KR102372409B1 - Method of tightening stone table to minimize vibration of precision measuring table of vibration isolation table - Google Patents

Abstract

In the present invention, in connecting and configuring a granite surface plate table, a granite surface plate connecting rod, and a granite surface plate rail housing, a through-bolt hole between the verticals is formed in the granite surface plate table and the granite surface plate rail housing, respectively, wherein the through-bolt hole forms a bolt head fastening step hole and through-shaft holes. In the granite surface plate connecting rod, the through-bolt hole and a rod nut hole coincident with each of the through-shaft holes are formed in a right angle to communicate in the vertical and horizontal direction so that a vertical shaft bolt and a rod nut having a female threaded hole perpendicular to the length of the rod of a certain length are fastened in a right angle direction. The method of fastening a granite surface plate to minimize the vibration of the precision measuring table of the vibration isolation table of the present invention makes sure that a connection part does not loosen or shake during an earthquake impact.

Description

Method of tightening stone table to minimize vibration of precision measuring table of vibration isolation table

The present invention relates to a method for fastening a stone plate for minimizing vibration of a precision measuring table for a vibration isolation table, and has been devised to provide a strong binding force to a stone plate that is coupled to two or more.

2005.07.08. According to the domestic utility model registration No. 390177, a three-dimensional measuring device with a combined structure of a stone plate having a vibration absorbing plate (hereinafter referred to as 'first invention 1'), a tension space is placed on the lower surface of the stone plate of the three-dimensional measuring device. and forming a seating groove larger than that of the tension space to fix the vibration absorbing plate thereto, and by coupling and forming a transport flange that is transported in engagement with a transport screw on the lower surface of the vibration absorbing plate, the drive control unit of each axis and rails, etc. When vibration is generated by dust or foreign substances in the transfer part of The technology related to the 3D measuring device by the combination structure of the granite plate with the vibration absorbing plate has a very economical effect by enabling stable quality control such as numerical management and measurement of ultra-precision products without causing misidentification defects. However, as the core technical content of this technology, in claim 1, a well-known three-dimensional measuring instrument consisting of a main body, a stone platen and a probe, and having a driving control unit composed of a driving motor, a transport screw, and a transport flange under the stone platen. In the lower surface of the stone plate, a concave tension space portion is formed, and a seating groove having a wider shape than the tension space portion is formed concentrically, and a high-strength shock absorbing plate is fixedly formed in the seating groove, and the The transport flange is coupled to the bottom surface of the shock absorbing plate so that the driving force by the rotation of the transport screw is transmitted to the granite plate through the transport flange and the shock absorbing plate, so that the granite plate is transported along the X and Y coordinates It can be seen that it is a three-dimensional measuring device by a combined structure of a stone plate having a vibration absorbing plate, and also 2011.03.28. Looking at what is known as Korean Patent Registration No. 1026834 LCD panel measuring device (hereinafter referred to as 'prior invention 2'), there is an LCD panel measuring device that can measure the thickness, flatness, bending or twisting of an LCD panel. In this regard, when an LCD panel is supplied, it automatically measures the thickness, flatness, bending or torsion of the LCD panel to determine whether or not it is good or bad, and to accumulate the measurement data and output the accumulated data. To provide an LCD panel measuring device to improve panel measurement efficiency. It is possible to measure LCD panels in a short time with minimal manpower, thereby improving production efficiency, reducing production costs, and reducing inspection time. By shortening it, mass-production inspection, not lot inspection, is possible as well as for the systematic management of shortened measurement data. Install a receiver that receives and transmits to the control panel so that the emitter and receiver send and receive sensor signals to measure the thickness, flatness, bending or torsion of the LCD panel. An LCD panel measuring device configured to install a corresponding detection sensor to stop the operation of equipment by a sensor signal from the detection sensor when an object is drawn in; A stone plate is installed on the base, a plurality of LCD panel holders are installed at equal intervals on the upper surface of the stone plate, and a stopper for controlling the position of the LCD panel is installed at the rear of the LCD panel holders located at the rearmost side, Install the transport rails on both sides of the panel holder to install the transport cart on each transport rail, install the emitter and receiver on the upper surface of the transport cart, and combine the fixing plate on the top surface of the emitter and receiver to the fixed plate. to enable the transmitter and receiver to move together by A reciprocating driving means driven by a driving motor is installed on one upper side of the base, and the transport trolley on either side of the transport trolley is coupled to a fixed member fastened to the reciprocating driving means to obtain a projector and a light projector by forward and reverse driving of the driving motor. to allow the receiver to reciprocate the upper part of the stone plate with the LCD panel holder in between; An LCD panel measuring device is known, characterized in that it is configured by installing a control panel for controlling the operation of equipment and storing/outputting measurement data and a monitor for outputting internal information on a shelf provided on the upper part of the base You can know the facts, and also, 2008.08.12. According to the technology known by the domestic registered Patent No. 852876 Stabilizer (hereinafter referred to as 'Prior Invention 3'), the suction plate is enlarged in response to the enlargement of the work, and while maintaining the flatness precision, the suction is carried out. As a task of moving the board smoothly together with the stage, the stage device comprises a stone platen, a stage moving on a plane of the stone platen, a suction plate placed on the stage for adsorbing a flat workpiece; It has a pair of Y linear motors that move the stage in the Y direction. The suction plate has a rectangular suction surface, the four sides of the suction surface in the X and Y directions are formed to have a dimension larger than that of the X stage, and the width dimension in the X direction is formed to be smaller than that of the stone plate. .

In addition, it has four struts extending in a downward direction from the lower surface of the suction plate 40, and an air pad provided at the lower end of each pole and movable by floating on the flat surface of the stone plate by air pressure. The sucker includes a stage that moves on a stone platen by directly supporting a post and an air pad, and a stage that moves on a flat surface of the stone platen; In the stage device having a linear motor for moving the stage, a plurality of struts extending in a downward direction from the lower surface of the suction plate are provided at the lower end of each strut, and are floated on the flat surface of the stone plate by air pressure. It can be seen that a stage device, etc., characterized in that it is provided with a movable first air pad, is known.

On the other hand, the stone plate in the above-mentioned precision measuring device is manufactured by processing a solid raw (natural) stone that is not allowed to have defects as a heavy stone material in principle without vibration due to the characteristics of the device.

The method of fastening the stone table for minimizing vibration of the precision measuring table of the vibration isolation table according to the present invention is a precision measurement of the vibration isolation table in the vibration isolation table precision measuring table in which two or more structures constituting the stone table are coupled in the Y direction or the X direction. It is a method of fastening the granite table, the stone granite connecting rod, and the granite rail housing constituting the table at right angles to the vertical shaft bolt and the horizontal bar nut. Make sure there is no problem.

A method of fastening a stone table for vibration minimization of a precision measuring table for a vibration isolation table according to an embodiment of the present invention that achieves the above object comprises the steps of: The purpose is achieved by forming a vertical shaft bolt hole in the stone plate table and the stone plate rail housing and inserting the shaft bolt, and by forming a horizontal tunnel-type nut hole in the stone plate connecting base to fasten the rod nut.

In the present invention, a vertical shaft bolt hole is formed in the stone table and the stone plate rail housing to insert the shaft bolt, and the horizontal tunnel type nut hole is formed in the stone plate connecting table to fasten the rod nut. The problem of loosening and separating the nut from the nut hole does not occur even under continuous vibration impact due to the increased binding force that can be tightened by applying sufficient force. It has the effect that it can be easily disassembled and replaced.

1 is a perspective view illustrating a state in which a stone plate of a precision measuring table for a vibration isolation table is coupled with a shaft bolt and a rod nut according to an embodiment of the present invention;
Figure 2 is a cross-sectional view of the main part of the side of the precision measuring instrument for explaining the present invention
Figure 3 is a partial cross-sectional view of the state in which the stone table table, the stone table plate connecting rod, and the stone table plate rail housing are coupled by the shaft bolt and the rod nut according to the present invention as viewed from the front;
Figure 4 is a partial cross-sectional view of the state in which the stone table table, the stone table plate connecting rod, and the stone table plate rail housing are coupled by the shaft bolt and the rod nut according to the present invention as viewed from the front;
5 is a partial cross-sectional view of a side state illustrating a state in which the shaft bolt and the rod nut according to the present invention are fitted and bound to the stone-grain connecting rod and the stone-grained-half rail housing;
Figure 6 is a partial cross-sectional view of the front state illustrating the state in which the shaft bolt and the rod nut according to the present invention are fitted and bound to the stone-grained semi-connection bar and the stone-grained semi-rail housing;
7 is a cross-sectional view of a rod nut according to the first embodiment of the present invention;
8 is a cross-sectional view of a bar nut according to a second embodiment of the present invention;
9 is a cross-sectional view taken along line A-A' of FIG. 8;
10 is a cross-sectional view taken along line B-B' of FIG. 8;
11 is a cross-sectional view of a bar nut according to a third embodiment of the present invention;
12 is a cross-sectional view along line A-A' of FIG. 11;
13 is a cross-sectional view taken along line B-B' of FIG. 11;
14 is a cross-sectional view of a bar nut according to a fourth embodiment of the present invention;
15 is a plan view of a bar nut according to a fourth embodiment of the present invention;
16 is a bottom view of FIG. 15;
17 is an exemplary view of the action of force by fastening the shaft bolt and the rod nut according to the present invention

In describing the present invention, when it is determined that a detailed description of a related known configuration may unnecessarily obscure the gist of the present invention, the detailed description thereof is omitted.

In addition, the terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of the user.

Therefore, it goes without saying that the definition should be made based on the content throughout this specification.

Next, the detailed configuration, preferred embodiment, and operating state of the vibration time reduction device for the precision measuring table of the vibration isolation table described in the present invention will be described in detail with reference to the accompanying drawings below.

1 is a perspective view illustrating a state in which a stone plate of a precision measuring table for vibration isolation table is coupled with a shaft bolt and a rod nut according to an embodiment of the present invention, and FIG. 3 is a partial cross-sectional view of the state in which the stone table plate, the stone table plate connecting rod, and the stone plate plate rail housing are coupled by the shaft bolts and rod nuts of the present invention, as viewed from the front, and FIG. It is a partial cross-sectional view of the state in which the stone-grain table, the stone-grain and semi-connector, and the stone-grained-and-half rail housing are combined by the It is a partial cross-sectional view of the side state explaining the binding state, and FIG. 6 is a partial cross-sectional view of the front state explaining the state in which the shaft bolt and the rod nut according to the present invention are inserted into the stone-grain connecting rod and the stone-grained-half rail housing and are bound. 7 is a cross-sectional view of a rod nut according to a first embodiment of the present invention, FIG. 8 is a cross-sectional view of a rod nut according to a second embodiment of the present invention, and FIG. 10 is a cross-sectional view taken along line B-B' of FIG. 8, FIG. 11 is a cross-sectional view of a bar nut according to the third embodiment of the present invention, and FIG. 12 is a cross-sectional view taken along line A-A' of FIG. 13 is a cross-sectional view taken along line B-B' of FIG. 11, FIG. 14 is a cross-sectional view of a bar nut according to a fourth embodiment of the present invention, and FIG. 15 is a plan view of a bar nut according to a fourth embodiment of the present invention , FIG. 16 is an exemplary bottom view of FIG. 15, and FIG. 17 is an exemplary view of the action of force by fastening the shaft bolt and the rod nut according to the present invention.

Next, as illustrated in FIG. 3 , the method of fastening the stone table plate for minimizing the vibration of the precision measuring table of the vibration isolation table according to the present invention includes the stone table table 10, the stone table plate connecting rod 20, and the stone table plate rail housing (30). In the connecting configuration, vertical through-bolt holes 11 and 31 are respectively formed in the stone granite table 10 and the stone granite rail housing 30, wherein the through bolt holes 11 and 31 are Bolt head fastening step holes 11a, 31a and through shaft holes 11b and 31b are formed, and in the stone plate connecting rod 20, through bolts coincident with each of the through shaft holes 11b and 31b. The hole 21 and the rod nut hole 22 are formed at right angles to communicate in the vertical and horizontal directions.

And in each of the through bolt holes 11, 21, 31 and the rod nut hole 22, the shaft bolt 40 and the rod nut 50 are inserted and fastened at a right angle. A method of fastening a stone plate for minimizing vibration of a precision measuring table for a vibration isolation table is provided, and this will be described in detail.

The shaft bolt 40 that achieves the above object has a bolt head 42 and a male screw 43 at the upper end and lower end of the long shaft 41 as illustrated in FIGS. 3 and 4, and the rod nut 50 is A female screw hole 52 is formed through the rod 51 of an appropriate length and perpendicular to the longitudinal direction, and the cross-sectional shape of the rod nut 50 at this time is a circular shape as illustrated in FIGS. 8 to 10 or FIGS. 14 to FIG. It is preferable to form a rectangle as exemplified in 16, and in another case, the positioning protrusion 60 along the longitudinal direction of the rod nut 50 as illustrated in FIGS. 11 to 13 and 14 to 16 . In this case, the positioning protrusion 60 may be formed on one or both sides, and when the positioning protrusion 60 is applied to the rod nut 50, the rod nut hole 22 A positioning groove (22a) for guiding the positioning projection (60) is formed in the.

In addition, as illustrated in FIGS. 7 and 8 , in the rod nut 50 , one, two, or more female screw holes 52 can be formed according to the length of the rod 51 .

Next, the formed shaft bolt 40 is inserted into the rod nut hole ( 22), but with the female threaded hole 52 vertical and pushed in until it coincides with the through bolt hole 21, the shaft is inserted into the shaft bolt 40 of the stone stone table 10 and the stone stone half rail housing 30. The shaft bolt 40 and the rod nut 50 are fastened by inserting the bolt 40 and then rotating a separate wrench (tool) into the bolt head 42 .

At this time, by rotating the shaft bolt 40 with the separate wrench, the grip force for fastening with the rod nut 50 is tightened by applying force to the maximum limit value.

When the shaft bolt 40 is strongly tightened as described above, the male screw 43 rotates while the bolt head 42 is hung in the stepped hole 31a, and the rod nut 50 is pulled and thus the rod nut ( 50) is tightened while being pulled closely in the direction of the bolt head 42, as illustrated in FIG. (30) is fastened with a strong binding force.

Therefore, in the method of fastening the stone plate for minimizing the vibration of the vibration isolation table precision measurement table provided by the present invention, the shaft bolt 40 and the rod nut 50 do not move even if a continuous vibration shock caused by an earthquake is transmitted. By maintaining the state, it is possible to perform reliable precision measurement work.

It is not implemented only by the structure described in the embodiment of the present invention described above, but may be implemented through other structures realizing the function corresponding to the configuration of the embodiment of the present invention, and this configuration is seen from the description of the embodiment described above. It is obvious that an expert in the technical field to which the invention belongs can easily implement it, and this also falls within the scope of the present invention.

10: stone table
11, 21, 31: through bolt hole
11a, 31a: step hole
11b, 31b: through shaft hole
20: stone granite joint
22: rod nut hole
30: Seokjeongban rail housing
40: shaft bolt
41: long shaft
42: bolt head
43: male
50: Bon nut
51: rod
52: female thread hole

Claims (4)

In connecting the stone table plate 10, the stone table plate connecting rod 20, and the stone plate plate rail housing 30, there is a vertical through bolt hole 11 in the stone table plate 10 and the stone table plate rail housing 30. (31) is formed, respectively, but the through bolt holes 11 and 31 form bolt head fastening step holes 11a and 31a and through shaft holes 11b and 31b, and the stone granite connecting rod 20 In the above, a through bolt hole 21 and a rod nut hole 22 coincident with each of the through shaft holes 11b and 31b are formed at right angles to communicate in a vertical and horizontal direction, so that the vertical shaft bolt 40 and a certain number are formed. A method of fastening a stone plate for minimizing vibration of a precision measuring table for a vibration isolation table, characterized in that a rod nut (50) having a female screw hole (52) perpendicular to the length of the rod (51) is fastened in a right angle direction.
According to claim 1,
A positioning groove (22a) is formed in the axial direction in the rod nut hole (22) of the stone granite connecting rod (20) of claim 1, and a positioning projection (60) is formed in the rod nut (22) so that the female screw hole (52) is formed. A method of fastening a stone plate for minimizing vibration of a precision measuring table of a vibration isolation table, characterized in that it further includes to be guided by the shaft bolt (40).
According to claim 1,
[Claim 2] The rod nut 50 of claim 1, wherein the rod 51 has a circular cross section and one or more female screw holes 52 are formed to be perpendicular to the longitudinal direction. A method of fastening the granite plate to minimize it.
According to claim 1,
The vibration of the vibration isolation table precision measurement table according to claim 1, wherein the rod nut 50 of claim 1 has a rectangular cross section of the rod 51 and further includes a positioning protrusion 60 formed at the center of one side in the longitudinal direction. A method of fastening the granite plate to minimize it.

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