TW201137183A - Copper foil for printed circuit board and copper-clad laminate for printed circuit board - Google Patents
Copper foil for printed circuit board and copper-clad laminate for printed circuit board Download PDFInfo
- Publication number
- TW201137183A TW201137183A TW100105943A TW100105943A TW201137183A TW 201137183 A TW201137183 A TW 201137183A TW 100105943 A TW100105943 A TW 100105943A TW 100105943 A TW100105943 A TW 100105943A TW 201137183 A TW201137183 A TW 201137183A
- Authority
- TW
- Taiwan
- Prior art keywords
- copper
- zinc
- mass
- layer
- circuit board
- Prior art date
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Laminated Bodies (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
201137183 六、發明說明: 【發明所屬之技術領域】 本發明’係關於一種耐熱性及耐藥品性優異之印刷電 路基板用銅羯及印刷電路基板用覆銅積層板,特別是關於 一種在銅箔之至少與樹脂的接著面’具有含有鎳、鋅及銅 之層(以下,稱為「銅鎳鋅層」。),並在該層上具有鉻 酸鹽被膜層、及進一步視需要所設之矽烷偶合劑層的印刷 電路基板用銅箔及使用該銅箔所製成之印刷電路基板用覆 銅積層板。 【先前技術】 ^半導體封裝基板為印刷電路基板之一種,係用於構裝 半導體ic晶片及其他半導體元件之印刷電路基板。形成於 半導體封裝基板之電路由於較通常之印刷電路基板微細, 因此基板材料係使用與—般印刷電路基板不同之樹脂基 半導體封裝基板,通常藉由下列步驟來製作。首先, 在高溫高麼下將銅落積層接著於合成樹脂等之基材。將此 稱為覆銅積層板或僅稱為積層板。接著1 了將作為目標 :導電性電路形成於積層板上,係藉由耐飯刻性樹 ;,將與電路相同之圖案印刷於銅箱上。然後,藉由敍刻 處理將所露出之㈣的不要部分加以去除。 ㈣後,去除印刷部而在基板上形成導電性電路。最 後將規定之元件祥接& & # & 一 坪钱於所形成之導電性電路,而形成電 疋件用之各種印刷電路基板 艰·彳交 兴抗敍劑或增層 201137183 (buildup)樹脂基板接合β 一般’對印刷電路基板用銅箔之品質要求,在與樹月旨 基材接著之接著面(所謂粗化面)及非接著面(所謂光澤 面)並不相同,必須同時滿足兩者。 對光澤面之要求,係要求(1 )外觀良好及保存時沒有 氧化變色現象,(2 )焊料潤濕性良好,(3 )高溫加熱時 沒有氧化變色現象,(4 )與抗蝕劑之密合性良好等。 而另-方面,對於粗化面,主要可舉出⑴在保存時 沒有氧化變色現象,⑺即使在經過高溫加熱、濕式處理、 焊接、藥品處理等後,與基材之剝離強度仍;i夠,(3)在 經過與基材之積層、㈣後,沒有產生所謂積層污點等。 又,近年來隨著電路印刷圖案的微細化,亦逐漸要求 銅箔表面的低粗度化。 且’於個人電腦或行動通訊等電子機器中,隨著通 A之冋速化、大容量化,電氣訊號朝高頻化邁進,故要求 I因應上述需求之印刷電路基板及銅箱。若電氣訊號之頻 Χ上時,則電流流過導體表面之集膚效應(skin effect)的影響變得雜这 _ . % 者’而無法忽視表面之凹凸導致電流 傳遞路徑產生變化,阻技 文儿丨且抗(hpedance)變大之影響。考量 此點’亦希望銅箱之表面粗糙度小。 為了因應此It , 分 / 而長1出了許多對印刷電路基板用銅 相之表面處理方法。[Technical Field] The present invention relates to a copper-clad laminate for a printed circuit board and a copper-clad laminate for a printed circuit board, which are excellent in heat resistance and chemical resistance, and more particularly to a copper foil. At least a layer containing nickel, zinc, and copper (hereinafter referred to as a "copper-nickel-zinc layer"), and a chromate coating layer on the layer, and further optionally A copper foil for a printed circuit board of a decane coupling layer, and a copper-clad laminate for a printed circuit board produced using the copper foil. [Prior Art] A semiconductor package substrate is a type of printed circuit board used for a printed circuit board in which a semiconductor ic chip and other semiconductor elements are mounted. Since the circuit formed on the semiconductor package substrate is finer than the usual printed circuit board, the substrate material is a resin-based semiconductor package substrate different from the general printed circuit board, and is usually produced by the following steps. First, the copper is deposited on a substrate such as a synthetic resin at a high temperature. This is called a copper clad laminate or simply a laminate. Then, as a target, a conductive circuit is formed on the laminate, and the same pattern as the circuit is printed on the copper box by the rice-resistant tree. Then, the unnecessary part of the exposed (four) is removed by the characterization process. (4) After that, the printed portion is removed to form a conductive circuit on the substrate. Finally, the specified components are connected to &&&&&&&&&&&&&&&&&&&&&&&&&&&&&&&&&& ) Resin substrate bonding β Generally, the quality requirements for the copper foil for printed circuit boards are not the same as the substrate (the so-called roughened surface) and the non-adhesive surface (the so-called shiny surface) of the substrate. Satisfy both. Requirements for glossy surface are required (1) good appearance and no oxidative discoloration during storage, (2) good solder wettability, (3) no oxidative discoloration when heated at high temperature, (4) dense with resist Good compatibility, etc. On the other hand, for the roughened surface, (1) there is no oxidative discoloration during storage, and (7) the peel strength with the substrate even after high-temperature heating, wet processing, welding, drug treatment, etc.; (3) After the layer and the substrate are laminated, (4), no so-called build-up stains or the like are generated. Further, in recent years, as the circuit printing pattern is miniaturized, the surface of the copper foil is required to have a low thickness. In the electronic devices such as personal computers and mobile communications, as the speed of A is faster and the capacity is increased, the electrical signals are moving toward higher frequencies. Therefore, it is required to provide printed circuit boards and copper boxes in response to the above requirements. If the frequency of the electrical signal is on the frequency, the effect of the skin effect of the current flowing through the surface of the conductor becomes mixed. _ % can't ignore the unevenness of the surface and cause a change in the current transmission path. The effect of babbling and hpedance is greater. Considering this point, it is also hoped that the surface roughness of the copper box is small. In order to respond to this It, a number of surface treatment methods for the copper phase of the printed circuit board have been made.
I延銅荡與電解隹Mi y A 解心的表面處理方法有所*同,電解 銅治之表面處理方法一 乃电例如下述之方法。 201137183 亦即’首先’為了提高銅與樹脂基材之接著力(剝離 強度),一般係將銅與氧化銅所構成之微粒附著於銅箔表 面(粗化處理),然後為了使其具有耐熱特性,而形成黃 銅或辞等耐熱層(障壁層)。 又,最後為了防止在運送時或保存時發生表面氧化等 現象,係施以藉由浸漬或電解所進行之鉻酸處理(chr〇mate treatment)或電解鋅鉻酸處理等防銹處理,藉而製成製品。 其中,尤以形成耐熱層之表面處理方法為決定銅箔表 面I·生狀之重要關鍵。因此,形成耐熱層之金屬或合金可舉 出如Zn、Cu— Ni合金、Cu— c〇合金及Cu— zn合金等而 形成有Zn、Cu-Ni合金、Cu—c〇合金及Cu_z^金等之 «層之大部分的㈣已實用化(例如’參照專利文獻n。 此等之中,形成有Cu—Zn合金(黃銅)所構成之耐敎 層的銅络使用在由環氧樹脂等所構成之印刷電路基板時, 由於具有樹脂層無污點’且經高溫保持印刷電路基板後之 銅落的剝離強度劣化少等優異特性,目此在工業上被廣為 使用°關於形成由此黃銅所構成之耐熱層的方法,係詳述 於專利文獻2。 、生然而近年來,於印刷電路基板,特別是封裝基板之製 造步驟中,為了提高抗触劑或增層樹脂基板與為電路面之 銅落之光澤面的密合性,係使用以硫酸與過氧化氫之混合 液進行軟蝕刻(soft etching)來將銅箔光澤面加以粗面化之 處理,惟若以上述硫酸與過氧化氫之混合液來對印刷電路 基板(係使用形成有專利讀!等所記載之公知耐熱層的 201137183 銅箔)的銅箔電路光澤面進 仃軟蝕刻,則會發生先前所形 成之電路圖案兩側端部(邊 緣。P)之侵飯(電路侵蚀)頊 象,而產生與樹脂基材之剝離3…、冤硌伩蝕)現 仍 < 剩離強度劣化的問題。 此電路侵触現象,伤扣 μ „ 、s s冶電路與樹脂基材之接著邊 界層被上述硫酸與過氧化氫 之混σ液钕蝕,而因此導致該 π /刀之銅珀的剝離強度顯著劣 戈化的現象。又,若整個電路 圖案均發生此現象時,電踗 “ ¥路圖案將會自基材剝離,而成為 威重之問題。 般已知鎳添加於黃銅而成 又 之錦一鋅一銅層可有 效作為能夠防止電路侵蝕現象 凡豕的表面處理層。然而,雖然 藉由添加鎳可防止電路侵飯g免 加a « 纷1又蝕現象,但是發明人等發現根據 錦添加量的不同,有時_舍古 ' 韦子會有耐熱性(耐熱剝離強度)降低 或形成電路時發生銅馆玲q j,白殘留荨較Cu— Zn合金(黃銅)所構 成之表面層差的情形。 專利文獻1 :日本特公昭51一 3571 1號公報 專利文獻2 :曰本特公昭54_67〇1號公報 【發明内容】 本發明之課題,在於開發一種在不會使Cu — Zn合金(黃 銅)所構成之表面層的諸特性劣化(將銅猪與樹脂基材加 以積層所製成之印刷電路基板之銅箔的常態剝離強度、以 兩溫將印刷電路板保持規定時間後的剝離強度(以下,稱 為耐熱剝離強度)、及耐藥品性(鹽酸))下,上述電路 侵蝕現象經減少之適用作為半導體封裝基板用的銅箔。 特別是在於當將銅箔積層於樹脂基材,大幅提升耐熱 201137183 剝離強度’且使用硫酸、過氧化氫系蝕刻液對電路進行 钱刻時’確立可有效防止該触刻液所造成之電路侵餘現象 (以下視需要,稱^「耐藥品性」)之銅羯的表面處 術。 议 為了解決上述課題,本發明人對在銅箔上進行表面處 理之條件等經過潛心研究的結果,發現以下之”對耐2 剝離強度提升及耐藥品性,#即對以硫酸、過氧化氣系触 J液進行銅箔光澤面之軟钱刻時粗化面的耐侵餘性(耐 路侵触性)有效。 由以上’本發明提供: 1)一種印刷電路基板用銅箔,係在銅箔表面,具備含 有鎳、辞及銅之層(以下,稱為「銅鎳鋅層」),該銅鎳 鋅層之每單位面積的鋅附著重量在200 //g/dm2以上、 2〇〇〇wg/dm2以下,該銅鎳鋅層中,犯為i〜5〇質量% , (鋅附著量(質量%) )/{1〇〇一(銅附著量(質量% ) )} 在0.3以上,(銅附著量(質量%) ) / {1〇〇一(鋅附著量 (質量% ))}在0.3以上。 又,本發明提供: 2 )如第1項所記載之印刷電路基板用銅箔,其中,在 該鋼鎳鋅層上具備鉻酸鹽被膜層。 3 )如第2項所記載之印刷電路基板用銅箔,其中,於 該鉻酸鹽被膜層中,每單位面積的鉻附著重量在3〇以g/ 以上、1〇〇仁g/dm2以下。 4 )如第2或3項所記載之印刷電路基板用銅箔,其中, 201137183 在該鉻酸鹽被膜層上,進—步具備我偶合劑層。 笔,5其)中如第二至4項中任一項所記載之印刷電路基板用銅 '、 鋼泊為電解銅箔,該銅鎳鋅層係形成在電M日# 之粗面或電解鋼落之光澤面。 &在電鑛時 [6其)中如第J & 5項中任一項所記載之印刷電路基板用銅 V白其中’鋼箔為壓延銅箔。 7) 一種印刷電路基板用覆銅積層板,係㈣i至6項 =力一載之印刷電路基板用銅荡與印刷電路基板用 Μ月曰加以貼合而製成。 如以上所示’本發明之印刷電路基板用銅荡,為了不 使印刷電路基板經高溫保持後之銅箔的剝離強度發生劣 化,係使用鋼鎳鋅層,藉此,可大幅地提升銅羯之耐熱剥 離強度。 且,藉此可得到能夠有效防止因藥品所造成之電路侵 敍現象,特別是能夠提升耐硫酸、過氧化氨性之新顆的特 性’作為印刷電路基板用銅箱(特別是半導體封裝基板用 銅落)、以及將銅羯與樹脂基材加以貼合所製成之覆銅積 層板(特別是半導體封裝基板用覆銅積層板)㉟為有效。 當然,亦可使用作為一般之印刷電路基板用銅箔。 【實施方式】 接著,具體且詳細地說明本發明,以纟易理解本發明。 本發明之mi,雖然電解㈣及麼延銅结皆可使用, 但是在電解銅落之情形時’可適用在電链時之粗面或電解 銅结之光澤面。又,並且亦可對此等之表面進—步施以粗 201137183 化處理。例如,為了提升樹脂基材與積層後之銅箔的制離 (peel )強度,係在脫脂後之銅箔表面施以粗化處理(例如 銅之「瘤」狀電沉積)的電解銅箔,並可直接使用之。 一般,於鼓式電解銅箔製造裝置,一側(鼓側)為光 澤面’相反側則為粗面。而於壓延銅箔,則為皆具有光澤 之壓延面。於本發明中,雖然電解銅箔具有粗面與光澤面, 但為粗面時,則可直接加以使用。而電解銅箔之光澤面, 為了進一步提高剝離強度,可施以粗化處理,形成粗化面。 於壓延銅箔,亦同樣地施以粗化處理。粗化處理’無 論是何種情形,皆可使用業已公知之粗化處理,並; 限制。 、 本發明之粗化面,係指電 施有粗化處理之電解銅羯或壓 所有之銅箔。 解銅箔之電鍍時的粗面,及 延銅箔的粗化面,可適用於 $ I發明之半導體封裝基板用銅fg,係、由形成 膜層及\ ^ (為與樹月旨之接著面)的銅錦鋅層、絡酸鹽被 述壓延二需要所設切貌偶合劑層構成。銅羯,可使用上 边壓延銅洎或電解銅箔。 二:層酸9被膜層’可使用電解路酸鹽被膜層或浸潰 及銅ίΓ:二上二?如係在銅*表面形成含有錄、辞 蚺馮「銅鎳鋅層」。)。 為了不使銅箔在高、π 上述銅錄辞層之銅荡::力:熱後之剝離強度劣化’必須使 母早位面積的鋅附著量在2〇0#g/ 201137183 dm以上。其原因在於:無論銅鎳鋅層的組成為何若鋅附 著重量未達200"g/dm2,則會沒有層形成的效果,高溫加 熱後之剝離強度的劣化將會加劇。另一方面,若鋅附著重 量超過2000 Wdm2時,則硫酸、過氧化氣系㈣液所造 成之電路端部的侵蝕會變得顯著。因此,上述銅鎳鋅層之 銅箔每單位面積的鋅附著量,較佳在2〇〇Vg/dm2以上、 2000 β g/ dm2 以下。 並且發明人等發現:銅錄鋅層中各金屬組成的平衡报 重要,藉由形成圖kCu_Ni_Zl^元合金組成區域所示 之區域X的銅錄鋅層,可使得高溫加熱後之_強度 樂品性(耐鹽酸性,耐硫酸、過氧化氫性)優異。以下具 J3* 祕 DCJ _ 1 丹 為了 率只要在 路侵敍現 後述之銅 度降低, 錄鋅層中 並且 銅鎳鋅層 耐薬品性 亦即 (質量% 量% )) 付而樂品性,必須添加錄,銅鎳鋅層中之鎳比 以上即可。若未達1% ’則無法有效地防^電 象。不過’若銅錄鋅層中的錄比率超過,則 ==的:、銅的平衡將會瓦解,剝離強 時常發生銅羯殘留,故不佳。因此,銅 之錄比率較佳在1%以上、5〇%以下。 銅 ,銅錄鋅層中之 中之辞與銅 广上5〇%以下時’ (涵酸)目 的比率會影響耐熱剝離強度或 (孤酸)。具體而言,必須滿足下式。 ;)(}鋅;;著二(質量%))/_1銅附著量 /川。〜(鋅:’在〇.3以上,(銅附著量(質 鋅附著量(質量%) Μ (式2)必須 201137183 在0.3以上(圖kx之區域)。 另為了容胃# 2)。 式刀別附註(式。與(式 例如’若鋅附著量過多,則 /{100一(鋼附著量(質量h(質量%)) 以上,但是鋼附著量會變少 式〇雖然會在0.3 /⑽-(辞附著量(質量二=量(質量… (圖1之區域〇。此情形時,由於相^)有時會低於〇.3 著量變少,因此耐荜^± f @ +於辞附著量,銅附 了条°〇性(鹽酸)會降低。 另方面,若銅附著量過 /{_-(辞附著量(質量%))}(:附:量(質量%)) 以上,但是(辞附著量(質量%));{10雖f會在0·3 (趣)”……會低於。·3({圖 於此清形時,由於相對於銅附著量,鋅… 因此耐熱剝離強度降低。因此,銅鎳辞層中 變少: 量的比率’較佳為滿足(辞附 二銅附者The surface treatment method of the copper ferrule and the electrolysis 隹 Mi y A is the same as the surface treatment method of the electrolytic copper treatment, for example, the following method. 201137183, that is, 'first' in order to improve the adhesion (peeling strength) between copper and resin substrate, generally, particles composed of copper and copper oxide are attached to the surface of the copper foil (roughening treatment), and then in order to have heat resistance characteristics. And a heat-resistant layer (barrier layer) such as brass or rhodium is formed. Further, in order to prevent the occurrence of surface oxidation or the like during transportation or storage, rust-preventing treatment such as chromic acid treatment or electrolytic zinc chromic acid treatment by dipping or electrolysis is applied. Made into products. Among them, the surface treatment method for forming the heat-resistant layer is an important factor for determining the surface I of the copper foil. Therefore, the metal or alloy forming the heat-resistant layer may be Zn, Cu-Ni alloy, Cu-c bismuth alloy, and Cu_z^ gold formed by, for example, Zn, Cu-Ni alloy, Cu-c 〇 alloy, and Cu-zn alloy. (4) The majority of the layers (4) have been put into practical use (for example, 'refer to the patent document n. Among them, a copper layer formed of a Cu-Zn alloy (brass) formed of a ruthenium resistant layer is used in the epoxy resin. When the printed circuit board is formed, the resin layer has no stains, and the peeling strength deterioration of the copper drop after holding the printed circuit board at a high temperature is excellent, and it is widely used in the industry. The method of forming a heat-resistant layer made of brass is described in detail in Patent Document 2. However, in recent years, in the manufacturing steps of a printed circuit board, particularly a package substrate, in order to improve the anti-contact agent or the build-up resin substrate, The adhesion of the shiny side of the copper surface of the circuit surface is treated by soft etching using a mixture of sulfuric acid and hydrogen peroxide to roughen the shiny side of the copper foil, except that the above sulfuric acid is used. Hydrogen peroxide mixture The soft surface of the copper foil circuit of the printed circuit board (using the 201137183 copper foil with the known heat-resistant layer described in the patent reading, etc.) is soft-etched, and both ends of the previously formed circuit pattern are formed (edge P) invaded rice (circuit erosion), and peeling from the resin substrate 3..., etched) is still a problem of deterioration of residual strength. The circuit intrusion phenomenon, the damage buckle μ „, the ss smelting circuit and the resin substrate substrate boundary layer is etched by the above mixed sulphuric acid and hydrogen peroxide σ liquid, thus causing the peeling strength of the π / knife copper slab is significantly inferior The phenomenon of Gehua. In addition, if this phenomenon occurs in the entire circuit pattern, the electric 踗 "¥路 pattern will be peeled off from the substrate, and become a problem of prestige. It is generally known that nickel is added to brass and the bismuth-zinc-copper layer is effective as a surface treatment layer which can prevent circuit erosion. However, although the addition of nickel can prevent the circuit from invading the rice, and the phenomenon of eclipse, the inventors found that depending on the amount of brocade added, sometimes _舍古' weizi has heat resistance (heat-resistant peeling) When the strength is lowered or the circuit is formed, the copper layer qqj, the white residual 荨 is worse than the surface layer formed by the Cu-Zn alloy (brass). [Patent Document 1] Japanese Patent Publication No. Sho 511-5571 1 Patent Document 2: 曰本特公昭54_67〇1 SUMMARY OF THE INVENTION The object of the present invention is to develop a Cu-Zn alloy (brass) The characteristics of the surface layer to be formed are deteriorated (the normal peel strength of the copper foil of the printed circuit board formed by laminating the copper pig and the resin substrate, and the peel strength after holding the printed circuit board for a predetermined time at both temperatures (below) In the case of the heat-resistant peeling strength and the chemical resistance (hydrochloric acid), the circuit erosion phenomenon described above is reduced as a copper foil for a semiconductor package substrate. In particular, when the copper foil is laminated on the resin substrate, the heat resistance 201137183 peel strength is greatly improved, and when the circuit is etched using sulfuric acid or hydrogen peroxide-based etching solution, the circuit can be effectively prevented from being invaded by the contact liquid. The phenomenon of the remaining phenomenon (hereinafter referred to as "chemical resistance") is the surface of the copper enamel. In order to solve the above-mentioned problems, the inventors of the present invention have conducted intensive studies on the conditions of surface treatment on a copper foil, and found that the following "peeling resistance to peeling 2 and chemical resistance", that is, sulfuric acid, peroxidizing gas It is effective to resist the repellency (road penetration resistance) of the roughened surface when the liquid J is exposed to the soft surface of the copper foil. The above invention provides: 1) A copper foil for a printed circuit board, which is copper The surface of the foil is provided with a layer containing nickel, copper and copper (hereinafter referred to as "copper nickel zinc layer"), and the zinc-zinc layer has a zinc adhesion weight per unit area of 200 //g/dm2 or more and 2〇〇. 〇wg/dm2 or less, in the copper-nickel-zinc layer, i~5〇% by mass, (zinc adhesion amount (% by mass))/{1〇〇(copper adhesion amount (% by mass))} is 0.3 or more (copper adhesion (% by mass)) / {1〇〇 (zinc adhesion (% by mass))} is 0.3 or more. The copper foil for a printed circuit board according to the first aspect of the invention, wherein the steel nickel-zinc layer is provided with a chromate film layer. (3) The copper foil for a printed circuit board according to the second aspect, wherein the chromium coating layer has a chromium adhesion weight per unit area of 3 g or more and 1 barium g/dm2 or less. . (4) The copper foil for a printed circuit board according to the second or third aspect, wherein, in the case of the chromate coating layer, the layer of the coupling agent is further provided on the chromate coating layer. In the fifth aspect of the invention, the copper of the printed circuit board as described in any one of the items 2 to 4, the steel boll is an electrolytic copper foil, and the copper-nickel-zinc layer is formed on the rough surface or the electrolysis of the electric M-day # The shiny surface of the steel. In the case of the electric ore, the copper foil of the printed circuit board as described in any one of the items J & 5, wherein the steel foil is a rolled copper foil. 7) A copper-clad laminate for printed circuit boards, which is made up of (4) i to 6 items. The printed circuit board is bonded to the printed circuit board by a copper slab. As described above, the copper substrate of the printed circuit board of the present invention is used to reduce the peel strength of the copper foil after the printed circuit board is maintained at a high temperature, thereby using a steel nickel-zinc layer. Heat resistant peel strength. In addition, it is possible to obtain a characteristic that can effectively prevent the circuit from being invaded by the drug, and in particular, to improve the resistance of sulfuric acid and ammonia peroxide, as a copper case for a printed circuit board (especially for a semiconductor package substrate) It is effective to form a copper-clad laminate (particularly a copper-clad laminate for a semiconductor package substrate) 35 which is formed by laminating a copper crucible and a resin substrate. Of course, a copper foil for a general printed circuit board can also be used. [Embodiment] The present invention will be specifically and specifically described, and the present invention will be understood. In the mi of the present invention, although both the electrolysis (4) and the prolonged copper junction can be used, in the case of electrolytic copper falling, it can be applied to the rough surface of the electric chain or the shiny surface of the electrolytic copper junction. Moreover, it is also possible to apply a rough 201137183 treatment to the surface of the surface. For example, in order to increase the peel strength of the resin substrate and the copper foil after lamination, an electrolytic copper foil which is subjected to roughening treatment (for example, "tumor" electrodeposition of copper) on the surface of the copper foil after degreasing is used. It can be used directly. Generally, in the drum type electrolytic copper foil manufacturing apparatus, the one side (the drum side) is the glossy side, and the opposite side is the rough side. In the case of a rolled copper foil, it is a calendered surface which is glossy. In the present invention, although the electrolytic copper foil has a rough surface and a glossy surface, it can be used as it is when it is a rough surface. On the other hand, in order to further improve the peeling strength, the shiny surface of the electrolytic copper foil may be subjected to a roughening treatment to form a roughened surface. The rolled copper foil was similarly subjected to a roughening treatment. The roughening process is used in any case where it is known to be roughened and limited; The roughened surface of the present invention refers to an electrolytic copper crucible or a copper foil which is subjected to roughening treatment. The rough surface of the copper foil and the roughened surface of the copper foil can be applied to the copper fg for the semiconductor package substrate of the invention, which is formed by the formation of the film layer and \^ (for the purpose of the tree The copper-zinc layer and the osmium acid salt of the surface are described as being formed by calendering. For copper matte, the upper copper or copper foil can be used. Two: layer of acid 9 film layer ' can use the electrolytic film salt layer or impregnation and copper Γ: two on the second? If it is formed on the surface of copper*, it contains the "copper nickel zinc layer". ). In order not to make the copper foil high, π the above copper recording layer of copper:: force: peeling strength deterioration after heat 'must make the mother early area of the zinc adhesion amount of 2〇0#g / 201137183 dm or more. The reason is that, regardless of the composition of the copper-nickel-zinc layer, if the weight of the zinc attached is less than 200"g/dm2, there is no effect of layer formation, and the deterioration of the peel strength after high-temperature heating is intensified. On the other hand, when the zinc adhesion weight exceeds 2000 Wdm2, the corrosion of the end portion of the circuit due to the sulfuric acid or the peroxidation gas system (four) liquid becomes remarkable. Therefore, the amount of zinc adhered per unit area of the copper foil of the copper-nickel-zinc layer is preferably 2 〇〇Vg/dm 2 or more and 2000 β g/dm 2 or less. And the inventors have found that the balance of the metal composition in the copper-recorded zinc layer is important, and the zinc-bearing zinc layer in the region X shown in the composition region of the kCu_Ni_Zl^ alloy is formed to enable the intensity of the high-temperature heating product. Excellent (hydrochloric acid resistance, sulfuric acid resistance, hydrogen peroxide resistance). The following J3* secret DCJ _ 1 Dan in order to reduce the copper level as described in the road intrusion, the zinc-plated layer and the corrosion resistance of the copper-nickel-zinc layer (% by mass)) It must be added, and the nickel in the copper-nickel-zinc layer can be more than the above. If it is less than 1%, it cannot effectively prevent the electric motor. However, if the recording ratio in the zinc-coated zinc layer exceeds, then ==: The balance of copper will collapse, and the copper peel will often occur when the peeling is strong, so it is not good. Therefore, the copper recording ratio is preferably 1% or more and 5% or less. The ratio of the words in the copper and copper-bearing zinc layers to the ratio of copper (up to 5%) to the heat-resistant peel strength or (or sour acid). Specifically, the following formula must be satisfied. ;) (}Zinc;; two (% by mass)) / _1 copper adhesion / Sichuan. ~ (Zinc: 'In 〇.3 or more, (copper adhesion amount (mass zinc adhesion amount (% by mass) Μ (Formula 2) must be 201137183 at 0.3 or more (in the area of Figure kx). Another for Rongwei # 2). Note: For example, if the amount of zinc adhered is too large, /{1001 (steel adhesion amount (mass h (% by mass)) or more, but the amount of steel adhesion will decrease, although it will be 0.3 / (10)-(Sentence amount (quality 2 = quantity (quality... (area in Fig. 1). In this case, due to phase ^), it may be lower than 〇.3, the amount is less, so 荜^± f @ + When the amount of adhesion is changed, the copper is attached to the strip. The hydrochloric acid is reduced. On the other hand, if the copper adhesion amount is over / {_- (the amount of adhesion (% by mass))} (:: amount (% by mass)) or more , but (the amount of resignation (% by mass)); {10 although f will be at 0·3 (interesting)"... will be lower than .3 (in the case of this clearing, due to the amount of copper attached, zinc ... Therefore, the heat-resistant peel strength is lowered. Therefore, the copper-nickel layer is lessened: the ratio of the amount is preferably satisfied (the attached copper-attachment)
(鋼附著量(質㈣)}(式W 量(質量% ·以上、(銅附著 (質里…(辞附著量 在0·3以上兩式。 彳))}(式2) 鋼錄鋅層,通常以下述條件來形成。然而,只要是可 銅錦辞層之每單位面積的鋅附著重量在如2 〇/、2〇〇〇/^加2以下’該銅錦鋅層中Nl4l〜5〇重量 ’(鋅附著量(質量%) ) /{1〇〇_ (鋼附著量(質量 0 (式1)在0·3以上’(銅附著量(質量%/ 201137183 (⑽―(鋅附著量(質量%))}(式2)在〇3以上」的 電鑛條件,則並無特別限制,亦可使用其他的電鑛條件。 (鑛敷液組成) 以 Nl . 〇 lg/L〜3〇g/L,Zn : 〇.lg/L〜12g/L,Cu : 〇.lg(L〜2g八’硫酸(Η』。。:〇々八〜i〇g八為基 本鑛冷。χ ’亦可使用其他無機酸或有機竣酸(摔權酸' 蘋果酸等)代替硫酸。 (電流密度)3〜25 A/dm2 接著此鉻酸鹽被膜層之製作,鉻酸處理可適用電解 鉻酸處理、浸潰鉻酸處理、及鉻酸鹽鍍浴中含有鋅之鋅鉻 酸處理。 無論是在哪一種情形,若鉻附著重量未達30〆g/ dm2’則由於增㈣酸性與耐熱性之效果少,因此使絡附著 重量在3“g//dm2以上。又,若絡附著重量超過i〇〇m / dm時,則鉻酸處理之效果會飽和,鉻附著重量無法再增 加。若總結此等’則鉻酸處理層中每單位面積之絡附著重 量較佳為30〜1〇〇 a g/dm2。 用以形成上述鉻酸鹽被臈層之條件之例記載如下。然 而,如上述,並不必受到此條件之限制,業已公知之鉻酸 處理皆可使用。 一般,浸潰鉻酸處理之情形,可達成每單位面積之鉻 附著重量30〜,g/dm2。又,電解絡酸處理之情形,則 可達成每單位面積之鉻附著重量3〇〜1〇〇" g//dm2。 此防錄處理,係會對銅箱之对酸性與耐熱性造成影響 12 201137183 的因素之一,藉由鉻酸處理,由於可更加提升銅箔之财藥 品性與耐熱性,因此為有效。 (a )浸潰鉻酸處理之一例(Steel adhesion amount (mass (4))} (Formula W amount (% by mass or more) (copper adhesion (quality (...) (2) , usually formed under the following conditions. However, as long as the copper adhesion layer per unit area of the zinc adhesion weight is, for example, 2 〇 /, 2 〇〇〇 / ^ plus 2 or less 'the copper zinc layer Nl4l ~ 5 〇weight '(zinc adhesion amount (% by mass)) /{1〇〇_ (steel adhesion amount (mass 0 (formula 1) above 0·3' (copper adhesion amount (mass%/ 201137183 ((10)-(zinc adhesion) The amount (mass %))} (Formula 2) is not particularly limited as long as it is 电3 or more. It is also possible to use other ore conditions. (Mineral composition) Nl. 〇lg/L~ 3〇g/L, Zn: 〇.lg/L~12g/L, Cu: 〇.lg (L~2g 八's sulphuric acid (Η 。..: 〇々8~i〇g8 is basic mine cold.χ 'Other inorganic acids or organic citric acid (worry acid 'malic acid, etc.) can also be used instead of sulfuric acid. (Current density) 3~25 A/dm2 Next, the chromate coating is made, and chromic acid treatment can be applied to electrolytic chromium. Acid treatment, impregnation chromic acid treatment, and chromate plating The bath contains zinc zinc chromic acid. In either case, if the chromium adhesion weight is less than 30〆g/dm2', the effect of increasing (4) acidity and heat resistance is small, so the adhesion weight is 3"g. //dm2 or more. Also, if the attached weight exceeds i〇〇m / dm, the effect of chromic acid treatment will be saturated, and the chrome adhesion weight can no longer be increased. If this is summarized, then the unit area per unit of chromic acid treatment layer The adhesion weight of the network is preferably 30 to 1 〇〇ag/dm 2 . Examples of the conditions for forming the above-mentioned chromate layer are as follows. However, as described above, it is not necessary to be limited by this condition, and chromium is known. Acid treatment can be used. Generally, in the case of chromic acid treatment, the chromium adhesion weight per unit area can be 30~, g/dm2. In addition, in the case of electrolytic acid treatment, chromium adhesion per unit area can be achieved. Weight 3〇~1〇〇" g//dm2. This anti-recording treatment is one of the factors affecting the acidity and heat resistance of the copper box 12 201137183, which can be further enhanced by chromic acid treatment. Foil is economical and heat resistant, so it is effective (a) An example of impregnation of chromic acid
Cr03 或 K2Cr2〇7 : 1〜12g/L ’ Zn ( OH) 2 或 ZnS04 · 7H20:〇〜i〇g/L,Na2S〇4:〇〜20g/L,pH2.5〜12.5, 溫度:20〜60°C,時間:0.5〜20秒 (b)電解鉻酸處理之一例Cr03 or K2Cr2〇7 : 1~12g/L ' Zn ( OH) 2 or ZnS04 · 7H20: 〇~i〇g/L, Na2S〇4: 〇~20g/L, pH 2.5~12.5, Temperature: 20~ 60 ° C, time: 0.5 to 20 seconds (b) an example of electrolytic chromic acid treatment
Cr03 或 K2Cr207 : 1 〜12g/L,Zn ( OH) 2 或 ZnS〇4 · 7H2〇 : 〇〜10g/L,Na2S04 : 0〜20g/L,ρΗ2·5〜12·5,溫 度:20〜60 °C ’電流密度0.5〜5 A/ dm2,時間:0 5〜2〇 秒 本發明之印刷電路基板用銅箱所使用之矽烷偶合劑, 較佳為例如至少含有四烷氧矽烷、與具備具有與樹脂之反 應性之官能基的烧氧矽烷之1種以上。此石夕烧偶合劑之選 擇亦為任意’但較佳為考慮與樹脂之接著性來加以選擇。 並且’本發明提供一種將上述第1至6項中任一項所 記载之印刷電路基板用銅箔與樹脂基材加以貼合而製成之 覆銅積層板。 接著,於此防銹層上,施以矽烷偶合劑處理(塗布後, 乾燥)。 矽烷偶合劑處理之條件如下。 將s有0.5體積%之環氧矽院(ep〇xysiiane )的水溶夜 調整成PH7,進行塗布,然後加以乾燥。 [試驗方法] 13 201137183 與銅诂積層之樹脂基材,係使用以下之2種類。 FR — 4樹脂(玻璃布基材環氧樹脂) BT樹脂(三讲—雙馬來亞醯胺系樹脂,商標名:三菱 瓦斯化學股份有限公司製GHPL— 830) 另,BT樹脂,耐熱性高,係半導體封裝用印刷電路基 板所使用之材料。 (1 )使用FR— 4基板之常態剝離強度與耐熱剝離強度 的測量 對積層銅箔形成有銅鎳鋅層之面與FR_4樹脂基材而 製成之積層板上的銅箔進行蝕刻,在積層板上形成1〇mm寬 的銅箔電路。 將此電路加以剝離,測量常態剝離強度。接著,測量 上述形成有10mm寬之銅结電路的積層板於大氣中以18〇。〇 加熱2天後之剝離強度(以下稱為耐熱剝離強度)、及與 該常態剝離強度相較之相對劣化率(損耗%),_4基板 若與BT基板相比較,則耐熱性顯得較差。 因此’當使用FR- 4基板時,若具有良好的耐熱剝離 強度與低劣化率’則使用BT基板時,亦會具有充分的耐熱 剝離強度與劣化率。 (2 )使用BT基板之常態剝離強度與耐硫酸過氧化氮 性的測量 對積層銅4形成有鋼錄鋅層之面與们樹脂基材而製成 之積層板上的mi進行触刻,在積層板上形成。4顏寬的 銅冶電路μ此電路加以剝離,測量常態剝離強度。接著, 201137183 使用上述形成有0.4mm寬之銅荡電路的 酸、過氧化氫”驗及㈣酸性試Γ 進行耐硫 才瓜酉欠過氧化氫性試驗,係將n 1 i 浸潰於含有硫…。體積%及過氧路 =:㈣電路厚度㈣掉2心後,測量 強度純之相對劣化率(損耗%)。 此情形之剝離強度的測量, 當使用FR-4義板時_ /說疋在嚴酷的環境下, 丞扳時,係較一般所進杆 加嚴酷的條件。 進订之耐樂性評價更 因此,當使用BT基板時,若呈古& t 化氫性m4美板亦合且二 硫酸、過氧 耐硫酸、過氧化氳性)。 (特別疋 耐鹽酸試驗,係將積層板上之鋼 12重量%之6(rc的液 貢於3有1酸 Μ μ 夜體9〇刀4里後,測量剝離強度及與哕 常態剝離強度相較之相對劣化率(損耗%)。 … (3)每單位面積之鎳及辞之鍍敷附著重 以銅箱形成有銅鎳鋅層之面 路《於表面的方式盘Fr__ 4樹脂基材積層,製作積。 於靜把η 積㈣接者,以鹽酸或硝酸將露出 於積層板表面之銅鎳辞層與其母層之銅加 行溶解液中之辞濃度的化學分析,來測量每單位面= 的附著重量。 干躓之鋅 (4 )鋅、鎳及銅之存在比的解析 = XPS(X射線光電子光譜法),來測量銅 所含有之錦、辞及銅的存在比。測量,係、-邊藉由氯^ 15 201137183 a又對銅泊厚度進行㈣,—邊從最表面至銅層(為鋼錄 辞層之基底)為止間歇地進行,纟自最表面起之深度,將 各冰度所得之錦、鋅及銅的存在比加以積分,藉此計算 鎖鋅及銅在銅錦鋅層全體的平均存在比。 測量所使用之機器為KRATOS公司製造之AXIS〜 HS’氬離子濺鑛的輸出& 52 5w。於此條件下,銅落厚度 會在1分鐘被蝕刻掉約20人。濺鍍時間係α 15 : 條件進行。 知之 實施例 接著,說明實施例及比較例。其結果示於以下各表。 ,,本實施例僅為顯示較佳之一 {列,本發明並不限定於此 等之實施伤!目此,包含於本發明之技術思想的變形 '其 他之實施例或態樣,全部包含於本發明。 八 另,為了與本發明進行比對,揭露有比較例。 (實施例1〜9 ) 使用厚度12”之電解㈣,以下述所示之條件,藉 由電鍍將銅鎳鋅層形成在此銅,g的粗化面(表面平均粗糙 度:3·8μη〇 。鎳、鋅、銅的存在比率示於表i。 (實施例1之電鍍液組成)Cr03 or K2Cr207: 1 to 12g/L, Zn(OH) 2 or ZnS〇4 · 7H2〇: 〇~10g/L, Na2S04: 0~20g/L, ρΗ2·5~12·5, temperature: 20~60 °C 'current density: 0.5 to 5 A/dm2, time: 0 5 to 2 sec. The decane coupling agent used in the copper box for a printed circuit board of the present invention preferably has at least a tetraalkane, and has One or more kinds of oxyalkylene oxides having a functional group reactive with a resin. The choice of the zebra coupling agent is also arbitrary, but it is preferably selected in consideration of the adhesion to the resin. The present invention provides a copper clad laminate obtained by laminating a copper foil for a printed circuit board according to any one of the above items 1 to 6 and a resin substrate. Next, this rustproof layer was treated with a decane coupling agent (after coating, dried). The conditions under which the decane coupling agent is treated are as follows. The water-soluble night of 0.5% by volume of epoxy broth (ep〇xysiiane) was adjusted to pH 7, coated, and then dried. [Test method] 13 201137183 The following two types of resin substrates are used for the resin substrate. FR-4 resin (glass cloth substrate epoxy resin) BT resin (three lectures - double malayanamide resin, trade name: Mitsubishi Gas Chemical Co., Ltd. GHPL-830) In addition, BT resin, high heat resistance It is a material used for a printed circuit board for semiconductor packaging. (1) Measurement of normal peel strength and heat-resistant peel strength of the FR-4 substrate The copper foil on the laminate plate formed by laminating the surface of the copper foil with the copper-nickel-zinc layer and the FR_4 resin substrate was etched. A 1 mm wide copper foil circuit is formed on the board. This circuit was peeled off and the normal peel strength was measured. Next, the laminate in which the above-described copper junction circuit having a width of 10 mm was formed was measured at 18 Torr in the atmosphere.剥离 The peel strength after heating for 2 days (hereinafter referred to as heat-resistant peel strength) and the relative deterioration rate (loss %) compared with the normal peel strength, the heat resistance is inferior if the substrate is compared with the BT substrate. Therefore, when the FR-4 substrate is used, if the BT substrate is used with good heat-resistant peel strength and low deterioration rate, sufficient heat-resistant peel strength and deterioration rate are obtained. (2) Measurement of the normal peel strength and the sulfuric acid-resistant nitrogen peroxide property of the BT substrate, and the contact of the layer of the copper-plated zinc layer on the laminated plate made of the steel substrate and the resin substrate is carried out. Formed on the laminate. 4 Yan Kuan's copper smelting circuit μ This circuit is peeled off and the normal peel strength is measured. Next, 201137183, using the above-mentioned acid and hydrogen peroxide forming a 0.4 mm wide copper-plated circuit, and (4) acid test, the sulfur-tolerant test was carried out, and the n 1 i was impregnated with sulfur. ....% by volume and peroxygen path =: (4) Thickness of the circuit (4) After the 2 hearts are dropped, the relative deterioration rate (loss %) of the measured intensity is pure. The peel strength measurement in this case, when using the FR-4 plate _ /疋In a harsh environment, when you pull it, it is more harsh than the normal one. The evaluation of the endurance of the order is even more so when using the BT substrate, if it is a & t hydrogen-hydrogen m4 Also combined with disulfuric acid, peroxysulfuric acid, and bismuth peroxide. (Specially resistant to hydrochloric acid test, the steel on the laminated board is 12% by weight of 6 (the liquid of rc is tributed to 3 with 1 acid Μ μ night body) After the boring tool 4, the peeling strength and the relative deterioration rate (loss %) compared with the bismuth normal peel strength were measured. (3) The nickel per unit area and the plating adhesion were made of copper and nickel in the copper box. The surface of the zinc layer "on the surface of the disk Fr__ 4 resin substrate layer, making a product. Yu Jing η product (four) receiver The chemical concentration of the copper-nickel layer on the surface of the laminate and the copper layer in the mother layer is measured by hydrochloric acid or nitric acid to measure the adhesion weight per unit surface = dry zinc (4) zinc Analysis of the existence ratio of nickel and copper = XPS (X-ray photoelectron spectroscopy) to measure the existence ratio of brocade, rhetoric and copper contained in copper. Measurement, system, and edge by chlorine 15 15 201137183 a The thickness of the berth is (4), which is intermittently carried out from the outermost surface to the copper layer (the base of the steel recording layer), and the depth from the outermost surface is used to compare the existence ratio of the brocade, zinc and copper obtained from each ice. Integral, thereby calculating the average existence ratio of zinc and copper in the copper-zinc layer. The machine used for the measurement is the output of AXIS~HS' argon ion splashing manufactured by KRATOS & 52 5w. Under these conditions, The thickness of the copper drop was etched away by about 20 in one minute. The sputtering time was α 15 : conditions were observed. Examples of the examples Next, the examples and comparative examples will be described. The results are shown in the following tables. In order to display one of the preferred {columns, the invention is not limited The present invention is also included in the present invention. The other embodiments or aspects included in the present invention are all included in the present invention. Eighth, in order to compare with the present invention, a comparative example is disclosed. Examples 1 to 9) Using a thickness of 12" electrolysis (4), a copper-nickel-zinc layer was formed on the copper by electroplating under the conditions shown below, and the roughened surface of g (surface average roughness: 3·8 μη〇). The ratio of the presence of nickel, zinc, and copper is shown in Table i. (Composition of plating solution of Example 1)
Ni:3g/L,Zn:6g/L,Cu:〇5g/L,硫酸(H2s〇4):Ni: 3 g/L, Zn: 6 g/L, Cu: 〇 5 g/L, sulfuric acid (H 2 s 〇 4):
7-5g/L (實施例2之電鍍液組成) 硫酸(h2so4):7-5 g/L (composition of the plating solution of Example 2) sulfuric acid (h2so4):
Ni: 20g/L,Zn: 3g/L,Cu: 〇.2g/LNi: 20g/L, Zn: 3g/L, Cu: 〇.2g/L
8.5g/L 201137183 (實施例3之電鍍液組成)8.5g/L 201137183 (the composition of the plating solution of Example 3)
Ni : 13g/L,Zn : lg/L,Cu : 2g/ L,硫酸(H2SO4): 8.5g/L (實施例4之電鍍液組成)Ni: 13 g/L, Zn: lg/L, Cu: 2 g/L, sulfuric acid (H2SO4): 8.5 g/L (composition of the plating solution of Example 4)
Ni: 10g/L,Zn: 12g/L,Cu: 0.2g/L,硫酸(H2S〇4): 8.5g/L (實施例5之電鍍液組成)Ni: 10 g/L, Zn: 12 g/L, Cu: 0.2 g/L, sulfuric acid (H2S〇4): 8.5 g/L (composition of the plating solution of Example 5)
Ni : 28g/ L,Zn : 8g/ L ’ Cu : 0.5g/ L,硫酸(H2S〇4 ): 8.5g/L (實施例6之電鍍液組成)Ni : 28 g / L, Zn : 8 g / L ′ Cu : 0.5 g / L, sulfuric acid (H 2 S 〇 4 ): 8.5 g / L (composition of the plating solution of Example 6)
Ni : 10g/ L,Zn : 5g/ L,Cu : l.Og/ L,硫酸(H2S〇4 ):Ni : 10g / L, Zn : 5g / L, Cu : l.Og / L, sulfuric acid (H2S〇4):
8.5g/L (實施例7之電錢液組成)8.5 g/L (composition of the liquid money solution of Example 7)
Ni: 0.3g/L,Zn: 0.3g/L,Cu: 2.0g/L,硫酸(H2S〇4): 8.5g/L (實施例8之電鍍液組成)Ni: 0.3 g/L, Zn: 0.3 g/L, Cu: 2.0 g/L, sulfuric acid (H2S〇4): 8.5 g/L (composition of the plating solution of Example 8)
Ni : 28g/ L,Zn : lg/ L,Cu : 0.8g/ L,硫酸(H2S〇4 ): 8-5g/ L (實施例9之電鍍液組成)Ni: 28 g/L, Zn: lg/L, Cu: 0.8 g/L, sulfuric acid (H2S〇4): 8-5 g/L (composition of the plating solution of Example 9)
Ni : 7g/ L,Zn : 10g / L,Cu : 0.5g/ L,硫酸(H2S〇4 ): 8.5g/L (電流密度)5A/dm2或10A/dm2 並且,在此銅錄鋅層上,進行鉻酸處理,形成防錢層。 以下表示處理條件。 17 201137183Ni: 7g/L, Zn: 10g / L, Cu: 0.5g / L, sulfuric acid (H2S〇4): 8.5g / L (current density) 5A / dm2 or 10A / dm2 and, on this copper zinc layer , chromic acid treatment to form an anti-money layer. The processing conditions are shown below. 17 201137183
Cr〇3 : 4.0g/L ’ ZnS〇4 . 7H2〇 : 2.0g/L,Na2S04 : I5g /L,pH : 4.2,溫度:45〇c,電流密度 3.0A/dm2,時間: 1.5秒 (實施例1 ) 於實施例1中,鍍敷被膜中之鋅(Zn )附著量為924 # g / dm2,鍍敷被膜中,Ni : 9質量%,Zn : 42質量%,Cu : 49質量% ’式ι(鋅附著量(質量%)) / {1〇〇—(銅附 著量(質量%) ) }為0.83,式2(銅附著量(質量) /{100—(鋅附著量(質量% ) ) }為〇_85,皆在本發明條 件之範圍。結果,於此實施例1 ’ FR基板之常態剝離強度 為1.47kN/m,2天老化(aging)後之剝離強度為1 2〇kN /m,劣化率為18%。 又,BT基板(嚴苛環境下)之常態剝離強度為丨〇5kN /m,鹽酸處理後之剝離強度為〇.85kN/m,劣化率為2〇 %,並且耐硫酸 '過氧化氫之剝離強度為〇.98kN/m,劣化 率為7%,皆為良好的結果。 以上之結果示於表1。 18 201137183 BT基板 硫酸、過氧化氫 %損耗 寸 〇\ (Ν Ο kN/m 0.98 0.86 0.88 0.92 0.93 0.98 0.96 0.95 0.98 鹽酸 %損耗 Ο ι—Η F—Η 寸 00 m kN/m 0.85 0.89 0.93 0.86 0.91 0.87 0.98 0.95 0.92 φΕ- kN/m i s 0.99 0.99 1.01 1.04 1.10 1.02 1.03 1.06 FR—4基板 2天老化 %損耗 oo ΟΝ (Ν rs m (Ν in ι—Η CN kN/m 1.20 1.42 1.53 00 CN 1.43 1.42 1.40 1.46 1.42 織 <dE- kN/m 1.47 1.55 1.46 1.48 JO 1.48 1.47 1.45 (N 0.85 0.54 0.79 0.77 0.37 0.79 0.92 0.33 0.35 0.83 0.52 0.39 0.98 0.47 0.39 0.56 0.39 0.78 Cu 質量% Os ΓΛ Ο Ο m CN Zn 質量% <Ν m 〇\ m (Ν Η C\ Ο m ON Ni 質量% 〇\ ΓΟ 00 1···^ (Ν ο οο 卜 Zn附著量 /zg/dm2 924 320 ιη 390 378 617 1860 746 220 實施例1 實施例2 實施例3 實施例4 實施例5 實施例6 實施例7 實施例8 實施例9 201137183 (實施例2) 於實施例2中,鍍敷被膜中之鋅(Zn )附著量為320 # g / dm2 ’鍍敷被膜中,Ni : 3 i質量%,zn : 34質量%,Cu : 36質里% ’式1 (鋅附著量(質量%)) / {100—(銅附 著量(質量%) ) }為〇·52,式2(銅附著量(質量%)) /{100~ (鋅附著量(質量%) ) }為0.54,皆在本發明條 件之範圍。結果,於此實施例2,FR基板之常態剝離強度 為1.5 6kN/m,2天老化後之剝離強度為i.42kN/m,劣化 率為9%。 又’ BT基板(嚴苛環境下)之常態剝離強度為〇 99kN /m’鹽酸處理後之剝離強度為〇89kN/m,劣化率為10 % ’並且财硫酸、過氧化氫之剝離強度為O MkN/m,劣化 率為14% ’皆為良好的結果。 以上之結果同樣地示於表1。 (實施例3) 於實施例3中,鍍敷被膜中之鋅(zn )附著量為465 μ g /dm2 ’鍍敷被膜中,Ni : 18質量%,Zn : 12質量%,Cu : 質量% ’式1(鋅附著量(質量/ {1〇〇—(銅附 著量(質量% ) ) }為0.39,式2(銅附著量(質量) /{100—(鋅附著量(質量% ))}為0.79,皆在本發明條 件之範圍。結果’於此實施例3,FR基板之常態剝離強度 為UAN/m,2天老化後之剝離強度為i_53kN/m,劣化 率為2%。Cr〇3 : 4.0g/L ' ZnS〇4 . 7H2〇: 2.0g/L, Na2S04 : I5g /L, pH : 4.2, temperature: 45〇c, current density 3.0A/dm2, time: 1.5 seconds (implementation Example 1) In Example 1, the adhesion amount of zinc (Zn) in the plating film was 924 #g / dm2, in the plating film, Ni: 9 mass%, Zn: 42 mass%, Cu: 49 mass% ' Formula ι (zinc adhesion (% by mass)) / {1〇〇—(copper adhesion (% by mass)) } is 0.83, formula 2 (copper adhesion (mass) / {100—(zinc adhesion (% by mass) ) ) } is 〇 _85, which is within the scope of the present invention. As a result, the normal peel strength of the FR substrate of this example 1 is 1.47 kN/m, and the peel strength after 2 days of aging is 12 〇. kN / m, the deterioration rate is 18%. Moreover, the normal peel strength of the BT substrate (under severe environment) is 丨〇5kN / m, the peel strength after hydrochloric acid treatment is 〇.85kN/m, and the degradation rate is 2〇%. And the peeling strength of sulfuric acid resistant 'hydrogen peroxide' was 〇98 kN/m, and the deterioration rate was 7%, which was a good result. The above results are shown in Table 1. 18 201137183 BT substrate sulfuric acid, hydrogen peroxide% loss 〇\ (Ν Ο kN/m 0.98 0.86 0.88 0.92 0.93 0.98 0.96 0.95 0.98 % hydrochloric acid loss ι—Η F—Η inch 00 m kN/m 0.85 0.89 0.93 0.86 0.91 0.87 0.98 0.95 0.92 φΕ- kN/mis 0.99 0.99 1.01 1.04 1.10 1.02 1.03 1.06 FR—4 Substrate 2 days aging % loss oo ΟΝ (Ν rs m (Ν in ι—Η CN kN/m 1.20 1.42 1.53 00 CN 1.43 1.42 1.40 1.46 1.42 woven <dE- kN/m 1.47 1.55 1.46 1.48 JO 1.48 1.47 1.45 (N 0.85 0.54 0.79 0.77 0.37 0.79 0.92 0.33 0.35 0.83 0.52 0.39 0.98 0.47 0.39 0.56 0.39 0.78 Cu% by mass Os ΓΛ Ο Ο m CN Zn % by mass <Ν m 〇\ m (Ν Η C\ Ο m ON Ni mass% 〇\ 00 00 1···^ (Ν ο οο Zn adhesion amount / zg / dm2 924 320 ιη 390 378 617 1860 746 220 Embodiment 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Implementation Example 8 Example 9 201137183 (Example 2) In Example 2, the amount of zinc (Zn) adhered in the plating film was 320 # g / dm 2 ' in the plating film, Ni : 3 i% by mass, zn : 34 Mass%, Cu: 36% of the mass 'Form 1 (zinc adhesion (% by mass)) / {100—(copper attached The amount (% by mass) is 〇·52, and the formula 2 (copper adhesion amount (% by mass)) / {100~ (zinc adhesion amount (% by mass))} is 0.54, which is within the scope of the present invention. As a result, in Example 2, the normal peel strength of the FR substrate was 1.5 6 kN/m, and the peel strength after 2 days of aging was i.42 kN/m, and the deterioration rate was 9%. In addition, the normal peel strength of the BT substrate (under harsh environment) is 〇99kN /m', the peel strength after hydrochloric acid treatment is 〇89kN/m, the deterioration rate is 10%' and the peeling strength of the sulfuric acid and hydrogen peroxide is O. MkN/m, the degradation rate of 14%' is a good result. The above results are also shown in Table 1. (Example 3) In Example 3, the amount of zinc (zn) adhered in the plating film was 465 μg /dm 2 'in the plating film, Ni: 18% by mass, Zn: 12% by mass, Cu: % by mass 'Formula 1 (zinc adhesion amount (mass / {1 〇〇 - (copper adhesion amount (% by mass))} is 0.39, formula 2 (copper adhesion amount (mass) / {100 - (zinc adhesion amount (% by mass)) The value of 0.79 is within the range of the conditions of the present invention. As a result, in the third embodiment, the normal peel strength of the FR substrate was UAN/m, and the peel strength after aging for 2 days was i_53 kN/m, and the deterioration rate was 2%.
又’ BT基板(嚴苛環境下)之常態剝離強度為〇.99kN 201137183 /m’鹽酸處理後之剝離強度為〇.93kN/m,劣化率為6%, 並且耐硫酸、過氧化氫之剝離強度為〇.88kN/m,劣化率為 Π % ’皆為良好的結果。 以上之結果同樣地示於表1。 (實施例4 ). 於實施例4中’鍍敷被膜中之鋅(zn )附著量為390 # g / dm2,錢敷被膜中’ m : 2質量%,Zn : 93質量%,Cu : 5質量%,式1(鋅附著量(質量%)) / {1〇〇_ (銅附著 3:(質量% ) ) }為0.98,式2(銅附著量(質量/ {100—(辞附著量(質量%) ) }為〇 77,皆在本發明條件 之範圍。結果,於此實施例4 , FR基板之常態剝離強度為 l_46kN/m,2天老化後之剝離強度為1 28kN/m ’劣化率 為 12%。 又BT基板(嚴苛環境下)之常態剝離強度為丨〇 1 /m,鹽酸處理後之剝離強度為〇.86kN/m,劣化率為15 %,並且耐硫酸、過氧化氫之剝離強度為0.92kN/ m,劣化 率為9%,皆為良好的結果。 以上之結果同樣地示於表1。 (實施例5) ^實施例5中,鍍敷被膜中之鋅(Zn )附著量為378 " e ,鍍敷被胰中,Ni : 4〇質量%,Zn: 36質量%,Cu : 24質量% ’式1 (鋅附著量(質量%) ) / {1〇〇一 著量(質量”為0.47,式2(銅附著量(質量%)) /{100-(鋅附著量(質量% )) }為〇 37,皆在本發明條In addition, the normal peel strength of the 'BT substrate (under harsh environment) is 〇.99kN 201137183 /m', the peel strength after hydrochloric acid treatment is 〇.93kN/m, the degradation rate is 6%, and it is resistant to sulfuric acid and hydrogen peroxide. The strength was 〇.88 kN/m, and the deterioration rate Π%' was a good result. The above results are also shown in Table 1. (Example 4). In Example 4, the amount of zinc (zn) adhered in the plating film was 390 #g / dm2, and in the money coating, 'm: 2% by mass, Zn: 93% by mass, Cu: 5 Mass %, Formula 1 (zinc adhesion amount (% by mass)) / {1〇〇_ (copper adhesion 3: (% by mass)) } is 0.98, Formula 2 (copper adhesion amount (mass / {100 - (exclusion amount) (% by mass)) } is 〇77, which is within the scope of the present invention. As a result, in this Example 4, the normal peel strength of the FR substrate was l_46 kN/m, and the peel strength after 2 days of aging was 1 28 kN/m. The deterioration rate is 12%. The normal peel strength of the BT substrate (under severe environment) is 丨〇1 / m, the peel strength after hydrochloric acid treatment is 86.86kN/m, the degradation rate is 15%, and it is resistant to sulfuric acid. The peeling strength of hydrogen peroxide was 0.92 kN/m, and the deterioration rate was 9%, which was a good result. The above results are also shown in Table 1. (Example 5) ^In Example 5, zinc in the plating film (Zn) adhesion amount is 378 " e , plating is in the pancreas, Ni: 4〇 mass%, Zn: 36 mass%, Cu: 24 mass% 'Formula 1 (zinc adhesion amount (% by mass)) / {1 〇〇 着 ( (quality) 0.47, Formula 2 (copper adhesion amount (% by mass)) / {100-(zinc adhesion amount (% by mass))} is 〇 37, both in the present invention
21 S 201137183 件之範圍。結果,於此實施例5,FR基板之常態剝離強度 為1.48kN/m,2天老化後之剝離強度為l_43kN/m,劣化 率為3%。 又’ BT基板(嚴苛環境下)之常態剝離強度為1 〇4kN /m’鹽酸處理後之剝離強度為〇.91kN/m,劣化率為13 %,並且耐硫酸、過氧化氫之剝離強度為〇 93kN/ m,劣化 率為11 %,皆為良好的結果。 以上之結果示於表1。 (實施例6) 於實施例6中,鍍敷被膜中之辞(Zn)附著量為617" g /dm2 ’鍍敷被膜中,⑷:18質量%,Zn : 12質量%,Cu : 質量% ’式1 (鋅附著量(質量%) ) / {1〇〇—(銅附 著量(質量% ) ) }為〇·39,式2(銅附著量(質量%)) /{100—(鋅附著量(質量% ) ) }為〇 79,皆在本發明條 件之範圍。結果,於此實施例6,FR基板之常態剝離強度 為1.45kN// m,2天老化後之剝離強度為1.42kN/ m,劣化 率為2%。21 S 201137183 The scope of the article. As a result, in this Example 5, the normal peel strength of the FR substrate was 1.48 kN/m, and the peel strength after aging for 2 days was l_43 kN/m, and the deterioration rate was 3%. In addition, the normal peel strength of the BT substrate (under harsh environment) is 1 〇 4kN / m'. The peel strength after hydrochloric acid treatment is 〇.91kN/m, the degradation rate is 13%, and the peeling strength of sulfuric acid and hydrogen peroxide is resistant. For 〇93kN/m, the degradation rate is 11%, which is a good result. The above results are shown in Table 1. (Example 6) In Example 6, the amount of (Zn) adhesion in the plating film was 617 "g /dm2' in the plating film, (4): 18% by mass, Zn: 12% by mass, Cu: % by mass 'Formula 1 (zinc adhesion (% by mass)) / {1〇〇—(copper adhesion (% by mass)) } is 〇·39, formula 2 (copper adhesion (% by mass)) / {100—(zinc) The amount of adhesion (% by mass) } } is 〇79, which is within the scope of the conditions of the present invention. As a result, in the Example 6, the normal peel strength of the FR substrate was 1.45 kN/m, the peel strength after the 2-day aging was 1.42 kN/m, and the deterioration rate was 2%.
又,BT基板(嚴苛環境下)之常態剝離強度為i. 1〇kN ,鹽酸處理後之剝離強度為0.87kN/m,劣化率為21 %,並且耐硫醆、過氧化氫之剝離強度為0.98kN/m,劣化 率為11 %,皆為良好的結果。 以上之結果同樣地示於表1。 (實施例7) 於實施例7中,鑛敷被膜中之鋅(Zn)附著量為1860/z g 22 201137183 / dm ’鍍敷被祺中,Ni : 7質量%,Zn : 9質量%,Cu . 84質量% ’式1 (鋅附著量(質量% )) / {100-(鋼附 著量(質量% ) ) }為〇 56,式2(銅附著量(質量% )) /{loo—(鋅附著量(質量%) ) }為〇 92,皆在本發明條 件之範圍。結果,於此實施例7,FR基板之常態剝離強度 為1.48kN/ m,2天老化後之剝離強度為1.40kN/ m,劣化 率為5%。 又’ BT基板(嚴苛環境下)之常態剝離強度為1 〇2kN /m,鹽酸處理後之剝離強度為〇.98kN/m,劣化率為4%, 並且耐硫酸、過氧化氫之剝離強度為0.96kN/ m,劣化率為 2% ’皆為良好的結果。 … 以上之結果同樣地示於表1。 (實施例8) 於實施例8中,鍍敷被膜中之鋅(Zn )附著量為746以g /dm2,鍍敷被膜中,別:47質量%,Zn : 30質量%,Cu : 23質量% ’式i (鋅附著量(質量%) ) / {1〇〇—(銅附 著量(質量%) ) }為0.39,式2(銅附著量(質量) /{100—(鋅附著量(質量% }為〇_33,皆在本發明條 件之範圍。結果’於此實施例8 ’ FR基板之常態剝離強度 為l_47kN/m,2天老化後之剝離強度為1.46kN/m,劣化 率為1%。 又’ BT基板(嚴苛環境下)之常態剝離強度為1.03kN /m’鹽酸處理後之剝離強度為〇.95kN/m,劣化率為8%, 並且耐硫酸、過氧化氫之剝離強度為〇_95kN/ m,劣化率為 23 201137183 〇%,皆為良好的結果β 以上之結果示於表1。 (實施例9 ) 於實施例9中’鍍敷被膜中之鋅(Ζη)附著量為22 /dm2,鍍敷被骐中,Ni: 2〇質量%,Ζη: 69質量%,Cu : ::質量%,式1 (鋅附著量(質量%) ) /{1〇〇〜(銅附 著量(質量/6) ) }為〇78’式2(銅附著量(質量% )) 鋅附著量(質量%) ) }為〇35,皆在本發明條 件之範圍。結| ’於此實施例9,FR基板之常態制離強度 為1.45kN/m,2天老化後之剝離強度為以則/爪,劣化 率為2 %。 又,BT基板(嚴苛環境下)之常態剝離強度為i ,鹽酸處理後之剝離強度為〇.92kN/m,劣化率為13 %,並且耐硫酸、過氧化氫之剝離強度為〇 98kN/m,劣化 率為11 % ’皆為良好的結果。 以上之結果同樣地示於表1。 如上述,實施例之鍍敷層每單位面積之鋅的附著重量 為220 y g/ dm2〜丨860 # g/ dm2,FR — 4基板之常態剝離強 度為l_45kN/m〜l_56kN/m,耐熱剝離強度為丨2〇kN/m 〜1.53kN/m,劣化率為18%以下之範圍,皆顯示出良好的 常態剝離強度與耐熱剝離強度。 又,BT基板之常態剝離強度為〇 99kN/m〜 l l〇kN/ m之範圍,鹽酸、硫酸過氧化氫溶液處理後之剝離強度分別 為 0.85kN/m〜〇.93kN/m、0.86kN/m〜〇.98kN/m,劣 24 201137183 化率分別A 4%〜21%、0%〜14% ’顯示出良好的性質。 (比較例1〜7 ) 以下述條件改變鍍浴組成,形成鋼鎳鋅層。每單位面 積鋅附著量與鍍敷被膜中之鎳、鋅、鋼的存在比率示於表2。 (比較例1之電鍍液組成)Moreover, the normal peel strength of the BT substrate (in a severe environment) is i. 1〇kN, the peel strength after hydrochloric acid treatment is 0.87 kN/m, the deterioration rate is 21%, and the peeling strength of sulfur-resistant and hydrogen peroxide is resistant. It was 0.98 kN/m and the deterioration rate was 11%, which was a good result. The above results are also shown in Table 1. (Example 7) In Example 7, the amount of zinc (Zn) adhered in the ore film was 1860 / zg 22 201137183 / dm 'plated in the crucible, Ni: 7 mass%, Zn: 9 mass%, Cu 84% by mass 'Form 1 (zinc adhesion (% by mass)) / {100-(steel adhesion (% by mass)) } is 〇56, formula 2 (copper adhesion (% by mass)) /{loo-( The amount of zinc adhesion (% by mass) } is 〇92, which is within the scope of the present invention. As a result, in this Example 7, the normal peel strength of the FR substrate was 1.48 kN/m, the peel strength after 2 days of aging was 1.40 kN/m, and the deterioration rate was 5%. In addition, the normal peel strength of the BT substrate (under harsh environment) is 1 〇 2kN / m, the peel strength after hydrochloric acid treatment is 〇.98kN / m, the degradation rate is 4%, and the peeling strength of sulfuric acid and hydrogen peroxide is resistant. A value of 0.96 kN/m and a degradation rate of 2%' are good results. The above results are also shown in Table 1. (Example 8) In Example 8, the amount of zinc (Zn) adhered in the plating film was 746 g/dm2, and in the plating film, 47% by mass, Zn: 30% by mass, and Cu: 23 mass. % 'Formula i (zinc adhesion amount (% by mass)) / {1〇〇—(copper adhesion amount (% by mass)) } is 0.39, formula 2 (copper adhesion amount (mass) / {100—(zinc adhesion amount ( The mass % } is 〇_33, which is within the range of the conditions of the present invention. Results 'The normal peel strength of the FR substrate of this Example 8' is 1-147 kN/m, and the peel strength after 2 days aging is 1.46 kN/m, and the deterioration rate is It is 1%. The normal peel strength of the 'BT substrate (under harsh environment) is 1.03kN /m'. The peel strength after hydrochloric acid treatment is 〇.95kN/m, the degradation rate is 8%, and it is resistant to sulfuric acid and hydrogen peroxide. The peeling strength was 〇95 kN/m, and the deterioration rate was 23 201137183 〇%, which was a good result. The results of β or more are shown in Table 1. (Example 9) In Example 9, 'zinc in the plating film ( Ζη) adhesion amount is 22 /dm2, plating is in the crucible, Ni: 2〇 mass%, Ζη: 69% by mass, Cu: :: mass%, formula 1 (zinc adhesion amount (% by mass)) / {1〇 〇~(copper attachment (mass/6)) } is 〇78' type 2 (copper adhesion amount (mass%)) zinc adhesion amount (mass%)) } is 〇35, both of which are within the scope of the present invention. 9. The normal separation strength of the FR substrate is 1.45 kN/m, and the peel strength after aging for 2 days is / claw, and the deterioration rate is 2%. Moreover, the normal peel strength of the BT substrate (under severe environment) is i. The peeling strength after the hydrochloric acid treatment was 〇.92 kN/m, the deterioration rate was 13%, and the peeling strength against sulfuric acid and hydrogen peroxide was 〇98 kN/m, and the deterioration rate was 11%, which was a good result. The results are similarly shown in Table 1. As described above, the adhesion weight of zinc per unit area of the plating layer of the examples was 220 yg/dm2 to 丨860 #g/dm2, and the normal peel strength of the FR-4 substrate was l_45 kN/m. ~l_56kN/m, the heat-resistant peel strength is 丨2〇kN/m~1.53kN/m, and the deterioration rate is 18% or less, which shows good normal peel strength and heat-resistant peel strength. Further, normal peeling of BT substrate The strength is in the range of 〇99kN/m~ll〇kN/m, and the peel strength after treatment with hydrochloric acid and sulfuric acid hydrogen peroxide solution is 0.8 respectively. 5kN/m~〇.93kN/m, 0.86kN/m~〇.98kN/m, inferior 24 201137183 The rate of A 4%~21%, 0%~14% respectively showed good properties. (Comparative Example 1 ~7) The composition of the plating bath was changed under the following conditions to form a steel nickel-zinc layer. The ratio of the amount of zinc adhered per unit area to the presence of nickel, zinc, and steel in the plating film is shown in Table 2. (Compound composition of Comparative Example 1)
Ni : 13g/L,Zn : 5g/L ’ Cu : Og/L,硫酸(H2S04):Ni : 13 g / L, Zn : 5 g / L ' Cu : Og / L, sulfuric acid (H2S04):
8-5g/L (比較例2之電鍍液組成)8-5 g/L (composition of plating solution of Comparative Example 2)
Ni : 13g/L ’ Zn : Og/L,Cu : 6.5g/L,硫酸(H2S04): 8.5g/L (比較例3之電鍍液組成)Ni : 13 g / L ' Zn : Og / L, Cu : 6.5 g / L, sulfuric acid (H 2 SO 4 ): 8.5 g / L (composition liquid of Comparative Example 3)
Ni : Og/L ’ Zn : 5g/L ’ Cu : 0.5g/L,硫酸(H2S04): 8.5g/L (比較例4之電鍍液組成)Ni : Og / L ′ Zn : 5 g / L ′ Cu : 0.5 g / L, sulfuric acid (H 2 SO 4 ): 8.5 g / L (composition of the plating solution of Comparative Example 4)
Ni: 13g/L,Zn: 15g/L,Cu: 0.9g/L,硫酸(H2S04): 8-5g/L (比較例5之電鍍液組成)Ni: 13 g/L, Zn: 15 g/L, Cu: 0.9 g/L, sulfuric acid (H2S04): 8-5 g/L (composition of plating solution of Comparative Example 5)
Ni: 15g/L,Zn: 〇.lg/L,Cu: 3g/L,硫酸(H2S04): 8.5g/L (比較例6之電鍍液組成)Ni: 15 g/L, Zn: 〇.lg/L, Cu: 3 g/L, sulfuric acid (H2S04): 8.5 g/L (composition of plating solution of Comparative Example 6)
Ni : 3g/L,Zn : 16g/L,Cu : O.lg/ L,硫酸(H2S04): lg/L (比較例7之電鍍液組成)Ni: 3 g/L, Zn: 16 g/L, Cu: O.lg/L, sulfuric acid (H2S04): lg/L (composition of plating solution of Comparative Example 7)
Ni : 13g/L,Zn : 3g/L,Cu : 0.5g/L,硫酸(h2S04): 25 201137183Ni : 13g / L, Zn : 3g / L, Cu : 0.5g / L, sulfuric acid (h2S04): 25 201137183
lg/L (比較例8之電鍍液組成) 川:4〇g/L,Zn : 3g/L,Cu : 〇 lg/ L,硫酸(H2S〇 lg/L ' (比較例9之電鍍液組成)Lg/L (composition of plating solution of Comparative Example 8) Chuan: 4〇g/L, Zn: 3g/L, Cu: 〇 lg/L, sulfuric acid (H2S〇 lg/L ' (composition of plating solution of Comparative Example 9)
Ni: 32g/L’ Zn: 0.05g/L,Cu: 3 4g/L,硫酸(H2s〇4): lg/L (比較例1 0之電鍍液組成)Ni: 32 g/L' Zn: 0.05 g/L, Cu: 3 4 g/L, sulfuric acid (H2s〇4): lg/L (composition liquid of Comparative Example 1)
Ni:25g/L,Zn:16g/L’Cu:〇〇5g/Lu^(H2S〇 lg/L 4;' (電流密度) 2.5A/dm2〜30A/dm2 (比較例1 ) 於比較例卜鍍敷被膜中不存在銅,並且鍍敷被膜中之 錄的存在比超過5G質量%,已不符本發明。又,雖然式丄 (鋅附著量(質量%) ) / {100一(銅附著量(質量%、二} 為0.49,但是式2(銅附著量(質量%) ) / {ι〇〇—(鋅附 著量(質量% ) ) }部為G.GG,並不在本發明條件之範圍。 於此比較例卜FR基板之常態剝離強度為i 5〇kN/m, 2天老化後之剝離強度為l.47kN/m,劣化率為2%。又, BT基板(嚴苛環境下)之常態剝離強度雖然為〇 98kN/爪, 但是鹽酸處理後之剝離強度為〇.15kN/m,劣化率顯著降低 至85%,並且耐硫酸、過氧化氫之剝離強度為〇75kN/m, 劣化率為2 4 %,無淪疋對於何者,耐藥品性皆大幅降低。 26 201137183 以上之結果示於表2 201137183 BT基板 硫酸、過氧化氫 %損耗 oo (N ON 寸 ΙΤϊ CN 寸 t-H kN/m 0.75 0.92 0.69 0.62 0.96 0.78 0.99 0.86 1.00 0.86 鹽酸 %損耗 yr\ 00 〇\ (N cn § 〇\ IT) 00 m in ro kN/m 0.15 0.90 0.65 0.20 0.91 0.16 1.00 0.92 1.02 0.71 駿 {〇& kN/m 0.98 0.99 0.96 1.02 1.00 1.04 s 0.97 o FR-4基板 2天老化 %損耗 (N in (N o m m <N (N iN ro kN/m 1.47 1.06 1.46 1.50 1.12 1.35 1.01 1.10 1.19 織 <00- kN/m 1.50 ...... in 1.48 (N in 1.50 1.35 1.46 1.42 fN F—H (N 0.00 0.45 1.00 0.49 0.83 0.20 0.49 0.31 0.54 0.28 f—H < 0.49 0.00 1.00 0.48 0.20 0.74 0.48 0.27 0.25 0.55 Cu 質量% 〇 m m § in CN iT) Zn 質量% 〇 VO yn CN m 寸 o (N 宕 m Ni 質量% in 〇 v〇 in m o 00 m Zn附著量 "g/dm2 452 O 620 2564 380 856 1649 1251 1089 比較例1 比較例2 比較例3 比較例4 比較例5 比車交例6 比較例7 比較例8 比較例9 比較例10Ni: 25 g / L, Zn: 16 g / L 'Cu: 〇〇 5 g / Lu ^ (H2S 〇 lg / L 4; ' (current density) 2.5 A / dm2 ~ 30A / dm2 (Comparative Example 1) in the comparative example There is no copper in the plating film, and the presence ratio in the plating film is more than 5 G mass%, which is inconsistent with the present invention. Further, although the formula (zinc adhesion amount (% by mass)) / {1001 (copper adhesion amount) (% by mass, two) is 0.49, but the formula 2 (copper adhesion amount (% by mass)) / {ι〇〇-(zinc adhesion amount (% by mass)) } is G.GG, which is not within the scope of the present invention. In this comparative example, the normal peel strength of the FR substrate is i 5 〇 kN/m, the peel strength after aging for 2 days is 1.47 kN/m, and the degradation rate is 2%. Further, the BT substrate (under severe environments) Although the normal peel strength is 〇98kN/paw, the peel strength after hydrochloric acid treatment is 〇15kN/m, the deterioration rate is remarkably reduced to 85%, and the peeling strength against sulfuric acid and hydrogen peroxide is 〇75kN/m, which is deteriorated. The rate is 24%, and the drug resistance is greatly reduced for any of them. 26 201137183 The above results are shown in Table 2 201137183 BT substrate sulfuric acid, hydrogen peroxide% loss oo (N ON inch ΙΤϊ CN inchtH kN/m 0.75 0.92 0.69 0.62 0.96 0.78 0.99 0.86 1.00 0.86 hydrochloric acid % loss yr\ 00 〇\ (N cn § 〇\ IT) 00 m in ro kN/m 0.15 0.90 0.65 0.20 0.91 0.16 1.00 0.92 1.02 0.71 {〇& kN/m 0.98 0.99 0.96 1.02 1.00 1.04 s 0.97 o FR-4 substrate 2 days aging % loss (N in (N omm < N (N iN ro kN/m 1.47 1.06 1.46 1.50 1.12 1.35 1.01 1.10 1.19 Weaving <00- kN/m 1.50 ...... in 1.48 (N in 1.50 1.35 1.46 1.42 fN F-H (N 0.00 0.45 1.00 0.49 0.83 0.20 0.49 0.31 0.54 0.28 f-H < 0.49 0.00 1.00 0.48 0.20 0.74 0.48 0.27 0.25 0.55 Cu mass % 〇mm § in CN iT) Zn mass % 〇VO yn CN m inch o (N 宕m Ni mass% in 〇v〇in mo 00 m Zn adhesion amount "g/dm2 452 O 620 2564 380 856 1649 1251 1089 Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 Comparative Example 6 Comparative Example 7 Comparative Example 8 Comparative Example 9 Comparative Example 10
00 <N 201137183 (比較例2) 於比較例2’鍍敷被膜中不存在鋅,並且鍍敷被膜中之 錄的存在比超過50質量% ’已不符本發明。又雖然式2 (銅附著1:(質罝%) ) / {100一(鋅附著量(質量% ))) 為〇_45,但是式i (辞附著量(質量%) ) / {ι〇〇—(銅附 著量(質量% ))}卻為().〇〇’並不在本發明條件之範圍。 於此比較例2,FR基板之常態剝離強度為151kN/m, 2天老化後之剝離強度為,劣化率為3〇%,fr 一4基板之耐熱剝離強度大幅降低。以上之結果同樣地示於 表2。 (比較例3) 於比較例3,鍍敷被膜中之鋅(Zn)附著量雖為62〇"g /dm2’但鍍敷被膜中不存在鎳,已不符本發明。式丨(辞 附著量(質量%) ) / {100—(銅附著量(質量}為 1.00’式2(銅附著量(質量%) ) / {1〇〇_ (辞附著量(質 量 % ) ) }為 1.00。 於此比較例3, BT基板(嚴苛環境下)之常態剝離強 度雖為0.96kN/m’但鹽酸處理後之剝離強度為〇65kN/ m,劣化率顯著降低至32%,並且耐硫酸、過氧化氣之剝離 強度為0.69kN/m,劣化率為28%,無論是對於何者,耐 藥品性皆大幅降低。以上之結果同樣地示於表2。 (比較例4) 於比較例4,每單位面積之鋅附著量為2564以g/ dm2, 已不符本發明。於此比較例4,B T基板(嚴苛環境下)之 29 201137183 吊i'剝離強度雖為i 02kN/ m,但鹽酸處理後之剝離強度為 〇.20kN/ m,劣化率顯著降低至,並且财硫酸、過氧化 虱之剝離強度為G.62kN/m,劣化率為39%,無論是對於 何者,耐藥品性皆大幅降低。 以上之結果同樣地示於表2。 (比較例5) 於比較例5,存在於鍍敷被膜中的銅多達8〇質量%, 鋅為4質量% ’鎳為16質量%,(鋅附著量(質量%)) /{1〇〇_ (銅附著量(質量% )) }為02,已超出本發明 之範圍。於此比較例5,FR—4基板之常態剝離強度雖為 1.50kN/m,但鹽酸處理後之剝離強度為i 12kN/m,劣化 率為25%,FR— 4基板之耐熱剝離強度大幅降低。 以上之結果同樣地示於表2。 (比較例6) 於比較例6,存在於鍍敷被膜中的鋅多達7〇質量%, 且銅僅有6質量%,因此(銅附著量(質量/ {1^ -(辞附著量(質量%))}為0_20,已超出本發明之範圍。 於此比較例6, BT基板之常態剝離強度雖為1〇4kN/m, 但鹽酸處理後之剝離強度為〇.16kN/m,劣化率高達85%, 耐藥品性(鹽酸)大幅降低。以上之結果同樣地示於表2。 (比較例7) 於比較例7,每單位面積之鋅的附著量僅有i5〇yg/ dm2 ’已不符本發明。於此比較例7,FR〜4基板之2天老 化後的剝離強度為l.〇lkN/m,劣化率高達31% ,耐熱性 201137183 大幅降低。 以上之結果同樣地示於表2。 (比較例8) 於比較例8 ’鍵敷被膜中之鋅的存在比超過$ 〇質量%, (鋅附著量(質量%) )/{1〇〇 一(銅附著量(質量% ))) 為0.27,已超出本發明之範圍。於此比較例8 , fr_4基板 之2天老化後的剝離強度為KiokN/m,劣化率高達23%, FR—4基板之耐熱剝離強度大幅降低。以上之結果同樣地示 於表2。 (比較例9) 於比較例9,(鋅附著量(質量%) ) / {1〇〇_ (銅附 著量(貝里% ))}為0.25,已超出本發明之範圍。於此比 較例9,FR — 4基板之2天老化後的剝離強度為i ·丨 m,劣化率高達22%,FR 一 4基板之耐熱剝離強度大幅降 低。以上之結果同樣地示於表2。 又,於比較例10,(銅附著量(質量%) ) / {1〇〇 — (鋅附著量(質量% ))}為0.28,已超出本發明之範圍。 於此比較例10, BT基板之常態剝離強度雖為丨〇lkN/m, 但鹽酸處理後之剝離強度為〇.71kN/m,劣化率高達3〇%, 耐藥品性(鹽酸)大幅降低。 以上之結果同樣地示於表2。 由上述,製作本發明之銅鎳鋅層時的鍍浴條件,較佳 為以 Ni: 〇.lg/L 〜30g/L,Zn: 〇 lg八〜%八,cu: 〇_lg/L 〜2g/L,硫酸(H2S〇4) : 〇 lg八〜1〇g八為基 31 201137183 本鍍浴。 右不在此等之濃度範圍,鎳、鋅或銅的濃度會變濃, 則由於會對廢水處理造成景《冑,因此作為鍵浴之條件並不 佳又,右成分濃度偏低時,則除了會因鍍敷之濃度變化 等的主要原成鍍浴的管理困難夕卜…電流效率會極 度降低,因此作為鍍浴之條件並不佳。 於上述中,雖對適用於電解銅箔之粗化面之情形進行 説明,但是當然地亦同樣適用於光澤面經施以粗化處理之 電解銅^並且經施以粗化處理之麼延㈣亦相同。若使 用電解銅落及壓延㈣之粗化面,雖然會因粗化處理之形 狀、表面粗糙度的不同,使得常態剝離強度之絕對值產Z 不同’但是可降低耐熱剝離強度及硫酸、過氧化氣水處理 後之剝離強度與常態剝離相較的相對劣化率。 於本發明之印刷電路基板用銅落,特別是將選擇銅朝 鋅層之最佳條件作為發明之中心課題。藉此,以大幅㈣ 銅泊之耐熱剝離強度’且有效地防止電路侵触現象使^ 硫酸、過氧化氫性恆常穩定地發揮效力。 因此,應 化面之選擇, 可容易理解電解銅落及壓延銅洛之選擇或粗 可視目的來任意地加以選擇。 産業上之可利用性 如以上所示,本發明之印刷電路基板用銅箱,為了不 使高溫加熱後與樹脂之剝離強度劣化,故使用銅錄辞層, 而可大幅提升銅结之对熱剝離強度…藉此能夠賦予可 有效防止電路侵蝕現象'可使耐藥品性(耐硫酸、過氧化 32 201137183 氫系性)值赍籍中 印屌J電 電路基 箔與樹 導體封 也發揮效力之新穎特性 路之微細_ # & & > ,陡,近年來 _茱化及向頻化發展中,可 板用銅箔(料B 乍為印刷 ^特別疋+導體封裝基板用銅箔)及 月曰基材加以貼合所製成之印刷電路基板(特別是: 裝基板)用覆銅積層板。 【圖式簡單說明】 之組成 圖1,係顯示Cu — Ni — Ζπ三元合金適於本發明 區域。 【主要元件符號說明】 無 3300 <N 201137183 (Comparative Example 2) Zinc was not present in the plating film of Comparative Example 2', and the existence ratio of the recorded film in the plating film was more than 50% by mass. Further, although the formula 2 (copper adhesion 1: (mass 罝%)) / {1001 (zinc adhesion amount (% by mass))) is 〇_45, but the formula i (the amount of adhesion (% by mass)) / {ι〇 〇—(copper adhesion (% by mass))} is (). 〇〇' is not within the scope of the present invention. In Comparative Example 2, the normal peel strength of the FR substrate was 151 kN/m, and the peel strength after aging for 2 days was 3% by mass, and the heat-resistant peel strength of the fr-4 substrate was largely lowered. The above results are also shown in Table 2. (Comparative Example 3) In Comparative Example 3, the zinc (Zn) adhesion amount in the plating film was 62 〇 "g /dm2', but nickel was not present in the plating film, which was inconsistent with the present invention.丨 (the amount of affixed (% by mass)) / {100—(copper adhesion (mass} is 1.00' type 2 (copper adhesion (% by mass)) / {1〇〇_ (word attachment amount (mass%) } is 1.00. In Comparative Example 3, the normal peel strength of the BT substrate (under severe environment) is 0.96 kN/m', but the peel strength after hydrochloric acid treatment is 〇65 kN/m, and the deterioration rate is remarkably reduced to 32%. Moreover, the peeling strength against sulfuric acid and peroxygen gas was 0.69 kN/m, and the deterioration rate was 28%, and the chemical resistance was greatly lowered for any of them. The above results are also shown in Table 2. (Comparative Example 4) In Comparative Example 4, the amount of zinc adhesion per unit area was 2564 g/dm 2 , which was inconsistent with the present invention. In Comparative Example 4, the BT substrate (in a severe environment) 29 201137183 hangs the i' peel strength although i 02kN / m, but the peel strength after hydrochloric acid treatment is 〇.20kN / m, the deterioration rate is significantly reduced to, and the peeling strength of sulphuric acid and cerium peroxide is G.62kN / m, the deterioration rate is 39%, no matter which The chemical resistance was greatly reduced. The above results are also shown in Table 2. (Comparative Example 5) In Comparative Example 5, it was present in plating. The amount of copper in the film is as high as 8% by mass, and zinc is 4% by mass. 'Nickel is 16% by mass, (zinc adhesion amount (% by mass)) / {1 〇〇 _ (copper adhesion amount (% by mass)) } is 02 It is beyond the scope of the present invention. In Comparative Example 5, the normal peel strength of the FR-4 substrate is 1.50 kN/m, but the peel strength after hydrochloric acid treatment is i 12 kN/m, and the deterioration rate is 25%, FR- 4. The heat-resistant peel strength of the substrate was greatly lowered. The above results are similarly shown in Table 2. (Comparative Example 6) In Comparative Example 6, zinc was present in the plating film as much as 7 〇 mass%, and copper was only 6 mass%. %, therefore (the amount of copper adhesion (mass / {1^ - (the amount of adhesion (% by mass))} is 0_20, which is beyond the scope of the present invention. In Comparative Example 6, the normal peel strength of the BT substrate is 1〇. 4kN/m, but the peel strength after hydrochloric acid treatment was 〇16kN/m, the deterioration rate was as high as 85%, and the chemical resistance (hydrochloric acid) was greatly reduced. The above results are also shown in Table 2. (Comparative Example 7) In Example 7, the adhesion amount of zinc per unit area was only i5 〇 yg / dm 2 ', which did not conform to the present invention. In Comparative Example 7, the peeling of the FR 〜 4 substrate after 2 days of aging was strong. The degree was l.〇lkN/m, the deterioration rate was as high as 31%, and the heat resistance 201137183 was drastically lowered. The above results are also shown in Table 2. (Comparative Example 8) The existence ratio of zinc in the bond film of Comparative Example 8 More than $ 〇 mass %, (zinc adhesion amount (% by mass)) / {1 〇〇 (copper adhesion amount (% by mass))) is 0.27, which is beyond the scope of the present invention. In this Comparative Example 8, the fr_4 substrate The peel strength after aging for 2 days was KiokN/m, the deterioration rate was as high as 23%, and the heat-resistant peel strength of the FR-4 substrate was greatly lowered. The above results are also shown in Table 2. (Comparative Example 9) In Comparative Example 9, (zinc adhesion amount (% by mass)) / {1〇〇_ (copper adhesion amount (Berry%))} was 0.25, which was outside the scope of the present invention. In Comparative Example 9, the peel strength after aging of the FR-4 substrate for 2 days was i·丨 m, the deterioration rate was as high as 22%, and the heat-resistant peel strength of the FR-4 substrate was drastically lowered. The above results are also shown in Table 2. Further, in Comparative Example 10, (copper adhesion amount (% by mass)) / {1 〇〇 - (zinc adhesion amount (% by mass))} was 0.28, which was outside the scope of the present invention. In Comparative Example 10, the normal peel strength of the BT substrate was 丨〇lkN/m, but the peel strength after the hydrochloric acid treatment was 7171 kN/m, the deterioration rate was as high as 3%, and the chemical resistance (hydrochloric acid) was drastically lowered. The above results are also shown in Table 2. From the above, the plating bath conditions for producing the copper-nickel-zinc layer of the present invention are preferably Ni: 〇.lg/L 〜30 g/L, Zn: 〇lg 八~% eight, cu: 〇_lg/L 〜 2g / L, sulfuric acid (H2S 〇 4): 〇 lg 八 ~ 1 〇 g eight base 31 201137183 this plating bath. If the right is not in the concentration range, the concentration of nickel, zinc or copper will become thicker, which will cause the situation of the wastewater treatment. Therefore, the conditions for the key bath are not good, and when the concentration of the right component is low, It is difficult to manage the main original plating bath due to changes in the concentration of plating, etc. The current efficiency is extremely lowered, so the conditions as a plating bath are not good. In the above, although the case of applying to the roughened surface of the electrolytic copper foil is described, it is of course also applicable to the electrolytic copper which has been subjected to the roughening treatment on the shiny side and is subjected to the roughening treatment (4) The same is true. If the roughened surface of electrolytic copper drop and calendering (4) is used, the absolute value of normal peel strength may be different depending on the shape and surface roughness of the roughening treatment, but the heat-resistant peel strength and sulfuric acid and peroxidation may be lowered. The relative deterioration rate of the peel strength after the gas water treatment compared with the normal peeling. The copper falling of the printed circuit board of the present invention, in particular, the optimum condition for selecting copper toward the zinc layer is a central issue of the invention. Thereby, the sulfuric acid and hydrogen peroxide properties are constantly and stably exerted with a large (four) heat-resistant peel strength of the copper bobbin and effectively preventing the circuit from being invaded. Therefore, the choice of the surface can be easily selected by arbitrarily selecting the choice of electrolytic copper drop and calendering or rough visual purpose. INDUSTRIAL APPLICABILITY As described above, in the copper case for a printed circuit board of the present invention, the copper recording layer is used in order to prevent deterioration of the peeling strength of the resin after heating at a high temperature, and the heat of the copper junction can be greatly improved. Peeling strength...this can provide effective protection against circuit erosion. 'The chemical resistance (sulfuric acid, peroxidation 32 201137183 hydrogen system) value can also be used to improve the effectiveness of the J-circuit circuit foil and the tree conductor seal. The characteristics of the road _ # &&>, steep, in recent years _ 茱 及 and the development of frequency, copper foil for the board (material B 乍 for printing ^ special 疋 + copper foil for conductor package substrate) and A copper-clad laminate for a printed circuit board (particularly: a substrate) produced by laminating a lunar base material. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows a Cu-Ni-Ζπ ternary alloy suitable for the region of the present invention. [Main component symbol description] None 33
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KR (1) | KR101344176B1 (en) |
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TWI460068B (en) * | 2012-01-18 | 2014-11-11 | Jx Nippon Mining & Metals Corp | Surface-treated copper foil for copper-clad laminates and copper-clad laminate using the same |
TWI776049B (en) * | 2018-04-27 | 2022-09-01 | 日商Jx金屬股份有限公司 | Surface treated copper foil, copper clad laminate and printed wiring board |
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JP5591422B1 (en) * | 2013-10-18 | 2014-09-17 | 三菱電機株式会社 | Processing table jig, processing table manufacturing method, and laser processing method |
WO2020017551A1 (en) * | 2018-07-18 | 2020-01-23 | 日立化成株式会社 | Copper-clad laminate, printed wiring board, semiconductor package and method for producing copper-clad laminate |
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JPH07202367A (en) * | 1993-12-28 | 1995-08-04 | Japan Energy Corp | Surface treatment method of copper foil for printed circuit |
JP3292774B2 (en) * | 1994-02-15 | 2002-06-17 | 三井金属鉱業株式会社 | Copper foil for printed wiring board and method for producing the same |
JP3142259B2 (en) * | 1998-11-30 | 2001-03-07 | 三井金属鉱業株式会社 | Copper foil for printed wiring board excellent in chemical resistance and heat resistance and method for producing the same |
JP3670185B2 (en) * | 2000-01-28 | 2005-07-13 | 三井金属鉱業株式会社 | Method for producing surface-treated copper foil for printed wiring board |
JP4172704B2 (en) * | 2003-07-31 | 2008-10-29 | 日鉱金属株式会社 | Surface-treated copper foil and substrate using the same |
JP4907580B2 (en) * | 2008-03-25 | 2012-03-28 | 新日鐵化学株式会社 | Flexible copper clad laminate |
CN101981230B (en) * | 2008-06-17 | 2013-01-16 | Jx日矿日石金属株式会社 | Copper foil for printed circuit board and copper clad laminate plate for printed circuit board |
-
2011
- 2011-02-21 MY MYPI2012003731A patent/MY162078A/en unknown
- 2011-02-21 JP JP2012501763A patent/JP5254491B2/en active Active
- 2011-02-21 WO PCT/JP2011/053646 patent/WO2011105318A1/en active Application Filing
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI460068B (en) * | 2012-01-18 | 2014-11-11 | Jx Nippon Mining & Metals Corp | Surface-treated copper foil for copper-clad laminates and copper-clad laminate using the same |
TWI776049B (en) * | 2018-04-27 | 2022-09-01 | 日商Jx金屬股份有限公司 | Surface treated copper foil, copper clad laminate and printed wiring board |
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JPWO2011105318A1 (en) | 2013-06-20 |
CN102783255A (en) | 2012-11-14 |
KR101344176B1 (en) | 2013-12-20 |
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KR20120115339A (en) | 2012-10-17 |
TWI509113B (en) | 2015-11-21 |
CN102783255B (en) | 2017-04-19 |
JP5254491B2 (en) | 2013-08-07 |
WO2011105318A1 (en) | 2011-09-01 |
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