JPH11316119A - Contact load control device, and shape measuring device using the device - Google Patents
Contact load control device, and shape measuring device using the deviceInfo
- Publication number
- JPH11316119A JPH11316119A JP13915798A JP13915798A JPH11316119A JP H11316119 A JPH11316119 A JP H11316119A JP 13915798 A JP13915798 A JP 13915798A JP 13915798 A JP13915798 A JP 13915798A JP H11316119 A JPH11316119 A JP H11316119A
- Authority
- JP
- Japan
- Prior art keywords
- stylus
- contact load
- control device
- measured
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、接触荷重制御装置
及び該装置を用いた形状測定装置に関し、より詳細に
は、被測定物面に接触する触針子の接触荷重制御装置及
び該装置を用いた形状測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a contact load control device and a shape measuring device using the same, and more particularly, to a contact load control device for a stylus in contact with a surface of an object to be measured and the device. The present invention relates to a shape measuring device used.
【０００２】[0002]
【従来の技術】従来、被測定物面の凹凸形状を高精度に
測定する装置に接触式プローブが多用されている。図５
は、従来の形状測定に使用される接触荷重制御装置の要
部断面図で、図中、１１は触針子（直動スライダ）１２
の一端に固定された球（真球）である。触針子１２は静
圧空気軸受で非接触支持されることにより、水平方向の
運動は拘束され、上下方向には摺動抵抗なく運動する。
１３はばね、１４は変位計、１５はハウジングで、図示
しない移動ステージに搭載される。2. Description of the Related Art Conventionally, a contact probe has been frequently used in an apparatus for measuring the irregular shape of a surface of an object to be measured with high accuracy. FIG.
Is a cross-sectional view of a main part of a contact load control device used for a conventional shape measurement.
Is a sphere (true sphere) fixed at one end. The stylus 12 is supported in a non-contact manner by a static pressure air bearing, so that the movement in the horizontal direction is restricted, and the stylus 12 moves in the vertical direction without sliding resistance.
13 is a spring, 14 is a displacement meter, 15 is a housing, which is mounted on a moving stage (not shown).
【０００３】球１１が被測定面１６に押し付けられる
と、ばね１３が変形し、変位計１４の出力が変化する。
移動ステージを駆動して変位計１４の出力が一定になる
ように制御することにより、球１１の接触荷重が一定に
保たれる。この状態で被測定面を走査し、移動ステージ
の動作軌跡を測定することにより、被測定面１６の形状
を測定することができる。When the ball 11 is pressed against the surface 16 to be measured, the spring 13 is deformed and the output of the displacement gauge 14 changes.
By controlling the output of the displacement meter 14 by driving the moving stage, the contact load of the ball 11 is kept constant. In this state, the shape of the measured surface 16 can be measured by scanning the measured surface and measuring the movement trajectory of the moving stage.
【０００４】[0004]
【発明が解決しようとする課題】こうした従来技術にお
いては、（イ）特に走査開始始点において、追従性能の
限界から触針子の軸方向移動量が所定量を大きく超えて
しまい、その結果、被測定面に過大な接触荷重がかかっ
てきずをつけてしまう、（ロ）摩擦力によって触針子に
過大なモーメント荷重がかかる場合があり、触針子が撓
んで測定誤差を生じたり、最悪の場合は、触針子を破損
するという問題点があった。In such prior art, (a) especially at the starting point of scanning, the amount of axial movement of the stylus greatly exceeds a predetermined amount due to the limit of the follow-up performance. Excessive contact load may not be applied to the measurement surface. (B) An excessive moment load may be applied to the stylus due to frictional force. In such a case, there is a problem that the stylus is damaged.
【０００５】本発明は、上述のような実情に鑑みてなさ
れたもので、被測定面に過大な接触荷重がかかるのを防
ぐ荷重制御装置及び過大な接触荷重により被測定面にき
ずをつけることなく、触針子の撓みによる測定誤差を極
力防止し、また触針子の破損を防止する形状測定装置を
提供するものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has a load control device for preventing an excessive contact load from being applied to a surface to be measured, and a method for flawing a surface to be measured by an excessive contact load. In addition, it is an object of the present invention to provide a shape measuring device for minimizing a measurement error due to deflection of a stylus and preventing breakage of the stylus.
【０００６】[0006]
【課題を解決するための手段】請求項１の発明は、被測
定面に接触する触針子の接触荷重が一定になるように制
御する接触荷重制御装置において、前記触針子の軸方向
荷重を支持する圧縮性流体を利用したばね機構と、前記
触針子の軸方向の移動量を検出する移動量検出手段と、
前記圧縮性流体の供給圧力を制御する供給圧力制御手段
とを有し、前記移動量検出手段の出力に応じて前記圧縮
性流体の供給圧力を制御することを特徴とするものであ
る。According to a first aspect of the present invention, there is provided a contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant. A spring mechanism using a compressible fluid that supports the stylus, and a moving amount detecting unit that detects an axial moving amount of the stylus,
Supply pressure control means for controlling the supply pressure of the compressible fluid, wherein the supply pressure of the compressible fluid is controlled in accordance with the output of the movement amount detection means.
【０００７】請求項２の発明は、被測定面に接触する触
針子の接触荷重が一定になるように制御する接触荷重制
御装置において、前記触針子の軸方向荷重を支持する圧
縮性流体を利用したばね機構と、前記触針子の軸方向の
移動量を検出する移動量検出手段と、前記触針子の軸外
方向の移動量を検出する移動量検出手段と、前記圧縮性
流体の供給圧力を制御する供給圧力制御手段とを有し、
前記各移動量検出手段の出力により前記圧縮性流体の供
給圧力を制御することを特徴とするものである。According to a second aspect of the present invention, there is provided a contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant, wherein a compressive fluid supporting an axial load of the stylus is provided. , A moving amount detecting means for detecting an axial moving amount of the stylus, a moving amount detecting means for detecting an off-axis moving amount of the stylus, and the compressible fluid. Supply pressure control means for controlling the supply pressure of
The supply pressure of the compressive fluid is controlled by the output of each of the moving amount detecting means.
【０００８】請求項３の発明は、被測定面に接触する触
針子の接触荷重が一定になるように制御する接触荷重制
御装置において、前記触針子の軸方向荷重を支持するば
ね機構と、前記触針子の軸方向の移動量を検出する移動
量検出手段と、前記ばね機構の支点を軸方向に変位させ
る支点駆動手段とを有し、前記移動量検出手段の出力に
より前記支点駆動手段を制御することを特徴とするもの
である。According to a third aspect of the present invention, there is provided a contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant, wherein a spring mechanism for supporting an axial load of the stylus is provided. A moving amount detecting means for detecting an axial moving amount of the stylus; and a fulcrum driving means for displacing a fulcrum of the spring mechanism in an axial direction. The fulcrum driving is performed by an output of the moving amount detecting means. It is characterized by controlling the means.
【０００９】請求項４の発明は、被測定面に接触する触
針子の接触荷重が一定になるように制御する接触荷重制
御装置において、前記触針子の軸方向荷重を支持するば
ね機構と、前記触針子の軸方向の移動量を検出する移動
量検出手段と、前記触針子の軸外方向の移動量を検出す
る移動量検出手段と、前記ばね機構の支点を触針子の軸
方向に変位させる支点駆動手段とを有し、前記各移動量
検出手段の出力により前支点駆動手段を制御することを
特徴とするものである。According to a fourth aspect of the present invention, there is provided a contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant, wherein a spring mechanism for supporting an axial load of the stylus is provided. A movement amount detecting means for detecting an axial movement amount of the stylus, a movement amount detecting means for detecting an off-axis movement amount of the stylus, and a fulcrum of the spring mechanism for the stylus. And a fulcrum driving means for displacing in the axial direction, wherein the front fulcrum driving means is controlled by an output of each of the movement amount detecting means.
【００１０】請求項５の発明は、被測定面に接触する触
針子の接触荷重が一定になるように制御する接触荷重制
御装置において、前記触針子の軸方向荷重を支持するば
ね機構と、前記触針子の軸方向の移動量を検出する移動
量検出手段と、前記触針子の軸方向荷重を支持するばね
機構の支点の軸方向の移動量を検出する移動量検出手段
と、前記ばね機構の支点を軸方向に変位させる支点駆動
手段とを有し、前記各移動量検出手段の出力差が一定に
なるように前記支点駆動手段を制御することを特徴とす
るものである。According to a fifth aspect of the present invention, there is provided a contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant, wherein a spring mechanism for supporting an axial load of the stylus is provided. Moving amount detecting means for detecting an axial moving amount of the stylus, moving amount detecting means for detecting an axial moving amount of a fulcrum of a spring mechanism supporting an axial load of the stylus, Fulcrum driving means for displacing the fulcrum of the spring mechanism in the axial direction, wherein the fulcrum driving means is controlled such that the output difference between the respective movement amount detecting means becomes constant.
【００１１】請求項６の発明は、請求項１乃至５のいず
れかに記載の接触荷重制御装置を触針ヘッドとして備
え、前記触針ヘッドを被測定面に沿って走査する走査手
段と、該走査手段による走査量を測定する測定手段と、
前記接触荷重制御装置の触針子の軸方向移動量が目標値
と等しくなるよう被測定面と前記触針ヘッド間の相対距
離を制御する位置制御手段と、前記位置制御手段による
移動量を測定する手段を有することを特徴とするもので
ある。According to a sixth aspect of the present invention, there is provided a contact load control device according to any one of the first to fifth aspects as a stylus head, and scanning means for scanning the stylus head along a surface to be measured. Measuring means for measuring the amount of scanning by the scanning means,
Position control means for controlling the relative distance between the surface to be measured and the stylus head so that the amount of axial movement of the stylus of the contact load control device becomes equal to a target value; and measuring the amount of movement by the position control means. It is characterized by having a means for performing.
【００１２】[0012]
【発明の実施の形態】（請求項１に対応）図１は、本発
明の一実施例を説明するための形状測定装置に使用され
る接触荷重制御装置の概略構成断面図であり、図中、１
は触針子（直動スライダ）２の一端に固定された球（真
球）である。触針子２は静圧空気軸受で非接触支持され
ることにより、水平方向の運動は拘束され、上下方向に
は摺動抵抗なく運動する。４は変位計、５はハウジン
グ、６は被測定面、７は押し下げ用吸気ポート、８は浮
き上げ用吸気ポートである。本プローブは図示しない移
動ステージに搭載される。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic sectional view of a contact load control device used in a shape measuring device for explaining an embodiment of the present invention. , 1
Is a sphere (true sphere) fixed to one end of the stylus (linear motion slider) 2. The stylus 2 is supported in a non-contact manner by a static pressure air bearing, so that the movement in the horizontal direction is restricted, and the stylus 2 moves in the vertical direction without sliding resistance. 4 is a displacement gauge, 5 is a housing, 6 is a surface to be measured, 7 is a suction port for pushing down, and 8 is a suction port for lifting. This probe is mounted on a moving stage (not shown).
【００１３】球１が被測定面６に押し付けられると、変
位計４の出力が変化する。移動ステージが駆動して変位
計４の出力が一定になるように制御することにより、球
１の接触荷重が一定に保たれる。この状態で被測定面を
走査し、移動ステージの動作軌跡を測定することによ
り、被測定面６の形状が測定される。When the ball 1 is pressed against the surface 6 to be measured, the output of the displacement meter 4 changes. By controlling the moving stage to be driven so that the output of the displacement meter 4 is constant, the contact load of the ball 1 is kept constant. In this state, the shape of the measured surface 6 is measured by scanning the measured surface and measuring the movement trajectory of the moving stage.
【００１４】押し下げ用吸気ポート７及び浮き上げ用吸
気ポート８には空気圧が供給され、該空気圧は、図示し
ない空電レギュレータ等で制御される。変位計４によっ
て測定される触針子２の移動量が所定量を超えた場合、
その量に応じて浮き上げ用吸気ポート８への供給圧力を
増すか、或いは押し下げ用吸気ポート７への供給圧力を
減じるか、或いはこれら両方の制御を同時に行うことに
よって、触針子２を押し上げる力を発生させ、これによ
り被測定面６にかかる荷重を低減させ、きずつきを防止
する。Air pressure is supplied to the intake port 7 for pushing down and the intake port 8 for lifting, and the air pressure is controlled by an unillustrated pneumatic regulator or the like. When the moving amount of the stylus 2 measured by the displacement meter 4 exceeds a predetermined amount,
The stylus 2 is pushed up by increasing the supply pressure to the lift intake port 8 or decreasing the supply pressure to the push-down intake port 7 in accordance with the amount, or by simultaneously performing both controls. A force is generated, thereby reducing the load applied to the surface 6 to be measured and preventing squealing.
【００１５】（請求項２に対応）図２は、本発明の他の
実施例を説明するための形状測定御装置に使用される接
触荷重制御の概略構成断面図であり、図中、９は、触針
子２の軸外方向の移動量を検出するための変位計であ
る。図１と同じ構成部品には同じ参照番号を付し説明を
省略する。(Corresponding to claim 2) FIG. 2 is a schematic sectional view of a contact load control used in a shape measuring control device for explaining another embodiment of the present invention. , A displacement meter for detecting the amount of movement of the stylus 2 in the off-axis direction. The same components as those in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted.
【００１６】被測定面６と触針子２先端の球１間に作用
する摩擦力によって、或いは段差測定の際に、触針子２
が横方向に荷重を受けた場合、それを変位計９で検出
し、該変位計９の出力に応じた浮上力を請求項１の発明
の実施例と同様の方法によって発生させ、触針子２に過
大な横方向荷重がかかるのを防止する。これにより、被
測定面６のきずつきを防止するのと同時に触針子２の撓
みによる測定誤差を低減することができる。The friction between the contact surface 2 and the ball 1 at the tip of the stylus 2 or when measuring the level difference
When a load is applied in the lateral direction, the load is detected by the displacement meter 9, and a levitation force corresponding to the output of the displacement meter 9 is generated by the same method as in the embodiment of the invention of claim 1, and 2 prevents an excessive lateral load from being applied. Accordingly, it is possible to prevent the measurement target surface 6 from wobbling, and at the same time, reduce the measurement error due to the bending of the stylus 2.
【００１７】（請求項３に対応）図３は、本発明の更に
他の実施例を説明するための形状測定装置に使用される
接触荷重制御装置の概略構成断面図で、図中、３はば
ね、１０は、該ばね３の支点を支持する圧電素子であ
る。図１又は図２と同じ構成部品には同じ参照番号を付
し説明を省略する。(Corresponding to claim 3) FIG. 3 is a schematic sectional view of a contact load control device used in a shape measuring device for explaining still another embodiment of the present invention. The springs 10 are piezoelectric elements that support the fulcrum of the spring 3. The same components as those in FIG. 1 or FIG. 2 are denoted by the same reference numerals, and description thereof will be omitted.
【００１８】変位計４の出力が規定値を超えると、圧電
素子１０に図示しない電源によって電圧が印加され、圧
電素子１０を伸長させる。その結果、ばねの弾性力によ
って触針子２を押し上げる力が発生し、被測定面６への
接触荷重が減少し、きずつきを防止することができる。When the output of the displacement meter 4 exceeds a specified value, a voltage is applied to the piezoelectric element 10 by a power source (not shown) to extend the piezoelectric element 10. As a result, a force that pushes up the stylus 2 is generated by the elastic force of the spring, and the contact load on the surface 6 to be measured is reduced, so that it is possible to prevent the rattle.
【００１９】（請求項４に対応）図４は、本発明の更に
他の実施例を説明するための形状測定装置に使用される
接触荷重制御装置の概略構成断面図で、この実施例は請
求項３の発明の実施例（図３）に触針子２の軸外方向の
移動量を検出するための変位計９を付加したものであ
る。該変位計９の出力に応じて圧電素子１０を制御す
る。(Corresponding to claim 4) FIG. 4 is a schematic sectional view of a contact load control device used in a shape measuring device for explaining still another embodiment of the present invention. The displacement meter 9 for detecting the amount of movement of the stylus 2 in the off-axis direction is added to the embodiment (FIG. 3) of the invention of the item 3 (FIG. 3). The piezoelectric element 10 is controlled according to the output of the displacement meter 9.
【００２０】（請求項５に対応）請求項５の発明の実施
例は、請求項３の発明の実施例（図３）のばね３の支点
を支持する圧電素子１０に、さらに歪みゲージ等の変位
検出手段を設け、前記変位計４の出力と前記歪みゲージ
の出力の差を一定にするように前記圧電素子１０の伸縮
量を変化させるものである。これにより被測定面６への
より細かな制御が可能となり被測定面６へのきずつきを
防止することができる。(Corresponding to claim 5) In the embodiment of the invention of claim 5, the piezoelectric element 10 supporting the fulcrum of the spring 3 of the embodiment of the invention of claim 3 (FIG. 3) is further provided with a strain gauge or the like. Displacement detecting means is provided, and the amount of expansion and contraction of the piezoelectric element 10 is changed so as to keep the difference between the output of the displacement meter 4 and the output of the strain gauge constant. As a result, finer control over the measured surface 6 is possible, and it is possible to prevent the measured surface 6 from being swung.
【００２１】（請求項６に対応）請求項６の発明は、請
求項１乃至５のいずれかの発明において述べた接触荷重
制御装置を触針ヘッドとして移動ステージ上に搭載し、
該移動ステージを駆動することによって被測定面６に沿
った触針の走査を行うと同時に変位計４の出力が一定と
なるように触針ヘッドと被測定面６との相対位置を制御
して測定面の形状を測定する。つまり、移動ステージの
動作軌跡に変位計４の出力を加算して被測定面６の形状
を得る。これにより、特に走査開始時に過大な接触荷重
が被測定面６にかかるのを防止でき、被測定面にきずを
つけることなく形状を測定することができる。According to a sixth aspect of the present invention, the contact load control device described in any one of the first to fifth aspects is mounted on a moving stage as a stylus head.
By driving the moving stage, the probe is scanned along the surface to be measured 6 and at the same time, the relative position between the probe head and the surface to be measured 6 is controlled so that the output of the displacement meter 4 becomes constant. Measure the shape of the measurement surface. That is, the shape of the measured surface 6 is obtained by adding the output of the displacement meter 4 to the motion trajectory of the moving stage. This can prevent an excessive contact load from being applied to the surface 6 to be measured, particularly at the start of scanning, and can measure the shape without flaws on the surface to be measured.
【００２２】更に、触針子の軸方向若しくは軸外方向移
動量がしきい値を超えた場合に、触針ヘッドの被測定面
に沿った走査を停止させる、或いは触針ヘッドを被測定
面から離れる方向に待避させる、若しくは、両方の動作
を行わせる。これにより、触針ヘッドの破損を防止する
ことができる。即ち、触針子ヘッドの被測定面に沿った
走査を停止させる、あるいは、触針ヘッドを被測定面か
ら離れる方向に待避させるので、触針ヘッドの破損を防
止することができる。Further, when the movement amount of the stylus in the axial direction or the off-axis direction exceeds a threshold value, the scanning of the stylus head along the surface to be measured is stopped, or the stylus head is moved to the surface to be measured. Evacuate in the direction away from, or perform both operations. Thereby, damage to the stylus head can be prevented. That is, the scanning of the stylus head along the surface to be measured is stopped, or the stylus head is retracted away from the surface to be measured, so that the stylus head can be prevented from being damaged.
【００２３】[0023]
【発明の効果】（請求項１に対応）触針子の軸方向移動
量検出手段によって測定される触針子の移動量が所定量
を越えた場合、その量に応じて浮上用吸気ポートへの供
給圧力を増すか、あるいは、押下用吸気ポートへの供給
圧力を減じるか、あるいは、両方の制御を同時に行うこ
とによって、触針子を押し上げる力を発生させるので、
被測定面にかかる荷重を低減でき、傷つきを防止でき
る。According to the first aspect of the present invention, when the movement amount of the stylus measured by the stylus axial movement amount detection means exceeds a predetermined amount, the stylus is moved to the air intake port for levitation in accordance with the amount. By increasing the supply pressure of, or decreasing the supply pressure to the depression intake port, or by performing both controls simultaneously, a force to push up the stylus is generated,
The load applied to the surface to be measured can be reduced, and scratches can be prevented.
【００２４】（請求項２に対応）軸外方向の移動量を検
出するための移動量検出手段の出力に応じた浮上力を請
求項１の実施例と同様の方法によって発生させ、触針子
に過大な横方向荷重がかかるのを防止することにより、
被測定面の傷つきを防止すると同時に、触針子の撓みに
よる測定誤差を低減できる。According to a second aspect of the present invention, a levitation force corresponding to the output of the movement amount detecting means for detecting the amount of movement in the off-axis direction is generated by the same method as in the first embodiment. By preventing excessive lateral load from being applied to
At the same time as preventing the surface to be measured from being damaged, it is possible to reduce a measurement error due to bending of the stylus.
【００２５】（請求項３に対応）ばね機構の支点を該支
点を軸方向に変化させる支点駆動手段で支持し、触針子
の軸方向移動量検出手段の出力が規定値を越えた場合に
は、前記支点駆動手段を駆動させて触針子を押し上げる
力を発生させるので、被測定面への接触荷重を減少で
き、傷つきを防止できる。The fulcrum of the spring mechanism is supported by fulcrum driving means for changing the fulcrum in the axial direction. When the output of the means for detecting the amount of movement of the stylus in the axial direction exceeds a specified value. Since the fulcrum driving means drives the fulcrum driving means to generate a force for pushing up the stylus, it is possible to reduce the contact load on the surface to be measured and prevent damage.
【００２６】（請求項４に対応）請求項２の発明の効果
と同等の効果を奏する。(Corresponding to claim 4) An effect equivalent to the effect of the invention of claim 2 is obtained.
【００２７】（請求項５に対応）ばね機構の支点を支持
する支点駆動手段に歪みゲージ等の支点の軸方向移動量
を検出する移動量検出手段を設け、触針子の移動量検出
手段の出力と前記歪みゲージ等の前記移動量検出手段と
の出力差を一定にするように支点駆動手段を制御するの
で、被測定面への接触荷重のよりきめ細やかな制御が可
能となり、被測定面の傷つきを防止できる。A fulcrum driving means for supporting a fulcrum of a spring mechanism is provided with a movement amount detecting means for detecting an axial movement amount of a fulcrum such as a strain gauge. Since the fulcrum driving means is controlled so as to make the output difference between the output and the movement amount detecting means such as the strain gauge constant, finer control of the contact load on the surface to be measured becomes possible and the surface to be measured can be controlled. Can be prevented from being damaged.
【００２８】（請求項６に対応）請求項１乃至５のいず
れかに記載の接触荷重制御装置を触針ヘッドとして形状
測定を行うので、特に走査開始時に過大な接触荷重が被
検面にかかるのを防止でき、被測定面に傷をつけること
なく形状を測定できる。(Corresponding to claim 6) Since the shape measurement is performed using the contact load control device according to any one of claims 1 to 5 as a stylus head, an excessive contact load is applied to the surface to be inspected particularly at the start of scanning. Can be prevented, and the shape can be measured without damaging the surface to be measured.
【図１】 本発明の一実施例を説明するための形状測定
装置に使用される接触荷重制御装置の概略構成断面図で
ある。FIG. 1 is a schematic configuration sectional view of a contact load control device used for a shape measuring device for explaining an embodiment of the present invention.
【図２】 本発明の他の実施例を説明するための形状測
定装置に使用される接触荷重制御装置の概略構成断面図
である。FIG. 2 is a schematic configuration sectional view of a contact load control device used in a shape measuring device for explaining another embodiment of the present invention.
【図３】 本発明の更に他の実施例を説明するための形
状測定装置に使用される接触荷重制御装置の概略構成断
面図である。FIG. 3 is a schematic sectional view of a contact load control device used in a shape measuring device for explaining still another embodiment of the present invention.
【図４】 本発明の更に他の実施例を説明するための形
状測定装置に使用される接触荷重制御装置の概略構成断
面図である。FIG. 4 is a schematic sectional view of a contact load control device used in a shape measuring device for explaining still another embodiment of the present invention.
【図５】 従来の形状測定に使用される接触荷重制御装
置の要部断面図である。FIG. 5 is a sectional view of a main part of a conventional contact load control device used for shape measurement.
１…球（真球）、２…触針子、３…ばね、４…変位計、
５…ハウジング、６…被測定面、７…押し下げ用吸気ポ
ート、８…浮き上げ用吸気ポート、９…変位計、１０…
圧電素子、１１…球（真球）、１２…触針子、１３…ば
ね、１４…変位計、１５…ハウジング、１６…被測定
面。1: ball (true sphere), 2: stylus, 3: spring, 4: displacement meter,
Reference numeral 5: housing, 6: surface to be measured, 7: intake port for pushing down, 8: intake port for lifting, 9: displacement meter, 10 ...
Piezoelectric element, 11: ball (true sphere), 12: stylus, 13: spring, 14: displacement gauge, 15: housing, 16: surface to be measured.
Claims (6)
一定になるように制御する接触荷重制御装置において、
前記触針子の軸方向荷重を支持する圧縮性流体を利用し
たばね機構と、前記触針子の軸方向の移動量を検出する
移動量検出手段と、前記圧縮性流体の供給圧力を制御す
る供給圧力制御手段とを有し、前記移動量検出手段の出
力に応じて前記圧縮性流体の供給圧力を制御することを
特徴とする接触荷重制御装置。1. A contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant,
A spring mechanism that uses a compressible fluid that supports the axial load of the stylus, a movement amount detection unit that detects an amount of movement of the stylus in the axial direction, and controls a supply pressure of the compressible fluid. A contact load control device, comprising: a supply pressure control unit; and controlling a supply pressure of the compressible fluid in accordance with an output of the movement amount detection unit.
一定になるように制御する接触荷重制御装置において、
前記触針子の軸方向荷重を支持する圧縮性流体を利用し
たばね機構と、前記触針子の軸方向の移動量を検出する
移動量検出手段と、前記触針子の軸外方向の移動量を検
出する移動量検出手段と、前記圧縮性流体の供給圧力を
制御する供給圧力制御手段とを有し、前記各移動量検出
手段の出力により前記圧縮性流体の供給圧力を制御する
ことを特徴とする接触荷重制御装置。2. A contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant.
A spring mechanism using a compressible fluid that supports an axial load of the stylus, a movement amount detecting unit that detects an axial movement amount of the stylus, and an off-axis movement of the stylus It has a movement amount detecting means for detecting the amount, and a supply pressure control means for controlling the supply pressure of the compressible fluid, and the supply pressure of the compressible fluid is controlled by the output of each movement amount detection means. Characteristic contact load control device.
一定になるように制御する接触荷重制御装置において、
前記触針子の軸方向荷重を支持するばね機構と、前記触
針子の軸方向の移動量を検出する移動量検出手段と、前
記ばね機構の支点を軸方向に変位させる支点駆動手段と
を有し、前記移動量検出手段の出力により前記支点駆動
手段を制御することを特徴とする接触荷重制御装置。3. A contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant,
A spring mechanism for supporting the axial load of the stylus, a movement amount detecting means for detecting an axial movement amount of the stylus, and a fulcrum driving means for axially displacing a fulcrum of the spring mechanism. A contact load control device for controlling the fulcrum drive means based on an output of the movement amount detection means.
一定になるように制御する接触荷重制御装置において、
前記触針子の軸方向荷重を支持するばね機構と、前記触
針子の軸方向の移動量を検出する移動量検出手段と、前
記触針子の軸外方向の移動量を検出する移動量検出手段
と、前記ばね機構の支点を触針子の軸方向に変位させる
支点駆動手段とを有し、前記各移動量検出手段の出力に
より前記支点駆動手段を制御することを特徴とする接触
荷重制御装置。4. A contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant,
A spring mechanism for supporting an axial load of the stylus, a movement amount detecting means for detecting an axial movement amount of the stylus, and a movement amount for detecting an off-axis movement amount of the stylus A contact load, comprising: a detecting means; and a fulcrum driving means for displacing a fulcrum of the spring mechanism in an axial direction of the stylus, wherein the fulcrum driving means is controlled by an output of each of the moving amount detecting means. Control device.
一定になるように制御する接触荷重制御装置において、
前記触針子の軸方向荷重を支持するばね機構と、前記触
針子の軸方向の移動量を検出する移動量検出手段と、前
記触針子の軸方向荷重を支持するばね機構の支点の軸方
向の移動量を検出する移動量検出手段と、前記ばね機構
の支点を軸方向に変位させる支点駆動手段とを有し、前
記各移動量検出手段の出力差が一定になるように前記支
点駆動手段を制御することを特徴とする接触荷重制御装
置。5. A contact load control device for controlling a contact load of a stylus in contact with a surface to be measured to be constant,
A spring mechanism that supports the axial load of the stylus, a movement amount detecting unit that detects an axial movement amount of the stylus, and a fulcrum of a spring mechanism that supports the axial load of the stylus. Moving amount detecting means for detecting the moving amount in the axial direction, and fulcrum driving means for displacing the fulcrum of the spring mechanism in the axial direction, wherein the fulcrum is fixed so that the output difference between the moving amount detecting means is constant. A contact load control device for controlling a driving means.
荷重制御装置を触針ヘッドとして備え、前記触針ヘッド
を被測定面に沿って走査する走査手段と、該走査手段に
よる走査量を測定する測定手段と、前記接触荷重制御装
置の触針子の軸方向移動量が目標値と等しくなるよう被
測定面と前記触針ヘッド間の相対距離を制御する位置制
御手段と、前記位置制御手段による移動量を測定する手
段を有することを特徴とする形状測定装置。6. A scanning means which comprises the contact load control device according to claim 1 as a stylus head, and scans the stylus head along a surface to be measured, and a scanning amount by the scanning means. Measuring means for measuring the position, a position control means for controlling the relative distance between the surface to be measured and the stylus head so that the amount of axial movement of the stylus of the contact load control device becomes equal to a target value, and the position A shape measuring device comprising means for measuring a movement amount by a control means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13915798A JPH11316119A (en) | 1998-05-06 | 1998-05-06 | Contact load control device, and shape measuring device using the device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13915798A JPH11316119A (en) | 1998-05-06 | 1998-05-06 | Contact load control device, and shape measuring device using the device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH11316119A true JPH11316119A (en) | 1999-11-16 |
Family
ID=15238914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13915798A Pending JPH11316119A (en) | 1998-05-06 | 1998-05-06 | Contact load control device, and shape measuring device using the device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11316119A (en) |
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| JP2007155440A (en) * | 2005-12-02 | 2007-06-21 | Institute Of Physical & Chemical Research | Apparatus and method for measuring minute force, and probe for measuring micro surface profile |
| JP2008196983A (en) * | 2007-02-14 | 2008-08-28 | Mitsutoyo Corp | Copying control method for contact type probe, and contact type measuring machine |
| JP2008203191A (en) * | 2007-02-22 | 2008-09-04 | Nippon Steel Materials Co Ltd | Probe head for contact type shape measuring device |
| JP2011203121A (en) * | 2010-03-25 | 2011-10-13 | Fanuc Ltd | Contact type measurement device having fine contact force adjustment mechanism |
| KR101244264B1 (en) | 2005-05-26 | 2013-03-18 | 가부시키가이샤 제이텍트 | Form measurement device |
| CN107883835A (en) * | 2017-12-07 | 2018-04-06 | 华中科技大学 | Magnetic suspension contact pilotage displacement transducer |
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1998
- 1998-05-06 JP JP13915798A patent/JPH11316119A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101244264B1 (en) | 2005-05-26 | 2013-03-18 | 가부시키가이샤 제이텍트 | Form measurement device |
| JP2007155440A (en) * | 2005-12-02 | 2007-06-21 | Institute Of Physical & Chemical Research | Apparatus and method for measuring minute force, and probe for measuring micro surface profile |
| JP2008196983A (en) * | 2007-02-14 | 2008-08-28 | Mitsutoyo Corp | Copying control method for contact type probe, and contact type measuring machine |
| JP2008203191A (en) * | 2007-02-22 | 2008-09-04 | Nippon Steel Materials Co Ltd | Probe head for contact type shape measuring device |
| JP2011203121A (en) * | 2010-03-25 | 2011-10-13 | Fanuc Ltd | Contact type measurement device having fine contact force adjustment mechanism |
| US8225519B2 (en) | 2010-03-25 | 2012-07-24 | Fanuc Corporation | Contact type measurement device having fine contact force adjustment mechanism |
| CN107883835A (en) * | 2017-12-07 | 2018-04-06 | 华中科技大学 | Magnetic suspension contact pilotage displacement transducer |
| CN107883835B (en) * | 2017-12-07 | 2024-02-06 | 华中科技大学 | Magnetic suspension contact pin displacement sensor |
| CN111998756A (en) * | 2020-08-27 | 2020-11-27 | 贵州民族大学 | Simple micro-surface profiler and use method thereof |
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