CN206654967U - Graphite boat calibrating apparatus for fixing - Google Patents
Graphite boat calibrating apparatus for fixing Download PDFInfo
- Publication number
- CN206654967U CN206654967U CN201720267873.8U CN201720267873U CN206654967U CN 206654967 U CN206654967 U CN 206654967U CN 201720267873 U CN201720267873 U CN 201720267873U CN 206654967 U CN206654967 U CN 206654967U
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- limiting plate
- stopper slot
- boat piece
- calibration assemblies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a kind of graphite boat calibrating apparatus for fixing, including the platform for placing graphite boat and two calibration assemblies, it is arranged with multiple necks for being used to limit graphite boat piece position on platform in parallel, two calibration assemblies are respectively arranged on the top at left and right sides of graphite boat piece, calibration assemblies include horizontally disposed first limiting plate and the second limiting plate being vertically arranged, multiple limited blocks are provided with vertically on the inside of the right angle that first limiting plate and the second limiting plate are formed, adjacent two limited blocks and the first limiting plate and the second limiting plate enclose and set to form stopper slot, limited block is provided with chamfering close to the side of stopper slot, stopper slot is coaxial with neck, spacing groove location sum amount corresponds with neck.Two right angles of the utility model using drive device control calibration assemblies at the top of graphite boat piece, quickly limit the upper-lower position all around of each boat piece, fix boat piece position, realize automation, convenient and swift, precision is high.
Description
Technical field
Graphite boat technical field is the utility model is related to, more particularly to a kind of graphite boat calibrating apparatus for fixing.
Background technology
Graphite boat is be arranged in parallel by several boat pieces and formed, and some ceramics poles are equipped between graphite boat, by all boats
After piece upper-lower position alignment all around, ceramics pole is brought into close contact with boat piece, is fixed graphite boat nut with torque spanner, is fixed
Graphite boat precision will not change after taking-up.
Graphite boat effectively can not be installed in place by existing graphite boat installation equipment, without accurate reference plane, and benchmark
Face deviation is larger, and deviation occurs in the installation of boat piece；Boat piece only relies on bottom platform neck to position, and ceramics are mingled among graphite boat
Post, after nut fixation, boat piece is not necessarily bonded completely with ceramics pole, because distance is influenceed by neck between boat, boat takes
After going out, deviation occurs in boat piece position.
Utility model content
Technical problem to be solved in the utility model is：In order to overcome in the prior art graphite boat installation accuracy it is low not
Foot, the utility model provide a kind of graphite boat calibrating apparatus for fixing.
The utility model solves its technical problem technical scheme to be taken：A kind of graphite boat calibrating apparatus for fixing,
Including the platform for placing graphite boat and two calibration assemblies, it is arranged with parallel on the platform multiple for limiting graphite boat
The neck of piece position, two calibration assemblies are respectively arranged on the top at left and right sides of the graphite boat piece, the calibration assemblies bag
Include horizontally disposed first limiting plate and the second limiting plate being vertically arranged, first limiting plate and the second limiting plate institute
Multiple limited blocks are provided with vertically on the inside of the right angle of composition, and adjacent two limited blocks and first limiting plate and second are spacing
Plate, which encloses, to be set to form stopper slot, and the limited block is provided with chamfering, the stopper slot and the neck close to the side of the stopper slot
Coaxially, the spacing groove location sum amount is corresponded with the neck, and the calibration assemblies, which are provided with, to be used to drive the school
Drive device of the prospective component closer or far from graphite boat piece upper end right angle.
Platform is used to carry graphite boat, and neck is used to consolidate the front and back position of graphite boat piece bottom graphite boat piece insertion
It is fixed, fixed range is kept between adjoining graphite boat piece, the first limiting plate and the second limiting plate are used to cooperate so as to limit stone
Black boat piece upper-lower position and right position, stopper slot are used to limit the front and back position at the top of graphite boat piece, set down on limited block
Angle is used to facilitate at the top of graphite boat piece in right angle insertion stopper slot.Calibration assemblies are controlled close to graphite boat piece top using drive device
Two right angles in portion, the upper-lower position all around of each boat piece is quickly limited, fix boat piece position, ceramics pole closely pastes with boat piece
Close, boat piece keeps vertical formation state, finally fixes graphite boat nut with torque spanner, and graphite boat precision is not after fixing taking-up
It can change, realize automation, convenient and swift, precision is high.
Further, in order that graphite boat piece can be inserted smoothly in stopper slot and neck, and graphite boat piece will not limit
Wobble effects precision in position groove and neck, the stopper slot and the neck width are slightly larger than the graphite boat piece width.
The beneficial effects of the utility model are：A kind of graphite boat calibrating apparatus for fixing provided by the utility model, using drive
Two right angles of the dynamic device control calibration assemblies at the top of graphite boat piece, the upper-lower position all around of each boat piece is quickly limited,
Fix boat piece position, ceramics pole is brought into close contact with boat piece, and boat piece keeps vertical formation state, finally with torque spanner anchor stone
Black boat nut, graphite boat precision will not change after fixing taking-up, realize automation, and convenient and swift, precision is high.
Brief description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and examples.
Fig. 1 is the structural representation of the best embodiment of the utility model；
Fig. 2 is the structural representation of calibration assemblies.
In figure：1st, platform, 2, neck, 3, calibration assemblies, the 4, first limiting plate, the 5, second limiting plate, 6, limited block, 7, limit
Position groove, 8, graphite boat piece, 9, ceramics pole, 10, cylinder.
Embodiment
The utility model is described in detail presently in connection with accompanying drawing.This figure is simplified schematic diagram, only in a schematic way
Illustrate basic structure of the present utility model, therefore it only shows the composition relevant with the utility model.
As shown in Figure 1-2, a kind of graphite boat calibrating apparatus for fixing of the present utility model, including for the flat of placing graphite boat
Platform 1 and two calibration assemblies 3, it is arranged with multiple necks 2 for being used to limit the position of graphite boat piece 8, two institutes on the platform 1 in parallel
State the top that calibration assemblies 3 are respectively arranged on the left and right sides of the graphite boat piece 8, the calibration assemblies 3 include horizontally disposed the
One limiting plate 4 and the second limiting plate 5 being vertically arranged, first limiting plate 4 and the integrally connected of the second limiting plate 5, institute
State and be provided with multiple limited blocks 6, adjacent two institute vertically on the inside of the right angle that the first limiting plate 4 and second limiting plate 5 are formed
State limited block 6 and the limiting plate 5 of the first limiting plate 4 and second encloses and sets to form stopper slot 7, the limited block 6 is close to the limit
The side of position groove 7 is provided with chamfering, and the stopper slot 7 and the neck 2 are coaxial, the position of stopper slot 7 and quantity and the card
Groove 2 is corresponded, and the calibration assemblies 3, which are provided with, to be used to drive the calibration assemblies 3 straight closer or far from the upper end of graphite boat piece 8
The drive device at angle, the drive device are cylinder 10.
Stopper slot 7 and the neck 2 width is slightly larger than the width of graphite boat piece 8.
Operation principle：
Graphite boat is placed on the platform 1, by the bottom of graphite boat piece 8 in the neck 2, before and after making the bottom of graphite boat piece 8
Position is fixed, and cylinder 10 drives calibration assemblies 3 close to two right angles of the top both sides of graphite boat piece 8, the top both sides of graphite boat piece 8
Two right angles insertion stopper slot 7 after, limit the front and back position at the top of graphite boat piece 8, and the upper-lower position of graphite boat piece 8
And right position, finally fix the position of graphite boat piece 8, ceramics pole 9 is brought into close contact with graphite boat piece 8, and graphite boat keeps vertical
Formation state, graphite boat nut finally is fixed with torque spanner, fix graphite boat after taking-up, graphite boat precision will not become
Change.
Using it is above-mentioned according to desirable embodiment of the present utility model as enlightenment, by above-mentioned description, related work
Personnel can carry out various changes and amendments in without departing from the scope of the utility model completely.This item utility model
Technical scope is not limited to the content on specification, it is necessary to determines its technical scope according to right.
Claims (2)
- A kind of 1. graphite boat calibrating apparatus for fixing, it is characterised in that：Calibrated including the platform (1) for placing graphite boat and two Component (3), it is arranged with multiple necks (2) for being used to limit graphite boat piece (8) position, two schools on the platform (1) in parallel Prospective component (3) is respectively arranged on the top at left and right sides of the graphite boat piece (8), and the calibration assemblies (3) include horizontally disposed First limiting plate (4) and the second limiting plate (5) being vertically arranged, first limiting plate (4) and second limiting plate (5) institute Multiple limited blocks (6), adjacent two limited block (6) and first limiting plate (4) are provided with the inside of the right angle of composition vertically Enclosed with the second limiting plate (5) and set to form stopper slot (7), the limited block (6) is provided with close to the side of the stopper slot (7) Angle, the stopper slot (7) and the neck (2) coaxially, a pair of stopper slot (7) position and quantity and the neck (2) 1 Should, the calibration assemblies (3), which are provided with, to be used to drive the calibration assemblies (3) closer or far from graphite boat piece (8) upper end right angle Drive device.
- 2. graphite boat calibrating apparatus for fixing as claimed in claim 1, it is characterised in that：The stopper slot (7) and the neck (2) width is slightly larger than the graphite boat piece (8) width.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720267873.8U CN206654967U (en) | 2017-03-20 | 2017-03-20 | Graphite boat calibrating apparatus for fixing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720267873.8U CN206654967U (en) | 2017-03-20 | 2017-03-20 | Graphite boat calibrating apparatus for fixing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206654967U true CN206654967U (en) | 2017-11-21 |
Family
ID=60316592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720267873.8U Withdrawn - After Issue CN206654967U (en) | 2017-03-20 | 2017-03-20 | Graphite boat calibrating apparatus for fixing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206654967U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106835290A (en) * | 2017-03-20 | 2017-06-13 | 常州亿晶光电科技有限公司 | Graphite boat calibrating apparatus for fixing |
| CN112382701A (en) * | 2020-11-05 | 2021-02-19 | 山西潞安太阳能科技有限责任公司 | Method for calibrating tubular PECVD graphite boat |
-
2017
- 2017-03-20 CN CN201720267873.8U patent/CN206654967U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106835290A (en) * | 2017-03-20 | 2017-06-13 | 常州亿晶光电科技有限公司 | Graphite boat calibrating apparatus for fixing |
| CN112382701A (en) * | 2020-11-05 | 2021-02-19 | 山西潞安太阳能科技有限责任公司 | Method for calibrating tubular PECVD graphite boat |
| CN112382701B (en) * | 2020-11-05 | 2022-03-15 | 山西潞安太阳能科技有限责任公司 | Method for calibrating tubular PECVD graphite boat |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204213569U (en) | For large-scale projection equipment slip fixing device | |
| CN206654967U (en) | Graphite boat calibrating apparatus for fixing | |
| CN207327308U (en) | A kind of glass punching support device that can easily be accommodated | |
| CN106835290A (en) | Graphite boat calibrating apparatus for fixing | |
| CN204167413U (en) | A kind of anti-overvoltage concora crush fixture | |
| CN109269384B (en) | Cylinder jacket hole diameter measuring device | |
| CN204142405U (en) | Threaded moulding torque force measuring device | |
| CN105268651A (en) | Integrated circuit sorting machine test device | |
| CN211087706U (en) | Butterfly specimen preparation auxiliary device | |
| CN206282828U (en) | Pipe P graphite boat installation calibrating equipment | |
| CN205363813U (en) | Albedometer rapid survey auxiliary positioning device | |
| CN205028011U (en) | Crystal filling machine | |
| CN211726420U (en) | Guide mechanism for liquid crystal display production line | |
| CN206588833U (en) | A kind of engine test load wall | |
| CN206311053U (en) | A kind of improved flatness checking device | |
| CN105817993B (en) | A kind of grinding clamp device suitable for cloud computing multi-core connector | |
| CN214224075U (en) | Combined indium steel ruler device | |
| CN206073849U (en) | Electric water pump rotor and shaft coupling alignment device | |
| CN220565289U (en) | Pile foundation fixing device for pile group model test | |
| CN213338165U (en) | Optical platform with leveling precision measurement correcting mechanism | |
| CN208208292U (en) | A kind of liquid crystal display panel electric performance test equipment | |
| CN202614342U (en) | Volume metering device | |
| CN212259483U (en) | Riveting positioner for PCB production | |
| CN210315641U (en) | Plug-in type angle steel foundation adjusting device for power transmission line | |
| CN213136738U (en) | Quick template for wire clamp drilling pitch |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20171121 Effective date of abandoning: 20230425 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20171121 Effective date of abandoning: 20230425 |