JP3209711U - Silencer device for quick exhaust valve - Google Patents

Abstract

A silencer device that reduces exhaust noise while maintaining stable operation of a quick exhaust valve is provided. A silencer device 20 for a quick exhaust valve 10A, 10B attached to a pump device, which has a bottomed cylindrical silencer body 21 attached to an air exhaust port 27 of the quick exhaust valve, and a silencer body. A cylindrical silencer cover 22 that is formed in a long shape and covers the outer peripheral side with a gap while opening the front end side of the silencer body. The silencer main body 21 has an attachment part 31 attached to the exhaust port and an air discharge part 32 communicating with the exhaust port via the attachment part. [Selection] Figure 3

Description

  The present invention relates to a silencer device used for a quick exhaust valve provided in a semiconductor manufacturing pump or the like.

  Conventionally, a quick exhaust valve (see, for example, Patent Document 1 below) attached to a semiconductor manufacturing pump or the like is known. If this quick exhaust valve is attached to a pump or the like, the operating speed of the pump or the like can be increased. However, if the air that is the working fluid is exhausted to the atmosphere as it is, the exhaust noise will increase. Is attached.

JP-A-10-323607

  However, simply attaching a silencer device to the quick exhaust valve can reduce the exhaust noise, but the silencer temperature decreases due to fluctuations in the air pressure when air is exhausted from the quick exhaust valve. This causes a problem that the surface and the inside of the silencer freeze, and it becomes difficult to maintain stable operation.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a silencer device capable of reducing exhaust noise while maintaining a stable operation of a quick exhaust valve.

  A silencer device according to an embodiment of the present invention is a silencer device for a quick exhaust valve attached to a pump device, the bottomed cylindrical silencer body attached to an air exhaust port of the quick exhaust valve, And a cylindrical silencer cover which is formed longer than the silencer body and covers the outer peripheral side with a gap while opening the distal end side of the silencer body.

  In another embodiment of the present invention, the silencer body has an attachment portion attached to the exhaust port, and an air discharge portion communicating with the exhaust port via the attachment portion. It is formed porous.

  In still another embodiment of the present invention, the silencer body is attached to the quick exhaust valve by screwing and connecting the attachment portion to the exhaust port, and the silencer cover is an outer peripheral portion of the attachment portion. It is attached so as to cover the silencer body by being press-fitted into the.

  In still another embodiment of the present invention, the silencer body and the silencer cover are made of synthetic resin.

  According to the present invention, exhaust noise can be reduced while maintaining stable operation of the quick exhaust valve.

It is a figure showing composition of a pump device which has a quick exhaust valve equipped with a silencer device concerning one embodiment of the present invention. It is a bottom view of the quick exhaust valve equipped with the silencer device. It is operation | movement explanatory drawing at the time of the intake of the quick exhaust valve which mounted | wore with the silencer apparatus. It is operation | movement explanatory drawing at the time of exhaust_gas | exhaustion of the quick exhaust valve equipped with the same silencer apparatus.

  Hereinafter, a silencer device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. However, the following embodiment does not limit the device according to each claim, and all combinations of features described in the embodiment are essential to the solution of the device. Not exclusively. In addition, the following embodiment illustrates the case where the quick exhaust valve provided with the silencer device according to the present invention is applied to, for example, a bellows pump for manufacturing a semiconductor.

  FIG. 1 is a view showing a configuration of a pump device having a quick exhaust valve equipped with a silencer device according to an embodiment of the present invention, and also including its peripheral mechanism. FIG. 2 is a bottom view of the quick exhaust valve equipped with the silencer device. 3 and 4 are explanatory diagrams of the operation of the quick exhaust valve equipped with the silencer device. FIG. 3 shows the operation during intake and FIG. 4 shows the operation during exhaust.

  As shown in FIG. 1, the bellows pump 1 includes a bottomed cylindrical cylinder 11a, which is a case member that is mounted and disposed on both sides of a pump head 1a disposed in the center so that the openings face each other. 11b. A pair of spaces are formed in the cylinders 11a and 11b, for example, in the axial direction. In these pair of spaces, for example, bottomed cylindrical bellows 4a and 4b made of fluororesin are coaxially arranged in a state of being attached to the pump head 1a so that their openings face each other and extending and contracting in the axial direction. ing.

  The bellows 4a and 4b are screwed and fixed to the pump head 1a with their open ends. For this reason, the bellows 4a and 4b constitute a pair of movable partition members that partition the internal spaces of the cylinders 11a and 11b, with the outsides as working chambers 5a and 5b and the insides as pump chambers 6a and 6b.

  The shaft fixing plates 12a and 12b are fixed to the bottoms of the bellows 4a and 4b by bolts, and one ends of the shafts 13a and 13b extending coaxially are fixed to the shaft fixing plates 12a and 12b. The other ends of the shafts 13a and 13b penetrate the centers of the bottoms of the cylinders 11a and 11b through a sealing material in an airtight manner, extend to the outside of the cylinders 11a and 11b, and are fixed to the connecting plates 14a and 14b with nuts. The connecting plates 14a and 14b are connected in the axial direction by a plurality of connecting shafts 15 at predetermined positions outside the cylinders 11a and 11b.

  The pump head 1a is provided with a suction port 9 and a discharge port 10 for a transfer fluid, for example, a liquid, at a position facing the side surface of the pump. Suction valves 7a and 7b are provided in a path from the suction port 9 to the pump chambers 6a and 6b, and discharge valves 8a and 8b are provided in a path from the pump chambers 6a and 6b to the discharge port 10. . These suction valves 7a and 7b and discharge valves 8a and 8b constitute a valve unit.

  Note that a working fluid such as air from a working fluid source such as an air compressor (not shown) is limited to a predetermined pressure by the regulator 2 and is supplied to the intake side of the quick exhaust valves 10A and 10B via the electromagnetic valve 3.

  As shown in FIGS. 2 to 4, each of the quick exhaust valves 10 </ b> A and 10 </ b> B includes a cylindrical upper casing 16 having an opening in the lower portion and a disk-shaped lower casing 17 that closes the opening. The upper driving body 16 and the lower driving body 17 are connected by a bolt 23 and a nut 24 to constitute a valve space 18 and a valve mechanism 19. The valve mechanism 19 includes a valve seat 29 that protrudes from the center of the lower driver 17 into the valve space 18 and a valve body 28 that is disposed above the valve seat 29 and opens and closes the valve seat 29. An upper central portion of the upper body 16 has an intake port 25 that communicates the outside with the valve space 18, and a side wall portion of the upper body 16 has an intake and exhaust port 26 that communicates the outside and the valve space 18. . Further, the valve seat 29 of the lower body 17 has an exhaust port 27 that communicates the outside with the valve space 18.

  The silencer device 20 includes a bottomed cylindrical silencer main body 21 attached to the exhaust ports 27 of the quick exhaust valves 10A and 10B, and a longer end than the silencer main body 21. ) And a cylindrical silencer cover 22 that covers the outer peripheral side with a gap. Further, the silencer body 21 of the silencer device 20 communicates with the exhaust port 27 of the quick exhaust valves 10A and 10B through, for example, an attachment part 31 attached by screw connection, and a communication path 30 between the exhaust port 27 and the attachment part 31. And an air discharge portion 32 for carrying out the operation. In addition, the air discharge part 32 is formed with the porous body provided with many fine holes. The silencer cover 22 is attached so as to cover the silencer main body 21 by being press-fitted into the outer peripheral portion of the attachment portion 31 of the silencer main body 21, for example.

  In addition, the silencer main body 21 and the silencer cover 22 which comprise the silencer apparatus 20 are the products made of a synthetic resin, for example, are formed by hardening a polypropylene. When the quick exhaust valves 10A and 10B are viewed from the bottom, as shown in FIG. 2, the silencer body 21 is covered by the silencer cover 22, but the quick exhaust valves 10A and 10B are opened to the atmosphere with the bottom side opened to the atmosphere. It is attached.

The quick exhaust valves 10A and 10B operate as shown in FIG. 3 during intake. That is, at the time of intake, air from the electromagnetic valve 3 is introduced into the inside through the intake ports 25 of the quick exhaust valves 10A and 10B. The air introduced into the interior of the bellows pump 1 is introduced into the working chambers 5a and 5b of the bellows pump 1 while pushing down the valve body 28 so as to be in close contact with the valve seat 29 and closing the exhaust port 27. .

  On the other hand, the quick exhaust valves 10A and 10B operate as shown in FIG. 4 during exhaust. That is, at the time of exhausting, the air discharged from the working chambers 5a and 5b is introduced into the inside through the intake / exhaust ports 26 of the quick exhaust valves 10A and 10B. The air introduced into the interior pushes up the valve body 28 so as to be in close contact with the intake port 25, closes the intake port 25, and is exhausted to the silencer device 20 side through the exhaust port 27. At this time, the silencer device 20 exhausts the high-pressure gas through the porous air discharge portion 32 in order to reduce the exhaust sound from the exhaust ports 27 of the quick exhaust valves 10A and 10B. Since the air discharge part 32 is cooled by the pressure fluctuation of the gas at the time of exhaust, freezing occurs on the surface and inside the porous body when exposed to the outside air containing moisture.

  In this regard, in the quick exhaust valves 10A and 10B to which the silencer device 20 according to this embodiment is attached, since the air discharge portion 32 is covered with the silencer cover 22, the air discharge portion 32 is not easily exposed to the outside air, and the air discharge is performed. The part 32 is difficult to freeze. In order to further enhance this effect, the air as the working fluid is preferably super dry air having a dew point temperature of −30 ° C. or lower. Thereby, it becomes easy to keep the periphery of the air discharge part 32 in a dry state.

According to this embodiment, for example, although the temperature of the air supplied to the intake port 25 is about 20.1 ° C. to 22.8 ° C., the air is exhausted from the silencer device 20 through the exhaust port 27. Even if the air temperature is as low as about −21.3 ° C. to −23.5 ° C., the silencer main body 21 and the silencer cover 22 do not generate condensation and the accompanying icing does not occur. . For this reason, according to the silencer device 20 which concerns on this invention, it becomes possible to aim at reduction of exhaust sound, maintaining the stable operation | movement of quick exhaust valve 10A, 10B.

  As mentioned above, although embodiment of this invention was described, this embodiment is shown as an example and is not intending limiting the range of invention. The novel embodiment can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. This embodiment and its modifications are included in the scope and gist of the invention, and are also included in the invention described in the claims of the utility model registration and the equivalent scope thereof.

  For example, in the above embodiment, the attachment portion 31 of the silencer body 21 of the silencer device 20 is screwed to the exhaust ports 27 of the quick exhaust valves 10A and 10B. As long as this attachment part 31 is connected to the exhaust port 27, various aspects, such as crimping | bonding and adhesion | attachment, can be taken. Further, the silencer cover 22 may be disposed so as to cover the silencer main body 21 with a gap while opening the distal end side, and therefore the silencer cover 22 is not limited to the above-described shape and the manner of attachment to the silencer main body 21.

DESCRIPTION OF SYMBOLS 1 Bellows pump 1a Pump head 2 Regulator 3 Solenoid valve 4a, 4b Bellows 11a, 11b Cylinder 10A, 10B Quick exhaust valve 20 Silencer device 21 Silencer body 22 Silencer cover 25 Intake port 26 Intake / exhaust port 27 Exhaust port 31 Mounting part 32 Air exhaust Part

Claims (4)

A silencer device for a quick exhaust valve attached to a pump device,
A bottomed cylindrical silencer body attached to the air exhaust port of the quick exhaust valve;
A silencer device comprising a cylindrical silencer cover that is formed longer than the silencer body and covers the outer peripheral side with a gap while opening the distal end side of the silencer body. The silencer body is
A mounting portion attached to the exhaust port; and an air discharge portion communicating with the exhaust port via the mounting portion;
The silencer device according to claim 1, wherein the discharge portion is formed to be porous. The silencer body is attached to the quick exhaust valve by screwing the attachment portion to the exhaust port,
The silencer device according to claim 1 or 2, wherein the silencer cover is attached so as to cover the silencer body by being press-fitted into an outer peripheral portion of the attachment portion. The silencer device according to any one of claims 1 to 3, wherein the silencer body and the silencer cover are made of synthetic resin.

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