201128100 六、發明說明： L發明戶斤屬之技術領域3 發明領域 本發明係有關於一種氣密密封裝置及一種具有該密封 裝置之顯示裝置製造系統。 I：先前技術3 發明背景 通常，一個顯示裝置包括一個供影像顥示用的液晶面 板和一個用於把驅動訊號施加到該液晶面板的驅動器。該 液晶面板包括一個上基板、一個下基板、和一個置於互相 連接之該上基板與該下基板之間的液晶層。 近期，由於顯示裝置之孔徑與基板的尺寸增加，顯示 裝置製造系統在尺寸方面變大。 為了製造顯示裝置，必須有一個專屬的顯示裝置製造 系統和一個能夠在從低真空到超高真空之大真空範圍中運 作之像是氣密密封溝閥般的氣密密封裝置。 然而，如果供顯示裝置用的基板被供應到一製造系統 而一閥是受控制關上的話，一個閥片是難以均稱地變成與 一殼體入口的邊緣接觸。為此，一個普通的氣密密封裝置 是被構築來對一運作部份施加過度的壓力俾可變成緊密接 觸。在這情況中，在一閥片與一殼體入口之間的過度緊密 接觸會使那些組件受損及變形，導致故障的結果。 【發明内容】 發明概要 3 201128100 本發明之目的是為提供一種能夠藉由氣壓或液壓的使 用以改進氣密密封性能來驅動一閥片的氣密密封裝置。 本發明之另一目的是為提供一種能夠獨立地驅動一個 用於隔離—第—真空室之閥片與-個用於隔離-第二真空 室之閥片的氣密密封裝置。 根據本發明之特徵，一種氣密密封裝置包括一個在一 側具有-第-人口和在另i具有—第二人口的殼體、置 於該殼體内部且分別與封閉該第―人口和該第二入口 的第閥片和一第二閥片、一個置於該殼體内部的支承 面板個°又於该支承面板之一側且水平地移動該第一閥 片的第/飞虹單元、一個置於該支承面板之另一側且水平 也移動。亥第_閥片的第二汽紅單元、及至少—個連接到該 支承面板且上下移動該第__閥片彳_動單元。 s亥至少-個驅動單元可以包括一個供應第一汽缸單元 氣麼或者液壓的第-驅動單元、及—個供應第二汽缸單元 氣壓或者液壓的第二驅動單元。 該殼體可以具有該第一閥片和第二閥片在裡面可上下 移動的内部儲存空間，該第-入口可以是-第-真空室的 入口 ’而該第二人口可以是—第二真空室的入口。 U第人α和第二人σ成緊密接觸的密封元件可 以被安裝到該第一閥片和第二閥片。 Θ第可以包括—個固㈣該支承面板之— 側的第-汽紅本體，和—個置於該第—汽缸本體内部俾可 線性地移動、把該第-汽缸單元之内部分割成—第一空間 201128100 與一第二空間、及連接到該第一閥片的第一可移動元件。 一條把空氣供應到第一空間及把空氣從第一空間排出 的第一管線及一條把空氣供應到第二空間及把空氣從第二 空間排出的第二管線是可以形成在該第一汽缸本體内。 該第二汽缸單元可以包括一個固定到該支承面板之另 一側的第二汽缸本體，和一個置於該第二汽缸本體内部俾 可線性移動、把該第二汽缸單元的内部分割成一第三空間 與一第四空間、並連接到該第二閥片的第二可移動元件。 一條把空氣供應到第三空間及把空氣從第一空間排出 的第三管線與一條把空氣供應到第四空間及把空氣從第四 空間排出的第四管線是可以形成在該第二汽缸本體内。 該至少一個驅動單元中之每一者可以包括：一個具有 被供應有氣壓之内部空間的本體；一個置於該本體110内俾 可移動並把該内部空間分割成一第一腔室與一第二腔室的 活塞；一個連接到該活塞120、從該本體伸出、固定到該支 承面板、並且在内部具有一第一通道與一第二通道的活塞 桿130，該第一通道是連接到該第一空間而該第二通道是連 接到該第二空間；及一個置於該活塞桿内部且在内部具有 一第三通道與一第四通道的導管，該第三通道被置放俾可 線性地移動且是連接到該第一通道而該第四通道是連接到 該第二通道。 一個上蓋可以形成在該本體的一側，一個下蓋可以形 成在該本體的另一側，一個用於把空氣供應到該第二腔室 及將空氣從該第二腔室排放的第一入氣口是可以形成在該 201128100 上蓋’而一個用於把空氣供應到該第二腔室並將空氣自該 第二腔室排放的第二入氣口是可以形成在該下蓋。 該活塞桿可以包括一個形成該第—通道的第-桿，和 -個與該第-桿之外周緣表面分隔〜預定_且形成該第 一通道的第二桿。 该導管可以包括一個形成該在該導管内部之第三通道 的第-管子’和一個與該第—管子之外周緣表面分隔一預 定間隙並形成該第二通道的第二管子。 -個第二孔洞可以形成在該第—桿的下端部份，而一 個第三孔洞可則M在該第4子的上端部份。如果該活 塞桿被拉出該本體之外的話，該第二孔洞和該第三孔洞可 以彼此連接。 一個第-壓力感測器可以設置在該第—閥片與該殼體 之内表面t之任-者上俾可測量第—閥片2{)施加到它那裡 的壓力，而-個第二壓力感測器可以設置在該第一閥片與 該殼體之内表面中之任—者上俾可測量第二閥片施加到它 那裡的壓力。 該氣密密封裝置可以更包括-條沿著該支承面板之縱 長方向置放的流體管線。在這結構中，該第__測缸單元與 δ玄第二汽缸單元可以連接_液體管線㈣第—閥片與該 第二閥片可以由從該流體管_供應之越的壓力驅動。 根據本發明的另一特徵，一個顯示裝置製造系統可以 包括以上所述的氣密密封裝置。 本發明的效果 201128100 根據本發明的實施例，一個汽缸單元是被設置而氣壓 或者流體壓是用來驅動一閥片。因此，要改進氣密密封性 能是有可能的。 此外，氣壓或者流體壓可以經由不同管線被供應到該 第一汽缸單元以供驅動該第一閥片和供應到該第二汽缸單 元以供驅動該第二閥片，藉此分開該第一閥片和該第二閥 片° 圖式簡單說明 第1圖是為一個描繪本發明之一實施例之顯示裝置製 造系統之結構的圖示。 第2圖是為一個描繪本發明之一實施例之氣密密封裝 置的圖示。 第3圖是為一個描繪本發明之實施例之氣密密封裝置 之一側的橫戴面圖。 第4圖是為一個描繪本發明之實施例之氣密密封裝置 之另一側的橫截面圖。 第5圖是為一個描繪本發明之一實施例之閥片的圖示。 第6圖是為一個描繪本發明之一實施例之運作單元的 圖示。 第7圖是為一個描繪第6圖之區域A的放大圖。 第8和9圖是為描繪本發明之一實施例之一氣密密封裝 置之運作之狀態的橫截面圖。 I：實施方式3 較佳實施例之詳細說明 201128100 實施本發明的最佳模式 本發明於此後將會配合該等顯示本發明之範例實施例 的附圖來作更徹底的描述。然而，本發明能夠以很多不同 的形式實施而不應被受限為於此中所陳述的範例實施例。 更確切地說，被揭露的實施例是被提供因此這揭露將會是 徹底且完整，而且會完全把本發明的範圍表達給熟知此項 技術的人仕。在該等圖式中，層與區域的尺寸及相對尺寸 為了清楚起見會是誇大的。此外，於此中所描述與描繪的 每個實施例也包括其之互補傳導型實施例。從頭到尾相同 的標號是用來標示相同的元件。 第1圖是為—個描繪本發明之一實施例之顯示裝置製 系統之結構的圖示。 5月參閱第1圖所示，本發明之一實施例的顯示裝置製造 、匕括個負載鎖定腔室200、傳輸腔室300、數個處理 腔至400 置於該傳輸腔室_與該等個別之處理腔室 400之間的氣密密封裝置100。 、5負裁鎖疋腔室200是為一個有像是玻璃基板般之材 料被載入或者卸_場所’並且具有用於關與開啟該負 載鎖定腔室2〇〇的、 ^ 叫的—個門閥210和一個閘閥220。該門閥是設 在 <負載鎖&腔室的—側而該閘閥是設置在該負載鎖定 腔室的另一側。 * 乂傳輪腔至300是為一個維持1CT6 Torr之高真空的第— 二至在内部包括一個主機械臂軸、一個感應器等等， 而且是負責，/丨 如’藉著連接到該主機械臂軸之機械臂的 201128100 使用來在該負載鎖定腔室與該等執行像是沉積與蝕刻般之 各種處理之處理腔室400之間的基板傳輸。 該數個處理腔室400是為維持内部處於真空狀態且在 真空狀態下處理材料的第二真空腔室。 該氣密密封裝置100是設置在該傳輸腔室3〇〇與該等個 別的處理腔室400之間而且執行在該傳輸腔室300與該等個 別之處理腔室400之間的氣密密封運作。 第2圖是為一個描繪本發明之一實施例之氣密密封裝 置的刖視圖。第3圖是為一個描繪本發明之實施例之氣密密 封裝置之一側的橫截面圖。第4圖是為一個描繪本發明之實 施例之氣密密封裝置之另一側的橫截面圖。 本發明之實施例的氣密密封裝置100包括一個殼體 10、一個第一閥片2〇、一個第二閥片3〇、汽缸單元7〇和8〇、 及驅動單元40和50。該殼體1〇是設置在該傳輸腔室3〇〇與一 處理腔室_之間並且具有—個第—入π 12和-個第二入 口 14 4第-閥片2()和該第二閥片3叹設置在該殼體内 部’該第-閥片20開啟與關閉該第—入口 12，而該第二閥 片_啟與關_第二人口 14。該等汽紅單㈣和齡平 地移動4第-閥片2Q和該第二閥片3q俾可使他們分別與第 Γ和第二入口 12和14緊密接觸。該等驅動單元40和50使該 第一閥片20和該第二閥片30上下移動。 ，殼體10具有儲存空間16’該第—閥片2〇和該第二閥 3口〇是:存於該儲存空間16内並且可垂直地移動 。該第一 入口 2疋形成在該殼體之要連接到該傳輸腔室300的- 9 201128100 側，而該第二入口 14是形成在該殼體之要連接到該處理腔 室400的另一側。 該第一入口 12和該第二入口 14是彼此面對面設置，而 且材料是透過該第一入口 12和該第二入口 14來被插入與取 出。 在該殼體10的一側，一個密封元件22是被安裝俾可使 該第一入口與該傳輸腔室300緊密接觸。在該殼體10的另一 側，一個密封元件24是被安裝俾可使該第二入口與該處理 腔室400緊密接觸。 一個支承面板60是設在該殼體10的儲存空間16内。該 第一閥片20是連接到該支承面板60的一側而該第二閥片30 是連接到該支承面板60的另一側。 該第一閥片20是平的而且具有一個比第一入口 12大的 面積俾可覆蓋該第一入口 12。一個密封元件26是設於該第 一閥片20之一側的邊緣上俾可密封該第一入口 12。 該第二閥片30是平的而且具有一個比第二入口 14大的 面積俾可覆蓋該第二入口 14。一個密封元件28是設於該第 二閥片30之一側的邊緣上俾可密封該第二入口 14。 該等汽缸單元70和80是由一第一汽缸單元70與一第二 汽缸單元80構成。該第一汽缸單元70是固定到該支承面板 60的一側並且水平地移動該第一閥片20，而該第二汽缸單 元80是固定到該支承面板60的另一側且水平地移動該第二 閥片30。 如在第3圖中所示，該第一汽缸單元70包括一個第一汽 10 201128100 缸本體72#彳@第-可移動元件75。該第—汽缸本體是 固定到該支承面板60的1並且具有供應有氣壓的内部空 間(74和76)。該第-可軸元件75被設置俾可線性地移動、 把該内部空間分割成_第—空間74和—第二空間％、並且 是固定到該第一閥片20。 在忒第一八缸本體72中，是形成有一個供第一可移動 元件75之犬出部份通過的貫孔73、一條連接到該第一空間 74的第一管線92、和—條連接到該第二空間％的第二管線 94。此外，一條第三管線96是形成於該支承面板6〇俾可連 接到該第一管線92。然而，第一空間74是連接到第二管線 94而第一空間76是連接到第一管線92和該第三管線96的一 種結構是有可能的。 —個密封元件77是安裝在該第一可移動元件75的外周 緣表面上俾可與内部空間（74,76)的内部表面緊密接觸，藉 此維持氣密狀態》—個密封元件78是安裝在該貫孔73的内 表面上俾可與該第一可移動元件75的外周緣表面緊密接 觸’藉此維持該内部空間在氣密狀態。 如在第5圖中所示，具有與第一汽缸單元70相同之結構 的—個或者多個汽缸單元是可以沿著該支承面板60的縱長 方向設置。在設置有數個第一汽缸單元的情況中，數個第 一可移動元件75是以預定的間隔固定到該第一閥片20。 此外’至少第一壓力感應器210會設置在該第一閥片20 或者該殼體1〇的内表面上俾可感測第一閥片20施加到殼體 之内表面的壓力。 11 201128100 該第一汽缸單元70的運作現在將會作描述。當該第一 驅動單元40供應氣壓到該第一空間74時，該第一可移動元 件75朝該第一入口移動而據此該第一閥片20朝該第一入口 移動。然後，該第一閥片20變成與該殼體的内表面緊密接 觸，藉此關閉該第一入口 12。如果該第一驅動單元40供應 氣壓到該第二空間76的話，該第一可移動元件75朝該支承 面板移動。然後，該第一閥片20是自該第一入口 12分離， 藉此開啟該第一入口 12。 當該第一閥片20變成與該第一入口 12緊密接觸時，該 第一壓力感應器210測量施加的壓力並且把一個壓力訊號 施加到一控制器。然後，該控制器把來自該第一壓力感應 器210的壓力訊號與一個參考值作比較並且控制要供應到 第一汽缸單元70的氣壓。 如在第4圖中所示，該第二汽缸單元80包括一個第二汽 缸本體82和一個第二可移動元件85。該第二汽缸本體82是 固定到該支承面板60的另一側且具有供應有氣壓的内部空 間（84和86)。該第二可移動元件85是被置放俾可線性地移 動、把該内部空間分割成一第三空間84和一第四空間86、 且是固定到該第二閥片30。 在該第二汽缸本體82中，是形成有一個供第二可移動 元件85之突出部份通過的貫孔83、一條連接到該第一空間 84的第四管線32、和一條連接到該第二空間86的第五管線 34。此外，一條第六管線36是形成於該支承面板60俾可連 接到該第四管線32。然而，第三空間84是連接到第五管線 12 201128100 34而第四空間86是連接到第四管線32和該第六管線36的一 種結構是有可能的。 具有與第二汽缸單元80相同之結構的一個或者多個汽 缸單元是可以設置在該支承面板60上。在設置有數個第二 汽缸單元的情況中，數個第二可移動元件85是以預定間隔 固定到該第二閥片30。 此外，至少一個第二壓力感應器220是可以設置在該第 一閥片20或該殼體1〇之内表面中之任一者上俾可感測第二 閥片30施加到它那裡的壓力。 該第二汽缸單元80是由該第二驅動單元5〇驅動。然 而，該第二驅動單元5〇是可以被省略。在這情況中，該第 二汽缸單元80可以由該第一驅動單元4〇驅動。該第二汽缸 單元80的其他運作是實質上與以上所述的第—汽缸單元7〇 相同而因此其之描述將會被省略。 該等驅動單元40和50包括第一驅動單元4〇和第二驅動 早該第一驅動單元4〇是連接到該支承面板⑼的一 ^上下移動δ玄支承面板60、並供應氣壓到該第一汽缸單 元7〇°该第二驅動單元50連接到該支承面板6〇的另一側、 上下移動該支承面板60、並且供應氣壓到該第二汽缸單元 80。 如在第6圖中所示，該第一驅動單元4〇包括一個本體 110、一個活塞120、一個活塞桿13()、和一個導管14〇。該 本體1】.〇具有一個被供應有氣壓的内部。該活塞12〇是置於 °亥本體110内部以致於是可移動並且把該本體的内部分割 13 201128100 成一第一腔室112和一第二腔室114。該活塞桿130是連接到 該活寨120、從該本體110延伸出來 '固定到該支承面板60、 並且在内部具有一第一通道132和一第二通道134。該第一 通道13 2是連接到該第一管線9 2而該第二通道13 4是連接到 該第二管線94。該導管140具有一個第三通道142和一個第 四通道144。該第三通道]42是連接到該第一通道132而該第 四通道144是連接到該第二通道134。 一個上蓋112是形成在該本體11 〇的一側而一個下蓋 114是形成在該本體110的另一側。—個貫孔116是形成於該 上蓋112而該活塞桿13〇經由該貫孔U6是可線性地移動。此 外，一個用於把空氣供應到該第二腔室114並把空氣自該第 二腔室1Μ排放的第一空氣入口 15〇是形成於該上蓋112的 一側。 該導管140是固定到該下蓋114俾可延伸到外部。一個 用於把空氣供應到該第一腔室112並把空氣自該第一腔室 112排放的第二空氣入口 152是形成於該下蓋114。 該第一空氣入口 150和該第二空氣入口 152是連接到， 例如，空氣壓力機，及分別連接到一第一軟管154和一第二 軟管156。 如在第7圖中所示，該活塞120是置於該本體11〇内部俾 可線性地移動而一密封元件12 2是安裝在該活塞的外周緣 表面上俾可與該本體11〇的内表面緊密接觸。一個貫孔124 是形成在該活塞12〇的中央而該導管14〇通過該貫孔。一個 密封兀件126是安裝於該貫孔124的内表面上俾可與該導管 14 201128100 140的外周緣表面緊密接觸。 該活塞桿130是由一個第H36和-個第二桿138構 成。該第-桿U6形成該第-通道132而該第二桿138是在與 該第-桿m的外表面相隔—預定間隙之下被置放並且形 成》玄第―通道m。在該第—桿136與該第二桿138之間的間 隙是為該第二通道134而該第—桿136的内部是為該第一通 道 132。 個岔封元件16 0是設置在該第一桿丨3 6與該第二桿之 間俾可在、封該第二通道134。—個第一孔洞162是形成在該 第二桿138的上側俾可連接該第二管線94和該第二通道 134，而該第一通道132的上側是連接到該第三管線％。 该導管140是由一個第一管子146和一個第二管子148 構成。該第一管子146形成在該導管内部的第三通道142， 而該第二管子148是在與該第一管子146之外周緣表面相隔 一預定間隙之下被置放並形成該第四通道丨4 4。 該第三通道142是連接到該第一通道132。此外，一個 第三孔洞166是形成於該第二管子148的上側而一第二孔洞 164是形成在該第一桿136的下側。該第二孔洞ία和該第三 孔洞166是選擇地彼此連接。即’如果該活塞桿13〇是最大 限度地被拉出的話，該第二孔洞164和該第三孔洞166是彼 此連接。 外部空氣是經由一連接到該第一管子的第三軟管17〇 來被供應到該第一管子146以及是經由一連接到該第二管 子的第四軟管來被供應到該第二管子148。 15 201128100 除了空氣是經由連接到第一通道的第四管線η來供應 到該第-通道132或者從該第—通道132排放以及是經由連 接到第二通道的第五管線3 4來供應到該第二通道丨3 4或者 從該第二通道134排放之外，該第二驅動單元5〇的結構是與 以上所述的第一驅動單元4〇相同。 如上所述構築而成之實施例之氣密密封裝置的運作現 在將會作描述。 首先，如在第3和4圖中所示，如果該第一閥片2〇和該 第二閥片30是位在該儲存空間16的下側的話，該第一入口 12和該第二入口 14被開啟。 在這狀態中，為了關閉該第一入口 12和該第二入口 14，該第一驅動單元4〇和該第二驅動單元5〇被驅動俾可把 該第一閥片20和該第二閥片30移動向上以致於該第一閥片 20面對該第一入口 12而該第二閥片30面對該第二入口 14。 特別地’如果空氣是供應到該第一驅動單元4〇的第— 腔室112的話’該活塞12〇是由於空氣的壓力而移動向上而 因此該活塞桿130被拉出該本體110。然後，設於該活塞桿 130之末端部份的支承面板60線性地移動而因此固定到該 支承面板60之兩側的該第一閥片20與該第二閥片30向上移 動俾可分別面對該第一入口 12和該第二入口 14。 在這狀態中，該第一入口 12和該第二入口 Η會被關 閉。即，如果空氣是供應到該第一驅動單元40的話，該第 —汽紅單元70被驅動而該第一閥片20關閉該第一入口 12。 如果空氣是供應到該第二驅動單元50的話，該第二汽缸單 16 201128100BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hermetic sealing device and a display device manufacturing system having the same. I: Prior Art 3 BACKGROUND OF THE INVENTION Generally, a display device includes a liquid crystal panel for image display and a driver for applying a driving signal to the liquid crystal panel. The liquid crystal panel includes an upper substrate, a lower substrate, and a liquid crystal layer interposed between the upper substrate and the lower substrate. Recently, display device manufacturing systems have become larger in size due to an increase in the aperture of the display device and the size of the substrate. In order to manufacture a display device, it is necessary to have a dedicated display device manufacturing system and a hermetic seal such as a hermetic seal groove valve that can operate in a large vacuum range from low vacuum to ultra high vacuum. However, if the substrate for the display device is supplied to a manufacturing system and a valve is controlled to be closed, it is difficult for a valve plate to become uniformly contacted with the edge of a casing inlet. To this end, a conventional hermetic seal is constructed to apply excessive pressure to a working portion and can become tightly contacted. In this case, excessive close contact between a valve plate and a housing inlet can damage and deform those components, resulting in a malfunction. SUMMARY OF THE INVENTION Summary of the Invention 3 201128100 An object of the present invention is to provide a hermetic sealing device capable of driving a valve plate by means of pneumatic or hydraulic pressure to improve hermetic sealing performance. Another object of the present invention is to provide a hermetic seal capable of independently driving a valve plate for isolating the first vacuum chamber and a valve plate for isolating the second vacuum chamber. According to a feature of the present invention, a hermetic sealing device includes a housing having a -first population on one side and a second population in another, placed inside the housing and respectively enclosing the first population and a first valve piece and a second valve piece of the second inlet, a support panel disposed inside the casing, and a first/flying unit that horizontally moves the first valve piece on one side of the support panel, One is placed on the other side of the support panel and the level also moves. The second red-hot unit of the _ _ valve piece, and at least one of the two are connected to the support panel and move the __ valve plate 彳-moving unit up and down. At least one of the drive units may include a first drive unit that supplies the first cylinder unit gas or hydraulic pressure, and a second drive unit that supplies the second cylinder unit air pressure or hydraulic pressure. The housing may have an internal storage space in which the first valve piece and the second valve piece are movable up and down, the first inlet may be an inlet of the first vacuum chamber and the second population may be a second vacuum The entrance to the room. A sealing member in which U first person α and second person σ are in close contact can be attached to the first valve piece and the second valve piece. The first portion may include a solid (four) first-steam red body on the side of the support panel, and one disposed inside the first cylinder body, linearly movable, and dividing the interior of the first cylinder unit into a first a space 201128100 and a second space, and a first movable element coupled to the first valve plate. a first line for supplying air to the first space and discharging the air from the first space, and a second line for supplying air to the second space and discharging the air from the second space may be formed on the first cylinder body Inside. The second cylinder unit may include a second cylinder body fixed to the other side of the support panel, and a portion disposed inside the second cylinder body to be linearly movable to divide the interior of the second cylinder unit into a third a space and a fourth space, and connected to the second movable element of the second valve plate. a third line for supplying air to the third space and discharging the air from the first space, and a fourth line for supplying air to the fourth space and discharging the air from the fourth space may be formed on the second cylinder body Inside. Each of the at least one drive unit may include: a body having an internal space to which air pressure is supplied; one disposed within the body 110 and movable to divide the internal space into a first chamber and a second a piston of the chamber; a piston rod 130 connected to the piston 120, extending from the body, fixed to the support panel, and having a first passage and a second passage therein, the first passage being connected to the piston a first space connected to the second space; and a conduit disposed inside the piston rod and having a third passage and a fourth passage therein, the third passage being placed and linear The ground is moved and connected to the first channel and the fourth channel is connected to the second channel. An upper cover may be formed on one side of the body, a lower cover may be formed on the other side of the body, a first inlet for supplying air to the second chamber and discharging air from the second chamber A gas port may be formed on the 201128100 and a second air inlet for supplying air to the second chamber and discharging air from the second chamber may be formed in the lower cover. The piston rod may include a first rod forming the first passage, and a second rod spaced apart from the outer peripheral surface of the first rod by a predetermined length and forming the first passage. The conduit may include a first tube forming a third passage inside the conduit and a second tube separating a predetermined gap from the outer peripheral surface of the first tube and forming the second passage. A second hole may be formed at a lower end portion of the first rod, and a third hole may be at an upper end portion of the fourth portion. The second hole and the third hole may be connected to each other if the piston rod is pulled out of the body. A first pressure sensor may be disposed on the first valve plate and the inner surface t of the housing to measure the pressure applied to the first valve plate 2{), and the second The pressure sensor can be disposed on any of the first valve plate and the inner surface of the housing to measure the pressure applied to the second valve plate thereto. The hermetic seal may further comprise a fluid line disposed along the longitudinal direction of the support panel. In this configuration, the __ cylinder unit and the δ second cylinder unit can be connected to the liquid line (4). The first valve plate and the second valve plate can be driven by the pressure from the fluid tube. According to another feature of the invention, a display device manufacturing system can include the hermetic seal device described above. EFFECTS OF THE INVENTION 201128100 According to an embodiment of the invention, a cylinder unit is provided and air pressure or fluid pressure is used to drive a valve plate. Therefore, it is possible to improve the hermetic sealing performance. Additionally, air pressure or fluid pressure may be supplied to the first cylinder unit via different lines for driving the first valve plate and to the second cylinder unit for driving the second valve plate, thereby separating the first valve Sheet and the second valve plate FIG. 1 is a diagram showing the structure of a display device manufacturing system which is an embodiment of the present invention. Figure 2 is a diagram of a hermetic sealing device depicting an embodiment of the present invention. Figure 3 is a cross-sectional view of one side of a hermetic sealing device depicting an embodiment of the present invention. Figure 4 is a cross-sectional view of the other side of a hermetic seal device depicting an embodiment of the present invention. Figure 5 is an illustration of a valve plate depicting an embodiment of the present invention. Figure 6 is a diagram of an operational unit depicting an embodiment of the present invention. Fig. 7 is an enlarged view of a region A depicting Fig. 6. Figs. 8 and 9 are cross-sectional views showing the state of operation of the hermetic sealing device of one embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT OF THE INVENTION The present invention will be described more fully hereinafter with reference to the accompanying drawings which illustrate exemplary embodiments of the invention. However, the invention can be embodied in many different forms and should not be limited to the exemplary embodiments set forth herein. Rather, the disclosed embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In these figures, the dimensions and relative dimensions of layers and regions may be exaggerated for clarity. Moreover, each of the embodiments described and depicted herein also includes complementary conductive embodiments thereof. The same reference numerals are used to designate the same elements from beginning to end. Fig. 1 is a view showing the structure of a system for manufacturing a display device which is an embodiment of the present invention. Referring to FIG. 1 , a display device according to an embodiment of the present invention, including a load lock chamber 200, a transfer chamber 300, and a plurality of processing chambers to 400 are placed in the transfer chamber _ and the like A hermetic seal 100 between the individual processing chambers 400. The 5-negative locking chamber 200 is a material such as a glass substrate that is loaded or unloaded and has a function for closing and opening the load lock chamber 2 Gate valve 210 and a gate valve 220. The gate valve is disposed on the side of the <load lock & chamber and the gate valve is disposed on the other side of the load lock chamber. * The transmission of the wheel cavity to 300 is for the first to maintain a high vacuum of 1CT6 Torr - to include a main mechanical arm shaft, a sensor, etc., and is responsible for, for example, 'by connecting to the main The 201128100 of the robotic arm of the robotic arm is used to transfer the substrate between the load lock chamber and the processing chamber 400 that performs various processes such as deposition and etching. The plurality of processing chambers 400 are second vacuum chambers for maintaining the interior in a vacuum state and processing the material under vacuum. The hermetic seal 100 is disposed between the transfer chamber 3 and the individual process chambers 400 and performs a hermetic seal between the transfer chamber 300 and the individual process chambers 400 Operation. Figure 2 is a side elevational view of a hermetic sealing device depicting an embodiment of the present invention. Figure 3 is a cross-sectional view of one side of a hermetic sealing device depicting an embodiment of the present invention. Figure 4 is a cross-sectional view of the other side of a hermetic seal depicting an embodiment of the present invention. The hermetic sealing device 100 of the embodiment of the present invention includes a housing 10, a first valve plate 2, a second valve plate 3, cylinder units 7A and 8B, and drive units 40 and 50. The housing 1 is disposed between the transfer chamber 3 and a processing chamber _ and has a first-into-π 12 and a second inlet 14 4 - a valve 2 () and the first The second valve plate 3 is disposed inside the casing. The first valve plate 20 opens and closes the first inlet 12, and the second valve plate opens and closes the second population 14. The steam red sheets (four) and the level moving 4th-valve piece 2Q and the second valve piece 3q are placed in close contact with the first and second inlets 12 and 14, respectively. The drive units 40 and 50 move the first valve plate 20 and the second valve plate 30 up and down. The housing 10 has a storage space 16'. The first valve plate 2 and the second valve 3 are: stored in the storage space 16 and vertically movable. The first inlet 2 is formed on the side of the housing to be connected to the transmission chamber 300 - 9 201128100, and the second inlet 14 is formed in the housing to be connected to the processing chamber 400 side. The first inlet 12 and the second inlet 14 are disposed face to face with each other, and the material is inserted and removed through the first inlet 12 and the second inlet 14. On one side of the housing 10, a sealing member 22 is mounted to bring the first inlet into close contact with the transfer chamber 300. On the other side of the housing 10, a sealing member 24 is mounted to bring the second inlet into intimate contact with the processing chamber 400. A support panel 60 is disposed within the storage space 16 of the housing 10. The first valve plate 20 is attached to one side of the support panel 60 and the second valve plate 30 is coupled to the other side of the support panel 60. The first valve plate 20 is flat and has a larger area than the first inlet 12 to cover the first inlet 12. A sealing member 26 is provided on an edge of one side of the first valve sheet 20 to seal the first inlet 12. The second valve plate 30 is flat and has a larger area than the second inlet 14 to cover the second inlet 14. A sealing member 28 is provided on an edge of one side of the second valve sheet 30 to seal the second inlet 14. The cylinder units 70 and 80 are comprised of a first cylinder unit 70 and a second cylinder unit 80. The first cylinder unit 70 is fixed to one side of the support panel 60 and horizontally moves the first valve sheet 20, and the second cylinder unit 80 is fixed to the other side of the support panel 60 and horizontally moves the The second valve plate 30. As shown in Fig. 3, the first cylinder unit 70 includes a first steam 10 201128100 cylinder body 72 #彳@第-movable element 75. The first cylinder body is fixed to the support panel 60 and has internal spaces (74 and 76) to which air pressure is supplied. The first-axis member 75 is disposed to be linearly movable, divides the internal space into a _th-space 74 and a second space %, and is fixed to the first valve sheet 20. In the first eight-cylinder body 72, there is formed a through hole 73 through which the canine portion of the first movable member 75 passes, a first line 92 connected to the first space 74, and a strip connection. To the second space 94 of the second space. Additionally, a third line 96 is formed in the support panel 6 and can be coupled to the first line 92. However, it is possible that the first space 74 is connected to the second line 94 and the first space 76 is connected to the first line 92 and the third line 96. A sealing member 77 is mounted on the outer peripheral surface of the first movable member 75 so as to be in close contact with the inner surface of the inner space (74, 76), thereby maintaining the airtight state - a sealing member 78 is mounted On the inner surface of the through hole 73, the crucible is in close contact with the outer peripheral surface of the first movable member 75, thereby maintaining the inner space in an airtight state. As shown in Fig. 5, one or more cylinder units having the same structure as the first cylinder unit 70 are disposed along the longitudinal direction of the support panel 60. In the case where a plurality of first cylinder units are provided, the plurality of first movable members 75 are fixed to the first valve sheet 20 at predetermined intervals. Further, at least the first pressure sensor 210 may be disposed on the inner surface of the first valve plate 20 or the casing 1 to sense the pressure applied by the first valve plate 20 to the inner surface of the casing. 11 201128100 The operation of the first cylinder unit 70 will now be described. When the first drive unit 40 supplies air pressure to the first space 74, the first movable element 75 moves toward the first inlet and accordingly the first valve plate 20 moves toward the first inlet. Then, the first valve sheet 20 becomes in close contact with the inner surface of the casing, thereby closing the first inlet 12. If the first drive unit 40 supplies air pressure to the second space 76, the first movable member 75 moves toward the support panel. Then, the first valve piece 20 is separated from the first inlet 12, thereby opening the first inlet 12. When the first valve plate 20 becomes in close contact with the first inlet 12, the first pressure sensor 210 measures the applied pressure and applies a pressure signal to a controller. Then, the controller compares the pressure signal from the first pressure sensor 210 with a reference value and controls the air pressure to be supplied to the first cylinder unit 70. As shown in Fig. 4, the second cylinder unit 80 includes a second cylinder body 82 and a second movable member 85. The second cylinder body 82 is fixed to the other side of the support panel 60 and has an internal space (84 and 86) to which air pressure is supplied. The second movable member 85 is placed to be linearly movable, divides the internal space into a third space 84 and a fourth space 86, and is fixed to the second valve sheet 30. In the second cylinder body 82, there is formed a through hole 83 through which the protruding portion of the second movable member 85 passes, a fourth line 32 connected to the first space 84, and a line connected to the first The fifth line 34 of the second space 86. Additionally, a sixth line 36 is formed in the support panel 60 and is connectable to the fourth line 32. However, it is possible that the third space 84 is connected to the fifth line 12 201128100 34 and the fourth space 86 is a structure connected to the fourth line 32 and the sixth line 36. One or more cylinder units having the same structure as the second cylinder unit 80 may be disposed on the support panel 60. In the case where a plurality of second cylinder units are provided, a plurality of second movable members 85 are fixed to the second valve sheet 30 at predetermined intervals. In addition, the at least one second pressure sensor 220 is disposed on the first valve plate 20 or the inner surface of the housing 1 俾 to sense the pressure applied to the second valve plate 30 thereto. . The second cylinder unit 80 is driven by the second drive unit 5〇. However, the second drive unit 5A can be omitted. In this case, the second cylinder unit 80 can be driven by the first drive unit 4A. The other operation of the second cylinder unit 80 is substantially the same as the first cylinder unit 7A described above and thus its description will be omitted. The driving units 40 and 50 include a first driving unit 4 and a second driving. The first driving unit 4 is connected to the support panel (9), and supplies air pressure to the first A cylinder unit 7 is connected to the other side of the support panel 6A, moves the support panel 60 up and down, and supplies air pressure to the second cylinder unit 80. As shown in Fig. 6, the first drive unit 4 includes a body 110, a piston 120, a piston rod 13 (), and a conduit 14A. The body 1 has an interior that is supplied with air pressure. The piston 12 is placed inside the body 110 so as to be movable and divide the interior of the body into a first chamber 112 and a second chamber 114. The piston rod 130 is coupled to the living basket 120, extends from the body 110 to be fixed to the support panel 60, and has a first passage 132 and a second passage 134 therein. The first passage 13 2 is connected to the first line 92 and the second passage 13 4 is connected to the second line 94. The conduit 140 has a third passage 142 and a fourth passage 144. The third channel 42 is connected to the first channel 132 and the fourth channel 144 is connected to the second channel 134. An upper cover 112 is formed on one side of the body 11 而 and a lower cover 114 is formed on the other side of the body 110. A through hole 116 is formed in the upper cover 112 and the piston rod 13 is linearly movable via the through hole U6. Further, a first air inlet 15A for supplying air to the second chamber 114 and discharging air from the second chamber 1 is formed on one side of the upper cover 112. The duct 140 is fixed to the lower cover 114 and can extend to the outside. A second air inlet 152 for supplying air to the first chamber 112 and discharging air from the first chamber 112 is formed in the lower cover 114. The first air inlet 150 and the second air inlet 152 are connected to, for example, an air press, and are coupled to a first hose 154 and a second hose 156, respectively. As shown in Fig. 7, the piston 120 is placed inside the body 11 and linearly movable, and a sealing member 12 2 is mounted on the outer peripheral surface of the piston to be inside the body 11 The surface is in close contact. A through hole 124 is formed in the center of the piston 12 and the conduit 14 passes through the through hole. A sealing member 126 is mounted on the inner surface of the through hole 124 and is in close contact with the outer peripheral surface of the catheter 14 201128100 140. The piston rod 130 is constructed of a first H36 and a second rod 138. The first rod U6 forms the first passage 132 and the second rod 138 is placed under the predetermined gap from the outer surface of the first rod m and is formed to form a "portion"-channel m. The gap between the first rod 136 and the second rod 138 is the second passage 134 and the inside of the first rod 136 is the first passage 132. The sealing element 16 0 is disposed between the first rod 36 and the second rod to seal the second passage 134. A first hole 162 is formed on the upper side of the second rod 138 to connect the second line 94 and the second passage 134, and the upper side of the first passage 132 is connected to the third line %. The conduit 140 is comprised of a first tube 146 and a second tube 148. The first tube 146 is formed in a third passage 142 inside the duct, and the second tube 148 is placed under a predetermined gap from the outer peripheral surface of the first tube 146 and forms the fourth passage. 4 4. The third passage 142 is connected to the first passage 132. Further, a third hole 166 is formed on the upper side of the second tube 148 and a second hole 164 is formed on the lower side of the first rod 136. The second hole ία and the third hole 166 are selectively connected to each other. That is, if the piston rod 13 is pulled out to the utmost extent, the second hole 164 and the third hole 166 are connected to each other. The outside air is supplied to the first pipe 146 via a third hose 17 connected to the first pipe and is supplied to the second pipe via a fourth hose connected to the second pipe 148. 15 201128100 The air is supplied to the first passage 132 via a fourth line η connected to the first passage or discharged from the first passage 132 and is supplied via a fifth line 34 connected to the second passage The second drive unit 5A has the same structure as the first drive unit 4〇 described above, in addition to or from the second passage 丨34. The operation of the hermetic sealing device of the embodiment constructed as described above will now be described. First, as shown in FIGS. 3 and 4, if the first valve piece 2 and the second valve piece 30 are located on the lower side of the storage space 16, the first inlet 12 and the second inlet 14 is turned on. In this state, in order to close the first inlet 12 and the second inlet 14, the first driving unit 4 and the second driving unit 5 are driven to hold the first valve 20 and the second valve. The sheet 30 is moved upward so that the first valve sheet 20 faces the first inlet 12 and the second valve sheet 30 faces the second inlet 14. Specifically, if the air is supplied to the first chamber 112 of the first driving unit 4', the piston 12'' is moved upward due to the pressure of the air, so that the piston rod 130 is pulled out of the body 110. Then, the support panel 60 disposed at the end portion of the piston rod 130 linearly moves, and thus the first valve piece 20 and the second valve piece 30 fixed to both sides of the support panel 60 are moved upwardly, respectively. The first inlet 12 and the second inlet 14 are. In this state, the first inlet 12 and the second inlet Η are closed. That is, if air is supplied to the first driving unit 40, the first steam red unit 70 is driven and the first valve sheet 20 closes the first inlet 12. If the air is supplied to the second driving unit 50, the second cylinder unit 16 201128100
。每時’在該第二空間76内部的空氣是經由該第一汽缸 單元70的第二管線94、該第二桿138的第二通道134、和該 第二管子148的第四通道144來排放到外部。 元80被驅動而該第^片__第 第一閥片20關閉第—入口 12的说 當该第一閥片20變成與該第一入口 12緊密接觸時，該 第壓力感應器210測量第一閥片2〇施加到該第一入口 12 的壓力並且把壓力訊號供應到該控制器。然後，該控制器 把來自第一壓力感應器210的壓力與一設定值作比較並且 控制供應到第二汽缸單元80之空氣的壓力。 因此，該第一閥片20藉一適當壓力與該第一入口 12成 默畨接觸。結果，要把第一閥片20的故障與損壞減至最小 程度是有可能的。 如果氣壓是供應到該第二汽缸單元80的話，該第二閥 片30關閉該第二入口 14。在這裡，該第二汽缸單元8〇的運 作與該把氣壓供應到第二汽缸單元80之第二驅動單元5〇的 運作是與有關於以上所述之第一閥片20之驅動的那些相同 17 201128100 而因此其之描述將會被省略。 在該等圖式與說明書中，本發明的實施例業已作描述 而且，雖然特定的名詞被使用，他們僅是通稱與描述用途 而已，並非作為限制，本發明的範圍是在後面的申請專利 範圍中作陳述。例如，在沒有離開本發明的意旨之下，該 控制電路的結構或者該内部連接結構是可以作變化的。 【圖式簡單說明】 第1圖是為一個描繪本發明之一實施例之顯示裝置製 造系統之結構的圖示。 第2圖是為一個描繪本發明之一實施例之氣密密封裝 置的圖示。 第3圖是為一個描繪本發明之實施例之氣密密封裝置 之一側的橫截面圖。 第4圖是為一個描繪本發明之實施例之氣密密封裝置 之另一側的橫截面圖。 第5圖是為一個描繪本發明之一實施例之閥片的圖示。 第6圖是為一個描繪本發明之一實施例之運作單元的 圖示。 第7圖是為一個描繪第6圖之區域A的放大圖。 第8和9圖是為描繪本發明之一實施例之一氣密密封裝 置之運作之狀態的橫截面圖。 【主要元件符號說明】 10 殼體 14 第二入口 12 第一入口 16 儲存空間 18 第一閥片 86 内部空間 密封元件 92 第一管線 密封元件 94 第二管線 密封元件 96 第三管線 密封元件 100 氣密密封裝置 第二閥片 110 本體 第四管線 112 第一腔室 第五管線 114 第二腔室 第六管線 116 貫孔 驅動單元 120 活塞 驅動單元 122 密封元件 支承面板 124 貫孔 汽缸單元 126 密封元件 第一汽缸本體 130 活塞桿 貫孔 132 第一通道 内部空間 134 第二通道 第一可移動元件 136 第一桿 内部空間 138 第二桿 密封元件 140 導管 密封元件 142 第三通道 汽缸單元 144 第四通道 第二汽缸本體 146 第一管子 内部空間 148 第二管子 第二可移動元件 150 第一空氣入口 19 201128100 152 第二空氣入口 172 第四軟管 154 第一軟管 200 負載鎖定腔室 156 第二軟管 210 門閥 160 密封元件 220 閘閥 162 第一孔洞 300 傳輸腔室 164 第二孔洞 400 處理腔室 166 第三孔洞 170 第三軟管 20. The air inside the second space 76 is discharged via the second line 94 of the first cylinder unit 70, the second passage 134 of the second rod 138, and the fourth passage 144 of the second tube 148. To the outside. When the element 80 is driven and the first piece __ the first valve piece 20 closes the first inlet 12, when the first valve piece 20 becomes in close contact with the first inlet 12, the first pressure sensor 210 measures the first A valve piece 2 压力 applies pressure to the first inlet 12 and supplies a pressure signal to the controller. Then, the controller compares the pressure from the first pressure sensor 210 with a set value and controls the pressure of the air supplied to the second cylinder unit 80. Therefore, the first valve plate 20 is in silent contact with the first inlet 12 by a suitable pressure. As a result, it is possible to minimize the failure and damage of the first valve plate 20. The second valve 30 closes the second inlet 14 if air pressure is supplied to the second cylinder unit 80. Here, the operation of the second cylinder unit 8〇 and the operation of supplying the air pressure to the second drive unit 5 of the second cylinder unit 80 are the same as those for the driving of the first valve plate 20 described above. 17 201128100 and therefore its description will be omitted. The embodiments of the present invention have been described in the drawings and the specification, and although specific nouns are used, they are only used for the purpose of description and description, and not by way of limitation, the scope of the invention Make a statement in the middle. For example, the structure of the control circuit or the internal connection structure can be varied without departing from the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the structure of a display device manufacturing system which is an embodiment of the present invention. Figure 2 is a diagram of a hermetic sealing device depicting an embodiment of the present invention. Figure 3 is a cross-sectional view of one side of a hermetic seal device depicting an embodiment of the present invention. Figure 4 is a cross-sectional view of the other side of a hermetic seal device depicting an embodiment of the present invention. Figure 5 is an illustration of a valve plate depicting an embodiment of the present invention. Figure 6 is a diagram of an operational unit depicting an embodiment of the present invention. Fig. 7 is an enlarged view of a region A depicting Fig. 6. Figs. 8 and 9 are cross-sectional views showing the state of operation of the hermetic sealing device of one embodiment of the present invention. [Main component symbol description] 10 Housing 14 Second inlet 12 First inlet 16 Storage space 18 First valve piece 86 Internal space sealing element 92 First line sealing element 94 Second line sealing element 96 Third line sealing element 100 Gas Closed seal second valve plate 110 body fourth line 112 first chamber fifth line 114 second chamber sixth line 116 through hole drive unit 120 piston drive unit 122 seal element support panel 124 through hole cylinder unit 126 seal element First cylinder body 130 piston rod through hole 132 first passage inner space 134 second passage first movable member 136 first rod inner space 138 second rod sealing member 140 duct sealing member 142 third passage cylinder unit 144 fourth passage Second cylinder body 146 first tube internal space 148 second tube second movable element 150 first air inlet 19 201128100 152 second air inlet 172 fourth hose 154 first hose 200 load lock chamber 156 second soft Tube 210 gate valve 160 sealing element 220 gate valve 162 first hole 3 00 Transfer chamber 164 Second hole 400 Processing chamber 166 Third hole 170 Third hose 20