JP2013258346A - Electronic component loading device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To ensure long life and high accuracy of an electronic component loading device.SOLUTION: A beam 16 has a vertical section in the longitudinal direction formed substantially in L-shape at two beam protrusions 16a, 16b. A stator 18b is formed, substantially in U-shape, of a first stator protrusion 18b2 where a permanent magnet is arranged in the longitudinal direction, a second stator protrusion 18b1 where a permanent magnet is arranged in the longitudinal direction, and a stator connection 18b3 for connecting the first stator protrusion 18b2 and the second stator protrusion 18b1. With regard to the beam 16 and the stator 18b, the second stator protrusion 18b1 and one of the two beam protrusions 16a, 16b are brought into contact and fastened with a bolt, and the stator connection 18b3 and the other of the two beam protrusions 16a, 16b are brought into contact and fastened with a bolt.

Description

  The present invention relates to an electronic component mounting apparatus, and more particularly to a drive stage used in an electronic component mounting apparatus.

  An electronic component mounting apparatus includes a drive stage that moves a moving body mounted with a mount mechanism for mounting an electronic component on a substrate along a drive guide, and a drive stage moving unit that moves the drive stage in a direction perpendicular to the above direction. And is an apparatus intended to mount an electronic component at a predetermined position on a substrate. A linear motor is used as an actuator for moving a drive stage or a moving body.

Patent Document 1 is disclosed as an electronic component mounting apparatus. FIG. 6 is a cross-sectional view of the driving stage of the first conventional example. FIG. 6 is a drawing corresponding to FIG.
The driving stage of the first conventional example includes a moving body 17 for mounting a mounting mechanism, a beam 16 for mounting the moving body 17, a linear motor 18 for driving them, and a driving guide (guide rail). 19 and slider 20). Note that the moving body 17 and the beam 16 are connected via a drive guide (guide rail 19 and slider 20).

The drive guide is composed of a guide rail 19 installed along the longitudinal direction of the beam 16 (direction passing through the paper surface of FIG. 6), and a slider 20 that can slide on the guide rail 19. It is installed on the moving body 17.
The linear motor 18 includes a mover 18a and a stator 18b, and the mover 18a is disposed at a position facing the stator 18b. A movable element 18 a is installed on the moving body 17, and a stator 18 b having a length corresponding to the moving distance of the moving body 17 is installed on the beam 16.

  As shown in FIG. 6, the stator 18 b is generally fastened and fixed on the beam 16 with a bolt 22. Here, when the linear motor 18 is operated, a magnetic attraction force attracting each other acts between the stator 18b and the movable element 18a in the y direction in FIG. For this reason, the bolt 22 fastens and fixes the stator 18b and the beam 16 so that the axial direction of the bolt 22 and the acting direction of the magnetic attractive force (y direction in FIG. 6) are parallel. Thereby, since the magnetic attraction force does not act as a force perpendicular to the axis of the bolt 22, slippage of the fastening portion and shear failure of the bolt can be prevented, and the reliability of the fastening portion can be ensured.

  However, if the rigidity of the beam 16 is increased in order to suppress the torsional deformation of the beam 16 caused by the magnetic attractive force between the movable element 18a and the stator 18b, the mass of the beam 16 and the entire drive stage 10 increases. Occurs.

Therefore, Patent Document 2 discloses a technique in which the linear motor 18 is configured such that the movable element 18a is sandwiched between two stators 18b. FIG. 7 is a cross-sectional view of the driving stage of the second conventional example. FIG. 7 is a drawing corresponding to FIG.
In the driving stage of the second conventional example shown in FIG. 7, the magnetic attractive force acting between the mover 18a and each stator 18b acts on the same axis in the opposite direction, so that the magnetic attractive force Is offset. With this configuration, not only the reliability of the fastening portion can be ensured, but also the deflection and torsional deformation of the beam 16 can be suppressed.

Further, Patent Document 3 is disclosed as a drive stage that cancels out the magnetic attractive force between the mover 18a and the stator 18b. FIG. 8 is a cross-sectional view of the driving stage of the third conventional example. FIG. 8 is a drawing corresponding to FIG.
Unlike the configuration of FIG. 7, the stator 18b shown in FIG. 8 has a structure in which the stator 18b sandwiches a mover (not shown) although the stator 18b has an integrated structure. However, the magnetic attractive force is offset.

  However, when the drive stage accelerates in the horizontal direction (y direction) in FIG. 8, an inertial force corresponding to a force obtained by multiplying the mass and acceleration of the drive part acts on the drive stage. This inertial force in the y direction acts as a force perpendicular to the axis of the bolt 22 that fastens and fixes the stator 18b. When the drive stage is operated at a large acceleration, slippage or shear failure of the bolt occurs at the fastening portion. There is a risk. As a result, the smooth operation of the linear motor 18 and the drive guide is hindered, which causes a decrease in the guide accuracy and operation speed of the drive stage.

Therefore, for the purpose of preventing the drive stage failure and performance degradation as described above, the configuration in which the stator 18b is fastened and fixed on the beam 16, the diameter of the bolt 22 is increased, and the constituent material of the stator 18b is changed. For example, Patent Document 4 is disclosed. FIG. 9 is a cross-sectional view of the drive stage of the fourth conventional example. FIG. 9 is a drawing corresponding to FIG.
In the drive stage of the fourth conventional example shown in FIG. 9, even if the drive stage accelerates in the horizontal direction (y direction), the inertia force in the y direction acts in the normal direction with respect to the installation surface of the stator 18b. The bolt 22 can bear all the inertial force in the y direction as an axial component. Therefore, it is possible to prevent slippage of the fastening portion and shear failure of the bolt against the inertial force.

JP 2008-198685 A Japanese Patent No. 4646385 JP 2006-49384 A JP 2011-155167 A

  In the drive stage fastening structure of the fourth conventional example shown in FIG. 9, the dead weight of the stator 18b acts in the direction perpendicular to the axis of the bolt 22, but the bolt 22 has a larger diameter or a smaller and lighter stator 18b. Can be used to prevent slippage of the fastening portion with respect to the dead weight of the stator 18b and shear failure of the bolt.

On the other hand, since the electronic component mounting apparatus is required to support a wide range of substrates from small to large, the range of movement of the moving body 17 on which the mount mechanism is mounted so that the electronic component can be mounted on a large-area substrate is expanded. Therefore, it is necessary to lengthen the stator 18b. Increasing the length of the stator 18b leads to an increase in the size of the movable body 17 and the beam 16. Therefore, a lightweight design with a small bolt diameter and a minimum number of bolts is desired.
However, when the bolt diameter is reduced and the number of bolts is reduced, the force of the component perpendicular to the axis acting on each bolt increases as a result, and the possibility of occurrence of slippage of the fastening portion and bolt shear failure increases. become.

  Accordingly, an object of the present invention is to increase the life and accuracy of an electronic component mounting apparatus.

  In order to solve such a problem, the present invention provides a beam, a movable body mounted on the beam via a drive guide movable along the longitudinal direction of the beam, and a fixing fixed to the beam. An electronic component mounting apparatus comprising: a driving stage having a linear motor having a child and a mover fixed to the moving body; and driving stage moving means for moving the driving stage in a direction perpendicular to the moving direction of the moving body. The beam has a vertical cross section in the longitudinal direction formed in an approximately L shape with two beam projections, and the stator has a first stator projection having a permanent magnet disposed in the longitudinal direction; A second stator protrusion portion in which a permanent magnet is arranged in the longitudinal direction and a stator connection portion connecting the first stator protrusion portion and the second stator protrusion portion are formed in a substantially U-shape. The beam and the fixed The second stator protrusion and one of the two beam protrusions are in contact with each other and fixed by bolt fastening, and the stator connection part and the two beam protrusions The electronic component mounting apparatus is characterized in that the other beam protrusion is in contact with and fixed by bolt fastening.

  Long life of the electronic component mounting device because it can prevent the sliding of the fastening part that fastens and fixes the linear motor stator and beam and the shear failure of the bolt, and suppress the torsional deformation of the beam due to magnetic attraction. And high accuracy can be achieved.

It is a front view of schematic structure of the electronic component mounting apparatus which concerns on this embodiment. It is a top view of schematic structure of the electronic component mounting apparatus which concerns on this embodiment. It is sectional drawing which cut | disconnected the drive stage with which the electronic component mounting apparatus which concerns on this embodiment was equipped with yz plane. It is a perspective view of a drive stage. It is a perspective view of a beam and a guide rail. It is sectional drawing of the drive stage of a 1st prior art example. It is sectional drawing of the drive stage of a 2nd prior art example. It is sectional drawing of the drive stage of a 3rd prior art example. It is sectional drawing of the drive stage of a 4th prior art example.

  Hereinafter, modes for carrying out the present invention (hereinafter referred to as “embodiments”) will be described in detail with reference to the drawings as appropriate. In each figure, common portions are denoted by the same reference numerals, and redundant description is omitted.

≪Electronic component mounting device≫
A configuration of the electronic component mounting apparatus 30 according to the present embodiment will be described.
1 and 2 are schematic configuration diagrams of an electronic component mounting apparatus 30 according to the present embodiment, FIG. 1 is a front view of the electronic component mounting apparatus 30, and FIG. 2 is an upper surface of the electronic component mounting apparatus 30. FIG.

  The electronic component mounting apparatus 30 supports the drive stage 10 while supporting a base 32 on which a substrate 31 (for example, a semiconductor wafer or an electronic circuit board) is disposed, and a drive stage 10 provided on the base 32. Driving stage moving means 33 for moving in a predetermined direction (y direction shown in FIG. 2), and a direction (shown in FIG. 2) perpendicular to the predetermined direction (y direction shown in FIG. 2) provided on the driving stage moving means 33. 1 and a drive stage 10 including a moving body 17 that moves in the x direction shown in FIG.

  The drive stage moving means 33 is slidable along a pair of y-axis guide rails 34 disposed on the base 32 so as to be parallel to each other with the substrate 31 interposed therebetween, and the y-axis guide rails 34. A y-axis slider 35, a support member 36 fixed to the y-axis slider 35 and supporting both ends of the drive stage 10, and a y-axis linear motor 37 for moving the drive stage 10. .

The driving stage 10 has a beam 16 that is long enough to bridge between the two y-axis guide rails 34, and the beam 16 along the longitudinal direction of the beam 16 (the x direction shown in FIGS. 1 and 2). Two x-axis guide rails 19 provided above, an x-axis slider 20 that can slide along the x-axis guide rail 19 (see FIG. 3 described later), and the x-axis slider 20 And the x-axis linear motor 18 for moving the moving body 17.
The moving body 17 is mounted with a mount mechanism 38 for mounting an electronic component (not shown) on the substrate 31.

An operation flow of the electronic component mounting apparatus 30 will be described.
First, the electronic component mounting apparatus 30 moves the drive stage 10 in the y-axis direction along the y-axis guide rail 34 by operating the y-axis linear motor 37. The electronic component mounting apparatus 30 moves the moving body 17 in the x-axis direction along the x-axis guide rail 19 by operating the x-axis linear motor 18.
With such a configuration, the electronic component mounting apparatus 30 can move the movable body 17 to an arbitrary position (xy plane) on the substrate 31 disposed on the base 32 and is installed on the movable body 17. The mounting mechanism 38 can mount an electronic component (not shown) at a predetermined position on the substrate 31.

≪Drive stage≫
The drive stage 10 provided in the electronic component mounting apparatus 30 according to the present embodiment will be further described with reference to FIGS.
FIG. 3 is a cross-sectional view of the drive stage 10 included in the electronic component mounting apparatus 30 according to the present embodiment taken along the yz plane. FIG. 4 is a perspective view of the drive stage 10. FIG. 5 is a perspective view of the beam 16 and the x-axis guide rail 19.
4 and 5, both ends of the drive stage 10 connected to the support member 36 of the drive stage moving means 33 are omitted, and an area in which the movable body 17 is movable in the x-axis direction is omitted. Only the drive stage 10 (beam 16) is shown.

  The driving stage 10 includes a beam 16 elongated in the x-axis direction, a moving body 17, an x-axis linear motor 18 for moving the moving body 17, and two x-axis guides provided on the beam 16. A rail 19 and an x-axis slider 20 fixed to the moving body 17 and slidable along the x-axis guide rail 19, and by operating the x-axis linear motor 18, the moving body 17 is It can be moved in the x-axis direction along the x-axis guide rail 19.

As shown in FIG. 3, the beam 16 has a substantially L-shaped cross section (yz cross section) perpendicular to the longitudinal direction (direction penetrating the paper surface of FIG. 3), and as shown in FIG. It is uniform in the (x direction) and formed in the same cross section.
Here, for each portion of the substantially L-shaped beam 16, a portion protruding upward in the vertical direction (z direction) in FIG. 3 is defined as an upper protruding portion 16 a, and a portion protruding leftward in the horizontal direction (y direction) Is defined as a lower protrusion 16b, and a region between the upper protrusion 16a and the lower protrusion 16b is defined as an opening 16d (see FIG. 5). As shown in FIG. 3, the beam 16 in the present embodiment is formed such that the length of the upper protrusion 16a protruding in the z direction is shorter than the length of the lower protrusion 16b protruding in the y direction.

  Further, as shown in FIGS. 3 and 5, the beam 16 is formed of a hollow structure having a uniform cross section having a hollow portion 16c therein. As shown in FIG. 5, the upper protrusion 16a and the lower protrusion 16b of the beam 16 are both bolts (bolts 22a and 22b shown in FIG. 3 described later) and other members (fixed shown in FIG. 3 described later). Holes 25a and 25b are formed so that the child 18b) can be fastened and fixed, and are aligned at equal intervals in the longitudinal direction of the beam 16. Here, the distance between the holes 25a and 25b in the longitudinal direction may not be equal in the longitudinal direction of the beam 16 as long as the reliability of the fastening portion is ensured.

In the present embodiment, a female screw is formed in the hole 25b of the lower protruding portion 16b, and the hole 25a of the upper protruding portion 16a is a normal through hole that does not form a female screw.
In addition, with respect to the diameters of the holes 25a and 25b, for the purpose of ensuring the reliability of the bolt fastening portion, the hole diameter of the hole 25b of the lower protruding portion 16b is larger than the hole diameter of the hole 25a of the upper protruding portion 16a. It is formed in a size of about 1.5 to 2 times, and as will be described later, the bolt 22b of the lower protrusion 16b has a larger diameter than the bolt 22a of the upper protrusion 16a.

  The beam 16 is manufactured at low cost by extruding a lightweight material such as aluminum. As shown in FIG. 3, reinforcing walls 23 and 24 for reinforcing the beam 16 are formed in the inside thereof, and the peripheral portions where the holes 25a and 25b are formed are reduced in overloading and screwed in the bolts 22a and 22b. It is formed as thick portions 16a1 and 16b1 that are thick enough to secure the depth. The reinforcing wall 24 is preferably formed to be thicker than the reinforcing wall 23. Moreover, the thickness of the thick parts 16a1 and 16b1 needs to be at least the diameter of the bolt, and is preferably about 2 to 3 times the diameter of the bolt from the viewpoint of achieving both reliability and weight reduction.

  As shown in FIG. 3, the movable body 17 has a section (yz section) perpendicular to the longitudinal direction of the beam 16 formed in a Γ shape. The movable body 17 includes a vertical plate portion 17a disposed on the end surface side of the lower protrusion 16b of the beam 16, and a horizontal plate portion provided perpendicularly to the vertical plate portion 17a and disposed on the upper surface side of the upper protrusion 16a. 17b. Although omitted in FIGS. 3 and 4, in this embodiment, the mount mechanism 38 (see FIGS. 1 and 2) is mounted on the vertical plate portion 17 a of the moving body 17.

The linear motor 18 includes a mover 18 a fixed to the moving body 17 and a stator 18 b fixed to the beam 16.
The mover 18 a is fixed to the vertical plate portion 17 a of the moving body 17 so as to be accommodated in the opening 16 d (see FIG. 5) of the beam 16.
Further, the stator 18b uses bolts 22a and 22b in the opening 16d (see FIG. 5) of the beam 16 by utilizing the holes 25a and 25b formed in the upper protruding portion 16a and the lower protruding portion 16b of the beam 16. It is fastened and fixed with.

  Here, as shown in FIG. 3, the stator 18b has a substantially U-shaped cross section perpendicular to the longitudinal direction (yz cross section), and the same two on the left side in the horizontal direction (y direction) in FIG. The upper projecting portion 18b1 and the lower projecting portion 18b2 projecting to the length, and the connecting portion 18b3 formed shorter than the two projecting portions (upper projecting portion 18b1, lower projecting portion) of the stator 18b. 18b2) is disposed so that the permanent magnets face each other in the longitudinal direction.

  In the stator 18b, the lower protruding portion 18b2 and the lower protruding portion 16b (thick portion 16b1) of the beam 16 are in contact with each other, the upper protruding portion 18b1 is not in contact with the beam 16, and the upper portion of the connecting portion 18b3 and the beam 16 is fixed. It installs on the beam 16 so that the protrusion part 16a (thick part 16a1) may contact | connect. Further, two installation surfaces are formed between the beam 16 and the stator 18b so that the normal directions of the surfaces are orthogonal to each other.

The bolts that fasten and fix the stator 18b to the beam 16 include bolts 22a that fasten and fix the connecting portion 18b3 and the upper protruding portion 16a (thick portion 16a1) of the beam 16, a lower protruding portion 18b2, and a lower protruding portion of the beam 16. Bolts 22b for fastening and fixing the portion 16b (thick wall portion 16b1), and arranged so that the axial directions thereof are orthogonal to each other.
In the present embodiment, a bolt 22b having a nominal diameter larger than the nominal diameter of the bolt 22a and having a size of about 1.5 to 2 times is used to the extent that reliability of any bolt fastening portion is ensured. ing.

Here, the bolt 22a is fastened and fixed at substantially the center of the surface where the upper projecting portion 16a (thick portion 16a1) of the beam 16 and the connecting portion 18b3 of the stator 18b contact each other through the hole 25a (see FIG. 5). It has become.
Further, the bolt 22b is fastened and fixed to the hole 25b (see FIG. 5) in which the female screw of the lower protrusion 16b (thick part 16b1) is formed through the connection part 18b3.

≪Action ・ Effect≫
The operation and effect of the electronic component mounting apparatus 30 according to the present embodiment will be described.
In FIG. 2, when the drive stage 10 is moved in the y direction by the drive stage moving means 33, the mass and acceleration of the moving part (drive stage 10, y-axis slider 35, support member 36, y-axis linear motor 37) An inertial force corresponding to the product is generated in the y direction, and this force acts on the stator 18b of the x-axis linear motor 18 shown in FIG.
Further, a force corresponding to the weight of the stator 18 b is generated in the z direction, and this force also acts on the bolt fastening portion of the stator 18 b and the beam 16.
That is, forces from both the y direction and the z direction always act on the bolt fastening portion of the stator 18b.

  In the present embodiment, even if forces in the y direction and the z direction are generated from both directions, two installation surfaces are formed between the beam 16 and the stator 18b, and the normal directions of the surfaces are orthogonal to each other, and The bolts 22a and 22b fastened and fixed to the respective installation surfaces are arranged so that the axial directions of the bolts 22b are orthogonal to each other. The force acting in the direction perpendicular to the axis of the bolt can be reduced (dispersed) rather than the structure, and as a result, sliding of the fastening portion and shear failure of the bolt can be prevented.

  Further, a cross section perpendicular to the longitudinal direction of the beam 16 (yz cross section shown in FIG. 3) is formed in a substantially L shape, and the moving body 17 is formed in a Γ shape, and is generated between the mover 18a and the stator 18b. Since the linear motor 18 capable of canceling the magnetic attraction force is disposed in the opening 16d (see FIG. 5) of the beam 16, the drive stage 10 can be reduced in size and weight, and the fastening portion The effect of preventing slip and bolt shear failure is enhanced.

Further, since the beam 16 is formed in a hollow structure and contributes to the weight reduction of the drive stage 10, an effect of reducing the force acting on the drive stage moving means 33 is also produced.
Further, since the thick portion 16a1 and the thick portion 16b1 are formed around the fastening portion for fixing the stator 18b of the beam 16 in order to secure the depth of the female screw, the excessive load of the bolt 22 is reduced. This reduces the concentration of stress generated in the thread of the bolt 22 and the female screw, and enhances the effect of preventing slippage of the fastening portion and shear failure of the bolt.

  Further, the reinforcing wall 23 and the reinforcing wall 24 inside the beam 16 not only have an effect of improving the reliability of the bolt fastening portion described above, but also when the force in the y direction acts on the beam 16. 16 such that the opening 16D opens (deforms so that the upper projecting portion 16a and the lower projecting portion 16b separate from each other) or deforms such that it closes (the upper projecting portion 16a and the lower projecting portion 16b approach each other). The stability of fixing the stator 18b is also greatly improved. Further, there is an effect of preventing the beam 16 from being bent or twisted due to an inertial force acting on the beam 16 when the driving stage 10 moves with the moving body 17 mounted on the beam 16.

  As described above, according to the electronic component mounting apparatus 30 including the drive stage 10 of the present embodiment, it is possible to prevent occurrence of slippage of the fastening portion of the beam 16 and the stator 18b of the linear motor 18 and shear failure of the bolt. The torsional deformation of the beam 16 due to the magnetic attractive force can be suppressed. In addition, when the high-performance linear motor 18 is used to improve the acceleration toward the higher speed of the drive stage 10, the mass of the linear motor 18 is increased. The problem can be solved, and the drive stage 10 can be speeded up.

<Modification>
The electronic component mounting apparatus 30 according to the present embodiment is not limited to the configuration of the above embodiment, and various modifications can be made without departing from the spirit of the invention.

In FIG. 5, the holes 25a and the holes 26b formed in the beam 16 have the same position in the x direction and are formed in the same number, but are not limited thereto.
For example, the holes 25a and 26b may be formed so that the positions in the x direction are staggered. With this configuration, interference between the through hole through which the bolt 22a formed in the connection portion 18b3 of the stator 18b passes and the female screw hole to which the bolt 22b is fixed can be prevented, and the bolt 22b is fixed. The female screw hole to be formed can be formed deeply. Thereby, the stress concentration which generate | occur | produces in the thread of the volt | bolt 22b and an internal thread can be reduced, and the prevention effect of the sliding of a fastening part and the shearing failure of a volt | bolt can be improved more.
Further, the number of holes 25a and holes 25b (the number of bolts 22a and bolts 22b) may be in a range in which the reliability of the fastening portion is ensured, and need not be the same.

3, the stator 18b opens in the y direction (left side in FIG. 3), and the mover 18a is disposed so as to protrude from the vertical plate portion 17a of the moving body 17 in the y direction (left side to right side in FIG. 3). However, the present invention is not limited to this.
For example, the stator 18b is opened in the z direction (upper side in FIG. 3), and the movable element 18a is disposed so as to protrude from the horizontal plate portion 17b of the moving body 17 in the z direction (upper side from the upper side in FIG. 3). It may be a configuration.

10 Drive stage 16 Beam 16a Upper protrusion (beam protrusion, other beam protrusion)
16a1 Thick part 16b Lower projection (beam projection, one beam projection)
16a1, 16b1 Thick portion 16c Hollow portion 16d Opening portion 17 Moving body 17a Vertical plate portion 17b Horizontal plate portion 18 Linear motor 18a Movable element 18b Stator 18b1 Upper protrusion (second stator protrusion)
18b2 Lower protrusion (first stator protrusion)
18b3 connection part (stator connection part)
19 Guide rail (drive guide)
20 Slider (drive guide)
22, 22a, 22b Bolt 23, 24 Reinforcement wall 25a, hole 25b hole (bolt hole)
30 Electronic component mounting apparatus 31 Substrate 32 Base 33 Drive stage moving means 34 Guide rail 35 Slider 36 Support member 37 Linear motor 38 Mounting mechanism

Claims (3)

A linear body having a beam, a movable body mounted on the beam via a drive guide movable along the longitudinal direction of the beam, a stator fixed to the beam, and a movable element fixed to the movable body A drive stage having a motor;
A driving stage moving means for moving the driving stage in a direction perpendicular to the moving direction of the moving body,
The beam is
The vertical cross section in the longitudinal direction is formed in a substantially L shape with two beam protrusions,
The stator is
A first stator protrusion in which a permanent magnet is disposed in the longitudinal direction; a second stator protrusion in which a permanent magnet is disposed in the longitudinal direction; the first stator protrusion and the second stator protrusion; With the stator connection part that connects the
The beam and the stator are
The second stator protrusion and one of the two beam protrusions are in contact with each other and fixed by bolt fastening,
The electronic component mounting apparatus, wherein the stator connecting portion and the other beam protruding portion of the two beam protruding portions are in contact with each other and fixed by bolt fastening. The other beam protrusion is formed shorter than the one beam protrusion,
The stator connection portion is formed shorter than the first stator protrusion and the second stator protrusion,
The electronic component mounting apparatus according to claim 1, wherein the other beam protruding portion and the stator connecting portion are fixed by bolt fastening at a substantially center of a surface. The beam is
It is uniformly stretched in the longitudinal direction and formed into a hollow structure having a hollow part inside,
The plate thickness of the beam having bolt holes for bolting the stator to the beam is formed to be thick so as to reduce the excessive load of the bolt and secure the screwing depth,
The electronic component mounting apparatus according to claim 1, wherein a reinforcing wall for reinforcing the beam is provided.

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