TW201120405A - Height measurement device having probe and method for using the device to measure height. - Google Patents
Height measurement device having probe and method for using the device to measure height. Download PDFInfo
- Publication number
- TW201120405A TW201120405A TW98142436A TW98142436A TW201120405A TW 201120405 A TW201120405 A TW 201120405A TW 98142436 A TW98142436 A TW 98142436A TW 98142436 A TW98142436 A TW 98142436A TW 201120405 A TW201120405 A TW 201120405A
- Authority
- TW
- Taiwan
- Prior art keywords
- probe
- image
- displacement
- computer system
- height
- Prior art date
Links
- 239000000523 sample Substances 0.000 title claims abstract description 66
- 238000000034 method Methods 0.000 title claims description 10
- 238000005259 measurement Methods 0.000 title abstract description 5
- 238000006073 displacement reaction Methods 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 240000006394 Sorghum bicolor Species 0.000 description 1
- 235000011684 Sorghum saccharatum Nutrition 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98142436A TW201120405A (en) | 2009-12-11 | 2009-12-11 | Height measurement device having probe and method for using the device to measure height. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW98142436A TW201120405A (en) | 2009-12-11 | 2009-12-11 | Height measurement device having probe and method for using the device to measure height. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201120405A true TW201120405A (en) | 2011-06-16 |
| TWI383126B TWI383126B (https=) | 2013-01-21 |
Family
ID=45045153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW98142436A TW201120405A (en) | 2009-12-11 | 2009-12-11 | Height measurement device having probe and method for using the device to measure height. |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201120405A (https=) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4007502A1 (de) * | 1990-03-09 | 1991-09-12 | Zeiss Carl Fa | Verfahren und vorrichtung zur beruehrungslosen vermessung von objektoberflaechen |
| GB9515311D0 (en) * | 1995-07-26 | 1995-09-20 | 3D Scanners Ltd | Stripe scanners and methods of scanning |
| SG91884A1 (en) * | 1998-02-27 | 2002-10-15 | Matsushita Electric Industrial Co Ltd | Component recognizing method and apparatus |
| WO2005057193A1 (en) * | 2003-11-18 | 2005-06-23 | Applied Materials Israel, Ltd | Inspection system with auto-focus |
| TWI237687B (en) * | 2004-04-13 | 2005-08-11 | Chien Hui Chuan | Computer control measuring center |
| EP1911338A1 (en) * | 2005-08-02 | 2008-04-16 | Matsushita Electric Industrial Co., Ltd. | Electronic component mounter and mounting method |
-
2009
- 2009-12-11 TW TW98142436A patent/TW201120405A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI383126B (https=) | 2013-01-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |