CN206282828U - Pipe P graphite boat installation calibrating equipment - Google Patents
Pipe P graphite boat installation calibrating equipment Download PDFInfo
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- CN206282828U CN206282828U CN201621355245.7U CN201621355245U CN206282828U CN 206282828 U CN206282828 U CN 206282828U CN 201621355245 U CN201621355245 U CN 201621355245U CN 206282828 U CN206282828 U CN 206282828U
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Abstract
The utility model provides a kind of pipe P graphite boats installation calibrating equipment, including the first calibration system, second calibration system and the 3rd calibration system, first calibration system includes side datum plate, first panel and the first drive mechanism, first panel is respectively arranged on both sides before and after graphite boat with side datum plate, first driving mechanisms control first panel is closer or far from side datum plate, second calibration system includes baffle plate, second panel and the second drive mechanism, second panel is respectively arranged on the graphite boat left and right sides with baffle plate, second driving mechanisms control second panel is closer or far from baffle plate, 3rd calibration system includes platform, 3rd panel and the 3rd drive mechanism, 3rd panel is located at platform top, 3rd panel is respectively arranged on the upper and lower both sides of graphite boat with platform.The utility model greatly improves pipe P graphite boat installation accuracies using the first calibration system, the second calibration system and the 3rd calibration system so that installation process has benchmark efficient.
Description
Technical field
The utility model is related to graphite boat technical field, more particularly to a kind of pipe P graphite boats installation calibrating equipment.
Background technology
Pipe P graphite boats are be arranged in parallel by several boat pieces and formed, and some ceramics poles are equipped between graphite boat, will owned
After the upper-lower position alignment all around of boat piece, ceramics pole is brought into close contact with boat piece, and graphite boat nut is fixed with torque spanner, fixed
Graphite boat precision will not change after good taking-up.
Existing graphite boat is installed equipment and effectively can not be installed in place graphite boat, does not have accurate datum level, and benchmark
Face deviation is larger, and boat piece is installed and deviation occurs；Boat piece only relies on bottom platform draw-in groove to position, and ceramics are mingled with the middle of graphite boat
Post, after nut fixation, boat piece is not necessarily fitted completely with ceramics pole, because distance is influenceed by draw-in groove between boat, boat takes
After going out, boat piece position occurs deviation.
Utility model content
Technical problem to be solved in the utility model is：In order to overcome pipe P graphite boats installation accuracy in the prior art low
Deficiency, the utility model provides a kind of pipe P graphite boats installation calibrating equipment.
The utility model solves its technical problem technical scheme to be taken：A kind of pipe P graphite boat installation calibratings set
It is standby, including for limit pipe P graphite boat front and back positions the first calibration system, for limit pipe P graphite boat right positions
Two calibration systems and the 3rd calibration system for limiting pipe P graphite boat upper-lower positions, first calibration system include side
Datum plate, first panel and the first drive mechanism, the first panel are respectively arranged on the pipe P graphite with the side datum plate
Before and after boat both sides and it is front and rear be oppositely arranged, and the first panel is parallel with the side datum plate, first drive mechanism
The first panel is controlled closer or far from the side datum plate, second calibration system include baffle plate, second panel and
Second drive mechanism, the second panel and the baffle plate are respectively arranged on the pipe P graphite boats left and right sides and left and right is relative sets
Put, and the second panel is parallel with the baffle plate, second panel is closer or far from institute described in second driving mechanisms control
Baffle plate is stated, the 3rd calibration system includes platform, the 3rd panel and the 3rd drive mechanism, and the 3rd panel is located at described flat
Platform top, the 3rd panel is respectively arranged on the upper and lower both sides of pipe P graphite boats and is oppositely arranged up and down with the platform, and institute
The 3rd panel and the platform parallel are stated, the 3rd panel is closer or far from the platform described in the 3rd driving mechanisms control.
Pipe P graphite boats are placed on platform, boat piece side be arranged in parallel with side datum plate, using the first calibration system
The first driving mechanisms control first panel push pipe P graphite boats to side datum plate, it is ensured that all boat pieces are vertical with platform, limit
Tubulation P graphite boat front and back positions；The second driving mechanisms control second panel using the second calibration system pushes pipe P graphite boats to
Baffle plate, it is ensured that all boat piece right positions are consistent, limits pipe P graphite boat right positions；Using the 3rd drive of the 3rd calibration system
The dynamic panel of mechanism controls the 3rd pushes pipe P graphite boats to platform, it is ensured that all boat piece upper-lower positions are consistent, limits pipe P graphite boats
Upper-lower position；Circulated by three drive mechanisms and promote boat piece, finally fix boat piece position, ceramics pole is closely pasted with boat piece
Close, boat piece keeps vertical formation state, finally fixes graphite boat nut with torque spanner, graphite boat precision is not after fixing taking-up
Can change.
Further, first calibration system also includes first support, guide post and fairlead, the first support and institute
State side datum plate to be oppositely arranged, first drive mechanism is fixedly connected with the first support, in the first panel
Be provided with some fairleads, the first support is provided with the guide post being engaged with the fairlead, the guide post with it is described
Fairlead position and quantity are corresponded, and the guide post is slidably connected with the fairlead.
First drive mechanism and guide post are fixed using first support, fairlead are set in first panel, guide post with lead
Coordinate to set, guide support effect is played to first panel, prevent drive mechanism from occurring when active force is applied to pipe P graphite boats
Deformation, influences the installation accuracy of pipe P graphite boats.
Further, second calibration system also includes second support, guide post and fairlead, the second support and institute
State baffle plate to be oppositely arranged, second drive mechanism is fixedly connected with the second support, if the second panel is provided with
Dry fairlead, the second support is provided with the guide post being engaged with the fairlead, the guide post and the fairlead
Position and quantity are corresponded, and the guide post is slidably connected with the fairlead.
Second drive mechanism and guide post are fixed using second support, fairlead are set in second panel, guide post with lead
Coordinate to set, guide support effect is played to second panel, prevent drive mechanism from occurring when active force is applied to pipe P graphite boats
Deformation, influences the installation accuracy of pipe P graphite boats.
Further, width of the length of the second panel fore-and-aft direction more than or equal to the fore-and-aft direction of pipe P graphite boats.
Ensure that each boat piece can limit right position by second panel on pipe P graphite boats.
Further, the 3rd calibration system also includes the 3rd support, and the 3rd support is oppositely arranged with the platform,
The 3rd drive mechanism is fixedly connected with 3rd support.3rd drive mechanism is fixed using the 3rd support.
Further, width of the length of the 3rd panel fore-and-aft direction more than or equal to the fore-and-aft direction of pipe P graphite boats.
Ensure that each boat piece can limit upper-lower position by the 3rd panel on pipe P graphite boats.
Further, also including base, the base is provided with the platform, side datum plate and baffle plate.Base is to first
Calibration system, the second calibration system and the 3rd calibration system play Auxiliary support effect.
Further, first drive mechanism, the second drive mechanism and the 3rd drive mechanism are cylinder.
The beneficial effects of the utility model are：A kind of pipe P graphite boats installation calibrating equipment that the utility model is provided, uses
First calibration system, the second calibration system and the 3rd calibration system greatly improve pipe P graphite boat installation accuracies so that installation process
There is benchmark efficient.
Brief description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and examples.
Fig. 1 is the structural representation of the utility model most preferred embodiment；
Fig. 2 is three dimensional structure diagram of the present utility model；
Fig. 3 is the structural representation of pipe P graphite boats.
In figure：1st, platform, 2, side datum plate, 3, baffle plate, 4-1, first panel, 4-2, second panel, 4-3, the 3rd face
Plate, 5-1, the first drive mechanism, 5-2, the second drive mechanism, 5-3, the 3rd drive mechanism, 6-1, first support, 6-2, second
Frame, 6-3, the 3rd support, 7, guide post, 8, fairlead, 9, pipe P graphite boats, 9-1, boat piece, 10, ceramics pole, 11, base.
Specific embodiment
The utility model is described in detail presently in connection with accompanying drawing.This figure is simplified schematic diagram, only in a schematic way
Basic structure of the present utility model is illustrated, therefore it only shows the composition relevant with the utility model.
As Figure 1-3, a kind of pipe P graphite boats installation calibrating equipment of the present utility model, including for limiting pipe P graphite
First calibration system of the front and back position of boat 9, the second calibration system for limiting the right position of pipe P graphite boats 9 and for limiting
3rd calibration system of the upper-lower position of pipe P graphite boats 9, first calibration system includes side datum plate 2, first panel 4-1
It is respectively arranged on before and after the pipe P graphite boats 9 with the side datum plate 2 with the first drive mechanism 5-1, the first panel 4-1
Both sides, and the first panel 4-1 is parallel with the side datum plate 2, the first drive mechanism 5-1 controls first face
Closer or far from the side datum plate 2, second calibration system includes that baffle plate 3, second panel 4-2 and second drive to plate 4-1
Motivation structure 5-2, the second panel 4-2 are respectively arranged on the left and right sides of pipe P graphite boats 9, and described second with the baffle plate 3
Panel 4-2 is parallel with the baffle plate 3, and the second drive mechanism 5-2 controls the second panel 4-2 closer or far from the gear
Plate 3, the 3rd calibration system includes platform 1, the 3rd panel 4-3 and the 3rd drive mechanism 5-3, and the 3rd panel 4-3 sets
In the top of the platform 1, the 3rd panel 4-3 is respectively arranged on the pipe P graphite boats with the platform 1, and about 9 both sides, and institute
State the 3rd panel 4-3 parallel with the platform 1, the 3rd drive mechanism 5-3 control the 3rd panel 4-3 closer or far from
The platform 1.
First calibration system also include first support 6-1, guide post 7 and fairlead 8, the first support 6-1 with
The side datum plate 2 is oppositely arranged, and the first drive mechanism 5-1, described are fixedly connected with the first support 6-1
Two fairleads 8 are uniformly provided with one panel 4-1, the first support 6-1 is provided with the guiding being engaged with the fairlead 8
Bar 7, the guide post 7 is corresponded with the position of the fairlead 8 and quantity, and the guide post 7 is slided with the fairlead 8 and connected
Connect.
Second calibration system also include second support 6-2, guide post 7 and fairlead 8, the second support 6-2 with
The baffle plate 3 is oppositely arranged, and the second drive mechanism 5-2, the second panel are fixedly connected with the second support 6-2
Two fairleads 8 are uniformly provided with 4-2, the second support 6-2 is provided with the guide post 7 being engaged with the fairlead 8, institute
State guide post 7 to be corresponded with the position of the fairlead 8 and quantity, the guide post 7 is slidably connected with the fairlead 8.
Width of the length of the second panel 4-2 fore-and-aft directions more than the fore-and-aft direction of pipe P graphite boats 9.
3rd calibration system also includes that the 3rd support 6-3, the 3rd support 6-3 are oppositely arranged with the platform 1,
The 3rd drive mechanism 5-3 is fixedly connected with the 3rd support 6-3.
Width of the length of the 3rd panel 4-3 fore-and-aft directions more than the fore-and-aft direction of pipe P graphite boats 9.
Also include base 11, the base 11 is provided with the platform 1, side datum plate 2 and baffle plate 3, the platform 1,
Side datum plate 2 and baffle plate 3 are mutually perpendicular between any two.
The first drive mechanism 5-1, the second drive mechanism 5-2 and the 3rd drive mechanism 5-3 are cylinder.
The course of work：
Pipe P graphite boats 9 are placed on the platform 1, boat piece 9-1 sides are oppositely arranged with side datum plate 2, using the first school
The first drive mechanism 5-1 control first panel 4-1 movements of Barebone, fairlead 8 is slidably connected with guide post 7, first panel
4-1 pushes pipe P graphite boats 9 to side datum plate 2 along guide post 7, it is ensured that all boat piece 9-1 are vertical with platform 1, limitation pipe P
The front and back position of graphite boat 9；Moved using the second drive mechanism 5-2 control second panels 4-2 of the second calibration system, fairlead 8
It is slidably connected with guide post 7, second panel 4-2 pushes pipe P graphite boats 9 to baffle plate 3 along guide post 7, it is ensured that all boat piece 9-1
Right position is consistent, the right position of limitation pipe P graphite boats 9；The 3rd is controlled using the 3rd drive mechanism 5-3 of the 3rd calibration system
Panel 4-3 pushes pipe P graphite boats 9 to platform 1, it is ensured that all boat piece 9-1 upper-lower positions are consistent, the next on limitation pipe P graphite boats 9
Put；Circulated by three drive mechanisms and promote boat piece 9-1, finally fix boat piece 9-1 positions, ceramics pole 10 is tight with boat piece 9-1
Closely connected conjunction, boat piece 9-1 keeps vertical formation state, finally fixes graphite boat nut with torque spanner, fixes pipe P stones after taking-up
The precision of black boat 9 will not change.
With above-mentioned according to desirable embodiment of the present utility model as enlightenment, by above-mentioned description, related work
Personnel can carry out various changes and amendments in the range of without departing from the utility model completely.This utility model
Technical scope is not limited to the content on specification, it is necessary to its technical scope is determined according to right.
Claims (8)
1. a kind of pipe P graphite boats installation calibrating equipment, it is characterised in that：Including for limiting pipe P graphite boat (9) front and back position
First calibration system, the second calibration system for limiting pipe P graphite boat (9) right position and for limiting pipe P graphite boats (9)
3rd calibration system of upper-lower position, first calibration system includes side datum plate (2), first panel (4-1) and first
Drive mechanism (5-1), before the first panel (4-1) is respectively arranged on the pipe P graphite boats (9) with the side datum plate (2)
Afterwards both sides and it is front and rear be oppositely arranged, and the first panel (4-1) is parallel with the side datum plate (2), and described first drives
Mechanism (5-1) controls the first panel (4-1) closer or far from the side datum plate (2), the second calibration system bag
Baffle plate (3), second panel (4-2) and the second drive mechanism (5-2) are included, the second panel (4-2) is with the baffle plate (3) respectively
It is oppositely arranged located at pipe P graphite boats (9) left and right sides and left and right, and the second panel (4-2) and the baffle plate (3) are flat
OK, second drive mechanism (5-2) controls the second panel (4-2) closer or far from the baffle plate (3), the 3rd school
Barebone includes platform (1), the 3rd panel (4-3) and the 3rd drive mechanism (5-3), and the 3rd panel (4-3) is located at described
Platform (1) top, the 3rd panel (4-3) and the platform (1) be respectively arranged on the pipe P graphite boats (9) up and down both sides and
It is oppositely arranged up and down, and the 3rd panel (4-3) is parallel with the platform (1), the 3rd drive mechanism (5-3) controls institute
The 3rd panel (4-3) is stated closer or far from the platform (1).
2. pipe P graphite boats installation calibrating equipment as claimed in claim 1, it is characterised in that：First calibration system is also wrapped
First support (6-1), guide post (7) and fairlead (8) are included, the first support (6-1) is relative with the side datum plate (2)
Set, first drive mechanism (5-1) is fixedly connected with the first support (6-1), set on the first panel (4-1)
There are some fairleads (8), the first support (6-1) is provided with the guide post (7) being engaged with the fairlead (8), described
Guide post (7) is corresponded with the fairlead (8) position and quantity, and the guide post (7) is slided with the fairlead (8) and connected
Connect.
3. pipe P graphite boats installation calibrating equipment as claimed in claim 1, it is characterised in that：Second calibration system is also wrapped
Second support (6-2), guide post (7) and fairlead (8) are included, the second support (6-2) is oppositely arranged with the baffle plate (3),
Second drive mechanism (5-2) is fixedly connected with the second support (6-2), the second panel (4-2) is if be provided with
Dry fairlead (8), the second support (6-2) is provided with the guide post (7) being engaged with the fairlead (8), the guiding
Bar (7) is corresponded with the fairlead (8) position and quantity, and the guide post (7) is slidably connected with the fairlead (8).
4. pipe P graphite boats installation calibrating equipment as claimed in claim 3, it is characterised in that：Before and after the second panel (4-2)
The width of fore-and-aft direction of the length in direction more than or equal to pipe P graphite boats (9).
5. pipe P graphite boats installation calibrating equipment as claimed in claim 1, it is characterised in that：3rd calibration system is also wrapped
The 3rd support (6-3) is included, the 3rd support (6-3) is oppositely arranged with the platform (1), it is solid on the 3rd support (6-3)
Surely it is connected with the 3rd drive mechanism (5-3).
6. pipe P graphite boats installation calibrating equipment as claimed in claim 5, it is characterised in that：Before and after 3rd panel (4-3)
The width of fore-and-aft direction of the length in direction more than or equal to pipe P graphite boats (9).
7. pipe P graphite boats installation calibrating equipment as claimed in claim 1, it is characterised in that：Also include base (11), the bottom
Seat (11) is provided with the platform (1), side datum plate (2) and baffle plate (3).
8. pipe P graphite boats installation calibrating equipment as claimed in claim 1, it is characterised in that：First drive mechanism (the 5-
1), the second drive mechanism (5-2) and the 3rd drive mechanism (5-3) are cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621355245.7U CN206282828U (en) | 2016-12-09 | 2016-12-09 | Pipe P graphite boat installation calibrating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621355245.7U CN206282828U (en) | 2016-12-09 | 2016-12-09 | Pipe P graphite boat installation calibrating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206282828U true CN206282828U (en) | 2017-06-27 |
Family
ID=59074786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621355245.7U Active CN206282828U (en) | 2016-12-09 | 2016-12-09 | Pipe P graphite boat installation calibrating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206282828U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112382701A (en) * | 2020-11-05 | 2021-02-19 | 山西潞安太阳能科技有限责任公司 | Method for calibrating tubular PECVD graphite boat |
-
2016
- 2016-12-09 CN CN201621355245.7U patent/CN206282828U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112382701A (en) * | 2020-11-05 | 2021-02-19 | 山西潞安太阳能科技有限责任公司 | Method for calibrating tubular PECVD graphite boat |
| CN112382701B (en) * | 2020-11-05 | 2022-03-15 | 山西潞安太阳能科技有限责任公司 | Method for calibrating tubular PECVD graphite boat |
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