201238864 41362pif 六、發明說明： 【發明所屬之技術領域】 本發明涉及一種包裝箱，該包裝箱是對收納有防塵薄 臈組件的容器進行運輸以及保管的包裝箱，該防塵薄膜組 件在製造半導體元件、印刷電路板、大規模積體電路、液 晶顯示器時作為防塵使用。 【先前技術】 在大規模積體電路等的製造過程中，將光照射於半導 體晶圓和液晶用玻璃原板來製作圖案時所使用的光罩即光 掩膜上一旦附著上塵埃，由於該塵埃會對光產生遮擋或者 折射’存在著會對轉印後的圖案造成損害的問題。為此， 這些作業通常在無塵室内進行，但即使這樣也很難始終保 持光掩膜的清潔，作為光掩膜表面的防塵措施，人們採用 了貼附防塵薄膜組件的方法。 利用所貼附的防塵薄膜組件，異物不會直接附著到光 掩膜的表面上，而只是會附著到防塵薄膜組件上，因此光 刻時如果將焦點對準在光掩膜的圖案上，則防塵薄膜組件 上的異物就與轉印沒有關係。該防塵薄膜組件具有如下結 構，即：在防塵薄膜組件框架的上端面上，通過塗布溶^ 使其風乾來雜或者通郷糊來雜驗普通光充分透 過的透明的__，並且在防㈣膜組件框架的下端面 置有驗黏貼光掩膜上的減層，以及作為黏貼層 的保濩目的的離型層（分離層）。 另外近年來，隨著液晶顯示器的大型化，液晶用光 201238864 41362pif =I 件也趨1現了邊長超過 的超大型產品。這樣的防塵薄膜 其收納容器也大型化，並且隨著收納容器的大型^，、、= 納容器的剛性的要求，因此伴隨著這樣的要求， 重1的增加也十分顯著。 在搬運這樣的防塵薄膜組件收納容器時，由於重量， 就變得比較困難。邊長超過麵贿 ^特^的防㈣膜組件的搬運作業，不僅 場合存在對作業人員造成重大傷害的危險ΐ —項伴有極大危險性的作業’因此要使用堆 :¾膜搬運5又備。為此’考慮到又具的插入，而在防 塵薄膜組件收納容器的外部底部設置突出_部。 Μ 2收納、運輸這樣的防塵薄膜组件收納容器 擊，在内㈣面配置底面緩衝體81以及在内部側面配^ 體14，以支持防塵薄膜組件收納容器3G的方式而 =¾ 在防塵薄膜組件邊長超過500mm的大型 收納f器的情況τ ’緩衝體在單位面積上 "、子在不能發揮緩衝能力的可能性。在那樣的 ^專利文少_體的接觸面積’能夠提高緩衝能力 。另一方面，在邊長超過1000mm的超大 相組件的情況下’防蘭驗件收納容器具有 重量，所以很難正確地設計硬度。難以兼顧緩衝J 抓入初期的緩衝性與加入了大的衝擊時的觸底現象。體 201238864 41J02plf 再有’還存在相對於水平方向的擊 力的問題。在防塵薄臈組件收納容器的重量比 下，防塵薄膜組件收納容器對緩衝體的陷入較少; 了來自水平方向的衝擊時’防塵薄膜組件收納容器在緩^ 體之上會有些側滑現象。配置在側面的緩衝體，是 了在此抵住發线滑的防塵薄膜組件收納容器來緩 而配置的。但是，在防㈣肋件㈣容 的情況下，並且，底面積非常大的情況下，防塵 衝體中的狀態’或者處於摩擦力非 =大的狀心。因此’在水平方向的衝擊緩和方面 緩衝體在水平方向上的剪切變形就顯得十分必要士 於大的平板狀賴韻在财向上幾乎 能充分發揮緩衝能力。 τ 乂不 對此，通過將緩衝體的形狀做成柱的形狀 =面的面積變小’而將厚度變得非常厚，就能夠提= =平方向的變形。但是’單純增加厚度的話會增大無十 工間，而且在裝載防塵_組件收納容器時如果不火 正確地將防塵薄膜組件收納容器裝載到緩衝體上的与，* =為失去平衡而出現傾斜以及脫落的危險性，所以並不t ^根據這些情況，到目前為止還沒有—種既能夠= 收納或取出防_驗件收納容H， 也 當設計，且沒有異物附著之虞的防塵薄膜組適 現有技術文獻 相° 專利文獻 6 201238864 41J0Zpif 專利文獻1 :日本特開2008—100733號公報 【發明内容】 本發明是為了解決所述課題而完成的，其目的在於提 供一種防塵薄膜組件用包裝箱，該包裝箱不僅能夠將收納 了至少一個邊長超過l〇〇〇mm的特大型的防塵薄膜組件的 防塵薄膜組件收納容器保持不傾斜以及不脫落地穩定且清 漂的狀態下來進行保管，而且能夠在對防塵薄膜組件收納 容器以及被收納著的防塵薄膜組件發揮充分的缓衝能力而 不對其造成衝擊和震動的情況下來進行運輸以及搬運。 為了實現所述目的，本發明技術方案丨所述的防塵薄 膜組件用包裝箱是用以保管及/或運送至少一個邊長超過 1000mm的防塵薄膜組件的收納容器，其特徵在於，在該 包裝箱的内部底面上分離地安裝有多個緩衝體，該緩衝體 具有將從該防塵薄膜組件收納容器的外部底面突出的的多 個腳部分別插入其中的凹部。 ，技術方案2所述的防塵薄膜組件用包裝箱，是根據技 術方案1所述的防塵薄膜組件用包裝箱，其特徵在於，所 述緩衝體由硬度不同的多個層積層形成。 ，•技術方案3所述的防塵薄膜組件用包襄箱，是根據技 術方案2所述的防塵薄膜組件用包㈣，其特徵在於，所 述緩衝體為兩層結構，下層的所述硬度高於上層的所述硬 度。 技術方案4所述的防塵薄膜組件用包襄箱，是根據技 術方案1所述的防塵薄膜組件用包裝箱，其特徵在於，在 201238864 41362pif 裝相的外部底面上安裝至少四個腳部或車輪，r而 吏，面與地面之間至少形成 ：輪:而 能夠拆卸。包裝相的四個側面中的至少—面的壁板 發明的効果 長超=:===將從收納有-個邊 組件收納容器上#膜組件的防塵薄膜 且各自獨立地固插入到分別對應各腳部 衝體的凹部中；==部底面設置而成的底面緩 夠保持蚊且清膜組件收納容11，從而能 二二=;的::緩r而言’正確地裝載有 容衝體的凹部内，所以防塵薄膜組件收納 此上發生傾斜以及脫落的危險性。因 膜組件以】广運時’能夠對施加於被收納著的防塵薄 轉薄膜組件收納容器白勺垂直方向以及水平方 向的震動以及衝擊加以_。 ^十方 硬度，箱的底面緩衝體，是由 件收細—辱積層而成’針對重倾重的防塵薄膜組 自小的：:的：t制底面緩衝體的厚度’ 一邊發揮出來 縮到奉类衝性，而且即使對於大的衝擊，不會被壓 象，=处豹；衝體的緩衝功能程度、不會產生觸底現 此°七揮充分的緩衝能力。基於防塵薄膜組件收納 201238864 41362pif 設備、預測的衝擊程度，通過對底面緩 m度、硬度、層的組合加以調整，來充分發 防彼從而ΐΐ在對被收納著的防塵薄膜組件以及 :、、、且收納容器不造成震動與衝擊的情況下，安全 地進行運輸以及搬運。 長方i?明的防塵薄膜組件用包裝箱，由於形成為 能 四個側面中的至少一面的壁板能夠拆 二載和取出防塵薄膜組件收納容器時能夠使用 備。同樣，在移動防塵薄膜組件用包 it箱的外部底面與地面之間確保有_，所以也 二釣—又型搬運設備。因此’在移動、運輸、搬運等時， 月匕句確保作業的安全性，同時能夠提高作業効 【實施方式】 ^ 範圍ί不面局態作詳細說明’但本發明的 .軍於ΐίΓ的防塵薄難件用包裝箱，用於穩定地保管並 搬運收納了一個邊超過卿職的大型的防塵薄 薄·件收納容器，在該包裳箱内的底面上 自防塵薄膜組件收納容器底面突出的多個聊部 的多個底面緩衝體。 =㈣餘件用包裝箱在裝載了防㈣膜 納谷益的使用狀態下的—個實施对示於圖1〜圖5中。收 如圖1的立體圖所示，防塵薄膜組件用包裝箱 方體的箱狀，其四個侧面由壁板13所覆蓋，並且頂面由2 201238864 41362pif 體20所覆蓋。該蓋體2〇通過固 箱上。壁板13的-部分設置右 破捆綁在整個包裝 別安裝在該防塵薄膜組‘用包巴二四個腳輪2 3被分 防塵薄膜組件用包裝们通過 ==部底面的㈣^ 間隔確保在漏_ =面與地面之間的 組件用包裝箱1的移動、收納以;=保就== =用例如知機或托板升降機或手動液壓搬運車等的搬運 1的A —A剖面線的正面剖面圖示於圖2中。 被裝載著的防塵薄膜組件收納容器3〇，是將防塵 組件收納在由托盤32和與其相對配置的盤蓋31之間所护 成的空間内的收納容器。另外，哕 ^ θ ., 卜°亥防塵薄膜組件收納容器 =具有攸其外部底面突出的四個聊部33。被收納著的防塵 涛膜組件具有如下結構，即：在由銘、不錄鋼、聚乙稀等 形成的防塵薄膜組件框架的上端面上，通過塗布溶劑使其 風乾來黏接或者通過丙烯g咖旨或環氧樹脂轉黏劑來^ 接能使普通光充分透過的由确基纖維素、醋酸纖維素或氟 類樹脂等形成的透明的防塵薄膜，並且在防塵薄膜組件框 =的下端面上’設置有用於黏貼至光掩膜上的由聚丁稀樹 脂、聚醋酸乙烯樹脂、丙烯酸樹脂等形成的黏貼層，以及 作為黏貼層的保護目的的離型層（分離層）。另外，在將 防塵薄膜組件黏貼於光掩膜上的狀態下，為了消除被包圍 在防塵薄膜組件内部的空間與外部的氣壓差，在防塵薄膜 201238864 41J02pif 組=框架的—部分開設有氣壓調節用的小孔，還設置有過 遽、以防止來自通過小孔移動的空氣中的異物侵入。 對於裴载包括盤蓋31、托盤32以及腳部33的防塵薄 膜組件收納容器30的内部底面而言，在托板1〇的上面使 用柳釘及/或如環氧系膠黏劑那樣的膠黏劑安裝有底板 11。该底板11上的四個角落位置，固定設置有抵接著壁板 13的L型的側面緩衝體14，該壁板13由覆蓋四個側面的 坌面形成。另外，在底板11上，在比所述侧面緩衝體14 更内側’且在裝載防塵薄膜組件收納容器30時的各腳部 33位置，分別用雙面膠帶固定設置有頂面側具有凹部17 的凹型的底面緩衝體18。底面緩衝體18的固定只要是能 夠^定在底板11上即可，不僅可以使用雙面膠帶那樣的黏 接膠帶，也可以使用黏接劑或膠黏劑或鉚釘。 _ 、該側面緩衝體14抵接著的壁板13是其四個側面分別 構成的板狀構件，通過在底板u上面的周圍所形成的邊樞 =，以可拆卸的方式相互嵌合固定。該壁板13較佳形成為 此夠將所需的面逐枚拆卸。因此變得能夠僅在必要的部位 拆卸壁板，利用堆高機那樣的搬運機（未圖示）進行收齣、 取出’以提高作業性。另外，壁板13也可以在底板U上 所形成的槽或在托板10與底板u所形成的槽中，以 卸的方式相互嵌合固定。 诉 一立覆蓋頂面的蓋體20在防塵薄膜組件收納容器3〇侧 一部^ ’形成有上面緩衝體19，該上面緩衝體19具 防塵薄膜組件收納容器3〇抵接或近接程度的高度。該上^ 201238864 41362pif 體’且㈣塵賴崎㈣Μ 30的盤 此面為平面狀。上面緩衝體19接觸或近接防塵 =且=納容器3〇的上表面，用來填補蓋㈣與防塵 内谷裔30之間的間隙。該蓋體20也可以通過 扣子進行固定。 &圖2的剖面線的俯視剖面圖示於圖 且/〇圖2的C — C剖面線的俯視剖面圖示於圖4中。、 在底的二面緩衝體14由兩個長方體的側面緩衝體Η 在底板11上的四個角落上接合 設置在如下位置，g卩.Χ邊側面緩衝體14被 33嵌合在底面緩衝體^:塵，組件收納容器30的腳部 收納容器30的四個“ 17中時，該防塵薄膜組件 L型的位置。_緩彳t別接觸或近接於側面緩衝體14的 衡辦1/1 4 緩衝體14的接觸面為平面狀。嗲相,丨^ 震動。側面緩==緩衝在水平方向產生的衝擊或 的嵌合程度接觸，5^塵溥膜組件收納容器30以適ί 接。又 5以最大具有3〇mm的間隙的程度ς 件收18分顺絲設置，細 ，、，内令杰30的腳部33相嵌合的 先專祺植 二 t=:收 積層…在高 -更度㈣體層】6而形成。通過在該底面 ^層 16的凹 201238864 41362pif 部17中分職合突出於防㈣職件收納容器的底面 的四個腳部^3，使得防塵薄膜組件收納容器％被穩定地 收納在防塵薄膜組件用包裝箱内。該腳部％是為了使用叉 型搬運設備來搬運而設計的，其高度為9〇mm〜2〇〇mm， 又型搬運设備能夠搬運如下大小的防塵薄膜組件收納容器 30，即.在人工搬運的情況下，122〇 mmxl4〇〇 mm的光掩 膜用防塵薄膜組件至少需2人，1620 mmxl780 mm的光掩 膜用防塵薄膜組件最低需4人，最好需6人以上的防塵薄 膜組件收納容器30。底面緩衝體18在支持防塵薄膜組件 收納容器30的同時’可以吸收並緩和在運輸以及搬運過程 中所造成的垂直方向以及水平方向的衝擊和震動。通過積 層硬度不同的緩衝體層，在能夠抑制其厚度的同時，進而 發揮出對於自小的衝擊的緩衝性，而且可確保對於大的衝 擊也不會出現觸底現象而進行緩衝的高緩衝功能。 該底面緩衝體18具有凹部17,該凹部17由依照聊部 33而與腳部33的側面抵接或近接的寬度，以及能夠將腳 部33整體插入且腳部底面不會接觸到底面緩衝體18的深 度所構成’並且該底面緩衝體18具有足夠的大小及厚度， 以便吸收運輸和搬運過程中的震動以及衝擊。被收納於防 塵薄膜組件收納容器30内的防塵薄膜組件，例如是520 mmx800 mm的光掩膜用防塵薄膜組件的場合不超過6 kg ’但在1220 mmxl400 mm的光掩膜用防塵薄膜組件的 場合則大約有40 kg，進而，在1620 mmxl780 mm的光掩 膜用防塵薄膜組件的場合大約f達90 kg。因此，腳部周 13 201238864 41362pif201238864 41362pif 6. Technical Field of the Invention The present invention relates to a packaging box which is a packaging box for transporting and storing a container containing a dustproof thin squeegee assembly for manufacturing a semiconductor element. It is used as a dustproof when printed circuit boards, large-scale integrated circuits, and liquid crystal displays. [Prior Art] In the manufacturing process of a large-scale integrated circuit or the like, dust is attached to the photomask, which is a photomask used for patterning a semiconductor wafer and a liquid crystal glass plate, because of the dust. There is a problem that the light is blocked or refracted, and there is damage to the transferred pattern. For this reason, these operations are usually carried out in a clean room, but even in this case, it is difficult to keep the photomask clean at all times, and as a dustproof measure on the surface of the photomask, a method of attaching the pellicle is employed. With the attached pellicle assembly, foreign matter does not directly adhere to the surface of the photomask, but only adheres to the pellicle assembly, so if the focus is on the photomask pattern during photolithography, The foreign matter on the pellicle is not related to the transfer. The pellicle has the following structure, that is, on the upper end surface of the pellicle frame, by coating it to be air-dried, or by using a paste to diagnose the transparent light that is transparent to the ordinary light, and in the prevention (4) The lower end surface of the membrane module frame is provided with a reduction layer on the photomask, and a release layer (separation layer) as a protective layer for the adhesion layer. In addition, in recent years, with the increase in the size of liquid crystal displays, the use of liquid crystal light 201238864 41362pif = I has also become a very large product with a side length exceeding. Such a dust-proof film has a large size in the storage container, and the size of the container is large, and the rigidity of the container is required. Therefore, with such a request, the increase in the weight 1 is remarkable. When such a pellicle container storage container is transported, it becomes difficult due to the weight. The handling of the anti-(4) membrane module with a side length exceeding the thickness of the bribe is not only a risk of serious injury to the operator, but also a very dangerous operation. Therefore, the stack is used: 3⁄4 membrane handling 5 . For this purpose, a separate projection is provided in the outer bottom of the dustproof membrane module storage container in consideration of the additional insertion. Μ 2 The dust-proof membrane module storage container is stored and transported, and the bottom cushioning body 81 and the inner side surface fitting body 14 are disposed on the inner (four) surface to support the dust-proof membrane module storage container 3G = 3⁄4 on the side of the dustproof membrane module In the case of a large storage device that is longer than 500 mm, τ 'the buffer body is in a unit area.' In such a ^ patent document less _ body contact area 'can improve the buffering capacity. On the other hand, in the case of an ultra-large phase component having a side length of more than 1000 mm, the anti-blue specimen storage container has a weight, so that it is difficult to accurately design the hardness. It is difficult to balance the cushioning property at the initial stage of the buffer J and the bottoming phenomenon when a large impact is added. Body 201238864 41J02plf There is also a problem that there is still a force with respect to the horizontal direction. At the weight ratio of the dust-proof thin-film unit storage container, the pellicle assembly container has less trapping of the cushion body; and when the impact is from the horizontal direction, the pellicle assembly container has a side slip phenomenon on the cushion. The cushion body disposed on the side is configured to be gently placed against the dust-proof membrane module storage container that is slippery. However, in the case of preventing the (4) rib (4) capacity, and in the case where the bottom area is very large, the state in the dustproof body is either a state in which the frictional force is not large. Therefore, in the horizontal direction of the impact relaxation, the shear deformation of the buffer body in the horizontal direction is very necessary. The large flat-plate Lai Yun can almost fully utilize the buffering ability in the financial direction. In the case of τ 乂, the shape of the buffer body is made into the shape of the column = the area of the surface is made smaller, and the thickness is made very thick, so that the deformation in the flat direction can be improved. However, ' simply increasing the thickness will increase the number of work spaces, and if the dust-proof membrane assembly storage container is loaded onto the cushion body correctly when the dust-proof assembly storage container is loaded, * = tilting for loss of balance And the danger of falling off, so it is not based on these conditions, so far, there is no dust-proof film group that can be used to store or take out the anti-test piece storage capacity H, and also design, and there is no foreign matter attached. The present invention has been made to solve the above problems, and an object of the present invention is to provide a packaging box for a pellicle film assembly. The present invention has been made to solve the above problems. In addition, the packaging of the pellicle assembly container that accommodates at least one extra large pellicle assembly having a side length of more than 10 mm can be stored without being tilted and stably and rinsing without falling off, and It is possible to provide sufficient cushioning energy to the pellicle container storage container and the stored pellicle module. But without causing shock and vibration down for shipping and handling. In order to achieve the above object, the dustproof film assembly package according to the present invention is a storage container for storing and/or transporting at least one pellicle component having a side length of more than 1000 mm, characterized in that the package is in the package. A plurality of cushioning bodies having recesses into which a plurality of leg portions projecting from the outer bottom surface of the pellicle container storage container are respectively inserted are separately attached to the inner bottom surface. The package for a pellicle according to the first aspect of the invention, wherein the cushion body is formed of a plurality of laminated layers having different hardnesses. The package for a pellicle for a pellicle according to the second aspect of the present invention, characterized in that the baffle has a two-layer structure, and the lower layer has a high hardness. The hardness of the upper layer. The package for a pellicle for a pellicle according to the first aspect of the present invention, characterized in that at least four legs or wheels are mounted on the outer bottom surface of the 201238864 41362pif phase. r, 吏, at least between the face and the ground: wheel: can be disassembled. At least one of the four sides of the packaging phase has a long effect of the invention: ====The dust-proof film of the #membrane assembly on the container-contained container is separately inserted and fixed to each other independently The bottom surface of each leg is flushed; the bottom surface provided by the bottom surface of the == part is slow enough to hold the mosquito and the clear film assembly is accommodated in the housing 11, so that the second and the second are: In the recess of the body, the pellicle assembly accommodates the risk of tilting and falling off. The film assembly can be subjected to vibration and impact applied in the vertical direction and the horizontal direction of the dust-shielded thin film container storage container to be stored. ^The hardness of the ten squares, the bottom buffer of the box is made up of pieces of the thinning-disintegrating layer. The dust-proof film set for the heavy weight is small:: the thickness of the bottom cushion body of the t-body is reduced to It is pungent, and even for large impacts, it will not be crushed, = leopard; the buffering function of the punch will not produce a bottoming. Based on the dust-proof membrane module, the 201238864 41362pif equipment is used to predict the degree of impact. By adjusting the combination of the degree of slowness of the bottom surface, the hardness, and the layer, it is possible to fully prevent and control the dust-proof membrane module and the contained dust-proof membrane module. Moreover, the storage container is safely transported and transported without causing vibration and impact. The packaging box for the pellicle of the rectangular side can be used when the wall panel which is formed to be at least one of the four side faces can be removed and the pellicle assembly container can be taken out. Similarly, it is ensured that there is a _ between the outer bottom surface of the bag for moving the dust-proof membrane module and the floor, so it is also a two-fishing-type handling device. Therefore, 'when moving, transporting, transporting, etc., the monthly haiku ensures the safety of the work, and at the same time can improve the work efficiency. [Implementation] ^ Scope 不 不 局 局 局 ' ' ' ' ' ' ' ' ' ' ' A package for thin and difficult parts, which is used for stably storing and transporting a large-sized dust-proof thin container storage container that has a side that exceeds the post, and protrudes from the bottom surface of the dust-proof film assembly storage container on the bottom surface of the package. Multiple bottom buffers for multiple chats. = (4) The package for the remaining parts is shown in Fig. 1 to Fig. 5 in the state in which the anti-(4) film is loaded. As shown in the perspective view of Fig. 1, the pellicle is assembled in the box shape of the box body, the four sides of which are covered by the wall panel 13, and the top surface is covered by the 2 201238864 41362pif body 20. The cover 2 is passed through the solid box. The part of the siding 13 is set to the right broken bundle and is attached to the dustproof film group in the whole package. 'With the baggage two four casters 2 3 is divided into the pellicle components. The package is passed through the == part of the bottom surface of the (four) ^ interval to ensure leakage _ = The movement of the package between the surface and the ground is stored and stored; == Guarantee == = The front of the A-A section line of the conveyance 1 such as a machine or pallet lift or a manual hydraulic truck The cross-sectional view is shown in Figure 2. The dust-proof membrane module storage container 3 that is mounted is a storage container that accommodates the dustproof component in a space protected between the tray 32 and the disk cover 31 disposed opposite thereto. In addition, 哕 ^ θ ., Bu Hai ply membrane assembly container = has four chat parts 33 protruding from the outer bottom surface thereof. The dust-proof membrane module to be accommodated has a structure in which, on the upper end surface of the pellicle frame formed of inscription, non-recording steel, polyethylene, or the like, it is air-dried by applying a solvent to adhere or pass through propylene. A transparent dust-proof film formed of a cellulose, a cellulose acetate or a fluorine-based resin which is sufficiently transparent to ordinary light, and a lower end surface of the dust-proof film module frame = The upper layer is provided with an adhesive layer formed of a polybutylene resin, a polyvinyl acetate resin, an acrylic resin or the like for adhesion to a photomask, and a release layer (separation layer) for the purpose of protection of the adhesive layer. In addition, in the state in which the pellicle is attached to the photomask, in order to eliminate the difference in air pressure between the space surrounded by the pellicle and the outside, the air pressure adjustment is performed on the portion of the pellicle 201238864 41J02pif group=frame. The small holes are also provided with a weir to prevent foreign matter from entering the air moving through the small holes. For the inner bottom surface of the pellicle assembly container 30 including the disk cover 31, the tray 32, and the leg portion 33, a rivet and/or a glue such as an epoxy adhesive is used on the upper surface of the pallet 1 The adhesive is mounted with a bottom plate 11. The four corner positions on the bottom plate 11 are fixedly provided with an L-shaped side cushion body 14 which abuts against the wall panel 13, and the wall panel 13 is formed by a weir surface covering the four sides. Further, on the bottom plate 11, the position of each of the leg portions 33 when the pellicle assembly container 30 is mounted on the inner side of the side cushion body 14 is fixed by a double-sided tape, and the concave portion 17 is provided on the top surface side. A concave bottom cushion body 18. The fixing of the bottom cushion body 18 is not limited to an adhesive tape such as a double-sided tape, and an adhesive, an adhesive or a rivet may be used as long as it can be fixed to the bottom plate 11. The wall plate 13 against which the side cushion body 14 abuts is a plate-like member formed by four side faces thereof, and is detachably fitted and fixed to each other by a side pivot formed on the periphery of the upper surface of the bottom plate u. The wall panel 13 is preferably formed to remove the desired faces one by one. Therefore, it is possible to remove the wall panel only at a necessary portion, and to take out and take out by a transporter (not shown) such as a stacker to improve workability. Further, the wall panel 13 may be fitted and fixed to each other in a groove formed in the bottom plate U or in a groove formed by the pallet 10 and the bottom plate u. The cover body 20 covering the top surface of the top surface of the pellicle assembly container 3 is formed with a top cushion body 19 having a height at which the pellicle film container 3 abuts or is close to each other. . The upper ^ 201238864 41362pif body 'and (four) dust Laisaki (four) Μ 30 disk This surface is flat. The upper buffer body 19 is in contact with or close to the dustproof = and = the upper surface of the container 3 is used to fill the gap between the cover (4) and the dust-proof inner valley. The cover 20 can also be fixed by a button. 2 is a top cross-sectional view of the hatching of FIG. 2 and a cross-sectional view of the C-C hatching of FIG. 2 is a top cross-sectional view of FIG. 4. The bottom two-sided cushion body 14 is joined by two rectangular parallelepiped side buffers 四个 on the four corners of the bottom plate 11 at the following positions, and the side buffer body 14 is fitted into the bottom cushion body 33 by 33. ^: Dust, the position of the pellicle assembly L type when the four of the leg storage containers 30 of the component storage container 30 are in the middle of the 17th. _ 彳 彳 t contact or close to the side buffer 14 4 The contact surface of the buffer body 14 is flat. The 嗲 phase, 丨^ vibration. The side is slow == buffering is caused by the impact or the degree of fitting in the horizontal direction, and the 5^ dust mites membrane module storage container 30 is properly connected. In addition, the height of the gap of 3 〇mm is 18 points, and it is set to be fine, and the foot 33 of the inner jade 30 is fitted with the first one. - a more (four) body layer is formed by 6. The dustproof film assembly is housed by dividing the four leg portions 3 protruding from the bottom surface of the (4) employee storage container in the concave portion 201238864 41362pif portion 17 of the bottom surface layer 16 The container % is stably housed in the package for the pellicle. The % of the foot is for the purpose of using the fork. The height of the transport equipment is 9〇mm~2〇〇mm, and the type of transport equipment can transport the dust-proof membrane module storage container 30 of the following size, that is, in the case of manual handling, 122〇mmxl4〇 The 防尘mm photomask has a pellicle module of at least 2 people, and the 1620 mmxl780 mm photomask pellicle module requires a minimum of 4 people, preferably 6 or more puff module storage containers 30. The bottom cushion body 18 is Supporting the pellicle assembly container 30 while absorbing and mitigating the impact and vibration in the vertical direction and the horizontal direction caused by transportation and handling. By stacking buffer layers having different hardnesses, while suppressing the thickness thereof, The cushioning property for the impact from a small impact is achieved, and a high cushioning function for buffering the bottoming phenomenon without causing a large impact is ensured. The bottom cushioning body 18 has a recessed portion 17 which is in accordance with the chat portion 33. The width abutting or abutting the side surface of the leg portion 33, and the foot portion 33 can be integrally inserted and the bottom surface of the leg portion does not contact the depth of the bottom cushion body 18. The bottom cushion body 18 has a sufficient size and thickness to absorb shock and impact during transportation and handling. The dustproof film assembly housed in the pellicle assembly container 30 is, for example, 520 mm x 800 mm. The masking pellicle module is not more than 6 kg'. However, in the case of the 1220 mmxl400 mm photomask pellicle module, there are approximately 40 kg, and in the case of the 1620 mmxl780 mm photomask pellicle assembly. About f up to 90 kg. Therefore, foot week 13 201238864 41362pif
邊的防塵薄膜組件收納容器底面34與底面緩衝體Μ接 觸，在其卿面上分散並承受防㈣驗件㈣容器％ 的負載。通常與防塵薄肋件收納容器底面34接觸的 配置硬度㈣低硬度緩衝體層16，所以提高 擊的緩衝性。 W 例如，在運輸以及搬運過程中受到小的衝擊時， 由與防塵_組件收納容器底面34接觸並承受負載的低 硬度緩衝體層16魏該衝擊’當受到大的衝料，低硬度 緩衝體層16因該衝擊被顯著壓縮，但隨著上層的壓縮，$ 層的硬度高的高硬度緩衝體層15的開始變形，而藉由高硬 度緩衝體層15吸收該衝擊。由此，底面緩衝體18，不會 因被壓縮到喪失其緩衝功能的程度而導致腳部33撞擊到 底板11的觸底現象，而能夠發揮優異的緩衝效果。 ，底面緩衝體18可以根據防塵薄膜組件收納容器3〇 的重畺、運輸設備、假定的衝擊程度等，來適當地選擇該 凹部17和整體的大小、厚度、硬度以及接觸面積。另外， 底面緩衝體18的大小，最好依照其硬度來適當地選擇。 從確保對水平方位的剪切變形性的觀點出發，底面緩 衝體18的大小最好是一邊的長度大概在2〇〇 mm〜400 mm 的範圍。 底面緩衝體18的厚度最好為150 mm〜400 mm，與防 塵薄膜組件收納容器30的接觸面積最好為30000 mm2〜150000 mm2 〇 底面緩衝體18的硬度，按照SRIS0101 (日本橡膠協 201238864 41302pif 會標準規格）規定的杜羅回跳硬度計（彈簧式硬度計）之 一的ASKER C型硬度計，最好為ASKER C20〜70。 底面缓衝體18的凹部17優選腳部33的側面與凹部 17的壁面能夠以適當的嵌合程度來接觸的寬度，或 的側面與凹部17的壁面最大具有接近2〇111〇1間隙的程产 的寬度。 & 由於防塵薄膜組件收納容器3〇的腳部33準確地嵌合 於該底面緩衝體18，所料會使防㈣·件i 入口 發生傾斜或脫落的現象，從而㈣敎地進行，° 夠在對防塵薄臈組件收納容器3G和防塵薄膜組 ^ 震動和衝擊的情況下進行運輸以及搬運。、 生 另外雖然底面緩衝體18的結構列皋屮了产^ 緩衝體層15上積層低硬度緩層 $向硬度 低硬度緩衝體層16無塵薄 L構’且該 觸的底面緩衝體18件收納容器底面34相接 層結構即可也可 緩衝體層15的社槿' 9 6上形成高硬度 18的凹邱171、、Γ 可以是腳部底面與底_二 Π接觸、而防塵薄膜組 ,面_ 面緩衝體18不接觸的結構。 底面34與底 杜此』為防塵涛膜組件用包裳箱的另一來r 二t器的腳部以及底面緩衝體附近的二，：塵薄膜組 圖（a)和圖6(b)中。 的局σΡ剖面圖示於 硬度Ϊ:二工所;Τ, ’底面緩衝體18可以是在根 層16上形成㈣度緩衝體層⑴㈣ 15 201238864 41J〇Zpif 度緩衝體層16上，而高硬度緩衝體層i5與防塵 ^收納谷态底面34不接觸的結構。該結構由於用底 的腳邛底面來承受防塵薄膜組件收納容器3〇的負 拔’所?將下層的低硬度緩衝體層16配置得大而厚。在這 丄=態的情況下，在初期狀態下低硬度緩衝體層16有一 义的入。一旦嗳到大的衝擊，下層的低硬度緩衝體 :進^步加大陷入，當陷入到某一程度時，防塵薄膜組 件收納容器底面34接觸到高硬度緩衝體層15，變成以大 $面積來承文負載，所以產生大的反推力。其結果即使 X到大的衝擊’底面緩衝體18也不會出現觸底現象，能夠 獲得與圖5所示形態同樣的緩衝効果。 另外，如圖ό (b)所示的那樣，底面緩衝體18也可 以是由高硬度緩衝體層15挾持低硬度緩衝體層 16所形成 的二層結構。在這樣的形態的情況下，由於低硬度緩衝體 ，16的厚度較薄，所以在低負載時的緩衝性比圖5所示形 態要遜色一些’但位於頂面的高硬度緩衝體層15的緩衝體 具有硬度’在裝載防塵薄膜組件收納容器3〇之際易於調整 位置等，具有操作上的優點。這些緩衝體層的硬度可以三 層都不相同。並且還可以是三層以上的多層化的形態。 這些底面緩衝體18的凹部π的深度，既可以是腳部 33此夠全部插入的深度，也可以是腳部的一部分插入 的深度。 這些底面緩衝體18可以根據其硬度、層的順序和接 觸面積，獲得各種各樣的緩衝特性，所以優選在綜合考慮 16 201238864 41362pif 二使用的防塵薄膜組件收納容器3〇的重量、運輸設備、假 ^的衝擊程度的基礎上，通過適當選擇來使用最適宜的組 合形式。特別是，優選上層緩衝體的硬度低於下層缓衝體 的硬度。 〜像這樣的對衝擊和震動進行緩衝的底面緩衝體i 8、側 面，衝體14、以及上面緩衝體19的材料，是具有合適緩 =月匕力的材料，例如可以列舉：聚胺自旨發泡材料、聚乙稀 I泡體’乙烯·醋酸乙烯共聚物發泡體，伸乙基_伸丙基_ 一烯-亞甲基橡膠發泡體等。 用於=塵薄膜組件用包褒箱丨的托板ig、底板n、 二，13、盍體2。’是由具有充分強度的材料來形成的。具 =來講’其材料可以列舉：塑膠硬紙板、強化硬紙板、紹 板、鋁製蜂窩板等。 敕-，為防塵薄膜組件用包I箱1的腳輪23，還可以是調 或其他的腳部等的塊狀的物品。 以下對本發明的實❹!加以詳細說明，但本發明的 範圍並不局限於這些實施例。 (實施例） 首先製作出了如圖]路-Μ 1。势作出的包mi L的防塵薄膜組件用包裝箱 的尸相1的外部尺寸為2250 _<2_ mmx 鬲850 mm (包含腳輪部分）。 Λ托板1〇形成為銘合金方管的焊接結構，在其四個角 23。壁板13採用厚度—的塑膠硬 板製作角°卩絲了1呂合金擠壓件，脑合金擠壓件 17 201238864 41J62pif 設為可相互組合而連接的結構。 托板10的上表面採用鉚釘以及環氧樹脂膠黏劑安裝 有厚度15mm的塑膠硬紙板制的底板11，其外周部與壁板 13嵌合。底板11的上表面上，在其所定的位置用雙面膠 帶固定了底面緩衝體18。該底面緩衝體18的結構形成為 如圖5所示的剖面結構，即設置有凹部17，該凹部17與 #載於其中的防塵薄膜組件收納容器30的腳部33恰當嵌 合。再有，該底面緩衝體18由聚胺酯發泡體（普利司通公 司生產，商品名：愛巴賴特(EVERLIGHT))製作，其大 小為250 mmx300 mmx高250mm。並且，低硬度緩衝體層 16使用咼度i5〇mm、表觀密度25 kg/m3的材料，高硬度 緩衝體層15使用高度l〇〇mm、表觀密度35 kg/m3 料。 裝載在s亥底面緩衝體18上的防塵薄膜組件收納容写 30的俯視圖示於圖7(a)中，其D —D線剖面圖示^^圖°7 (b)中。防塵薄膜組件收納容器3〇是用於收納162〇mm xn80mm掩膜用防塵薄膜組件的收納容器，由從收納了防 塵薄膜組件70的上方能夠透視的丙烯酸樹脂製盤蓋31、 鋁合金製托盤32、不銹鋼製腳部33構成，其外部尺寸為 1940 mmx 1700 mmx高！90mm的本體底部上安裝有高卢為 的腳部33，總重量為9〇kg。在托盤％的上^面 上安裝了 SUS3〇4»的框架保持銷75以及支持該框架保持 銷75的ABS樹脂製的銷座74。框架保持銷75被嵌合保 持在銷座74的孔（未圖示）中，形成為沿其軸向可抽插的 18 201238864 41362pif :構。被收納在防塵薄膜組件收納容器3〇内的防塵薄膜組 I 7〇，例如為外部尺寸P48 mmxl526mm、高8mm的製 II Λ防塵薄膜組件框架71的上表面上通過防塵薄膜膠黏 未圖示）黏接著防塵薄膜7 2，在防塵薄膜組件框架7i =表面上设置有掩膜黏貼層73以及在防塵薄膜組件使 用時從該黏貼層剝離的分離層（未圖示）。在該防塵薄膜 ^件框架71的四個外側面角部附近，設置有㈣5匪的 非貫通的圓孔（未圖示），藉由插入框架保持銷75的前端， 而進行嵌合’而成為托盤32上的防塵薄膜組件7Q固定不 動的結構。 將該防塵薄膜組件收納容器3〇sclassl〇的無塵室内 用界面活性劑和純淨水進行清洗，風乾至完全乾燥。之後， 在暗至内用40萬勒克司的聚光燈對盤蓋3卜托盤32的内 側仔細地進行異物檢查’將通過目測能夠確認的清洗殘留 的異物用黏接膠帶黏掉，清潔成完全無異物的狀態。另外， 此時目測確認的盤蓋3卜托盤32上的異物大概是1〇 μιη 以上大小的異物。 接著，在異物檢查後將盤蓋31小心地蓋到托盤32 上，嵌合部用黏接膠帶（未圖示）進行無間隙密封。並且， 將其收納在防靜電聚乙烯袋（未圖示）中，經熱封加以密 封。 在防塵薄膜組件收納容器3〇和壁板丨3的間隙内，配 置有由聚胺Sa發泡體形成的側面緩衝體μ。蓋體2〇是對 厚度9mm的塑膠硬紙板用鋁合金製造的角件進行加固製 19 201238864 41362pif 造而成，形成為能夠覆蓋住壁板13的外側 J 了聚胺酯發泡體製的上面緩衝體19。:著體== 後^«胺樹脂製的固定帶21對其整體力^f 之:間在:=f高崎市至福 r:'r器30的防塵薄膜組件用=== 車輛的裝卸能夠利用堆高機進行，可， 往返運輸後，對防塵薄膜組件用 ，塵薄膜組件收納容器30搬入到所述無塵室進二 通過與所迷完全相_步驟在暗室㈣錄3卜托盤 的内側所附著的異物進行了再確認。 瓜 其結果’通過目測，在盤蓋31的内側僅確認到了 ！ 個異物’在托盤32的内側確認到了 4個異物，而且用吹風 =能夠：易地全部除去。再者，往返運輸是用未收納防 塵4膜組件7G的防塵相組件收納容器％進行的，但 便是==㈣膜組件川其結果也相同。 v按照圖1所不的外觀，製作出了内部剖面如圖8所示 形態的包裝箱80。其外觀、寸法與實施例的防塵薄膜組件 2裝箱1完全相同，但在内部所使㈣底面緩衝體的結 疋有差異的。裝載的防塵薄膜組件收納容器3〇使用了與 20 201238864 41362pif 實施例完全相同的收納容器。 底面緩衝體81使用聚胺醋發泡體（普利司通公司生 f心=名寺(EVERLIGHT)，表觀密度 ^ : °卩尺寸為14㈨mmxl500mmx高（最頂部） 处，在與防塵薄膜組件收納容器30的接觸部 位置’實施了如圖8的局部放大圖所示的金字塔形的深度 約30mm的凹凸加工。除了該底面緩衝體81以外其他 部件採用了與所述實施例完全相同的結構。 ;、對-玄包#箱80進行了與實施例完全相同步驟的運輸 戈驗用Γ]樣的&查方法對防塵薄膜組件收納容器内部的 /、物、a加進行了確5忍。其結果，在盤蓋Μ的内側確認到了 12個異物，在粍盤32的内側確認到了 34個異物。異物中 的^多數能夠用吹風機除去，但是其中也有超過50 μιη的 比較大的異物，作為防塵賴組件的運輸方法屬於難以使 用的等級。 產業上的可利用性 本發明的防塵薄膜組件用包裝箱可以在製造半導體 兀件、印刷電路板或液晶顯示器等時作為防塵使用，能夠 用於保管及/或運輸收納有在製造光刻用防塵薄膜組件， 特別是在製造液晶時所使用的大型防塵薄膜組件的容器。 【圖式簡單說明】 圖1為適用於本發明的防塵薄膜組件用包裝箱的立體 圖。 圖2為適用於本發明的的防塵薄膜組件用包裝箱的a 21 201238864 41362pif —A線正面剖面圖。 圖3為適用於本發明的防塵薄膜組件用包裝箱的B — B線俯視剖面圖。 圖4為適用於本發明的防塵薄膜組件用包裝箱的C — C線俯視剖面圖。 圖5為適用於本發明的防塵薄膜組件用包裝箱在底面 緩衝體與防塵薄膜組件收納容器的腳部嵌合前後的底面緩 衝體附近的局部剖面圖。 圖6 (a)和圖6 (b)分別為適用於本發明的另一防 塵薄膜組件用包裝箱中的防塵薄膜組件收納容器的腳部以 及底面緩衝體附近的局部剖面圖。 圖7 (a)為裝載於適用於本發明的防塵薄膜組件用包 裝箱中的防塵薄膜組件收納容器的俯視圖。 圖7 ( b )為沿圖7 ( a )的D — D線剖面圖。 圖8為先有技術的防塵薄膜組件用包裝箱的正面剖面 圖。 【主要元件符號說明】 I :防塵薄膜組件用包裝箱 10 :托板 II :底板 12 :邊框 13 :壁板 14 :側面緩衝體 15 :高硬度緩衝體層 22 201238864 41362pif 16 :低硬度緩衝體層 17 :凹部 18 :底面緩衝體 19 :上面緩衝體 20 :蓋體 21 :固定帶 22 :把手 23 :腳輪 30 :防塵薄膜組件收納容器 31 :盤蓋 32 :托盤 33 :腳部 34 :防塵薄膜組件收納容器底面 70 :防塵薄膜組件 71 :防塵薄膜組件框架 72 :防塵薄膜 73 :掩膜黏貼層 74 :銷座 75 :框架保持銷 80 :包裝箱 81 :底面緩衝體 A —A、B —B、C —C、D —D :剖面線 23The bottom surface 34 of the side pellicle assembly container is in contact with the bottom cushion body ,, and is dispersed on the upper surface thereof to withstand the load of the (4) inspection piece (4) container. Usually, the hardness (four) of the low-hardness buffer layer 16 is placed in contact with the bottom surface 34 of the dust-proof rib member storage container, so that the cushioning property of the impact is improved. W, for example, when subjected to a small impact during transportation and handling, the low-hardness buffer layer 16 that is in contact with the dust-proof assembly container bottom surface 34 and is subjected to load is subjected to the impact 'when subjected to a large punch, the low-hardness buffer layer 16 Since the impact is significantly compressed, the high hardness buffer layer 15 having a high hardness of the layer is initially deformed as the upper layer is compressed, and the impact is absorbed by the high hardness buffer layer 15. Thereby, the bottom cushion body 18 does not suffer from the loss of the cushioning function, and the leg portion 33 hits the bottoming of the bottom plate 11, thereby exhibiting an excellent cushioning effect. The bottom cushion body 18 can appropriately select the size, thickness, hardness, and contact area of the concave portion 17 and the entire body in accordance with the weight of the pellicle assembly container 3, the transportation equipment, the assumed degree of impact, and the like. Further, the size of the bottom cushion body 18 is preferably appropriately selected in accordance with the hardness thereof. From the viewpoint of ensuring shear deformation to the horizontal orientation, the size of the bottom buffer 18 is preferably such that the length of one side is approximately in the range of 2 〇〇 mm to 400 mm. The thickness of the bottom cushion body 18 is preferably 150 mm to 400 mm, and the contact area with the pellicle container storage container 30 is preferably 30,000 mm 2 to 150,000 mm 2 . The hardness of the bottom cushion body 18 is in accordance with SRIS0101 (Japan Rubber Association 201238864 41302pif meeting) The ASKER C hardness tester, one of the Douro rebound hardness testers (spring type hardness testers) specified in the standard specification, is preferably ASKER C20 to 70. The concave portion 17 of the bottom cushion body 18 is preferably a width in which the side surface of the leg portion 33 and the wall surface of the concave portion 17 can be contacted with an appropriate fitting degree, or the side surface and the wall surface of the concave portion 17 have a maximum gap of approximately 2〇111〇1. The width of the production. & Since the leg portion 33 of the pellicle assembly container 3 is accurately fitted to the bottom cushion body 18, it is expected that the entrance of the (4) member i may be inclined or detached, and (4) squatting, ° Transportation and transportation are carried out in the case of vibration and impact of the dustproof thin-film assembly storage container 3G and the pellicle. In addition, although the structure of the bottom buffer body 18 is arranged, the low-hardness layer of the buffer layer 15 is deposited on the low-hardness buffer layer 16 and the bottom cushion body of the touch is 18 pieces. The bottom surface 34 may be connected to the layer structure. The buffer layer 15 may also form a high hardness 18 concave 171 on the body layer 9, Γ may be the bottom surface of the foot and the bottom Π Π, and the pellicle group, the surface _ The structure in which the surface buffer 18 does not contact. The bottom surface 34 and the bottom surface are the other two parts of the r-t device of the dust-proof membrane module and the vicinity of the bottom buffer body: the dust film group (a) and FIG. 6(b) . The σΡ section is shown in the hardness Ϊ: 二工所; Τ, 'The bottom buffer body 18 can be formed on the root layer 16 (four) degree buffer layer (1) (four) 15 201238864 41J 〇 Zpif degree buffer layer 16, and high hardness buffer layer The structure of the i5 and the dustproof ^ storage valley bottom surface 34 is not in contact. This structure is configured to receive the negative pull-down of the pellicle assembly container 3 by the bottom surface of the bottom of the foot, and to arrange the lower-layer low-hardness buffer layer 16 to be large and thick. In the case of this 丄 = state, the low-hardness buffer layer 16 has an inductive entry in the initial state. Once the large impact is reached, the lower-layer low-hardness buffer body is stepped up, and when it is caught to a certain extent, the bottom surface 34 of the pellicle assembly container contacts the high-hardness buffer layer 15 and becomes a large $ area. The load is loaded, so a large thrust is generated. As a result, even if the X is large, the impact of the bottom cushion body 18 does not occur, and the same buffering effect as that shown in Fig. 5 can be obtained. Further, as shown in Fig. 2(b), the bottom cushion body 18 may have a two-layer structure in which the low-hardness buffer layer 16 is held by the high-hardness buffer layer 15. In the case of such a form, since the thickness of the low-hardness buffer body 16 is thin, the cushioning property at a low load is inferior to that of the form shown in Fig. 5, but the buffer of the high-hardness buffer layer 15 located on the top surface is buffered. The hardness of the body is easy to adjust the position when the pellicle container storage container 3 is loaded, and has an operational advantage. The hardness of these buffer layers can vary from three layers. Further, it may be a multilayered form of three or more layers. The depth of the concave portion π of the bottom cushion body 18 may be a depth at which the leg portion 33 is fully inserted, or a depth at which a part of the leg portion is inserted. These bottom cushioning bodies 18 can obtain various cushioning characteristics depending on the hardness, the order of the layers, and the contact area. Therefore, it is preferable to consider the weight, transportation equipment, and dummy of the pellicle assembly container 3 used in consideration of 16 201238864 41362pif. Based on the degree of impact, the most appropriate combination is used by appropriate selection. In particular, it is preferred that the hardness of the upper buffer is lower than the hardness of the lower buffer. The material of the bottom cushion body i 8 , the side surface, the punch body 14 , and the upper cushion body 19 that buffers shock and vibration as described above is a material having a suitable retarding force, and for example, polyamine is used. A foamed material, a polyethylene I foamed body, an ethylene-vinyl acetate copolymer foam, an ethyl propylene group, a propylene-methylene rubber foam, and the like. The pallet ig, the bottom plate n, the second, the third, the third body 2 are used for the packing box of the dust film assembly. ' is formed from a material with sufficient strength. With = for the material can be listed: plastic cardboard, reinforced cardboard, steel, aluminum honeycomb panels.敕-, which is the caster 23 of the bag 1 of the pellicle for the pellicle, may be a block-shaped article such as a tune or other leg. The details of the present invention are described in detail below, but the scope of the present invention is not limited to the embodiments. (Embodiment) First, the road - Μ 1 is created as shown in the figure. The outer dimensions of the corpse phase 1 of the package for the pliers of the package of mi L are 2250 _<2_ mmx 鬲850 mm (including the caster portion). The Λ pallet 1〇 is formed as a welded structure of the square alloy square tube at its four corners 23. The wall panel 13 is made of a thickness of a plastic hard plate. The ruthenium has a 1 Lu alloy extrusion, and the brain alloy extrusion 17 201238864 41J62pif is a structure that can be combined with each other. The upper surface of the pallet 10 is attached with a rivet and an epoxy resin adhesive to a bottom plate 11 made of a plastic cardboard having a thickness of 15 mm, and an outer peripheral portion thereof is fitted to the wall plate 13. The bottom surface cushion body 18 is fixed to the upper surface of the bottom plate 11 by a double-sided tape at a predetermined position. The bottom cushion body 18 is formed in a cross-sectional structure as shown in Fig. 5, that is, a recessed portion 17 is provided which is properly fitted to the leg portion 33 of the pellicle assembly container 30 in which it is placed. Further, the bottom cushion body 18 is made of a polyurethane foam (manufactured by Bridgestone, trade name: EVERLIGHT) and has a size of 250 mm x 300 mm x 250 mm. Further, the low-hardness buffer layer 16 is made of a material having a twist of i5 mm and an apparent density of 25 kg/m3, and the high-hardness buffer layer 15 is made of a material having a height of 10 mm and an apparent density of 35 kg/m3. The plan view of the pellicle film accommodating container 30 mounted on the sigma bottom buffer body 18 is shown in Fig. 7(a), and its D-D line cross-sectional view is shown in Fig. 7(b). The pellicle container storage container 3 is a storage container for accommodating a 167 mm x n 80 mm mask pellicle assembly, and is made of an acrylic resin disk cover 31 and an aluminum alloy tray 32 that can be seen from above the dust film assembly 70. The stainless steel leg 33 is formed with an outer dimension of 1940 mm x 1700 mm x high! A 90-foot foot 33 is mounted on the bottom of the body, and the total weight is 9 〇kg. A frame holding pin 75 of SUS3〇4» and a pin holder 74 made of ABS resin supporting the frame holding pin 75 are attached to the upper surface of the tray. The frame holding pin 75 is fitted and held in a hole (not shown) of the pin holder 74, and is formed as a detachable 18 201238864 41362pif structure. The pellicle group I 7 that is housed in the pellicle container storage container 3 is, for example, an outer surface of PII mm×l 526 mm and a height of 8 mm, and the upper surface of the II Λ pellicle frame 71 is adhered by a pellicle film (not shown) The pellicle film 7 is adhered, and a mask adhesive layer 73 and a separation layer (not shown) peeled off from the adhesive layer when the pellicle is used are provided on the surface of the pellicle frame 7i. In the vicinity of the four outer side corner portions of the dust-proof film frame 71, a non-penetrating circular hole (not shown) of (4) 5 turns is provided, and the front end of the frame holding pin 75 is inserted into the frame to be fitted. The pellicle assembly 7Q on the tray 32 is fixed in a fixed structure. The dust-proof membrane module storage container 3〇sclassl〇 was cleaned in a clean room with a surfactant and purified water, and air-dried to completely dry. After that, the inside of the tray cover 3 tray 32 is carefully inspected with a spotlight of 400,000 lux in the dark. 'The foreign matter to be cleaned by visual inspection can be adhered by the adhesive tape, and cleaned to be completely foreign-free. status. Further, at this time, the foreign matter on the tray cover 32 which is visually confirmed is approximately 1 〇 μηη or more. Next, after the foreign matter inspection, the disk cover 31 is carefully placed on the tray 32, and the fitting portion is sealed without gaps by an adhesive tape (not shown). Further, it was placed in an antistatic polyethylene bag (not shown) and sealed by heat sealing. A side cushion body μ formed of a polyamine Sa foam is disposed in a gap between the pellicle assembly container 3 and the wall panel 3. The lid body 2 is made of a corner piece made of an aluminum alloy having a thickness of 9 mm and is made of an aluminum alloy 19 201238864 41362pif, and is formed to cover the outer side of the wall panel 13 and has an upper cushion body 19 of a polyurethane foaming system. . :========================================================================================================= The stacker is carried out, and after the round-trip transportation, for the dust-proof film assembly, the dust film assembly storage container 30 is carried into the clean room, and the inside of the tray is placed in the dark room (4). The attached foreign matter was reconfirmed. The result of the melon was only confirmed by the visual inspection on the inside of the disk cover 31! The foreign matter 'confirmed four foreign objects on the inner side of the tray 32, and was able to be completely removed by blowing. Further, the round-trip transportation was carried out by using the dust-proof phase component storage container % in which the dust-proof 4 membrane module 7G was not housed, but the result was the same in the == (four) membrane module. v According to the appearance of Fig. 1, a package 80 having an internal cross section as shown in Fig. 8 was produced. The appearance and the size of the method are the same as those of the pellicle film assembly 2 of the embodiment, but the inside of the (4) bottom cushion body is different. The loaded pellicle container storage container 3 uses the same storage container as the 20 201238864 41362pif embodiment. The bottom cushion body 81 is made of polyurethane foam (Princestone company f heart = EVERLIGHT), apparent density ^: °卩 size is 14 (nine) mmxl500mmx high (topmost), and is housed in the dustproof membrane module The contact portion position ' of the container 30 is subjected to a concavo-convex process having a pyramidal depth of about 30 mm as shown in a partially enlarged view of Fig. 8. The other components except the bottom cushion body 81 have the same configuration as that of the above embodiment. In the case of the box 80, the same method as the embodiment was carried out, and the method of checking the inside of the pellicle container storage container was confirmed. As a result, 12 foreign matters were confirmed inside the disk cover, and 34 foreign objects were confirmed inside the disk 32. Most of the foreign matter can be removed by a hair dryer, but there are also relatively large foreign matters exceeding 50 μm. The method of transporting the dust-proof component is a difficult-to-use grade. Industrial Applicability The package for the pellicle film assembly of the present invention can be used in the manufacture of a semiconductor component, a printed circuit board or a liquid crystal display. In the case of dustproof use, it is possible to store and/or transport a container containing a large-sized pellicle for use in manufacturing a pellicle for lithography, particularly in the production of a liquid crystal. [Simplified Schematic] FIG. 1 is applicable. Fig. 2 is a front cross-sectional view of a 21 201238864 41362pif-A line of a packaging for a pellicle for use in the present invention. Fig. 3 is a pellicle film suitable for use in the present invention. Fig. 4 is a plan cross-sectional view taken along line C-C of the package for a pellicle for use in the present invention. Fig. 5 is a package for a pellicle assembly suitable for use in the present invention. A partial cross-sectional view of the vicinity of the bottom cushion body before and after the bottom cushion body and the leg portion of the pellicle container storage container are fitted. Fig. 6 (a) and Fig. 6 (b) are respectively used for another pellicle film assembly of the present invention. A partial cross-sectional view of the vicinity of the leg portion of the pellicle assembly container and the bottom cushion body in the package. Fig. 7 (a) is for mounting on a pellicle for use in the present invention. Fig. 7 (b) is a cross-sectional view taken along line D - D of Fig. 7 (a). Fig. 8 is a front sectional view showing a package for a pellicle according to the prior art. [Description of main component symbols] I: Package for dustproof film assembly 10: Pallet II: Base plate 12: Frame 13: Wall 14: Side cushion 15: High hardness buffer layer 22 201238864 41362pif 16 : Low hardness buffer layer 17 : Concave portion 18: bottom cushion body 19: upper cushion body 20: cover body 21: fixing belt 22: handle 23: caster 30: pellicle assembly container 31: disk cover 32: tray 33: leg portion 34: pellicle assembly container Bottom surface 70: pellicle assembly 71: pellicle frame 72: pellicle 73: mask adhesive layer 74: pin holder 75: frame holding pin 80: package 81: bottom cushion body A - A, B - B, C - C, D — D : section line 23