JP5456649B2 - Driving stage - Google Patents

Description

  The present invention relates to a drive stage used in a semiconductor manufacturing apparatus or an electronic component mounting apparatus.

  Semiconductor manufacturing apparatuses and electronic component mounting apparatuses (chip mounters) include, for example, a drive stage in which a mechanism for mounting electronic components on a printed circuit board moves in a single axial direction (X direction) on the rail, and the drive stage in the vertical direction of the rail. The electronic component is mounted on the printed circuit board (on the XY plane) by a mechanism that moves in the (Y direction). In particular, some drive stages used in chip mounters use a linear motor as an actuator for moving the mount mechanism.

  FIG. 6 is a side view showing an example of a conventional drive stage (see Patent Document 1).

  As shown in FIG. 6, in the conventional drive stage, one linear motor stator (linear motor 18) is installed on the central beam on the left vertical line portion of the cross section perpendicular to the longitudinal direction of the beam 16, and one linear motor movable element. Is installed on the movable body 17 so as to face the linear motor stator. A magnetic attraction force acts in the horizontal direction in FIG. 4 between one linear motor stator installed on the beam 16 and one linear motor movable element installed on the moving body 17.

  FIG. 7 is a perspective view of a linear guide structure including the linear guide rail 19 and the slider 20.

  As shown in FIG. 7, the linear guide structure has a plurality of metal balls 21 sandwiched between the linear guide rail 19 and the slider 20, and has a path through which the metal balls 21 circulate in the slider 20. By moving 21 within the slider 20, the movable body 17 fixed to the slider 20 can be driven along the linear guide rail 19 installed on the beam 16.

  This linear guide structure is designed to have a high strength against a load acting in a direction perpendicular to the installation surface of the linear guide rail 19, and on the other hand, the metal ball 21 is weak against a load acting in a parallel direction. Easy to wear. The linear guide rail 19 is generally installed on the beam so that the axial direction of the bolt intersects the installation surface perpendicularly. Therefore, when a load acts in a direction parallel to the installation surface of the linear guide rail 19, there is a possibility that the fastening portion slips or the bolt 22 shears.

  Wear of the metal sphere 21 in the above linear guide structure, slippage of the fastening portion and shear fracture of the bolt 22 cause the drive guide of the moving body 17 to become unstable and cause the guide accuracy of the drive stage to be greatly reduced.

  In the conventional example shown in FIG. 6, since the acting direction of the magnetic attraction force applied to the two linear guide rails 19 and the beam 16 is perpendicular to each other, the above-described failure of the linear guide structure is prevented. It is possible. However, the magnetic attractive force acting between the linear motor movable element a and the linear motor stator b deforms the beam 16 and the moving body 17. As a countermeasure, if the rigidity of the beam is increased, the mass of the beam 16 increases, and the mass of the entire apparatus increases.

  FIG. 8 is a side view showing an example of a conventional drive stage described in Patent Document 2. In FIG. In the conventional drive stage shown in FIG. 8, two linear motor stators 18b are installed on the upper and lower sides of the left side surface of the beam 16, and one linear motor movable element 18a is in the I-shaped cross section of the moving body 17. It is installed in the right center part. As a result, the magnetic attractive force acting between the linear motor movable element 18a and the two linear motor stators 18b is coaxial and opposite in direction, so that the magnetic attractive force is offset. Therefore, the deflection and torsional deformation of the beam 16 due to the magnetic attractive force is smaller than the structure of the drive stage described in Patent Document 1. However, the installation surfaces of the two linear guide rails 19 and the beam 16 are parallel to each other. When a load (load from the top in the figure) is applied in a direction parallel to the installation surface of the two linear guide rails 19, slipping of the fastening part that fastens and fixes the linear guide rail 19 to the beam 16 and shear failure of the bolt may occur. There is a possibility that the drive guide becomes unstable and the guide accuracy of the drive stage is greatly reduced.

  FIG. 9 is a side view showing an example of a conventional drive stage described in Patent Document 2. In FIG. The conventional drive stage shown in FIG. 7 is substantially the same as the configuration of the conventional drive stage shown in FIG. 8, and the magnetic attractive force acting between the linear motor movable element 18a and the two linear motor stators 18b cancels out. Has been. However, the moving body 17 having a Γ-shaped cross section is fixed to the beam 16 by only one linear guide rail 19 installed on the upper surface of the beam 16. This is because if a load (a load from the side in the figure) acts in parallel with the installation surface of the linear guide rail 19 due to the movement of the drive stage, there is a high possibility that a slip of the fastening portion or a shear failure of the bolt will occur. Is unstable, and the guidance accuracy is greatly reduced.

  Therefore, in order to prevent the failure of the drive stage, studies have been made on reinforcement of the linear guide rail 19 and change of constituent materials, such as enlargement of the linear guide rail 19.

JP 2008-070732 A JP 2004-140888 A

  However, there is a limit to the suppression of failure due to reinforcement of the linear guide rail and material change, and if the load in the parallel direction increases on the installation surface of the linear guide rail and the beam due to the increase in mass of the moving body and increase in magnetic attraction force, It becomes difficult to prevent breakdown. In addition, if the size of the linear guide rail is increased in order to mount electronic components on a large-area wafer, it is necessary to increase the size of the beam by securing the installation surface, which increases the overall weight of the equipment. Resulting in.

  An object of the present invention is to solve the above-mentioned problems by preventing the occurrence of sliding of a fastening portion and shearing of a bolt, suppressing torsional deformation of a beam due to magnetic attraction, and extending the life and accuracy of the drive stage. It is an object of the present invention to provide a driving stage that can be used and a chip mounter using the driving stage.

  In order to achieve the above object, a driving stage according to the present invention includes a beam, a plurality of linear guide rails provided on the beam along the longitudinal direction of the beam, and a slider slidable along the linear guide rail. And a driving stage that is fixed to the slider and moves along the linear guide rail via the slider, and a beam of at least one linear guide rail among the plurality of linear guide rails. The installation surface is perpendicular to the installation surface of the beam of another linear guide rail.

  According to the present invention, it is possible to prevent slippage of the fastening portion of the beam and the linear guide rail and shear failure of the bolt in the drive stage, and to suppress torsional deformation of the beam due to magnetic attraction force. It is possible to increase the life and accuracy of the.

  Furthermore, a lighter driving stage than the conventional one can be realized in which the upper protruding portion of the beam is formed shorter than the lower protruding portion.

  In addition, according to the present invention, the weight of the linear motor increases as the performance of the linear motor for increasing the drive acceleration of the drive stage increases, and the load in the parallel direction increases on the installation surface of the linear guide rail and the beam. However, since the drive stage can be prevented from being broken, the drive stage can be speeded up.

It is sectional drawing which shows the drive stage of one Embodiment which concerns on this invention. It is a perspective view of the drive stage of FIG. It is a side view of the drive stage of FIG. It is a top view which shows the chip mounter using a drive stage. It is a side view of the chip mounter of FIG. It is a side view which shows an example of the conventional drive stage. It is a partially cutaway perspective view showing another example of a conventional drive stage. It is sectional drawing which shows the other example of the conventional drive stage. It is sectional drawing which shows the other example of the conventional drive stage.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Preferred embodiments of the invention will be described below with reference to the accompanying drawings.

  The present invention relates to a drive stage. First, the configuration of a chip mounter will be described.

  4 and 5 are schematic configuration diagrams showing the configuration of the chip mounter, FIG. 4 is a side view thereof, and FIG. 5 is a plan view thereof. As shown in FIGS. 4 and 5, the chip mounter 30 moves in one direction (referred to as the Y-axis direction) while supporting the drive stage 10 provided on the base 32 and the base 32 on which the substrate 31 is disposed. Drive stage moving means 33 to be driven, and drive stage 10 provided on the drive stage moving means 33.

  The drive stage moving means 33 slides along a pair of linear guide rails (Y-axis linear guide rails) 34 arranged parallel to each other on the base 32 with the substrate 31 interposed therebetween, and the linear guide rails 34. And a stage support slider 35 that supports the drive stage 10 at both ends thereof, and a linear motor (Y-axis linear motor) 36 for driving the stage support slider 35.

The driving stage 10 has a beam 16 that is long enough to bridge between the two Y-axis linear guide rails 34, and two that are provided on the beam 16 along the beam longitudinal direction (X-axis direction). Linear guide rail (X-axis linear guide rail) 19, a slider slidable along the linear guide rail 19, and a moving body 17 fixed to the slider.
A chip mounting mechanism 37 for mounting electronic components on the substrate 31 is attached to the moving body 17.

  The chip mounter 30 moves the drive stage 10 on the Y-axis linear guide rail 34 in the Y direction by driving the Y-axis linear motor 36 of the drive stage moving means 32, and also the X-axis linear motor 19 of the drive stage 10. The moving body 17 can be moved in the direction (X direction) perpendicular to the driving stage moving direction by the above driving. Thereby, the movable body 17 can be aligned with any position on the substrate (semiconductor wafer, electronic circuit board, etc.) 31 placed on the base 32, and the chip mounting attached to the movable body 17 is possible. With the mechanism 37, an electronic component can be mounted at a desired position on the substrate 31.

  Details of the drive stage 10 of the present embodiment will be described with reference to FIGS. FIG. 1 is a cross-sectional view showing a drive stage of the present embodiment, FIG. 2 is a perspective view, and FIG. 3 is a side view.

  As shown in FIGS. 1 to 3, the beam 16 is formed in a U shape in a cross section (cross section perpendicular to the longitudinal direction) of the beam 16, and the shape thereof is uniform in the longitudinal direction of the beam. Here, for the beam 16 having a U-shaped cross section, the upper protruding portion is the upper protruding portion 16a, the lower protruding portion is the lower protruding portion 16b, and the upper protruding portion 16a and the lower protruding portion 16b. Is defined as an opening. The beam 16 is basically formed in a U-shaped cross section, but in this embodiment, the upper protruding portion 16a is formed shorter than the lower protruding portion 16b.

  The beam 16 is formed in a hollow structure having a hollow portion 16c having a uniform cross section in the longitudinal direction, and a reinforcing wall 23 for reinforcing the beam is provided inside the beam. The beam 16 is made of a lightweight metal such as an aluminum material, and the beam 16 can be manufactured at low cost by extrusion molding.

  Of the two linear guide rails 19, one linear guide rail 19b is disposed along the beam longitudinal direction on the end surface 16d of the lower protruding portion 16b, and the other linear guide rail 19a is the upper surface 16e on the upper protruding portion 16a side. Are arranged along the longitudinal direction of the beam. That is, the drive stage 10 of the present embodiment is configured such that one linear guide rail 19a and the installation surface of the beam 16 are perpendicular to the other linear guide rail 19b and the installation surface of the beam 16.

  The linear guide rail 19 is fixed to the beam 16 by fastening means (bolts 22 and female screws). In the vicinity of the portion where the linear guide rail 19 of the beam 16 is fixed, the wall (frame) of the beam 16 is formed thick enough to secure the depth of the fastening means (female screw). The thickness of the thick wall portion 24 is required to be at least the diameter of the bolt 22 and is preferably 2 to 3 times the diameter of the bolt from the viewpoint of durability against load and weight reduction.

  The two linear guide rails 19 are provided with sliders 20 that are fixed to one moving body 17 and slide along the linear guide rails 19.

  The movable body 17 has a vertical cross section in the beam longitudinal direction uniformly formed in a Γ shape. Specifically, from the vertical plate portion 17a disposed on the end surface side of the projecting portion of the beam 19 and the horizontal plate portion 17b provided perpendicularly to the vertical plate portion 17a and disposed on the upper surface 16e side of the upper projecting portion 16a. It is formed in a Γ shape. A chip mounting mechanism is attached to the vertical plate portion 17 a and / or the horizontal plate portion 17 b of the moving body 17.

  The linear motor 18 includes a linear motor movable element 18a and a plurality of linear motor stators 18b. The linear motor movable element 18 a is fixed to the moving body 17, and the plurality of linear motor stators 18 b are fixed to the beam 16. Specifically, the linear motor movable element 18 a is fixed to substantially the center of the vertical plate portion 17 a of the moving body 17 and is disposed at the opening of the beam 16. The plurality of linear motor stators 18b are fixed to the lower surface (opening side) of the upper projecting portion 16a of the beam 16 in alignment with the longitudinal direction of the beam, and the upper surface (opening side) of the lower projecting portion 16b of the beam 16 ) Aligned and fixed in the longitudinal direction of the beam. The linear motor movable element 18a has coils on both upper and lower surfaces, and both coils act on the linear motor stator 18b on the upper protruding part 16a side and the linear motor stator 18b on the lower protruding part 16b side, respectively.

  The operation of this embodiment will be described. Since a device such as a chip mounting mechanism is attached to the moving body 17, a load in the downward direction (Z direction) acts on the installation surface of the beam 16 and the linear guide rail 19 due to the weight of the device and the like. The drive stage 10 is mounted on the chip mounter 30 and moves in a direction (Y direction) on the installation surface of the beam 16 and the linear guide rail 19 by moving in the direction perpendicular to the drive stage longitudinal direction (Y direction). The load of acts.

  According to the drive stage 10 of the present embodiment, the installation surface of one linear guide rail 19a and the beam 16 is configured to be perpendicular to the installation surface of the other linear guide rail 19b and the beam 16. When a load in the Y direction and the Z direction is applied to the installation surface of the linear guide rail 19 and the beam 16, a load is applied vertically to one installation surface, and a load is applied in parallel to the other installation surface. Therefore, it is possible to reduce (disperse) the load applied in parallel to the installation surfaces of the respective linear guide rails 19 and the beam 16, and to prevent the sliding of the fastening portion and the shear failure of the bolt.

  In particular, the beam 16 is formed in a U-shape in the longitudinal cross section, the moving body 17 is formed in a Γ-shape, one of the linear guide rails 19 is disposed on the upper surface 16e of the beam 16, and the other is a lower protrusion. 19b is arranged on the end surface 19d, and the linear motor 18 is arranged in the opening of the beam, so that the effect of preventing slippage of the fastening portion and shear failure of the bolt is maintained while maintaining a compact stage (light weight) of the stage. Can be increased.

  Further, the linear motor movable element 18a is installed on the vertical plate portion 17a of the Γ-shaped movable body 17, and the linear motor movable element 18b is disposed so as to face the linear motor movable element 18a, thereby moving the linear motor. Direction of action of magnetic attraction force generated between the child 18a and the upper linear motor stator 18b, and direction of action of magnetic attraction force generated between the linear motor movable element 18a and the lower linear motor stator 18b Are coaxial with each other and in opposite directions so that the magnetic attractive forces can be offset. Therefore, the load applied to the linear guide rail 19 due to the magnetic attractive force can be reduced, and the linear guide structure can be prevented from being broken.

  Further, the drive stage is lightened by forming the inside of the beam 16 hollow. Thereby, when the drive stage 10 is mounted on the chip mounter 30, the load on the stage moving means 33 of the chip mounter 10 can be reduced.

  As the beam 16 is hollowed, the periphery of the fastening portion that fixes the linear guide rail 19 to the beam 16 is formed thick to ensure the depth of the female screw. The concentration of generated stress can be reduced, and slippage of the fastening portion and shear failure of the bolt 22 can be prevented.

  When the magnetic attraction force by the linear motor 18 is applied to the beam 16, the magnetic attraction force causes torsional deformation so that the opening of the beam 16 opens or closes (the upper protrusion 16a and the lower protrusion 16b bend). To do. In this drive stage 10, by providing a reinforcing wall 23 inside the hollowed beam, the opening of the beam 16 is applied when a magnetic attractive force generated between the mover 18a and the stator 18b of the linear motor is applied. It is possible to suppress the torsional deformation of the beam 16 which is deformed so that is opened or closed.

  Further, since the beam 16 has a hollow structure, the wall (frame) constituting the beam 16 is thinned, but in the vicinity of the fastening portion (the bolt 22 and the female screw portion) of the beam 16 where the linear guide rail 19 is installed, By forming the wall (frame) to be thick, it is possible to secure the depth of the fastening portion and prevent the fastening portion from slipping and the bolt from shearing.

  By providing the reinforcing wall 23 and the thick portion 24 on the beam 16, the stability of fixing the linear guide rail 19 and the linear motor stator 18b is remarkably enhanced. In addition to improving the stability of the fixed portions of the linear guide rail 19 and the linear motor stator 18b, there is an effect of preventing the beam 16 from being bent or twisted when the moving body 17 is mounted on the beam 16 and driven.

  As described above, according to the drive stage of the present embodiment, it is possible to prevent the fastening portion between the beam 16 and the linear guide rail 19 from slipping and the shear failure of the bolt, and to suppress the torsional deformation of the beam 16 due to the magnetic attractive force. Can do. As a result, the life and accuracy of the drive stage 10 can be increased. Further, if a high-performance linear motor is used to increase the driving acceleration of the driving stage 10, the weight of the linear motor increases. However, even if the load in the parallel direction increases on the installation surface of the linear guide rail 19 and the beam 16 Since the drive stage failure can be prevented, the drive stage 10 can be speeded up.

  As described above, the present invention is not limited to the above-described embodiments, and various other ones are assumed.

  Three or more linear guide rails 19 may be provided, and at least one of the linear guide rails 19 is disposed on the projecting portion end surface 19d in the beam longitudinal direction vertical section, and at least one of the linear guide rails 19 is the upper projecting portion in the beam longitudinal direction vertical section. It only has to be arranged on the upper surface 19e on the side or the lower surface on the lower protruding portion side. In this embodiment, the linear guide rail 19b is installed on the end surface 16d of the lower projecting portion 16b. However, the linear guide rail 19b may be installed on the end surface of the upper projecting portion 16a.

  The drive stage 10 uses the linear motor 18 as an actuator for moving the moving body 17, but may alternatively use a ball screw mechanism. Further, a mechanism for moving the moving body 17 by a piston mechanism, for example, a hydraulic piston mechanism may be used.

DESCRIPTION OF SYMBOLS 10 Drive stage 16 Beam 17 Moving body 18 Linear motor 18a Linear motor movable element 18b Linear motor stator 19 Linear motor guide rail 20 Slider 22 Bolt 23 Reinforcement wall 24 Thick part

Claims (18)

A driving stage,
With the beam,
A plurality of linear guide rails provided on the beam along the longitudinal direction of the beam;
A slider slidable along the linear guide rail;
A moving body fixed to the slider and moving along the linear guide rail through the slider;
Of the plurality of linear guide rails, an installation surface of at least one linear guide rail with the beam and an installation surface of the other linear guide rail with the beam are perpendicular to each other.
The beam is formed in a U-shaped vertical cross section in the longitudinal direction,
The at least one linear guide rail is disposed on an end surface of the projecting portion in the longitudinal vertical section of the beam;
The other linear guide rail is disposed on the upper surface of the upper protrusion or the lower surface of the lower protrusion in the longitudinal cross section of the beam.
The drive stage characterized in that the upper protrusion of the beam is formed shorter than the lower protrusion. The drive stage according to claim 1,
The drive stage is a drive stage for a chip mounter. The drive stage according to claim 1,
The moving body is formed in a Γ shape including a vertical plate portion arranged on the end surface side of the protruding portion of the beam and a horizontal plate portion arranged on the upper protruding portion side,
As means for driving the moving body, a linear motor comprising a plurality of linear motor stators fixed to the beam in alignment with the longitudinal direction of the beam and a linear motor movable element fixed to the moving body is provided. A drive stage characterized by The drive stage according to claim 1,
One linear guide rail is disposed on the end surface of the lower projecting portion of the beam, and one linear guide rail is disposed on the upper surface of the beam on the upper projecting portion side. The drive stage according to claim 1,
The drive stage, wherein the beam is formed in a hollow structure having a hollow portion therein, and a reinforcing wall for beam reinforcement is provided inside the beam. The drive stage according to claim 5,
The portion of the beam where the linear guide rail is fixed is formed to be thick enough to secure a depth of a fastening fixing screw for fixing the linear guide rail to the beam. Driving stage. A driving stage,
With the beam,
A plurality of linear guide rails provided on the beam along the longitudinal direction of the beam;
A slider slidable along the linear guide rail;
A moving body fixed to the slider and moving along the linear guide rail via the slider,
Of the plurality of linear guide rails, the installation surface of at least one linear guide rail with the beam and the installation surface of the other linear guide rail with the beam are substantially perpendicular,
The beam is formed in a U-shaped vertical cross section in the longitudinal direction,
The at least one linear guide rail is disposed on an end surface of the projecting portion in the longitudinal vertical section of the beam;
The other linear guide rail is disposed on the upper surface of the upper protrusion or the lower surface of the lower protrusion in the longitudinal cross section of the beam.
The drive stage characterized in that the upper protrusion of the beam is formed shorter than the lower protrusion. The drive stage according to claim 7,
The drive stage is a drive stage for a chip mounter. The drive stage according to claim 7,
The moving body is formed in a Γ shape including a vertical plate portion arranged on the end surface side of the protruding portion of the beam and a horizontal plate portion arranged on the upper protruding portion side,
As means for driving the moving body, a linear motor comprising a plurality of linear motor stators fixed to the beam in alignment with the longitudinal direction of the beam and a linear motor movable element fixed to the moving body is provided. A drive stage characterized by The drive stage according to claim 7,
One linear guide rail is disposed on the end surface of the lower projecting portion of the beam, and one linear guide rail is disposed on the upper surface of the beam on the upper projecting portion side. The drive stage according to claim 7,
The drive stage, wherein the beam is formed in a hollow structure having a hollow portion therein, and a reinforcing wall for beam reinforcement is provided inside the beam. The drive stage according to claim 11,
The portion of the beam where the linear guide rail is fixed is formed to be thick enough to secure a depth of a fastening fixing screw for fixing the linear guide rail to the beam. Driving stage. A component mounting apparatus having a drive stage,
The drive stage is
With the beam,
A plurality of linear guide rails provided on the beam along the longitudinal direction of the beam;
A slider slidable along the linear guide rail;
A moving body fixed to the slider and moving along the linear guide rail via the slider,
Of the plurality of linear guide rails, the installation surface of at least one linear guide rail with the beam and the installation surface of the other linear guide rail with the beam are substantially perpendicular,
The beam is formed in a U-shaped vertical cross section in the longitudinal direction,
The at least one linear guide rail is disposed on an end surface of the projecting portion in the longitudinal vertical section of the beam;
The other linear guide rail is disposed on the upper surface of the upper protrusion or the lower surface of the lower protrusion in the longitudinal cross section of the beam.
The component mounting apparatus according to claim 1, wherein the upper protruding portion of the beam is formed shorter than the lower protruding portion. The component mounting apparatus according to claim 13 ,
The component mounting apparatus, wherein the driving stage is a driving stage for a chip mounter. The component mounting apparatus according to claim 13 ,
The moving body is formed in a Γ shape including a vertical plate portion arranged on the end surface side of the protruding portion of the beam and a horizontal plate portion arranged on the upper protruding portion side,
As means for driving the moving body, a linear motor comprising a plurality of linear motor stators fixed to the beam in alignment with the longitudinal direction of the beam and a linear motor movable element fixed to the moving body is provided. A component mounting apparatus characterized by The component mounting apparatus according to claim 13 ,
One linear guide rail is disposed on the end surface of the lower projecting portion of the beam, and one linear guide rail is disposed on the upper surface of the beam on the upper projecting portion side. The component mounting apparatus according to claim 13 ,
The component mounting apparatus, wherein the beam is formed in a hollow structure having a hollow portion therein, and a reinforcing wall for beam reinforcement is provided inside the beam. The component mounting equipment according to claim 17 ,
The portion of the beam where the linear guide rail is fixed is formed to be thick enough to secure a depth of a fastening fixing screw for fixing the linear guide rail to the beam. Component mounting equipment.

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