201132557 六、發明說明： 【發明所屬之技術領域】 導體在5大型積體電路、超大型積體電路等之半 罩或倍縮光罩之防塵蓋使用ί 防塵及肋運送防㈣媒組件的 【先前技術】 曰顧在^大型積體電路、超大型積體電路等之半導體F置或液 書罩 *:印=導體或液晶顯二f晶用原 是被吸收，所《不僅是轉印在^ 的先破反射，或 邊緣部份會或=二=的: 。到其尺寸、品質、外觀等，使光 丄曰木…而才貝 在半導體晶圓或是液晶用原板，半期望的轉印 能降低、產量降低，此等皆為其問破置或疋液晶顯示器的性 為了防止此種問題，乃於無塵宮 用原板的曝光，但即使如此，亦體晶圓或是液晶 組件之防塵蓋，安裝於光罩的表t、為防塵薄膜 原板曝光。 屢+導體日日圓或是液晶用 通常，防塵薄膜組件之製造，传 的面黏接防塵薄膜，並在防塵薄膜組，框架的一邊 以附著於光罩的黏著層，且在黏著層上邊的面形成用 層或分離部而製成。該防塵薄膜係^ ^ 1濩用之分離 =維素類樹脂或氟化樹脂等製成，且對用=纖維素等 射率。該防塵薄膜組件框架編、不鏽鋼:聚以= 4 201132557 該防塵薄膜黏接於防塵薄膜組件框架“ 框架的-邊的面塗佈防塵薄膜材 ^ 組件 膜風乾後進行黏接；或利用丙烯_^、方塵薄 黏接劑而黏接之。該黏著層係由 二虱，知或氟樹脂等之 丙烯、㊉酮樹脂等所構成(專利文獻『烯樹脂、 導體構成的防塵薄膜組件裝設在光罩的表面，於使丰 _的表面，而不是直接】著===防塵 :射使焦點位於光罩所形成之圖案上，即能去除:質以= 組件亦日趨大^用光罩及防塵薄膜 塵薄膜組件。 開始使用邊長大於麵贿的極大型之防 [習知技術文獻] [專利文獻] 專利文獻1 專利文獻2 專利文獻3 付公昭W —27707號公報 專利文獻4:日本特開平7—168345號公報 曰本特開昭58 — 219023號公報 美國專利第4861402號說明書 日本特公昭63—27707號公報 【發明内容】 之收薄膜組件的大型化’用以收納防塵薄膜組件 防塵薄膜:件之器的;性之目的， 收納容的重里亦養地挪。防塵_組件之 塵薄然收納52Gmmx8GGmm的光罩用的防 防：ΐϊ i 於6kg，但收納122〇趣腿的光罩用的 氺罢田、、且件之谷态的情形約為4〇kg，甚至收納1620xl78〇mm的 先罩用的防塵薄膜組件之容器的情形，亦達約斷g。如咖的 ，此在運送像這樣大型的防塵薄膜組件之收納容器時， ”疋在運送收納邊長大於麵讓像這樣朗是大刺防塵薄膜 201132557 組件之容器時，因為重量或尺寸的問題，故以 如至的先罩用的防塵薄膜組狀 的人手。 〗主少而要4個人，更佳為6個人 谈你^=收=等大型的收納防塵薄膜組件之收納容器的運 大型的防塵薄膜組件收納-ίίίίίΪίΪ：： 写，平狀§運送像這樣大型的防塵_組件收納容 放場所等較大的空間，以上皆為其問題點 送，並：：決= 並存件收納容器垂直直立運送， 為了解j問題點：二使的tv並不實用。 僅在運送通道的各處，都必須組件收納容器’不 懸吊機械的場所作業，甚為不便\ 、械’而且只能在設有 放之ίί: ί ί:2運堂?f，組件收納容器，並存 中:’而1個人所分擔的重量變大，ΐΐ送 增加翻覆，或從運獅上奸之危險性 件收ΐίΐ ’ Ξίϊ，垂直直立的狀態運送大型的防塵薄膜组 一常是以水平的狀態運送大型的防塵薄膜二牛收 因此，本發明的目的係提供一種能安全地運送防塵薄膜組件 6 201132557 的大型的防塵薄長大於l_mm 之： =;的的=^膜組件 [解決問題之技術手段] 巧明===容，容 為1〇〇〇職以上的防塵_組件；蓋體 =邊的邊長 述防塵_轉㈣容器本體關合於上 收納於盏體與上述防塵薄膜組件收納料防塵缚膜組件 設於上述防塵薄敵件收納容器本體 ’ Μ腳部， 分離；上述防塵薄膜組件收納容器之特徵°禮=有4個且相互 Γ嵌合於運送防塵薄膜組件收納容器的運送機轉 於運物卩可嵌合 能以較少的人數，安全且宏县=機構之可轉動的载置台，故 納容塵薄_ 件收納容器之運送用台車二式『，係利用一種防塵薄膜組 防塵薄膜組件收納容器本體，mm件收納容器，其包含·· 組件收納容器本體的開=，合於上述防塵薄膜 與上述防㈣顺件收納容器本體卩I讀_組件收納於蓋體 塵薄膜組件收納容器本體的 至:有，設於上述防 201132557 膜組件收納容器之運送用台車之 嵌合上述防塵_組件收納容 |聊;，設有能 ㈣ί據ί ’因為於防塵薄膜 ，置:’ δχ有施嵌合設於防塵薄臈組納 =用台車的 1?結能容易地將防塵薄膜組件 或存放空間，而 薄膜組件之防塵薄上為ί 載置ίίίΓΓί的實施態射，上職熱係定位成通過上社 述防塵薄膜組件收納容器時的重心。 置較佳的實施態樣，因為旋轉軸係定位成通過載 度固定防塵薄膜植件收έ 置σ月匕谷易地以任意的角 在本發送防塵_組件收納容器。 有衝擊緩衝機m錄中，在運送用台車的底部，裝有具 [對照先前技術之功效] 收納;s據=為可;薄膜组件之 大型的防，組件之防塵薄膜'二 大於麵麵的 送用二蛊右本發明’可提供一種防塵薄膜组件收納容器之運 【實施方式】 圖 係依本發明的較佳的實施態樣之防塵薄膜組件之收納容 8 201132557 ㈣’312係其前視圖，圖3係其右側視圖。 ，具有㈣防㈣本實施態樣之防塵薄膜組件收納容器 體12。 / 、、、且件之防塵薄膜組件收納容器本體11與蓋 收納塵薄膜組件 收納容器本體η的内周合於防塵薄膜組件 納容器10内。 防塵賴讀㈣於防㈣膜組件收 有膜組件收納容器本㈣的底部 ，由螺拴(未圖示)裝 腈-丁二基丙湘_旨， L將銘合金、鎮合金等^ 造，但更佳的 適當的表面處理而製造。 驭尘蛉4荨方式加工，並施以 丁-ίϋ雖n交佳之方式係將聚甲基丙稀酸甲醋、丙稀产 合金、鎂合金等衝麗成型而^造秘月曰真工成型並製造，但亦能將紹 於防塵薄膜收納容器本體H， ，亦裝有4個可握持的把手t有二m14，於 或金屬所形成。 把乎14、15，由合成樹脂 作為用以形成腳部13的材料，降入a 的金屬之外，雖然可使用聚氧化甲金、鋼鐵、不、繡鋼等 金炫接加工等。另一方面，作二木^，加工、板金加工、板 _射出成型、真空成型、板材腳部13的加工方法，可 等。作為腳部13的材質及加工W貼塊狀材料切削 ，之強度與尺寸精度之_可，.二目選擇具有所 内部不會囤積清洗液。 4理想的構造為：在清洗時， 圖4係搭载防塵薄膜組件收納容㈣之運賴台車的概略前 201132557 視圖。 如圖4所示，運w用二击 方向的車輪25之料部裝了可自由轉換 在此，在運送__組1^==^有支柱2i。 承座載於安裂，台24上的腳部 轉軸26所支撐。於本實支柱22的前端部之可旋轉的旋 , 容器1。的腳部且13二:==°::气由,塵薄臈組件收納 :承及運送用台以的 ^嵌合於腳部承座23。嵌合的ω的腳部 較佳為考慮到下列情形而設計，下列,^ίί式=的設計，但 組件收納容器10的腳部13， .易於將防塵薄膜 時能確實地固持腳部内;於傾斜 部車藉 防塵薄臈組件收納容器10搭載m 口24上之腳部承座23， 件收納容器本體U及蓋體/在==== 猶塵薄膜奴 b可設於所期望之位置，而且又;十=田自由度變大，把手14、 等之功能性零件。 胁5又置用以固定蓋體12的環扣 支持載置台24的旋轉軸26，設;、w 一 ra ^ & 24上搭載了防塵_1^=用台車20的載置台 搭載於運送用台車2。的載置ΠΛ!Γ重二位置’因此，可將 10 ’在從水平狀態至垂直狀態之間傾f的防塵薄膜組件收納容器 如圖4所示’在傾斜狀態時，為了防止防塵薄膜組件收納容 201132557 在軸㈣，料爾之桿型構造的 痒上5 顯示將防塵薄膜組件收納容器w，對於水平…$ 度的角度Θ傾斜的狀態之防塵_=^水+面以75 車20的概略前視圖，圖6係其右侧視圖/ Μ 1〇及運送用台 如上所述，支持載置台24的旋 車20的㈣24满了 用台 置，所以作章人属僅右彳/ 卞叹'，円合态1〇時的重心位 !。傾：。人更膜組件收納容器 意的傾斜角度固定載置台24。二本：二”俾於能以任 構成如下：且有長孔28a本貫知態樣中’角度固定機構Μ f螺^ 8b，藉由將栓28b鎖入長孔 ㈣於水平面之載置台24的肖度 ^此運抑。車2〇’搭餘塵細組件收納容器⑺ 二容器1〇日夺，使載置防塵薄臈組件收蜗容哭3 的載置台24傾斜’以使對於水平 裔1〇 能，度來看’_宜使載置台24為垂直狀 :、角二=Ϊ缚?組件收納容器1〇的載置台24對於水Ϊ: 組件收納容器Ια ?4 夕似 Λ 徒阿 亦有安全上的問題。又， 使載置 &能㈣t平面的角度Θ越大’亦即使載置台24越接近垂直 的=’亦即將載置防塵薄膜組件收納容器w的 it平面上日杨寬_、，如此雖可減少橫方‘ :間仁在另一方面，上下方向的長度變長，而難播= ίΐί方的空間受限制的部分，此為其問題點。再 S載f，膜组件收納容器10的載置台24的橫方向的J产 対，介由纽22域_ 2¾ 产越rr :目、二，見又亦有同樣有減小之必要，但架台部21的寬 又、”百s、ι運送用台車2〇越不安定，從此點來看，亦使載置^ 201132557 24接近於垂餘態的情形受到關^因此，在運送用 ^塵薄膜組件收納容器1G，運送防塵薄膜組件收納容哭i I J載置=塵薄膜組件收納容器i。的载置台24傾斜，以&夺201132557 VI. Description of the invention: [Technical field to which the invention pertains] The conductor is used in a dust cover of a half-size cover or a refracting hood of a large-sized integrated circuit, a super-large integrated circuit, etc. ί dustproof and rib-transported (four) medium components Prior Art] Regardless of the large-scale integrated circuit, ultra-large integrated circuit, etc., the semiconductor F or liquid cover *: printed = conductor or liquid crystal display, the original is absorbed, "not only in the transfer The first break of the reflection, or the edge part will be ====. To its size, quality, appearance, etc., to make the enamel wood ... and the semiconductor board or the original board for liquid crystal, the semi-desired transfer energy can be reduced, the yield is reduced, and these are all broken or 疋 liquid crystal In order to prevent such a problem, the display is exposed to the original board of the dust-free palace. However, even the dust cover of the wafer or the liquid crystal module is attached to the watch t of the photomask to expose the original film of the pellicle. Repeated + conductors for the Japanese yen or liquid crystal. Generally, the pellicle is manufactured, the surface is bonded to the pellicle, and the pellicle is placed on one side of the frame to adhere to the adhesive layer of the reticle and on the side of the adhesive layer. It is made by forming a layer or a separation part. The pellicle film is made of a separation product such as a vitamin resin or a fluorinated resin, and is used for a cellulose equivalent rate. The pellicle frame is made of stainless steel: poly = 4 201132557 The pellicle is adhered to the pellicle frame. "The side of the frame is coated with a dustproof film. The component film is air-dried and bonded; or propylene is used. The adhesive layer is made of a thin adhesive, which is composed of a bismuth, a propylene resin such as a fluororesin, or a ketone resin (the patent document "The epoxy resin component of the olefin resin and the conductor is installed in the The surface of the reticle is used to make the surface of the blister instead of directly. ===Dustproof: The focus is placed on the pattern formed by the reticle, which can be removed: quality = component is also getting bigger ^ with reticle and A dust-proof film dust film assembly. The use of a large-scale type with a side length greater than a bribe [Practical Technical Document] [Patent Document] Patent Document 1 Patent Document 2 Patent Document 3 Fu Gongzhao W-27707 Patent Document 4: Japanese Special Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Dust-proof film: the purpose of the device; the purpose of the sex, the weight of the storage capacity is also raised. Dust-proof _ component dust thinly contain the anti-defense of the 52Gmmx8GGmm reticle: ΐϊ i at 6kg, but the 122-inch fun legs The case of the mask for the mask, and the case of the grain of the piece is about 4 〇kg, and even the case of the container of the dust-proof membrane module for the first cover of 1620×l78〇mm is also about to be broken. When transporting a storage container of such a large-sized pellicle film assembly, "when the transport storage side is longer than the surface to make the container of the large puncture dustproof film 201132557, because of the weight or size problem, The first hand is used for the dust-proof film group of the hand. 〗 〖The main body is less than 4 people, and it is better for 6 people to talk about you ^= Receive = large storage of the dust-proof film module storage container for large-scale dust-proof film module storage -写 , 平 平 运送 运送 § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § § Problem point: two The tv is not practical. Only in the transportation channel, the component storage container must be operated in a place where the machinery is not suspended, which is inconvenient, mechanical, and can only be placed in the ίί: ί ί:2 Yuntang?f, the component storage container, coexisting: 'While the weight shared by one person becomes larger, the sputum is increased and overturned, or the dangerous parts from the lion are collected ΐ ΐ ϊ ϊ ϊ, vertical erect state transport large The dust-proof film group is often used to transport a large dust-proof film in a horizontal state. Therefore, the object of the present invention is to provide a large dust-proof thin length of more than l_mm that can safely transport the pellicle film assembly 6 201132557: =^ Membrane component [Technical means to solve the problem] Qiaoming ===容,容1 dustproof_components above 1 job; cover body=side of the side of the dust-proof _ turn (four) container body close to the upper storage The dust-proof film assembly of the dust-proof film module storage material is disposed on the body portion of the dust-proof thin-package storage container body, and is separated from each other; the characteristics of the dust-proof film module storage container are as follows: Dustproof The transporter of the membrane module storage container can be fitted to the transporter to be able to be fitted with a small number of people, and the safe and macro-discharged mounting table of the mechanism can be used. 『Using a dust-proof film group pellicle assembly storage container body, a mm-piece storage container, including the opening of the component storage container body, and the above-mentioned dust-proof film and the above-mentioned anti-fourth-lined container body 卩I read_ The component is housed in the cover dust film assembly container main body: the dustproof _ component storage capacity is provided in the transporting trolley of the film assembly storage container of the 201132557, and the device is provided with (4) For the dust-proof film, set: ' δ χ has a fitting on the dust-proof thin 臈 = = = 1 结 用 用 用 用 用 用 台 台 台 台 台 台 台 台 台 台 台 台 台 台 台 台 台 台 台 台 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘In the implementation of the morphism, the upper-level thermal system is positioned to pass the center of gravity when the dust-proof membrane module storage container is used. The preferred embodiment is provided because the rotating shaft system is positioned to fix the dust-proof membrane planting member by the load, and the dust-proof component storage container is sent at an arbitrary angle. In the shock buffer machine m recording, at the bottom of the transport trolley, equipped with [control according to the prior art] storage; s according to = can be; large-scale anti-film module, the component of the dust-proof film 'two is larger than the surface The present invention provides a dust-proof membrane module storage container. [Embodiment] The dust-proof membrane module according to a preferred embodiment of the present invention is accommodated in a housing 8 201132557 (4) '312 front view Figure 3 is the right side view. (4) The fourth embodiment of the dustproof membrane module storage container body 12 of the present embodiment. The pellicle assembly container body 11 and the cover of the member are housed in the dust-proof film assembly nano-container 10. Dust-proof reading (4) In the bottom of the membrane assembly storage container (4), the bottom of the membrane assembly is filled with a nitrile-butadiene-based propane, which is made of snails (not shown), L-ming alloy, town alloy, etc. But it is made with better proper surface treatment. Dust 蛉 4蛉 processing, and applied Ding- ϋ ϋ n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n n And manufactured, but can also be used in the dust-proof film storage container body H, and also has four handles t that can be held, two m14, or metal. Regarding 14, 15, the synthetic resin is used as the material for forming the leg portion 13 and is lowered into the metal of a. Although it is possible to use gold oxide processing such as polymagnesium oxide, steel, stainless steel or stainless steel. On the other hand, it can be used for processing, sheet metal processing, sheet-and-eject molding, vacuum forming, and sheet metal processing. As the material of the leg portion 13 and the processing of the W-block material, the strength and dimensional accuracy of the material can be arbitrarily selected. 4 The ideal structure is: In the case of cleaning, Figure 4 is a schematic view of the front of the 201132557 with the dust-proof membrane module storage capacity (4). As shown in Fig. 4, the material of the wheel 25 in the two-stroke direction is freely convertible. Here, the carrier 2i is provided in the transport__ group 1^==^. The socket is supported by the foot shaft 26 on the table 24. a rotatable screw, container 1 at the front end of the solid strut 22. The foot is 13 2: == °:: air, dust thin 臈 assembly storage: The bearing table is fitted to the foot support 23 . The leg portion of the fitting ω is preferably designed in consideration of the following circumstances, and the design of the following formula, but the leg portion 13 of the component storage container 10, can easily hold the leg portion when the pell film is removed; The inclined portion car is provided with the foot holder 23 on the m-port 24 by the dust-proof thin-film assembly storage container 10, and the container storage container body U and the lid body are placed at a desired position in the ==== And again; ten = the degree of freedom of the field, the handle 14, the functional parts. The flank 5 is provided with a buckle for supporting the lid 12 to support the rotating shaft 26 of the mounting table 24, and is provided with a dustproof _1^= mounting table for the trolley 20 for transporting Trolley 2. The placement of the ΠΛ Γ Γ Γ Γ Γ Γ Γ Γ Γ Γ ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘容 201132557 In the shaft (four), the itch of the rod-type structure of the stalks 5 shows the dust-proof membrane module storage container w, for the level of ... ... degrees of angle Θ tilted state of the dust _ = ^ water + surface to 75 car 20 summary Front view, Fig. 6 is the right side view / Μ 1〇 and the transport table. As mentioned above, the (four) 24 of the turntable 20 supporting the mounting table 24 is full, so the man is only right 卞 / 卞 ' ' , the center of gravity when the state is 1 !! pour:. The human membrane assembly storage container is fixed to the mounting table 24 at an inclined angle. Two copies: The second one can be configured as follows: and there is a long hole 28a in the local sense of the 'angle fixing mechanism Μ f screw ^ 8b, by locking the bolt 28b into the long hole (four) on the level of the mounting table 24 The degree of Xiao Du ^ This is fortunate. Car 2 〇 'Residual dust thin components storage container (7) Two containers for 1 day, so that the placement of the dust-proof thin 臈 收 收 容 哭 哭 哭 哭 哭 3 3 3 3 3 以 以 以 以 以 以1 〇, degree to see ' _ should make the mounting table 24 vertical: angle 2 = Ϊ binding? The assembly storage container 1 〇 of the mounting table 24 for the leeches: component storage container Ι α ? 4 夕 Λ 徒 阿 亦There is a problem in safety. Moreover, the angle Θ of the placement of the (four) t-plane is made larger, and even if the mounting table 24 is closer to the vertical=', the iterative surface on which the pellicle assembly container w is placed is placed. _,, although this can reduce the horizontal ': the middle of the kernel, on the other hand, the length of the up and down direction becomes longer, and the part where the space of the = = = 受 受 受 , , , , , , , 方 方 方 方 方 , , , , , , , , In the horizontal direction of the mounting table 24 of the component storage container 10, the J is produced by the New 22 domain _ 23⁄4. There is a need to reduce, but the width of the gantry section 21, "the hundred s, ι transport trolley 2 〇 is less stable, from this point of view, it also makes the placement of ^ 201132557 24 close to the sloping state is subject to ^ Therefore, in the transport dust film assembly storage container 1G, the dust-proof film module is transported to accommodate the crying I I mount = dust film assembly storage container i. The mounting table 24 is tilted to &
=2 6〇度至8〇度，運送防塵薄膜組件收納2器： 並保存，以上為其較佳之實施態樣。 D 若根據本貫施態樣，因為防塵薄膜 == 收納容器10的_，嵌合牛二= 裝在載置D 24上的腳部承座23，防塵細組件㈣容 斤广防塵薄膜組件收納容器10的外周;ί 使是如收納，_ 收納容器10，具有重達組件之防塵薄膜組件 -載置iiir台力的:防塵薄膜組件收納容器 ^VZT：^: 26 " 10時的重心位置，所以載了防塵溥膜組件收納容器 運送用台車2〇的载么貝腔人“f能容易地使搭載在 薄膜組件收·ϋ $ 有 就能安全且容純運送防塵 容器態樣’因為能使載置_膜組件收納 8〇度，安全\軍„傾斜’以使對於水平面的角度Θ成60度至 件收納容II ㈣容111G ’故運雜塵薄膜組 為水平狀態並運係在使防塵薄膜組件收納容器10 納容器Η)時，^； = 5()^下:又，亦於保存防塵薄膜組件收 為水平狀能並俘在技斤而的工間’係在使防塵薄膜組件收納容器10 U保騎的编以下，可實現省m *且因為在 201132557 用ί車?架台部21的下部，安裝了可自由轉換方向的車 二” ί以ΐ保存防塵薄膜組件收納容器ig時，亦於有必要移動 納容組件收納容器10的情形，能容易地移動防塵薄膜組件收 【實施例】 以下’為了闡明本發明之效果，而揭露實施例及比較 <實施例> 將具有圖1至圖3所示之形狀的防塵薄膜組件收納容器1〇， 如以下方式製成。 防塵薄膜組件收納谷器本體11係將链合金AC4C砂型鑄造， 研磨布對表面進行精加卫，_外周部及搭.塵薄膜组 夕銳床進行切削加工，且以防塵薄膜組件收納容器工〇的 汁周為基準，加工出腳部13的安裝用的螺絲孔。 t檢ϋ的機械加工結束之後，絲面輯孔等之鑄造缺陷以油 灰填補進行精加工，塗佈導電性塗料’以烘箱施以燒成乾燥。 腳邻係以將厚度4mm的SUS304冷軋板彎曲加工製成。 =i ί寸，定為70x80xl00mm ’藉由⑽的六角承窩頭螺栓， 女放於防塵薄膜組件收納容器本體u的下面的6個地方。 夕％妾ΰϋ對厚度3_的聚甲基丙稀酸甲醋板施以抗靜電塗裝 其真空細，製成蓋體12。蓋體12的外周，以Nc起槽 以使其尺寸與防塵薄膜組件收納容器本體11的 胸製成的蓋體12,安裝於τ面裝有6伽卩部13的防塵薄 納容器本體η，完成防塵薄膜組件收納容器1〇。如此製 成的防塵溥膜組件收納容器10的重量約為80kg。 容哭4至圖6所示之帛域置並運送防塵細組件收納 今。σ 10之運送用台車20，如以下方式製成。 ，台部21及支柱22 ’係將銘合金的中空擠製型材以螺栓扣接 於架台部21的下部，以螺栓錢了車輪Μ。分別於2 根支柱22的各上部’設有由2列配置之十字滾柱轴承所支持的旋 201132557 轉軸26。在此，設定各構件 置，與繞其周圍旋轉的防塵镇置’以使旋轉軸26的中心軸的位 及腳部承座23的重心—致4胰組件收納容器10、下述載置台24 以螺才全扣^组裝^的ϋ台24 ’係將銘合金的中空擠製型材 於防塵薄膜組件收納容器24的既定的位置，裝有拔合 部承座23，係以導電性=〇尸的=部13之腳部承座23。在此，腳 與防塵薄膜組件收納容器10 又，為了防止 *塵再靜電用之聚氣上生傷痕、 構27。其構造 ====，=脫落防止機 • 90度的範圍旋轉。 疋轉軸為中、，在水平方向於0度至 又’於旋轉軸26的附近的支 的螺栓28b所構成的角度固定機 2 :有5又置了把手之Μ12 下：藉由將螺栓28b鎖緊二角度固定機構28，構成如 之角度固定載置台24的緊角、支的長孔孤’能以所期望 在如以上構成之安裝於運送用 承座23内，嵌合防塵薄膜组m口 24上的腳部 台車20的載置台24上祝#咏鹿* f 的腳部13，於運送用 位作業人員，如圖6所干^^膜組件收納容器10之後，由1 載置台24傾斜，以讓载置台薄膜組件收納容器1〇之 容易地即可使搭載防塵薄膜組件收納7容哭面= 75度， 且雖然由1位作業人員來務之載置台24傾斜， 送用台車2。，但不會感t丨有危;塵伽組件收納容器10之運 又，在移動搭載防塵薄膜組件收納容器ω ί比^路的寬度，即使保留少許的裕度，約為_口聰。2〇 水平保持 膜組件收够11本體11的把手&並運送 14 201132557 ίο ° 作業員分擔的重量約陶’雖然有點重，但不會對運送 ，々皆ί是’試著測量用以運送防塵薄膜組件收納容器10所需的通 章的^所需的通路寬度為25GQmm以上，若考慮顺以安全作 業的裕度，必要的通路寬度大約為3000mm。 作 ;主^發·不僅限於以上之實施態樣及實施例，而可 之發明的範圍内做各式各樣的變更，其等亦= 本發明之乾圍内，自不待言。 匕3於 體11的底部，裝有6個車輪25,作是車_ 25絲Γ又、内谷益本 塵薄膜組件收納容器10的剛性來宜根據防 於防塵薄膜組件收納容叉非以6個車輪25安裝 輪25即可。 °。本體11的底部為必要，至少裳有4個車 沖^者’於上述實絲樣巾’雖賊落防止機構271右 =構造，但脫落防止機構27並 &為^要，亦可翻其他的構造之脫落防止機構 姑的構 藉由將定機物成如下: 角度固定載置台24的备支，22的長孔28a，能以所期望之 成為必要：藉由將雜構28麟以如下之構 定载置台24,藉由於^柱為了能以所期望之角度固 =期望之咖孔内， 之角度固定機構。 Μ更用具有各式各樣的構成 容器送防塵薄膜組件收納 物之目的，車輪μ設未^納谷器受到衝擊，而附著異 設有衝擊緩衝機構為^未衝機構，但車輪25非以 亦可安裝-般的車輪。；运用口車20的架台部21的底部， 15 201132557 【圖式簡單說明】 圖1係依本發明的較佳的實施態樣之防塵薄膜組件之收納容 器的概略平面圖。 圖2係圖1所示之防塵薄膜組件之收納容器的概略前視圖。 斤示庙之ff薄膜組件之收納容器的概略右側視圖。 圖。圖4物載防㈣膜組件收納容器之運送用台車的概略前視 圖5係顯示將防塵薄膜組件收納容器， 角度傾斜的雜之防㈣麻件㈣容 75度的 視圖。 夂連迗用台車的概略前 圖6係顯示將防塵薄膜組件收納容器， 角度傾斜的狀態之防塵薄膜組件收納容 了於水平面以75度的 側視圖。 、’夂運送用台車的概略右 【主要元件符號說明】 10〜防塵薄膜組件收納容器 11〜防塵薄膜組件收納容器本體 12〜防塵薄膜組件收納容器之蓋體 13〜防塵薄膜組件收納容器之腳部 14〜把手 15〜把手 20〜運送用台車 21〜架台部 22〜支柱 23〜腳部承座 24〜載置台 ^ 25〜車輪 2 6〜旋轉轴 27〜脫落防止機構 201132557 28〜角度固定機構 28a~長孔 28b〜螺栓= 2 6 degrees to 8 degrees, the dust-proof membrane module is stored in the container: and stored, the above is a preferred embodiment. D According to the local application, because the dustproof film == _ of the storage container 10, the fitting cow 2 = the foot holder 23 mounted on the D 24, the dustproof thin component (4) accommodates the dustproof film assembly The outer circumference of the container 10; ί is such as storage, _ storage container 10, dust-proof membrane module having a weight of the assembly - placing iiir force: pellicle assembly container ^VZT: ^: 26 " Therefore, it is possible to carry the dust-proof enamel module storage container transporting trolley 2 〇 么 “ “ “ “ 能 能 能 能 能 能 能 能 能 能 能 能 能 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有The mounting _ membrane module is stored at 8 , degrees, and the safety 军 „ 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜 斜When the pellicle assembly container 10 is in the container Η), ^; = 5 () ^: In addition, the pellicle is also stored in a horizontal position and is captured in the work room. The storage container 10 U Bao riding is compiled below, which can save m * and because at 201132557 In the lower part of the gantry unit 21, a car that can be freely changed in direction is attached. When the dust-proof film unit storage container ig is stored in the ί, it is necessary to move the nano-capacity unit storage container 10, and the dust can be easily moved. [Examples] Hereinafter, in order to clarify the effects of the present invention, examples and comparisons are made. <Examples> A pellicle assembly container having the shape shown in Figs. 1 to 3 is used, as follows. The dust-proof membrane module is stored in the trough body 11 by sand-casting the chain alloy AC4C, and the polishing cloth is used to finely clean the surface, and the outer peripheral portion and the dust-collecting film group are cut and processed, and the dust-proof film assembly is used. The screw hole for mounting the leg portion 13 is processed on the basis of the juice circumference of the container container. After the machining of the t-check is completed, the casting defects such as the mesh surface are finished with the putty filling, and the coating is coated. The paint was fired and dried in an oven. The foot was made by bending a SUS304 cold-rolled sheet with a thickness of 4 mm. =i í inch, set at 70x80xl00mm 'with hexagonal socket head bolts (10), female It is placed in the lower six places of the pellicle assembly container main body u. The polymethyl methacrylate plate having a thickness of 3 mm is applied with an antistatic coating and vacuum-dried to form a lid 12. The outer periphery of the lid body 12 is grooved with Nc so as to have a size and a chest made of the pellicle assembly container body 11, and is attached to the dust-proof thin-film container body η having the 6-gauge portion 13 on the τ surface. The dust-proof membrane module storage container 1 is completed. The weight of the dust-proof membrane module storage container 10 thus produced is about 80 kg. The crying 4 is placed in the area shown in Fig. 6 and the dustproof component is stored and transported. The trolley 20 is made as follows. The table portion 21 and the struts 22' are fastened to the lower portion of the gantry portion 21 by bolts of the hollow extruded profiles of the alloy, and the wheel rims are bolted. Each of the upper portions of the two pillars 22 is provided with a rotary shaft 201132557 which is supported by two rows of cross roller bearings. Here, each member is set so as to be placed in a dustproof manner around the periphery thereof so that the position of the central axis of the rotating shaft 26 and the center of gravity of the leg holder 23 are caused by the pancreas assembly container 10 and the following mounting table 24 The squeezing of the snail is fully assembled. The hollow extruded profile of the alloy is placed at a predetermined position of the pellicle assembly container 24, and the detachable portion seat 23 is provided for electrical conductivity = 〇 The foot of the corpse = part 13 of the seat 23 . Here, the foot and the pellicle container storage container 10 are also provided with a structure 27 for preventing the occurrence of scratches on the gas collected by the dust re-electrostaticization. Its configuration ====, = shedding prevention machine • 90 degree range rotation. The angle fixing machine 2 consisting of a bolt 28b in the horizontal direction at 0 degrees to the vicinity of the rotating shaft 26 is provided with 5 handles and 12 handles: by locking the bolt 28b The second angle fixing mechanism 28 is configured such that the tight angle of the angle-fixing mounting table 24 and the long hole of the branch can be attached to the transport holder 23 as desired, and the pellicle film m is fitted. On the mounting table 24 of the leg vehicle 20 on the 24, the leg portion 13 of the #咏鹿* f is placed on the mounting table 24 by the transporting operator, as shown in Fig. 6, after the film assembly storage container 10 is closed. In the case where the mounting film unit storage container 1 is easily attached, the dust-proof film unit is placed in the storage area, and the mounting surface 24 is tilted, and the table 2 is fed. However, it does not feel that there is a danger; the dust gamma component storage container 10 is transported, and the width of the dust-proof membrane module storage container ω ί is more than the width of the road, even if a small margin is reserved, it is about _ mouth. 2〇 Horizontal retention membrane assembly receives 11 handles of the body 11 & and transports 14 201132557 ίο ° The weight shared by the operator is about Tao 'Although a bit heavy, but not for delivery, 々 ί is 'try to measure for shipping The required passage width of the dust-proof membrane module storage container 10 is 25 GQ mm or more, and the necessary passage width is about 3000 mm in consideration of the margin for safe work. The main embodiment is not limited to the above embodiments and examples, but various modifications can be made within the scope of the invention, and the like is also within the scope of the invention.匕3 is at the bottom of the body 11, and is equipped with six wheels 25, which is the rigidity of the car _ 25 wire crepe and the inner gluten dust film assembly container 10, and it is preferable to accommodate the fork according to the anti-dust film assembly. The wheels 25 can be mounted on the wheels 25. °. The bottom of the body 11 is necessary, at least four cars are rushed to 'the above-mentioned silk-like towel', although the thief-fall prevention mechanism 271 is right-structured, but the fall-off prevention mechanism 27 is & The structure of the detachment prevention mechanism is constructed by the following: The angle of the fixed mounting table 24, the long hole 28a of the 22 can be made as desired: by using the hybrid 28 lin The mounting table 24 is configured to be an angle fixing mechanism for the purpose of being able to fix the desired angle in the coffee hole at a desired angle. Μ 用 用 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有Can be installed - the same wheel. The bottom of the gantry portion 21 of the car 20 is used. 15 201132557 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic plan view showing a receiving container of a pellicle according to a preferred embodiment of the present invention. Fig. 2 is a schematic front view showing a storage container of the pellicle according to Fig. 1. A schematic right side view of the storage container of the ff film assembly of the temple. Figure. Fig. 4 is a schematic front view of the transporting carriage of the material-proof (4) membrane module storage container. Fig. 5 is a view showing the dust-proof membrane module storage container with an angle of inclination of the miscellaneous (four) hemp pieces (four). Fig. 6 is a side view showing the pellicle assembly container in which the pellicle assembly container is placed at an angle of 75 degrees in a horizontal plane.概略 概略 夂 夂 【 【 【 【 【 【 【 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘 防尘14 to handle 15 to handle 20 to transport carriage 21 to gantry portion 22 to struts 23 to foot support 24 to mounting table 25 to wheel 2 6 to rotary shaft 27 to fall prevention mechanism 201132557 28 to angle fixing mechanism 28a~ Long hole 28b~bolt