TW201238919A - Scribing wheel and scribing device - Google Patents

Abstract

The present invention provides a scribing wheel capable of forming excellent scribe lines on a brittle material substrate and a scribing device provided with the scribing wheel. A polycrystalline diamond scribing wheel 50 is arranged by a way of using the lower faces of two conical frustums to face each other (wherein, the area of lower face is greater than that of the top face) and has a substantially disc-like shape (abacus bead shape). In addition, the polycrystalline diamond used to form the scribing wheel 50 is formed by using a graphite type carbon substance having fine crystal grain structure or amorphous character as a starting substance to directly convert and sinter under extra-high pressure and temperature. Furthermore, the polycrystalline diamond substantially contains only diamond without intentionally adding other substances therein.

Description

201238919 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a scribing wheel and a scribing apparatus having the scribing wheel. [Prior Art] Conventionally, as a tool for forming a scribe line on a brittle material substrate (for example, a 'glass substrate or the like), a scribing wheel (cutter wheel) made of sintered diamond is known. [Prior Art Document] [Patent Document 1] [Patent Document 1] JP-A-2009-166169 (Summary of the Invention) [Problems to be Solved by the Invention] Here, a sintered diamond (P〇lycrystal丨ine diam〇nd) : PCD) is produced by sintering diamond particles, metal bond materials, and additives as a result of the thermodynamically stable ultra high pressure and high temperature of the diamond. Therefore, sintered diamond has no problem of cleavage compared with single crystal lock stone, has no anisotropy of mechanical properties, and has excellent toughness. However, the mechanical properties of the sintered diamond at a high temperature are lowered by the metal bonding material contained in the grain boundary. For example, if the scribing substrate is abutted to form a scribe line, the scribing wheel is The machine tip of the tool tip j wear resistance produces a decrease in the grain boundary bonding strength of the sintered diamond, which means that the mechanical properties are degraded. Therefore, the object of the present invention is to form a well-marked scribing wheel. A brittle material substrate and a scribing device having the scribing wheel 159525.doc 201238919 [Technical means for solving the problem] In order to solve the above problems, the invention of claim 1 is characterized in that it is a polycrystalline diamond scribing wheel a disk-shaped body portion, an annular knife provided on an outer circumference of the body portion, and a blade edge provided along an outermost peripheral portion of the blade, and the thickness of the blade is from a center of the body portion toward the blade edge The above-mentioned polycrystalline diamonds have a fine grain structure or an amorphous graphite-type carbon material as a starting material, and are directly converted into a diamond at an ultrahigh pressure and high temperature, and substantially contain only diamonds. Further, the invention of claim 2 is the scribing wheel according to the invention, wherein the blade tip has a plurality of protrusions provided along the outermost peripheral portion. Further, the invention of claim 3 is characterized in that: a scribing unit is formed by forming a scribing line on the brittle material substrate by crimping the scribing wheel as described in the prior art with respect to the brittle material substrate; and maintaining The unit is configured to hold the brittle material substrate, and the surface of the brittle material substrate is relatively moved to the scribe unit. [Effect of the Invention] According to the inventions of the first to third aspects, the polycrystalline diamond constituting the scribing wheel has a fine grain structure or an amorphous graphite-type carbon material as a starting material, and is super-high temperature. Directly convert I into a diamond. Also, polycrystalline diamonds contain essentially only diamonds. Therefore, the polycrystalline diamond scribing wheel can not only improve the hardness at normal temperature, but also improve the mechanical properties at high temperatures. Therefore, it is possible to further extend the life of the scribing wheel. In particular, according to the invention of claim 2, the scribing wheel is formed by the polycrystalline diamond 159525.doc 201238919 stone forming and the hardness of the scribing wheel at normal temperature and the mechanical characteristics of the scribing wheel at a high temperature are improved. Therefore, even if a plurality of projections ′ are provided on the outermost peripheral portion of the blade edge, the projections can be prevented from being defective, and the scribing wheel can be further extended in life. [Embodiment] <1. Configuration of scribing device> Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Fig. 1 and Fig. 2 are a front view and a side view, respectively, showing an example of the overall configuration of the scribing device 1. 3 and 4 are a front view and a bottom view showing an example of the configuration in the vicinity of the scribing wheel 50. Fig. 5 is a bottom view for explaining the stabilizing effect of the kingpin. The scribing device 1 is a device for scribing a surface of a substrate made of a brittle material (hereinafter, also referred to simply as "brittle material substrate j" 4) such as a glass substrate or a ceramic substrate (cutting line: longitudinal direction) As shown in FIG. 1 and FIG. 2, the scribing device system mainly includes a holding unit ι, a scribing unit 20, an imaging unit 6〇, and a control unit 9 (further, in FIG. 1 and later). In the figure, in order to clarify the directional relationship of the members, an XYZ orthogonal coordinate system in which the Z-axis direction is the vertical direction and the 乂丫 plane is the horizontal plane is appropriately labeled as needed. As shown in the figure, when the scribe line SL is formed on the surface of the brittle material substrate 4 by the scribing device i, a vertical crack κ extending in the vertical direction (Z-axis direction) is generated on the brittle material substrate 4 (the scribing step) Further, the following method is referred to as "fracture", that is, by transmitting a stress (fracture step) to the brittle material substrate 4 having the vertical crack κ of the 159525.doc 201238919, the vertical crack κ is formed with a scribe line. The main surface of the s L brittle material substrate 4 Stretching to the opposite side of the main surface, thereby cutting the brittle material substrate 4. The other aspect 'refers to the following method as "split", that is, using only the scribing step (ie, 'do not perform the breaking step'' The crack K is cut from the main surface of the scribe line SL of the brittle material substrate 4 to the main surface on the opposite side, thereby cutting the brittle material substrate 4. The fracture and splitting are in the aspect of not cutting the swarf of the cliff. It is superior to the use of a diamond cutting machine (or a grinding wheel), or a diamond cutting machine amp & 4 stone slashing machine cutting method 0, as a cutting method by the present embodiment can be broken or The material <column of the split brittle material substrate 4 is glass, ceramic, enamel, or sapphire, etc. In particular, in recent years, as a substrate for a high-frequency module related to a communication device, it is being derived from HTCC (High 0).

Ceramics, high temperature co-fired ceramic illusion towards relatively easy processing ltcc(10)w

Temperature C (). fired Ceramies, low temperature co-firing temperament acceleration transfer. Therefore, the scribing method of the present embodiment is continuously used effectively. The holding unit 1G holds the brittle material substrate 4, and causes the held embedding material substrate 4 to relatively move the scribing unit 2G. As shown in FIG. 1, the holding unit H) is provided on the base 10a, and mainly includes a mounting table n, a ball screw mechanism 12, and an electric motor 13. Here, the base portion 1a is formed of, for example, a substantially cubic stone plate, and the upper surface thereof (the surface facing the holding unit 1A) is flattened. Thereby, the thermal expansion of the base portion H)a can be lowered, so that the brittleness I59525.doc 201238919 held by the holding unit 1〇 is well moved. The mounting table 11 sucks and holds the brittle material substrate 4 placed thereon. Further, the mounting table 11 moves the brittle material substrate 4 held in the direction of the arrow line AR1 (the X-axis positive or negative direction: hereinafter, also referred to as "advancing and retracting direction"), and moves in the direction of the arrow R1. As shown in Fig. 1 and Fig. 2, the mounting table 1 has mainly an adsorption unit 11a, a rotary table lib, and a mobile station lie. The adsorption portion 11a is provided on the upper side of the rotary table 11b. As shown in FIG. 1 and FIG. 2, the brittle material substrate 4 can be placed on the upper surface of the adsorption portion 11a, and a plurality of adsorption grooves (not shown) are arranged in a grid shape on the upper surface of the adsorption portion 1la. . Therefore, the brittle material substrate 4 is adsorbed to the adsorption portion 11a by exhausting (suction) the ambient gas in each adsorption tank while the brittle material substrate 4 is placed. The rotary table 11b is disposed on the lower side of the adsorption portion 11a, and rotates the adsorption portion Ua around the rotation axis lid substantially parallel to the z-axis. Further, the mobile station lie is disposed on the lower side of the rotary table lib, and moves the adsorption portion 11a and the rotary table lib in the advancing and retracting direction. Therefore, the brittle material substrate 4 adsorbed and held by the mounting table 11 moves forward and backward in the direction of the arrow AR1, and rotates around the rotation axis lid that moves in accordance with the advancing and retracting operation of the adsorption portion Ua. The ball screw mechanism 12 is disposed on the lower side of the mounting table, and moves the mounting table 11 forward and backward in the direction of the arrow AR1. As shown in Figs. i and 2, the ball screw mechanism 12 mainly includes a feed screw 丨 2a and a nut 丨 2b. The feed screw 12a is a rod that extends in the advancing and retracting direction of the mounting table u. On the outer peripheral surface of the feed screw 12&, a spiral groove is provided (illustration 159525.doc 201238919 is omitted, and one end of the feed screw 12a is rotatably supported by the support portion i4a' and the other end of the feed screw 12a The support screw 14a is rotatably supported by the support portion 14b. Further, the feed screw 12a is coupled to the motor 13 and the feed screw 12a is rotated in the rotation direction of the motor 13 when the motor 13 rotates. As the feed screw 12a rotates, it moves forward and backward in the direction of the arrow line AR1 by rolling of the ball (not shown). As shown in Fig. 1 and Fig. 2, the nut 12b is fixed to the lower portion of the moving table iic. When the motor 13 is driven and the rotational force of the motor 13 is transmitted to the feed screw 12a, the nut 12b moves forward and backward in the direction of the arrow AR1. As a result, the mounting table 11 to which the nut 12b is fixed will be the same as the nut 12b. Moving forward and backward in the direction of the arrow line AR1" The pair of guide rails 15, 16 restrain the movement of the mounting table 11 in the traveling direction. As shown in Fig. 2, a pair of guide rails 15 and 16 are attached to the base portion 1a, separated by a specific The distance is fixed to the arrow line AR2 In the direction, a plurality of (two in the present embodiment) sliding portions 17 (17a' 17b) are slidable along the guide rail 15 in the direction of the arrow line AR1. As shown in Figs. 1 and 2, each sliding portion 17 is shown. (17a, 17b) is attached to the lower portion of the mobile station 11c, and is fixed in the direction of the arrow line AR1 by a certain distance. A plurality of (two in the present embodiment: wherein, for convenience of illustration, only the sliding portion is described) 18a) The sliding portion 18 is slidable along the guide rail 16 in the direction of the arrow AR1. As shown in Figs. 1 and 2, the respective sliding portions 8 are similar to the sliding 1 17 (17a, 17b) in the moving table He. The lower portion is fixed in the direction of the arrow line AR1 by a certain distance. 159525.doc 201238919 As described above, when the rotational force of the motor 13 is transmitted to the ball screw 12, the stage 11 will move along the pair of guide rails 15, 16. Therefore, the translatability of the mounting table 11 in the advancing and retracting direction can be ensured. The scribing unit 20 presses the brittle material substrate 4 held by the holding unit 1 压 by the polycrystalline diamond scribing wheel 5 (refer to 3), a scribe line SLe is formed on the surface of the brittle material substrate 4 as shown in FIG. The scribing unit 20 mainly includes a scribing head portion 3A and a driving portion 4A. The scribing head portion 30 is a pair of the scribing wheel 50 to the brittle material substrate 4 by a lifting and pressing mechanism (not shown). The surface transmits a pressing force (hereinafter also referred to simply as "streaking load"). As shown in Fig. 3, the scribing head 3 includes a wheel carrier 35. Further, the wheel frame 35 is rotatably held by the scribing wheel. As shown in FIG. 3, the wheel carrier 35 mainly includes a pin 36, a support frame 37, and a turning portion 38. The chord 6 is a rod that is fixed in a state of being inserted into the through hole $5 of the Beton scribing wheel. Here, as shown in Figs. 3 and 4, the through hole pool extends along the rotation shaft 50b substantially parallel to the X-axis. As shown in Fig. 3, the support frame 37 is a structure that is disposed so as to cover the two openings (both ends) of the through hole 5〇a. A pin 3 projecting from both ends of the through hole 5〇a is rotatably provided to the support frame 37. Therefore, the scribing wheel 50 fixed by the pin % can be freely rotated with respect to the support frame 37. As shown in Fig. 3, the 'turning portion 38 is provided on the upper portion of the swing frame 37, and the pivot frame 38a whose axis is substantially parallel is centered to rotate the branch frame η as shown in Fig. 4, from below. The position of the rotating shaft % of the observed turning portion % and the setting position of the holding unit 1 () in the brittle material substrate 4 are wrong. 159525.doc 201238919 By this, as shown in FIG. 5, if the scribing wheel 5 is advanced When the direction is changed from the arrow line AR3 (2-point key line) direction to the arrow line AR4 (solid line) direction, the torque of the circumferential rotation pumping 38a acts on the scribing wheel 50 due to the kingpin backward tilting stabilizing effect. Therefore, the scribing wheel 50 is rotated in the direction of the arrow line R2, and the position of the scribing wheel 50 is changed from the 2-point chain position to the solid line position. As described above, even if the traveling direction of the scribing wheel 50 changes, the posture of the scribing wheel 5 is deviated from the traveling direction by only the angle Θ1, and the torque in the direction of the arrow R2 acts on the scribing wheel 50. As a result, the scribing wheel 5 turns in such a manner that the direction of the scribing wheel 5 is substantially parallel to the traveling direction of the scribing wheel 50. The drive unit 40 reciprocates the scribing head 30 provided with the scribing wheel 50 in the direction of the arrow line AR2 (Y-axis positive or negative direction: hereinafter, also simply referred to as "reciprocating direction"). As shown in Fig. 2, the drive unit 4 mainly includes a support 41, a guide rail 42, and a motor 43. In Fig. 2, an example in which a ball screw is used as a driving mechanism is shown, but other mechanisms such as a linear motor (linear guide) or the like can be used. A plurality of (two in the present embodiment) pillars 41 (4ia ' 4ib) are from the base

The specific distance is fixed in the up and down direction. L〇a extends in the up and down direction (z-axis direction). As shown in FIG. 2, each guide rail 42

The ball screw mechanism is connected to a feed mechanism (not shown) (for example, 159525.doc 201238919. Thus, when the motor 43 rotates, the scribing head 3 is along the plurality of guides 42 in the arrow The scribing wheel 50 is reciprocally moved in the direction of the line AR2. The scribing wheel 50 is rolled onto the brittle material substrate 4 by crimping, and a scribe line SL is formed on the brittle material substrate 4 (see Fig. 3). The detailed configuration will be described later. The imaging unit 60 captures the brittle material substrate 4 held by the holding unit 1G. As shown in Fig. 2, the imaging unit 6 () includes a plurality of cameras 65 (65a, 65b). As shown in Fig. 2, a plurality of (two in the present embodiment) cameras 65 (65a, 65b) are disposed above the holding unit 1A. Each of the cameras 65 (65a, 65b) is formed on the brittle material substrate 4. An image of a characteristic portion (for example, an alignment mark (not shown)). Further, based on an image captured by each camera 65 (65a, 65b), the position and posture of the brittle material substrate 4 are obtained. 'The position of the so-called brittle material substrate 4 means the absolute coordinates. Any position on the brittle material substrate 4 in the system. The "posture" of the brittle material substrate 4 means the reference line of the brittle material substrate 4 (for example, the lif in the four sides when the brittle material substrate 4 is square) The inclination of the reciprocating direction of the scribe head 3 。. Further, in the present (fourth) state, the brittle material substrate 4 of the time shape is formed, and the two corners of the four corners of the brittle material substrate 4 are formed adjacent to each other. Alignment marks. Further 'each alignment mark is taken by the corresponding camera, price, and based on the captured images', the position of each alignment mark in the absolute coordinate system is determined. X X 'based on the alignment The position of the mark, the calculation of the brittle material base I59525.doc 201238919 The position and posture of the plate 4. The operation control and control unit 90 of each component mainly includes the control unit 90 to realize the data operation of the scribing device 1. As shown in Fig. 1 and 2, ROM (Read (five) y Me, ry, read-only memory) 91, RAM (Ran ^ Access Memory, random access memory) 9? ^ With, and CPU (Central

Processing Unit, the central processing unit) 93. The ROM (Read Only Memory) is a so-called non-volatile memory unit, and stores, for example, a program 91a. Further, as R〇M9l, a non-volatile memory that is freely readable and writable, that is, a flash memory can be used. Randl

Access Mem〇ry) 92 is a volatile memory unit and stores information such as those used in the calculation of CPU 93. The CPU (Central pr0cessing Unit) 93 performs control of the program 91a following the r〇m9i (advance and retreat of the holding unit 1〇, rotation operation, and control of the reciprocating operation of the scribing head unit 30 by the drive unit 4), and brittleness Data processing such as position and posture calculation of the material substrate 4. For example, the CPU 93 is (1) calculating the position and posture of the brittle material substrate 4, and (2) rotating the rotary table ub based on the calculation result of the position and posture, and performing the forward movement of the mobile station 11c. The brittle material substrate 4 is processed for alignment of the scribing heads 30. <2. Configuration of the scribing wheel> Fig. 7 and Fig. 7 are a side view and a front view showing an example of the configuration of the scribing wheel 5〇. In the present embodiment, the scribing wheel 50 is formed of polycrystalline diamond. As shown in FIG. 3 to FIG. 7 , the scribing wheel 5 is configured such that the two truncated cones are 159525.doc •12·201238919 (where the area of the lower bottom surface is larger than the upper bottom surface) and are opposite to each other. Disc shape (abacus bead shape). As shown in Figs. 6 to 8, the scribing wheel 50 mainly includes a main body portion 51, a blade 52, and a blade edge 52a. As shown in Figs. 6 and 7, the main body portion 51 has a disk shape, and a through hole 50a penetrating through the main body portion 51 along the rotating shaft 50b is provided in the vicinity of the center of the main body portion 51. Further, an annular main body portion 5 is provided on the outer circumference of the main body portion 51. As shown in Fig. 6, the knife 52 is an annular body formed by a concentric inner circumference and an outer circumference centering on the rotation shaft 50b. . As shown in Fig. 7, the knife 52 is V-shaped in the front view. The thickness Tb (refer to FIG. 7) of the blade 52 along the rotating shaft 50b gradually becomes smaller as the self-rotating shaft 50b side faces the blade edge 52a. The blade edge 52a is along the outermost peripheral portion of the blade 52 (ie, the blade 52). The distance between the middle and the rotating shaft 5〇b is maximized, and the thickness Tb of the knife 52 is the smallest. As shown in Fig. 6, at each of the blade tips 52 & there are no intentionally formed irregularities, and the distance between the respective portions of the blade edge 52a and the rotating shaft 5〇b is the same. Further, the scribing wheel 50 is rotated on the brittle material substrate 4 while being in contact with the blade edge 52&, and the scribing line SL corresponding to the locus of the blade edge 523 is formed on the brittle material substrate 4. . <2 1. Size of the scribing wheel> Here, the outer diameter Dm (refer to Fig. 7) of the scribing wheel 50 is usually 丨~(7) (4), preferably 15 (mm) (more preferably 卜) The range of the surface). When the outer diameter Dm of the scribing wheel is less than 丨mm, the operability and durability of the scribing wheel 5() is decreased. The outer diameter Dm of the scribing wheel 50 is greater than 5 mm. In the case of the case, it is possible that the vertical crack u at the time of scribing can be formed deeper than the brittle material 159525.doc -13 - 201238919. Further, the thickness Th of the scribing wheel 50 (refer to FIG. 7) is preferably 〇. The range of .5 to 12 (mmK is preferably 0.5 to ll (mm)). When the thickness Th of the scribing wheel 5 is less than 〇5 mm, 'there may be a decrease in workability and workability. On the other hand' When the thickness Th of the scribing wheel 50 is greater than 12 mm, the cost of the material and the manufacturing cost for the scribing wheel 50 becomes high. Further, the blade tip angle Θ2 (refer to FIG. 7) of the blade 52 is usually an obtuse angle, and Preferably, the range of 90<e2S160(deg) (more preferably i〇0g2g140(deg)). Further, the specific angle of the corner angle Θ2 is appropriate according to the material and/or thickness of the brittle material substrate 4 to be cut as needed. Set. <2.2. Material contained in the wheel> The polycrystalline diamond used for the scribing wheel 50 is formed by using a fine grain structure or an amorphous graphite-type carbon material as a starting material, which is directly under ultrahigh pressure and high m· Conversion and sintering into diamonds. In addition, polycrystalline diamonds contain only diamonds in nature and do not intentionally add other substances to the polycrystalline diamonds. As a graphite type carbon material having a fine grain structure, for example, an average particle diameter of 0.5 to 〜 1 (μηι) of diamond particles. Further, as the amorphous graphite-type slave substance, amorphous carbon (am〇rph〇us Carbon: a. G), carbon nanotube (CNT Nanotube: CNT), Or Fuller C60. Here, a comparative study of various diamonds (for example, single crystal diamonds, sintered diamonds, and polycrystalline diamonds) that can be used for the scribing wheel 50 is formed. First, for polycrystalline diamonds and single crystal diamonds. Comparative study. Single crystal diamonds are known to have cleavage and crystal anisotropy, and reach the southernmost hardness in a specific plane orientation. 159525.doc •14- 201238919 In contrast, polycrystalline diamond gamma seedlings, single, ~ Compared to daily diamonds There is no cleavage problem, no anisotropy of mechanical properties, and excellent boring properties. 硬度 'More than 4 stone hardness at room temperature becomes opposite to the highest hardness of crystallized diamonds depending on the specific plane orientation. Therefore, the hardness of the polycrystalline diamonds in each plane orientation is approximately the same, and the highest hardness is equal to that of the single crystal diamond. Also known as single crystal diamonds, w., and, under the dish are unique ( 111) The <110> direction will cause slip deformation. As a result, the single L day diamond has a problem that the hardness is lowered due to heating.

On the other hand, the polycrystalline germanium x + B rn p t has a high bonding strength per day, and has the effect of suppressing the crack propagation at the grain boundary and suppressing the deformation of m ^ 0 迮. Therefore, polycrystalline diamonds have superior hardness characteristics compared to soap-crystallized diamonds under the same dish. It is a person who compares the polycrystalline diamonds with the diamonds, burns, and diamonds. Sintered diamonds complain that the straw is made up of diamond particles. m genus, ° 5 material, and mixture of additives, crystallized Λ 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石 钻石Excellent toughness. #' And, however, sintered diamonds and 闵曰 ^ eight due to the combination of materials contained in the yang boundary cause the problem of mechanical properties at high temperatures. For example, in sintered diamonds, the catalysis of the material... The diamond particles are bound by the metal to the sister a, ie, the sintered diamond has substantially the diamond formed by the mouth and mouth. Therefore, depending on the composite material of the UpT and the metal bond material, the metal bond material will be in the structure of the diamond due to the difference between the thermal expansion rate of the structure of the diamond and the difference between the expansion ratio and the expansion ratio. Produced 159525.doc -15· 201238919 Micro-J split, .. Wen Qi, 'fruit' if the sintered diamond is subjected to the heat history, depending on the situation 'will lead to a decrease in the hardness of the sintered diamond. In contrast, the polycrystalline diamond does not contain A single-phase polycrystalline diamond with a sintering aid and a metal bonding material. The polycrystalline diamond has a structure in which the dense diamond particles of several tens of nm are firmly bonded to each other. That is, the polycrystalline diamond does not substantially contain inclusions on the grain boundary. 'There is no problem of microcracking due to inclusions. Therefore, unlike polycrystalline diamond, polycrystalline diamond can reduce the problem of hardness reduction due to thermal history. As mentioned above, the crystal diamond not only has a single The advantages of crystal diamonds and the advantages of sintered diamonds '1 have heat resistance. Thereby, the scribing wheel 5 formed of polycrystalline diamond can not only improve the hardness at normal temperature, but also improve the mechanical properties at high temperatures. Further, the scribing wheel 5〇 has a longer life. <3. Method of forming the scribing wheel> Here, a method of forming the scribing wheel 5〇 from the polycrystalline diamond will be described. First, in the present forming method 'Firstly, a disc having a desired radius is cut from a polycrystalline diamond of a preferred thickness. Next, the thickness of the knife 52 along the rotating shaft 50b is gradually reduced from the side of the rotating shaft 5 toward the cutting edge 52a. In this manner, the peripheral portion of the disk is cut, whereby a v-shaped knife 52 is formed in the peripheral portion of the disk. [4. Scribing method] Here, the scribing wheel 50 is used for the brittle material substrate. In the present method, the scribing wheel 50 of the twisting head portion 30 is crimped to the brittle material substrate 4 by a lifting and lowering mechanism (not shown). I59525.doc -16- 201238919 Motor 13 and/or motor 43 of drive unit 4 To drive, the scribing head 30 is relatively moved in the horizontal plane with respect to the brittle material substrate 4 held by the holding unit 1 . Therefore, on the brittle material substrate 4, the required scribing SL is formed by the scribing wheel 5 And generating a vertical crack κ. Here, the scribing load is preferably in the range of 5 to 5 〇 (N) (more preferably 15 to 30 (N)). Further, the scribing wheel 50 is opposed to the brittle material substrate 4 The moving speed (hereinafter also referred to as "scribing speed") is usually in the range of 5 〇 to 12 〇〇 (mm/sec), preferably 50 to 300 (mm/sec). Further, the specific values of the scribing load and the scribing speed are appropriately set depending on the material and/or thickness of the brittle material substrate 4. Further, on the brittle material substrate 4, a scribe line SL as follows is formed corresponding to the relative movement of the scribe head portion 3''. For example, when the motor 丨3 is driven in a state where the motor 43 is stopped, the holding unit 10 is moved in the advancing and retracting direction (the direction of the arrow line AR1 in Fig. 1) while the scribing head portion 30 is stopped. That is, the scribing head portion 3 is relatively moved in the advancing and retracting direction with respect to the brittle material substrate 4 held by the holding unit 10. Therefore, a scribe line SL (see Fig. 3) along the advancing and retracting direction is formed on the upper surface of the brittle material substrate 4. On the other hand, when the motor 43 is driven in a state where the motor 13 is stopped, the scribing head portion 30 is moved in the reciprocating direction (the direction of the arrow line AR2 in Fig. 2) while the holding unit 1 is stopped. Namely, the scribing head portion 3〇 is relatively moved in the reciprocating direction with respect to the brittle material substrate 4 held by the holding unit 1A. Therefore, a scribe line SL (see Fig. 3) along the reciprocating direction is formed on the upper surface of the brittle material substrate 4. 159525.doc •17· 201238919 In addition, if the operation state of each of the motors 13 and 43 is changed from (1) the motor is stopped and the motor 13 is driven to the state (2) the motor 13 is stopped and the motor 43 is driven, The moving direction of the wire head 3 turns into a reciprocating direction (second horizontal direction) from the advancing and retracting direction (the horizontal direction) parallel to the brittle material substrate 4 due to the kingpin backward tilting stabilizing effect. That is, the scribing wheel 5 is held in contact with the brittle material substrate 4, and the direction of the blade edge 52&amp; of the scribing wheel 5 is changed by 90 degrees. Therefore, a substantially l-shaped scribe line SL is formed on the upper surface of the brittle material substrate 4 (see Fig. 3). Further, when the motors 13 and 43 are simultaneously rotated, the traveling direction of the scribing head 3〇 is in a state of being inclined with respect to the advancing and retracting direction (arrow line AR1 direction) and the reciprocating direction (arrow line AR2 direction). Therefore, on the upper surface of the brittle material substrate 4, a scribe line SL (see Fig. 3) in a state of being inclined with respect to the advancing and retracting direction and the reciprocating direction is formed. Further, when the number of revolutions of the motors 13 and 43 is changed, a curved line SL (see Fig. 3) is formed. Here, in the present embodiment, a case where a vertical crack κ (see Fig. 3) is generated on the brittle material substrate 4 by forming a substantially L-shaped scribe line is also referred to as an "L-line". In the case of the fracture, the main surface of the main surface of the brittle material substrate 4 in which the scribe line SL is formed (hereinafter, also simply referred to as "formation surface") and (2) The stress is transmitted to the main surface on the opposite side to the forming surface. Therefore, the vertical crack K generated on the brittle material substrate 4 in the scribing step is extended to the surface opposite to the formation surface, thereby cutting the brittle material substrate 4 (breaking step). In the case of splitting, a deeper vertical is formed by the scribing step. 159525.doc -18· 201238919 Crack κ. Therefore, the brittle material substrate 4 is cut only by the scribing step without a breaking device (not shown). &lt;5. Advantages of the scribing wheel of the present embodiment&gt; As described above, the scribing wheel 5 of the present embodiment is made of polycrystalline diamond and the polycrystalline diamond system will have fine grain structure or The crystalline graphite carbon material is used as the starting material 'directly under ultrahigh pressure and high temperature: it is changed into sintered rock. Further, polycrystalline diamonds sometimes contain extremely small amounts of nitrogen or the like, but contain only diamonds in essence, and do not intentionally add other substances to the polycrystalline diamonds. By this, the scribing wheel 50 formed of polycrystalline diamond can not only improve the hardness at normal temperature, but also improve the mechanical properties at high temperatures. Therefore, the scribing wheel 50 can be further extended in life. &lt; 6. Modified Example&gt; Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made. (1) In the present embodiment, the irregularities formed on the respective portions of the blade edge 5 2 a are not described (see FIGS. 6 and 7 ), but the shape of the blade edge 52 a is not limited to this. Figure 8 is an enlarged view of a portion A of Figure 6. As shown in Fig. 8, the blade edge 52a has a projection portion 54, and a groove 53 and a ridge line 54a are provided on the blade edge 52a. The plurality of grooves 53 are formed on the blade edge 52a and have a substantially V-shaped recess in a side view, and are formed by a conventionally known processing method such as laser processing, electric discharge machining, or polishing. As shown in Fig. 8, the adjacent grooves 53 are formed along the outer circumference of the blade 52 only by the required pitch p. Wherein, as described above, the scribing wheel 50 of the present embodiment has a small diameter 159525.doc •19·201238919

GdOnm)), and processing accuracy is required during the formation of the groove 53. Therefore, as the processing method of the groove 53, laser processing is recommended, and as the laser light to be used, for example, YAG (Yttrium Aluminium coffee, (iv) garnet) high-frequency laser, carbon dioxide gas laser 'green laser, UV (Ultravi) 〇let, ultraviolet) laser, femtosecond laser. As shown in Fig. 8, a plurality of projections 54 are provided along the outermost periphery of the body portion 51. More specifically, each of the projections 54 is disposed between the adjacent grooves 53 in the plurality of grooves 53 provided along the blade edge 52a. As described above, the blade edge 52a has a plurality of protrusions 54 (refer to FIG. 8), and the cutting (split or break) of the brittle material substrate 4 is abutted (embedded) by the respective protrusions $4 on the blade edge 52a. achieve. Further, as described above, the scribing wheel 50 is formed of polycrystalline diamond. Thereby, the hardness of the scribing wheel 50 at normal temperature and the mechanical characteristics of the scribing wheel 5 at a high temperature are improved. Therefore, when the traveling direction of the scribing wheel 50 changes in a state in which the scribing wheel 5A abuts against the brittle material substrate 4 as the cutting target, the projections 54 of the blade edge 52a can be effectively prevented from being damaged. Therefore, the life of the scribing wheel 50 is further extended. In addition, in FIG. 8, 'for the convenience of illustration, only three grooves 53 and four protrusions 54 are described. Further, a plurality of grooves 53 formed on the blade edge 52a are intentionally processed in a micrometer scale. Therefore, the plurality of grooves 53 are distinguished from the grinding stripes which are inevitably formed by the grinding process when the blade edge 52a is formed. Further, the depth Dp of the groove 53 formed on the blade edge 52a (in other words, the height of the protrusion portion 54: see Fig. 8) is usually 1 to 60 (μιη), preferably 丨~2〇() 159525.doc -20 - 201238919 (more preferably 1 to 15 (μηι)) range. When the scribing wheel 50 having a depth Dp of the groove 53 of i or more (especially 2 μm or more) is continuously formed with a scribe line, it is possible to sufficiently ensure that the vertical crack Κ reaches a desired depth or more (hereinafter, Also referred to as "effective cutting length"). On the other hand, in terms of workability, the depth Dp is set to 6 〇 μΓΏ or less. Further, the distance ρ between the adjacent grooves 53 (see Fig. 8) is usually 1 〇 to 2 〇〇 (μιη), preferably 50 to 200 (μιη) (more preferably 7 〇 to 17 〇 (μιΏ)). The scope. When the distance between the adjacent grooves 53 is less than 1 〇 μπ ΐ 2, the wear of the blade edge 52a of the scribing wheel 50 may become large, resulting in a decrease in durability. On the other hand, when the pitch P is larger than 200 μη ΐ 2, a good vertical crack κ may not be formed on the brittle material substrate 4. Further, the length l (see Fig. 8) of the ridge line 54a formed between the adjacent grooves 53 is preferably in the range of 25 to 75 bm) (more preferably 25 to 75 (μιη)). When the length L of the ridgeline 54a is less than 25 μm, a sufficient effective cutting length cannot be ensured, resulting in a problem that the life of the scribing wheel 5 is shortened. Further, the ratio of the width W of the groove 53 to the length L of the ridgeline 54a Ri (= W/L) is usually 〇_2 to 5.0', preferably 〇5 to 5.0 (further, in terms of forming a deep vertical crack) Preferably, it is 1·〇~35, and on the other hand, in terms of the quality of the fracture surface or the division surface, it is preferably in the range of 〇). In this case, the effective cutting length can be sufficiently ensured. (2) The shape of the plurality of grooves 53 provided on the blade edge 52a is not limited to a substantially V-shape in a side view. Fig. 9 to Fig. 9 are views showing another example of the groove 53 formed in the blade 52a of the scribing wheel 5?. As shown in Fig. 9, the groove 53 may also be, for example, a trapezoidal depression in a side view. Moreover, as shown in Fig. 1 and Fig. 159525.doc • 21 · 201238919, it may not be a concave or concave shape in a side view in an arc shape or a rectangular shape. [Schematic description of the drawings] Fig. 1 shows an embodiment of the present invention. A front view of an example of the overall configuration of the scribing device. Fig. 2 is a side view showing an example of the overall configuration of a scribing apparatus according to an embodiment of the present invention. Fig. 3 is a front view showing an example of the configuration in the vicinity of the scribing wheel. Fig. 4 is a bottom view showing an example of the configuration in the vicinity of the scribing wheel. Fig. 5 is a bottom view for explaining the stabilizing effect of the kingpin. Fig. 6 is a side view showing an example of the configuration of the scribing wheel. Fig. 7 is a front view showing an example of the configuration of the scribing wheel. Figure 8 is an enlarged view of a portion of Figure 6. Fig. 9 is a view showing another example of the shape of the groove formed on the blade edge of the scribing wheel. Fig. 1 is a view showing another example of the shape of a groove formed on the tip of the scribing wheel. Fig. 11 is a view showing another example of the shape of the groove which is not formed on the blade edge of the scribing wheel. [Description of main component symbols] Scribe device brittle material substrate holding unit base mounting table 4 10 10a 11 159525.doc •22- 201238919 lla adsorption unit lib rotating table 11c moving table lid rotating shaft 12 ball screw mechanism 12a feeding Screw 12b nut 13 motor 14a, 14b support portion 15' 16 pair of guides 17, 17a, 17b &gt; sliding portion 18, 18a 20 scribing unit 30 scribing head 35 wheel carrier 36 pin 37 supporting frame 38 turning portion 38a Rotary shaft 40 Drive unit 41, 41a, 41b Pillar 42 Guide 43 Motor 50 Scribe wheel 159525.doc -23- 201238919

50a 50b 50c 51 52 52a 53 54 54a 60 65, 90 91 91a 92 93 AR1 AR4 Dm Dp K Through-hole rotation axis setting position Main body knife tip groove projection ridge line imaging unit 65a, 65b Camera control unit ROM (Read Only Memory (read only memory) Program RAM (Random Access Memory 5) CPU (Central Processing Unit), AR2, AR3, arrow line wheel OD groove depth vertical crack 159525 .doc -24- 201238919 L Length of ridge line P Spacing R1, R2 Arrow line SL scribe line Tb Thickness of knife Th Thickness of scribe wheel W Width of groove 159525.doc -25-

Claims (1)

201238919 VII. Patent application scope: 1. A scribing wheel, characterized in that it is a polycrystalline diamond scribing wheel, and includes: (a) a disk-shaped body portion; '. (b) is disposed on the body a ring-shaped knife on the outer circumference; and - (c) / 0 is provided at the outermost peripheral portion of the knife; the thickness of the knife is smaller from the center of the body portion toward the tip; A graphite material having a fine grain structure or an amorphous graphite material is used as a starting material, and is directly converted into a diamond at an ultrahigh pressure and high temperature, and substantially contains only a diamond. 2. The scribing wheel of claim 1, wherein the cutting edge has (b-1) a plurality of projections disposed along the outermost peripheral portion. 3. A scribing apparatus, comprising: a scribing unit 兀' which forms a stroke on the brittle material substrate by crimping a brittle material substrate by a scribing wheel as claimed in claim 2 or 2 (4) The unit 'the system' - the surface (4) the above test (4) substrate, - surface. The above-mentioned brittle material substrate is relatively moved to the scribe unit. I59525.doc