TW201115678A - Panel suction unit and panel suction assembly having the same - Google Patents

Panel suction unit and panel suction assembly having the same Download PDF

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Publication number
TW201115678A
TW201115678A TW098139470A TW98139470A TW201115678A TW 201115678 A TW201115678 A TW 201115678A TW 098139470 A TW098139470 A TW 098139470A TW 98139470 A TW98139470 A TW 98139470A TW 201115678 A TW201115678 A TW 201115678A
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Taiwan
Prior art keywords
adsorption
substrate
substrate adsorption
fixing
assembly
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TW098139470A
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Chinese (zh)
Inventor
Jui-Hsi Chen
Li-Hshiuan Sun
Shih-Ming Tseng
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Sun Yueh Way
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Application filed by Sun Yueh Way filed Critical Sun Yueh Way
Priority to JP2010016746A priority Critical patent/JP2011093707A/en
Publication of TW201115678A publication Critical patent/TW201115678A/en

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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Packaging Frangible Articles (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Attitude Control For Articles On Conveyors (AREA)

Abstract

A panel suction unit and a panel suction assembly having the same for absorbing a plurality of substrates are disclosed. The panel suction assembly comprises a fixing frame and a plurality of panel suction units. Each panel suction unit pneumatically connects to a vacuum device and comprises a body and a suction portion. The body pneumatically connects to the vacuum device. The suction portion has a plurality of suckers, symmetrically disposed on a distal end of the body, and pneumatically connects to the vacuum device via the body for absorbing one of the panels uniformly.

Description

201115678 六、發明說明: 【發明所屬之技術領域】 本發明係與一種搬運裝置有關,特別是有關一種搬運切割後基 板之搬運裝置。 【先前技術】 隨著液晶顯示器(Liquid Crystal Display, LCD )有關技術的快速 發展’其省電、重量輕、低輻射及易攜帶等優點,促使液晶顯示 器逐漸取代傳統陰極射線管(Cathode Ray Tube,CRT)的顯示器 而廣泛地應用於電視、電腦螢幕、筆記型電腦、汽車導航系統、 行動通訊震置等電子產品中,成為顯示器市場上的主流。 以目則液晶顯不的發展技術而言,無論是大尺寸或小尺寸之 液晶面板,大抵係由上、下二玻璃大板進行上下對位組合而成, 後經上、下切割並予以裂片之後,方生產出不同尺寸的液晶面板。 更詳細而言,由於液晶顯示器為上、下二玻璃大板組合而成,而 且上、下玻璃間必須要有驅動電路之搭載區域或者其他端子線路 區。因此,在切割製程中無法以一次切裂上、下兩片破璃之方式 進行玻璃裁切’而必須分別在上、下二玻璃組合大板進行縱線及 橫線方向之劃切,爾後再利用外力方式進行裂片,以取得各不同 尺寸的液晶面板。尤其是,為節省製程步驟、時間以及材料,液 晶面板的生產技術朝向加大前述玻璃大板面積之方向發展,以4 5 代生產線730釐米X 920釐米之玻璃基板規格、5代生產線11〇〇 釐米X 1250釐米之玻璃基板規格或其他更先進之6代、7代之生 產線為例’玻璃基板越大,其生產效率越佳 '裁切之材料損耗越 201115678 少。然而,當玻璃面板尺寸越大、厚度越薄時,傳統製程缺少適 當的自動化設備進行面板之自動化搬運及裁切,因而需要大量的 人力進行加工,進而增加人為毁損面板以及降低產品品質之可能 性。 面對上述有關面板尺寸的瓶頸問題,習知製程無法對玻璃組合 大板進行加工,而係先將玻璃組合大板裁切為原面積1/4的玻璃中 型板後,再進行各不同尺寸的液晶LCD面板的加工及切割,以解 決上述的問題。但如此一來,製程將因而增加近4倍的工程數、 時間,同時也增加了切割保留區域,造成玻璃裁切上材料的浪費 及成本的增加,並減少單位玻璃基板上可裁切的面板數量。 有鑑於此,針對玻璃組合大板之生產製程,提供裁切、搬運之 自動化設備,特別是針對製程中切割玻璃組合大板後所形成複數 已切割面板之搬運、下料等作業,設計適當的搬運裝置,以減少 人為毁損之機會、提升生產品質、並降低生產成本,為此一業界 亟待解決之問題。 【發明内容】 鑑於先前技術所面臨的問題,本發明之一目的在於針對玻璃組 合大板之生產製程,提供搬運之自動化設備,以減少人為毀損之 機會、提升生產品質、並降低生產成本。 本發明之另一目的在於針對製程中已切割之不同尺寸面板之搬 運、下料等作業,提供適當的搬運裝置,以增進製程彈性及生產 效率。 4 201115678 為達上述目的,本發明提供一種基板吸附單元及包含複數基板 吸附單元之基板吸附總成,用以吸附複數已切割之基板,基板吸 附總成除包含複數基板吸附單元外更包含一固定框架,而各基板 吸附單元相應各已切割基板間隔地固設於固定框架上。其中各基 板吸附單元可氣體連通至一真空裝置,其包含一本體及一吸附 部。詳細而言,本體可氣體連通至真空裝置,吸附部具有複數吸 附件,對稱地設置於本體之一末端,並經由本體而氣體連通至真 空裝置,用以均勻地吸附其中一已切割基板。 為讓本發明之上述目的、技術特徵、和優點能更明顯易懂,下 文係以較隹實施例、配合所附圖式進行詳細說明。 【實施方式】 請參閱第1圖,其顯示本發明申請人針對液晶玻璃組合大板之 裁切、搬運自動設備之一示意圖。此自動設備1主要包含上料、 移動、切割、翻轉、下料等功能,第1圖所示者僅為此自動設備1 之部分裝置,例如:上料區10、上料機械手臂20、輸送軸30、下 料機械手臂40、下料區50等。上述各該裝置之功能及特徵可一併 參閱本發名申請人之其他專利申請案。此自動設備1中與本申請 案相關之裝置主要是與下料機械手臂40、下料區50作動相關之基 板吸附總成1〇〇,詳如下述。 請合併參閱第2圖,其顯示本發明一實施例中固定於下料機械 手臂40之基板吸附總成100之示意圖。基板吸附總成100包含一 固定框架110以及複數基板吸附單元120,基板吸附總成100之固 定框架110係連接至一下料機械手臂40,此下料機械手臂40可藉 201115678 由輸送轴30及機械手臂之操作而移動基板吸附總成100,使各基 板吸附單元120得吸附經由上料區10、上料機械手臂20等裝置切 割完成的每個液晶玻璃基板(未圖示),並搬運至下料區50以進 行後續液晶面板之製程。需說明的是,第2圖所示複數基板吸附 單元120之數量及排列位置僅為例示,並非用以限制本發明。 詳細而言,本發明基板吸附總成100中之固定框架110具有二 橫桿112及複數固定桿114,各固定桿114係彼此平行地設置於二 橫桿112之間,而且,特別地是,各固定桿114可於橫桿112之 縱軸方向上(如圖上所示之X軸方向)平行且滑移地調整彼此間 之一橫向間距,以相應複數基板於X軸方向上之排列位置,使後 續固定於固定桿上之各基板吸附單元120適可對應每個已切割後 之玻璃基板,詳如後述。 請合併參閱上述圖式以及第3A圖、第3B圖、第3C圖、第3D 圖,其分別顯示本發明基板吸附總成100中一基板吸附單元120 之立體圖、前視圖、下侧視圖以及俯視圖。各基板吸附單元120 包含一本體12卜一吸附部122及一固定部123。其中,吸附部122 設置於本體121之一末端,固定部123具有二個螺帽相對於吸附 部122設置於本體121之另一端,藉由上下螺帽間的迫緊將本體 121固設至固定框架110之固定桿114。此各基板吸附單元120上 之固定部123可於各固定桿114可之縱轴方向上(如圖上所示之Y 軸方向)滑移地調整各基板吸附單元120彼此間之一縱向間距, 使各基板吸附單元120可相應Y轴方向上各基板之排列位置而間 隔地固設於該固定框架上,確保各基板吸附單元120得相應吸附 201115678 一個液晶基板。 此外,各基板吸附單元120之本體121係為一中空柱體,内部 具有一氣路,可氣體連通至吸附部122,並經由一氣嘴124氣體連 通至真空裝置(未圖示),例如一真空幫浦,以於本體121及吸附 部122内部形成一負壓,進而於吸附部122形成一吸附力用以吸 附基板。明確而言,吸附部122具有複數吸附件125,各吸附件 125經由本體121内部之氣路以及氣嘴124可氣體連通至真空裝 置,藉由真空裝置形成之負壓於吸附件125表面形成一吸附力, ^ 用以吸附切割後之一基板。 以本實施例而言,吸附部122具有三吸附件125,彼此對稱地設 置於本體121之一末端。相較習知單一吸附件的設計,此種多個 吸附件的設計,不但可於被吸附表面上形成更為均勻分布的吸附 力,以避免吸附力過度集中而殘留應力於基板上、甚至導致破片, 亦可於部分吸附件因真空洩漏或無法正常作動時,立即將真空負 壓均勻地分布到其餘吸附件上吸附液晶基板,避免造成液晶基板 ® 因掉落而破裂毀損。 較佳地,本發明為緩和因真空裝置啟動之際於氣路内所形成之 真空吸附衝力,特別於吸附件125之前端設置一橡膠吸盤126,並 設置一緩衝件127於本體121内,用以緩衝真空裝置施加於吸附 件125前端之真空吸附衝力。而且,於基板吸附單元120吸附液 晶基板並移動時,本體121内之緩衝件127亦可緩衝來自外部的 衝撞力,降低液晶基板破片的可能性。具體而言,緩衝件127可 為一彈簧。 7 201115678 上述之實施例僅用來例舉本發明之實施態樣,以及闡釋本發明 之技術特徵,並非用來限制本發明之保護範疇。任何熟悉此技術 者可輕易完成之改變或均等性之安排均屬於本發明所主張之範 圍,本發明之權利保護範圍應以申請專利範圍為準。 【圖式簡單說明】 第1圖係為本發明一實施例中一液晶玻璃基板之搬運自動設備 之不意圖, 第2圖係為本發明一實施例中固定於下料機械手臂之基板吸附 總成之不意圖; 第3A圖係為本發明基板吸附單元之立體圖; 第3B圖係為本發明基板吸附單元之前視圖; 第3C圖係為本發明基板吸附單元之下侧視圖;以及 第3D圖係為本發明基板吸附單元之俯視圖。 【主要元件符號說明】 1 自動設備 10 上料區 20 上料機械手臂 30 輸送軸 40 下料機械手臂 50 下料區 100 基板吸附總成 110 固定框架 112 橫桿 114 固定桿 120 基板吸附單元 121 本體 122 吸附部 123 固定部 201115678 124氣嘴 125吸附件 126橡膠吸盤 127緩衝件201115678 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a handling device, and more particularly to a handling device for handling a substrate after cutting. [Prior Art] With the rapid development of liquid crystal display (LCD) technology, its advantages of power saving, light weight, low radiation and easy portability have led to the liquid crystal display gradually replacing the traditional cathode ray tube (Cathode Ray Tube, CRT) displays are widely used in televisions, computer screens, notebook computers, car navigation systems, mobile communication and other electronic products, becoming the mainstream in the display market. In terms of the development technology of liquid crystal display, whether it is a large-sized or small-sized liquid crystal panel, it is mainly composed of upper and lower glass slabs, which are vertically and vertically aligned, and then cut up and down and lobed. After that, different sizes of liquid crystal panels were produced. More specifically, since the liquid crystal display is a combination of upper and lower glass slabs, it is necessary to have a driving circuit mounting region or other terminal wiring region between the upper and lower glass. Therefore, in the cutting process, it is not possible to cut the glass by cutting the upper and lower pieces of glass once, and it is necessary to perform the cutting of the vertical line and the horizontal line in the upper and lower glass combination plates, respectively. The split is performed by an external force to obtain liquid crystal panels of different sizes. In particular, in order to save the process steps, time and materials, the production technology of the liquid crystal panel is oriented towards increasing the area of the glass slab. The 750 cm X 920 cm glass substrate specification and the 5th generation production line of the 45th generation line are 11〇〇. For example, the glass substrate size of CX X 1250 cm or other more advanced 6th and 7th generation production lines is the case. The larger the glass substrate, the better the production efficiency. The material loss of cutting is less than 201115678. However, when the size of the glass panel is larger and the thickness is thinner, the conventional process lacks proper automation equipment for automatic handling and cutting of the panel, and thus requires a large amount of manpower for processing, thereby increasing the possibility of artificially damaging the panel and reducing the quality of the product. . Faced with the bottleneck problem of the above-mentioned panel size, the conventional process cannot process the glass composite slab, and the glass composite slab is first cut into the 1/4 glass slab of the original area, and then the different sizes are The processing and cutting of the liquid crystal LCD panel to solve the above problems. However, the process will increase the engineering number and time by nearly 4 times, and also increase the cutting and retaining area, resulting in waste of material and cost in the glass cutting, and reducing the panel that can be cut on the unit glass substrate. Quantity. In view of this, for the production process of the glass composite slab, the automatic equipment for cutting and conveying is provided, especially for the handling and cutting of the plurality of cut panels formed after cutting the glass composite slab in the process, and the design is appropriate. Handling devices to reduce the chance of human damage, improve production quality, and reduce production costs, which is an urgent problem to be solved in the industry. SUMMARY OF THE INVENTION In view of the problems faced by the prior art, it is an object of the present invention to provide automated equipment for handling a glass composite panel manufacturing process to reduce the chance of human damage, improve production quality, and reduce production costs. Another object of the present invention is to provide an appropriate handling device for handling and unloading of different sized panels that have been cut in the process to improve process flexibility and production efficiency. 4 201115678 In order to achieve the above object, the present invention provides a substrate adsorption unit and a substrate adsorption assembly including a plurality of substrate adsorption units for adsorbing a plurality of cut substrates, and the substrate adsorption assembly further comprises a fixed portion in addition to the plurality of substrate adsorption units. The frame, and each of the substrate adsorption units is fixed to the fixed frame at intervals of the respective cut substrates. Each of the substrate adsorption units may be in gas communication with a vacuum device including a body and an adsorption portion. In detail, the body may be in gas communication with the vacuum device, and the adsorption portion has a plurality of suction attachments symmetrically disposed at one end of the body and gas-connected to the vacuum device via the body for uniformly adsorbing one of the cut substrates. The above objects, technical features, and advantages of the present invention will become more apparent from the accompanying drawings. [Embodiment] Referring to Fig. 1, there is shown a schematic view of an automatic device for cutting and transporting a liquid crystal glass composite panel by the applicant of the present invention. The automatic device 1 mainly includes functions of loading, moving, cutting, turning, unloading, etc., and the device shown in Fig. 1 is only a part of the device of the automatic device 1, for example, the loading area 10, the loading robot 20, and the conveying The shaft 30, the blanking robot arm 40, the blanking zone 50, and the like. The functions and features of each of the above-described devices can be found in conjunction with other patent applications filed by the applicant. The apparatus associated with the present application in the automatic apparatus 1 is mainly a substrate adsorption assembly associated with the unloading robot arm 40 and the unloading zone 50, as described below. Referring to Figure 2, there is shown a schematic view of a substrate adsorption assembly 100 secured to a blanking robot arm 40 in accordance with one embodiment of the present invention. The substrate adsorption assembly 100 includes a fixed frame 110 and a plurality of substrate adsorption units 120. The fixed frame 110 of the substrate adsorption assembly 100 is coupled to the blanking robot 40. The blanking robot 40 can be transported by the conveyor shaft 30 and the machine by 201115678. The substrate suction assembly 100 is moved by the operation of the arm, so that each of the substrate adsorption units 120 adsorbs each liquid crystal glass substrate (not shown) cut through the loading unit 10, the loading robot 20, and the like, and transports it to the lower portion. The material zone 50 is used for the subsequent process of the liquid crystal panel. It should be noted that the number and arrangement positions of the plurality of substrate adsorption units 120 shown in Fig. 2 are merely illustrative and are not intended to limit the present invention. In detail, the fixed frame 110 in the substrate adsorption assembly 100 of the present invention has two cross bars 112 and a plurality of fixing bars 114, and each of the fixing bars 114 is disposed in parallel with each other between the two cross bars 112, and, in particular, Each of the fixing rods 114 can adjust one of the lateral spacings of each other in the direction of the longitudinal axis of the crossbar 112 (in the X-axis direction as shown in the figure) in parallel and in a sliding manner to correspond to the arrangement position of the plurality of substrates in the X-axis direction. The substrate adsorption unit 120 that is subsequently fixed on the fixed rod is adapted to correspond to each of the cut glass substrates, as will be described later. Referring to the above drawings and FIGS. 3A, 3B, 3C, and 3D, respectively, a perspective view, a front view, a bottom view, and a top view of a substrate adsorption unit 120 in the substrate adsorption assembly 100 of the present invention are shown. . Each of the substrate adsorption units 120 includes a body 12, a suction portion 122, and a fixing portion 123. The adsorption portion 122 is disposed at one end of the body 121. The fixing portion 123 has two nuts disposed on the other end of the body 121 with respect to the adsorption portion 122. The body 121 is fixed to the fixed portion by pressing between the upper and lower nuts. The fixing rod 114 of the frame 110. The fixing portion 123 of each of the substrate adsorption units 120 can adjust the longitudinal spacing of each of the substrate adsorption units 120 with each other in a longitudinal direction of each of the fixing rods 114 (in the Y-axis direction as shown in the figure). The substrate adsorption unit 120 can be fixedly mounted on the fixed frame at intervals corresponding to the arrangement positions of the substrates in the Y-axis direction, and ensure that each of the substrate adsorption units 120 absorbs a liquid crystal substrate of 201115678. In addition, the body 121 of each substrate adsorption unit 120 is a hollow cylinder having a gas path therein, which can be gas-connected to the adsorption portion 122 and is gas-connected to a vacuum device (not shown) via a gas nozzle 124, such as a vacuum gang. In order to form a negative pressure inside the body 121 and the adsorption portion 122, an adsorption force is formed on the adsorption portion 122 to adsorb the substrate. Specifically, the adsorption unit 122 has a plurality of adsorption members 125, and each of the adsorption members 125 can be gas-connected to the vacuum device via the gas path inside the body 121 and the gas nozzle 124, and a negative pressure formed by the vacuum device forms a surface on the adsorption member 125. The adsorption force, ^ is used to adsorb one of the substrates after cutting. In the present embodiment, the adsorption portion 122 has three adsorption members 125 which are symmetrically disposed at one end of the body 121. Compared with the design of the conventional single adsorbing member, the design of the plurality of adsorbing members can not only form a more evenly distributed adsorption force on the adsorbed surface, but also avoid excessive concentration of the adsorbing force and residual stress on the substrate, or even cause Fragmentation, when a part of the adsorbing member leaks due to vacuum or fails to operate normally, the vacuum negative pressure is evenly distributed to the remaining adsorbing members to adsorb the liquid crystal substrate, thereby preventing the liquid crystal substrate® from being broken due to falling. Preferably, the present invention is for mitigating the vacuum absorbing force formed in the gas path when the vacuum device is started. In particular, a rubber suction cup 126 is disposed at the front end of the absorbing member 125, and a buffer member 127 is disposed in the body 121. The vacuum suction force applied to the front end of the adsorbing member 125 by the buffer vacuum device. Further, when the substrate adsorption unit 120 adsorbs the liquid crystal substrate and moves, the buffer member 127 in the main body 121 can also buffer the impact from the outside and reduce the possibility of fragmentation of the liquid crystal substrate. Specifically, the cushioning member 127 can be a spring. 7 201115678 The above-described embodiments are only intended to illustrate the embodiments of the present invention, and to explain the technical features of the present invention, and are not intended to limit the scope of protection of the present invention. Any changes or equivalents that can be easily made by those skilled in the art are within the scope of the invention. The scope of the invention should be determined by the scope of the claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing an automatic conveying apparatus for a liquid crystal glass substrate according to an embodiment of the present invention, and FIG. 2 is a total adsorption of a substrate fixed to a blanking robot arm according to an embodiment of the present invention. 3A is a perspective view of the substrate adsorption unit of the present invention; FIG. 3B is a front view of the substrate adsorption unit of the present invention; FIG. 3C is a side view of the substrate adsorption unit of the present invention; and FIG. 3D It is a top view of the substrate adsorption unit of the present invention. [Main component symbol description] 1 Automatic equipment 10 Loading area 20 Loading robot 30 Delivery shaft 40 Cutting robot 50 Lowering area 100 Substrate adsorption assembly 110 Fixed frame 112 Crossbar 114 Fixing rod 120 Substrate adsorption unit 121 Body 122 adsorption part 123 fixed part 201115678 124 gas nozzle 125 adsorption part 126 rubber suction cup 127 buffer

Claims (1)

201115678 七、申請專利範圍: 1- 一種基板吸附單元,包含: 一本體,可氣體連通至一真空裝置; 一吸附部,具有複數吸附件,對稱地設置於該本體之一 末端,並經由該本體而氣體連通至該真空裝置,用以均勻地 吸附一基板;以及 一緩衝件,設置於該本體内,用以緩衝該真空裝置施加 於該吸附部之一真空吸附衝力。 2. 如請求項1所述之基板吸附單元,更包含一固定部,相對於 該吸附部,設置於該本體之另一端,用以將該本體固設至一 固定框架。 3. 如請求項1所述之基板吸附單元,其中該吸附部具有三個吸 附件,對稱地設置於該本體之該末端,用以均勻地吸附該基 板。 4. 如請求項1所述之基板吸附單元,其中各該吸附件具有一橡 膠吸盤,設置於各該吸附件之一前端。 5. 如請求項1所述之基板吸附單元,其中該緩衝件係一彈簧。 6. 一種基板吸附總成,用以吸附複數基板,包含: 一固定框架;以及 複數基板吸附單元,各該基板吸附單元相應各該基板間 隔地固設於該固定框架上,其中各該基板吸附單元可氣體連 通至一真空裝置,包含: 一本體,可氣體連通至該真空裝置;以及 一吸附部,具有複數吸附件,對稱地設置於該本體 201115678 之一末端,並經由該本體而氣體連通至該真空裝置,用 以均勻地吸附該等基板其中之一。 7. 如請求項6所述之基板吸附總成,其中各該基板吸附單元更 包含一缓衝件,設置於該本體内,用以緩衝該真空裝置施加 於該吸附部之一真空吸附衝力。 8. 如請求項6所述之基板吸附總成,其中各該基板吸附單元更 包含一固定部,相對於該吸附部,設置於該本體之另一端, 用以將該本體固設至該固定框架,並可調整各該基板吸附單 Φ 元間之一縱向間距。 9. 如請求項8所述之基板吸附總成,其t該固定框架具有二橫 桿及複數固定桿,各該固定桿係彼此平行地設置於該二橫桿 間,並可相應該等基板之位置而調整該等固定桿間之一橫向 間距,使各該基板吸附單元之該固定部係可調整地固定於相 鄰之該等固定桿間。 10. 如請求項6所述之基板吸附總成,其中該吸附部具有三個吸 ^ 附件,對稱地設置於該本體之該末端,用以均勻地吸附該等 基板其中之一。 11. 如請求項6所述之基板吸附總成,其中各該吸附件具有一橡 膠吸盤,設置於各該吸附件之一前端。 12. 如請求項6所述之基板吸附總成,其中該緩衝件係一彈簧。 13. 如請求項6所述之基板吸附總成,其中該基板吸附總成係連 接至一機械手臂,用以移動該基板吸附總成吸附已分割後之 該等基板。201115678 VII. Patent application scope: 1- A substrate adsorption unit comprises: a body that can be gas-connected to a vacuum device; and an adsorption portion having a plurality of adsorption members symmetrically disposed at one end of the body and via the body And a gas is connected to the vacuum device for uniformly adsorbing a substrate; and a buffer member is disposed in the body for buffering a vacuum adsorption force applied by the vacuum device to the adsorption portion. 2. The substrate adsorption unit of claim 1, further comprising a fixing portion disposed at the other end of the body relative to the adsorption portion for fixing the body to a fixing frame. 3. The substrate adsorption unit according to claim 1, wherein the adsorption portion has three suction attachments symmetrically disposed at the end of the body for uniformly adsorbing the substrate. 4. The substrate adsorption unit according to claim 1, wherein each of the adsorption members has a rubber suction cup disposed at a front end of each of the adsorption members. 5. The substrate adsorption unit of claim 1, wherein the buffer member is a spring. A substrate adsorption assembly for adsorbing a plurality of substrates, comprising: a fixed frame; and a plurality of substrate adsorption units, wherein each of the substrate adsorption units is fixedly spaced on the fixing frame, wherein each of the substrates is adsorbed The unit may be in gas communication with a vacuum device, comprising: a body electrically connectable to the vacuum device; and a adsorption portion having a plurality of adsorbing members symmetrically disposed at one end of the body 201115678 and being in gas communication via the body To the vacuum device for uniformly adsorbing one of the substrates. 7. The substrate adsorption assembly of claim 6, wherein each of the substrate adsorption units further comprises a buffer member disposed in the body for buffering a vacuum adsorption force applied by the vacuum device to the adsorption portion. 8. The substrate adsorption assembly of claim 6, wherein each of the substrate adsorption units further comprises a fixing portion disposed at the other end of the body relative to the adsorption portion for fixing the body to the fixing The frame and the longitudinal spacing of each of the substrates adsorbed by the single Φ element can be adjusted. 9. The substrate adsorption assembly according to claim 8, wherein the fixing frame has two cross bars and a plurality of fixing bars, each of the fixing bars being disposed in parallel with each other between the two cross bars, and corresponding to the substrates The lateral spacing between the fixing rods is adjusted such that the fixing portions of the substrate adsorption units are adjustably fixed between the adjacent fixing rods. 10. The substrate adsorption assembly of claim 6, wherein the adsorption portion has three suction attachments symmetrically disposed at the end of the body for uniformly adsorbing one of the substrates. 11. The substrate adsorption assembly of claim 6, wherein each of the adsorbing members has a rubber suction cup disposed at a front end of each of the adsorbing members. 12. The substrate adsorption assembly of claim 6, wherein the buffer member is a spring. 13. The substrate adsorption assembly of claim 6, wherein the substrate adsorption assembly is coupled to a robot arm for moving the substrate adsorption assembly to adsorb the divided substrates.
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