JP2022028958A - Cushioning material for pellicle and packaging body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cushioning material for pellicle capable of effectively suppressing adhesion of debris to the pellicle and being repeatedly used, even when a pellicle case is transported by using the cushioning material for pellicle after long term storage, or the pellicle case is transported by using the cushioning material for pellicle repeatedly.

SOLUTION: There is provided a cushioning material for pellicle 1 which is arranged in a packing box 6 accommodating a pellicle case 4 on which a pellicle 9 is mounted with a state that the pellicle case 4 is mounted at an upper part, in which acceleration A of the pellicle and acceleration B of the pellicle case at vibration frequency of 10.5 Hz after the cushioning material 1 for pellicle is pressed with 0.06 kg/cm² for 90 days have a relationship of ((A-B)/A)×100(%)≤25(%).

SELECTED DRAWING: Figure 1

COPYRIGHT: (C)2022,JPO&INPIT

Description

The present invention relates to a cushioning material for a pellicle and a package.

Conventionally, a predetermined packing body has been used when storing, storing, and transporting a pellicle.
In the lithography process at the time of manufacturing a circuit pattern of a semiconductor device, a liquid crystal display, or the like, a method of attaching a dustproof film generally called a pellicle is used for the purpose of preventing foreign matter from a photomask or an exposure substrate such as a reticle.
This pellicle is a transparent polymer having a thickness of 10 μm or less, such as nitrocellulose, a cellulose derivative, or a fluoropolymer, on the upper edge surface of a frame having a shape matching the shape of the exposure substrate and having a thickness of about several millimeters. A film (hereinafter referred to as "pellicle film") is stretched and adhered, and an adhesive is applied to the lower edge surface of the frame, and a liner is applied on the adhesive with a predetermined adhesive force. It has a structure in which a protective film called is adhered. Recently, a linerless type pellicle without a liner is also known.
The adhesive is for fixing the pellicle to the exposure substrate, and the accuracy of micron-order flatness is required so that fine cavities do not occur when the pellicle is adhered to the exposure substrate. Be done. Further, the liner protects the adhesive surface of the pressure-sensitive adhesive in order to maintain the adhesive strength of the pressure-sensitive adhesive until the pressure-sensitive adhesive is used for the purpose.

In the above-mentioned pellicle, in general, the pellicle maker that manufactures the pellicle and the maker of the mask that attaches the pellicle to the photomask or the like are often geographically separated from each other, and the mask or the like is separated from the pellicle maker. Transportation work to the manufacturer is indispensable. Therefore, in the transportation work of the pellicle, in order to prevent foreign matter from adhering to the pellicle membrane and the like, and to prevent the pellicle from being damaged, one pellicle is placed in a dedicated pellicle case consisting of a tray and a lid. It is generally practiced to store the pellicle cases, stack a plurality of the pellicle cases, and then pack them in a packing box provided with a predetermined cushioning material such as an air cushion (see, for example, Patent Document 1).
In particular, as a cushioning material used when packing a pellicle case for a large pellicle in a packing box, a cushioning material in which the contact area with the pellicle case is defined and the cushioning capacity is enhanced has also been proposed (for example, Patent Documents). See a few).

Japanese Unexamined Patent Publication No. 10-305814 Japanese Unexamined Patent Publication No. 2008-100733 Japanese Unexamined Patent Publication No. 2010-64780

As described above, in the prior art, particularly large pellicle cases have a large area and a large weight, the weight of the pellicle case is added to the cushioning material over time during transportation and storage, and the cushioning material is repeated. Since it is not supposed to be used, we are exclusively looking for a new cushioning material with high cushioning capacity.
Further, conventionally, the focus has been on obtaining a cushioning material having a high function of suppressing relatively large vibration caused by a rough road or a strong impact during transportation, which occurs during transportation.

However, in the prior art, when the cushioning material is repeatedly used, foreign matter is generated not only when a large vibration is applied to the pellicle case but also when a relatively small vibration is applied to the pellicle case, which may adhere to the transportation target. There is a problem that this has not been sufficiently examined.

Therefore, in the present invention, in view of the above-mentioned problems of the prior art, a cushioning material to be placed in the packing box containing the pellicle case containing the pellicle is examined, and when transporting a large heavy pellicle case or when transporting a large pellicle case, the weight is large. It is an object of the present invention to provide a cushioning material for a pellicle in which foreign matter does not adhere even when transported after long-term storage and the adhesion of foreign matter can be effectively reduced even after repeated use.

As a result of diligent studies to solve the above-mentioned problems, the present inventors have found that when a specific vibration frequency is applied to the pellicle and the pellicle case, stress more than the externally applied vibration is generated.
That is, by controlling the acceleration difference between the pellicle case and the pellicle at a predetermined vibration frequency to a predetermined value or less when the pressure is applied at a predetermined pressure for a predetermined period, the liner may fall off or the liner and the tray may rub against each other. , It has been found that the generation and adhesion of foreign matter due to friction between the pellicle frame and the tray can be effectively prevented, and the present invention has been completed.
That is, the present invention is as follows.

[1]
A cushioning material for pellicle, which is arranged in a packing box containing a pellicle case on which the pellicle is placed, with the pellicle case placed on the upper part.
The acceleration A of the pellicle and the acceleration B of the pellicle case at a vibration frequency of 10.5 Hz after pressurizing the cushioning material for the pellicle at 0.06 kg / cm ² for 90 days are obtained.
((AB) / A) × 100 (%) ≦ 25 (%)
Cushioning material for pellicle.
[2]
The cushioning material for pellicle according to the above [1], wherein the cushioning material for pellicle contains at least a double structure.
[3]
The cushioning material for pellicle according to the above [2], wherein at least one structure of the cushioning material for pellicle is a structure having a rebound resilience of 60% or less.
[4]
The structure having a rebound resilience of 60% or less is
The cushioning material for a pellicle according to the above [3], which is any structure selected from the group consisting of a vibration-proof rubber type, a metal spring type, and an air spring type.
[5]
The cushioning material for pellicle according to the above [3] or [4], wherein the structure having a impact resilience of 60% or less is in contact with the bottom surface of the packing box.
[6]
Other structures other than the structure having a rebound resilience of 60% or less
The cushioning material for a pellicle according to any one of the above [3] to [5], which is polyethylene foam or styrofoam.
[7]
A packing body in which a pellicle case containing a pellicle is horizontally held and stored in a packing box by the cushioning material for pellicle according to any one of the above [1] to [6].
The cushioning material for the pellicle is dispersedly arranged on the inner bottom surface of the packing box.
One or more of the pellicle cases are supported by the upper surface of the cushioning material for pellicle having a total upper surface area corresponding to 2.0% or more and less than 30.0% of the bottom area of the pellicle case located at the bottom in the packing box. It is a packing body.

According to the present invention, even when the pellicle case is transported using the pellicle cushioning material after long-term storage, or when the pellicle case is repeatedly transported using the pellicle cushioning material, foreign matter adheres to the pellicle effectively. It is possible to provide a cushioning material for a pellicle that can be suppressed and can be used repeatedly.

A schematic cross-sectional view showing a state in which a pellicle case containing a pellicle is stored in a packing box is shown. (A)-(d) A schematic plan view of the inner bottom of the packing box showing an example of the arrangement of the cushioning material for the pellicle is shown. The schematic diagram of the measurement test of the vibration frequency and the acceleration is shown. The acceleration measurement position of the pellicle and the pellicle case is shown.

Hereinafter, embodiments for carrying out the present invention (hereinafter, simply referred to as “the present embodiment”) will be described in detail with reference to the drawings as necessary, but the present invention is described in the following embodiments. Not limited. The present invention can be implemented with various modifications within the scope of the gist thereof.

[Cushioning material for pellicle]
The cushioning material for pellicle of this embodiment is
A cushioning material for pellicle, which is arranged in a packing box containing a pellicle case on which the pellicle is placed, with the pellicle case placed on the upper part.
The acceleration A of the pellicle and the acceleration B of the pellicle case at a vibration frequency of 10.5 Hz after pressurizing the cushioning material for the pellicle at 0.06 kg / cm ² for 90 days are obtained.
A cushioning material for pellicle that satisfies the relationship ((AB) / A) × 100 (%) ≦ 25 (%).

Hereinafter, the cushioning material for pellicle of this embodiment will be described with reference to the drawings.
FIG. 1 is a schematic cross-sectional view showing an example of a package containing a large pellicle.
2 (a) to 2 (d) are plan views of the inner bottom surface of the packing box showing an example of the arrangement of the cushioning material for the pellicle.
Here, the large pellicle means a pellicle film having an area of 1000 cm ² or more and 50,000 cm ² or less.

As shown in FIG. 1, the packing body A supports a pellicle case 4 composed of a lid 4a and a tray 4b, which houses a pellicle 9 having a pellicle film adhered to one end surface of the pellicle frame 10, and the pellicle case 4. It has a structure in which the cushioning material 1 for the pellicle and the cushioning material 1 for the pellicle are housed in the packing box 6.
Here, the number of pellicle cases 4 to be stored in the packing box 6 may be one or a plurality, but in the case of a large pellicle case, up to three pellicle cases 6 can be stored in one packing box 6 due to the relationship between size and weight. It is preferable to store it in.
In FIG. 1, the lower holding member 2 and the upper holding member 3 each have a two-stage configuration in which the pellicle case 4 is housed, and the packing body is housed in the packing box 6 while being held by the top plate 5. A is stacked in two stages, placed on a pallet 8, and held by a transport top plate 7.

The cushioning material 1 for a pellicle is preferably composed of a double or more structure, and FIG. 1 shows, as an example, a double structure composed of an upper structure 1b and a lower structure 1a. Is not limited to such a structure, and may have a single-layer structure or may have a triple or more structure.

The cushioning material for pellicle of the present embodiment has the acceleration A of the pellicle and the pellicle case at a vibration frequency of 10.5 Hz after being pressurized at 0.06 kg / cm ² for 90 days with the configuration as shown in FIG. Acceleration B has a function of ((AB) / A) × 100 (%) ≦ 25 (%). It is preferably 20% or less, more preferably 15% or less.
In the past, the cushioning capacity of the cushioning material was increased by focusing only on large vibrations during transportation and storage, but in actual transportation, even if the vibrations are not large, the pellicle and pellicle case have a specific vibration frequency. When is applied, the pellicle moves violently, causing more stress than the externally applied vibration.
Especially when transported after long-term use, when a specific vibration frequency is applied, the pellicle moves more violently than a new pellicle, and a large amount of stress is applied to the pellicle, between the pellicle and the pellicle case. Friction occurs, and foreign matter is generated due to the liner falling off, the friction between the liner and the tray, and the friction between the pellicle frame and the tray.
In the present embodiment, the acceleration A of the pellicle and the acceleration B of the pellicle case are specified so as to satisfy the relationship of the above formula, and even if some stress is applied, friction between the pellicle and the pellicle case is generated. It can be effectively suppressed and the generation of the above-mentioned foreign matter can be prevented.

As described above, in order to control the acceleration A of the pellicle and the acceleration B of the pellicle case to ((AB) / A) × 100 (%) ≦ 25 (%), the compression rate with respect to the pellicle case Use a small cushioning material, use a cushioning material that does not deteriorate over time, make the pellicle case a more flexible material, and design it so that there is a gap between the pellicle and the pellicle case. It is effective to do it.

As shown in FIG. 1, the cushioning material 1 for a pellicle of the present embodiment is arranged in a packing box 6 with the pellicle case 4 mounted on the upper portion.
As shown in FIGS. 2A to 2D, the cushioning material 1 for the pellicle is preferably distributed on the inner bottom surface of the packing box 6.
Here, the distributed and arranged cushioning materials 1 for pellicle are preferably individually independent, but may be connected to each other at the lower portion as long as the upper surfaces are at least independent. When they are independent, the occupied volume of the pellicle cushioning material 1 can be reduced, and when they are connected, the pellicle cushioning material 1 can be easily arranged in the packing box 6.

The arrangement number and shape of the cushioning material 1 for the pellicle are appropriately selected to the extent that the pellicle case 4 can be kept flat when there is no impact from the outside. That is, a plurality of cushioning materials 1 for pellicle are symmetrically arranged along the side surface of the packing box 6 within a range having a total top surface area of 2.0% to 30.0% of the bottom area of the pellicle case 4. Is preferable.
By arranging the cushioning material 1 for the pellicle in this way, it is possible to prevent the packing box 6 from coming into direct contact with the pellicle case 4, even when a strong impact is applied to the packing body A from below, so that the film contact is made. It can be avoided.
Further, the shape of the cushioning material 1 for the pellicle is preferably a shape in which the contact area with the pellicle case does not change significantly due to a load, and for example, a rectangular parallelepiped is preferable.

As a specific example of the shape of the cushioning material 1 for the pellicle of the present embodiment and the arrangement in the packing box 6, as shown in FIG. 2A, the cushioning material for the pellicle having a rectangular parallelepiped shape is provided at six locations on the inner bottom surface of the packing box. As shown in FIG. 2 (b), a rectangular parallelepiped cushioning material for pellicle is arranged in 6 places on the inner bottom surface of the package, and as shown in FIG. 2 (c), a pellicle having a rectangular cross section. A form in which the cushioning material 1 is arranged at four locations on the inner bottom surface of the packaging box, and as shown in FIG. 2D, the cushioning material 1 for pellicle is arranged in two parallel rows on both sides of the short side of the inner bottom surface of the packaging box. The form to do is mentioned.

The total area of the upper surface of the pellicle cushioning material 1 that supports the pellicle case 4 shall be 2.0% or more and less than 30.0% of the bottom area of the pellicle case 4 located at the bottom in the packing box 6. Is preferable. Further, it is more preferably 2.5% or more and less than 25.0%, and further preferably 3.0% or more and less than 20.0%.
Further, the cushioning material 1 for the pellicle of the present embodiment may be in direct contact with the pellicle case 4, or a predetermined member used for fixing the pellicle case 4 such as a holding member described later may be used as the pellicle case 4. It may be arranged between the cushioning material 1 and the cushioning material 1 for pellicle.
Further, a member having good adhesive strength with the cushioning material 1 for the pellicle or a member having the bottom surface parallel to the cushioning material 1 for the pellicle may be arranged between the bottom surface of the packing box 6 and the cushioning material 1 for the pellicle.

If the total area of the upper surface of the pellicle cushioning material 1 that supports the pellicle case 4 is less than 2.0% with respect to the bottom area of the pellicle case 4 located at the bottom in the packing box 6, it is static. Since the storage container cannot be sufficiently supported at the time of placement, the flatness deteriorates and there is a risk of dust generation.
On the other hand, when it is 30.0% or more, on the contrary, the buffering capacity is deteriorated and it is easy to receive an impact from the outside, which is not preferable. Further, since the packing box 6 is generally made of a material such as corrugated cardboard, there is a problem that the packing box 6 is easily deformed by a puncture wound of a forklift or a strong impact during transportation. Therefore, when the packing box 6 is deformed, the cushioning material 1 for the pellicle acts as a medium for transmitting the impact, and the impact is transmitted to the pellicle case 4, and as a result, contamination or film contact may occur.

The cushioning material 1 for a pellicle of the present embodiment preferably has a height of 50 to 500 mm, more preferably 80 to 400 mm, and even more preferably 100 to 250 mm.
If the height of the cushioning material 1 for the pellicle of the present embodiment is 500 mm or less, there is little wasted space, and if it is 50 mm or more, even if the bottom surface of the package A is impacted by a drop impact, the inside of the pellicle case 4 The effect on the pellicle 9 can be effectively reduced.
Therefore, it is preferable to appropriately design the height of the cushioning material 1 for the pellicle according to the increase in the mass of the package A.
As described above, regarding the shape and arrangement of the cushioning material 1 for the pellicle other than the total top surface area, the desired cushioning effect can be obtained in consideration of the above points with respect to the mass of the pellicle case 4 to be stored. Determine as appropriate.

The cushioning material 1 for pellicle of the present embodiment preferably contains at least a double structure.
When the cushioning material 1 for pellicle contains a double structure, it is preferable that at least one of the structures has a rebound resilience of 60% or less.
The rebound resilience is more preferably 58% or less, further preferably 55% or less.
Since the impact resilience is within the above numerical range, it is possible to exert the effect of suppressing each vibration due to a specific vibration frequency during transportation even if it is stored and used for a long period of time.
In addition, it is preferable because it can exert the effect of suppressing vibration without deterioration even during transportation after long-term storage.

The structure having a rebound resilience of 60% or less is preferably, for example, a vibration-proof rubber-based, resin foam-based, metal spring-based, or air spring-based cushioning material, but more preferably a vibration-proof rubber sponge. And polyurethane foam. In particular, a polyurethane foam having excellent durability for repeated use is more preferable.

Further, it is preferable that the surface of the packing box 6 in contact with the bottom surface is in contact with the structure having a rebound resilience of 60% or less. As a result, the vibration of the entire pellicle case 4 can be suppressed.
When the cushioning material for pellicle of the present embodiment contains a double structure, the ratio of the double structure is such that a space is provided between the pellicle case and the bottom of the packing box from the viewpoint of the weight and area of the pellicle case. From the viewpoint of suppressing film contact, the structure having a rebound resilience of 60% or less with respect to the entire height of the cushioning material 1 for pellicle is preferably 25% or less. It is more preferably 20% or less, still more preferably 15% or less.

It is preferable that the other structures other than the structure having a rebound resilience of 60% or less among the double structures are formed of a material that can suppress strong impact. Further, when the pellicle case is stored for a long period of time, it is possible to suppress the displacement of the height even when the pellicle case having a large weight is held, which is preferable.
Further, from the viewpoint of reducing the probability that the claws of the forklift will hit the pellicle case 4 when the bottom surface is pushed up by a forklift or the like and reducing troubles during transportation, between the pellicle case 4 and the bottom surface of the packing box 6. It is preferable to provide a space and keep a distance from the bottom surface of the pellicle case 4 and the packing box 6.
The structure other than the structure having a rebound resilience of 60% or less among the double structures is not limited to the following, and is not limited to, for example, a hollow structure of a flow molded product, foamed polyethylene, and expanded polystyrene. , Corrugated cardboard, a structure made of paper, and the like, and in particular, foamed polyethylene, expanded polystyrene, and a hollow structure are preferable from the viewpoint of appropriate rigidity and light weight.

[Packing body]
The packing body of the present embodiment is formed by horizontally holding and storing the pellicle case containing the pellicle in the packing box by the cushioning material for the pellicle of the present embodiment described above, and the inner bottom surface of the packing box. The cushioning material for the pellicle is dispersedly arranged in the package, and one or more of the pellicle cases correspond to 2.0% or more and less than 30.0% of the bottom area of the pellicle case located at the bottom of the packing box. It has a structure supported by the upper surface of the cushioning material for a pellicle having a total upper surface area.
The package A of the present embodiment will be described with reference to FIG.
In the embodiment shown in FIG. 1, the packing body A includes a lower holding member 2 and an upper holding member 3 for holding the pellicle case 4 one by one, a top plate 5 for covering the upper portion of the upper holding member 3, and the pellicle. The cushioning material 1 and the cushioning material 1 are stored in the packing box 6.
In the package A, a plurality of pellicle cases 4 can be stacked by using the holding members 2 and 3, but the number of stacking stages is preferably one or two.
The holding members 2 and 3 have a role of regulating the horizontal position of the pellicle case 4 in addition to the role of adjusting the space above and below the pellicle case 4. Further, the package A may be firmly fastened with a plurality of binding bands (not shown).

Further, although a plurality of packed bodies A can be transported in a stack, it is preferable to use one or two boxes in terms of portability and stability.
When transporting the package A, it is preferable to use a packaging pallet in which a transport top plate 7 is arranged above the package A and a pallet 8 is arranged below the package A. The transport top plate 7, the packing body A, and the pallet 8 are preferably firmly fastened with a plurality of binding bands (not shown).
Although the package A can be transported as it is, it is more preferable to combine the transport top plate 7 and the pallet 8. In that case, the packing pallet becomes stronger by using the corner pad.

The transport top plate 7, the packing body A, and the pallet 8 (excluding the support legs) are preferably made of a material having sufficient strength, and have a plastic corrugated cardboard, a paper corrugated cardboard, a reinforced corrugated cardboard, a multi-layer corrugated cardboard, and a honeycomb structure. It can be appropriately selected from plate-shaped materials, synthetic resins, foams of synthetic resins, metals and the like, but is not limited thereto. Further, the material when the corner pad is used is not particularly limited and can be appropriately selected.

The support legs of the pallet 8 are preferably made of a material having a strength capable of supporting the weight and particularly having a high cushioning effect against vertical impacts, and is made of a foamable resin (for example, foamable polyethylene, foamable styrene, etc.). , Plastic corrugated cardboard, paper corrugated cardboard, reinforced corrugated cardboard, multi-layer corrugated cardboard, air cushion, liquid gel and the like can be appropriately selected, but the present invention is not limited thereto.
As the shape, it is preferable that the hole penetrates in a direction that is easily crushed by an impact, and a round shape, an ellipse shape, a triangular shape, etc. are preferable, but a configuration that serves as a cushioning material even if the hole does not penetrate. You may do it.
Further, when the pallet 8 is not used, the support legs may be directly installed on the outer lower surface of the packing box 6.

The binding band for binding the transport top plate 7, the packing body A, and the pallet 8 is generally made of polypropylene, but it is preferably appropriately selected according to the weight of each constituent member.

The holding members 2 and 3 used in the package A will be described.
The material of the holding members 2 and 3 may be a cushioning material that absorbs impact, such as foamable polyethylene, foamable styrene, and foamable polyurethane, and may be a material having sufficient strength to hold the pellicle case 4 flat.
Further, the holding members 2 and 3 preferably have a structure capable of holding the pellicle case 4 flatly, but have a shape that covers a part of the side surface and the bottom surface of the pellicle case rather than a concave shape that covers the side surface and the bottom surface of the pellicle case 4. Is preferable. More preferably, the cross section is L-shaped.

Further, the lowermost holding member 2 is the upper surface of the pellicle cushioning material 1, and when the pellicle cushioning material 1 is composed of a plurality of structures, for example, an upper structure 1b and a lower structure 1a, the upper structure is formed. It is preferably placed in contact with 1b.

The material of the top plate 5 that serves as the lid of the uppermost holding member 3 will be described.
The top plate 5 is preferably made of a cushioning material that absorbs impact, such as foamable polyethylene, foamable styrene, and foamable polyurethane, and at least so that it can be placed on the peripheral edge of the upper holding member 3. It is assumed that the lower surface is formed flat. Further, a soft predetermined cushioning material such as foamable urethane or an air cushion may be arranged between the top plate 5 and the pellicle case 4 to further suppress the impact on the pellicle case 4.
With such a configuration, the top surface of the package A can be effectively protected.

In the packing body A of the present embodiment, the pellicle case 9 is horizontally held and stored in the packing box 6 by the cushioning material 1 for the pellicle.
The cushioning material for pellicle is dispersedly arranged on the inner bottom surface of the packing box 6. For example, the arrangement form shown in FIGS. 2 (a) to 2 (d) can be mentioned.
Further, the cushioning material for pellicle having a total top surface area in which one or more of the pellicle cases 4 correspond to 2.0% or more and less than 30.0% of the bottom area of the pellicle case 4 located at the bottom of the packing box 6. It is supported by the upper surface of 1.
The total area of the upper surface of the cushioning material 1 for the pellicle that supports the pellicle case 4 is set to 2.0% or more of the bottom area of the pellicle case 4 located at the bottom in the packing box 6, so that it is static. The storage container can be sufficiently supported at the time of placement, good flatness can be obtained, and dust generation can be effectively prevented.
Further, when it is less than 30.0%, an excellent buffering capacity can be exhibited and an impact from the outside can be suppressed.

According to the package of the present embodiment, the pellicle can be effectively protected from vibration and impact during storage and transportation of the pellicle, no film contact occurs, and no foreign matter adheres to the pellicle, and the pellicle is clean. It can be transported in good condition.
In addition, the cushioning effect can be exhibited by reducing the occupied volume of the cushioning material.

Hereinafter, the present embodiment will be described in more detail with reference to specific examples and comparative examples, but the present embodiment is not limited to the following examples as long as the gist of the present embodiment is not exceeded.
In addition, each physical property in Example and Comparative Example was measured by the following method.

((1) Vibration frequency and acceleration measurement test)
The vibration frequency and acceleration applied to the pellicle case and the pellicle were measured.
As shown in FIG. 3, the measurement was carried out using one box of the package A of FIG.
As shown in FIG. 3, a total of two pellicle cases 4 are housed in each of the upper holding member 3 and the lower holding member 2.
The pellicle 9 provided with the pellicle film and the pellicle frame 10 is placed on the lower pellicle case 4 held by the lower holding member 2, and the upper pellicle case 4 held by the upper holding member 3 is provided. Only the pellicle frame 10 was placed.
An accelerometer is attached to the upper pellicle case 4 at a position corresponding to the center of the short side of the pellicle with adhesive tape as shown in FIG. 4, and the accelerometer is set as the acceleration measurement position of the pellicle case 4 ( B) was measured.
The acceleration (A) of the pellicle is measured by similarly mounting an accelerometer on the pellicle frame at the center of the short side of the pellicle frame 10 so that the acceleration (A) of the pellicle is substantially the same as the acceleration measurement position of the pellicle case 4 as shown in FIG. bottom.
The pellicle case 4 was housed in a packing box, and the cushioning material 1 for the pellicle was arranged.
As shown in FIG. 3, a packing box 6 containing a pellicle case 4 was placed on a vibration tester stage, and a vibration test was performed in which the packaging box 6 was vibrated by a vibration drive unit. For data processing, the vibration frequency and acceleration were determined using a transport vibration recorder (Togh Logger model TR-1000, manufactured by IMV).
As the vibration tester, IMV K125LS / SA18M was used.
The test conditions were an acceleration of 8 G and a vibration frequency of 0 to 200 Hz.

((2) Foreign matter inspection)
A sample similar to the above was prepared and a transportation test was performed.
The transportation test was conducted by going back and forth from Miyazaki to Haneda.
The Miyazaki-Fukuoka round trip was transported by truck, and the Fukuoka-Haneda round trip was transported by air, and the impact in the vertical direction was measured to evaluate the state of foreign matter adhesion.

[Example 1]
As shown in FIG. 1, the pellicle 9 was placed in the pellicle case 4.
At that time, an adhesive tape was used to fasten the liner to the tray 4b.
The pellicle case 4 was stored in the packing box 6.
As the cushioning material 1 for the pellicle, a material having the double structures 1a and 1b was used.
The cushioning material 1 for the pellicle of the double structure uses a cushioning material made of foamed polyethylene having a height of 160 mm × 50 mm and a height of 140 mm as the upper structure 1b, and has a height of 160 mm × 50 mm and a height of 20 mm as the lower structure 1a. A cushioning material made of a polyurethane elastomer having a impact resilience of 50% was used. These upper and lower structures were bonded together with an adhesive to form a cushioning material 1 for a pellicle.
As the pellicle case 4, a case having an outer dimension of 950 mm × 1300 mm and a height of the pellicle case 4 including the lid 4a of 100 mm was used.
The pellicle case 4 is held by holding members (made of foamed polyethylene) 2 and 3, and the cushioning material 1 for the pellicle is placed at 6 places on the bottom of the lower pellicle case 4 as shown in FIG. 2A and packed. Body A. At this time, in order to easily fix the cushioning material 1 for the pellicle to the bottom surface of the packing box 6, a plate-shaped material made of foamed polyethylene, an outer dimension of 1050 mm × 1400 mm, and a height of 4 mm is laid on the bottom surface to cushion the pellicle. Material 1 was attached with an adhesive.
At this time, a pressure of 0.06 kg / cm ² was applied to the cushioning material 1 for the pellicle.
In the package obtained as described above, the package was stored in a warehouse for 90 days, and the above ((1) vibration frequency and acceleration test) was carried out.
The vibration frequency was 10.5 Hz, and the acceleration of the pellicle case (B) and the acceleration of the pellicle (A) were measured.
When the acceleration difference was calculated by ((A)-(B) / (A)) × 100, it was 3%.
Moreover, when ((2) foreign matter inspection) was carried out, it was confirmed that there was no foreign matter adhesion.

[Comparative Example 1]
The upper structure 1b and the lower structure 1a of [Example 1] were integrated and replaced with foaming urethane having a rebound resilience of 72%.
In addition, the arrangement of the cushioning material 1 for the pellicle was changed to four places at the four corners as shown in FIG. 2 (c).
The other conditions were the same as in [Example 1], and the evaluations (1) and (2) were carried out.
The acceleration difference in (1) was 58% when the vibration frequency was 10.5 Hz.
Further, as a result of the foreign matter inspection in (2), foreign matter adhesion was confirmed.

The cushioning material for a pellicle of the present invention is an exposure substrate such as a photomask or a reticle used in a lithography process when manufacturing a thin film transistor (TFT) or a color filter (CF) constituting an LSI or a liquid crystal display (LCD). It has industrial applicability as a cushioning material for pellicle used to prevent foreign matter from adhering to the liquid crystal display.

1 Cushioning material for pellicle 1a Lower structure 1b Upper structure 2 Lower holding member 3 Upper holding member 4 Pellicle case 4a Lid 4b Tray 5 Top plate 6 Packing box 7 Transport top plate 8 Pallet 9 Pellicle 10 Pellicle frame A Packing body

[1]
It is a packing body in which the pellicle case containing the pellicle is horizontally held and stored in the packing box by the cushioning material for the pellicle .
The cushioning material for the pellicle is dispersedly arranged on the inner bottom surface of the packing box.
For pellicle in which one or more of the pellicle cases housed in the vertical direction has a total top surface area corresponding to 2.0% or more and less than 30.0% of the bottom area of the bottom pellicle case located in the packing box. It is supported by the upper surface of the cushioning material and
The pellicle has a pellicle film having an area of 1000 cm ² or more and 50,000 cm ² or less and a frame body, and a protective film is adhered to the lower edge surface of the frame body via an adhesive.
The cushioning material for the pellicle is designed to provide the adhesive and the protective film as a gap between the pellicle and the pellicle case with an adhesive tape, and the pellicle is fixed to the tray of the pellicle case. The total upper surface area is filled with the mass including the pellicle and the pellicle case for accommodating the pellicle, and the vibration frequency 10 after pressurizing the cushioning material for the pellicle at 0.06 kg / cm ² for 90 days. The acceleration A of the pellicle at 5.5 Hz and the acceleration B of the pellicle case located at the bottom are
((AB) / A) × 100 (%) ≦ 25 (%)
The pellicle cushioning material contains at least a double structure having different impact resilience.
The cushioning material for the pellicle to be dispersedly arranged has an independent upper surface in the vertical direction .
Packing body.
[2]
The package according to the above [1] , wherein at least one structure of the cushioning material for pellicle is a structure having a impact resilience of 60% or less.
[3]
The structure having a rebound resilience of 60% or less is
The package according to the above [2] , which is any structure selected from the group consisting of anti-vibration rubber type, metal spring type, and air spring type.
[4]
The packing body according to the above [2] or [3] , wherein the structure having a impact resilience of 60% or less is in contact with the bottom surface of the packing box.
[5]
Other structures other than the structure having a rebound resilience of 60% or less
The package according to any one of the above [2] to [4] , which is polyethylene foam or styrofoam.
[6]
The packing body according to any one of the above [2] to [5], wherein the structure having a rebound resilience of 60% or less is in contact with the surface in contact with the bottom surface of the packing box .
[7]
The package according to any one of [1] to [6] above, wherein the at least double structure includes a lower structure and an upper structure having different impact resilience in the vertical direction.
[8]
The packaging body according to the above [7], wherein the lower structure and the upper structure are bonded to each other with an adhesive.

Claims (7)

A cushioning material for pellicle, which is arranged in a packing box containing a pellicle case on which the pellicle is placed, with the pellicle case placed on the upper part.
The acceleration A of the pellicle and the acceleration B of the pellicle case at a vibration frequency of 10.5 Hz after pressurizing the cushioning material for the pellicle at 0.06 kg / cm ² for 90 days are obtained.
((AB) / A) × 100 (%) ≦ 25 (%)
Cushioning material for pellicle. The cushioning material for pellicle according to claim 1, wherein the pellicle cushioning material contains at least a double structure. The cushioning material for pellicle according to claim 2, wherein at least one structure of the cushioning material for pellicle is a structure having a impact resilience of 60% or less. The structure having a rebound resilience of 60% or less is
The cushioning material for a pellicle according to claim 3, which is any structure selected from the group consisting of a vibration-proof rubber type, a metal spring type, and an air spring type. The cushioning material for a pellicle according to claim 3 or 4, wherein the structure having a impact resilience of 60% or less is in contact with the bottom surface of the packing box. Other structures other than the structure having a rebound resilience of 60% or less
The cushioning material for a pellicle according to any one of claims 3 to 5, which is polyethylene foam or styrofoam. A packing body in which a pellicle case in which a pellicle is stored by the cushioning material for a pellicle according to any one of claims 1 to 6 is horizontally held and stored in a packing box.
The cushioning material for the pellicle is dispersedly arranged on the inner bottom surface of the packing box.
One or more of the pellicle cases are supported by the upper surface of the cushioning material for pellicle having a total upper surface area corresponding to 2.0% or more and less than 30.0% of the bottom area of the pellicle case located at the bottom in the packing box. It is a packing body.

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