TWI445973B - Electrical connecting apparatus and testing system using the same - Google Patents

Description

Electrical connection device and test device using same

The present invention relates to an electrical connection device for electrical inspection of a flat object to be inspected such as a semiconductor integrated circuit or a liquid crystal display substrate, and a test device using the electrical connection device.

The integrated circuit is formed by, for example, forming a semiconductor wafer of a flat germanium substrate, and the semiconductor wafer is diced into individual wafers. Such a semiconductor integrated circuit is subjected to electrical inspection as a test object in a state of a semiconductor wafer in the manufacturing process. Further, a liquid crystal display substrate such as a thin film transistor substrate (TFT substrate) having an electrode on a flat surface or a liquid crystal display panel receives the same electrical inspection during the manufacturing process.

The testing device for the electrical inspection of the object to be inspected, that is, the testing device, is provided with a tester for generating an electrical signal for electrical inspection or a processing response signal, connected to the tester and contacting the object to be inspected to test the device Check the electrical connections of the electrical connections. The electrical connecting device has a support for providing a facing surface facing the plane of the electrode to be inspected, and a probe protruding from the opposing surface region of the support.

In order to perform electrical inspection, when the electrical connection device moves toward the object to be inspected and the probe is in contact with the electrode, the surface portion of the corresponding electrode is removed by the front end of the probe, and the oxide film on the surface of the electrode is removed. Thereby, the probe system is surely in contact with the corresponding electrode, and the electrical connection device is surely connected to the object to be inspected. However, the surface of the electrode taken at the front end of the probe The surface portion is concentrated into foreign matter due to static electricity or the like, and may adhere to the opposing surface region of the support.

Since the probe is formed in a minute size, the probe is in contact with the electrode of the test object, and the opposite surface region of the support provided with the probe is close to the plane of the electrode on which the test object is provided. .

Therefore, when the foreign matter having the larger distance between the opposing surface region and the plane of the object to be inspected is in contact with the opposing surface region of the electrical connecting device, the electrical connecting device moves toward the object to be inspected. The foreign matter will hit the object to be inspected. Therefore, the integrated circuit of the object to be inspected is formed with an impact mark on the electrode, or the wiring thereof is broken, and the product is damaged and becomes a product defect. In particular, if the electrical inspection is repeated in the state in which foreign matter is attached, a great number of products are defective.

The electrical connection device of Patent Document 1 has a recess in the opposing surface region of the support in order to prevent the occurrence of defective products due to such foreign matter. That is, even if the foreign matter adheres to the opposing surface region of the support, as long as the adhered portion is the inner side of the concave portion, the foreign matter concentrates in the concave portion and does not hit the object to be inspected. However, in order to surely prevent damage caused by foreign matter, there is a recess formed deep enough so that foreign matter of any size does not protrude from the recess. Further, in consideration of the function as a recess, the recess cannot be formed in the entire region of the opposing surface region, and foreign matter adheres to the opposing surface region where the recess is not formed, and the specimen is damaged by the foreign matter. That is, it is difficult to provide an electrical connecting device that does not damage the object to be inspected at all even if foreign matter adheres.

[Previous Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent No. 4372785

Therefore, the present invention and the idea of providing an electrical connecting device that does not damage the object to be inspected even if foreign matter adheres are fundamentally different, and are based on the idea of preventing electrical inspection in a state where foreign matter adheres to the facing region.

That is, the object of the present invention is to prevent foreign matter from adhering to the opposing surface region of the object to be inspected to the support of the electrical connection device, and to prevent repeated electrical inspection in the presence of foreign matter.

An electrical connection device according to the present invention is an electrical connection device for electrical inspection of an object to be inspected having a plane on which an electrode is provided, and includes: an interval between the plane of the object to be inspected and an opposite direction a support body in a facing area of the planar arrangement, having a needle head to be in contact with the electrode, and the needle head protruding from the opposing surface area to contact the plurality of probes of the electrode, and extending over at least the opposing surface area a wiring having a plurality of wirings which are adjacent to each other and extend in parallel and exposed from the opposite surface area, and an electrical quantity for detecting a short circuit of the wiring portion or a disconnection of the wiring The electrical connection of the measuring device is electrically connected to the detecting electrodes of the respective wirings.

The opposing surface area is divided into a plurality of areas, and a plurality of areas of the plurality of wirings are independently provided in each area.

In addition, the electrical connection device may further include a wiring board that is disposed so as to be parallel to the plane with respect to the object to be inspected, and to hold the support body on a surface facing the object to be inspected. The wiring board may include the detecting electrode, a tester electrode electrically connected to the probe, and first and second matching lines respectively connected to the detecting electrode and the tester electrode. The support body may have a third matching line between the wiring and the first wiring, and electrically connecting the wiring to the detecting electrode, and between the probe and the second matching line. The fourth matching circuit in which the probe is electrically connected to the aforementioned tester electrode.

The electrical connection device may further include a holding block between the wiring board and the support and attached to the wiring board and the support, and the support may have one surface mounted on the first sheet of the holding block. a member in which one of the members is attached to the other surface of the first sheet-like member, and the other surface includes the second sheet-like member of the opposing surface region, and the third matching line and the fourth matching line The first sheet member and the second sheet member may extend along the two sheet members.

The probe may have a base portion that penetrates the base portion of the second sheet-like member in the thickness direction thereof, and is connected to the fourth distribution line, and extends from the fourth distribution line to the base portion of the inspection object, and the base portion Extending the end to the aforementioned opposite direction of the second sheet member The arm portion extends in an arm portion extending in parallel with the opposing surface region, and the needle head may extend from the extended end of the arm portion toward the object to be inspected.

The electrical connection device may further include a wiring substrate in which the support body is disposed in parallel with each other and spaced apart from each other, and the wiring substrate may be provided with the plurality of probes on a surface facing the object to be inspected In the plurality of probe island portions, the support body may include a first plate-shaped member and a second plate-shaped member that face each other with a gap therebetween, and the first plate-shaped member and the second plate-shaped member a frame-shaped member provided between the first plate-shaped member and the second plate-shaped member in a manner of forming a box having a hollow portion, wherein the first plate-shaped member may be provided in the wiring substrate The portion of the island portion is kept in parallel with the wiring board, and the second plate member may have the opposite surface region on a surface opposite to a surface facing the first plate member, and the probe may be One end of the probe island portion is abutted, and the probe island portion extends linearly from the probe island portion, and the first plate member, the hollow portion, and the second plate member penetrate the case. , protruding from the aforementioned opposite surface area.

The electrical connection device may further include a body of the probe device disposed outside the object to be inspected and having the support, and the support may be formed in a sheet shape extending from the body to the object to be inspected. One of the faces has the aforementioned opposing surface area, and the probe is provided at the extended end.

The test device of the present invention is a test device comprising the electrical connection device and the electrical measuring device electrically connected to the detecting electrode.

According to the electric connecting device of the present invention, the wiring of the opposing surface region facing the plane of the object to be inspected has a plurality of closely-connected portions which are adjacent to each other and extend in parallel from the opposing surface region, and are electrically connected. The electrical connection between the electrical measuring devices that can detect the short circuit of the proximal portion or the disconnection of the wiring is electrically connected to the detecting electrodes of the respective wirings. When the foreign matter adhering to the proximal portion of the wiring is adhered, and the short-circuited portion or the foreign matter adhering to the wiring is broken, the resistance value of the wiring changes. The electrical measuring device detects or measures the change, and detects foreign matter adhesion in the opposite surface area.

When foreign matter adheres, it is only necessary to clean the opposing surface area of the support in order to remove foreign matter. Therefore, according to the electrical connecting device of the present invention, the electrical inspection is not repeated in the state in which foreign matter adheres, and it is possible to prevent foreign matter from being damaged to the object to be inspected, and the object to be inspected is defective in the product.

[First Embodiment]

Referring to Fig. 1, a test apparatus 10 according to a first embodiment of the present invention is for using an electrical connection device 16 to divide a whole of a flat object 12 such as a semiconductor wafer into a plurality of inspection areas for each inspection area. Electrical inspection of the test. The test device 10 includes the detachable holding of the object 12 to be inspected The chuck 14 has an electrical connection device 16 that is disposed at intervals between the chucks 14, a tester (not shown) that is electrically connected to the electrical connector device 16, and an electrical measuring device 60 (see FIG. 4).

An integrated circuit (not shown) such as an electronic circuit is incorporated in the semiconductor wafer of the object 12 to be inspected, and the plurality of electrodes 12a which are input terminals or output terminals of the integrated circuit are provided on the plane 12b of the object 12 to be inspected.

The chuck 14 is provided on a known inspection stage, and has an upper surface 14A that releasably holds the inspection object 12 with the electrode 12a facing upward. The holding of the test object 12 to the collet 14 can be performed, for example, by vacuum suction.

The chuck 14 and the electrical connection device 16 are relatively three-dimensionally moved in three directions in the XY plane extending in the X direction and the Y direction and three directions in the Z direction perpendicular to the XY plane, although not shown. Rotate relative to each other angularly about the Z axis.

The electrical connecting device 16 of the present invention moves relative to the object 12 to be held by the chuck 14 in a direction close to the test (that is, in the up-down direction in FIG. 1), so that the probe 26 to be described later contacts the object to be inspected. 12 electrode 12a. The electrical connection device 16 is electrically connected to the aforementioned tester of the test device 10 to function as an electrical signal between the tester and the test object 12. The electrical signal (voltage, current) to be tested includes a test signal supplied from the tester to the test object 12, and a response signal supplied from the tester to the test object 12 in response to the test signal.

The electrical connection device 16 includes a wiring substrate 20, a holding block 22 supported on one surface 20A of the wiring substrate 20, and is mounted on the wiring substrate 20 and protected. The wiring piece 24 of the holding block 22, the plurality of contacts 26 provided on the wiring sheet 24 and contacting the electrode 12a of the object 12 to be inspected, that is, the plurality of probes 26 and the wiring 28 provided on one surface 24A of the wiring sheet 24 (refer to the figure) 2). The wiring sheet 24 functions as a support for supporting the probe 26.

The wiring board 20 is a printed wiring board (PWB: Printed Wiring Board) in which an epoxy resin sheet in which glass fibers are dispersed is formed, for example, as is conventionally known. The wiring board 20 is generally formed in a circular shape.

The wiring board 20 is provided with a plurality of distribution lines 30 and 32 (that is, first and second distribution lines), and is provided on the other surface 20B of the wiring board 20, and is connected to each of the distribution lines 30 and 32, respectively. The detecting electrode 34 and the tester electrode 36 at one end of the line 30, 32 are provided. The detecting electrode 34 and the tester electrode 36 are electrically connected to the above-described testers of the electrical measuring device 60 and the testing device 10 described later, respectively, and are arranged along the edge of the wiring substrate 20. The wiring board 20 is placed in parallel with the inspection object 12 at intervals, and is held by a holder (not shown) of the test apparatus 10.

The holding block 22 is disposed between the wiring board 20 and the wiring sheet 24, and is disposed at the center of one of the faces 20A of the wiring board 20, and is attached to the wiring board 20. For example, the holding block 22 can couple the wiring board 20 in the thickness direction and screw the screw member to which the holding block 22 is screwed to the wiring board 20.

The wiring sheet 24 has a contact region 24a attached to the holding block 22, a pair of extending regions 24b extending continuously to the contact region 24a and extending outside the wiring substrate 20, and extending continuously and outwardly toward the respective protruding regions 24b. Further, it is bonded to the connection region 24c of the one surface 20A of the wiring substrate 20.

The contact area 24a is supported by the holding block 22 by the other side 24B. A probe 26 that protrudes downward from the one side 24A is provided. Each of the probes 26 is in contact with the electrode 12a of the test object 12. The surface 24A of one of the contact areas 24a is opposed to the plane 12b of the object 12 to be inspected.

As shown in FIG. 2, the wiring sheet 24 includes the first and second sheet members 40 and 42 and the fourth line of the distribution line 44. The two sheet members are attached to each other, and the distribution line 44 extends between the two sheet members along the two sheet members. The distribution line 44 is connected to the probe 26 by the contact area 24a, the extension area 24b to the connection area 24c, and the connection area 24c to the other end of the distribution line 32.

As shown in FIG. 2, the probe 26 is provided with a base portion 26a that penetrates the second sheet-like member 42 in the thickness direction and a needle portion 26b that is integrally formed with the base portion 26a in the contact region 24a of the wiring sheet 24. The base portion 26a is connected to the distribution line 44, and extends from the distribution line 44 to the inspection object 12. The needle head portion 26b protrudes from the lower end of the base portion 26a through the second sheet member 42 from the lower surface of the second sheet member 42. Therefore, the probe 26 is electrically connected to the tester electrode 36 through the wiring line 44 of the wiring sheet 24 and the wiring line 32 of the wiring substrate 20.

The probe 26 and the wiring sheet 24 are manufactured in a continuous process using a photolithography technique, an etching technique, a plating technique, or the like in the same manner as the PWB by a conventionally known method. Therefore, the base portion 26a and the wiring line 44 are integrally formed using the plating technique in this manufacturing step.

During the test, the electrical connecting device 16 and the object 12 are relatively moved in the direction in which they are in contact with each other, and the electrode 12a of the subject 12 is in contact with the needle head 26b of the probe 26 corresponding to the electrode. Thereby, before the test device 10 The tester transmits and receives an electrical signal for electrical inspection between the test object electrode 36, the distribution line 32, the distribution line 44, and the probe 26 of the electrical connection device 16 and the test object 12. Here, the contact system is conventionally obtained by cutting a portion of the electrode 12a and chipping of the electrode 12a is generated.

The wiring 28 connected to the electrical measuring device 60 is provided on the surface 24A which is one of the contact regions 24a, that is, the opposing surface region, and is exposed from the opposing surface region. The wiring 28 is not electrically connected to the probe 26, and is even a circuit that is electrically insulated. The wiring 28 is electrically connected to the other end of the distribution line 30 via the connection line 24c through a distribution line (not shown) provided in the extension region 24b of the wiring sheet 24, that is, the third distribution line. Thereby, the wiring 28 is electrically connected to the detecting electrode 34. The wiring 28 can be distributed throughout the contact area 24a or over a portion of the contact area 24a.

Referring to Fig. 3, the opposing surface area is divided into a plurality of areas, and in the illustrated example, areas 50, 52 are provided. A pair of wirings 28a and 28b are separately provided in the region 50, and a wiring 28c is provided independently in the region 52.

The wirings 28a and 28b provided in one of the regions 50 are provided with a proximal portion (for example, the proximal portion 28A) which is adjacent to each other and extends in parallel, and a wiring (for example, the wiring 28b) which is folded back to each other and which is adjacent to each other and extends in parallel (for example, Proximity portion 28B). Further, the wiring 28c of the region 52 is provided with a proximal portion (for example, the proximal portion 28C) in which one of the wirings is folded back and is adjacent to each other and extends in parallel.

Each of the ends 28a, 28b, and 28c is electrically connected to the other end through the detecting electrode 34, and is electrically connected to the electrical measuring device 60 of the resistance of the detectable wiring, that is, the short circuit of the wiring or the disconnection of the wiring, or It is connectable.

The wiring 28a and the wiring 28b are electrically insulated from each other in a state where no foreign matter adheres. The electrical measuring device 60 is electrically connected to one end of each of the wiring 28a and the wiring 28b, and the detecting wiring 28a and the wiring 28b are electrically insulated. When foreign matter adheres between the wiring 28a and the wiring 28b (for example, the proximity portion 28A), the closed circuit from the wiring 28a to the wiring 28b is formed by the foreign matter. Therefore, the electrical measuring device 60 detects the conduction of the wiring 28a and the wiring 28b, and detects that foreign matter adheres between the wiring 28a and the wiring 28b.

Since the wiring 28b is one continuous wiring, the circuit from one end of the wiring 28b to the other end is a series circuit. Therefore, the electrical measuring device 60 is electrically connected to one end and the other end of the wiring 28b, and measures the resistance of the series circuit of the wiring 28b from the one end to the other end in a state where no foreign matter adheres. When the wiring 28b is folded back and the immediately adjacent portion (for example, the proximal portion 28B) has a foreign matter that short-circuits the proximal portion, a new closed circuit that transmits foreign matter is formed, and the wiring 28b is connected in parallel from the one end to the other end. Thereby, the resistance of the series circuit of the wiring 28b from the one end to the other end is changed (reduced), so that the electrical measuring device 60 can detect that foreign matter adheres to the adjacent portion of the wiring 28b. In the illustrated example, a wiring pattern bent at an angle of about 90 degrees is formed.

The wiring 28c is one continuous wiring in the same manner as the wiring 28b. Therefore, similarly to the case where the foreign matter adheres to the vicinity of the wiring 28b, the electrical measuring device 60 can detect that foreign matter adheres to the proximal portion of the wiring 28c (for example, the proximal portion 28C).

Further, it is possible that the wires 28 are disconnected by foreign matter adhering to and adhering to the respective wires (28a, 28b, and 28c). In this case, the wirings 28a, 28b, The resistance of the series circuit of the 28c from the one end to the other end is infinite, so that the electrical measuring device 60 can detect that foreign matter adheres to each of the wires 28a, 28b, and 28c.

4 is an electrical equivalent circuit showing the electrical measuring device 60 and the wiring 28. The equivalent circuit of the electrical measuring device 60 is shown on the right side of the imaginary line (a little chain line) of the figure, and the equivalent circuit of the wiring 28 is shown on the left side. The electrical measuring device 60 includes two terminals 62 and 64, a power source 66, an ammeter 68, and a protection against 70.

A power source 66, an ammeter 68, and a protection against 70 are connected in series between the terminals 62, 64. The electrical measuring device 60 detects the change in the resistance value of the aforementioned circuit connected to the electrical measuring device 60 based on the change in the current measured by the ammeter 68. The terminals 62 and 64 are electrically connected to the wiring 28 through the detecting electrode 34.

Fig. 4(A) shows a state in which the terminals 62, 64 are connected to one end of each of the wiring 28a and the wiring 28b in Fig. 3. In the state in which the foreign matter 72 is not attached, the wiring 28a and the wiring 28b do not form a closed circuit, so that no current flows in the ammeter 68. In a state in which the foreign matter 72 is adhered between the wiring 28a and the wiring 28b, the wiring 28a and the wiring 28b form a closed circuit, so that current flows in the ammeter 68. Therefore, the resistance value between the wiring 28a and the wiring 28b changes before and after the foreign matter 72 is attached, and the electrical measuring device 60 detects the adhesion of the foreign matter.

Fig. 4(B) shows a state in which the terminals 62, 64 are connected to one end and the other end of the wiring 28b (or the wiring 28c) in Fig. 3, respectively. The wiring 28b is between the aforementioned one end and the other end in a state where no foreign matter 72 is attached. A series circuit is formed, so that the galvanometer 68 has a predetermined constant current flow. In a state in which the foreign matter 72 is adhered to the proximal portion of the wiring 28b, a closed circuit through which the foreign matter 72 is formed is formed in addition to the existing series circuit, and a parallel circuit is formed between the one end of the wiring 28b and the other end. The equivalent circuit between the one end of the wiring 28b and the other end is changed, so that the current flowing in the ammeter 68 also changes. Therefore, the resistance value between the one end of the wiring 28b and the other end before and after the attachment of the foreign matter 72 changes, and the electrical measuring device 60 detects the adhesion of the foreign matter.

Fig. 4(C) shows a state in which the terminals 62 and 64 are connected to one end and the other end of the wiring 28a (or the wiring 28b and the wiring 28c) in Fig. 3, respectively. In the state where the foreign matter 72 is not attached, the wiring 28b forms a closed circuit between the one end and the other end. Therefore, the galvanometer 68 flows with a predetermined constant current. In a state in which the foreign matter 72 adheres to the proximal portion of the wiring 28b and the foreign matter 72 breaks the wiring 28a, an open circuit is formed between the one end of the wiring 28b and the other end. Therefore, no current flows in the galvanometer 68. Therefore, the resistance value between the one end and the other end of the wiring 28b before and after the attachment to the foreign matter 72 in the proximal portion changes, and the electrical measuring device 60 detects the adhesion of the foreign matter based on the change in the resistance value.

The electrical measuring device 60 is not limited to the above-described embodiment, and may be configured as long as it can detect or measure the change in the resistance value of the wiring 28. For example, it can be configured in the same manner as a general multi-tester capable of performing measurement of resistance values. The electrical measuring device 60 may be incorporated into the aforementioned test device of the testing device 10.

As described above, the opposite surface area of the contact area 24a is divided into plural numbers In the region 50 or the region 52, the wirings 28a and 28b are provided independently in the region 50, and the wiring 28c is provided in the region 52, and the wiring of the region and the wiring provided in the region is given to specify the wiring having the resistance value change, and the region to which the foreign matter adheres can be specified. . Thereby, the area where the foreign matter is removed and removed can be specified, so that the cleaning operation of the electrical connection device 16 becomes easy.

The wiring area 28 may be distributed over the entire area of the facing area without dividing the opposing surface area into areas. Thus, as long as the resistance value of one of the wires 28 is detected, the detection operation becomes easy. Further, it is also possible to spread the parallel plurality of wirings over the entire area of the facing area.

In the present embodiment, the detecting electrode 34 is provided on the wiring board 20 in the same manner as the tester electrode 36. However, the detecting electrode 34 may be provided on the wiring sheet 24. However, if the detecting electrode 34 is disposed in the vicinity of the tester electrode 36, the detecting electrode 34 can be connected to the electrical measuring device 60 in parallel with the operation of connecting the tester electrode 36 to the tester of the testing device 10. operation. This makes it easy to perform these connection tasks.

The third matching line that electrically connects the detecting electrode 34 and the wiring 28 is the same layer as the wiring sheet 24 and the wiring line 44 (the fourth wiring), that is, the first sheet member 40 and the first The sheet members 42 of 2 may also be between. In this case, the distribution line 44 and the third distribution line can be simultaneously produced in the manufacture of the wiring sheet 24. Therefore, it is not necessary to separately provide the step of fabricating the third distribution line, and the wiring sheet 24 can be easily manufactured.

As described above, the probe 26 and the wiring sheet 24 are manufactured in a continuous step, but the wiring 28 can be manufactured in the above-described successive steps using the plating technique in the manufacturing steps of the probe 26 and the wiring sheet 24.

Referring to Fig. 5 and Fig. 6, in the electrical connecting device 116 of the present invention, only the probe 126 is different from the probe 26 shown in Fig. 2, and the other configurations are the same as those of the electrical connecting device 16.

The probe 126 is a conventional cantilever type probe, and the contact portion 24a of the wiring sheet 24 includes a base portion 126a that penetrates the second sheet member 42 in the thickness direction thereof, and an arm portion 126c that is integrally formed on the base portion 126a. The needle head 126b is formed on the arm portion 126c. The base portion 126a is connected to the distribution line 44, and extends from the distribution line 44 to the inspection object 12. The arm portion 126c extends in parallel from the extended end of the base portion 126a to the contact region 24a at intervals. The needle head portion 126b extends from the extended end of the arm portion 126c toward the subject 12 to be inspected.

At the time of electrical inspection of the subject 12, the probe 126 is in contact with the electrode 12a of the subject 12, and the needle head 126b is pushed up toward the contact area 24a. Thereby, the arm portion 126c is bent with a predetermined force with the boundary of the base portion 126a as a fulcrum.

According to the electrical connecting device 116, the wiring 28 is also provided at a portion corresponding to the arm portion 126c of the opposing surface region, so that foreign matter adhering to the portion can be detected. The detected foreign matter is removed by cleaning the aforementioned opposing surface area. Therefore, when the arm portion 126c is bent, it is possible to prevent the foreign matter adhering to the opposing surface region from being caught between the arm portion 126c and the opposing surface region, and the arm portion 126c is broken. By designing the abutting portion of the wiring 28 to be smaller than the interval between the opposing face region and the arm portion 126c, it is possible to more reliably detect foreign matter having a size that is broken by the arm portion 126c.

7 and 8 , the electrical connection device 216 of the present invention includes a wiring substrate 20 similar to the testing device 10 of FIG. 1 , a connection substrate 222 mounted on the wiring substrate 20 , and a probe substrate 224 mounted on the connection substrate 222 . The plurality of probes 226 coupled to the probe substrate 224 and the wiring 28 provided on the probe substrate 224.

The wiring board 20, the connection board 222, and the probe board 224 are overlapped with each other, and each has a plurality of lines, and the probe 226 and the wiring 28 are electrically connected to the detecting electrode 34 and the tester electrode 36 through the wiring.

The probe substrate 224 is a support for the support probe 226 which is at least a part of the face 224A facing the test object 12 as a facing area. The probe 226 is provided on the opposing surface area of the probe substrate 224, and protrudes from the opposing surface area to the subject 12 .

The probe substrate 224 is produced as a conventional printed wiring board, and includes a rigid substrate such as ceramics, epoxy resin added with glass fibers, a plurality of wiring lines 244 provided inside or outside the substrate, and a matching wiring 244. Electrically connected probe island portion 228.

The probe 226 is a conventional cantilever type probe, and includes a base portion 226a, an arm portion 226c, and a needle head portion 226b which are integrally formed with each other. The base portion 226a is connected to the probe island portion 228 at one end thereof and extends downward from the probe island portion 228. The arm portion 226c extends in parallel with the opposing surface region from the extended end of the base portion 226a to the opposing surface region. The needle head 226b extends downward from the extended end of the arm portion 226c.

The probe 226 in this embodiment is a cantilever-type probe similarly to the probe 126 of the electrical connection device 116 shown in FIGS. 5 and 6, and is thus damaged by the foreign matter 72 attached to the facing area 224A. Hey. However, according to the electrical connection device 216, the wiring 28 is provided in the opposing surface region 224A, so that such foreign matter can be detected. By removing the foreign matter during the detection of the foreign matter, the prevention The breakage of the probe 226 is stopped.

The probe island portion 228 and the wiring 28 are formed on the same surface of the opposite surface region 224A, that is, the probe substrate 224. Therefore, since the probe island portion 228 and the wiring 28 can be simultaneously formed in the step of fabricating the probe substrate 224, it is necessary to separately produce the wiring 28 in addition to the step of fabricating the probe substrate 224. When the probe island portion 228 and the wiring 28 are formed in the same step, the thickness of the probe island portion 228 and the wiring 28 are substantially the same size.

Referring to Fig. 9 and Fig. 10, the electrical connecting device 316 of the present invention includes a wiring board 20, a probe assembly 322 attached to the wiring board 20, and a wiring 28 provided in the probe assembly 322. The probe assembly 322 is provided with a plurality of probes 326 and a support mechanism 324 that mounts and supports the plurality of probes 326. That is, the support mechanism 324 functions as a support for the support probe 326.

The support mechanism 324 includes a first plate member 330, a frame member 332, and a second plate member 334. The first plate-shaped member 330 and the second plate-shaped member 334 are disposed to face each other with a space therebetween. The frame member 332 is disposed between the first plate member 330 and the second plate member 334. The first plate-shaped member 330, the frame-shaped member 332, and the second plate-shaped member 334 are superposed and joined to form a case having the hollow portion 336.

The plurality of probes 326 extend linearly, and are attached to the support mechanism 324 through the first plate member 330, the hollow portion 336, and the second plate member 334 so as to penetrate the case. The probe assembly 322 is assembled as described above.

The wiring board 20 is provided with a plurality of probe island portions (not shown) facing the object to be inspected 12, and the probe assembly 322 is attached to the probe island portion at one end of the probe 326. The wiring board 20 described above. E.g, The probe assembly 322 can support the wiring board 20 by a screw member that penetrates the support mechanism 324 and screws the wiring board 20 .

One of the faces 334A of the second plate-shaped member 334 is opposed to the test object 12 in a state where the probe assembly 322 is attached to the wiring board 20. Therefore, at least a part of the surface 334A of one of the second plate-shaped members 334 is a region facing the plane 12b of the test object 12.

The wiring 28 is provided on one of the faces 334A of the second plate member 334. In the example shown in the figure, the second plate-shaped member 334 is formed by directly forming a wiring in a plate-like body. However, a flexible wiring board on which the wiring 28 is formed may be attached to a plate-shaped body.

[Second Embodiment]

Referring to Fig. 11 and Fig. 12, a test apparatus 410 according to a second embodiment of the present invention is used for electrical inspection of illuminating inspection of a liquid crystal display substrate such as a TFT substrate or a liquid crystal display panel.

The test apparatus 410 includes a specimen 412 in which the substrate for liquid crystal display is formed into a flat shape, and holds a chuck (not shown) of the specimen 412, and is disposed at intervals along the edge of the specimen 412 held by the chuck. The electrical connection device 416 is electrically connected to the tester (not shown) of the electrical connection device 416. Additionally, test device 410 can further include the aforementioned electrical measurement device 60.

The object to be inspected 412 has a rectangular shape, and a plurality of electrodes 412a are formed on the edge portion corresponding to at least one of the sides of the rectangle. Each of the electrodes 412a has a direction orthogonal to the longitudinal direction of the edge portion on which the electrode 412a is formed (that is, the paper back direction of FIG. 11) (that is, the left-right direction of FIG. 11). The strip shape is formed at a predetermined interval in the longitudinal direction of the edge portion.

The electrical connection device 416 is a conventional probe device and is disposed at intervals around the subject 412 from the subject 412. In the probe device, the main body 422 is disposed outside the test object 412, and includes a wiring piece 424 extending from the main body 422 to the test object 412, and a plurality of contacts 426 disposed on the wiring piece 424. The wiring 28 of the wiring sheet 424, the elastic member 430 supporting the wiring sheet 424, and the detecting electrode (not shown) electrically connected to the wiring 28 are provided.

The probe 426 is provided on the wiring sheet 424 corresponding to the electrode 412a of the object to be inspected 412, and the pitch of the probe 426 corresponds to the pitch of the electrode 412a. The electrical connection device 416 and the object to be inspected 412 relatively move in such a manner that the probe 426 is in contact with the electrode 412a. The contact between the electrical connection device 416 and the object to be inspected 412 is conventionally known to be a part of the electrode 412a, and the chips of the electrode 412a are generated.

The wiring sheet 424 includes the third plate member 432, the wiring 434 provided in the third plate member 432, and the fourth surface 434A attached to the fourth plate member 432 so as to cover the wiring 434. The plate member 436. The wiring 28 is provided on the other surface 434B of the fourth plate-shaped member 436.

The wiring sheet 424 is exposed to the inspection body 412 (below the figure) at the extension end wiring 434. The probe 426 is formed on the exposed portion of the wiring 434, and the wiring sheet 424 functions as a support for the support probe 426. Probe 426 is electrically coupled to the aforementioned tester of test device 410 via wiring 434.

One of the third plate members 432 of the extended ends of the wiring sheets 424 One of the faces 434A of the fourth surface of the fourth plate-shaped member 436 located adjacent to the probe 426 is formed as a pair of facing faces 424A facing the object to be inspected 412. According to the electrical connection device 416, the foreign matter attached to the opposing surface area can be detected.

[Industrial availability]

The present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit and scope of the invention.

16, 116, 216, 316, 416‧‧‧ electrical connection devices

12. 412‧‧‧Inspected body

12a, 412a‧‧‧ electrodes of the inspected body

24‧‧‧Wiring

24A, 224A, 324A, 424A‧‧‧ opposite areas

26, 226, 326, 426‧‧ probe

Bases 26a, 226a, 326a, 426a‧‧

26b, 226b, 326b, 426b‧‧‧ needle head

28‧‧‧Wiring

34‧‧‧Detection electrode

224‧‧‧Probe substrate

324‧‧‧Support institutions

424‧‧‧Wiring sheet

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a side elevational view showing a first embodiment of the test apparatus of the present invention.

Fig. 2 is a cross-sectional view showing a portion of the wiring sheet of Fig. 1 enlarged.

Fig. 3 is a bottom plan view showing an enlarged portion of one of the wiring sheets of Fig. 1.

4 is a circuit diagram showing an electrical equivalent circuit of a wiring and an electrical measuring device, and FIG. 4(A) shows a state in which a short circuit is caused by a foreign matter, and FIG. 4(B) shows a wiring due to adhesion of a foreign matter. There is a state in which a parallel circuit is formed, and FIG. 4(C) shows a state in which the wiring is broken due to foreign matter.

Fig. 5 is a side view showing a second embodiment of the electrical connecting device of the present invention.

Fig. 6 is a cross-sectional view showing an enlarged portion of a wiring piece in Fig. 5.

Fig. 7 is a side view showing a third embodiment of the electrical connecting device of the present invention.

Fig. 8 is a cross-sectional view showing an enlarged portion of a probe substrate of Fig. 7.

Fig. 9 is a side view showing a fourth embodiment of the electrical connecting device of the present invention.

Fig. 10 is a cross-sectional view showing a part of the second plate member in Fig. 9 in an enlarged manner.

Figure 11 is a side elevational view showing a second embodiment of the test apparatus of the present invention.

Fig. 12 is a bottom plan view showing an enlarged portion of a wiring piece in Fig. 11.

24a‧‧‧Contact area

26‧‧‧Probe

28A‧‧‧ Near part

28B‧‧‧ Near part

28C‧‧‧ Near part

28a‧‧‧Wiring

28b‧‧‧Wiring

28c‧‧‧Wiring

50‧‧‧Area

52‧‧‧Area

Claims (8)

An electrical connection device for electrical inspection of an object to be inspected having a plane on which an electrode is provided, comprising: an interval facing the plane of the object to be inspected and having an opposite surface disposed opposite to the plane a support of the region, having a needle head that is in contact with the electrode, and the needle head protrudes from the opposite surface region to contact the plurality of probes of the electrode, spread over the aforementioned opposing surface regions, and have mutually adjacent and extend in parallel Electrically connecting at least one of a plurality of proximal portions exposed from the opposing surface region to electrically connect the wiring to an electrical measuring device capable of detecting a short circuit in the proximal portion or a disconnection of the wiring Detection electrodes for each wiring. The electrical connection device of claim 1, wherein the opposite surface region is divided into a plurality of regions each having one or a plurality of the plurality of wires. The electrical connection device according to the first aspect of the invention, further comprising a wiring board in which the object to be inspected is disposed in parallel with the plane and the support body is held on a surface facing the object to be inspected, The wiring board includes the detecting electrode, a tester electrode electrically connected to the probe, and first and second lines respectively connected to the detecting electrode and the tester electrode, wherein the support has the aforementioned The third wiring electrically connecting the wiring to the detecting electrode between the wiring and the first matching line A fourth line connecting the probe to the tester electrode electrically connected between the probe and the second line. The electrical connection device of claim 3, further comprising a holding block between the wiring board and the support and mounted on the wiring board and the support, wherein the support has one surface mounted on the surface The first sheet-like member of the holding block, one surface of which is attached to the other surface of the first sheet-like member, and the other surface of which has the second sheet-like member of the opposing surface region, the third The distribution line and the fourth distribution line extend along the two sheet-like members between the first sheet-like member and the second sheet-like member. The electrical connection device according to claim 4, wherein the probe has a second sheet member penetrating in a thickness direction thereof and connected to the fourth wiring line, and the wiring line is formed from the fourth wiring line. a base portion extending from the base portion, and an arm portion extending parallel to the opposing surface region from the extended end of the base portion to the opposing surface region of the second sheet-like member, wherein the needle head portion is from the arm portion The extended end extends toward the aforementioned object to be inspected. The electrical connection device according to the first aspect of the invention, further comprising: a wiring board in which the support body is arranged in parallel with the spacer to be held in parallel with each other, and the wiring board is disposed opposite to the object to be inspected The surface of the plurality of probe islands that are in contact with the plurality of probes, and the support body includes a first plate-shaped member that faces each other with a gap therebetween The second plate-shaped member is provided in the first plate-shaped member and the second plate-shaped member so as to form a box having a hollow portion together with the first plate-shaped member and the second plate-shaped member. In the frame member, the first plate-shaped member is held in a portion of the wiring board where the probe island portion is provided so as to be parallel to the wiring substrate, and the second plate-shaped member is attached to the first plate member. The surface of the plate-shaped member facing the opposite surface has the opposing surface area, and the probe has one end abutting the probe island portion, and linearly extending from the probe island portion to the object to be inspected. The first plate-shaped member, the hollow portion, and the second plate-shaped member penetrate the case and protrude from the opposing surface region. The electrical connection device of claim 1, further comprising: a body of the probe device disposed outside the object to be inspected and having the support, wherein the support system is formed to be inspected from the body to the foregoing The body extends in a sheet shape having the aforementioned facing surface region on one side thereof, and the probe is provided at the extended end thereof. A test apparatus includes the electrical connection device of claim 1 and the electrical measurement device electrically connected to the detection electrode.