CN202953559U - Robot and manufacturing device - Google Patents
Robot and manufacturing device Download PDFInfo
- Publication number
- CN202953559U CN202953559U CN2012204558704U CN201220455870U CN202953559U CN 202953559 U CN202953559 U CN 202953559U CN 2012204558704 U CN2012204558704 U CN 2012204558704U CN 201220455870 U CN201220455870 U CN 201220455870U CN 202953559 U CN202953559 U CN 202953559U
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- Prior art keywords
- robot
- cover
- unit
- housing
- module
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a robot and a manufacturing device. The robot can be easily arranged into a cover. The robot with an implementation way is provided with a machine body portion and an arm unit. The machine body portion is transported into an evacuated cover from the top of the evacuated cover, and is fixed in the evacuated cover. In addition, the arm unit is transported into the evacuated cover from the top of the evacuated cover and is connected with the machine body portion which is fixed in the cover.
Description
Technical field
Disclosed embodiment relates to method to set up and the manufacturing installation of robot, robot.
Background technology
In the past, the known robot that the conveyance workpiece is arranged.As the conveyance robot is known for example horizontal articulated robot arranged, this horizontal articulated robot utilization in the horizontal direction flexible arm comes conveyance workpiece (with reference to patent documentation 1).
The conveyance robot is such as be used for the workpiece such as conveyance semiconductor wafer or glass substrate in semiconductor-fabricating device or liquid crystal mfg. apparatus etc.In this device, carry out in post-decompression vacuum (-tight) housing the processing of workpiece is many.Therefore, the conveyance robot also is configured in the vacuum (-tight) housing more.
The conveyance robot is being assembled in the situation of vacuum (-tight) housing, is moving to after the top of vacuum (-tight) housing such as the conveyance robot of slinging such as the Jack device that utilizes the overhead traveling crane device, the Jack device is being descended and the conveyance robot is moved in the vacuum (-tight) housing.
Patent documentation 1: No. 3881579 communique of Japan's special permission
, the workpiece such as glass substrate or semiconductor wafer maximizes gradually in recent years, and conveyance robot and vacuum (-tight) housing are followed the maximization of these workpiece maximization that also becomes.Therefore, have and be difficult to the conveyance robot is set to possibility in the vacuum (-tight) housing.
For example, the conveyance robot more maximizes, and just easier change is large for its height dimension.Therefore, for the conveyance robot that makes maximization is positioned at the top of vacuum (-tight) housing, preferably guarantee the conveyance robot move into the space, be that the space of top of vacuum (-tight) housing upper surface is more spacious.Therefore but when the height dimension of conveyance robot became large, the height dimension of taking in the vacuum (-tight) housing of conveyance robot also became greatly, and what be difficult to guarantee the conveyance robot moves into the space spaciousness.
Like this, the conveyance robot more maximizes, and may just more difficult the conveyance robot be set in the vacuum (-tight) housing.
The utility model content
The purpose of a form of embodiment is, the robot that can easily be set in the cover, method to set up and the manufacturing installation of robot are provided.
The robot of a form of embodiment possesses first module and second unit.First module is moved in the cover from the top of cover, and is fixed in cover.Second unit is moved in the cover from the top of cover, and the first module interior with being fixed in cover is connected.
In addition, in the described robot, the height dimension sum of the height dimension of described first module and described second unit is greater than the height dimension of moving into the space of described cover top, and described first module and described second unit height dimension separately are less than the described height dimension of moving into the space.
In the described robot, described first module has makes described second unit along the lifting unit of vertical direction lifting, and described second unit has flexible in the horizontal direction arm and the rotating part that described arm is rotated centered by the rotation axis that is parallel to vertical direction.
In the described robot, described lifting unit has axial region and the mapping device of electrical motor, tubular, described mapping device is configured in the cylinder of described axial region, be used for that rotatablely moving of described electrical motor is transformed to straight-line motion and make described axial region lifting, described axial region has guide body, and this guide body guides to the distribution space between the inner peripheral surface that is formed on described axial region and the described mapping device for the distribution of the described first module that will insert from the top of described axial region.
In the described robot, described first module has the first flange part that extends in the horizontal direction on top, described second unit has the second flange part that extends in the horizontal direction in the bottom, by described the first flange part and described the second flange part are fixed together, described second unit is connected with described first module.
In the described robot, the side in described the first flange part and described the second flange part has the protuberance of location usefulness, the recess that the opposing party in described the first flange part and described the second flange part has the location usefulness that engages with described protuberance.
In addition, the method to set up of the robot of embodiment form comprises fixedly operation and is connected operation.In fixing operation, move into cover in from the top of cover the first module of robot and be fixed in cover.In connecting operation, move into cover in from the top of cover the second unit of robot and be connected to the first module that is fixed in the cover.
In addition, the manufacturing installation of embodiment form possesses the robot that covers and be arranged at cover.And robot possesses first module and second unit.First module is moved in the cover from the top of cover, and is fixed in cover.Second unit is moved in the cover from the top of cover, and the first module interior with being fixed in cover is connected.
According to a form of embodiment, can provide the robot that easily is set in the cover, method to set up and the manufacturing installation of robot.
Description of drawings
Fig. 1 is the schematic isometric of the robot of the first embodiment.
Fig. 2 illustrates the diagrammatic side view that robot is arranged at the state behind the vacuum (-tight) housing.
Fig. 3 is the schematic sectional view that the structure of body section and base portion is shown.
Fig. 4 is the comparison diagram of the height dimension of the height dimension of moving into the space of vacuum (-tight) housing top and robot.
Fig. 5 A illustrates body section to the instruction diagram of the method to set up of vacuum (-tight) housing setting.
Fig. 5 B illustrates arm unit to the instruction diagram of the method to set up of vacuum (-tight) housing setting.
Fig. 6 illustrates arm unit with respect to the instruction diagram of the roughly localization method of body section.
Label declaration
1: robot
10: body section
11: housing
12: flange part
125,126: guide member
15: the lifting flange part
15a: the first companion flange (docking flange)
15b: the second companion flange
151: locating dowel pin
152,154: through hole
153: connecting hole
20: arm unit
21: permanent seat section
22: the first arms
23: the second arms
24: movable base section
25: auxiliary arm
30: vacuum (-tight) housing
31: peristome
32: cap
40: jacking system
42: mapping device
43: axial region
60: turning gear
61: with the electrical motor of retarder
61a: electrical motor
61b: retarder
62: axial region
622: through hole
300: distribution
450: guide body
600: suspension attachment
602a, 603a: through hole
610: the collar
700: crane in bridge type
701: hook
751: travel
800: suspension attachment
810: the collar
The specific embodiment
Below, with reference to accompanying drawing, the method to set up of the disclosed robot of the application, robot and the embodiment of manufacturing installation are described in detail.And the utility model is not limited by embodiment shown below.
At first, utilize Fig. 1 that the structure of the robot of present embodiment is described.Fig. 1 is the schematic isometric of the robot of embodiment.
As shown in Figure 1, robot 1 is the horizontal articulated robot that possesses two flexible in the horizontal direction telescopic booms.Specifically, robot 1 possesses body section 10 and arm unit 20.
Be formed with flange part 12 on the top of housing 11.By this flange part 12 being supported on the edge part of the peristome that forms at vacuum (-tight) housing, robot 1 becomes the state that is arranged at vacuum (-tight) housing.About this point, utilize Fig. 2 to describe.
The base end part of the first arm 22 is connected in the top of permanent seat section 21 in the mode that can rotate via retarder.In addition, the base end part of the second arm 23 is connected in the upper end of the first arm 22 in the mode that can rotate via retarder.
And movable base section 24 is connected in the terminal part of the second arm 23 in the mode that can rotate.Movable base section 24 possesses the end-effector 24a for holding workpiece on top, this movable base section 24 moves along with the spinning movement of the first arm 22 and the second arm 23.
In robot 1, by using an electrical motor retarder of the base end part of being located at the first arm 22 and the retarder of being located at the terminal part of the first arm 22 are synchronously moved, make end-effector 24a traveling priority.
Specifically, in robot 1, take the second arm 23 with respect to the rotation amount of the first arm 22 as 2 times the mode of the first arm 22 with respect to the rotation amount of permanent seat section 21, make the first arm 22 and 23 rotations of the second arm.For example, in robot 1, make by this way the first arm 22 and the rotation of the second arm 23: rotated in the situation of α degree with respect to permanent seat section 21 at the first arm 22, the second arm 23 is with respect to the first arm 22 rotations 2 α degree.Thus, end-effector 24a traveling priority.
The viewpoints such as the pollution in preventing vacuum (-tight) housing, retarder, these driver trains of electrical motor are incorporated in the inside that remains atmospheric the first arm 22.Thus, even robot 1 is positioned over situation under the reduced pressure atmosphere, also can prevent the drying of the lubricating oils such as grease, in addition, can also prevent from making in the vacuum (-tight) housing contaminated because producing dust.
Specifically, auxiliary arm 25 possesses the 25a of first connecting rod section, the 25b of intermediate connecting rod section and the 25c of second connecting rod section.
The base end part of the 25a of first connecting rod section is connected with permanent seat section 21 in the mode that can rotate, and the 25a of first connecting rod section endways section is connected with the terminal part of the 25b of intermediate connecting rod section in the mode that can rotate.In addition, the base end part of the 25b of intermediate connecting rod section by with the first arm 22 and the second arm 23 between the coaxial ground axle suspension of adapter shaft, the terminal part of the 25b of intermediate connecting rod section is connected with the terminal part of the 25a of first connecting rod section in the mode that can rotate.
The 25c of second connecting rod section is connected with the 25b of intermediate connecting rod section in the mode that can rotate at base end part, and the 25c of second connecting rod section endways section is connected with the base end part of movable base section 24 in the mode that can rotate.In addition, movable base section 24 endways section is connected with the terminal part of the second arm 23 in the mode that can rotate, and movable base section 24 is connected with the 25c of second connecting rod section in the mode that can rotate at base end part.
The 25a of first connecting rod section and permanent seat section 21, the first arm 22 and the 25b of intermediate connecting rod section together form the first parallel linkage.That is, when the first arm 22 rotates centered by base end part, while the 25a of first connecting rod section and the 25b of intermediate connecting rod section keep respectively the state parallel with the first arm 22 and permanent seat section 21 to rotate.
In addition, the 25c of second connecting rod section and the second arm 23, movable base section 24 and the 25b of intermediate connecting rod section together form the second parallel linkage.That is, when the second arm 23 rotates centered by base end part, while the 25c of second connecting rod section and movable base section 24 keep respectively rotating with the second arm 23 state parallel with the 25b of intermediate connecting rod section.
The 25b of intermediate connecting rod section by the first parallel linkage while keeping the state parallel with permanent seat section 21 to rotate.Therefore, while the movable base section 24 of the second parallel linkage also keeps the state parallel with permanent seat section 21 to rotate.Consequently, keep the state traveling priority parallel with permanent seat section 21 while be installed in the end-effector 24a on movable base section 24 tops.
Like this, robot 1 utilizes the first parallel linkage and these two parallel linkages of the second parallel linkage, keeps the direction of end-effector 24a constant.Therefore, and for example be located at belt wheel or driving band in the second arm and utilize these belt wheels or driving band is compared the situation that the direction of end-effector is maintained fixed-direction, can suppress to produce because of the dust that belt wheel or driving band cause.
In addition, can improve the rigidity of whole arm, the vibration in the time of therefore can reducing end-effector 24a action by auxiliary arm 25.Therefore, the situation that is maintained fixed-direction with the direction of using belt wheel or driving band with end-effector is compared, and the vibration that can also suppress when moving because of end-effector 24a causes producing dust.
In addition, the robot 1 of present embodiment possesses two groups of telescopic arm section that are made of the first arm 22, the second arm 23, movable base section 24 and auxiliary arm 25.Therefore, robot 1 can carry out simultaneously abreast such as using a telescopic boom to take out workpiece from certain conveyance position, use another telescopic boom with two operations such as to described conveyance position of new work transporting simultaneously.
Next, after the structure to the manufacturing installation of robot 1 with present embodiment and vacuum (-tight) housing describes, the structure around the companion flange and robot 1 method to set up to the vacuum (-tight) housing setting is specifically described.
Fig. 2 is the diagrammatic side view that the structure of manufacturing installation is shown.As shown in Figure 2, manufacturing installation 100 possesses robot 1 and the vacuum (-tight) housing 30 of taking in robot 1.
The flange part that is formed at body section 10 12 of robot 1 is fixed on the edge of peristome 31 through sealing element, and described peristome 31 is formed at the bottom of vacuum (-tight) housing 30.Thus, vacuum (-tight) housing 30 becomes the state that is sealed, and utilizes the pressure purgers such as vacuum pump to make vacuum (-tight) housing 30 inside remain decompression state.And the housing 11 of body section 10 is outstanding from the bottom of vacuum (-tight) housing 30, is positioned at the space of the support 35 that vacuum (-tight) housing 30 is supported.
Then, robot 1 makes permanent seat section 21 rotate in the horizontal direction centered by rotation axis O after end-effector 24a is retracted, and thus, arm unit 20 is faced becomes other vacuum (-tight) housing of the conveyance of workpiece destination.Then, robot 1 uses the first arm 22 and the second arm 23 to make end-effector 24a traveling priority, thus workpiece is moved into other vacuum (-tight) housing that becomes the work transporting destination.
Vacuum (-tight) housing 30 forms accordingly with the shape of robot 1.For example, as shown in Figure 2, be formed with recess in the bottom surface of vacuum (-tight) housing 30, the outstanding position downwards of the robot 1 that permanent seat section 21 or lifting flange part 15 are such is accommodated in described recess.Like this, form accordingly the volume in can reducing to cover by making vacuum (-tight) housing 30 and the shape of robot 1.Therefore, can easily keep the decompression state of vacuum (-tight) housing 30.
The cap 32 that vacuum (-tight) housing 30 is sealed in the mode that can be communicated with the outside is located at the top of vacuum (-tight) housing 30.Robot 1 is that the top of the vacuum (-tight) housing 30 that is removed from cap 32 is moved in the vacuum (-tight) housing 30.
The robot 1 of present embodiment constitutes body section 10 and arm unit 20 can be cut apart at lifting flange part 15.
Particularly, the lifting flange part 15 of the robot 1 of present embodiment is made of the first companion flange 15a and these two flanges of the second companion flange 15b.The first companion flange 15a is the flange that is fixed in body section 10 sides, and the second companion flange 15b is the flange that is fixed in arm unit 20 sides.The robot 1 of present embodiment is by utilizing bolt etc. with these the first companion flange 15a and integrated body section 10 and the arm unit 20 integrated states of becoming of the second companion flange 15b.
And, in the present embodiment, robot 1 is moved in the vacuum (-tight) housing 30 with the state that is divided into body section 10 and arm unit 20.Thus, can easily robot 1 be arranged to vacuum (-tight) housing 30.
Next, utilizing Fig. 3 to illustrate has the body section 10 of the first companion flange 15a and has the structure of the permanent seat section 21 of the second companion flange 15b.Fig. 3 is the schematic sectional view that the structure of body section 10 and permanent seat section 21 is shown.
As shown in Figure 3, body section 10 possesses jacking system 40.Jacking system 40 is the devices that utilize not shown electrical motor and mapping device 42 that axial region 43 is moved in vertical direction.The first companion flange 15a is fixed in the outstanding upper end of peristome 121 from being formed at flange part 12 of axial region 43.
In addition, arm unit 20 possesses turning gear 60.Turning gear 60 for example by make with the rotation of the electrical motor 61 of retarder through belt wheel 64,65 and driving band 63 pass to axial region 62, make axial region 62 rotations, integrated and consist of by described electrical motor 61a and retarder 61b with the electrical motor 61 of retarder.Axial region 62 is rotatably supported in permanent seat section 21 through bearing 211, but hand of rotation is fixed, and therefore consequently permanent seat section 21 rotates in the horizontal direction take the central axis of axial region 62 as rotation axis O.
The second companion flange 15b is fixed in the vertical terminal part of giving prominence in the bottom from permanent seat section 21 of axial region 62 downwards.
And body section 10 and arm unit 20 usefulness bolts etc. fixes the first companion flange 15a and the second companion flange 15b and is integrated, becomes robot 1.
Here, as shown in Figure 3, be provided with locating dowel pin 151 at the upper surface of the first companion flange 15a, be formed with the connecting hole 153 that engages with locating dowel pin 151 at the second companion flange 15b.State with 153 engagings of locating dowel pin 151 and connecting hole is fixed the first companion flange 15a and the second companion flange 15b, thus with respect to body section 10 connecting arm unit 20 in position.
Like this, in the robot 1 of present embodiment, have the first companion flange 15a that extends in the horizontal direction on top as the body section 10 of first module, have the second companion flange 15b that extends in the horizontal direction in the bottom as the arm unit 20 of second unit.Like this, in the robot 1 of present embodiment, by fixing the first companion flange 15a and the second companion flange 15b, come junctor body 10 and arm unit 20.Therefore, can easily carry out the connection operation that body section 10 is connected with arm unit.
In addition, in the robot 1 of present embodiment, the first companion flange 15a is provided as the location with the locating dowel pin 151 of protuberance, forms the connecting hole 153 that engages with this locating dowel pin 151 at the second companion flange 15b.Therefore, with respect to body section 10 in correct connecting arm unit, position 20.
And,, at the first companion flange 15a locating dowel pin 151 is set here, form connecting hole 153 at the second companion flange 15b, but can also form jack at the first companion flange 15a, at the second companion flange 15b locating dowel pin is set.In addition,, with protuberance and the example of location with recess, utilize locating dowel pin 151 and connecting hole 153 to be illustrated as the location, but protuberance and the recess of location usefulness are not limited to pin and jack here.
In addition, the example that here turning gear 60 is had with the situation of the electrical motor 61 of retarder is illustrated, but electrical motor and retarder are also not necessarily integrated.
Next, the concrete structure of turning gear 60 and jacking system 40 described.As shown in Figure 3, at the axial region 62 of turning gear 60, be formed with the through hole 622 that penetrates into the lower end from the upper end of axial region 62 along rotation axis O, also be formed with same through hole 154 at the second companion flange 15b.And, run through the distribution 300 that is inserted with arm unit 20 at these through holes 622,154.This distribution 300 becomes top from axial region 62 by through hole 622,154 states that hang down from the bottom of permanent seat section 21.
Jacking system 40 possesses mapping device 42, axial region 43 and linear guide section 44.Mapping device 42 is that rotatablely moving of not shown electrical motor is transformed to section of straight-line mechanism.Particularly, mapping device 42 possesses ball-screw 421 and ball nut 422.Ball-screw 421 can be supported on housing 11 rotatably through bearing 112, and ball nut 422 is sleeved on the ball-screw 421.
When making not shown motor operation, the rotation of electrical motor is through not shown driving band and belt wheel and pass to the ball-screw 421 of mapping device 42.Then, by ball-screw 421 and ball nut 422 rotatablely moving of electrical motor is transformed to straight-line motion, is fixed with axial region 43 property guide portion 44 liftings along the line of ball nut 422.
Be formed with through hole 152 at the first companion flange 15a along rotation axis O, the distribution 300 of arm unit 20 inserts in the axial region 43 via this through hole 152.The distributions 300 that insert in the axial region 43 are drawn to axial region 43 outside from the notch 431 that is formed at axial region 43 bottoms, and are located at axial region 43 connector panel outward and are connected.
Here, mapping device 42 is with the state configuration of the inner peripheral surface of close axial region 43.Particularly, mapping device 42 is configured with the central axis of ball-screw 421 state from central axis (the being rotation axis O) skew of axial region 43.Thus, between the inner peripheral surface of mapping device 42 and axial region 43, be formed with the distribution space S of distribution 300.
And, be provided with guide body 450 at axial region 43, the distribution 300 guiding distribution space S that this guide body 450 will be inserted from the top.Guide body 450 is to be arranged in the top of covering ball-screw 421 between distribution space S and the mapping device 42 and the parts of side, in guide body 450, is formed with inclination towards the distribution space S.
Like this, in the cylinder of axial region 43, guide body 450 is set, can hinder thus ball-screw 421 and ball nut 422, can be easily with distribution 300 guiding distribution space S.In addition, in the action of robot 1, can also prevent that distribution 300 from contacting with mapping device 42.
Below, robot 1 arranged to the method to set up of vacuum (-tight) housing 30 describe.At first, utilize Fig. 4 relatively describing the height dimension of the height dimension of moving into the space of vacuum (-tight) housing 30 tops and robot 1.Fig. 4 is the comparison diagram of the height dimension of the height dimension of moving into the space of vacuum (-tight) housing 30 tops and robot 1.And as shown in Figure 4, the operation of moving into of robot 1 is with reference to Fig. 2 at the cap 32(that takes off vacuum (-tight) housing 30 tops) state under carry out.
For the object that will utilize overhead traveling crane device 700 to sling is moved in the vacuum (-tight) housing 30, the height dimension of object must be less than the height dimension X that moves into the space of vacuum (-tight) housing 30 tops.Here, moving into the space that the space refers to move into for the robot 1 that will be positioned at vacuum (-tight) housing 30 tops vacuum (-tight) housing 30, particularly, is the space till from the bottom of the hook 701 that is pulled up to the extreme higher position to the upper end of vacuum (-tight) housing 30.
The height dimension H of the robot 1 of present embodiment moves into the height dimension X in space greater than this.In this case, move into the space even want to utilize crane in bridge type 700 that robot 1 is moved to, robot 1 can be inconsistent with the sidewall of vacuum (-tight) housing 30, therefore is difficult to robot 1 moved to move into the space.
Therefore, the robot 1 of present embodiment constitutes and robot 1 can be divided into body section 10 and arm unit 20, respectively body section 10 and arm unit 20 is moved into vacuum (-tight) housing 30.
Below, utilize the robot 1 of Fig. 5 A and Fig. 5 B explanation present embodiment to the method to set up of vacuum (-tight) housing 30 settings.Fig. 5 A illustrates body section 10 to the instruction diagram of the method to set up of vacuum (-tight) housing 30 settings, and Fig. 5 B illustrates arm unit 20 to the instruction diagram of the method to set up of vacuum (-tight) housing 30 settings.
Shown in Fig. 5 A, operator etc. utilize overhead traveling crane device 700 that body section 10 is arranged to vacuum (-tight) housing 30.At first, the suspension attachment 800 that operator etc. will have the collar 810 is installed in after the body section 10, and the collar 810 that the hook 701 of overhead traveling crane device 700 is suspended to suspension attachment 800 is sling body section 10.
Next, operator etc. travel by crane in bridge type 700 being followed sail 751, make body section 10 move to the space of moving into of vacuum (-tight) housing 30 tops.Here, shown in Fig. 5 A, the height dimension h1 that comprises suspension attachment 800 of body section 10 is less than the height dimension X that moves into the space.Therefore, body section 10 can move to and move into the space and can be not inconsistent with vacuum (-tight) housing 30.
Next, the operation crane in bridge type 700 such as operator make the housing 11 of body section 10 by the peristome 31 of vacuum (-tight) housing 30, and body section 10 is placed in the vacuum (-tight) housing 30.Thus, body section 10 becomes the state of edge part that is supported on the peristome 31 of vacuum (-tight) housing 30 at flange part 12.
Then, operator waits and to utilize bolt etc. that the flange part 12 of body section 10 is fixed with the edge part of peristome 31.Thus, body section 10 is to the end that arranges of vacuum (-tight) housing 30.And, in the body section 10 that is set to vacuum (-tight) housing 30 guide member for radius arm unit 20 is installed, utilize Fig. 6 to describe about this point.
Operators etc. travel by crane in bridge type 700 being followed sail 751, make arm unit 20 move to the space of moving into of vacuum (-tight) housing 30 tops.Here, shown in Fig. 5 B, the height dimension h2 that comprises suspension attachment 600 of arm unit 20 is less than the height dimension X that moves into the space.Therefore, arm unit 20 can move to and move into the space and can be not inconsistent with vacuum (-tight) housing 30.
Next, the operation crane in bridge type 700 such as operator makes arm unit 20 descend to the body section 10 that is arranged at vacuum (-tight) housing 30.In the axial region 43 of the jacking system 40 that the distribution 300 insertion machine bodies 10 that hang down from the bottom of arm unit 20 thus, have (with reference to Fig. 3).As mentioned above, in axial region 43, between the distribution space S of distribution 300 and mapping device 42, be provided with guide body 450.Therefore, operator etc. can make distribution 300 lead to the distribution space S and can not be transformed mechanism's 42 obstruction.And the distribution 300 that leads to the distribution space S is drawn outside 43 from notch 431 to axial region, and is connected with connector panel.
Next, operator etc. further descend arm unit 20, make the second companion flange 15b that is located at arm unit 20 bottoms approach the first companion flange 15a that is located at body section 10 tops.
Here, be formed with the location mark paired with the guide member of being located at body section 10 at the suspension attachment 600 of arm unit 20, operator etc. utilize these guide members and location to carry out the roughly location of arm unit 20 with mark.Fig. 6 illustrates arm unit 20 with respect to the instruction diagram of the roughly localization method of body section 10.
As described in Figure 6, the desired location on the flange part 12 of body section 10 is equipped with cylindric guide member 125,126.In addition, be formed with through hole 602a, 603a as the location mark at the suspension attachment 600 of arm unit 20 with the interval that equates with guide member 125,126 interval.
Operator etc. with these guide members 125,126 and through hole 602a, 603a serve as a mark and carry out the location of arm unit 20.Particularly, operator etc. from above observe in the situation of through hole 602a, 603a, adjust on one side arm unit 20 the position so that guide member 125,126 closed in through hole 602a, the 603a respectively, Yi Bian make arm unit 20 to 10 declines of body section.
Like this, in the present embodiment, be provided with the guide member 125,126 of the location usefulness that can load and unload at the flange part 12 of body section 10, be formed with and guide member 125,126 corresponding through hole 602a, 603a at suspension attachment 600.And, in the present embodiment, utilize these guide members 125,126 and through hole 602a, 603a, carry out arm unit 20 with respect to the location of body section 10.Therefore, the operator waits and makes arm unit 20 can easily hold arm unit 20 with respect to the roughly installation site of body section 10 when body section 10 descends.
In addition, as mentioned above, be provided with as the locating dowel pin 151 of location with protuberance at the first companion flange 15a of body section 10, be provided with the connecting hole 153 that engages with locating dowel pin 151 at the second companion flange 15b of arm unit 20.Thus, the operator waits and the second companion flange correctly can be arranged at the first companion flange 15a.
After the first companion flange 15a mounting the second companion flange 15b, operator etc. fix the first companion flange 15a and the second companion flange 15b with bolt etc.Thus, body section 10 and arm unit 20 are integrated and become robot 1.
And as shown in Figure 6, the suspension attachment 600 of arm unit 20 has upside support unit 601, downside support unit 602,603 and adapter shaft 604～606.Operators etc. at first are installed on downside support unit 602,603 bottom of permanent seat section 21.The downside support unit 602,603 that is installed on permanent seat section 21 becomes its part state outstanding from permanent seat section 21 to the Y-axis negative direction.This downside support unit 602,603 be formed with respectively through hole 602a, 603a from the outstanding parts of permanent seat section 212.
Next, operator etc. are installed on respectively downside support unit 602,603 with adapter shaft 604,605, and adapter shaft 606 is installed on permanent seat section 21.And operator etc. are installed on adapter shaft 604～606 with upside support unit 601, and are with bolt etc. that they are fastening.Thus, suspension attachment 600 becomes the state that is installed on arm unit 20.
As mentioned above, in the present embodiment, robot constituted to be divided into body section and these two unit of arm unit.Particularly, constitute: body section moves in the vacuum (-tight) housing from the top of vacuum (-tight) housing and is fixed in vacuum (-tight) housing, and the arm unit body section interior with being fixed in vacuum (-tight) housing is connected.Therefore can easily robot be set in the vacuum (-tight) housing.
In addition, in the present embodiment, the height dimension sum of the height dimension of body section and arm unit is greater than the height dimension of moving into the space of vacuum (-tight) housing top, and body section and arm unit height dimension separately is less than the height dimension of moving into the space.
Therefore, even for example maximize and be difficult to guarantee to move in the situation in space at robot and vacuum (-tight) housing, by cutting apart robot, also can easily carry out robot to the setting of vacuum (-tight) housing.
And, in the present embodiment, be provided with in body section and make arm unit at the jacking system of vertical direction lifting, be provided with the turning gear that telescopic boom is rotated centered by rotation axis at arm unit.Thus, compare with the situation that has jacking system and turning gear in body section, can the height dimension of the height dimension of body section and arm unit is consistent equably.
Therefore, compare with the situation that the difference of the height dimension of the height dimension of body section and arm unit is larger, though on the vacuum (-tight) housing to move into the space less, body section and arm unit are moved to move into the space.
And, in the above-described embodiment, the machine people is illustrated for the example of the situation of the conveyance robot of conveyance workpiece, but robot can also be the robot that carries out the operation in addition of conveyance workpiece.In addition, in the above-described embodiment, the example of robot being located at the situation in the vacuum (-tight) housing is illustrated, but the set cover of robot can also be the cover beyond the vacuum (-tight) housing.
In addition, in the above-described embodiment, the height dimension of the robot example greater than the situation of the height dimension in conveyance space is illustrated, but the height dimension of robot also can be less than the height dimension in conveyance space.Even in this case, in cover, carry out conveyance by cutting apart robot, also can reduce once to move into weight and the size of the object of moving in the action, can easily robot be moved in the cover.
In addition, in the above-described embodiment, the example that the crane in bridge type that building is located in utilization carries out the situation of moving into operation of body section and arm unit is illustrated, but the employed hoisting crane of operation of moving into of body section and arm unit can also be crane equipment beyond the crane in bridge type.
Concerning those skilled in the art, can easily derive further effect and variation.Therefore, wider mode of the present utility model is not represented and specific detailed content and the representational embodiment recorded and narrated limit as described above.Therefore, only otherwise break away from spirit or scope by the concept of the defined total utility model of the scope of the claim of enclosing and its equivalent, can carry out various changes.
Claims (7)
1. a robot is characterized in that,
Described robot possesses:
First module, its top from cover is moved in the described cover, and is fixed in described cover; With
Second unit, its top from described cover is moved in the described cover, and is connected with described first module in being fixed in described cover.
2. robot according to claim 1 is characterized in that,
The height dimension sum of the height dimension of described first module and described second unit is greater than the height dimension of moving into the space of described cover top,
Described first module and described second unit height dimension separately are less than the described height dimension of moving into the space.
3. robot according to claim 1 and 2 is characterized in that,
Described first module has makes described second unit along the lifting unit of vertical direction lifting,
Described second unit has flexible in the horizontal direction arm and the rotating part that described arm is rotated centered by the rotation axis that is parallel to vertical direction.
4. robot according to claim 3 is characterized in that,
Described lifting unit has axial region and the mapping device of electrical motor, tubular, and described mapping device is configured in the cylinder of described axial region, and be used for that rotatablely moving of described electrical motor is transformed to straight-line motion and make described axial region lifting,
Described axial region has guide body, and this guide body guides to the distribution space between the inner peripheral surface that is formed on described axial region and the described mapping device for the distribution of the described first module that will insert from the top of described axial region.
5. robot according to claim 1 and 2 is characterized in that,
Described first module has the first flange part that extends in the horizontal direction on top,
Described second unit has the second flange part that extends in the horizontal direction in the bottom, by described the first flange part and described the second flange part are fixed together, described second unit is connected with described first module.
6. robot according to claim 5 is characterized in that,
Side in described the first flange part and described the second flange part has the protuberance of location usefulness,
The recess that the opposing party in described the first flange part and described the second flange part has the location usefulness that engages with described protuberance.
7. a manufacturing installation is characterized in that,
This manufacturing installation possesses cover and is arranged at the interior robot of described cover,
Described robot possesses: first module, and its top from described cover is moved in the described cover, and is fixed in described cover; And second unit, its top from described cover is moved in the described cover, and is connected with described first module in being fixed in described cover.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011196070A JP5403021B2 (en) | 2011-09-08 | 2011-09-08 | Robot, robot installation method and manufacturing apparatus |
| JP2011-196070 | 2011-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202953559U true CN202953559U (en) | 2013-05-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012204558704U Expired - Lifetime CN202953559U (en) | 2011-09-08 | 2012-09-07 | Robot and manufacturing device |
| CN201210328799.8A Expired - Fee Related CN102992033B (en) | 2011-09-08 | 2012-09-07 | Robot, method of setting robot and device for manufacturing robot |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210328799.8A Expired - Fee Related CN102992033B (en) | 2011-09-08 | 2012-09-07 | Robot, method of setting robot and device for manufacturing robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5403021B2 (en) |
| KR (1) | KR101544252B1 (en) |
| CN (2) | CN202953559U (en) |
| TW (1) | TW201330141A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102992033A (en) * | 2011-09-08 | 2013-03-27 | 株式会社安川电机 | Robot, method of setting robot and device for manufacturing robot |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6429450B2 (en) | 2013-10-31 | 2018-11-28 | キヤノン株式会社 | Information processing apparatus and information processing method |
| JP6499826B2 (en) * | 2014-01-29 | 2019-04-10 | 日本電産サンキョー株式会社 | Industrial robot |
| TWI758595B (en) * | 2018-03-31 | 2022-03-21 | 日商平田機工股份有限公司 | chamber configuration |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6423387U (en) * | 1987-07-29 | 1989-02-07 | ||
| JPH08255822A (en) * | 1995-03-16 | 1996-10-01 | Metsukusu:Kk | Silicon wafer transfer device |
| JPH10277987A (en) * | 1997-02-10 | 1998-10-20 | Ckd Corp | Carrier robot |
| JP2000167792A (en) * | 1998-12-04 | 2000-06-20 | Daihen Corp | Conveyance device |
| JPWO2008120294A1 (en) * | 2007-03-02 | 2010-07-15 | 株式会社ダイヘン | Transport device |
| JP5419581B2 (en) * | 2009-07-31 | 2014-02-19 | 東京エレクトロン株式会社 | Method for assembling transfer mechanism and transfer chamber |
| WO2011161888A1 (en) * | 2010-06-21 | 2011-12-29 | 株式会社アルバック | Transfer apparatus and method for manufacturing transfer apparatus |
| JP5403021B2 (en) * | 2011-09-08 | 2014-01-29 | 株式会社安川電機 | Robot, robot installation method and manufacturing apparatus |
-
2011
- 2011-09-08 JP JP2011196070A patent/JP5403021B2/en active Active
-
2012
- 2012-08-29 TW TW101131318A patent/TW201330141A/en unknown
- 2012-09-06 KR KR1020120098792A patent/KR101544252B1/en active IP Right Grant
- 2012-09-07 CN CN2012204558704U patent/CN202953559U/en not_active Expired - Lifetime
- 2012-09-07 CN CN201210328799.8A patent/CN102992033B/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102992033A (en) * | 2011-09-08 | 2013-03-27 | 株式会社安川电机 | Robot, method of setting robot and device for manufacturing robot |
| CN102992033B (en) * | 2011-09-08 | 2015-03-04 | 株式会社安川电机 | Robot, method of setting robot and device for manufacturing robot |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130028009A (en) | 2013-03-18 |
| CN102992033B (en) | 2015-03-04 |
| JP5403021B2 (en) | 2014-01-29 |
| KR101544252B1 (en) | 2015-08-12 |
| CN102992033A (en) | 2013-03-27 |
| JP2013056393A (en) | 2013-03-28 |
| TW201330141A (en) | 2013-07-16 |
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