CN102201352B - Trolley for transporting receiving container for dustproof thin film component - Google Patents
Trolley for transporting receiving container for dustproof thin film component Download PDFInfo
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- CN102201352B CN102201352B CN2011100713344A CN201110071334A CN102201352B CN 102201352 B CN102201352 B CN 102201352B CN 2011100713344 A CN2011100713344 A CN 2011100713344A CN 201110071334 A CN201110071334 A CN 201110071334A CN 102201352 B CN102201352 B CN 102201352B
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- container kit
- pellicle container
- mounting table
- film component
- transporting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67796—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The invention provides a receiving container for a dustproof thin film component capable of receiving and safely transporting a large-scale dustproof thin film component and a trolley for transporting the same. A receiving container for a dustproof thin film component 10 comprises: a receiving container body for a dustproof thin film component 11 used for supporting the dustproof thin film component; a cover body 12 in a tabling in the opening part of the receiving container body for a dustproof thin film component 11 via the outer periphery and capable of receiving the dustproof thin film component between the cover body 12 and the receiving container body for a dustproof thin film component 11; and six foot parts 13 disposed at the bottom of the receiving container body for a dustproof thin film component 11. The foot parts 13 are constructed to be in a tabling at a rotatable mounting table of a transporting device for transporting a receiving container for a dustproof thin film component.
Description
Technical field
The present invention relates in the manufacture process of the semiconductor device of large scale integrated circuit, very lagre scale integrated circuit (VLSIC) etc. or LCD panel; the accommodating container of the dust-proof pellicle for lithography that uses as the dust cover of photomask or reticle mask, and the transporting of Pellicle container kit that is used for transporting dustproof film component used chassis.
Background technology
When the semiconductor device of making large scale integrated circuit, very lagre scale integrated circuit (VLSIC) etc. or LCD panel; the exposure that sees through photomask or reticle mask etc. is with raw sheet (being referred to as in this manual photomask); exposure light is shone semiconductor wafer or liquid crystal with on the raw sheet; thereby the pattern of transfer printing photomask, the pattern of formation semiconductor device or liquid crystal display.
Therefore, here there is such problem, namely when having adhered to the foreign matters such as dust on the photomask, owing to being attached to the foreign matters such as the lip-deep dust of photomask, can make the light of exposure usefulness be reflected or absorb, so not only can make and be transferred in semiconductor wafer or liquid crystal deforms with the pattern on the raw sheet or the marginal portion of pattern becomes not distinct, but also can cause the background stolen goods dirty, size, quality and appearance damage, cause toward semiconductor wafer or liquid crystal undesirable with the pattern of transfer printing on the raw sheet, thereby make the hydraulic performance decline of semiconductor device or liquid crystal display, fabrication yield reduces.
For preventing this problem, semiconductor wafer or liquid crystal carry out in dust free room with the exposure of raw sheet.But even so, be difficult to also prevent fully that foreign matter is attached to the photomask surface.Therefore normally adopt a kind of like this formation, namely in the installation of the surface of photomask exposure light is had dust cover high permeability, that be called as dustproof film component, then semiconductor wafer or liquid crystal are exposed with raw sheet.
Usually; dustproof film component; to paste dustproof film by the face on one side of dustproof film component framework; and form in order to adhering to the adhesive linkage of photomask at the face of the another side of dustproof film component framework, and separating layer that this adhesive linkage of protection uses or separation unit are set and make at adhesive linkage.This dustproof film is to be made by the cellulosic resins such as the nitrocellulose that exposure light is had high permeability, cellulose acetate or fluororesin etc.This dustproof film component framework is formed by aluminium, stainless steel, polyethylene etc.The method that this dustproof film is pasted on the dustproof film component framework is: easy to be broad dose of the face coating dustproof film material on one side of dustproof film component framework, and paste after described dustproof film is air-dry, perhaps utilize the adhesive of acrylic resin, epoxy resin or fluororesin etc. to paste.Described adhesive linkage is to consist of (patent documentation 1,2,3 and 4) by institutes such as polybutene resin, polyvinyl acetate resins, acrylic resin, silicones.
To be installed in by the dustproof film component of above structure the surface of photomask, when semiconductor wafer or liquid crystal are exposed with raw sheet, because the foreign matter of dust etc. is attached to the surface of dustproof film component, rather than directly be attached to the surface of photomask, as long as expose so will be formed in focus on the pattern of photomask, just can get rid of the impact of the foreign matters such as dust.
In recent years, along with the maximization of liquid crystal display, liquid crystal also maximizes increasingly with photomask and dustproof film component, has brought into use the length of side to surpass the very big type dustproof film component of 1000mm.
Patent documentation 1: Japanese kokai publication sho 58-219023 communique
Patent documentation 2: No. 4861402 specification of United States Patent (USP)
Patent documentation 3: Japanese Patent Publication 63-27707 communique
Patent documentation 4: Japanese kokai publication hei 7-168345 communique
Along with the maximization of dustproof film component, also must maximize in order to the accommodating container of taking in dustproof film component, and based on the purpose of the rigidity that improves accommodating container, the weight of Pellicle container kit is also in remarkable increase.For example, only has 6kg although take in the weight of the accommodating container of the dustproof film component that the photomask of 520mm * 800mm uses, but the weight of the accommodating container of the dustproof film component that the photomask of taking in 1220mm * 1400mm is used is about 40kg, and the weight of taking in the accommodating container of the dustproof film component that the photomask of 1620mm * 1780mm uses reaches 80kg unexpectedly.
Therefore, when transporting the accommodating container of so large-scale dustproof film component, especially when transporting the accommodating container of taking in the super-huge dustproof film component that the length of side surpasses 1000mm, because the problem of weight or size, therefore manually to have transported its difficulty.For example, during the container of the dustproof film component of using at the photomask that transports 1220mm * 1400mm, need at least 2 people; During the container of the dustproof film component of using at the photomask that transports 1620mm * 1780mm, need at least 4 people, be more preferred from 6 people.
Like this, take in this type of large-scale dustproof film component accommodating container transport operation, not only workload is very large, and in transporting the way, if Pellicle container kit falls from transporting machine, might cause great damage to the operating personnel, so the operation of transporting of Pellicle container kit is accompanied by very large danger.
Also have a problem to be, when transporting and depositing this type of large-scale Pellicle container kit with level, need spacious path, larger door and the spacious larger space such as place of depositing.This problem, although can be by the state of Pellicle container kit with vertical stand-up be transported and deposits and solve, but in fact, the Pellicle container kit vertical stand-up of the 80kg that weighs is transported and deposits, be accompanied by very large staff dangerous and that need numerous, so and unrealistic.
In order to solve described problem, although can use the suspention machinery of chain block, crane etc., but in order to use this type of suspention machine to transport Pellicle container kit, not only need to be at this machinery of installing everywhere of conveying channel, and can only carry out operation in the place that is provided with suspention machinery, very inconvenience.
In addition, also has a problem, compared with transport and deposit Pellicle container kit with level, when transporting and depositing with the vertical stand-up state, the position that grips of Pellicle container kit seldom, although need more staff, many people add that to transport operation very difficult.The weight increasing that the people shares causes in transporting the way as a result, Pellicle container kit overturning, or the danger increase that falls from transporting machine.
As mentioned above, because transport relatively difficulty of large-scale Pellicle container kit with the vertical stand-up state, so usually transport large-scale Pellicle container kit with level.
Therefore, the purpose of this invention is to provide and a kind ofly can transport safely and can take in the length of side at least one limit greater than the Pellicle container kit of the large-scale dustproof film component of 1000mm.
Simultaneously, another object of the present invention, provide transporting of a kind of Pellicle container kit and use chassis, it can be safely and transports the length of side of taking at least one limit with less staff greater than the Pellicle container kit of the large-scale dustproof film component of 1000mm.
Summary of the invention
Described purpose of the present invention realizes by a kind of Pellicle container kit, and described Pellicle container kit comprises: Pellicle container kit body, carrying have at least the length of side on one side to surpass the dustproof film component of 1000mm; Lid is embedded in the peristome of described Pellicle container kit body by its outer rim, described dustproof film component can be accommodated between described lid and the described Pellicle container kit body; And foot, have 4 at least, and they are arranged on the bottom of described Pellicle container kit body each other with interval; It is characterized in that: described foot can be embedded in the rotating mounting table of the conveyer that transports Pellicle container kit.
According to the present invention, because the foot of Pellicle container kit body can be embedded in the rotating mounting table of the conveyer that transports Pellicle container kit, therefore can be with less number, safety the and easily Pellicle container kit that assembles being fixed on the conveyer of Pellicle container kit.
Described purpose of the present invention, also be achieved by following mode, namely utilize transporting with chassis of a kind of Pellicle container kit to transport Pellicle container kit, described Pellicle container kit comprises: Pellicle container kit body, carrying have at least the length of side on one side to surpass the dustproof film component of 1000mm; Lid is embedded in the peristome of described Pellicle container kit body by its outer rim, described dustproof film component can be accommodated between described lid and the described Pellicle container kit body; And foot, have 4 at least, and they are arranged on the bottom of described Pellicle container kit body each other with interval.Transporting with chassis of described Pellicle container kit comprises: mounting table, supported by rotatable rotating shaft, and can load described Pellicle container kit on it; And the mounting table fixture, can be with the fixing described mounting table of angle arbitrarily; Described Pellicle container kit transports with chassis and is characterised in that: be provided with the connecting portion that the described foot of described Pellicle container kit can be chimeric in described mounting table.
According to the present invention, because at the connecting portion that is provided with the foot that can chimericly be located at Pellicle container kit body bottom with the mounting table of chassis that transports of Pellicle container kit, so can easily Pellicle container kit be connected to mounting table.And, can be with the fixing mounting table fixture of mounting table of angle arbitrarily because the transporting of Pellicle container kit has with chassis, so can be according to the duct width that transports Pellicle container kit or parking space, set the angle of the mounting table that connects Pellicle container kit, therefore can safety and use less staff to transport and take in and have the length of side on one side at least greater than the Pellicle container kit of the large-scale dustproof film component of 1000mm.
In preferred example of the present invention, the location of described rotating shaft will make its center of gravity when being equipped on described Pellicle container kit on the described mounting table.
According to preferred example of the present invention, because rotating shaft is located in the position of the center of gravity when being equipped on Pellicle container kit on the mounting table, when therefore even the operating personnel only has a people, also can be by rotating mounting table around rotating shaft, easily with arbitrarily angled fixedly Pellicle container kit, and transport Pellicle container kit.
In preferred example of the present invention, in the bottom of transporting with chassis, the wheel with damping of shocks mechanism is housed.
By the present invention, can provide a kind of can taking in to have the length of side on one side at least greater than the Pellicle container kit of the large-scale dustproof film component of 1000mm and energy safe transport.
Simultaneously, by the present invention, can provide transporting of a kind of Pellicle container kit to use chassis, it can be safely and just can transport to take in less staff and have the length of side on one side at least greater than the Pellicle container kit of the large-scale dustproof film component of 1000mm.
Description of drawings
Fig. 1 is the general view of the Pellicle container kit under the preferred example of the present invention.
Fig. 2 is the diagrammatic elevational view of Pellicle container kit shown in Figure 1.
Fig. 3 is the summary right view of Pellicle container kit shown in Figure 1.
Fig. 4 is the diagrammatic elevational view of using chassis of transporting of having carried Pellicle container kit.
Fig. 5 is that expression allows Pellicle container kit with respect to the horizontal plane with the Pellicle container kit of the 75 angle heeling conditions of spending and the diagrammatic elevational view of transporting the usefulness chassis.
Fig. 6 is that expression allows Pellicle container kit with respect to the horizontal plane with the Pellicle container kit of the angle heeling conditions of 75 degree and transport summary right view with chassis.
Embodiment
Fig. 1 is the general view of the Pellicle container kit of preferred example of the present invention, and Fig. 2 is its front view, and Fig. 3 is its right view.
As shown in Figure 1 to Figure 3, the Pellicle container kit 10 in this example has Pellicle container kit body 11 and the lid 12 of taking in dustproof film component.
It is constructed as follows: dustproof film component is loaded on Pellicle container kit body 11, be embedded in the interior perimembranous of Pellicle container kit body 11 by the outer edge with lid 12, dustproof film component is accommodated within the Pellicle container kit 10.
In the bottom of Pellicle container kit body 11, by bolt (not shown) 6 foots 13 are housed.
Pellicle container kit body 11, although can be by making with the resin vacuum forming of PMMA (polymethyl methacrylate), ABS (acrylonitrile-styrene-butadiene copolymer compound), PC (Merlon) etc., but more preferably process by modes such as punch forming, castings with aluminium alloy, magnesium alloy etc., and impose suitable surface treatment and make.
8 handles that can grip 14 are housed on the Pellicle container kit body 11,4 handles that can grip 15 also are housed on the lid 12. Handle 14,15 is formed by synthetic resin or metal.
As in order to form the material of foot 13, except the metals such as aluminium alloy, iron and steel, stainless steel, also can use the engineering resin of POM (polyformaldehyde), PA (polyamide) etc., but preferably have anti-static function.As the processing method of metal foot 13, except taking from the bulk material cut, also can adopt casting processing, panel beating, panel beating welding processing etc.And the processing method of resinous foot 13, can take ejection formation, vacuum forming, sheet material bonding, from bulk material cut etc.As material and the processing method of foot 13, can suitably select to have material and the method for desired intensity, dimensional accuracy, but preferably when cleaning inside can not accumulate cleaning fluid.
Fig. 4 is the diagrammatic elevational view of using chassis of transporting of carrying Pellicle container kit 10.
As shown in Figure 4, transport bottom with chassis 20 and have the pallet section 21 that wheel that can free conversion direction has been installed, be provided with pillar 22 at the two ends of pallet section 21.
At this, impacted and adhered to foreign matter in transporting the way in order to prevent Pellicle container kit 10, be provided with not shown damping of shocks mechanism at wheel 25.
Being constructed as follows of Pellicle container kit 10: be embedded in by the foot 13 with Pellicle container kit 10 and be installed in foot's bearing 23 of transporting with on the mounting table 24 of chassis 20, Pellicle container kit 10 is equipped on transports with on the chassis 20.Therefore, the foot 13 of Pellicle container kit 10 and foot's bearing 23 of transporting usefulness chassis 20 are accurately positioned, so that the foot 13 of Pellicle container kit 10 is embedded in foot's bearing 23.Chimeric form can have various designs, but it is desirable to comparatively consider that following situation designs, that is: be easy to the foot 13 of Pellicle container kit 10 is inserted foot's bearing 23 from top; Even when tilting, foot's bearing 23 also can positively keep the firm of foot 13; Be easy to clean.
As mentioned above, because have following formation: be embedded in by the foot 13 with Pellicle container kit 10 and be installed in foot's bearing 23 of transporting with on the mounting table 24 of chassis 20, Pellicle container kit 10 is equipped on transports with on the chassis 20, so Pellicle container kit body 11 and lid 12 degree of freedom in design increases, handle 14,15 can be arranged at desired position, and, be easy to arrange in order to the fixing functional features such as latch closure of lid 12.
Support the rotating shaft 26 of mounting table 24, be arranged at Pellicle container kit 10 is equipped on the position of centre of gravity that transports with on the mounting table 24 of chassis 20 time.Therefore, can with being equipped on the Pellicle container kit 10 that transports with on the mounting table 24 of chassis 20, tilt between the plumbness from level.
As shown in Figure 4, when heeling condition, in order to prevent Pellicle container kit 10 overturnings or to fall, be provided with the anti-locking mechanism 27 of coming off of rotatable bar type structure transporting with chassis 20.
Fig. 5 is that expression allows Pellicle container kit 10 with respect to the horizontal plane with the Pellicle container kit 10 of the 75 angle θ heeling conditions of spending and the diagrammatic elevational view of transporting usefulness chassis 20, and Fig. 6 is its right view.
As implied above, because support the rotating shaft 26 of mounting table 24 to be arranged at Pellicle container kit 10 is equipped on the position of centre of gravity that transports with on the mounting table 24 of chassis 20 time, so only 1 operation personnel just can easily make Pellicle container kit 10 tilt.In this example, also be provided with angle fixed mechanism 28, so that can be with the fixing mounting table 24 in angle of inclination arbitrarily.In this example, being constructed as follows of angle fixed mechanism 28: have slotted hole 28a and bolt 28b, by bolt 28b is locked slotted hole 28a so that can be with respect to the horizontal plane with the angle of arbitrarily angled setting mounting table 24.
Preferably Pellicle container kit 10 is equipped on described transporting when transporting on the chassis 20, allow the mounting table 24 of Pellicle container kit 10 tilt, make its angle θ with respect to the horizontal plane become 60 degree to 80 degree, transport and deposit Pellicle container kit 10.
Namely, although from joint space-efficient angle, allow mounting table 24 be in plumbness, make the mounting table 24 angle θ with respect to the horizontal plane of mounting Pellicle container kit 10 become 90 degree, transport and deposit Pellicle container kit 10 for preferred, but in such cases, the possibility of overturning increases, and on the safety problem is arranged.Another problem is, angle θ with respect to the horizontal plane is larger for mounting table 24, be mounting table 24 attitudes more close to the vertical shape, horizontal width then, being about to load the width that the mounting table 24 of Pellicle container kit 10 projects on the horizontal plane diminishes, though can reduce like this space of transverse direction, because the length of above-below direction is elongated, be difficult to the part that is restricted by superjacent air spaces such as door or Air dust purifiers simultaneously.In addition, if reduce to load the transverse width of the mounting table 24 of Pellicle container kit 10, when the transverse direction space is reduced, the transverse width of supporting the pallet section 21 of mounting table 24 by pillar 22 is also needed to do same reducing, but the width of pallet section 21 is less, transport with chassis 20 more unstablely, so from then on, allow the mounting table 24 also be conditional close to plumbness.Therefore, when Pellicle container kit 10 being equipped on when transporting on transporting with chassis 20, preferred situation, to allow the mounting table 24 of mounting Pellicle container kit 10 tilt, make its angle θ with respect to the horizontal plane become 60 degree to 80 degree, transport and deposit Pellicle container kit 10.
According to this example, because Pellicle container kit 10, to be embedded in by the foot 13 with Pellicle container kit 10 to be installed in foot's bearing 23 of transporting with on the mounting table 24 of chassis 20, use on the chassis 20 and be equipped on to transport, so can be in the desired position of the peripheral part of Pellicle container kit 10, the grip part that installing handle 13 operating personnels such as grade can grip, even therefore use as the photomask of taking in 1620 * 1780mm, Pellicle container kit 10 with the 80kg weight that weighs, under several operation personnel's together cooperation, also can easily Pellicle container kit 10 be equipped on and transport with on the mounting table 24 of chassis 20.
And, according to this example, because support the rotating shaft 26 of mounting table 24 to be arranged on Pellicle container kit 10 is equipped on the position of centre of gravity that transports with on the mounting table 24 of chassis 20 time, so, 1 operation personnel only, Pellicle container kit 10 is tilted, because in the bottom of transporting with the pallet section 21 of chassis 20, installed can free conversion direction wheel 25, even use as the photomask of taking in 1620 * 1780mm, Pellicle container kit 10 with the 80kg weight that weighs, 1 operation personnel just can be safely and easily transport Pellicle container kit 10.
In addition, according to this example, because the mounting table 24 of Pellicle container kit 10 is tilted, make its angle θ with respect to the horizontal plane become 60 degree to 80 degree, thereby transport safely Pellicle container kit 10, therefore transport the required duct width of Pellicle container kit 10, when transporting Pellicle container kit 10 with level below 50%.Simultaneously, required space when depositing Pellicle container kit 10, when depositing Pellicle container kit 10 with level below 50%, can realize save space, and, because in the bottom of transporting with the pallet section 21 of chassis 20, installed can free conversion direction wheel 25, so in the process of preserving Pellicle container kit 10, if when needing mobile Pellicle container kit 10, can easily be moved.
Below, for clear and definite effect of the present invention, provide embodiment and comparative example.
Embodiment
Make Fig. 1 to the Pellicle container kit 10 of shape shown in Figure 3 in order to the below legal system.
Pellicle container kit body 11, be with aluminium alloy AC4C after sand casting, with abrasive cloth fine finishining is carried out on its surface again.For peripheral part section and carry the face of dustproof film component, carry out cut with milling machine, and take the periphery of Pellicle container kit 10 as benchmark, process the screw hole that foot's 13 usefulness are installed.
After above machining finished, the casting flaws such as the blowhole of effects on surface were filled up with putty and are carried out fine finishining, and the coating conductive coating paint imposes the sintering drying with baking oven.
Next, be that PMMA (polymethyl methacrylate) plate of 3mm imposes after the antistatic application to thickness, with its vacuum forming, make lid 12.The periphery of lid 12 is carried out cut with the NC router, makes its size identical with the peripheral dimension of Pellicle container kit body 11.
The lid 12 of so making is installed in the Pellicle container kit body 11 that 6 foots 13 are equipped with in the bottom surface, finishes the making of Pellicle container kit 10.The weight of the Pellicle container kit 10 of so making is about 80kg.
Moreover Fig. 4 uses chassis 20 to shown in Figure 6 in order to load and to transport transporting of Pellicle container kit 10, makes with the following method.
By the mounting table 24 that rotating shaft 26 is supported, be that the hollow extrusion sectional material of aluminium alloy is also assembled with the bolt snapping.At both allocations of mounting table 24, foot's bearing 23 of the foot 13 that is embedded in Pellicle container kit 10 is housed.Here, foot's bearing 23 is that conductivity MC nylon cut is made.And, for the surface of the mounting table 24 that prevents from contacting with Pellicle container kit 10 produces scar, dust, installed slim antistatic with PVC (polyvinyl chloride) plate.
Moreover the bar type anti-locking mechanism 27 that comes off has been installed in 2 positions around mounting table 22.Its structure is: centered by the rotating shaft of root, in rotating in 0 degree to the scope between 90 degree on the horizontal direction.
In addition, near the pillar 22 the rotating shaft 26, be provided with the angle fixed mechanism 28 that the bolt 28b by the M12 that has configured handle consists of.Being constructed as follows of angle fixed mechanism 28: by bolt 28b being locked at the slotted hole 28a that is located on the pillar 22, the angle of mounting table 24 can be fixed on desired angle.
In addition, mobile carry dustproof film spare accommodating container 10 transport with chassis 20 time, the width of required path, even if slightly stay a little nargin, also only about 1500mm.
Comparative example
To keep levels with the dustproof film spare accommodating container 10 that the fully same method of embodiment is made, and be transported by 8 operation personnel.Each operating personnel grips the handle 14 on the dustproof film spare accommodating container body 11, transports dustproof film spare accommodating container 10.
The weight that each operating personnel shares is about 10kg, although heavy a little, can not counteract transporting operation.
But, the width that transports dustproof film spare accommodating container 10 required paths is measured, its result's demonstration, the width of required path is more than the 2500mm.If consider the nargin of safety work, the width of required path is about 3000mm.
The present invention is not limited in above example and embodiment, can do various changes within the scope that claim is put down in writing, and must not say, these all within the scope of the present invention.
For example, in described example, in the bottom of dustproof film spare accommodating container body 11 6 wheels 25 are housed, but the number of wheel 25, can decide according to the rigidity of dustproof film spare accommodating container 10, be not to fill 6 wheels 25 in the bottom of dustproof film spare accommodating container body 11,4 wheels be installed at least got final product.
Moreover in described example, the anti-locking mechanism 27 that comes off has rotatable bar type mechanism, but the anti-locking mechanism 27 that comes off not is necessarily to have rotatable bar type mechanism, can select the anti-locking mechanism of coming off of other structures yet.
Also have, in described example, angle fixed mechanism 28 is by bolt 28b being locked at the slotted hole 28a that is formed at pillar 22, being fixed as desired angle with the angle with mounting table 24.But angle fixed mechanism 28 is not necessarily to have following formation, namely by bolt 28b being locked at the slotted hole 28a that is formed at pillar 22, is fixed as desired angle with the angle with mounting table 24.In order the angle of mounting table 24 to be fixed as desired angle, can be by forming fixing hole at pillar 22, and latch inserted in the fixing hole, thereby the angle of mounting table 24 is fixed as desired angle etc., can adopt the angle fixed mechanism of various structures.
In addition, in described example, in dustproof film spare accommodating container 10, impacted and adhere to foreign matter in order to prevent dustproof film spare accommodating container, wheel 25 is provided with not shown damping of shocks mechanism.But wheel 25 is not to establish damping of shocks mechanism, in the bottom of transporting with the pallet section 21 of chassis 20, common wheel can be installed yet.
Symbol description
10: Pellicle container kit
11: the Pellicle container kit body
12: the lid of Pellicle container kit
13: the foot of Pellicle container kit
14: handle
15: handle
20: transport and use chassis
21: pallet section
22: pillar
23: foot's bearing
24: mounting table
25: wheel
26: rotating shaft
27: anti-locking mechanism comes off
28: the angle fixed mechanism
28a: slotted hole
28b: bolt
Claims (3)
1. transporting of a Pellicle container kit used chassis,
Described Pellicle container kit comprises:
It is the above dustproof film component of 1000mm that Pellicle container kit body, its carrying have the length of side on one side at least;
Lid is embedded in the peristome of described Pellicle container kit body by its outer rim, described dustproof film component can be accommodated between described lid and the described Pellicle container kit body; And
Foot has 4 at least, and they are arranged on the bottom of described Pellicle container kit body each other with interval;
Transporting with chassis of described Pellicle container kit comprises:
Mounting table is supported by rotatable rotating shaft, can load described Pellicle container kit on it; And
The mounting table fixture can be with arbitrarily angled fixing described mounting table;
Described Pellicle container kit transports with chassis and is characterised in that, is provided with the connecting portion that the foot of Pellicle container kit can be chimeric in described mounting table.
2. transporting of Pellicle container kit as claimed in claim 1 used chassis, it is characterized in that:
Center of gravity when the location of described rotating shaft will make it pass through to carry described Pellicle container kit on mounting table.
3. transporting of Pellicle container kit as claimed in claim 1 or 2 used chassis, it is characterized in that:
Wheel with damping of shocks mechanism is housed in the bottom of described chassis.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-067952 | 2010-03-24 | ||
| JP2010067952A JP2011203309A (en) | 2010-03-24 | 2010-03-24 | Pellicle storage container and truck for conveying pellicle storage container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102201352A CN102201352A (en) | 2011-09-28 |
| CN102201352B true CN102201352B (en) | 2013-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100713344A Active CN102201352B (en) | 2010-03-24 | 2011-03-22 | Trolley for transporting receiving container for dustproof thin film component |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2011203309A (en) |
| KR (1) | KR20110107266A (en) |
| CN (1) | CN102201352B (en) |
| HK (1) | HK1158820A1 (en) |
| TW (1) | TW201132557A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5684752B2 (en) * | 2012-03-29 | 2015-03-18 | 信越化学工業株式会社 | Pellicle storage container |
| CN102897409A (en) * | 2012-09-20 | 2013-01-30 | 怀远县祥源新型建材有限公司 | Brick conveying rack |
| CN107878899B (en) * | 2017-11-03 | 2019-09-20 | 北京特种机械研究所 | A kind of adaptive castor turnover mechanism of packaging cassette carrier |
| CN107839981A (en) * | 2017-11-22 | 2018-03-27 | 金陵科技学院 | A kind of portable damping transport cylinder of anticollision |
| CN110092243B (en) * | 2019-03-14 | 2019-11-19 | 东阳市空想智能科技有限公司 | A kind of vehicle dust protector storage box |
Citations (3)
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| CN101013270A (en) * | 2006-01-31 | 2007-08-08 | Hoya株式会社 | Photomask substrate container unit, photomask substrate transportation and exposal method |
| CN101086612A (en) * | 2006-06-09 | 2007-12-12 | 信越化学工业株式会社 | Protection film components containing vessel and manufacturing method thereof |
| CN101111802A (en) * | 2005-01-27 | 2008-01-23 | 旭化成电子材料元件株式会社 | Macrotype light shield protective film accepting container |
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| JPH1124240A (en) * | 1997-07-07 | 1999-01-29 | Shin Etsu Chem Co Ltd | Pellicle housing method and pellicle housing container |
| JP2004292080A (en) * | 2003-03-26 | 2004-10-21 | Dainippon Screen Mfg Co Ltd | Large-size substrate transport device |
| JP2004361705A (en) * | 2003-06-05 | 2004-12-24 | Asahi Kasei Electronics Co Ltd | Method for housing large pellicle |
| JP4373316B2 (en) * | 2004-10-14 | 2009-11-25 | ミライアル株式会社 | Clamp device for thin plate support container |
| JP4667018B2 (en) * | 2004-11-24 | 2011-04-06 | ミライアル株式会社 | Reticle transfer container |
| JP4478557B2 (en) * | 2004-12-08 | 2010-06-09 | 大日本印刷株式会社 | Large pellicle, pellicle transport method, pellicle case, and pellicle transfer device |
| JP4855885B2 (en) * | 2006-09-29 | 2012-01-18 | Ｈｏｙａ株式会社 | Mask case, mask cassette, pattern transfer method, and display device manufacturing method |
| JP5269438B2 (en) * | 2007-03-13 | 2013-08-21 | 旭化成イーマテリアルズ株式会社 | Protective film for large pellicle and storage method for large pellicle |
| JP5263587B2 (en) * | 2008-08-07 | 2013-08-14 | Ｔｄｋ株式会社 | Closed container lid opening and closing system and lid opening and closing method |
| JP2010060992A (en) * | 2008-09-05 | 2010-03-18 | Asahi Kasei E-Materials Corp | Large pellicle structure and large pellicle housing structure |
| JP2011099946A (en) * | 2009-11-05 | 2011-05-19 | Lasertec Corp | Method for attaching pellicle |
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2010
- 2010-03-24 JP JP2010067952A patent/JP2011203309A/en active Pending
- 2010-12-28 KR KR1020100136570A patent/KR20110107266A/en not_active Application Discontinuation
-
2011
- 2011-03-21 TW TW100109545A patent/TW201132557A/en unknown
- 2011-03-22 CN CN2011100713344A patent/CN102201352B/en active Active
- 2011-11-30 HK HK11112979.7A patent/HK1158820A1/en not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101111802A (en) * | 2005-01-27 | 2008-01-23 | 旭化成电子材料元件株式会社 | Macrotype light shield protective film accepting container |
| CN101013270A (en) * | 2006-01-31 | 2007-08-08 | Hoya株式会社 | Photomask substrate container unit, photomask substrate transportation and exposal method |
| CN101086612A (en) * | 2006-06-09 | 2007-12-12 | 信越化学工业株式会社 | Protection film components containing vessel and manufacturing method thereof |
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| Title |
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| JP特开2008-87811A 2006.04.17 |
Also Published As
| Publication number | Publication date |
|---|---|
| HK1158820A1 (en) | 2012-07-20 |
| CN102201352A (en) | 2011-09-28 |
| JP2011203309A (en) | 2011-10-13 |
| KR20110107266A (en) | 2011-09-30 |
| TW201132557A (en) | 2011-10-01 |
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