CN200990756Y - Electronic device producing room - Google Patents

Abstract

In a first aspect, a first multi-piece chamber is provided. The first multi-piece chamber includes (1) a central piece having a first side and a second side; (2) a first side piece adapted to couple with the first side of the central piece; and (3) a second side piece adapted to couple with the second side of the central piece. The central piece, the first side piece and the second side piece form a substantially cylindrical inner chamber region when coupled together. The pieces may each include openings in the top of the pieces and flat mounting surfaces for coupling the pieces together. Numerous other aspects are provided.

Description

Electronic device is made the chamber

Technical field

The utility model relates in general to flat-panel monitor and/or electronic device manufacturing, relates in particular to electronic device and makes the chamber.

Background technology

Along with the substrate size that uses in the flat-panel monitor strengthens, being used to make more, the size (for example, processing and/or transfer chamber) of the electronic device manufacturing chamber of massive plate display also must strengthen.But because the overall dimensions and/or the weight of chamber, the difficulty of making and transporting this chamber also increases along with the chamber size.Therefore, exist the electronic device that improvement is used to make the massive plate display to make the needs of chamber, and to the needs of the method for improving this chamber of transportation.

The utility model content

The purpose of this utility model is to provide a kind of electronic device of being convenient to transport to make the chamber.

According to some aspect, the utility model provides a kind of non-polygonal electronic device to make the chamber, comprises a plurality of chamber components, and being shaped as of described a plurality of chamber components is fitted together the non-polygonal described electronic device manufacturing of formation chamber.Each chamber component all has the size that meets ground and/or air transport regulation.But the overall dimensions that non-polygonal described electronic device is made the chamber does not meet ground and/or air transport regulation.

According to some aspect, the utility model provides a kind of electronic device to make the chamber, comprise: (1) first chamber component, its shape of cross section is oval for a part of cutting with two flat-cuts, thereby comprises two curved portion, first straight line portion and second straight line portion; (2) second chamber components, its shape of cross section is oval for a part of cutting with a flat-cut, thereby comprises a curved portion and the 3rd straight line portion; And (3) the 3rd chamber components, the part ellipse of its shape of cross section for cutting with a flat-cut, thereby comprise a curved portion and the 4th straight line portion.These chamber components are fit to be fitted together the formation cylindroid.

According to some aspect, the utility model provides a kind of electronic device to make the chamber, comprising: (1) first chamber component; (2) be fit to be connected to second chamber component of first chamber component; And (3) are fit to be connected to the 3rd chamber component of first chamber component.First chamber component comprises the top that its shape is formed by two curved portion, first straight line portion and second straight line portion.Second chamber component comprises that its shape is by a curved portion and the top that straight line portion forms.The 3rd chamber component comprises that its shape is by a curved portion and the top that straight line portion forms.

The length of first straight line portion of first chamber component is substantially equal to the straight line portion of second chamber component, and the length of second straight line portion of first chamber component is substantially equal to the straight line portion of the 3rd chamber component.When the second and the 3rd chamber component was connected to first chamber component, two curved portion of first chamber component, the curved portion of second chamber component and the curved portion of the 3rd chamber component formed ellipse.

About above-mentioned technical scheme, electronic device is made the chamber can be disassembled into a plurality of chamber components, and described a plurality of chamber components meet the regulation of ground and/or air transport standard.Therefore, can easily transport described electronic device and make the chamber.

By following detailed description, additional claim and accompanying drawing, will manifest other characteristics of the present utility model and aspect more fully.

Description of drawings

Fig. 1 makes the vertical view of chamber according to the first exemplary multi-part electronic device of some embodiment of the utility model;

Fig. 2 A makes the axle survey views such as decomposition of chamber according to the first exemplary multi-part electronic device among some embodiment Fig. 1 of the utility model;

Fig. 2 B is that first Room axle that waits when mounted of Fig. 2 A is surveyed view;

Fig. 2 C is the vertical view of first Room of Fig. 2 A;

Fig. 2 D is the end view of first Room of Fig. 2 A;

Fig. 3 is a survey view that waits of making the chamber according to the second exemplary multi-part electronic device of some embodiment of the utility model;

Fig. 4 A makes the axle survey views such as decomposition of chamber according to the second exemplary multi-part electronic device among some embodiment Fig. 3 of the utility model;

Fig. 4 B is that second Room axle that waits when mounted of Fig. 4 A is surveyed view;

Fig. 4 C is the vertical view of second Room of Fig. 4 A;

Fig. 4 D is the end view of second Room of Fig. 4 A;

Fig. 5 is a flow chart of explaining some method embodiment of the utility model.

Embodiment

Fig. 1 makes the vertical view of chamber 100 according to the first exemplary multi-part electronic device of some embodiment of the utility model.With reference to figure 1, the multi-part electronic device is made the transfer chamber that chamber 100 is transportation substrates in the electronic device manufacture process.Transfer chamber 100 is connected to one or more process chambers and/or load lock (load lock) 103 in the electronic device manufacture process.Transfer chamber 100 can be included in end effector (end effector) (not shown) that transports substrate in the electronic device manufacture process between process chamber and/or load lock 103.Exemplary substrate comprises for example glass plate, polymeric substrates, semiconductor wafer, mask, graticule or the like.

According to some embodiment of the present utility model, transfer chamber 100 can comprise a plurality of parts that couple together.More specifically, transfer chamber 100 can comprise first parts 109 (for example first side component) and second parts 111 (for example second side component) that are connected to the 3rd parts 113 (for example central module).First parts 109 and second parts 111 can encircle (not illustrating separately) by O and be connected to the 3rd parts 113.First parts 109 and second parts 111 can be fixed to the 3rd parts 113, for example screw, bolt or the like with fixture.Comprise three parts although the multi-part electronic device of Fig. 1 is made chamber 100, the multi-part electronic device is made the chamber can comprise more or less parts (for example 2,4,5,6 or the like).

The width of tradition transfer chamber (for example single part transfer chamber) is limited in usually and is less than or equal to about 3m, to meet or to adapt to the requirement of ground and/or air transport regulations, transport capacity and/or architectural design.For example, local regulation can forbid greater than airfreighter (for example Boeing-747) transportation with most of common capacity of the transfer chamber of about 3m, and transfer chamber is too big and can not be fit to the door of standard electronic device manufacturing facility inlet.On the contrary, in one or more embodiment of the present utility model, the width W 1 (for example whole width) of multi-part transfer chamber after assembling is 4.2m.Therefore, this electronic device manufacturing chamber 100 can hold bigger substrate than traditional single part transfer chamber.Electronic device is made chamber 100 can be the width more greater or lesser than 4.2m.

According to embodiment more of the present utility model, from vertical view or viewgraph of cross-section, the shape that each exemplary multi-part electronic device is made the parts 109-113 of chamber all is similar to the circle that is cut by one or more flat-cut.For example, from vertical view or viewgraph of cross-section, side component 109,111 is similar to a part of being cut by flat-cut and justifies (ellipse of perhaps, more generally saying so).Equally, from vertical view or viewgraph of cross-section, central module 113 is similar to the part circle that is cut by two parallel flat-cuts.This shape comprises two curved portion and two straight line portioies.The shape of side component 109,111 comprises curved portion and straight line portion.Notice that each parts 109-113 does not have polygonal shape.In other words, each parts 109-113 comprises at least one curved portion.

From vertical view, perhaps from viewgraph of cross-section, the shape (for example combination back shape) after assembling that exemplary multi-part electronic device is made chamber 100 is circular.It is cylindrical shape that exemplary multi-part electronic device is made the global shape (for example 3D shape) of chamber 100 after assembling.But the multi-part electronic device is made chamber 100 and can be had and comprise various non-polygonal other global shapes (for example oval cylinder).For the chamber material of scheduled volume, especially symmetrical non-polygon chamber, this non-polygonal chamber (for example drum-shaped chamber) can provide maximum available internal base plate to transmit area.For example, compare with the polygon chamber, non-polygon chamber does not comprise useless folding corner region.Like this, can transmit area with internal base plate for scheduled volume, the weight of non-polygon chamber can to transmit the polygon chamber of area with internal base plate littler than having equivalent.

Fig. 2 A is axle survey views such as decomposition of making chamber 100 (rotating the back with respect to situation shown in Fig. 1) according to the first exemplary multi-part electronic device of some embodiment of the utility model.Among first parts to the, the three parts 109-113 each can laterally connect to form the multi-part electronic device makes chamber 100.The length of first parts 109 represents with LS1, and the Breadth Maximum of first parts 109 (for example the width of wide point) is represented with WS1.The length of second parts 111 represents that with LS2 the Breadth Maximum of second parts 111 is represented with WS2.The maximum length of the 3rd parts 113 length of the longest point (for example) represents that with LC1 the width of the 3rd parts 113 is represented with WC1.

In one or more embodiments, the Breadth Maximum WC1 of the 3rd parts 113 is about 2.4m, and the maximum length LC1 of the 3rd parts 113 is about 4.2m.The 3rd parts 113 can adopt greater or lesser length and/or width.In an illustrated embodiment, the maximum length LC1 of the 3rd parts 113 also is the whole diameter of chamber 100.As shown in the figure, the length L S2 of the length L S1 of first parts 109 and second parts 111 equals the length of the 3rd parts 113 sides.But the length L S2 of the length L S1 of first parts 109 and/or second parts 111 can be different.In one embodiment, the width W S2 of the width W S1 of first parts 109 and/or second parts 111 is about 0.9m.But the width W S2 of the width W S1 of first parts 109 and/or second parts 111 can different (for example greater or lesser) and/or be differed from one another.(in one exemplary embodiment, the width of the 3rd parts 113 can be substantially equal to or add less than the width of first parts 109 width of second parts 111.But can also be other relation between the second and the 3rd parts 109,111 and 113 the width one).

Each parts 109-113 that the multi-part electronic device is made chamber 100 can be applicable to that the material of transfer chamber makes by aluminium for example, stainless steel or any feasible, relative inertness.

Although this multi-part electronic device is made the overall dimensions of chamber 100 and do not met ground and/or air transport regulation, this multi-part electronic device is made size conforms ground and/or the air transport regulation of each parts 109-113 of chamber 100.More specifically, in above-mentioned example, the integral width W1 that the multi-part electronic device is made chamber 100 is 4.2m, and this does not meet ground and/or air transport regulation.But the width W S2 of the width W S1 of first parts 109 and second parts 111 is 0.9m, and the width W C1 of the 3rd parts 113 is 2.4m, they each all meet ground and/or air transport regulation.(in another embodiment, the width W C1 of the 3rd parts 113 can be about 3 to 3.2m, and width W S1, the WS2 of first and second parts 109,111 can be about 0.5 to 0.6m.)

And each parts 109-113 that the multi-part electronic device is made chamber 100 can make in traditional machining center or workshop.Therefore, the producer of multi-part electronic device manufacturing chamber 100 can select one or more traditional machining centers or workshop to make the parts 109-113 that the multi-part electronic device is made chamber 100.Make the manufacturing of multi-part electronic device manufacturing chamber 100 can obtain better price at a plurality of traditional machining centers or the competition between the workshop.On the contrary, be similar to the multi-part electronic device and make chamber 100, can make its size and can hold more that the single part electronic device of large substrates is made the machining center of chamber or the quantity in workshop is limited.This limited amount machining center or workshop cause competition still less.Because competition still less can be more than making 100 costs of multi-part semiconductor manufacturing chamber so make this single part chamber.And, because this single part chamber does not meet ground and/or air transport regulation, so when this chamber of transportation, the producer of this single part chamber can need to obtain special measure, for example sign of escort under police, " super-huge loading " or the like.The multi-part electronic device is made chamber 100 does not need this measure.

Illustrate that referring now to Fig. 2 A and Fig. 2 B-2D the first multi-part electronic device makes the further feature of chamber 100, wherein Fig. 2 B is that the axle that waits of first Room 100, assembling back is surveyed a view; Fig. 2 C is the vertical view of first Room 100; Fig. 2 D is the end view (represented a facet of first Room 100, this facet is suitable for being connected to three substrates that further specify below and piles up load lock chamber) of first Room 100.

With reference to figure 2A-2D, first Room 100 comprises a plurality of recessed facet 201A-F (cannot see recessed facet 201D from outdoor).In the embodiment shown, six recessed facets are set, but more or less face can be set.

Each recessed facet 201A-F is provided with plane domain, and process chamber, load lock chamber (loadlock chamber) or other chamber can connect (for example by O ring or other potted component) hermetically to this plane domain, for example chamber 103 as shown in Figure 1.Although there is recessed facet 201A-F, the overall structure of first Room 100 is cylindrical shapes.For example, shown in Fig. 2 A-2C, first (side) parts 109 comprise that cylindrical wall 203, the second (side) parts 111 that wherein form recessed facet 201B, 201C comprise the cylindrical wall 205 that wherein forms recessed facet 201E, 201F.The 3rd (center) parts 113 have comprise respectively recessed facet 201A, 201D, the cylindrical shape opposing sidewalls 207,209 shown in figure (Fig. 2 A).

Because the interior zone of the cylindrical wall Room 100 203,205,207,209, the first of parts 109,111,113 also is cylindrical shape (for example referring to Fig. 2 A and Fig. 2 C) basically.The columnar structured internal volume that reduces first Room 100 makes the vacuum mechanical-arm that is positioned at 100 inside, first Room freely rotate simultaneously.For example, thereby rotate when transmitting substrate between each chamber 103 be connected in first Room 100 when manipulator, this rotation (Fig. 1) can take place.

In order to adapt to the rotation of vacuum machine hand channel chamber 100 the 3rd (center) parts 113, the 3rd parts 113 comprise gap regions 211A-D (referring to Fig. 2 A, wherein only showing breach 211A-C).Additional gap also is provided during opening (for example slit opening) that breach 211A-D forms in substrate transmits each face by first and second side components 109,111.That is to say that breach 211A-D can provide additional gap (shown in Fig. 2 A and 2B) at 213,215,217,219 o'clock at the opening that substrate transmits by corresponding respectively to recessed facet 201F, 201E, 201C, 201B.

Only have an opening although recessed facet 201B, 201C, 201E, the 201F of first and second parts 309,311 are shown as, each recessed facet can comprise other opening (for example 2,3,4 or more opening).Equally, the face 201A of the 3rd (center) parts 113 is shown as has single opening 221 (Fig. 2 A), but can comprise other opening (for example 2,3,4 or the like).The face 201D of the 3rd parts 113 (Fig. 2 D) comprises three vertical stacked opening 223A-C (Fig. 2 A and Fig. 2 D), but can comprise the opening (for example 1,2,4,5 or the like) of other quantity.In at least one embodiment of the present utility model, the middle opening 223B of the recessed facet 201D of the 3rd (center) parts 113 and the opening 217 that the opening 215 and first side component 109 of second side component, 111 recessed facet 201e are recessed into facet 201C vertically align (shown in Fig. 2 D).Notice that the size of each opening 213-223c can make substrate pass through.Can also adopt other structure or arrangement.

With reference to figure 2A-2B, first and second side components 109,111 comprise a plurality of fin structures 225 again, and each fin structure 225 is suitable for first Room 100 structural integrity is provided.For example, fin structure 225 can reduce the cylindrical shape side/roof of first and second side components 109,111 because the interior zone of first Room 100 and be connected to its any process chamber and/or the deflection that causes of the pressure differential between the internal environment of first Room 100.And, use fin structure 225 can reduce the wall thickness of first and second parts 109,111, and reduce the overall weight of first Room 100.In one embodiment, (for stainless steel) fin structure 225 has about 0.55 inch thickness near the outer side/roof of first and second side components 109,111, near the sealing surfaces of first and second side components 109,111 that contact central module 113, have about 1.3 inches thickness, but can also use other material and/or thickness.

Fig. 2 A further illustrates, and the bottom 227 of the 3rd (center) parts 113 of first Room 100 comprises planar section 229 and arcuate part 231 (equally referring to Fig. 2 D).Arcuate part 231 is because the shape of its arch and for bottom 227 provides higher intensity, and reduces the required material thickness in bottom 227.In one exemplary embodiment, when adopting stainless steel, arcuate part 231 can have and is less than or equal to about 3/8 " thickness, and planar section 227 can have the thickness that is less than or equal to about 3/4 " to 1 ".Can use the thickness difference between other material and/or one-tenth-value thickness 1/10 and/or planar section 229 and the arcuate part 231.In order further to improve the intensity of arcuate part 231, shown in Fig. 2 D, can below arcuate part 231, form fin or similar supporting construction 233.For example, use fin 233 can reduce the vertical misalignment of arcuate part 231.

Fig. 2 B-2C illustrates the top cover 235 that can use together with first Room 100.For example, lid 235 can be used to seal the 3rd (center) parts 113 (by adopt 0 ring or similar potted component between lid the 235 and the 3rd parts 113) of first Room.

With reference to figure 2B-2C, top cover 235 comprises the flat seal part of strengthening with the beam 239 of a plurality of supporting constructions shown in for example 237.The thickness of hermetic unit 237 can be similar to the thickness of the planar section 229 (Fig. 2 A) of 100 bottoms 227, chamber, and beam 239 provides additional structural support (can reduce to cover 235 thickness and weight).Cover 235 and can comprise connection location 241, this connection location 241 can be used for covering 235 with respect to (for example by crane or the like) rising of first Room 100 and/or reduction.

Because the weight of lid 235 preferably provides one or more and enters hatch (not shown) or other opening, thereby do not need to remove whole lid 235 from first Room 100 in lid 235, just entered the inside (for example in order to maintain or other maintenance) of first Room 100.Can comprise any amount of hatch (for example 1,3,4 or the like) that enters.

Fig. 3 makes the vertical view of chamber 300 according to the second exemplary multi-part electronic device of some embodiment of the utility model.With reference to figure 3, second embodiment that the multi-part electronic device is made chamber 300 also is the transfer chamber of transportation substrate in the electronic device manufacture process.Transfer chamber 300 is connected to one or more process chambers and/or load lock 103 in the electronic device manufacture process.Transfer chamber 300 can comprise the end effector (not shown), to be used for transporting substrate in the electronic device manufacture process in process chamber and/or load lock 103.

According to embodiment more of the present utility model, transfer chamber 300 can comprise a plurality of parts that link together.More specifically, transfer chamber 300 can comprise first parts 309 (for example first side component) and second parts 311 (for example second side component) that are connected to the 3rd parts 313 (for example central module).First parts 309 and second parts 311 can encircle (not illustrating separately) by O and be connected to the 3rd parts 313.First parts 309 and second parts 311 can be fixed to the 3rd parts 313, for example screw, bolt or the like with fixture.Comprise three parts although the multi-part electronic device of Fig. 3 is made chamber 300, this multi-part electronic device is made chamber can also comprise more or less parts (for example 2,4,5,6 or the like).

In one or more embodiment of the present utility model, the width W 2 (for example integral width) of multi-part transfer chamber after assembling is 4.2m.Therefore this electronic device manufacturing chamber 300 can hold bigger substrate than traditional single part transfer chamber.The width that electronic device is made chamber 300 can be greater than or less than 4.2m.

According to embodiment more of the present utility model, from vertical view or cross-sectional view as can be seen, the shape that each exemplary multi-part electronic device is made chamber component 309-313 is similar to the circle that is cut by one or more flat-cut.For example, from vertical view and viewgraph of cross-section as can be seen, side component 309, the 311 similar parts circles that cut by flat-cut (perhaps, more generally say so ellipse).Similarly, for example, from vertical view or cross-sectional view as can be seen, central module 313 is similar to the part circle that is cut by two parallel flat-cuts.This shape comprises two curved portion and two straight line portioies.The shape of side component 309,311 comprises curved portion and straight line portion.Notice that each parts 309-313 does not have polygonal shape.In other words, each parts 309-313 comprises at least one curved portion.

From vertical view and viewgraph of cross-section, it is circular that the second exemplary multi-part electronic device is made the shape (for example combined shaped) of chamber 300 after assembling.Global shape (for example 3D shape) after the assembling of the second exemplary multi-part electronic device manufacturing chamber 300 is cylindrical shape basically.But the multi-part electronic device is made chamber 300 can have other global shape (for example oval cylinder), comprises various non-polygons.As mentioned above, this non-polygonal chamber especially can increase available internal base plate transmission area in the non-polygon chamber (for example drum-shaped chamber) of symmetry for the chamber material of scheduled volume.

Fig. 4 A is axle survey views such as decomposition of making chamber 300 (rotating the back with respect to situation shown in Figure 3) according to the second exemplary multi-part electronic device of some embodiment of the utility model.Among first to the 3rd parts 309-313 each all laterally connects to form the multi-part electronic device makes chamber 300.The length of first parts 309 represents that with LS1 ' Breadth Maximum of first parts 309 (for example width of the wideest point) is represented with WS1 '.The length of second parts 311 represents that with LS2 ' Breadth Maximum of second parts 311 is represented with WS2 '.The maximum length of the 3rd parts 313 (for example length of the longest point) represents that with LC1 ' width of the 3rd parts 313 is represented with WC1 '.

In one or more embodiments, the Breadth Maximum WC1 ' of the 3rd parts 313 is about 2.4m, and the maximum length LC1 ' of the 3rd parts 313 is about 4.2m.The 3rd parts 313 can adopt longer or shorter length and/or width.In an illustrated embodiment, the maximum length LC1 ' of the 3rd parts 313 also is the integral diameter of chamber 300.As shown in the figure, the length L S2 ' of the length L S1 ' of first parts 309 and second parts 311 equals the length of the 3rd parts 313 sides.But the length L S2 ' of the length L S1 ' of first parts 309 and/or second parts 311 can be different.In one embodiment, the width W S2 ' of the width W S1 ' of first parts 309 and/or second parts 311 is about 0.9m.But the width W S2 ' of the width W S1 ' of first parts 309 and/or second parts 311 can different (for example longer or shorter) and/or be differed from one another.(in a certain embodiments, the width of the 3rd parts 313 can be substantially equal to or add the width of second parts 311 less than the width of first parts 309, but also can adopt between first, second and the 3rd parts 309,311 and 313 other width relation).

Each parts 309-313 that the multi-part electronic device is made chamber 300 can be made by for example aluminium, stainless steel or any practicality, the material that is suitable as the relative inertness of transfer chamber.

Although the multi-part electronic device is made the overall dimensions of chamber 300 and do not met ground and/or air transport regulation, this multi-part electronic device is made size conforms ground and/or the air transport regulation of each parts 309-313 of chamber 300.More specifically, in above-mentioned example, the integral width W2 that the multi-part electronic device is made chamber 300 is 4.2m, and this does not meet ground and/or air transport regulation.But the width W S2 ' of the width W S1 ' of first parts 309 and second parts 311 is 0.9m, and the width W C1 ' of the 3rd parts 313 is 2.4m, they each all meet ground and/or air transport regulation.(in another embodiment, the width W C1 ' of the 3rd parts 313 can be about 3 to 3.2m, and width W S1 ', the WS2 ' of first and second parts 309,311 can be about 0.5 to 0.6m.)

And each parts 309-313 that the multi-part electronic device is made chamber 300 can make in traditional machining center or workshop.Therefore, as above-mentioned multi-part electronic device was made chamber 100, the producer that the multi-part electronic device is made chamber 300 can select one or more traditional machining centers or workshop to make the parts 309-313 that the multi-part electronic device is made chamber 300.And this multi-part electronic device is made chamber 300 does not need special transport measure.

Illustrate that referring now to Fig. 4 A and Fig. 4 B-4D the first multi-part electronic device makes the further feature of chamber 300, wherein Fig. 4 B is that the axle that waits of second Room 300, assembling back is surveyed a view; Fig. 4 C is the vertical view of second Room 300; Fig. 4 D is the end view (facet of having represented second Room 300, described facet are suitable for being connected to three substrates that further specify below and pile up load lock chamber) of second Room 300.

With reference to figure 4A-4D, second Room 300 comprise a plurality of from the chamber the outstanding extension facet 401A-F of 300 crooked sidewall.In the embodiment shown, be provided with six and extend facet, but more or less facet can be set.

Each extends facet 401A-F and is provided with plane domain, and process chamber, load lock chamber or other chamber can connect (for example by O ring or other potted component) hermetically to this plane domain, for example chamber 103 as shown in Figure 3.Extend facet 401A-F although exist, the overall structure of first Room 300 is cylindrical shape basically.For example, shown in Fig. 4 A-4C, first (side) parts 309 comprise that extending facet 401B, 401C comprises that from its outstanding cylindrical wall 403, the second (side) parts 311 extension facet 401E, 401F are from its outstanding cylindrical wall 405.The 3rd (center) parts 313 have comprise respectively extend facet 401A, 401D, the cylindrical shape opposing sidewalls 407,409 shown in figure (Fig. 4 A).

Because the interior zone of the cylindrical wall Room 300 403,405,407,409, the second of parts 309,311,313 also is cylindrical shape (for example referring to Fig. 4 A and Fig. 4 C) basically.The columnar structured internal volume that reduces second Room 300 makes the vacuum mechanical-arm that is positioned at 300 inside, second Room freely rotate simultaneously.For example, thereby rotate when transmitting substrate between each chamber 103 be connected in first Room 300 when manipulator, this rotation (Fig. 3) can take place.

In order to adapt to the rotation of vacuum machine hand channel chamber 300 the 3rd (center) parts 313, the 3rd parts 313 comprise gap regions 411A-D (referring to Fig. 4 A, wherein only showing breach 411A-C).Additional gap also is provided during opening (for example slit opening) that breach 411A-C forms in substrate transmits each face by first and second side components 309,311.That is to say that breach 411A-D transmits at substrate can provide additional gap (shown in 4A and 4B) at 413,415,417,419 o'clock by the opening that corresponds respectively to face 401F, 401E, 401C, 401B.

Only have an opening although extension facet 401B, 401C, 401E, the 401F of first and second parts 309,311 are shown as, each extends facet can comprise other opening (for example 2,3,4 or more opening).Equally, the extension facet 401A of the 3rd (center) parts 313 is shown as has single opening 421 (Fig. 4 A), but can comprise other opening (for example 2,3,4 or the like).The extension facet 401D (Fig. 4 D) of the 3rd parts 313 comprises three vertical stacked opening 423A-C (Fig. 4 A and Fig. 4 D), but can comprise the opening (for example 1,2,4,5 or the like) of other quantity.In at least one embodiment of the present utility model, the opening 417 that the middle opening 423B that the 3rd (center) parts 413 extend facet 401D and second side component 311 extend the opening 415 of facet 401e and first side component, 309 extension facet 401C vertically align (shown in Fig. 4 D).Notice that the size of each opening 413-423c can make substrate pass through.Can also adopt other structure or arrangement.

With reference to figure 4A-4B, first and second side components 309,311 comprise a plurality of fin structures 425 again, and each fin structure 425 is suitable for second Room 300 structural integrity is provided.For example, fin structure 425 can reduce the cylindrical shape side/roof of first and second side components 309,311 because the interior zone of second Room 300 and be connected to its any process chamber and/or the deflection that causes of the pressure differential between the internal environment of the 3rd Room 300.And, use fin structure 425 can reduce the wall thickness of first and second parts 309,311, and reduce the overall weight of second Room 300.In one embodiment, (for stainless steel) fin structure 425 has about 0.55 inch thickness near the outer side/roof of first and second side components 309,311, near the sealing surfaces of first and second side components 309,311 that contact central module 313, have about 1.3 inches thickness, but can also use other material and/or thickness.

Fig. 4 A further illustrates, and the bottom 427 of second Room 300 the 3rd (center) parts 313 comprises planar section 429 and arcuate part 431 (equally referring to Fig. 4 D).Arcuate part 431 is because the shape of its arch and for bottom 427 provides higher intensity, and reduces the required material thickness in bottom 427.In one exemplary embodiment, when adopting stainless steel, arcuate part 431 can have and is less than or equal to about 3/8 " thickness, and planar section 427 can have the thickness that is less than or equal to about 3/4 " to 1 ".Can use the thickness difference between other material and/or one-tenth-value thickness 1/10 and/or planar section 429 and the arcuate part 431.In order further to improve the intensity of arcuate part 431, shown in Fig. 4 D, can below arcuate part 431, form fin or similar supporting construction 433.For example, use fin 433 can reduce the vertical misalignment of arcuate part 431.

Fig. 4 B-4C also illustrates the top cover 435 that can use together with second Room 300.For example, lid 435 can be used to seal the 3rd (center) parts 313 (by adopt O ring or similar potted component between lid the 435 and the 3rd parts 313) of first Room.

With reference to figure 4B-4C, top cover 435 comprises the flat seal part of strengthening with the beam 439 of a plurality of supporting constructions shown in for example 437.The thickness of hermetic unit 437 can be similar to the thickness of the planar section 429 (Fig. 4 A) of 300 bottoms 427, chamber, and beam 439 provides additional structural support (can reduce to cover 435 thickness and weight).Cover 435 and can comprise connection location 441, this connection location 441 can be used for covering 235 with respect to (for example by crane or the like) rising of second Room 300 and/or reduction.

Make chamber 100,300 in order to make the multi-part electronic device, user for example producer can adopt the 5 described creative methods 500 with reference to figure.Method 500 begins with step 502.According to this creativeness method 500, in step 504, determine one or more overall dimensions of electronic device manufacturing chamber.More specifically, the producer need make the substrate of required size.According to required size, the producer can determine that (for example design) can make one or more overall dimensions of the electronic device manufacturing chamber of this substrate.If required substrate size is enough big, the overall dimensions of chamber will meet at least one of ground and air transport regulation.

After this, in certain embodiments, for example, the producer can determine how the electronic device chamber of manufacturing is divided into a plurality of parts, thereby in a plurality of parts each size conforms ground and at least one in the air transport regulation, and the structural integrity of chamber, combination back will be enough to carry out manufacturing operation simultaneously.For example, the producer can make the chamber with the multi-part electronic device of design with vertical subdivision method and be divided into some parts, and for example the electronic device shown in Fig. 1-4 is made chamber 100,300.Laterally the subdivision method also can.The producer can determine with the subdivision method with other orientation or orientation combination the electronic device chamber of manufacturing to be divided into some parts.

After this, in step 506, make a plurality of parts.For example, the producer can adopt machining center or workshop to make a plurality of parts.Make the multi-part electronic device like this and make chamber 100,300.

Make chamber 100,300 in case made electronic device, in step 508, just electronic device can be made chamber 100,300 and be transported to for example curstomer`s site.Make chamber 100,300 in order to transport the multi-part electronic device, the producer can adopt the method for transportation according to this chamber of the one or more embodiment of the utility model.For example, first parts of a plurality of electronic devices manufacturing chamber components can transport by one of ground and air transport.First parts can be placed in the chest that meets the transportation regulation, thereby the face of first parts and chest (for example bottom surface) angulation.Therefore, if not being placed in the chest with this angle, first parts may have than the bigger actual height or the width dimensions that allow, but can also be contained in the chest that meets the transportation regulation.The ability that can load and transport bigger parts makes have this creationary multi-part chamber to be formed by less components.Therefore, preferably, parts are placed at angle in container.In certain embodiments, preferably, can make the multi-part chamber, make main or central module big as far as possible, and the standard size container of still packing into, and remainder is littler or as far as possible little, thereby easier assembling.

In case parts arrive for example curstomer`s site, just can in step 510, form electronic device manufacturing chamber 100,300 by assembling parts.In certain embodiments, in step 512, extend facet and can be installed in the electronic device manufacturing chamber 100, perhaps replace electronic device to make the recessed facet 201A-F of chamber 100.In such an embodiment, extending facet can help load lock and/or process chamber are connected to electronic device manufacturing chamber 100.In certain embodiments, the extension facet that is added to recessed facet 201A-F also can extend to the outside that electronic device is made chamber 100 peripheries fully, thereby the outdoor table that obtains is similar to the embodiment shown in Fig. 4 A.In other embodiments, the extension facet that is added to recessed facet 201A-F only partly extends the periphery that electronic device is made chamber 100.Extend facet and can comprise the have opening adaption section of plane domain (being used to connect load lock or process chamber) and the depression that is recessed into facet 201A-F of packing into hermetically of (its size can make substrate pass through).

In step 514, load lock and/or process chamber can be connected to the face that electronic device is made chamber 100,300.In step 516, can make at electronic device the manipulator that is fit to by non-polygon transfer chamber moving substrate between process chamber is installed in the chamber 100,300.In step 518, method 500 finishes.

Therefore, although disclose the utility model in conjunction with exemplary embodiment, should be appreciated that other embodiment also can fall in the spirit and scope of the present utility model, scope of the present utility model is defined by the claims.

The application requires the U.S. Patent application No.11/214 of submission on August 29th, 2005, the U.S. Patent application No.11/145 that on June 2nd, 475 and 2005 submitted to, 003 priority.These applications consider that various purposes are incorporated into this by reference and all.

Claims (23)

1. a non-polygonal electronic device is made the chamber, it is characterized in that, comprise a plurality of chamber components, being shaped as of described a plurality of chamber components is fitted together the non-polygonal described electronic device manufacturing of formation chamber, wherein, described a plurality of chamber component has separately and meets at least a size in ground and the air transport regulation, and the overall dimensions that non-polygonal described electronic device is made the chamber does not meet at least a in described ground and the air transport regulation.

2. electronic device as claimed in claim 1 is made the chamber, it is characterized in that each described chamber component all comprises at least one curved side.

3. electronic device as claimed in claim 2 is made the chamber, it is characterized in that at least one described chamber component comprises at least two curved side and two straight sided.

4. electronic device as claimed in claim 2 is made the chamber, it is characterized in that at least two described chamber components all comprise at least one curved side and a straight sided.

5. electronic device as claimed in claim 4 is made the chamber, it is characterized in that, described a plurality of chamber components are fit to be assembled together along described straight sided.

6. electronic device as claimed in claim 2 is made the chamber, it is characterized in that described at least one curved side all comprises at least one opening, and each opening not only its size can allow substrate pass through, but also is fit to be connected with second Room.

7. electronic device as claimed in claim 2 is made the chamber, it is characterized in that, at least one chamber component in described a plurality of chamber component has at least one facet at least one curved side, described at least one facet is fit to be connected to second Room, and comprises at least one opening.

8. electronic device as claimed in claim 7 is made the chamber, it is characterized in that described at least one facet is recessed in the described curved side.

9. electronic device as claimed in claim 8 is made the chamber, it is characterized in that described at least one facet comprises a plurality of openings.

10. electronic device as claimed in claim 7 is made the chamber, it is characterized in that described at least one facet is fit to extend described curved side.

11. electronic device as claimed in claim 10 is made the chamber, it is characterized in that described at least one facet comprises a plurality of openings.

12. an electronic device is made the chamber, it is characterized in that, comprising:

First chamber component, its shape of cross section is oval for a part of cutting with two flat-cuts, thereby comprises two curved portion, first straight line portion and second straight line portion;

Second chamber component, its shape of cross section is oval for a part of cutting with a flat-cut, thereby comprises a curved portion and the 3rd straight line portion; With

The 3rd chamber component, its shape of cross section is oval for a part of cutting with a flat-cut, thereby comprises a curved portion and the 4th straight line portion,

Wherein, described first, second and third chamber component is fit to be fitted together the shape that forms cylindroid.

13. electronic device as claimed in claim 12 is made the chamber, it is characterized in that, described two strings of shape of cross section that form described first chamber component are parallel.

14. electronic device as claimed in claim 12 is made the chamber, it is characterized in that, described first chamber component is fit to be connected to described second chamber component along described first straight line portion, and described first chamber component is fit to be connected to described the 3rd chamber component along described second straight line portion.

15. electronic device as claimed in claim 12 is made the chamber, it is characterized in that, described first, second and third chamber component is fit to be fitted together the columnar chamber of formation.

16. an electronic device is made the chamber, it is characterized in that, comprising:

First chamber component;

Be fit to be connected to second chamber component of described first chamber component; And

Be fit to be connected to the 3rd chamber component of described first chamber component,

Wherein, described first chamber component comprises the top, and the shape at described top is formed by two curved portion, first straight line portion and second straight line portion,

Wherein, described second chamber component comprises the top, and the shape at described top is formed by a curved portion and a straight line portion,

Wherein, described the 3rd chamber component comprises the top, and the shape at described top is formed by a curved portion and a straight line portion,

Wherein, the length of first straight line portion of described first chamber component is substantially equal to the straight line portion of described second chamber component, and the length of second straight line portion of described first chamber component is substantially equal to the straight line portion of described the 3rd chamber component,

Wherein, when described second and third chamber component was connected to described first chamber component, the curved portion of two curved portion of described first chamber component, described second chamber component and the curved portion of described the 3rd chamber component formed ellipse.

17. electronic device as claimed in claim 16 is made the chamber, it is characterized in that, the ellipse that is formed by the curved portion of described first, second and third chamber component is round.

18. electronic device as claimed in claim 16 is made the chamber, it is characterized in that, described second chamber component is fit to be connected to described first chamber component along the straight line portion of described second chamber component and first straight line portion of described first chamber component.

19. electronic device as claimed in claim 16 is made the chamber, it is characterized in that the second straight line portion length of first straight line portion of described first chamber component and described first chamber component about equally.

20. electronic device as claimed in claim 16 is made the chamber, it is characterized in that first straight line portion of described first chamber component is different with the length of second straight line portion of described first chamber component.

21. electronic device as claimed in claim 16 is made the chamber, it is characterized in that, in described first, second and third chamber component each all comprises at least one crooked sidewall and at least one facet in described crooked sidewall, described at least one facet is fit to be connected to load lock, and described at least one facet comprises the one or more openings that are fit to by substrate.

22. electronic device as claimed in claim 21 is made the chamber, it is characterized in that described at least one facet is recessed into described crooked sidewall.

23. electronic device as claimed in claim 21 is made the chamber, it is characterized in that described at least one facet extends out from described crooked sidewall.

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