TW201319597A - Semiconductor test socket - Google Patents

Semiconductor test socket Download PDF

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Publication number
TW201319597A
TW201319597A TW101134766A TW101134766A TW201319597A TW 201319597 A TW201319597 A TW 201319597A TW 101134766 A TW101134766 A TW 101134766A TW 101134766 A TW101134766 A TW 101134766A TW 201319597 A TW201319597 A TW 201319597A
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test socket
semiconductor test
insulating
wires
semiconductor
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TW101134766A
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Chinese (zh)
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TWI453438B (en
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Jong-Cheon Shin
Dong-Ho Ha
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Jong-Cheon Shin
Dong-Ho Ha
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0441Details
    • G01R1/0466Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0483Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

Provided is a semiconductor test socket, including: a conductive silicon unit which is formed in an area which comes into contact with leads of a semiconductor device; an insulating silicon unit which is formed in an area which does not come into contact with the leads of the semiconductor device so as to support the conductive silicon unit, and performs a function of an insulating layer; and at least one insulating reinforcement line which is formed within the area which comes into contact with the leads of the conductive silicon unit, thereby being capable of minimizing the damage of a silicon rubber film caused by the friction of a contact area, which is generated because when a semiconductor is pressed on a contact surface of the semiconductor test socket, silicon rubber and conductive powders of the semiconductor test socket are pushed in all directions of the outside.

Description

半導體測試插槽Semiconductor test slot 相關申請案之交叉引用Cross-reference to related applications

本申請案之優先權係為2011年9月23日在韓國智慧財產局申請之韓國專利申請號10-2011-0096121,並以引用之方式整體併入本文。 The priority of the present application is the Korean Patent Application No. 10-2011-0096121, filed on Sep. 23, 2011, at the Korean Intellectual Property Office, which is incorporated herein by reference in its entirety.

本發明係關於半導體測試插槽,更特定言之,係為減少由半導體之導線造成之損傷的半導體測試插槽。 This invention relates to semiconductor test sockets, and more particularly to semiconductor test sockets that reduce damage caused by semiconductor leads.

半導體測試插槽係用於測試非破壞性狀態的半導體元件之電子信號。 The semiconductor test socket is used to test the electrical signals of semiconductor components in a non-destructive state.

在半導體測試插槽中,藉由適當的壓力按壓半導體導電單元的接觸區域與插槽的上端部分的同時,半導體測試插槽的異性下部分與PCB(印刷電路板)形成導電通道,而使電子信號的流動進行。一般而言,半導體測試插槽中成為導電通路的每一導電接腳應小於數百mΩ,和插槽重複接觸之數目應多於數萬次,而使電子信號的流動良好地進行。 In the semiconductor test socket, while pressing the contact area of the semiconductor conductive unit and the upper end portion of the socket by appropriate pressure, the opposite portion of the semiconductor test socket forms a conductive path with the PCB (printed circuit board), and the electron is made. The flow of the signal proceeds. In general, each conductive pin that becomes a conductive path in the semiconductor test socket should be less than several hundred mΩ, and the number of repeated contacts of the socket should be more than tens of thousands of times, so that the flow of the electronic signal proceeds well.

此外,係在同時接觸數十至數百個接腳的狀況下進行電子測試。因此,即使在一個接腳上產生接觸不良或形成不穩定的接觸,則由於半導體測試插槽的不穩定而認 為測試之完成有缺陷(即使在完成測試之半導體係為正常),因而降低產率。此外,由於根據缺陷之處理而造成之再檢查或生產之產率的減少,一般造成1至3%的嚴重損失。因此,半導體製造工廠不斷開發新技術,以使半導體測試插槽之產品具有良好的電氣壽命和產率。 In addition, electronic testing is performed while touching tens to hundreds of pins at the same time. Therefore, even if a poor contact or an unstable contact is formed on one of the pins, it is recognized due to the instability of the semiconductor test slot. Defects were made for the completion of the test (even if the semiconductor was completed in the test), thus reducing the yield. In addition, a severe loss of 1 to 3% is generally caused due to a reduction in the yield of re-inspection or production according to the treatment of defects. As a result, semiconductor manufacturing plants continue to develop new technologies to enable semiconductor test socket products to have good electrical life and yield.

當BGA(球柵陣列)之小球(半導體之導電單元)進入與接觸單元接觸,應防止橡膠薄膜之分離和損壞。此外,在主體外側中具有終端(鉛)的TSOP(薄型小尺寸封裝)或具有在主體底部上均勻形成之終端的扁平封裝的情況下,當半導體按壓至半導體測試插槽的接觸表面上時,半導體測試插槽之矽橡膠與導電粉末被推往所有方向的外側達一按壓容積。此時,由於在插槽和半導體終端間的接觸區域的摩擦,導電粉末很容易從矽橡膠分離。此外,由於半導體封裝的特性,與半導體測試插槽接觸者係為尖銳的橫截面,而使得矽橡膠膜容易損壞而有問題。 When the small ball of the BGA (ball grid array) (the conductive unit of the semiconductor) comes into contact with the contact unit, the separation and damage of the rubber film should be prevented. Further, in the case of a TSOP (Thin Small Package) having a terminal (lead) in the outer side of the main body or a flat package having a terminal uniformly formed on the bottom of the main body, when the semiconductor is pressed onto the contact surface of the semiconductor test socket, The rubber and conductive powder between the semiconductor test sockets are pushed to the outside of all directions up to a pressing volume. At this time, the conductive powder is easily separated from the ruthenium rubber due to the friction of the contact area between the socket and the semiconductor terminal. In addition, due to the characteristics of the semiconductor package, the contact with the semiconductor test socket has a sharp cross section, which makes the silicone rubber film susceptible to damage and has a problem.

本發明已在上述問題保持注意,而本發明之態樣係提供一種半導體測試插槽,其中絕緣加固線係形成在同一方向上以作為半導體終端,亦即,依據所按壓之半導體測試插槽之容積擴大的方向,以最小化由接觸區域的摩擦造成之矽橡膠薄膜之損壞,該損壞係因為當半導體按 壓至半導體測試插槽之接觸表面時,半導體測試插槽之矽橡膠與導電粉末被推往所有方向的外側達一按壓容積。 The present invention has been paid attention to the above problems, and the aspect of the present invention provides a semiconductor test socket in which insulating reinforcing wires are formed in the same direction as a semiconductor terminal, that is, according to the semiconductor test socket pressed The direction in which the volume is enlarged to minimize the damage of the rubber film caused by the friction of the contact area, which is caused by the semiconductor pressing When pressed to the contact surface of the semiconductor test socket, the rubber and conductive powder of the semiconductor test socket are pushed to the outside of all directions to a pressing volume.

根據本發明之示例性實施例,係提供一種半導體測試插槽,包含:導電矽單元,該導電矽單元係形成在與半導體裝置之導線接觸之區域中;絕緣矽單元,該絕緣矽單元係形成在不與半導體裝置之導線接觸之區域中,以支撐導電矽單元,並實行一絕緣層功能;以及至少一個絕緣加固線,該至少一個絕緣加固線係形成在與導電矽單元之導線接觸之區域中。 According to an exemplary embodiment of the present invention, there is provided a semiconductor test socket comprising: a conductive germanium unit formed in a region in contact with a conductor of a semiconductor device; an insulating germanium unit, the insulating germanium unit being formed In a region not in contact with the wires of the semiconductor device, to support the conductive germanium unit and perform an insulating layer function; and at least one insulating reinforcing wire formed in an area in contact with the conductive germanium unit in.

根據本發明之另一示例性實施例,半導體測試插槽可進一步包括支撐加固線,該支撐加固線將複數個絕緣加固線連接至絕緣矽單元之表面區域。 According to another exemplary embodiment of the present invention, the semiconductor test socket may further include a support reinforcement line connecting the plurality of insulation reinforcement wires to a surface area of the insulation unit.

仍然根據本發明之另一示例性實施例,半導體測試插槽可經配置以使絕緣加固線位在第一方向上,第一方向係為半導體測試插槽之寬度方向,而支撐加固線位在第二方向上,第二方向以直角跨越第一方向上之絕緣加固線。 According to still another exemplary embodiment of the present invention, the semiconductor test socket may be configured to position the insulating reinforcement line in a first direction, the first direction being the width direction of the semiconductor test socket, and the support reinforcement line being at In the second direction, the second direction spans the insulation reinforcement line in the first direction at a right angle.

仍然根據本發明之另一示例性實施例,半導體測試插槽可經配置以使絕緣加固線位在第一方向上,第一方向係為半導體測試插槽之寬度方向,且形成一區域,該區域在第二方向上斷開,第二方向以直角跨越第一方向上之絕緣加固線。 According to still another exemplary embodiment of the present invention, the semiconductor test socket may be configured to position the insulating reinforcement line in a first direction, the first direction being a width direction of the semiconductor test socket, and forming an area, The region is broken in the second direction, and the second direction spans the insulation reinforcement line in the first direction at a right angle.

仍然根據本發明之另一示例性實施例,半導體測試插 槽可進一步包括側邊支撐加固線,該側邊支撐加固線在第二方向上連接至複數個絕緣加固線之一個端。 Still in accordance with another exemplary embodiment of the present invention, a semiconductor test plug The slot may further include a side support reinforcement line connected to one end of the plurality of insulation reinforcement lines in the second direction.

仍然根據本發明之另一示例性實施例,側邊支撐加固線可位於跨越絕緣加固線彼此相鄰之兩端。 According to still another exemplary embodiment of the present invention, the side support reinforcing wires may be located at both ends adjacent to each other across the insulation reinforcing wires.

仍然根據本發明之另一示例性實施例,絕緣加固線與支撐加固線可互相以直角跨越。 According to still another exemplary embodiment of the present invention, the insulating reinforcing wire and the supporting reinforcing wire may cross each other at a right angle.

仍然根據本發明之另一示例性實施例,絕緣加固線可經調整以對應於半導體裝置之導線間之距離,並可因此形成於導電矽單元之表面區域上。 Still according to another exemplary embodiment of the present invention, the insulating reinforcing wires may be adjusted to correspond to the distance between the wires of the semiconductor device, and may thus be formed on the surface area of the conductive germanium unit.

仍然根據本發明之另一示例性實施例,絕緣加固線可具有0.05至0.15mm之寬度、0.15至0.25mm之長度與0.05至0.3mm之厚度。 Still according to another exemplary embodiment of the present invention, the insulating reinforcing wire may have a width of 0.05 to 0.15 mm, a length of 0.15 to 0.25 mm, and a thickness of 0.05 to 0.3 mm.

仍然根據本發明之另一示例性實施例,絕緣加固線可由下列各者形成:聚四氟乙烯基氟碳樹脂纖維、醯胺纖維、聚亞醯胺纖維、聚丙烯酸脂基纖維、尼龍纖維或奈米纖維。 According to still another exemplary embodiment of the present invention, the insulating reinforcing wire may be formed of: polytetrafluoroethylene fluorocarbon resin fiber, guanamine fiber, polyamido fiber, polyacrylate fiber, nylon fiber or Nanofiber.

仍然根據本發明之另一示例性實施例,支撐加固線可由下列各者形成:聚四氟乙烯基氟碳樹脂纖維、醯胺纖維、聚亞醯胺纖維、聚丙烯酸脂基纖維、尼龍纖維或奈米纖維。 According to still another exemplary embodiment of the present invention, the support reinforcing wire may be formed of: polytetrafluoroethylene fluorocarbon resin fiber, guanamine fiber, polyamido fiber, polyacrylate fiber, nylon fiber or Nanofiber.

根據本發明,隨著藉由絕緣加固線形成在插槽的一個表面上而在平行地一個方向上按壓半導體裝置之導線,並亦按壓絕緣加固線,而使環繞絕緣加固線出現的導電粉末由於壓力相對自由地與導線接觸。因此,根據接觸 壓力的接觸面積增加,藉此改良接觸電阻。 According to the present invention, as the wire of the semiconductor device is pressed in one direction in parallel by the insulating reinforcing wire on one surface of the slot, and the insulating reinforcing wire is also pressed, the conductive powder which appears around the insulating reinforcing wire is The pressure is relatively free to contact the wire. Therefore, according to the contact The contact area of the pressure is increased, thereby improving the contact resistance.

此外,在本發明中,即使比習知技術之壓力小10至20%可實行更穩定的電接觸,藉此能夠根據重複接觸而改良壽命,並降低半導體測試插槽的測試不良率。 Further, in the present invention, even if the voltage is 10 to 20% smaller than the pressure of the prior art, a more stable electrical contact can be performed, whereby the life can be improved in accordance with repeated contact, and the test failure rate of the semiconductor test socket can be lowered.

此外,根據本發明,當半導體接觸終端和插槽的導電粉末開始彼此接觸時,亦按壓絕緣加固線,所以相對寬的區域的導電粉末被按壓。因此,由於保持穩定的形狀,可最小化導電粉末的變形,而可改良相較於傳統的技術之重複接觸之壽命。 Further, according to the present invention, when the conductive powder of the semiconductor contact terminal and the socket comes into contact with each other, the insulating reinforcing wire is also pressed, so that the conductive powder of a relatively wide area is pressed. Therefore, since the shape is maintained to be stable, the deformation of the conductive powder can be minimized, and the life of repeated contact compared with the conventional technique can be improved.

根據本發明之示例性實施例將在下文參照隨附圖式以更充分地描述。然而,在本發明之示例性實施例可以許多不同的形式實施,並且不應解釋為限於本文所述之實施例。反之,此示例性實施例中係提供以使得此揭示將是徹底的和完全的,並且將充分地傳達本發明的範圍至該領域具有通常知識者。關於實行類似功能和操作之元件,在本說明書中相同的數字係指相同的元件。 Exemplary embodiments in accordance with the present invention will be described more fully hereinafter with reference to the accompanying drawings. However, the exemplary embodiments of the invention may be embodied in many different forms and should not be construed as being limited to the embodiments described herein. Rather, the exemplary embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. With respect to elements that perform similar functions and operations, the same numerals in the present specification refer to the same elements.

第1圖係根據本發明之示例性實施例之半導體測試插槽之側視圖。將參照第1圖解釋,根據本發明之本示例性實施例之半導體測試插槽。 1 is a side view of a semiconductor test socket in accordance with an exemplary embodiment of the present invention. A semiconductor test socket according to the present exemplary embodiment of the present invention will be explained with reference to FIG.

根據本發明之示例性實施例之半導體測試插槽經配置以包括導電矽單元110,絕緣矽單元120與絕緣加固線 130。 A semiconductor test socket according to an exemplary embodiment of the present invention is configured to include a conductive germanium unit 110, an insulating germanium unit 120 and an insulating reinforcing wire 130.

導電矽單元110係形成與半導體裝置之導線140接觸之區域。 The conductive germanium unit 110 forms a region in contact with the wires 140 of the semiconductor device.

絕緣矽單元120係形成在不與半導體裝置之導線140接觸之區域中,以支撐導電矽單元110,並實行絕緣層功能。 The insulating germanium unit 120 is formed in a region not in contact with the wires 140 of the semiconductor device to support the conductive germanium unit 110 and perform an insulating layer function.

至少一個絕緣加固線130係形成在與導電矽單元110之導線140接觸的表面區域上。此時,絕緣加固線130可形成在導電矽單元110之表面區域上,並可調整以對應半導體裝置之導線140間之距離。 At least one insulating reinforcing wire 130 is formed on a surface area in contact with the wire 140 of the conductive germanium unit 110. At this time, the insulating reinforcing wires 130 may be formed on the surface area of the conductive germanium unit 110 and may be adjusted to correspond to the distance between the wires 140 of the semiconductor device.

根據本發明之半導體測試插槽採用絕緣加固線130,藉此防止導電矽單元110容易因尖銳的導線140而損壞。亦即,在由導線140按壓導電矽單元110之情況下,半導體導線由絕緣加固線130穩定地按壓。因此,在本發明中,當半導體接觸終端和插槽之導電粉末開始彼此接觸時,亦按壓絕緣加固線,並因此相對寬的區域的導電粉末被按壓。因此,保持穩定的形狀,藉此能夠最小化導電粉末的變形,而可改良相較於傳統的技術之重複接觸之壽命。 The semiconductor test socket according to the present invention employs an insulating reinforcing wire 130, thereby preventing the conductive germanium unit 110 from being easily damaged by the sharp wire 140. That is, in the case where the conductive cymbal unit 110 is pressed by the wire 140, the semiconductor wire is stably pressed by the insulating reinforcing wire 130. Therefore, in the present invention, when the conductive powder of the semiconductor contact terminal and the socket comes into contact with each other, the insulating reinforcing wire is also pressed, and thus the conductive powder of a relatively wide area is pressed. Therefore, a stable shape is maintained, whereby the deformation of the conductive powder can be minimized, and the life of repeated contact compared with the conventional technique can be improved.

另外,當半導體裝置之導線140與導電矽單元110接觸且被按壓時,環繞絕緣加固線130之導電粉末由於壓力自由地與導線140接觸。因此,根據本發明之半導體測試插槽穩定地電性連接到半導體裝置之導線140,並且亦改良重複接觸的壽命。 In addition, when the wire 140 of the semiconductor device is in contact with the conductive germanium unit 110 and is pressed, the conductive powder surrounding the insulating reinforcing wire 130 is freely contacted with the wire 140 due to pressure. Therefore, the semiconductor test socket according to the present invention is stably electrically connected to the wires 140 of the semiconductor device, and the life of the repeated contacts is also improved.

因此,在本發明中,由於實行更穩定的電性接觸,而即使在相較於習知技術之低壓下,可改良重複接觸的壽命,並可減少半導體測試插槽之測試不良率。 Therefore, in the present invention, since a more stable electrical contact is performed, the life of the repeated contact can be improved even at a low voltage compared to the conventional technique, and the test failure rate of the semiconductor test socket can be reduced.

第2圖係根據本發明之示例性實施例之半導體測試插槽之視圖。 2 is a view of a semiconductor test socket in accordance with an exemplary embodiment of the present invention.

如第2圖所示,根據本發明之示例性實施例之半導體測試插槽中,導電矽單元110和絕緣矽單元120形成之半導體之接觸區域上之絕緣材料形成的絕緣加固線130係形成在水平方向上。 As shown in FIG. 2, in the semiconductor test socket according to an exemplary embodiment of the present invention, an insulating reinforcing line 130 formed of an insulating material on a contact region of a semiconductor formed by the conductive germanium unit 110 and the insulating germanium unit 120 is formed in In the horizontal direction.

像這樣,隨著絕緣加固線130在水平方向上形成,且當半導體裝置之導線按壓在半導體測試插槽之導電矽單元110上時,相較於絕緣加固線130形成網格形狀之情況,導線可使用相對小的力與導電粉末接觸。因此,在本發明中,沒有過大的力施加至變得薄與高度集成的半導體,藉此能夠減少晶片損壞或鍵被激發的現象,並改良半導體測試插槽之壽命。 As such, as the insulating reinforcing wire 130 is formed in the horizontal direction, and when the wire of the semiconductor device is pressed against the conductive germanium unit 110 of the semiconductor test socket, the wire is formed as compared with the insulating reinforcing wire 130. A relatively small force can be used to contact the conductive powder. Therefore, in the present invention, no excessive force is applied to the semiconductor which becomes thin and highly integrated, whereby the phenomenon of wafer damage or key excitation can be reduced, and the life of the semiconductor test socket can be improved.

使用穩定的電絕緣性與溫度及化學特性的絕緣材料以形成絕緣加固線130。 An insulating material having stable electrical insulation and temperature and chemical characteristics is used to form the insulating reinforcing wire 130.

第3圖係根據本發明之示例性實施例之半導體測試插槽之放大視圖。更特定言之,第3圖圖示具有0.12mm之寬度、0.2mm之距離與0.1mm之厚度之絕緣加固線130之示例性實施例。 Figure 3 is an enlarged view of a semiconductor test socket in accordance with an exemplary embodiment of the present invention. More specifically, FIG. 3 illustrates an exemplary embodiment of an insulating reinforcing wire 130 having a width of 0.12 mm, a distance of 0.2 mm, and a thickness of 0.1 mm.

根據本發明之示例性實施例之絕緣加固線130係使用具有優異的電、熱和化學性質之絕緣材料形成。聚四氟 乙烯基氟碳樹脂纖維、醯胺纖維、聚亞醯胺纖維、聚丙烯酸脂基纖維、尼龍纖維、奈米纖維或類似物可使用為絕緣材料。 The insulating reinforcing wire 130 according to an exemplary embodiment of the present invention is formed using an insulating material having excellent electrical, thermal, and chemical properties. Polytetrafluoro Vinyl fluorocarbon resin fibers, guanamine fibers, polyamidocellulose fibers, polyacrylate-based fibers, nylon fibers, nanofibers or the like can be used as the insulating material.

可藉由調整絕緣加固線130的寬度、距離與厚度使用絕緣加固線130,並在實行測試時根據半導體之接觸導線間之距離而使得絕緣加固線130具有0.05至0.15mm之寬度,0.15至0.25mm之距離,以及0.05至0.3mm之厚度。 The insulating reinforcing wire 130 can be used by adjusting the width, distance and thickness of the insulating reinforcing wire 130, and the insulating reinforcing wire 130 has a width of 0.05 to 0.15 mm, 0.15 to 0.25 according to the distance between the contact wires of the semiconductor during the test. The distance of mm and the thickness of 0.05 to 0.3 mm.

第4、5及6圖係根據本發明之另一示例性實施例之半導體測試插槽之視圖。 4, 5 and 6 are views of a semiconductor test socket in accordance with another exemplary embodiment of the present invention.

根據本發明之示例性實施例,如第4、5及6圖所示,半導體測試插槽可進一步包括連接絕緣加固線123的支撐加固線135。 According to an exemplary embodiment of the present invention, as shown in FIGS. 4, 5, and 6, the semiconductor test socket may further include a support reinforcement line 135 that connects the insulation reinforcement wires 123.

支撐加固線135可形成在絕緣矽單元的表面區域上,以跨越複數個絕緣加固線130。絕緣加固線130可由聚四氟乙烯基氟碳樹脂纖維、醯胺纖維、聚亞醯胺纖維、聚丙烯酸脂基纖維、尼龍纖維或奈米纖維形成。 A support reinforcing line 135 may be formed on a surface area of the insulating unit to span a plurality of insulating reinforcing lines 130. The insulating reinforcing wire 130 may be formed of polytetrafluoroethylene fluorocarbon resin fiber, guanamine fiber, polyamidocellulose fiber, polyacrylate-based fiber, nylon fiber or nanofiber.

根據本發明之另一示例性實施例,如第4圖所圖示,半導體測試插槽可經配置以使得支撐加固線135僅形成在中央部分。更具體言之,當絕緣加固線130佈置在第一方向上時,支撐加固線135可沿著絕緣加固線130的中央區域佈置在第二方向上。此時,根據本發明之示例性實施例中的中央區域係為包括不包括絕緣加固線130之佈置結構之兩端的內部區域之概念。 According to another exemplary embodiment of the present invention, as illustrated in FIG. 4, the semiconductor test socket may be configured such that the support reinforcement line 135 is formed only at the central portion. More specifically, when the insulating reinforcing wires 130 are arranged in the first direction, the supporting reinforcing wires 135 may be arranged in the second direction along the central region of the insulating reinforcing wires 130. At this time, the central region in the exemplary embodiment according to the present invention is a concept including an inner region including both ends of the arrangement of the insulating reinforcing wires 130.

根據本發明之又另一示例性實施例,如第5圖所圖示,斷開支撐加固線135之中央區域,且支撐加固線135係連接至在第二方向上的複數個絕緣加固線130的一個端,而使得可形成韓國字母「」的形狀。 According to still another exemplary embodiment of the present invention, as illustrated in FIG. 5, the central region of the support reinforcing wire 135 is broken, and the support reinforcing wire 135 is connected to the plurality of insulating reinforcing wires 130 in the second direction. One end, so that the Korean alphabet can be formed" "shape.

根據本發明之又另一示例性實施例,如第6圖所圖示,支撐加固線135可佈置以跨越彼此相鄰的絕緣加固線130的兩個端,並在絕緣加固線130和支撐加固線135可佈置以直角彼此跨越。亦即,如第6圖所圖示,佈置為跨越之結構係為藉由連接絕緣加固線130而將支撐加固線135佈置為類似韓國字母「」形狀之鋸齒形(zigzag sharp)的結構。 According to still another exemplary embodiment of the present invention, as illustrated in FIG. 6, the support reinforcing wires 135 may be disposed to span both ends of the insulating reinforcing wires 130 adjacent to each other, and are reinforced at the insulating reinforcing wires 130 and the support. Lines 135 can be arranged to span each other at right angles. That is, as illustrated in FIG. 6, the structure arranged to span is to arrange the support reinforcement line 135 to resemble a Korean letter by connecting the insulation reinforcing wires 130. The zigzag sharp structure.

此外,在如晶片級封裝(CSP)之扁平封裝之情況下,如第7圖所圖示,因為在半導體測試插槽經配置以使得導電單元之導線在包裝下部的所有方向上平坦地形成,絕緣加固線130可形成平行於導線之方向。 Further, in the case of a flat package such as a wafer level package (CSP), as illustrated in FIG. 7, since the semiconductor test socket is configured such that the wires of the conductive unit are formed flat in all directions of the lower portion of the package, The insulating reinforcing wires 130 may form a direction parallel to the wires.

因此,在本發明中,隨著藉由絕緣加固線形成在插槽的一個表面上而在平行地一個方向上按壓半導體裝置之導線,並亦按壓絕緣加固線,而因此環繞絕緣加固線出現的導電粉末由於壓力相對自由地與導線接觸。因此,隨著相較於習知技術之接觸壓力增加,而接觸面積增加,並因此由於接觸電阻之改良,即使在小了10%至20%的壓力亦可實行更穩定的電性接觸。因此,在本發明中,可改良半導體測試插槽的重複接觸的壽命,並可減少半導體測試插槽的測試不良率。 Therefore, in the present invention, as the wire of the semiconductor device is pressed in one direction in parallel by the insulating reinforcing wire on one surface of the slot, and the insulating reinforcing wire is also pressed, the surrounding reinforcing reinforcing wire appears. The conductive powder is relatively free to contact the wire due to the pressure. Therefore, as the contact pressure is increased as compared with the prior art, the contact area is increased, and thus, due to the improvement of the contact resistance, a more stable electrical contact can be performed even at a pressure of 10% to 20% smaller. Therefore, in the present invention, the life of repeated contact of the semiconductor test socket can be improved, and the test failure rate of the semiconductor test socket can be reduced.

如前所述,在本發明之【實施方式】中已描述本發明的詳細的示例性實施例,應可藉由本領域具有通常知識者在不脫離本發明的精神或範疇的情況下輕義地修改和變化。因此,應理解,如前所述係為本發明的說明,而不應限制為所揭示的特定實施例,並且對所揭示的實施例的修改,以及其他實施例,係意欲包含在專利申請範圍及等效物的範圍中。 As described above, the detailed exemplary embodiments of the present invention have been described in the embodiments of the present invention, and it should be understood by those skilled in the art without departing from the spirit or scope of the invention. Modifications and changes. Therefore, it is to be understood that the foregoing description of the present invention is not intended to be limited to the specific embodiments disclosed, and modifications of the disclosed embodiments, as well as other embodiments, are intended to be included in the scope of the patent application. And the scope of the equivalent.

110‧‧‧導電矽單元 110‧‧‧ Conductive unit

120‧‧‧絕緣矽單元 120‧‧‧Insulation unit

130‧‧‧絕緣加固線 130‧‧‧Insulation reinforcement line

135‧‧‧支撐加固線 135‧‧‧Support reinforcement line

140‧‧‧導線 140‧‧‧Wire

隨附圖式係包括以提供本發明之進一步理解,並且被併入並構成本說明書的一部分。圖式所圖示之本發明的示例性實施例與說明書一起,用於解釋本發明的原則。在圖式中:第1圖係根據本發明之示例性實施例之半導體測試插槽之側視圖。 The accompanying drawings are included to provide a further understanding of the invention and are incorporated The exemplary embodiments of the invention, which are illustrated in the drawings, are intended to illustrate the principles of the invention. In the drawings: Figure 1 is a side view of a semiconductor test socket in accordance with an exemplary embodiment of the present invention.

第2圖係根據本發明之示例性實施例之半導體測試插槽之視圖。 2 is a view of a semiconductor test socket in accordance with an exemplary embodiment of the present invention.

第3圖係根據本發明之示例性實施例之半導體測試插槽之放大視圖。 Figure 3 is an enlarged view of a semiconductor test socket in accordance with an exemplary embodiment of the present invention.

第4、5及6圖係根據本發明之另一示例性實施例之半導體測試插槽之視圖。 4, 5 and 6 are views of a semiconductor test socket in accordance with another exemplary embodiment of the present invention.

第7圖係為如晶片級封裝(CSP)之扁平封裝之視圖。 Figure 7 is a view of a flat package such as a wafer level package (CSP).

110‧‧‧導電矽單元 110‧‧‧ Conductive unit

120‧‧‧絕緣矽單元 120‧‧‧Insulation unit

130‧‧‧絕緣加固線 130‧‧‧Insulation reinforcement line

140‧‧‧導線 140‧‧‧Wire

Claims (11)

一種半導體測試插槽,包含:一導電矽單元,該導電矽單元係形成在與一半導體裝置之導線接觸之一區域中;以及一絕緣矽單元,該絕緣矽單元係形成在不與該半導體裝置之該等導線接觸之一區域中,以支撐該導電矽單元,並實行一絕緣層功能;以及至少一個絕緣加固線,該至少一個絕緣加固線係形成在與該導電矽單元之該等導線接觸之該區域中。 A semiconductor test socket comprising: a conductive germanium unit formed in a region in contact with a conductor of a semiconductor device; and an insulating germanium unit formed without the semiconductor device One of the wires contacting one of the regions to support the conductive germanium unit and performing an insulating layer function; and at least one insulating reinforcing wire formed in contact with the conductive wires of the conductive germanium unit In this area. 如請求項1所述之半導體測試插槽,更進一步包含一支撐加固線,該支撐加固線將該複數個絕緣加固線連接至該絕緣矽單元之一表面區域。 The semiconductor test socket of claim 1, further comprising a support reinforcement line connecting the plurality of insulation reinforcement wires to a surface area of the insulation unit. 如請求項2所述之半導體測試插槽,其中該半導體測試插槽經配置以使該等絕緣加固線位在一第一方向上,該第一方向係為該半導體測試插槽之一寬度方向,而該支撐加固線位在一第二方向上,該第二方向以直角跨越該第一方向上之該等絕緣加固線。 The semiconductor test socket of claim 2, wherein the semiconductor test socket is configured to position the insulating reinforcement lines in a first direction, the first direction being a width direction of the semiconductor test socket And the support reinforcement line is located in a second direction that spans the insulation reinforcement lines in the first direction at a right angle. 如請求項2所述之半導體測試插槽,其中該半導體測試插槽經配置以使該等絕緣加固線位在該第一方向上,該第一方向係為該半導體測試插槽之該寬度方向,而形成一區域,該區域在該第二方向上斷開,該第二方向以直角跨越該第一方向上之該等絕緣加固線。 The semiconductor test socket of claim 2, wherein the semiconductor test socket is configured to position the insulating reinforcement lines in the first direction, the first direction being the width direction of the semiconductor test socket Forming a region that is broken in the second direction, the second direction spanning the insulated reinforcing lines in the first direction at a right angle. 如請求項3所述之半導體測試插槽,更進一步包含一側 邊支撐加固線,該側邊支撐加固線在該第二方向上連接至該複數個絕緣加固線之一個端。 The semiconductor test slot of claim 3 further includes one side The reinforcing wire is supported by the side, and the side supporting reinforcing wire is connected to one end of the plurality of insulating reinforcing wires in the second direction. 如請求項5所述之半導體測試插槽,其中該側邊支撐加固線具有跨越該等絕緣加固線彼此相鄰之兩端之一結構。 The semiconductor test socket of claim 5, wherein the side support reinforcing wires have a structure of one of two ends adjacent to each other across the insulating reinforcing wires. 如請求項2所述之半導體測試插槽,其中該等絕緣加固線與該支撐加固線互相以直角跨越。 The semiconductor test socket of claim 2, wherein the insulated reinforcing wires and the supporting reinforcing wires cross each other at right angles. 如請求項1所述之半導體測試插槽,其中該絕緣加固線經調整以對應於該半導體裝置之該等導線間之一距離,並形成於該導電矽單元之一表面區域上。 The semiconductor test socket of claim 1, wherein the insulating reinforcing wire is adjusted to correspond to a distance between the wires of the semiconductor device and formed on a surface area of the conductive germanium unit. 如請求項1所述之半導體測試插槽,其中該等絕緣加固線具有0.05至0.15mm之一寬度、0.15至.025mm之一長度與0.05至0.3mm之一厚度。 The semiconductor test socket of claim 1, wherein the insulated reinforcing wires have a width of 0.05 to 0.15 mm, a length of 0.15 to .025 mm, and a thickness of 0.05 to 0.3 mm. 如請求項1所述之半導體測試插槽,其中該等絕緣加固線係由下列各者形成:聚四氟乙烯基氟碳樹脂纖維、醯胺纖維、聚亞醯胺纖維、聚丙烯酸脂基纖維、尼龍纖維或奈米纖維。 The semiconductor test socket according to claim 1, wherein the insulation reinforcing wires are formed by: polytetrafluoroethylene fluorocarbon resin fiber, guanamine fiber, polyamidamide fiber, polyacrylate-based fiber. , nylon fiber or nanofiber. 如請求項1所述之半導體測試插槽,其中該支撐加固線係由下列各者形成:聚四氟乙烯基氟碳樹脂纖維、醯胺纖維、聚亞醯胺纖維、聚丙烯酸脂基纖維、尼龍纖維或奈米纖維。 The semiconductor test socket according to claim 1, wherein the support reinforcing wire is formed of: polytetrafluoroethylene fluorocarbon resin fiber, guanamine fiber, polyamidamide fiber, polyacrylate-based fiber, Nylon fiber or nanofiber.
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Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000065891A (en) 1998-08-18 2000-03-03 Seiko Epson Corp Electric characteristic measuring device
KR100681156B1 (en) * 2006-01-25 2007-02-09 삼성전자주식회사 Socket for an electrical tester
KR101004296B1 (en) 2008-07-07 2010-12-28 주식회사 아이에스시테크놀러지 Test socket having conductive wire
KR101019721B1 (en) * 2008-11-11 2011-03-07 주식회사 아이에스시테크놀러지 Test socket with pillar particle
KR101173117B1 (en) * 2009-07-06 2012-08-14 리노공업주식회사 Test socket
TWI420120B (en) * 2009-08-27 2013-12-21 Leeno Ind Inc Socket for testing semiconductor chip

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TWI654435B (en) 2017-10-06 2019-03-21 吳在淑 Ground structure of socket for semiconductor chip test and socket for testing semiconductor chip including same

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