JP2007278377A - Feeder joint - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a joint for improving the linearity accuracy of a feeder by taking countermeasures for the runout of a feed nut relative to a feed screw in the perpendicular direction and in the rotating direction. <P>SOLUTION: A first plate spring member whose face is turned to the horizontal direction and a second plate spring member whose face is turned to the vertical direction are provided on a moving carriage 25, so that the runout relative to the feed screw 2 in the perpendicular direction is absorbed with no friction force by the elastic deformation of the first plate spring member and the second spring member. A pair of arms 80, 80 are provided on a feed nut housing 4 for restricting the rotation of the feed nut 3 around the feed screw 2. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a joint for a feeding device used in precision measuring machines such as a surface roughness measuring machine and a straightness measuring machine.

  In precision feeding devices used in precision measuring machines such as surface roughness measuring machines and straightness measuring machines, the displacement in one direction perpendicular to the guide (movement) direction of the stylus is measured. High feed straightness and feed pitching angle accuracy are required.

  When a feed device having a feed screw such as a feed screw or a ball screw is applied as such a precision feed device, a feed nut that is screwed to the feed screw is provided on a moving carriage provided with a stylus. Is common.

  By the way, the applicant of this application has proposed a joint of a feed device that connects a feed nut screwed to a feed screw and a moving carriage in Patent Document 1. This joint is composed of a first leaf spring member, a second leaf spring member, and an intermediate member. The first leaf spring members are arranged on both sides of the moving carriage in the moving direction with a feed nut interposed therebetween. One end is connected to the nut, and the other end is connected to the intermediate member, and out of the feed nut runout in a direction perpendicular to the feed screw, the runout in one direction is elastically deformed and absorbed. The second leaf spring member has one end connected to the intermediate member and the other end connected to the moving carriage. Of the runout of the feed nut in a direction perpendicular to the feed screw, the one direction The vibration in the other direction orthogonal to the side is elastically deformed and absorbed.

According to the joint disclosed in Patent Document 1, the first leaf spring member and the second leaf spring member are elastically deformed with respect to the deflection (displacement) in the direction perpendicular to the feeding direction, so that the deflection has no frictional force. And the transmission of the deflection to the moving carriage can be cut off. Thereby, there is an advantage that high straightness accuracy can be obtained.
JP 2004-44710 A

  However, although the joint of Patent Document 1 has an absorption force for the runout of the feed nut in the direction perpendicular to the feed screw, the runout in the rotational direction relative to the feed screw does not include means for absorbing the runout. There was a problem that the accuracy when the direction fluctuation occurred could not be guaranteed.

  The present invention has been made in view of such circumstances, and by taking measures against runout of the feed nut in the direction perpendicular to the feed screw and in the rotational direction, the straightness accuracy of the feed device can be improved. It aims at providing the joint which can be performed.

  According to a first aspect of the present invention, in order to achieve the object, in a joint of a feed device that connects a feed nut screwed to a feed screw and a moving member, the movement of the moving member is sandwiched between the feed nuts. One end of the feed nut is connected to the feed nut and the other end is connected to the intermediate member. A first leaf spring member that elastically deforms and absorbs, and one end portion connected to the intermediate member and the other end portion connected to the moving member, and a swing of a feed nut in a direction perpendicular to the feed screw A second leaf spring member that elastically deforms and absorbs vibrations in the other direction orthogonal to the one direction side, and one end fixed to the feed nut and the other end is a linear guide member of the moving member The feed It is characterized by having the nut rotation restriction member for restricting the rotation of the feed nut, the relative Flip.

  The invention according to claim 1 is provided with a first leaf spring member whose surface faces in one direction (for example, horizontal direction) and a second leaf spring member in which the surface faces in the other direction (for example, vertical direction). Therefore, the vibration in the direction perpendicular to the feed screw can be absorbed without frictional force by elastically deforming the first leaf spring member and the second leaf spring member.

  According to the first aspect of the present invention, the rotation of the feed nut is restricted by the nut rotation restricting member fixed to the feed nut, thereby preventing the rotation of the feed screw in the rotational direction. The nut rotation restricting member has one end fixed to the feed nut and the other end slidably contacted with the linear guide member of the moving member, and moves while being guided by the linear guide member as the feed nut moves. The rotation of the feed nut is restricted over the entire movement range.

  According to a second aspect of the present invention, in the first aspect, the linear guide member of the moving member is a guide bar disposed along the feeding direction of the moving member.

  According to the second aspect of the present invention, the other end of the nut rotation restricting member is slidably contacted with the guide rod arranged along the feed direction of the moving member, so that the feed nut is moved in the entire moving range of the feed nut. Rotation can be regulated.

  According to the joint of the feeding device according to the present invention, the first leaf spring member whose surface is directed in one direction and the second leaf spring member facing in the other direction are provided. The deflection in the direction can be absorbed by elastic deformation of the first leaf spring member and the second leaf spring member. Further, since the rotation of the feed nut is restricted by the nut rotation restricting member fixed to the feed nut, it is possible to prevent the rotation of the feed screw in the rotational direction. This improves the straightness accuracy of the feeder.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a joint of a feeding device according to the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a perspective view showing a surface roughness measuring machine 102 to which the precision feeding device 100 of the embodiment is applied. The surface roughness measuring machine 102 is attached with the measuring object 108 adjusted in position by a position adjusting device 106 installed on the measuring unit base 104. Further, a column 110 is erected on the measurement unit base 104, and a driving device 112 in which the feeding device 100 is built is provided on the column 110 so as to be movable up and down (Z-axis direction). The feed device 100 includes a feed screw 2, a motor 116, and a moving carriage (moving member) 25 in which a feed nut (not shown) is provided, and a detector 120 provided with a stylus 118 is connected to the moving carriage 25. Has been.

  According to the surface roughness measuring machine 102 configured as described above, the driving device 112 is moved down along the column 110 to bring the stylus 118 into contact with the measurement object 108. Thereafter, the motor 116 of the feed device 100 is driven to rotate the feed screw 2 and the moving carriage 25 is moved horizontally (X direction) by the thrust of the feed nut, whereby the stylus 118 is moved to the object 108 to be measured. The roughness of the measurement object 108 is measured by the detector 120 by moving the stylus 118 up and down (Z direction).

  The surface roughness measuring device 102 is required to have a high straightness in the Z-axis direction of the movable carriage 25 in order to measure the roughness by moving the stylus 118 up and down. For this reason, the joint according to the embodiment is provided in the movable carriage 25. This joint will be described later.

  FIG. 2 is a perspective view showing a straightness measuring machine 122 to which the feeding device 100 of the embodiment is applied, and FIG. 3 is an assembly perspective view of the feeding device 100. In the straightness measuring machine 122, a position adjustment table 124 is provided so as to be movable in the X-axis direction along the X-axis feed stage fixed guide surface 1 formed on the guide member 1B having a concave cross section. The object 108 is attached with its position adjusted. Further, a column 126 is erected on the guide member 1B, and a stylus 130 is provided on the column 126 via a Z-axis displacement detector 128.

  According to the straightness measuring machine 122 configured as described above, after the stylus 130 is brought into contact with the measurement object 108, the motor 116 of the feeder 100 is driven to rotate the feed screw 2, and the configuration shown in FIG. The moving carriage 25 connected to the lower portion of the position adjustment table 124 is moved in the X-axis direction by the thrust of the feed nut 3. Thereby, the displacement in the Z-axis direction is measured by the Z-axis displacement detector 128, and the XZ cross-sectional contour shape of the measurement object 108 is obtained.

  As shown in FIGS. 2 and 3, the guide member 1B on which the X-axis feed stage fixed guide surface 1 is formed is formed with a guide groove 1C in which the feed screw 2 and the moving carriage 25 are placed, The movable carriage 25 disposed in the guide groove 1C is slidably supported on the X-axis feed stage fixed guide surface 1 via the position adjustment table 124.

  FIGS. 4 to 9 show structural diagrams of the joint 60 according to the embodiment.

  A feed nut 3 shown in FIG. 4 screwed to the feed screw 2 is fixed to the feed nut housing 4. 4 horizontal strip leaf springs (first leaf spring members) 5, 6, 35 on the right and left sides of the feed nut housing 4 across the feed nut housing 4, that is, on both sides of the feed nut in the moving direction. 36 is fixed by four horizontal strip spring retainers 7, 8, 37, 38. The horizontal strip leaf springs 5 and 6 are disposed in parallel with the feed screw 2 with the feed screw 2 interposed therebetween, and the horizontal strip leaf springs 35 and 36 are also disposed in the same manner.

  The horizontal strip leaf springs 5, 6, 35, 36 are reinforced at their intermediate portions by two leaf spring retainers 9, 10, 11, 12, 39, 40, 41, 42 on the front and back sides, respectively. Are fixed to the intermediate members 15 and 34 by one horizontal leaf spring retainer 13, 14, 43 and 44, respectively.

  Further, vertical strip leaf springs (second leaf spring members) 17, 18, 26, and 27 are fixed to the intermediate members 15 and 34 by a single vertical leaf spring retainer 23, 24, 32, and 33, respectively. The vertical strip leaf springs 17, 18, 26, and 27 are reinforced at their middle portions by two leaf spring retainers 19, 20, 21, 22, 28, 29, 30, and 31, respectively. Are fixed to the side walls 25A, 25B arranged on both sides of the movable carriage 25 with a predetermined tension. The vertical strip springs 17 and 18 are disposed in parallel with the feed screw 2 with the feed screw 2 interposed therebetween, and the vertical strip springs 26 and 27 are also disposed in the same manner.

  According to the joint 60 configured in this way, the horizontal strip springs 5, 6, 35, and 36 whose surfaces are directed in the horizontal direction, and the vertical strip springs 17, 18, and 26 whose surfaces are directed in the vertical direction. , 27 with a predetermined tension on the movable carriage 25 via the intermediate members 15, 34, the horizontal strip springs 5, 6, 35 against the deflection of the feed screw 2 in the direction perpendicular to the feed direction. , 36 and the vertical strip springs 17, 18, 26, 27 are elastically deformed, so that the vibration can be absorbed without frictional force and the transmission of the vibration to the movable carriage 25 can be cut off. Also, by applying the horizontal strip springs 5, 6, 35, 36 and the vertical strip springs 17, 18, 26, 27, the rigidity in the feed direction can be remarkably improved and the feed by the feed screw 2 can be improved. Can absorb runout and pitching error perpendicular to the direction.

  In addition, a pair of horizontal strip springs 5, 6, 35, 36 and vertical strip springs 17, 18, 26, 27 are provided on both sides of the feed nut 3, respectively, and these horizontal strip springs 5, 6, 35, 36 and the vertical strip springs 17, 18, 26, 27 are arranged in parallel with the feed screw 2 with the feed screw 2 interposed therebetween, so that the deflection of the feed screw 2 in the direction perpendicular to the feed direction can be reliably absorbed. .

  Further, as shown in FIGS. 7 and 8, the extension lines 5A, 6A, 35A, 36A, 17A of the surfaces of the horizontal strip springs 5, 6, 35, 36 and the vertical strip springs 17, 18, 26, 27 are provided. , 18A, 26A, 27A are disposed so that the horizontal strip leaf springs 5, 6, 35, 36 and the vertical strip leaf springs 17, 18, 26, 27 are oriented so that the center of the feed screw 2 is 2A. 3 pitching can be absorbed.

  Further, as shown in FIG. 4, the joint 60 according to the embodiment includes connecting portions 62, 64, 66, 68 of the intermediate members 15, 34 to which the vertical strip springs 17, 18, 26, 27 are connected, and the feed nut 3. It is formed to project toward. Further, these connecting portions 62, 64, 66, 68 are connected to connecting portions 70, 72, 74, 76 of the feed nut housing 4 on the feed nut 3 side to which the horizontal strip springs 5, 6, 35, 36 are connected. It is positioned substantially on the same plane as a plane 78 indicated by a two-dot chain line in FIG.

  As described above, the connecting portions 62, 64, 66, and 68 of the intermediate members 15 and 34 to which the vertical strip springs 17, 18, 26, and 27 are connected are projected to the feed nut 3 side. Since the equivalent execution length can be made longer than the length of the movable carriage 25, the absorption function against the lateral displacement and inclination of the joint 60 is improved.

  Further, since the connecting portions 62, 64, 66, 68 and the connecting portions 70, 72, 74, 76 are positioned substantially on the same plane with respect to the surface 78 orthogonal to the feed screw 2, the pitching of the feed nut 3 is absorbed. it can.

  Furthermore, since the horizontal strip springs 5, 6, 35, and 36 are disposed in a plane having the same height as the gravity center of the sliding force of the movable carriage 25, the couple that causes pitching displacement is reduced.

  Moreover, even if a pitching change arises in the feed nut 3 by arrange | positioning in the substantially same position about the rocking | swiveling center feed direction by the side of the movable carriage 25 of the left and right horizontal strip leaf springs 5, 6, 35, 36, The couple in the pitching direction does not act on the moving carriage 25.

  The vertical strip springs 17, 18, 26, 27 escape against displacement and inclination (yawing) in a direction perpendicular to the driving direction and parallel to the X-axis feed stage fixed guide surface 1, so that the force in this direction is guided. Transmission to the surface 1 can be prevented.

  In the embodiment, as described above, the connecting portions 62, 64, 66, 68 and the connecting portions 70, 72, 74, 76 are positioned substantially on the same plane with respect to the surface 78 orthogonal to the feed screw 2. However, the present invention is not limited to this. That is, even if the connecting portions 62, 64, 66, and 68 and the connecting portions 70, 72, 74, and 76 are formed to be shifted in the horizontal direction, the surface roughness measuring instrument 102 is not hindered in measurement accuracy. That is, in the surface roughness measuring machine 102, since the displacement of the feed nut 3 in the Z-axis direction is caused by a measurement error, even when the shifted structure is adopted, the displacement in the Z-axis direction can be sufficiently achieved without friction force. Absorb. Therefore, the measurement accuracy is improved without affecting the measurement accuracy.

  By the way, in the joint 60 of the feed device of the embodiment, as shown in FIG. 4 and the like, a pair of arms (nuts) that regulate the rotation of the feed nut 3 around the feed screw 2 via the feed nut housing 4. Rotation restricting members) 80 and 80 are provided.

  One end of each of the arms 80, 80 is fixed to the side surface of the feed nut housing 4 with a screw 82 so as to sandwich the feed nut housing 4, and a sliding member 84 is attached to the other end. The sliding member 84 is a self-lubricating member such as polytetrafluoroethylene (trade name: Teflon), and is fixed or coated on the lower end of a screw 86 attached to the other end of the arm 80.

  The other end of the arm 80 to which the sliding member 84 is attached extends from the side opening 25A of the movable carriage 25 to both sides as shown in FIG. 3, and is a slit formed in the guide member 1B as shown in FIG. A sliding member 84 is in contact with the 1D guide surface (straight guide member) 1E. The guide surface 1E is formed in parallel to the X-axis feed stage fixed guide surface 1 and has a length that includes the entire movement range of the movable carriage 25 in the X-axis direction. Further, the sliding member 84 is brought into contact with the guide surface 1E with a predetermined pressing force by the self-elastic force of the arm 80 so that no gap is generated between the sliding member 84 and the guide surface 1E.

  Accordingly, when the movable carriage 25 is moved in the X-axis direction by the feed action of the feed screw 2, the sliding member 84 slides on the guide surface 1E, so that the arm 80 is moved along with the movable carriage 25 along the guide surface 1E. Translated in the X-axis direction.

  During the movement in the X-axis direction, the feed nut 3 is restricted from rotating around the feed screw 2 by the arms 80 and 80 via the feed nut housing 4. Therefore, according to this joint 60, even if a force in the rotational direction acts on the feed nut 3, the feed nut 3 does not rotate because its rotation is restricted by the arms 80, 80.

  Therefore, according to the joint 60 of the embodiment, since measures are taken against the swing of the feed nut 3 in the direction perpendicular to the feed screw 2 and in the rotational direction, the straightness accuracy of the precision feeding device 100 is improved.

  FIG. 10 is a cross-sectional view of another embodiment for regulating the rotation of the feed nut 3 in the rotational direction.

  The nut rotation restricting mechanism shown in the figure is configured by bringing a pair of arms 90, 90 fixed downward on both sides of the feed nut housing 4 into contact with the guide bar 92 so as to sandwich the guide bar 92 therebetween. .

  The guide bar 92 is disposed so as to penetrate the movable carriage 25 and is attached to the guide member 1B (see FIG. 2) in parallel with the feed screw 2.

  Therefore, when the moving carriage 25 is moved in the X-axis direction by the feed action of the feed screw 2, the arm 90 is translated in the X-axis direction together with the moving carriage 25 while being in contact with the guide rod 90.

  During the movement in the X-axis direction, the rotation of the feed nut 3 around the feed screw 2 is restricted by the arms 90 and 90 via the feed nut housing 4. Therefore, according to this joint 60, even if a force in the rotational direction acts on the feed nut 3, the feed nut 3 does not rotate because its rotation is restricted by the arms 90, 90. Further, the surface of the arm 90 that contacts the guide rod 90 is coated with self-lubricating, for example, polytetrafluoroethylene.

The perspective view of the surface roughness measuring machine with which the joint of the precision feeder of embodiment was applied The perspective view of the straightness measuring machine to which the joint of the precision feeder of the embodiment is applied Assembly perspective view of precision feeding device of straightness measuring machine shown in FIG. Assembly perspective view of joint of precision feeding device of embodiment The perspective view which shows the structure of the joint of the precision feeder excluding the strip spring Plan view showing the structure of the joint of the precision feeder Side view of joint as seen from line 7-7 in FIG. Side view of joint as seen from line 8-8 in FIG. Side view of the joint shown in FIG. Sectional drawing of the principal part showing another embodiment of the nut rotation restricting member

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... X-axis feed stage fixed guide surface, 2 ... Feed screw, 3 ... Feed nut, 4 ... Feed nut housing 5, 6, 35, 36 ... Horizontal strip spring, 7, 8, 37, 38 ... Horizontal strip Spring retainer, 9, 10, 11, 12, 39, 40, 41, 42 ... leaf spring retainer, 15, 34 ... intermediate member, 13, 14, 43, 44 ... horizontal leaf spring retainer, 17, 18, 26, 27 ... vertical strip springs, 23, 24, 32, 33 ... vertical leaf spring holders, 19, 20, 21, 22, 28, 29, 30, 31 ... leaf spring holders, 25 ... moving carriages, 60 ... joints, 80 ... Arm, 84 ... sliding member, 90 ... arm, 92 ... guide rod, 100 ... precision feeding device, 102 ... surface roughness measuring machine, 122 ... straightness measuring machine

Claims (2)

In the joint of the feed device that connects the feed nut screwed to the feed screw and the moving member,
The feed nut is disposed on both sides in the moving direction of the moving member with the feed nut interposed therebetween, and one end portion is connected to the feed nut and the other end portion is connected to an intermediate member, and the feed nut is perpendicular to the feed screw. A first leaf spring member that elastically deforms and absorbs one-side deflection among the deflections of
One end is connected to the intermediate member, the other end is connected to the moving member, and the other side of the feed nut in a direction perpendicular to the feed screw is perpendicular to the one direction. A second leaf spring member that elastically deforms and absorbs the vibration;
A nut rotation regulating member whose one end is fixed to the feed nut and the other end is slidably contacted with the rectilinear guide member of the moving member, and regulates rotation of the feed nut relative to the feed screw;
A joint for a feeder characterized by comprising:   The joint of the feeding device according to claim 1, wherein the linear guide member of the moving member is a guide bar disposed along a feeding direction of the moving member.

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