CN115233194A - Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat - Google Patents
Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat Download PDFInfo
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- CN115233194A CN115233194A CN202210893860.7A CN202210893860A CN115233194A CN 115233194 A CN115233194 A CN 115233194A CN 202210893860 A CN202210893860 A CN 202210893860A CN 115233194 A CN115233194 A CN 115233194A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention discloses an automatic device for realizing full-automatic calibration, locking and detection of a graphite boat, which comprises: the device comprises a machine table large plate, a fixing system, a locking system, a positioning system and a detection system; the large board of the machine table is arranged on the equipment frame; the fixing system is arranged on the large board of the machine table and is used for realizing the automatic positioning and clamping functions of the graphite boat; the positioning system is arranged on the large board of the machine table and is used for realizing the parallelism positioning of the graphite boat; the locking system is arranged on the large board of the machine table and used for accurately locking the locking nut and accurately controlling the width of the graphite boat; the detection system is arranged on the large board of the machine table and used for detecting the graphite boat. The invention has the beneficial effects that: manual operation can be replaced; the problem that the graphite boat page is frequently damaged due to manual assembly is solved, and the damage rate is reduced; the assembly time is reduced, and the assembly efficiency is improved; the problem of difficult recruitment is solved, and the harm of a large amount of graphite dust to a human body in the manual assembly process is avoided.
Description
Technical Field
The invention relates to the technical field of graphite boat automation equipment, in particular to automation equipment for full-automatic calibration, locking and detection of a graphite boat.
Background
Solar energy is an inexhaustible renewable energy source, and has the characteristics of sufficient cleanness, absolute safety and relative universality, thereby having important influence on long-term energy strategy.
A process called PECVD coating is adopted in the production and processing of the solar silicon wafer, and the process has the function of improving the solar energy conversion rate of the silicon wafer. This process uses graphite boats. The graphite boat is used as a carrier when the solar cell is plated with an antireflection film, and the structure and the size of the graphite boat directly influence the conversion efficiency and the production efficiency of the silicon wafer. The graphite boat is a cube formed by assembling graphite accessories such as graphite boat pages, ceramic sleeves, ceramic rods, graphite clamping points, graphite nuts and the like. A graphite boat is composed of a large number of graphite boat pages, and each graphite boat page is divided into a plurality of grooves with different numbers. The graphite boat page is a rectangular sheet with the thickness of about 1.0 mm-2.5 mm, a plurality of square holes are formed in the middle of the graphite boat page, graphite clamping points are installed on the graphite boat page, and the graphite clamping points are mainly used for supporting the silicon wafer so as to ensure that the silicon wafer is tightly attached to the graphite boat page. The graphite boat pages are separated by ceramic sleeves, and finally all the graphite boat pages are fixed by graphite rods, and graphite nuts are mounted at two ends of each graphite rod. The graphite boat after the assembly is composed of a plurality of vertically placed graphite sheets which are parallel to each other, the upper width and the lower width of the graphite boat are consistent, the distance between the graphite boat pages is fixed and equal, and the graphite boat pages are perpendicular to the ground.
Graphite stuck point and graphite boat page or leaf are mutually perpendicular, have the numerous circular port of quantity on the graphite boat page or leaf, and the diameter in hole is close with graphite stuck point diameter. The graphite stuck points are loaded into the graphite boat page in an interference mode, and then the graphite stuck points are extruded into the graphite boat page in a torque pressing mode. Graphite stuck point can be than the protruding take the altitude of graphite boat page or leaf after the completion of impressing, and the end of graphite stuck point has a arch simultaneously, and the bulge of graphite stuck point just forms a recess with between the graphite boat page or leaf, and this recess just is used for holding up the silicon chip that adjacent graphite boat page or leaf was placed.
The automatic loading and unloading machine of graphite boat puts the silicon chip of non-coating film on graphite boat page or leaf some graphite stuck points on the wall through the robot sucking disc, and the graphite boat page or leaf size that the silicon chip of different size used is different, and the graphite stuck point quantity on different graphite boat pages or leaf is different. A minimum of 3 graphite sites are required for a single wafer. After all the silicon wafers are placed, the graphite boat is driven by a belt line to enter a PECVD coating machine. The graphite boat can plate a film on the surface of the silicon wafer through specific chemical reaction in a PECVD coating machine under the high-temperature condition. The graphite boat after the film coating is finished can be withdrawn from the PECVD again, and then is transported to an automatic wafer loading and unloading machine through a belt line, and a robot of the automatic wafer loading and unloading machine can unload the silicon wafer after the film coating is finished from the graphite boat and take the silicon wafer out. After the silicon wafer is unloaded, the robot can put the original silicon wafer without the film coating again, put the original silicon wafer into the graphite boat again, and the processes are repeated in sequence.
After the graphite boat goes in and out of the PECVD repeatedly, the thickness and the size of the groove between the graphite boat surface, the graphite boat sheet, the graphite clamping point, the tail end protrusion of the graphite clamping point and the graphite boat sheet are changed due to repeated film coating. The size that the recess leads to the recess between the terminal arch of graphite stuck point and the graphite boat page or leaf can diminish because of the coating film many times, and after the recess size diminishes to a certain degree, this recess just can't be put into again to the silicon chip that does not coat the film to lead to the silicon chip to fall out from the graphite boat. Meanwhile, as the diameter of the groove of the graphite clamping point is very small, after the silicon wafer is repeatedly put in and taken out for many times, the diameter of the groove can be abraded, and the situation that the graphite clamping point is broken from the groove can be seriously caused. Therefore, the graphite boat after being coated with the films for many times is taken out from the PECVD or automatic wafer loading and unloading machine periodically, the graphite boat is put into special cleaning equipment to clean redundant films on the surface, and meanwhile, the graphite boat needs to be disassembled manually, and then all clamping points on each graphite boat page are replaced. Because there are numerous graphite stuck points (for example, there are 24 graphite stuck points on a graphite boat page or leaf) on every graphite boat page or leaf, the manual work needs to carry out artifical stuck point to all graphite boat pages or leaves on a graphite boat and dismantle, and the stuck point is pressed in to manual dress stuck point and with special pressure tool again. Therefore, a large amount of operators are required to specially deal with the work of changing the stuck point, and great labor cost is brought to customers. At present, the card points are disassembled and assembled manually in the industry, seven or eight persons are required to specially engage in the industry in one factory, and meanwhile, graphite is a fragile substance and has extremely strong pollution characteristics to the lung of a worker, so that the lung is extremely damaged, and the recruitment of the worker in the industry is difficult. There is a need in the art to develop an efficient, fully automated, accurate automated device to replace manual operations.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides automatic equipment for realizing full-automatic calibration, locking and detection of a graphite boat.
The technical scheme of the invention is as follows: the invention provides an automatic device for realizing full-automatic calibration, locking and detection of a graphite boat, which comprises: the device comprises a machine table large plate, a fixing system, a locking system, a positioning system and a detection system;
the large board of the machine table is arranged on the equipment rack;
the fixing system is arranged on the large board of the machine table and is used for realizing the automatic positioning and clamping functions of the graphite boat;
the positioning system is arranged on the machine table large plate and used for realizing the parallelism positioning of the graphite boat;
the locking system is arranged on the large board of the machine table and used for accurately locking the locking nut and accurately controlling the width of the graphite boat;
the detection system is arranged on the machine table large plate and used for detecting the graphite boat.
Furthermore, the fixing system comprises a fixing system fixing edge positioning plate and a fixing system movable pressing assembly, the fixing system movable pressing assembly is used for pressing the graphite boat, and the fixing system fixing edge positioning plate is used for positioning the graphite boat.
Furthermore, the positioning system comprises a positioning system supporting component, a positioning system positioning component and a positioning system short edge pressing component, the positioning system supporting component is used for supporting the graphite boat, the positioning system positioning component is used for positioning the graphite boat, and the positioning system short edge pressing component is used for pressing the graphite boat.
Furthermore, the locking system comprises a locking system XYZ module and a locking system nut tightening assembly, the locking system XYZ module is used for driving the locking system nut tightening assembly to move on an X axis, a Y axis and a Z axis, and the locking system nut tightening assembly is used for tightening a locking nut.
Furthermore, the detection system comprises a detection system Y-axis module, a detection system Z-axis module and a detection lens detection assembly, wherein the detection system Y-axis module and the detection system Z-axis module are respectively used for driving the detection system lens detection assembly to move on the Y axis and the Z axis, and the detection system lens assembly is used for collecting images of the graphite boat to be detected for detection.
Further, in the equipment, the graphite boat is operated by the following steps:
step 1: the graphite boat is roughly positioned by the fixing system and the positioning system;
step 2: loosening the nut of the graphite boat by the locking system to realize loosening of the graphite boat;
and step 3: shaking of the graphite boat is realized through the fixing system and the positioning system, and the stress of the graphite boat is released;
and 4, step 4: the graphite boat is coarsely positioned again through the fixing system and the positioning system;
and 5: the graphite boat is precisely positioned by the positioning system;
step 6: the locking system is used for locking the nut of the graphite boat;
and 7: the detection of the graphite boat is realized through the detection system.
By adopting the scheme, the invention has the beneficial effects that: manual operation can be replaced; the assembly and detection precision is high, and the assembly precision can reach 0.02mm; the problem that the graphite boat page is frequently damaged due to manual assembly is solved, and the damage rate is reduced; the assembly time is reduced, and the assembly efficiency is improved; the problem of difficult recruitment is solved, and the harm of a large amount of graphite dust to a human body in the manual assembly process is avoided.
Drawings
Fig. 1 is a side view of the structure of the present invention.
Fig. 2 is a top view of the structure of the present invention.
Fig. 3 is a schematic structural diagram of the positioning system of the present invention.
Fig. 4 is a schematic view of the locking system of the present invention.
Fig. 5 is a schematic structural diagram of the detection system of the present invention.
Detailed Description
The invention is described in detail below with reference to the figures and the specific embodiments.
Referring to fig. 1 to 5, in the present embodiment, the present invention provides an automatic apparatus for implementing full-automatic calibration, locking and detection of a graphite boat, including: the device comprises a machine table large plate 2, a fixing system 3, a locking system 4, a positioning system 5 and a detection system 6; the machine table large plate 2 is arranged on the equipment rack 1; the fixing system 3 is arranged on the machine table large plate 2 and is used for realizing the automatic positioning and clamping functions of the graphite boat; the positioning system 5 is arranged on the machine table large plate 2 and used for realizing the parallelism positioning of the graphite boat; the locking system 4 is arranged on the machine table large plate 2 and used for accurately locking the locking nut and accurately controlling the width of the graphite boat; the detection system 6 is arranged on the machine table large plate 2 and used for detecting the graphite boat.
The equipment during operation of this scheme can realize full automatic calibration, locking and the detection to the graphite boat, specifically includes following step: step 1: the graphite boat is roughly positioned by the fixing system 3 and the positioning system 5. In the initial stage of equipment work, the fixing system movable pressing component 8 and the positioning system short edge pressing component 11 move backwards so as to vacate a space for putting down the graphite boat, after the graphite boat is put into the positioning system supporting component 9 of the positioning system 5, the positioning system short edge pressing component 11 of the positioning system 5 presses the short edge of the graphite boat, and the fixing system movable pressing component 8 of the fixing system 3 presses the long edge of the graphite boat, so that the coarse positioning of the graphite boat is realized.
And 2, step: and the locking system 4 is used for loosening the nut of the graphite boat to realize loosening of the graphite boat. After the graphite boat is initially positioned, the locking system 4 is used for loosening the nut of the graphite boat to realize loosening of the graphite boat.
And step 3: the graphite boat can shake through the fixing system 3 and the positioning system 5, and the stress of the graphite boat is released. In the step, after the graphite boat is loosened, the power device of the fixing system 3 and the short side pressing assembly of the fixing system 3 of the positioning system 5 move back and forth along the Y-axis direction and the X-axis direction in sequence, so that the graphite boat is shaken, and the stress of the graphite boat can be released.
And 4, step 4: the graphite boat is coarsely positioned again through the fixing system 3 and the positioning system 5. In this step, the short side of the graphite boat is compressed by the short side compressing assembly 11 of the positioning system 5, and the long side of the graphite boat is compressed by the movable compressing assembly 8 of the fixing system 3, so that the graphite boat is roughly positioned.
And 5: the graphite boat is precisely positioned by the positioning system 5. In this step, after the graphite boat is positioned again, the positioning system positioning assembly 10 of the positioning system 5 is pushed by the cylinder to push the positioning block upward, so that the boat sheet of the graphite boat is clamped into the clamping groove of the positioning block, thereby positioning the graphite boat sheet.
Step 6: and the locking system 4 is used for locking the nut of the graphite boat. In the step, after the graphite boat page or leaf is positioned, the nut of the graphite boat is locked on the locking system 4, and the width of the graphite boat is synchronously detected through the displacement sensor while locking, so that the accurate control of the width of the graphite boat is realized
And 7: the graphite boat is detected by the detection system 6. In this step, after the graphite boat is locked, the detection system 6 starts to work, and the detection system lens detection assembly 17 detects the parallelism and the straightness of the graphite boat under the driving of the detection system 6XYZ module of the detection system 6. And (5) finishing the action of the whole machine after the detection is finished, and returning each station to the initial position.
Specifically, in the equipment of this scheme, fixing system 3 includes fixing system fixed limit locating plate 7 and fixing system activity compress tightly subassembly 8, fixing system activity compress tightly subassembly 8 is used for compressing tightly the graphite boat, fixing system fixed limit locating plate 7 is used for the location to the graphite boat. The graphite boat is fixed by the fixing system 3, which is the first process of the full-automatic graphite boat checking equipment. The fixing system 3 realizes the automatic positioning and clamping functions after the graphite boat is placed into the machine table, ensures that no position deviation occurs in the process of positioning the graphite boat page and locking the graphite boat, and avoids influencing the processing precision. In this embodiment, the fixing system 3 includes: the device comprises a fixed edge support of the fixed system 3, a fixed edge positioning plate 7 of the fixed system, a movable pressing assembly 8 of the fixed system, a movable edge support of the fixed system 3, a linear guide rail of the fixed system 3 and a power device assembly of the fixed system 3. The fixing system 3 fixing edge support is arranged on the machine table big plate 2, the fixing system fixing edge positioning plate 7 is arranged on the fixing system 3 fixing edge support, and the fixing system fixing edge positioning plates 7 in different numbers and different installation positions are needed according to graphite boats in different models. 3 linear guide of fixed system installs in board 2 greatly, 3 movable limit support of fixed system are installed on 3 linear guide of fixed system, 3 movable limit supports of fixed system with 3 power device of fixed system subassembly are connected, 3 power device of fixed system subassemblies include but not limited to belt and lead screw module, are used for converting servo motor's rotary motion into linear motion, thereby drive 3 movable limit supports of fixed system are in 3 linear guide of fixed system upward movements, the fixed system activity compresses tightly subassembly 8 and installs on 3 movable limit supports of fixed system, the fixed system activity compresses tightly subassembly 8 and includes linear bearing, guiding axle, compression spring, clamp plate and mounting panel. After the graphite boat is put in place, the power device of the fixing system 3 provides power to enable the pressing plate in the movable pressing assembly 8 of the fixing system to press the graphite boat, so that the graphite boat is fixed. More specifically, in the fixing system 3, the fixed edge support of the fixing system 3 is directly installed on the machine table large plate 2, and the fixed edge support of the fixing system 3 is composed of a fixed holding block and a circular tube. The fixing system fixing edge positioning plate 7 is installed on a circular tube of the fixing edge support, the fixing system fixing edge positioning plate 7 can be adjusted left and right on the circular tube of the fixing edge support of the fixing system 3, and the graphite boat fixing device is compatible with graphite boats of different models. The number of the positioning plates 7 of the fixing system fixing edges required by graphite boats of different models is also different. The fixed system 3 linear slide rail and the fixed system 3 power device are arranged on the machine table large plate 2, the fixed system 3 movable edge support is arranged on the fixed system 3 linear slide rail, is connected with the movable part of the fixed system 3 power device and can move back and forth on the slide rail, and the fixed system 3 movable edge support is composed of a bottom plate, a fixed locking block and a circular tube. The fixing system movable pressing assembly 8 is arranged on a round pipe of the support of the movable side of the fixing system 3, can be adjusted left and right along the round pipe, and can be compatible with graphite boats of different models. The number of the movable pressing assemblies 8 of the fixing system required by graphite boats of different types is also different.
Specifically, in the equipment of the present embodiment, the positioning system 5 includes a positioning system supporting component 9, a positioning system positioning component 10, and a positioning system short edge pressing component 11, the positioning system supporting component 9 is used for supporting the graphite boat, and the positioning system positioning component 10 is used for positioning the graphite boat. The positioning system 5 is the second process of the full-automatic ink boat checking equipment. The positioning system 5 realizes the parallelism positioning of the graphite boat pages, so that the straightness of each boat page and the parallelism between the boat pages reach the standard. The positioning system 5 includes: a positioning system supporting component 9, a positioning system positioning component 10 and a positioning system short edge pressing component 11. The positioning system supporting assembly 9 comprises a slide rail supporting block, an X-axis linear slide rail, a bottom plate, a Y-axis linear slide rail, a supporting aluminum profile and a supporting seat, wherein the slide rail supporting block is installed on the machine table large plate 2, and the X-axis linear slide rail is installed on a slide block installing plate and used for positioning and pressing the graphite boat in the X-axis direction without scratching the graphite boat. The bottom plate is installed on the X-axis linear slide rail, and the Y-axis linear slide rail is installed on the bottom plate and used for positioning and compressing the graphite boat in the Y axis without scratching the graphite boat. The supporting aluminum profile is connected with the Y-axis linear slide rail through a connecting block, and a plurality of supporting seats are arranged on the supporting aluminum profile and used for supporting the graphite boat. The positioning system positioning assembly 10 comprises a slider mounting plate, a Z-axis slide rail, a thin-wall cylinder and a positioning block. The slider mounting panel is installed on the bottom plate, and Z axle slide rail passes through the connecting plate and is connected with the locating piece, and it has several grooves to open on the locating piece, through the up-and-down motion of thin wall cylinder and the direction of Z boat slide rail, makes the boat page or leaf of graphite boat accurately fall into the groove of locating piece to the realization is to the location of graphite boat. The short edge pressing assembly 11 of the positioning system comprises a short edge positioning assembly, a compression assembly and a screw rod module, wherein the short edge positioning assembly is installed on the machine table large plate 2 and used for limiting the position of the short edge of the graphite boat. The compression assembly is connected with the screw rod module, and the screw rod module drives the compression assembly to realize the compression and positioning of the graphite boat. More specifically, the positioning system 5 is installed on the machine table large plate 2, and the positioning system supporting component 9 of the positioning system 5 includes a slide rail supporting block, an X-axis linear slide rail, a bottom plate, a Y-axis linear slide rail, a supporting aluminum profile, and a supporting seat. The slide rail supporting shoe is installed on board 2, and X axle linear slide dress is in the slide rail backup pad, and the bottom plate is connected with X axle linear slide, and Y axle linear slide fixes on the bottom plate, supports the aluminium alloy and is connected through the connecting block with Y axle linear slide, and the supporting seat is installed on supporting the aluminium alloy. The bottom plate can slide along with X axle linear slide rail round trip to drive the supporting seat and remove along the X axle, support the aluminium alloy and can follow Y axle linear slide rail back-and-forth movement, thereby realize that the supporting seat also can follow Y axle back-and-forth movement. The positioning system positioning assembly 10 includes: the sliding block mounting plate, the Z-axis sliding rail, the thin-wall cylinder and the positioning block. The slide block mounting plate is used for vertically mounting a Z-axis slide rail, and the Z-axis slide rail is connected with the positioning block through a connecting block, so that the guiding effect is realized. The thin-wall cylinder is connected with the positioning block and drives the positioning block to slide up and down. The short edge pressing assembly 11 of the positioning system comprises a short edge positioning assembly, a compression assembly and a screw rod module. And the short edge positioning component of the positioning system 5 is arranged on the machine table large plate 2. The lead screw module is also installed at the machine table large plate 2. The compression assembly is installed on the lead screw module. The compression assembly consists of a pressure plate, a compression spring, a guide shaft and a mounting plate, and can realize flexible compression of the graphite boat.
Specifically, in this embodiment, the locking system 4 includes a locking system XYZ module 12 and a locking system nut tightening assembly 13, where the locking system 4XYZ module is configured to drive the locking system nut tightening assembly 13 to move on an X axis, a Y axis, and a Z axis, and the locking system nut tightening assembly 13 is configured to tighten a locking nut. The locking system 4 is a third process of the full-automatic graphite boat calibration equipment, and the locking system 4 realizes the accurate locking of each locking nut of the graphite boat and the accurate control of the width of the graphite boat. The locking system XYZ module 12 includes: the X-axis belt module, the Y-axis screw rod module and the Z-axis screw rod module. The X-axis belt module is directly installed on the machine table large plate 2, the Z-axis screw rod module is installed on the X-axis belt module, and the Y-axis screw rod module is connected with the Z-axis screw rod module. The locking system nut tightening assembly 13 is mounted on the locking system XYZ module 12 assembly, the locking system nut tightening assembly 13 comprising: the locking system nut screwing assembly 13 is installed on a Z-axis lead screw module of the graphite boat locking system XYZ module 12 assembly. The servo motor is arranged on the mounting plate and is connected with the rotating shaft through the transfer sleeve. The displacement sensor is installed on the mounting panel, and the during operation drives the rotation axis through servo motor and rotates, realizes the locking to graphite boat nut, through displacement sensor's detection, realizes the accurate measurement to graphite boat width.
Specifically, in this embodiment, the detection system 6 includes a detection system 6XYZ module (including a detection system support 14, a detection system Y-axis module 15, a detection system Z-axis module 16) and a detection lens detection assembly, the detection system Y-axis module 15 and the detection system Z-axis module 16 are respectively configured to drive the detection system lens detection assembly 17 to move on the Y-axis and the Z-axis, and the detection system 6 lens assembly is configured to collect an image of a graphite boat to be detected for detection. The detection system 6XYZ module comprises a square through frame, a gear rack, a slide rail, a motor, a Y-axis lead screw module (namely a detection system Y-axis module 15) and a Z-axis lead screw module (namely a detection system Z-axis module 16). The square tube frame is arranged on the machine table large plate 2 and is a supporting part of the whole system. The rack and the slide rail are all installed on the square through frame through the connecting blocks, the Y-axis lead screw module is installed on the slide rail, and the Z-axis lead screw module is connected with the Y-axis lead screw module, so that XYZ three-axis movement is realized. The detection system lens detection assembly 17 comprises a vision camera, a light source and a camera mounting plate. The lens detection assembly is connected with the Z-axis lead screw module of the detection system 6XYZ module assembly, and the parallelism and the straightness of different types of the graphite boat can be detected by three-axis movement of the XYZ module.
Specifically, the work flow of the equipment is as follows: 1. the systems are started with each system in its initial position. 2. Graphite boat material loading is put on positioning system supporting component 9's supporting seat, has the material inductor to sense and has the material, and PLC control positioning system minor face compresses tightly the lead screw module motor rotation of subassembly 11, and drive compression assembly extrusion graphite boat makes graphite boat reach positioning system 5 minor face compression assembly's minor face locating component to arrived by the inductor, motor stall. 3. The PLC controls a power device component motor of a fixing component of the fixing system 3 to rotate, so that the fixing system movable pressing component 8 presses the graphite boat, and the sensor senses that the graphite boat is pressed in place. The motor stops rotating. 4. The PLC controls the XYZ module 12 assembly of the locking system, so that the XYZ module 12 of the locking system moves the nut tightening assembly 13 of the locking system to the position of the corresponding nut. And the locking system nut screwing component 13 rotates by a servo motor to drive the rotating shaft to unscrew the nut. After all the nuts are unscrewed in sequence, the locking system XYZ module 12 assembly returns to the initial position. 5. And the PLC controls a power device component motor of a fixing component of the fixing system 3 to rotate, so that the movable pressing component 8 of the fixing system is separated from the graphite boat. And the PLC controls the short edge pressing component 11 of the positioning system to rotate the screw rod module motor forward and backward, so that the short edge pressing component 11 of the positioning system drives the bottom plate of the positioning system 5 to shake back and forth for a plurality of times, namely, the X axis of the graphite boat is shaken back and forth to release stress. After shaking is finished. And the PLC controls a power device component motor of the fixing component of the fixing system 3 to rotate back and forth to drive the supporting seat of the positioning system supporting component 9 to shake back and forth, so that the Y-axis of the graphite boat can be shaken, and the stress is released. 6. And the PLC controls a motor of a screw rod module of the short edge pressing assembly 11 of the positioning system to rotate, and when a compression assembly of the short edge pressing assembly 11 of the positioning system compresses the graphite boat, the motor stops rotating. The PLC controls a power device component motor of the fixing component to rotate, and when the fixing system movable pressing component 8 presses the graphite boat, the motor stops rotating. 7. And the PLC controls the thin-wall cylinder of the positioning component of the positioning system 5 to move upwards, so that the clamping groove of the positioning block is clamped into the graphite boat to position the graphite boat. 8. The PLC controls the locking system XYZ module 12 to work, so that the nut tightening assemblies of the tightening system are moved to the corresponding positions of the nuts. The nut screwing assembly servo motor of the screwing system rotates to drive the rotating shaft to screw the nut, and the displacement sensor detects the width size of the graphite boat. After all nuts are screwed up in sequence, the XYZ module assembly of the screwing system returns to the initial position, and the PLC records data of the displacement sensor. 9. And the PLC controls the thin-wall cylinder of the positioning component of the positioning system 5 to move downwards, so that the clamping groove of the positioning block is separated from the graphite boat. 10. The PLC controls an XYZ module motor of the detection system 6, drives the detection system lens detection assembly 17 to detect the straightness of the boat pages on the upper surface of the graphite boat and the parallelism between the boat pages and records data, and after detection is finished, the PLC controls the detection system 6 to return to an initial position. 11. And the PLC controls the short edge pressing assembly 11 screw rod module motor of the positioning system to rotate, so that the compression assembly is separated from the graphite boat and returns to the initial position, and the motor stops rotating. 12. And the PLC controls a power device component motor of a fixing component of the fixing system 3 to rotate, so that the movable pressing component 8 of the fixing system is separated from the graphite boat and returns to the initial position, and the motor stops rotating. The calibration, locking and detection of the whole graphite boat can be completed by sequentially repeating the steps of each system.
In conclusion, the beneficial effects of the invention are as follows: manual operation can be replaced; the assembly and detection precision is high, and the assembly precision can reach 0.02mm; the problem that the graphite boat page is frequently damaged due to manual assembly is solved, and the damage rate is reduced; the assembly time is reduced, and the assembly efficiency is improved; the problem of difficult recruitment is solved, and the harm of a large amount of graphite dust to a human body in the manual assembly process is avoided.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalents and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides an automation equipment for realizing full-automatic calibration, locking and detect graphite boat which characterized in that includes: the device comprises a machine table large plate, a fixing system, a locking system, a positioning system and a detection system;
the large board of the machine table is arranged on the equipment rack;
the fixing system is arranged on the machine table large plate and used for realizing the automatic positioning and clamping functions of the graphite boat;
the positioning system is arranged on the large board of the machine table and is used for realizing the parallelism positioning of the graphite boat;
the locking system is arranged on the machine table large plate and used for accurately locking the locking nut and accurately controlling the width of the graphite boat;
the detection system is arranged on the machine table large plate and used for detecting the graphite boat.
2. The automated apparatus for performing fully automated calibration, locking and inspection of graphite boats of claim 1 wherein the fixture system comprises fixture system fixed edge positioning plates and fixture system movable hold down assemblies, the fixture system movable hold down assemblies for holding down the graphite boats, the fixture system fixed edge positioning plates for positioning the graphite boats.
3. The automated apparatus for performing fully automated calibration, locking and inspection of graphite boats of claim 2 wherein the positioning system comprises a positioning system support assembly for supporting the graphite boat, a positioning system positioning assembly for positioning the graphite boat, and a positioning system short edge hold down assembly for holding down the graphite boat.
4. The automated equipment for achieving full automatic calibration, locking and inspection of graphite boats of claim 3, wherein the locking system comprises a locking system XYZ module and a locking system nut tightening assembly, the locking system XYZ module is used for driving the locking system nut tightening assembly to move on an X-axis, a Y-axis and a Z-axis, and the locking system nut tightening assembly is used for tightening a locking nut.
5. The automated equipment for realizing fully automatic calibration, locking and detection of graphite boats as claimed in claim 4, wherein the detection system comprises a detection system Y-axis module, a detection system Z-axis module and a detection lens detection assembly, the detection system Y-axis module and the detection system Z-axis module are respectively used for driving the detection system lens detection assembly to move on Y-axis and Z-axis, and the detection system lens assembly is used for collecting images of graphite boats to be detected for detection.
6. The automated equipment for realizing fully automatic calibration, locking and detection of graphite boats according to any one of claims 1 to 5, wherein the equipment is used for realizing the operation of the graphite boats through the following steps:
step 1: the graphite boat is roughly positioned by the fixing system and the positioning system;
and 2, step: loosening the nut of the graphite boat by the locking system to realize loosening of the graphite boat;
and step 3: shaking of the graphite boat is realized through the fixing system and the positioning system, and the stress of the graphite boat is released;
and 4, step 4: the graphite boat is coarsely positioned again through the fixing system and the positioning system;
and 5: the graphite boat is precisely positioned by the positioning system;
and 6: the locking system is used for locking the nut of the graphite boat;
and 7: the detection system is used for detecting the graphite boat.
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| CN202210893860.7A CN115233194A (en) | 2022-07-27 | 2022-07-27 | Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat |
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| CN202210893860.7A CN115233194A (en) | 2022-07-27 | 2022-07-27 | Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat |
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