KR20120085770A - Stylus-type measuring apparatus - Google Patents

Abstract

In the stylus type measuring device in which the stylus is supported by the Y-axis stage 4 supported by the linear guide on the beam 32 of the upper end of the door-shaped frame which is relatively movable in the X-axis direction with respect to the object to be measured, wear of the linear guide. This prevents deterioration of measurement accuracy. The linear guide is movable in contact with the pair of guide rails 51 and 52 fixed to the lower surface of the beam 32 and the guide surfaces 51a and 52a that are inclined with respect to the vertical surface of each guide rail 51 and 52. It consists of a pair of linear motion bearings 53 and 54. One linear motion bearing 54 makes it possible to flow in the X-axis direction and the vertical direction with respect to the Y-axis stage 4. On the Y-axis stage 4, the beam 32 is provided while the pressurizing means 55 for pressurizing the linear motion bearing 54 in the X-axis direction so as to be pushed against the guide surface 52a of the guide rail 52. The second pressing means 56 which presses the linear motion bearing 54 downward is provided in the side, and the vector direction of the combined force of the pressing force of both pressing means 55 and 56 is matched in the normal direction of the guide surface 52a. Let's do it.

Description

Hand-held measuring device {STYLUS-TYPE MEASURING APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stylus type measuring device having a stylus in contact with the surface of an object to be measured and measuring the surface shape and the like of the object to be measured.

Conventionally, a door-shaped frame that is relatively movable in the X-axis direction with respect to an object to be measured with two horizontal directions perpendicular to each other in the X-axis direction and the Y-axis direction, and long in the Y-axis direction of the upper end of the frame. A stylus measuring device is known which includes a Y-axis stage supported by the beam so as to be movable in the Y-axis direction through a linear guide, and which supports a stylus in contact with the surface of the object to be measured on the Y-axis stage (for example, See Patent Document 1).

In addition, in what is described in patent document 1, the linear guide uses the static pressure type thing which supports a slider which moves along a guide rail non-contactedly by air pressure. However, in the static pressure linear guide, it is difficult to sufficiently secure the support rigidity of the Y-axis stage. Therefore, it is also known to use the sliding type or rolling guide provided with the linear motion bearing which movably contacts the guide surface formed in the guide rail as a linear guide.

In this case, generally, while fixing a pair of upper and lower guide rails long in the Y-axis direction to one side of the X-axis direction of the beam long in the Y-axis direction, the Y-axis is provided on the guide surface formed on these guide rails. The pair of upper and lower linear motion bearings which are movably contacted in the direction is fixed to the Y axis stage.

In this case, however, when used for a certain period of time, wear of the guide surface of the guide rail and the contact surface of the linear motion bearing causes wear, thereby creating a gap therebetween. Then, the Y-axis stage is displaced in the vertical direction by this gap, and the vertical position of the stylus support portion provided in the Y-axis stage is shifted from the normal position, so that the measurement accuracy is deteriorated.

[Patent Document]

Patent Document 1: Japanese Patent Application Laid-Open No. 7-218207

In view of the above, it is an object of the present invention to provide a tactile measuring device in which the measurement accuracy is not deteriorated even if wear of the linear guide occurs.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention makes the horizontal frame | shaft orthogonal mutually orthogonal to the X-axis direction and the Y-axis direction, the door frame of the door shape which can move relatively to an X-axis direction with respect to a to-be-measured object, and Y of the upper end of this frame. Y-axis stage provided with the Y-axis stage axially supported by the drive mechanism which is supported by the linear guide to the beam elongate in an axial direction through a linear guide, and has an output member which moves to a Y-axis direction, and Y In the stylus type measuring device which supported the stylus which contacts the surface of a to-be-measured object to an axial stage, the linear guide is a pair of 1st and 2nd pair which are long in the Y-axis direction fixed to the X-axis direction and fixed to the lower surface of the beam. The 1st linear bearing which movably contacts a guide rail, the guide surface formed in the X-axis direction one side of the 1st guide rail in the Y-axis direction, and the X-axis direction of a 2nd guide rail. It consists of the 2nd linear motion bearing which movably contacts the guide surface formed in the other side surface in the Y-axis direction, The guide surface of each 1st and 2nd guide rail is a 1st and 2nd linear motion bearing. In order not to fall, it inclines with respect to a perpendicular surface, a 1st linear bearing is fixed to a Y-axis stage, a 2nd linear bearing is made to be movable in an X-axis direction and an up-down direction with respect to a Y-axis stage, A first pressing means for pressing the second linear bearing in the X-axis direction so as to push the second linear bearing to the guide surface of the second guide rail, the second pressing the second linear bearing downward to the beam or the member fixed to the beam; The pressing means is provided, and the vector direction of the force of the pressing force of the first pressing means and the pressing force of the second pressing means coincides in the normal direction of the guide surface of the second guide rail. do.

According to the present invention, even when abrasion of the contact surface of each linear bearing to the guide surface of each guide rail and the guide surface occurs, the gap between the guide surface and the contact surface of the linear motion bearing is generated by the pressing force of the first pressing means. This is avoided. And the 1st linear bearing fixed to the Y-axis stage is pressed against the guide surface of the 1st guide rail inclined with respect to the perpendicular | vertical surface, and the Y-axis stage is hold | maintained in the predetermined up-down direction position. Further, with the force of the pressing force of both the first and second pressing means, the second linear bearing is pressed in the normal direction of the guide surface of the second guide rail, so that the guide surface of the second guide rail and the second linear bearing It is possible to prevent uneven wear of the contact surface (wearing that the angle of inclination of the guide surface with respect to the vertical surface) changes. Therefore, the inclination of the Y-axis stage in the up-down direction by uneven wear is prevented, and the movement straightness in the Y-axis direction of a Y-axis stage can be ensured with high precision. Therefore, even if abrasion of the linear guide occurs, the Y-axis stage moves straight in the Y-axis direction while being held at a predetermined vertical position, so that the measurement accuracy does not deteriorate.

In addition, when the guide surface of the first guide rail and the contact surface of the first linear motion bearing wear, the pressing force of the first pressing means does not create a gap between the guide surface of the first guide rail and the first linear motion bearing. The axial stage is displaced in the X axis direction. In this case, if the output member of the drive mechanism is fixed to the Y-axis stage, the output member is also displaced in the X-axis direction integrally with the Y-axis stage, and a load acts on the drive mechanism, adversely affecting durability. In addition, the output member is oriented in the X-axis direction and the up-down direction due to the manufacturing precision error of the drive mechanism, and this pulling is transmitted to the Y-axis stage, which may adversely affect measurement accuracy.

Therefore, in this invention, it is preferable to provide the connection means which connects an output member with respect to a Y-axis table so that it has a degree of freedom of the movement along the perpendicular surface orthogonal to a Y-axis direction. According to this, even if the Y-axis stage is displaced in the X-axis direction, the output member does not displace. Therefore, it is possible to prevent the acting load on the drive mechanism. In addition, even if the output member is inclined in the X-axis direction and in the vertical direction, this inclination is not transmitted to the Y-axis stage, and there is no adverse effect on the measurement accuracy.

By the way, although the connection means may be comprised by the universal joint which has the freedom degree of a movement in the X-axis direction and an up-down direction, this becomes complicated and this leads to a cost increase. Therefore, the connecting means pushes the vertical bearing surface perpendicular to the Y-axis direction provided on one side of the Y-axis stage and the output member, the spherical portion provided on the other side of the Y-axis stage and the output member, and the spherical portion on the bearing surface. It is preferable that it is comprised with the spring to stick. According to this, the spherical surface portion is movable in point contact with the support surface, the above-mentioned degree of freedom of movement is obtained, and the structure is simplified, thereby reducing the cost.

1 is a front view of a stylus type measuring device according to an embodiment of the present invention.
FIG. 2 is an enlarged cross-sectional view of a main part of the stylus measuring device of FIG. 1. FIG.
3 is a cross-sectional view taken along line III-III of FIG. 2.
4 is a cross-sectional view taken along the line IV-IV of FIG. 3.
5 is a cross-sectional view taken along the line VV of FIG. 2.
6 is a cross-sectional view corresponding to FIG. 3 of another embodiment.

1 shows a stylus measuring device according to an embodiment of the present invention. This measuring apparatus arrange | positioned so that the sample stage 2 which mounts the base 1, the to-be-measured object W arrange | positioned on the base 1, and the sample stage 2 on the base 1 may be arrange | positioned. The door frame 3 is provided. The sample stage 2 is supported by the pair of guide rails 2a and 2a elongated in the X-axis direction fixed on the base 1 with horizontal two directions perpendicular to each other as the X-axis direction and the Y-axis direction. do. Then, by moving the long ball screw in the X-axis direction (not shown), the sample stage 2 is moved in the X-axis direction through a nut screwed to the ball screw. (3) is made to move relatively in the X-axis direction.

The door frame 3 is a beam 32 elongated in the Y-axis direction horizontally provided between the columns 31 and 31 on both sides of the Y-axis in the base 1 and the upper ends of both columns 31 and 31. Has) In addition, the sample stage 2 is fixed on the base 1, and the sentence frame 3 is movable in the X-axis direction, so that the sentence frame 3 is moved in the X-axis direction with respect to the measurement object W. You may make it move relative.

The Y-axis stage 4 is supported by the beam 32 of the upper end of the sentence frame 3 so that a movement to a Y-axis direction is possible through the linear guide 5 mentioned later. The Y-axis stage 4 is reciprocated in the Y-axis direction by the drive mechanism which has an output member moving in the Y-axis direction. In this embodiment, the drive mechanism is composed of a feed screw mechanism having a ball screw 6 long in the Y-axis direction and a nut 7 screwed thereto, as shown in Figs.

More specifically, the guide block 33 is fixed to the lower surface of the beam 32. The guide block 33 is formed with a concave indentation 33a elongated in the Y-axis direction concaved upward from the lower surface thereof. Then, in the state where the ball screw 6 is accommodated in the recessed part 33a, the ball screw 6 is axially axially supported on the support 33b fixed to both ends of the recessed part 33a in the Y-axis direction. Supported by. The ball screw 6 is connected to a servo motor (not shown) through a pulley 62 fixed to its shaft end and a belt 63 wound around it. Moreover, the nut holder 72 supported by the guide rail 71 fixed to the ceiling part of the recessed part 33a so that a movement to the Y-axis direction in the recessed part 33a is provided is provided, and the nut holder 72 is a nut. We keep in state that we stopped around (7). And by the rotation of the ball screw 6, the nut holder 72 which is an output member of a drive mechanism moves to the Y-axis direction through the nut 7, and the Y-axis stage 4 is moved through the nut holder 72. To move in the Y-axis direction.

The support frame 4a extending downward is attached to the Y-axis stage 4, and the needle 8 which contacts the surface of the to-be-measured object W is attached to this support frame 4a by a Z-axis sensor ( 81 is supported so as to be displaceable in the vertical direction. And the up-down displacement of the needle 8 is made to detect with the Z-axis sensor 81. As shown in FIG.

At the time of measurement, the stylus 8 is avoided by moving the sentence frame 3 relative to the object W in the X-axis direction while the stylus 8 is in contact with the surface of the object under measurement. Scan in the X-axis direction along the surface of the workpiece (W). And based on the vertical displacement of the stylus 8 detected by the Z-axis sensor 81 during this scan, the surface shape (unevenness | corrugation) along one X direction cross section of the to-be-measured object W is measured. Next, after moving the Y-axis stage 4 by a predetermined stroke in the Y-axis direction, the stylus 8 is scanned along the surface of the measurement object W in the X-axis direction in the same manner as above, and the measurement object W Measure the surface shape according to the cross section in the X direction. This is repeated and the surface shape of the predetermined area | region of the to-be-measured object W is measured.

By the way, when the vertical position of the Y-axis stage 4 changes due to wear of the linear guide 5 supporting the Y-axis stage 4, the Z-axis sensor for detecting the vertical displacement of the stylus 8 ( The detection output of 81 changes, and the measurement accuracy deteriorates. Moreover, even when the movement straightness of the Y-axis stage 4 to the Y-axis direction is impaired and the Y-axis stage 4 inclines in the up-down direction, the detection output of the Z-axis sensor 81 changes, and it measures Precision deteriorates Therefore, in the present embodiment, even if the wear occurs, the linear guide 5 is configured to move straight in the Y-axis direction while the Y-axis stage 4 is held at the predetermined vertical position. Hereinafter, the linear guide 5 will be described in detail.

3 and 4, the linear guide 5 is a pair of first and second guide rails 51 long in the Y-axis direction fixed to the lower surface of the beam 32 in the X-axis direction and fixed. 52). In the present embodiment, the first and second guide rails 51 and 52 are both held by screws on the lower surface of the guide block 33 on both outer sides of the recessed part 33a in the X-axis direction. . Therefore, both guide rails 51 and 52 are fixed to the lower surface of the beam 32 via the guide block 33.

Moreover, the linear guide 5 is made of the first guide rail 51 which is movably in contact with the guide surface 51a formed on one side surface (left side surface of FIG. 4) in the X-axis direction in the Y-axis direction. The first linear bearing 53 and the guide surface 52a formed on the other side surface (right side surface of FIG. 4) of the 2nd guide rail 52 on the other side of the X-axis direction, The agent which moves so that a movement to a Y-axis direction is possible Two linear motion bearings 54 are provided. Further, the first and second linear motion bearings 53 and 54 are constituted by sliding bearings which are in surface contact with the guide surfaces 51a and 52a of the respective guide rails 51 and 52 so as to be slidable. In addition, the guide surfaces 51a and 52a of each guide rail 51 and 52 are inclined with respect to the perpendicular surface so that each linear motion bearing 53 and 54 may not fall, but it is natural, but not to guide surface 51a, 52a. The contact surface of each linear motion bearing 53 and 54 which contacts is also inclined with respect to a perpendicular surface.

Here, the first linear bearing 53 is screwed to the Y-axis stage 4, but the second linear bearing 54 is movable in the X-axis direction and the vertical direction with respect to the Y-axis stage 4. Specifically, in the Y-axis stage 4, as shown in FIG. 3, the groove part 41 which receives the outer end part of the 2nd linear motion bearing 54 is formed, and this groove part 41 has 2nd linear motion. The bearing 54 is engaged so that it can flow to an X-axis direction and an up-down direction. And the 1st pressing means 55 which presses the 2nd linear motion bearing 54 to the guide surface 52a of the 2nd guide rail 52 in the X-axis direction is provided in the Y-axis stage 4, Doing. Moreover, the 2nd pressurizing means 56 which presses the 2nd linear motion bearing 54 downward is provided in the guide block 33 fixed to the beam 32. As shown in FIG.

In the present embodiment, the second linear motion bearing 54 is divided into three in the Y-axis direction, and the first pressing means 55 is provided for each of the divided second linear motion bearings 54. Moreover, the resin plate 54a elongate in the Y-axis direction which slidably contacts the upper surface of all the divided linear motion bearings 54 is provided. In the guide block 33, a plurality of second pressing means 56 is provided with a gap in the Y-axis direction so as to contact the upper surface of the resin plate 54a, and to the second pressing means 56. By this, each 2nd linear motion bearing 54 is pressurized downward through the resin plate 54a.

Each of the first and second pressing means 55, 56 is constituted by a spring plunger which is screwed into the Y-axis stage 4 or the guide block 33 from the X-axis direction outward or upward. And the pressing force of each pressurizing means 55 and 56 is adjusted by the screw insertion depth, and each pressurizing means 55 and 56 is set to the Y-axis stage 4 by the fixing nut 55a and 56a to the required screw insertion depth. ) And the guide block 33.

The pressing force of the first pressing means 55 and the pressing force of the second pressing means 56 are adjusted so that the vector direction of the force of these pressing forces coincides with the normal direction of the guide surface 52a. Thereby, the 2nd linear motion bearing 54 is pressed in the normal direction of the guide surface 52a of the 2nd guide rail 52, and the 2nd linear motion with the guide surface 52a of the 2nd guide rail 52 is carried out. Uneven wear of the contact surface of the bearing 54 (abrasion where the inclination angle of the guide surface 52a with respect to the vertical surface changes) can be prevented.

Moreover, the V-shaped groove 54b extended in the up-down direction used as the contact part of the 1st pressing means 55 is formed in the X-axis direction outer surface of the 2nd linear motion bearing 54. As shown in FIG. Thereby, the 2nd linear motion bearing 54 becomes movable relative to an up-down direction with respect to the 1st pressing means 55, and the 2nd linear motion bearing 54 is Y with respect to the 1st pressing means 55. As shown in FIG. Relative movement in the axial direction becomes impossible. Therefore, it is possible to prevent the second linear bearing 54 from moving in the Y-axis direction with respect to the Y-axis stage 4 by the amount of insertion clearance inevitably generated between the second linear bearing 54 and the groove 41. .

In addition, in order to be able to endure long-term use, it is necessary to select materials as the guide rails 51 and 52 and the linear motion bearings 53 and 54 that are as difficult to wear as possible. For example, when the guide rails 51 and 52 are made of hard ceramic, and the linear motion bearings 53 and 54 are made of resin having excellent lubricity such as PTFE and PCTFE, it is difficult to be affected by wear.

Moreover, the connecting means 9 which connects the nut holder 72 with respect to the Y-axis stage 4 so that it has a degree of freedom of the movement along the perpendicular surface orthogonal to a Y-axis direction is provided. In this embodiment, the vertical support surface 91 orthogonal to the Y-axis direction provided with the connecting means 9 to the Y-axis stage 4, the spherical part 92 provided to the nut holder 72, And the spring 93 which pushes the spherical surface portion 92 to the support surface 91.

In more detail, the convex part 72a which protrudes below is provided in a part of the Y-axis direction of the nut holder 72, and the convex part (as shown in FIG. 5) in the Y-axis stage 4 is shown in FIG. The substantially rectangular window hole 42 which receives 72a) is formed. A screw having a flat head is mounted on one side of the window hole 42 in the Y-axis direction, and the support surface 91 is formed by the head of the screw. In addition, a screw having a spherical head is mounted on one side of the convex portion 72a in the Y-axis direction, and the head of the screw constitutes the spherical portion 92. Furthermore, in the Y-axis stage 4, a pair of perforations 43 and 43 spaced apart in the X-axis direction opening to the side surface of the window hole 42 to the other side of the Y-axis direction are formed, and each The beam-shaped spring support 94 is inserted into the perforation 43. And between the spring support 94 and the other side surface of the convex part 72a on the other side of the Y-axis direction, the spring 93 which consists of coil springs was reduced and installed, and the spherical part ( 92 is pressed against the support surface 91.

Moreover, the adjustment means which adjusts the pressing force of the spring 93 is provided. That is, with the fixing nut 95a inserted into each of the perforations 43 and abutting the spring support 94 on the plate 44 screwed to the outer surface of the Y-axis direction on the other outer side of the Y-axis stage 4. The adjustment screw 95 to be fixed is screwed in. And the spring support 94 is displaced to the Y-axis direction by the adjustment screw 95, and the pressing force of the spring 93 can be adjusted. Here, the pressing force of the spring 93 is the sum of the friction force generated by the linear guide 5 and the force required for the acceleration and deceleration of the Y-axis stage 4 within a range less than a force causing elastic deformation of the spherical portion 92. Is adjusted to be greater than the force. Thereby, even if the nut holder 72 moves to one direction of the Y-axis direction and the other, the spherical part 92 does not fall from the support surface 91, and the nut holder (of the Y-axis stage 4 ( 72) followability is ensured.

According to the present embodiment, even if the contact surfaces of the guide surfaces 51a and 52a of the first and second guide rails 51 and 52 and the contact surfaces of the first and second linear motion bearings 53 and 54 are caused, By the pressing force of the first pressing means 55, the generation of a gap between the guide surfaces 51a and 52a and the linear motion bearings 53 and 54 is prevented. And Y-axis stage 4 by the press reaction force of the 1st press means 55 which acts on the Y-axis stage 4 via the 2nd linear bearing 54 by using the 2nd guide rail 52 as a reaction force support. The first linear motion bearing 53 fixed to the pressure contact with the guide surface 51a of the first guide rail 51 inclined with respect to the vertical surface. Therefore, the upper surface part of the Y-axis stage 4 which opposes this contact with the lower surface of the 1st guide rail 51 by the component force of this pressure contact reaction force upward, and the Y-axis stage 4 is predetermined up-down direction Is kept in position. Further, as described above, since uneven wear of the contact surface of the guide surface 52a of the second guide rail 52 and the second linear motion bearing 54 is prevented, the movement of the Y-axis stage 4 in the Y-axis direction is prevented. Straightness is ensured with high accuracy, and the Y-axis stage 4 does not incline to an up-down direction. Therefore, even if abrasion of the linear guide 5 occurs, the Y-axis stage 4 moves straightly in the Y-axis direction while being held at a predetermined up-down position, and the position change of the Y-axis stage 4 in the up-down direction The deterioration of the measurement accuracy due to the slope does not occur.

By the way, when the contact surface of the guide surface 51a of the 1st guide rail 51 and the contact surface of the 1st linear motion bearing 53 generate | occur | produces, the guide surface 51a and 1st linear motion by the pressing force of the 1st pressing means 55 are caused. The Y axis stage 4 is displaced in the X axis direction so as not to make a gap between the bearing 53. In this case, if the nut holder 72 is fixed to the Y-axis stage 4, the nut holder 72 will also be displaced in the X-axis direction integrally with the Y-axis stage 4, and the ball screw 6 will be axially oriented. Orthogonal load acts and causes uneven wear of the ball screw 6, which adversely affects durability. In addition, due to the eccentricity of the ball screw 6 and the eccentricity of the lead portion of the ball screw 6, the nut holder 72 is oriented in the X-axis direction and the up-down direction through the nut 7, and this pulling is caused by the Y-axis stage ( 4) may adversely affect measurement accuracy.

On the other hand, in this embodiment, the nut holder 72 is the X-axis direction and the up-down direction in the spherical part 92 on the perpendicular support surface 91 orthogonal to the Y-axis direction provided in the Y-axis stage 4. Y-axis stage 4 because of its point contact so as to be movable in a positive direction, that is, the nut holder 72 is connected with respect to the Y-axis table 4 to have a degree of freedom of movement along a perpendicular plane perpendicular to the Y-axis direction. The nut holder 72 does not displace even if the plate is displaced in the X-axis direction. Therefore, the lateral load orthogonal to the ball screw 6 does not act, and uneven wear of the ball screw 6 can be prevented. In addition, even if the nut holder 72 is squeezed in the X-axis direction and the vertical direction by the eccentricity of the ball screw 6 or the lead portion of the ball screw 6, this pulling is not transmitted to the Y-axis stage 4. This does not adversely affect measurement accuracy.

By the way, it is also possible to comprise the connecting means 9 by the universal joint which has the freedom degree of movement of an X-axis direction and an up-down direction. However, this complicates the structure and leads to an increase in cost. On the other hand, since the connecting means 9 of this embodiment is comprised by the support surface 91, the spherical part 92, and the spring 93, the structure can be simplified and cost reduction can be attained. In addition, in this embodiment, although the support surface 91 is provided in the Y-axis stage 4 and the spherical part 92 is provided in the nut holder 72, the spherical part in the Y-axis stage 4 is provided. At the same time as the 92 is provided, the support surface 91 may be provided at the nut holder 72.

In addition, in the said 1st Example, although the 1st and 2nd linear motion bearings 53 and 54 are comprised by the sliding bearing, at least one of both the linear motion bearings 53 and 54 may be comprised by rolling bearings. . For example, as in the second embodiment shown in FIG. 6, a cloud made of a ball or roller which makes the second linear bearing 54 contact the guide surface 52a of the second guide rail 52 in a rolling motion. You may comprise with a bearing. In the second embodiment, a collar 54c is provided between the first pressing means 55 and the second linear bearing 54 to hold the second linear bearing 54 in rolling motion. The second linear bearing 54 is pressed in the X-axis direction by the first pressing means 55 through the collar 54c. The other configuration of the second embodiment is the same as that of the first embodiment.

As mentioned above, although the Example of this invention was described with reference to drawings, this invention is not limited to this. For example, in the said embodiment, although the drive mechanism is comprised by the feed screw mechanism using the ball screw 6, it is also possible to comprise a drive mechanism by other mechanisms, such as a lock pinion mechanism. In this case, the output member (lock) may be tilted in the vertical direction due to the manufacturing accuracy error of the teeth of the lock or pinion, or the eccentricity of the bearing, and the above connecting means (not to be transmitted to the Y-axis stage 4) It is preferable to connect the output member to the Y-axis stage 4 via 9).

In addition, although the present embodiment applies the present invention to the stylus type measuring device in which the stylus 8 is supported to be displaced in the vertical direction through the Z-axis sensor 81, it is possible to oscillate in the vertical direction to the Y-axis stage 4. Supporting the lever, attaching the stylus to one end of the lever, and installing a sensor for detecting the swing displacement in the vertical direction of the lever, the vertical displacement of the stylus in contact with the surface of the object to be measured through the lever Similarly, the present invention can be applied to a stylus type measuring device in such a way that it can be detected.

W: measured object 3: door frame
32: beam 33: guide block (member fixed to the beam)
4: Y axis stage 5: Linear guide
51: first guide rail 52: second guide rail
51a, 52a: Guide surface 53: First linear bearing
54: second linear motion bearing 55: first pressing means
56 second pressure means 6 ball screw (drive mechanism)
7: nut (drive mechanism) 72: nut holder (output member)
8: stylus 9: connection means
91: support surface 92: spherical portion
93: spring

Claims (3)

A linear guide is provided in a frame of a door-shaped frame which is movable in the X-axis direction and the Y-axis direction perpendicular to each other in the X-axis direction and the Y-axis direction, and a beam long in the Y-axis direction of the upper end of the frame. A Y-axis stage movably supported in the Y-axis direction and reciprocating in the Y-axis direction by a drive mechanism having an output member moving in the Y-axis direction, the Y-axis stage being in contact with the surface of the object to be measured In the stylus type measuring device which supported the stylus to say,
The linear guide has a pair of first and second guide rails long in the Y-axis direction fixed to the lower surface of the beam in the X-axis direction, and a guide surface formed on one side of the X-axis direction of the first guide rail. It consists of a 1st linear motion bearing which movably contacts in a Y-axis direction, and a 2nd linear motion bearing which movably contacts a Y-direction in the guide surface formed in the other side of the X-axis direction of the 2nd guide rail,
The guide surface of each of the first and second guide rails is inclined with respect to the vertical surface so that the first and second linear motion bearings do not fall,
The first linear bearing is fixed to the Y-axis stage, the second linear bearing is movable in the X-axis direction and the vertical direction with respect to the Y-axis stage,
In the Y-axis stage, the first pressing means for pressing the second linear bearing in the X-axis direction is provided to push the second linear bearing to the guide surface of the second guide rail, and the second linear bearing is lowered to the beam or the member fixed to the beam. And a second pressurizing means for pressurizing the pressure sensor, wherein the vector direction of the force of the pressing force of the first pressing means and the pressing force of the second pressing means coincides in the normal direction of the guide surface of the second guide rail. Measuring device. The method according to claim 1,
And connecting means for connecting the output member with respect to the Y axis table to have a degree of freedom of movement along a vertical plane orthogonal to the Y axis direction. The method according to claim 2,
The connecting means includes a vertical support surface orthogonal to the Y-axis direction provided on one of the Y-axis stage and the output member, a spherical portion provided on the other side of the Y-axis stage and the output member, and a spherical portion on the support surface. A stylus type measuring device comprising a spring to be pushed.

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