JP5364736B2 - Packing box for pellicle - Google Patents

Description

  The present invention relates to a packaging box for transporting and storing a container containing a pellicle used as a dust guard when manufacturing a semiconductor device, a printed circuit board, a large-scale integrated circuit, and a liquid crystal display.

  In the manufacture of large-scale integrated circuits, etc., if dust adheres to the photomask, which is a reticle used to create patterns by irradiating light onto a semiconductor wafer or liquid crystal glass substrate, the dust may block the light. There is a problem that the transferred pattern is damaged due to bending. For this reason, these operations are usually performed in a clean room, but it is still difficult to keep the photomask clean, and a method of sticking a pellicle on the photomask surface as a dust guard is used.

  Due to the attached pellicle, the foreign matter does not adhere directly to the surface of the photomask, but adheres to the pellicle, so if the focal point is aligned with the pattern of the photomask during lithography, the foreign matter on the pellicle is irrelevant to the transfer It becomes. In this pellicle, a transparent pellicle film that sufficiently transmits normal light is applied to the upper end surface of the pellicle frame by applying a solvent and air-dried or bonded with an adhesive. An adhesive layer for mounting on a mask and a release layer (separator) for the purpose of protecting the adhesive layer are provided.

  In recent years, with the increase in size of liquid crystal displays, the size of photomasks for liquid crystals and pellicles has also increased, and extremely large ones having a side length exceeding 1000 mm have appeared. Such a pellicle naturally has a large container for storing it, and as the size of the pellicle increases, it is necessary to increase the rigidity of the storage container.

  When such a pellicle storage container is transported, it is difficult to transport it manually due to weight and size problems. Carrying a particularly large pellicle with a side length exceeding 1000 mm is extremely labor-intensive and may cause serious damage to the operator if dropped. Therefore, a fork type conveying means such as a forklift is used. Therefore, a protruding leg portion is provided on the outer bottom portion of the pellicle storage container in consideration of fork insertion.

  A packing box for storing and transporting such a pellicle storage container has a bottom buffer 81 on the inner bottom surface and a side buffer on the inner side surface so as not to give an impact to the pellicle storage container as shown in FIG. The body 14 is arranged and configured to support the pellicle storage container 30. Here, in the case of a large pellicle storage container having a pellicle side length exceeding 500 mm, the load per unit area of the buffer body becomes small, and the buffer capacity may not be exhibited. In such a case, the buffer capacity can be increased by reducing the contact area of the buffer (Patent Document 1). On the other hand, in the case of an extremely large pellicle whose side length exceeds 1000 mm, the pellicle storage container has a considerable weight, and it is difficult to design the hardness appropriately. This is because it is difficult to achieve both the initial buffering property of the buffer body and the prevention of bottoming when a large impact is applied.

  Furthermore, there is a problem that it is difficult to exert a buffering capacity against a horizontal impact. If the weight of the pellicle storage container is light, the pellicle storage container will not sink into the buffer body. When an impact is applied from the horizontal direction, the pellicle storage container will slide somewhat on the buffer body. I was able to. The shock absorber disposed on the side surface is mainly disposed to receive the pellicle storage container that has slid on the side and relieve the impact. However, when the weight of the pellicle storage container is extremely heavy and the bottom area is extremely large, the pellicle storage container is submerged in the buffer body or is placed in a state of extremely high friction. Therefore, in order to mitigate the impact in the horizontal direction, it is necessary for the shock absorber on the lower surface to shear and deform in the horizontal direction, but the large flat shock absorber can hardly be deformed in this direction. Cannot be demonstrated.

  On the other hand, it is possible to improve the deformation in the horizontal direction by reducing the horizontal plane area and extremely increasing the thickness of the buffer body, that is, by forming a columnar shape. However, simply increasing the thickness increases the wasted space. In addition, if the pellicle storage container is not placed on the buffer very accurately when the pellicle storage container is mounted, the balance will be tilted and dropped out. This is not preferable. From these points, there has been no pellicle packaging box that can easily store and take out the pellicle storage container, has a suitable buffering property, and does not have a risk of foreign matter adhesion.

Japanese Patent Laid-Open No. 2008-100733

  The present invention has been made to solve the above-mentioned problems, and is a stable and clean state without tilting and dropping off a pellicle storage container storing a particularly large pellicle having at least one side length exceeding 1000 mm. To provide a pellicle packaging box that can be transported and transported without exerting shock or vibration by providing sufficient buffering capacity to the pellicle storage container and the stored pellicle And

The pellicle packaging box according to claim 1, which is made to achieve the above object, stores and / or stores a pellicle storage container that stores at least one pellicle having a side length exceeding 1000 mm. A packaging box for transporting, wherein a plurality of shock absorbers having recesses into which a plurality of legs protruding from the outer bottom surface of the pellicle storage container are respectively inserted are separately attached to the inner bottom surface of the packaging box. The recess has a depth that prevents the bottom surface of the leg from contacting the bottom buffer body of the recess when the leg portion is inserted and the outer bottom surface contacts the top surface of the buffer body. And

  A packaging box for a pellicle according to a second aspect is the one according to the first aspect, wherein the buffer body is formed by laminating a plurality of layers having different hardnesses.

  The pellicle packaging box described in claim 3 is the packing box for pellicle described in claim 2, wherein the buffer has a two-layer structure, and the hardness of the lower layer is higher than the hardness of the upper layer. It is characterized by.

  A packaging box for a pellicle according to claim 4 is the packaging box according to claim 1, wherein at least four legs or wheels are attached to the outer bottom surface of the packaging box. And the floor surface is at least 100 mm, and at least one wall material of the four side surfaces of the packaging box forming a rectangular parallelepiped is detachable.

  The pellicle packaging box according to the present invention has a plurality of legs protruding from a pellicle storage container storing a particularly large and heavy pellicle with a side length of more than 1000 mm. The pellicle storage container can be supported and stored in a stable and clean state by being inserted into the recess of the bottom buffer body fixed and installed on the inner bottom surface of the packaging box independently. The pellicle storage container is accurately mounted on the bottom buffer body with a height, and the leg part is fitted in the recess of each bottom buffer body, so the pellicle storage container is inclined and dropped from the bottom buffer body There is no fear of doing. For this reason, during transportation and transportation, vibrations and shocks in the vertical and horizontal directions applied to the stored pellicle and pellicle storage container can be buffered.

  In addition, the bottom shock absorber of this pellicle packaging box has a plurality of layers of different hardness, and it is possible to absorb shock from small impacts while controlling the thickness of the bottom shock absorber for heavy pellicle storage containers. The buffering capacity can be sufficiently exerted without being compressed or sunk to the extent that the buffering function of the bottom buffer body is lost even for a large impact. By adjusting the size, thickness, hardness, and layer combination of the bottom cushioning body according to the weight of the pellicle storage container, transportation means, and assumed impact level, the pellicle and pellicle that are stored and exhibit sufficient buffering capacity The container can be safely transported and transported without giving vibration or impact to the container.

  Furthermore, since the pellicle packaging box of the present invention can remove at least one wall material on the four side surfaces of the rectangular parallelepiped packaging box, a fork-type conveying means can be used for mounting and taking out the pellicle storage container. Similarly, in moving the pellicle packaging box, a fork-type conveying means can be used because the gap between the outer bottom surface and the floor surface of the packaging box is secured. Therefore, it is possible to ensure the safety of work in transportation, transportation, transportation, etc. and improve work efficiency.

1 is a perspective view of a pellicle packaging box to which the present invention is applied. It is an AA line front sectional view of a packing box for pellicles to which the present invention is applied. It is a BB line plane sectional view of a packing box for pellicles to which the present invention is applied. It is CC line plane sectional drawing of the packaging box for pellicles to which this invention is applied. It is a fragmentary sectional view of the bottom buffer body vicinity before and behind fitting of the bottom buffer body of the pellicle packaging box to which the present invention is applied and the leg part of the pellicle storage container. FIG. 5 is a partial cross-sectional view of the vicinity of a leg portion and a bottom buffer body of a pellicle storage container in another pellicle packaging box to which the present invention is applied. It is the top view of the pellicle storage container mounted in the packing box for pellicles to which this invention is applied, and its DD sectional view. It is a front sectional view of a conventional pellicle packaging box to which the present invention is not applied.

  Hereinafter, although the form for implementing this invention is demonstrated in detail, the scope of the present invention is not limited to these forms.

  The pellicle packaging box of the present invention is for stably storing, transporting and transporting a pellicle storage container that stores a large pellicle having a side exceeding 1000 mm, and includes a plurality of pellicle storage containers protruding from the bottom of the pellicle storage container. A plurality of bottom surface cushions for fitting the leg portions are installed on the bottom surface in the packaging box.

  One Embodiment in the use condition which mounts the pellicle storage container of this packing box for pellicles is shown in FIGS.

  As shown in the perspective view of FIG. 1, the pellicle packaging box 1 has a rectangular parallelepiped box shape in which the four side surfaces are covered with a wall material 13 and the top surface is covered with a lid 20. . The lid 20 is fastened to the entire packaging box by a fixing band 21. A handle 22 is provided in a part of the wall material 13, and four casters 23 are attached to corners of the outer bottom surface of the pellicle packaging box 1. In the pellicle packaging box 1, it is preferable that the distance between the outer bottom surface and the floor surface of the pellicle packaging box is secured by a caster 23 to 100 mm or more. By securing the gap, a transporter such as a forklift, a pallet lifter, or a hand lifter can be easily used for moving, storing, and taking out the pellicle packaging box 1.

  FIG. 2 is a front sectional view taken along the line AA of FIG.

  The mounted pellicle storage container 30 stores the pellicle in a space formed between the tray 32 and the cover 31 arranged to face the tray 32. The pellicle storage container 30 has four leg portions 33 protruding from the outer bottom surface. The pellicle to be stored is a transparent pellicle film made of nitrocellulose, cellulose acetate, or fluororesin that normally transmits light to the upper end surface of a pellicle frame made of aluminum, stainless steel, polyethylene, or the like. Adhesive layer made of polybuden resin, polyvinyl acetate resin, acrylic resin, etc. for mounting on a photomask on the lower end surface of the pellicle frame. And a release layer (separator) for the purpose of protecting the adhesive layer. In addition, when the pellicle is attached to the photomask, a small hole for pressure adjustment is made in a part of the pellicle frame to eliminate the pressure difference between the space surrounded by the inside of the pellicle and the outside, and it moves through the small hole. A filter may be installed to prevent foreign objects from entering the air.

  On the inner bottom surface on which the pellicle storage container 30 including the cover 31, the tray 32, and the leg portion 33 is mounted, the bottom plate 11 is attached to the upper surface of the pallet plate 10 using an adhesive such as a rivet and / or an epoxy adhesive. Yes. At the four corners on the bottom plate 11, L-shaped side buffer bodies 14 that cover the four side surfaces and abut against the wall material 13 serving as a wall surface are fixed and installed. Further, on the bottom plate 11, inside the side buffer body 14, a concave bottom buffer body 18 having a concave portion 17 on the top surface side is provided at each leg 33 position when the pellicle storage container 30 is mounted. Fixed and installed with double-sided tape. The bottom buffer 18 may be fixed on the bottom plate 11 and may be not only an adhesive tape such as a double-sided tape but also an adhesive, an adhesive, or a rivet.

  The wall member 13 with which the side cushioning body 14 abuts is a plate shape whose four side surfaces are separately configured, and is detachably fitted and fixed to each other at an edge 12 formed around the bottom plate 11. It is what. It is preferable that the wall material 13 can be removed one surface at a time. The wall material can be removed only where necessary, and the pellicle storage container 30 can be stored and taken out by a transporter (not shown) such as a forklift, which improves workability. The wall member 13 may be detachably fitted into a groove formed on the bottom plate 11 or a groove formed by the pallet plate 10 and the bottom plate 11 and fixed to each other.

  The lid 20 that covers the top surface is formed with a top buffer 19 having a height that is close to or close to the pellicle storage container 30 on a part of the pellicle storage container 30 side. The upper surface buffer 19 is a rectangular parallelepiped and has a flat contact surface with the cover 31 of the pellicle storage container 30. The upper buffer 19 is in contact with or close to the upper surface of the pellicle storage container 30 and fills the gap between the lid 20 and the pellicle storage container 30. The lid 20 may be fixed with a buckle.

  2 is a plan sectional view taken along the line BB of FIG. 2, and FIG. 4 is a plan sectional view taken along the line CC of FIG.

  The L-shaped side cushioning body 14 is formed by joining two rectangular parallelepiped side cushioning bodies 14 at four corners on the bottom plate 11. When the leg portions 33 of the pellicle storage container 30 are fitted into the recesses 17 of the bottom surface buffer 18, the side cushions 14 are in contact with the four corners of the pellicle storage container 30 respectively. It is provided in a close position. The contact surface of the side buffer body 14 is planar. The side buffer body 14 is in contact with or close to the side surface of the pellicle storage container 30 and can buffer shocks and vibrations applied in the horizontal direction during transportation and transportation. The side buffer body 14 and the pellicle storage container 30 are in contact with each other so as to fit properly or close enough to have a gap of 30 mm at the maximum.

  The four bottom buffer bodies 18 are installed separately from each other with the concave portions 17 fitted to the leg portions 33 of the pellicle storage container 30 facing the top surface side. As shown in FIG. 5 which is a partial cross-sectional view of the leg 33 of the pellicle storage container 30 and the periphery of the bottom buffer 18, the bottom buffer 18 is formed by stacking two types of buffer layers having different hardnesses. The low hardness buffer layer 16 is laminated on the high hardness buffer layer 15. The four leg portions 33 projecting from the bottom surface of the pellicle storage container 30 are respectively fitted into the recesses 17 of the bottom buffer body 18 so that the pellicle storage container 30 is stably stored in the pellicle packaging box. This leg 33 is a pellicle storage container 30 that requires at least two people for a pouch for a 1220 × 1400 mm photomask and at least four people for a pellicle for a 1620 × 1780 mm photomask, preferably six or more. Is provided for transporting using a fork-type transport means, and has a height of 90 to 200 mm. The bottom buffer 18 supports the pellicle storage container 30, and absorbs and relieves vertical and horizontal impacts and vibrations caused by transportation and transportation. By stacking materials having different hardnesses, it is possible to secure a high buffering function that exhibits buffering properties from even smaller impacts while suppressing thickness, and cushions without impacting even large impacts.

  The bottom surface buffer 18 is a concave portion that has a width that is in contact with or close to the side surface of the leg portion 33 and a depth that allows the entire leg portion 33 to be inserted and that the bottom surface of the leg portion does not contact the bottom surface buffer 18. 17 and has a size and thickness sufficient to absorb vibrations and shocks during transportation and transportation. The pellicle stored in the pellicle storage container 30 is, for example, only 6 kg in the case of a 520 × 800 mm photomask pellicle, but is approximately 40 kg in the case of a 1220 × 1400 mm photomask pellicle, and further, for a 1620 × 1780 mm photomask. In the case of a pellicle, it reaches about 90 kg. Therefore, the bottom surface 34 of the pellicle storage container around the legs and the bottom buffer 18 are in contact with each other, and the load of the pellicle storage container 30 is distributed and received by the contact surface. By providing the low-hardness buffer layer 16 having a low hardness at the part that is always in contact with the bottom surface 34 of the pellicle storage container, the buffering property against a small impact is enhanced.

  For example, when a small impact is received during transportation and transportation, the impact is absorbed by the low hardness buffer layer 16 that is always in contact with the pellicle storage container bottom surface 34 and receives a load. The shock absorber layer 16 is greatly compressed by the impact, but as the upper layer is compressed, the high hardness shock absorber layer 15, which is the lower layer, starts to deform, and the shock is absorbed by the high hardness shock absorber layer 15. As a result, the bottom buffer 18 can exhibit an excellent buffering effect without causing a bottom butt that strikes the leg 33 against the bottom plate 11 by being compressed to such an extent that the buffer function is lost.

  It is preferable that the bottom buffer 18 is appropriately selected for the concave portion 17 and the overall size, thickness, hardness, and contact area depending on the weight of the pellicle storage container 30, the transportation means, the assumed impact level, and the like. Moreover, it is preferable that the size of the bottom buffer 18 is appropriately selected according to its hardness.

  The size of the bottom buffer 18 is preferably such that the length of one side is approximately in the range of 200 to 400 mm from the viewpoint of securing shear deformability in the horizontal direction.

The thickness of the bottom buffer 18 is preferably 150 to 400 mm, and the contact area with the pellicle storage container 30 is preferably 30000 to 150,000 mm ² .

  The hardness of the bottom buffer 18 is preferably an Asker C20-70 in an Asker C hardness meter which is one of durometers (spring type hardness meter) defined in SRIS0101 (Japan Rubber Association Standard).

  The concave portion 17 of the bottom buffer 18 has a width that allows the side surface of the leg portion 33 and the wall surface of the concave portion 17 to be fitted to each other, or has a gap of 20 mm at the maximum between the side surface of the leg portion 33 and the wall surface of the concave portion 17. The width is preferably close to the extent.

  Since the leg portion 33 of the pellicle storage container 30 is accurately fitted to the bottom buffer 18, the pellicle storage container 30 can be stably stored without being tilted or dropped, and can be vibrated and shocked. The pellicle storage container 30 and the pellicle can be transported and transported without being given.

  The bottom buffer 18 has a two-layer structure in which the low hardness buffer layer 16 is laminated on the high hardness buffer layer 15, and the low hardness buffer layer 16 and the pellicle storage container bottom 34 are in contact with each other. Although the bottom buffer 18 was illustrated, it is not limited to this. The structure may be a multilayer structure, or may be a structure in which the high hardness buffer layer 15 is formed on the low hardness buffer layer 16, and the bottom surface of the leg portion and the concave portion 17 of the bottom buffer body 18 are formed. The pellicle storage container bottom surface 34 and the bottom surface buffer 18 may come into contact with each other and come into contact with each other.

  As another form of the pellicle packaging box, FIG. 6 shows a partial cross-sectional view of the pellicle storage container in the vicinity of the leg portion and the bottom buffer body.

  As shown in FIG. 6 (a), the bottom buffer 18 has a high hardness buffer layer 15 formed on the low hardness buffer layer 16, and the bottom surface of the leg is in contact with the low hardness buffer layer 16. The buffer layer 15 and the pellicle storage container bottom surface 34 may be in non-contact. In this structure, since the load of the pellicle storage container 30 is received at the bottom surface of the leg portion having a small bottom area, the lower hardness buffer layer 16 as a lower layer is arranged with a large thickness. In the case of such a form, the low-hardness buffer layer 16 sinks to some extent in the initial state. When subjected to a large impact, the lower low hardness buffer layer 16 sinks further, but the pellicle storage container bottom surface 34 comes into contact with the high hardness buffer layer 15 when it sinks to some extent, and a load is applied in a large area. Therefore, a large repulsive force is generated. As a result, the bottom buffer 18 does not bottom out even with a large impact, and the same buffering effect as that shown in FIG. 5 can be obtained.

  Further, as shown in FIG. 6B, the bottom buffer 18 may be formed of a three-layer structure in which the low hardness buffer layer 16 is sandwiched between the high hardness buffer layers 15. In the case of such a form, since the thickness of the low-hardness buffer layer 16 is thin, the shock-absorbing property at a low load is slightly inferior to the form shown in FIG. The cushioning material is hard and has advantages in handling such as easy positioning when the pellicle storage container 30 is mounted. The hardness of these buffer layers may be different from the three layers. Further, it may be a multi-layered form of three or more layers.

  The depths of the concave portions 17 of these bottom surface cushions 18 may be such that all of the leg portions 33 may be inserted, or a part of the leg portions 33 may be inserted.

  Since these bottom buffer bodies 18 can obtain various buffering characteristics depending on their hardness, layer order, and contact area, the weight of the pellicle storage container 30 to be used, transportation means, and the degree of impact assumed are comprehensive. In consideration, it is preferable to select an appropriate one and use the optimum one. In particular, the hardness of the upper buffer is preferably lower than the hardness of the lower buffer.

  The material of the bottom surface buffer 18, the side surface buffer 14, and the top surface buffer 19 that cushions such shocks and vibrations has an appropriate buffering capacity, such as urethane foam, polyethylene foam, ethylene, and the like. Examples include vinyl acetate copolymer foams, ethylene-propylene-diene-methylene rubber foams, and the like.

  The pallet plate 10, the bottom plate 11, the wall material 13, and the lid 20 used for the pellicle packaging box 1 are made of a material having sufficient strength. Specific examples of the material include plastic cardboard, reinforced cardboard, aluminum plate, and aluminum honeycomb plate.

  The pellicle packaging box 1 may be provided with a block-like one such as an adjuster or other leg portion as an alternative to the caster 23.

  Examples of the present invention will be described in detail below, but the scope of the present invention is not limited to these examples.

(Example)
A pellicle packaging box 1 as shown in FIG. 1 was produced. The outer dimensions of the manufactured packaging box 1 are 2250 × 2000 × height 850 mm (including caster part).

  The pallet plate 10 has a welded structure of an aluminum alloy square pipe, and casters 23 are provided at four corners thereof. The wall material 13 was manufactured using plastic corrugated cardboard having a thickness of 12 mm, but an aluminum alloy extruded material was attached to the corners, and the aluminum alloy extruded materials could be connected in combination with each other.

On the upper surface of the pallet plate 10, a plastic corrugated cardboard bottom plate 11 having a thickness of 15 mm is attached using rivets and an epoxy adhesive, and the outer peripheral portion thereof is fitted with the wall material 13. A bottom cushioning material 18 was fixed to a predetermined position on the upper surface of the bottom plate 11 with double-sided tape. The structure of the bottom cushioning material 18 has a cross-sectional structure as shown in FIG. 5, and the concave portion 17 is provided so as to substantially fit with the leg portion 33 of the pellicle storage container 30 mounted therein. The bottom cushioning material 18 was made of foamed urethane (manufactured by Bridgestone Corporation, trade name: Everlite), and the size was 250 × 300 × height 250 mm. The low-hardness layer 16 has a height of 150 mm and an apparent density of 25 kg / m ³ , and the high-hardness layer 15 has a height of 100 mm and an apparent density of 35 kg / m ³ .

  FIG. 7A shows a plan view of the pellicle storage container 30 mounted on the bottom cushioning material 18, and FIG. 7B shows a cross-sectional view taken along the line DD. The pellicle storage container 30 is for storing a 1620 × 1780 mm mask pellicle, and includes an acrylic cover 31, an aluminum alloy tray 32, and stainless steel legs 33 through which the pellicle 70 can be seen from above. A leg 33 having a height of 100 mm is attached to the bottom of the main body having an outer size of 1940 × 1700 × height of 190 mm, and the total weight is 90 kg. A frame holding pin 75 made of SUS304 and a pin holder 74 made of ABS resin for supporting it are attached to the upper surface of the tray 32. The frame holding pin 75 is fitted and held in a hole (not shown) of the pin holder 74 and has a structure that can be inserted and removed in the axial direction. The pellicle 70 stored in the pellicle storage container 30 has, for example, an outer size of 1748 × 1526 mm and a height of 8 mm. A pellicle film 72 is bonded to the upper surface of the pellicle frame 71 with a pellicle film adhesive (not shown). A mask adhesive layer 73 and a separator (not shown) that is peeled off from the adhesive layer when the pellicle is used are provided on the lower surface of the frame 71. In the vicinity of the four corners of the outer surface of the pellicle frame 71, φ2.5 mm non-penetrating round holes (not shown) are provided. By inserting and fitting the front ends of the frame holding pins 75, the tray 32 is provided. The pellicle 70 is fixed so as not to move.

  The pellicle storage container 30 was washed with a surfactant and pure water in a Class 10 clean room, and completely dried by air drying. Thereafter, the inside of the cover 31 and the tray 32 is carefully inspected with a 400,000 lux condenser lamp in a dark room, and the remaining cleaning foreign matter that can be visually confirmed is transferred and removed with an adhesive tape. There was no state. The foreign matter on the cover 31 and the tray 32 visually confirmed at this time is approximately 10 μm or larger.

  After the foreign matter inspection, the cover 31 was carefully placed on the tray 32, and the fitting portion was sealed with an adhesive tape (not shown) without a gap. Furthermore, it was housed in an antistatic polyethylene bag (not shown) and sealed by heat sealing.

  In the gap between the pellicle storage container 30 and the wall material 13, a side cushion 14 made of urethane foam is disposed. The lid 20 is manufactured by reinforcing plastic cardboard with a thickness of 9 mm with an aluminum alloy angle, and has a size that covers the outside of the wall member 13. Furthermore, assuming a situation where the pellicle storage container 30 is violated in the packing box 1 due to extremely large shaking, an upper surface cushioning body 19 made of urethane foam is attached inside the lid body 20 just in case. And after putting the cover body 20, the whole was fastened with the fixing band 21 made from a polyamide resin.

  The pellicle packaging box 1 storing the pellicle storage container 30 as described above was reciprocated by truck transportation between about 1000 km from Takasaki City, Gunma Prefecture to Fukuoka City, Fukuoka Prefecture. At this time, forklifts could be used for loading and unloading to truck vehicles, and it was easy to work.

  After the round-trip transportation, the pellicle packaging box 1 was unpacked again, and the pellicle storage container 30 was carried into the clean room. And the foreign substance adhering to the inner side of the cover 31 and the tray 32 was reconfirmed in the dark room by the completely same process as the above.

  As a result, only one was confirmed inside the cover 31 and four was confirmed inside the tray 32, and all could be easily removed by air blow. Although the reciprocal transport was performed in the pellicle storage container 30 in which the pellicle 70 is not stored, the same result is obtained even if the pellicle 70 is stored.

(Comparative example)
A packaging box 80 having an appearance as shown in FIG. 1 and an internal cross section shown in FIG. 8 was produced. The appearance and dimensions are exactly the same as those of the pellicle packaging box 1 of the embodiment, but the structure of the bottom cushioning material used inside is different. The mounted pellicle storage container 30 was exactly the same as in the example.

The bottom cushioning material 81 is manufactured using foamed urethane (manufactured by Bridgestone Corporation, trade name: Everlite, apparent density 25 kg / m ³ ), and its outer dimensions are 1400 × 1500 × height (top) 200 mm. is there. Here, the contact portion with the pellicle storage container 30 was provided with a concave and convex process having a quadrangular pyramid shape and a depth of about 30 mm as shown in the partially enlarged view of FIG. All members other than the bottom cushioning material 81 have the same configuration as in the above embodiment.

  The packaging box 80 was subjected to a transportation test in exactly the same steps as in the example, and the same inspection method was used to confirm an increase in foreign matter inside the pellicle storage container. As a result, 12 foreign objects were confirmed inside the cover 31 and 34 foreign objects inside the tray 32. Most of the foreign matters could be removed by air blow, but some of them were larger than 50 μm, and it was difficult to use as a means for transporting the pellicle.

  The packaging box for pellicle of the present invention accommodates a pellicle for lithography, particularly a large pellicle used for liquid crystal production, which is used as a dust prevention when manufacturing semiconductor devices, printed boards or liquid crystal displays. Used to store and / or transport existing containers.

  1 is a packing box for pellicle, 10 is a pallet plate, 11 is a bottom plate, 12 is an edge, 13 is a wall material, 14 is a side buffer, 15 is a high hardness buffer layer, 16 is a low hardness buffer layer, and 17 is a recess. , 18 is a bottom buffer, 19 is a top buffer, 20 is a lid, 21 is a fixing band, 22 is a handle, 23 is a caster, 30 is a pellicle storage container, 31 is a cover, 32 is a tray, and 33 is a leg. , 34 is the bottom surface of the pellicle storage container, 70 is the pellicle, 71 is the pellicle frame, 72 is the pellicle film, 73 is the mask adhesive layer, 74 is the pin holder, 75 is the frame holding pin, 80 is the packing box, 81 is the bottom cushioning material, A -A, BB, CC, DD are cross-sectional lines.

Claims (4)

A packaging box for storing and / or transporting a pellicle storage container that stores at least one pellicle having a side length exceeding 1000 mm,
A plurality of shock absorbers each having a recess for inserting a plurality of legs projecting from the outer bottom surface of the pellicle storage container are separately attached to the inner bottom surface of the packaging box ,
The recess has a depth that prevents the bottom of the leg from contacting the bottom buffer of the recess when the leg is inserted and the outer bottom contacts the top of the buffer. Packing box.   The pellicle packaging box according to claim 1, wherein the buffer body is formed by laminating a plurality of layers having different hardnesses.   The pellicle packaging box according to claim 2, wherein the buffer has a two-layer structure, and the hardness of the lower layer is higher than the hardness of the upper layer.   Since at least four legs or wheels are attached to the outer bottom surface of the packaging box, the gap between the outer bottom surface and the floor surface is at least 100 mm, and the four side surfaces of the packaging box that forms a rectangular parallelepiped. The pellicle packaging box according to claim 1, wherein at least one of the wall materials is detachable.

Images