201114659 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種搬運裝置及加工方法，更詳細來說，本發明 係關於一種搬運並容置玻璃基板之裝置，以及導正該裝置位置之 加工方法。 【先前技術】 近年來，如玻璃等具高透光特性之材質，係廣泛的應用於面板、 光學等特定的相關產品中，然由於其易碎、不耐衝擊等特性，加 上通常以基板的形式大量出貨至各處進行其他後續生產加工程 序，故常須謹慎包裝，以避免運送過程中，因過度震動而損壞。 請參考第1A圖及第1B圖，第1A圖係習知用以搬運玻璃基板 之盒體1與一玻璃基板11之組裝示意圖，第1B圖係顯示習知盒 體之運送方式示意圖。習知盒體1具有一容置部12、一底面13、 複數内側壁14、複數外侧壁15及一蓋體16，其中，各内側壁14 係平行並對應各外側壁15設置於各外側壁15之一内侧，容置部 12則由該等内側壁14及底面13所共同界定，適可容置一玻璃基 板11，而蓋體16具有與底面13相應之一外形以罩蓋該容置部12。 當玻璃基板11放置於習知盒體1内部後，須運送至指定地點進行 其他加工程序，例如：切割製程。於運送時，如第1B圖所示，通 常會將習知盒體1以平放的方式放置於運送工具之一承載面A 上，使習知盒體1之一底面13與運送工具之承載面A相接觸。然， 熟知此技術領域者應可了解，當玻璃之受力面積越大，越容易因 其結構強度不足而破損。尤其是在產品輕薄化之發展趨勢下，玻 201114659 璃基板11之厚度日益減少，因此其結構本身之強度亦相形減弱， 因此藉由上述搬運方式，經常造成玻璃基板11之底面111因承受 外部應力之面積過大而損毀，進而使得面板等相關產品之生產成 本大大提而。 有鑑於此，提供一種適當保護玻璃基板完整度之搬運設備及與 之配套的加工程序，乃為此一業界亟待解決的問題。 【發明内容】 Φ 為解決上述問題，本發明之一目的在於提供一種搬運裝置，係 可於運送中有效保護易碎裂之基板，此搬運裝置係為一盒體，其 包含四外側壁及四内側壁，其中該等外側壁係相互鄰接，而該等 内側壁係分別對應各該外側壁而設置於各該外側壁之一内側，並 相互鄰接以界定出一容置空間容置至少一基板。各該外側壁之一 延伸方向與其相對應之各該内側壁之一延伸方向具有一夾角。藉 此，當該盒體直立擺放，亦即該其中之一外側壁與一運送工具之 一承載面相接觸時，該基板適可相對於該承載面梢微傾斜一角 ® 度。如此一來，玻璃基板係可以一小面積之特定區域承受大部分 之外部應力，以減輕基板其他區域的外部應力，避免影響液晶面 板之正常功能。 本發明之另一目的在於提供一種可導正上述盒體位置之載具。 該位置導正載具係包含一支撐座、一致動器及一旋轉平台。該支 撐座具有一預設基準面，該致動器係設置於該支撐座中，而該旋 轉平台係可置放該盒體，並與該致動器電性連結，其中，該致動 器適可驅動該旋轉平台轉動，以使該盒體之部分内側壁與該預設 201114659 基準面平行。 本發明之又一目的在於提供前述盒體之位置導正方法，包含下 列步驟：（a)放置該盒體於一旋轉平台上之一第一位置；以及（b) 驅動該旋轉平台由該第一位置旋轉至一第二位置，以調整該盒體 之部分該等内側壁平行於一預設基準面。藉此，使容置於盒體内 之玻璃基板可調整至正確位置，以利後續進行液晶面板之相關製 程步驟。 為讓上述目的、技術特徵、和優點能更明顯易懂，下文係以較 佳實施例配合所附圖式進行詳細說明。 【實施方式】 如前所述，為能於運送令，有效保護易碎裂之玻璃基板，本發 明設計一種改良式玻璃基板搬運裝置，請參考第2A圖及第2B圖。 其中，第2A圖係本發明一實施例中一盒體2與一基板21之組裝 示意圖，第2B圖，係本發明一盒體2之内部正視圖。本發明之改 良式玻璃基板搬運裝置係為一盒體，用以於液晶面板之製造過程 中，有效保護玻璃基板之完整性，並減少應力集中於後續欲取得 的液晶面板中，以有效增加產品的良率。 本發明一實施例之盒體2包含四外側壁22、四内側壁23,其中， 四外側壁22係相互鄰接，而四内側壁23係分別對應各外側壁22 設置於各外側壁22之一内側，並相互鄰接以界定出一容置空間 231，此容置空間231適可容置至少一基板21。本發明之一特徵在 於，各外側壁22之一延仲方向X與其相對應之各内側壁23之一 延伸方向y具有一夾角0，如第2B圖所示。藉此，當盒體2垂直 201114659 擺設於承載面A運送時，可使容置於盒體2内部基板21之一特定 區域21a承受大部分之外部應力，而減輕基板21其他區域所承受 之外部應力，並將因碰撞而可能產生之破損儘量集中於此特定區 域21a内，而避免損及其他區域。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a handling device and a processing method. More particularly, the present invention relates to a device for handling and accommodating a glass substrate, and to guide the position of the device. processing methods. [Prior Art] In recent years, materials such as glass have high light transmission properties, and are widely used in specific related products such as panels and optics. However, due to their fragile and impact-resistant characteristics, The form is shipped in large quantities to other subsequent production and processing procedures, so it is often necessary to carefully package to avoid damage due to excessive vibration during transportation. Please refer to FIG. 1A and FIG. 1B. FIG. 1A is a schematic view showing the assembly of a casing 1 for transporting a glass substrate and a glass substrate 11. FIG. 1B is a schematic view showing a manner of transporting a conventional casing. The conventional housing 1 has a receiving portion 12, a bottom surface 13, a plurality of inner side walls 14, a plurality of outer side walls 15, and a cover body 16, wherein each inner side wall 14 is parallel and corresponding to each outer side wall 15 is disposed on each outer side wall. One of the inner sides of the housing 15 is defined by the inner side wall 14 and the bottom surface 13 to accommodate a glass substrate 11 , and the cover 16 has a shape corresponding to the bottom surface 13 to cover the receiving portion. Department 12. When the glass substrate 11 is placed inside the conventional casing 1, it must be transported to a designated location for other processing procedures, such as a cutting process. When transporting, as shown in FIG. 1B, the conventional casing 1 is usually placed in a flat manner on one of the carrying surfaces A of the transporting tool, so that the bottom surface 13 of the conventional casing 1 and the carrying tool are carried. Face A is in contact. However, those skilled in the art should understand that the larger the area of force on the glass, the more easily it is damaged due to insufficient structural strength. Especially in the development trend of thinner and lighter products, the thickness of the glass substrate 11 is increasingly reduced, so the strength of the structure itself is also weakened. Therefore, the bottom surface 111 of the glass substrate 11 is often subjected to external stress by the above-mentioned transportation method. The area is too large and damaged, which in turn leads to a significant increase in the production costs of related products such as panels. In view of this, it is an urgent problem to be solved in the industry to provide a handling device that appropriately protects the integrity of the glass substrate and a processing program associated therewith. SUMMARY OF THE INVENTION In order to solve the above problems, an object of the present invention is to provide a transport device capable of effectively protecting a fragile substrate during transportation. The transport device is a box body including four outer side walls and four The inner side wall, wherein the outer side walls are adjacent to each other, and the inner side walls are respectively disposed on one inner side of each of the outer side walls corresponding to the outer side walls, and are adjacent to each other to define an accommodating space for accommodating at least one substrate . One of the outer side walls extends in an angle with respect to an extending direction of one of the inner side walls. Therefore, when the casing is placed upright, that is, one of the outer side walls is in contact with a bearing surface of a conveying tool, the substrate is adapted to be slightly inclined by an angle of + with respect to the bearing surface. In this way, the glass substrate can withstand a large portion of external stress in a specific area of a small area to reduce external stress in other areas of the substrate and avoid affecting the normal function of the liquid crystal panel. Another object of the present invention is to provide a carrier that can guide the position of the above-mentioned case. The position guiding carrier comprises a support base, an actuator and a rotating platform. The support base has a predetermined reference surface, and the actuator is disposed in the support base, and the rotary platform can be placed and electrically connected to the actuator, wherein the actuator is electrically connected to the actuator The rotating platform is adapted to rotate such that a portion of the inner side wall of the casing is parallel to the preset 201114659 reference surface. It is still another object of the present invention to provide a method for guiding a position of the aforementioned casing, comprising the steps of: (a) placing the casing in a first position on a rotating platform; and (b) driving the rotating platform by the first A position is rotated to a second position to adjust a portion of the casing such that the inner sidewalls are parallel to a predetermined reference plane. Thereby, the glass substrate accommodated in the casing can be adjusted to the correct position for subsequent processing steps of the liquid crystal panel. The above objects, technical features, and advantages will be more apparent from the following description. [Embodiment] As described above, in order to effectively protect a fragile glass substrate from a shipping order, the present invention has been devised to design an improved glass substrate conveying device. Please refer to Figs. 2A and 2B. 2A is a schematic view showing the assembly of a casing 2 and a substrate 21 in an embodiment of the present invention, and FIG. 2B is an internal front view of a casing 2 of the present invention. The improved glass substrate conveying device of the present invention is a box body for effectively protecting the integrity of the glass substrate during the manufacturing process of the liquid crystal panel, and reducing stress concentration in the liquid crystal panel to be subsequently obtained, thereby effectively increasing the product. Yield. The casing 2 of the embodiment of the present invention comprises four outer side walls 22 and four inner side walls 23, wherein the four outer side walls 22 are adjacent to each other, and the four inner side walls 23 are respectively disposed on one of the outer side walls 22 corresponding to the outer side walls 22, respectively. The inner side is adjacent to each other to define an accommodating space 231 , and the accommodating space 231 is adapted to receive at least one substrate 21 . One feature of the present invention is that the longitudinal direction X of each of the outer side walls 22 has an included angle 0 with respect to one of the corresponding inner side walls 23 extending direction y, as shown in Fig. 2B. Therefore, when the casing 2 is vertically placed on the carrying surface A, the specific area 21a of the inner substrate 21 of the casing 2 can be subjected to most external stress, and the external portion of the other portion of the substrate 21 can be alleviated. The stress is applied to the specific area 21a as much as possible due to the collision, and damage to other areas is avoided.
須特別說明的是，第2B圖所示之特定區域21a於後續製程中將 被切除，而基板21特定區域21a外之其他區域方為後續液晶面板 製程中所欲切割後保留之區域，因此，藉由本發明盒體之特殊設 計，將可有效避免因基板本身重量所產生之應力集中於後續液晶 面板之產品中，並可有效限定破損可能發生的區域，提升產品的 良率。而且，圖中所示之特定區域21a之範圍僅為例示，其面積 及位置係依照盒體2之形狀或者基板21之面積大小等因素作改 變，熟知此領域者應可暸解，於此不詳加贅述。 詳言之，請續參考第2B圖，該等外側壁22之一第一外側壁22a 之一延伸方向X與該等内側壁23之一第一内側壁23a之一延伸方 向y具有夾角0。熟知此技術領域者應可瞭解，當基板之受力面 • 積越小，其承受外力之強度也就隨之提高，因此，於運送過程中， 盒體2之第一外側壁22a放置於如前所述之運送工具之承載面A 上時，基板21會與第一外側壁22a之延伸方向y具有夾角Θ，使 得大部分之外部應力集中於靠近第一内側壁23a之一特定區域21a 上，由於，特定區域21a之面積較基板21之整體面積小，故相較 於基板21之整體，特定區域21a反而能承受較大的外部應力，藉 此，使得基板21放置於盒體2中運送時，較不易碎裂，抑或者僅 有特定區域21a會產生碎裂而不致影響基板21之其他部分。 201114659 需特別說明的是，於本發明—最佳之實拖例中，基板2ι係為一 玻璃基板，而㈣θ實質上為2度，如此―來，射在特定區域 21a可承叉的範圍下’集中部分之外部的 ^藉以舒緩基板2丨其他部分所承受之外部應力，然=It should be particularly noted that the specific region 21a shown in FIG. 2B will be cut off in the subsequent process, and the other regions outside the specific region 21a of the substrate 21 are the regions to be reserved after the subsequent liquid crystal panel process, and therefore, By the special design of the box body of the invention, the stress generated by the weight of the substrate itself can be effectively prevented from being concentrated in the products of the subsequent liquid crystal panel, and the area where the damage may occur can be effectively limited, and the yield of the product can be improved. Moreover, the range of the specific area 21a shown in the figure is merely an example, and the area and position thereof are changed according to the shape of the box body 2 or the size of the substrate 21, etc., and those skilled in the art should understand that this is not detailed. Narration. In detail, referring back to FIG. 2B, one of the first outer side walls 22a of one of the outer side walls 22 has an angle X extending from an extending direction y of one of the inner side walls 23a. It is well known to those skilled in the art that when the force surface of the substrate is smaller, the strength of the external force is increased. Therefore, during the transportation, the first outer side wall 22a of the casing 2 is placed, for example. When the loading surface A of the transporting tool is previously described, the substrate 21 has an angle Θ with the extending direction y of the first outer side wall 22a, so that most of the external stress is concentrated on a specific area 21a adjacent to the first inner side wall 23a. Since the area of the specific area 21a is smaller than the entire area of the substrate 21, the specific area 21a can withstand a large external stress as compared with the entirety of the substrate 21, whereby the substrate 21 is placed in the case 2 for transport. At the time, it is less likely to be broken, or only a specific region 21a may be chipped without affecting other portions of the substrate 21. 201114659 It should be particularly noted that in the preferred embodiment of the present invention, the substrate 2 is a glass substrate, and (4) θ is substantially 2 degrees, so that the shot is in the range of the specific region 21a. 'The external part of the concentrated part ^ is used to relieve the external stress on the other parts of the substrate 2, then =
實加例中，夹角Θ之角度不僅限於上述角度，亦可為其他之角度 以達成同樣的效果。 X 此外，睛參考第2B圖，為使外部應力施壓於基板21之力量減 y至最低’本發明—較佳實施例之盒體2係具有複數凸塊Μ間隔 地汉置於該等内侧壁22上，如此適可使盒體2與基板Μ接觸的 面積減y ’外部應力透過盒體2傳遞至基板21之力量亦相對減 v進而使得基板21更不容易於運送時因過大的外部應力而有碎 裂的情形發生。 者由於大。ρ分運送時，基板大部分呈一矩形以方便後續 時依產tra的需求切割成各種形狀’故該等内側壁係相互 鄰接以呈-㈣’且為使搬運時方便將盒體2堆置於運送工具 上該等外側壁22亦相互鄰接以呈一矩形，而盒體2更包含一蓋 體25 ’具有與該等外側壁22相應之—外形，用以罩蓋容置空間 231以保護基板21。然若前述基板之外型有所改變時，本發明盒 體2内侧壁23相互鄰接所形成之外型亦可隨之改變。 為考量盒體2之内外側壁間因具有特殊的夾角0，因而基板21 自盒體2中取出時’係相對於之第—外側壁22a呈-歪斜狀態， 而不利後~製程之定位與加工。有鑑於此，本發明係依據前述盒 體之特殊設計，另外提供-種位置導正载具3，請參考第3圖，其 201114659 顯示本發明一位置導正載具3之立體示意圖，此導正載具3係主 要用以導正前述盒體2内基板21之一位置，以利後續施作於基板 21之加工製程可於正確的基板位置上操作。 具體而言，於本發明實施例中，導正載具3具有一支撐座31、 一致動器32及一旋轉平台33。支撐座3卜具有一預設基準面31a， 致動器32係設置於支撐座31中，且旋轉平台33適可放置盒體2 並與致動器32電性連結。其中，致動器32適可驅動旋轉平台33 轉動，以使盒體2之部分内側壁23a、23b與預設基準面31a平行。 ® 藉此，基板21係可以一正確之加工位置放置於其他加工製程設備 上加工進行切割等加工程序。 更進一步而言，請同時參考第3圖及第4圖，第4圖係本發明 一位置導正載具與一盒體之相對關係示意圖。支撐座31包含一檯 面311，檯面311係設有預設基準面31a，而旋轉平台33係設置 於檯面311上，且旋轉平台33具有一轉軸331適與致動器32電 性連結，使得致動器32係可透過轉轴331驅動旋轉平台33轉動， • 以使盒體2之部分内侧壁23a、23b與預設基準面31a平行（如第4 圖所繪示）。此外，致動器32包含一馬達係可有效驅動旋轉平台 33帶動盒體2中之基板21至一適當位置。 本發明亦提供一種位置導正方法，係可導正如上述之盒體中基 板之一位置，抑或者上述位置導正載具係可利用此方法導正該盒 體之位置，此位置導正方法如第5圖所示，其包含下列步驟：首 先，在步驟401中，放置該盒體於一旋轉平台上之一第一位置。 接著，在步驟402令，驅動該旋轉平台由該第一位置旋轉至一第 201114659 二位置，以調整該盒體之部分該等内側壁平行於一預設基準面。 詳細而言，於步驟401中，係主要控制該盒體之部分該外側壁 與該預設基準面平行，而於步驟402中，係主要利用一致動器驅 動該旋轉平台由該第一位置旋轉至該第二位置，且該致動器相對 於該預設基準面旋轉該旋轉平台較佳為2度。藉由上述方法，係 可以將已偏移的該盒體中之該基板調整至適當位置，以順利進行 相關產品之其他製成步驟。 綜上所述，相較於習知盒體，本發明之盒體適可於運送及搬運 過程中，有效調整及減緩外部應力對於易碎基板之施壓方向及力 量，以保護基板之完整度，進而提升生產良率並降低其生產成本。 而且，透過本發明之位置導正載具及位置導正方法，適可使盒體 中之基板得以正確之擺放位置順利進行後續其他加工動作，以增 加生產效率並提升製造加工之精確度。 上述之實施例僅用來例舉本發明之實施態樣，以及闡釋本發明 之技術特徵，並非用來限制本發明之範疇。任何熟悉此技術者可 輕易完成之改變或均等性之安排均屬於本發明所主張之範圍，本 發明之樣利範圍應以申請專利範圍為準。 【圖式簡單說明】 第1A圖係習知盒體與一基板之組裝示意圖； 第1B圖係習知盒體之運送方式示意圖； 第2A圖係本發明一盒體與一基板之組裝示意圖； 第2B圖係本發明一盒體之内部正視圖； 第3圖係本發明一位置導正載具之立體示意圖； 201114659 第4圖係本發明一位置導正載具與一盒體之相對關係示意圖； 及 第5圖係本發明用於導正一盒體之位置導正流程圖。 【主要元件符號說明】In the actual example, the angle of the angle Θ is not limited to the above angle, and may be other angles to achieve the same effect. In addition, the eye refers to FIG. 2B, and the force for applying external stress to the substrate 21 is reduced to a minimum. The present invention is a preferred embodiment of the casing 2 having a plurality of bumps spaced apart from each other. On the wall 22, the area in which the casing 2 is in contact with the substrate 减 is reduced by y. The force transmitted by the external stress through the casing 2 to the substrate 21 is also relatively reduced, thereby making the substrate 21 less likely to be transported due to excessive externality. Stress and fragmentation occur. Because of the big. When the ρ is transported, the substrate is mostly rectangular, so as to be easily cut into various shapes according to the demand of the tra tra tra tra s. Therefore, the inner side walls are adjacent to each other to be -(d)' and the case 2 is conveniently placed for transportation. The outer side walls 22 of the transporting tool are also adjacent to each other to form a rectangle, and the box body 2 further includes a cover body 25' having an outer shape corresponding to the outer side walls 22 for covering the receiving space 231 for protection. Substrate 21. However, if the shape of the substrate is changed, the shape of the inner side walls 23 of the casing 2 of the present invention adjacent to each other may be changed. In order to consider that the inner and outer sidewalls of the casing 2 have a special angle 0, the substrate 21 is taken out from the casing 2 in a skewed state relative to the first outer wall 22a, and the process and processing of the process are unfavorable. . In view of the above, the present invention provides a position guide carrier 3 according to the special design of the foregoing box body. Please refer to FIG. 3, which shows a perspective view of a position guide carrier 3 of the present invention. The positive carrier 3 is mainly used to guide the position of one of the substrates 21 in the casing 2, so that the subsequent processing of the substrate 21 can be operated at the correct substrate position. Specifically, in the embodiment of the present invention, the guiding carrier 3 has a supporting base 31, an actuator 32 and a rotating platform 33. The support base 3 has a predetermined reference surface 31a, and the actuator 32 is disposed in the support base 31. The rotary platform 33 is adapted to place the housing 2 and is electrically connected to the actuator 32. The actuator 32 is adapted to drive the rotary table 33 to rotate such that a portion of the inner side walls 23a, 23b of the casing 2 are parallel to the predetermined reference surface 31a. ® By this, the substrate 21 can be placed on other processing equipment in a correct processing position for processing such as cutting. Furthermore, please refer to FIG. 3 and FIG. 4 at the same time. FIG. 4 is a schematic diagram showing the relative relationship between a position guiding vehicle and a casing according to the present invention. The support base 31 includes a surface 311. The table top 311 is provided with a preset reference surface 31a, and the rotating platform 33 is disposed on the table top 311. The rotating platform 33 has a rotating shaft 331 adapted to be electrically connected to the actuator 32. The actuator 32 is configured to drive the rotary table 33 to rotate through the rotating shaft 331, so that the partial inner side walls 23a, 23b of the casing 2 are parallel to the predetermined reference surface 31a (as shown in Fig. 4). In addition, the actuator 32 includes a motor train that effectively drives the rotating platform 33 to drive the substrate 21 in the casing 2 to an appropriate position. The present invention also provides a position guiding method, which can guide the position of a substrate in the box body as described above, or the position guiding vehicle can guide the position of the box body by using the method, and the position guiding method is As shown in Fig. 5, it comprises the following steps: First, in step 401, the cartridge is placed in a first position on a rotating platform. Next, in step 402, the rotating platform is driven to rotate from the first position to a position of 201114659 to adjust a portion of the inner wall of the box to be parallel to a predetermined reference surface. In detail, in step 401, a portion of the outer casing is mainly controlled to be parallel with the predetermined reference plane, and in step 402, the rotary platform is mainly driven by the actuator to rotate from the first position. Up to the second position, and the actuator rotates the rotating platform relative to the predetermined reference plane by 2 degrees. By the above method, the substrate in the offsetted substrate can be adjusted to an appropriate position to smoothly perform other manufacturing steps of the related product. In summary, compared with the conventional box body, the box body of the invention can effectively adjust and slow down the direction and strength of external stress on the fragile substrate during the transportation and handling process to protect the integrity of the substrate. , thereby increasing production yield and reducing its production costs. Moreover, the position guiding device and the position guiding method of the present invention are suitable for the substrate in the casing to be correctly placed in the subsequent processing operations to increase the production efficiency and improve the precision of the manufacturing process. The embodiments described above are only intended to illustrate the embodiments of the invention, and to illustrate the technical features of the invention, and are not intended to limit the scope of the invention. Any changes or equivalents that can be easily made by those skilled in the art are within the scope of the invention. The scope of the invention should be determined by the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a schematic view showing the assembly of a conventional case and a substrate; FIG. 1B is a schematic view showing a manner of transporting a conventional case; FIG. 2A is a schematic view showing the assembly of a case and a substrate of the present invention; 2B is an internal front view of a box of the present invention; FIG. 3 is a perspective view of a position guide carrier of the present invention; 201114659 Fig. 4 is a relative relationship between a position guide carrier and a box of the present invention Schematic diagram; and Figure 5 is a flow chart of the position of the present invention for guiding a box. [Main component symbol description]
1 盒體 11 玻璃基板 111 底面 12 容置部 13 底面 14 内側壁 15 外側壁 16 蓋體 2 盒體 21 基板 21a 特定區域 22 外側壁 22a 第一外側壁 23 内側壁 231 容置空間 23a 第一内側壁 23b 内側壁 24 凸塊 25 蓋體 3 位置導正載具 31 支撐座 311 檯面 31a 預設基準面 32 致動器 33 旋轉平台 331 轉軸 X 延伸方向 y 延伸方向 θ 夾角 A 承載面1 Case 11 Glass substrate 111 Bottom surface 12 accommodating portion 13 Bottom surface 14 Inner side wall 15 Outer side wall 16 Cover body 2 Case 21 Substrate 21a Specific area 22 Outer side wall 22a First outer side wall 23 Inner side wall 231 accommodating space 23a First inside Wall 23b Inner side wall 24 Bump 25 Cover body 3 Position guide carrier 31 Support seat 311 Table 31a Preset reference surface 32 Actuator 33 Rotary platform 331 Rotation axis X Extension direction y Extension direction θ Angle A Bearing surface