JP5856260B2 - Package of pellicle storage case - Google Patents

Description

  In the present invention, foreign matter adheres to an exposure base such as a photomask or a reticle used in a lithography process when manufacturing a thin film transistor (TFT), a color filter (CF), or the like constituting an LSI or a liquid crystal display (LCD). The present invention relates to a package of a pellicle storage case used for storing and transporting a pellicle storage case used to prevent this.

The present invention relates to a package used for storing, storing and transporting a pellicle. First, the pellicle to be stored will be described.
In a lithography process at the time of manufacturing a circuit pattern such as a semiconductor device or a liquid crystal display, a method of attaching a dust-proof film called a pellicle is generally used for the purpose of removing foreign substances on an exposure substrate such as a photomask or a reticle. This pellicle has a shape matching the shape of the substrate for exposure, and a transparent polymer film (hereinafter referred to as nitrocellulose, cellulose derivative or fluoropolymer) having a thickness of 10 μm or less on the upper edge surface of a frame of about several millimeters in thickness. , "Pellicle film") is spread and bonded, and an adhesive is applied to the lower edge surface of the frame, and a protective film is adhered to the adhesive with a predetermined adhesive force. .
The adhesive material is for fixing the pellicle to the exposure base, and accuracy such as micron-order flatness is required so that a fine cavity does not occur when the pellicle is fixed to the exposure base. . Further, the protective film protects the adhesive surface of the pressure-sensitive adhesive material in order to maintain the adhesive force of the pressure-sensitive adhesive material until the pressure-sensitive adhesive material is used for that purpose.

In general, such a pellicle is often geographically separated from the manufacturer that manufactures the pellicle and the manufacturer that finally attaches the pellicle to the mask. Transportation work to is essential. Therefore, in carrying the pellicle, to prevent foreign matter from adhering to the pellicle film, etc., or to prevent the pellicle from being damaged, each pellicle is stored in a dedicated pellicle case consisting of a tray and a lid, In general, a plurality of pellicle cases are stacked and then packed in a packing box containing a cushioning material such as an air cushion. (For example, refer to Patent Document 1).
Further, in the case of a small pellicle for LSI, there is also a packing form in which a plurality of pellicle storage cases are stacked and then packed in a packing box containing a cushioning material such as an air cushion. (For example, see Patent Document 1)
As a cushioning material for a large pellicle storage case, a cushioning material having a buffering capacity increased by defining a contact area with the case has been proposed. (For example, see Patent Document 2)

Japanese Patent Laid-Open No. 10-305814 Japanese Patent Laid-Open No. 2008-100733

In recent years, especially in the pellicle for manufacturing liquid crystal panels, the size of the pellicle has increased due to the increased exposure area, and it has become necessary to reduce vibration and shock during transportation and handling using a large amount of cushioning material. Yes. Therefore, the packing form is also enlarged and expensive.
In addition, since the storage case, the cushioning material, and the packaging box are in direct contact with each other, the impact of the packaging box is transmitted to the storage case through the cushioning material, resulting in rubbing, foreign matter adhering to the pellicle film, There is a risk that the accuracy such as the flatness of the mask adhesive may be lowered.
In addition to the above, when the size is increased, the amount of waste increases and the environment is not good.
SUMMARY OF THE INVENTION The present invention solves the above-described problems, and an object of the present invention is to provide a package capable of suppressing foreign matter such as dust from adhering to the pellicle stored in the pellicle storage case during transportation of the pellicle. Is to provide.

  As a result of intensive studies to solve the above-mentioned problems, the present inventors have a frame material and a stretchability in which a cushioning material for packing a storage case for storing and storing a large pellicle is bonded to the frame body. The inventors have found that the impact can be alleviated with a structure comprising a support film, and have reached the present invention.

That is, the present invention is as follows.
[1]
A packing box, and a cushioning material that protects the pellicle storage case stored in the packing box within the packing box,
The buffer material is a stretchable support film that supports the top surface or bottom surface of the pellicle storage case,
A substantially polygonal frame in plan view on which the support film is pasted,
The package of a pellicle storage case, wherein the support film is substantially fixed and pasted on at least one side of the frame body at a position sandwiching at least a central part on the one side. .
[2]
The package according to [1], wherein the support film is substantially fixed at least at an end portion in a length direction of the side of the frame.
[3]
The package body according to [1] or [2], wherein the frame body is formed by connecting a partial frame body and another partial frame body.
[4]
The package according to [3], wherein the position of the connection exists in a central portion in the length direction of the side of the frame.
[5]
The packaging body according to any one of [1] to [4], wherein an opening area of the frame body is 1.1 times or more and 3.0 times or less of a bottom surface area of the pellicle storage case.
[6]
The packaging body according to any one of [1] to [5], wherein a width of the frame body in plan view is 4 mm or more.
[7]
The packaging body according to any one of [1] to [6], wherein a height of a side surface of the frame body is larger than a height of the pellicle storage case.
[8]
A method for packing a pellicle storage case using the packing body according to any one of [1] to [7], wherein the pellicle storage case is supported from a top surface side and a bottom surface side using a pair of cushioning materials. Packing method characterized by.

  ADVANTAGE OF THE INVENTION According to this invention, the package which can suppress that foreign materials, such as dust, adhere to the pellicle accommodated in the pellicle storage case at the time of transport of a pellicle is provided.

It is a schematic perspective view which shows one Embodiment of a package. It is a schematic perspective view which shows one Embodiment of a buffer material. It is a schematic perspective view which shows other embodiment of a shock absorbing material. It is the schematic diagram showing the schematic of an impact test, and the position of the shock sensor at the time of a packing form.

  Hereinafter, the best mode for carrying out the present invention (hereinafter abbreviated as “this embodiment”) will be described in detail. In addition, this invention is not limited to this following Embodiment, It can implement by changing variously within the range of the summary.

Drawing 1 is an outline perspective view showing one embodiment of a packing object. The packing body 1 according to the present embodiment includes a packing box 2 and a cushioning material 4 that protects the pellicle storage case 3 stored in the packing box 2 in the packing box.
The packing box 2 has a substantially rectangular bottom surface in plan view, a side surface standing upward from the periphery of the bottom surface, and a substantially rectangular opening formed with the upper edge of the side surface as the periphery. Further, a tongue-like lid portion 21 is formed on a pair of parallel sides forming the opening portion, and the opening portion is closed by folding the lid portion, and the pellicle storage case 3 and the cushioning material 4 are packed. The box 2 is housed inside.

  As the material of the packaging box 2, cardboard, reinforced cardboard, plastic cardboard, or the like can be used. The inner dimension of the packing box 2 is preferably approximately the same size as the outer dimension of the frame body 42 so that the frame body 42 of the cushioning material 4 does not move, and the inner dimension height of the packing box 2 buffers the pellicle storage case 3. It is preferable that the height is 1 to 0.9 times the height when wrapped with the material 4, and the support film 41 that can be expanded and contracted in this way is firmly stretched to impact the pellicle storage case 3. Can be absorbed. If the inner size of the packaging box 2 is excessively large, a spacer made of cardboard or an air cap may be interposed in the gap between the cushioning material 4 and the packaging box 2. In the corner portion, the packaging box 2 may be deformed by the tension of the support film 41 or the like. For the purpose of preventing such deformation, a plate-like object is placed on the upper surface or the lower surface of the support film 2 on the lower surface side of the cushioning material. You may arrange. The material of the plate-like material may be any material such as corrugated cardboard, reinforced corrugated cardboard, resin, polystyrene foam, polyethylene foam, polyurethane foam, and may be fixed to the support film 41 or not.

The pellicle storage case 3 has a tray on which a pellicle (not shown) is placed and a lid that covers the tray. The tray has, for example, a thick, substantially square shape, and a mounting surface as a horizontal upper surface is formed on the upper surface. Further, the lid is formed in a square shape when viewed from the plane, and is formed so as to be in close contact with the tray at the peripheral edge when the lid is put on the tray. The material of the tray and lid is not particularly limited, and examples thereof include engineering plastic, reinforced plastic, and metal. From the viewpoint of weight reduction and moldability, plastic materials are often selected, and acrylic resin, acrylonitrile resin, polycarbonate resin, polyethylene terephthalate resin, acrylonitrile / butadiene / styrene resin, and the like can be used. In addition to the above resins, polyester resins other than polyethylene terephthalate, olefin resins such as polyethylene and polypropylene, polystyrene resins such as polystyrene, acrylonitrile / styrene resins, and the like can also be used. The above resin may be imparted with antistatic properties in order to prevent foreign matter adhesion due to static electricity. Fiber reinforced plastics can also be used. When selecting a metal, you may use aluminum from a viewpoint of weight reduction.
The dimensions of the tray and lid of the pellicle storage case 3 are set according to the size of the pellicle to be stored. Large area of the pellicle storage case, there bottom area of 1000 cm ² or more, 3000 cm ² or more, 7000 cm ² or more, further also becomes 15000 cm ² or more becomes large, more than 1kg in the case and lid also excluding the reinforcing material and the like by weight 4kg or more, and up to 10kg for larger size.

In the present embodiment, the cushioning material 4 is used as a set so as to support the upper surface and the bottom surface of the pellicle storage case 3, and is arranged in the packing box 2 so as to fix the pellicle storage case 3 in a suspended manner. Note that it is not always necessary to use the cushioning material 4 as a pair, and only one cushioning material 4 can be used to support the upper surface or the bottom surface of the pellicle storage case 3.
When a top plate is further arranged on the upper surface side of the cushioning material 4 that supports the upper surface side of the pellicle storage case 3 and the lid portion 21 is folded and the pellicle storage case 3 is stored in the packaging box 2, It is also possible to isolate the portion 21 and the cushioning material 4 from each other. Such a top plate can also suppress deformation of the packaging box 2. Further, in consideration of reinforcement, the packaging box 2 itself may be doubled.
The material of the top plate is not particularly limited, but a cardboard, a plastic plate, or the like can be used, and the size is preferably the same as the inner size of the packaging box 2.
Further, the pellicle storage case 3 may be packaged with a clean bag or the like, and may be stored as a single set or a plurality of sets such as two sets, three sets, four sets, and the like.

  FIG. 2 is a schematic perspective view showing one embodiment of the cushioning material. The cushioning material 4 includes a stretchable support film 41 that supports the upper surface or the bottom surface of the pellicle storage case 3, and a rectangular frame 42 in plan view on which the support film 41 is pasted. The support film 41 is substantially fixed and pasted on each side of the frame body 42 at a position sandwiching the central portion 43 on the side.

The material of the support film 2 that can be expanded and contracted is not particularly limited, but a material that is flexible, elastic, and difficult to slip is preferred. For example, polymer films and sheets such as polyurethane, polyethylene, and rubber, or high-performance polymer films such as woven or laminated films, alloys, and composites woven in a net shape can be used. From the viewpoint of adhesion and generation of foreign matter, a film or sheet such as polyurethane, polyethylene, or rubber is particularly preferable.
The support film 2 may be present on the entire surface of the opening or may be partially present. When it exists partially, it is preferable that the support film 2 is fixed substantially at the end in the length direction of each side. When the pellicle storage case 3 is rectangular, it is preferable that a support film is present at least on the short side of the case. When the pellicle storage case 3 is square, it means that at least a support film is present on either pair of sides. Of course, this is not the case when a partial frame is used.

  The inner dimension of each side of the frame body 42 is preferably larger than the side length of the pellicle storage case to be stored, and is preferably in the range of 1.05 to 3 times. Further, the outer dimensions of each side of the frame body 42 are preferably designed such that the distance from the inner wall of the packing box 2 for storing the cushioning material 4 to the pellicle storage case 3 is 3 cm or more, more preferably the pellicle. It is preferable to design the length so that the distance between the storage case 3 and the inner wall of the packaging box 2 is 3 cm or more and 20 cm or less.

The shape of the opening of the frame body 42 is not particularly limited, and the shape in plan view is preferably a substantially polygonal shape such as a square such as a square or a rectangle, a hexagon, or an octagon. The substantially polygonal top portion may be formed at an obtuse angle or may be formed in an arc shape as shown in FIG. Further, the planar view shape may be a circular shape.
As shown in FIG. 2, the height H of the frame 42 is such that when the pellicle storage case 3 is stored with the cushioning material 4, the pellicle storage case 3 is placed on the bottom of the packing box 2 or the packing through the support film 41. It is preferable that the height be suspended in the air without contacting the top of the box 2. Accordingly, it is preferable that the height of the pellicle storage case 3 to be stored is higher, more preferably 1.1 times or more of the case thickness, but it is preferable to be in the range of 1.1 to 10 times in consideration of transportation efficiency.
Moreover, it is preferable that the frame body 42 has a bottom surface having a certain area area along the length direction of the side at the lower position in the height direction of the frame body 42.

  The opening area of the frame body 42 is preferably 1.1 to 3.0 times the bottom surface area of the pellicle storage case 3. More preferably, they are 1.15 times or more and 2.5 times or less, More preferably, they are 1.2 times or more and 2.0 times or less. 1.1 times or more means that when the distance between the pellicle storage case 3 and the frame 41 is kept moderate and the pellicle storage case 3 is held on the support film 41, the pellicle is stored due to the influence of a highly rigid corner. It is possible to suppress the possibility that the corner portion of the pellicle storage case 3 is distorted without the case 3 being held horizontally. On the other hand, setting it to 3.0 times or less prevents the case 42 from being excessively stretched when the pellicle storage case 3 is held on the support film 41 and the case 41 sinks when the pellicle storage case 3 is held on the support film 41. Further, it is possible to suppress the reduction of the contact portion with the support film 41 on the upper surface side and the suppression from the upper surface direction. Not becoming too large leads to securing handling properties.

  The material of the frame body 42 may be corrugated cardboard, reinforced corrugated cardboard, resin, metal such as aluminum alloy, etc., and the frame body may have a honeycomb structure for the purpose of providing rigidity and weight reduction. good. Corrugated cardboard, reinforced cardboard, and the like are preferable from the viewpoint of weight as a cushioning material and waste. The width of the frame in plan view is preferably 4 mm or more. The case has a shape supported by cushioning material from above and below, and may be stored in a packing box in a stacked state, so if it is smaller than 4 mm, the frame of the cushioning material that enters the lower stage cannot withstand the weight of the upper stage The upper and lower cases may be in contact with each other. In addition, since the fixed width on the frame is also narrowed, the width can be increased as much as possible, but from the viewpoint of handling, the above functions are sufficiently provided if it is 700 mm or less. In the case where a plurality of layers are considered and when the portion where the support film 41 is fixed is the width of the frame, 15 mm or more is a more preferable width.

The planar view shape of the frame body 42 is not limited to a rectangular shape, and various planar view substantially polygonal shapes can be employed. Here, the substantially polygonal shape in plan view includes a triangular shape, a quadrangular shape, an octagonal shape, and the like, and may include an elliptical shape, a circular shape, an arc shape, and the like.
In addition, the frame body 42 may be divided into partial frame bodies 421 ′ and 421 ′, and the support film 41 may be fixed to the partial frame bodies 421 ′ and 421 ′.

FIG. 3 is a schematic perspective view showing another embodiment of the cushioning material. The cushioning material 4 ′ has a U-shape, and is formed by connecting a pair of partial frame bodies 421 ′ and 421 ′ facing each other so that the U-shaped openings face each other via a connecting portion 44, A frame shape having the same shape as the frame 42 is formed as a whole. In particular, when the bottom area of the case is 5000 cm 2 or more, it may be better to use the partial frame bodies 421 ′ and 421 ′ in terms of rigidity and waste.
One partial frame and the other partial frame may be connected to each other with the same size frame, or one of the partial frames is slightly smaller than the other partial frame and fitted. It may be. For connection or the like, an adhesive, a pressure-sensitive adhesive, a tape, a pin, or the like may be used. In the case of a fitting type, an adhesive or the like may not be used.

The support film 41 is substantially fixed and pasted on each side of the frame body 42 at a position sandwiching at least the central portion 43 on each side.
Here, at least the central portion has a portion where the supporting film 41 is not fixed in the vicinity of the central portion on one side, but there is a portion where the supporting film 2 is not fixed in addition to the central portion near the central portion. Also means good. Moreover, substantially fixing includes the case where the support film 2 is also fixed a little near the center.
Referring to FIG. 2, the ratio of the length Wb of the central portion 43 along the length direction of the side having the central portion 43 to the length Wa of the side is preferably 10% or more and 70% or less. More preferably, they are 15% or more and 60% or less, More preferably, they are 20% or more and 50% or less. By doing so, a moderate and extensibility is exhibited with respect to a large and heavy case, and the adhesiveness with the case is improved.

In FIG. 2, the support film 41 is fixed on the upper surface of the frame body 42, but may be fixed on the side surface of the frame body 42.
Also, the fixing method is not particularly limited, and an adhesive or a pressure-sensitive adhesive material can be used, and it may be physically fixed by thermal bonding, screws, screws, clips, or the like.

  In FIG. 3, the partial support films 411 ′ and 411 ′ are pasted on the partial frame bodies 421 ′ and 421 ′, respectively. In this case, it is preferable that the connection part 44 exists in the center part in the length direction of a side at least. By doing so, the connecting portion 44 can also serve as the central portion 43.

Since the package of the pellicle storage case of the present embodiment has the above-described configuration, even if the stress is most applied to the central portion in the length direction of the side of the frame body, this stress can be relieved. Can do. That is, if the support film is completely pasted on the entire surface, strong stress tends to be applied near the center where the rigidity is weak due to the size and weight of the case, so the frame itself deforms to the center along the support film. In addition, the tension of the support film is lowered, and the function as a buffer material may be reduced. Therefore, by substantially fixing and sticking the support film at a position sandwiching at least the center part on one side, the weight in the vicinity of the center can be covered only by expansion and contraction of the support film, and the frame body is hardly deformed.
Further, the movement of the pellicle storage case in the packing box can be effectively suppressed. As a result, the friction between the pellicle storage case and other parts (for example, the packing box and the cushioning material) is suppressed, and dust based on the friction Therefore, it is possible to prevent foreign matter such as dust from adhering to the pellicle stored in the pellicle storage case.
By using the package of the pellicle storage case according to the present embodiment, the pellicle and the pellicle storage case are protected from shock and vibration generated during pellicle transportation and handling, and dust generation due to rubbing of those constituent members is prevented. At the same time, it is possible to maintain the accuracy of the adhesive due to impact or the like at a high level. In particular, when placed on a large pellicle, the amount of cushioning material can be reduced, so that the entire packing box can be made lighter and more compact, and waste can be reduced. Also, since the packing box and the cushioning material are not in direct contact with each other, the pellicle case should also be contacted when the bottom of the packing box is pushed up with a forklift claw or when another object is accidentally dropped from above. It is possible to prevent pellicle damage and dust generation.

  Next, the present embodiment will be described more specifically with reference to examples and comparative examples. However, the present embodiment is not limited to the following examples as long as the gist thereof is not exceeded. In addition, each physical property in an Example was measured with the following method.

(1) Impact value, foreign object state In order to measure the impact applied to the storage case, a pellicle is not placed in the middle storage case, but a shock recorder (impact vibration acceleration recorder manufactured by microtechno) is used in the center of the case with an adhesive tape. A model SR300 was attached (FIGS. 4B and 4C), and a drop test was performed.
That is, as shown in FIG. 4 (a), one side of the bottom surface of the package is placed in a wooden box with a height of 15 cm, and one pair of the one side is lifted by 50 cm to make it slant, It was dropped so that the whole landed at the same time. The measurement results in the vertical direction and the adhesion of foreign matter to the pellicle were inspected.
In addition, a packing body in which the shock recorder was attached to the middle storage case was prepared in the same manner as described above, and a transportation test was performed. I made a round trip to Haneda from Miyazaki. The Miyazaki-Fukuoka round trip was transported by truck, and the Fukuoka-Haneda round trip was transported by air. The measurement results in the vertical direction of the impact and the foreign matter adhesion state were inspected.

[Example 1]
As shown in FIG. 1, the pellicle storage case was stored in a package. Here, a cushioning material as shown in FIG. 3 was used.
More specifically, first, a pellicle storage case having a bottom surface of 930 mm × 650 mm, a height of 40 mm, and a weight of 5 kg was prepared.
On the other hand, two partial frame bodies with outer dimensions of 450 mm × 820 mm × 100 mm and width of 40 mm are prepared, and two rectangular parallelepiped (bar-shaped) members having a length of 600 mm × width of 35 mm × height of 95 mm are prepared as connecting members. did.
The partial frame bodies were connected by a connecting member and integrated to form a rectangular frame body in plan view. A polyurethane film support film was applied to the entire surface of each of the partial frame portions. For this reason, there is no support film at the position of the connecting member, and the support frame is not provided in the central part of the long side as an integral frame.
A pair of pellicle storage cases sandwiched from the upper and lower sides with cushioning material is stored as a set in a packing box, and a reinforced corrugated cardboard top is placed on the top of the top and taped. The package was sealed (see FIG. 4C). Various physical properties were evaluated. The results are shown in Table 1 or 2.

[Example 2]
As shown in FIG. 1, the pellicle storage case was stored in a package. Here, a cushioning material as shown in FIG. 2 was used.
More specifically, first, a pellicle storage case having a bottom surface of 600 mm × 450 mm, a height of 40 mm, and a weight of 1.5 kg was prepared. The size of the cushioning material is a frame with an outer dimension of 720mm x 650mm x 65mm and a width of 35mm. Adhesive is applied to the width and a polyurethane film support film is pasted over the entire surface. did. It was packed in the same structure as in Example 1 except that the cushioning material was changed. Various physical properties were evaluated. The results are shown in Table 1 or 2.

[Comparative Example 1]
A package having the same structure as that of Example 1 was prepared except that the cushioning material of Example 1 was changed. That is, a 1000 mm × 700 mm × 100 mm rectangular parallelepiped made of foaming polyurethane is disposed on the top surface of the bottom of the packaging box as shown in FIG. 4B, and the top surface of the cushioning material is 1000 mm × 700 mm × of foaming polyethylene. The pellicle storage case was stored in a 100 mm cushioning material, and was packed in the same manner as in Example 1 except that three layers were stacked as shown in FIG. The results are shown in Table 1 or 2.

  As is apparent from the results shown in Tables 1 and 2, the package of the present embodiment has an excellent shock buffering capacity, and exhibits a pellicle storage case protection function that is strong against transportation and strong shocks.

  An object of the present invention is to provide an environmentally friendly package having excellent buffering capacity for protecting a pellicle storage case during transportation and storage. In particular, it can be suitably used in the field of large pellicles.

1: Packing body 2: Packing box 21: Lid part 3: Pellicle storage case 4: Buffer material 41: Support film 411 ': Partial support film 42: Frame body 421': Partial frame body 43: Central part 44: Connection part

Claims (5)

A packing box, and a cushioning material that protects the pellicle storage case stored in the packing box within the packing box,
The cushioning material has a stretchable support film that supports an upper surface or a bottom surface of a pellicle storage case, and a substantially polygonal frame in plan view on which the support film is pasted,
The support film is substantially fixed and bonded to the at least one side at a position sandwiching a central portion in the length direction of the at least one side on at least one side of the frame, Is not fixed to the at least one side in the central portion,
The support film is substantially fixed to the side of the frame at at least the end in the length direction of the side of the frame;
The frame includes two partial frames and a connecting portion that connects the two partial frames.
At least one of the two parts frame defines the end of the frame, the connecting portion defines the central portion of the frame body,
The ratio of the length of the central portion along the length direction of the at least one side having the central portion to the length of the at least one side is 10% or more and 70% or less. Packing body for pellicle storage case. The package according to claim 1, wherein an opening area of the frame body is 1.1 times or more and 3.0 times or less of a bottom surface area of the pellicle storage case. The package according to claim 1 or 2 , wherein a width of the frame body in plan view is 4 mm or more and 700 mm or less . The package according to any one of claims 1 to 3 , wherein a height of a side surface of the frame body is larger than a height of the pellicle storage case. A method for packing a pellicle storage case using the packing body according to any one of claims 1 to 4 , wherein the pellicle storage case is supported from a top surface side and a bottom surface side using a pair of cushioning materials. Packing method characterized by.

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