201239314 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種具備與被測量物之表面接觸的觸針 ，且測量被測量物之表面形狀等的觸針式測量裝置。 【先前技術】 習知以來有一種以下的觸針式測量裝置（例如，參照 專利文獻1 )爲人所周知，該觸針式測量裝置係具備：門 型框架，其係以相互正交的水平2方向爲X軸方向及Y 軸方向，並可相對於被測量物朝X軸方向自如地相對移動 :以及Y軸載台，其係夾介線性導件朝Y軸方向移動自 如地由在該框架上端之Y軸方向呈長邊的樑所支撐，且在 Y軸載台支撐與被測量物之表面接觸的觸針。 另外，在專利文獻1所記載的發明中，作爲線性導件 ，係使用使沿著導軌而移動的滑件藉由空氣壓力以非接觸 方式支撐於導軌的靜壓式之線性導件。但是，在靜壓式之 線性導件中，很難充分地確保Y軸載台的支撐剛性。因此 ，作爲線性導件，爲人周知的是使用具備移動自如地與形 成於導軌之導引面接觸的直動軸承之滑動式或旋轉式的導 件。201239314 VI. [Technical Field] The present invention relates to a stylus type measuring device having a stylus that is in contact with a surface of an object to be measured, and measuring a surface shape or the like of the object to be measured. [Prior Art] There has been known a stylus type measuring device (for example, refer to Patent Document 1) which has a door type frame which is horizontally orthogonal to each other. The two directions are the X-axis direction and the Y-axis direction, and are relatively movable relative to the object to be measured in the X-axis direction: and the Y-axis stage, the clip-on linear guide is freely movable in the Y-axis direction. The upper end of the frame is supported by a beam having a long side in the Y-axis direction, and a stylus that contacts the surface of the object to be measured is supported on the Y-axis stage. Further, in the invention described in Patent Document 1, as the linear guide, a static-pressure linear guide that supports the slide member moving along the guide rail by the air pressure in a non-contact manner on the guide rail is used. However, in the static pressure type linear guide, it is difficult to sufficiently ensure the support rigidity of the Y-axis stage. Therefore, as a linear guide, it is known to use a slide type or a rotary guide having a linear motion bearing that is movably and in contact with a guide surface formed on a guide rail.
在此情況下，一般是在與Y軸方向呈長邊的樑之X 軸方向一方的側面，固定與Y軸方向呈長邊的上下一對導 軌，並且將朝Y軸方向移動自如地與形成於此等導軌之導 引面接觸的上下一對直動軸承固定於γ軸載台。 201239314 但是’在此導件中’當使用某程度之期間時，就會產 生導軌的導引面和直動軸承的接觸面之磨損，並在兩者間 產生間隙。而且’ Y軸載台會在上下方向位移該間隙量， 而使設置於Y軸載台的觸針用支撐部之上下方向位置從正 規位置偏移，使得測量精度惡化。 (專利文獻1)日本特開平7-218207號公報 【發明內容】 (發明所欲解決之問題） 本發明係有鑑於以上問題點而提供一種即便產生線性 導件之磨損也不會使測量精度惡化的觸針式測量裝置。 (解決問題之手段） 爲了解決上述課題，本發明的觸針式測量裝置，係具 備：門型框架，其係以相互正交的水平2方向爲X軸方向 及Y軸方向，並可相對於被測量物朝X軸方向自如地相 對移動；以及Y軸載台，其係夾介線性導件朝Y軸方向 移動自如地由在該框架上端之Y軸方向呈長邊的樑所支撐 ，且藉由具有朝Y軸方向移動之輸出構件的驅動機構而朝 Y軸方向往復移動，且在Y軸載台，支撐與被測量物之表 面接觸的觸針之觸針式測量裝置，其特徵爲：線性導件， 係由呈長邊的第1和第2之一對導軌、第1直動軸承及第 2直動軸承所構成，該呈長邊的第1和第2之一對導軌係 位於朝X軸方向分離地固定在樑之下面的γ軸方向，該 -6- 201239314 第1直動軸承係朝Y軸方向移動自如地與形成於第1導軌 之X軸方向一方側面的導引面接觸，該第2直動軸承係朝 Υ軸方向移動自如地與形成於第2導軌之X軸方向另一方 側面的導引面接觸，第1和第2之各導軌的導引面，係相 對於鉛垂面呈傾斜，以免第1和第2之各直動軸承掉落， 第1直動軸承係固定於Υ軸載台，而第2直動軸承係相對 於Υ軸載台朝著X軸方向及上下方向游動自如，在Υ軸 載台，設置有朝X軸方向彈壓的第1彈壓手段，俾將第2 直動軸承按壓於第2導軌之導引面，而在樑或固定於樑之 構件，設置有將第2直動軸承朝下方彈壓的第2彈壓手段 ，且使第1彈壓手段之彈壓力和第2彈壓手段之彈壓力的 合力之向量方向一致於第2導軌之導引面的法線方向。 依據本發明，則即便產生各導軌的導引面和相對於導 引面的各直動軸承之接觸面的磨損，也可藉由第1彈壓手 段之彈壓力，來防止導引面和直動軸承的接觸面之間的間 隙發生。而且，藉由固定於Υ軸載台的第1直動軸承壓接 在相對於鉛垂面呈傾斜的第1導軌之導引面，Υ軸載台就 可保持於預定的上下方向位置。又，利用第1和第2的兩 彈壓手段之彈壓力的合力，第2直動軸承就可按壓於第2 導軌之導引面的法線方向，且可防止第2導軌的導引面和 第2直動軸承的接觸面之偏磨損（如導引面之對於鉛垂面 的傾斜角產生變化的磨損）。因此，可防止因偏磨損所造 成的Υ軸載台之上下方向的傾斜，且可高精度地確保γ 軸載台朝Υ軸方向之移動筆直度。因而，即便產生線性導 201239314 件之磨損，γ軸載台也能以保持於指定之上下方向位置的 狀態朝Υ軸方向筆直地移動，且測量精度不會惡化。 另外，當產生第1導軌的導引面和第I直動軸承的接 觸面之磨損時，藉由第1彈壓手段之彈壓力可使Υ軸載台 朝X軸方向位移，以免在第1導軌的導引面和第1直動軸 承之間產生間隙。在該情況下，當驅動機構之輸出構件固 定於Υ軸載台時，輸出構件也會與Υ軸載台一體地朝X 軸方向位移，並使偏荷重作用於驅動機構，而對耐久性帶 來不良影響。更且，因驅動機構之製作精度誤差會使輸出 構件在X軸方向及上下方晃動，該晃動會傳遞至γ軸載 台，也對測量精度帶來不良影響》 因此’在本發明中，較佳爲，具備：連結手段，係相 對於前述γ軸載台將前述輸出構件以具有沿著正交於Υ 軸方向之鉛垂面的移動自由度之方式來連結。藉此，即便 Υ軸載台朝X軸方向位移，輸出構件也不會位移。因而， 可防止偏荷重作用於驅動機構。更且，即便輸出構件在X 軸方向及上下方向晃動，該晃動也不會傳遞至γ軸載台， 而不對測量精度帶來不良影響。 可是’連結手段，雖然亦可由具有X軸方向及上下方 向之移動自由度的通用接頭（universal joint)所構成， 但是此萬用接頭的構造複雜而會招來成本提升。因此，較 佳爲：連結手段’係由鉛垂之承接面、球面部及彈簧所構 成’該鉛垂之承接面係與設置於Y軸載台和輸出構件之其 中一方的Y軸方向正交，該球面部係設置於γ軸載台和 201239314 輸出構件之另一方，該彈簧係將球面部按壓於承接面。藉 此，則球面部可移動自如地點接觸於承接面，並獲得如上 述的移動自由度，並且因構造簡單而可謀求成本降低。 【實施方式】 第1圖係顯示本發明之實施形態的觸針式測量裝置。 該測量裝置，係具備：基座1;及載置配置於基座丨上之 被測量物W的試料載台2 :以及以橫跨試料載台2的方式 配置於基座1上的門型框架3。試料載台2,係以相互正 交的水平2方向爲X軸方向及Y軸方向，並移動自如地 由與固定於基座1上之X軸方向呈長邊的一對導軌2a、 2a所支撐。然後，藉由與省略圖示之X軸方向呈長邊的 滾珠螺桿之旋轉並透過螺合於該滾珠螺桿的螺帽使試料載 台2朝X軸方向移動，藉此門型框架3可相對於被測量物 W而朝X軸方向相對移動。 門型框架3，係具有：豎設於基座1的γ軸方向兩側 之柱3 1、3 1 ;以及與橫設於兩柱3 1、3 1之上端間的Y軸 方向呈長邊的樑32。另外，亦可將試料載台2固定於基座 1上’使門型框架3朝X軸方向移動自如，門型框架3可 相對於被測量物W朝X軸方向相對移動。 在門型框架3之上端的樑32，係夾介後述的線性導件 5而朝Y軸方向移動自如地支撐有Y軸載台4。Y軸載台 4，係可藉由具有朝Y軸方向移動之輸出構件的驅動機構 而朝Y軸方向往復移動。在本實施形態中，如第2圖、第 201239314 3圖所示，驅動機構，係由具有與Y軸方向呈長邊的滾珠 螺桿6和螺合於該滾珠螺桿6的螺帽7之進給螺桿機構所 構成。 更具體說明之，在樑32之下面係固定有導塊（guide block ) 33。在導塊33，係形成有從其下面往上方凹入之 與Y軸方向呈長邊的凹入部33a。然後，在將滾珠螺桿6 收納於凹入部33a的狀態下，透過軸承61將滾珠螺桿6 軸支於固定在凹入部33a之Y軸方向兩端部的支撐體33b 。滾珠螺桿6，係夾介固定於其軸端的滑輪62和捲繞於該 滑輪62的皮帶63而連結於省略圖示的伺服馬達。又，在 固定於凹入部33a之頂部的導軌71設置可在凹入部33a 內朝Y軸方向移動自如地支撐的螺帽固定座（nut holder )72’且以停止旋動的狀態使螺帽7保持於該螺帽固定座 72。然後，藉由滾珠螺桿6之旋轉透過螺帽7使作爲驅動 機構之輸出構件的螺帽固定座72朝Y軸方向移動，且透 過螺帽固定座72使Y軸載台4朝Y軸方向移動。 在Y軸載台4’係安裝有延伸於下方的支撐框4a，且 在該支撐框4a，夾介Z軸感測器81而支撐有與被測量物 W之表面接觸的觸針8’該觸針8可在上下方向位移自如 地支撐。然後，藉由Z軸感測器81來檢測觸針8之上下 方向位移。 在進行測量時，以使觸針8接觸到被測量物W之表 面的狀態使門型框架3相對於被測量物W朝X軸方向相 對移動，藉此使觸針8沿著被測量物W之表面而朝X軸 -10- 201239314 方向掃描。然後，根據在該掃描中由z軸感測器81所檢 測出的觸針8之上下方向位移，來測量被測量物W之沿 著一個X方向剖面的表面形狀（凹凸）。其次，在使Y 軸載台4朝Y軸方向移動預定衝程之後，與上述同樣地使 觸針8沿著被測量物W之表面而朝X軸方向掃描，並測 量被測量物W之沿著下一個X方向剖面的表面形狀。反 覆此動作，測量被測量物W之預定區域的表面形狀。 可是，當因支撐Y軸載台4的線性導件5之磨損，而 使Y軸載台4之上下方向位置產生變化時，檢測觸針8之 上下方向位移的Z軸感測器81之檢測輸出就會產生變化 ，而使測量精度惡化。又，即使在Y軸載台4之朝Y軸 方向的移動筆直度有所損受，並使Y軸載台4傾斜於上下 方向的情況，Z軸感測器81之檢測輸出也會產生變化， 而使測量精度惡化。因此，在本實施形態中，係構成爲： 將線性導件5，以即便產生該磨損也會使Y軸載台4保持 於預定之上下方向位置的狀態筆直地移動於Y軸方向。以 下，就線性導件5加以詳述。 如第3圖、第4圖所示，線性導件5，係具備：朝X 軸方向隔離地固定於樑32之下面之與Y軸方向呈長邊的 第1和第2之一對導軌51、52。另外，在本實施形態中， 在導塊33之下面，以螺釘固定位於凹入部33a之X軸方 向兩外側的第1和第2之兩導軌51、52。因此，在樑32 之下面夾介導塊33而固定有兩導軌51、52。 線性導件5，復具備：第1直動軸承5 3，其係朝Y軸 -11 - 201239314 方向移動自如地與第1導軌51之形成於X軸方向一方之 側面（第4圖之左側的側面）的導引面5 1 a接觸；以及第 2直動軸承54，其係朝Y軸方向移動自如地與第2導軌 52之形成於X軸方向另一方之側面（第4圖之右側的側 面）的導引面52a接觸。另外，第1和第2之各直動軸承 53、54，係由滑動自如地與各導軌51、52之導引面51a、 52a進行面接觸的滑動軸承所構成。又，各導軌51、52之 導引面51a、52a，係相對於鉛垂面呈傾斜，以免使各直動 軸承53、54掉落，當然，與導引面51a、52a接觸的各直 動軸承53、54之接觸面也是相對於鉛垂面呈傾斜。 在此，雖然第1直動軸承53，係以螺釘固定於Y軸 載台4，但是第2直動軸承54，係相對於Y軸載台4在X 軸方向及上下方向游動自如。具體而言，如第3圖所示， 在Y軸載台4，形成容納第2直動軸承54之外端部的溝 槽部41，並使第2直動軸承54在X軸方向及上下方向游 動自如地卡合於該溝槽部41。然後，在Y軸載台4,設置 以將第2直動軸承54按壓於第2導軌52之導引面52a的 方式朝X軸方向彈壓的第1彈壓手段55。又，在固定於 樑32的導塊33,設置將第2直動軸承54朝下方彈壓的第 2彈壓手段5 6。 另外，在本實施形態中，係將第2直動軸承54朝Y 軸方向分割成三個，且就被分割出的各第2直動軸承54 之各個設置第1彈壓手段55。又，在被分割出之全部的直 動軸承54之上面設置與滑動自如地接觸之Y軸方向呈長 -12- 201239314 邊的樹脂板5 4 a。然後，在導塊3 3，以抵接於該樹脂板 54a之上面的方式存在Y軸方向之間隔地設置複數個第2 彈壓手段56，藉由此等第2彈壓手段56將各第2直動軸 承54透過樹脂板54a而朝下方彈壓。 第1和第2之各彈壓手段55、56，係由從X軸方向 外側或上側螺入於Y軸載台4或導塊33的彈簧柱塞所構 成。然後，藉由該螺入深度來調整各彈壓手段55、56之 彈壓力，且各彈壓手段55、56以所需要的螺入深度藉由 固定螺帽55a、56a固定於Y軸載台4或導塊33。 第1彈壓手段55之彈壓力和第2彈壓手段56之彈壓 力’係調整爲：此等彈壓力之合力的向量方向與導引面 5 2a之法線方向一致。藉此，第2直動軸承54係被按壓於 第2導軌52之導引面52a的法線方向，而可防止第2導 軌52的導引面52a和第2直動軸承54的接觸面之偏磨損 (如導引面5 2 a對鉛垂面之傾斜角產生變化的磨損）。 又，在第2直動軸承54之X軸方向外側面，係形成 有成爲第1彈壓手段55之抵接部之延伸於上下方向的v 字狀溝槽54b。藉此，第2直動軸承54能夠相對於第1彈 壓手段55在上下方向相對移動自如，進而第2直動軸承 5 4不能相對於第1彈壓手段5 5在Y軸方向相對移動自如 。因而’可防止第2直動軸承54以不可避地產生於第2 直動軸承5 4和溝槽部4 1之間的插入間隙量相對於γ軸載 台4朝Y軸方向移動。 另外，爲了能承受長期間的使用，作爲導軌5 1、5 2 -13- 201239314 及直動軸承53、54之材質，有需要儘量選定不易磨損的 材質。例如，若將導軌51、52設爲硬質的陶瓷製，將直 動軸承53、54設爲PTFE、PCTFE等之潤滑性優異的樹脂 製，則不易受到磨損的影響。 又，設置連結手段9，該連結手段9係以具有沿著與 Y軸方向正交之鉛垂面的移動自由度之方式將螺帽固定座 72連結於Y軸載台4。在本實施形態中，係將連結手段9 由鉛垂之承接面91、球面部92及彈簧93所構成，該承接 面91係與設置於Y軸載台4的Y軸方向正交，該球面部 92係設置於螺帽固定座72，該彈簧93係將球面部92按 壓於承接面91。 更具體說明之，在螺帽固定座72之Y軸方向的一部 分設置朝下方突出的凸部72a，並如第5圖所示，在Y軸 載台4，形成容納凸部72a之大致呈方形的窗孔42。然後 ’在該窗孔42之Y軸方向—方的側面螺鎖具有平面狀之 頭部的螺桿’且以該螺桿的頭部來構成前述承接面9〗。又 ’在凸部72a之Y軸方向—方的側面螓鎖具有球面狀之頭 部的螺桿’並以該螺桿的頭部來構成前述球面部92。更且 ’在Y軸載台4，形成在開口於窗孔42之γ軸方向另— 方的側面之X軸方向隔離出的—對穿孔43、43，且在各 穿孔43插入針狀的彈簧承接部94。然後，在各彈簧承接 部94和凸部72a之Y軸方向另一方的側面之間縮設由螺 旋彈賛所構成的彈簧93 ’且以該彈簧93之彈壓力將球面 部92按壓於承接面91。 -14- 201239314 又，設置調節彈簧93之彈壓力的調節手段。亦即， 在以螺釘固定於Y軸載台4之Y軸方向另一方的外側面 之板44，螺插調節螺桿95，該調節螺桿95係插入於各穿 孔43並抵接於彈簧承接部94，且以固定螺帽95a來固定 。然後，可藉由調節螺桿95使彈簧承接部94朝Y軸方向 位移，並可調節彈簧93之彈壓力。在此，彈簧93之彈壓 力，係在未滿發生球面部92之彈性變形之力的範圍內， 且調節成爲在線性導件5產生的摩擦力和γ軸載台4之加 減速所需要的力之合計力以上。藉此，即便螺帽固定座72 朝Y軸方向一方和另一方的任何一方移動，球面部92也 不會從承接面91離開，而可確保Y軸載台4之對於螺帽 固定座72的追蹤性。 依據本實施形態，則即便產生第1和第2之各導軌5 1 、52的導引面51a、52a與第1和第2之各直動軸承53、 54的接觸面之磨損，也可藉由第1彈壓手段55之彈壓力 ，來防止導引面5 1 a、5 2 a和直動軸承5 3、5 4之間的間隙 發生。而且’藉由將第2導軌52當作反作用力承接部並 透過第2直動軸承54作用於Y軸載台4的第1彈壓手段 5 5之反彈壓力’使固定於Y軸載台4的第1直動軸承53 壓接在相對於鉛垂面呈傾斜的第1導軌51之導引面51a。 因此’利用該壓接反作用力之朝上方的分力使與此相對向 的Y軸載台4之上面部分接觸到第1導軌51之下面，可 使Y軸載台4保持於預定之上下方向位置。又，如上述般 由於可防止第2導軌52的導引面52a和第2直動軸承54 -15- 201239314 的接觸面之偏磨損，所以可高精度地確保Y軸載台4之朝 Υ軸方向的移動筆直度，且Υ軸載台4不會朝上下方向傾 斜。因而，即便產生線性導件5之磨損，Υ軸載台4也可 以保持於指定之上下方向位置的狀態朝Υ軸方向筆直地移 動，且不會發生因Υ軸載台4之上下方向的位置變化或傾 斜而引起的測量精度之惡化。 可是，當產生第1導軌51的導引面51a與第1直動 軸承53的接觸面之磨損時，就藉由第1彈壓手段55之彈 壓力使Y軸載台4朝X軸方向位移，以免在導引面51a和 第1直動軸承53之間產生間隙。在此情況下，當螺帽固 定座72固定於Y軸載台4時，螺帽固定座72也會與Y 軸載台4 一體地朝X軸方向位移，並使正交於軸方向的偏 荷重作用於滾珠螺桿6，且產生滾珠螺桿6之偏磨損而對 耐久性帶來不良影響。更且，因滾珠螺桿6之偏心或滾珠 螺桿6的導引部之偏心，將透過螺帽7使螺帽固定座72 在X軸方向及上下方向晃動，該晃動會傳遞至Y軸載台4 ，也會對測量精度帶來不良影響。 相對於此，在本實施形態中，由於螺帽固定座72在 球面部92中朝著X軸方向及上下方向移動自如地與鉛垂 的承接面91進行點接觸，該承接面91係與設置於Y軸載 台4的Y軸方向正交，亦即，螺帽固定座72對於Y軸載 台4以具有沿著正交於Y軸方向之鉛垂面的移動自由度之 方式連結，所以即便Y軸載台4朝X軸方向位移，螺帽 固定座72也不會位移。因而，正交於軸方向的偏荷重不 -16- 201239314 會作用於滾珠螺桿6，而可防止滾珠螺桿6之偏磨損。更 且，即便因滾珠螺桿6之偏心或滾珠螺桿6的導引部之偏 心，而使螺帽固定座72在X軸方向及上下方向晃動，該 晃動也不會傳遞至Y軸載台4，且不會對測量精度帶來不 良影響。 可是，也能夠以具有X軸方向和上下方向之移動自由 度的萬用接頭來構成連結手段9。但是，此將使構造變得 複雜而招致成本提高。相對於此，由於本實施形態的連結 手段9，係由承接面91、球面部92及彈簧93所構成，所 以可將構造簡化並可謀求成本降低。另外，在本實施形態 中，雖然是在Y軸載台4設置承接面91，並且在螺帽固 定座72設置球面部92，但是亦可在Y軸載台4設置球面 部92，並且在螺帽固定座72設置承接面91» 又，在上述第1實施形態中，雖然是以滑動軸承來構 成第1和第2之兩直動軸承53、54，但是亦可以轉動軸承 來構成兩直動軸承5 3、5 4之至少一方。例如，如第6圖 所示的第2實施形態，亦可以轉動軸承來構成第2直動軸 承54，該轉動軸承係由轉動自如地與第2導軌52之導引 面5 2a接觸的滾珠或輥子所構成。另外，在第2實施形態 中，係在第1彈壓手段55和第2直動軸承54之間夾介設 置轉動自如地保持第2直動軸承54的軸環54c，且將第2 直動軸承54藉由第1彈壓手段55透過軸環54c朝X軸方 向彈壓。第2實施形態的其他構成係與上述第1實施形態 同樣。 -17- 201239314 以上’雖然已參照圖式就本 ，但是本發明並未被限定於此。 然是以使用滾珠螺桿6的進給螺 但是，也能夠以齒條與小齒輪機 動機構。在此情況下，有時會因 作精度誤差或軸承之偏心而使輸 向晃動，爲了不使該晃動傳遞至 過上述的連結手段9將輸出構件 又，上述實施形態，雖然是 感測器81使觸針8位移自如地 測量裝置中，但是同樣地可將本 針式測量裝置中，該觸針式測量 朝上下方向擺動自如的槓桿，且 ’並且設置檢測槓桿之朝上下方 透過槓桿並以感測器來檢測與被 之上下方向位移》 【圖式簡單說明】 第1圖係本發明之實施形態 圖。 第2圖係第1圖的觸針式測 剖視圖。In this case, a pair of upper and lower guide rails having a long side in the Y-axis direction are fixed to the side surface of the beam in the X-axis direction of the long side in the Y-axis direction, and are moved freely in the Y-axis direction. A pair of upper and lower linear motion bearings that are in contact with the guide faces of the guide rails are fixed to the γ-axis stage. 201239314 However, when a certain period of use is used, the contact surface of the guide rail and the contact surface of the linear motion bearing are worn, and a gap is formed therebetween. Further, the y-axis stage shifts the gap amount in the up-and-down direction, and the position of the stylus supporting portion provided on the Y-axis stage is shifted from the normal position in the up-down direction, so that the measurement accuracy is deteriorated. (Problem to be Solved by the Invention) The present invention provides a problem that the measurement accuracy is not deteriorated even if the wear of the linear guide is caused in view of the above problems. Stylus measuring device. (Means for Solving the Problems) In order to solve the above problems, the stylus type measuring apparatus according to the present invention includes a door frame in which the horizontal two directions orthogonal to each other are the X-axis direction and the Y-axis direction, and are relative to The object to be measured is relatively movable in the X-axis direction; and the Y-axis stage is supported by the beam-guided linear guide in a Y-axis direction by a beam having a long side in the Y-axis direction at the upper end of the frame, and A stylus type measuring device that reciprocates in the Y-axis direction by a driving mechanism having an output member that moves in the Y-axis direction, and supports a stylus that is in contact with the surface of the object to be measured on the Y-axis stage, and is characterized by The linear guide member is composed of a first pair of first and second pair of guide rails having a long side, a first linear motion bearing and a second linear motion bearing, and the first and second pair of guide rails having a long side are The θ-axis direction is fixed to the lower side of the beam in the X-axis direction, and the -6-201239314 first linear motion bearing is movably moved in the Y-axis direction and guided on one side surface of the first guide rail in the X-axis direction. In the surface contact, the second linear motion bearing is freely movable in the direction of the x-axis The guide surface of the second guide rail in the X-axis direction is in contact with each other, and the guide surfaces of the first and second guide rails are inclined with respect to the vertical plane to prevent the first and second direct movements. When the bearing is dropped, the first linear motion bearing is fixed to the cymbal stage, and the second linear motion bearing is movable toward the X-axis direction and the vertical direction with respect to the cymbal stage, and the cymbal stage is provided with The first biasing means that is biased in the X-axis direction presses the second linear motion bearing against the guide surface of the second rail, and the member that is fixed to the beam is provided with the second direct-moving bearing that is biased downward. In the second biasing means, the vector direction of the resultant force of the elastic pressure of the first biasing means and the elastic pressure of the second biasing means is aligned with the normal direction of the guiding surface of the second guide rail. According to the present invention, even if the contact faces of the guide rails and the contact faces of the linear motion bearings with respect to the guide faces are worn, the guide surface and the linear motion can be prevented by the elastic pressure of the first biasing means. A gap occurs between the contact faces of the bearings. Further, the first linear motion bearing fixed to the cymbal stage is pressed against the guide surface of the first guide rail inclined with respect to the vertical surface, and the cymbal stage can be held at a predetermined vertical position. Further, by the resultant force of the elastic pressures of the first and second elastic means, the second linear motion bearing can be pressed against the normal direction of the guide surface of the second guide rail, and the guide surface of the second guide rail can be prevented. The partial wear of the contact surface of the second linear motion bearing (such as the change in the inclination angle of the guide surface with respect to the vertical plane). Therefore, the inclination of the y-axis stage in the up-down direction due to the partial wear can be prevented, and the straightness of the γ-axis stage in the y-axis direction can be ensured with high precision. Therefore, even if the wear of the linear guide 201239314 is generated, the γ-axis stage can be moved straight in the direction of the x-axis while maintaining the position in the downward direction, and the measurement accuracy does not deteriorate. Further, when the contact surface between the guide surface of the first guide rail and the first direct-moving bearing is worn, the tension of the first biasing means can be displaced in the X-axis direction so as not to be in the first guide rail. A gap is formed between the guide surface and the first linear motion bearing. In this case, when the output member of the drive mechanism is fixed to the cymbal stage, the output member is also displaced integrally with the yoke stage in the X-axis direction, and the bias load acts on the drive mechanism, and the durability belt Bad influence. Furthermore, the output member is swayed in the X-axis direction and the upper and lower sides due to the manufacturing accuracy error of the driving mechanism, and the sway is transmitted to the γ-axis stage, which also adversely affects the measurement accuracy. Therefore, in the present invention, Preferably, the means for connecting is connected to the γ-axis stage so that the output member has a degree of freedom of movement along a vertical plane orthogonal to the y-axis direction. Thereby, even if the boring stage is displaced in the X-axis direction, the output member is not displaced. Therefore, it is possible to prevent the bias load from acting on the drive mechanism. Further, even if the output member is shaken in the X-axis direction and the vertical direction, the sway is not transmitted to the γ-axis stage, and the measurement accuracy is not adversely affected. However, the "connection means" may be constituted by a universal joint having a degree of freedom of movement in the X-axis direction and the up-down direction. However, the structure of the universal joint is complicated and the cost is increased. Therefore, it is preferable that the connecting means ' is constituted by a vertical receiving surface, a spherical portion, and a spring." The vertical receiving surface is orthogonal to the Y-axis direction provided on one of the Y-axis stage and the output member. The spherical surface is provided on the other of the γ-axis stage and the 201239314 output member, and the spring presses the spherical surface to the receiving surface. As a result, the spherical surface can be moved to the receiving surface in a movable position, and the degree of freedom of movement as described above can be obtained, and the structure can be reduced to reduce the cost. [Embodiment] Fig. 1 shows a stylus type measuring device according to an embodiment of the present invention. The measuring device includes a susceptor 1 and a sample stage 2 on which the object W to be placed placed on the susceptor is placed: and a door type disposed on the susceptor 1 so as to straddle the sample stage 2 Frame 3. The sample stage 2 is a pair of guide rails 2a and 2a which are long in the X-axis direction fixed to the susceptor 1 so as to be in the X-axis direction and the Y-axis direction in the horizontal direction 2 which is orthogonal to each other. support. Then, the sample stage 2 is moved in the X-axis direction by the rotation of the ball screw having the long side in the X-axis direction (not shown) and the nut screwed to the ball screw, whereby the portal frame 3 can be opposed to each other. The object W is relatively moved in the X-axis direction. The gantry frame 3 has: a column 3 1 , 3 1 erected on both sides of the y-axis direction of the susceptor 1 ; and a long side in a Y-axis direction transversely disposed between the ends of the two columns 3 1 , 3 1 Beam 32. Further, the sample stage 2 can be fixed to the susceptor 1 to move the gantry frame 3 in the X-axis direction, and the gantry frame 3 can relatively move in the X-axis direction with respect to the object W. The beam 32 at the upper end of the portal frame 3 is slidably supported by the Y-axis stage 4 so as to be movable in the Y-axis direction by a linear guide 5 which will be described later. The Y-axis stage 4 is reciprocally movable in the Y-axis direction by a drive mechanism having an output member that moves in the Y-axis direction. In the present embodiment, as shown in Fig. 2 and 201239314, the drive mechanism is fed by a ball screw 6 having a long side with respect to the Y-axis direction and a nut 7 screwed to the ball screw 6. The screw mechanism is composed of. More specifically, a guide block 33 is fixed to the lower surface of the beam 32. In the guide block 33, a concave portion 33a which is recessed upward from the lower surface thereof and has a long side in the Y-axis direction is formed. Then, in a state in which the ball screw 6 is housed in the recessed portion 33a, the ball screw 6 is axially supported by the support body 33b fixed to both end portions of the recessed portion 33a in the Y-axis direction. The ball screw 6 is coupled to a servo motor (not shown) by a pulley 62 that is fixed to the shaft end thereof and a belt 63 that is wound around the pulley 62. Further, a guide nut 71 fixed to the top of the recessed portion 33a is provided with a nut holder 72' movably supported in the recessed portion 33a in the Y-axis direction, and the nut 7 is stopped in a state of stopping the rotation. The nut holder 72 is held. Then, the nut holder 72 as the output member of the drive mechanism is moved in the Y-axis direction by the rotation of the ball screw 6, and the Y-axis stage 4 is moved in the Y-axis direction by the nut holder 72. . A support frame 4a extending downward is mounted on the Y-axis stage 4', and a stylus 8' that is in contact with the surface of the object to be measured W is supported by the Z-axis sensor 81 in the support frame 4a. The stylus 8 is movably supported in the up and down direction. Then, the displacement of the upper and lower directions of the stylus 8 is detected by the Z-axis sensor 81. When the measurement is performed, the gantry 8 is relatively moved in the X-axis direction with respect to the object to be measured W in a state where the stylus 8 is brought into contact with the surface of the object to be measured W, whereby the stylus 8 is placed along the object to be measured W. The surface is scanned in the direction of the X-axis-10-201239314. Then, the surface shape (concavity and convexity) of the object W along the X-direction cross section is measured based on the displacement of the stylus 8 detected by the z-axis sensor 81 in the scanning direction. Then, after the Y-axis stage 4 is moved in the Y-axis direction by a predetermined stroke, the stylus 8 is scanned in the X-axis direction along the surface of the object W as described above, and the measurement object W is measured along the same direction. The surface shape of the next X-direction section. In response to this action, the surface shape of the predetermined region of the object W to be measured is measured. However, when the position of the upper and lower directions of the Y-axis stage 4 is changed by the wear of the linear guide 5 supporting the Y-axis stage 4, the detection of the Z-axis sensor 81 for detecting the displacement of the upper and lower directions of the stylus 8 is detected. The output will change and the measurement accuracy will deteriorate. Further, even if the straightness of the movement of the Y-axis stage 4 in the Y-axis direction is damaged and the Y-axis stage 4 is inclined in the vertical direction, the detection output of the Z-axis sensor 81 changes. , and the measurement accuracy is deteriorated. Therefore, in the present embodiment, the linear guide 5 is configured to linearly move the Y-axis direction in a state in which the Y-axis stage 4 is held in a predetermined up-down direction even if such wear occurs. Hereinafter, the linear guide 5 will be described in detail. As shown in FIGS. 3 and 4, the linear guide 5 includes first and second pair of guide rails 51 which are fixed to the lower surface of the beam 32 in the X-axis direction and have a long side in the Y-axis direction. 52. Further, in the present embodiment, the first and second guide rails 51, 52 located on the outer sides in the X-axis direction of the recessed portion 33a are fixed to the lower surface of the guide block 33 by screws. Therefore, the guide rails 33 are sandwiched under the beam 32 to fix the two guide rails 51, 52. The linear guide 5 is provided with a first linear motion bearing 5 3 that is movable in the Y-axis -11 - 201239314 direction and a side surface of the first rail 51 formed on one side in the X-axis direction (the left side of FIG. 4) The guide surface 5 1 a of the side surface is in contact with each other; and the second linear motion bearing 54 is movably movable in the Y-axis direction and the other side of the second rail 52 formed on the X-axis direction (the right side of FIG. 4) The guide faces 52a of the side faces are in contact. Further, each of the first and second linear motion bearings 53 and 54 is constituted by a sliding bearing that is slidably brought into surface contact with the guide faces 51a and 52a of the respective guide rails 51 and 52. Further, the guide faces 51a, 52a of the guide rails 51, 52 are inclined with respect to the vertical plane so as not to cause the linear motion bearings 53, 54 to fall, and of course, the direct movements in contact with the guide faces 51a, 52a. The contact faces of the bearings 53, 54 are also inclined with respect to the vertical plane. Here, the first linear motion bearing 53 is fixed to the Y-axis stage 4 by screws, but the second linear motion bearing 54 is slidable in the X-axis direction and the vertical direction with respect to the Y-axis stage 4. Specifically, as shown in FIG. 3, the Y-axis stage 4 is formed with a groove portion 41 that accommodates the outer end portion of the second linear motion bearing 54, and the second linear motion bearing 54 is in the X-axis direction and up and down. The direction is free to be engaged with the groove portion 41. Then, the Y-axis stage 4 is provided with a first biasing means 55 that biases the second linear motion bearing 54 against the guide surface 52a of the second guide rail 52 in the X-axis direction. Further, a second biasing means 56 for biasing the second linear motion bearing 54 downward is provided in the guide block 33 fixed to the beam 32. In the present embodiment, the second linear motion bearing 54 is divided into three in the Y-axis direction, and the first biasing means 55 is provided for each of the divided second linear motion bearings 54. Further, a resin plate 534a having a length of -12 to 201239314 in the Y-axis direction which is slidably contacted is provided on the upper surface of all of the divided linear bearings 54. Then, in the guide block 33, a plurality of second biasing means 56 are provided at intervals in the Y-axis direction so as to be in contact with the upper surface of the resin plate 54a, whereby the second elastic means 56 is used to move each of the second straight The movable bearing 54 is biased downward by the resin plate 54a. Each of the first and second biasing means 55, 56 is constituted by a spring plunger that is screwed into the Y-axis stage 4 or the guide block 33 from the X-axis direction outer side or the upper side. Then, the spring pressure of each of the biasing means 55, 56 is adjusted by the screwing depth, and each of the biasing means 55, 56 is fixed to the Y-axis stage 4 by the fixing nut 55a, 56a at a required screwing depth or Guide block 33. The spring pressure of the first biasing means 55 and the spring pressure of the second biasing means 56 are adjusted such that the vector direction of the resultant force of the elastic pressures coincides with the normal direction of the guide surface 52a. Thereby, the second linear motion bearing 54 is pressed against the normal direction of the guide surface 52a of the second guide rail 52, and the contact surface between the guide surface 52a of the second guide rail 52 and the second linear motion bearing 54 can be prevented. Partial wear (such as the change in the inclination angle of the guide surface 52 a to the vertical plane). Further, in the outer surface of the second linear motion bearing 54 in the X-axis direction, a v-shaped groove 54b extending in the vertical direction as the abutting portion of the first biasing means 55 is formed. By this, the second linear motion bearing 54 can be relatively moved in the vertical direction with respect to the first elastic force means 55, and the second linear motion bearing 5 4 cannot be relatively moved in the Y-axis direction with respect to the first elastic force means 55. Therefore, the amount of the insertion gap which is inevitably generated between the second linear motion bearing 54 and the groove portion 41 in the second linear motion bearing 54 can be prevented from moving in the Y-axis direction with respect to the γ-axis stage 4. Further, in order to withstand the use for a long period of time, as the materials of the guide rails 5 1 , 5 2 - 13 to 201239314 and the linear motion bearings 53 and 54, it is necessary to select a material which is hard to wear as much as possible. For example, when the guide rails 51 and 52 are made of a hard ceramic, the linear bearings 53 and 54 are made of a resin having excellent lubricity such as PTFE or PCTFE, and are less susceptible to abrasion. Further, the connecting means 9 is provided which connects the nut holder 72 to the Y-axis stage 4 so as to have a degree of freedom of movement along the vertical plane orthogonal to the Y-axis direction. In the present embodiment, the connecting means 9 is constituted by the vertical receiving surface 91, the spherical portion 92, and the spring 93. The receiving surface 91 is orthogonal to the Y-axis direction provided in the Y-axis stage 4, and the spherical surface The portion 92 is provided on the nut holder 72, and the spring 93 presses the spherical portion 92 against the receiving surface 91. More specifically, a convex portion 72a that protrudes downward is provided in a portion of the nut holder 72 in the Y-axis direction, and as shown in Fig. 5, a substantially square shape that accommodates the convex portion 72a is formed in the Y-axis stage 4. Window 42. Then, a screw having a flat head portion is screwed in a side surface of the window hole 42 in the Y-axis direction, and the aforementioned receiving surface 9 is formed by the head of the screw. Further, the screw portion of the spherical head portion is locked in the side surface of the convex portion 72a in the Y-axis direction, and the spherical portion 92 is constituted by the head of the screw. Further, 'on the Y-axis stage 4, the pair of through holes 43, 43 are formed in the X-axis direction which is opened in the other side of the γ-axis direction of the window hole 42, and the needle-shaped spring is inserted in each of the through holes 43. Receiving portion 94. Then, a spring 93' composed of a spiral is folded between the spring receiving portion 94 and the other side surface of the convex portion 72a in the Y-axis direction, and the spherical portion 92 is pressed against the receiving surface by the elastic pressure of the spring 93. 91. -14- 201239314 Further, an adjustment means for adjusting the spring pressure of the spring 93 is provided. That is, the adjusting screw 95 is screwed into the plate 44 which is screwed to the other outer side surface of the Y-axis stage 4 in the Y-axis direction, and the adjusting screw 95 is inserted into each of the through holes 43 and abuts against the spring receiving portion 94. And fixed with a fixing nut 95a. Then, the spring receiving portion 94 can be displaced in the Y-axis direction by the adjusting screw 95, and the spring pressure of the spring 93 can be adjusted. Here, the spring pressure of the spring 93 is within a range of the force that is less than the elastic deformation of the spherical portion 92, and is adjusted to be the frictional force generated by the linear guide 5 and the acceleration and deceleration of the γ-axis stage 4. The total force of force is above. Thereby, even if the nut holder 72 moves in one of the Y-axis directions and the other, the spherical portion 92 does not move away from the receiving surface 91, and the Y-axis stage 4 can be secured to the nut holder 72. Traceability. According to the present embodiment, even if the contact faces 51a and 52a of the first and second guide rails 5 1 and 52 and the contact faces of the first and second linear motion bearings 53 and 54 are worn, it is possible to The spring pressure of the first biasing means 55 prevents the gap between the guide faces 5 1 a, 5 2 a and the linear motion bearings 5 3, 5 4 from occurring. Further, 'the rebound pressure ' of the first biasing means 55 acting on the Y-axis stage 4 by the second rail 52 as the reaction force receiving portion is fixed to the Y-axis stage 4 The first linear motion bearing 53 is press-contacted to the guide surface 51a of the first rail 51 that is inclined with respect to the vertical plane. Therefore, the upward force component of the crimping reaction force causes the upper portion of the Y-axis stage 4 opposed thereto to contact the lower surface of the first rail 51, so that the Y-axis stage 4 can be maintained in a predetermined upper and lower directions. position. Further, as described above, since the contact surface between the guide surface 52a of the second guide rail 52 and the second linear motion bearing 54 -15-201239314 can be prevented from being worn, the yaw axis of the Y-axis stage 4 can be ensured with high precision. The straightness of the direction is moved, and the boring stage 4 is not inclined in the up and down direction. Therefore, even if the wear of the linear guide 5 occurs, the cymbal stage 4 can be moved straight in the direction of the yaw axis while maintaining the position in the up-down direction, and the position in the up-down direction of the yoke stage 4 does not occur. Deterioration of measurement accuracy caused by variation or tilt. However, when the contact surface between the guide surface 51a of the first rail 51 and the first linear motion bearing 53 is worn, the Y-axis stage 4 is displaced in the X-axis direction by the elastic pressure of the first biasing means 55. Therefore, a gap is generated between the guide surface 51a and the first linear motion bearing 53. In this case, when the nut holder 72 is fixed to the Y-axis stage 4, the nut holder 72 is also displaced integrally with the Y-axis stage 4 in the X-axis direction, and is offset orthogonal to the axis direction. The load acts on the ball screw 6, and the partial wear of the ball screw 6 is generated to adversely affect the durability. Further, due to the eccentricity of the ball screw 6 or the eccentricity of the guide portion of the ball screw 6, the nut holder 72 is swayed in the X-axis direction and the vertical direction by the nut 7, and the sway is transmitted to the Y-axis stage 4 It also has an adverse effect on measurement accuracy. On the other hand, in the present embodiment, the nut holder 72 is movably brought into point contact with the vertical receiving surface 91 in the X-axis direction and the vertical direction in the spherical portion 92, and the receiving surface 91 is provided and arranged. The Y-axis direction of the Y-axis stage 4 is orthogonal to each other, that is, the nut holder 72 is connected to the Y-axis stage 4 so as to have a degree of freedom of movement along a vertical plane perpendicular to the Y-axis direction. Even if the Y-axis stage 4 is displaced in the X-axis direction, the nut holder 72 is not displaced. Therefore, the bias load orthogonal to the axial direction does not act on the ball screw 6, and the partial wear of the ball screw 6 can be prevented. Further, even if the eccentricity of the ball screw 6 or the eccentricity of the guide portion of the ball screw 6 causes the nut holder 72 to sway in the X-axis direction and the vertical direction, the sway is not transmitted to the Y-axis stage 4, It does not adversely affect measurement accuracy. However, the connecting means 9 can also be constituted by a universal joint having a degree of freedom of movement in the X-axis direction and the vertical direction. However, this will complicate the construction and incur costs. On the other hand, since the connecting means 9 of the present embodiment is constituted by the receiving surface 91, the spherical portion 92, and the spring 93, the structure can be simplified and the cost can be reduced. Further, in the present embodiment, the receiving surface 91 is provided on the Y-axis stage 4, and the spherical portion 92 is provided on the nut holder 72. However, the spherical portion 92 may be provided on the Y-axis stage 4, and the snail may be provided. The cap holder 72 is provided with a receiving surface 91». In the first embodiment, the first and second linear motion bearings 53 and 54 are formed by sliding bearings. However, the bearings may be rotated to form two direct motions. At least one of the bearings 5 3, 5 4 . For example, in the second embodiment shown in Fig. 6, the second linear motion bearing 54 may be formed by rotating a bearing, and the rotary bearing may be a ball that is rotatably contacted with the guide surface 52a of the second guide rail 52 or The roller is composed of. Further, in the second embodiment, the collar 54c that rotatably holds the second linear motion bearing 54 is interposed between the first biasing means 55 and the second linear motion bearing 54, and the second linear motion bearing is provided. 54 is biased in the X-axis direction by the first biasing means 55 through the collar 54c. The other configuration of the second embodiment is the same as that of the first embodiment. -17-201239314 The above has been described with reference to the drawings, but the present invention is not limited thereto. However, the feed screw of the ball screw 6 is used, but the rack and pinion mechanism can also be used. In this case, the output may be swayed due to the accuracy error or the eccentricity of the bearing, and the output member may be used in order to prevent the sway from being transmitted to the connecting means 9 as described above. The stylus 8 is variably detachably mounted in the measuring device, but similarly, in the stylus type measuring device, the stylus type can be oscillated in the up and down direction, and 'and the detecting lever is disposed above and below the lever and The sensor detects and shifts in the up and down direction. [Schematic description of the drawings] Fig. 1 is an embodiment of the present invention. Fig. 2 is a cross-sectional view of the stylus type of Fig. 1.
第3圖係以第2圖之III-III 第4圖係以第3圖之IV-IV 發明之實施形態加以說明 例如，上述實施形態，雖 桿機構來構成驅動機構， 構等的其他機構來構成驅 齒條或小齒輪之齒部的製 出構件（齒條）在上下方 Y軸載台4，較佳爲：透 連結於Y軸載台4。 將本發明應用於夾介Z軸 支撐於上下方向的觸針式 發明應用於如下型式的觸 裝置係在Y軸載台4支撐 在該槓桿之一端安裝觸針 向的擺動位移之感測器， 測量物之表面接觸的觸針 的觸針式測量裝置之前視 量裝置之主要部分的放大 線切斷的剖視圖。 線切斷的剖視圖。 -18- 201239314 第5圖係以第2圖之V-V線切斷的剖視圖。 第6圖係另一實施形態之對應於第3圖的剖視圖。 【主要元件符號說明】 W :被測量物 1 :基座 2 :試料載台 2a :導軌 3 :門型框架 31 :柱 32 :樑 33:導塊（固定於樑的構件） 33a :凹入部 33b :支撐體 4 : Y軸載台 4a :支撐框 4 1 :溝槽部 42 :窗孔 4 3 :穿孔 44 :板 5 :線性導件 5 1 :第1導軌 5 2 :第2導軌 5 1a、52a ：導弓丨面 -19- 201239314 53 :第1直動軸承 54 :第2直動軸承 54a :樹脂板 5 4 b :溝槽 54c :軸環 5 5 :第1彈壓手段 5 6 :第2彈壓手段 6:滾珠螺桿（驅動機構） 6 1 :軸承 62 :滑輪 63 :皮帶 7 :螺帽（驅動機構） 71 :導軌 72 :螺帽固定座（輸出構件） 7 2 a :凸部 8 :觸針 8 1 : Z軸感測器 9 :連結手段 9 1 :承接面 92 :球面部 9 3 :彈簧 94 :彈簧承接部 9 5 :調節螺桿 -20-Fig. 3 is a view showing an embodiment of the invention according to the IV-IV of Fig. 3, which is shown in Fig. 4, III, III, Fig. 4, for example, in the above embodiment, the lever mechanism constitutes a mechanism such as a drive mechanism or a structure. The production member (rack) constituting the tooth portion of the rack or pinion gear is preferably connected to the Y-axis stage 4 on the upper and lower Y-axis stage 4. The invention relates to a stylus type invention in which a Z-axis support is supported in an up-and-down direction. The invention is applied to a contact device of the following type, in which a Y-axis stage 4 supports a oscillating displacement sensor mounted on one end of the lever, A cross-sectional view of an enlarged line of a main portion of the etalon measuring device of the stylus of the stylus contacting the surface of the measuring object. A cross-sectional view of the line cut. -18- 201239314 Fig. 5 is a cross-sectional view taken along line V-V of Fig. 2. Fig. 6 is a cross-sectional view corresponding to Fig. 3 of another embodiment. [Description of main component symbols] W: Object to be measured 1: Base 2: Sample stage 2a: Guide rail 3: Portal frame 31: Column 32: Beam 33: Guide block (member fixed to the beam) 33a: Recessed portion 33b : support body 4 : Y-axis stage 4a : support frame 4 1 : groove portion 42 : window hole 4 3 : perforation 44 : plate 5 : linear guide 5 1 : first guide rail 5 2 : second guide rail 5 1a, 52a: guide bow face -19- 201239314 53 : 1st linear motion bearing 54 : 2nd linear motion bearing 54a : resin plate 5 4 b : groove 54c : collar 5 5 : 1st elastic means 5 6 : 2nd Spring pressure means 6: Ball screw (drive mechanism) 6 1 : Bearing 62 : Pulley 63 : Belt 7 : Nut (drive mechanism) 71 : Guide rail 72 : Nut holder (output member) 7 2 a : Projection 8 : Touch Needle 8 1 : Z-axis sensor 9 : Connecting means 9 1 : receiving surface 92 : spherical portion 9 3 : spring 94 : spring receiving portion 9 5 : adjusting screw - 20 -