TW201314977A - Method of forming LED heat dissipation substrate - Google Patents
Method of forming LED heat dissipation substrate Download PDFInfo
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- TW201314977A TW201314977A TW100133893A TW100133893A TW201314977A TW 201314977 A TW201314977 A TW 201314977A TW 100133893 A TW100133893 A TW 100133893A TW 100133893 A TW100133893 A TW 100133893A TW 201314977 A TW201314977 A TW 201314977A
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Abstract
Description
本發明係有關於一種LED散熱基板之成型方法,尤指一種以濺鍍方式形成電路電極及導體層後,再以化學機械拋光之方式,對前述之電路電極及導體層施予拋光,並藉由化學鍍之方式於該電路電極及導體層上附著一層如銀、金等金屬之金屬表面的LED散熱基板之成型方法者。The invention relates to a method for forming a heat dissipation substrate for an LED, in particular to a method for forming a circuit electrode and a conductor layer by sputtering, and then polishing the circuit electrode and the conductor layer by chemical mechanical polishing. A method for forming an LED heat-dissipating substrate having a metal surface such as silver or gold adhered to the circuit electrode and the conductor layer by electroless plating.
由於發光二極體具有耗電低、壽命長之特點,加上近年來,發光二極體產生之亮度已逐步提升,高亮度發光二極體的應用現已逐漸取代傳統之電燈泡、日光燈等,勢將成為未來主流的照明元件。Since the light-emitting diode has the characteristics of low power consumption and long life, in recent years, the brightness of the light-emitting diode has been gradually improved, and the application of the high-brightness light-emitting diode has gradually replaced the traditional electric bulb, fluorescent lamp, and the like. It will become the mainstream lighting component in the future.
目前應用於發光二極體晶粒之固晶基板,係藉由印刷之方式,於一基材上,印刷形成電路電極及反射層,於接著發光二極體後,再施予打線及封裝之製程,而形成發光二極體之成品。At present, a solid crystal substrate applied to a light-emitting diode die is printed on a substrate by printing to form a circuit electrode and a reflective layer, and then applied to the light-emitting diode, and then applied to the wire and package. The process is completed to form a finished product of the light-emitting diode.
由於上述之電路電極及反射層係以網板印刷方式印刷於基材上,在微觀時,便可以發現,電路電極及反射層其表面是呈粗糙之表面,除了會損耗反射光源效率,導致減損其明亮度外,以網版印刷之電路電極,其導電粒子間之電阻呈不穩定,且其阻抗較高,因此在應用上較為耗電,而顯見其缺點,並有改進之必要。Since the above-mentioned circuit electrode and reflective layer are printed on the substrate by screen printing, when microscopically, it can be found that the surface of the circuit electrode and the reflective layer is rough, except that the efficiency of the reflected light source is lost, resulting in impairment. In addition to its brightness, the circuit electrodes printed by screen printing have unstable resistance between conductive particles and high impedance, so they are more power-consuming in application, and their shortcomings are obvious, and improvement is necessary.
本案發明人有鑑於此,乃予以研究創新,揭示出本發明所述LED散熱基板之成型方法。In view of this, the inventors of the present invention have researched and innovated to disclose the molding method of the LED heat dissipation substrate of the present invention.
本發明之目的旨在提供一種LED散熱基板之成型方法,係包括:The object of the present invention is to provide a method for molding an LED heat dissipation substrate, which comprises:
(a)於一基板之兩相對側面上,以濺鍍方式分別形成數組相互對應之電路電極,且至少於該基板之其中一側面上形成有多數導體層,而各該導體層是分別位於一組電路電極之一側者;(a) forming circuit electrodes corresponding to each other in an array on opposite sides of a substrate by sputtering, and forming a plurality of conductor layers on at least one side of the substrate, and each of the conductor layers is located at a One of the group circuit electrodes;
(b)以化學機械研磨[CMP,Chemical Mechanical Polishing]方式,對該基板其中一側面之各組電路電極及導體層進行拋光;以及(b) polishing the respective sets of circuit electrodes and conductor layers on one side of the substrate by a chemical mechanical polishing [CMP];
(c)將該基板以化學鍍(Chemical plating)[無電鍍(Electroless Plating)或稱自身催化電鍍(autocatalyticplating)]方式,於上述(b)步驟中,經CMP拋光之各組電路電極及導體層,鍍上一層銀或金之金屬表面,以增進本發明對光之出光效率並降低各組電路電極之電阻,並降低電耗者。(c) the substrate is subjected to electroless plating (electroplating or autocatalytic plating), and the circuit electrodes and the conductor layers are polished by CMP in the above step (b). A layer of silver or gold metal is plated to enhance the light-emitting efficiency of the present invention and to reduce the resistance of each group of circuit electrodes, and to reduce power consumption.
本發明所揭示LED散熱基板之成型方法,所形成之LED散熱基板係用以承載如發光二極體[LED]、有機發光二極體[OLED]、高分子發光二極體[PLED]……等晶粒,本發明並不自限其應用範圍。The LED heat dissipation substrate formed by the method for forming the LED heat dissipation substrate is used to carry, for example, a light emitting diode [LED], an organic light emitting diode [OLED], a polymer light emitting diode [PLED], The invention does not limit the scope of its application.
本發明所揭示LED散熱基板之成型方法,其中該基板係可陶瓷基板、氮化鋁基板……等,本發明並不自限該基板之材質者。The method for molding an LED heat dissipation substrate according to the present invention, wherein the substrate is a ceramic substrate, an aluminum nitride substrate, etc., and the present invention does not limit the material of the substrate.
本發明所揭示LED散熱基板之成型方法,其中(a)步驟,係使該基板以多次濺鍍的方式,在該基板上形成沉積,以形成各該電路電極及導體層;由於本發明採用多次濺鍍的方式,因此各該電路電極及導體層,可以更能緊附於該基板上,獲得不易脫落的優點。The method for molding an LED heat dissipating substrate according to the present invention, wherein the step (a) is such that the substrate is deposited on the substrate by multiple sputtering to form each of the circuit electrodes and the conductor layer; Since the sputtering method is performed multiple times, each of the circuit electrodes and the conductor layer can be more closely attached to the substrate, and the advantage of being easily detached is obtained.
本發明所揭示LED散熱基板之成型方法,由於最終獲得之LED散熱基板,其導體層上,係附著有出光效率較佳之銀或金之金屬表面,故可以獲得較佳之投光亮度,而各組電路電極,由於附著有導電效率高之金或銀等金屬,故可降低電力之損耗,而增進電力之使用效率,而顯現其優點,並具產業之利用性。According to the method for molding an LED heat dissipating substrate disclosed in the present invention, since the finally obtained LED heat dissipating substrate has a metal surface of silver or gold with a light-emitting efficiency attached to the conductor layer, a better projection brightness can be obtained, and each group can be obtained. Since the circuit electrode is adhered to a metal such as gold or silver having high conductivity, the power consumption can be reduced, and the use efficiency of the power can be improved, and the advantages thereof can be exhibited, and the industrial use can be utilized.
本發明之可取實體,可由以下之說明及所附各圖式,而得以明晰。The desirable entities of the present invention can be clarified by the following description and the accompanying drawings.
請參閱第一、二、三圖所示,本發明係有關於一種LED散熱基板之成型方法,係包括:Please refer to the first, second and third figures. The present invention relates to a method for forming an LED heat dissipation substrate, which comprises:
(a) 於一基板(11)之兩相對側面上,以濺鍍方式分別形成數組相互對應之電路電極(12a、12b),且至少於該基板(11)之其中一側面上形成有多數導體層(13),而各該導體層(13)是分別位於一組電路電極(12a、12b)之一側者;(a) forming circuit electrodes (12a, 12b) corresponding to each other in an array on opposite sides of a substrate (11) by sputtering, and forming a plurality of conductors on at least one side of the substrate (11) a layer (13), wherein each of the conductor layers (13) is located on one side of a group of circuit electrodes (12a, 12b);
(b) 以化學機械研磨[CMP,Chemical Mechanical Polishing]方式,對該基板(11)其中一側面之各組電路電極(12a、12b)及導體層(13)進行拋光;以及(b) polishing the respective sets of circuit electrodes (12a, 12b) and the conductor layer (13) on one side of the substrate (11) by a chemical mechanical polishing (CMP) method;
(c) 將該基板(11)以化學鍍(Chemical plating)[或稱無電鍍(Electroless Plating)、或稱自身催化電鍍(autocatalyticplating)]方式,於上述(b)步驟中,經CMP拋光之各組電路電極(12a、12b)及導體層(13),鍍上一層銀或金之金屬表面(14),以增進本發明對光之出光效率並降低各組電路電極(12a、12b)之電阻,以降低電耗者。(c) the substrate (11) is subjected to chemical plating (or electroless plating, or autocatalytic plating), in the above step (b), by CMP polishing The circuit electrodes (12a, 12b) and the conductor layer (13) are plated with a silver or gold metal surface (14) to enhance the light-emitting efficiency of the present invention and reduce the resistance of each set of circuit electrodes (12a, 12b). To reduce power consumption.
本發明所揭示LED散熱基板之成型方法,所形成之LED散熱基板係用以承載如發光二極體[LED]、有機發光二極體[OLED]、高分子發光二極體[PLED]……等晶粒,本發明並不自限其應用範圍。The LED heat dissipation substrate formed by the method for forming the LED heat dissipation substrate is used to carry, for example, a light emitting diode [LED], an organic light emitting diode [OLED], a polymer light emitting diode [PLED], The invention does not limit the scope of its application.
本發明所揭示LED散熱基板之成型方法,其中該基板(11)係可為陶瓷基板、氮化鋁基板……等,本發明並不自限該基板(11)之材質者。The method for molding an LED heat dissipation substrate according to the present invention, wherein the substrate (11) is a ceramic substrate, an aluminum nitride substrate, etc., and the present invention does not limit the material of the substrate (11).
本發明所揭示LED散熱基板之成型方法,其中在(a)步驟中,該基板(11)係以多次濺鍍的方式,在該基板(11)上形成沉積,以形成各該電路電極(12a、12b)及導體層(13);由於本發明採用多次濺鍍的方式,因此可以使各該電路電極(12a、12b)及導體層(13)更能緊附於該基板(11)上,獲得不易脫落的優點。The method for molding an LED heat dissipation substrate according to the present invention, wherein in the step (a), the substrate (11) is deposited on the substrate (11) by multiple sputtering to form each of the circuit electrodes ( 12a, 12b) and conductor layer (13); since the present invention employs multiple sputtering methods, each of the circuit electrodes (12a, 12b) and the conductor layer (13) can be more closely attached to the substrate (11) On the top, the advantage of not easy to fall off is obtained.
本發明所揭示LED散熱基板之成型方法,由於最終獲得之LED散熱基板,其導體層(13)上,係附著有出光效率較佳之銀或金之金屬表面(14),故可以獲得較佳之投光亮度,而各組電路電極(12a、12b),由於附著有導電效率高之金或銀等金屬表面(14),故可降低電力之損耗,而增進電力之使用效率,而顯現其優點,並具產業之利用性。According to the method for molding an LED heat dissipating substrate disclosed in the present invention, since the finally obtained LED heat dissipating substrate has a silver or gold metal surface (14) with a light-emitting efficiency better on the conductor layer (13), a better investment can be obtained. The brightness of the circuit, and the circuit electrodes (12a, 12b) of each group adhere to the metal surface (14) such as gold or silver with high conductivity, so that the power loss can be reduced, and the use efficiency of the power can be improved, and the advantages are obtained. And the use of the industry.
本發明所揭示之方法,可於不違本發明之精神及範疇下予以修飾應用,本發明並不予自限。The method disclosed in the present invention can be modified and applied without departing from the spirit and scope of the invention, and the invention is not limited.
(11)...之基板(11). . . Substrate
(12a)(12b)...電路電極(12a) (12b). . . Circuit electrode
(13)...導體層(13). . . Conductor layer
(14)...金屬表面(14). . . Metal surface
第一圖:係本發明之製造流程圖。First Figure: A manufacturing flow diagram of the present invention.
第二圖:係本發明所形成之LED散熱基板之平面結構圖。Second: is a plan view of the LED heat sink substrate formed by the present invention.
第三圖:係本發明於完成濺鍍步驟時之剖面結構圖。Third: is a cross-sectional structural view of the present invention when the sputtering step is completed.
第四圖:係本發明完成最終步驟後之剖面結構圖。Figure 4 is a cross-sectional structural view of the present invention after completion of the final step.
(11)...基板(11). . . Substrate
(12a)(12b)...電路電極(12a) (12b). . . Circuit electrode
(13)...導體層(13). . . Conductor layer
(14)...金屬表面(14). . . Metal surface
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JP2006261569A (en) * | 2005-03-18 | 2006-09-28 | Dowa Mining Co Ltd | Sub-mount and its manufacturing method |
CN101325236A (en) * | 2008-07-30 | 2008-12-17 | 鹤山丽得电子实业有限公司 | LED chip and manufacturing method thereof |
CN101908534B (en) * | 2009-06-08 | 2012-06-13 | 晶元光电股份有限公司 | Light emitting device |
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