CN208907790U - It is a kind of for detecting the rapid detection tool of graphite boat verticality and spacing - Google Patents
It is a kind of for detecting the rapid detection tool of graphite boat verticality and spacing Download PDFInfo
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- CN208907790U CN208907790U CN201821771557.5U CN201821771557U CN208907790U CN 208907790 U CN208907790 U CN 208907790U CN 201821771557 U CN201821771557 U CN 201821771557U CN 208907790 U CN208907790 U CN 208907790U
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- verticality
- graphite boat
- spacing
- mounting
- bottom plate
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Abstract
The utility model discloses a kind of for detecting the rapid detection tool of graphite boat verticality and spacing, including bottom plate, mounting plate is equipped on the bottom plate, be equipped at intervals with multiple spacing detection items along its length on the mounting plate, be equipped at intervals with along its length on the upper surface of the detection detector bar it is multiple for detect spacing between the adjacent two panels graphite boat piece of graphite boat whether He Ge spacing detection slot；Multiple mounting rods are equipped at intervals between the bottom plate and mounting plate and along the length direction of bottom plate, one end of the mounting rod and the side of bottom plate are concordant, measuring for verticality bracket is installed on the other end of the mounting rod, on the measuring for verticality bracket be equipped with for detect graphite boat verticality whether He Ge measuring for verticality item.The utility model not only reduces the labor intensity of testing staff, and also improves the detection efficiency of graphite boat, at the same can also accurate detection go out the verticality and spacing of graphite boat.
Description
Technical field
The utility model relates to graphite boat detection technique field, be related specifically to it is a kind of for detect graphite boat verticality with
And the rapid detection tool of spacing.
Background technique
Graphite boat, when carrying out plated film, will be inserted with uncoated to the silicon chip film-coated carrier in solar battery sheet
The graphite boat of silicon wafer is sent into PECVD vacuum coating equipment cavity and carries out electric discharge plated film using pecvd process.Plated film terminates
Afterwards, graphite boat is taken out, silicon wafer is unloaded from graphite boat and is taken off.
Graphite boat includes ceramic rod, is equipped at intervals with multiple graphite boat pieces along its axial direction on the ceramic rod, in institute
It states on ceramic rod and is equipped with ceramic tube between two adjacent graphite boat pieces, the ceramic tube is set on ceramic rod, graphite boat
When assembling, one end of ceramic rod is passed through into the mounting hole in graphite boat piece, then ceramic tube is set in one end of ceramic rod again
On, then another graphite boat piece is worn to ceramic rod again, is recycled according to above-mentioned installation process, until ceramic rod
Across last graphite boat piece, is locked finally by graphite nut, after graphite boat is installed, need to hang down to graphite boat
Spacing between straight degree and adjoining graphite boat piece is detected, and carries out subsequent operation after detection is qualified.
And the detecting tool overall structure of existing verticality and spacing for detecting graphite boat is complex, operation
Relatively complicated, the detecting tool adopted the structure not only increases the labor intensity of testing staff, and also reduces graphite
The detection efficiency of boat, while it being also difficult to verticality and spacing that accurate detection goes out graphite boat, to the detection work of graphite boat
Bring biggish inconvenience.
However in view of the deficiencies of the prior art, a kind of design is reasonable, structure is simple, operation side it is necessary to develop by developer
Just, the labor intensity of testing staff is not only reduced, and also improves the detection efficiency of graphite boat, while can also be accurate
Detect the verticality of graphite boat and the rapid detection tool for being used to detect graphite boat verticality and spacing of spacing.
Utility model content
In order to solve the problems existing in the prior art, the utility model aim provide a kind of design rationally, structure is simple, behaviour
Facilitate, not only reduce the labor intensity of testing staff, and also improve the detection efficiency of graphite boat, while can also be quasi-
The rapid detection tool for being used to detect graphite boat verticality and spacing of the true verticality for detecting graphite boat and spacing.
In order to solve the above technical problems, the utility model is realized using following technical scheme:
It is a kind of for detecting the rapid detection tool of graphite boat verticality and spacing, including bottom plate, which is characterized in that
The bottom plate is equipped with mounting plate, multiple spacing detection items is equipped at intervals with along its length on the mounting plate, described
It is equipped at intervals with along its length on the upper surface of detection detector bar multiple for detecting the adjacent two panels graphite boat piece of graphite boat
Between spacing whether He Ge spacing detection slot；
Multiple mounting rods, the mounting rod are equipped at intervals between the bottom plate and mounting plate and along the length direction of bottom plate
One end it is concordant with the side of bottom plate, measuring for verticality bracket is installed on the other end of the mounting rod, described vertical
Degree detection support be equipped with for detect graphite boat verticality whether He Ge measuring for verticality item.
In a preferred embodiment of the utility model, it is equipped with mounting base in the lower end of the measuring for verticality bracket,
It offers kidney-shaped adjustment hole along its length in the mounting base, is offered on the other end of the mounting rod and kidney-shaped
The corresponding mounting hole of adjustment hole.
Compared with prior art, the utility model is carrying out verticality to the graphite boat after installation and when spacing detection,
It only needs the graphite boat after being installed being placed on the rapid detection tool, makes the outermost piece of graphite of graphite boat
Boat piece is aligned with measuring for verticality item, and then adjacent graphite boat piece is placed in spacing detection slot, using defined clearance gauge
Gap between graphite boat piece and measuring for verticality item is detected, if the distance between be less than clearance gauge size be graphite boat
Verticality it is qualified, otherwise verticality is substandard product；If in addition adjacent graphite boat piece can easily be placed on spacing
In detection slot, then the spacing between the adjoining graphite boat piece of graphite boat is qualified, otherwise to be unqualified, using the above structure not
But the labor intensity of testing staff is reduced, and also improves the detection efficiency of graphite boat, while can also accurate detection
The verticality and spacing of graphite boat out.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model.
Specific embodiment
In order to be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, under
Face combines and is specifically illustrating, and the utility model is further described.
Shown in referring to Fig.1, what is provided in figure is a kind of for detecting the rapid detection tool of graphite boat verticality and spacing,
Including bottom plate 100.
It is equipped with mounting plate 200 on bottom plate 100, is equipped at intervals with multiple spacing inspections along its length on mounting plate 200
Item 300 is surveyed, is equipped at intervals with along its length on the upper surface of detection detector bar 300 multiple adjacent for detecting graphite boat
Spacing between two panels graphite boat piece whether He Ge spacing detection slot 310.
When carrying out spacing detection to the graphite boat being installed using the above structure, by the adjacent graphite boat piece of graphite boat
It is placed in spacing detection slot 310, if the adjacent graphite boat piece of graphite boat can easily be placed on spacing detection slot 310
Interior, then the spacing between the adjoining graphite boat piece of graphite boat is qualified, if can not if it is unqualified for spacing, need to re-start
It is detected again after adjustment.
Multiple mounting rods 400 are equipped at intervals between bottom plate 100 and mounting plate 200 and along the length direction of bottom plate, are installed
One end of bar 400 is concordant with the side of bottom plate 100, and measuring for verticality bracket 500 is equipped on the other end of mounting rod 400,
On measuring for verticality bracket 500 be equipped with for detect graphite boat verticality whether He Ge measuring for verticality item 600.
It is aligned the outermost piece of graphite boat piece of graphite boat with measuring for verticality item 600, using defined clearance gauge pair
Gap between graphite boat piece and measuring for verticality item 600 is detected, if the distance between be less than clearance gauge size be graphite
The verticality of boat is qualified, and otherwise verticality is substandard product.
It is equipped with mounting base 510 in the lower end of measuring for verticality bracket 500, is opened up along its length in mounting base 510
There is kidney-shaped adjustment hole 511, mounting hole corresponding with kidney-shaped adjustment hole 511 is offered on the other end of mounting rod 400, selects
Bolt passes through kidney-shaped adjustment hole 511 and matches with mounting hole, so that measuring for verticality bracket 500 is fixedly mounted on mounting rod
On 400, adopt the structure can the position to measuring for verticality bracket 500 effectively adjusted, can be according to graphite boat
Specific size the position of measuring for verticality bracket 500 is adjusted, that is to say, that can adapt to various sizes of graphite boat.
The utility model is when carrying out verticality and spacing detection to the graphite boat after installation in summary, it is only necessary to will
Graphite boat after being installed is placed on the rapid detection tool, makes the outermost piece of graphite boat piece of graphite boat and hangs down
Adjacent graphite boat piece, is then placed in spacing detection slot, using defined clearance gauge to graphite boat by straight degree detector bar alignment
Gap between piece and measuring for verticality item is detected, if the distance between be less than clearance gauge size be graphite boat verticality
Qualification, otherwise verticality is substandard product；If in addition adjacent graphite boat piece can be easily placed in spacing detection slot,
Then be spacing between the adjoining graphite boat piece of graphite boat be it is qualified, otherwise to be unqualified, not only reduce using the above structure
The labor intensity of testing staff, and also improve the detection efficiency of graphite boat, at the same can also accurate detection go out graphite boat
Verticality and spacing.
Basic principles, main features, and advantages of the present invention has been shown and described above.Current row
The technical staff of industry is described in above embodiments and description it should be appreciated that the present utility model is not limited to the above embodiments
Only illustrate the principles of the present invention, the utility model can also on the premise of not departing from the spirit and scope of the utility model
There are various changes and modifications, these various changes and improvements fall within the scope of the claimed invention.The utility model is wanted
Protection scope is asked to be defined by appended claims and its equivalent.
Claims (2)
1. a kind of for detecting the rapid detection tool of graphite boat verticality and spacing, including bottom plate, which is characterized in that in institute
Bottom plate is stated equipped with mounting plate, multiple spacing detection items are equipped at intervals with along its length on the mounting plate, in the inspection
It is equipped at intervals with along its length on the upper surface of survey item multiple for detecting between the adjacent two panels graphite boat piece of graphite boat
Spacing whether He Ge spacing detection slot；
Multiple mounting rods are equipped at intervals between the bottom plate and mounting plate and along the length direction of bottom plate, the one of the mounting rod
End is concordant with the side of bottom plate, and measuring for verticality bracket is equipped on the other end of the mounting rod, examines in the verticality
Survey bracket be equipped with for detect graphite boat verticality whether He Ge measuring for verticality item.
2. as described in claim 1 a kind of for detecting the rapid detection tool of graphite boat verticality and spacing, feature
It is: is equipped with mounting base in the lower end of the measuring for verticality bracket, offers waist along its length in the mounting base
Shape adjustment hole offers mounting hole corresponding with kidney-shaped adjustment hole on the other end of the mounting rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821771557.5U CN208907790U (en) | 2018-10-30 | 2018-10-30 | It is a kind of for detecting the rapid detection tool of graphite boat verticality and spacing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821771557.5U CN208907790U (en) | 2018-10-30 | 2018-10-30 | It is a kind of for detecting the rapid detection tool of graphite boat verticality and spacing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208907790U true CN208907790U (en) | 2019-05-28 |
Family
ID=66614549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821771557.5U Active CN208907790U (en) | 2018-10-30 | 2018-10-30 | It is a kind of for detecting the rapid detection tool of graphite boat verticality and spacing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208907790U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115233194A (en) * | 2022-07-27 | 2022-10-25 | 深圳市艾特自动化有限公司 | Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat |
-
2018
- 2018-10-30 CN CN201821771557.5U patent/CN208907790U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115233194A (en) * | 2022-07-27 | 2022-10-25 | 深圳市艾特自动化有限公司 | Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat |
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