CN102992033B - Robot, method of setting robot and device for manufacturing robot - Google Patents
Robot, method of setting robot and device for manufacturing robot Download PDFInfo
- Publication number
- CN102992033B CN102992033B CN201210328799.8A CN201210328799A CN102992033B CN 102992033 B CN102992033 B CN 102992033B CN 201210328799 A CN201210328799 A CN 201210328799A CN 102992033 B CN102992033 B CN 102992033B
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- China
- Prior art keywords
- robot
- cover
- module
- unit
- axle portion
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Abstract
The invention provides a robot, a method of setting the robot and a device for manufacturing the robot. The robot can be easily arranged in a cover and comprises a body part and an arm unit. The body part is moved into a vacuum cover from the above and then is fixed in the vacuum cover. The arm unit is moved into the cover also from the above and then is connected with the body part fixed in the vacuum cover.
Description
Technical field
Disclosed execution mode relates to robot, the method to set up of robot and manufacturing installation.
Background technology
In the past, the robot transporting workpiece was known to.Be known to such as horizontal articulated robot as conveying machine people, this horizontal articulated robot utilizes arm flexible in the horizontal direction to transport workpiece (with reference to patent documentation 1).
Conveying machine people such as in semiconductor-fabricating device or liquid crystal mfg. apparatus etc. for transporting the workpiece such as semiconductor wafer or glass substrate.Carry out in post-decompression vacuum (-tight) housing the process of workpiece is many in this device.Therefore, conveying machine people also more is configured in vacuum (-tight) housing.
When conveying machine people is assembled into vacuum (-tight) housing, such as, utilizes the crane device such as overhead traveling crane device to sling after conveying machine people moves to the top of vacuum (-tight) housing, make crane device decline and conveying machine people be moved in vacuum (-tight) housing.
Patent documentation 1: Japanese Patent No. 3881579 publication
, the workpiece such as glass substrate or semiconductor wafer maximizes gradually in recent years, and conveying machine people and vacuum (-tight) housing also become maximization with the maximization of these workpiece.Therefore, there is the possibility being difficult to conveying machine people be set in vacuum (-tight) housing.
Such as, conveying machine people more maximizes, and its height dimension more easily becomes large.Therefore, in order to the top making the conveying machine people of maximization be positioned at vacuum (-tight) housing, preferably guarantee conveying machine people to move into space, the i.e. space of the top of vacuum (-tight) housing upper surface more spacious.But when the height dimension of conveying machine people becomes large, the height dimension of the vacuum (-tight) housing of storage conveying machine people also becomes large, is therefore difficult to guarantee that conveying machine people's moves into space spaciousness.
Like this, conveying machine people more maximizes, and may more difficultly conveying machine people be set in vacuum (-tight) housing.
Summary of the invention
The object of a form of execution mode is, provides method to set up and the manufacturing installation of the robot that can easily be set in cover, robot.
The robot first module of a form of execution mode and second unit.First module is moved in cover from the top of cover, and is fixed in cover.Second unit is moved in cover from the top of cover, and is connected with the first module be fixed in cover.
In addition, the method to set up of the robot of a form of execution mode comprises fixed work order and is connected operation.In fixed work order, the first module of robot to be moved into from the top of cover in cover and to be fixed on cover.In connection operation, the second unit of robot to be moved into from the top of cover in cover and to be connected to the first module be fixed in cover.
In addition, the manufacturing installation of a form of execution mode possesses cover and is arranged at the robot of cover.Further, robot first module and second unit.First module is moved in cover from the top of cover, and is fixed in cover.Second unit is moved in cover from the top of cover, and is connected with the first module be fixed in cover.
According to a form of execution mode, method to set up and the manufacturing installation of the robot be easily set in cover, robot can be provided.
Embodiment
Below, with reference to accompanying drawing, the method to set up of robot disclosed in the present application, robot and the execution mode of manufacturing installation are described in detail.Further, the present invention does not limit by execution mode shown below.
First, the structure of Fig. 1 to the robot of present embodiment is utilized to be described.Fig. 1 is the schematic isometric of the robot of execution mode.
As shown in Figure 1, robot 1 is the horizontal articulated robot possessing two flexible in the horizontal direction telescopic arms.Specifically, robot 1 possesses body portion 10 and arm unit 20.
Body portion 10 is for being located at the unit of arm unit 20 bottom.Described body portion 10 possesses lowering or hoisting gear in the housing 11 of tubular, utilizes described lowering or hoisting gear that arm unit 20 is elevated along vertical direction.The structure of lowering or hoisting gear utilizes Fig. 3 to be described.
Flange part 12 is formed on the top of housing 11.By this flange part 12 being supported on the edge part of the peristome formed at vacuum (-tight) housing, robot 1 becomes the state being arranged at vacuum (-tight) housing.About this point, Fig. 2 is utilized to be described.
Arm unit 20 is the unit be connected with body portion 10 via lifting flange part 15.Specifically, arm unit 20 possesses fixed pedestal portion 21, first arm 22, second arm 23, movable base portion 24 and auxiliary arm 25.Further, in the present embodiment, fixed pedestal portion 21, first arm 22, second arm 23 and movable base portion 24 correspond respectively to first component, second component, the 3rd parts and the 4th parts.
Fixed pedestal portion 21 is supported to rotate relative to lifting flange part 15.Fixed pedestal portion 21 possesses the slewing equipment be made up of motor or decelerator, axle etc., and described fixed pedestal portion 21 utilizes described slewing equipment to rotate.The structure of Fig. 3 to slewing equipment is utilized to be described.
The base end part of the first arm 22 is connected to the top in fixed pedestal portion 21 in the mode that can rotate via decelerator.In addition, the base end part of the second arm 23 is connected to the upper end of the first arm 22 in the mode that can rotate via decelerator.
Further, movable base portion 24 is connected to the terminal part of the second arm 23 in the mode that can rotate.Movable base portion 24 possesses the end effector 24a for holding workpiece on top, this movable base portion 24 along with the first arm 22 and the second arm 23 spinning movement and move.
In robot 1, by using a motor to make to be located at the decelerator of the base end part of the first arm 22 and being located at the decelerator synchronously action of terminal part of the first arm 22, end effector 24a is moved linearly.
Specifically, in robot 1, be the mode of 2 times of the first arm 22 relative to the rotation amount in fixed pedestal portion 21 with the second arm 23 relative to the rotation amount of the first arm 22, the first arm 22 and the second arm 23 are rotated.Such as, in robot 1, the first arm 22 and the second arm 23 is made to rotate by this way: when the first arm 22 have rotated α degree relative to fixed pedestal portion 21, the second arm 23 rotates 2 α degree relative to the first arm 22.Thus, end effector 24a moves linearly.
From viewpoints such as the pollutions prevented in vacuum (-tight) housing, these driving mechanisms of decelerator, motor are incorporated in the inside remaining atmospheric first arm 22.Thus, even robot 1 is positioned over the situation under reduced pressure atmosphere, also can preventing the drying of the lubricating oil such as lubricating grease, in addition, can also preventing from making in vacuum (-tight) housing contaminated because producing dust.
Auxiliary arm 25 is linkage, and it always limits the rotation in movable base portion 24 towards the fixing mode in direction and the spinning movement of the first arm 22 and the second arm 23 in linkage with the end effector 24a in movement.
Specifically, auxiliary arm 25 possesses first connecting rod portion 25a, intermediate connecting rod portion 25b and second connecting rod portion 25c.
The base end part of first connecting rod portion 25a is connected with fixed pedestal portion 21 in the mode that can rotate, and first connecting rod portion 25a is connected with the terminal part of the mode that can rotate with intermediate connecting rod portion 25b at terminal part.In addition, base end part quilt and the coaxial ground axle suspension of connecting axle between the first arm 22 and the second arm 23 of intermediate connecting rod portion 25b, the terminal part of intermediate connecting rod portion 25b is connected with the terminal part of the mode that can rotate with first connecting rod portion 25a.
Second connecting rod portion 25c is connected with intermediate connecting rod portion 25b in the mode that can rotate at base end part, and second connecting rod portion 25c is connected with the base end part of the mode that can rotate with movable base portion 24 at terminal part.In addition, movable base portion 24 is connected with the terminal part of the mode that can rotate with the second arm 23 at terminal part, and movable base portion 24 is connected with second connecting rod portion 25c in the mode that can rotate at base end part.
First connecting rod portion 25a and fixed pedestal portion 21, first arm 22 and intermediate connecting rod portion 25b together form the first parallel linkage.That is, when the first arm 22 rotates centered by base end part, first connecting rod portion 25a and intermediate connecting rod portion 25b keep state parallel with fixed pedestal portion 21 with the first arm 22 respectively to rotate.
In addition, second connecting rod portion 25c and the second arm 23, movable base portion 24 and intermediate connecting rod portion 25b together form the second parallel linkage.That is, when the second arm 23 rotates centered by base end part, second connecting rod portion 25c and movable base portion 24 keep state parallel with intermediate connecting rod portion 25b with the second arm 23 respectively to rotate.
Intermediate connecting rod portion 25b keeps the state parallel with fixed pedestal portion 21 while rotate by the first parallel linkage.Therefore, the movable base portion 24 of the second parallel linkage also keeps the state parallel with fixed pedestal portion 21 to rotate.Consequently, the end effector 24a being arranged on top, movable base portion 24 keeps the state parallel with fixed pedestal portion 21 to move linearly.
Like this, robot 1 utilizes the first parallel linkage and these two parallel linkages of the second parallel linkage, keeps the direction of end effector 24a constant.Therefore, and such as belt wheel or driving-belt to be located in the second arm and to utilize these belt wheels or driving-belt to be maintained in the direction of end effector compared with the situation of fixed-direction, the dust caused because of belt wheel or driving-belt can be suppressed to produce.
In addition, the rigidity of whole arm can be improved by auxiliary arm 25, therefore, it is possible to vibration when reducing end effector 24a action.Therefore, compared with the direction of end effector being maintained the situation of fixed-direction with use belt wheel or driving-belt, can also suppress to cause because of vibration during end effector 24a action producing dust.
In addition, the robot 1 of present embodiment possesses two groups of telescopic arm section be made up of the first arm 22, second arm 23, movable base portion 24 and auxiliary arm 25.Therefore, robot 1 can such as use a telescopic arm to take out workpiece from certain conveyance position, use another telescopic arm by new work transporting to two operations such as described conveyance positions simultaneously simultaneously abreast.
Next, after the structure of the manufacturing installation to the robot 1 and vacuum (-tight) housing with present embodiment is described, the method to set up that the structure around companion flange and robot 1 are arranged to vacuum (-tight) housing is specifically described.
Fig. 2 is the diagrammatic side view of the structure that manufacturing installation is shown.As shown in Figure 2, manufacturing installation 100 possesses the vacuum (-tight) housing 30 of robot 1 and storage robot 1.
The flange part 12 being formed at body portion 10 of robot 1 is fixed on the edge of peristome 31 through seal member, described peristome 31 is formed at the bottom of vacuum (-tight) housing 30.Thus, vacuum (-tight) housing 30 becomes by airtight state, utilizes the decompressors such as vacuum pump to make vacuum (-tight) housing 30 inside remain decompression state.Further, the housing 11 in body portion 10 is given prominence to from the bottom of vacuum (-tight) housing 30, is positioned at the space to the support 35 that vacuum (-tight) housing 30 supports.
Robot 1 carries out the conveyance operation of workpiece in this vacuum (-tight) housing 30.Such as, robot 1 makes end effector 24a move linearly by use first arm 22 and the second arm 23, takes out workpiece through not shown gate valve from other vacuum (-tight) housing be connected with vacuum (-tight) housing 30.
Then, robot 1, after being retracted by end effector 24a, makes fixed pedestal portion 21 rotate in the horizontal direction centered by axis of rotation O, and thus, arm unit 20 is faced becomes other vacuum (-tight) housing of the conveyance destination of workpiece.Then, robot 1 uses the first arm 22 and the second arm 23 that end effector 24a is moved linearly, and thus workpiece is moved into other vacuum (-tight) housing becoming work transporting destination.
Vacuum (-tight) housing 30 is formed accordingly with the shape of robot 1.Such as, as shown in Figure 2, be formed with recess in the bottom surface of vacuum (-tight) housing 30, the position outstanding downwards of fixed pedestal portion 21 or the such robot 1 of lifting flange part 15 is accommodated in described recess.Like this, by making vacuum (-tight) housing 30 be formed accordingly with the shape of robot 1, the volume in cover can be reduced.Therefore, it is possible to easily maintain the decompression state of vacuum (-tight) housing 30.
Vacuum (-tight) housing 30 is located at the top of vacuum (-tight) housing 30 with the cap 32 can closed with the mode of ft connection.Robot 1 is that the top of the vacuum (-tight) housing 30 be removed from cap 32 is moved in vacuum (-tight) housing 30.
The robot 1 of present embodiment is configured to body portion 10 and arm unit 20 can be split at lifting flange part 15.
Specifically, the lifting flange part 15 of the robot 1 of present embodiment is made up of these two flanges of the first companion flange 15a and the second companion flange 15b.First companion flange 15a is the flange being fixed on side, body portion 10, and the second companion flange 15b is the flange being fixed on arm unit 20 side.The robot 1 of the present embodiment state by utilizing bolt etc. these the first companion flange 15a and the second companion flange 15b integration to be become body portion 10 and arm unit 20 integration.
And, in the present embodiment, robot 1 is moved in vacuum (-tight) housing 30 with the state being divided into body portion 10 and arm unit 20.Thereby, it is possible to easily robot 1 is arranged to vacuum (-tight) housing 30.
Next, the structure in the body portion 10 utilizing Fig. 3 to illustrate to have the first companion flange 15a and the fixed pedestal portion 21 with the second companion flange 15b.Fig. 3 is the schematic sectional view of the structure that body portion 10 and fixed pedestal portion 21 are shown.
As shown in Figure 3, body portion 10 possesses lowering or hoisting gear 40.Lowering or hoisting gear 40 utilizes not shown motor and mapping device 42 to make axle portion 43 at the device of vertical direction movement.First companion flange 15a is fixed on the upper end outstanding from the peristome 121 being formed at flange part 12 in axle portion 43.
In addition, arm unit 20 possesses slewing equipment 60.Slewing equipment 60 such as by making the rotation of the motor 61 of band decelerator pass to axle portion 62 through belt wheel 64,65 and driving-belt 63, makes axle portion 62 rotate, and the motor 61 of band decelerator is made up of described motor 61a and decelerator 61b integration.Axle portion 62 is rotatably supported in fixed pedestal portion 21 through bearing 211, but direction of rotation is fixed, therefore consequently fixed pedestal portion 21 with the central axis in axle portion 62 for axis of rotation O rotates in the horizontal direction.
Second companion flange 15b is fixed on the vertical outstanding terminal part from the bottom in fixed pedestal portion 21 in axle portion 62 downwards.
And body portion 10 and arm unit 20 fix the first companion flange 15a and the second companion flange 15b with bolt etc. and integrated, become robot 1.
Here, as shown in Figure 3, be provided with alignment pin 151 at the upper surface of the first companion flange 15a, be formed with the connecting hole 153 engaged with alignment pin 151 at the second companion flange 15b.First companion flange 15a and the second companion flange 15b is fixed, thus relative to body portion 10 linking arm unit 20 in position with the state that alignment pin 151 and connecting hole 153 engage.
Like this, in the robot 1 of present embodiment, the body portion 10 as first module has the first companion flange 15a extended in the horizontal direction on top, and the arm unit 20 as second unit has the second companion flange 15b extended in the horizontal direction in bottom.Like this, in the robot 1 of present embodiment, by fixing the first companion flange 15a and the second companion flange 15b, come junctor body 10 and arm unit 20.Therefore, it is possible to easily carry out the connection operation of body portion 10 and arm unit 20.
In addition, in the robot 1 of present embodiment, the first companion flange 15a is provided as to the alignment pin 151 of location protuberance, forms the connecting hole 153 engaged with this alignment pin 151 at the second companion flange 15b.Therefore, relative to body portion 10 at correct position linking arm unit 20.
And, alignment pin 151 is set at the first companion flange 15a here, forms connecting hole 153 at the second companion flange 15b, but jack can also be formed at the first companion flange 15a, alignment pin is set at the second companion flange 15b.In addition, here, as an example of location protuberance and location recess, utilize alignment pin 151 and connecting hole 153 to be illustrated, but the protuberance of location and recess are not limited to pin and jack.
In addition, the example of situation here slewing equipment 60 to the motor 61 of band decelerator is illustrated, but the also not necessarily integration of motor and decelerator.
Next, the concrete structure of slewing equipment 60 and lowering or hoisting gear 40 is described.As shown in Figure 3, in the axle portion 62 of slewing equipment 60, be formed with the through hole 622 penetrating into lower end from the upper end in axle portion 62 along axis of rotation O, be also formed with same through hole 154 at the second companion flange 15b.And, run through at these through holes 622,154 distribution 300 being inserted with arm unit 20.This distribution 300 becomes the state hung down from the bottom in fixed pedestal portion 21 by through hole 622,154 from the top in axle portion 62.
Lowering or hoisting gear 40 possesses mapping device 42, axle portion 43 and linear guide portion 44.Mapping device 42 is the mechanism part rotary motion of not shown motor being transformed to rectilinear motion.Specifically, mapping device 42 possesses ball-screw 421 and ball nut 422.Ball-screw 421 can be supported on housing 11 rotatably through bearing 112, and ball nut 422 is sleeved on ball-screw 421.
Axle portion 43 is the cartridges extended along vertical direction.In the cylinder in this axle portion 43, be equipped with mapping device 42, the ball nut 422 of mapping device 42 is fixed on the inner peripheral surface in axle portion 43.In addition, linear guide portion 44 is fixed at outer peripheral face in axle portion 43.
When making not shown motor work, the rotation of motor passes to the ball-screw 421 of mapping device 42 through not shown driving-belt and belt wheel.Then, by ball-screw 421 and ball nut 422, the rotary motion of motor is transformed to rectilinear motion, the axle portion 43 being fixed with ball nut 422 is elevated along linear guide portion 44.
Be formed with through hole 152 at the first companion flange 15a along axis of rotation O, the distribution 300 of arm unit 20 inserts in axle portion 43 via this through hole 152.The distribution 300 inserted in axle portion 43 is drawn to axle portion 43 from the notch 431 being formed at bottom, axle portion 43, is connected with the connector panel be located at outside axle portion 43.
Here, mapping device 42 is with the configuration of the state of the inner peripheral surface near axle portion 43.Specifically, the state that mapping device 42 offsets from the central axis (i.e. axis of rotation O) in axle portion 43 with the central axis of ball-screw 421 is configured.Thus, between mapping device 42 and the inner peripheral surface in axle portion 43, be formed with the wiring space S of distribution 300.
And be provided with guide body 450 in axle portion 43, the distribution 300 inserted from top leads wiring space S by this guide body 450.Guide body 450 is arranged between wiring space S and mapping device 42 to cover the top of ball-screw 421 and the parts of side, in guide body 450, is formed with inclination towards wiring space S.
Like this, in the cylinder in axle portion 43, arrange guide body 450, can not hinder ball-screw 421 and ball nut 422 thus, can easily lead distribution 300 wiring space S.In addition, in the action of robot 1, can also prevent distribution 300 from contacting with mapping device 42.
Below, the method to set up that robot 1 is arranged to vacuum (-tight) housing 30 is described.First, Fig. 4 being relatively described the height dimension of the height dimension moving into space above vacuum (-tight) housing 30 and robot 1 is utilized.Fig. 4 is the comparison diagram of the height dimension of the height dimension moving into space above vacuum (-tight) housing 30 and robot 1.And as shown in Figure 4, the operation of moving into of robot 1 is with reference to Fig. 2 at the cap 32(taking off vacuum (-tight) housing 30 top) state under carry out.
Robot 1 such as utilizes bridge crane 700 to be moved in vacuum (-tight) housing 30 by the top from vacuum (-tight) housing 30.Bridge crane 700 is such crane equipments: utilize hook 701 to sling to predetermined altitude by object, after the travel road 751 being located at top 750 travels, the object sling is dropped to precalculated position.
In order to be moved in vacuum (-tight) housing 30 by the object utilizing overhead traveling crane device 700 to sling, the height dimension of object must be less than the height dimension X moving into space above vacuum (-tight) housing 30.Here, moving into space and refer to space for the robot be positioned at above vacuum (-tight) housing 30 1 being moved into vacuum (-tight) housing 30, specifically, is the space of bottom to the upper end of vacuum (-tight) housing 30 from the hook 701 being pulled up to extreme higher position.
The height dimension H of the robot 1 of present embodiment is greater than the height dimension X that this moves into space.In this case, even if want that utilizing bridge crane 700 to be moved to by robot 1 moves into space, robot 1 can be inconsistent with the sidewall of vacuum (-tight) housing 30, is therefore difficult to robot 1 to move to move into space.
Therefore, the robot 1 of present embodiment is configured to robot 1 to be divided into body portion 10 and arm unit 20, respectively body portion 10 and arm unit 20 is moved into vacuum (-tight) housing 30.
Below, utilize Fig. 5 A and Fig. 5 B that the method to set up that the robot 1 of present embodiment is arranged to vacuum (-tight) housing 30 is described.Fig. 5 A is the key diagram that the method to set up that body portion 10 is arranged to vacuum (-tight) housing 30 is shown, Fig. 5 B is the key diagram that the method to set up that arm unit 20 is arranged to vacuum (-tight) housing 30 is shown.
As shown in Figure 5A, operator etc. utilize overhead traveling crane device 700 to arrange body portion 10 to vacuum (-tight) housing 30.First, after the suspension attachment 800 with the collar 810 is arranged on body portion 10 by operator etc., is sling in body portion 10 by the collar 810 that the hook 701 of overhead traveling crane device 700 is suspended to suspension attachment 800.
Next, operator etc. travel along travel road 751 by making bridge crane 700, body portion 10 is moved to and moves into space above vacuum (-tight) housing 30.Here, as shown in Figure 5A, the height dimension h1 comprising suspension attachment 800 in body portion 10 is less than the height dimension X moving into space.Therefore, body portion 10 can move to and move into space and can not be inconsistent with vacuum (-tight) housing 30.
Next, the bridge cranes 700 such as operator make the peristome 31 of housing 11 by vacuum (-tight) housing 30 in body portion 10, are placed in vacuum (-tight) housing 30 in body portion 10.Thus, body portion 10 becomes the state being supported on the edge part of the peristome 31 of vacuum (-tight) housing 30 at flange part 12.
Then, operator etc. utilize bolt etc. to be fixed with the edge part of peristome 31 by the flange part 12 in body portion 10.Thus, body portion 10 arranges end to vacuum (-tight) housing 30.And, in the body portion 10 being set to vacuum (-tight) housing 30, the guide member for registration arm unit 20 is installed, utilizes Fig. 6 to be described about this point.
Body portion 10 is to after being provided with of vacuum (-tight) housing 30, and operator etc. carry out the setting of arm unit 20 to vacuum (-tight) housing 30 as shown in Figure 5 B.First, arm unit 20, after the suspension attachment 600 with the collar 610 is installed on arm unit 20, is sling by operator etc. by the collar 610 that the hook 701 of overhead traveling crane device 700 is suspended to suspension attachment 600.Now, the distribution 300 of arm unit 20 becomes the state hung down from the bottom of arm unit 20.
Operators etc. travel along travel road 751 by making bridge crane 700, arm unit 20 is moved to and moves into space above vacuum (-tight) housing 30.Here, as shown in Figure 5 B, the height dimension h2 comprising suspension attachment 600 of arm unit 20 is less than the height dimension X moving into space.Therefore, arm unit 20 can move to and move into space and can not be inconsistent with vacuum (-tight) housing 30.
Next, the bridge crane 700 such as operator makes arm unit 20 decline to the body portion 10 being arranged at vacuum (-tight) housing 30.Thus, in the axle portion 43 of the lowering or hoisting gear 40 that the distribution 300 insertion machine body 10 hung down from the bottom of arm unit 20 has (with reference to Fig. 3).As mentioned above, in axle portion 43, between the wiring space S and mapping device 42 of distribution 300, be provided with guide body 450.Therefore, operator etc. can make distribution 300 lead to wiring space S and can not be transformed mechanism 42 to hinder.And the distribution 300 leading to wiring space S is drawn outside axle portion 43 by from notch 431, and is connected with connector panel.
Next, operator etc. make arm unit 20 decline further, make the second companion flange 15b being located at arm unit 20 bottom close to the first companion flange 15a being located at top, body portion 10.
Here, be formed with the location paired with the guide member being located at body portion 10 at the suspension attachment 600 of arm unit 20 and mark, operator etc. utilize these guide members and location mark to carry out the roughly location of arm unit 20.Fig. 6 illustrates the key diagram of arm unit 20 relative to the roughly localization method in body portion 10.
As described in Figure 6, the precalculated position on the flange part 12 in body portion 10 is provided with cylindric guide member 125,126.In addition, arm unit 20 suspension attachment 600 using and guide member 125,126 between the equal gap-forming in interval have through hole 602a, 603a to mark as location.
These guide members 125,126 and through hole 602a, 603a are carried out the location of arm unit 20 as mark by operators etc.Specifically, operator etc. are when from top view through hole 602a, 603a, and the position of adjustment arm unit 20 is closed in through hole 602a, 603a to make guide member 125,126, respectively while make arm unit 20 decline to body portion 10.
Like this, in the present embodiment, be provided with the guide member 125,126 of the location that can load and unload at the flange part 12 in body portion 10, be formed and guide member 125,126 corresponding through hole 602a, 603a at suspension attachment 600.Further, in the present embodiment, utilize these guide member 125,126 and through hole 602a, 603a, carry out the location of arm unit 20 relative to body portion 10.Therefore, operator etc. easily hold the roughly installation site of arm unit 20 relative to body portion 10 while arm unit 20 is declined to body portion 10.
In addition, as mentioned above, be provided with the alignment pin 151 as location protuberance at the first companion flange 15a in body portion 10, be provided with at the second companion flange 15b of arm unit 20 connecting hole 153 engaged with alignment pin 151.Thus, the second companion flange can be correctly arranged at the first companion flange 15a by operator etc.
After first companion flange 15a loads the second companion flange 15b, the first companion flange 15a and the second companion flange 15b fixes by bolt such as operator's grade etc.Thus, body portion 10 and arm unit 20 integration and become robot 1.
And as shown in Figure 6, the suspension attachment 600 of arm unit 20 has upside support unit 601, downside support unit 602,603 and connecting axle 604 ~ 606.First downside support unit 602,603 is installed on the bottom in fixed pedestal portion 21 by operators etc.The downside support unit 602,603 being installed on fixed pedestal portion 21 becomes its part state outstanding to Y-axis negative direction from fixed pedestal portion 21.On the downside of this, the part outstanding from fixed pedestal portion 212 of support unit 602,603 is formed with through hole 602a, 603a respectively.
Next, connecting axle 604,605 is installed on downside support unit 602,603 by operator etc. respectively, and connecting axle 606 is installed on fixed pedestal portion 21.And upside support unit 601 is installed on connecting axle 604 ~ 606 by operator etc., with bolt etc., they are fastening.Thus, suspension attachment 600 becomes the state being installed on arm unit 20.
As mentioned above, in present embodiment, robot is configured to can be divided into body portion and these two unit of arm unit.Specifically, be configured to: body portion to move into from the top of vacuum (-tight) housing in vacuum (-tight) housing and is fixed on vacuum (-tight) housing, and arm unit is connected with the body portion be fixed in vacuum (-tight) housing.Therefore, it is possible to easily robot is set in vacuum (-tight) housing.
In addition, in the present embodiment, the height dimension in body portion and the height dimension sum of arm unit are greater than the height dimension moving into space above vacuum (-tight) housing, and body portion and arm unit height dimension is separately less than the height dimension moving into space.
Therefore, even if such as when robot and vacuum (-tight) housing maximize and be difficult to guarantee to move into space, by segmentation robot, also can easily carry out the setting of robot to vacuum (-tight) housing.
And, in the present embodiment, be provided with the lowering or hoisting gear that arm unit is elevated in vertical direction in body portion, be provided with the slewing equipment that telescopic arm is rotated centered by axis of rotation at arm unit.Thus, and in body portion, there is lowering or hoisting gear and compare with the situation of slewing equipment, can be consistent equably with the height dimension of arm unit by the height dimension in body portion.
Therefore, the situation larger with the difference of the height dimension of arm unit with the height dimension in body portion is compared, though on vacuum (-tight) housing to move into space less, body portion and arm unit also can be made to move to and to move into space.
And in the above-described embodiment, example machine artificially being transported to the situation of the conveying machine people of workpiece is illustrated, but robot can also be the robot carrying out the operation transported beyond workpiece.In addition, in the above-described embodiment, the example of the situation that robot is located in vacuum (-tight) housing is illustrated, but the cover set by robot can also be the cover beyond vacuum (-tight) housing.
In addition, in the above-described embodiment, the example height dimension of robot being greater than to the situation of the height dimension in conveyance space is illustrated, but the height dimension of robot also can be less than the height dimension in conveyance space.Even if in this case, transported in cover by segmentation robot, also can reduce weight and the size of once moving into the object moved in action, can easily robot be moved in cover.
In addition, in the above-described embodiment, the example moving into the situation of operation utilizing the bridge crane being located at building to carry out body portion and arm unit is illustrated, but the crane that operation uses moved into of body portion and arm unit can also be crane equipment beyond bridge crane.
Concerning those skilled in the art, can easily derive further effect and variation.Therefore, wider mode of the present invention is not represented and the specific detailed content described and representational execution mode limit as described above.Therefore, only otherwise depart from the spirit or scope of the concept of the total invention defined by the scope of the claim of enclosing and its equivalent, various change can be carried out.
Accompanying drawing explanation
Fig. 1 is the schematic isometric of the robot of the first execution mode.
Fig. 2 illustrates diagrammatic side view robot being arranged at the state after vacuum (-tight) housing.
Fig. 3 is the schematic sectional view of the structure that body portion and base portion are shown.
Fig. 4 is the comparison diagram moving into the height dimension in space and the height dimension of robot above vacuum (-tight) housing.
Fig. 5 A is the key diagram that the method to set up that body portion is arranged to vacuum (-tight) housing is shown.
Fig. 5 B is the key diagram that the method to set up that arm unit is arranged to vacuum (-tight) housing is shown.
Fig. 6 illustrates the key diagram of arm unit relative to the roughly localization method in body portion.
Label declaration
1: robot
10: body portion
11: housing
12: flange part
125,126: guide member
15: lifting flange part
15a: the first companion flange (docking flange)
15b: the second companion flange
151: alignment pin
152,154: through hole
153: connecting hole
20: arm unit
21: fixed pedestal portion
22: the first arms
23: the second arms
24: movable base portion
25: auxiliary arm
30: vacuum (-tight) housing
31: peristome
32: cap
40: lowering or hoisting gear
42: mapping device
43: axle portion
60: slewing equipment
61: the motor of band decelerator
61a: motor
61b: decelerator
62: axle portion
622: through hole
300: distribution
450: guide body
600: suspension attachment
602a, 603a: through hole
610: the collar
700: bridge crane
701: hook
751: travel road
800: suspension attachment
810: the collar
Claims (7)
1. a robot, is characterized in that,
Described robot:
First module, it is moved in described cover from the top of cover, and is fixed in described cover; With
Second unit, it is moved in described cover from the top of described cover, and is connected with the described first module be fixed in described cover,
Described first module has the lifting unit that described second unit is elevated along vertical direction,
Described lifting unit has motor, the axle portion of tubular and mapping device, and described mapping device is configured in the cylinder in described axle portion, for the rotary motion of described motor being transformed to rectilinear motion, described axle portion is elevated,
Described axle portion has guide body, and the distribution that this guide body is used for the described first module inserted the top from described axle portion guides to the wiring space be formed between the inner peripheral surface in described axle portion and described mapping device.
2. robot according to claim 1, is characterized in that,
The height dimension of described first module and the height dimension sum of described second unit are greater than the height dimension moving into space of described cover top,
The height dimension in space is moved into described in described first module and described second unit height dimension are separately less than.
3. robot according to claim 1 and 2, is characterized in that,
Described second unit has arm flexible in the horizontal direction and makes described arm to be parallel to the rotating part rotated centered by the axis of rotation of vertical direction.
4. robot according to claim 1 and 2, is characterized in that,
Described first module has the first flange part extended in the horizontal direction on top,
Described second unit has the second flange part extended in the horizontal direction in bottom, by described first flange part and described second flange part being fixed together, described second unit is connected with described first module.
5. robot according to claim 4, is characterized in that,
A side in described first flange part and described second flange part has the protuberance of location,
The opposing party in described first flange part and described second flange part has the recess of the location engaged with described protuberance.
6. a method to set up for robot, is characterized in that, the method to set up of described robot comprises:
Fixed work order, in this fixed work order, to move into the first module of robot from the top of cover in described cover and to be fixed on described cover, and
Connect operation, in this connection operation, the second unit of described robot moved in described cover from the top of described cover, and be connected to the described first module be fixed in described cover,
Described connection operation comprises:
Setting process, in this setting process, arranges location parts in the precalculated position of described first module; With
Positioning process, in this positioning process, when being moved in described cover above described cover by the described second unit being provided with predetermined tool, the location parts being arranged at described first module and the location being formed at described instrument mark is utilized to carry out the location of described second unit relative to described first module.
7. a manufacturing installation, is characterized in that,
This manufacturing installation possesses cover and is arranged at the robot of described cover,
Described robot: first module, it is moved in described cover from the top of described cover, and is fixed in described cover; And second unit, it is moved in described cover from the top of described cover, and is connected with the described first module be fixed in described cover,
Described first module has the lifting unit that described second unit is elevated along vertical direction,
Described lifting unit has motor, the axle portion of tubular and mapping device, and described mapping device is configured in the cylinder in described axle portion, for the rotary motion of described motor being transformed to rectilinear motion, described axle portion is elevated,
Described axle portion has guide body, and the distribution that this guide body is used for the described first module inserted the top from described axle portion guides to the wiring space be formed between the inner peripheral surface in described axle portion and described mapping device.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011196070A JP5403021B2 (en) | 2011-09-08 | 2011-09-08 | Robot, robot installation method and manufacturing apparatus |
| JP2011-196070 | 2011-09-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102992033A CN102992033A (en) | 2013-03-27 |
| CN102992033B true CN102992033B (en) | 2015-03-04 |
Family
ID=47921254
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210328799.8A Expired - Fee Related CN102992033B (en) | 2011-09-08 | 2012-09-07 | Robot, method of setting robot and device for manufacturing robot |
| CN2012204558704U Expired - Lifetime CN202953559U (en) | 2011-09-08 | 2012-09-07 | Robot and manufacturing device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012204558704U Expired - Lifetime CN202953559U (en) | 2011-09-08 | 2012-09-07 | Robot and manufacturing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5403021B2 (en) |
| KR (1) | KR101544252B1 (en) |
| CN (2) | CN102992033B (en) |
| TW (1) | TW201330141A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5403021B2 (en) * | 2011-09-08 | 2014-01-29 | 株式会社安川電機 | Robot, robot installation method and manufacturing apparatus |
| JP6429450B2 (en) * | 2013-10-31 | 2018-11-28 | キヤノン株式会社 | Information processing apparatus and information processing method |
| JP6499826B2 (en) * | 2014-01-29 | 2019-04-10 | 日本電産サンキョー株式会社 | Industrial robot |
| TWI758595B (en) * | 2018-03-31 | 2022-03-21 | 日商平田機工股份有限公司 | chamber configuration |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08255822A (en) * | 1995-03-16 | 1996-10-01 | Metsukusu:Kk | Silicon wafer transfer device |
| JP2000167792A (en) * | 1998-12-04 | 2000-06-20 | Daihen Corp | Conveyance device |
| CN101989562A (en) * | 2009-07-31 | 2011-03-23 | 东京毅力科创株式会社 | Assembly method of transfer mechanism and transfer chamber |
| CN202953559U (en) * | 2011-09-08 | 2013-05-29 | 株式会社安川电机 | Robot and manufacturing device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6423387U (en) * | 1987-07-29 | 1989-02-07 | ||
| JPH10277987A (en) * | 1997-02-10 | 1998-10-20 | Ckd Corp | Carrier robot |
| CN101627467B (en) * | 2007-03-02 | 2011-04-27 | 株式会社大亨 | Conveying device |
| WO2011161888A1 (en) * | 2010-06-21 | 2011-12-29 | 株式会社アルバック | Transfer apparatus and method for manufacturing transfer apparatus |
-
2011
- 2011-09-08 JP JP2011196070A patent/JP5403021B2/en active Active
-
2012
- 2012-08-29 TW TW101131318A patent/TW201330141A/en unknown
- 2012-09-06 KR KR1020120098792A patent/KR101544252B1/en active IP Right Grant
- 2012-09-07 CN CN201210328799.8A patent/CN102992033B/en not_active Expired - Fee Related
- 2012-09-07 CN CN2012204558704U patent/CN202953559U/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08255822A (en) * | 1995-03-16 | 1996-10-01 | Metsukusu:Kk | Silicon wafer transfer device |
| JP2000167792A (en) * | 1998-12-04 | 2000-06-20 | Daihen Corp | Conveyance device |
| CN101989562A (en) * | 2009-07-31 | 2011-03-23 | 东京毅力科创株式会社 | Assembly method of transfer mechanism and transfer chamber |
| CN202953559U (en) * | 2011-09-08 | 2013-05-29 | 株式会社安川电机 | Robot and manufacturing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102992033A (en) | 2013-03-27 |
| TW201330141A (en) | 2013-07-16 |
| KR101544252B1 (en) | 2015-08-12 |
| JP5403021B2 (en) | 2014-01-29 |
| JP2013056393A (en) | 2013-03-28 |
| KR20130028009A (en) | 2013-03-18 |
| CN202953559U (en) | 2013-05-29 |
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