CN113113337A - Automatic school boat machine - Google Patents

Automatic school boat machine Download PDF

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Publication number
CN113113337A
CN113113337A CN202110219321.0A CN202110219321A CN113113337A CN 113113337 A CN113113337 A CN 113113337A CN 202110219321 A CN202110219321 A CN 202110219321A CN 113113337 A CN113113337 A CN 113113337A
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CN
China
Prior art keywords
boat
swing
clamping plate
graphite boat
swing platform
Prior art date
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Pending
Application number
CN202110219321.0A
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Chinese (zh)
Inventor
王森林
殷文杰
岳胜斌
许凤新
刘月良
金俊强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Aiko Solar Energy Technology Co Ltd
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Zhejiang Aiko Solar Energy Technology Co Ltd
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Publication date
Application filed by Zhejiang Aiko Solar Energy Technology Co Ltd filed Critical Zhejiang Aiko Solar Energy Technology Co Ltd
Priority to CN202110219321.0A priority Critical patent/CN113113337A/en
Publication of CN113113337A publication Critical patent/CN113113337A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers

Abstract

The invention relates to an automatic boat calibrating machine. It comprises the following components: the correcting device comprises a correcting mechanism and a shaking mechanism which are arranged on the base; the clamping plate mechanism is used for clamping and fixing the graphite boat; the bolt tightening and loosening mechanism is used for loosening or tightening bolts on the graphite boat; the bolt tightening mechanism needs the clamping plate mechanism to be matched with and clamp the graphite boat tightly when tightening or loosening the bolt on the graphite boat, and the shaking mechanism needs the bolt tightening mechanism to loosen or tighten the bolt respectively before and after shaking the graphite boat. The invention separates the adhered boat sheets by shaking, so that all the boat sheets are separated from each other, internal stress is eliminated, then each boat sheet is tidied again by the clamping plate mechanism, and finally all the bolts are screwed again by the bolt tightening and loosening mechanism, thereby completing the boat calibration process. The invention has the function of fully-automatic bolt loosening, realizes the effect of canceling internal stress by shaking and separating adhered boat sheets, realizes fully-automatic boat calibration, and is suitable for the boat calibration process of new and old graphite boats.

Description

Automatic school boat machine
Technical Field
The invention relates to a graphite boat calibrating device, in particular to an automatic boat calibrating machine.
Background
The graphite boat is a carrier for bearing a photovoltaic cell, and is structurally formed by fixing a plurality of graphite boat pieces into a whole through bolts. In actual production, the graphite boat needs to operate in various environments, the internal stress generated by different graphite boat sheets is different, and the internal stress can cause the graphite boat sheets to deform in different amplitudes. A traditional Chinese patent (patent number: 201710164102.0) named as a graphite boat installation and calibration device comprises a platform for placing a graphite boat and two calibration components, wherein a plurality of clamping grooves for limiting the position of a graphite boat sheet are arranged on the platform in parallel, the two calibration components are respectively arranged above the left side and the right side of the graphite boat sheet, each calibration component comprises a first limiting plate and a second limiting plate, the first limiting plate and the second limiting plate are horizontally arranged, the second limiting plate is vertically arranged, a plurality of limiting blocks are axially arranged on the inner side of a right angle formed by the first limiting plate and the second limiting plate, two adjacent limiting blocks, the first limiting plate and the second limiting plate are arranged in an enclosing mode to form limiting grooves, chamfers are arranged on one sides, close to the limiting grooves, the limiting grooves are coaxial with the clamping grooves, and the positions. The invention adopts the driving device to control the two right angles of the calibration assembly close to the top of the graphite boat piece, quickly limits the front, back, left, right, upper and lower positions of each boat piece, fixes the positions of the boat pieces, realizes automation, and is convenient and quick and has high precision.
The invention can be used to calibrate newly assembled graphite boats, but the calibration effect on old graphite boats is not reliable. The two calibration components are mutually extruded, so that the boat sheets are arranged in order, after the bolts of the old graphite boat are loosened, the boat sheets are adhered, the adhered boat sheets are relatively ordered, the adhesion condition of the boat sheets cannot be changed by using the invention, and the boat sheets can be deformed because the internal stress is not removed even if the two ends of each boat sheet are ordered. Meanwhile, the invention does not have the function of automatically loosening and tightening the bolt.
Disclosure of Invention
The invention provides an automatic boat calibrating machine; solves the problem that the internal stress of the graphite boat piece can not be eliminated in the prior art.
The technical problem of the invention is mainly solved by the following technical scheme: an automatic boat calibration machine comprising: a base;
the graphite boat is characterized by comprising a correction device and a shaking mechanism, wherein the correction device comprises a correction mechanism and a shaking mechanism which are arranged on a base, the shaking mechanism is used for bearing and shaking the graphite boat, and the shaking mode of the shaking mechanism can be vibration generated by the rotation of an eccentric wheel structure or shaking driven by a reciprocating mechanism such as a cylinder, a piston and the like; the correction mechanism is used for correcting the position of the graphite boat;
the bolt tightening and loosening device is arranged on the base and used for loosening or tightening bolts on the graphite boat;
when the bolt tightening and loosening device loosens the bolt, the shaking mechanism shakes the graphite boat; after the shaking mechanism shakes, the bolt tightening and loosening device screws the bolt, and the correction mechanism starts to correct the graphite boat.
The operation process of the invention is as follows: the graphite boat to be corrected is placed on a shaking mechanism, the graphite boat can be conveyed through a mechanical arm specifically, then the graphite boat is clamped and fixed by a clamping plate mechanism, each bolt on the graphite boat is loosened by a bolt tightening mechanism in sequence, then the graphite boat starts to be shaken by the shaking mechanism, boat sheets adhered by shaking separation are enabled to be separated from each other, internal stress is eliminated, all bolts are screwed by the bolt tightening mechanism again, and the correcting mechanism can be used for correcting the relative position of the graphite boat on the shaking mechanism. According to the technical scheme, the shaking mechanism and the bolt tightening and loosening device are additionally arranged on the boat correcting machine and matched with each other to unload the stress in the boat sheet, so that the problem of the card is solved, and the fragment rate of the inserting sheet is reduced. The shaking mechanism separates the adhered boat sheets by shaking to achieve the effect of canceling the internal stress.
Further, the shaking mechanism comprises: the first swing platform can swing back and forth relative to the base;
the second swing platform is arranged on the first swing platform, can synchronously swing back and forth along with the first swing platform, can independently swing back and forth relative to the first swing platform, and can bear the graphite boat;
the first power mechanism is used for driving the first swing platform to swing in a reciprocating manner;
and the second power mechanism is used for driving the second swing platform to swing in a reciprocating manner.
The first power mechanism and the second power mechanism can be linear motors, air cylinders and other existing devices. The second swing platform on the shaking mechanism is used for bearing the graphite boat, the first swing platform and the second swing platform have independent reciprocating swing capacity, and the placing directions are mutually perpendicular, so that the shaking effect is better, and the boat sheets are separated more thoroughly. Compared with a vibrating table, the mode of mechanical shaking is adopted, the shaking amplitude is large, and the shaking effect is better.
Further, the correction mechanism comprises: the first clamping plate is fixed relative to the first swing platform and is positioned at the left end of the graphite boat;
the second clamping plate slides left and right relative to the first swing platform and is positioned at the right end of the graphite boat;
the graphite boat is characterized in that the second swing platform and the first swing platform are in sliding fit, the second clamping plate can drive the second swing platform to swing left and right when sliding left and right, the second clamping plate can slide to one side of the first clamping plate, the first clamping plate and the second clamping plate can be abutted to two ends of the graphite boat at the same time, and a first power mechanism used for driving the second clamping plate to reciprocate is arranged on the first swing platform.
The graphite boat still needs the process of an elasticity nut before and after rocking, can play fixed graphite boat through pressing from both sides tight graphite boat on first splint and the second splint, and the elasticity operation of the nut of being convenient for can play the effect of neat graphite boat piece with the part that the graphite boat supports to close on first splint and the second splint simultaneously. Through first power unit drive second splint reciprocating motion, and the second splint can drive second swing platform horizontal hunting, therefore the second swing platform is driven setting, is favorable to reducing power unit, reduce cost, improves holistic reliability simultaneously.
Furthermore, a first limit part and a second limit part are arranged on the second swing platform, a second clamping plate can circularly impact the first limit part and the second limit part when swinging in a left-right reciprocating manner, the second swing platform is driven to swing in a reciprocating manner by impact, the movable amplitude of the second clamping plate between the first limit part and the second limit part is 20-50 mm, and the second clamping plate and the swing platform can also generate relative motion due to the existence of the gap; the second limiting part is farther away from the first clamping plate relative to the first limiting part, and a tension spring is connected between one side, close to the second limiting part, of the second swing platform and the second clamping plate. When the second clamping plate impacts the first limiting part, the second clamping plate is abutted to the end part of the graphite boat, and meanwhile, the second clamping plate can continue to push the swing platform to move towards one side of the first clamping plate until the other end of the graphite boat is abutted to the first clamping plate; when the second clamping plate moves away from one side of the first limiting part, the second swing platform is not stressed to keep fixed, the second clamping plate is far away from the end part of the graphite boat until the second clamping plate impacts the second limiting part, and the graphite boat on the second swing platform is driven to leave the first clamping plate. The design makes the graphite boat break away from with two splint intermittently at the swing in-process, does not have the restraint of two splint, and loose graphite boat piece's effect is better. The effect of extension spring lies in pulling the second splint and is close to towards the spacing portion of second, and like this when loading graphite boat, guarantee that second splint and graphite boat have sufficient clearance, reduce the loading process and take place the entity and collide.
Furthermore, be equipped with on the base can with the front side of graphite boat support the third splint that close and can with the rear side of graphite boat support the fourth splint that close, third splint fixed with the base, but the relative base of fourth splint reciprocating motion all around, be equipped with the spacing portion of third on the first swing platform, fourth splint outside lateral movement can strike the spacing portion of third, drive first swing platform motion simultaneously, be connected with reset spring between first swing platform and the base, can restore to the throne first swing platform to third splint one side pulling, be equipped with the second power unit that is used for driving fourth splint reciprocating motion on the base. The third splint and the fourth splint can be used for clamping the front side and the rear side of the fixed graphite boat by reducing the gap between the third splint and the fourth splint, and the positioning of the graphite boat in four directions can be completed when the nut is tightened on the graphite boat by matching the first splint and the second splint. The first swing platform can be driven to rock when the fourth splint move back and forth, so that the fourth splint are arranged actively, and the second swing platform is arranged in a driven manner, thereby being beneficial to reducing a power mechanism, reducing the cost and improving the overall reliability.
Further, the bolt tightening mechanism includes: the first tightening assembly is used for being matched with the nut, and the second tightening assembly is used for being matched with the head of the bolt; moving mechanisms are connected between the first elastic component and the base, the moving mechanisms are in a three-axis linkage type, and the moving mechanisms can drive the first elastic component or the second elastic component to move to each bolt point position of the graphite boat.
The graphite boat is under the centre gripping of four splint is fixed, and moving mechanism drives the bolt loose-tight subassembly according to preset operation route and removes to treating pivoted bolt both ends, and wherein first loose-tight subassembly removes to nut one side on corresponding the bolt, and the second loose-tight subassembly removes to head one side of this bolt, and first loose-tight subassembly and second loose-tight subassembly are supported with the both ends of bolt simultaneously and are closed the cooperation back, begin the rotation and loosen or tighten the bolt, so on and so on, moving mechanism drives the bolt loose-tight subassembly and loosens or tighten all bolts on the graphite boat in proper order.
Further, the first tightening assembly comprises: the positioning seat is fixedly connected with the moving mechanism; the motor is fixed on the power mechanism on the positioning seat; the first elastic rod can be driven by a motor to rotate, and the head of the outer end of the first elastic rod can be matched with the shape of the nut; the telescopic mechanism is used for synchronously connecting the output shaft of the motor and the first elastic rod and has telescopic capacity. After the motor drives the first tightening rod to rotate, the rotating nut can generate feeding or retracting amount, the telescopic mechanism can make up through self-stretching, and the outer end of the first tightening assembly is guaranteed to be normally matched with the nut all the time.
Furthermore, the second tightening assembly comprises a second tightening rod, the outer end of the second tightening rod can be matched with the appearance of the head of the bolt, and the axial direction of the second tightening rod is parallel to that of the first tightening rod.
Furthermore, laser sensors are respectively fixed on the first elastic component and the second elastic component, and the two laser sensors are arranged right opposite to the side wall of the graphite boat. The laser sensor can be used for detecting the width of the graphite boat after the correction process is finished and judging whether the width of the graphite boat meets the standard or not.
Therefore, compared with the prior art, the invention has the following characteristics: 1. after the bolts of the graphite boat are loosened, the graphite boat shakes and separates the adhered boat pieces through the shaking mechanism to achieve the effect of canceling the internal stress, and then the graphite boat is corrected again by matching with the clamping plate mechanism, so that the internal stress on the graphite boat can be better removed, and the method is suitable for the boat correcting process of new and old graphite boats; 2. the bolt tightening mechanism can fully automatically tighten the bolts on the graphite boat, so that the automation level is improved; 3. and the first elastic component and the second elastic component are respectively fixed with a laser sensor which can be used for detecting the width of the graphite boat after the correction process is finished and judging whether the width of the graphite boat meets the standard or not.
Drawings
FIG. 1 is a schematic diagram of a structure of a self-contained motion module of a first swing platform;
FIG. 2 is a front view of FIG. 1;
FIG. 3 is an enlarged view of portion A of FIG. 2;
FIG. 4 is an exploded view of the first swing platform;
FIG. 5 is a schematic view showing the assembled relationship of the second clamping plate and the second slider;
FIG. 6 is a top view of the rocking mechanism;
FIG. 7 is a schematic diagram of a rocking mechanism;
FIG. 8 is a schematic view of the structure of embodiment 1;
FIG. 9 is an enlarged view of portion B of FIG. 8;
FIG. 10 is a view of the travel mechanism and the first takeup member in assembled relationship;
FIG. 11 is a schematic view of the first take-up assembly;
fig. 12 is a detection schematic diagram of a laser sensor.
Detailed Description
The technical scheme of the invention is further specifically described by the following embodiments and the accompanying drawings.
Example 1: referring to fig. 8, an automatic boat calibration machine comprises:
a base 201;
the calibration device 10 comprises a calibration mechanism 11 and a shaking mechanism 12 which are arranged on the base 201, wherein the shaking mechanism 12 is used for bearing and shaking the graphite boat, and the shaking mode of the shaking mechanism 12 can be vibration generated by the rotation of an eccentric wheel structure or shaking driven by a reciprocating mechanism such as a cylinder, a piston and the like; the correcting mechanism 11 is used for correcting the position of the graphite boat;
the bolt tightening and loosening device 30 is arranged on the base 201, and the bolt tightening and loosening device 30 is used for loosening or tightening bolts on the graphite boat;
when the bolt tightening and loosening device 30 loosens the bolts on the graphite boat, the shaking mechanism 12 shakes the graphite boat; after the shaking mechanism 12 finishes shaking, the correcting mechanism 11 is used for correcting the flatness of the graphite boat; after the correcting mechanism 11 finishes correcting, the bolt tightening and loosening device 30 tightens the bolt.
Referring to fig. 1, 4 and 6, the shaking mechanism 12 includes: the first swing platform 101 can swing back and forth relative to the base 201;
the second swing platform 1011 is arranged on the first swing platform 101, can synchronously swing back and forth along with the first swing platform 101, can independently swing left and right in a reciprocating manner relative to the first swing platform 101, and can bear a graphite boat;
the first swing platform 101 and the second swing platform 1011 can be driven to move by a power mechanism such as an air cylinder and a linear motor.
Referring to fig. 4 and 6, the correction mechanism 11 includes: a first clamping plate 107 fixed relative to the first swing platform 101 and located at the left end of the graphite boat;
the second clamping plate 109 slides left and right relative to the first swing platform 101 and is positioned at the right end of the graphite boat;
the second swing platform 1011 and the first swing platform 101 are in sliding fit, the second clamp plate 109 can drive the second swing platform 1011 to swing left and right when sliding left and right, and the second clamp plate 109 can slide towards one side of the first clamp plate 107, so that the first clamp plate 107 and the second clamp plate 109 can be abutted to two ends of the graphite boat at the same time.
Referring to fig. 4, the second swing platform 1011 includes: the graphite boat comprises a first sliding block 104, a second sliding block 105 and a supporting beam 106 for supporting the graphite boat, wherein two ends of the supporting beam 106 are fixedly connected with the first sliding block 104 and the second sliding block 105, the supporting beam 106 is distributed in the left-right direction in the axial direction, and the first sliding block 104, the second sliding block 105 and the first swing platform 101 are in sliding fit.
Referring to fig. 1 and 2, two first slide rails 102 and two second slide rails 103 which are parallel to each other are laid on a first swing platform 101, the first slide rails 102 and the second slide rails 103 are both distributed from left to right, and a first slider 104 and a second slider 105 are distributed and slidably matched on the first slide rails 102 and the second slide rails 103;
referring to fig. 4 and 5, the first clamping plate 107 is fixed on the moving path of the first sliding block 104, third sliding rails 108 distributed left and right are arranged on two sides of the second sliding block 105, the third sliding rails 108 are in sliding fit with the second clamping plate 109, and meanwhile, a first power mechanism 110 capable of pushing the second clamping plate 109 to swing left and right is arranged on the first swing platform 101;
referring to fig. 3, the second slider 105 is provided with a first limiting portion 111 and a second limiting portion 112 which can be abutted with the second clamp plate 109 in a front-back direction, the second clamp plate 109 moves towards one side of the first slider 104 and collides with the first limiting portion 111, the second clamp plate 109 moves in a reverse direction and collides with the second limiting portion 112, the distance between the second clamp plate 109 moving away from the first limiting portion 111 and contacting the second limiting portion 112 is 30mm, and the second slider 105 is provided with a tension spring 113 which can pull the second clamp plate 109 towards the second limiting portion 112.
In this embodiment, the first power mechanism can synchronously drive the second clamping plate to move left and right, the second clamping plate sequentially impacts the first limiting portion and the second limiting portion on the second sliding block in the reciprocating process, and the first sliding block, the second sliding block and the supporting beam are fixedly integrated, that is, the second swing platform. Therefore, the graphite boat on the second swing platform can be driven to swing left and right by the left and right movement of the second clamping plate.
Through the flexible volume and the flexible speed of modification electric cylinder, can change the rocking frequency of the amplitude of rocking and the frequency of rocking of bearing beam, the frequency of rocking and the amplitude of rocking that obtain through this control mode are controllable, and it is better to rock the loose effect that produces, and the graphite boat can obtain better unloading effect. Meanwhile, the whole one-way swing mechanism only has a single power source, so that the cost and the control difficulty are reduced, and the overall reliability is improved.
Referring to fig. 6 and 7, three horizontal and parallel fourth sliding rails 202 perpendicular to the support beam 106 are arranged on the base 201, and the first swing platform 101 is slidably mounted on the fourth sliding rails 202;
referring to fig. 6 and 7, a third clamp plate 203 is fixed on the base 201 and located at the front side of the supporting beam 106, two fifth slide rails 204 which are horizontally parallel and perpendicular to the supporting beam 106 are arranged on the base 201, a fourth clamp plate 205 is slidably fitted on the fifth slide rails 204, the fourth clamp plate 205 is located at the rear side of the supporting beam 106, and a second power mechanism 206 for driving the fourth clamp plate 205 to move back and forth is arranged on the base 201 and is a linear electric cylinder;
referring to fig. 6 and 7, a connecting rod 114 extends from a side of the first swing platform 101 close to the fourth clamping plate 205, a third limiting portion 115 is disposed at a tail end of the connecting rod 114, the fourth clamping plate 205 collides with the third limiting portion 115 when moving to the rear side, and a return spring 207 is connected between the base 201 and the first swing platform 101 to pull the first swing platform 101 to the third clamping plate 203.
The second power mechanism can synchronously drive the fourth clamping plate to reciprocate back and forth, when the fourth clamping plate moves backwards, the fourth clamping plate collides with the third limiting part on the connecting rod to drive the first swing platform to move integrally, and when the fourth clamping plate moves forwards, the first swing platform is pulled back to the original position by the reset spring. The actual effect that brings is that the bearing beam and the graphite boat on the bearing beam can obtain the shaking effect in four directions at most, and the shaking effect is better.
Referring to fig. 8, two pairs of bolt tightening assemblies 30 are arranged on the base 201, each pair of bolt tightening assemblies 30 includes a first tightening assembly 301 and a second tightening assembly 302, the first tightening assembly 301 and the second tightening assembly 302 are located on the front side and the rear side of the first swing platform 101, and moving mechanisms 303 are respectively connected between the first tightening assembly 301 and the base 201 and between the second tightening assembly 302 and the base 201.
Referring to fig. 10, the three-axis moving mechanism 303 includes a first rail assembly 304 distributed along the X-axis, a second rail assembly 305 distributed along the Y-axis, and a third rail assembly 306 distributed along the Z-axis, the first rail assembly 304 is fixedly disposed relative to the base 201, and the three-axis moving mechanism 303 can drive the first tightening assembly 301 or the second tightening assembly 302 to move in three axes.
See fig. 8, two triaxial moving mechanisms 303 are furnished with respectively to two first tightening assemblies 301 in two pairs of bolt tightening assemblies, same first track subassembly 304 is shared to two triaxial moving mechanisms 303, the length of first track subassembly 304 can cover the maximum length size of graphite boat, first track subassembly 304 chooses linear electric motor as the power supply simultaneously, and second track subassembly 305 and third track subassembly 306 choose the electric jar as the power supply, three's motion precision all is 0.01mm, linear electric motor compares the electric jar, the structure is simpler, the length of first track subassembly 304 is the biggest, consequently compare the electric jar, choose linear electric motor can reduce cost.
Referring to fig. 10 and 11, the first tightening/loosening assembly 301 includes a positioning seat 307, a motor 308, a first tightening/loosening rod 309, the positioning seat 307 is slidably engaged with the third track assembly 306 and can be controlled by the third track assembly 306 to move axially, the motor 308 is configured to drive the first tightening/loosening rod 309 to rotate forward and backward, an outer end of the first tightening/loosening rod 309 is configured to be engaged with a nut, a sleeve 310 is coaxially and fixedly connected to an output shaft of the motor 308, a strip-shaped groove 311 is formed in the sleeve 310, an axial direction of the strip-shaped groove 311 is axially parallel to the first tightening/loosening rod 309, the first tightening/loosening rod 309 is slidably engaged with the sleeve 310, and a limit pin 312 capable of sliding and limiting with the strip-shaped groove 311 is disposed on the first tightening/loosening rod 309, such that the sleeve 310 can drive the first tightening/loosening rod 309 to rotate synchronously, the first tightening/loosening rod 309 can also axially extend and retract relative to the sleeve 310, a pressure spring 313 is disposed between the first tightening/loosening rod 309, for resetting.
Referring to fig. 9, the second tightening unit 302 includes a positioning seat 307 and a second tightening rod 314, the positioning seat 307 is also slidably fitted with the third rail unit 306, the second tightening rod 314 is fixed on the positioning seat 307, the outer end of the second tightening rod can be fitted with the head of the bolt, the second tightening unit 302 and the first tightening unit 301 need to be fitted with each other, the second tightening rod is fitted with the head of the bolt to be fixed, and the first tightening rod is fitted with the nut of the bolt while rotating forward or backward to tighten or loosen the bolt. The second tightening rod serves to prevent the bolt from following the nut.
Referring to fig. 9, 10 and 12, the positioning seats 307 of the first tightening component 301 and the second tightening component 302 are respectively provided with a laser sensor 401, the three-axis movement mechanism 303 can drive the laser sensors to move to a plurality of detection points for detection, the two laser sensors can detect linear distances D1 and D2 between the two laser sensors and the detection points, the distance between the two laser sensors is a set fixed value D, and the width L = D-D1-D2 of the detection point of the graphite boat.
It will be obvious to those skilled in the art that the present invention may be varied in many ways, and that such variations are not to be regarded as a departure from the scope of the invention. All such modifications as would be obvious to one skilled in the art are intended to be included within the scope of this claim.

Claims (10)

1. The utility model provides an automatic school boat machine for rectify the position of graphite boat, its characterized in that: the automatic school boat machine includes:
a base;
the correction device comprises a correction mechanism and a shaking mechanism which are arranged on the base, and the shaking mechanism is used for bearing and shaking the graphite boat; the correction mechanism is used for correcting the graphite boat;
the bolt tightening and loosening device is arranged on the base and used for loosening or tightening bolts on the graphite boat;
when the bolt tightening and loosening device loosens the bolt, the shaking mechanism shakes the graphite boat; after the shaking mechanism shakes, the bolt tightening and loosening device screws the bolt, and the correction mechanism starts to correct the graphite boat.
2. The automated boat corrector of claim 1, wherein: the shaking mechanism comprises: the first swing platform can swing back and forth relative to the base;
the second swing platform is arranged on the first swing platform, can synchronously swing back and forth along with the first swing platform, can independently swing back and forth relative to the first swing platform, and can bear the graphite boat;
the first power mechanism is used for driving the first swing platform to swing in a reciprocating manner;
and the second power mechanism is used for driving the second swing platform to swing in a reciprocating manner.
3. The automated boat corrector of claim 2, wherein: the correction mechanism comprises: the first clamping plate is fixed relative to the first swing platform and is positioned at the left end of the graphite boat;
the second clamping plate slides left and right relative to the first swing platform and is positioned at the right end of the graphite boat;
the second swing platform and the first swing platform are in sliding fit, the second clamping plate can drive the second swing platform to swing left and right when sliding left and right, and meanwhile, the second clamping plate slides to one side of the first clamping plate, so that the first clamping plate and the second clamping plate can be abutted to two ends of the graphite boat at the same time.
4. The automated boat corrector of claim 3, wherein: second swing platform on be equipped with first spacing portion and the spacing portion of second, but the first spacing portion of second splint circulated striking when reciprocating swing about, striking drives second swing platform reciprocating swing, the mobile range of second splint between first spacing portion and the spacing portion of second is 20 to 50mm, the relative first spacing portion of the spacing portion of second more farther apart from first splint, be close to on the second swing platform and be connected with the extension spring between spacing portion one side of second and the second splint.
5. The automated boat corrector of claim 4, wherein: the base is provided with a third clamping plate capable of abutting against the front side of the graphite boat and a fourth clamping plate capable of abutting against the rear side of the graphite boat, the third clamping plate is fixed with the base, the fourth clamping plate can reciprocate front and back relative to the base, the first swing platform is provided with a third limiting portion, the fourth clamping plate can impact the third limiting portion when moving outwards to drive the first swing platform to move, and a reset spring is connected between the first swing platform and the base and can pull the first swing platform to reset to one side of the third clamping plate.
6. The automated boat corrector of claim 1, wherein: bolt straining device includes: the first tightening assembly is used for being matched with the nut, and the second tightening assembly is used for being matched with the head of the bolt; moving mechanisms are connected between the first elastic component and the base, the moving mechanisms are in a three-axis linkage type, and the moving mechanisms can drive the first elastic component or the second elastic component to move to each bolt point position of the graphite boat.
7. The automated boat corrector of claim 6, wherein: the first tightening assembly comprises: the positioning seat is fixedly connected with the moving mechanism; the motor is fixed on the power mechanism on the positioning seat; the first elastic rod can be driven by a motor to rotate, and the head of the outer end of the first elastic rod can be matched with the shape of the nut; the telescopic mechanism is used for synchronously connecting the output shaft of the motor and the first elastic rod and has telescopic capacity.
8. The automated boat corrector of claim 6, wherein: the second elastic component comprises a second elastic rod, the outer end of the second elastic rod can be matched with the appearance of the head of the bolt, and the axial direction of the second elastic rod is parallel to that of the first elastic rod.
9. The automated boat calibrating machine of claim 7, wherein: the telescopic mechanism comprises: the sliding key is in sliding fit with the front and back of the sleeve, the sleeve can drive the sliding key to synchronously rotate, and the positioning seat is provided with a pressure spring which can push the first elastic rod to move outwards along the axial direction of the positioning seat.
10. The automated boat corrector of claim 6, wherein: and the first elastic component and the second elastic component are respectively fixed with a laser sensor, and the two laser sensors are arranged right opposite to the side wall of the graphite boat.
CN202110219321.0A 2021-02-26 2021-02-26 Automatic school boat machine Pending CN113113337A (en)

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Application Number Priority Date Filing Date Title
CN202110219321.0A CN113113337A (en) 2021-02-26 2021-02-26 Automatic school boat machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110219321.0A CN113113337A (en) 2021-02-26 2021-02-26 Automatic school boat machine

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CN113113337A true CN113113337A (en) 2021-07-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110219321.0A Pending CN113113337A (en) 2021-02-26 2021-02-26 Automatic school boat machine

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115233194A (en) * 2022-07-27 2022-10-25 深圳市艾特自动化有限公司 Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat
CN115962630A (en) * 2022-12-28 2023-04-14 无锡亚电智能装备有限公司 Graphite boat draining groove

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115233194A (en) * 2022-07-27 2022-10-25 深圳市艾特自动化有限公司 Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat
CN115962630A (en) * 2022-12-28 2023-04-14 无锡亚电智能装备有限公司 Graphite boat draining groove
CN115962630B (en) * 2022-12-28 2023-12-01 无锡亚电智能装备有限公司 Graphite boat draining groove

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