JP7245893B2 - Cushioning material for pellicle and package - Google Patents

Description

The present invention relates to a pellicle cushioning material and a package.

2. Description of the Related Art Conventionally, a predetermined package has been used for storing, storing, and transporting a pellicle.
2. Description of the Related Art In the lithography process during the manufacture of circuit patterns for semiconductor devices, liquid crystal displays, etc., a method of attaching a dust-proof film, generally called a pellicle, is used to prevent foreign matter from entering a substrate for exposure such as a photomask or reticle.
This pellicle has a transparent polymer film made of nitrocellulose, a cellulose derivative, or a fluorine polymer with a thickness of 10 μm or less on the upper edge surface of a frame having a thickness of about several millimeters and having a shape that matches the shape of the substrate for exposure. A film (hereinafter referred to as “pellicle film”) is stretched and adhered, and an adhesive is applied to the lower edge surface of the frame. It has a configuration in which a protective film called is adhered. Also, recently, a linerless type pellicle that does not have a liner is known.
The adhesive is used to fix the pellicle to the substrate for exposure, and is required to have flatness precision on the order of microns so that fine cavities do not occur when the pellicle is fixed to the substrate for exposure. be done. Also, the liner protects the adhesive surface of the adhesive in order to maintain the adhesive strength of the adhesive until the adhesive is ready for use.

As for the pellicle as described above, the pellicle manufacturer that manufactures the pellicle and the mask manufacturer that attaches the pellicle to the photomask are often geographically separated from each other. transportation work to the manufacturer is essential. For this reason, when transporting pellicles, in order to prevent foreign matter from adhering to the pellicle film and prevent damage to the pellicle, each pellicle is placed in a dedicated pellicle case consisting of a tray and a lid. Generally, the pellicle case is stored, a plurality of pellicle cases are stacked, and then packed in a packing box having a predetermined cushioning material such as an air cushion (see, for example, Patent Document 1).
In particular, as a cushioning material used when packing a pellicle case for a large pellicle in a packing box, there has been proposed a cushioning material with a defined contact area with the pellicle case to increase the cushioning capacity (see, for example, Patent Document 2, 3).

JP-A-10-305814 JP 2008-100733 A JP-A-2010-64780

As described above, in the prior art, especially large pellicle cases are large in area and heavy in weight; Since they are not supposed to be used, they are looking for new cushioning materials with high cushioning capacity.
Further, conventionally, efforts have been made to obtain a cushioning material that has a high function of suppressing relatively large vibrations caused by rough roads or strong impacts during transportation, etc., during transportation.

However, in the conventional technology, when the cushioning material is repeatedly used, not only large vibrations but also relatively small vibrations are applied to the pellicle case, generating foreign matter, which may adhere to the object to be transported. However, there is a problem that sufficient consideration has not been given to this matter.

Therefore, in the present invention, in view of the above-mentioned problems of the prior art, we have studied the cushioning material to be arranged in the packing box that houses the pellicle case containing the pellicle. To provide a cushioning material for a pellicle which does not adhere foreign matter even when transported after long-term storage and can effectively reduce adhesion of foreign matter even after repeated use.

As a result of intensive studies to solve the above-mentioned problems, the inventors of the present invention discovered that when a specific vibration frequency is applied to the pellicle and the pellicle case, stress greater than that of externally applied vibration is generated.
That is, by controlling the difference in acceleration between the pellicle case and the pellicle at a predetermined vibration frequency when a predetermined pressure is applied for a predetermined period of time to a predetermined value or less, it is possible to prevent the liner from falling off and the friction between the liner and the tray. The inventors have also found that it is possible to effectively prevent the generation and adhesion of foreign matter due to friction between the pellicle frame and the tray, and have completed the present invention.
That is, the present invention is as follows.

[1]
A method for preventing the generation of foreign matter using a packing body in which a pellicle case containing a pellicle is horizontally held in a packing box by a pellicle cushioning material, comprising:
The pellicle cushioning material is dispersedly arranged on the inner bottom surface of the packaging box,
For pellicles in which one or more of the pellicle cases accommodated in the vertical direction have a total top surface area corresponding to 2.0% or more and less than 30.0% of the bottom area of the pellicle case positioned at the bottom in the packing box. It is supported by the upper surface of the cushioning material,
The pellicle has a pellicle membrane with an area of 1000 cm ² or more and 50000 cm ² or less and a frame, and a protective film is adhered to the lower edge surface of the frame via an adhesive,
The pellicle cushioning material has a design in which the adhesive and the protective film are provided with an adhesive tape as a gap between the pellicle and the pellicle case, and when the pellicle is fixed to the tray of the pellicle case, , the total top surface area is filled with the mass including the pellicle and the pellicle case containing the pellicle, and the pellicle cushioning material is pressurized at 0.06 kg/cm ² for 90 days. , the acceleration A of the pellicle and the acceleration B of the pellicle case located at the bottom at a vibration frequency of 10.5 Hz shall satisfy the following formula,
((AB)/A) x 100 (%) ≤ 25 (%)
the pellicle cushioning material includes at least a double structure having different impact resilience,
The dispersedly arranged pellicle cushioning materials have independent vertical upper surfaces,
A method for preventing generation of foreign matter using a package.
[2]
A method for preventing generation of foreign matter using the package according to [1], wherein at least one structure of the pellicle cushioning material has a rebound resilience of 60% or less.
[3]
The structure whose impact resilience is 60% or less,
A method for preventing generation of foreign matter using the package according to [2] above, which is a structure selected from the group consisting of anti-vibration rubber systems, metal spring systems, and air spring systems.
[4]
A method for preventing generation of foreign matter using the package according to the above [2] or [3], wherein the structure having an impact resilience of 60% or less is in contact with the bottom surface of the packaging box.
[5]
A structure other than the structure having an impact resilience of 60% or less,
A method for preventing the generation of foreign matter using the package according to any one of [2] to [4], which is foamed polyethylene or styrofoam.
[6]
Using the package according to any one of [2] to [5], wherein the surface in contact with the bottom surface of the package box is in contact with the structure having rebound resilience of 60% or less, preventing the generation of foreign matter. Prevention method .
[7]
The at least double structure includes a lower structure and an upper structure having different rebound resilience in the vertical direction, using the package according to any one of [1] to [6], preventing foreign matter from occurring. Prevention method .
[8]
A method for preventing generation of foreign matter using the package according to [7], wherein the lower structure and the upper structure are bonded together with an adhesive.

According to the present invention, even when the pellicle case is transported using the pellicle cushioning material after long-term storage, or even when the pellicle case is repeatedly transported using the pellicle cushioning material, adhesion of foreign matter to the pellicle can be effectively prevented. It is possible to provide a pellicle cushioning material that can be suppressed to a minimum and can be used repeatedly.

FIG. 4 shows a schematic cross-sectional view of a state in which a pellicle case containing a pellicle is housed in a packing box. (a) to (d) are schematic plan views of the inner bottom portion of the packing box, showing examples of the arrangement of the pellicle cushioning material. 1 shows a schematic diagram of a vibration frequency and acceleration measurement test; FIG. Acceleration measurement positions of the pellicle and pellicle case are shown.

Hereinafter, modes for carrying out the present invention (hereinafter simply referred to as "present embodiments") will be described in detail with reference to the drawings as necessary. It is not limited. The present invention can be carried out with various modifications within the scope of its gist.

[Buffer material for pellicle]
The pellicle cushioning material of this embodiment is
A pellicle cushioning material that is placed in a packing box containing a pellicle case in which a pellicle is placed, with the pellicle case placed thereon,
The acceleration A of the pellicle and the acceleration B of the pellicle case at a vibration frequency of 10.5 Hz after pressurizing the pellicle cushioning material at 0.06 kg/cm ² for 90 days are:
This cushioning material for a pellicle satisfies the relationship of ((A−B)/A)×100(%)≦25(%).

The pellicle cushioning material of this embodiment will be described below with reference to the drawings.
FIG. 1 is a schematic cross-sectional view showing an example of a package containing a large pellicle.
2(a) to 2(d) are plan views of the inner bottom surface of the packing box showing examples of the arrangement of the pellicle cushioning material.
Here, a large pellicle refers to a pellicle having a pellicle film area of 1000 cm ² or more and 50000 cm ^{2 or} less.

As shown in FIG. 1, the package A includes a pellicle case 4 containing a pellicle 9 having a pellicle film adhered to one end surface of a pellicle frame 10, and a pellicle case 4 including a lid 4a and a tray 4b. , and the pellicle cushioning material 1 is housed in the packing box 6 .
Here, the pellicle case 4 to be housed in the packing box 6 may be singular or plural, but in the case of a large pellicle case, up to three pellicle cases can be stored in one packing box 6 due to the size and weight. It is preferable to store it in
In FIG. 1, a lower holding member 2 and an upper holding member 3 form a two-stage structure in which a pellicle case 4 is accommodated, and the package is held in a packaging box 6 while being held by a top plate 5. A is stacked in two stages, placed on a pallet 8, and held by a top plate 7 for transportation.

It is preferable that the pellicle cushioning material 1 has a double or more structure. In FIG. 1, as an example, a double structure consisting of an upper structure 1b and a lower structure 1a is shown. is not limited to such a structure, and may be a single layer structure or a structure of three or more layers.

The pellicle cushioning material of this embodiment has the configuration shown in ^FIG . and the acceleration B of ((AB)/A)×100(%)≦25(%). It is preferably 20% or less, more preferably 15% or less.
In the past, we focused only on large vibrations during transportation and storage to increase the cushioning capacity of cushioning materials. When the force is applied, the pellicle moves violently, generating stress greater than the externally applied vibration.
In particular, when transported after long-term use, when certain vibration frequencies are applied, the pellicle moves more violently than a new pellicle. Friction occurs, and foreign matter is generated due to falling off of the liner, friction between the liner and the tray, and friction between the frame of the pellicle and the tray.
In this embodiment, the acceleration A of the pellicle and the acceleration B of the pellicle case are specified so as to satisfy the relationship of the above formula, and even if some stress is applied, the occurrence of friction between the pellicle and the pellicle case is prevented. It is possible to effectively suppress the occurrence of the above-described foreign matter and the like.

As described above, in order to control the acceleration A of the pellicle and the acceleration B of the pellicle case to ((AB)/A)×100(%)≦25(%), the compression ratio for the pellicle case is The pellicle should be designed to use a cushioning material with a small thickness, a cushioning material that deteriorates less over time, a more flexible material for the pellicle case, and a gap between the pellicle and the pellicle case. It is effective to

As shown in FIG. 1, the pellicle cushioning material 1 of this embodiment is arranged in a packing box 6 with a pellicle case 4 placed thereon.
The pellicle cushioning materials 1 are preferably distributed on the inner bottom surface of the packing box 6 as shown in FIGS. 2(a) to 2(d).
Here, the dispersed pellicle cushioning materials 1 are preferably independent from each other, but may be connected to each other at their lower portions as long as at least their upper surfaces are independent. When they are independent, the occupied volume of the pellicle cushioning material 1 can be reduced, and when they are connected, the arrangement of the pellicle cushioning material 1 in the packing box 6 is facilitated.

The number and shape of the pellicle cushioning materials 1 are appropriately selected so that the pellicle case 4 can be kept flat when there is no external impact. That is, along the sides of the packing box 6, a plurality of pellicle cushioning materials 1 are symmetrically arranged within a range having a total top surface area of 2.0% to 30.0% of the bottom area of the pellicle case 4. is preferred.
By arranging the pellicle cushioning material 1 in this way, it is possible to prevent the packaging box 6 from coming into direct contact with the pellicle case 4 even when a strong impact is applied to the package A particularly from below. can be avoided.
Moreover, the shape of the pellicle cushioning material 1 is preferably a shape in which the contact area with the pellicle case does not greatly change due to the load, for example, a rectangular parallelepiped.

As a specific example of the shape of the pellicle cushioning material 1 of the present embodiment and its arrangement in the packaging box 6, as shown in FIG. 2(b), rectangular parallelepiped pellicle cushioning materials are arranged at six locations on the inner bottom surface of the packing case; and, as shown in FIG. 2. As shown in FIG. 2(d), pellicle cushioning materials 1 are arranged in two parallel rows on both short sides of the inner bottom surface of the packaging box. The form to do is mentioned.

The total area of the upper surface of the pellicle cushioning material 1 that supports the pellicle case 4 should be 2.0% or more and less than 30.0% of the bottom area of the pellicle case 4 located at the bottom in the packing box 6. is preferred. Furthermore, it is more preferably 2.5% or more and less than 25.0%, and even more preferably 3.0% or more and less than 20.0%.
Further, the pellicle cushioning material 1 of the present embodiment may be in direct contact with the pellicle case 4, or a predetermined member used for fixing the pellicle case 4, such as a holding member to be described later, may be attached to the pellicle case 4. and the pellicle cushioning material 1.
Also, between the bottom surface of the packing box 6 and the pellicle cushioning material 1, a member having good adhesion to the pellicle cushioning material 1 or a member having a parallel bottom surface may be arranged.

If the total area of the top surface of the pellicle cushioning material 1 that supports the pellicle case 4 is less than 2.0% of the bottom area of the pellicle case 4 located at the bottom in the packing box 6, static Since the storage container cannot be sufficiently supported when placed, the flatness is deteriorated, and there is a risk of dust generation.
On the other hand, if it is 30.0% or more, the cushioning capacity will be deteriorated, and it will be susceptible to external impacts, which is not preferable. In addition, since the packing box 6 is generally made of a material such as cardboard, there is a problem that the packing box 6 is easily deformed by a forklift stab wound or a strong impact during transportation. Therefore, when the packing box 6 is deformed, the pellicle cushioning material 1 serves as a medium for transmitting the impact, and the impact is transmitted to the pellicle case 4, which may result in contamination, film contact, and the like.

The pellicle cushioning material 1 of the present embodiment preferably has a height of 50 to 500 mm, more preferably 80 to 400 mm, even more preferably 100 to 250 mm.
If the height of the pellicle cushioning material 1 of this embodiment is 500 mm or less, there is little wasted space. The influence of the pellicle 9 can be effectively reduced.
Therefore, it is preferable to appropriately design the height of the pellicle cushioning material 1 according to the increase in the mass of the package A.
As described above, the shape and arrangement of the pellicle cushioning material 1 other than the total top surface area are determined so as to obtain the desired cushioning effect with respect to the mass of the pellicle case 4 to be accommodated, taking into consideration the above points. Decide accordingly.

The pellicle cushioning material 1 of this embodiment preferably includes at least a double structure.
When the pellicle cushioning material 1 includes a double structure, at least one of the structures preferably has a rebound resilience of 60% or less.
More preferably, the impact resilience is 58% or less, and even more preferably 55% or less.
When the impact resilience is within the above numerical range, the effect of suppressing each vibration caused by a specific vibration frequency during transportation can be exhibited even after long-term storage and use.
Moreover, even during transportation after long-term storage, the effect of suppressing vibration can be exhibited without deterioration, which is preferable.

The structure having a rebound resilience of 60% or less is preferably, for example, a vibration-isolating rubber-based, resin foam-based, metal spring-based, or air spring-based cushioning material, and more preferably a vibration-isolating rubber sponge. and polyurethane foam. Polyurethane foam, which is particularly durable for repeated use, is more preferable.

In addition, it is preferable that the surface of the packaging box 6 that is in contact with the bottom surface is in contact with the structure having the impact resilience of 60% or less. As a result, vibration of the pellicle case 4 as a whole can be suppressed.
In addition, when the pellicle cushioning material of the present embodiment includes a double structure, the ratio of the double structure is determined from the viewpoint of the weight and area of the pellicle case and the space provided between the pellicle case and the bottom surface of the packaging box. From the viewpoint of suppressing film contact, it is preferable that the structure having the impact resilience of 60% or less is 25% or less of the entire height of the pellicle cushioning material 1 . More preferably 20% or less, still more preferably 15% or less.

It is preferable that the structure other than the structure having impact resilience of 60% or less among the double structures be made of a material capable of suppressing a strong impact. Furthermore, even when a heavy pellicle case is held during long-term storage, it is possible to suppress height displacement, which is preferable.
In addition, from the viewpoint of reducing the probability that the claws of the forklift will hit the pellicle case 4 when the bottom surface is pushed up by a forklift or the like and to reduce troubles during transportation, a gap between the pellicle case 4 and the bottom surface of the packing box 6 is provided. It is preferable to provide a space and keep a distance from the bottom surfaces of the pellicle case 4 and the packing box 6 .
Structures other than structures having impact resilience of 60% or less among double structures are not limited to the following. , corrugated cardboard, structures made of paper, etc., and from the viewpoint of appropriate rigidity and light weight, foamed polyethylene, expanded styrene, and hollow structures are particularly preferred.

[Package]
The package of the present embodiment comprises a pellicle case containing a pellicle, which is horizontally held in a packing box by the pellicle cushioning material of the present embodiment described above. , the pellicle cushioning material is distributed, and one or more of the pellicle cases occupy 2.0% or more and less than 30.0% of the bottom area of the pellicle case located at the bottom of the packing box. It has a structure supported by the upper surface of a pellicle cushioning material having a total upper surface area of .
The package A of this embodiment will be described with reference to FIG.
In the embodiment shown in FIG. 1, the package A includes a lower holding member 2 and an upper holding member 3 each holding a pellicle case 4, a top plate 5 covering the upper portion of the upper holding member 3, and the pellicle. The cushioning material 1 is housed in a packing box 6.
In the package A, a plurality of pellicle cases 4 can be stacked using the holding members 2 and 3, and it is preferable to stack the pellicle cases 4 in one or two stages.
The holding members 2 and 3 have the role of adjusting the vertical space of the pellicle case 4 and also the role of regulating the horizontal position of the pellicle case 4 . Furthermore, the package A may be firmly fastened with a plurality of binding bands (not shown).

In addition, although a plurality of packages A can be stacked and transported, one or two packages are preferable from the viewpoint of portability and stability.
When transporting the package A, it is preferable to use a packing pallet having a transportation top plate 7 above it and a pallet 8 below it. It is preferable that the transportation top plate 7, the package A, and the pallet 8 are firmly fastened with a plurality of binding bands (not shown).
Although the package A can be transported as it is, it is more preferable to have the transportation top plate 7 and the pallet 8 together. In that case, using the corner pads will make the packing pallet stronger.

The top plate 7 for transportation, the package A, and the pallet 8 (excluding the support legs) are preferably made of a material with sufficient strength, and have a plastic cardboard, paper cardboard, reinforced cardboard, multi-layer cardboard, or honeycomb structure. The material can be appropriately selected from plate-like materials, synthetic resins, synthetic resin foams, metals, and the like, but is not limited to these. In addition, the material when using the corner pad is not particularly limited, and can be selected as appropriate.

The supporting legs of the pallet 8 are preferably made of a material that is strong enough to support the weight and particularly has a high cushioning effect against vertical impacts, and is made of a foaming resin (eg, foaming polyethylene, foaming styrol, etc.). , plastic corrugated board, paper corrugated board, reinforced corrugated board, multilayer corrugated board, air cushion, liquid gel, etc., but not limited to these.
As for the shape, it is preferable that the hole penetrates in the direction in which it is easily crushed by impact, and a round shape, an elliptical shape, a triangular shape, etc. can be
Also, the support legs may be directly installed on the outer lower surface of the packing box 6 when the pallet 8 is not used.

The binding band for binding the transportation top plate 7, the package A, and the pallet 8 is generally made of polypropylene, but it is preferable to appropriately select the binding band according to the weight of each component.

The holding members 2 and 3 used in the package A will be explained.
The material of the holding members 2 and 3 may be a cushioning material such as foamed polyethylene, foamed styrol, foamed polyurethane, or the like that absorbs impact and has sufficient strength to hold the pellicle case 4 flat.
It is preferable that the holding members 2 and 3 have a structure capable of holding the pellicle case 4 flat. is preferably More preferably, the cross section is L-shaped.

In addition, the bottom holding member 2 is the upper surface of the pellicle cushioning material 1, and when the pellicle cushioning material 1 is composed of a plurality of structures, for example, an upper structure 1b and a lower structure 1a, the upper structure It is preferably placed in contact with 1b.

The material of the top plate 5 serving as the lid of the top holding member 3 will be described.
The top plate 5 is preferably made of a shock-absorbing cushioning material such as foamed polyethylene, foamed styrol, or foamed polyurethane. It is assumed that the lower surface is formed flat. Further, a predetermined soft cushioning material such as foamed urethane or an air cushion may be arranged between the top plate 5 and the pellicle case 4 to suppress the impact on the pellicle case 4 .
With such a configuration, the top surface of the package A can be effectively protected.

In the package A of the present embodiment, the pellicle case 9 is horizontally held in the packaging box 6 by the pellicle cushioning material 1 and accommodated.
The pellicle cushioning material is distributed on the inner bottom surface of the packing box 6 . For example, the arrangement forms shown in FIGS.
In addition, a pellicle cushioning material in which one or more of the pellicle cases 4 have a total top surface area corresponding to 2.0% or more and less than 30.0% of the bottom area of the pellicle case 4 positioned at the bottom of the packing box 6. It is supported by the upper surface of 1.
A static The storage container can be sufficiently supported when placed, good flatness can be obtained, and dust generation can be effectively prevented.
Moreover, by making it less than 30.0%, it is possible to exhibit excellent cushioning ability and suppress impact from the outside.

According to the package of the present embodiment, the pellicle can be effectively protected from vibration and impact during storage and transportation of the pellicle, and the pellicle can be kept clean without causing film contact or adhering foreign matter to the pellicle. It can be transported in good condition.
In addition, the volume occupied by the cushioning material can be reduced to exhibit the cushioning effect.

Hereinafter, the present embodiment will be described in more detail with reference to specific examples and comparative examples, but the present embodiment is not limited to the following examples as long as the gist thereof is not exceeded.
In addition, each physical property in Examples and Comparative Examples was measured by the following methods.

((1) Vibration frequency and acceleration measurement test)
The vibration frequency and acceleration applied to the pellicle case and pellicle were measured.
As shown in FIG. 3, the measurement was performed using one package A of FIG.
As shown in FIG. 3, a total of two pellicle cases 4 were housed in each of the upper holding member 3 and the lower holding member 2 .
A pellicle 9 having a pellicle film and a pellicle frame 10 is mounted on the lower pellicle case 4 held by the lower holding member 2, and the upper pellicle case 4 held by the upper holding member 3 has a Only the pellicle frame 10 was placed.
An accelerometer is attached to the upper pellicle case 4 at a position corresponding to the center of the short side of the pellicle as shown in FIG. B) was measured.
The acceleration (A) of the pellicle is measured by similarly attaching an accelerometer on the pellicle frame at the center of the short side of the pellicle frame 10 so that the acceleration measurement position of the pellicle case 4 is approximately the same as that of the pellicle case 4 as shown in FIG. bottom.
The pellicle case 4 was housed in a packing box, and the pellicle cushioning material 1 was arranged.
As shown in FIG. 3, the packing box 6 containing the pellicle case 4 was placed on the stage of the vibration tester, and a vibration test was performed by vibrating it with the vibration driving unit. For data processing, a transport vibration recorder (Tough Logger model TR-1000, manufactured by IMV) was used to determine vibration frequency and acceleration.
As a vibration tester, K125LS/SA18M manufactured by IMV was used.
The test conditions were an acceleration of 8 G and a vibration frequency of 0 to 200 Hz.

((2) foreign matter inspection)
A sample similar to that described above was prepared and a transportation test was conducted.
A transportation test was conducted by making a round trip from Miyazaki to Haneda.
The Miyazaki-Fukuoka round trip was transported by truck, and the Fukuoka-Haneda round trip was transported by air.

[Example 1]
As shown in FIG. 1, the pellicle 9 was placed in the pellicle case 4 .
At that time, an adhesive tape was used to fix the liner to the tray 4b.
The pellicle case 4 is stored in the packing box 6 .
As the pellicle cushioning material 1, one having double structures 1a and 1b was used.
The double structure pellicle cushioning material 1 uses a cushioning material made of polyethylene foam measuring 160 mm×50 mm and 140 mm in height as the upper structure 1b, and uses a cushioning material made of polyethylene foam measuring 160 mm×50 mm and 20 mm in height as the lower structure 1a. , a cushioning material made of polyurethane elastomer having an impact resilience of 50% was used. These upper and lower structures were attached together with an adhesive to form a pellicle cushioning material 1 .
As the pellicle case 4, the outer dimensions are 950 mm×1300 mm, and the height of the pellicle case 4 including the lid 4a is 100 mm.
The pellicle case 4 is held by holding members (made of foamed polyethylene) 2 and 3, and pellicle cushioning materials 1 are arranged at six locations on the bottom of the lower pellicle case 4 as shown in FIG. Called Body A. At this time, in order to facilitate the fixing of the pellicle cushioning material 1 to the bottom surface of the packaging box 6, a foamed polyethylene plate having an outer dimension of 1050 mm x 1400 mm and a height of 4 mm was placed on the bottom surface, and the pellicle cushioning material was placed on the plate. Material 1 was attached with an adhesive.
At this time, a pressure of 0.06 kg/cm ² was applied to the pellicle cushioning material 1 .
The packages obtained as described above were stored in a warehouse for 90 days and subjected to the above ((1) vibration frequency and acceleration test).
The vibration frequency was set to 10.5 Hz, and the acceleration (B) of the pellicle case and the acceleration (A) of the pellicle were measured.
When the acceleration difference was calculated by ((A)-(B)/(A))×100, it was 3%.
In addition, when (2) foreign matter inspection was carried out, it was confirmed that no foreign matter adhered.

[Comparative Example 1]
The upper structure 1b and the lower structure 1a of [Example 1] were made into an integrated body, and the foamed urethane having a rebound resilience of 72% was used.
Also, the arrangement of the pellicle cushioning material 1 was changed to four locations at the four corners as shown in FIG. 2(c).
Other conditions were the same as those in [Example 1], and the above evaluations (1) and (2) were carried out.
The acceleration difference in (1) was 58% when the vibration frequency was 10.5 Hz.
As a result of the foreign matter inspection (2), adhesion of foreign matter was confirmed.

The pellicle cushioning material of the present invention is used as a substrate for exposure such as photomasks and reticles used in the lithography process for manufacturing thin film transistors (TFTs) and color filters (CFs) that constitute LSIs and liquid crystal displays (LCDs). It has industrial applicability as a pellicle cushioning material used to prevent foreign matter from adhering to the pellicle.

1 Pellicle cushioning material 1a Lower structure 1b Upper structure 2 Lower holding member 3 Upper holding member 4 Pellicle case 4a Lid 4b Tray 5 Top plate 6 Packaging box 7 Top plate for transportation 8 Pallet 9 Pellicle 10 Pellicle frame A Package

Claims (8)

A method for preventing the generation of foreign matter using a packing body in which a pellicle case containing a pellicle is horizontally held in a packing box by a pellicle cushioning material, comprising:
The pellicle cushioning material is dispersedly arranged on the inner bottom surface of the packaging box,
For pellicles in which one or more of the pellicle cases accommodated in the vertical direction have a total top surface area corresponding to 2.0% or more and less than 30.0% of the bottom area of the pellicle case positioned at the bottom in the packing box. It is supported by the upper surface of the cushioning material,
The pellicle has a pellicle membrane with an area of 1000 cm ² or more and 50000 cm ² or less and a frame, and a protective film is adhered to the lower edge surface of the frame via an adhesive,
The pellicle cushioning material has a design in which the adhesive and the protective film are provided with an adhesive tape as a gap between the pellicle and the pellicle case, and when the pellicle is fixed to the tray of the pellicle case, , the total top surface area is filled with the mass including the pellicle and the pellicle case containing the pellicle, and the pellicle cushioning material is pressurized at 0.06 kg/cm ² for 90 days. , the acceleration A of the pellicle and the acceleration B of the pellicle case located at the bottom at a vibration frequency of 10.5 Hz shall satisfy the following formula,
((AB)/A) x 100 (%) ≤ 25 (%)
the pellicle cushioning material includes at least a double structure having different impact resilience,
The dispersedly arranged pellicle cushioning materials have independent vertical upper surfaces,
A method for preventing generation of foreign matter using a package. 2. The method for preventing generation of foreign matter using the package according to claim 1, wherein at least one structure of said pellicle cushioning material has a rebound resilience of 60% or less. The structure whose impact resilience is 60% or less,
3. A method for preventing generation of foreign matter using the package according to claim 2, wherein the structure is one selected from the group consisting of anti-vibration rubber systems, metal spring systems, and air spring systems. 4. A method for preventing generation of foreign matter using the package according to claim 2 or 3, wherein the structure having impact resilience of 60% or less is in contact with the bottom surface of the package. A structure other than the structure having an impact resilience of 60% or less,
A method for preventing generation of foreign matter using the package according to any one of claims 2 to 4, which is foamed polyethylene or styrofoam. The structure having a repulsion resilience of 60% or less is in contact with the surface in contact with the bottom surface of the packaging box,
A method for preventing generation of foreign matter using the package according to any one of claims 2 to 5. 7. A method for preventing generation of foreign matter using the package according to any one of claims 1 to 6, wherein the at least double structure includes a lower structure and an upper structure having different impact resilience in the vertical direction. . 8. The method for preventing generation of foreign matter using the package according to claim 7, wherein said lower structure and said upper structure are bonded together with an adhesive.

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