201250261 六、發明說明： 【發明所屬之技術領域】 本發明係關於於半導體積體電路、液晶顯示用基板等 平板狀之被檢查體之電氣檢查使用之電氣連接裝_置與使用 該電氣連接裝置之測試裝置。 【先前技術】 積體電路係集合形成於例如平坦之石夕基板之半導體晶 圓後’該半導體晶圓切割為各晶片。此種半導體積體電路 係在其製造過程中之半導體晶圓之狀態下做為被檢查體而 接受電氣檢查。此外’於平坦之面具有電極之薄膜電晶體 基板（TFT基板）、液晶顯示面板等液晶顯示用基板亦於製 造過程中接受同樣之電氣檢查。 用於此種被檢查體t電氣檢查之檢查裝置亦即測試裝 置具備生成電氣檢查用之電氣信號或處理應答信號之測試 器，連接於該測試器且對被檢查體接觸而將測試器與被檢 查體電氣連接之電氣連接裝置^電氣連接裝置具有設有 對破檢查體之設有電極之平面對向之對向面區域之支持 體、從該支持體之前述對向面區域突出之探針。 :::氣檢査而前述電氣連接裝置往前述 針：電極接觸時，藉由前述探針之前端將對應 之則述電極之表面部分削取， 此探針係確實接觸對庳之電極^面之氧化膜除去。藉 被檢查體確實連接J:述電氣連接裝置與前述 連接然而，以探針之前端削取之電極之表 4 201250261 面。卩分會因靜電等而集中成為異物，可能對前述支持體之 月'J述對向面區域附著。 月述探針係以微小之尺寸形成，故於前述探針接觸被 檢查體之電極之狀態係前述支持體之設有探針之前述對向 面區域與被檢查體之設有電極之前述平面接近。 因此，若如比接近之狀態之前述對向面區域與被檢查 體之平面之間隔大之前述之異物對前述電氣連接裝置之前 述對向面區域附著，前述電氣連接裝置往被檢查體移動 時’該異物會對被檢查體撞擊。因此，被檢查體之積體電 路會於其電極有撞擊痕形成，或其配線斷路，受損傷而成 為製品不良。特別是若在有異物附著之狀態重複電氣檢查 會有極大之數量之製品不良產生。 專利文獻丨之電氣連接裝置係為了防止此種異物導致 之製品不良產生而於支持體之對向面區域具備凹處。亦 即，即使異物對支持體之對向面區域附著，只要附著之部 分為凹處之内側，異物會集中於凹處 。 甲不會對被檢杳 體撞擊。然而，為了確實防止異物造成 一 $砜〈彳貝傷，有形成充 分深之凹處以使不論何種大小之異物都不會從凹處突出。 此外’若考慮做為凹處之機能，不能此在 +颭將凹處於對向面區域 之全域形成，於凹所沒有形成之對 从 囟&域係有異物附 者’因該異物而被檢查體損傷1即，提供即使 亦完全不會使被檢查體損傷之電氣連接裝置為_。 [先前技術文獻] [專利文獻] 201250261 專利文獻1 :曰本專利4372785號公報 【發明内容】 [發明欲解決之課題] 因此，本發明與提供即使有異物附著亦不會使被檢查 體損傷之電氣連接裝置之思想在根本上相異，係基於防止 在於對向面區域有異物附著之狀態下之電氣檢查之想法。 亦即，本發明之目的係在於偵測於對向於電氣連接裝 置之支持體之被檢查體之對向面區域有異物附著，防止在 有異物附著之狀態下重複電氣檢查。 [解決課題之手段] 本發明之電氣連接裝置係一種電氣連接裝置，用於具 有設有電極之平面之被檢查體之電氣檢查，其特徵在於包 含： 隔著間隔且具備對向於該 對前述被檢查體之前述平面 平面配置之對向面區域之支持體 具有應接觸於前述電搞夕# _s & k «極之針碩部且該針頭部從前述1 向面區域突出為可接瓶# 接觸則述電極之複數探針、 遍佈於前述對向面區域之至少 接近而並行延伸且從前述對向面區 之配線、 1個之配線且具有互相 域露出之複數近接部分 用來將前述配線對 述配線之斷線之電氣量 線之偵測用電極。 可偵測在前述近接部分之短路或前 測裝置電氣連接之電氣連接於各配 6 201250261 前述對向面區域係分為複數區域且於各區域獨立設有 1個或複數前述配線之複數區域。 另外，前述電氣連接裝置可另包含可對前述被檢查體 隔著間隔平行於前述平面配置且將前述支持體保持於； 述被檢查體對向之面之配線基板， 該配線基板可具備前述债測用電極、電氣連接於 器電極、分別連接於前述偵測用電極與前述測 试窃電極之第1與第2之配線路， 前述支持體可具有位於前述配線與前述第i之配 之間將前述配線與前述偵㈣電極電氣連接之帛3之配 前述:二:針與“第2之配線路之間將前述探針與 』这，電極電氖連接之第4之配線路。 則述電氣連接技置可另包含位於前述配線基板與前 塊，體之間且安裝於前述配線基板與前述支持體之保持 …待體可具有一方之面安裝於 之片狀構件、一方之而目上从二 t尼叉弟1 之面且另-方之面具=述帛1之片狀構件之另-方 面具備則述對向面區域之第2之片狀構件， 月《1遗第3之配線路斑笛 之片狀構件與第2之片之配線路可係、在前述前述“ 前、片狀構件之間沿著兩片狀構件延伸。 貫通之其邱第2之片狀構件於其厚度方向 :通：基…接於前述第4之配線路並從該第 ： 路在則述被檢查體延伸之基部、 次 從該基部之延長端拄舒 ^第2之片狀構件之前述對向 201250261 面區域隔著間隔往該對向面區域平行延伸之臂部， 前述針頭部可係從前述臂部之延長端往前述被檢查體 延伸。 前述電亂連接裝置可另包含可對前述被檢查體隔著間 隔平行配置且保持前述支持體之配線基板， 該配線基板可係於對前述被檢查體對向之—方之面具 備前述複數探針抵接之複數探針島部， 、 前述支持體可具備相互隔著間隔對向之第1之板狀構 件與第2之板狀構件、以與該第i之板狀構件與第2之板 狀構件共同形成具有中空部之箱之方式設於㈣i之板狀 構件與第2之板狀構件之間之框狀構件， 前述第1t板狀構件可係於前述配線基板之設有前述 探針島部之部分保持為與前述配線基板平行， 前述第2之板狀構件可係於與對前述第！之板狀構件 對向之面相反之面具有前述對向面區域， 前述探針可係使其一端杈技計 %柢接别述探針島部，從前述| 針島部往前述被檢查體直線妝柚 且琛狀延伸，通過前述第1之板并 構件、前述中空部、前述第2夕此仙说a 义弟2之板狀構件貫通前述箱，名 前述對向面區域突出。 前述電氣連接裝置可另包含配置於前述被檢查體之夕丨 方且安裝有前述支持體之探針裝置之本體， 前述支持體可係形成為從前述本體往前賴檢查體匈 山之片狀，於其-方之面具有前述對向面區域， 、設有前述探針。 ' 8 201250261 本發明之測試裝置係—種測試裝置，包含前述電氣連 、置電乳連接於前述侦測用電極之前述電氣量測裝置。 [發明之效果] 根=本發明之前述電氣連接裝置，遍佈於對前述被檢 、一引述平面對向之對向面區域之配線具有互相接近而 f仃延伸且從前述對向面區域露出之複數近接部分，且電 札連接於對可偵測在前述近接部分之短路或前述配線之斷 線之電氣量測裝置電氣連接之電氣連接於各配線之痛測用 電極。若因於前述配線之前述近接部分有導電性之異物附 著而前述近接部分短路或對前述配線附著之異物使前述配 線斷線，前述m抵抗值會變化^前述電氣量測裝置檢 出或量測此變化，偵測於對向面區域有異物附著。 於有異物附著之場合係只要為了除去異物而清掃支持 體之對向面區域再進行電氣檢查即可n，根據本發明 之電氣連接裝I，π會在有異物附著之狀態下重複電氣檢 查，可防止異物對被檢查體給予損傷而被檢查體成為製品 不良。 【實施方式】 [第1實施例] 參照圖1，本發明之第1實施例之測試裝置1〇係用於 使用電氣連接裝£ 10將如半導體晶圓之平板狀之被檢查體 12之全域以一次或分為複數檢查區域對各檢查區域試驗之 電氣檢查。測試裝置10包含將被檢查體12可卸除地保持 201250261 之爽頭14、對該夾頭14隔間隔配置之電氣連接裝置i6、 電氣連接於該電氣連接裝置16之測試器（不圖示）與電氣 量測裝置60 (參照圖4 )。 於為被檢查體12之半導體晶圓係組裝有如電子電路之 積體電路（不圖示），該積體電路之為輸入端子或輸出端 子之複數電極12a設於被檢查體12之平面12b。 失頭14係具備於既知之檢查載台者，且具有在電極12& 朝向上方之狀態下將被檢查體12可解除地保持之上面 14A。往夾頭14之被檢查冑12之保持係可使為例如以真空 吸著來進行。 夾頭14與電氣連接裝置16係以雖不圖示但以往習知 之驅動機構於往X方向與Υ方向延伸之χγ面内、對χγ 面垂直之Ζ方向之3方向三次元地相對移冑，且繞ζ轴線 角度地相對旋轉》 本發明之電氣連接裝置16與保持於夾頭14之被檢查 體12係於試驗時於相靠近之方向（亦即圖1中之上下方向） 相對移動，使後述之探針26接觸被檢查體12之電極】2a。 電氣連接裝置1 6係電氣連接於測試裝置丨〇之前述測試 器，以在該測試器與被檢查體12之間傳達電氣信號之方式 發揮機能。為了試驗之電氣信號（電壓、電流）係包含從 别述測試器往被檢查體12供給之試驗信號、對該試驗信號 應答之從前述測試器往被檢查體丨2供給之應答信號。 電氣連接裝置1 6係包含配線基板2〇、支持於配線基板 20之一方之面20A之保持塊22、安裝於配線基板2〇與保 10 201250261 持塊22之配線片，24、設於配線片24且對被檢查體12之電 極12a接觸之複數接觸子亦即複數探針26、設於配線片24 之一方之面24A之配線28 (參照圖2 )。配線片24係做為 支持探針26之支持體發揮機能。 配線基板20係如以往習知，為例如於使玻璃纖維分散 之環氧樹脂板形成配線路之印刷配線基板（PWB : Printed wiring Board)。一般配線基板20係形成為圓形。 配線基板20係於其内部具備複數配線路30、32 (亦即 第1與第2配線路）、設於配線基板20之另一方之面20B 且對應於各配線路30、32而分別連接於配線路30、32之 一端之檢出用電極34與測試器電極36。檢出用電極34與 測試器電極3 6係分別電氣連接於之後說明之電氣量測裝置 6〇、測試裝置10之前述測試器，且沿配線基板2〇之緣部 排列。配線基板20係於被檢查體12隔間隔平行配置，保 持於測試裝置1 0之不圖示之支架。 保持塊22係位於配線基板20與配線片24之間，配置 於配線基板20之一方之面20A之中央，安裝於配線基板 20。例如，保持塊22可以將配線基板2〇於厚度方向貫通 並對保持塊22螺合之螺絲構件對配線基板2〇結合。 配線片24係具有安裝於保持塊22之接觸領域、 接觸領域24a連續且往配線基板2〇之外方延伸之一對 出區域24b、對各伸出區❺24b連續且更往外方延伸且2 於配線基板20之-方之自2〇A之連接區域24〇 支持於保持塊22， 接觸領域24a係以另一方之面24β 201250261 設有從一方之面24A往下方突出之探針 分子木計2 6位7[Technical Field] The present invention relates to an electrical connection device for use in electrical inspection of a flat object to be inspected such as a semiconductor integrated circuit or a liquid crystal display substrate, and the use of the electrical connection device Test device. [Prior Art] The integrated circuit is formed by, for example, forming a semiconductor wafer of a flat slab substrate. The semiconductor wafer is diced into individual wafers. Such a semiconductor integrated circuit is subjected to electrical inspection as a test object in the state of a semiconductor wafer in the manufacturing process. Further, a liquid crystal display substrate such as a thin film transistor substrate (TFT substrate) having an electrode on a flat surface or a liquid crystal display panel receives the same electrical inspection during the manufacturing process. The testing device for the electrical inspection of the inspected body t, that is, the testing device, is provided with a tester for generating an electrical signal for electrical inspection or a processing response signal, connected to the tester and contacting the object to be inspected to test the device Electrical connection device for inspecting electrical connection of the body ^ The electrical connection device has a support body provided with a facing surface region facing the plane of the broken inspection body, and a probe protruding from the opposite surface region of the support body . ::: gas inspection, when the electrical connection device is in contact with the needle: the electrode, the surface portion of the corresponding electrode is cut by the front end of the probe, and the probe system is in contact with the electrode of the opposite electrode The oxide film is removed. The object to be inspected is indeed connected to J: the electrical connection device is connected to the foregoing. However, the surface of the electrode taken at the front end of the probe is shown in Table 4 201250261. The sputum is concentrated as a foreign matter due to static electricity or the like, and may adhere to the opposite surface of the support. Since the probe is formed in a small size, the state in which the probe contacts the electrode of the test object is the aforementioned facing surface area of the support provided with the probe and the plane in which the electrode of the test object is provided. Close. Therefore, when the foreign matter having the larger distance between the opposing surface region and the plane of the object to be inspected is in contact with the opposing surface region of the electrical connecting device, the electrical connecting device moves toward the object to be inspected. 'The foreign object will hit the object being inspected. Therefore, the integrated circuit of the object to be inspected is formed by the presence of an impact mark on the electrode thereof, or the wiring thereof is broken, and the product is damaged to become a defective product. In particular, if the electrical inspection is repeated in the state in which foreign matter is attached, a large number of defective products may occur. The electrical connection device of the patent document has a recess in the opposing surface region of the support in order to prevent the occurrence of defective products due to such foreign matter. That is, even if the foreign matter adheres to the opposing surface region of the support, the foreign matter is concentrated in the concave portion as long as the adhered portion is divided into the inner side of the concave portion. A will not hit the body being examined. However, in order to surely prevent foreign matter from causing a sulphide, a deep recess is formed so that foreign matter of any size does not protrude from the recess. In addition, if you consider the function as a recess, you can't form the concave in the entire area of the opposite surface in the +飐, and the foreign body attached to the 囟& Inspecting the body damage 1 means providing an electrical connection device that does not damage the object to be inspected at all. [Prior Art Document] [Patent Document] 201250261 Patent Document 1: Japanese Patent No. 4372785 SUMMARY OF INVENTION [Problem to be Solved by the Invention] Therefore, the present invention provides a method of providing damage to an object to be inspected even if foreign matter adheres thereto. The idea of the electrical connection device is fundamentally different, based on the idea of preventing electrical inspection in a state where foreign matter adheres to the facing area. That is, the object of the present invention is to prevent foreign matter from adhering to the opposing surface region of the object to be inspected to the support of the electrical connecting device, and to prevent repeated electrical inspection in the presence of foreign matter. [Means for Solving the Problem] The electrical connection device of the present invention is an electrical connection device for electrical inspection of an object to be inspected having a plane on which an electrode is provided, and includes: an interval opposite to the pair The support body of the opposite plane region of the aforementioned planar plane of the object to be inspected has contact with the above-mentioned electric shovel # _s & k «pole needle portion and the needle head protrudes from the aforementioned 1-way surface region into a bottle receivable a plurality of probes contacting the electrodes, at least close to the opposite surface regions, extending in parallel and wiring from the opposite surface regions, one wiring and having a plurality of adjacent portions exposed to each other for use in the foregoing The electrode for detecting the electric quantity line of the disconnection of the wiring. The short circuit of the proximal portion or the electrical connection of the pre-measuring device can be electrically connected to each of the matching units. 201250261 The aforementioned opposing surface region is divided into a plurality of regions, and a plurality of regions of the plurality of wirings are independently provided in each region. Further, the electrical connection device may further include a wiring board that is disposed parallel to the plane with respect to the inspection object and that holds the support body on a surface facing the inspection object, and the wiring board may include the debt a measuring electrode, an electrical connection electrode, and a first and a second connecting line respectively connected to the detecting electrode and the test stealing electrode, wherein the support body may have a line between the wire and the first The 帛3 in which the wiring is electrically connected to the Detector (four) electrode is arranged as follows: the second: the needle and the "the second pair of lines are connected to the probe", and the electrode is electrically connected to the fourth line. The electrical connection technology may further include a sheet member located between the wiring board and the front block and between the body and mounted on the wiring board and the support body, and the body may be attached to the sheet member. From the other side of the two-piece nibble 1 and the mask of the other side, the second piece of the sheet-like member of the opposite side, the second piece of the wiring of the month The flake flute sheet member and 2 with the line of the sheet may be based, before the aforementioned ", extends between the two sheet-like member is a sheet-like member. The sheet-like member of the Qiu second is penetrated in the thickness direction thereof: the base is connected to the fourth distribution line, and the base: the base extending from the inspection object, and the extension from the base In the arm portion of the second sheet-like member, the facing portion of the 201250261 surface region is parallel to the opposing surface region, and the needle head portion extends from the extended end of the arm portion toward the object to be inspected. The galvanic connection device may further include a wiring board in which the support body is disposed in parallel with each other and spaced apart from each other, and the wiring board may be provided with the plurality of probes facing the object to be inspected The plurality of probe island portions that the needle abuts, and the support body may include a first plate-shaped member and a second plate-shaped member that are opposed to each other with a gap therebetween, and the second plate-shaped member and the second plate a plate-shaped member is formed in a box having a hollow portion, and is provided in a frame-like member between the plate member of the fourth member and the second plate member, and the first t-shaped member is attached to the wiring substrate. The portion of the island portion is kept parallel to the wiring board, and the second plate member can be attached to the aforementioned! The opposite surface of the plate-shaped member has the opposite surface area, and the probe may be configured such that one end of the probe is connected to the probe island portion, and the needle-to-island portion is transferred to the object to be inspected. The straight-line makeup pomelo extends in a weir-like shape, and the plate-shaped member of the first and second slabs is inserted through the first plate and the member, the hollow portion, and the plate member of the second child. The electrical connection device may further include a main body of the probe device disposed at the evening of the object to be inspected and having the support body, and the support body may be formed as a sheet from the body to the front of the Hungarian body. The probe has the aforementioned opposite surface region on the surface of the square side. 8 201250261 The test device of the present invention is a test device comprising the electrical measuring device in which the electrical connection and the electrician are connected to the detecting electrode. [Effects of the Invention] The root=the electrical connecting device of the present invention is provided so as to be adjacent to the wiring of the opposite surface region facing the inspection and the reference plane, and extending from the opposite surface region. The plurality of proximity portions are connected to the pain measuring electrodes electrically connected to the respective wires for electrically connecting the electrical measuring devices capable of detecting the short circuit of the proximal portion or the disconnection of the wiring. The m resistance value may change due to the adhesion of the conductive foreign matter to the proximity portion of the wiring, and the short-circuit of the proximal portion or the foreign matter adhering to the wiring may be changed. The electrical measuring device detects or measures the electrical measuring device. This change detects the presence of foreign matter in the opposing area. In the case where foreign matter is attached, it is only necessary to perform electrical inspection for cleaning the opposing surface region of the support in order to remove foreign matter. According to the electrical connection device I of the present invention, π repeats electrical inspection in the presence of foreign matter. It is possible to prevent foreign matter from being damaged to the object to be inspected, and the object to be inspected is defective in the product. [Embodiment] [First Embodiment] Referring to Fig. 1, a test apparatus 1 according to a first embodiment of the present invention is used for mounting a whole body of a flat object 12 such as a semiconductor wafer using an electrical connection. Conduct an electrical inspection of each inspection area test at one time or in multiple inspection areas. The test apparatus 10 includes a cooling head 14 that detachably holds the object 12 to be inspected, and an electrical connection device i6 that is disposed at intervals in the chuck 14 and a tester that is electrically connected to the electrical connection device 16 (not shown). And electrical measuring device 60 (refer to Figure 4). An integrated circuit (not shown) such as an electronic circuit is incorporated in the semiconductor wafer of the object 12 to be inspected, and the complex electrode 12a of the integrated circuit, which is an input terminal or an output terminal, is provided on the plane 12b of the object 12 to be inspected. The head 14 is provided on a known inspection stage, and has an upper surface 14A that releasably holds the inspection object 12 in a state where the electrode 12 & The holding of the inspected crucible 12 to the collet 14 can be carried out, for example, by vacuum suction. The chuck 14 and the electrical connection device 16 are three-dimensionally moved in three directions in the χ γ plane extending in the X direction and the Υ direction and three directions perpendicular to the χ 垂直 plane in the X γ plane, although not shown. And the relative rotation of the yoke axis is relatively angular. The electrical connecting device 16 of the present invention and the object 12 held by the chuck 14 are relatively moved in a direction close to each other (ie, in the upper and lower directions in FIG. 1). The probe 26 to be described later is brought into contact with the electrode 2a of the test object 12. The electrical connecting device 16 is electrically connected to the tester of the test device , to function as an electrical signal between the tester and the test object 12. The electrical signal (voltage, current) to be tested includes a test signal supplied from a tester to the test object 12, and a response signal supplied from the tester to the test object 应答2 in response to the test signal. The electrical connection device 16 includes a wiring board 2A, a holding block 22 supported on one surface 20A of the wiring board 20, and a wiring sheet mounted on the wiring board 2 and the 10201250261 holding block 22, and 24, which are provided on the wiring sheet. 24, a plurality of contacts which are in contact with the electrode 12a of the test object 12, that is, a plurality of probes 26, and a wiring 28 provided on the surface 24A of one of the wiring sheets 24 (see Fig. 2). The wiring sheet 24 functions as a support for supporting the probe 26. The wiring board 20 is conventionally known as a printed wiring board (PWB: Printed Wiring Board) in which an epoxy resin sheet in which glass fibers are dispersed is formed. The wiring board 20 is generally formed in a circular shape. The wiring board 20 is provided with a plurality of wirings 30 and 32 (that is, first and second wiring lines), and the other surface 20B of the wiring board 20, and is connected to each of the wirings 30 and 32, respectively. The detecting electrode 34 and the tester electrode 36 at one end of the line 30, 32 are provided. The detecting electrode 34 and the tester electrode 36 are electrically connected to the above-described testers of the electrical measuring device 6A and the testing device 10, which will be described later, and are arranged along the edge of the wiring substrate 2A. The wiring board 20 is placed in parallel with the inspection object 12 at intervals, and is held by a holder (not shown) of the test apparatus 10. The holding block 22 is disposed between the wiring board 20 and the wiring sheet 24, and is disposed at the center of one of the faces 20A of the wiring board 20, and is mounted on the wiring board 20. For example, the holding block 22 can join the wiring board 2 to the wiring board 2 by screwing the wiring board 2 in the thickness direction and screwing the holding block 22. The wiring sheet 24 has a contact area mounted on the holding block 22, the contact area 24a is continuous and extends outward from the wiring board 2〇, and extends outwardly and further outwardly from the protruding area 24b. The connection region 24A of the wiring board 20 from the side 2A is supported by the holding block 22, and the contact area 24a is provided with the probe molecule meter 2 which protrudes downward from the one side 24A on the other side 24β 201250261. 6 digits 7
對被檢查體12之電極12a接觸.接觸領域24 — 1f'T 竭對被檢查體12之平面12b對向之對二：方之面 配線片24係如於圖2顯示，具備第丨及第2 件4 0與4 2、配線路4 4亦即第4之配線路。兩片2 == 相互貼合，配線路44係在兩片狀構件之間沿該兩片狀構： 延和配線路則以接觸領域24a連接於探㈣，通過伸 出區域24b往連接區域24c延伸，以連接^ 線路32之L 連接^ A連接於配 探針26係如於圖2明確顯示，於配線片^之接觸區 域24a具備將第2之片狀構件42 „ '、厚度方向貫通之基部 a、與基部26a -體形成之針頭部⑽。基部—係連接 於配線路44,從該配線路44往被檢查體 2讣係從基部26a之延長端經 _十頭4 之片狀構件42之下C t 狀構件42由該第2 2…⑽路44與配線基板2。之 器電極％。 。之配線路32電氣連接於測試 技術、^ 6與配線片24係以以往習知之方法使用光微影 連靖牛刻技術、電錢技術等以與PWB同樣之製造方法以 :::驟製造。因此，基部…與配線路44係在該製造 步驟之中使用電鍍技術一體形成。 =試驗時係電氣連接裝置Μ與被檢查體〃於相靠近 極之探二1 移動，對被檢查體12之電極i2a有對應於該電 之針頭部26b接觸。藉此，測試裝置1 0之前 12 201250261 述測試器係透過電氣連接裝置16之測試器電極36、配線路 32、配線路44、探針26在與被檢查體12之間進行為了電 氣檢查之電氣信號之授受。在此接觸係如以往習知削取電 極12a之一部分而有電極i2a之切削屑產生。 連接於電氣量測裝置6〇之配線28係設於接觸區域24a 之一方之面24A亦即對向面區域，從該對向面區域露出。 配線28係不對探針26電氣連接，亦即使為電氣絕緣之相 異電路。配線28係透過設於配線片24之伸出區域24b之 配線路（不圖不）亦即第3之配線路以連接區域24^電氣連 接於配線路30之另一端。藉此，配線28係電氣連接於偵 測用電極34。配線28係可遍佈於接觸區域24a之全面或遍 佈於接觸區域24a 4 —部分。 參照圖3’前述對向面區域係區分為複數區域，在圖示 之例係具有區域50、52。於區域50係分別獨立設有一對之 配線28a、28b，於區域52係獨立設有配線28c。 設於區域50之一對之配線28a與m係具備分別互相 接近且平行延伸之近接部分（例如近接部分“A )、一條之 配線（例如配線28b)折返而互相接近且平行延伸之近接部 分（例如近接部分28B)。此外，區域52之配線—係具 備一條之配線折返而互相接近且平行延伸之近接部分（例 如近接部分28C )。 配線28a、28b、28c之各一端與各另一端係透過偵測用 電極34電氣連接於可横測配線之抵抗值亦即配線間之短路 或配線之斷線之電氣量測裝置6〇，或使為可連接。 201250261 配線28a、配線28b係在沒有異物附著之狀態下為相互 電氣絕緣。電氣量測裝置60係電氣連接於配線28a、配線 28b之各自之一端，檢出配線28a、配線28b為電氣絕緣。 若於配線2 8 a、配線2 8 b之間（例如近接部分2 8 a )有異物 附著’從配線28a到配線28b之閉電路會透過前述異物形 成。因此，電氣量測裝置60係檢出配線28a、配線28b之 導通，偵測於配線28a、配線28b之間有異物附著。 配線28b係連續之一條之配線，故從配線28b之一端 至另一端之電路係串聯電路。因此，電氣量測裝置6 〇係電 氣連接於配線28b之一端與另一端’在沒有異物附著之狀 態下係量測配線2 8 b之從前述一端至前述另一端之前述串 聯電路之電阻。若於配線28b折返而近接之近接部分（例 如近接部分28B )有使該近接部分短路之異物附著，透過異 物之新閉電路形成’配線28b之從前述一端至前述另一端 成為並聯電路。藉此’配線28b之從前述一端至前述另一 端之前述串聯電路之電阻變化（減少），故電氣量測裝置 6〇可倩測於配線28b之近接部分有異物附著。在圖示之例 係形成有以大約90度之角度折彎之配線圖案。 配線28c係與配線28b同樣地連續之一條之配線。因 此，與上述之於配線28b之近接部分有異物附著之場合同 樣地’電氣量測裝置60可偵測於配線28c之近接部分（例 如近接部分28C)有異物附著。 此外’可能於各配線（28a、28b、28c)有異物附著且 附著之異物使配線28斷線。於此種場合亦各配線28a、28b、 14 201250261 28c之從前述一臨空此丄 响主則述另一端之前述串聯電路之電阻成 為無限，故電氣眚：目丨丨壯m 礼重‘則裝置60可偵測於各配線28a、28b、28c 有異物附著。 圖4係顯示電氡量測裝置6〇與配線 —— ，4电軋寻效電 路。比圖之假相绐r 〜Ί (一點鍊線）右側係顯示電氣量測裝 60之等效電路，力如乂么 及俱丨係顯示配線28之等效電路。電氣量測 裝置6 0係包含2伯| > 之知子62、64、電源66、電流計68、 保護抵抗70。 電源66電流计68、保護抵抗70係在端子62、64之 間串聯連接。根據以電流計68量測之電流之變化，電氣量 測裝置60係可檢出連接於該電氣量測裝置6〇之前述電路 之抵抗值之變化。端子62、64係透過偵測用電極34電氣 連接於配線28。 圖4 ( A )係顯示於圖3中之配線28a與配線2扑之各 自之一端連接有端子62、64之狀態。在沒有異物72附著 之狀態下配線28a與配線28b係不形成閉電路，故於電流計 68係沒有電流流動。在於配線28a與配線28b之間有異物 72附著之狀態下配線28a與配線28b係形成閉電路，故於 電流計6 8係有電流流動。因此，在異物7 2之附著前後配 線2 8 a與配線2 8 b Fa，之抵抗值會變化，故電氣量測裝置6 〇 偵測異物之附著。 圖4 ( B )係顯示於圖3中之配線28b (或配線28c )之 一端與另一端分別連接有端子62、64之狀態。在沒有異物 72附著之狀態下配線28b係在前述一端與前述另一端之間 201250261 形成串聯電路，因此於電流計68係有既定之定電流流動。 I於配線28b之近接部分有異物72附著之狀態下，除了既 存之串聯電路外形成經過異物72之閉電路，在配線28b之 别述一端與前述另一端之間形成並聯電路。配線28b之前 述一端與前述另一端之間之等效電路變化，故於電流計68 μ動之電流亦變化。因此’在異物72之附著前後配線2扑 之則述一端與前述另一端之間之之抵抗值會變化，故電氣 量測裝置60偵測異物之附著。 圖4 ( C )係顯示於圖3中之配線28a (或配線28b、配 線28c )之一端與另一端分別連接有端子62、64之狀態。 在沒有異物72附著之狀態下配線28b係在前述一端與前述 另一端之間形成閉電路，因此於電流計68係有既定之定電 流流動。在於配線28b之近接部分有異物72附著且異物Μ 使配線28a斷線之狀態下，在配線28b之前述一端與前述另 一端之間形成開電路。因此，於電流計68變成沒有電流流 動。因此’在往前述近接部分之異物72之附著前後配線2仏 之前述一端與前述另一端之間之之抵抗值會變化，故電氣 量測裝置60根據此抵抗值之變化偵測異物之附著。 電氣量測裝置60不限於上述之實施例，只要能彳貞測或 量測配線28之抵抗值之變化，可使為其他構成。例如，可 使為與能進行抵抗值之測定之一般之複數測試器同樣之構 成。電氣量測裝置60係組入測試裝置1〇之前述測試器亦 "5J- 〇 區域區分為複數 如前述，藉由將接觸區域24a之對向面 201250261 區域50或區域52並於區域50獨立設配線28a、28b、於區 域52設配線28c且給予區域與設於該區域之配線之對應關 係來特定抵抗值變化之配線，可特定有異物附著之區域。 藉此’可特定為了將異物除去而清掃之區域，故電氣連接 裝置1 6之清掃作巽變容易。 不將對向面區域分為區域而使一條之配線2 8遍佈於對 向面區域之全域亦可。如此，只要檢出一條之配線28之抵 抗值即可，故檢出作業變容易。此外，使平行之複數配線 遍佈於對向面區域之全域亦可。 於本實施例中，偵測用電極34係與測試器電極36同 樣地設於配線基板20。但偵測用電極34係設於配線片Μ 亦可。但若偵測用電極34設於測試器電極％之附近，可 於將測試ϋ電極36對測試裝置1G之前述測試器連接之作 業並行進行將伯測用電極34對電氣量測裝置6〇連接之作 業。藉此，可簡易違行此等連接作業。 將偵測用電極34與配線28電氣連接之前述第3之配 線路係於配線片24與配線路44(帛4之配線路）相同 :即設於第1之片狀構件40與第2之片狀構件42之間亦 只要如此，可將配線路44與前述第3之配線路於配線 之1造同時製作’故沒有另外設製 路之步驟之必要，配線片24之製造變容易。 ’探針26與配線片24係以連續之步驟製造， 於探針26與配線片Μ之製造步驟使用電錢 技術在則述連續之步驟之中製造。 17 201250261 參照圖5與圖6,本發明之電氣連接裝置116係僅探針 接裝置㈣樣之構成。 其他之構成係與電氣連 探針126係以往習知之懸臂型之探針’於配線片24之 接觸區域24a包含將第2之片狀構件42於其厚度方向貫通 二=ma、-體形心基部ma之臂部—、—體形成 於U 126c之針頭部126b。基部叫係連接於配線路休 從該配線路44往被檢查體12延伸。臂部咖係從基部叫 之延長端往接觸區$ 24a隔著間隔平行延伸。針頭部126b 係從臂部126c之延長端往被檢查體12延伸。 於被檢查體12之電氣檢查時，探針126對被檢查體η 之電極⑴接觸，針頭部126b往接觸區域24a推上。藉此， 臂部l26e係以與基部126a境界為支點以既定之力靑曲。 根據電氣連接裝置丨丨6，k? & 1。+ 配線2 8亦設於對應於前述對 二面區域之臂部126c之部分，故可僧測於該部分附著之異 。偵測之異物係藉由清掃前述對向面區域而除去。因此， 於臂部126C彎曲時，可防止因於前述對向面區域附著之異 :夾於臂部126C與前述對向面區域之間而㈣me折損。 =由將配線28之前述近接部分設計為比前述對向面區域與 部心之間隔小，可更確實㈣將臂部126c折損之尺寸 之異物。 參照® 7與圆8’本發明之電氣連接裝置216係包含與 1之測試裝置Π)同樣之配線基板2G、安裝於配線基板 〇之連接基板222、安裝於連接基板222之探針基板224、 18 201250261 結合於探針基板224之複數探針226、設於探針基板224之 配線2 8。 配線基板20,連接基板222、探針基板224係相互重 疊結合，分別具備複數配線路，探針226與配線28係透過 此等配線路電氣連接於檢出用電極34與測試器電極％。 探針基板224係以對被檢查體12對向之一方之面224a 之至少一部分做為對向面區域之支持探針226之支持體。 探針226係設於探針基板224之對向面區域，從對向面區 域往被檢查體1 2突出。 探針基板224係做為以往習知之印刷配線基板製作， 具備陶兗、加入玻璃纖维之環氧樹脂等硬直之基材、設於 該基材之内部或外面之複數配線路244、對配線路244電氣 連接之探針島部228。 ,探針226係以往習知之懸臂型之探針，包含相互一體 形成之基部226a、臂部226c、針頭部鶴。基部⑽係 以其一端連接於探P島部228，從探針島部228往下方延 伸。臂部226c係從基部226a之延長端往對向面區域隔著間 隔與該對向面區域平行延伸。針頭部2鳥係從臂部22心 之延長端往下延伸。 、本實施例中之探針226係與於圖5與圖6顯示之電氣 、接裝置116之探刮-126同樣為懸臂型之探針，故有因於 •二面區域224A附著之異物72而折損之虞 '然而，根據 氣連接裝置21 6，於對向面區域224A設有配線28，故可 偵測此種異物。藉由於此異物之偵測時將該異物除去，防 19 201250261 止探針226之折損。 探針島部228與配線28係形成於對向面區域224八亦 P探針基板224之同一面。因此，於製作探針基板224之 步驟中可將探針島部228與配線28同時形成，故不以製作 探針基板224之步驟外另外製作配線28之步驟為必要。若 將探針島部228與配線28以同一步驟製作，探針島部228 與配線28之厚度成為大致同一尺寸。 參照圖9與圖10 ’本發明之電氣連接裝置316係包含 與配線基板20、安裝於配線基板2〇之探針組裝體322、設 於探針組裝體322之配線2卜探針組裝體322係具備複數 探針326、女裝並支持複數探針326之支持機構324。亦即， 支持機構324係做為支持探針326之支持體發揮機能。 支持機構324係包含第1之板狀構件330、框狀構件 332、第2之板狀構件334。第i之板狀構件與第2之 板狀構件334係、相互隔著間隔對向配置。絲構件332係 配置於第1之板狀構件請與第2之板狀構件334之間。 第1之板狀構件330、框狀構件332、第2之板狀構件说 係重疊結合為形成具有中空部3 3 6之箱。 複數探針326係、分別直線狀延伸，通過第1之板狀構 件330、中空部336、第2之板狀構件334，以貫通前述箱 之狀態安裝於支持機構324。如上述組裝探針組裝體⑵。 配線基板20係於對被檢查體12對向之面設有複數探 針島部（不圖示）’探針組裝體322係以探針326之一端 地接前述探針島部之方式安裝於前㈣線基板20。例如， 201250261 探針組裝體322係可以貫通支持機構324並對配線基板2〇 螺合之螺絲構件對配線基板2 0支持。 第2之板狀構件334之一方之面334A係以探針組裝體 322安裝於配線基7_反20之狀態對被檢查體12對向。因此， 第2之板狀構件334之一方之面334A之至少一部分係成為 對被檢查體12之平面12b對向之對向面區域。 配線2 8係.设於第2之板狀構件3 3 4之一方之面3 3 4 A。 在圖示之例雖係第2之板狀構件3 3 4於板狀之本體直接形 成配線而製作，但以將形成有配線2 8之撓性配線基板等對 板狀之本體貼附來製作亦可。 [第2實施例] 參照圖U與圖！2,本發明之第2實施例之測試裝置 410係用於如TFT &板、液晶顯示用面板等液晶顯示用基板 之發光檢查之電氣檢查。 測試裝置410包含以液晶顯示用基板做為平板狀之被 檢查體412並保持技檢查體412<夹頭（不圖示）、對保 持於該失頭之被㈣體412之緣部隔間隔配置之電氣連接 裝置川、電氣連接於該電氣連接裝置416之測試器（不圖 示）。此外’測試裝置4H)係可進一步包含前述之電氣量 測裝置60。 被檢查體412係具有矩形之形狀，於對應於其矩形之 至少1個之邊之緣部形成有多數之電極412ae各電極4心 係具有往與形成有該電極412a之緣部之長度方向（亦即圖 11之紙背方向）正交之方向（亦即圖U之左右方向）延伸 21 201250261 之帶狀之形狀，於緣部之長度方向以既定之間隔形成。 電氣連接裝置416係以往習知之探針裝置，於被檢查 體412之周圍從被檢查體412隔著間隔配置。前述探針裝 置係其本體422配置於被檢查體412之外方，包含從本體 422往被檢查體412延伸之配線片424、設於配線片似之 複數接觸子亦即複數探_似、設於配線片424之配線28、 支持配線片424之彈性構件43〇、電氣連接於配線μ之摘 測用電極（不圖示）。 探針426係對應於被檢查體412之電極412a設於配線 片424 ’探針426之節距係對應於電極412a之節距。電氣 連接裝置416與被檢查體412係以探針426對電極412“矣 觸之方式相對移動。在電氣連接裝置416與被檢查體412 之接觸係如以往習知削取電極412a之—部分而有電極仙 之切削屑產生。 配線片424係包含第3之板狀構件432、設於第3之板 狀構件432之配線434、以覆蓋配線434之方式將—方之面 434A貼附於第3之板狀構件…之第4之板狀構件㈣。 配線28係設於第4之板狀構件436之另一方之面434b。 配線片424係在其延長端配線434往被檢查體412 (圖 之下方）露出。探針426係形成於配限434之露出部分， 配線片424係做為支持探針㈣之支持體發揮作用。二針 426係透過配線434電氣連接於測試裝置41〇之前述測試 配線片424之延長端中之第3之板狀構件432之一方 22 201250261 之面432A與位於探針426之附近之第4之板狀構件彳“之 另一方之面434B之一部分係做為配線片424之對被檢查體 M2對向之對向面區域424A發揮作用。根據電氣連接裝置 410，可檢出於對向面區域附著之異物。 、 [產業上之可利用性] 本發明不限於上述實施例，只要不脫離記裁於 利範圍之主旨，各種變更皆可。 【圖式簡單說明】 圖 圖1係顯示本發明之測試裝置之帛1之實施例之側面 將圖1中之配線片之一部分擴大顯示之剖面圖。 糸將…之配線片之一部分擴大顯示之仰視圖。 圖，：顯：配線與電氣量測器之電氣等效電路之電路 圖4 Α)係顯示因異物之附著而配線間短路之狀態， 之狀離阁糸顯示因異物之附著而於配線間有並聯電路形成 ’、顯示因異物而配線斷線之狀，離。 側面係顯示本發明之電氣連接裝置之第2之;施例之 圖7 I將圖5中之配線片之—部分擴大顯示之剖面圖。 側面圖。系顯示本發明之電氣連接裝置之第3之實施例之 圖8係將圖7巾夕柄ί 圖。 探針基板之一部分擴大顯示之剖面 23 201250261 圖9係顯示本發明之電氣連接裝置之第4之實施例之 側面圖。 圖10係將圖9中之第2板狀構件之一部分擴大顯示之 剖面圖。 圖1 1係顯示本發明之測試裝置之第2之實施例之側面 圖。 圖12係將圖11中之配線片之一部分擴大顯示之仰視 圖。 【主要元件符號說明】 16 、 116 、 216 、 316 、 416 電氣連接裝置 12 ' 412 被檢查體 12a 、 412a 被檢查體之電極 24 、 224 、 324 、 424 支持體 24A、224A、324A、424A 對向面區域 26 、 226 、 326 、 426 探針 26a ' 226a ' 326a 、 426a 基部 26b 、 226b 、 326b 、 426b 針頭部 28 配線 34 偵測用電極 24The electrode 12a of the object to be inspected 12 is in contact with the contact area 24 - 1f'T, and the plane 12b of the object 12 to be inspected is opposite to each other: the square surface wiring sheet 24 is shown in Fig. 2, and has the third and the third 2 pieces of 4 0 and 4 2. The line 4 4 is the 4th line. The two pieces 2 == are fitted to each other, and the matching line 44 is formed between the two sheet-like members along the two-piece structure: the extension and the distribution line are connected to the probe (4) by the contact area 24a, and the extension area 24b is connected to the connection area 24c. The extension is connected to the connection line 32. The connection A is connected to the distribution probe 26. As is apparent from Fig. 2, the contact portion 24a of the wiring sheet has the second sheet member 42 „' and the thickness direction thereof. a base portion a, a needle head portion (10) formed integrally with the base portion 26a. The base portion is connected to the distribution line 44, and the sheet-like member from the extension end of the base portion 26a is extended from the distribution line 44 to the object to be inspected 2 The lower C 42 member 42 is formed by the second (...) path 44 and the wiring board 2. The wiring line 32 is electrically connected to the test technique, and the wiring sheet 24 is conventionally known. The manufacturing method of the same method as the PWB is manufactured by using the photolithography method, the electric money technique, the electric money technique, etc. Therefore, the base portion and the distribution line 44 are integrally formed using the plating technique in the manufacturing step. During the test, the electrical connection device Μ and the object to be inspected are moved closer to the pole. The electrode i2a of the object to be inspected 12 is in contact with the needle head 26b of the electric device. Thus, the test device 10 before 12 201250261 passes through the tester electrode 36 of the electrical connection device 16, the distribution line 32, and the distribution line. 44. The probe 26 performs an electrical signal for electrical inspection between the probe and the test object 12. Here, the contact is conventionally obtained by cutting a portion of the electrode 12a and generating chips of the electrode i2a. The wiring 28 of the measuring device 6 is disposed on the surface 24A which is one of the contact regions 24a, that is, the opposing surface region, and is exposed from the opposing surface region. The wiring 28 is not electrically connected to the probe 26, and is even electrically insulated. The wiring 28 is electrically connected to the other end of the distribution line 30 through the connection line 24^ through the distribution line (not shown) provided in the extension area 24b of the wiring sheet 24, that is, the third connection line. The wiring 28 is electrically connected to the detecting electrode 34. The wiring 28 may be distributed over the contact region 24a or distributed over the contact region 24a. Referring to Fig. 3, the aforementioned opposing region is divided into a plurality of regions. Example The regions 50 and 52 are provided with a pair of wirings 28a and 28b, and a wiring 28c is provided independently in the region 50. The wirings 28a and m of one of the regions 50 are respectively adjacent to each other and parallel. The extended proximal portion (e.g., the proximal portion "A", the one wiring (e.g., the wiring 28b) is folded back to the adjacent portion and the parallel extending proximal portion (e.g., the proximal portion 28B). In addition, the wiring of the area 52 is provided with a proximal portion (e.g., the proximal portion 28C) in which the wiring is folded back and is adjacent to each other and extends in parallel. Each of the ends 28a, 28b, and 28c is electrically connected to the other end through the detecting electrode 34, and is electrically connected to the electrical measuring device 6A of the resistance of the cross-measured wiring, that is, the short circuit between the wirings or the disconnection of the wiring, or Make it connectable. 201250261 Wiring 28a and wiring 28b are electrically insulated from each other without foreign matter adhering. The electric measuring device 60 is electrically connected to one end of each of the wiring 28a and the wiring 28b, and the detecting wiring 28a and the wiring 28b are electrically insulated. If there is foreign matter adhering between the wiring 2 8 a and the wiring 2 8 b (for example, the proximal portion 28 8 a), the closed circuit from the wiring 28a to the wiring 28b is formed through the foreign matter. Therefore, the electrical measuring device 60 detects the conduction of the wiring 28a and the wiring 28b, and detects that foreign matter adheres between the wiring 28a and the wiring 28b. Since the wiring 28b is one continuous wiring, the circuit from one end of the wiring 28b to the other end is a series circuit. Therefore, the electrical measuring device 6 is electrically connected to one end of the wiring 28b and the other end' of the resistance of the series circuit from the one end to the other end of the wiring 2 8 b in a state where no foreign matter adheres. When the wiring 28b is folded back and the immediately adjacent portion (e.g., the proximal portion 28B) has a foreign matter that short-circuits the proximal portion, a new closed circuit that transmits the foreign matter is formed. The wiring 28b is connected in parallel from the one end to the other end. Thereby, the resistance of the series circuit of the wiring 28b from the one end to the other end is changed (reduced), so that the electrical measuring device 6 can detect that foreign matter adheres to the adjacent portion of the wiring 28b. In the illustrated example, a wiring pattern bent at an angle of about 90 degrees is formed. The wiring 28c is one continuous wiring in the same manner as the wiring 28b. Therefore, the electric measuring device 60 can detect that foreign matter adheres to the proximal portion of the wiring 28c (e.g., the proximal portion 28C) in cooperation with the above-mentioned field where the foreign matter adheres to the vicinity of the wiring 28b. Further, it is possible that the foreign matter adhered to and adhered to each of the wirings (28a, 28b, 28c) causes the wiring 28 to be broken. In this case as well, the wirings 28a, 28b, 14 201250261 28c are infinite from the aforementioned one, and the resistance of the series circuit at the other end is infinite, so the electric device: the device is strong. 60 can detect that foreign matter adheres to each of the wires 28a, 28b, and 28c. Fig. 4 shows the electric 氡 measuring device 6 〇 and wiring —— , 4 electric rolling seeking circuit. The opposite phase of the figure 绐r Ί Ί (a little chain line) shows the equivalent circuit of the electrical quantity measuring device 60, and the equivalent circuit of the display wiring 28 is shown. The electrical measuring device 60 includes two electrons 62, 64, a power source 66, an ammeter 68, and a protection against 70. A power source 66 ammeter 68 and a protection against 70 are connected in series between the terminals 62, 64. Based on the change in the current measured by the ammeter 68, the electrical measuring device 60 detects the change in the resistance value of the aforementioned circuit connected to the electrical measuring device 6〇. The terminals 62 and 64 are electrically connected to the wiring 28 through the detecting electrode 34. Fig. 4 (A) shows a state in which the wirings 28a and the wirings 2 are connected to the terminals 62 and 64 at one of the ends of the wiring 2 in Fig. 3 . In the state where the foreign matter 72 is not adhered, the wiring 28a and the wiring 28b do not form a closed circuit, so that no current flows in the ammeter 68. In the state in which the foreign matter 72 is adhered between the wiring 28a and the wiring 28b, the wiring 28a and the wiring 28b form a closed circuit, so that an electric current flows through the galvanometer 68. Therefore, the resistance value of the wiring 28 8 a and the wiring 2 8 b Fa before and after the attachment of the foreign matter 7 2 changes, so that the electrical measuring device 6 detects the adhesion of the foreign matter. Fig. 4 (B) shows a state in which the terminals 62 and 64 are connected to the other end of the wiring 28b (or the wiring 28c) in Fig. 3, respectively. In the state where the foreign matter 72 is not attached, the wiring 28b forms a series circuit between the one end and the other end of the 201250261. Therefore, the galvanometer 68 has a predetermined constant current flow. In a state in which the foreign matter 72 is attached to the vicinity of the wiring 28b, a closed circuit through which the foreign matter 72 is formed is formed in addition to the existing series circuit, and a parallel circuit is formed between one end of the wiring 28b and the other end. The equivalent circuit between the one end and the other end of the wiring 28b changes, so that the current of the galvanometer 68 μ also changes. Therefore, the resistance value between the one end and the other end of the wiring 2 is changed before and after the attachment of the foreign matter 72, so that the electrical measuring device 60 detects the adhesion of the foreign matter. Fig. 4 (C) shows a state in which the terminals 62, 64 are connected to one end of the wiring 28a (or the wiring 28b, the wiring 28c) in Fig. 3, respectively. In the state where the foreign matter 72 is not attached, the wiring 28b forms a closed circuit between the one end and the other end. Therefore, the galvanometer 68 has a predetermined constant current flow. In a state in which the foreign matter 72 is adhered to the proximal portion of the wiring 28b and the foreign matter 断 is disconnected from the wiring 28a, an open circuit is formed between the one end of the wiring 28b and the other end. Therefore, no current flows in the ammeter 68. Therefore, the resistance value between the one end and the other end of the wiring 2仏 before and after the attachment of the foreign matter 72 to the proximal portion changes, and the electrical measuring device 60 detects the adhesion of the foreign matter based on the change in the resistance value. The electric measuring device 60 is not limited to the above-described embodiment, and may be configured as long as it can detect or measure the change in the resistance value of the wiring 28. For example, it can be constructed in the same manner as a general multi-tester capable of performing measurement of resistance values. The electrical measuring device 60 is incorporated into the testing device 1 and the aforementioned tester is also divided into a plurality of regions as described above, by the opposite surface of the contact region 24a 201250261 region 50 or region 52 and independent of the region 50 In the wirings 28a and 28b, the wiring 28c is provided in the region 52, and the wiring of the region and the wiring provided in the region is specified to specify the wiring having the resistance value change, and the region where the foreign matter adheres can be specified. Therefore, the area in which the foreign matter is removed for cleaning can be specified, so that the cleaning of the electrical connecting device 16 becomes easy. The opposite surface area is not divided into areas, and one wiring 2 8 may be distributed over the entire area of the opposite surface area. Thus, as long as the resistance value of one of the wires 28 is detected, the detection operation becomes easy. Further, it is also possible to spread the parallel plurality of wirings over the entire area of the facing area. In the present embodiment, the detecting electrode 34 is provided on the wiring board 20 in the same manner as the tester electrode 36. However, the detecting electrode 34 may be provided on the wiring sheet. However, if the detecting electrode 34 is disposed near the tester electrode %, the test electrode 33 can be connected to the test device 1G in parallel with the operation of connecting the test electrode 1 to the electrical measuring device 6 Homework. This makes it easy to violate these connection jobs. The third matching circuit that electrically connects the detecting electrode 34 and the wiring 28 is the same as the wiring piece 24 and the wiring line 44 (the wiring line of the crucible 4): that is, the first sheet member 40 and the second one. As long as the sheet members 42 are arranged as described above, it is possible to manufacture the wiring line 44 and the third wiring line at the same time as the wiring. Therefore, it is necessary to separately provide a circuit, and the wiring sheet 24 can be easily manufactured. The probe 26 and the wiring sheet 24 are manufactured in a continuous step, and are manufactured in a continuous step using the electric money technique in the manufacturing steps of the probe 26 and the wiring sheet. 17 201250261 Referring to Fig. 5 and Fig. 6, the electrical connecting device 116 of the present invention is constructed only by the probe connecting device (four). The other configuration and the electrical connection probe 126 are conventionally known as a cantilever type probe 'in the contact region 24a of the wiring sheet 24, and the second sheet member 42 is penetrated in the thickness direction thereof by two = ma, - body base portion The arm of the ma—the body is formed on the needle head 126b of the U 126c. The base portion is connected to the distribution line and extends from the distribution line 44 to the object 12 to be inspected. The arm portion is extended in parallel from the extended end of the base to the contact area $24a across the interval. The needle head portion 126b extends from the extended end of the arm portion 126c toward the subject 12 to be inspected. At the time of electrical inspection of the test object 12, the probe 126 is in contact with the electrode (1) of the test object η, and the needle head 126b is pushed up toward the contact area 24a. Thereby, the arm portion l26e is twisted with a predetermined force with the boundary of the base portion 126a as a fulcrum. According to the electrical connection device 丨丨6, k? & 1. The wiring 2 8 is also provided in the portion corresponding to the arm portion 126c of the opposite two-sided region, so that the difference in adhesion of the portion can be measured. The detected foreign matter is removed by cleaning the aforementioned opposing surface area. Therefore, when the arm portion 126C is bent, it is possible to prevent the difference in the adhesion to the opposing surface region from being sandwiched between the arm portion 126C and the opposing surface region, and (4)me is broken. = By designing the aforementioned abutting portion of the wiring 28 to be smaller than the interval between the opposing face region and the center of the core, it is possible to more reliably (4) the foreign matter of the size of the arm portion 126c. The electric connection device 216 of the present invention includes the wiring board 2G similar to the test apparatus of the first embodiment, the connection board 222 attached to the wiring board, and the probe board 224 attached to the connection board 222, 18 201250261 A plurality of probes 226 coupled to the probe substrate 224 and wirings 28 disposed on the probe substrate 224. The wiring board 20, the connection board 222, and the probe board 224 are overlapped with each other, and each has a plurality of lines, and the probe 226 and the wiring 28 are electrically connected to the detecting electrode 34 and the tester electrode % through the wiring. The probe substrate 224 is a support for the support probe 226 which serves as a facing area of at least a part of the surface 224a facing the object 12 to be inspected. The probe 226 is provided on the opposing surface area of the probe substrate 224, and protrudes from the opposing surface area toward the subject 12 to be inspected. The probe substrate 224 is produced as a conventional printed wiring board, and includes a rigid substrate such as ceramic enamel, epoxy resin added with glass fiber, a plurality of wiring lines 244 provided inside or outside the substrate, and wiring. The probe 244 is electrically connected to the probe island 228. The probe 226 is a conventional cantilever type probe, and includes a base portion 226a, an arm portion 226c, and a needle head crane which are integrally formed with each other. The base portion (10) is connected to the probe P island portion 228 at one end thereof and extends downward from the probe island portion 228. The arm portion 226c extends in parallel with the opposing surface region from the extended end of the base portion 226a toward the opposing surface region. The needle head 2 bird extends downward from the extended end of the arm 22 core. The probe 226 in this embodiment is similar to the probe-126 of the electrical and connection device 116 shown in FIG. 5 and FIG. 6, and is a cantilever type probe. Therefore, there is a foreign matter attached to the two-sided area 224A. However, since the wiring 28 is provided in the opposing surface region 224A according to the gas connecting device 21, such foreign matter can be detected. By removing the foreign matter during the detection of the foreign matter, the breakage of the probe 226 is prevented. The probe island portion 228 and the wiring 28 are formed on the same surface of the opposite surface region 224 and the P probe substrate 224. Therefore, since the probe island portion 228 and the wiring 28 can be simultaneously formed in the step of fabricating the probe substrate 224, it is necessary to separately produce the wiring 28 in addition to the step of fabricating the probe substrate 224. When the probe island portion 228 and the wiring 28 are formed in the same step, the thickness of the probe island portion 228 and the wiring 28 are substantially the same size. Referring to Fig. 9 and Fig. 10, the electrical connecting device 316 of the present invention includes a wiring board 20, a probe assembly 322 attached to the wiring board 2, and a wiring 2 provided in the probe assembly 322. The support mechanism 324 is provided with a plurality of probes 326, women's wear, and a plurality of probes 326. That is, the support mechanism 324 functions as a support for the support probe 326. The support mechanism 324 includes a first plate member 330, a frame member 332, and a second plate member 334. The i-th plate-shaped member and the second plate-shaped member 334 are disposed to face each other with a space therebetween. The wire member 332 is disposed between the first plate member and the second plate member 334. The first plate member 330, the frame member 332, and the second plate member are overlapped and joined to form a case having a hollow portion 336. The plurality of probes 326 are linearly extended, and are attached to the support mechanism 324 by the first plate member 330, the hollow portion 336, and the second plate member 334 so as to penetrate the case. The probe assembly (2) was assembled as described above. The wiring board 20 is provided with a plurality of probe island portions (not shown) on the surface facing the subject 12, and the probe assembly 322 is attached to the probe island portion at one end of the probe 326. Front (four) line substrate 20. For example, the 201250261 probe assembly 322 can support the wiring board 20 by a screw member that penetrates the support mechanism 324 and screws the wiring board 2 . One of the faces 334A of the second plate-shaped member 334 is opposed to the test object 12 in a state in which the probe assembly 322 is attached to the wiring base 7_reverse 20. Therefore, at least a part of the surface 334A of one of the second plate-shaped members 334 is a region facing the plane 12b of the test object 12. The wiring 2 8 is provided on the surface 3 3 4 A of one of the second plate-shaped members 3 3 4 . In the example shown in the figure, the second plate member 3 3 4 is formed by directly forming a wiring in a plate-like body, but a flexible wiring board on which the wiring 28 is formed is attached to a plate-like body. Also. [Second Embodiment] Referring to Figure U and Figure! 2. The test apparatus 410 of the second embodiment of the present invention is used for electrical inspection of illuminating inspection of a liquid crystal display substrate such as a TFT & panel or a liquid crystal display panel. The test apparatus 410 includes a test object 412 in which a liquid crystal display substrate is formed into a flat plate shape, and holds a technical inspection body 412 < a chuck (not shown), and is disposed at an edge of the edge of the body 412 held by the lost head. The electrical connection device is connected to a tester (not shown) of the electrical connection device 416. Further, the 'test device 4H' may further include the aforementioned electrical measuring device 60. The object to be inspected 412 has a rectangular shape, and a plurality of electrodes 412ae are formed on the edge portion corresponding to at least one of the rectangular sides thereof. The cores of the electrodes 4 have a length direction toward the edge portion where the electrode 412a is formed ( That is, the strip-shaped shape in which the direction orthogonal to the paper (in the direction of the paper U in FIG. 11) extends 21 201250261 is formed at a predetermined interval in the longitudinal direction of the edge portion. The electrical connecting device 416 is a conventional probe device and is disposed at intervals around the subject 412 from the subject 412. In the probe device, the main body 422 is disposed outside the object to be inspected 412, and includes a wiring piece 424 extending from the main body 422 to the object to be inspected 412, and a plurality of contacts, such as a plurality of contacts, which are arranged on the wiring piece. The wiring 28 of the wiring sheet 424, the elastic member 43 of the supporting wiring sheet 424, and the electrode for extraction (not shown) electrically connected to the wiring μ. The probe 426 corresponds to the pitch of the electrode 412a of the test object 412 provided on the patch 424' probe 426 corresponding to the pitch of the electrode 412a. The electrical connection device 416 and the object to be inspected 412 are relatively moved by the probe 426 in the manner of "touching" the electrode 412. The contact between the electrical connection device 416 and the object to be inspected 412 is conventionally known as the portion of the electrode 412a. The wiring piece 424 includes the third plate member 432, the wiring 434 provided in the third plate member 432, and the surface 434A attached to the wiring 434. The fourth plate-shaped member (four) of the plate-shaped member of the third member. The wiring 28 is provided on the other surface 434b of the fourth plate-shaped member 436. The wiring piece 424 is attached to the extended end wiring 434 to the object to be inspected 412 ( The lower portion of the figure is exposed. The probe 426 is formed in the exposed portion of the matching portion 434, and the wiring sheet 424 functions as a support for supporting the probe (4). The two pins 426 are electrically connected to the test device 41 through the wiring 434. One of the third plate member 432 of the third test piece 432, the face 432A of the 201250261, and the fourth plate member 彳 of the fourth plate member 位于 of the fourth side of the probe 426 are "made". It is the pair of the inspection object M2 facing the wiring piece 424 The facing area 424A functions. According to the electrical connection device 410, the foreign matter attached to the opposing surface area can be detected. [Industrial Applicability] The present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the spirit and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side elevational view showing an embodiment of a first embodiment of a test apparatus of the present invention.之一The part of the wiring piece of ... will be enlarged to show the bottom view. Fig.: Display: The circuit of the electrical equivalent circuit of the wiring and the electrical measuring device Fig. 4 Α) shows the state of short circuit between the wirings due to the adhesion of the foreign matter, and the state of the cabinet is shown in parallel with the wiring due to the adhesion of the foreign matter. The circuit forms ', and the wiring is broken due to foreign matter, and is separated. The side view shows the second part of the electrical connecting device of the present invention; the embodiment of Fig. 7 is a cross-sectional view showing a portion of the wiring piece of Fig. 5 in an enlarged manner. side view. Fig. 8 showing a third embodiment of the electrical connecting device of the present invention is a view of Fig. 7. Cross section of one portion of the probe substrate enlarged display 23 201250261 Fig. 9 is a side view showing a fourth embodiment of the electrical connecting device of the present invention. Fig. 10 is a cross-sectional view showing a part of the second plate member in Fig. 9 enlarged. Fig. 1 is a side view showing a second embodiment of the test apparatus of the present invention. Fig. 12 is a bottom plan view showing an enlarged portion of a wiring piece in Fig. 11. [Description of main component symbols] 16, 116, 216, 316, 416 Electrical connection device 12' 412 Inspected bodies 12a, 412a The electrodes 24, 224, 324, 424 of the object to be inspected are opposed to each other 24A, 224A, 324A, 424A Areas 26, 226, 326, 426 Probes 26a' 226a ' 326a, 426a Bases 26b, 226b, 326b, 426b Needle Head 28 Wiring 34 Detection Electrodes 24