CN106835290A - Graphite boat calibrating apparatus for fixing - Google Patents
Graphite boat calibrating apparatus for fixing Download PDFInfo
- Publication number
- CN106835290A CN106835290A CN201710164102.0A CN201710164102A CN106835290A CN 106835290 A CN106835290 A CN 106835290A CN 201710164102 A CN201710164102 A CN 201710164102A CN 106835290 A CN106835290 A CN 106835290A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- limiting plate
- draw
- boat piece
- stopper slot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Charging Or Discharging (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The present invention provides a kind of graphite boat calibrating apparatus for fixing, including the platform for placing graphite boat and two calibration assemblies, it is arranged with multiple draw-in grooves for limiting graphite boat piece position on platform in parallel, two calibration assemblies are respectively arranged on the top of the graphite boat piece left and right sides, calibration assemblies include horizontally disposed first limiting plate and the second limiting plate being vertically arranged, the right angle inner side that first limiting plate and the second limiting plate are constituted is provided with multiple limited blocks vertically, adjacent two limited block and the first limiting plate and the second limiting plate enclose and set to form stopper slot, limited block is provided with chamfering near the side of stopper slot, stopper slot is coaxial with draw-in groove, spacing groove location sum amount is corresponded with draw-in groove.Two right angles of the present invention using drive device control calibration assemblies at the top of graphite boat piece, quickly limit the upper-lower position all around of each boat piece, fix boat piece position, realize automation, convenient and swift, high precision.
Description
Technical field
The present invention relates to graphite boat technical field, more particularly to a kind of graphite boat calibrating apparatus for fixing.
Background technology
Graphite boat is be arranged in parallel by several boat pieces and formed, and some ceramics poles are equipped between graphite boat, by all boats
After piece upper-lower position alignment all around, ceramics pole is brought into close contact with boat piece, and graphite boat nut is fixed with torque spanner, is fixed
Graphite boat precision will not change after taking-up.
Existing graphite boat is installed equipment and effectively can not be installed in place graphite boat, does not have accurate datum level, and benchmark
Face deviation is larger, and boat piece is installed and deviation occurs；Boat piece only relies on bottom platform draw-in groove to position, and ceramics are mingled with the middle of graphite boat
Post, after nut fixation, boat piece is not necessarily fitted completely with ceramics pole, because distance is influenceed by draw-in groove between boat, boat takes
After going out, boat piece position occurs deviation.
The content of the invention
The technical problems to be solved by the invention are：In order to overcome the shortcomings of that graphite boat installation accuracy is low in the prior art,
The present invention provides a kind of graphite boat calibrating apparatus for fixing.
The present invention solves its technical problem technical scheme to be taken：A kind of graphite boat calibrating apparatus for fixing, including
Platform and two calibration assemblies for placing graphite boat, are arranged with parallel multiple for limiting graphite boat piece position on the platform
The draw-in groove put, calibration assemblies described in two are respectively arranged on the top of the graphite boat piece left and right sides, and the calibration assemblies include water
Flat the first limiting plate for setting and the second limiting plate being vertically arranged, first limiting plate and second limiting plate are constituted
Right angle inner side be provided with multiple limited blocks vertically, limited block described in adjacent two encloses with first limiting plate and the second limiting plate
If forming stopper slot, the limited block is provided with chamfering near the side of the stopper slot, and the stopper slot is coaxial with the draw-in groove,
The spacing groove location sum amount is corresponded with the draw-in groove, and the calibration assemblies are provided with for driving the calibration assemblies
Closer or far from the drive device at graphite boat piece upper end right angle.
Platform is used to carry graphite boat, and draw-in groove is used to consolidate the front and back position of graphite boat piece bottom graphite boat piece insertion
It is fixed, keep fixed range, the first limiting plate and the second limiting plate to be used to cooperate so as to limit stone between adjoining graphite boat piece
Black boat piece upper-lower position and right position, stopper slot are used to limit the front and back position at the top of graphite boat piece, are set down on limited block
Angle is used to facilitate in graphite boat piece top right angle insertion stopper slot.Using drive device control calibration assemblies near graphite boat piece top
Two right angles in portion, quickly limit the upper-lower position all around of each boat piece, fix boat piece position, and ceramics pole is closely pasted with boat piece
Close, boat piece keeps vertical formation state, finally fixes graphite boat nut with torque spanner, graphite boat precision is not after fixing taking-up
Can change, realize automation, convenient and swift, high precision.
Further, in order that graphite boat piece can be inserted smoothly in stopper slot and draw-in groove, and graphite boat piece will not be in limit
Wobble effects precision in position groove and draw-in groove, the stopper slot and the draw-in groove width are slightly larger than the graphite boat piece width.
The beneficial effects of the invention are as follows：A kind of graphite boat calibrating apparatus for fixing that the present invention is provided, using drive device control
Two right angles of the calibration assemblies processed at the top of graphite boat piece, quickly limit the upper-lower position all around of each boat piece, make boat piece position
Fixation is put, ceramics pole is brought into close contact with boat piece, boat piece keeps vertical formation state, finally fixes graphite boat spiral shell with torque spanner
Mother, graphite boat precision will not change after fixing taking-up, realize automation, convenient and swift, high precision.
Brief description of the drawings
The invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the structural representation of preferred embodiment；
Fig. 2 is the structural representation of calibration assemblies.
In figure：1st, platform, 2, draw-in groove, 3, calibration assemblies, the 4, first limiting plate, the 5, second limiting plate, 6, limited block, 7, limit
Position groove, 8, graphite boat piece, 9, ceramics pole, 10, cylinder.
Specific embodiment
Presently in connection with accompanying drawing, the present invention is described in detail.This figure is simplified schematic diagram, is only illustrated in a schematic way
Basic structure of the invention, therefore it only shows the composition relevant with the present invention.
As shown in Figure 1-2, a kind of graphite boat calibrating apparatus for fixing of the invention, including for the platform 1 of placing graphite boat
With two calibration assemblies 3, multiple draw-in grooves 2 for limiting the position of graphite boat piece 8 are arranged with the platform 1 in parallel, described in two
Calibration assemblies 3 are respectively arranged on the top of the left and right sides of the graphite boat piece 8, and the calibration assemblies 3 include horizontally disposed first
Limiting plate 4 and the second limiting plate 5 being vertically arranged, first limiting plate 4 and the integrally connected of the second limiting plate 5, it is described
The right angle inner side that first limiting plate 4 and second limiting plate 5 are constituted is provided with multiple limited blocks 6 vertically, described in adjacent two
Limited block 6 encloses to set to form stopper slot 7 with the limiting plate 5 of first limiting plate 4 and second, and the limited block 6 is near described spacing
The side of groove 7 is provided with chamfering, and the stopper slot 7 is coaxial with the draw-in groove 2, the position of stopper slot 7 and quantity and the draw-in groove 2
Correspond, the calibration assemblies 3 are provided with for driving the calibration assemblies 3 closer or far from the upper end right angle of graphite boat piece 8
Drive device, the drive device be cylinder 10.
The stopper slot 7 and the width of the draw-in groove 2 are slightly larger than the width of the graphite boat piece 8.
Operation principle：
Graphite boat is placed on the platform 1, by the bottom of graphite boat piece 8 in the draw-in groove 2, before and after making the bottom of graphite boat piece 8
Position is fixed, and cylinder 10 drives calibration assemblies 3 near two right angles of the top both sides of graphite boat piece 8, the top both sides of graphite boat piece 8
Two right angles insertion stopper slot 7 after, limit the front and back position at the top of graphite boat piece 8, and graphite boat piece 8 upper-lower position
And right position, finally fix the position of graphite boat piece 8, ceramics pole 9 is brought into close contact with graphite boat piece 8, and graphite boat keeps vertical
Formation state, finally fixes graphite boat nut with torque spanner, fixes graphite boat after taking-up, and graphite boat precision will not become
Change.
With above-mentioned according to desirable embodiment of the invention as enlightenment, by above-mentioned description, related staff
Various changes and amendments can be carried out in without departing from the scope of the present invention completely.The technical scope of this invention is not
It is confined to the content on specification, it is necessary to its technical scope is determined according to right.
Claims (2)
1. a kind of graphite boat calibrating apparatus for fixing, it is characterised in that：Calibrated including the platform (1) for placing graphite boat and two
Component (3), is arranged with multiple draw-in grooves (2) for limiting graphite boat piece (8) position, school described in two in parallel on the platform (1)
Prospective component (3) is respectively arranged on the top of the graphite boat piece (8) left and right sides, and the calibration assemblies (3) are including horizontally disposed
First limiting plate (4) and the second limiting plate (5) being vertically arranged, first limiting plate (4) and second limiting plate (5) institute
The right angle inner side of composition is provided with multiple limited blocks (6) vertically, limited block (6) described in adjacent two and first limiting plate (4)
Enclosed with the second limiting plate (5) and set to form stopper slot (7), the limited block (6) is provided with down near the side of the stopper slot (7)
Angle, the stopper slot (7) is coaxial with the draw-in groove (2), a pair of stopper slot (7) position and quantity and the draw-in groove (2)
Should, the calibration assemblies (3) are provided with for driving the calibration assemblies (3) closer or far from graphite boat piece (8) upper end right angle
Drive device.
2. graphite boat calibrating apparatus for fixing as claimed in claim 1, it is characterised in that：The stopper slot (7) and the draw-in groove
(2) width is slightly larger than the graphite boat piece (8) width.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710164102.0A CN106835290B (en) | 2017-03-20 | 2017-03-20 | Graphite boat installation calibrating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710164102.0A CN106835290B (en) | 2017-03-20 | 2017-03-20 | Graphite boat installation calibrating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106835290A true CN106835290A (en) | 2017-06-13 |
| CN106835290B CN106835290B (en) | 2023-04-25 |
Family
ID=59129298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710164102.0A Active CN106835290B (en) | 2017-03-20 | 2017-03-20 | Graphite boat installation calibrating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106835290B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112382701A (en) * | 2020-11-05 | 2021-02-19 | 山西潞安太阳能科技有限责任公司 | Method for calibrating tubular PECVD graphite boat |
| CN115233194A (en) * | 2022-07-27 | 2022-10-25 | 深圳市艾特自动化有限公司 | Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102214592A (en) * | 2011-04-01 | 2011-10-12 | 石金精密科技（深圳）有限公司 | Assembling method for graphite boat location column |
| CN103137783A (en) * | 2011-12-05 | 2013-06-05 | 浚鑫科技股份有限公司 | Solar cell graphite boat electrode holder and solar cell graphite boat |
| CN206654967U (en) * | 2017-03-20 | 2017-11-21 | 常州亿晶光电科技有限公司 | Graphite boat calibrating apparatus for fixing |
-
2017
- 2017-03-20 CN CN201710164102.0A patent/CN106835290B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102214592A (en) * | 2011-04-01 | 2011-10-12 | 石金精密科技（深圳）有限公司 | Assembling method for graphite boat location column |
| CN103137783A (en) * | 2011-12-05 | 2013-06-05 | 浚鑫科技股份有限公司 | Solar cell graphite boat electrode holder and solar cell graphite boat |
| CN206654967U (en) * | 2017-03-20 | 2017-11-21 | 常州亿晶光电科技有限公司 | Graphite boat calibrating apparatus for fixing |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112382701A (en) * | 2020-11-05 | 2021-02-19 | 山西潞安太阳能科技有限责任公司 | Method for calibrating tubular PECVD graphite boat |
| CN112382701B (en) * | 2020-11-05 | 2022-03-15 | 山西潞安太阳能科技有限责任公司 | Method for calibrating tubular PECVD graphite boat |
| CN115233194A (en) * | 2022-07-27 | 2022-10-25 | 深圳市艾特自动化有限公司 | Automatic equipment for realizing full-automatic calibration, locking and detection of graphite boat |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106835290B (en) | 2023-04-25 |
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