower supporting members 602 and 603, respectively, and attaches the connecting shaft 606 to the fixed base portion 21. Next, the operator or the like attaches the upper support member 601 to the connection shafts 604 to 606, and locks them with bolts or the like. As a result, the suspension tool 600 is in a state of being attached to the arm unit 20.
如以上所述，本實施形態中，機器人是構成為可分割的2個單元即胴體部及手臂單元。具體而言，胴體部是構成為從真空室上方搬入至真空室內並且固定在真空室內，手臂單元是構成為連結在已經固定在真空室內的胴體部。因此就能夠容易使機器人設置在真空室內。 As described above, in the present embodiment, the robot is a body unit and an arm unit which are two units that can be divided. Specifically, the body portion is configured to be carried into the vacuum chamber from above the vacuum chamber and fixed in the vacuum chamber, and the arm unit is configured to be coupled to the body portion that has been fixed in the vacuum chamber. Therefore, it is possible to easily set the robot in the vacuum chamber.
此外，本實施形態中，胴體部的高度尺寸及手臂單元的高度尺寸之合計是比真空室上方之搬入空間的高度尺寸還大，但胴體部及手臂單元的各自高度尺寸是比搬入空間的高度尺寸還小。 Further, in the present embodiment, the total height of the body portion and the height of the arm unit are larger than the height of the loading space above the vacuum chamber, but the height of each of the body portion and the arm unit is higher than the height of the carrying space. The size is still small.
因此，例如：即使於機器人及真空室大型化造成難以確保有搬入空間時，藉由機器人的分割構成，就能夠使機器人容易設置在真空室內。 Therefore, for example, even when the size of the robot and the vacuum chamber is increased, it is difficult to secure the loading space, and the robot can be easily installed in the vacuum chamber by the division of the robot.
再加上，本實施形態中，可使手臂單元朝垂直方向昇降的昇降裝置是設置在胴體部，可使伸縮手臂以旋繞軸為中心進行旋轉的旋繞裝置是設置在手臂單元。如此一來，這與胴體部具備有昇降裝置及旋繞裝置之兩個裝置時的形 態相比，是較能夠使胴體部的高度尺寸和手臂單元的高度尺寸構成為均等。 Further, in the present embodiment, the lifting device that can raise and lower the arm unit in the vertical direction is provided in the body portion, and the winding device that can rotate the telescopic arm around the winding axis is provided in the arm unit. In this way, the shape of the body is provided with two devices of the lifting device and the winding device. In comparison with the state, it is possible to make the height dimension of the body portion and the height dimension of the arm unit equal.
因此，這與胴體部的高度尺寸和手臂單元的高度尺寸之差較大的形態相比，當真空室上的搬入空間更小時，還是較能夠使胴體部及手臂單元移動至搬入空間。 Therefore, compared with the aspect in which the difference between the height dimension of the trunk portion and the height dimension of the arm unit is large, when the loading space on the vacuum chamber is smaller, the body portion and the arm unit can be moved to the carrying space.
另，以上所述的實施形態，是針對機器人為工件搬運用的搬運機器人為例子進行了說明，但機器人也可以是工件搬運以外之作業執行用的機器人。此外，以上所述的實施形態，是針對機器人設置在真空室內的例子進行了說明，但機器人所要設置的腔室也可以是真空室以外的腔室。 In the above-described embodiment, the robot is a transport robot for transporting a workpiece. However, the robot may be a robot for performing work other than workpiece transport. Further, although the above-described embodiment has been described with respect to an example in which the robot is installed in the vacuum chamber, the chamber to be provided by the robot may be a chamber other than the vacuum chamber.
此外，以上所述的實施形態，是針對機器人的高度尺寸比搬運空間的高度尺寸還大的例子進行了說明，但機器人的高度尺寸也可以比搬運空間的高度尺寸還小。如上述形態時，機器人也是分割後搬入至真空室內，因此就能夠減少1次搬入動作所要搬入之對象物的重量及大小，能夠使機器人容易搬入至真空室內。 Further, the above-described embodiment has been described with respect to an example in which the height dimension of the robot is larger than the height dimension of the transport space, but the height dimension of the robot may be smaller than the height dimension of the transport space. In the above-described form, the robot is also moved into the vacuum chamber after being divided, so that the weight and size of the object to be carried in the loading operation can be reduced, and the robot can be easily carried into the vacuum chamber.
另外，以上所述的實施形態，是針對使用設置在建築物的高架起重機進行胴體部及手臂單元之搬入作業的例子進行了說明，但胴體部及手臂單元之搬入作業所要使用的起重機也可以是高架起重機以外的吊車裝置。 Further, the above-described embodiment has been described with respect to an example in which a carcass and an arm unit are carried in using an overhead crane installed in a building. However, the crane to be used for carrying in the body and the arm unit may be Crane equipment other than overhead cranes.
其他的效果及變形例，是能夠由該當業者容易導出。因此，本發明其更寬廣範圍的形態，並不限於以上所揭示並且所記述之特定的細部及代表性的實施形態。基於此， 只要不脫離所附之申請專利範圍及其均等物所定義之總括性的發明概念精神及範圍，是可進行各式各樣的變更。 Other effects and modifications can be easily derived by the practitioner. Therefore, the invention in its broader aspects is not limited to the specific details and embodiments disclosed herein. Based on, Various changes can be made without departing from the spirit and scope of the invention as defined by the appended claims.
1‧‧‧機器手臂 1‧‧‧Machine arm
10‧‧‧胴體部 10‧‧‧ Body Department
11‧‧‧筐體 11‧‧‧Shell
12‧‧‧凸緣部 12‧‧‧Flange
125、126‧‧‧引導構件 125, 126‧‧‧ Guided components
15‧‧‧昇降凸緣部 15‧‧‧ lifting flange
15a‧‧‧第1對接凸緣 15a‧‧‧1st butt flange
15b‧‧‧第2對接凸緣 15b‧‧‧2nd butt flange
151‧‧‧定位銷 151‧‧‧Locating pin
152、154‧‧‧貫通孔 152, 154‧‧‧through holes
153‧‧‧卡合孔 153‧‧‧Snap hole
20‧‧‧手臂單元 20‧‧‧arm unit
21‧‧‧固定底座部 21‧‧‧Fixed base
22‧‧‧第1手臂部 22‧‧‧1st arm
23‧‧‧第2手臂部 23‧‧‧2nd arm
24‧‧‧活動底座部 24‧‧‧Active base
25‧‧‧輔助手臂部 25‧‧‧Auxiliary arm
30‧‧‧真空室 30‧‧‧vacuum room
31‧‧‧開口部 31‧‧‧ openings
32‧‧‧蓋部 32‧‧‧ 盖部
40‧‧‧昇降裝置 40‧‧‧ lifting device
42‧‧‧轉換機構 42‧‧‧ Conversion agency
43‧‧‧軸筒部 43‧‧‧ shaft tube
60‧‧‧旋繞裝置 60‧‧‧Rolling device
61‧‧‧附減速機之馬達 61‧‧‧Motor with gearbox
61a‧‧‧馬達 61a‧‧‧Motor
61b‧‧‧減速機 61b‧‧‧Reducer
62‧‧‧軸筒部 62‧‧‧ shaft tube
622‧‧‧貫通孔 622‧‧‧through holes
300‧‧‧配線 300‧‧‧ wiring
450‧‧‧引導體 450‧‧‧Guide
600‧‧‧懸吊用具 600‧‧‧suspension equipment
602a、603a‧‧‧貫通孔 602a, 603a‧‧‧through holes
610‧‧‧吊環 610‧‧‧ rings
700‧‧‧高架式起重機 700‧‧‧Overhead crane
701‧‧‧吊掛鉤 701‧‧‧ Hanging hook
751‧‧‧運輸線道 751‧‧‧Transportation lane
800‧‧‧懸吊用具 800‧‧‧suspension equipment
810‧‧‧吊環 810‧‧‧ rings
第1圖為本發明實施形態相關的機器人模式性透視圖。 Fig. 1 is a schematic perspective view of a robot according to an embodiment of the present invention.
第2圖為表示機器人設置在真空室內的狀態模式性側面圖。 Fig. 2 is a schematic side view showing a state in which the robot is placed in a vacuum chamber.
第3圖為表示胴體部及底座部之構成的模式性剖面圖。 Fig. 3 is a schematic cross-sectional view showing the configuration of a body portion and a base portion.
第4圖為真空室上方之搬入空間的高度尺寸和機器人之高度尺寸的比較圖。 Figure 4 is a comparison of the height dimension of the loading space above the vacuum chamber and the height dimension of the robot.
第5A圖為表示胴體部要設置在真空室內的設置方法說明圖。 Fig. 5A is an explanatory view showing a method of setting the body portion to be placed in the vacuum chamber.
第5B圖為表示手臂單元要設置在真空室內的設置方法說明圖。 Fig. 5B is an explanatory view showing a setting method of the arm unit to be placed in the vacuum chamber.
第6圖為表示手臂單元要大致定位在胴體部時的定位方法說明圖。 Fig. 6 is an explanatory view showing a positioning method when the arm unit is to be substantially positioned at the body portion.
10‧‧‧胴體部 10‧‧‧ Body Department
11‧‧‧筐體 11‧‧‧Shell
112‧‧‧軸承 112‧‧‧ bearing
12‧‧‧凸緣部 12‧‧‧Flange
121‧‧‧開口部 121‧‧‧ openings
15‧‧‧昇降凸緣部 15‧‧‧ lifting flange
15a‧‧‧第1對接凸緣 15a‧‧‧1st butt flange
15b‧‧‧第2對接凸緣 15b‧‧‧2nd butt flange
151‧‧‧定位銷 151‧‧‧Locating pin
152、154‧‧‧貫通孔 152, 154‧‧‧through holes
153‧‧‧卡合孔 153‧‧‧Snap hole
21‧‧‧固定底座部 21‧‧‧Fixed base
211‧‧‧軸承 211‧‧‧ bearing
40‧‧‧昇降裝置 40‧‧‧ lifting device
42‧‧‧轉換機構 42‧‧‧ Conversion agency
421‧‧‧滾珠螺桿 421‧‧‧Rolling screw
422‧‧‧滾珠螺帽 422‧‧‧Ball nuts
43‧‧‧軸筒部 43‧‧‧ shaft tube
431‧‧‧缺口部 431‧‧‧Gap section
44‧‧‧線性導件 44‧‧‧Linear guides
60‧‧‧旋繞裝置 60‧‧‧Rolling device
61‧‧‧附減速機之馬達 61‧‧‧Motor with gearbox
61a‧‧‧馬達 61a‧‧‧Motor
61b‧‧‧減速機 61b‧‧‧Reducer
62‧‧‧軸筒部 62‧‧‧ shaft tube
622‧‧‧貫通孔 622‧‧‧through holes
63‧‧‧傳動皮帶 63‧‧‧Drive belt
64、65‧‧‧皮帶輪 64, 65‧‧‧ Pulley
300‧‧‧配線 300‧‧‧ wiring
450‧‧‧引導體 450‧‧‧Guide
O‧‧‧旋繞軸 O‧‧‧Spinning shaft
S‧‧‧配線空間 S‧‧‧ wiring space
Claims (9)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011196070A JP5403021B2 (en) | 2011-09-08 | 2011-09-08 | Robot, robot installation method and manufacturing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201330141A true TW201330141A (en) | 2013-07-16 |
Family
ID=47921254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101131318A TW201330141A (en) | 2011-09-08 | 2012-08-29 | Robot, method of setting robot and device for manufacturing robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5403021B2 (en) |
| KR (1) | KR101544252B1 (en) |
| CN (2) | CN202953559U (en) |
| TW (1) | TW201330141A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5403021B2 (en) * | 2011-09-08 | 2014-01-29 | 株式会社安川電機 | Robot, robot installation method and manufacturing apparatus |
| JP6429450B2 (en) | 2013-10-31 | 2018-11-28 | キヤノン株式会社 | Information processing apparatus and information processing method |
| JP6499826B2 (en) * | 2014-01-29 | 2019-04-10 | 日本電産サンキョー株式会社 | Industrial robot |
| TWI758595B (en) * | 2018-03-31 | 2022-03-21 | 日商平田機工股份有限公司 | chamber configuration |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6423387U (en) * | 1987-07-29 | 1989-02-07 | ||
| JPH08255822A (en) * | 1995-03-16 | 1996-10-01 | Metsukusu:Kk | Silicon wafer transfer device |
| JPH10277987A (en) * | 1997-02-10 | 1998-10-20 | Ckd Corp | Carrier robot |
| JP2000167792A (en) * | 1998-12-04 | 2000-06-20 | Daihen Corp | Conveyance device |
| CN101627467B (en) * | 2007-03-02 | 2011-04-27 | 株式会社大亨 | Conveying device |
| JP5419581B2 (en) * | 2009-07-31 | 2014-02-19 | 東京エレクトロン株式会社 | Method for assembling transfer mechanism and transfer chamber |
| WO2011161888A1 (en) * | 2010-06-21 | 2011-12-29 | 株式会社アルバック | Transfer apparatus and method for manufacturing transfer apparatus |
| JP5403021B2 (en) * | 2011-09-08 | 2014-01-29 | 株式会社安川電機 | Robot, robot installation method and manufacturing apparatus |
-
2011
- 2011-09-08 JP JP2011196070A patent/JP5403021B2/en active Active
-
2012
- 2012-08-29 TW TW101131318A patent/TW201330141A/en unknown
- 2012-09-06 KR KR1020120098792A patent/KR101544252B1/en active IP Right Grant
- 2012-09-07 CN CN2012204558704U patent/CN202953559U/en not_active Expired - Lifetime
- 2012-09-07 CN CN201210328799.8A patent/CN102992033B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130028009A (en) | 2013-03-18 |
| JP5403021B2 (en) | 2014-01-29 |
| CN102992033A (en) | 2013-03-27 |
| CN202953559U (en) | 2013-05-29 |
| KR101544252B1 (en) | 2015-08-12 |
| CN102992033B (en) | 2015-03-04 |
| JP2013056393A (en) | 2013-03-28 |
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