201126779 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種可撓性熱電能源轉換器及其製程方 法，特別係指一種將n-type碲化鉍（BizTe3)合金及p_type碲 化録（SbsTe3)合金沈積形成之p/n熱電薄膜結合於膠結構 體之可撓性熱電能源轉換器及其製程方法。 【先前技術】 # 十九世紀，德國物理學家發現了熱電效應，開啟了人們 對熱電材料之研究。蘭年，靠著半導體技術的配合，熱電 能源轉換器問世。此熱電能源轉換器則是可將熱能與電能相 互轉換之主要卫具，其可利用溫度差產生電能，相對的可以 利用電壓差產生溫度差異。 曰別王世界對於能源的消耗量每年以2」％的比率在增 加广由、天然氣等能源價格持續飆漲，在在顯示地球上能 源短缺的現象。在日新月異的時代，隨著科技進步與發展， 能源的需求日益漸增，各種能源的利用與轉換成為當今首要 之課題。而熱電能源轉換器早已被美國太空總署認定為二十 太空探勘任務之主要電力來源，並已經在多次太 ’使㈣子能燃料作為熱源之熱電發電機來發電。 源，在地 以及μ活μ諸料難生之熱源 “射所帶來之熱能量至今仍無法有效回收與利 201126779 用’使付月b源之使用效率偏低以及浪費，而各種廢熱的回收 與利用不僅可提咼各項能源之轉換效率並可減少與降低生 活環境中所產生之各種熱污染，所以在未來環保以及能源的 考量下’能源利用之相關研究與研發顯得格外的重要。 隨著半導體製程技術不斷的進步，高科技電子產品已然 演變成高速、高頻、高功率，並不斷往輕薄短小演進，相對 之下’電子元件容易產生極大的熱功率，在高溫環境中操 作，不僅影響sfl號傳遞功能，並會降低元件之使用壽命，故 如何解決電子元件衍生熱源所造成之效能降低，減少系統壽 命便成為散熱研究的主要重點之一。就市場而言’發展較久 的風冷式及水冷式散熱裝置還是較為普及，不過風冷式散熱 裝置有著使用壽命與噪音等問題；至於水冷式散熱裝置之體 積大、價格高以及污染等問題也讓人詬病，因此如何在有限 的條件中，將熱迅速散去，已成為目前科技發展一大重點。 在種種因素考量下，熱電能源轉換器因應而出，其優點使之 漸漸有著取代傳統散熱裝置的趨勢。 熱電能源轉換器之優點如下·· 1. 體積小、重量輕：熱電能源轉換器之體積與重量相較 於傳統冷卻或加熱機械來的小及輕。 2. 無噪音、壽命長、不受重力與方向影響：一般熱電能 源轉換器能量轉換方4不需#由循環4體傳《，故其並不受 重力與方向影響，也少了流體循環所需之泵浦造成的噪音與 201126779 機械故障率。 3.適合局部冷卻或加熱.熱電能源轉換器可以針對特定 元件或特定區域作冷卻或加熱效果，而不必對周圍整體封 裝。 4·同一元件有冷卻或加熱以及發電等各種作用：熱電能 源轉換器當輸入電流相反，半導體载子反向流動’則熱流方 向相反，即冷熱端交換轉變，也較容易作溫度之控制；另外 當輸加熱電能源轉換器一定溫差後，即會輸出一定之電能， 可作為發電或溫度感測之用途。 另外，亦有精密度高、反應速度快與環保等優點。有了 上述之優點’使得熱電等效應逐漸引起大家的探討也讓這 一類的相關研究逐漸趨於成熟。 由此可見’上述習用方式仍有諸多缺失，實非_良善之 设計者，而亟待加以改良。201126779 VI. Description of the Invention: [Technical Field] The present invention relates to a flexible thermoelectric energy converter and a method for manufacturing the same, and particularly to an n-type bismuth telluride (BizTe3) alloy and p_type (SbsTe3) A flexible thermoelectric energy converter in which a p/n thermoelectric film formed by alloy deposition is bonded to a gel structure and a process method thereof. [Prior Art] # In the 19th century, German physicists discovered the thermoelectric effect and opened up research on thermoelectric materials. Lan Nian, with the cooperation of semiconductor technology, the thermoelectric energy converter came out. The thermoelectric energy converter is a main fixture that converts thermal energy and electrical energy. It can generate electricity by using the temperature difference, and the voltage difference can be used to generate temperature difference. In the world of energy consumption, the energy consumption of the world is increasing by 2%, and the price of energy such as natural gas continues to soar, showing the shortage of energy on the earth. In the era of rapid changes, with the advancement and development of science and technology, the demand for energy is increasing, and the utilization and conversion of various energy sources has become the primary issue today. The thermoelectric energy converter has long been recognized by NASA as the main source of power for the 20 space exploration missions, and has been generating electricity from a number of thermoelectric generators that use (four) sub-energy fuel as a heat source. The source, the heat source of the ground and the μ live material are “the heat energy brought by the shot is still unable to be effectively recovered and benefited 201126779. The use efficiency of the source of the Fuyue b source is low and waste, and the recycling of various waste heats. The use and utilization not only can improve the conversion efficiency of various energy sources, but also reduce and reduce various thermal pollutions generated in the living environment. Therefore, in the future environmental protection and energy considerations, research and research on energy utilization is particularly important. With the continuous advancement of semiconductor process technology, high-tech electronic products have evolved into high-speed, high-frequency, high-power, and continue to evolve into thin, light and short. In contrast, electronic components are prone to generate enormous thermal power and operate in high-temperature environments. Affect the transfer function of sfl number, and reduce the service life of components. Therefore, how to solve the performance reduction caused by the heat source derived from electronic components and reduce the life of the system has become one of the main focuses of heat dissipation research. Cold and water-cooled heat sinks are still popular, but air-cooled heat sinks have a lifetime Sound and other issues; as for the large size, high price and pollution of water-cooled heat sinks, it is also criticized. Therefore, how to dissipate heat quickly under limited conditions has become a major focus of current technology development. Considering the thermoelectric energy converter, its advantages make it gradually have the tendency to replace the traditional heat sink. The advantages of the thermoelectric energy converter are as follows: 1. Small size and light weight: the volume and weight of the thermoelectric energy converter Smaller and lighter than traditional cooling or heating machinery. 2. No noise, long life, no influence on gravity and direction: General thermoelectric energy converter energy conversion side 4 does not need #传循环传", so its Not affected by gravity and direction, it also reduces the noise caused by pumping required by fluid circulation and the mechanical failure rate of 201126779. 3. Suitable for local cooling or heating. The thermoelectric energy converter can cool or heat the specific component or specific area. Without having to package the whole package around. 4. The same component has various functions such as cooling or heating and power generation: thermoelectric energy converter when input The opposite current, the reverse flow of the semiconductor carrier', the opposite direction of the heat flow, that is, the exchange of cold and hot ends, is also easier to control the temperature; in addition, when the heating energy converter has a certain temperature difference, it will output a certain amount of energy, which can be used as The purpose of power generation or temperature sensing. In addition, it has the advantages of high precision, fast response speed and environmental protection. With the above advantages, the effects of thermoelectricity and other effects have gradually attracted everyone’s discussion, and this kind of related research has gradually matured. It can be seen that there are still many shortcomings in the above-mentioned methods of use, which are not the designers of goodness, but need to be improved.
本案發明人鑑於上述習用方式所衍生的各項缺點亟思 種種改良創新的方法，經過長久的觀察及驗證後，終於成功 疋成本件可撓性熱電能源轉換器及其製程方法之研發工作。 【發明内容】 本&月之目的即在於提供—種將電鑄母模以電化學沈積 法沈積形成—特定p/n熱電薄膜’並將該"η熱電薄膜結人 於uv膠結構體之間’同時藉由uv膠結構體具有可挽性： 特性’於實施上係可貼附於不規則表面之物體上，使得其於 201126779 上將不會㈣任何限制’藉以達到任何空間及 物體上皆可實施之目的。 本發月之-人-目的係在於提供一種可降低製程生產成 本，並可達到量化生產、縮短製程，且可依使用者之需求製 作不同規格尺寸之可撓性熱電能源轉換器，使其達到多元化 功效之可撓性熱電能源轉換器及其製程μ。 可達成上述發明目的之可挽性熱電能源轉換器及其製程 方法，係將液態狀的聚二甲切氧燒㈣ydi細hyisii。讀e， PDMS，即所謂的石夕勝）與硬化劑倒入模具中經加轨後使盆 固化成-聰S結構體；係於一㈣上利用電子束蒸鍍機將 金鍍至料上以形成―基材，藉由該基材作為電鑄起始層， 再將基材置入於-模具中，並將PDMS結構體疊至基材上， 並使得職s結構„壓制於模具内，其巾該PDMS結構 體開設有-注人孔及排氣孔，透過注人孔以uv膠注入模具 内，而排氣孔則作為模具内部空氣排除之路徑，同時直至 UV膠完全填滿㈣空間後，再照射uv光源，使得模具内 的UV膠完全固化，而―膠與基材相結合後將其取出即 形成-電鑄母模，並於電鑄母模上形成有複數個沈積孔洞； 再利用電化學沈積法將n_type碲化叙（Bi2Te3)合金及Μ解 碲化録（Sb2Te3)合金分別沈積於電鑄母模各沈積孔洞内以 形成-特定p/n熱電薄膜’再將一 uv膠結構體固化於鍍金 鋁箔及熱電薄膜上，作為元件之可撓性結構體，此時，將鍍 201126779 金鋁荡撕下，使得熱電薄膜結合於uv膠結構體上，再透過 銀漆作為導電電極並依序鋪i p/n #電薄膜兩#，以作為導 電串聯’最後再連接上導線’再將一 u”結構體固化於_ 熱電薄膜與_聯裸露處，以針對元件作整體封裝，即形成本 件之可撓性熱電能源轉換器，由於製作完成之熱電能源轉換 器係固化於UV膠結構體中’透過uv膠結構體具有可挽性In view of the shortcomings derived from the above-mentioned conventional methods, the inventors of the present invention have succeeded in the research and development of the cost-effective flexible thermoelectric energy converter and its manufacturing method after long-term observation and verification. SUMMARY OF THE INVENTION The purpose of this & month is to provide a kind of electroforming deposition of an electroforming master to form a specific p/n thermoelectric film 'and to make the "η thermoelectric film into a uv gel structure Between the two sides, the uv rubber structure is also manageable: the property can be attached to the object of the irregular surface in practice, so that it will not (4) any restrictions on 201126779 'to achieve any space and object Both can be implemented. The purpose of this month is to provide a flexible thermoelectric energy converter that can reduce the production cost of the process, achieve quantitative production, shorten the process, and can manufacture different sizes according to the needs of users. A flexible thermoelectric energy converter with diverse functions and its process μ. The switchable thermoelectric energy converter and the process method thereof for achieving the above object are a liquid polydimethylene oxide (four) ydi fine hyisii. Read e, PDMS, the so-called Shi Xisheng) and the hardener into the mold after the rail is added to make the pot solidified into a Cong S structure; on a (four) using an electron beam evaporation machine to plate gold onto the material To form a substrate, by using the substrate as an electroforming starting layer, placing the substrate in a mold, and stacking the PDMS structure onto the substrate, and pressing the structure into the mold The PDMS structure of the towel is provided with a manhole and a vent hole, and the uv glue is injected into the mold through the injection hole, and the vent hole serves as a path for removing the air inside the mold, and at the same time until the UV glue is completely filled (4) After the space, the uv light source is further irradiated, so that the UV glue in the mold is completely solidified, and the glue is combined with the substrate to be taken out to form an electroforming master mold, and a plurality of deposition holes are formed on the electroforming master mold. Then, the n_type bismuth (Bi2Te3) alloy and the bismuth bismuth (Sb2Te3) alloy are deposited in the deposition holes of the electroforming master mold by electrochemical deposition to form a specific p/n thermoelectric film. The uv adhesive structure is cured on a gold-plated aluminum foil and a thermoelectric film as a flexible structure of the component Body, at this time, the plating of 201126779 gold aluminum is torn off, so that the thermoelectric film is bonded to the uv rubber structure, and then through the silver paint as a conductive electrode and sequentially ip / n #电膜两#, as a conductive series ' Finally, the upper wire is connected to the 'an additional u' structure to be cured on the _ thermoelectric film and the _ joint exposed portion, so as to integrally package the component, that is, the flexible thermoelectric energy converter forming the piece, due to the completed thermoelectric energy conversion The system is cured in a UV adhesive structure. 'Transmissibility through the uv rubber structure
之特性，該電能源轉換器便具有可撓性之特性，以可實施應 用於不規則表面之物體上之目的。 【實施方式】 月參閱圖A〜D所不’為本發明可撓性熱電能源轉換 器及其製程方法之PDMS結構體製作流程圖，其步驟包括有： 步驟一.利用CNC雕刻機雕刻出所需PDMS之模具〖（如 圖一 A所示）； 步驟二：將液態PDMS與硬化劑以1〇:〗比例調配，再 籲將其倒入模具1中（如圖一 B所示）； 步驟三：再將模具i放人真空烤箱，以降低腔體壓力並 排除氣泡，並以㈣溫度加熱一段時間後，使pDMs完全固 化（如圖一 C所示）； V驟四再將固化後之PDMS取出，即形成一 PDMS結 構體2(如圖一D所示）。 ,,參閱圖二A〜G所示’為該可撓性熱電能源轉換器及 、’方法之電鑄母模製作流程圖，其步驟包括有： 201126779 步驟一：係利用電子束蒸鍍機將金32鍍至紹猪31上以 形成一基材3(如圖二a所示）； v驟-.將基材3置入於„模具4中，並將pDMs結構 體2疊至基材3上方處’再於pDMs結構體2上開設有一注 入孔21及排氣孔22’該注入孔21係供uv膠注入模具4内， 而排氣孔22則作為模具4内部空氣排出至模具4外部（如 圖二B所示）； 步驟一.再透過模具4施予壓力並緊壓模具4内之 PDMS結構體2,以降低不必要空隙之產生（如圖二c所示）； 步驟四：係將UV膠透過注入孔21注入於模具4内，而 模八4内的空氣會再經由排氣孔22排出並直至uV膠完全 填滿於模具4空間内並與基材3相黏著成一體（如二〇所 示）； v驟五’待UV膠填滿模具4内之空間後，再照射uv 光源奴時間，使得模具4内部的UV膠完全固化（如圖二E 所示）； 步驟六：當模具4内的UV膠固化後，UV膠便會與基材 -成體，再將其取出後’即形成一電禱母模5，且 於電禱母模5上形成有複數個沈積孔洞5 1 (如圖二F、G所 示）。 再叫參閱圖三A〜I所示’為該可撓性熱電能源轉換器及 "製私方法之可撓性熱電能源轉換器製作流程圖，其步驟包 201126779 括有： 步驟一.係利用電化學沈積法將n-type(Bi2Te3)合金61 沉積至電鑄母模5所定義之沉積孔洞5丨中，以可形成一特 定形狀之合金薄膜（如圖三A所示）。 步驟二：再將沈積後的電鑄母模5元件浸泡於EPOXY 溶解劑中，使得電鑄母模5上的uv-軟化並脫落留下沉 積有n-type(Bi2Te3)合金61之合金薄膜（如圖三B所示）； ® 纟驟二：係再定義一 UV膠結構形狀與位置，並將其固 化於基材3上，以再次形成一電鑄母模5結構（如圖三c所 示）； 步驟四：再次利用電化學沉積法將p-type(Sb2Te3)合金62 沉積至電鑄母模5所定義之沉積孔洞51中，形成一特定形 狀之合金薄膜（如圖三D所示）； 步驟五’將沈積後的電鑄母模5元件浸泡於環氧樹脂溶 ♦解劑（EPOXY)中，使得電禱母模5上的uv膠軟化脫落，留 下沉積有n-type(Bi2Te3)合金61及p type(sb2Te3)合金Μ之 合金薄膜，即完成所需之p/n熱電薄膜6(如圖三£所示）； 步驟-.利用uv膠具有可撓特性，係將一 uv膠結構 體7固化於基材3與p/n熱電薄膜6上，作為元件可撓性之 結構體（如圖三F所示）； 步驟七.再將上述步驟六之基材3撕取下，而p/n熱電 薄膜6則會留至純較佳之w膠結構體7上（如圖三 201126779 示）； 示）； 步驟八：再透過㈣銀漆作為導電電極8,並依序舖至 p/n熱電薄膜6之兩端’使其相互導電串聯，最後再於p/n 熱電4膜6兩側之導電電極8分別接上-導線9(如圖三Η所 由步驟九：再將另-UV膠結構體7固化於熱電薄膜6盘 ”電極裸露之下端處’以針對㈣作整體之封裝，即製作 凡成―可撓性熱電能源轉換㈣(如圖^所示）。 了確保欲錢之熱電薄膜沉積品質以及附著性， 電化學電鑄沉積前，必須經過—道基材前處理步驟 則處理過程步驟如下： 1 、將定義70成欲沉積熱電材料之試片浸入鹼性脫 知液中，用以去除試片表面之油汙、塵埃以及污染物; 月先將脫脂後之試片卩去離子水（Di减州清洗； =洗：以酸性處理液以去除試片表面之氧化物； 月先將π成酸洗後之試片以去離子水（DI贿⑺清 洗； •電鱗·欲鍍基材表面清潔處理完畢後進行電鑄作業； 脫核·經電鑄完成之試片’浸人E〇p刪3膠溶解劑， 字UV膠&成之電_母模軟化脫離； .膠'合解劑去除：將基材上殘留之EOP9003膠溶解劑以 酮/、甲醇去除，即可得到熱電薄膜合金結構。 201126779 本發明所提供之可撓性熱電能源轉換器及其製程方法， 與其他習用技術相互比較時，更具有下列之優點： 1. 本發明係在於提供一種將電鑄母模以電化學沈積法沈 積形成一特定p/n熱電薄膜，並將該p/n熱電薄膜結合於 膠結構體之間，使得製作完成之熱電能源轉換器具有可繞性 之特性。 2. 本發明係在於提供一種由於uv膠結構體具有可撓性 之特性，係可實施貼附於各種不規則表面之物體上，使其於 使用上及空間上不會受到任何限制，#以達到任冑空間及物 體上皆可實施之目的。 3·本發明係在於提供一種可降低製程生產成本，並可達 到！化生產、縮短製程，且可依使用者之需求製作不同規格 尺寸之可撓性熱電能源轉換器]吏其達到多元化功效之可撓 性熱電能源轉換器及其製程方法。 上列詳細說明係針對本發明之一可行實施例之具體說 明’惟該實施例並㈣以限制本發明之專利範圍，凡未脫離 么月技藝精神所為之等效實施或變更，均應包含於本案之 專利範圍中。 综上所述，本案不但在技術思想上確屬創新，並能較習 用物°°增進上述多項功效’應已充分符合新賴性及進步性之 法定發明專利要件，爰依法提出巾請#局核准本件 發明專利申請案，以勵發明，至感德便。 201126779 【圖式簡單說明】 請參閱以下有關本發明一較佳實施例之詳細說明及其附 圖’將可進-步瞭解本發明之技術内容及其目的功效；有關 該實施例之附圖為： 圖一 A〜D為本發明可撓性埶雪At 悦熟電忐源轉換器及其製程方 法之PDMS結構體製作流程圖； 圖 A〜G為該可撓性熱電能源轉換 電鑄母模製作流程圖；以及 圖二A〜I為該可撓性熱電能 可撓性熱電能源轉換器製作流程圖【主要元件符號說明】 1模具 器及其製程方法之 源轉換器及纟製程方法The electrical energy converter is flexible in its ability to be applied to objects that are intended for irregular surfaces. [Embodiment] Referring to Figures A to D, a flow chart of a PDMS structure for a flexible thermoelectric energy converter and a method for manufacturing the same according to the present invention is provided. The steps include: Step 1. Using a CNC engraving machine to engrave The mold of PDMS is required (as shown in Figure 1A); Step 2: Dispense the liquid PDMS and the hardener in a ratio of 1〇:, and then pour it into the mold 1 (as shown in Figure 1B); Three: Put the mold i into the vacuum oven to reduce the pressure of the cavity and eliminate the air bubbles, and then heat the pDMs after curing at a temperature of (4) for a period of time (as shown in Figure 1C); The PDMS is taken out to form a PDMS structure 2 (as shown in FIG. 1D). Referring to Figures 2A to G, the flow chart of the electroforming mold for the flexible thermoelectric energy converter and the method includes the following steps: 201126779 Step 1: Using an electron beam evaporation machine Gold 32 is plated onto the porridge 31 to form a substrate 3 (as shown in Fig. 2a); v--. The substrate 3 is placed in the „mold 4, and the pDMs structure 2 is stacked on the substrate 3 In the upper portion, an injection hole 21 and a vent hole 22' are formed in the pDMs structure 2. The injection hole 21 is used for injecting the uv glue into the mold 4, and the vent hole 22 is discharged as air inside the mold 4 to the outside of the mold 4. (As shown in Figure 2B); Step 1. Apply pressure through the mold 4 and press the PDMS structure 2 in the mold 4 to reduce unnecessary voids (as shown in Figure 2c); Step 4: The UV glue is injected into the mold 4 through the injection hole 21, and the air in the mold 8 is discharged through the vent hole 22 until the uV glue completely fills the space of the mold 4 and is adhered to the substrate 3. (As shown in Fig. 2); v. V. After the UV glue fills the space inside the mold 4, the UV light source is irradiated for the time, so that the UV glue inside the mold 4 is made. Fully cured (as shown in Figure 2E); Step 6: After the UV glue in the mold 4 is cured, the UV glue will be integrated with the substrate, and then removed, then an electric prayer master mold 5 is formed. And a plurality of deposition holes 5 1 are formed on the electric prayer mother mold 5 (as shown in FIG. 2F and G). Referring to FIG. 3A to I, the flexible heat and energy converter and the " A flow chart for manufacturing a flexible thermoelectric energy converter by a private method, the step package 201126779 includes: Step 1. The deposition of an n-type (Bi2Te3) alloy 61 by an electrochemical deposition method is defined by an electroforming master mold 5 Depositing holes 5丨 to form a specific shape of the alloy film (as shown in Figure 3A) Step 2: Soak the deposited electroforming master 5 components in EPOXY solvent to make the electroforming master The uv-softening and detachment on the 5 leaves the alloy film deposited with the n-type (Bi2Te3) alloy 61 (as shown in Fig. 3B); ® 二2: further defines the shape and position of a UV adhesive structure, and It is cured on the substrate 3 to form an electroformed master 5 structure again (as shown in Figure 3c); Step 4: Reusing Electrochemistry The deposition method deposits p-type (Sb2Te3) alloy 62 into the deposition holes 51 defined by the electroforming master mold 5 to form a specific shape alloy film (as shown in FIG. 3D); Step 5' will deposit the electricity The casting mother mold 5 element is immersed in the epoxy resin solution (EPOXY), so that the uv glue on the electric prayer mother mold 5 softens and falls off, leaving the deposited n-type (Bi2Te3) alloy 61 and p type (sb2Te3). The alloy film of the alloy bismuth, that is, the required p/n thermoelectric film 6 is completed (as shown in FIG. 3); Step--Using the uv glue to have the flexible property, the uv rubber structure 7 is cured on the substrate 3 And the p/n thermoelectric film 6, as a structurally flexible structure (as shown in FIG. 3F); Step 7. The substrate 3 of the above step 6 is further removed, and the p/n thermoelectric film 6 is Will be left to the purely better w-gel structure 7 (as shown in Figure 3, 201126779); show); Step 8: through (4) silver paint as conductive electrode 8, and sequentially spread to the ends of p / n thermoelectric film 6 ' The electrodes are electrically connected in series, and finally the conductive electrodes 8 on both sides of the p/n thermoelectric 4 film 6 are respectively connected with the wires 9 (as shown in Figure 3: Step 9: Further UV-gel structure) 7 cured at thermoelectric film 6 "at the lower end 'of the electrode exposed to (iv) for the package as a whole, i.e. where the so produced - a flexible thermoelectric energy conversion (iv) (as shown in Figure ^). To ensure the quality and adhesion of the thermoelectric film deposition of the desired money, before the electrochemical electroforming deposition, the substrate must be subjected to the pretreatment step of the substrate. The process steps are as follows: 1. The test piece defining 70% of the thermoelectric material to be deposited is immersed in the alkali. In the sexual desorption solution, it is used to remove the oil, dust and contaminants on the surface of the test piece; the degreased test piece is firstly deionized water (Di reduction state cleaning; = wash: acid treatment liquid to remove the test piece surface) The oxide is firstly washed with deionized water (DI bribe (7); the electric scale is required to be electroplated after the surface of the substrate is cleaned; The test piece 'Immersion E〇p delete 3 gel dissolving agent, the word UV glue & into the electricity_mother mold softening and detachment; . Glue 'resolving agent removal: the remaining EOP9003 gel dissolving agent on the substrate to ketone / The thermoelectric thin film alloy structure can be obtained by removing methanol. 201126779 The flexible thermoelectric energy converter and the manufacturing method thereof provided by the invention have the following advantages when compared with other conventional techniques: 1. The invention is based on Providing an electroforming master Electrodeposition deposition forms a specific p/n thermoelectric film, and the p/n thermoelectric film is bonded between the adhesive structures, so that the fabricated thermoelectric energy converter has the properties of being splicable. It is to provide a flexible property of the uv rubber structure, which can be attached to objects of various irregular surfaces, so that it is not restricted in use and space, so as to achieve the space and The object can be implemented on the object. 3. The invention provides a flexible thermoelectric energy conversion which can reduce the production cost of the process, can achieve the production, shorten the process, and can manufacture different specifications according to the needs of the user. Flexible heat and energy energy converter and its process method for achieving diversified functions. The above detailed description is directed to a specific description of one possible embodiment of the present invention 'only this embodiment and (4) to limit the patent of the present invention The scope, the equivalent implementation or change of the technical spirit of the month shall be included in the scope of the patent in this case. In summary, the case is not only in technical thinking. It is indeed an innovation, and can improve the above-mentioned multiple functions compared with the conventional use of ° ° ' should have fully met the new legal and progressive legal requirements of the invention patents, 提出 提出 提出 请 局 局 局 核准 核准 核准 核准 核准 核准 核准 核准 核准 核准 核准201126779 [Simplified description of the drawings] Please refer to the following detailed description of a preferred embodiment of the present invention and its accompanying drawings, which will be further understood to understand the technical contents of the present invention and the purpose thereof. The drawings of the embodiments are as follows: FIG. 1A to D are flowcharts showing the fabrication of a PDMS structure of a flexible snow-capped At-light power converter and a manufacturing method thereof; FIGS. A to G are the flexible thermoelectrics. Flow chart of energy conversion electroforming master mold; and Fig. 2A to I are flow charts of the flexible thermoelectric flexible thermoelectric energy converter [main component symbol description] 1 source converter of mold and its manufacturing method And process method
之 2 PDMS結構體 21注入孔2 PDMS structure 21 injection hole
22排氣孔 3基材 31鋁落 32金 4模具 5電鑄母模 51沈積孔洞 6熱電薄膜 12 201126779 61 n-type(Bi2Te3)合金 62 P_type(Sb2Te3)合金 7 UV膠結構體 8導電電極 9導線 10可撓性熱電能源轉換器22 vent hole 3 substrate 31 aluminum drop 32 gold 4 mold 5 electroforming master mold 51 deposition hole 6 thermoelectric film 12 201126779 61 n-type (Bi2Te3) alloy 62 P_type (Sb2Te3) alloy 7 UV glue structure 8 conductive electrode 9 Wire 10 flexible thermoelectric energy converter
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