TW201220387A - capable of saving space in areas such as a clean room by arranging spaces on a housing container for temporarily placing lid bodies removed for maintenance work - Google Patents

Abstract

The subject of the invention is to arrange spaces on a housing container for temporarily placing lid bodies removed for maintenance work, so as to save space in areas such as a clean room. The solution is to provide a transfer chamber (200) and a load lock chamber (102) serving as housing chambers for housing processed bodies. A container (210) of the transfer chamber (200) is provided with: a ceiling part (212) having an opening (214) and a lid body (250) detachably provided to close the opening (214). On the ceiling part (212), there are provided with: a first lid body placing area Y, which is used for temporarily placing a lid part (120) removed from another container (110) of the load lock chamber (102), and a second lid body placing area X, which is used for temporarily placing a lid part (250) removed from the container (210) of the transfer chamber (200).

Description

[Technical Field] The present invention relates to a processing apparatus including a storage chamber for receiving a target object such as an FPD board. [Prior Art] For example, in the manufacturing process of a flat panel display (FPD) typified by a liquid crystal display (LCD), a so-called multi-chamber type substrate processing apparatus is used, which is a substrate for a glass substrate or the like in a vacuum pressure environment. A processing chamber (process chamber) for performing predetermined processing such as etching or CVD is performed. Such a substrate processing apparatus includes a transfer chamber including a transfer device that transports a substrate, and a plurality of processing chambers provided around the substrate. Further, the substrate processing apparatus is provided with a load lock chamber which is used when transporting the substrate between the atmospheric pressure environment and the transfer chamber held by the vacuum. In the substrate processing apparatus, the gate (atmosphere side gate) provided on the atmosphere side of the load lock chamber is first opened, and the substrate transported by the transfer robot or the like in an atmospheric pressure environment is housed in the load lock chamber. Then, when the atmosphere side gate is closed and the load lock chamber is depressurized to a vacuum state, the gate (vacuum side gate) provided on the transfer chamber side of the load lock chamber is opened, and the load lock chamber and the transfer chamber are communicated, and the transfer chamber is transported. The apparatus carries out the substrate from the load lock chamber and transports it to any of a plurality of processing chambers. After the predetermined processing is performed on the substrate in each processing chamber, the processed substrate is taken out from each processing chamber by the transfer device of the transfer chamber, and loaded into the load lock chamber. Then, close the vacuum side gate of the load lock chamber to boost the room

S -5- 201220387 After returning to the atmospheric environment, open the atmosphere side gate. The substrate to be processed is transported from the load lock chamber by a transfer robot or the like in an atmospheric pressure environment, and is transported to the next project. In the processing chamber, the transfer chamber, the load lock chamber, and the like that constitute such a substrate processing apparatus, the substrate can be housed in the internal storage chamber, and in order to perform internal maintenance or the like, the opening portion is often provided at the top to be detachable. The cover is used to close the opening. In the storage chamber in which the cover body is detachably mounted, the cover body is temporarily moved to a space different from the installation space of the substrate processing apparatus by the maintenance of the cover. For example, in the following Patent Documents 1 and 2, a space for ensuring sliding of the lid body is also ensured. Further, in the following Patent Document 3, a crane is used to move the removed cover to a trolley located in another space. [Patent Document 1] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2001-185534 (Patent Document 3) JP-A-2001-185534 (Patent Document 3) JP-A-2009- 1 705 3 [Problems to be Solved by the Invention] In recent years, the size of the glass substrate has increased, and the size of the substrate storage chamber such as the processing chamber, the transfer chamber, and the load lock chamber of the substrate processing apparatus has been increased. The size of the cover is also getting bigger and bigger. Therefore, in order to temporarily move the cover body of the -6 - 201220387, the space area which must be secured is also increasing, and the point of omitting the space saving of the clean room or the like becomes a problem. Further, this space is not used at all when the substrate processing apparatus is operated when the cover is removed during maintenance or the like. Then, the present invention has been made in view of such a problem, and an object of the present invention is to provide a processing apparatus capable of saving space without separately securing a space for placing a cover that is detached from a storage chamber such as a transfer chamber. . (Means for Solving the Problems) In order to solve the above problems, according to the present invention, it is possible to provide a processing apparatus including a processing apparatus for accommodating a storage chamber of a target object, wherein the storage compartment is provided with: A top portion having an opening, and a lid body that detachably closes the opening portion, and a lid body mounting region for temporarily placing the lid body detached from the opening portion is provided at the top portion. According to the present invention as described above, the cover body that is removed during maintenance or the like can be placed on the upper surface of the top of the storage chamber. Further, the lid body mounting region may be configured to be adjacent to the opening portion. According to this, the distance between the cover and the cover mounting area can be reduced by removing the cover from the opening, so that the working time can be shortened. In this case, the opening is provided at the center of the top portion, and the width of the opening is preferably 1/3 or less of the width of the top portion. Moreover, the cover body mounting area may be provided to support the cover body

S 201220387 multiple support tables. Preferably, the support table is formed of a resin material at least in contact with the lid body. Thereby, when the lid body is placed on the lid body mounting area, the surface of the lid body can be prevented from being injured. Further, the cover system is provided with a grid mounting portion on which the safety barrier is detachably attached, and when the cover is attached to the cover mounting region in a state in which the barrier is mounted, the safety barrier on the cover is used The gate mounting portion can be disposed along the edge of the opening. According to this, if the cover is placed on the lid mounting area, that is, the safety barrier is provided, the work efficiency of installing the safety barrier can be improved. In order to solve the above problems, according to another aspect of the present invention, a processing apparatus including a plurality of storage chambers for accommodating a processing object, wherein the plurality of storage chambers include: a top portion of the opening portion and a lid body that closes the opening portion, and at least one of the storage chambers is provided with a first lid body mounting region for placing a lid body of another storage chamber. According to the present invention, Then, the cover of the other storage compartment that is removed during maintenance or the like can be placed on the top of a storage compartment. Further, the storage chamber having the first lid mounting region may have a second lid mounting region on which the lid of the storage chamber is placed. In this case, the opening of the storage chamber having the second lid mounting region may be provided at the center of the top portion, and the second lid mounting region may be provided adjacent to the opening portion of the above - 8 - 201220387. Further, the first cover mounting region and the second cover mounting region may be arranged to overlap each other. Further, the first lid mounting region and the second lid mounting region may be disposed higher than an upper surface of the lid when the opening is closed. According to this, the lid of the other storage chamber can be placed under the lid body in which the storage chamber is not installed. Further, the plurality of storage chambers include: a processing chamber that performs processing on the object to be processed, for example, in a vacuum pressure environment; and a load lock chamber that temporarily transports the object to be processed between the atmospheric pressure environment and the processing chamber The inside of the object to be processed is accommodated, and the inside is switched to an atmospheric pressure environment or a vacuum pressure environment; and the transfer chamber is airtightly connected to the load lock chamber and the processing chamber, and the load lock chamber and the above are provided therein. The conveying device of the object to be processed is transported between the processing chambers. Further, a transfer device may be provided in the inside of the storage chamber, and the object to be processed may be transported on the holding portion, and the holding portion may be configured to be disassembled by the width of the opening portion. Whether the size of the holding portion is larger than the opening portion of the storage chamber or the lower portion of the substrate holding portion can be easily released from the opening portion. [Effects of the Invention] According to the present invention, the cover body can be removed by maintenance or the like. Placed on top of the top of the -9-201220387 containment room. Thereby, it is not necessary to separately secure a space for placing the lid in addition to the space in which the processing apparatus is installed, so that space saving can be achieved. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and the drawings, constituent elements that have substantially the same functional configuration are denoted by the same reference numerals, and the description thereof will not be repeated. (Processing Apparatus) First, a processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. Here, the processing apparatus includes a multi-chamber type substrate processing apparatus including a plurality of processing chambers (process chambers) for plasma-treating a FPD glass substrate (hereinafter simply referred to as "substrate"). Further, specific examples of the FPD include, for example, a liquid crystal display (LCD), an electroluminescence (EL) display, and an electric prize display panel (PDP). Fig. 1 is a perspective view showing a configuration of a substrate processing apparatus 1A according to the present embodiment. This substrate processing apparatus 100 is provided with a load lock chamber 102 as a storage chamber of the present invention, a processing chamber 104, and a transfer chamber 200. More specifically, the substrate processing apparatus 100 includes a transfer chamber 200 at substantially the center thereof, and a processing chamber 1〇4 in which three lock chambers 1 and 2 are mounted around the transfer chamber 200. Between the transfer chamber 200 and the load lock chamber 102, a vacuum side gate valve 106 is provided between the transfer chamber 200 and each of the processing chambers 104, and the vacuum side gate valve 106 is provided to be airtightly sealed therebetween, and is configured to be openable and closable. Further, an atmosphere side gate valve (not shown) is provided in the opening portion connecting the load lock chamber -10- 201220387 102 and the outside atmosphere. The processing chamber 104 is a period during which a predetermined plasma treatment (e.g., etching treatment or ashing treatment) is performed on the substrate. The internal space thereof is maintained in a predetermined vacuum pressure environment. Since the substrate processing apparatus 1 has three processing chambers 1〇4, for example, two of the processing chambers can be used as an etching processing chamber, and the remaining one processing chamber can be used as an ashing processing chamber or three processing chambers. A saturating processing chamber or an ashing processing chamber of the same treatment. Further, the number of processing chambers is not limited to three, and may be four or more or two or less. Similarly to the processing chamber 104, the transfer chamber 200 can be maintained in a predetermined vacuum pressure environment. A transfer device (not shown) provided with a pickup for holding the substrate is provided in the transfer chamber 200. The transfer device can access the processing lock chambers 1 and 2 and the three processing chambers 104, and transport the substrates therebetween. The load lock chamber 102 is for transferring a substrate between a transfer device (not shown) provided in an atmospheric pressure environment and a transfer device in the transfer chamber 200 in a vacuum pressure environment. Therefore, the load lock chamber 102 is constructed to switch its interior to an atmospheric pressure environment and a vacuum pressure environment. The load lock chamber 102 is provided with a substantially box-shaped container 11 that houses the substrate, and a lid body 120 that hermetically closes the opening portion 14 provided in the top portion 126 of the container 1 10 . Since the opening portion 114 is provided in almost the entire area of the top portion 112, the lid body 120 to be closed is also enlarged. Further, since the size of the load lock chamber 102 is also determined by the size of the substrate, the size of the lid body 120 also becomes large. In the case of the load lock chamber 1〇2 for processing a large glass substrate, the size of the lid body 120 may exceed 3 meters square. 201220387 When the inside of the load lock chamber 102 is repaired, the cover 120 is detached from the container 110, so that the larger the cover 120 is, the larger the space for temporary placement is required. In this embodiment, various efforts have been made to solve this point. The mounting position or the detaching operation of the lid body 120 of the load lock chamber 102 will be described later. The container 110 of the load lock chamber 102 is partitioned into two upper and lower sections, and substrate carry-out ports 116, 118 are formed on the atmospheric side of each of the upper and lower sections. For example, by the transfer robot (not shown), the unprocessed substrate is carried into the upper or lower stage in the load lock chamber 1〇2 via the substrate carry-in/out port 116 or the substrate carry-out port 118, and is loaded from the load. The upper or lower stage in the lock chamber 102 carries out the processed substrate. The substrate processing apparatus 100 is connected to a control unit (not shown), whereby the control unit can control the operations of the load lock chamber 102, the transfer chamber 200, and the respective processing chambers 104. The control unit is connected to a keyboard, which is an operation unit (not shown) including an input operation for instructing the operator to manage the substrate processing apparatus 100, or a display or the like for visualizing the operation state of the substrate processing apparatus. . The control unit is connected to a memory unit that is not shown. Here, the program for realizing various processes performed by the substrate processing device 100 by commands from the control unit or a plurality of processing conditions (prescription) necessary for executing the program are used. )Wait. Each of the processing conditions is a collection of various parameters such as control parameters and setting parameters of each unit of the control substrate processing apparatus 100. Specific examples of the parameters include the flow ratio of the process gas, the pressure in the process chamber, and the high frequency power. In addition, the programs or processing conditions may be memorized on a hard disk or a semi--12-201220387 conductor memory, or may be stored in a CD-ROM, a DVD, etc., which can be read by a computer. In the state of 100 million media, it is set at a predetermined position in the memory unit. The control unit reads out the desired program and processing conditions from the storage unit based on an instruction from the operation unit, and executes the entire processing of the substrate processing apparatus 100 under the control unit. Further, the processing conditions can be edited in accordance with an instruction from the operation unit. (Configuration Example of Transfer Room) Next, a configuration example of the transfer chamber 200 will be described in detail with reference to the drawings. Fig. 2 is a partially enlarged view of Fig. 1 and a perspective view showing a specific configuration example of the transfer chamber 20 0. The transfer chamber 200 is provided with a container 210 having a substantially box shape for accommodating a substrate, and a lid 250 for hermetically closing the opening portion 214 provided in the top portion 212 of the container 210. The opening portion 214 is provided at the center of the top portion 212, and the non-opening portion 216 is provided on both sides of the opening portion 214. The opening portion 214 of the 218 conveyance chamber 200 is, for example, long from the loading lock chamber 102 side to the depth direction in Fig. 2 Roughly rectangular. Plate-shaped reinforcing members 222 and 224 are attached to a part of the non-opening portions 216 and 218 of the top portion 212 of the transfer chamber 20 0 shown in Fig. 2 along the edge of the opening portion 146. Further, in this case, since the reinforcing members 222 and 224 generate a step on the non-opening portions 216 and 218, the present invention is not limited thereto, and the reinforcing members 222, 224 may not be provided in such a manner that the non-opening portions 216 and 218 are stepped. . The shape of the reinforcing members 222, 224 is also not limited to a plate shape. -13-201220387 A transport device (not shown) is provided in the container 210 of the transfer chamber 200, and has a pickup 300 as a substrate holding portion as shown in Fig. 7 which will be described later. The transfer device transfers the substrate between the load lock chamber 102 and each of the process chambers 104 via the substrate carry-out port 220 provided on each side surface of the container 210. As described above, since the transfer chamber 200 is provided with the transfer device in the container 210, a space for operation is required. Therefore, the container 210 of the transfer chamber 200 is larger than the container 110 of the load lock chamber 102. Therefore, as shown in Fig. 2, even if the opening portion 214 is a part of the top portion 212, the lid body 250 to be closed is still large. When the inside of the transfer chamber 200 is repaired, the lid body 250 is detached from the container 210. Therefore, as in the case of loading the lock chamber 102, the lid body 250 is larger, and a large space for temporary placement is required. Therefore, in the present embodiment, the lid mounting region (the second lid mounting region) for temporarily placing the lid 250 of the container which is detached from the opening portion 214 is provided on the upper surface of the top portion 212 of the transfer chamber 200. , the container cover itself is placed in the area) X. Specifically, as shown in Fig. 2, the entire upper surface of the non-opening portion 218 on one side of the opening 214 is referred to as a lid mounting region X. As a result, for example, as shown in Fig. 3 and Fig. 4, which will be described later, the lid body 250 detached during the maintenance of the transfer chamber 200 can be placed on the top portion 212', so that space saving in the flawless chamber can be achieved. Further, the size or arrangement of the lid mounting region X is not limited thereto, and one portion of the upper surface of the non-opening portion 218 may be the lid mounting region X in accordance with the size of the lid 250, or may be another The one non-opening portion 216 is provided with a lid mounting region X. • 14 - 201220387 In addition, when the opening 214 is provided in the center of the top portion 2 1 2 as in the present embodiment, the width of the opening portion 214 is the width of the top portion 212 (the width of the opening portion 214 plus the non-opening portions on both sides thereof) 1/3 or less of the width of the entire width of 216,218 is ideal. Thereby, the opening portion 21 4 can be obtained as much as possible, and the entire upper portion of the one non-opening portion 216 can be set as the lid mounting region X. Further, in the transfer chamber 200 of the present embodiment, the lid body 120 constituting the load lock chamber 102 may be placed on the upper surface of the top portion 212. Specifically, as shown in FIG. 2, on the upper surface of the non-opening portions 216, 218 of the transfer chamber 200, a cover for placing the cover 120 of the other container detached from the opening portion 14 of the lock lock chamber 102 is provided. Mounting area (first cover mounting area, other container cover mounting area) Y. Thereby, for example, as shown in FIG. 5 and FIG. 6 which will be described later, the lid body 120 detached during the maintenance of the load lock chamber 102 can be placed on the top portion 212 of the transfer chamber 20, thereby saving space in the clean room. Chemical. In addition, the size or arrangement of the cover mounting area Y is not limited thereto. By arranging the lid mounting area X of the transfer chamber 200 and the lid mounting area Y of the load lock chamber on the upper surface of the non-opening portions 216 and 218 of the transfer chamber 200, the space saving of the clean room can be further improved. . Further, the transfer chamber 200 is provided below the reinforcing members 222, 224 in the non-opening portions 216, 218, and is formed higher than the upper surface of the lid body 250 when the opening portion 214 is closed. Thereby, the lid body 250 to which the transfer chamber 2 is attached can be held, and the lid body 120 of the load lock chamber 102 can be placed on the non-opening portions 216 and 218. Further, a plurality of support tables for placing the lids 120, 250 are provided on the upper surfaces of the non-opening portions 216, 218 of the top portion 212 of the transfer chamber 200. Take this

S -15- 201220387 can prevent the surfaces of the covers 120, 250 from being in contact with each other and being injured, and can cover the covers 120, 250 horizontally. Specifically, a plurality of support stages 244 and 248 are disposed in the lid mounting area X of the non-opening portion 218 of the transfer chamber 200 in accordance with the size of the lid body 250. The support table 244 has a plate shape, and a protrusion portion for positioning the mounting position of the lid body 120 is provided on the support table 248. When the contact faces of the support tables 244, 248 and the cover 120 are formed at the same height, the cover 120 can be horizontally placed. In particular, as in the transfer chamber 200 shown in FIG. 2, when the reinforcing members 222 and 224 are attached to a part of the non-opening portions 216 and 218, the portions of the reinforcing members 222 and 224 and the portions of the non-reinforcing members 222 and 224 are generated. Step difference. In such a case, the lid body 12 can be horizontally placed by adjusting the height of the contact faces of the plurality of support tables 244, 248. Further, in the cover mounting region Y of the non-opening portions 216, 218 of the transfer chamber 200, a plurality of support tables 240, 242, 2 44, 246 are disposed in accordance with the size of the lid body 120. The support table 2 44 has a plate shape, and the support tables 240, 242, and 24 6 are provided with protrusions for positioning the mounting position of the cover 250. Further, it is preferable that each of the support tables 240, 242, 246, and 24 8 is detachable and responsive to the needs. The support table 246 is an obstacle when the cover 250 is placed, so it is removed. And the 'support table 244' can be used as a common support table in the covers 120, 250. Further, each of the support tables 240, 242, 246, and 248 is preferably made of resin or the like, so that the lids 120 and 250 are not injured. In this case, only the contact surface with the lid body 120' 250 may be made of a resin or the like. Further, as shown in FIG. 2, the upper surface of the cover body 250 of the transfer chamber 200 may be provided with a plurality of safety barriers 262 as shown in FIG. 3, which will be described later, along the long sides. Mounting holes 228. Further, a plurality of mounting holes 230 for mounting a safety barrier may be provided in the transfer chamber 200 in the non-opening portion 218 of the top portion 212 of the transfer chamber 200. Although not shown, a plurality of mounting holes 23 for attaching and detaching the safety barrier may be provided in the non-opening portion 216. (Removal of the lid body of the transfer chamber) Next, the operation of placing the lid body mounting region X by removing the lid body 250 from the opening portion 214 of the transfer chamber 200 will be described in detail with reference to the drawing. Fig. 3 is a perspective view for explaining a state before the cover body 25 is removed. Fig. 4 is a perspective view showing a state in which the lid body 250 detached from the opening portion 214 is placed in the lid body mounting region X. First, before the operation of removing the cover 250 from the opening 214 is started, as shown in FIG. 3, the safety barrier 260 is erected on the upper surface of the non-opening portion 216, and the safety barrier 202 is erected on the cover 25 Above. Specifically, the leg portions of the safety barrier 260 are attached to a plurality of mounting holes (not shown) of the non-opening portion 216. The leg portions of the safety barrier 262 are attached to the plurality of mounting holes 22 8 on the upper surface of the lid 250. In addition, since the support table 246 is not required here, it is first removed. Next, for example, the lid body 250 is lifted by a crane mechanism (not shown) and conveyed in the direction of the arrow shown in FIG. 3, and as shown in FIG. 4, the support table 244' 248 is placed on the lid body mounting region X. . At this time, the placement position of the lid 250 can be positioned at the projection of the support table 248. By thus removing the lid body 250 from the opening portion 214, the inside of the transfer chamber 200 can be repaired. Moreover, since the safety barrier 260 is provided along the opening portion 214

S -17- 201220387, 262, so that the operator working on the top portion 212 can be prevented from falling to the opening portion 214. Further, if the lid body 25 is removed from the opening portion 214 and placed on the lid body mounting region X, the safety barrier 2 62 is erected along the opening portion 214. In this way, the efficiency of the operation of the safety barrier 2 62 can also be improved. In addition, in order to improve safety, railings or stencils may be added to the safety barriers 260, 262. Also, the barriers 260, 262 may also be permanent and removed or removed as needed. As described above, according to the present embodiment, it is not necessary to prepare a space for placing the cover body 250 detached from the opening portion 214 except for the space in which the substrate processing apparatus 100 is provided. Therefore, the floor area of the clean room in which the substrate processing apparatus 100 is installed can be made small. Further, since the lid mounting region X of the lid body 250 of the transfer chamber 200 is provided in the non-opening portion 2 1 8 which is very close to the opening portion 2 1 4, the lid body 25 0 can be greatly shortened by a crane or the like. The time taken to mount the cover X in the cover. Therefore, the work time of maintenance and the like can be shortened, and the productivity of the substrate processing apparatus 100 can be improved. (The removal of the lid of the load lock chamber.) Next, the opening from the load lock chamber 102 will be described in detail with reference to the drawing. 114. The lid body 120 is detached and placed in the lid body mounting region Y. Fig. 5 is a perspective view for explaining a state before the lid body 12 is removed from the opening portion 114. Fig. 6 is a perspective view for explaining a state in which the lid body 120 detached from the opening portion 14 is placed on the lid body mounting region γ. First, start removing the cover from the opening portion II4! Before the operation, -18-201220387 erects the safety barrier 260 on the upper surface of the non-opening portion 216, and erects the safety barrier 262 on the upper surface of the non-opening portion 218. Specifically, the foot of the safety barrier 260 is installed. The plurality of mounting holes (not shown) of the non-opening portion 216 are attached to the plurality of mounting holes 230 of the non-opening portion 218. Here, for example, the cover shown in FIG. 3 and FIG. When the removal/installation operation of the body 250 is about to be performed, the safety barrier 262 is fixed to the cover 250, and the support table 246 is also not mounted. In this case, the support table 246 is attached to the predetermined position of the reinforcing member 224. The safety barrier 262 may be moved to the non-opening portion 2 1 8 . Next, for example, the lid body 12 is lifted by a crane mechanism (not shown) and conveyed in the direction of the arrow shown in FIG. 5 , as shown in FIG. 6 . The support tables 240, 242, 244, 246 are placed on the cover mounting area Y. At this time, the mounting position of the cover 120 is a projection that can be positioned on the support tables 240, 242, 246*. The cover 120 is detached from the opening portion 144, and the inside of the load lock chamber 200 can be repaired. Since the safety barrier 260' 262' is erected along the opening 214, the safety of the operator working on the top portion 212 can be ensured. Thus, according to the present embodiment, it is not necessary to prepare for the space of the substrate processing apparatus 100. The space of the lid body 120 detached from the opening portion 114 of the load lock chamber 1A2 is placed. Thereby, the floor area of the clean room can be made more space-saving. Further, since the cover body 120 to be loaded with the lock chamber 102 is used Since the lid mounting region Y is provided at the top portion 212 of the transfer chamber that is very close to the opening portion 114, the time taken to lift the lid body 120 by a crane or the like and to be placed on the lid body mounting region Y can be greatly shortened. Therefore, the work time for maintenance and the like can be shortened, and the base can be

S *19- 201220387 The productivity of the board processing apparatus 100 is improved. However, in the transfer chamber 200 of the present embodiment, the non-opening portions 216 and 218 are provided in the top portion 212 to secure the lid-mounting regions X and Y. Therefore, the non-opening portions 2 1 , 2 1 8 are not provided. At this time, it is necessary to reduce the opening portion 2 1 4 . Therefore, it is conceivable that the size of the pickup 300 depending on the conveying device in the transfer chamber 200 may not be carried out from the opening 214 as described above. Therefore, the pickup 300 can be configured to be decomposed freely in accordance with the width of the opening portion 214. A specific configuration example of such a picker 300 will be described with reference to the drawings. Fig. 7 and Fig. 8 are perspective views showing the configuration of the pickup 300 of the conveying apparatus of the embodiment. Fig. 7 is a view showing a state of the pickup 300 before the disassembly, and Fig. 8 is a view showing a state of the pickup 300 after the disassembly. The pickup 300 shown in Fig. 7 is three-part (a part 302 of a width Wa, a part 304 of a width Wb, and a part 306 of a width Wc) as shown in Fig. 8 . Here, the widths Wa, Wb, and Wc are all smaller than the dimension of the opening portion 214 in the width direction. As a result, when the pickup unit 300 is taken out from the transfer chamber 200 by maintenance or the like, the pickup unit 300 can be decomposed into the parts 302, 304, and 306 in the transfer chamber 200, and then taken out from the opening portion 214. When the pickup 300 is carried in the transfer chamber 200, the components 302, 304, and 306 can be inserted into the transfer chamber 200 from the opening 214, and then the pickup 300 can be assembled in the transfer chamber 200. Therefore, even if the width of the opening portion 214 is small, the pickup 300 wider than the opening portion can be easily taken in and out. The preferred embodiments of the present invention have been described above with reference to the accompanying drawings, but the invention is not limited thereto. As long as the Employer is a clerk, it is possible to make various modifications or corrections within the scope of the patent application, and it is of course also within the technical scope of the present invention. For example, a configuration in which the lid 120 of the load lock chamber 102 is placed on the transfer chamber 200 will be described as an embodiment of the present invention, but the lid of the processing chamber 104 may be placed in the transfer chamber 200. Further, the lid body 250 of the transfer chamber 200 or the lid of the processing chamber 104 may be placed on the load lock chamber 1A2. Even the cover can be divided to be placed. [Industrial Applicability] The present invention is applicable to a processing apparatus including a storage chamber for storing a target object such as an FPD board. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a configuration of a substrate processing apparatus according to an embodiment of the present invention. Fig. 2 is a perspective view showing a specific configuration example of the transfer chamber shown in Fig. 1; Fig. 3 is a perspective view for explaining a state before the cover body is removed from the opening of the transfer chamber in the same embodiment. Fig. 4 is a perspective view for explaining a state in which the lid body of the transfer chamber shown in Fig. 3 is removed and placed in the lid body mounting region X. Fig. 5 is a perspective view for explaining a state before the cover body is detached from the opening portion of the lock lock chamber in the same embodiment. Fig. 6 is a perspective view for explaining a state in which the lid body of the load lock chamber shown in Fig. 5 is placed in the lid body mounting region Y.

S - 21 - 201220387 Fig. 7 is a perspective view for explaining a schematic configuration of a pickup of the conveying device of the embodiment. Fig. 8 is a perspective view for explaining a state in which the pickup shown in Fig. 7 is disassembled. [Description of main component symbols] 100: substrate processing apparatus 102: load lock chamber 1 04: processing chamber 1〇6: vacuum side gate valve 110: container (container that locks the lock chamber) 112: top 11 4: opening portion 116' 118, 220: substrate carry-in/out port 120: lid body (cover body for loading lock chamber) 200: transport chamber 210: container (container of transfer chamber) 212: top 2 1 4 : opening portion 2 1 6 ' 2 1 8 : non-opening portion 222, 224: reinforcing members 228, 230: mounting holes 240, 242, 244, 246, 248: support table 250: cover (cover of the transfer chamber) -22- 201220387 260, 262: safety barrier 3 00: pickup 302, 304, 3 06 : Part S: Substrate X, Y: Cover mounting area -23-

Claims (1)

201220387 VII. Patent application scope: 1. A processing apparatus comprising: a processing device for accommodating a storage chamber of a to-be-processed object, wherein: the storage chamber includes: a top portion having an opening, and closably closable The lid body of the opening portion is provided with a lid body mounting region for temporarily placing the lid body detached from the opening portion at the top portion. 2. The processing apparatus according to claim 1, wherein the cover mounting area is adjacent to the opening. 3. The processing apparatus according to claim 2, wherein the opening portion is provided at a center of the top portion, and a width of the opening portion is 1/3 or less of a width of the top portion. 4. The processing apparatus of claim 3, wherein the cover mounting area is provided with a plurality of support tables for supporting the cover. 5. The processing apparatus according to claim 4, wherein the supporting platform is formed of at least a resin material in contact with the lid. 6. The processing apparatus of claim 5, wherein the cover system is provided with a slidable mounting portion on which the safety barrier is mounted, and the cover is mounted on the cover in a state in which the safety barrier is mounted When the region is placed, the gate mounting portion can be disposed along the edge of the opening portion by the safety barrier on the lid. A processing apparatus comprising: a plurality of storage chambers for accommodating a plurality of storage chambers of the object to be processed, wherein: the plurality of storage chambers include: a top portion having an opening, -24-201220387, and closing the opening At least one of the storage chambers is provided with a first cover mounting region for placing a cover of another storage chamber. 8. The processing apparatus according to claim 7, wherein the storage chamber having the first lid loading area has a second lid mounting region on which a lid of the storage chamber is placed. 9. The processing apparatus according to claim 8, wherein an opening of the storage chamber having the second lid mounting region is provided at a center of the top portion, and the second lid mounting region is connected to the opening Adjacent settings. 10. The processing apparatus according to claim 9, wherein the first cover mounting area and the second cover mounting area are disposed to overlap each other. The processing apparatus according to the first aspect of the invention, wherein the first lid mounting area and the second lid mounting area are disposed more than an upper surface of the lid when the opening is closed. high. The processing apparatus according to any one of claims 1 to 11, wherein the plurality of storage chambers include: a processing chamber that processes the object to be processed in a vacuum pressure environment And a load lock chamber that temporarily accommodates the object to be processed when the object to be processed is transported between the atmospheric pressure environment and the processing chamber, and switches the inside to an atmospheric pressure environment or a vacuum pressure environment: and a transfer chamber, which is a gas The storage lock chamber and the processing chamber are densely connected, and a transfer device that transports the object to be processed between the load lock chamber and the processing chamber is provided inside. 13. The processing apparatus according to claim 12, wherein the transfer device is disposed inside the storage chamber of the above S-25-201220387, wherein the object to be processed is carried on the holding portion, and the holding portion is fitted The width of the opening is configured to be decomposed.